Polishing tool, polishing support drive structure, and polishing device

Abstract

To realize polishing processing capable of preventing a decrease in polishing accuracy due to deterioration in support driving accuracy and improving productivity.SOLUTION: A polishing tool or a polishing support driving structure according to the present invention is the polishing tool for polishing a workpiece and comprises an internal space a. In the internal space a, a group B of granular bodies b is disposed in a state where the granular bodies can vibrate. Here, the polishing tool refers to a tool directly used for polishing a workpiece such as an optical lens. Examples of polishing tools include a holder for holding the workpiece and polishing members such as a polishing plate or a polishing cup for polishing the workpiece. The polishing support driving structure is the structure that supports or drives the polishing tool. Examples include a pin or a drive arm that supports or drives the holder, or a rotating shaft that supports or drives the polishing member.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a polishing tool, a polishing support and drive structure, and a polishing apparatus. [Background technology]

[0002] Conventionally, various polishing machines have been used to polish workpieces, such as optical lenses. A polishing machine for an optical lens typically uses, as polishing tools, a holder for holding the optical lens and a polishing member for polishing the optical lens held in the holder. Furthermore, the polishing machine is provided with a support and drive structure for the polishing tool, which includes a holder-side support and drive structure for supporting and driving the holder and a polishing member-side support and drive structure for supporting and driving the polishing member.

[0003] For example, in an Oscar-type polishing machine, the holder-side support and drive structure is configured such that the spherical tip of a spool that fits into a recess provided in the holder is connected to the holder at any angle, and the spool is connected to the arm of a periodic motion mechanism that moves back and forth horizontally, thereby oscillating the holder. The polishing member-side support and drive structure is configured such that the polishing member (polishing plate) is fixed to a rotating shaft, which is rotatably supported and connected to a drive source such as a motor. Then, while supplying slurry containing an abrasive between the optical lens attached to the holder and the polishing surface of the polishing member, the optical lens is slid against the polishing surface, thereby performing the polishing process.

[0004] In the above-mentioned polishing apparatus, the polishing accuracy of the optical lens is reduced by vibrations of the drive unit transmitted from the drive system and chatter vibrations caused by the stick-slip phenomenon that occurs between the optical lens and the polishing surface. To address this problem, it has been proposed to insert an elastic body or a cushioning material between the lens mounting section and the drive system, as described in Patent Documents 1 and 2 below. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 7-060627 [Patent Document 2] Japanese Patent Application Laid-Open No. 2001-259984 Summary of the Invention [Problem to be solved by the invention]

[0006] However, while the above-mentioned method of using an elastic body or cushioning member may have the effect of absorbing the vibrations, it reduces the rigidity of the support and drive structure, causing a deterioration in support and drive accuracy.This deterioration in support and drive accuracy has the problem that it is not possible to achieve the desired polishing accuracy for workpieces such as optical lenses, which require high surface accuracy on the polished surface.

[0007] Furthermore, in actual polishing processes, it is necessary to increase the polishing pressure and rotation speed in order to shorten the processing time and improve productivity. However, this increases the vibrations mentioned above, which makes it difficult to achieve both productivity and polishing accuracy for the workpiece.

[0008] Therefore, the present invention is intended to solve the above-mentioned problems, and its object is to realize a polishing process that can prevent a decrease in polishing accuracy due to a deterioration in support and drive accuracy and can improve productivity. [Means for solving the problem]

[0009] In order to solve the above problems, the polishing tool of the present invention is a polishing tool for polishing a workpiece, characterized in that it has an internal space and a group of granular materials arranged in the internal space in a state in which the granular materials can be vibrated. Here, the polishing tool refers to a tool that is directly used when polishing a workpiece such as an optical lens. Examples of polishing tools include a holder for holding the workpiece, and polishing members such as a polishing plate or polishing cup for polishing the workpiece.

[0010] According to the present invention, a group of granular materials is arranged in an internal space provided in a polishing tool, and these granular materials are allowed to vibrate in the internal space, so that vibration energy generated by the drive system or the polishing area during polishing is converted into thermal energy and absorbed as each granular material belonging to the group of granular materials arranged in the internal space collides with the inner surface of the internal space or other granular materials. In this way, since vibrations during polishing are absorbed in the internal space of the polishing tool, vibrations generated during polishing can be suppressed without significantly reducing the rigidity of the polishing tool itself and without using elastic materials or buffer members that cannot suppress the reduction in rigidity.

[0011] In the present invention, it is preferable that a plurality of the internal spaces are provided in which the groups of granular materials are arranged with partition walls between them. By providing a plurality of internal spaces with partition walls between them, it is possible to suppress a decrease in rigidity while ensuring porosity, and also to increase the total area of ​​the inner surfaces of the internal spaces, thereby further improving the vibration energy absorption performance.

[0012] In the present invention, it is preferable that a solid portion without an internal space is formed between the supported portion to which the polishing support and drive structure is connected and the mounting portion where the workpiece is held or the polishing portion against which the workpiece slides, except for the surface portion near the outer surface, and that the internal space is formed in the portion excluding the surface portion and the solid portion. By providing a continuous solid portion between the supported portion and the mounting portion or polishing portion of the workpiece, it becomes easier to ensure rigidity against the driving force and supporting force received during polishing, further improving polishing accuracy and productivity. In this case, it is preferable that the solid portion is located in the center, and the internal space is configured in a ring shape around the center.

[0013] In any of the above-mentioned polishing tools, it is preferable that the entire tool has a seamless, one-piece structure. Such a one-piece structure can be manufactured by a metal 3D manufacturing method such as additive manufacturing. In this case, it is preferable that this manufacturing method uses metal granules. In this case, it is even more preferable that the internal space constituting the granular damper and the group of granules arranged in the internal space are composed of the above-mentioned unsintered granules.

[0014] In the present invention, it is preferable that the tool body has a function as a tool, and a separate damper section detachably attached to the tool body, having the internal space, in which the granular material is arranged in a vibrating state. In this case, the separate damper section is detachably attached to the tool body, and the separate damper section is provided with a damping function using the granular material and the internal space, thereby achieving a vibration absorption effect without reducing the inherent rigidity of the polishing tool. Furthermore, it is possible to retrofit the separate damper section to an existing polishing tool. In this case, it is preferable that the separate damper section and the internal space are configured in a ring shape around the tool body. As described in the previous paragraph, it is preferable that the separate damper section has a seamless, integrated structure. Even in this case, the preferred embodiment described at the end of the previous paragraph can be adopted.

[0015] In these cases, it is preferable to provide reinforcing ribs on the inner surface of the internal space of the surface portion of the workpiece corresponding to the attachment portion or the polishing portion of the workpiece (i.e., the portion facing the attachment surface or polishing surface) to prevent deformation of the surface portion. In this case, it is desirable to form multiple reinforcing ribs radially from the central axis of the polishing tool toward the periphery.

[0016] Next, the polishing support and drive structure according to the present invention is a polishing support and drive structure for supporting and driving a polishing tool, characterized in that it has an internal space, and a group of granular materials is arranged in the internal space in a state in which the granular materials can be vibrated. Here, the polishing support and drive structure refers to a structure that supports and drives the polishing tool. Examples include a spool or drive arm that supports and drives the holder, or a rotating shaft that supports and drives the polishing member.

[0017] In the present invention, it is preferable that the plurality of internal spaces are provided with partition walls between them, which makes it possible to prevent a decrease in rigidity while ensuring porosity and increase the total area of ​​the inner surfaces of the internal spaces, thereby further improving the vibration energy absorption performance.

[0018] In any of the above support and drive structures, it is preferable that the entire structure be a seamless, one-piece structure. Such a one-piece structure can be manufactured using a metal 3D manufacturing method such as additive manufacturing. In this case, it is preferable that this manufacturing method uses metal granules. In this case, it is even more preferable that the internal space that constitutes the granular damper and the group of granules arranged in the internal space are composed of the above-mentioned unsintered granules.

[0019] In the present invention, it is preferable to have a support / drive structure main body that functions as a support / drive structure, and a separate damper section that is detachably attached to the support / drive structure main body, has an internal space, and has a group of granular materials arranged in the internal space so that the granular materials can vibrate. In this way, the separate damper section is detachably attached to the support / drive structure main body, and the separate damper section is provided with a damping function using the granular materials provided with the internal space, thereby achieving a vibration absorption effect without reducing the inherent rigidity of the support / drive structure for polishing. Thus, the term "separate damper structure" also includes an additional separate damper structure that is not an inherent support / drive structure in a polishing machine but is retrofitted to an existing support / drive structure. For example, a separate damper structure fixed to a drive arm connected to a pin connected to a holder, or a separate damper structure fixed to a rotating shaft connected to a polishing member or connected via a bearing, etc. As mentioned in the previous paragraph, the separate damper section is preferably a seamless, integrated structure. In this case, too, the desirable embodiment described at the end of the previous paragraph can be adopted.

[0020] Furthermore, a polishing apparatus according to the present invention comprises a polishing tool for polishing a workpiece and a polishing support / drive structure for supporting and driving the polishing tool, wherein the polishing tool or the polishing support / drive structure has an internal space, and a group of granular materials is arranged in the internal space in a state in which the granular materials can vibrate. More specifically, for example, the polishing tool comprises a holder for holding the workpiece and a polishing member for polishing the workpiece held by the holder, and the polishing support / drive structure comprises a holder-side support / drive structure for supporting and driving the holder and a polishing member-side support / drive structure for supporting and driving the polishing member, and it is preferable that the internal space is provided in at least one of the holder, the polishing member, the holder-side support / drive structure, or the polishing member-side support / drive structure, and that the group of granular materials is arranged in the internal space in a state in which the granular materials can vibrate.

[0021] In each of the above inventions, the polishing tool (holder or polishing member) in which the internal space is provided, or the polishing support / drive structure (holder-side support / drive structure or polishing member-side support / drive structure) is preferably made of a metal material from the viewpoint of thermal conductivity, and the granular material is also preferably made of a metal material from the viewpoint of heat dissipation. Furthermore, the size of the granular material preferably has an equivalent spherical diameter of 1 μm-10 mm, and preferably has an equivalent spherical diameter of 5 μm-2 mm. Furthermore, the space filling ratio of the granular material to the internal space is preferably 50% or more, and preferably 60% or more.

[0022] In addition, in each of the above inventions, the porosity, which is the proportion of the internal space in the polishing tool (holder or polishing member) in which the internal space is provided, or in the polishing support drive structure (holder side support drive structure, polishing member side support drive structure), is preferably within the range of 0.2 (20%) - 0.3 (30%) in order to increase the vibration damping rate while suppressing a decrease in rigidity. [Effects of the Invention]

[0023] According to the present invention, it is possible to prevent a decrease in polishing accuracy due to a deterioration in support and drive accuracy, and to realize polishing processing that can improve productivity. [Brief explanation of the drawings]

[0024] [Figure 1] 1A is an explanatory diagram showing a schematic configuration of a polishing drive unit of an embodiment of a polishing apparatus according to the present invention, and FIG. 1B is a schematic partial cross-sectional view showing the overall configuration of the embodiment. [Figure 2] 1A is an explanatory diagram showing a schematic diagram of the basic configuration of the granular material damper configured in the embodiment of the polishing device shown in FIG. 1, FIG. 1B is a plan view of the polishing drive unit of the embodiment, and FIG. 1C is a longitudinal cross-sectional view of the upper shaft support drive structure of the polishing drive unit. [Figure 3] 2A is a perspective view and a longitudinal sectional view of a holder as a polishing tool used in the polishing apparatus shown in FIG. 1, and FIG. 2C is an explanatory diagram showing the design region and constraint conditions of the holder. [Figure 4]1A is a cross-sectional view showing optimization example A of a holder, which is a polishing tool; FIG. 1B is a cross-sectional view showing optimization example B; and FIG. 1C is a cross-sectional view showing different design examples TO1-TO4. [Figure 5] Graph (a) shows various analytical values ​​(porosity, natural frequency, rigidity) of the four design examples of the solid structure model, TO1, TO2, and TO4 holders, normalized by the values ​​of the solid structure holders, and Graph (b) shows the loss coefficient η, which is the result of a hammering test on prototype holders (No. 1 to No. 4) based on the design examples of the solid models, TO1, TO2, and TO4. [Figure 6] CT images (a)-(d) show four prototype holders (No. 1-No. 4), and a photograph (e) shows a hammering test being performed on the polishing drive unit using these holders. [Figure 7] 1A is a graph showing vibration spectra when four prototype holders No. 1 to No. 4 are used, and FIG. 1B is a graph showing an enlarged portion of the vibration spectra. [Figure 8] 1A is a perspective view of a polishing plate, which is a polishing tool (polishing member), FIG. 1B is a half cross-sectional view showing the design area and constraint conditions of the polishing plate, and FIG. 1C is a half cross-sectional view showing a design example. [Figure 9] 1A is a cross-sectional view showing the cross-sectional structure of a polishing plate after manufacture, and FIG. 1B is a graph showing a comparison of the loss factor η between the presence and absence of granular material in a hammering test using the polishing plate. [Figure 10] 10 is a graph showing a comparison of vibration spectra between polishing plates with and without granular material. [Figure 11] 1A is a perspective view, FIG. 1B is a plan view, and FIG. 1C is a side view showing a separate damper structure (assembly type) attached to an upper shaft support drive structure. [Figure 12] Photographs (a) and (b) show the separate damper structure (assembly type) attached to the upper shaft support drive structure of the polishing drive unit of the polishing machine. [Figure 13] 10 is a graph showing a comparison of acceleration amplitude results with and without a separate damper structure (assembly type). [Figure 14]10 is a graph showing a comparison of vibration spectra between the presence and absence of a separate damper structure (assembly type). [Figure 15] 10 is a photograph showing a comparison between a polishing drive unit of a polishing apparatus equipped with a separate damper structure (integrated type) and the polishing drive unit before the attachment. [Figure 16] This is a perspective view of a separate damper structure (integrated type). [Figure 17] FIG. 1 is an exploded perspective view showing the internal structure of a separate damper structure (integrated type). [Figure 18] FIG. 1 is an exploded cross-sectional view showing the internal structure of a separate damper structure (integrated type). [Figure 19] FIG. 10 is a perspective view showing a separate damper structure (integrated type) disposed on a base member of an upper shaft support drive structure of a polishing drive unit of a polishing machine. [Figure 20] This is a graph comparing the vibration damping waveforms of a solid test piece O and a test piece A5 having a granular damper inside. [Figure 21] 1 is a graph showing the relationship between the rigidity and the porosity of each of test specimens O, A1-A6, B1-B5, and C. [Figure 22] 1 is a graph showing the relationship between the loss factor and the porosity of each of test specimens O, A1-A6, B1-B5, and C. DETAILED DESCRIPTION OF THE INVENTION

[0025] Next, an embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, the overall configuration of one example (embodiment) of a polishing apparatus using an embodiment of a polishing tool and a polishing support / drive structure according to the present invention will be described with reference to Figs. 1 and 2.

[0026] The polishing apparatus used in this embodiment is an Oscar-type polishing apparatus, which polishes an optical lens as a workpiece by sliding a holder that holds the optical lens and a polishing dish, as shown in Fig. 1(a). In the illustrated Oscar-type apparatus, the holder is connected to the tip of a spool so that the angle can be freely adjusted, and the holder is oscillated by driving an arm that holds the spool, and the polishing dish is rotated around its axis, causing the optical lens to slide against the polishing surface.

[0027] As shown in FIG. 1(b), the polishing apparatus 100 of this embodiment includes a holder 10 and a polishing dish 20 as polishing tools. The holder 10 is a tool for holding a workpiece, and in the illustrated example, it is a lens holder for holding an optical lens, which is the workpiece. The polishing dish 20 is a tool for polishing the workpiece, and in the illustrated example, it has a concave polishing surface for polishing the optical lens. However, depending on the shape of the workpiece, it may have a convex polishing surface or a flat polishing surface. These polishing surfaces are typically formed by attaching a polishing material such as a polishing pad to the surface of the polishing tool, but this is not limited thereto. The polishing surface may be a surface that has been subjected to some kind of coating treatment, or it may be the material of the tool itself. Furthermore, even if the polishing surface itself does not have abrasive properties, a polishing action may be generated by supplying a slurry containing an abrasive. Polishing tools also include not only polishing dishes but also various polishing members such as polishing cups and polishing turntables.

[0028] 2(b) and 2(c), the holder 10 is supported and driven by a kanzashi 31, a drive arm 32, a rotating shaft 33, a journal portion 34, an eccentric drive shaft 35, a rotor 36, and a drive motor 37, which constitute the upper shaft support drive structure 30. The eccentric drive shaft 35 engages with an engagement hole 34a formed in the base body of the journal portion 34 at a position eccentric with respect to an axis 34x, and when the drive motor 37 rotates the rotor 36, which has the eccentric drive shaft 35 at an eccentric position, the journal portion 34 rotates alternately in forward and reverse directions around the axis 34x, whereby the kanzashi 31, the drive arm 32, and the rotating shaft 33 swing left and right. Although the illustrated polishing apparatus 100 has a structure in which the upper shaft is swung around the center, depending on the type of polishing apparatus, as shown in Fig. 1(a), the holder 10 may be driven so as to make a linear reciprocating motion in the horizontal direction by the upper shaft support / drive structure 30, or the holder 10 may simply be driven to rotate around a predetermined rotation axis. Also, the upper shaft support / drive structure 30 may be configured to be adjustable in inclination angle of the axis 34x, or may be an upper shaft swung type device that swung the axis 34x.

[0029] The polishing dish 20 is rotated about an axis 42x by a tool mounting portion 41, a rotary drive shaft 42, and a drive motor 43, which constitute a lower shaft support and drive structure 40. The lower shaft support and drive structure 40 may be configured so that the inclination angle of the axis 42x is adjustable, or may be a lower shaft swinging type device that swings the axis 42x. That is, although an Oscar-type polishing machine equipped with a sling 31 is illustrated in this embodiment, the present invention can use polishing machines with various structures, such as a spherical core swinging type or a lower shaft swinging type.

[0030] In the various polishing apparatuses described above, such as the polishing apparatus 100, the polishing drive unit in which the workpiece, such as an optical lens, is polished by sliding between the workpiece and the polishing surface of the polishing tool generates vibrations, such as drive system vibrations depending on the drive mode and chatter vibrations depending on the polishing conditions, which degrade the quality of the polished surface of the workpiece. In the illustrated example, polishing is performed by sliding between the polishing surface 1a of the optical lens 1 and the polishing surface of the polishing plate 20, for example, the surface 21a of the polishing pad 21. The chatter vibrations are thought to be caused by vibrations due to the stick-slip phenomenon between the polishing surface 1a and the polishing surface 21a, which resonate in the polishing drive unit of the polishing apparatus, resulting in problems. Here, the polishing drive unit includes polishing tools such as the holder 10 and the polishing tray 20, and a polishing support drive structure that supports and drives these polishing tools, i.e., an upper shaft support drive structure that supports and drives the holder 10, which includes a spool 31, drive arm 32, rotating shaft 33, shaft support portion 34, eccentric drive shaft 35, rotating body 36, and drive motor 37, and a lower shaft support drive structure that supports and drives the polishing tray 20, which includes a tool mounting portion 41, rotating drive shaft 42, and drive motor 43.

[0031] Typically, increasing the polishing driving force (e.g., the amount of polishing sliding, such as the oscillation speed of the upper shaft and the rotation speed of the lower shaft) and the polishing pressure applied between the polished surface 1a and the polishing surface 21a) increases the polishing efficiency (speed) and productivity. However, the stick-slip phenomenon also becomes more pronounced and defects become more likely as the polishing driving force increases. Therefore, by absorbing and reducing vibrations without reducing the rigidity of the polishing tool and the polishing support and drive structure as much as possible, it is possible to maintain or significantly improve polishing quality while increasing productivity. Furthermore, the polishing apparatus 100 may have a resonance point (natural frequency) that is prone to vibration due to its structure. At this resonance point, large amplitudes are generated by vibration energy generated for various reasons, resulting in deformation of various parts of the polishing apparatus 100 and causing a decrease in the polishing accuracy of the optical lens being processed.

[0032] In this embodiment, a granular material damper A, as shown schematically in FIG. 2(a), is configured in a polishing tool or a support and drive structure for a polishing machine. This granular material damper A forms an internal space a in the polishing tool or the support and drive structure for a polishing machine, and a group B of granular materials b is disposed in this internal space a. In the illustrated example, a large number of granular materials B are filled in a state in which they can collide with the inner surface of the internal space and with other granular materials, i.e., the granular materials b are vibrated. Here, the term "polishing tool" refers to a tool directly used when polishing a workpiece such as an optical lens. Examples of polishing tools include holders for holding the workpiece and polishing members such as polishing plates and polishing cups. Because the large number of granular materials (group) B filled in the internal space a are vibrated, vibration energy generated by the drive system or the polishing area during polishing is converted into thermal energy and absorbed when the large number of granular materials B filled in the internal space a collide with the inner surface of the internal space a and with other granular materials b.

[0033] In this embodiment, the group B of granules b, i.e., the individual granules b constituting the numerous granules B, are not particularly limited. However, it is generally preferable that the equivalent sphere diameter for the same volume be 1 μm-10 mm (representative values ​​such as average particle size or median), and particularly preferably within the range of 5 μm-2 mm. If the diameter exceeds these ranges, handling becomes difficult and adverse effects due to the movement of the granules b may occur. If the diameter falls below these ranges, the vibration damping effect may be reduced. In particular, considering vibration damping properties, the diameter is preferably within the range of 15 μm-150 μm, and more preferably within the range of 20 μm-50 μm. Furthermore, mixing two or more types of granules with different particle sizes may facilitate an increase in the space filling rate. The shape of the granules b is preferably close to a sphere, and in particular, a sphere is desirable. From the viewpoint of thermal conductivity, the material of the granules b is preferably metal. As for metals, iron alloys such as stainless steel and copper alloys, which have particularly high specific gravity, are desirable. Furthermore, from the viewpoint of heat dissipation, etc., it is desirable that the partition wall (granular damper A itself) that forms the internal space a is also made of metal. Regarding the formation mode of the granular damper A, in a polishing tool, it is preferable to form the internal space a inside the polishing tool itself from the viewpoint of vibration absorption. However, a separate damper unit may be attached to the polishing tool. Furthermore, in a polishing support drive structure, the internal space a may be formed in the existing support drive structure itself, but it is preferable to attach an additional separate damper unit that forms the granular damper A to the existing support drive structure. When forming the granular damper A inside the polishing tool or the existing polishing support drive structure itself, it is preferable to perform topology optimization analysis to ensure a balance between the rigidity and vibration absorption of the tool or support drive structure.

[0034] When a group B of granular materials b (a large number of granular materials) is placed in the internal space a of the granular material damper A, the group B of granular materials b can be placed in various states. In the present invention, the multiple granular materials b contained in the internal space a are vibrable. More specifically, the granular materials b can collide with the inner surface of the internal space a or with other granular materials b due to external vibrations or acceleration. While the number of granular materials b contained in the internal space a is not particularly limited, a space filling ratio that allows the granular materials b to easily fill the internal space a, for example, a range from sparse packing to random packing, i.e., approximately 50-60%, is generally preferred. This space filling ratio is more preferably in the range from random close packing to close packing, i.e., approximately 60-74%. However, if there is a particle size distribution of the granular materials, the value of the space filling ratio will also vary to some extent from the above range. When using additive manufacturing methods with a powder sintering 3D printer, the granular damper can be formed directly without discharging the unsintered material powder. In this case, it has been confirmed that when the particles are high-density metal spheres, the space filling rate of the powder is about 60%.

[0035] Furthermore, although it is preferable that the internal space a is closed as shown in the figure, it is acceptable for it to have openings as long as they do not interfere with the operation of the polishing drive unit. In particular, even if there are pores small enough to allow the granular material b to pass through, in many cases the structure can be configured so that this does not interfere with the polishing process itself. Even if there is an obstacle, the openings or pores can be closed with a lid or plug to eliminate the problem.

[0036] (First Example) First, we will explain an example in which the granular material damper A is built into the holder 10. Figures 3(a) and (b) show the shape and structure of a holder (lens holder) 10 used as a polishing tool. The holder 10 consists of a holder body 11 made of a metal such as aluminum and a resin protective ring 12 fitted around the holder body 11. The holder body 11 has a mounting portion (mounting surface) 11a for the optical lens 1, and a fitting portion 11b on the opposite side (top surface) of the mounting portion 11a that receives a spool 31 and engages with the engagement end of the spool 31 in a freely angular manner. When designing the internal space a in the holder 10, a design area excluding the surface portion of the holder body 11 with a thickness d was set as shown in Figure 3(c). In Figure 3(c), d = 1 mm. In this case, by removing the surface portion of thickness d, the fitting portion 11b, which engages with the leading engagement end of the spool 31, is removed from the design region, leaving only the ring-shaped peripheral portion of the fitting portion 11b. In other words, a solid portion with no continuous internal space is formed in the center between the attachment portion 11a, which contacts the optical lens 1, the workpiece, and the fitting portion 11b, to which the spool 31, the upper shaft support and drive structure, is connected. Note that in this embodiment, a solid portion is formed in the center as a result of setting the thickness, but regardless of the thickness setting, a solid portion with no continuous internal space a may be intentionally provided between the attachment portion 11a, which contacts the optical lens 1, the workpiece, and the fitting portion 11b, which engages with the spool 31, the support and drive structure.

[0037] The design domain shown in Figure 3(c) was established. The constraints were that the mating portion 11b was completely fixed as a constraint surface, a vertical force of 100 N was applied to the mounting surface 11a, and a torque of 1 Nm was applied around the central axis. The optimization conditions were a maximum of 30% of the mass of the design domain, and the objective function was to maximize stiffness. Figures 4(a) and (b) show examples of optimization results performed using the commercially available analysis program Altair Inspire 2020. The analysis results indicated that the internal support and drive structure with an internal space was shaped to support the mounting surface 11a from behind, with the mating portion 11b at its center. By changing the maximum and minimum widths of the structural elements and the size of the minimum gap during optimization, two design examples were obtained: a thin structure with a segmented support structure, as shown in Optimization Design A in Figure 4(a), and a thick structure with a consolidated support structure, as shown in Optimization Design B in Figure 4(b).

[0038] Using the results of the topology optimization described above, we designed the internal space of the holder 10, where the granular damper is located. In designing this internal space, it is important to ensure a balance between rigidity and vibration damping. The total volume of the internal space (equivalent to the damper capacity) was varied to create four design examples TO1-TO4, shown in Figures 4(c)-(f). Here, we assumed that the holder 10 would be integrally molded using additive manufacturing (AM), with the mounting portion (mounting surface) 11a facing upward. The downward-facing surface was configured with an inclination angle of 45 degrees or greater, so that support was not required during AM. Design example TO1 is a modified version of optimized design example A suitable for AM. Design example TO2 is a modified version of optimized design example B suitable for AM. Design example TO3 is based on design example TO2, but with increased wall thickness for increased rigidity. Design example TO4 is based on design example TO3, but with increased wall thickness for increased rigidity. In each design example, an annular internal space a was formed around the solid portion extending from the center of the mounting portion 11a to the fitting portion 11b. In each design example, two or more internal spaces a were formed.

[0039] A structural analysis of the above design examples was conducted to investigate how the inclusion of internal spaces affects the rigidity and natural frequency. The graph in Figure 5(a) shows the analytical values ​​for the porosity (the ratio of the total volume of the internal space a to the total volume of the holder body 11), first-mode natural frequency, and rigidity of design examples TO1-TO4, normalized by the values ​​for the solid model, based on a solid-structure holder design (solid model). The overall trend is that the rigidity and natural frequency decrease as the porosity increases. From these results, comparing the narrow-structure design TO1 with the wide-structure design TO2, the rigidity is comparable, but the porosity of design TO1 is greater. Therefore, when granular material is introduced into the internal spaces, design TO1 exhibits higher vibration absorption (damping) than design TO2. In other words, creating more internal spaces separated by partitions (partition walls) improves vibration damping relative to rigidity. In particular, in the case of holder 10, mounting portion 11a for mounting optical lens 1 is supported from the inside by partitions, and therefore in order to ensure the rigidity of mounting portion 11a and prevent a decrease in the polishing accuracy of optical lens 1 due to deformation of mounting portion 11a during polishing, it is preferable to support mounting portion 11a evenly over its entire surface, and therefore an internal structure in which the number of internal spaces is increased or the number of partitions is made thinner is considered to be effective. In optimization example A, the number of internal spaces is about 6-7, 2 in optimization example B, 4 in TO1 above, 2 in TO2 above, 2 in TO3 above, and 2 in TO4 above.

[0040] Based on the above design examples, four types of holders, designated as solid models, TO1, TO2, and TO4, were prototyped using additive manufacturing (AM). Because AM can cause deformation of the molded object (particularly warping of the mounting surface 11a) due to thermal stress during fabrication, eight 1-mm-thick ribs were formed radially from the center along the inside of the mounting surface 11a. AM was performed using a TRUMPF TruPrint 1000 3D printer and aluminum alloy powder with an average particle size of 30 μm. Figures 6(a)-(d) show cross-sectional images of each prototype holder measured with an X-ray CT scanner. It can be seen that the internal space was created as designed. Unlike other areas, the internal space was not sintered using a laser or other method; instead, the internal space was closed by laminating unsintered granular material in the corresponding area. This resulted in a granular damper being created inside the holder 10. The granular material filling the internal space can be made easier by using the metal powder used in the additive manufacturing method without removing it. However, this does not rule out the use of granular material other than that used for manufacturing. The granular material is left in the state it was supplied in before sintering without any special pressure application, depending on the particle size distribution of the granular material, so the space filling rate is thought to be around 50-74%. The mating portion 11b was shaped in advance while leaving a processing allowance, and the desired engagement structure was formed by machining (cutting) after shaping.

[0041] To compare the vibration damping of the prototype holders, we attached the prototype holders to the polishing drive unit of a polishing machine as shown in Figure 6(e) and conducted a hammering test. The polishing tray 20, optical lens 1, holder 10, and spool 31 were attached to the polishing machine and the hammering test was conducted in a stationary state. The load on the spool 31 was set to the same as the polishing conditions. The side of the polishing tray 20 was vibrated with a hammer, and the vibration transmitted to the polishing tray 20 and the magnitude of its damping were evaluated using an acceleration sensor installed at the top end of the spool 31. The logarithmic damping rate δ, damping ratio (damping factor) ζ, loss factor η, and frequency were calculated from the damped waveform detected by the acceleration sensor. Measurements were performed 20 times for each prototype holder, and the average values ​​were calculated. Figure 5(b) shows the loss factor η for each prototype holder. Table 1 below lists the hammering test results.

[0042] [Table 1]

[0043] In the above test, clear vibration damping was achieved even though the granular damper was simply formed integrally inside the holder 10 of the polishing tool. Also, prototype holder No. 2 corresponding to TO1 had the highest vibration absorption, followed by prototype holder No. 3 corresponding to TO2, which confirmed that it is more effective to have a high porosity and multiple finely spaced internal spaces.

[0044] Next, a polishing test was conducted using the prototype holder. Uniaxial acceleration sensors were installed at four locations: the top surface of the frame of the base of the machine (below the rotational drive mechanism of the polishing tray 20); the top surface of the fixed part of the drive arm 32 of the kanzashi 31; the top surface of the drive arm 32; and the top surface of the frame of the arm drive mechanism. Recording was performed at a sampling frequency of 10 kHz. The polishing machine automatically stopped 3 minutes and 30 seconds after the start of polishing. Each sensor recorded data for 4 minutes. Figure 7(a) shows the measurement results of the acceleration sensor installed on top of the kanzashi 31. Figure 7(b) shows an enlarged view of the frequency range from 100 Hz to 400 Hz. These polishing data also show that prototype holders No. 2 to No. 4 all exhibited reduced vibration compared to the solid prototype holder No. 1. Prototype holders No. 2 and No. 3 in particular demonstrated a high vibration damping effect. It can be seen that vibration acceleration at the resonance point was significantly suppressed.

[0045] In this embodiment, the mounting portion 11a, which holds the optical lens 1 of the holder 10, and the fitting portion 11b for the pin 31 are configured as a continuous solid portion with no internal space. A granular damper portion, consisting of an internal space filled with the above-mentioned numerous granular materials, is configured around this solid portion, making it easier to ensure the rigidity of the holder 10 in the pressure and rotation directions during polishing. Thus, this embodiment provides the vibration damping function of the granular damper portion while reducing the impact of reduced rigidity on polishing accuracy. In particular, in the illustrated example, the solid portion is located in the center of the holder 10, and the internal space is configured in a ring shape around the center, which makes it less likely to affect the polishing operation of the holder 10 and also allows for a good weight balance.

[0046] In the above embodiment, an internal space is formed in the holder 10 itself, and a granular damper is built into it. However, a separate granular damper may be attached to the holder 10 in a location that does not interfere with the polishing operation, such as the upper periphery or outer periphery of the holder. In this case, it can be retrofitted to an existing polishing machine, and the manufacturing method, shape, and structure can be more flexible. This allows for increased damper volume and reduced overall manufacturing costs. Furthermore, attaching a separate granular damper is one example in which the holder 10 itself functions as the solid portion described above, ensuring rigidity during polishing. Furthermore, a separate granular damper provided outside this solid portion can provide vibration damping. Even in this case, it is preferable to configure the separate damper and its internal space in a ring shape around the holder 10.

[0047] The holder 10 of this embodiment is easy to handle because it has a seamless, integrated structure. Furthermore, compared to an assembled structure in which multiple separate parts are assembled, it does not generate unnecessary vibrations or resonance, and can reliably absorb vibrations.

[0048] (Second Example) Next, we will explain an example in which the above-mentioned granular damper A is incorporated into a polishing dish 20 used as a polishing tool. Figure 8(a) shows a perspective view of an example of the polishing dish 20. However, polishing dishes 20 may have not only a concave polishing surface as shown in the figure, but also convex or flat polishing surfaces. Instead of a polishing dish, polishing members such as polishing cups or polishing discs may also be used. In this polishing dish 20, the surface of the polishing pad 21 serves as the polishing surface 21a. The 2.5 mm-thick surface portion of the polishing dish 20 was designated the non-design region, and the remaining interior portion was designated the design region. A topology optimization analysis was performed using the same method as described above.

[0049] As shown in Figure 8(b), the outer surface (male thread portion) of the shaft mounting portion 22 was used as the constraint surface, and a vertical force of 100 N was applied to the polishing surface 21a, while a torque of 1 Nm was applied around the central axis. The optimization conditions were a constraint that the mass of the design domain be kept at a maximum of 30% or less, and the objective function was to maximize rigidity. The optimization results are shown in Figure 8(c). A partition wall with an inverted Y-shaped cross section was provided as a support structure at the radially intermediate portion of the polishing surface 21a. Three internal spaces were formed: one in the center, one annular internal space in the radially intermediate portion, and one annular internal space at the outer periphery.

[0050] Based on the optimization results, modifications were made to the cross-sectional structure shown in Figure 9(a) for manufacturing by additive manufacturing, such as inclining the upper surface of the cavity at an angle of 45 degrees or more. Here, sand drainage holes were formed connecting the internal space to the outside to compare the vibration absorption effect between filling the internal space with granular material and removing the granular material to create a hollow space. Furthermore, although not shown, 1.5 mm thick ribs were formed in the internal space extending radially from the center to suppress thermal deformation during manufacturing. Furthermore, the shaft mounting portion 22 was machined (cut) to form a threaded structure after manufacturing. The metal powder used in additive manufacturing was stainless steel (equivalent to SUS316) with an average particle size (equivalent to a spherical diameter) of 35 μm. The granular material filling the internal space was the same metal powder used in additive manufacturing, without removing any of the powder. Although the granular material depends on the particle size distribution of the granular material, the space filling rate is thought to be around 60-80% because the granular material was left in the state in which it was supplied before sintering without any particular pressure application.

[0051] As described above, a polishing dish 20 with three internal spaces 23, 24, and 25 was manufactured using the additive manufacturing method. Here, a solid portion without a continuous internal space was formed from the center of the polishing support surface 20a, which supports the polishing surface 21a of the optical lens 1 to be polished, to the shaft mounting portion 22 connected to the rotary drive shaft 42. Each solid portion had annular internal spaces 23, 24, and 25 formed around it. A hammering test similar to that described above was conducted on a polishing dish with the internal space filled with granular material and a polishing dish with the internal space removed to leave it hollow. The side of the polishing dish 20 was vibrated with a hammer, and the vibration transmitted to the polishing dish 20 and its damping magnitude were evaluated using an acceleration sensor installed at the top end of the sprocket 31. The logarithmic damping rate δ, damping ratio (damping factor) ζ, loss coefficient η, and frequency were determined from the damped waveform detected by the acceleration sensor. Measurements were performed 20 times for each prototype holder, and average values ​​were calculated. Figure 9(b) shows the loss coefficient η of each prototype holder. Table 2 below shows the results of the hammering test, which was carried out in the same manner as described above.

[0052] [Table 2]

[0053] When a polishing plate with a granular damper whose internal space is filled with granular material was used, the loss coefficient η increased by 71% compared to when a hollow polishing plate with no granular material was used. In particular, in the case of polishing plate 20, it is thought that a large vibration damping effect was obtained due to the large damper volume.

[0054] Next, a polishing test was conducted using a prototype polishing dish 20 with an internal space, similar to the case of the prototype holder described above. Here, the polishing pad 21 described above was attached to the polishing support surface 20a of the polishing dish 20. Figure 10 shows the results of a spectrum analysis of the acceleration of the upper part of the squeegee 31 during polishing. It can be seen that the polishing dish 20 with a granular damper has a significantly lower resonance peak than a dish with a hollow internal space. While the present embodiment employs an integrated granular damper within the polishing dish 20, a separate, annular, e.g., torus-shaped, damper may be attached to the periphery of a conventional polishing dish to absorb vibrations from the polishing dish and other polishing components. This allows for retrofitting to existing polishing equipment and allows for greater flexibility in manufacturing methods, shape, and structure, thereby improving the effectiveness of increased damper volume and reducing total manufacturing costs. Furthermore, by attaching this separate damper portion, as in the present embodiment, the polishing dish 20 itself functions as the solid portion (center portion) described above, thereby ensuring rigidity during polishing, and the separate damper portion provided in a portion other than this solid portion provides vibration damping. Even in this case, it is desirable to configure the separate damper portion and its internal space in a ring shape around the polishing dish 20.

[0055] The polishing dish 20 of this embodiment is easy to handle because it has a seamless, one-piece structure. Furthermore, compared to an assembled structure made up of multiple separate parts, it does not generate unnecessary vibrations or resonance, and can reliably absorb vibrations.

[0056] (Third Example) Next, as an example of providing the above-mentioned granular damper A in a polishing support drive structure, an embodiment will be described in which a separate damper is additionally attached to the drive arm 32 to absorb vibrations in the polishing drive unit of the polishing machine. As with the polishing tool embodiment described above, a granular damper may be formed inside the existing support drive structure for a polishing support drive structure, but because the existing support drive structure is used to ensure sufficient support drive rigidity, it is preferable to achieve vibration absorption by an additional structure without reducing the support drive rigidity.

[0057] FIG. 11 shows a perspective view (a), a plan view (b), and a side view (c) of the separate-type damper 50. FIGS. 12(a) and 12(b) show the separate-type damper 50 mounted on a polishing machine equipped with a reciprocating upper shaft. The separate-type damper 50 is fixed to the drive arm 32 of the polishing machine and has a box-like structure with an internal space (not shown). In this example, a resin 3D printer was used to form the separate-type damper 50 from ABS resin with an openable lid. The interior of the separate-type damper 50 housing was filled with 370 g of stainless steel (equivalent to SUS316) granules with an average particle size of 35 μm. The total weight of the separate-type damper 50 after filling with the granules was 472 g.

[0058] When the separate damper 50 is installed, the pressure applied to the polishing drive unit increases by the weight of the separate damper 50. Therefore, in the polishing machine used in the experiment, the pressure (pressing force) during polishing was set to the same level as when the separate damper 50 was not installed, so the load of the pneumatic cylinder (not shown) was reduced. The pressure applied to the tip of the kanzashi 31 was approximately 32 N, almost the same as before the separate damper was installed. The polishing test was conducted under the same sampling conditions and for the same polishing time as described above. Figure 13 shows the overall acceleration values ​​detected by the acceleration sensor on the top of the kanzashi 31, comparing the results with and without the separate damper 50. When the separate damper 50 was installed, the vibration acceleration values ​​were reduced to less than two-thirds. Figure 14 also shows the results of a spectrum analysis of the detected data. By installing the separate damper 50, the vibration peak value was reduced to approximately one-third, resulting in a broad, gentle spectrum.

[0059] (Fourth Example) Next, an embodiment of the separate-type damper 60 will be described. The separate-type damper 60 in this embodiment is installed on the base of the support shaft 34 of the polishing apparatus shown in the photograph of FIG. 15. This polishing apparatus is the polishing apparatus 100 equipped with the upper shaft drive mechanism shown in FIGS. 1 and 2. The separate-type damper 60 is not attached to the polishing drive unit on the right side of FIG. 15, so that its original structure can be seen, while the separate-type damper 60 attached to the polishing drive unit on the left side can be seen. In this embodiment, the separate-type damper 60 is constructed as a seamless, integrated structure. However, for convenience, FIGS. 17 and 18 show the separate-type damper 60 in an exploded state to show its internal structure. However, it is also possible to use a structure in which disassembled parts are assembled, as shown in FIGS. 17 and 18.

[0060] Although the separate-type damper 50 of the third embodiment and the separate-type damper 60 of the fourth embodiment are both configured as separate structural components detachably attached to the drive arm 32 and the pivot support 34, which correspond to the support and drive structure, each of the support and drive structures, such as the pin 31, drive arm 32, and pivot support 34, may be configured as a seamless, integrated structure. In this case, this integrated structure can be manufactured by a 3D printing method using metal granules, such as the additive manufacturing method described above. Even in these cases, each support and drive structure is easy to handle, and compared to an assembled structure in which multiple separate parts are assembled, unnecessary vibrations and resonance are not generated, ensuring a reliable vibration absorption effect.

[0061] The separate-type damper 60 of this embodiment has the overall shape shown in FIG. 16 and has a structure in which multiple internal spaces are partitioned in a honeycomb-like planar configuration, as shown in the exploded perspective view of FIG. 17 and the exploded cross-sectional view of FIG. 18. This separate-type damper 60 is integrally formed by additive manufacturing and is finally fixed to the base of the support member 34 with bolts or the like. The separate-type damper 60 has a lower layer portion 60A, a middle layer portion 60B, and an upper layer portion 60C. The lower layer portion 60A is formed with two internal spaces 61 and 62, and the middle layer portion 60B has multiple internal spaces 63 arranged in a planar configuration by honeycomb-structured partition walls. The upper layer portion 60C has a lid-like structure that closes the internal space 63 from above. The separate-type damper 60 having this structure is integrally formed by additive manufacturing. 15 and 19, the separate damper 60 can be fixed to the base 34B of the pivot support 34 with bolts or fixing screws. Each of the internal spaces 61-63 is filled with a large number of granules, as the metal powder used in the additive manufacturing method is left unsintered. The space filling rate of the granules is approximately 60-65%.

[0062] The separate-type damper 60 of this embodiment is easy to handle because it has a seamless, one-piece structure. Furthermore, compared to an assembled structure in which multiple separate parts are assembled, it does not generate unnecessary vibrations or resonance, and can reliably absorb vibrations.

[0063] Finally, we will explain the experimental data showing the general vibration absorption performance of granular dampers. A square bar-shaped test piece with external dimensions of 8 mm x 8 mm and a total length of 95 mm and a square cross section was used. One 20 mm long end was used as the fixed end, gripped in a vise, and the acceleration on the free end was measured when an impulse hammer was used to strike the area near the fixed end. The test piece was manufactured using additive manufacturing with a powder sintering 3D printer (TRUMPF, TruPrint1000) using SUS316L gas-atomized powder and metal powder with a particle size of 35.40 μm (median). The solid O was formed, and the damper structure had a cavity extending from the free end to the surface, with unsintered powder remaining in the cavity to form a group of granular materials. The A series (A1-A6) had porosities of 0.04, 0.08, 0.16, 0.23, 0.31, and 0.39, respectively, as a single internal space extending toward the fixed end. The B series (B1, B2, B3) had 16 internal spaces of the same size arranged longitudinally with partitions between them, 8 internal spaces of the same size arranged longitudinally with partitions between them, 4 internal spaces of the same size arranged longitudinally with partitions between them, 4 internal spaces of different sizes arranged longitudinally with partitions between them, and 2 internal spaces of the same size arranged longitudinally with partitions between them, as shown in Figure 1. Furthermore, specimen C was tested by discharging granular material from the internal space, which had the same void ratio of 0.31 as specimen A5, leaving the internal space hollow. The space filling rate of specimens other than specimen C is considered to be approximately 60%. Since specimens B1-B5 all had the same partition wall thickness, the void ratios of the internal spaces were 0.22, 0.27, 0.29, 0.29, and 0.31, respectively, and the void ratio decreased as the number of internal spaces increased.

[0064] First, a comparison of the vibration waveforms of solid specimen O and specimen A5 is shown in Figure 20. It can be seen that specimen A5, which has a granular damper built inside, has a sharp decrease in amplitude compared to specimen O. In addition, specimen A5 has a slightly higher natural frequency than specimen O.

[0065] Next, to compare the beam strength, structural analysis software (ANSYS Workbench 2020 R2) was used to calculate the stiffness against bending load. Here, the inverse of the displacement when a constant load is applied to the free end was considered stiffness, and it was evaluated relative to the solid state (specimen O). The results are shown in Figure 21. For specimens A1-A6 in the A series, stiffness decreased with increasing porosity. This is likely due to the internal space formation method, in which the internal space expands toward the fixed end as the porosity increases. While a certain degree of stiffness is maintained up to a porosity of approximately 0.25, taking into account the above-mentioned influence, a certain degree of stiffness remains up to a porosity of approximately 0.3. When multiple internal spaces are formed, the inclusion of partition walls as part of the support structure is likely to have an effect on maintaining stiffness.

[0066] Additionally, hammering tests were conducted to determine the natural frequency of each specimen and the loss factor η near the first mode. In the A series, the natural frequency forms a convex curve with a peak near a porosity of 0.19 (midway between A3 and A4). This is thought to be due to the balance between mass and rigidity. In the B series, the natural frequency changes depending on the porosity and the number and arrangement of partition walls.

[0067] Furthermore, as shown in Figure 22, the loss factor η increases overall with increasing porosity, but appears to saturate at porosities of approximately 0.25-0.3. Furthermore, the loss factor η was large for specimens A4, A5, and A6, which had large internal spaces and high porosities. In the B series, specimens B2-B5 all exhibited high values. While specimens B2-B5, which have multiple internal spaces, exhibited high vibration damping, specimen B1, which had a large number of partition walls and small internal spaces, exhibited damping similar to that of specimen A3, which had a small porosity, possibly due to increased rigidity. When multiple internal spaces are formed, as long as the number of internal spaces is not excessive, for example, in the range of approximately 2-10, preferably approximately 3-8, it is believed that a vibration damping effect can be achieved. In the B series specimens, the partition wall thickness was kept constant, so as the number of partition walls increased, rigidity increased, but vibration energy absorption performance was also reduced. When the number of partition walls is increased, it is thought that the decrease in vibration damping can be suppressed by taking measures such as thinning the partition walls.

[0068] Considering the stiffness shown in Figure 21 and the loss factor shown in Figure 22, it is believed that a balance between stiffness and vibration damping can be achieved when one or more internal spaces are formed longitudinally within a rod-shaped material, as in the test specimen, with a porosity in the range of 0.2-0.3. A polishing support / drive structure with a similar shape and structure to this test specimen is the kanzashi 31. When an internal space is formed longitudinally in the kanzashi 31, it is preferable to form the internal space with a porosity in the range of 0.2-0.3. Furthermore, within this porosity range, it is desirable to provide multiple internal spaces arranged with partitions between them. Furthermore, it is believed possible to suppress a decrease in stiffness by forming a shaft-shaped solid portion at the center of the kanzashi 31 and forming a cylindrical internal space around this solid portion to form a granular damper section.

[0069] In this embodiment, by configuring a granular damper A in a polishing tool or a polishing support and drive structure, which has a group B of granular materials b arranged in an internal space a, it is possible to absorb vibrations that occur between the workpiece and the polishing surface and in the support and drive structure while suppressing a decrease in rigidity of the tool or support and drive structure, and to reduce the decrease in polishing accuracy due to vibrations, thereby preventing a decrease in polishing accuracy due to a deterioration in support and drive accuracy and realizing a polishing process that can improve productivity. In particular, by providing multiple internal spaces via partitions, it is possible to further improve vibration absorption performance while suppressing a decrease in rigidity.

[0070] The polishing tool, polishing support and drive structure, and polishing apparatus of the present invention are not limited to the examples shown in the drawings, and various modifications can be made without departing from the spirit of the present invention. For example, although an Oscar-type polishing apparatus is exemplified in each of the above embodiments, the present invention is not limited to the Oscar-type, and can be applied to other types of polishing apparatuses, such as a spherical core oscillation type, and can also be applied to grinding apparatuses such as curve generators for forming the outline shape of a lens, and polishing apparatuses other than those used in the finishing stage of polishing, such as roughing machines. [Explanation of symbols]

[0071] 1...optical lens (workpiece), 1a...surface to be polished, 10...holder (polishing tool), 11...holder body, 11a...mounting portion (mounting surface), 11b...fitting portion, 20...polishing plate (polishing tool, polishing member), 20a...polishing support surface, 21...polishing pad, 21a...polishing surface, 22...shaft mounting portion, 30...upper shaft support drive structure, 31...spindle, 32...rotating shaft, 33...drive arm, 34...shaft support portion, 34x...axis, 35...eccentric drive shaft, 36...rotating body, 37...drive motor, 40...lower shaft support drive structure, 41...tool mounting portion, 42...rotating drive shaft, 43...drive motor, 50, 60...separate damper, A...granular damper, a...internal space, B...multiple granular bodies, b...granular bodies

Claims

1. A polishing tool for polishing a workpiece, comprising: An internal space is provided, and a group of granular materials is arranged in the internal space in a state in which the granular materials can be vibrated, a solid portion without an internal space is formed between a supported portion to which the polishing support and drive structure is connected and an attachment portion to which the workpiece is held or a polishing portion with which the workpiece is in sliding contact, in a portion excluding a surface portion close to the outer surface, and the internal space is formed in a portion excluding the surface portion and the solid portion; The solid portion is provided in a central portion, and the internal space is configured in an annular shape around the central portion. Polishing tools.

2. A plurality of the internal spaces are provided in which the groups of granular materials are arranged via partition walls. The abrasive tool of claim 1.

3. The entire product has a seamless, one-piece structure. The polishing tool according to claim 1 or 2.

4. A reinforcing rib is provided on the inner surface of the internal space of the surface portion corresponding to the mounting surface of the workpiece or the polishing surface of the workpiece to prevent deformation of the surface portion. The polishing tool according to claim 1 or 2.

5. A polishing apparatus comprising the polishing tool described in claim 1 or 2 and the polishing support drive structure for supporting and driving the polishing tool.

6. A polishing tool for polishing a workpiece, comprising: An internal space is provided, and a group of granular materials is arranged in the internal space in a state in which the granular materials can be vibrated, a tool body portion that functions as a tool; and a separate damper portion that is detachably attached to the tool body portion and has the internal space, and in which the group of granular materials is arranged in a state in which the granular materials can vibrate; the separate damper portion and the internal space are configured in an annular shape around the tool body portion; Polishing tools.

7. The tool body is configured to function as a solid portion, with no internal space provided continuously between the supported portion to which the grinding support drive structure is connected and the mounting portion on which the workpiece is held, or the grinding portion against which the workpiece slides, except for the surface portion close to the outer surface. The abrasive tool according to claim 6.

8. The separate damper section has a seamless, integral structure. The polishing tool according to claim 6 or 7.

9. A polishing apparatus comprising the polishing tool described in claim 6 and a polishing support drive structure for supporting and driving the polishing tool.

10. A polishing apparatus comprising the polishing tool described in claim 7 and the polishing support drive structure for supporting and driving the polishing tool.

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