Measurement device, measurement system, computing device, and measurement method

Abstract

To enable a measurement that is easy to manage.SOLUTION: A measurement device 20 comprises: a light source 21 that emits light in a variable wavelength; a movable reflection mirror 22 that reflects light L0 emitted from the light source 21; a first lens 23 that passes lights L1-Ln through that was scanned by the movable reflection mirror 22 so as to enable these to proceed in parallel; a second lens 24 that is located at a contour position facing the first lens 23, of a containing body 25 having an inner containing space S where the component to be analyzed exists, and that passes the lights L1-Ln proceeding in parallel through to create transmitted lights TR1-TRn and emits the transmitted lights TR1-TRn to the containing body inner space S while converging these; and a light reception element 26 that receives the transmitted lights TR1-TRn.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a measurement device, a measurement system, a computing device, and a measurement method. [Background technology]

[0002] Spectroscopic analyzers utilize the property that molecules absorb light of specific wavelengths to analyze the concentration of the components to be analyzed by irradiating the gas to be measured with laser light. According to the Lambert-Beer law, the absorbance of gas molecules with respect to laser light is proportional to the component concentration and the optical path length. Therefore, the concentration of the component to be analyzed can be analyzed by measuring the intensity of the optical absorption spectrum.

[0003] Non-Patent Document 1 discloses a spectroscopic analyzer that uses a purge gas. [Prior art documents] [Non-patent literature]

[0004] [Non-Patent Document 1] Tamura, Kazuto, and three others, "The TDLS200 Laser Gas Analyzer and Its Application to Industrial Processes," Yokogawa Technical Report, Yokogawa Electric Corporation, 2010, Vol. 53, No. 2 (2010), pp. 51-54 Summary of the Invention [Problem to be solved by the invention]

[0005] In the spectroscopic analyzer disclosed in Non-Patent Document 1, when the gas to be measured is a gas present in the atmosphere, such as oxygen, the laser light is absorbed in spaces other than the space where the measurement is performed, making accurate measurement difficult. For this reason, purge gas is sent into each unit other than the space where the measurement is performed to expel gas that may affect the measurement.

[0006] Measurements using purge gas require gas equipment and measures to prevent gas leaks, which increases the time and cost of maintenance. Furthermore, when used on ships, gas cylinders for storing purge gases such as nitrogen are required. However, gas cylinder standards vary from country to country, so it is not always possible to procure the same gas cylinders as in the source region when the spectrometer is being shipped, making it difficult to ensure a stable supply of purge gas. These factors make measurements using purge gas difficult to implement.

[0007] The purpose of this disclosure is to enable an easy to operate measurement. [Means for solving the problem]

[0008] A measurement device according to some embodiments includes a light source that emits light of a variable wavelength, a movable reflecting mirror that reflects the light emitted from the light source, a first lens that transmits the light reflected by the movable reflecting mirror while varying the reflection angle, allowing the light to travel in a parallel direction, a second lens that is positioned opposite the first lens on the outer periphery of a container having an internal space where a target component is present, and transmits the parallel light as transmitted light and converges the transmitted light before emitting it into the internal space, and a light-receiving element that receives the transmitted light. In this measurement device, the optical path length is constant in the space between the first and second lenses, while the optical path length can be varied over time in the space between the second lens and the light-receiving element where a gas containing the target component is present. By time-differentiating the relationship between the absorbance of the transmitted light received by the light-receiving element and the optical path length within the internal space of the container, the concentration of the target component can be measured without being affected by the ambient gas between the first and second lenses. This allows for easy measurement.

[0009] In one embodiment, the measurement device further includes a housing that houses the light source and the movable reflecting mirror and is filled with a gas that does not contain the analyte component or is under vacuum. The first lens is disposed on the outer periphery of the housing, and an ambient environment gas containing the same component as the analyte is present between the first lens and the second lens. According to this embodiment, even in an environment where the ambient environment gas contains the same component as the analyte component, the optical path from the light source to the movable reflecting mirror and the optical path from the movable reflecting mirror to the first lens are isolated from the ambient environment gas and are not affected by the ambient environment gas. This allows for accurate measurement.

[0010] In one embodiment, the light receiving element is disposed in the interior space of the container at a position away from the second lens, and such an embodiment makes it possible to easily determine the optical path length through the analyte component in the interior space of the container from the dimensions of the interior space of the container.

[0011] In one embodiment, the measurement device further includes a reflector positioned within the housing interior space away from the second lens. The second lens further transmits the transmitted light reflected by the reflector, causing it to travel in parallel and then incident on the first lens. The first lens then further transmits the transmitted light incident from the second lens, converging it onto the light-receiving element and emitting it. In this embodiment, the light-receiving element is positioned away from the first lens on the opposite side from the second lens and receives the transmitted light emitted on the opposite side. This embodiment allows the optical path length to be extended, for example, even when the optical path within the housing interior space is limited. Furthermore, the light-receiving element can be isolated from external disturbances such as vibration or heat of the housing. This improves measurement sensitivity and enables more accurate measurements.

[0012] A measurement system according to some embodiments includes a measurement device according to any of the embodiments, a memory unit storing optical path length data indicating the optical path length within the internal space of the container, and a controller that acquires absorbance data indicating the absorbance of transmitted light received by the light-receiving element and calculates the concentration of the target component based on the optical path length data and the absorbance data. In such a measurement system, the concentration of the target component can be calculated based on the optical path length data and the absorbance data without being affected by ambient environmental gas.

[0013] According to some embodiments, a computing device includes a light source that emits light of a variable wavelength, a movable reflecting mirror that reflects the light emitted from the light source, a first lens that transmits the light reflected by the movable reflecting mirror while changing the reflection angle so that the light travels in a parallel manner, a second lens that is disposed on the outer periphery of a container having an internal space where a target component is present, facing the first lens, that transmits the parallel light as transmitted light and converges the transmitted light while emitting it into the internal space, and a light-receiving element that receives the transmitted light. The computing device includes: a memory unit that stores optical path length data indicating the optical path length within the internal space of the container; and a control unit that acquires absorbance data indicating the absorbance of the transmitted light received by the light-receiving element and calculates the concentration of the target component based on the optical path length data and the absorbance data. This computing device allows the concentration of the target component to be calculated based on the optical path length data and the absorbance data without being affected by ambient environmental gases.

[0014] In one embodiment, the control unit calculates the concentration of the analyte by time-differentiating the absorbance data and the optical path length data. In this computing device, the concentration of the analyte can be calculated based on the optical path length data and the absorbance data without being affected by the ambient environmental gas.

[0015] A measurement method according to some embodiments includes emitting light of variable wavelengths from a light source, reflecting the light emitted from the light source with a movable reflecting mirror, transmitting the light reflected by the movable reflecting mirror at varying reflection angles through a first lens to travel in parallel, transmitting the parallel light through a second lens disposed opposite the first lens on the outer periphery of a container having an internal space where a target component is present, forming transmitted light, and emitting the transmitted light while converging it into the internal space, receiving the transmitted light with a light-receiving element, acquiring optical path length data indicating the optical path length within the internal space of the container and absorbance data indicating the absorbance of the transmitted light received by the light-receiving element, and calculating the concentration of the target component based on the optical path length data and the absorbance data. The light reflected by the movable reflecting mirror at varying reflection angles is transmitted and diffracted through the first lens to become parallel. The parallel transmitted and diffracted light is converged within the target component present in the internal space of the container. In this measurement method, the light travels parallel in the space between the first and second lenses, keeping the optical path length constant, while the optical path length can be changed over time in the space where the gas containing the component to be analyzed is present. Then, by time-differentiating the relationship between the absorbance of the transmitted light received by the light-receiving element and the optical path length within the internal space of the container, the concentration of the component to be analyzed can be measured without being affected by the ambient gas. This results in an easy-to-operate measurement.

[0016] In one embodiment, the light source and the movable reflecting mirror are housed in a housing filled with a gas that does not contain the target component or is under vacuum, the first lens is disposed on the outer periphery of the housing, and an ambient environment gas containing the same component as the target component is present between the first lens and the second lens. According to this embodiment, even in an environment where the ambient environment gas contains the same component as the target component, the optical path from the light source to the movable reflecting mirror and the optical path from the movable reflecting mirror to the first lens are isolated from the ambient environment gas and are not affected by the ambient environment gas. Therefore, accurate measurement is possible.

[0017] In one embodiment, the light receiving element is disposed in the interior space of the container at a position away from the second lens, and such an embodiment makes it possible to easily determine the optical path length through the analyte component in the interior space of the container from the dimensions of the interior space of the container.

[0018] In one embodiment, the measurement method further includes reflecting transmitted light emitted into the housing internal space by a reflector located within the housing internal space and space away from the second lens; further transmitting the transmitted light reflected by the reflector through the second lens to travel in parallel and cause the transmitted light to be incident on the first lens; and further transmitting the transmitted light incident from the second lens through the first lens to converge and emit it on the side opposite the second lens, the light receiving element being located on the opposite side and space away from the first lens. The transmitted light reflected by the reflector is transmitted and diffracted in parallel by the second lens and then incident on the first lens. According to this embodiment, for example, the optical path length can be extended even when the optical path within the housing internal space is limited. Furthermore, the light receiving element can be isolated from external disturbances such as vibration or heat of the housing. This improves measurement sensitivity and enables more accurate measurements. [Effects of the Invention]

[0019] According to the present disclosure, measurements that are easy to operate become possible. [Brief explanation of the drawings]

[0020] [Figure 1] 1 is a block diagram showing a configuration of a measurement system according to an embodiment of the present disclosure. [Figure 2] FIG. 1 is a schematic diagram illustrating a configuration of a measurement device according to an embodiment of the present disclosure. [Figure 3] FIG. 10 is a schematic diagram illustrating a configuration of a measurement device according to a modified example of an embodiment of the present disclosure. [Figure 4] FIG. 1 is a block diagram illustrating a configuration of a computing device according to an embodiment of the present disclosure. [Figure 5] 10 is a flowchart illustrating the operation of the measurement system according to an embodiment of the present disclosure. [Figure 6] 10 is a flowchart illustrating the operation of a measurement system according to a modified example of an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0021] Hereinafter, various embodiments of the present disclosure will be described with reference to the drawings.

[0022] In each drawing, the same or corresponding parts are denoted by the same reference numerals. In the description of each embodiment, the description of the same or corresponding parts will be omitted or simplified as appropriate.

[0023] The configuration of a measurement system 10 according to this embodiment will be described with reference to FIG.

[0024] As shown in FIG. 1, a measurement system 10 according to this embodiment includes a measurement device 20 and a calculation device 30.

[0025] As shown in FIG. 2, the measuring device 20 includes a light source 21, a movable reflecting mirror 22, a first lens 23, a second lens 24, and a light receiving element 26.

[0026] As shown in Fig. 4, the arithmetic device 30 includes a storage unit 31, a control unit 32, and a communication unit 33. The arithmetic device 30 is a computer such as a laptop computer installed at the site where the measurement is performed. The arithmetic device 30 may also be installed in a facility such as a data center. In this case, the arithmetic device 30 is a computer such as a server belonging to a cloud computing system or other computing system.

[0027] The outline of this embodiment will be described with reference to FIGS.

[0028] The measurement system 10 emits light L0 of a variable wavelength from a light source 21 so that the concentration of an analyte component contained in gas G1 can be measured. In the measurement system 10, the light L0 emitted from the light source 21 is reflected by a movable reflecting mirror 22. Specifically, the light L0 is reflected by the movable reflecting mirror 22 toward a first lens 23 and scanned in a first direction. The first direction corresponds to the vertical direction in FIG. 2. In the measurement system 10, the light L1 to Ln reflected by the movable reflecting mirror 22 with varying reflection angles is transmitted through the first lens 23 to travel in a parallel direction. Specifically, the light L1 to Ln is diffracted or refracted by the first lens 23 so that it travels parallel to a second direction that is perpendicular to the first direction. The second direction corresponds to the horizontal direction in FIG. 2. In this manner, the light L0 is reflected by the movable reflecting mirror 22 to form light beams L1 to Ln, and the light beams L1 to Ln are diffracted or refracted by the first lens 23 so that they travel in parallel, which is also referred to as angular scanning hereinafter. The number n of scanned light beams is an integer greater than or equal to 2. The second lens 24, located on the outer periphery of the container 25 having the container internal space S in which the gas G1 exists, transmits the light beams L1 to Ln traveling in parallel in the second direction to form transmitted light beams TR1 to TRn, and then converges and emits the transmitted light beams TR1 to TRn into the container internal space S. As shown in FIG. 2, the second lens 24 is located on the outer periphery of the container 25, facing the first lens 23 along the second direction. The measurement system 10 receives the transmitted light beams TR1 to TRn with the light receiving element 26. The measurement system 10 acquires optical path length data indicating the optical path length within the container internal space S and absorbance data indicating the absorbance of the transmitted light beams TR1 to TRn received by the light receiving element 26. The measurement system 10 calculates the concentration of the analyte based on the optical path length data and the absorbance data.

[0029] In this embodiment, the measurement system 10 calculates the concentration of the analyte component by time-differentiating the absorbance data and the optical path length data.

[0030] According to this embodiment, in a space where the influence of the ambient gas may be present, the angle-scanned light is caused to travel parallel to the second direction, and the optical path length is kept constant, while in a space where a gas containing the target component is present, the optical path length is changed over time. By differentiating the absorbance data and the optical path length data with respect to time, the concentration of the target component contained in the gas can be measured without being influenced by the ambient gas, thereby enabling easy-to-operate measurements.

[0031] Here, the concentration of the target component contained in the gas G1 is calculated based on the light intensity absorbed along the optical path traveled by the light. In this embodiment, the light L0 emitted from the light source 21 travels along the following optical paths. (1) First optical path P1 until reaching the movable reflecting mirror 22 (2) A second optical path P2 in which the light beams are angularly scanned by the movable reflecting mirror 22 and reach the first lens 23 as light beams L1 to Ln. (3) The third optical path P3 from the first lens 23 to the second lens 24 (4) A fourth optical path P4 from the second lens 24 to the light receiving element 26 as transmitted light TR1 to TRn. If ambient environmental gas is present in any of these optical paths and contains the same component as the target component, light absorption may occur in the corresponding optical path. This would affect the accuracy of measuring the concentration of the target component. In this regard, in this embodiment, measures are taken to counteract the influence of the ambient environmental gas in each of the optical paths (1) to (4), so that the concentration of the target component in the gas can be measured without being affected by the ambient environmental gas. As a result, measurements can be performed with ease.

[0032] The configuration of the measurement device 20 according to this embodiment will be described in detail with reference to FIG.

[0033] As already described, the measuring device 20 includes a light source 21, a movable reflecting mirror 22, a first lens 23, a second lens 24, and a light receiving element 26, and further includes a housing 25 having an internal space S of the housing.

[0034] The light source 21 emits light whose absorbance varies depending on the concentration of the component to be analyzed. The light source 21 is, for example, a laser diode (LD), a light emitting diode (LED), or a superluminescent diode (SLD).

[0035] The movable reflecting mirror 22 may be a mechanically driven movable reflecting mirror such as a MEMS mirror, a polygon mirror, or a galvanometer mirror, a solid-state element such as an acousto-optical deflector or an electro-optical deflector, or any combination thereof. MEMS is an abbreviation for micro electro mechanical systems.

[0036] The measuring device 20 includes a condenser lens AL interposed between the light source 21 and the movable reflecting mirror 22, although this is not essential.

[0037] The first lens 23 is any lens that collimates light and condenses the parallel light, and is, for example, a collimator lens.

[0038] The second lens 24 is any lens that collimates light and condenses the parallel light, and is, for example, a collimating lens.

[0039] The container 25 having the container internal space S is, for example, a pipe, a flue, or a packaging container. A gas G1 containing a component to be analyzed is present in the container internal space S of the container 25. The component to be analyzed may be, for example, O2 (oxygen), CO (carbon monoxide), CO2 (carbon dioxide), H2O (water), C n H m (hydrocarbon), or NH3 (ammonia).

[0040] The light receiving element 26 is an element capable of converting the light intensity of the light to be measured into an electrical signal, and is, for example, a photodiode.

[0041] 2, the measuring device 20 further includes a housing 27 that houses the light source 21 and the movable reflecting mirror 22 and is filled with a gas that does not contain the component to be analyzed or is in a vacuum state. The first lens 23 of the measuring device 20 is disposed on the outer periphery of the housing 27. Between the first lens 23 and the second lens 24, there is present an ambient gas G2 that contains the same component as the component to be analyzed.

[0042] In this embodiment, the light source 21 and the movable reflecting mirror 22 are housed in a housing 27 that is filled with a gas that does not contain the target component to be analyzed or is in a vacuum state, and the first lens 23 is disposed on the outer periphery of the housing 27. Therefore, the first optical path P1 and the second optical path P2 are isolated from the ambient environmental gas G2 and are not affected by the ambient environmental gas G2. That is, measures are taken to prevent the optical paths (1) and (2) from being affected by the ambient environmental gas G2. Therefore, accurate measurement is possible. Meanwhile, in the space between the first lens 23 and the second lens 24, the light beams L1 to Ln scanned in the first direction travel parallel to the second direction, making the respective optical path lengths constant. Therefore, as for the third optical path P3, even if it is not isolated from the ambient environmental gas G2, the influence of the ambient environmental gas G2 can be eliminated, as will be described later. That is, it can be said that measures are taken to prevent the optical path (3) from being affected by the ambient environmental gas G2.

[0043] In this embodiment, the light receiving element 26 of the measuring device 20 is disposed in a position apart from the second lens 24 within the housing internal space S, as shown in FIG.

[0044] According to this embodiment, the light receiving element 26 is disposed within the housing internal space S, and therefore the optical path length through which the target component passes within the housing internal space S can be easily determined from the dimensions of the housing internal space S. The space between the second lens 24 and the light receiving element 26, where the gas G1 exists, is blocked from the outside by the housing 25, and therefore the fourth optical path P4 described above cannot be affected by the ambient environmental gas G2. In other words, it can be said that measures have been taken to prevent the optical path (4) from being affected by the ambient environmental gas G2.

[0045] As a modification of this embodiment, the measuring device 20 may further include a reflector 28, as shown in FIG. 3. In this modification, the reflector 28 is disposed in place of the light receiving element 26 in a position away from the second lens 24 within the housing internal space S. The second lens 24 of the measuring device 20 further transmits the transmitted light TR1 to TRn reflected by the reflector 28, causing it to travel parallel to the second direction, and causes the transmitted light TR1 to TRn to be incident on the first lens 23. The first lens 23 of the measuring device 20 further transmits the transmitted light TR1 to TRn incident from the second lens 24, converges the transmitted light, and emits it to the side opposite to the side where the second lens 24 is located. The light receiving element 26 of the measuring device 20 is disposed on the opposite side, at a position away from the first lens 23.

[0046] According to this modification, even when the housing 25 is a small packaging container or the like and the optical path in the housing internal space S cannot be made large, the optical path length can be extended by the amount of the transmitted light TR1 to TRn reflected by the reflector 28 and returned to the second lens 24. Furthermore, by disposing the light receiving element 26 outside the housing 25, the light receiving element 26 can be isolated from the influence of external disturbances such as vibration or heat of the housing 25. Therefore, measurement sensitivity is improved, and more accurate measurement is possible.

[0047] The configuration of the arithmetic device 30 according to this embodiment will be described in detail with reference to FIG.

[0048] As already described, the arithmetic device 30 includes a storage unit 31, a control unit 32, and a communication unit 33.

[0049] The storage unit 31 includes at least one semiconductor memory, at least one magnetic memory, at least one optical memory, or any combination thereof. The semiconductor memory may be, for example, a RAM or a ROM. "RAM" is an abbreviation for random access memory. "ROM" is an abbreviation for read-only memory. RAM may be, for example, an SRAM or a DRAM. "SRAM" is an abbreviation for static random access memory. "DRAM" is an abbreviation for dynamic random access memory. ROM may be, for example, an EEPROM. "EEPROM" is an abbreviation for electrically erasable programmable read-only memory. The storage unit 31 functions as, for example, a main storage device, an auxiliary storage device, or a cache memory. The storage unit 31 stores data used in the operation of the arithmetic unit 30 and data obtained by the operation of the arithmetic unit 30. The storage unit 31 is not limited to being housed in the same housing as the control unit 32, but may also be, for example, an external storage device connected via a digital input / output port such as a USB. "USB" is an abbreviation for universal serial bus.

[0050] The control unit 32 includes at least one processor, at least one programmable circuit, at least one dedicated circuit, or any combination thereof. The processor is a general-purpose processor such as a CPU or GPU, or a dedicated processor specialized for specific processing. "CPU" is an abbreviation for central processing unit. "GPU" is an abbreviation for graphics processing unit. An example of the programmable circuit is an FPGA. "FPGA" is an abbreviation for field-programmable gate array. An example of the dedicated circuit is an ASIC. "ASIC" is an abbreviation for application specific integrated circuit. The control unit 32 controls each part of the arithmetic device 30 and executes processing related to the operation of the arithmetic device 30.

[0051] The communication unit 33 includes at least one communication interface. The communication interface is, for example, a LAN interface, an interface compatible with a mobile communication standard such as LTE, the 4G standard, or the 5G standard, or an interface compatible with a short-range wireless communication standard such as Bluetooth (registered trademark). "LAN" is an abbreviation for local area network. "LTE" is an abbreviation for Long Term Evolution. "4G" is an abbreviation for 4th generation. "5G" is an abbreviation for 5th generation. The communication unit 33 receives data used in the operation of the arithmetic device 30 and transmits data obtained by the operation of the arithmetic device 30.

[0052] The functions of the arithmetic device 30 are realized by executing a program according to this embodiment on a processor serving as the control unit 32. That is, the functions of the arithmetic device 30 are realized by software. The program causes a computer to execute the operations of the arithmetic device 30, thereby causing the computer to function as the arithmetic device 30. That is, the computer functions as the arithmetic device 30 by executing the operations of the arithmetic device 30 in accordance with the program.

[0053] The program can be stored on a non-transitory computer-readable medium. Examples of non-transitory computer-readable media include flash memory, magnetic recording devices, optical disks, magneto-optical recording media, and ROMs. The program can be distributed by selling, transferring, or lending portable media such as SD cards, DVDs, or CD-ROMs that store the program. "SD" is an abbreviation for Secure Digital. "DVD" is an abbreviation for digital versatile disc. "CD-ROM" is an abbreviation for compact disc read only memory. The program can also be distributed by storing it in the storage of a server and transferring it from the server to another computer. The program can also be provided as a program product.

[0054] A computer temporarily stores a program stored on a portable medium or transferred from a server in its main storage device. The computer then reads the program stored in the main storage device using a processor and executes processing in accordance with the read program. The computer may also read the program directly from a portable medium and execute processing in accordance with the program. The computer may also execute processing in accordance with the received program each time a program is transferred from a server to the computer. Processing may also be executed through a so-called ASP-type service that achieves its functions simply by issuing execution instructions and obtaining results, without transferring the program from the server to the computer. "ASP" is an abbreviation for application service provider. A program is information used for processing by a computer and includes something equivalent to a program. For example, data that is not a direct instruction to a computer but has properties that define computer processing falls under the category of "something equivalent to a program."

[0055] Some or all of the functions of the arithmetic device 30 may be implemented by a programmable circuit or a dedicated circuit as the control unit 32. In other words, some or all of the functions of the arithmetic device 30 may be implemented by hardware.

[0056] The operation of the measurement system 10 according to this embodiment will be described with reference to Fig. 5. Fig. 5 shows the operation of the measurement device 20 and the calculation device 30. This operation corresponds to the measurement method according to this embodiment.

[0057] In step S101, the light source 21 of the measuring device 20 emits light with a variable wavelength. Specifically, the light source 21 emits light L0 with a wavelength that varies depending on the component to be analyzed. The light L0 is light whose absorbance varies depending on the concentration of the component to be analyzed contained in the gas G1. As an example, the component to be analyzed is assumed to be O2 (oxygen). The wavelength of the light L0 is assumed to be 760 nm, which is the absorption wavelength of oxygen molecules.

[0058] In this embodiment, although not essential, the light L0 emitted from the light source 21 is condensed by the condenser lens AL so that the light emitted from the first lens 23 becomes parallel, and then enters the movable reflecting mirror 22.

[0059] In step S102, movable reflecting mirror 22 of measuring device 20 reflects light L0 emitted from light source 21 to perform angular scanning. Specifically, movable reflecting mirror 22 reflects light L0 to perform scanning in a first direction. As described above, the first direction corresponds to the vertical direction in FIG. 2. Light L0 emitted from light source 21 is reflected by movable reflecting mirror 22 while the reflection angle changes, and is scanned in the first direction to become light L1 to Ln. For example, light L1 is light reflected by movable reflecting mirror 22 at time T1, and similarly, light L2 to Ln correspond to light reflected by movable reflecting mirror 22 at times T2 to Tn.

[0060] In step S103, first lens 23 of measurement device 20 transmits light L1-Ln reflected by movable reflecting mirror 22 while changing the reflection angle, causing the light L1-Ln to travel in a parallel direction. Specifically, first lens 23 causes light L1-Ln to travel along a second direction perpendicular to the first direction. As described above, the second direction corresponds to the horizontal direction in FIG. 2. In other words, light L1-Ln that passes through first lens 23 and travels along the second direction is parallel light with a constant optical path length.

[0061] In this embodiment, the light source 21 and the movable reflecting mirror 22 are housed in a housing 27 that is filled with a gas that does not contain the component to be analyzed or is in a vacuum state, and the first lens 23 is disposed on the outer periphery of the housing 27. Between the first lens 23 and the second lens 24, there is an ambient environment gas that contains the same component as the component to be analyzed. Specifically, in this embodiment, the housing 27 is filled with nitrogen gas, but it may also be evacuated by a vacuum pump. For example, the component to be analyzed is O2, and the ambient environment gas is air.

[0062] In step S104, second lens 24, which is disposed at a position facing first lens 23 along the second direction on the outer periphery of container 25 having container internal space S in which gas G1 exists, transmits light L1 to Ln traveling parallel to the second direction as transmitted light, and converges the transmitted light and emits it into container internal space S. Specifically, light L1 to Ln traveling parallel to the second direction passes through second lens 24, which is a condenser lens, and becomes transmitted light. For example, light L1 reflected by movable reflecting mirror 22 at time T1 becomes transmitted light TR1, and similarly, light L2 to Ln reflected by movable reflecting mirror 22 at times T2 to Tn becomes transmitted light TR2 to TRn.

[0063] In step S105, the light receiving element 26 of the measuring device 20 receives the transmitted light. For example, the light receiving element 26 receives transmitted light TR1 to TRn based on light L1 to Ln reflected by the movable reflecting mirror 22 at times T1 to Tn while the reflection angle is changed. In this embodiment, the light receiving element 26 is disposed in the housing internal space S at a position away from the second lens 24.

[0064] The light receiving element 26 outputs received light intensity data indicating the intensity of the transmitted light. Specifically, the light receiving element 26 outputs data indicating the intensity of the transmitted light TR1 to TRn as the received light intensity data.

[0065] In step S106, the control unit 32 of the calculation device 30 acquires optical path length data indicating the optical path length within the internal space S of the housing and absorbance data indicating the absorbance of the transmitted light received by the light receiving element 26. Specifically, the control unit 32 of the calculation device 30 acquires the optical path length data OD pre-stored in the storage unit 31 of the calculation device 30. The control unit 32 receives the received light intensity data output from the light receiving element 26 via the communication unit 33. The control unit 32 acquires initial intensity data indicating the intensity of the light L0 emitted from the light source 21, which is pre-stored in the storage unit 31 or notified via the communication unit 33. The control unit 32 calculates the difference between the intensities of the transmitted lights TR1 to TRn indicated by the received received light intensity data and the intensity of the light L0 indicated by the acquired initial intensity data as the absorbance of the transmitted lights TR1 to TRn, thereby acquiring absorbance data AD indicating the absorbance of the transmitted lights TR1 to TRn.

[0066] The absorbance data AD may be acquired from the measurement device 20 instead of being acquired inside the calculation device 30. For example, inside the measurement device 20, the difference between the intensity of the transmitted light TR1 to TRn indicated by the received light intensity data and the intensity of a preset light L0 may be calculated as the absorbance of the transmitted light TR1 to TRn, and the calculation result may be transmitted to the calculation device 30 as the absorbance data AD. In this case, the control unit 32 of the calculation device 30 receives the absorbance data AD from the measurement device 20 via the communication unit 33, thereby acquiring the absorbance data AD.

[0067] In step S107, the control unit 32 of the arithmetic device 30 calculates the concentration of the component to be analyzed based on the optical path length data OD and absorbance data AD acquired in step S106.

[0068] According to the Lambert-Beer law, the absorbance of a molecule is proportional to its component concentration and optical path length, so the concentration of the analyte component can be analyzed by measuring the intensity of the optical absorption spectrum. In this embodiment, the intensity of the molecular-specific optical absorption spectrum of the analyte component contained in gas G1 is measured according to a concentration calculation method for a TDLAS (Tunable Diode Laser Absorption Spectroscopy) laser gas analyzer, and the concentration of the analyte component is calculated by converting the acquired optical absorption spectrum. The concentration conversion method may be a known method such as the peak height method, the spectral area method, or the 2f method.

[0069] For example, when the component to be analyzed is O2 and the ambient environmental gas is air, the control unit 32 calculates the concentration of the component to be analyzed O2 as follows based on the acquired optical path length data OD and absorbance data AD: If the concentration of O2 present between the first lens 23 and the second lens 24, i.e., on the third optical path P3, is Ce, the optical path length is Le, the concentration of O2 in the housing internal space S is Cm, and the optical path length is Lm(t), the absorbance A(t) of the light L0, L1-Ln and the transmitted light TR1-TRn is expressed by the following equation 1. A(t)=αCeLe+αCmLm(t)...Equation 1 Here, α is the absorption coefficient. In step S103, the light L1 to Ln scanned in the first direction is made to travel in the second direction to keep the optical path length constant, so Le is constant and Ce can also be considered to be constant. On the other hand, by scanning light L0 in the first direction with movable reflecting mirror 22 in step S102, the optical path lengths PL1 to PLn of transmitted light TR1 to TRn received by light receiving element 26 in step S105 change over time. By differentiating equation 1 with respect to time, equation 2 is obtained. dA / dt=αCm·dLm(t) / dt ···Equation 2 The first term of Equation 2 becomes zero due to time differentiation, and the gas is no longer affected by the ambient gas G2 outside the container 25. As a result, it becomes possible to calculate the concentration of the target component based on the time function of the optical path length using the movable reflecting mirror 22 and the rate of change in absorbance.

[0070] According to this embodiment, in a space where the influence of the ambient gas may be present, the light scanned in the first direction is made to travel in the second direction to keep the optical path length constant, and in a space where a gas containing the target component is present, the optical path length is made to change over time, thereby making it possible to measure the concentration of the target component contained in the gas without being influenced by the ambient gas, thereby enabling easy-to-operate measurements.

[0071] The operation of the measurement system 10 according to the modified example of Fig. 3 will be further described with reference to Fig. 6. Fig. 6 shows the operation of the measurement device 20 and the calculation device 30. This operation corresponds to the measurement method according to this modified example.

[0072] Steps S201 to S204 are the same as steps S101 to S104 described above, and therefore a description thereof will be omitted.

[0073] In step S205, the transmitted light TR1 to TRn emitted into the housing internal space S is reflected by a reflector 28 that is arranged in the housing internal space S at a position away from the second lens 24. Specifically, the reflector 28 is a mirror that specularly reflects the transmitted light TR1 to TRn.

[0074] In step S206, the second lens 24 of the measuring device 20 further transmits the transmitted light TR1 to TRn reflected by the reflector 28, causes it to travel parallel to the second direction, and makes the transmitted light TR1 to TRn incident on the first lens 23.

[0075] In step S207, the first lens 23 of the measuring device 20 further transmits the transmitted light TR1 to TRn incident from the second lens 24, converges the light, and emits it in the opposite direction from the side where the second lens 24 is located.

[0076] In step S208, the light receiving element 26 of the measurement device 20 receives the transmitted light beams TR1 to TRn. In this modification, the light receiving element 26 is disposed at a position away from the first lens 23, on the side opposite to the side where the second lens 24 is located.

[0077] The light receiving element 26 outputs received light intensity data indicating the intensity of the transmitted light. Specifically, the light receiving element 26 outputs data indicating the intensity of the transmitted light TR1 to TRn as the received light intensity data.

[0078] Steps 209 to S210 are the same as steps S106 to S107 described above, and therefore a description thereof will be omitted.

[0079] According to this modification, even if the container is a small packaging container and the optical path in the container's internal space cannot be made large, the optical path length can be extended by reflecting the transmitted light off the reflector and returning it to the second lens. Furthermore, by placing the light receiving element outside the container, the light receiving element can be isolated from external disturbances such as vibration or heat of the container. As a result, measurement sensitivity is improved, enabling more accurate measurements.

[0080] As described above, in this embodiment, the optical path length is kept constant in a space that may be affected by the ambient environmental gas, and the optical path length is changed over time in a space where a gas containing a component to be analyzed is present.

[0081] According to this embodiment, the concentration of the target component contained in the gas can be measured without being affected by the surrounding environmental gas, which makes the measurement easy to operate.

[0082] Although the present embodiment has been described in the context of using optical absorption spectroscopy, the present invention is not limited thereto. The measurement system 10 may analyze the analyte components using any spectroscopy other than absorption spectroscopy. The spectroscopy may include, for example, Raman spectroscopy. For example, in Raman spectroscopy, the optical spectrum includes a Raman spectrum.

[0083] As described above, in this embodiment, the measurement system 10 emits light L0 from the light source 21, the absorbance of which varies depending on the concentration of the target component contained in the gas G1. The measurement system 10 scans the light L0 emitted from the light source 21 in a first direction using the movable reflecting mirror 22. The measurement system 10 transmits the light L1-Ln scanned by the movable reflecting mirror 22 through the first lens 23 and causes it to travel in a second direction perpendicular to the first direction. The light L1-Ln traveling in the second direction is transmitted through the second lens 24, which is disposed on the outer periphery of the container 25, which has a container internal space S containing the gas G1, at a position opposite the first lens 23 along the second direction, to form transmitted light TR1-TRn, and the transmitted light TR1-TRn is converged and emitted into the container internal space S. The measurement system 10 receives the transmitted light TR1-TRn using the light receiving element 26. The measurement system 10 acquires optical path length data indicating the optical path length within the container internal space S and absorbance data indicating the absorbance of the transmitted light TR1 to TRn received by the light receiving element 26. The measurement system 10 calculates the concentration of the component to be analyzed based on the optical path length data OD and the absorbance data AD.

[0084] The present disclosure is not limited to the above-described embodiments. For example, two or more blocks shown in the block diagrams may be integrated, or one block may be divided. Two or more steps shown in the flowcharts may be executed in parallel or in a different order, instead of being executed in chronological order as described, depending on the capabilities of the device executing each step, or as needed. Other modifications are possible within the scope of the present disclosure. [Explanation of symbols]

[0085] 10 Measurement System 20 Measuring Equipment 21 Light source 22 Movable reflector 23 First lens 24 Second lens 25 Containment Unit 26 Photodetector 27 Case 28 Reflector 30 Arithmetic unit 31 Storage section 32 Control section 33 Communications Department

Claims

1. a light source that emits light of a variable wavelength; a movable reflecting mirror that reflects the light emitted from the light source; a first lens that transmits the light reflected by the movable reflecting mirror while changing the reflection angle, and causes the light to travel in parallel; a second lens that is disposed at a position facing the first lens on the outer periphery of a container having an internal space where a component to be analyzed is present, and that transmits the light traveling in parallel to the first lens to form transmitted light, and emits the transmitted light into the internal space of the container while converging it; a light receiving element that receives the transmitted light; A measuring device comprising:

2. a housing that houses the light source and the movable reflecting mirror and is filled with a gas that does not contain the component to be analyzed or is in a vacuum state; the first lens is disposed on the outer periphery of the housing; 2. The measuring device according to claim 1, wherein an ambient gas containing the same component as the component to be analyzed is present between the first lens and the second lens.

3. The measuring device according to claim 1 , wherein the light receiving element is disposed in the internal space of the housing at a position away from the second lens.

4. a reflector disposed in the interior space of the housing at a position spaced apart from the second lens; the second lens further transmits the transmitted light reflected by the reflector, causes the transmitted light to travel in parallel, and causes the transmitted light to be incident on the first lens; the first lens further transmits the transmitted light incident from the second lens, converges the transmitted light, and outputs the light to an opposite side from the side where the second lens is located, The measuring device according to claim 1 or 2, wherein the light receiving element is disposed on the opposite side at a position away from the first lens.

5. The measuring device according to claim 1 or 2; a calculation device including: a memory unit that stores optical path length data indicating an optical path length within the internal space of the container; and a control unit that acquires absorbance data indicating the absorbance of the transmitted light received by the light receiving element, and calculates the concentration of the component to be analyzed based on the optical path length data and the absorbance data; A measurement system comprising:

6. a light source that emits light of a variable wavelength; a movable reflecting mirror that reflects the light emitted from the light source; a first lens that transmits the light reflected by the movable reflecting mirror while changing the reflection angle and causes the light to travel in parallel; a second lens that is arranged at a position facing the first lens on the outer periphery of a container having an internal space in which a component to be analyzed is present, and transmits the light traveling in parallel to form transmitted light and converges the transmitted light while emitting it into the internal space of the container; and a light receiving element that receives the transmitted light; and a memory unit that stores optical path length data that indicates the optical path length within the internal space of the container. a control unit that acquires absorbance data indicating the absorbance of the transmitted light received by the light receiving element, and calculates the concentration of the component to be analyzed by time-differentiating the absorbance data and the optical path length data; A computing device comprising:

7. Emitting light of a variable wavelength from a light source; reflecting the light emitted from the light source by a movable reflecting mirror; the light reflected by the movable reflecting mirror with a change in reflection angle is transmitted through a first lens and travels in parallel; transmitting the light traveling in parallel to the light beam through a second lens disposed at a position facing the first lens in an outer periphery of a container having an internal space where the component to be analyzed is present, to form transmitted light, and emitting the transmitted light into the internal space of the container while converging it; receiving the transmitted light with a light receiving element; acquiring optical path length data indicating an optical path length within the interior space of the housing and absorbance data indicating an absorbance of the transmitted light received by the light receiving element; calculating a concentration of the analyte component based on the optical path length data and the absorbance data; Measurement methods including:

8. the light source and the movable reflecting mirror are housed in a housing filled with a gas that does not contain the component to be analyzed or in a vacuum state; the first lens is disposed on the outer periphery of the housing; The measurement method according to claim 7 , wherein an ambient environmental gas containing the same component as the component to be analyzed is present between the first lens and the second lens.

9. The measurement method according to claim 7 or 8, wherein the light receiving element is disposed in the interior space of the housing at a position away from the second lens.

10. The transmitted light emitted into the housing internal space is reflected by a reflector disposed in the housing internal space at a position away from the second lens; The transmitted light reflected by the reflector is further transmitted through the second lens to travel in parallel, and the transmitted light is incident on the first lens; the transmitted light incident from the second lens is further transmitted through the first lens, and is converged while being emitted to an opposite side from the side where the second lens is located; Further comprising: The measurement method according to claim 7 or 8, wherein the light receiving element is disposed on the opposite side at a position away from the first lens.

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