Heat Treatment Equipment

Abstract

To provide a heating treatment apparatus which can suppress the generation of particles even when each heater stretches in a direction along a central axis upon the ON / OFF time of the heater.SOLUTION: A heating treatment apparatus comprises: a chamber for storing a workpiece; bar-shaped plural heaters 33 which are provided inside the chamber; and either a first support part 34 or a second support part for supporting the heaters at the inside of the chamber. The plural heaters are lined up in a heater central axis cross direction, and the first support part comprises: a first plate 34a2 provided below the heaters; and a rolling part 34a provided between the heaters and the first plate, brought into contact with the heaters and the first plate and movable in the heater central axis direction. The second support part comprises: a holding part for holding the heaters; and a second plate which is connected to the holding part and is elastically deformable in the central axis direction of the heaters in response to the stretching of the heaters.SELECTED DRAWING: Figure 8

Description

[Technical Field]

[0001] FIELD An embodiment of the present invention relates to a heat treatment apparatus. [Background technology]

[0002] 2. Description of the Related Art There are heat treatment devices that heat a workpiece to form a film or the like on the surface of the workpiece or to treat the surface of the workpiece. For example, a heat treatment apparatus has been proposed that includes a chamber for holding a workpiece, and a plate and a plurality of heaters provided inside the chamber. The plate is provided so as to face the front side and the back side of the workpiece, respectively.

[0003] The heaters are rod-shaped and arranged side by side on the opposite side of the plate from the workpiece side. One end of each heater is fixed to the chamber. The other end of each heater is supported by a plate-shaped bracket fixed to the chamber.

[0004] When power is applied to the heater (ON), the heater becomes hot and expands. This causes the heater to expand mainly in the direction along the central axis. When power is stopped (OFF), the heater contracts in the direction along the central axis (returns to its original shape). Therefore, if the end of the heater is supported by a plate-shaped bracket fixed to the chamber, friction occurs at the contact point between the heater and bracket. When friction occurs at the contact point between the heater and bracket, particles may be generated. If the generated particles adhere to the workpiece, it may reduce the quality of the workpiece. Therefore, there has been a demand for the development of a heat treatment apparatus that can suppress the generation of particles even when the heater expands and contracts when the heater is turned on and off. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2019-184229 Summary of the Invention [Problem to be solved by the invention]

[0006] The problem to be solved by the present invention is to provide a heat treatment apparatus that can suppress the generation of particles even if the heater expands and contracts when the heater is turned on and off. [Means for solving the problem]

[0007] A heat treatment apparatus according to an embodiment includes a chamber in which a workpiece is housed, a plurality of rod-shaped heaters provided inside the chamber, and a first support unit supporting the heaters inside the chamber, the plurality of heaters being arranged in a direction intersecting a central axis of the heaters, the first support unit including a first plate provided below the heaters so as to intersect with the plurality of heaters, and a rotating unit provided between the heaters and the first plate, in contact with the heaters and the first plate, and movable in a direction along the central axis of the heaters; a guide plate provided on one end of the first plate on the center side of the chamber and rising from the first plate in a direction approaching the heater; It has. [Effects of the Invention]

[0008] According to an embodiment of the present invention, a heat treatment apparatus is provided that can suppress the generation of particles even if the heater expands and contracts when the heater is turned on and off. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a schematic front view illustrating a heat treatment apparatus according to an embodiment of the present invention; [Figure 2] 2 is a schematic cross-sectional view of the heat treatment device in FIG. 1 taken along the line AA. [Figure 3] FIG. 2 is a schematic perspective view of a chamber and a cassette rack. [Figure 4] FIG. 2 is a schematic perspective view illustrating a cassette. [Figure 5] FIG. 10 is a schematic perspective view illustrating the holding of the heater by the holding portion. [Figure 6] 10A and 10B are schematic perspective views illustrating support of a heater by a support portion according to a comparative example. [Figure 7] 5A to 5C are schematic views illustrating support of a heater by a support portion according to the present embodiment. [Figure 8] FIG. 2 is a schematic perspective view illustrating a support portion. [Figure 9] 10A and 10B are schematic diagrams for illustrating the function of the support portion. [Figure 10] 10A to 10C are schematic views illustrating support of a heater by a support portion according to another embodiment. [Figure 11] 10A to 10C are schematic views illustrating support of a heater by a support portion according to another embodiment. [Figure 12] FIG. 10 is a schematic perspective view illustrating a cassette according to another embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, embodiments will be illustrated with reference to the drawings. In the drawings, like components are designated by like reference numerals and detailed descriptions thereof will be omitted where appropriate. In the following, as an example, a heat treatment apparatus that heats a workpiece in an atmosphere reduced in pressure below atmospheric pressure to form an organic film on the surface of the workpiece will be described. However, the present invention is not limited to this. For example, the present invention can also be applied to a heat treatment apparatus that heats a workpiece to form an inorganic film or the like on the surface of the workpiece, or to treat the surface of the workpiece.

[0011] Furthermore, the work before heating may include, for example, a substrate and a solution applied to the surface of the substrate, or may be a substrate only. In the following, as an example, a case where the work before heating includes a substrate and a solution applied to the surface of the substrate will be described.

[0012] Before being heat-treated by the heat treatment device 1 according to this embodiment, the workpiece 100 has a substrate and a solution applied to the surface of the substrate. The substrate is, for example, a glass substrate or a semiconductor wafer. However, the substrate is not limited to the examples given. The solution contains, for example, an organic material and a solvent. The organic material is not particularly limited as long as it can be dissolved by the solvent. The solution can be, for example, a varnish containing polyamic acid. However, the solution is not limited to the examples given. The solution may also be a liquid that has been pre-baked to a semi-hardened state (a state in which it does not flow).

[0013] FIG. 1 is a schematic front view illustrating a heat treatment device 1 according to the present embodiment. In FIG. 1, only one cassette 50 is shown to avoid complication. FIG. 2 is a schematic cross-sectional view of the heat treatment apparatus 1 in FIG. 1 taken along the line AA. In FIG. 2, the cassette 50 is omitted to avoid complication. FIG. 3 is a schematic perspective view of the chamber 10 and the cassette rack 60. As shown in FIG. In each figure, the X, Y, and Z directions represent three mutually orthogonal directions. For example, the X and Y directions are horizontal directions. For example, the Z direction is the up-down direction (vertical direction).

[0014] As shown in FIGS. 1 and 2, the heat treatment apparatus 1 includes, for example, a chamber 10, an exhaust unit 20, a heating unit 30, a cooling unit 40, a cassette 50, a cassette rack 60, and a controller 70.

[0015] The controller 70 includes, for example, a calculation unit such as a CPU (Central Processing Unit) and a storage unit such as a memory. The controller 70 is, for example, a computer. The controller 70 controls the operation of each element provided in the heat treatment device 1 based on, for example, a control program stored in the storage unit.

[0016] As shown in FIGS. 1 to 3, the chamber 10 is box-shaped. The chamber 10 has an airtight structure that can maintain an atmosphere at a pressure lower than atmospheric pressure. There are no particular limitations on the external shape of the chamber 10. The external shape of the chamber 10 can be, for example, a rectangular parallelepiped or a cylinder. The chamber 10 is formed from a metal such as stainless steel.

[0017] For example, openings are provided at both ends of the chamber 10 in the Y direction. A flange 11 is provided at one end of the chamber 10 in the Y direction. A seal 12 such as an O-ring is provided on the flange 11. An opening / closing door 13 is provided on the side of the chamber 10 where the flange 11 is provided. When the opening / closing door 13 is closed, the opening of the chamber 10 is closed airtight by the seal 12. When the opening / closing door 13 is opened, the workpiece 100 can be carried in or out of the cassette 50 through the opening of the chamber 10. In other words, the workpiece 100 is stored inside the chamber 10.

[0018] For example, a flange 14 is provided at the other end of the chamber 10 in the Y direction. A sealant 12 is provided on the flange 14. A lid 15 is provided on the side of the chamber 10 where the flange 14 is provided. For example, the lid 15 is detachably attached to the flange 14 using a fastening member such as a screw. When the lid 15 is attached, the opening of the chamber 10 is closed airtightly by the sealant 12. If the detachable lid 15 is provided, maintenance of the heat treatment device 1 from the side where the flange 14 is provided is facilitated. Furthermore, when the lid 15 is opened for maintenance, a cassette 50 having a processing space for heating the workpiece 100 is carried into the chamber 10 through the opening of the chamber 10. Alternatively, the cassette 50 is carried out of the chamber 10 through the opening of the chamber 10.

[0019] Furthermore, a cooling device (not shown) can be provided on the outer wall of the chamber 10. The cooling device can be, for example, a water jacket. If a cooling device is provided, the temperature of the outer wall of the chamber 10 can be prevented from rising above a predetermined temperature.

[0020] The exhaust unit 20 exhausts the inside of the chamber 10 . 1, the exhaust unit 20 has a first exhaust unit 21 and a second exhaust unit 22. The first exhaust unit 21 and the second exhaust unit 22 are connected to an exhaust port 16 provided on the bottom surface of the chamber 10.

[0021] The first exhaust unit 21 includes an exhaust pump 21a and a pressure control unit 21b. The exhaust pump 21a may be an exhaust pump that performs rough exhaust from atmospheric pressure to a predetermined pressure. Therefore, the exhaust pump 21a has a larger exhaust volume than the exhaust pump 22a described below. The exhaust pump 21a may be, for example, a dry vacuum pump.

[0022] The pressure control unit 21b is provided between the exhaust port 16 and the exhaust pump 21a. The pressure control unit 21b controls the internal pressure of the chamber 10 to a predetermined pressure based on the output of a vacuum gauge (not shown) or the like that detects the internal pressure of the chamber 10. The pressure control unit 21b can be, for example, an APC (Auto Pressure Controller).

[0023] The second exhaust unit 22 includes an exhaust pump 22a and a pressure control unit 22b. The exhaust pump 22a exhausts the air to a lower predetermined pressure after the rough exhaust by the exhaust pump 21a. The exhaust pump 22a has an exhaust capacity capable of exhausting the air to a molecular flow region of a high vacuum. For example, the exhaust pump 22a can be a turbo molecular pump (TMP).

[0024] The pressure control unit 22b is provided between the exhaust port 16 and the exhaust pump 22a. The pressure control unit 22b controls the internal pressure of the chamber 10 to a predetermined pressure based on the output of a vacuum gauge (not shown) or the like that detects the internal pressure of the chamber 10. The pressure control unit 22b can be, for example, an APC.

[0025] If the pressure in the internal space of the chamber 10 is reduced, the amount of heat released to the outside of the chamber 10 can be reduced. This improves the heating efficiency and heat storage efficiency, allowing the power applied to the heater 33, which will be described later, to be reduced. If the power applied to the heater 33 can be reduced, the load on the heater 33 can be prevented from becoming too high. This allows the life of the heater 33 to be extended.

[0026] The heating unit 30 includes, for example, a first heating unit 31 and a second heating unit 32. The first heating unit 31 and the second heating unit 32 are provided inside the chamber 10. The first heating unit 31 is provided above the cassette 50. The second heating unit 32 is provided below the cassette 50. The second heating unit 32 faces the first heating unit 31.

[0027] As will be described later, the workpiece 100 is supported inside the cassette 50. Therefore, the first heating unit 31 heats the front surface (top surface) of the workpiece 100 supported inside the cassette 50. The second heating unit 32 heats the back surface (bottom surface) of the workpiece 100 supported inside the cassette 50.

[0028] 1, when a plurality of cassettes 50 are arranged in the Z direction (vertical direction) inside the chamber 10, the second heating section 32 provided below the upper cassette 50 can serve as the first heating section 31 provided above the lower cassette 50. In other words, the first heating section 31 and the second heating section 32 provided between the cassettes 50 can be used as one heating section. For convenience, when focusing on one cassette 50, the upper side as viewed from the cassette 50 is designated as the first heating section 31 and the lower side as the second heating section 32, but heating sections (heaters 33) are provided on the top and bottom of all cassettes 50.

[0029] In this case, the back surface of the workpiece 100 supported inside the upper cassette 50 is heated by the shared first heating unit 31 or second heating unit 32. The front surface of the workpiece 100 supported inside the lower cassette 50 is heated by the shared first heating unit 31 or second heating unit 32. In this way, it is possible to reduce the number of first heating sections 31 or second heating sections 32. This makes it possible to reduce power consumption, manufacturing costs, and space.

[0030] The first heating section 31 and the second heating section 32 each have, for example, a heater 33, a support section 34 (corresponding to an example of a first support section), and a holding section 35. At least one heater 33 is provided. For example, one support section 34 is provided for one heater 33, or one support section 34 is provided for multiple heaters 33. For example, one holding section 35 is provided for one heater 33, or one support section 34 is provided for multiple heaters 33.

[0031] Each of the first heating unit 31 and the second heating unit 32 illustrated in FIGS. 1 and 2 has multiple heaters 33. The multiple heaters 33 extend in the X direction and are aligned in the Y direction, for example. The multiple heaters 33 may extend in the Y direction and be aligned in the X direction. That is, the multiple heaters 33 are aligned in a direction intersecting the central axis of the heaters 33. The multiple heaters 33 may be aligned at equal intervals, or the intervals may be varied depending on the in-plane temperature distribution of the workpiece 100. The specifications, number, and intervals of the heaters 33 provided in the second heating unit 32 may be the same as or different from the specifications, number, and intervals of the heaters 33 provided in the first heating unit 31. The specifications, number, and intervals of the heaters 33 can be appropriately changed depending on the composition of the solution to be heated (the heating temperature of the solution), the size of the workpiece 100, and the like. The specifications, number, and intervals of the heaters 33 can be appropriately determined by simulations, experiments, and the like.

[0032] The heater 33 may be a rod-shaped heater extending in one direction. There are no particular limitations on the heater 33 as long as it is a rod-shaped heater. The heater 33 may be, for example, a sheath heater, a ceramic heater, a cartridge heater, or the like. The heater 33 may have, for example, a quartz cover. In this specification, the term "rod-shaped heater" includes heaters covered with a quartz cover. There are no limitations on the external shape of the "rod-shaped heater," and it can be, for example, a cylindrical or prismatic shape.

[0033] Furthermore, the heater 33 is not limited to the one described above as long as it can heat the workpiece 100 in an atmosphere that is reduced in pressure below atmospheric pressure. That is, the heater 33 may be any heater that is rod-shaped and utilizes thermal energy by radiation.

[0034] As shown in FIG. 5, which will be described later, the vicinity of the end of the heater 33 on the terminal 33a side is detachably held by a holding part 35 outside the chamber 10. The heater 33 is supported by a support 34 inside the chamber 10 near the end opposite to the terminal 33a side. The holding of the heater 33 by the holding portion 35 and the support of the heater 33 by the support portion 34 will be described in detail later.

[0035] The cooling unit 40 cooperates with a cooling unit 57 provided in the cassette 50, which will be described later, to supply cooling gas to the cassette 50. As will be described later, the cooling gas supplied to the cassette 50 is supplied to the workpiece 100 supported inside the cassette 50. The cooling gas supplied to the cassette 50 is also supplied to the heat equalizing plates (upper heat equalizing plate 52, lower heat equalizing plate 53, side heat equalizing plate 54, side heat equalizing plate 55) of the cassette 50, which will be described later.

[0036] By supplying the cooling gas to the workpiece 100, the workpiece 100, which is in a high temperature state, is directly cooled. In addition, by supplying the cooling gas supplied to the workpiece 100 to the heat equalizing plate of the cassette 50, the cassette 50 is also cooled. By cooling the cassette 50, it is possible to suppress the heat of the cassette 50 from being transferred to the workpiece 100. Therefore, the workpiece 100 is indirectly cooled by the cassette 50.

[0037] The provision of the cooling unit 40 can shorten the cooling time of the workpiece 100. Furthermore, when the workpiece 100 is cooled, it is possible to suppress the occurrence of variations in temperature distribution within the surface of the workpiece 100 due to heat from the cassette 50.

[0038] The cooling unit 40 includes, for example, a joint 41, a gas source 42, and a gas control unit 43. The joint 41, the gas source 42, and the gas control unit 43 are connected by a pipe 44.

[0039] The joint 41 is detachably connected to a joint (not shown) of the cooling unit 57 provided in the cassette 50, for example. The gas source 42 supplies cooling gas to the cooling unit 57 of the cassette 50 via the gas control unit 43. The gas source 42 may be, for example, a high-pressure gas cylinder, factory piping, or the like. The cooling gas is not particularly limited as long as it is a gas that does not easily react with the heated workpiece 100. Examples of the cooling gas include nitrogen gas and rare gas. Examples of the rare gas include argon gas and helium gas. The temperature of the cooling gas can be, for example, room temperature (e.g., 25°C) or lower.

[0040] The gas control unit 43 is provided between the joint 41 and the gas source 42. The gas control unit 43 can, for example, supply the cooling gas, stop the supply, and control at least one of the flow rate and the flow rate of the cooling gas.

[0041] 1, the cassette 50 is detachably mounted on a pair of receiving members 62 of a cassette rack 60 provided inside the chamber 10. In this case, the cassette 50 is detachably mounted between the first heating unit 31 and the second heating unit 32.

[0042] FIG. 4 is a schematic perspective view illustrating the cassette 50. As shown in FIG. 4, the cassette 50 is box-shaped and has a processing space therein for supporting the workpiece 100. There are no particular limitations on the external shape of the cassette 50. The external shape of the cassette 50 may be, for example, a rectangular parallelepiped.

[0043] The cassette 50 includes, for example, a cassette frame 51, an upper heat equalizer plate 52, a lower heat equalizer plate 53, a side heat equalizer plate 54, a side heat equalizer plate 55, a work support portion 56, and a cooling portion 57. (See Figures 1 and 2) , and a cassette support portion 58.

[0044] The cassette frame 51 defines a processing space for heating the workpiece 100. In this embodiment, the cassette frame 51 defines a space surrounded by an upper heat equalizer plate 52, a lower heat equalizer plate 53, a side heat equalizer plate 54, and a side heat equalizer plate 55. The cassette frame 51 has a framework structure using, for example, elongated plate material or structural steel. Alternatively, the cassette frame 51 may be a frame formed by sheet metal processing or the like. There are no particular limitations on the external shape of the cassette frame 51. The external shape of the cassette frame 51 is, for example, a rectangular parallelepiped.

[0045] The upper heat equalizer plate 52 has a plate shape and is provided on the upper part of the cassette frame 51. The upper heat equalizer plate 52 can be detachably provided on the upper part of the cassette frame 51. At least one upper heat equalizer plate 52 can be provided. The cassette 50 illustrated in FIG. 4 is provided with seven upper heat equalizer plates 52. The planar shape of the upper heat equalizer plates 52 can be, for example, rectangular. The number and planar shape of the upper heat equalizer plates 52 can be changed as appropriate depending on the size and shape of the upper part of the cassette frame 51.

[0046] The lower heat equalizer 53 has a plate shape and is provided at the bottom of the cassette frame 51. Like the upper heat equalizer 52, the lower heat equalizer 53 can be detachably provided at the bottom of the cassette frame 51. The lower heat equalizer 53 faces the upper heat equalizer 52. At least one lower heat equalizer 53 can be provided. The number and planar shape of the lower heat equalizers 53 can be the same as or different from the number and planar shape of the upper heat equalizer 52.

[0047] The side heat equalizer plates 54 are plate-shaped. A pair of side heat equalizer plates 54 can be provided. One of the side heat equalizer plates 54 is provided, for example, on one of the opposing sides of the cassette frame 51.

[0048] The workpiece 100 is carried into the cassette 50 through an opening provided in the side of the cassette frame 51. Alternatively, the workpiece 100 is carried out from the cassette 50 through an opening provided in the side of the cassette frame 51. Therefore, the side of the cassette frame 51 opposite to the side where the side heat equalizing plate 54 is provided is open.

[0049] The opening of the cassette frame 51 is opened and closed by the other side heat equalizer 54. For example, the side heat equalizer 54 can be provided on the opening and closing door 13 of the chamber 10 described above, so that when the opening and closing door 13 is closed, the opening of the cassette frame 51 is closed by the side heat equalizer 54. Alternatively, the side heat equalizer 54 can be provided on the side of the cassette frame 51 so as to be able to open and close, so that the opening of the cassette frame 51 is closed by the openable and closable side heat equalizer 54.

[0050] The side heat equalizer plates 55 are plate-shaped and a pair are provided inside the cassette frame 51. The pair of side heat equalizer plates 55 face each other and extend between the pair of side heat equalizer plates 54. One of the pair of side heat equalizer plates 55 is provided near one side of the cassette frame 51. The other of the pair of side heat equalizer plates 55 is provided near the other side of the cassette frame 51.

[0051] The space surrounded by the upper heat equalizer plate 52, the lower heat equalizer plate 53, the side heat equalizer plate 54, and the side heat equalizer plate 55 is a processing space for heating the workpiece 100. The processing space inside the cassette 50 and the internal space of the chamber 10 are connected, for example, via gaps between the heat equalizer plates (gaps between the cassette beams present between the heat equalizer plates and the heat equalizer plates). Therefore, when the pressure in the internal space of the chamber 10 is reduced, the pressure in the internal space of the cassette 50 is also reduced.

[0052] As described above, the multiple rod-shaped heaters 33 are arranged at predetermined intervals. When the heaters 33 are rod-shaped, heat is radiated radially from the central axis of the heaters 33. Therefore, the shorter the distance between the central axis of the heater 33 and the heated portion of the workpiece 100, the higher the temperature of the heated portion. In other words, when the workpiece 100 is directly heated using multiple rod-shaped heaters 33, the temperature distribution varies within the surface of the heated workpiece 100.

[0053] If the temperature distribution varies across the surface of the workpiece 100, the quality of the formed organic film may be reduced. For example, bubbles may be generated in the areas where the temperature is high, or the composition of the organic film may change.

[0054] If the upper heat equalizer plate 52 and the lower heat equalizer plate 53 are provided, the heat radiated from the multiple heaters 33 is incident on the upper heat equalizer plate 52 and the lower heat equalizer plate 53. The heat incident on the upper heat equalizer plate 52 and the lower heat equalizer plate 53 is radiated toward the workpiece 100 while propagating within them in the planar direction. This makes it possible to suppress variations in the temperature distribution within the surface of the workpiece 100. As a result, the quality of the formed organic film can be improved.

[0055] The upper heat equalizer plate 52, the lower heat equalizer plate 53, and the side heat equalizer plates 54, 55 can be made of a metal such as aluminum, copper, or stainless steel.

[0056] A plurality of workpiece support parts 56 are provided inside the cassette 50. The plurality of workpiece support parts 56 support the back surface of the workpiece 100 in the processing space where the workpiece 100 is heated. The plurality of workpiece support parts 56 support the workpiece 100 so that the workpiece 100 faces the upper heat equalizing plate 52 and the lower heat equalizing plate 53.

[0057] The workpiece support portion 56 may be a rod-shaped body. The workpiece support portion 56 may be made of, for example, stainless steel. The number, arrangement, spacing, etc. of the workpiece support portions 56 may be changed as appropriate depending on the size, rigidity (deflection), etc. of the workpiece 100.

[0058] Returning to Figure 1, The cooling unit 57 supplies the cooling gas supplied from the cooling unit 40 to the workpieces 100 in the cassette 50. The cooling unit 57 can be provided on the side surface of the cassette frame 51, for example.

[0059] The cooling unit 57 has, for example, a pipe, a nozzle, and a joint, none of which are shown. The pipe supplies the cooling gas supplied from the cooling unit 40 to the nozzle. The pipe is provided, for example, outside the cassette 50 (cassette frame 51). At least one pipe may be provided. Also, the end of the pipe may be branched to have multiple ends.

[0060] The nozzle is provided inside the cassette 50 (cassette frame 51). The nozzle is attached, for example, to the tip of a pipe. For example, the nozzle supplies cooling gas to the back surface of the workpiece 100 supported in the processing space of the cassette 50. At least one nozzle can be provided. The joint detachably connects the cooling unit 40 and the piping.

[0061] The cassette support parts 58 are provided on the side surfaces of the cassette frame 51 that intersect with the side surfaces on which the side heat equalizer plates 54 are provided. There are provided a pair of cassette support parts 58. The cassette support parts 58 protrude outward from the side surfaces of the cassette frame 51 and extend in a direction perpendicular to the side surfaces on which the side heat equalizer plates 54 are provided.

[0062] The cassette support parts 58 are provided on each of a pair of opposing side surfaces of the cassette 50. The cassette support parts 58 are supported by receiving members 62 of a cassette rack 60, which will be described later. That is, the cassette 50 is removably mounted inside the chamber 10 (cassette rack 60) by the cassette support parts 58 and the receiving members 62. Removably mounting the cassette 50 inside the chamber 10 facilitates maintenance.

[0063] The cassette rack 60 is provided inside the chamber 10. The cassette rack 60 holds the heater 33 and the cassette 50 in a predetermined position inside the chamber 10.

[0064] The cassette rack 60 includes a frame 61 , a receiving member 62 , and a reflector 63 . The frame 61 has, for example, a framework structure made up of elongated members. There are no particular limitations on the external shape of the frame 61. The external shape of the frame 61 can be, for example, a rectangular parallelepiped or a cylinder.

[0065] At least one pair of receiving members 62 is provided inside the frame 61 (see FIG. 3). The pair of receiving members 62 supports the cassette support portion 58 of the cassette 50 inside the chamber 10. In the Z direction, the pair of receiving members 62 is provided between the first heating unit 31 and the second heating unit 32. One cassette 50 is placed on the pair of receiving members 62. Therefore, a pair of receiving members 62 is provided for each cassette 50. For example, if the frame 61 is designed to be able to store 14 cassettes 50 inside, 14 pairs of receiving members 62 are provided inside the frame 61.

[0066] The pair of receiving members 62 are provided, for example, on inner walls of the frame 61 that face each other in the X direction. The pair of receiving members 62 extend in the Y direction. When multiple pairs of receiving members 62 are provided, the pairs of receiving members 62 can be arranged side by side in the Z direction.

[0067] The reflector 63 reflects heat incident from the heater 33 side toward the cassette 50 side. If the reflector 63 is provided, it is possible to improve the heat storage capacity in the internal space (processing space) of the cassette 50. The reflector 63 is plate-shaped and is provided on the outer periphery of the frame 61. To avoid complexity, the reflector 63 is not depicted in FIGS. 1 and 2. Also, in FIG. 3, only the reflector 63 attached to the side of the frame 61 to which the receiving member 62 is attached is depicted.

[0068] Next, the holding of the heater 33 by the holding portion 35 and the support of the heater 33 by the support portion 34 will be further described. FIG. 5 is a schematic perspective view illustrating how the heater 33 is held by the holding portion 35. As shown in FIG. 5, the holding part 35 can be provided on the outer surface of the chamber 10 using, for example, a fastening member such as a screw. The holding part 35 detachably holds the vicinity of the end of the heater 33 on the terminal 33a side. The holding part 35 has, for example, a split clamping mechanism that tightens the inserted heater 33. When the holding part 35 holds the vicinity of the end of the heater 33 on the terminal 33a side, the terminal 33a of the heater 33 is exposed to the outside of the chamber 10.

[0069] If the terminal 33a of the heater 33 is exposed to the outside of the chamber 10, maintenance of the heater 33 is easy. In addition, when power is applied to the workpiece 100, the occurrence of vacuum discharge at the terminal 33a of the heater 33 can be suppressed.

[0070] For example, one holding unit 35 is provided for one heater 33, or one holding unit is provided for a plurality of heaters 33. The holding unit 35 illustrated in FIG.

[0071] FIG. 6 is a schematic perspective view illustrating support of the heater 33 by a support portion 134 according to a comparative example. 6, the support portion 134 is provided below the heater 33. The support portion 134 has a mounting plate 134a, a plate 134b, and a support plate 134c.

[0072] The mounting plate 134 a is provided on the frame 61 of the cassette rack 60 . The plate 134b is provided between the mounting plate 134a and the support plate 134c in the X direction.

[0073] The support plate 134c has a notch 134c1 that penetrates the support plate 134c in the thickness direction and into which the heater 33 can be inserted. The notch 134c1 can be a U-shaped hole.

[0074] When the heater 33 is inserted into the notch 134c1, the heater 33 comes into contact with the inner wall of the notch 134c1 in the Z direction (the inner wall below the notch 134c1). Therefore, the vicinity of the end of the heater 33 opposite to the terminal 33a side is supported by the support portion 134.

[0075] When power is applied to the heater 33 (ON), the heater 33 is heated by the generated heat, and the heater 33 expands mainly in a direction along the central axis due to thermal expansion. When power application to the heater 33 is stopped (OFF), the heated heater 33 cools, and the heater 33 contracts in a direction along the central axis. That is, when power is applied to the heater 33 (ON) or when power application to the heater 33 is stopped (OFF), the heater 33 expands and contracts in a direction along the central axis. Note that, because one end of the heater 33 on the terminal 33a side is fixed by the holding portion 35, the expansion and contraction of the heater 33 due to thermal expansion starts from the one end on the terminal 33a side.

[0076] In this case, the vicinity of the end of the heater 33 opposite to the terminal 33a side is simply placed on the lower inner wall of the notch 134c1 due to gravity, and therefore even if the heater 33 expands and contracts in the direction along the central axis, the heater 33 is not constrained. Therefore, deformation of the heater 33 when the heater 33 expands and contracts in the direction along the central axis can be suppressed.

[0077] However, if the heater 33 is placed on the lower inner wall of the notch 134c1 due to gravity, the heater 33 will rub against the inner wall of the notch 134c1 when the heater 33 expands and contracts in the direction along the central axis. Rubbing between the heater 33 and the inner wall of the notch 134c1 may generate particles. If the generated particles adhere to the workpiece 100, the quality of the workpiece 100 may be degraded.

[0078] FIG. 7 is a schematic view illustrating support of the heater 33 by the support portion 34 according to the present embodiment. FIG. 8 is a schematic perspective view illustrating the support portion 34. As shown in FIG. As shown in FIGS. 7 and 8, the support portion 34 has a guide portion 34a and a rotating portion 34b. The guide portion 34a is provided below the heater 33. The guide portion 34a has, for example, a mounting plate 34a1, a plate 34a2 (which corresponds to an example of a first plate), and a guide plate 34a3. The mounting plate 34a1, the plate 34a2, and the guide plate 34a3 can be integrally formed by, for example, bending a plate material.

[0079] The mounting plate 34 a 1 is provided on a frame 61 of the cassette rack 60 . The plate 34a2 is provided between the mounting plate 34a1 and the guide plate 34a3 in the X direction. 2 One end of the plate 34a2 in the X direction is connected to the upper end of the mounting plate 34a1 in the Z direction, and the other end of the plate 34a2 in the X direction is connected to the lower end of the guide plate 34a3 in the Z direction. The plate 34a2 is provided below the heater 33 at a predetermined distance. For example, the plate 34a2 can be provided so as to face the heater 33 and be parallel to the heater 33.

[0080] The guide plate 34a3 is provided at a different position from the mounting plate 34a1 in the X and Z directions. In this case, the guide plate 34a3 is provided above the mounting plate 34a1. The guide plate 34a3 is provided at the same position as the mounting plate 34a1 in the Y direction. The guide plate 34a3 is provided so as to be parallel to the mounting plate 34a1.

[0081] The guide plate 34a3 has a notch 34a3a that penetrates the thickness direction and allows insertion of the heater 33. The notch 34a3a opens at the upper end of the guide plate 34a3 in the Z direction. The notch 34a3a may be a U-shaped notch.

[0082] 8, when the heater 33 is inserted into the notch 34a3a, a gap is provided between the inner wall of the notch 34a3a and the heater 33. The guide portion 34a (guide plate 34a3) prevents the heater 33 from shifting in position in the Y direction, but does not support the heater 33 like the support portion 134 (support plate 134c).

[0083] The rotating portion 34b is provided between the plate 34a2 of the guide portion 34a and the heater 33. The rotating portion 34b contacts the heater 33 and the plate 34a2. When the rotating portion 34b is in contact with the heater 33, the heater 33 does not contact the inner wall of the notch 34a3a of the guide plate 34a3 in the Z direction (the inner wall below the notch 34a3a). The heater 33 may contact one inner wall of the notch 34a3a of the guide plate 34a3 in the Y direction (one side wall of the notch 34a3a). However, the heater 33 is not pressed against the side wall of the notch 34a3a by gravity. The function of the support portion 34 (rotating portion 34b) will be described later.

[0084] Furthermore, while in contact with the heater 33, the rotating part 34b is movable in a direction (X direction) along the central axis of the heater 33 in response to (following) the expansion and contraction of the heater 33. The rotating part 34b has, for example, a cylindrical (solid) or cylindrical (hollow) shape and extends in a direction intersecting the central axis of the heater 33.

[0085] The rotating part 34b is made of a heat-resistant material because it comes into contact with the heater 33. Furthermore, since the rotating part 34b is movable in the extension direction of the heater 33, it is preferable that the rotating part 34b be made of a material that does not generate particles even when it moves. The rotating part 34b can be made of a metal such as stainless steel, for example.

[0086] Next, the function of the support portion 34 will be described. FIG. 9 is a schematic view illustrating the function of the support portion 34. As shown in FIG. As shown by the solid line in FIG. 9, when power is applied to the heater 33 (when ON), the heater 33 is heated by the generated heat, and therefore the heater 33 expands in the direction along the central axis. As shown by the dashed line in FIG. 9, when the application of power to the heater 33 is stopped (OFF), the heated heater 33 cools down, and therefore the heater 33 contracts in the direction along the central axis.

[0087] As described above, the rotating portion 34b is movable while supporting the heater 33. Therefore, as shown in Fig. 9, the rotating portion 34b moves in response to expansion and contraction in a direction along the central axis of the heater 33. In this case, because the rotating portion 34b moves in a rotational manner, it is possible to prevent friction from occurring between the rotating portion 34b and the heater 33 and between the rotating portion 34b and the plate 34a2.

[0088] Furthermore, since the rotating portion 34b supports the heater 33, as described above, the heater 33 does not come into contact with the inner wall below the notch 34a3a of the guide plate 34a3. to When the heater 33 expands and contracts, no friction occurs between the inner wall of the lower side of the notch 34a3a and the heater 33.

[0089] If there is no friction between the rotating part 34b and the heater 33, between the rotating part 34b and the plate 34a2, and between the lower inner wall of the notch 34a3a and the heater 33, the generation of particles can be suppressed.

[0090] As described above, one side wall of the notch 34a3a in the guide plate 34a3 may come into contact with the heater 33, but the heater 33 is not pressed against the side wall of the notch 34a3a. Therefore, even if friction occurs between the heater 33 and the side wall of the notch 34a3a, the amount of particles generated is significantly reduced.

[0091] Therefore, with the support portion 34 according to this embodiment, even if the heater 33 expands and contracts in the direction along the central axis when the heater 33 is turned on and off, the generation of particles can be suppressed.

[0092] Furthermore, if the rotating part 34b is cylindrical (hollow), the weight of the rotating part 34b can be reduced. If the weight of the rotating part 34b can be reduced, the mounting and removal of the rotating part 34b becomes easier, and the rotational movement of the rotating part 34b becomes easier.

[0093] In addition, the rotating portion 34b of If the diameter is reduced, the rotation of the rotating part 34b becomes easier. of The diameter can be equal to or smaller than the diameter of the heater 33. In this way, the force required for rotation of the rotating part 34b is small, making the rotation of the rotating part 34b even easier. If the rotating part 34b can be rotated with a small force, the rotating part 34b can move smoothly in response to the expansion of the heater 33, thereby more reliably preventing the heater 33 and the rotating part 34b from rubbing against each other.

[0094] One rotating part 34b may be provided for one heater 33, or one for multiple heaters 33. In this case, if one rotating part 34b is provided for multiple heaters 33, it is possible to prevent the rotating part 34b from moving in a direction intersecting the direction along the central axis of the heater 33. If the rotating part 34b does not move in a direction intersecting the direction along the central axis of the heater 33, it is possible to prevent friction between the rotating part 34b and the heater 33 and between the rotating part 34b and the plate 34a2.

[0095] For example, the length of the rotating part 34b in a direction intersecting the central axis of the heater 33 (the length in the axial direction of the rotating part 34b) can be set to a length that makes contact with three or more heaters 33. In this way, movement of the rotating part 34b in a direction intersecting the direction along the central axis of the heater 33 can be effectively suppressed. Here, when a force acts on the rotating part 34b in a direction intersecting the direction along the central axis of the heater 33, the central axis of the rotating part 34b gradually deviates significantly from a direction perpendicular to the central axis of the heater 33. When the central axis of the rotating part 34b deviates significantly from a direction perpendicular to the central axis of the heater 33, the contact area between the heater 33 and the rotating part 34b increases, and the area where they rub against each other also increases, causing particles to be generated. Therefore, if the length of the rotating part 34b is set to a length that allows it to come into contact with three or more heaters 33, the load of three or more heaters 33 can be applied to the rotating part 34b. This prevents the load from being applied to parts of the rotating part 34b that are off-center in the longitudinal direction compared to the central part, and therefore prevents force from acting in a direction intersecting the direction along the central axis of the heater 33.

[0096] Furthermore, the length of the rotating portion 34b in a direction intersecting the central axis of the heater 33 (the axial length of the rotating portion 34b) can be set to a length that is 20 times or more the extension amount of the heater 33. For example, if the extension amount of the heater 33 is about 20 mm, the axial length of the rotating portion 34b can be set to 400 mm or more. Setting the axial length of the rotating portion 34b in this manner can effectively prevent the rotating portion 34b from moving in a direction intersecting the direction along the central axis of the heater 33. In this case, too, the central axis of the rotating portion 34b can be prevented from significantly deviating from the direction perpendicular to the central axis of the heater 33, thereby more effectively preventing particle generation.

[0097] As shown in Figure 8, ,centre A heat shield 65 can be provided between the frame 61 and the mounting plate 34a1. The heat shield 65 is provided to prevent heat from the heater 33 from being transferred to the outside of the chamber 10 and to improve the heating efficiency and heat storage efficiency within the chamber 10. As shown in FIG. 9 , the heat shield 65 also has a notch. If the heat shield 65 has a notch, it can prevent the end of the heater 33 from rubbing against the heat shield 65 and generating particles when the heater 33 expands and the end of the heater 33 reaches the position of the heat shield 65. As will be described later, the end of the heater 33 is a non-heated area. Therefore, even if the heat shield 65 has a notch, it can sufficiently block the heat that spreads radially from the portion of the heater 33 inside the rotating portion 34 toward the frame 61.

[0098] Here, for example, heat is more likely to escape to the outside near the ends of the workpiece 100 than at the center of the workpiece 100. Therefore, in order to reduce variations in the in-plane temperature of the workpiece 100, the temperature control of the workpiece 100 (control of the heater 33) may be performed in multiple regions. For example, if the heater 33 is controlled in three regions, namely, two regions near both ends of the workpiece 100 and one region in the center of the workpiece 100, the temperature setting and ON / OFF timing of the heater 33 may differ for each region. For example, it is conceivable to set the temperature higher in the two regions at both ends, where heat is more likely to escape to the outside, than in the center region. If the temperature setting of the heater 33 differs for each region, the amount of expansion and contraction of the heater 33 may differ for each region. Since the temperature setting and ON / OFF timing of the heater 33 are controlled to heat the in-plane temperature of the workpiece 100 uniformly, it is conceivable that the peripheral temperature will also be uniform and the heater 33 will expand at roughly the same speed. However, to be precise, these temperature controls may result in the amount of expansion and contraction of the heater differing for each region. Alternatively, it is conceivable to make the spacing between the heaters 33 closer in the two end regions where heat is more likely to escape to the outside than in the central region. In this case, the number of heaters 33 supported by the rotating part 34b varies depending on the position of the rotating part 34b in the Y direction, which may result in differences in the ease of rotational movement of the rotating part 34b.

[0099] In this case, if one rotating unit 34b is provided for multiple regions where the temperature of the workpiece 100 (control of the heater 33) is controlled, or if one rotating unit 34b is provided across multiple regions, friction may occur between the rotating unit 34b and the heater 33, and between the rotating unit 34b and the plate 34a2. This friction may result in the generation of particles. Alternatively, if the number of heaters 33 supported varies, the ease of rotation of the rotating unit 34b differs between regions that support many heaters 33 and regions that do not. This may result in the central axis of the rotating unit 34b being significantly deviated from the direction perpendicular to the central axis of the heater 33, as described above. This increases the contact area between the heater 33 and the rotating unit 34b, increasing the area where they rub against each other, which may result in the generation of particles.

[0100] Therefore, it is preferable to provide one rotating part 34b for each of a plurality of regions where the temperature of the workpiece 100 is controlled (the heater 33 is controlled). In each region where the temperature of the workpiece 100 is controlled (the heater 33 is controlled), the heater 33 expands and contracts by approximately the same amount. Therefore, if one rotating part 34b is provided for each of a plurality of regions where the temperature of the workpiece 100 is controlled (the heater 33 is controlled), it is possible to suppress friction caused by differences in the amount of expansion and contraction of the heater 33, and ultimately the generation of particles.

[0101] That is, when the temperature control of the plurality of heaters 33 is performed for each of the plurality of regions on the workpiece 100, it is preferable to provide one rotating part 34b for each of the plurality of regions. For example, when the temperature control of the workpiece 100 (control of the heater 33) is performed in multiple regions, a temperature sensor is often provided for each region where temperature control is performed. Therefore, one rotating part 34b can be provided for each temperature sensor. When multiple rotating parts 34b are provided in the Y direction in this way, a small positioning protrusion may be provided on the mounting plate 34a1 to prevent the multiple rotating parts 34b from contacting each other.

[0102] In addition to providing a rotating part 34b in each of a plurality of regions based on differences in temperature control, it is also possible to simply divide the entire unit into two regions and provide a rotating part 34b for each of these regions (i.e., provide two rotating parts 34b in the Y direction). When two rotating parts 34b are provided in the Y direction in this way, one can be removed from the opening / closing door 13 side and the other from the lid 15 side, allowing for efficient removal when performing maintenance, etc.

[0103] 10 and 11 are schematic views illustrating support of the heater 33 by a support portion 36 (corresponding to an example of a second support portion) according to another embodiment. As shown in FIGS. 10 and 11, the support portion 36 has a mounting plate 36a, a plate 36b (corresponding to an example of a second plate), and a holding portion 36c.

[0104] The mounting plate 36a is plate-shaped and is attached to a beam 64 or the like provided on the cassette rack 60 using fastening members such as screws (see FIG. 4).

[0105] Plate 36b has a plate shape and extends toward heater 33. One end of plate 36b is connected to mounting plate 36a. Mounting plate 36a and plate 36b can be integrally formed by, for example, bending a plate material.

[0106] The holding portion 36c is band-shaped and uses a fastening member such as a screw to hold the heater 33. The end of the plate 36b opposite to the mounting plate 36a side is connected to the holding portion 36c using a fastening member such as a screw.

[0107] The support portion 36 (mounting plate 36a, plate 36b, and holding portion 36c) is made of a material that is heat-resistant, does not easily generate particles, and is elastically deformable. The support portion 36 can be made of, for example, a stainless steel plate with a thickness of about 0.5 mm.

[0108] When the heater 33 expands and contracts along its central axis when it is turned on and off, a bending stress acts on the plate 36b via the retaining portion 36c. The plate 36b is made of an elastically deformable material and functions as a leaf spring. That is, the plate 36b is connected to the retaining portion 36c and elastically deforms along the central axis of the heater 33 in response to the expansion and contraction of the heater 33.

[0109] If the plate 36b is elastically deformed in a direction along the central axis of the heater 33, friction between the support portion 36 (holding portion 36c) and the heater 33 can be suppressed even if the heater 33 expands or contracts. Therefore, even if the heater 33 expands and contracts in the direction along the central axis when the heater 33 is turned on and off, it is possible to suppress the generation of particles.

[0110] In the above, the example has been described in which the support portion 34 or the holding portion 36c is provided near the axial end portion of the heater 33. However, it is also possible to provide a plurality of support portions 34 for one heater 33, a plurality of support portions 36 for one heater 33, to provide a support portion 34 and a holding portion 36c for one heater 33, or to use different support portions 34 and support portions 36 for each region where the temperature control described above is performed. That is, at least one of the support portion 34 and the holding portion 36c can be provided.

[0111] Generally, the vicinity of the end of the heater 33 in the axial direction is a non-heated region. of If the support portions 34 and 36 are provided above and below, the in-plane temperature distribution of the workpiece 100 may become uneven. Therefore, it is preferable to provide the support part 34 and the holding part 36c in the non-heated part near the end of the heater 33. Furthermore, by providing the support part 34 and the holding part 36c in the non-heated part, radiation from the heater 33 is not hindered, particularly when the workpiece 100 is being heat-treated in a vacuum inside the chamber 10, and the workpiece 100 can be uniformly heat-treated.

[0112] FIG. 12 is a schematic perspective view illustrating a cassette 50a according to another embodiment. As shown in Figure 12, the cassette 50a, like the cassette 50 described above, has a cassette frame 51, an upper heat equalizer plate 52, a lower heat equalizer plate 53, a side heat equalizer plate 54, a side heat equalizer plate 55, a work support portion 56, a cooling portion 57, and a cassette support portion 58. The cassette 50a further includes a pair of heaters 33. 。 The diameter and length of the heater 33 can be changed as appropriate depending on the size of the cassette frame 51. The heater 33 can be provided outside the area where the workpiece 100 is supported.

[0113] When the heater 33 is provided inside the cassette 50a (cassette frame 51), at least one of the support portion 34 for supporting the heater 33 and the holding portion 36c can be provided, as in the above. For example, heaters 33 can be provided inside the cassette 50a at both ends of the cassette 50a in the X direction. In this case, the door 13 is provided on the front side of the paper in FIG. 12, but the heaters 33 are provided so as to extend in the Y direction. Therefore, the end of the heater 33 on the door 13 side is provided with a support portion 3. 4、 It is not possible to provide a rotating portion 34b, so it is preferable to employ the support portion 36 shown in Figures 10 and 11.

[0114] In this way, even if the heater 33 expands and contracts in the direction along the central axis when the heater 33 is turned on and off, it is possible to suppress the generation of particles inside the cassette 50a (cassette frame 51).

[0115] Although the embodiments have been described above, the present invention is not limited to these descriptions. Any design modifications made by a person skilled in the art to the above-described embodiments are also encompassed within the scope of the present invention as long as they include the features of the present invention. For example, the shape, dimensions, arrangement, etc. of the heat treatment device 1 are not limited to those exemplified, and can be changed as appropriate.

[0116] Furthermore, the elements of each of the above-described embodiments can be combined to the greatest extent possible, and such combinations are also included within the scope of the present invention as long as they include the features of the present invention. [Explanation of symbols]

[0117] 1 Heating treatment device, 10 Chamber, 20 Exhaust section, 30 Heating section, 33 Heater, 33a Terminal, 34 Support section, 34a Guide section, 34a1 Mounting plate, 34a2 Plate, 34a3 Guide plate, 34a3a Notch, 34b Rotating section, 36 Support section, 36a Mounting plate, 36b Plate, 36c Holding section, 50 Cassette, 50a Cassette, 60 Cassette rack, 61 Frame, 62 Receiving member, 100 Work

Claims

1. a chamber in which the workpiece is housed; a plurality of rod-shaped heaters provided inside the chamber; a first support that supports the heater inside the chamber; Equipped with the plurality of heaters are arranged in a direction intersecting the central axes of the heaters, the first support portion includes: a first plate disposed below the heaters so as to intersect with the heaters; a rotating portion disposed between the heaters and the first plate, in contact with the heaters and the first plate, and movable in a direction along a central axis of the heaters; and a guide plate disposed on one end of the first plate toward the center of the chamber, rising from the first plate in a direction approaching the heaters.

2. the guide plate has a notch into which the heater can be inserted, 2. The heat treatment apparatus according to claim 1, wherein the notch prevents the heater from shifting in position in a direction intersecting a central axis of the heater.

3. the rotating portion has a columnar or cylindrical shape and extends in a direction intersecting with a central axis of the heater, The length of the rotating portion in a direction intersecting the central axis of the heater is A length of 20 times or more the elongation amount of the heater, and, a length in contact with three or more of the heaters; 3. The heat treatment device according to claim 1, wherein the heat treatment device is at least one of the above.

4. further comprising an exhaust unit that exhausts the inside of the chamber; 3. The heat treatment apparatus according to claim 1, wherein the rotating portion is provided in a non-heating portion near an end of the heater.

5. The temperature control of the plurality of heaters is performed for each of a plurality of regions of the workpiece, The heat treatment apparatus according to claim 1 , wherein the rotating section is provided in each of the plurality of regions.

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