Indication device

Abstract

Provided is a display device that has an imaging function. Provided is a display device or imaging device that has a high aperture ratio. The display device comprises: a light-emitting element that emits white-colored light; and a light-receiving element. The light-emitting element has a first pixel electrode, a first organic layer, and a common electrode that are layered in the stated order; the light-receiving element has a second pixel electrode, a second organic layer, and a common electrode that are layered in the stated order; the second organic layer includes a photoelectric conversion layer; a first layer and a second layer are included in a region between the light-emitting element and the light-receiving element; the first layer is superimposed over the second organic layer, and contains the same material as the first organic layer; the second layer is superimposed over the first organic layer, and contains the same material as the second organic layer; an end of the first organic layer and an end of the first layer are disposed facing one another in the region between the light-emitting element and the light-receiving element; and an end of the second organic layer and an end of the second layer are disposed facing one another in the region between the light-emitting element and the light-receiving element.

Description

[Technical Field]

[0001] FIELD OF THE INVENTION One aspect of the present invention relates to a display device, an imaging device, and a display device having an imaging function.

[0002] Note that one embodiment of the present invention is not limited to the above technical field. Examples of the technical field of one embodiment of the present invention disclosed in this specification and the like include semiconductor devices, display devices, light-emitting devices, power storage devices, memory devices, electronic devices, lighting devices, input devices, input / output devices, driving methods thereof, and manufacturing methods thereof. A semiconductor device refers to any device that can function by utilizing semiconductor characteristics. [Background technology]

[0003] In recent years, display devices have been required to have higher definition in order to display high-resolution images. Furthermore, for information terminal devices such as smartphones, tablet terminals, and notebook PCs (personal computers), display devices are required to have not only high definition but also low power consumption. Furthermore, display devices that not only display images but also have various additional functions, such as a touch panel function or a function for capturing fingerprints for authentication, are in demand.

[0004] As a display device, for example, a light-emitting device having a light-emitting element has been developed. Light-emitting elements (also referred to as EL elements) that utilize the electroluminescence (hereinafter referred to as EL) phenomenon have features such as being easily made thin and lightweight, being capable of responding quickly to input signals, and being able to be driven using a DC constant voltage power supply, and are therefore applied to display devices. For example, Patent Document 1 discloses a flexible light-emitting device that uses an organic EL element. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-197522 Summary of the Invention [Problem to be solved by the invention]

[0006] An object of one embodiment of the present invention is to provide a display device having an imaging function. Another object is to provide a high-resolution imaging device or display device. Another object is to provide a display device or imaging device with a high aperture ratio. Another object is to provide an imaging device or display device that can perform imaging with high sensitivity. Another object is to provide a display device that can acquire biometric information such as a fingerprint. Another object is to provide a display device that functions as a touch panel.

[0007] An object of one embodiment of the present invention is to provide a highly reliable display device, imaging device, or electronic device.An object of one embodiment of the present invention is to provide a display device, imaging device, electronic device, or the like having a novel structure.An object of one embodiment of the present invention is to alleviate at least one of the problems of the prior art.

[0008] Note that the description of these problems does not preclude the existence of other problems. Note that one embodiment of the present invention does not necessarily solve all of these problems. Note that problems other than these can be extracted from the description of the specification, drawings, claims, etc. [Means for solving the problem]

[0009] One embodiment of the present invention includes a first light-emitting element and a light-receiving element. The first light-emitting element includes a first pixel electrode, a first organic layer, and a common electrode stacked in this order. The light-receiving element includes a second pixel electrode, a second organic layer, and a common electrode stacked in this order. The first organic layer includes a first light-emitting layer and a second light-emitting layer. The first light-emitting layer contains a first light-emitting substance. The second light-emitting layer contains a second light-emitting substance different from the first light-emitting substance. The second organic layer includes a photoelectric conversion layer. The first layer and the second layer are provided in a region between the first light-emitting element and the light-receiving element. a first organic layer overlapping the second organic layer and containing the same material as the first organic layer, the second layer overlapping the first organic layer and containing the same material as the second organic layer, an end of the first organic layer and an end of the first layer are arranged opposite each other in a region between the first light-emitting element and the light-receiving element, an end of the second organic layer and an end of the second layer are arranged opposite each other in a region between the first light-emitting element and the light-receiving element, the first layer has a portion overlapping with the second pixel electrode and the second organic layer, and the second layer has a portion overlapping with the first pixel electrode and the first organic layer.

[0010] In the above structure, the first light-emitting element preferably emits white light.

[0011] In the above structure, it is preferable that the first organic layer contains two light-emitting substances, and that the light-emitting colors of the two light-emitting substances have a complementary relationship.

[0012] In the above-described configuration, the second light-emitting element has a third pixel electrode, a third organic layer, and a common electrode stacked in this order, the third organic layer includes a third light-emitting layer and a fourth light-emitting layer, the third light-emitting layer includes a first light-emitting substance, and the fourth light-emitting layer includes a second light-emitting substance. The third layer and the fourth layer are provided in a region between the second light-emitting element and the light-receiving element, and the third layer overlaps with the third organic layer and includes the same material as the second organic layer, and the fourth layer is It is preferable that the fourth layer overlaps with the second organic layer and contains the same material as the third organic layer, and that an end of the second organic layer faces an end of the third layer in the region between the second light-emitting element and the light-receiving element, and that an end of the third organic layer faces an end of the fourth layer in the region between the second light-emitting element and the light-receiving element, and that the third layer has a portion overlapping with the third pixel electrode and the third organic layer, and that the fourth layer has a portion overlapping with the second pixel electrode and the second organic layer.

[0013] In the above configuration, it is preferable that the light receiving element is sandwiched between the first light emitting element and the second light emitting element in plan view.

[0014] In the above structure, the second light-emitting element preferably emits white light.

[0015] The above configuration preferably includes a first colored layer overlapping the first light-emitting element and a second colored layer overlapping the second light-emitting element, and the second colored layer transmits light in a wavelength range different from that of the first colored layer. Different wavelength ranges refer, for example, to the fact that light transmitted through the first colored layer has intensity in a wavelength range of one color selected from blue, purple, blue-purple, green, yellow-green, yellow, orange, and red, and light transmitted through the second colored layer has intensity in a wavelength range of another color selected from blue, purple, blue-purple, green, yellow-green, yellow, orange, and red. Even when the wavelength ranges of the colored layers are different, the wavelength ranges may overlap.

[0016] The above configuration also includes a first colored layer overlapping the first light-emitting element and a second colored layer overlapping the second light-emitting element, and the first colored layer and the second colored layer preferably transmit light in wavelength regions that overlap. The first colored layer and the second colored layer preferably transmit light in the same wavelength region. The same wavelength region means, for example, that the light transmitted through the first colored layer and the light transmitted through the second colored layer both have intensity in a wavelength region of one color selected from blue, purple, blue-purple, green, yellow-green, yellow, orange, and red. Even when the wavelength regions of the respective colored layers are the same, the wavelength regions may not overlap with each other.

[0017] In addition, in the above configuration, it is preferable that a resin layer is provided, the resin layer is located in a region between the first light-emitting element and the light-receiving element, an end of the first organic layer and an end of the first layer face each other across the resin layer, and an end of the second organic layer and an end of the second layer face each other across the resin layer.

[0018] In addition, in the above configuration, it is preferable that the first insulating layer is provided, the first insulating layer is located between the first light-emitting element and the light-receiving element, and the first insulating layer is in contact with an end of the first organic layer, an end of the second organic layer, an end of the first layer, and an end of the second layer. [Effects of the Invention]

[0019] According to one embodiment of the present invention, a display device having an imaging function can be provided. Alternatively, a high-resolution imaging device or display device can be provided. Alternatively, a display device or imaging device with a high aperture ratio can be provided. Alternatively, an imaging device or display device capable of performing imaging with high sensitivity can be provided. Alternatively, a display device capable of acquiring biometric information such as a fingerprint can be provided. Alternatively, a display device functioning as a touch panel can be provided.

[0020] According to one embodiment of the present invention, it is possible to provide a highly reliable display device, an imaging device, or an electronic device. Alternatively, it is possible to provide a display device, an imaging device, an electronic device, or the like having a novel configuration. Alternatively, it is possible to alleviate at least one of the problems of the prior art.

[0021] Note that the description of these effects does not preclude the existence of other effects. Note that one embodiment of the present invention does not necessarily have all of these effects. Note that effects other than these can be extracted from the description in the specification, drawings, claims, etc. [Brief explanation of the drawings]

[0022] 1A to 1D are diagrams showing configuration examples of a display device. FIG. 2 is a diagram illustrating an example of the configuration of a display device. 3A and 3B are diagrams showing configuration examples of a display device. 4A and 4B are diagrams showing configuration examples of a display device. 5A to 5E are diagrams showing an example of a method for manufacturing a display device. 6A to 6E are diagrams showing an example of a method for manufacturing a display device. 7A and 7B are diagrams showing an example of a method for manufacturing a display device. 8A to 8D are diagrams showing an example of a method for manufacturing a display device. 9A is a diagram illustrating a configuration example of a display device, and FIG. 9B is a diagram illustrating a configuration example of a transistor. FIG. 10 is a diagram showing an example of the configuration of a display device. Fig. 11A is a diagram showing a configuration example of a display device, and Fig. 11B is a diagram showing a configuration example of a transistor. 12A and 12B are perspective views showing an example of a display module. FIG. 13 is a cross-sectional view showing an example of a display device. FIG. 14 is a cross-sectional view showing an example of a display device. FIG. 15 is a cross-sectional view showing an example of a display device. FIG. 16 is a cross-sectional view showing an example of a display device. FIG. 17 is a cross-sectional view showing an example of a display device. Figures 18A, 18B, and 18D are cross-sectional views showing examples of display devices, Figures 18C and 18E are diagrams showing example images, and Figures 18F to 18H are top views showing example pixels. 19A to 19J are diagrams showing examples of pixels. 20A and 20B are diagrams showing examples of pixels. 21A to 21H are diagrams showing examples of pixels. 22A and 22B are diagrams showing examples of circuit diagrams of pixels. 23A to 23F are diagrams showing configuration examples of a display device. 24A to 24J are diagrams showing configuration examples of a display device. 25A and 25B are diagrams showing an example of an electronic device. 26A to 26D are diagrams showing an example of an electronic device. 27A to 27F are diagrams showing an example of an electronic device. 28A to 28F are diagrams showing an example of an electronic device. DETAILED DESCRIPTION OF THE INVENTION

[0023] Hereinafter, embodiments will be described with reference to the drawings. However, it will be readily understood by those skilled in the art that the embodiments can be implemented in many different ways and that various changes in form and details can be made without departing from the spirit and scope of the present invention. Therefore, the present invention should not be interpreted as being limited to the following description of the embodiments.

[0024] In the configuration of the invention described below, the same parts or parts having similar functions are denoted by the same reference numerals in different drawings, and repeated explanations thereof will be omitted. In addition, when referring to similar functions, the same hatch pattern may be used and no particular reference numeral may be assigned.

[0025] In the drawings described in this specification, the size of each component, the thickness of a layer, or an area may be exaggerated for clarity, and therefore, the drawings are not necessarily limited to the scale.

[0026] In this specification, ordinal numbers such as "first" and "second" are used to avoid confusion of components and do not limit the number.

[0027] In the following, expressions indicating directions such as "up" and "down" will basically be used in accordance with the directions in the drawings. However, for purposes such as facilitating explanation, the directions indicated by "up" or "down" in the specification may not match those in the drawings. For example, when explaining the stacking order (or formation order) of a laminate, etc., even if the surface on which the laminate is provided in the drawing (such as the surface to be formed, the supporting surface, the adhesive surface, or the flat surface) is located above the laminate, the direction toward that surface may be expressed as "down" and the opposite direction as "up."

[0028] Furthermore, in this specification and the like, the terms "film" and "layer" are interchangeable. For example, the terms "conductive layer" and "insulating layer" may be interchangeable with the terms "conductive film" and "insulating film."

[0029] In this specification, the EL layer refers to a layer provided between a pair of electrodes of a light-emitting element and containing at least a light-emitting substance (also referred to as a light-emitting layer), or a stack including a light-emitting layer.

[0030] In this specification and the like, a display panel, which is one aspect of a display device, has a function of displaying (outputting) images etc. on a display surface, and therefore the display panel is one aspect of an output device.

[0031] In addition, in this specification, a display panel having a connector such as an FPC (Flexible Printed Circuit) or TCP (Tape Carrier Package) attached to the substrate, or having an IC mounted on the substrate using a COG (Chip On Glass) method or the like, may be referred to as a display panel module, display module, or simply a display panel.

[0032] (Embodiment 1) In this embodiment, a structural example of a display device according to one embodiment of the present invention and an example of a manufacturing method of the display device will be described.

[0033] One embodiment of the present invention is a display device including a light-emitting element (also referred to as a light-emitting device) and a light-receiving element (also referred to as a light-receiving device). The light-emitting element has a pair of electrodes and an EL layer therebetween. The light-receiving element has a pair of electrodes and an active layer therebetween. The light-emitting element is preferably an organic EL element (organic electroluminescent element). The light-receiving element is preferably an organic photodiode (organic photoelectric conversion element).

[0034] Furthermore, the display device preferably has light-emitting elements having EL layers of the same configuration and colored layers overlapping the light-emitting elements. The light-emitting elements may be configured to emit white light, for example. Subpixels exhibiting different colors have colored layers that transmit visible light of different colors. For example, a full-color display device can be realized by using three types of colored layers that transmit red (R), green (G), or blue (B) light, respectively.

[0035] One embodiment of the present invention functions as an imaging device because it can capture an image using a plurality of light-receiving elements. In this case, the light-emitting elements can be used as a light source for capturing an image. Another embodiment of the present invention functions as a display device because it can display an image using a plurality of light-emitting elements. Therefore, one embodiment of the present invention can be said to be a display device having an imaging function or an imaging device having a display function.

[0036] For example, in a display device according to one embodiment of the present invention, light-emitting elements are arranged in a matrix in the display portion, and light-receiving elements are also arranged in a matrix in the display portion. Therefore, the display portion has a function of displaying an image and a function as a light-receiving portion. Since images can be captured by the light-receiving elements provided in the display portion, the display device can function as an image sensor, a touch panel, or the like. That is, the display portion can capture an image or detect the approach or contact of an object. Furthermore, since the light-emitting elements provided in the display portion can be used as a light source for receiving light, there is no need to provide a light source separately from the display device, and a highly functional display device can be realized without increasing the number of electronic components.

[0037] In one embodiment of the present invention, when light emitted from a light-emitting element included in a display portion is reflected by an object, the light-receiving element can detect the reflected light; therefore, imaging or touch (including non-contact) detection can be performed even in a dark environment.

[0038] Furthermore, the display device of one embodiment of the present invention can capture an image of a fingerprint or palm print when a finger, palm, or the like is placed in contact with the display unit. Therefore, an electronic device including the display device of one embodiment of the present invention can perform personal authentication using an image of the captured fingerprint, palm print, or the like. This eliminates the need for a separate imaging device for fingerprint authentication or palm print authentication, thereby reducing the number of components in the electronic device. Furthermore, since the light receiving elements are arranged in a matrix on the display unit, an image of a fingerprint, palm print, or the like can be captured anywhere on the display unit, thereby realizing an electronic device with excellent convenience.

[0039] When the light-emitting element of each pixel is formed using a white-emitting organic EL element, there is no need to separately paint the light-emitting layer in each pixel. Therefore, layers other than the pixel electrode (e.g., the light-emitting layer) included in the light-emitting element can be common to each pixel. However, some layers included in the light-emitting element have relatively high conductivity, and providing a common layer with high conductivity among each pixel can cause leakage current between pixels. In particular, as display devices become higher in resolution or aperture ratio and the distance between pixels becomes smaller, the leakage current becomes significant and may cause a deterioration in the display quality of the display device. Therefore, in a display device according to one embodiment of the present invention, at least a portion of the light-emitting element in each pixel is formed in an island shape, thereby achieving high resolution of the display device. Here, the island-shaped portion of the light-emitting element includes the light-emitting layer.

[0040] In a light-emitting element that emits white light, it is not necessary to form all layers constituting the EL layer in an island shape, and some layers can be formed in the same process. In a manufacturing method of a display device according to one embodiment of the present invention, after some layers constituting the EL layer are formed in an island shape for each pixel, the sacrificial layer is removed, and the remaining layers constituting the EL layer (for example, a carrier injection layer) and a common electrode (which can also be referred to as an upper electrode) can be formed in common.

[0041] Here, when creating separate EL layers for light-emitting elements of different colors, it is known to form them by deposition using a shadow mask such as a fine metal mask (FMM). Furthermore, when creating separate organic layers for light-emitting and light-receiving elements, FMM and other techniques can also be used. However, this method makes it difficult to achieve high resolution and a high aperture ratio because the shape and position of the island-shaped organic film can deviate from the design due to various factors such as the accuracy of the FMM, misalignment between the FMM and the substrate, deflection of the FMM, and the spread of the contours of the deposited film due to vapor scattering. Therefore, measures have been taken to artificially increase the resolution (also known as pixel density) by applying special pixel arrangements such as a pentile array.

[0042] In the FMM fabrication method, two adjacent island-shaped organic films can be formed so that they partially overlap in order to achieve even the slightest increase in resolution and aperture ratio. This significantly reduces the distance between the light-emitting and light-receiving regions of adjacent elements compared to when the two island-shaped organic films are not overlapped. However, when two adjacent island-shaped organic films are overlapped, current leakage between the adjacent light-emitting and light-receiving elements through the overlapping organic films can occur, resulting in unintended light emission. This can result in reduced brightness and contrast, degrading display quality. Furthermore, the leakage current can also reduce power efficiency and power consumption.

[0043] Furthermore, if a similar leakage current occurs between the light-emitting element and the light-receiving element, the leakage current may become a source of noise when imaging using the light-receiving element, which may result in a decrease in imaging sensitivity (signal-to-noise ratio (S / N ratio)).

[0044] Therefore, in one embodiment of the present invention, an FMM is used to separately fabricate organic films between adjacent light-emitting elements and light-receiving elements so that their respective organic films overlap. Specifically, a layer containing a light-emitting compound (also referred to as an "emission layer") in the light-emitting element and a layer containing a photoelectric conversion material (also referred to as an "active layer" or "photoelectric conversion layer") in the light-receiving element are separately fabricated using an FMM. In this case, organic films that can be used in common between the light-emitting elements and the light-receiving elements may be used without separately fabricating them. An organic stacked film, in which an emission layer, an active layer, and other organic films are stacked, is located between adjacent light-emitting elements and light-receiving elements. Subsequently, the organic stacked film is divided by partially etching the organic stacked film using photolithography. This allows current leakage paths between the light-emitting elements and the light-receiving elements to be divided. This reduces noise during imaging using the light-receiving elements, enabling high-sensitivity imaging.

[0045] In this way, leakage current (also called side leakage) between the light-emitting element and the light-receiving element is suppressed, enabling high-precision imaging with a high S / N ratio. Therefore, clear imaging can be achieved even with weak light. Therefore, the brightness of the light-emitting element used as a light source can be reduced during imaging, thereby reducing power consumption.

[0046] Furthermore, current leakage paths between adjacent light-emitting and light-receiving elements can be cut off, which can increase brightness, contrast, power efficiency, or reduce power consumption.

[0047] Furthermore, it is preferable to form an insulating layer to protect the side surfaces of the organic laminated film exposed by etching, thereby improving the reliability of the display device.

[0048] The organic film formed using FMM may be formed so as to overlap not only the pixel electrode of the target element but also the pixel electrode of the adjacent element. This allows for a more dense arrangement of pixel electrodes. In this case, a portion of the organic film of the adjacent element that has been separated will overlap the pixel electrode of one element.

[0049] Below, a structural example of a display device according to one embodiment of the present invention and an example of a manufacturing method thereof will be described with reference to the drawings.

[0050] [Configuration example 1] 1A shows a schematic top view of a display device 100. The display device 100 has a display section in which a plurality of pixels 110 are arranged in a matrix, and a connection section 130 outside the display section. The pixel 110 shown in FIG. 1A is composed of four subpixels: 110a, 110b, 110c, and 110S.

[0051] A stripe arrangement is applied to the subpixels 110a, 110b, and 110c of the pixel 110 shown in FIG. 1A.

[0052] The subpixels 110a, 110b, and 110c each have a white-emitting light-emitting element 140a, 140b, or 140c (hereinafter, sometimes collectively referred to as light-emitting element 140). Colored layers 129a, 129b, or 129c (hereinafter, sometimes collectively referred to as colored layer 129) are provided over the light-emitting elements 140a, 140b, or 140c, causing each subpixel to emit light of a different color. Examples of the subpixels 110a, 110b, or 110c include three subpixels of red (R), green (G), and blue (B), and three subpixels of yellow (Y), cyan (C), and magenta (M). The colored layers are sometimes referred to as color filters.

[0053] The subpixel 110S includes a light receiving element 140S.

[0054] In FIG. 1A, as an example to easily distinguish between the sub-pixels, the sub-pixels 110a, 110b, and 110c are sub-pixels of three colors, red (R), green (G), and blue (B), and the symbols R, G, B, and S are assigned to the light-emitting or light-receiving regions of the light-emitting element or light-receiving element of each pixel. However, the sub-pixels 110a, 110b, and 110c are not limited to the sub-pixels of three colors, red (R), green (G), and blue (B).

[0055] The subpixels 110a, 110b, 110c, and 110S are arranged in a matrix. Fig. 1A shows a configuration in which the subpixels 110a, 110b, and 110c are arranged in a stripe pattern. The subpixel arrangement is not limited to this, and other arrangements such as an S-stripe arrangement, a delta arrangement, a Bayer arrangement, or a zigzag arrangement may also be used. A pentile arrangement, a diamond arrangement, or the like may also be used.

[0056] The light-emitting elements 140a, 140b, and 140c are preferably EL elements such as organic light-emitting diodes (OLEDs) or quantum-dot light-emitting diodes (QLEDs). Examples of light-emitting materials that the EL elements may contain include fluorescent materials, phosphorescent materials, inorganic compounds (such as quantum dot materials), and thermally activated delayed fluorescence (TADF) materials. The TADF material may be a material that is in thermal equilibrium between a singlet excited state and a triplet excited state. Such TADF materials have a short emission lifetime (excitation lifetime), which can suppress a decrease in the efficiency of the light-emitting element in the high-brightness range.

[0057] A light-emitting element has an EL layer between a pair of electrodes, one of which is sometimes referred to as a pixel electrode and the other as a common electrode in this specification and the like.

[0058] One of a pair of electrodes of a light-emitting element functions as an anode and the other functions as a cathode. In the following, an example will be described in which the pixel electrode functions as the anode and the common electrode functions as the cathode.

[0059] The structure of the light-emitting element in this embodiment may be a single structure or a tandem structure. A single structure is preferable. By using a light-emitting element with a single structure, the driving power of the light-emitting element can be reduced. Furthermore, the manufacturing process of the light-emitting element can be simplified. An example of the structure of the light-emitting element will be described later in Embodiment 2.

[0060] The light receiving element 140S can be, for example, a pn-type or pin-type photodiode. The light receiving element 140S functions as a photoelectric conversion element that detects light incident on the light receiving element 140S and generates an electric charge. The amount of electric charge generated by the photoelectric conversion element is determined according to the amount of incident light. In particular, it is preferable to use an organic photodiode having a layer containing an organic compound as the light receiving element 140S. Organic photodiodes can be easily made thin, lightweight, and large in area, and have a high degree of freedom in shape and design, making them applicable to a variety of devices.

[0061] 1A also shows a connection electrode 111C that is electrically connected to the common electrode 113. The connection electrode 111C is given a potential (for example, an anode potential or a cathode potential) to be supplied to the common electrode 113. The connection electrode 111C is provided outside the display area where the light-emitting elements 140a and the like are arranged. In addition, in FIG. 1A, the common electrode 113 is shown by a dashed line.

[0062] The connection electrodes 111C can be provided along the periphery of the display area. For example, they may be provided along one side of the periphery of the display area, or they may be provided over two or more sides of the periphery of the display area. That is, if the top surface of the display area has a rectangular shape, the top surface of the connection electrodes 111C can have a strip-like, L-shaped, U-shaped (square bracket-shaped), quadrangular, or the like shape.

[0063] 1B, 1C, and 1D are schematic cross-sectional views corresponding to dashed dotted lines A1-A2, A2-A3, and C1-C2 in FIG. 1A, respectively. Fig. 1B shows a schematic cross-sectional view of light-emitting element 140c, light-emitting element 140b, light-emitting element 140a, and light-receiving element 140S, and Fig. 1D shows a schematic cross-sectional view of connection electrode 111C.

[0064] 1B includes a substrate 137 and a substrate 136. In FIG. 1B, the substrate 137 includes a layer 101, a light-emitting element 140a, a light-emitting element 140b, a light-emitting element 140c, a light-receiving element 140S, and a protective layer 121.

[0065] Layer 101 is, for example, a layer containing a transistor.

[0066] The substrate 136 includes a substrate 128, colored layers 129a, 129b, and 129c, and a black matrix 129d.

[0067] A resin layer 122 is provided between the substrate 137 and the substrate 136. The resin layer 122 has a function of bonding the substrate 137 and the substrate 136 together.

[0068] The resin layer 122 can be made of various curable adhesives, such as a photo-curable adhesive (e.g., an ultraviolet curable adhesive), a reactive curable adhesive, a thermosetting adhesive, or an anaerobic adhesive. Examples of such adhesives include epoxy resin, acrylic resin, silicone resin, phenolic resin, polyimide resin, imide resin, PVC (polyvinyl chloride) resin, PVB (polyvinyl butyral) resin, and EVA (ethylene vinyl acetate) resin. In particular, a material with low moisture permeability, such as epoxy resin, is preferable. Alternatively, a two-component resin may be used. Alternatively, an adhesive sheet or the like may be used.

[0069] The colored layers 129a, 129b, and 129c have the function of transmitting light of different colors. The colored layer 129a, for example, transmits light in a wavelength range different from that of the colored layer 129b. The colored layer 129b, for example, transmits light in a wavelength range different from that of the colored layer 129c. The colored layer 129c, for example, transmits light in a wavelength range different from that of the colored layer 129a. For example, the colored layer 129a transmits red light, the colored layer 129b transmits green light, and the colored layer 129c transmits blue light. This allows the display device 100 to perform full-color display. The colored layers 129a, 129b, and 129c may transmit any of cyan, magenta, and yellow light.

[0070] Here, for example, adjacent colored layers 129 may have overlapping regions in regions where they do not overlap with the light-emitting elements 140. By overlapping the colored layers 129 that transmit light of different colors, the colored layers 129 can function as light-blocking layers in the overlapping regions. This can prevent light emitted by the light-emitting elements 140 from leaking to adjacent subpixels. For example, it can prevent light emitted by the light-emitting element 140a that overlaps with the colored layer 129a from entering the colored layer 129b. This can increase the contrast of images displayed on the display device, thereby achieving a display device with high display quality.

[0071] Note that adjacent colored layers 129 do not necessarily have to have overlapping regions. In this case, it is preferable to provide a black matrix 129d in a region that does not overlap with the light emitting element 140. The black matrix 129d can be provided, for example, on the surface of the substrate 128 that faces the resin layer 122. Alternatively, the colored layer 129 may be provided on the surface of the substrate 128 that faces the resin layer 122.

[0072] The black matrix is ​​sometimes called a black layer.

[0073] 1B, the subpixels 110a, 110b, and 110c have a configuration in which colored layers 129a, 129b, and 129c (hereinafter, sometimes collectively referred to as colored layer 129) are provided to overlap the light-emitting elements 140a, 140b, and 140c. The subpixel 110S also has a light-receiving element 140S.

[0074] In FIG. 1B, substrate 136 is provided with colored layers 129a, 129b, and 129c, each of which has the function of transmitting light of a different color, and a black matrix 129d, and is bonded to substrate 137 so that the colored layers of each color are positioned to overlap light-emitting elements 140a, 140b, and 140c of substrate 137, thereby forming subpixels 110a, 110b, and 110c that emit light of different colors.

[0075] The subpixel may not have a colored layer and may be configured to extract white light to the outside. Alternatively, the pixel may further include a subpixel that does not have a colored layer and extracts white light to the outside. While FIG. 1B shows an example in which the colored layers 129a, 129b, and 129c all have the same thickness, this is not limiting. The thicknesses of the colored layers 129a, 129b, and 129c are preferably adjusted appropriately depending on the transmittance of each color, and the thicknesses of the colored layers 129a, 129b, and 129c may be different from each other.

[0076] 2, colored layers 129a, 129b, and 129c are provided so as to overlap light-emitting elements 140a, 140b, and 140c. A resin layer 122 is provided between the substrate 128 and the colored layers 129a, 129b, and 129c. In the configuration shown in FIG. 1C, for example, each of the colored layers 129a, 129b, and 129c may have an area in contact with the upper surface of the protective layer 121.

[0077] As shown in FIG. 2, by forming the colored layer 129 on the protective layer 121, it is easier to align each light-emitting element 140 with each colored layer 129 than when the colored layer 129 is formed on the substrate 128, and an extremely high-definition display device can be realized.

[0078] The light-emitting element 140a has a pixel electrode 111a, an organic layer 115, an organic layer 112a, an organic layer 116, an organic layer 114, and a common electrode 113. The light-emitting element 140b has a pixel electrode 111b, an organic layer 115, an organic layer 112b, an organic layer 116, an organic layer 114, and a common electrode 113. The light-emitting element 140c has a pixel electrode 111c, an organic layer 115, an organic layer 112c, an organic layer 116, an organic layer 114, and a common electrode 113. The light-receiving element 140S has a pixel electrode 111S, an organic layer 115, an organic layer 155, an organic layer 116, an organic layer 114, and a common electrode 113. The organic layer 114 and the common electrode 113 are provided in common to the light-emitting element 140a, the light-emitting element 140b, the light-emitting element 140c, and the light-receiving element 140S. The organic layer 114 can also be referred to as a common layer.

[0079] The organic layers 112a, 112b, and 112c of the light-emitting elements 140a, 140b, and 140c contain a light-emitting organic compound, respectively. The organic layers 112a, 112b, and 112c can also be called light-emitting layers.

[0080] Preferably, the organic layers 112a, 112b, and 112c each have a configuration that emits white light. Here, the organic layers 112a, 112b, and 112c are preferably made of the same material. That is, the island-shaped organic layers 112a, 112b, and 112c are preferably formed by patterning a film formed in the same process.

[0081] The light-emitting layer is a layer containing a light-emitting substance. The light-emitting layer can contain one or more light-emitting substances. As the light-emitting substance, a substance that emits light of a color such as blue, purple, blue-purple, green, yellow-green, yellow, orange, or red is appropriately used. Furthermore, a substance that emits near-infrared light can also be used as the light-emitting substance.

[0082] Examples of light-emitting materials include fluorescent materials, phosphorescent materials, TADF materials, and quantum dot materials.

[0083] Examples of fluorescent materials include pyrene derivatives, anthracene derivatives, triphenylene derivatives, fluorene derivatives, carbazole derivatives, dibenzothiophene derivatives, dibenzofuran derivatives, dibenzoquinoxaline derivatives, quinoxaline derivatives, pyridine derivatives, pyrimidine derivatives, phenanthrene derivatives, and naphthalene derivatives.

[0084] Examples of phosphorescent materials include organometallic complexes (particularly iridium complexes) having a 4H-triazole skeleton, a 1H-triazole skeleton, an imidazole skeleton, a pyrimidine skeleton, a pyrazine skeleton, or a pyridine skeleton; organometallic complexes (particularly iridium complexes) having a phenylpyridine derivative having an electron-withdrawing group as a ligand; platinum complexes; and rare earth metal complexes.

[0085] The light-emitting layer may contain one or more organic compounds (host materials, assist materials, etc.) in addition to a light-emitting substance (guest material). One or more organic compounds may be a hole-transporting material or an electron-transporting material, or both. Alternatively, a bipolar material or a TADF material may be used as the one or more organic compounds.

[0086] The light-emitting layer preferably contains, for example, a phosphorescent material and a hole-transporting material and an electron-transporting material that are a combination that easily forms an exciplex. This configuration allows for efficient emission using Exciplex-Triplet Energy Transfer (ExTET), which is energy transfer from the exciplex to the light-emitting material (phosphorescent material). By selecting a combination that forms an exciplex that emits light that overlaps with the wavelength of the lowest-energy absorption band of the light-emitting material, the energy transfer becomes smooth, allowing for efficient emission. This configuration simultaneously enables high efficiency, low-voltage operation, and long life of the light-emitting element.

[0087] The organic layer 155 of the light receiving element 140S contains a photoelectric conversion material that is sensitive to the wavelength range of visible light or infrared light. The wavelength range to which the photoelectric conversion material of the organic layer 155 is sensitive preferably includes one or more of the wavelength range of light emitted by the subpixel 110a, the wavelength range of light emitted by the subpixel 110b, and the wavelength range of light emitted by the subpixel 110c. Alternatively, a photoelectric conversion material that is sensitive to infrared light with a longer wavelength than the wavelength range of light emitted by the subpixel 110a, etc. may be used. The organic layer 155 may also be called an active layer or a photoelectric conversion layer.

[0088] Hereinafter, when describing matters common to light-emitting elements 140a, 140b, and 140c, they may be referred to as light-emitting element 140. Similarly, when describing matters common to components distinguished by letters, such as organic layer 112a, organic layer 112b, and organic layer 112c, they may be referred to using reference numerals without the letters. For example, when describing matters common to organic layer 112a, organic layer 112b, and organic layer 112c, they may be referred to as organic layer 112. Furthermore, when describing matters common to pixel electrode 111a, pixel electrode 111b, pixel electrode 111c, and pixel electrode 111S, they may be referred to as pixel electrode 111.

[0089] In each light-emitting element, the laminated film located between the pixel electrode and the common electrode 113 can be called an EL layer. In the light-receiving element 140S, the laminated film located between the pixel electrode 111S and the common electrode 113 can be called a PD layer.

[0090] In each light-emitting element or light-receiving element 140S, organic layer 115 is a layer located between organic layer 112 or organic layer 155 and pixel electrode 111. Organic layer 116 is a layer located between organic layer 112 or organic layer 155 and organic layer 114. Organic layer 114 is a layer located between organic layer 116 and common electrode 113.

[0091] The organic layer 115, the organic layer 116, and the organic layer 114 can each independently include one or more of an electron injection layer, an electron transport layer, an electron blocking layer, a hole blocking layer, a hole injection layer, and a hole transport layer. For example, the organic layer 115 can have a stacked structure of a hole injection layer and a hole transport layer from the pixel electrode 111 side, the organic layer 116 can have an electron transport layer, and the organic layer 114 can have an electron injection layer. Alternatively, the organic layer 115 can have a stacked structure of an electron injection layer and an electron transport layer from the pixel electrode 111 side, the organic layer 116 can have a hole transport layer, and the organic layer 114 can have a hole injection layer.

[0092] It should be noted that the term "organic layer" used for layers located between a pair of electrodes of the light-emitting element or light-receiving element 140S, such as organic layer 112, organic layer 114, organic layer 115, organic layer 116, and organic layer 155, is intended to refer to layers that constitute an organic EL element or an organic photoelectric conversion element, and do not necessarily need to contain an organic compound. For example, organic layer 112, organic layer 114, organic layer 115, and organic layer 116 may each be a film that does not contain an organic compound and contains only an inorganic compound or inorganic substance.

[0093] The pixel electrode 111a, pixel electrode 111b, and pixel electrode 111c are provided for each light-emitting element. The common electrode 113 and organic layer 114 are provided as a continuous layer common to each light-emitting element and light-receiving element 140S. A conductive film that is transparent to visible light is used for either one of the pixel electrodes or the common electrode 113, and a conductive film that is reflective to visible light is used for the other. By making each pixel electrode transparent and the common electrode 113 reflective, a bottom-emission display device can be achieved. Conversely, by making each pixel electrode reflective and the common electrode 113 transparent, a top-emission display device can be achieved. Incidentally, by making both each pixel electrode and the common electrode 113 transparent, a dual-emission display device can be achieved.

[0094] The light-emitting element preferably has a micro-optical resonator (microcavity) structure. Therefore, one of the pair of electrodes of the light-emitting element preferably has a transparent and reflective electrode for visible light (semi-transmissive / semi-reflective electrode), and the other preferably has a reflective electrode for visible light (reflective electrode). When the light-emitting element has a microcavity structure, the light emitted from the light-emitting layer can be resonated between the two electrodes, thereby intensifying the light emitted from the light-emitting element.

[0095] The semi-transmitting / semi-reflective electrode can have a laminated structure of a reflective electrode and an electrode that is transparent to visible light (also called a transparent electrode).

[0096] The light transmittance of the transparent electrode is 40% or more. For example, it is preferable to use an electrode with a visible light (light with a wavelength of 400 nm or more and less than 750 nm) transmittance of 40% or more for the light emitting element. The visible light reflectance of the semi-transmissive / semi-reflective electrode is 10% or more and 95% or less, preferably 30% or more and 80% or less. The visible light reflectance of the reflective electrode is 40% or more and 100% or less, preferably 70% or more and 100% or less. In addition, the resistivity of these electrodes is 1×10 -2 Ωcm or less is preferable.

[0097] The pair of electrodes (pixel electrode and common electrode) of the light-emitting element can be formed from a metal, an alloy, an electrically conductive compound, or a mixture thereof, etc. Specific examples include indium tin oxide (In-Sn oxide, also referred to as ITO), In-Si-Sn oxide (also referred to as ITSO), indium zinc oxide (In-Zn oxide), In-W-Zn oxide, an aluminum alloy (aluminum alloy) such as an alloy of aluminum, nickel, and lanthanum (Al-Ni-La), and an alloy of silver, palladium, and copper (Ag-Pd-Cu, also referred to as APC). Other examples of usable materials include aluminum (Al), titanium (Ti), chromium (Cr), manganese (Mn), iron (Fe), cobalt (Co), nickel (Ni), copper (Cu), gallium (Ga), zinc (Zn), indium (In), tin (Sn), molybdenum (Mo), tantalum (Ta), tungsten (W), palladium (Pd), gold (Au), platinum (Pt), silver (Ag), yttrium (Y), and neodymium (Nd), as well as alloys containing these metals in combination. Other examples include rare earth metals such as elements belonging to Groups 1 and 2 of the periodic table (e.g., lithium (Li), cesium (Cs), calcium (Ca), and strontium (Sr)), europium (Eu), and ytterbium (Yb), as well as alloys containing these metals in combination, graphene, and the like.

[0098] A protective layer 121 is provided on the common electrode 113 to cover the light emitting elements 140a, 140b, 140c, and the light receiving element 140S. The protective layer 121 has a function of preventing impurities such as water from diffusing from above to each light emitting element.

[0099] Slits 120 are provided between adjacent light-emitting elements and light-receiving elements 140S and between two adjacent light-emitting elements. Slits 120 correspond to etched portions of organic layer 112 or organic layer 155, organic layer 115, and organic layer 116 located between adjacent light-emitting elements and light-receiving elements 140S or between two adjacent light-emitting elements.

[0100] An insulating layer 125 and a resin layer 126 are provided in the slit 120. The insulating layer 125 is provided along the sidewalls and bottom surface of the slit 120. The resin layer 126 is provided on the insulating layer 125 and has the function of filling the recesses located in the slit 120 and flattening the upper surface. By flattening the recesses of the slit 120 with the resin layer 126, it is possible to improve the coverage of the organic layer 114, the common electrode 113, and the protective layer 121.

[0101] Furthermore, the slits 120 can be formed simultaneously with the formation of openings for external connection terminals such as the connection electrode 111C, and therefore these can be formed without increasing the number of processes. Furthermore, the slits 120 have the insulating layer 125 and the resin layer 126, which has the effect of preventing short circuits between the pixel electrode 111 and the common electrode 113. Furthermore, the resin layer 126 has the effect of improving the adhesion of the organic layer 114. That is, by providing the resin layer 126, the adhesion of the organic layer 114 is improved, and therefore peeling of the organic layer 114 can be suppressed.

[0102] Since the insulating layer 125 is provided in contact with the side surface of an organic layer (e.g., organic layer 115), a structure can be achieved in which the organic layer does not come into contact with the resin layer 126. If the organic layer comes into contact with the resin layer 126, the organic layer may be dissolved by an organic solvent contained in the resin layer 126. Therefore, as shown in this embodiment, by providing the insulating layer 125 between the organic layer and the resin layer 126, it is possible to protect the side surface of the organic layer. Note that the slit 120 may be configured to separate at least one or more of the hole injection layer, hole transport layer, electron blocking layer, light-emitting layer, active layer, hole blocking layer, electron transport layer, and electron injection layer.

[0103] The insulating layer 125 can be an insulating layer containing an inorganic material. For example, an inorganic insulating film such as an insulating oxide film, a nitride insulating film, an oxynitride insulating film, or a nitride oxide insulating film can be used for the insulating layer 125. The insulating layer 125 may have a single-layer structure or a stacked-layer structure. Examples of oxide insulating films include a silicon oxide film, an aluminum oxide film, a magnesium oxide film, an indium gallium zinc oxide film, a gallium oxide film, a germanium oxide film, an yttrium oxide film, a zirconium oxide film, a lanthanum oxide film, a neodymium oxide film, a hafnium oxide film, and a tantalum oxide film. Examples of nitride insulating films include a silicon nitride film and an aluminum nitride film. Examples of oxynitride insulating films include a silicon oxynitride film and an aluminum oxynitride film. Examples of nitride oxide insulating films include a silicon nitride oxide film and an aluminum nitride oxide film. In particular, by using an inorganic insulating film such as a metal oxide film, an aluminum oxide film, or a silicon oxide film formed by an ALD method as the insulating layer 125, an insulating layer 125 with few pinholes and excellent protection of the EL layer can be formed.

[0104] In this specification and elsewhere, an oxynitride refers to a material whose composition contains more oxygen than nitrogen, and a nitride oxide refers to a material whose composition contains more nitrogen than oxygen. For example, silicon oxynitride refers to a material whose composition contains more oxygen than nitrogen, and silicon nitride oxide refers to a material whose composition contains more nitrogen than oxygen.

[0105] The insulating layer 125 can be formed by a sputtering method, a CVD method, a PLD method, an ALD method, etc. The insulating layer 125 is preferably formed by an ALD method, which has good coverage.

[0106] An insulating layer containing an organic material can be suitably used as the resin layer 126. For example, acrylic resin, polyimide resin, epoxy resin, imide resin, polyamide resin, polyimideamide resin, silicone resin, siloxane resin, benzocyclobutene resin, phenol resin, precursors of these resins, etc. can be used as the resin layer 126. Alternatively, organic materials such as polyvinyl alcohol (PVA), polyvinyl butyral, polyvinylpyrrolidone, polyethylene glycol, polyglycerin, pullulan, water-soluble cellulose, or alcohol-soluble polyamide resin can be used as the resin layer 126.

[0107] Furthermore, a photosensitive resin can be used as the resin layer 126. A photoresist can be used as the photosensitive resin. The photosensitive resin can be a positive type material or a negative type material.

[0108] Furthermore, by using a colored material (for example, a material containing a black pigment) for the resin layer 126, the layer may be provided with the function of blocking stray light from adjacent pixels and suppressing color mixing.

[0109] In addition, a reflective film (for example, a metal film containing one or more selected from silver, palladium, copper, titanium, aluminum, etc.) may be provided between the insulating layer 125 and the resin layer 126, and the reflective film may reflect the light emitted from the light-emitting layer, thereby improving the light extraction efficiency.

[0110] The upper surface of the resin layer 126 is preferably as flat as possible, but the surface may have a gently curved shape. While Fig. 1B and other figures show an example in which the upper surface of the resin layer 126 has a wavy shape with concave and convex portions, this is not limiting. For example, the upper surface of the resin layer 126 may be a convex surface, a concave surface, or a flat surface.

[0111] The protective layer 121 may also be a laminated film of an inorganic insulating film and an organic insulating film. For example, it is preferable to have a configuration in which an organic insulating film is sandwiched between a pair of inorganic insulating films. Furthermore, it is preferable that the organic insulating film functions as a planarizing film. This makes it possible to make the upper surface of the organic insulating film flat, thereby improving the coverage of the inorganic insulating film thereon and enhancing the barrier properties. In addition, since the upper surface of the protective layer 121 is flat, it is preferable that when a structure (e.g., a color filter, a touch sensor electrode, a lens array, etc.) is provided above the protective layer 121, the influence of uneven shapes caused by the structure below can be reduced.

[0112] The protective layer 121 may have, for example, a single-layer structure or a multilayer structure including at least an inorganic insulating film. Examples of the inorganic insulating film include oxide films or nitride films such as a silicon oxide film, a silicon oxynitride film, a silicon nitride oxide film, a silicon nitride film, an aluminum oxide film, an aluminum oxynitride film, and a hafnium oxide film. Alternatively, the protective layer 121 may be made of a semiconductor material such as indium gallium oxide or indium gallium zinc oxide.

[0113] 1D shows a connection section 130 where the connection electrode 111C and the common electrode 113 are electrically connected. In the connection section 130, the common electrode 113 is provided on the connection electrode 111C via an organic layer 114. An insulating layer 125 is provided in contact with the side surface of the connection electrode 111C, and a resin layer 126 is provided on the insulating layer 125.

[0114] The organic layer 114 does not necessarily have to be provided in the connection section 130. In that case, in the connection section 130, the common electrode 113 is provided in contact with the connection electrode 111C, and the protective layer 121 is provided to cover the common electrode 113.

[0115] Next, a preferred configuration of the slit 120 and its vicinity will be described in detail. Figure 3A is a schematic cross-sectional view including part of the light-emitting element 140b, part of the light-receiving element 140S, and the region therebetween in Figure 1B.

[0116] As shown in Fig. 3A, the edge of the pixel electrode 111 is preferably tapered. This can improve the step coverage of the organic layer 115, etc. In this specification and the like, a tapered edge of an object means that the angle between the surface and the surface to be formed in the edge region is greater than 0 degrees and less than 90 degrees, and the cross-sectional shape has a continuously increasing thickness from the edge. Note that although the pixel electrode 111b and the like have a single-layer structure in this example, multiple layers may be stacked.

[0117] An organic layer 115 is provided to cover the pixel electrode 111b. An organic layer 115 is also provided to cover the pixel electrode 111S. These organic layers 115 are formed by dividing a continuous film by a slit 120.

[0118] Organic layer 112b is provided covering organic layer 115 on the light-emitting element 140b side of slit 120. Furthermore, layer 135b is provided on organic layer 115 on the light-receiving element 140S side of slit 120. Layer 135b can also be said to be a fragment of a part of the film that will become organic layer 112b, which is separated by slit 120 and remains on the light-receiving element 140S side. Layer 135b and organic layer 112b are provided separated by slit 120.

[0119] Furthermore, organic layer 155 is provided covering organic layer 115 on the light receiving element 140S side of slit 120. Furthermore, layer 135S is provided on organic layer 112b on the light emitting element 140b side of slit 120. Layer 135S can also be said to be a fragment of a part of the film that will become organic layer 155, which is separated by slit 120 and remains on the light emitting element 140b side. Layer 135S and organic layer 155 are provided separated by slit 120.

[0120] An end (side surface) of organic layer 112b and an end of layer 135b are provided opposite each other with slit 120 interposed therebetween. Similarly, an end of organic layer 155 and an end of layer 135S are provided opposite each other with slit 120 interposed therebetween.

[0121] Note that one or both of layer 135b and layer 135S may not be formed depending on the position and width of slit 120, the formation position of organic layer 112b, the formation position of organic layer 155, etc. Specifically, if the end of organic layer 112b before forming slit 120 overlaps with the formation position of slit 120, layer 135b may not be formed.

[0122] An organic layer 116 is provided to cover organic layer 112b and layer 135S. In addition, an organic layer 116 is provided to cover organic layer 155 and layer 135b. Similar to organic layer 115, these organic layers 116 are formed by dividing a continuous film by slits 120.

[0123] The insulating layer 125 is provided inside the slit 120 and is provided in contact with the side surfaces of the pair of organic layers 115, the side surfaces of the organic layer 112b, the side surfaces of the organic layer 155, the side surfaces of the layer 135b, the side surfaces of the layer 135S, and the side surfaces of the pair of organic layers 116. The insulating layer 125 is also provided to cover the upper surface of the layer 101.

[0124] The resin layer 126 is provided in contact with the upper surface and side surfaces of the insulating layer 125. The resin layer 126 has the function of flattening recesses in the surface on which the organic layer 114 is to be formed.

[0125] An organic layer 114, a common electrode 113, and a protective layer 121 are formed in this order to cover the top surfaces of the organic layer 116, the insulating layer 125, and the resin layer 126. The organic layer 114 may not be provided if it is not necessary.

[0126] Here, layer 135b and layer 135S are portions located at the edges of the film that will become organic layer 112b or organic layer 155. In a film formation method using FMM, the thickness of an organic film tends to gradually decrease closer to the edges, so layer 135b and layer 135S have portions that are thinner than organic layer 112b or organic layer 155. Layer 135b and layer 135S may be so thin that they cannot be confirmed by cross-sectional observation. Furthermore, even if layer 135b or layer 135S exists, it may be difficult to confirm the boundary between layer 135b and organic layer 155 and the boundary between layer 135S and organic layer 112b by cross-sectional observation.

[0127] On the other hand, since layers 135b and 135S contain a light-emitting compound (e.g., a fluorescent material, a phosphorescent material, or quantum dots), when irradiated with ultraviolet light, visible light, or the like in a planar view, light is emitted by photoluminescence. By observing this light emission with an optical microscope or the like, the presence of layers 135b and 135S can be confirmed. Specifically, since layer 135b and organic layer 155 overlap in the area where layer 135b is located, when ultraviolet light or the like is irradiated on this area, both light from layer 135b and light from organic layer 155 can be confirmed. Furthermore, from the emission spectrum, wavelength, emission color, and the like of the light emitted from layers 135b and 135S, it can be confirmed that layer 135b or layer 135S contains the same material as organic layer 112b or organic layer 155. Furthermore, it may also be possible to estimate the compounds contained in layers 135b and 135S.

[0128] The end of the layer 135b opposite the slit 120 extends to a region overlapping with the pixel electrode 111S. That is, the layer 135b has a portion overlapping with both the pixel electrode 111S and the organic layer 155. Similarly, the layer 135S has a portion overlapping with both the pixel electrode 111b and the organic layer 112b.

[0129] Here, an example has been shown in which organic layer 112b and organic layer 155 are separately formed using FMM, and the other organic layers (organic layer 115, organic layer 116) are formed as a continuous film, but this is not limiting. For example, either organic layer 115, organic layer 116, or both may also be separately formed using FMM. In this case, pieces of organic layer 115 or organic layer 116 may remain near slit 120, similar to layer 135b and the like.

[0130] 3A can be obtained, for example, by forming organic layer 112b and then depositing an organic film that will become organic layer 155 in the manufacturing process of display device 100. On the other hand, for example, the configuration shown in FIG. 3B can be obtained by forming organic layer 155 and then depositing an organic film that will become organic layer 112b.

[0131] 3B, organic layer 155 is provided covering organic layer 115 on the light receiving element 140S side of slit 120. Furthermore, layer 135S is provided on organic layer 115 on the light emitting element 140b side of slit 120. Layer 135S can also be said to be a fragment of a part of the film that will become organic layer 155, which is separated by slit 120 and remains on the light emitting element 140b side. Layer 135S and organic layer 155 are provided separated by slit 120.

[0132] 3B, organic layer 112b is provided covering organic layer 115 on the light-emitting element 140b side of slit 120. Layer 135b is provided on organic layer 155 on the light-receiving element 140S side of slit 120. Layer 135b can also be said to be a fragment of a part of the film that will become organic layer 112b, which is separated by slit 120 and remains on the light-receiving element 140S side. Layer 135b and organic layer 112b are provided separated by slit 120.

[0133] In the enlarged views shown in Figures 3A and 3B, the area between the light-emitting element 140b and the light-receiving element 140S is described, but a similar configuration may also exist between the light-emitting element 140a and the light-receiving element 140S, and between the light-emitting element 140c and the light-receiving element 140S.

[0134] For example, when the light-emitting element 140a and the light-receiving element 140S are provided in adjacent subpixels, or when the light-emitting element 140a and the light-receiving element 140S are disposed adjacent to each other, the display device of one embodiment of the present invention may have a structure in which the light-emitting element 140b, pixel electrode 111b, organic layer 112b, and layer 135b in FIGS. 3A and 3B are replaced with the light-emitting element 140a, pixel electrode 111a, organic layer 112a, and layer 135a. Here, the layer 135a and the organic layer 112a are provided separated by a slit 120. The layer 135a can be considered to be a fragment of a film that will become the organic layer 112a, separated by the slit 120 and remaining on the light-receiving element 140S side.

[0135] Furthermore, for example, when the light-emitting element 140c and the light-receiving element 140S are provided in adjacent subpixels, or when the light-emitting element 140c and the light-receiving element 140S are disposed adjacent to each other, the display device of one embodiment of the present invention may have a structure in which the light-emitting element 140b, pixel electrode 111b, organic layer 112b, and layer 135b in FIGS. 3A and 3B are replaced with the light-emitting element 140c, pixel electrode 111c, organic layer 112c, and layer 135c. Here, the layer 135c and the organic layer 112c are provided separated by the slit 120. The layer 135c can be considered to be a fragment of a film that will become the organic layer 112c, separated by the slit 120 and remaining on the light-receiving element 140S side.

[0136] Furthermore, the closer the distance between adjacent sub-pixels, the thicker the organic layer provided across the slit 120 may be.

[0137] 4A and 4B are cross-sectional schematic diagrams each showing a case where there is no insulating layer 125. In Fig. 4A and 4B, resin layer 126 is provided in contact with the side surfaces of the pair of organic layers 115, the side surface of organic layer 112b, the side surface of organic layer 155, the side surface of layer 135b, the side surface of layer 135S, and the side surfaces of the pair of organic layers 116.

[0138] At this time, the EL layer or PD layer may be partially dissolved by the solvent used in forming the film that will become the resin layer 126. Therefore, if the insulating layer 125 is not provided, it is preferable to use water or an alcohol such as ethyl alcohol, methyl alcohol, isopropyl alcohol (IPA), or glycerin as the solvent for the resin layer 126. However, the solvent is not limited to this, and any solvent that does not dissolve or hardly dissolves the EL layer and the PD layer may be used.

[0139] As described above, the display device of one embodiment of the present invention can have a structure in which an insulator covering an edge of a pixel electrode is not provided. In other words, the display device of one embodiment of the present invention has a structure in which an insulator is not provided between the pixel electrode and the EL layer. With this structure, light emitted from the EL layer can be efficiently extracted, thereby significantly reducing the viewing angle dependency. For example, in the display device of one embodiment of the present invention, the viewing angle (the maximum angle at which a certain contrast ratio is maintained when the screen is viewed from an oblique direction) can be set to a range of 100° to less than 180°, preferably 150° to 170°. Note that the above viewing angle can be applied to both the vertical and horizontal directions. The display device of one embodiment of the present invention can improve the viewing angle dependency and enhance the visibility of images.

[0140] [Example of manufacturing method] An example of a method for manufacturing a display device according to one embodiment of the present invention will be described below with reference to the drawings. Here, the display device shown in FIGS. 1A to 1C will be used as an example. FIGS. 5A to 7D are schematic cross-sectional views illustrating steps in the example of a method for manufacturing a display device described below.

[0141] The thin films (insulating films, semiconductor films, conductive films, etc.) that make up the display device can be formed using methods such as sputtering, chemical vapor deposition (CVD), vacuum evaporation, pulsed laser deposition (PLD), and atomic layer deposition (ALD). CVD methods include plasma enhanced chemical vapor deposition (PECVD) and thermal CVD. Metal organic chemical vapor deposition (MOCVD) is one type of thermal CVD.

[0142] Furthermore, thin films (insulating films, semiconductor films, conductive films, etc.) that constitute the display device can be formed by methods such as spin coating, dipping, spray coating, inkjet, dispensing, screen printing, offset printing, doctor knife method, slit coating, roll coating, curtain coating, or knife coating.

[0143] Furthermore, when processing the thin film that constitutes the display device, a photolithography method or the like can be used. Alternatively, the thin film may be processed by a nanoimprint method, a sandblasting method, a lift-off method, or the like. Furthermore, the island-shaped thin film may be directly formed by a film formation method using a shielding mask such as a metal mask.

[0144] There are two typical photolithography methods: one is to form a resist mask on the thin film to be processed, process the thin film by etching or the like, and then remove the resist mask; the other is to form a photosensitive thin film, and then process the thin film into the desired shape by exposure and development.

[0145] In photolithography, the light used for exposure can be, for example, i-line (wavelength 365 nm), g-line (wavelength 436 nm), h-line (wavelength 405 nm), or a mixture of these. Other light sources that can be used include ultraviolet light, KrF laser light, and ArF laser light. Exposure can also be performed using immersion exposure technology. Light sources that can be used for exposure include extreme ultraviolet (EUV) light, X-rays, and the like. Electron beams can also be used instead of light for exposure. Extreme ultraviolet light, X-rays, or electron beams are preferred because they enable extremely fine processing. When exposure is performed by scanning a beam such as an electron beam, a photomask is not required.

[0146] For etching the thin film, dry etching, wet etching, sandblasting, or the like can be used.

[0147] Preparation of Layer 101 A substrate having heat resistance sufficient to withstand at least a subsequent heat treatment can be used as the layer 101. When an insulating substrate is used as the layer 101, a glass substrate, a quartz substrate, a sapphire substrate, a ceramic substrate, an organic resin substrate, or the like can be used. Also, a semiconductor substrate such as a single crystal semiconductor substrate made of silicon, silicon carbide, or the like, a polycrystalline semiconductor substrate, a compound semiconductor substrate such as silicon germanium, or an SOI substrate can be used.

[0148] In particular, it is preferable to use a substrate in which a semiconductor circuit including semiconductor elements such as transistors is formed on the semiconductor substrate or insulating substrate as the layer 101. The semiconductor circuit preferably constitutes, for example, a pixel circuit, a gate line driving circuit (gate driver), a source line driving circuit (source driver), etc. In addition to the above, an arithmetic circuit, a memory circuit, etc. may also be constituted.

[0149] [Formation of pixel electrode 111 and organic layer 115] A conductive film is formed over the layer 101 and part of the conductive film is removed by etching, thereby forming the pixel electrode 111 .

[0150] Subsequently, the organic layer 115 is formed on the pixel electrode 111 (FIG. 5A). The organic layer 115 is preferably formed without using an FMM.

[0151] The organic layer 115 may be separately formed using FMM. In this case, the description of the organic layer 112a and the like to be described later can be applied.

[0152] The organic layer 115 can be preferably formed by vacuum deposition. However, the method is not limited to this, and it can also be formed by sputtering, inkjet printing, etc. Furthermore, the above-mentioned film formation methods can be used as appropriate.

[0153] [Formation of Organic Layer 112a, Organic Layer 112b, Organic Layer 112c, and Organic Layer 155] Next, organic layer 112W is formed on organic layer 115. By processing organic layer 112W using the steps described below, organic layers 112a, 112b, and 112c are obtained. Organic layer 112a is formed on organic layer 115 so as to encompass the region overlapping with pixel electrode 111a. Organic layer 112b is formed on organic layer 115 so as to encompass the region overlapping with pixel electrode 111b. Organic layer 112c is formed on organic layer 115 so as to encompass the region overlapping with pixel electrode 111c.

[0154] The organic layer 112W is preferably formed by vacuum deposition using an FMM. Alternatively, the island-shaped organic layer 112W may be formed by sputtering using an FMM or by inkjet printing.

[0155] 5B shows the organic layer 112W being deposited via the FMM 151W. In one embodiment of the present invention, the organic layers 112a, 112b, and 112c are formed by patterning a film deposited in the same process, in this case, the organic layer 112W.

[0156] For example, the FMM151W functions as a mask that opens the area where the organic layer of the light-emitting element will be provided and blocks the area that will become the light-receiving element. Figure 5B shows the film being formed using the so-called face-down method, in which the substrate is inverted so that the surface to be formed is facing downwards.

[0157] Narrowing the gap between pixel electrodes allows light-emitting elements and light-receiving elements to be arranged at high density. In this case, the organic layer 112W may be formed so as to overlap with the pixel electrode 111S of an adjacent pixel. In the display device according to one embodiment of the present invention, the slit 120 can separate a leakage path between the organic layer 112 of a subpixel having a light-emitting element and the organic layer 155 of a subpixel adjacent to the subpixel having a light-receiving element.

[0158] In evaporation methods using an FMM, evaporation is often performed over an area wider than the opening pattern of the FMM. Therefore, as shown by the dashed line in Figure 5B, the organic layer 112W can be formed over an area wider than the opening pattern of the FMM 151W. In the example shown in Figure 5C, the pixel electrode 111S, which is the pixel electrode of the light receiving element, does not overlap with the opening of the FMM 151W, but the organic layer 112W is also formed on the pixel electrode 111S.

[0159] Next, using the FMM 151S, the organic layer 155 is formed so as to overlap with the pixel electrode 111S (FIG. 5C). Here, the organic layer 155 extends outward beyond the pixel electrode 111S and is also formed on the adjacent pixel electrode 111b. As a result, a portion where the organic layer 155 is stacked is formed on the organic layer 112W.

[0160] Although the organic layer 112W and the organic layer 155 are formed in this order, the order of formation is not limited to this.

[0161] [Formation of organic layer 116] Subsequently, the organic layer 116 is formed to cover the organic layer 112W and the organic layer 155 (FIG. 5D). The organic layer 116 can be formed by the same method as the organic layer 115.

[0162] [Formation of Sacrificial Film 144] Subsequently, a sacrificial film 144 is formed covering the organic layer 116 .

[0163] For the sacrificial film 144, a film that is highly resistant to the etching process of the organic layer 115, the organic layer 112W, the organic layer 155, and the organic layer 116, that is, a film with a large etching selectivity, can be used. Also, for the sacrificial film 144, a film that has a large etching selectivity with respect to a sacrificial film such as the sacrificial film 146 described below can be used. Furthermore, for the sacrificial film 144, it is particularly preferable to use a film that can be removed by wet etching, which causes little damage to the organic layer 115, the organic layer 112W, the organic layer 155, and the organic layer 116.

[0164] For example, an inorganic film such as a metal film, an alloy film, a metal oxide film, a semiconductor film, an organic insulating film, or an inorganic insulating film can be suitably used as the sacrificial film 144. The sacrificial film 144 can be formed by various film formation methods such as a sputtering method, a vapor deposition method, a CVD method, or an ALD method.

[0165] In particular, since the ALD method causes less damage to the layer on which the film is formed, it is preferable to form the sacrificial film 144 directly on the organic layer 116 using the ALD method.

[0166] For example, metal materials such as gold, silver, platinum, magnesium, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, palladium, titanium, aluminum, yttrium, zirconium, and tantalum, or alloy materials containing these metal materials can be used as the sacrificial film 144. In particular, it is preferable to use a low-melting-point material such as aluminum or silver.

[0167] Furthermore, metal oxides such as indium gallium zinc oxide (In-Ga-Zn oxide, also written as IGZO) can be used for the sacrificial film 144. Furthermore, indium oxide, indium zinc oxide (In-Zn oxide), indium tin oxide (In-Sn oxide), indium titanium oxide (In-Ti oxide), indium tin zinc oxide (In-Sn-Zn oxide), indium titanium zinc oxide (In-Ti-Zn oxide), indium gallium tin zinc oxide (In-Ga-Sn-Zn oxide), etc. can also be used. Alternatively, indium tin oxide containing silicon can also be used.

[0168] The present invention can also be applied to a case where, instead of the gallium, an element M (wherein M is one or more elements selected from aluminum, silicon, boron, yttrium, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium) is used. In particular, it is preferable that M is one or more elements selected from gallium, aluminum, and yttrium.

[0169] Furthermore, oxides such as aluminum oxide, hafnium oxide, and silicon oxide, nitrides such as silicon nitride and aluminum nitride, and oxynitrides such as silicon oxynitride can be used as the sacrificial film 144. Such inorganic insulating materials can be formed using a film formation method such as a sputtering method, a CVD method, or an ALD method.

[0170] Furthermore, the sacrificial film 144 may be made of a material that is soluble in a chemically stable solvent, at least with respect to the organic layer 116 located at the top of the EL layer. In particular, a material that dissolves in water or alcohol is preferably used for the sacrificial film 144. When forming the sacrificial film 144, it is preferable to apply the material dissolved in a solvent such as water or alcohol by a wet film formation method, and then perform a heat treatment to evaporate the solvent. At this time, performing the heat treatment under a reduced pressure atmosphere is preferable because it allows the solvent to be removed at a low temperature in a short time, thereby reducing thermal damage to the EL layer.

[0171] Wet film formation methods that can be used to form the sacrificial film 144 include spin coating, dipping, spray coating, inkjet, dispensing, screen printing, offset printing, doctor knife method, slit coating, roll coating, curtain coating, and knife coating.

[0172] The sacrificial film 144 may be made of an organic resin such as polyvinyl alcohol (PVA), polyvinyl butyral, polyvinylpyrrolidone, polyethylene glycol, polyglycerin, pullulan, water-soluble cellulose, or alcohol-soluble polyamide resin. The sacrificial film 144 and the sacrificial film 146 may each be made of a fluororesin such as a perfluoropolymer.

[0173] For example, the sacrificial film 144 can be an organic film (e.g., a PVA film) formed using a vapor deposition method or one of the above wet film formation methods, and the sacrificial film 146 can be an inorganic film (e.g., a silicon oxide film or a silicon nitride film) formed using a sputtering method.

[0174] [Formation of Sacrificial Film 146] Subsequently, a sacrificial film 146 is formed on the sacrificial film 144 .

[0175] The sacrificial film 146 is a film that is used as a hard mask when etching the sacrificial film 144 later. Furthermore, when processing the sacrificial film 146 later, the sacrificial film 144 is exposed. Therefore, a combination of films that have a large etching selectivity with respect to each other is selected for the sacrificial film 144 and the sacrificial film 146. Therefore, a film that can be used for the sacrificial film 146 can be selected depending on the etching conditions for the sacrificial film 144 and the etching conditions for the sacrificial film 146.

[0176] The sacrificial film 146 can be selected from various materials depending on the etching conditions of the sacrificial film 144 and the etching conditions of the sacrificial film 146. For example, the material can be selected from the films that can be used for the sacrificial film 144 described above.

[0177] For example, an oxide film can be used as the sacrificial film 146. Typically, an oxide film or an oxynitride film such as silicon oxide, silicon oxynitride, aluminum oxide, aluminum oxynitride, hafnium oxide, or hafnium oxynitride can also be used.

[0178] Furthermore, for example, a nitride film can be used as the sacrificial film 146. Specifically, nitrides such as silicon nitride, aluminum nitride, hafnium nitride, titanium nitride, tantalum nitride, tungsten nitride, gallium nitride, and germanium nitride can also be used.

[0179] For example, it is preferable to use an inorganic insulating material such as aluminum oxide, hafnium oxide, or silicon oxide formed by an ALD method as the sacrificial film 144, and a metal oxide containing indium such as indium gallium zinc oxide (In-Ga-Zn oxide, also referred to as IGZO) formed by a sputtering method as the sacrificial film 146. Alternatively, it is preferable to use a metal such as tungsten, molybdenum, copper, aluminum, titanium, or tantalum, or an alloy containing such a metal as the sacrificial film 146.

[0180] Alternatively, the sacrificial film 146 may be an organic film that can be used for the organic layer 115, the organic layer 112, the organic layer 155, the organic layer 116, and the like. For example, the same organic film as that used for the organic layer 115, the organic layer 112, the organic layer 155, or the organic layer 116 can be used for the sacrificial film 146. Using such an organic film is preferable because it allows the same film-forming equipment to be used for the organic layer 115, the organic layer 112, the organic layer 155, the organic layer 116, and the like. Furthermore, the sacrificial layer can be removed simultaneously when etching the organic layer 115, the organic layer 112, the organic layer 155, the organic layer 116, and the like using the sacrificial layer as a mask later, thereby simplifying the process.

[0181] [Formation of Resist Mask 143] Subsequently, a resist mask 143 is formed on the sacrificial film 146 at positions overlapping the pixel electrode 111a, the pixel electrode 111b, the pixel electrode 111c, and the pixel electrode 111S (FIG. 5E).

[0182] The resist mask 143 can be made of a resist material containing a photosensitive resin, such as a positive resist material or a negative resist material.

[0183] Here, when the resist mask 143 is formed on the sacrificial film 144 without the sacrificial film 146, if defects such as pinholes exist in the sacrificial film 144, the organic layer 115, the organic layer 112, the organic layer 155, the organic layer 116, etc. may be dissolved by the solvent of the resist material. By using the sacrificial film 146, it is possible to prevent such defects from occurring.

[0184] In addition, when a material that does not dissolve organic layer 115, organic layer 112, organic layer 155, and organic layer 116 is used as a solvent for the resist material, it may be possible to form resist mask 143 directly on sacrificial film 144 without using sacrificial film 146.

[0185] [Etching of the sacrificial film 146] Subsequently, a portion of the sacrificial film 146 that is not covered by the resist mask 143 is removed by etching to form a sacrificial layer 147 .

[0186] When etching the sacrificial film 146, it is preferable to use etching conditions with a high selectivity so that the sacrificial film 144 is not removed by the etching. The sacrificial film 146 can be etched by wet etching or dry etching, but by using dry etching, it is possible to prevent the pattern of the sacrificial layer 147 from shrinking.

[0187] [Removal of resist mask 143] Subsequently, the resist mask 143 is removed.

[0188] The resist mask 143 can be removed by wet etching or dry etching. In particular, it is preferable to remove the resist mask 143 by dry etching (also called plasma ashing) using oxygen gas as an etching gas.

[0189] At this time, the removal of the resist mask 143 is performed in a state in which the organic layer 116 is covered with the sacrificial film 144, and therefore the influence on the organic layer 115, the organic layer 112, the organic layer 155, and the organic layer 116 is suppressed. In particular, if the organic layer 115, the organic layer 112, the organic layer 155, and the organic layer 116 come into contact with oxygen, it may have an adverse effect on the electrical characteristics, and therefore this is suitable for performing etching using oxygen gas, such as plasma ashing. Furthermore, even when the resist mask 143 is removed by wet etching, the organic layer 116 and the like do not come into contact with the chemical solution, and therefore dissolution of the organic layer 116 and the like can be prevented.

[0190] [Etching of the sacrificial film 144] Subsequently, using the sacrificial layer 147 as a hard mask, a portion of the sacrificial film 144 is removed by etching to form a sacrificial layer 145 (FIG. 6A).

[0191] The sacrificial film 144 can be etched by wet etching or dry etching, but dry etching is preferable because it can prevent the pattern from shrinking.

[0192] [Etching of organic layer 116, organic layer 112W, organic layer 155, and organic layer 115] Subsequently, organic layer 116, organic layer 112W, organic layer 155, and a portion of organic layer 115 that is not covered with sacrificial layer 145 are removed by etching to form slit 120. By forming slit 120, a portion of organic layer 112W is removed by etching, and organic layer 112a, organic layer 112b, and organic layer 112c are formed.

[0193] At this time, organic layer 112W and a portion of organic layer 155 may be separated by etching, resulting in the formation of layers 135R, 135G, and 135B, which are pieces of organic layer 112W, and layer 135S, which is a piece of organic layer 155.

[0194] In particular, dry etching using an etching gas that does not contain oxygen as a main component is preferably used for etching organic layer 116, organic layer 112, organic layer 155, and organic layer 115. This suppresses deterioration of organic layer 116, organic layer 112, organic layer 155, and organic layer 115, thereby achieving a highly reliable display device. Examples of etching gases that do not contain oxygen as a main component include noble gases such as CF4, C4F8, SF6, CHF3, Cl2, H2O, BCl3, H2, and He. Also, a mixed gas of any of the above gases and a dilution gas that does not contain oxygen can be used as the etching gas.

[0195] The etching of organic layer 116, organic layer 112, organic layer 155, and organic layer 115 is not limited to the above, and may be dry etching using other gases or wet etching.

[0196] Furthermore, when dry etching is used to etch the organic layers 116, 112, 155, and 115 using oxygen gas or a mixed gas containing oxygen gas as an etching gas, the etching rate can be increased. Therefore, etching can be performed under low power conditions while maintaining a sufficiently high etching rate, thereby reducing damage caused by etching. Furthermore, problems such as adhesion of reaction products generated during etching can be suppressed. For example, a mixed gas obtained by adding oxygen gas to the above-mentioned etching gas that does not contain oxygen as a main component can be used as the etching gas.

[0197] When the organic layer 116, the organic layer 112, the organic layer 155, and the organic layer 115 are etched, the layer 101 is exposed. For example, an insulating layer is preferably formed on the upper surface of the layer 101. For example, the insulating layer has an exposed region on the upper surface of the layer 101. For the insulating layer, a film having high resistance to etching of the organic layer 115 is preferably used. Note that when the organic layer 115 is etched, the upper portion of the insulating layer may be etched, and the portion not covered by the organic layer 115 may become thinner.

[0198] The sacrificial layer 147 may be etched simultaneously with etching the organic layer 116, the organic layer 112, the organic layer 155, or the organic layer 115. Etching the organic layer 116, the organic layer 112, the organic layer 155, or the organic layer 115 and the sacrificial layer 147 by the same treatment is preferable because it simplifies the process and reduces the manufacturing cost of the display device.

[0199] [Removal of Sacrificial Layer] Next, the sacrificial layer 147 is removed to expose the upper surface of the sacrificial layer 145 (FIG. 6B). At this time, it is preferable to leave the sacrificial layer 145. However, it is not necessary to remove the sacrificial layer 147 at this point.

[0200] [Formation of insulating film 125f] Subsequently, an insulating film 125f is formed to cover the sacrificial layer 145 and the slits 120.

[0201] The insulating film 125f functions as a barrier layer that prevents impurities such as water from diffusing into the EL layer. The insulating film 125f is preferably formed by the ALD method, which has excellent step coverage, because it can adequately cover the side surfaces of the EL layer.

[0202] It is preferable that the insulating film 125f is the same film as the sacrificial layer 145, because they can be etched simultaneously in a later step. For example, it is preferable that the insulating film 125f and the sacrificial layer 145 are made of an inorganic insulating material such as aluminum oxide, hafnium oxide, or silicon oxide formed by the ALD method.

[0203] The material that can be used for the insulating film 125f is not limited to this, and any material that can be used for the sacrificial film 144 can be used as appropriate.

[0204] [Formation of Resin Layer 126] Next, a resin layer 126 is formed in the region overlapping with the slit 120 (FIG. 6C). The resin layer 126 can be formed by the same method as the resin layer 163. For example, the resin layer 126 can be formed by forming a photosensitive resin, followed by exposure and development. The resin layer 126 may also be formed by forming the resin over the entire surface, and then etching part of the resin by ashing or the like.

[0205] Here, an example is shown in which the resin layer 126 is formed to have a width that matches the width of the slit 120.

[0206] [Etching of insulating film 125f and sacrificial layer 145] Next, the insulating film 125f and the sacrificial layer 145 are etched away from the portions not covered by the resin layer 126 to expose the upper surface of the organic layer 116. As a result, the insulating layer 125 and the sacrificial layer 145 are formed in the region covered by the resin layer 126 (FIG. 6D).

[0207] It is preferable to etch the insulating film 125f and the sacrificial layer 145 in the same process. In particular, it is preferable to etch the sacrificial layer 145 by wet etching, which causes less etching damage to the organic layer 116. For example, it is preferable to use wet etching using a tetramethylammonium hydroxide solution (TMAH), dilute hydrofluoric acid, oxalic acid, phosphoric acid, acetic acid, nitric acid, or a mixture of these.

[0208] Alternatively, an organic material may be used for either or both of the insulating film 125f and the sacrificial layer 145. For example, a material that can be dissolved in a chemically stable solvent may be used as the organic material for at least the film located at the top of the light-emitting layer. In particular, it is preferable to remove the material by dissolving it in a solvent such as water or alcohol. Here, various alcohols such as ethyl alcohol, methyl alcohol, isopropyl alcohol (IPA), or glycerin can be used as the alcohol that can dissolve the insulating film 125f and the sacrificial layer 145.

[0209] After removing the insulating film 125f and the sacrificial layer 145, it is preferable to perform a drying treatment to remove water contained inside the organic layer 115, the organic layer 112, the organic layer 155, the organic layer 116, etc., and water adsorbed on the surface. For example, it is preferable to perform a heat treatment in an inert gas atmosphere or a reduced pressure atmosphere. The heat treatment can be performed at a substrate temperature of 50°C or higher and 200°C or lower, preferably 60°C or higher and 150°C or lower, and more preferably 70°C or higher and 120°C or lower. A reduced pressure atmosphere is preferable because it allows drying at a lower temperature.

[0210] By removing the insulating film 125f and the sacrificial layer 145, the upper surface of the connection electrode 111C is exposed.

[0211] [Formation of organic layer 114] Subsequently, the organic layer 114 is formed to cover the organic layer 116, the insulating layer 125, the sacrificial layer 145, the resin layer 126, and the like.

[0212] The organic layer 114 can be formed by the same method as the organic layer 115. When the organic layer 114 is formed by vapor deposition, a shielding mask may be used to prevent the organic layer 114 from being formed on the connection electrode 111C.

[0213] [Formation of Common Electrode 113] Subsequently, the common electrode 113 is formed to cover the organic layer 114 .

[0214] The common electrode 113 can be formed by a film formation method such as evaporation or sputtering, or by stacking a film formed by evaporation and a film formed by sputtering.

[0215] The common electrode 113 is preferably formed so as to encompass the region where the organic layer 114 is formed. That is, the edge of the organic layer 114 can be configured to overlap the common electrode 113. The common electrode 113 may be formed using a shielding mask.

[0216] 1D, for example, the organic layer 114 is sandwiched between the connection electrode 111C and the common electrode 113. In this case, it is preferable to use a material with as low an electrical resistance as possible for the organic layer 114. Alternatively, it is preferable to form the organic layer 114 as thin as possible to reduce the electrical resistance in the thickness direction of the organic layer 114. For example, by using an electron-injecting or hole-injecting material with a thickness of 1 nm to 5 nm, preferably 1 nm to 3 nm, for the organic layer 114, it may be possible to reduce the electrical resistance between the connection electrode 111C and the common electrode 113 to a negligible level.

[0217] Alternatively, the organic layer 114 may not be provided between the connection electrode 111C and the common electrode 113. In such a configuration, the connection electrode 111C and the common electrode 113 are in contact with each other, so that the contact resistance between them can be made extremely small, thereby reducing power consumption.

[0218] [Formation of protective layer] Next, a protective layer 121 is formed on the common electrode 113 (FIG. 6E). The inorganic insulating film used for the protective layer 121 is preferably formed by sputtering, PECVD, or ALD. The ALD method is particularly preferred because it has excellent step coverage and is less likely to cause defects such as pinholes. The organic insulating film is preferably formed by inkjet printing, which allows for the formation of a uniform film in the desired area.

[0219] In this manner, the display device shown in FIGS. 1A to 1C can be manufactured.

[0220] In the above example, the resin layer 126 is formed so that its width is equal to that of the slit 120, but the resin layer 126 and the slit 120 may be formed so that their widths are wider.

[0221] FIG. 7A is a schematic cross-sectional view at the point in time when the resin layer 126 is formed after the insulating film 125f is formed.

[0222] Subsequently, in the same manner as above, the insulating film 125f and the sacrificial layer 145 are etched. At this time, the portion of the sacrificial layer 145 covered with the resin layer 126 remains as a piece of the sacrificial layer 145.

[0223] Subsequently, the organic layer 114, the common electrode 113, and the protective layer 121 are formed in the same manner as above, thereby fabricating a display device as shown in FIG. 7B.

[0224] Furthermore, after forming the resin layer 126 that is wider than the slit 120, the upper part of the resin layer 126 is etched by ashing or the like, so that the resin layer 126 can be formed only inside the slit 120. At this time, it is preferable to bring the upper surface of the resin layer 126 as close as possible to the height of the upper surface of the adjacent organic layer 116. This can reduce the step between the portion overlapping with the slit 120 and both ends of the portion, and can improve the step coverage of the organic layer 114, etc.

[0225] [Production method example 2] 5A to 6E show an example in which the organic layer 112W is formed first and then the organic layer 155 is formed, but the order of formation is not limited to this. An example in which the organic layer 112W is formed after the organic layer 155 is formed will be shown with reference to FIGS. 8A to 8D.

[0226] First, the pixel electrodes 111a, 111b, 111c, and 111S are formed on the layer 101.

[0227] Subsequently, the organic layer 115 is formed to cover the pixel electrodes 111a, 111b, 111c, and 111S.

[0228] Next, an organic layer 155 is formed on the organic layer 115. The organic layer 155 is formed using FMM 151S so as to overlap with the pixel electrode 111S (FIG. 8A). In FIG. 8A, the organic layer 155 extends outward beyond the pixel electrode 111S and is also formed on the adjacent pixel electrode 111b.

[0229] Next, organic layer 112W is formed using FMM 151W (FIG. 8B). In FIG. 8B, organic layer 112W extends beyond the opening of FMM 151W and is also formed on organic layer 155. As a result, a portion where organic layer 112W is stacked is formed on organic layer 155.

[0230] Next, sacrificial layers 147 and 145 are fabricated, and organic layers 116, 112W, 155, and a portion of organic layer 115 that is not covered by sacrificial layer 145 are removed by etching to form slits 120 (FIG. 8C).

[0231] Next, the sacrificial layer 147 is removed to expose the upper surface of the sacrificial layer 145. Next, an insulating film 125f is formed to cover the sacrificial layer 145 and the slits 120. Next, a resin layer 126 is formed in the area overlapping the slits 120. Next, the insulating film 125f and the sacrificial layer 145 are etched away from the portions not covered by the resin layer 126 to expose the upper surface of the organic layer 116. Next, the organic layer 114, the common electrode 113, and the protective layer 121 are formed, thereby fabricating the display device shown in FIG. 8D.

[0232] This completes the description of the example of the method for manufacturing the display device.

[0233] [Configuration example 2] Further configuration examples of the display device according to one embodiment of the present invention will be described below.

[0234] Fig. 9A is a schematic cross-sectional view of a display device. Fig. 9A shows a cross section in which light-emitting element 140a, light-receiving element 140S, light-emitting element 140c, and light-receiving element 140S are arranged in this order, and a cross section of a region including connection portion 130. In Fig. 9A, first light-receiving element 140S is represented as light-receiving element 140S1, and second light-receiving element 140S is represented as light-receiving element 140S2. Fig. 9B is a schematic cross-sectional view enlarging slit 120 located between light-emitting element 140a and light-receiving element 140S1 and its vicinity.

[0235] The light-emitting element 140c has a pixel electrode 111c, an organic layer 115, an organic layer 112c, an organic layer 116, an organic layer 114, and a common electrode 113. In Fig. 9A, a layer 135B which is a part (piece) of the organic layer 112c separated by the slit 120 is provided near the light-receiving element 140S1 and near the light-receiving element 140S2.

[0236] Below the pixel electrode 111, a conductive layer 161, a conductive layer 162, and a resin layer 163 are provided.

[0237] The conductive layer 161 is provided over the insulating layer 105. The conductive layer 161 has a portion that penetrates the insulating layer 105 in an opening provided in the insulating layer 105. The conductive layer 161 functions as a wiring or an electrode that electrically connects a wiring, a transistor, an electrode, or the like (not shown) located below the insulating layer 105 to the pixel electrode 111.

[0238] The conductive layer 161 has a recess formed in a portion corresponding to the opening of the insulating layer 105. The resin layer 163 is provided to fill the recess and functions as a planarizing film. The flatter the upper surface of the resin layer 163, the better, but the surface may also have a gently curved shape. While FIG. 6A and other figures show an example in which the upper surface of the resin layer 163 has a corrugated shape with recesses and protrusions, this is not limiting. For example, the upper surface of the resin layer 163 may be a convex surface, a concave surface, or a flat surface.

[0239] A conductive layer 162 is provided over the conductive layer 161 and the resin layer 163. The conductive layer 162 functions as an electrode that electrically connects the conductive layer 161 and the pixel electrode 111.

[0240] Here, when the light-emitting element 140 is a top-emission light-emitting element, a film reflective to visible light is used for the conductive layer 162, and a film transmissive to visible light is used for the pixel electrode 111, so that the conductive layer 162 can function as a reflective electrode. Furthermore, the conductive layer 162 and the pixel electrode 111 can also be provided above an opening (also referred to as a contact portion) of the insulating layer 105 via the resin layer 163, so that the opening can be a light-emitting region. Therefore, the aperture ratio can be increased.

[0241] Similarly, when the light receiving element 140S is used as a photoelectric conversion element that receives light from above, a reflective film can be used for the conductive layer 162, and a light-transmitting film can be used for the pixel electrode 111. Furthermore, since the contact portion can also function as a light receiving region, the light receiving area can be enlarged and the light receiving sensitivity can be improved.

[0242] The thickness of each pixel electrode 111 may be different. In this case, the pixel electrode 111 can be used as an optical adjustment layer for the microcavity. When a microcavity is used, a film having transparency and reflectivity is used as the common electrode.

[0243] 9A and 9B show an example in which the shape of the resin layer 126 is different from that described above.

[0244] As shown in FIG. 9B , the upper part of the resin layer 126 has a shape that is wider than the slits 120. As will be described later, the insulating layer 125 is processed using the resin layer 126 as an etching mask, so a portion of the insulating layer 125 that is covered by the upper part of the resin layer 126 remains. Furthermore, a portion of the sacrificial layer 145 used in the manufacturing process of the display device also remains for the same reason. Specifically, the sacrificial layer 145 is provided on the organic layer 116 in the vicinity of the slits 120. Furthermore, a portion of the insulating layer 125 is provided so as to cover the upper surface of the sacrificial layer 145. Furthermore, the resin layer 126 is provided so as to cover the sacrificial layer 145 and the insulating layer 125.

[0245] In this case, it is preferable that the end of the insulating layer 125 and the end of the sacrificial layer 145 each have a tapered shape, which can improve the step coverage of the organic layer 114 and the like.

[0246] 9A and 9B, the layer 135R, the layer 135B, and the layer 135S each have regions that contact the insulating layer 125 and overlap with the insulating layer 125, the sacrificial layer 145, and the resin layer 126. The layer 135R, the layer 135B, and the layer 135S each have portions that overlap with the pixel electrodes of the adjacent light-emitting elements or light-receiving elements.

[0247] This embodiment mode can be implemented by appropriately combining at least a part thereof with other embodiment modes described in this specification.

[0248] (Embodiment 2) In this embodiment, a structural example of a display device according to one embodiment of the present invention will be described. Here, a display device capable of displaying an image will be described, but the display device can also be used by using a light-emitting element as a light source.

[0249] The display device of the present embodiment can be a high-resolution display device or a large-sized display device. Therefore, the display device of the present embodiment can be used in electronic devices having relatively large screens, such as television devices, desktop or notebook personal computers, computer monitors, digital signage, and large game machines such as pachinko machines, as well as in the display units of digital cameras, digital video cameras, digital photo frames, mobile phones, portable game machines, smartphones, wristwatch-type terminals, tablet terminals, personal digital assistants, and sound reproduction devices.

[0250] [Display device 400] FIG. 10 shows a perspective view of display device 400, and FIG. 11A shows a cross-sectional view of display device 400.

[0251] The display device 400 has a configuration in which a substrate 452 and a substrate 451 are bonded together. In Fig. 10, the substrate 452 is clearly indicated by a dashed line.

[0252] The display device 400 includes a display unit 462, a circuit 464, wiring 465, etc. Fig. 10 shows an example in which an IC 473 and an FPC 472 are mounted on the display device 400. Therefore, the configuration shown in Fig. 11 can also be said to be a display module including the display device 400, an IC (integrated circuit), and an FPC.

[0253] The circuit 464 can be, for example, a scanning line driver circuit.

[0254] The wiring 465 has a function of supplying signals and power to the display portion 462 and the circuit 464. The signals and power are input to the wiring 465 from the outside via the FPC 472 or input to the wiring 465 from the IC 473.

[0255] 10 shows an example in which an IC 473 is provided on a substrate 451 by a COG (Chip On Glass) method or a COF (Chip on Film) method. The IC 473 may be, for example, an IC having a scanning line driver circuit or a signal line driver circuit. Note that the display device 400 and the display module may not include an IC. Alternatively, the IC may be mounted on an FPC by a COF method or the like.

[0256] 11A shows an example of a cross section of display device 400, where a part of a region including FPC 472, a part of circuit 464, a part of display unit 462, and a part of a region including a connection portion are cut away. Fig. 11A shows an example of a cross section of display unit 462, where a region including light-emitting element 430b that emits green light (G) and light-receiving element 440 that receives reflected light (L) is cut away.

[0257] The display device 400 shown in FIG. 11A includes the transistor 242, the transistor 260, the transistor 258, the light-emitting element 430b, the light-receiving element 440, and the like between a substrate 453 and a substrate 454.

[0258] The light emitting element 430b and the light receiving element 440 may be any of the light emitting elements or light receiving elements exemplified above.

[0259] Here, when a pixel of a display device has three types of subpixels having light-emitting elements that emit different colors, the three subpixels may include subpixels of three colors: red (R), green (G), and blue (B), or subpixels of three colors: yellow (Y), cyan (C), and magenta (M). When a pixel of a display device has four subpixels, the four subpixels may include subpixels of four colors: R, G, B, and white (W), or subpixels of four colors: R, G, B, and Y. Alternatively, the subpixels may include light-emitting elements that emit infrared light.

[0260] Furthermore, the light receiving element 440 may be a photoelectric conversion element sensitive to light in the red, green, or blue wavelength range, or a photoelectric conversion element sensitive to light in the infrared wavelength range.

[0261] The substrate 454 and the protective layer 416 are bonded together via an adhesive layer 442. The adhesive layer 442 is provided to overlap the light emitting element 430b and the light receiving element 440, respectively, and a solid sealing structure is applied to the display device 400. The substrate 454 is provided with a colored layer 418 and a light-shielding layer 417.

[0262] The light-emitting element 430b and the light-receiving element 440 each have a conductive layer 411a, a conductive layer 411b, and a conductive layer 411c as pixel electrodes. The conductive layer 411b is reflective to visible light and functions as a reflective electrode. The conductive layer 411c is transparent to visible light and functions as an optical adjustment layer.

[0263] A conductive layer 411a included in the light-emitting element 430b is connected to a conductive layer 272b included in the transistor 260 through an opening provided in the insulating layer 294. The transistor 260 has a function of controlling driving of the light-emitting element. On the other hand, the conductive layer 411a included in the light-receiving element 440 is electrically connected to a conductive layer 272b included in the transistor 258. The transistor 258 has a function of controlling the timing of exposure using the light-receiving element 440, for example.

[0264] An EL layer 412b or a PD layer 412S is provided to cover the pixel electrode. An insulating layer 421 is provided in contact with the side surfaces of the EL layer 412b and the PD layer 412S, and a resin layer 422 is provided to fill the recesses in the insulating layer 421. An organic layer 414, a common electrode 413, and a protective layer 416 are provided to cover the EL layer 412b and the PD layer 412S. Providing the protective layer 416 to cover the light-emitting element prevents impurities such as water from entering the light-emitting element, thereby improving the reliability of the light-emitting element.

[0265] Furthermore, a layer 415b and a layer 415S are provided in contact with the insulating layer 421. The layer 415b contains the same material as the EL layer 412b, and the layer 415S contains the same material as the PD layer 412S.

[0266] A portion of the layer 415b has a portion covering the ends of the conductive layer 411a, the conductive layer 411b, and the conductive layer 411c of the light-receiving element 440, and a portion overlapping with the PD layer 412S and the conductive layer 411c. A portion of the layer 415S has a portion covering the ends of the conductive layer 411a, the conductive layer 411b, and the conductive layer 411c of the light-emitting element 430b, and a portion overlapping with the EL layer 412b and the conductive layer 411c.

[0267] Light emitted by light-emitting element 430b passes through colored layer 418 and is emitted toward substrate 452 as light G. Light-receiving element 440 receives light L incident through substrate 452 and converts it into an electrical signal. It is preferable that substrate 452 be made of a material that is highly transparent to visible light.

[0268] The transistor 242, the transistor 260, and the transistor 258 are all formed over a substrate 451. These transistors can be manufactured using the same material and the same process.

[0269] Note that the transistor 242, the transistor 260, and the transistor 258 may be fabricated to have different structures. For example, transistors may be fabricated with or without a back gate, or transistors may be fabricated with different materials and / or thicknesses of semiconductors, gate electrodes, gate insulating layers, source electrodes, and drain electrodes.

[0270] The substrate 453 and the insulating layer 262 are bonded together by an adhesive layer 455 .

[0271] The display device 400 is manufactured by first bonding a fabrication substrate provided with the insulating layer 262, the transistors, the light-emitting elements, the light-receiving elements, and the like to a substrate 454 provided with the light-shielding layer 417 and the coloring layer 418 with an adhesive layer 442. Then, the fabrication substrate is peeled off, and a substrate 453 is attached to the exposed surface, thereby transferring each component formed on the fabrication substrate to the substrate 453. The substrate 453 and the substrate 454 are preferably flexible. This can increase the flexibility of the display device 400.

[0272] A connection portion 244 is provided in an area of ​​the substrate 453 where the substrate 454 does not overlap. In the connection portion 244, a wiring 465 is electrically connected to the FPC 472 via a conductive layer 466 and a connection layer 292. The conductive layer 466 can be obtained by processing the same conductive film as the pixel electrode. This allows the connection portion 244 and the FPC 472 to be electrically connected via the connection layer 292.

[0273] The transistor 242, the transistor 260, and the transistor 258 each include a conductive layer 471 functioning as a gate, an insulating layer 261 functioning as a gate insulating layer, a semiconductor layer 281 including a channel formation region 281i and a pair of low-resistance regions 281n, a conductive layer 272a connected to one of the pair of low-resistance regions 281n, a conductive layer 272b connected to the other of the pair of low-resistance regions 281n, an insulating layer 275 functioning as a gate insulating layer, a conductive layer 273 functioning as a gate, and an insulating layer 265 covering the conductive layer 273. The insulating layer 261 is located between the conductive layer 471 and the channel formation region 281i. The insulating layer 275 is located between the conductive layer 273 and the channel formation region 281i.

[0274] The conductive layer 272a and the conductive layer 272b are each connected to the low-resistance region 281n through an opening provided in the insulating layer 265. One of the conductive layer 272a and the conductive layer 272b functions as a source, and the other functions as a drain.

[0275] 11A shows an example in which the insulating layer 275 covers the top surface and side surfaces of the semiconductor layer. The conductive layer 272a and the conductive layer 272b are connected to the low-resistance region 281n through openings provided in the insulating layer 275 and the insulating layer 265, respectively.

[0276] 11B, the insulating layer 275 overlaps with the channel formation region 281i of the semiconductor layer 281 but does not overlap with the low-resistance region 281n. For example, the structure shown in FIG. 11B can be manufactured by processing the insulating layer 275 using the conductive layer 273 as a mask. In FIG. 11B, the insulating layer 265 is provided to cover the insulating layer 275 and the conductive layer 273, and the conductive layer 272a and the conductive layer 272b are each connected to the low-resistance region 281n through openings in the insulating layer 265. Furthermore, an insulating layer 268 may be provided to cover the transistor.

[0277] The structure of the transistor included in the display device of this embodiment is not particularly limited. For example, a planar transistor, a staggered transistor, an inverted staggered transistor, or the like can be used. Furthermore, either a top-gate transistor or a bottom-gate transistor structure may be used. Alternatively, gates may be provided above and below a semiconductor layer in which a channel is formed.

[0278] The transistor 242, the transistor 260, and the transistor 258 each have a structure in which a semiconductor layer in which a channel is formed is sandwiched between two gates. The two gates may be connected and supplied with the same signal to drive the transistor. Alternatively, the threshold voltage of the transistor may be controlled by applying a potential for controlling the threshold voltage to one of the two gates and a potential for driving the other.

[0279] The crystallinity of a semiconductor material used for a semiconductor layer of a transistor is not particularly limited, and any of an amorphous semiconductor, a single-crystal semiconductor, and a semiconductor having crystallinity other than single crystal (a microcrystalline semiconductor, a polycrystalline semiconductor, or a semiconductor having a crystalline region in part) may be used. The use of a single-crystal semiconductor or a crystalline semiconductor is preferable because it can suppress deterioration of transistor characteristics.

[0280] The semiconductor layer of the transistor preferably includes a metal oxide (also referred to as an oxide semiconductor). That is, the display device of this embodiment preferably includes a transistor using a metal oxide for a channel formation region (hereinafter referred to as an OS transistor).

[0281] The band gap of the metal oxide used for the semiconductor layer of the transistor is preferably 2 eV or more, more preferably 2.5 eV or more. Use of a metal oxide with a wide band gap can reduce the off-state current of the OS transistor.

[0282] The metal oxide preferably contains at least indium or zinc, and more preferably contains indium and zinc. For example, the metal oxide preferably contains indium, M (where M is one or more selected from gallium, aluminum, yttrium, tin, silicon, boron, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, and cobalt), and zinc. In particular, M is preferably one or more selected from gallium, aluminum, yttrium, and tin, and more preferably gallium. Note that a metal oxide containing indium, M, and zinc may be referred to as an In-M-Zn oxide hereinafter.

[0283] When the metal oxide is an In-M-Zn oxide, the atomic ratio of In in the In-M-Zn oxide is preferably equal to or greater than the atomic ratio of M. Examples of atomic ratios of metal elements in such In-M-Zn oxides include compositions in which In:M:Zn=1:1:1 or thereabouts, In:M:Zn=1:1:1.2 or thereabouts, In:M:Zn=2:1:3 or thereabouts, In:M:Zn=3:1:2 or thereabouts, In:M:Zn=4:2:3 or thereabouts, In:M:Zn=4:2:4.1 or thereabouts, In:M:Zn=5:1:3 or thereabouts, In:M:Zn=5:1:6 or thereabouts, In:M:Zn=5:1:7 or thereabouts, In:M:Zn=5:1:8 or thereabouts, In:M:Zn=6:1:6 or thereabouts, and In:M:Zn=5:2:5 or thereabouts, etc. Note that "nearby compositions" includes a range of ±30% of the desired atomic ratio. By increasing the atomic ratio of indium in the metal oxide, the on-state current, field-effect mobility, and the like of a transistor can be increased.

[0284] For example, when describing a composition with an atomic ratio of In:Ga:Zn=4:2:3 or thereabout, this includes a case where, when the atomic ratio of In is 4, the atomic ratio of Ga is 1 to 3 and the atomic ratio of Zn is 2 to 4. Furthermore, when describing a composition with an atomic ratio of In:Ga:Zn=5:1:6 or thereabout, this includes a case where, when the atomic ratio of In is 5, the atomic ratio of Ga is greater than 0.1 and less than 2 and the atomic ratio of Zn is greater than 5 and less than 7. Furthermore, when describing a composition with an atomic ratio of In:Ga:Zn=1:1:1 or thereabout, this includes a case where, when the atomic ratio of In is 1, the atomic ratio of Ga is greater than 0.1 and less than 2 and the atomic ratio of Zn is greater than 0.1 and less than 2.

[0285] The atomic ratio of In in the In-M-Zn oxide may be less than the atomic ratio of M. Examples of atomic ratios of metal elements in such In-M-Zn oxide include compositions of In:M:Zn=1:3:2 or thereabouts, In:M:Zn=1:3:3 or thereabouts, and In:M:Zn=1:3:4 or thereabouts. Increasing the atomic ratio of M in the metal oxide increases the band gap of the In-M-Zn oxide, thereby improving its resistance to negative bias stress testing under light irradiation. Specifically, it reduces the change in threshold voltage or shift voltage (Vsh) measured in a negative bias temperature illumination stress (NBTIS) test of a transistor. The shift voltage (Vsh) is defined as the Vg at which the tangent to the maximum slope of the drain current (Id)-gate voltage (Vg) curve of the transistor intersects with the line at Id=1 pA.

[0286] Alternatively, the semiconductor layer of the transistor may include silicon, such as amorphous silicon or crystalline silicon (low-temperature polysilicon (also referred to as LTPS) or single-crystal silicon).

[0287] In particular, low-temperature polysilicon has relatively high mobility and can be formed on a glass substrate, making it suitable for use in display devices. For example, a transistor using low-temperature polysilicon in a semiconductor layer (LTPS transistor) can be applied to the transistor 242 or the like in a driver circuit, and a transistor using an oxide semiconductor in a semiconductor layer (OS transistor) can be applied to the transistor 260, the transistor 258, or the like provided in a pixel. By using both an LTPS transistor and an OS transistor, a display device with low power consumption and high driving capability can be realized. A structure in which an LTPS transistor and an OS transistor are combined is sometimes referred to as LTPO. Note that, as a more preferred example, it is preferable to use an OS transistor as a transistor that functions as a switch for controlling conduction / non-conduction between wirings and an LTPS transistor as a transistor for controlling current.

[0288] Alternatively, the semiconductor layer of the transistor may include a layered material that functions as a semiconductor. A layered material is a general term for a group of materials that have a layered crystal structure. A layered crystal structure is a structure in which layers formed by covalent or ionic bonds are stacked via bonds weaker than covalent or ionic bonds, such as van der Waals forces. A layered material has high electrical conductivity within a unit layer, that is, high two-dimensional electrical conductivity. By using a material that functions as a semiconductor and has high two-dimensional electrical conductivity in the channel formation region, a transistor with a large on-state current can be provided.

[0289] Examples of the layered material include graphene, silicene, and chalcogenides. Chalcogenides are compounds containing chalcogen (elements belonging to Group 16). Examples of chalcogenides include transition metal chalcogenides and Group 13 chalcogenides. Specific examples of transition metal chalcogenides applicable to the semiconductor layer of a transistor include molybdenum sulfide (typically MoS2), molybdenum selenide (typically MoSe2), molybdenum tellurium (typically MoTe2), tungsten sulfide (typically WS2), tungsten selenide (typically WSe2), tungsten tellurium (typically WTe2), hafnium sulfide (typically HfS2), hafnium selenide (typically HfSe2), zirconium sulfide (typically ZrS2), and zirconium selenide (typically ZrSe2).

[0290] The display device shown in FIG. 11A includes an OS transistor and a common layer between light-emitting elements that is separated. This configuration significantly reduces leakage current that may flow through the transistor and leakage current that may flow between adjacent light-emitting elements (also referred to as lateral leakage current or side leakage current). Furthermore, when an image is displayed on the display device, the viewer can observe one or more of image clarity, image sharpness, high saturation, and a high contrast ratio. By significantly reducing leakage current that may flow through the transistor and lateral leakage current between light-emitting elements, a display with extremely reduced light leakage (so-called floating black) that may occur during black display (also referred to as true black display) can be achieved.

[0291] In particular, by applying a color-coded structure (SBS structure) to light-emitting elements with an MML structure, the layers between the light-emitting elements (for example, organic layers shared between the light-emitting elements, also called common layers) are separated, resulting in a display with no or very little side leakage.

[0292] The transistors included in the circuit 464 may have the same structure as or different from the transistors included in the display portion 462. The transistors included in the circuit 464 may all have the same structure or may have two or more types of structures. Similarly, the transistors included in the display portion 462 may all have the same structure or may have two or more types of structures.

[0293] At least one insulating layer covering the transistor is preferably made of a material that is resistant to the diffusion of impurities such as water and hydrogen. This allows the insulating layer to function as a barrier layer. With this structure, it is possible to effectively prevent impurities from diffusing into the transistor from the outside, thereby improving the reliability of the display device.

[0294] It is preferable to use an inorganic insulating film for each of the insulating layers 261, 262, 265, 268, and 275. Examples of the inorganic insulating film that can be used include a silicon nitride film, a silicon oxynitride film, a silicon oxide film, a silicon nitride oxide film, an aluminum oxide film, and an aluminum nitride film. Alternatively, a hafnium oxide film, an yttrium oxide film, a zirconium oxide film, a gallium oxide film, a tantalum oxide film, a magnesium oxide film, a lanthanum oxide film, a cerium oxide film, and a neodymium oxide film may also be used. Two or more of the above-described inorganic insulating films may be stacked.

[0295] Here, organic insulating films often have lower barrier properties than inorganic insulating films. Therefore, it is preferable that the organic insulating film has an opening near the edge of the display device 400. This can prevent impurities from entering from the edge of the display device 400 through the organic insulating film. Alternatively, the organic insulating film may be formed so that the edge of the organic insulating film is located inside the edge of the display device 400, so that the organic insulating film is not exposed at the edge of the display device 400.

[0296] An organic insulating film is suitable for the insulating layer 294, which functions as a planarizing layer. Materials that can be used for the organic insulating film include acrylic resin, polyimide resin, epoxy resin, polyamide resin, polyimideamide resin, siloxane resin, benzocyclobutene resin, phenol resin, and precursors of these resins.

[0297] It is preferable to provide a light-shielding layer 417 on the surface of substrate 454 facing substrate 453. In addition, various optical members can be arranged on the outside of substrate 454. Examples of optical members include a polarizing plate, a retardation plate, a light diffusion layer (such as a diffusion film), an anti-reflection layer, and a light-collecting film. In addition, an antistatic film that suppresses the adhesion of dust, a water-repellent film that makes it difficult for dirt to adhere, a hard coat film that suppresses the occurrence of scratches during use, an impact absorbing layer, etc. may be arranged on the outside of substrate 454.

[0298] 11A shows a connection portion 278. The common electrode 413 and a wiring are electrically connected at the connection portion 278. FIG. 11A shows an example in which the same layered structure as that of the pixel electrode is applied to the wiring.

[0299] The substrate 453 and the substrate 454 can each be made of glass, quartz, ceramic, sapphire, resin, metal, alloy, semiconductor, or the like. A material that transmits light is used for the substrate on the side from which light from the light-emitting element is extracted. Using a flexible material for the substrate 453 and the substrate 454 can increase the flexibility of the display device. Alternatively, a polarizing plate may be used for the substrate 453 or the substrate 454.

[0300] Substrates 453 and 454 can be made of polyester resins such as polyethylene terephthalate (PET) and polyethylene naphthalate (PEN), polyacrylonitrile resin, acrylic resin, polyimide resin, polymethyl methacrylate resin, polycarbonate (PC) resin, polyethersulfone (PES) resin, polyamide resin (nylon, aramid, etc.), polysiloxane resin, cycloolefin resin, polystyrene resin, polyamideimide resin, polyurethane resin, polyvinyl chloride resin, polyvinylidene chloride resin, polypropylene resin, polytetrafluoroethylene (PTFE) resin, ABS resin, cellulose nanofiber, etc. One or both of substrates 453 and 454 may be made of glass having a thickness sufficient to provide flexibility.

[0301] When a circularly polarizing plate is superimposed on a display device, it is preferable that the display device has a substrate with high optical isotropy. A substrate with high optical isotropy has small birefringence (or a small amount of birefringence).

[0302] The absolute value of the retardation (phase difference) of a substrate having high optical isotropy is preferably 30 nm or less, more preferably 20 nm or less, and even more preferably 10 nm or less.

[0303] Examples of films with high optical isotropy include triacetyl cellulose (TAC, also known as cellulose triacetate) films, cycloolefin polymer (COP) films, cycloolefin copolymer (COC) films, and acrylic films.

[0304] Furthermore, when a film is used as a substrate, the film may absorb water, causing deformation such as wrinkles in the display panel. Therefore, it is preferable to use a film with low water absorption for the substrate. For example, it is preferable to use a film with a water absorption rate of 1% or less, more preferably 0.1% or less, and even more preferably 0.01% or less.

[0305] The adhesive layer can be made of various curable adhesives, such as photo-curable adhesives (e.g., ultraviolet curable), reactive curable adhesives, thermosetting adhesives, and anaerobic adhesives. Examples of such adhesives include epoxy resin, acrylic resin, silicone resin, phenolic resin, polyimide resin, imide resin, PVC (polyvinyl chloride) resin, PVB (polyvinyl butyral) resin, and EVA (ethylene vinyl acetate) resin. Materials with low moisture permeability, such as epoxy resin, are particularly preferred. Two-component resins may also be used. Adhesive sheets, etc., may also be used.

[0306] The connection layer 292 may be made of an anisotropic conductive film (ACF), an anisotropic conductive paste (ACP), or the like.

[0307] Materials that can be used for conductive layers such as the gate, source, and drain of a transistor, as well as various wirings and electrodes that constitute a display device include metals such as aluminum, titanium, chromium, nickel, copper, yttrium, zirconium, molybdenum, silver, tantalum, and tungsten, and alloys containing these metals as main components, etc. Films containing these materials can be used as a single layer or a stacked layer structure.

[0308] Examples of light-transmitting conductive materials include conductive oxides such as indium oxide, indium tin oxide, indium zinc oxide, zinc oxide, and zinc oxide containing gallium, or graphene. Alternatively, metal materials such as gold, silver, platinum, magnesium, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, palladium, and titanium, or alloy materials containing such metal materials, can be used. Alternatively, nitrides of such metal materials (e.g., titanium nitride) can be used. When using metal materials or alloy materials (or their nitrides), it is preferable to thin them sufficiently to ensure light-transmitting properties. A stacked film of the above materials can also be used as the conductive layer. For example, a stacked film of an alloy of silver and magnesium and indium tin oxide is preferable because it can enhance conductivity. These can also be used for conductive layers such as various wirings and electrodes constituting a display device, and for conductive layers (conductive layers functioning as pixel electrodes or common electrodes) of light-emitting elements.

[0309] Examples of insulating materials that can be used for each insulating layer include resins such as acrylic resin and epoxy resin, and inorganic insulating materials such as silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, and aluminum oxide.

[0310] At least a part of the configuration examples exemplified in this embodiment and the corresponding drawings can be combined as appropriate with other configuration examples or drawings.

[0311] This embodiment mode can be implemented by appropriately combining at least a part thereof with other embodiment modes described in this specification.

[0312] (Embodiment 3) In this embodiment, a display device of one embodiment of the present invention will be described with reference to FIGS.

[0313] The display device of the present embodiment can be a high-definition display device, and can therefore be used as a display unit for information terminals (wearable devices) such as wristwatches and bracelets, as well as for wearable devices that can be worn on the head, such as VR devices such as head-mounted displays and AR devices such as glasses.

[0314] [Display module] 12A shows a perspective view of a display module 280. The display module 280 includes a display device 100C and an FPC 290. Note that the display device included in the display module 280 is not limited to the display device 100C, and may be any of the display devices 100D to 100G described below.

[0315] The display module 280 has a substrate 291 and a substrate 293. The display module 280 has a display unit 288. The display unit 288 is a region that displays an image in the display module 280, and is a region where light from each pixel provided in a pixel unit 284 (described later) can be viewed.

[0316] 12B is a perspective view schematically showing the configuration on the substrate 291 side. A circuit section 282, a pixel circuit section 283 on the circuit section 282, and a pixel section 284 on the pixel circuit section 283 are stacked on the substrate 291. A terminal section 285 for connecting to an FPC 290 is provided in a portion of the substrate 291 that does not overlap with the pixel section 284. The terminal section 285 and the circuit section 282 are electrically connected by a wiring section 286 composed of a plurality of wirings.

[0317] The pixel section 284 has a plurality of periodically arranged pixels 284a. An enlarged view of one pixel 284a is shown on the right side of FIG. 12B. The pixel 284a has subpixels 110a, 110b, and 110c. The previous embodiment can be referred to for the configuration of the subpixels 110a, 110b, and 110c and their surroundings. The plurality of subpixels can be arranged in a stripe array as shown in FIG. 12B. Various light-emitting element arrangement methods, such as a delta array or a pentile array, can also be applied.

[0318] The pixel circuit section 283 has a plurality of pixel circuits 283a arranged periodically.

[0319] One pixel circuit 283a is a circuit that controls the light emission of three light-emitting elements included in one pixel 284a. One pixel circuit 283a may be configured to have three circuits that control the light emission of one light-emitting element. For example, the pixel circuit 283a may be configured to have at least one selection transistor, one current control transistor (drive transistor), and a capacitance element for each light-emitting element. In this case, a gate signal is input to the gate of the selection transistor, and a source signal is input to either the source or the drain. This realizes an active matrix display device.

[0320] The circuit portion 282 includes a circuit for driving each pixel circuit 283a of the pixel circuit portion 283. For example, it is preferable that the circuit portion 282 includes one or both of a gate line driver circuit and a source line driver circuit. In addition, the circuit portion 282 may include at least one of an arithmetic circuit, a memory circuit, a power supply circuit, and the like.

[0321] The FPC 290 functions as wiring for supplying a video signal, a power supply potential, or the like from the outside to the circuit section 282. An IC may also be mounted on the FPC 290.

[0322] The display module 280 can be configured such that one or both of the pixel circuit unit 283 and the circuit unit 282 are stacked below the pixel unit 284, thereby enabling the aperture ratio (effective display area ratio) of the display unit 288 to be extremely high. For example, the aperture ratio of the display unit 288 can be set to 40% or more and less than 100%, preferably 50% or more and 95% or less, and more preferably 60% or more and 95% or less. Furthermore, the pixels 284a can be arranged at an extremely high density, enabling the resolution of the display unit 288 to be extremely high. For example, it is preferable that the pixels 284a are arranged in the display unit 288 at a resolution of 2000 ppi or more, preferably 3000 ppi or more, more preferably 5000 ppi or more, and even more preferably 6000 ppi or more, and 20000 ppi or less, or 30000 ppi or less.

[0323] Such a display module 280 has extremely high resolution and can therefore be suitably used in VR devices such as head-mounted displays or eyeglass-type AR devices. For example, even in a configuration in which the display unit of the display module 280 is viewed through lenses, the display module 280 has an extremely high-resolution display unit 288, so that even when the display unit is enlarged with lenses, the pixels are not visible, allowing for a highly immersive display. Furthermore, the display module 280 is not limited to this, and can be suitably used in electronic devices having relatively small display units. For example, it can be suitably used in the display unit of a wearable electronic device such as a wristwatch.

[0324] [Display device 100C] 13 includes a substrate 301, subpixels 110a, 110b, and 110c, a capacitor 240, and a transistor 310. The subpixel 110a includes a light-emitting element 140a and a colored layer 129a, the subpixel 110b includes a light-emitting element 140b and a colored layer 129b, and the subpixel 110c includes a light-emitting element 140c and a colored layer 129c.

[0325] 12A and 12B. The stacked structure from the substrate 301 to the insulating layer 255b corresponds to the layer 101 including the transistors in Embodiment 1. FIG. 13 shows four transistors 310 included in the layer 101.

[0326] The transistor 310 has a channel formation region in a substrate 301. The substrate 301 can be, for example, a semiconductor substrate such as a single crystal silicon substrate. The transistor 310 includes a part of the substrate 301, a conductive layer 311, a low-resistance region 312, an insulating layer 313, and an insulating layer 314. The conductive layer 311 functions as a gate electrode. The insulating layer 313 is located between the substrate 301 and the conductive layer 311 and functions as a gate insulating layer. The low-resistance region 312 is a region in which the substrate 301 is doped with impurities and functions as either a source or a drain. The insulating layer 314 is provided to cover a side surface of the conductive layer 311 and functions as an insulating layer.

[0327] Furthermore, an element isolation layer 315 is provided between two adjacent transistors 310 so as to be embedded in the substrate 301 .

[0328] In addition, an insulating layer 261 is provided to cover the transistor 310 , and a capacitor 240 is provided on the insulating layer 261 .

[0329] Capacitor 240 has conductive layer 241, conductive layer 245, and insulating layer 243 positioned therebetween. Conductive layer 241 functions as one electrode of capacitor 240, conductive layer 245 functions as the other electrode of capacitor 240, and insulating layer 243 functions as a dielectric of capacitor 240.

[0330] The conductive layer 241 is provided over the insulating layer 261 and is buried in the insulating layer 254. The conductive layer 241 is electrically connected to one of the source and drain of the transistor 310 by a plug 271 buried in the insulating layer 261. The insulating layer 243 is provided to cover the conductive layer 241. The conductive layer 245 is provided in a region overlapping with the conductive layer 241 with the insulating layer 243 interposed therebetween.

[0331] An insulating layer 255a is provided covering the capacitor 240, an insulating layer 255b is provided on the insulating layer 255a, and light-emitting elements 140a, 140b, 140c, etc. are provided on the insulating layer 255b. In this embodiment, an example is shown in which the layered structure shown in Fig. 1B is applied to the light-emitting elements 140a, 140b, 140c, the resin layer 122 thereover, the colored layers 129a, 129b, 129c, the black matrix 129d, and the substrate 128. The substrate 128 corresponds to the substrate 293 in Fig. 12A.

[0332] The insulating layers 255a and 255b can be formed using various inorganic insulating films such as an insulating oxide film, an insulating nitride film, an insulating oxynitride film, and an insulating nitride oxide film. The insulating layer 255a is preferably formed using an insulating oxide film or an insulating oxynitride film such as a silicon oxide film, a silicon oxynitride film, or an aluminum oxide film. The insulating layer 255b is preferably formed using a nitride insulating film or an insulating nitride oxide film such as a silicon nitride film or a silicon nitride oxide film. More specifically, the insulating layer 255a is preferably formed using a silicon oxide film, and the insulating layer 255b is preferably formed using a silicon nitride film. The insulating layer 255b preferably functions as an etching protective film. Alternatively, the insulating layer 255a may be formed using a nitride insulating film or a nitride oxide insulating film, and the insulating layer 255b may be formed using an insulating oxide insulating film or an oxynitride insulating film. Although this embodiment illustrates an example in which a recess is provided in the insulating layer 255b, the insulating layer 255b does not necessarily have a recess.

[0333] In FIG. 13, the pixel electrodes of the light-emitting elements 140a, 140b, and 140c and the pixel electrode of the light-receiving element 140S are electrically connected to different transistors 310. They are electrically connected to plugs embedded in the insulating layers 255a and 255b. The plugs embedded in the insulating layers 255a and 255b, for example, are electrically connected to one of the source or drain of the transistor 310 via a conductive layer embedded in the insulating layer 254 and a plug embedded in the insulating layer 261. In FIG. 12, the plug 256 embedded in the insulating layers 255a and 255b is electrically connected to one of the source or drain of the transistor 310 via a conductive layer 241 embedded in the insulating layer 254 and a plug 271 embedded in the insulating layer 261. The height of the top surface of the insulating layer 255b and the height of the plug 256 are the same or approximately the same. Various conductive materials can be used for the plug.

[0334] [Display device 100D] 14 differs from the display device 100C mainly in the configuration of the transistors, and a description of the same parts as those of the display device 100C may be omitted.

[0335] The transistor 320 is a transistor (OS transistor) in which a metal oxide (also referred to as an oxide semiconductor) is used for a semiconductor layer in which a channel is formed.

[0336] The transistor 320 includes a semiconductor layer 321 , an insulating layer 323 , a conductive layer 324 , a pair of conductive layers 325 , an insulating layer 326 , and a conductive layer 327 .

[0337] 12A and 12B. The stacked structure from the substrate 331 to the insulating layer 255b corresponds to the layer 101 including the transistor in Embodiment 1. The substrate 331 can be an insulating substrate or a semiconductor substrate.

[0338] An insulating layer 332 is provided over a substrate 331. The insulating layer 332 functions as a barrier layer that prevents impurities such as water or hydrogen from diffusing from the substrate 331 to the transistor 320 and prevents oxygen from being released from the semiconductor layer 321 toward the insulating layer 332. The insulating layer 332 can be, for example, a film through which hydrogen or oxygen is less likely to diffuse than a silicon oxide film, such as an aluminum oxide film, a hafnium oxide film, or a silicon nitride film.

[0339] A conductive layer 327 is provided over the insulating layer 332, and an insulating layer 326 is provided to cover the conductive layer 327. The conductive layer 327 functions as a first gate electrode of the transistor 320, and part of the insulating layer 326 functions as a first gate insulating layer. An oxide insulating film such as a silicon oxide film is preferably used for at least a portion of the insulating layer 326 that is in contact with the semiconductor layer 321. The top surface of the insulating layer 326 is preferably planarized.

[0340] The semiconductor layer 321 is provided over the insulating layer 326. The semiconductor layer 321 preferably includes a metal oxide (also referred to as an oxide semiconductor) film having semiconductor properties. Materials that can be suitably used for the semiconductor layer 321 will be described in detail later.

[0341] A pair of conductive layers 325 is provided over and in contact with the semiconductor layer 321 and functions as a source electrode and a drain electrode.

[0342] An insulating layer 328 is provided to cover top surfaces and side surfaces of the pair of conductive layers 325 and side surfaces of the semiconductor layer 321, and an insulating layer 264 is provided over the insulating layer 328. The insulating layer 328 functions as a barrier layer that prevents impurities such as water or hydrogen from diffusing from the insulating layer 264 or the like to the semiconductor layer 321 and prevents oxygen from being released from the semiconductor layer 321. The insulating layer 328 can be an insulating film similar to the insulating layer 332.

[0343] An opening reaching the semiconductor layer 321 is provided in the insulating layer 328 and the insulating layer 264. An insulating layer 323 and a conductive layer 324 are buried inside the opening and are in contact with the side surfaces of the insulating layer 264, the insulating layer 328, and the conductive layer 325 and the top surface of the semiconductor layer 321. The conductive layer 324 functions as a second gate electrode, and the insulating layer 323 functions as a second gate insulating layer.

[0344] The upper surfaces of the conductive layer 324, the insulating layer 323, and the insulating layer 264 are planarized so that their heights are the same or approximately the same, and insulating layers 329 and 265 are provided to cover them.

[0345] The insulating layer 264 and the insulating layer 265 function as interlayer insulating layers. The insulating layer 329 functions as a barrier layer that prevents impurities such as water or hydrogen from diffusing from the insulating layer 265 or the like to the transistor 320. The insulating layer 329 can be formed using an insulating film similar to the insulating layer 328 and the insulating layer 332.

[0346] A plug 274 electrically connected to one of the pair of conductive layers 325 is provided to be embedded in the insulating layer 265, the insulating layer 329, and the insulating layer 264. Here, the plug 274 preferably includes a conductive layer 274a covering the side surfaces of the openings in the insulating layer 265, the insulating layer 329, the insulating layer 264, and the insulating layer 328 and part of the top surface of the conductive layer 325, and a conductive layer 274b in contact with the top surface of the conductive layer 274a. In this case, the conductive layer 274a is preferably made of a conductive material through which hydrogen and oxygen do not easily diffuse.

[0347] The configuration of the display device 100D from the insulating layer 254 to the substrate 128 is the same as that of the display device 100C.

[0348] [Display device 100E] 15 has a stacked structure of a transistor 310 having a channel formed in a substrate 301 and a transistor 320 having a channel formed in a semiconductor layer containing a metal oxide. Note that descriptions of parts similar to those of the display devices 100C and 100D may be omitted.

[0349] An insulating layer 261 is provided to cover the transistor 310, and a conductive layer 251 is provided over the insulating layer 261. An insulating layer 262 is provided to cover the conductive layer 251, and a conductive layer 252 is provided over the insulating layer 262. The conductive layers 251 and 252 each function as wirings. An insulating layer 263 and an insulating layer 332 are provided to cover the conductive layer 252, and a transistor 320 is provided over the insulating layer 332. An insulating layer 265 is provided to cover the transistor 320, and a capacitor 240 is provided over the insulating layer 265. The capacitor 240 and the transistor 320 are electrically connected by a plug 274.

[0350] The transistor 320 can be used as a transistor included in a pixel circuit. The transistor 310 can be used as a transistor included in a pixel circuit or a driver circuit (gate line driver circuit, source line driver circuit) for driving the pixel circuit. The transistors 310 and 320 can be used as transistors included in various circuits such as an arithmetic circuit or a memory circuit.

[0351] With this configuration, not only pixel circuits but also driver circuits and the like can be formed directly under the light-emitting elements, making it possible to miniaturize the display device compared to when driver circuits are provided around the periphery of the display area.

[0352] [Display device 100F] A display device 100F shown in FIG. 16 has a stacked structure of a transistor 310A and a transistor 310B, each of which has a channel formed in a semiconductor substrate.

[0353] The display device 100F has a configuration in which a substrate 301B on which a transistor 310B, a capacitor 240, and each light-emitting element are provided and a substrate 301A on which a transistor 310A is provided are bonded together.

[0354] Here, it is preferable to provide an insulating layer 345 on the lower surface of substrate 301B. It is also preferable to provide an insulating layer 346 on insulating layer 261 provided on substrate 301A. Insulating layers 345 and 346 are insulating layers that function as protective layers and can suppress the diffusion of impurities into substrates 301B and 301A. For insulating layers 345 and 346, an inorganic insulating film that can be used for protective layer 121 or insulating layer 332 can be used.

[0355] A plug 343 penetrating the substrate 301B and an insulating layer 345 is provided in the substrate 301B. Preferably, an insulating layer 344 is provided to cover the side surface of the plug 343. The insulating layer 344 functions as a protective layer and can suppress the diffusion of impurities into the substrate 301B. The insulating layer 344 can be an inorganic insulating film that can be used for the protective layer 121 or the insulating layer 332.

[0356] Furthermore, a conductive layer 342 is provided on the back surface of substrate 301B (the surface opposite to substrate 128) below insulating layer 345. Conductive layer 342 is preferably provided so as to be embedded in insulating layer 335. Furthermore, the lower surfaces of conductive layer 342 and insulating layer 335 are preferably flattened. Here, conductive layer 342 is electrically connected to plug 343.

[0357] On the other hand, in the substrate 301A, a conductive layer 341 is provided on an insulating layer 346. The conductive layer 341 is preferably provided so as to be embedded in the insulating layer 336. Furthermore, the upper surfaces of the conductive layer 341 and the insulating layer 336 are preferably flattened.

[0358] The substrates 301A and 301B are electrically connected by bonding the conductive layer 341 and the conductive layer 342. Here, by improving the flatness of the surface formed by the conductive layer 342 and the insulating layer 335 and the surface formed by the conductive layer 341 and the insulating layer 336, the conductive layer 341 and the conductive layer 342 can be bonded well.

[0359] It is preferable to use the same conductive material for conductive layer 341 and conductive layer 342. For example, a metal film containing an element selected from Al, Cr, Cu, Ta, Ti, Mo, and W, or a metal nitride film containing the above elements (titanium nitride film, molybdenum nitride film, tungsten nitride film), etc., can be used. In particular, it is preferable to use copper for conductive layer 341 and conductive layer 342. This allows the use of Cu-Cu (copper-copper) direct bonding technology (technology that achieves electrical conductivity by connecting Cu (copper) pads together).

[0360] [Display device 100G] 16 shows an example in which Cu-Cu direct bonding technology is used to bond conductive layer 341 and conductive layer 342, but the present invention is not limited to this. As shown in FIG. 17, in display device 100G, conductive layer 341 and conductive layer 342 may be bonded via bump 347.

[0361] 17, by providing a bump 347 between the conductive layer 341 and the conductive layer 342, the conductive layer 341 and the conductive layer 342 can be electrically connected. The bump 347 can be formed using a conductive material containing, for example, gold (Au), nickel (Ni), indium (In), tin (Sn), or the like. Alternatively, for example, solder may be used as the bump 347. An adhesive layer 348 may be provided between the insulating layer 345 and the insulating layer 346. When the bump 347 is provided, the insulating layer 335 and the insulating layer 336 may not be provided.

[0362] This embodiment mode can be combined with other embodiment modes as appropriate.

[0363] (Fourth embodiment) In this embodiment, a display device according to one embodiment of the present invention will be described.

[0364] A display device of one embodiment of the present invention includes a light-receiving element (also referred to as a light-receiving device) and a light-emitting element (also referred to as a light-emitting device). Alternatively, the display device of one embodiment of the present invention may include a light-receiving and light-emitting element (also referred to as a light-emitting and receiving device) and a light-emitting element.

[0365] First, a display device having a light receiving element and a light emitting element will be described.

[0366] A display device of one embodiment of the present invention includes a light-receiving element and a light-emitting element in a light-receiving and light-emitting portion. In the display device of one embodiment of the present invention, the light-emitting and receiving portion includes light-emitting elements arranged in a matrix, and an image can be displayed in the light-receiving and light-emitting portion. The light-receiving and light-emitting portion also includes light-receiving elements arranged in a matrix, and the light-receiving and light-emitting portion has one or both of an imaging function and a sensing function. The light-receiving and light-emitting portion can be used as an image sensor, a touch sensor, or the like. That is, by detecting light in the light-receiving and light-emitting portion, an image can be captured and a touch operation of an object (such as a finger or a pen) can be detected. Furthermore, in the display device of one embodiment of the present invention, the light-emitting element can be used as a light source for a sensor. Therefore, a light-receiving portion and a light source do not need to be provided separately from the display device, and the number of components in an electronic device can be reduced.

[0367] In the display device of one embodiment of the present invention, when light emitted by a light-emitting element included in the light-emitting and receiving portion is reflected (or scattered) by an object, the light-receiving element can detect the reflected light (or scattered light); therefore, imaging, detection of touch operations, and the like are possible even in dark places.

[0368] The light-emitting element included in the display device of one embodiment of the present invention functions as a display element (also referred to as a display device).

[0369] As the light-emitting element, it is preferable to use an EL element (also called an EL device) such as an OLED or QLED. Examples of light-emitting materials contained in the EL element include a fluorescent material, a phosphorescent material, an inorganic compound (such as a quantum dot material), and a material that exhibits thermally activated delayed fluorescence (thermally activated delayed fluorescence (TADF) material). Alternatively, an LED such as a micro LED can be used as the light-emitting element.

[0370] A display device according to one embodiment of the present invention has a function of detecting light using a light-receiving element.

[0371] When the light receiving element is used as an image sensor, the display device can capture an image using the light receiving element, for example, the display device can be used as a scanner.

[0372] An electronic device to which the display device of one embodiment of the present invention is applied can acquire data related to biometric information such as a fingerprint or palm print by using a function as an image sensor. That is, a biometric authentication sensor can be built into the display device. The built-in biometric authentication sensor in the display device reduces the number of components in the electronic device compared to a case in which a biometric authentication sensor is provided separately from the display device, and the electronic device can be made smaller and lighter.

[0373] Furthermore, when the light receiving element is used as a touch sensor, the display device can detect a touch operation of an object using the light receiving element.

[0374] The light receiving element can be, for example, a pn-type or pin-type photodiode. The light receiving element functions as a photoelectric conversion element (also called a photoelectric conversion device) that detects light incident on the light receiving element and generates electric charge. The amount of electric charge generated by the light receiving element is determined based on the amount of light incident on the light receiving element.

[0375] In particular, it is preferable to use an organic photodiode having a layer containing an organic compound as the light-receiving element. Organic photodiodes can be easily made thin, lightweight, and large in area, and have a high degree of freedom in shape and design, making them applicable to a variety of devices.

[0376] In one embodiment of the present invention, an organic EL element (also referred to as an organic EL device) is used as a light-emitting element, and an organic photodiode is used as a light-receiving element. The organic EL element and the organic photodiode can be formed on the same substrate. Therefore, the organic photodiode can be built into a display device using the organic EL element.

[0377] If all the layers constituting the organic EL element and the organic photodiode were to be fabricated separately, the number of film formation processes would be enormous. However, since the organic photodiode has many layers that can be configured in common with the organic EL element, the layers that can be configured in common can be formed in one go, thereby suppressing the increase in film formation processes.

[0378] For example, one of the pair of electrodes (common electrode) can be a layer common to the light-receiving element and the light-emitting element. Furthermore, for example, at least one of the hole injection layer, the hole transport layer, the electron transport layer, and the electron injection layer can be a layer common to the light-receiving element and the light-emitting element. By having a common layer for the light-receiving element and the light-emitting element in this way, the number of film formations and the number of masks can be reduced, thereby reducing the manufacturing process and manufacturing costs of the display device. Furthermore, a display device having a light-receiving element can be manufactured using existing manufacturing equipment and manufacturing methods for display devices.

[0379] Next, a display device having light emitting and receiving elements and a light emitting element will be described. Note that the description of the same functions, actions, effects, etc. as those described above may be omitted.

[0380] In a display device according to one embodiment of the present invention, a subpixel that exhibits one of the colors has a light-emitting / receiving element instead of a light-emitting element, and a subpixel that exhibits the other color has a light-emitting element. The light-emitting / receiving element has both a function of emitting light (light-emitting function) and a function of receiving light (light-receiving function). For example, when a pixel has three subpixels, namely, a red subpixel, a green subpixel, and a blue subpixel, at least one subpixel has a light-emitting / receiving element, and the other subpixels have light-emitting elements. Therefore, the light-emitting / receiving portion of the display device according to one embodiment of the present invention has a function of displaying an image using both the light-emitting / receiving element and the light-emitting element.

[0381] By using a light-receiving / light-emitting element that serves as both a light-emitting element and a light-receiving element, a pixel can be given a light-receiving function without increasing the number of subpixels included in the pixel. This allows one or both of an imaging function and a sensing function to be added to the light-receiving / light-emitting portion of the display device while maintaining the aperture ratio of the pixel (aperture ratio of each subpixel) and the resolution of the display device. Therefore, the display device of one embodiment of the present invention can have a higher aperture ratio of the pixel and can easily achieve higher resolution than a display device in which a subpixel having a light-receiving element is provided separately from a subpixel having a light-emitting element.

[0382] In a display device according to one embodiment of the present invention, light-emitting and receiving elements and light-emitting elements are arranged in a matrix in a light-emitting and receiving portion, and an image can be displayed in the light-emitting and receiving portion. The light-emitting and receiving portion can be used as an image sensor, a touch sensor, or the like. In the display device according to one embodiment of the present invention, the light-emitting element can be used as a light source for the sensor. Therefore, imaging, detection of a touch operation, and the like can be performed even in a dark place.

[0383] Light-emitting and receiving elements can be fabricated by combining an organic EL element and an organic photodiode. For example, light-emitting and receiving elements can be fabricated by adding the active layer of an organic photodiode to the layered structure of an organic EL element. Furthermore, light-emitting and receiving elements fabricated by combining an organic EL element and an organic photodiode can suppress an increase in the number of film-forming steps by forming layers that can be configured in common with the organic EL element in a single step.

[0384] For example, one of the pair of electrodes (common electrode) may be a layer common to the light-emitting and light-emitting elements. Also, for example, at least one of the hole injection layer, hole transport layer, electron transport layer, and electron injection layer may be a layer common to the light-emitting and light-emitting elements.

[0385] Note that the layers of the light emitting / receiving element may have different functions depending on whether the light emitting / receiving element functions as a light receiving element or a light emitting element. In this specification, the components are referred to based on their functions when the light emitting / receiving element functions as a light emitting element.

[0386] The display device of this embodiment mode has a function of displaying an image using a light-emitting element and a light-emitting / light-emitting element. That is, the light-emitting element and the light-emitting / light-emitting element function as display elements.

[0387] The display device of this embodiment has a function of detecting light using a light receiving and emitting element, which can detect light having a shorter wavelength than light emitted by the light receiving and emitting element itself.

[0388] When the light-emitting / receiving elements are used as an image sensor, the display device of this embodiment can capture an image using the light-emitting / receiving elements. When the light-emitting / receiving elements are used as a touch sensor, the display device of this embodiment can detect a touch operation of an object using the light-emitting / receiving elements.

[0389] The light-receiving / light-emitting element functions as a photoelectric conversion element. The light-receiving / light-emitting element can be fabricated by adding an active layer of a light-receiving element to the configuration of the light-emitting element. For example, the active layer of a pn-type or pin-type photodiode can be used for the light-receiving / light-emitting element.

[0390] In particular, it is preferable to use an organic photodiode having an active layer containing an organic compound as the light-receiving / light-emitting element. Organic photodiodes can be easily made thin, lightweight, and large in area, and have a high degree of freedom in shape and design, making them applicable to a variety of devices.

[0391] A display device, which is an example of a display device according to one embodiment of the present invention, will be described in more detail below with reference to drawings.

[0392] [Display device configuration example 1] [Configuration Example 1-1] 18A shows a schematic diagram of a display panel 200. The display panel 200 includes a substrate 201, a substrate 202, a light receiving element 212, a light emitting element 211R, a light emitting element 211G, a light emitting element 211B, a functional layer 203, and the like.

[0393] The light-emitting element 211R, the light-emitting element 211G, the light-emitting element 211B, and the light-receiving element 212 are provided between the substrate 201 and the substrate 202. The light-emitting element 211R, the light-emitting element 211G, and the light-emitting element 211B emit red (R), green (G), or blue (B) light, respectively. Note that hereinafter, when there is no need to distinguish between the light-emitting element 211R, the light-emitting element 211G, and the light-emitting element 211B, they may be referred to as the light-emitting element 211.

[0394] The display panel 200 has a plurality of pixels arranged in a matrix. Each pixel has one or more sub-pixels. Each sub-pixel has one light-emitting element. For example, a pixel may have three sub-pixels (e.g., three colors of R, G, and B, or three colors of yellow (Y), cyan (C), and magenta (M)), or four sub-pixels (e.g., four colors of R, G, B, and white (W), or four colors of R, G, B, and Y). Each pixel also has a light-receiving element 212. The light-receiving element 212 may be provided in all pixels or in some of the pixels. Alternatively, one pixel may have multiple light-receiving elements 212.

[0395] 18A shows a state in which finger 220 touches the surface of substrate 202. A portion of the light emitted by light-emitting element 211G is reflected at the contact point between substrate 202 and finger 220. A portion of the reflected light is then incident on light-receiving element 212, making it possible to detect that finger 220 has touched substrate 202. In other words, display panel 200 can function as a touch panel.

[0396] The functional layer 203 has a circuit for driving the light-emitting element 211R, the light-emitting element 211G, and the light-emitting element 211B, and a circuit for driving the light-receiving element 212. The functional layer 203 is provided with switches, transistors, capacitors, wiring, and the like. Note that when the light-emitting element 211R, the light-emitting element 211G, the light-emitting element 211B, and the light-receiving element 212 are driven by a passive matrix method, a configuration without switches, transistors, and the like may be adopted.

[0397] It is preferable that the display panel 200 has a function for detecting the fingerprint of a finger 220. Fig. 18B is a schematic enlarged view of a contact portion when the finger 220 is in contact with the substrate 202. Fig. 18B also shows light emitting elements 211 and light receiving elements 212 arranged alternately.

[0398] A fingerprint is formed by concave and convex portions of finger 220. Therefore, the convex portions of the fingerprint are in contact with substrate 202 as shown in FIG.

[0399] Light reflected from a surface, interface, etc. can be classified as specular reflection or diffuse reflection. Specular reflection is highly directional light, in which the angle of incidence and the angle of reflection are the same, while diffuse reflection is low-directional light, in which the intensity is less dependent on the angle. The diffuse reflection component is dominant in the light reflected from the surface of the finger 220. On the other hand, the specular reflection component is dominant in the light reflected from the interface between the substrate 202 and the atmosphere.

[0400] The intensity of light reflected by the contact or non-contact surface between finger 220 and substrate 202 and incident on light receiving element 212 located directly below them is the sum of specularly reflected light and diffusely reflected light. As described above, at the concave portions of finger 220, substrate 202 and finger 220 do not come into contact, so specularly reflected light (indicated by solid arrows) is dominant, whereas at the convex portions, they come into contact, so diffusely reflected light (indicated by dashed arrows) from finger 220 is dominant. Therefore, the intensity of light received by light receiving element 212 located directly below the concave portions is higher than that of light receiving element 212 located directly below the convex portions. This makes it possible to capture an image of the fingerprint of finger 220.

[0401] A clear fingerprint image can be obtained by arranging the light receiving elements 212 at an interval smaller than the distance between two convex portions of a fingerprint, preferably the distance between adjacent concave and convex portions. Since the distance between concave and convex portions of a human fingerprint is approximately 200 μm, for example, the interval between the light receiving elements 212 is 400 μm or less, preferably 200 μm or less, more preferably 150 μm or less, even more preferably 100 μm or less, and even more preferably 50 μm or less, and is 1 μm or more, preferably 10 μm or more, and more preferably 20 μm or more.

[0402] Fig. 18C shows an example of a fingerprint image captured by display panel 200. In Fig. 18C, the outline of finger 220 is indicated by a dashed line and the outline of contact portion 221 is indicated by a dashed line within imaging range 223. Within contact portion 221, a fingerprint 222 with high contrast can be captured due to differences in the amount of light incident on light receiving element 212.

[0403] The display panel 200 can also function as a touch panel or a pen tablet. Fig. 18D shows a state in which the tip of a stylus 225 is in contact with the substrate 202 and is slid in the direction of the dashed arrow.

[0404] As shown in Figure 18D, the diffuse reflected light scattered by the tip of stylus 225 and the contact surface of substrate 202 is incident on light receiving element 212 located at the part overlapping with the contact surface, thereby enabling the position of the tip of stylus 225 to be detected with high accuracy.

[0405] 18E shows an example of a trajectory 226 of the stylus 225 detected by the display panel 200. The display panel 200 is capable of detecting the position of a detectable object such as the stylus 225 with high positional accuracy, and therefore is also capable of performing high-resolution drawing in a drawing application or the like. Furthermore, unlike the case where a capacitance-type touch sensor, an electromagnetic induction-type touch pen, or the like is used, the position of even a highly insulating detectable object can be detected, and therefore the material of the tip of the stylus 225 is not a factor, and various writing implements (for example, a brush, a glass pen, a feather pen, etc.) can be used.

[0406] 18F to 18H show an example of a pixel that can be applied to the display panel 200. FIG.

[0407] 18F and 18G each have a red (R) light-emitting element 211R, a green (G) light-emitting element 211G, a blue (B) light-emitting element 211B, and a light-receiving element 212. The pixel has a pixel circuit for driving the light-emitting element 211R, the light-emitting element 211G, the light-emitting element 211B, and the light-receiving element 212, respectively.

[0408] Fig. 18F shows an example in which three light-emitting elements are arranged in a row, and one horizontally elongated light-receiving element 212 is arranged below them. Fig. 18G shows an example in which two light-emitting elements are arranged in a row horizontally, and one horizontally elongated light-emitting element and one horizontally elongated light-receiving element are arranged below them, in that order.

[0409] 18H is an example of a pixel having a white (W) light-emitting element 211W. Here, four light-emitting elements are arranged in a row, and a light-receiving element 212 is arranged below them.

[0410] The pixel configuration is not limited to the above, and various arrangement methods can be adopted.

[0411] As described above, pixels with various arrangements can be applied to the display device of this embodiment mode.

[0412] This embodiment mode can be implemented by appropriately combining at least a part thereof with other embodiment modes described in this specification.

[0413] (Embodiment 5) In this embodiment, an example of a display device including a light-receiving element or the like according to one embodiment of the present invention will be described.

[0414] In the display device of this embodiment, a pixel can be configured to have multiple types of subpixels, each having a light-emitting element that emits a different color. For example, a pixel can be configured to have three types of subpixels. Examples of the three subpixels include subpixels of red (R), green (G), and blue (B), or subpixels of yellow (Y), cyan (C), and magenta (M). Alternatively, a pixel can be configured to have four types of subpixels. Examples of the four subpixels include subpixels of R, G, B, and white (W), or subpixels of R, G, B, and Y.

[0415] There are no particular limitations on the arrangement of the sub-pixels, and various methods can be applied, including, for example, a stripe arrangement, an S-stripe arrangement, a matrix arrangement, a delta arrangement, a Bayer arrangement, and a pentile arrangement.

[0416] The top surface shape of the sub-pixel may be, for example, a triangle, a quadrangle (including a rectangle and a square), a polygon such as a pentagon, a polygon with rounded corners, an ellipse, a circle, etc. The top surface shape of the sub-pixel here corresponds to the top surface shape of the light-emitting region of the light-emitting element.

[0417] In a display device having a light-emitting element and a light-receiving element in each pixel, the pixel has a light-receiving function, so that it is possible to detect contact or proximity of an object while displaying an image. For example, in addition to displaying an image using all of the sub-pixels of the display device, some of the sub-pixels can emit light as a light source and the remaining sub-pixels can display an image.

[0418] 19A to 19E show examples of arrangements of sub-pixels included in a pixel Px.

[0419] 19A to 19E includes a region 218 and subpixels PS. The region 218 includes subpixels R, G, and B. Examples of the arrangement of the subpixels R, G, and B in the region 218 are shown in FIGS. 19F to 19H.

[0420] In the pixel Px shown in FIG. 19A, the sub-pixel PS is arranged below the region 218. The pixel Px shown in FIG. 19A may have a configuration in which the adjacent pixel Px is upside down, as shown in FIG. 19B, for example. FIGS. 20A and 20B show an example in which a plurality of pixels Px are arranged. FIGS. 20A and 20B show an example in which the configuration shown in FIG. 19F is applied to the region 218. In FIGS. 20A and 20B, the sub-pixels R, G, and B shown in the pixel Px are arranged at an angle of 45° with respect to the x-axis direction. In FIG. 20, the x-axis and y-axis are orthogonal to each other, and the x-axis is, for example, a direction along one side of the display unit of the display device. One of the x-axis and y-axis is, for example, a direction along the long side of the display unit of the display device. FIG. 20A shows an example in which pixels Px are arranged in the same arrangement, while FIG. 20B shows an example in which two pixels Px having line-symmetrical configurations are arranged alternately.

[0421] 19A shows an example in which the subpixel PS is disposed toward the center in the horizontal direction of the pixel Px, while FIG. 19C shows an example in which the subpixel PS is disposed toward the left, and FIG. 19D shows an example in which the subpixel PS is disposed toward the right. FIG. 19E shows an example in which the subpixel PS has a horizontally elongated shape. In FIGS. 19A, 19C, and 19D, for example, the resolution of an image captured by the subpixel PS may be higher than in FIG. 19E. In FIG. 19E, for example, the sensitivity of an image captured by the subpixel PS may be higher than in FIGS. 19A, 19C, and 19D.

[0422] 19A, 19C, and 19D, a case will be described in which the arrangement of FIG. 19F is applied to region 218. In this case, in FIG. 19A, of the subpixels R, G, and B, subpixel G is arranged closest to subpixel PS. In FIG. 19C, of ​​the subpixels R, G, and B, subpixel R is arranged closest to subpixel PS. In FIG. 19D, of the subpixels R, G, and B, subpixel B is arranged closest to subpixel PS.

[0423] Fig. 19F shows an example in which vertically elongated subpixels R, G, and B are arranged horizontally in stripes in region 218. Fig. 19G shows an example in which subpixels R, G, and B are arranged horizontally in two columns in region 218, with subpixel G arranged in the first column and subpixels R and B arranged above and below in the second column. Fig. 19H shows an example in which horizontally elongated subpixels R, G, and B are arranged vertically in stripes in region 218.

[0424] 19I and 19J show examples in which region 218 has subpixels R, G, B, and W. Fig. 19I shows an example in which subpixels R, G, B, and W are arranged in a matrix in region 218. Fig. 19J shows an example in which vertically elongated subpixels R, G, B, and W are arranged horizontally in stripes in region 218.

[0425] Here, the white light emitted by the subpixel W may be light with high instantaneous brightness, such as a flashlight or strobe light, or light with high color rendering, such as a reading light. When using white light as a reading light, the color temperature of the white light emission can be lowered. For example, by using white light with an incandescent color (e.g., 2500K or more but less than 3250K) or a warm white color (e.g., 3250K or more but less than 3800K), the light source can be gentle on the user's eyes.

[0426] The strobe light function can be realized by, for example, repeating light emission and non-emission in a short cycle, while the flash light function can be realized by, for example, generating a flash of light by instantaneous discharge utilizing the principle of an electric double layer.

[0427] For example, if an electronic device is equipped with a camera function, a strobe light function or a flash light function can be used to capture images with the electronic device even at night. Here, the display device of the electronic device functions as a surface light source, which is less likely to cast shadows on the subject, allowing for beautiful images to be captured. Note that the strobe light function or flash light function can be used at times other than night. When an electronic device is equipped with a strobe light function or a flash light function, the color temperature of the white light emitted can be increased. For example, the color temperature of the light emitted from the electronic device can be white (3800K or more but less than 4500K), daylight white (4500K or more but less than 5500K), or daylight white (5500K or more but less than 7100K).

[0428] Furthermore, if the flash emits light that is stronger than necessary, areas that are naturally bright or dark may appear all white in the image (so-called whiteout). On the other hand, if the flash is too weak, dark areas may appear all black in the image (so-called blackout). To address this issue, the display device may be configured to detect the brightness around the subject using a light-receiving element, allowing the light-emitting element of the sub-pixel to adjust the light intensity to an optimal level. In other words, the electronic device can also function as an exposure meter.

[0429] The strobe light function and flash light function can also be used for crime prevention or self-defense purposes.

[0430] Furthermore, in order to improve the color rendering of the light emitted from the light-emitting element of the subpixel W, it is preferable to increase the number of light-emitting layers included in the light-emitting element or the types of light-emitting materials included in the light-emitting layers, thereby obtaining a broader emission spectrum with intensity over a wider wavelength range, and exhibiting light emission with higher color rendering that is closer to sunlight.

[0431] The emission color for the lighting application is preferably white, but there is no particular limitation on the emission color for lighting application, and the user can appropriately select one or more optimal emission colors from white, blue, purple, blue-purple, green, yellow-green, yellow, orange, red, and the like.

[0432] 21A and 21B show examples of the arrangement of the sub-pixels R, G, B, and PS of the pixel Px.

[0433] In the pixel Px shown in FIG. 21A, four sub-pixels (sub-pixel R, sub-pixel G, sub-pixel B, and sub-pixel PS) are arranged in a matrix.

[0434] The pixel shown in FIG. 21B has a configuration in which three subpixels (subpixel R, subpixel G, and subpixel S) are vertically arranged next to one subpixel (subpixel B).

[0435] 21C to 21E show examples of arrangements of the subpixels G, B, R, IR, and PS of the pixel Px.

[0436] 21C, 21D, and 21E show an example in which one pixel is arranged across two rows. The top row (first row) has three subpixels (subpixel G, subpixel B, and subpixel R), and the bottom row (second row) has two subpixels (one subpixel PS and one subpixel IR).

[0437] In Fig. 21C, three vertically elongated subpixels G, B, and R are arranged horizontally, with a subpixel PS and a horizontally elongated subpixel IR arranged horizontally below them. In Fig. 21D, two horizontally elongated subpixels G and R are arranged vertically, with a vertically elongated subpixel B arranged horizontally next to them, and a horizontally elongated subpixel IR and a vertically elongated subpixel PS arranged horizontally below them. In Fig. 21E, three vertically elongated subpixels R, G, and B are arranged horizontally, with a horizontally elongated subpixel IR and a vertically elongated subpixel PS arranged horizontally below them. Figs. 21D and 21E show a case where the area of ​​the subpixel IR is the largest and the area of ​​the subpixel PS is approximately the same as that of the other subpixels.

[0438] Alternatively, pixel Px may have two light-receiving elements with different sensitivity wavelength ranges. The pixel Px shown in FIG. 21F has a configuration in which three vertically elongated subpixels, G, B, and R, are arranged horizontally, with subpixels PS1 and PS2 arranged horizontally below them. Subpixels PS1 and PS2 each have a light-receiving element. Subpixel PS2 has higher sensitivity in the infrared wavelength range, for example, compared to subpixel PS1. Subpixel PS1 preferably detects light in wavelength ranges such as blue, purple, blue-purple, green, yellow-green, yellow, orange, and red. Subpixel PS2 preferably detects light in the infrared wavelength range, for example.

[0439] Here, the light receiving elements of the subpixels PS1 and PS2 can be configured to have active layers formed by patterning an organic film that is formed in the same process. In such a case, for example, in a microcavity structure using the pixel electrodes of the light receiving elements and the common electrode, the cavity lengths of the light receiving elements can be made different to enhance the wavelength range of light that each light receiving element detects.

[0440] The light receiving elements of the subpixels PS1 and PS2 may have different active layers, for example, by forming the active layers of the light receiving elements using different FMMs.

[0441] The pixel Px shown in Figure 21G has a configuration in which three vertically elongated subpixels G, B, and R are arranged horizontally, and below them, a vertically elongated subpixel IR, a vertically elongated subpixel PS1, and a vertically elongated subpixel PS2 are arranged horizontally.

[0442] The pixel Px shown in Figure 21H has a configuration in which two horizontally elongated sub-pixels G and R are arranged vertically, and a vertically elongated sub-pixel B is arranged next to them, and below them, a vertically elongated sub-pixel IR, a vertically elongated sub-pixel PS1, and a vertically elongated sub-pixel PS2 are arranged horizontally.

[0443] The layout of the sub-pixels is not limited to the above configuration.

[0444] Subpixel R has a light-emitting element that emits red light. Subpixel G has a light-emitting element that emits green light. Subpixel B has a light-emitting element that emits blue light. Subpixel IR has a light-emitting element that emits infrared light. Subpixel PS has a light-receiving element. The wavelength of light detected by subpixel PS is not particularly limited, but it is preferable that the light-receiving element of subpixel PS is sensitive to light emitted by the light-emitting element of subpixel R, subpixel G, subpixel B, or subpixel IR. For example, it is preferable to detect one or more of light in wavelength ranges such as blue, purple, blue-purple, green, yellow-green, yellow, orange, and red, and light in the infrared wavelength range.

[0445] The light-receiving area of ​​the subpixel PS is smaller than the light-emitting area of ​​the other subpixels. The smaller the light-receiving area, the narrower the imaging range, which makes it possible to suppress blurring in the imaging results and improve resolution. Therefore, by using the subpixel PS, high-definition or high-resolution imaging can be performed. For example, the subpixel PS can be used to capture images for personal authentication using fingerprints, palm prints, irises, pulse patterns (including vein patterns and artery patterns), faces, etc.

[0446] The sub-pixel PS can be used as a touch sensor (also called a direct touch sensor) or a near-touch sensor (also called a hover sensor, hover touch sensor, non-contact sensor, or touchless sensor). For example, the sub-pixel PS preferably detects infrared light. By using an element that detects infrared light, touch detection becomes possible even in dark places. Furthermore, by using an element that detects infrared light, black objects can be detected. For example, a hand wearing a glove that is dark in color, such as black, can be detected as an object.

[0447] Here, a touch sensor or near-touch sensor can detect the proximity or contact of an object (such as a finger, hand, or pen). A touch sensor can detect an object when the display device and the object are in direct contact with each other. A near-touch sensor can detect an object even if the object does not touch the display device. For example, a configuration in which the display device can detect an object when the distance between the display device and the object is in the range of 0.1 mm to 300 mm, preferably 3 mm to 50 mm, is preferable. This configuration makes it possible to operate the display device without the object directly touching it, in other words, to operate the display device in a contactless (touchless) manner. This configuration reduces the risk of the display device becoming dirty or scratched, or makes it possible to operate the display device without the object directly touching dirt (e.g., dust, viruses, etc.) attached to the display device.

[0448] In order to capture high-resolution images, it is preferable that the sub-pixels PS be provided in all pixels of the display device. On the other hand, when used in a touch sensor or near-touch sensor, the sub-pixels PS do not require high accuracy compared to when capturing images of fingerprints, etc., so it is sufficient to provide the sub-pixels PS in only some of the pixels of the display device. By making the number of sub-pixels PS in the display device smaller than the number of sub-pixels R, etc., the detection speed can be increased.

[0449] FIG. 22A shows an example of a pixel circuit of a sub-pixel having a light receiving element, and FIG. 22B shows an example of a pixel circuit of a sub-pixel having a light emitting element.

[0450] 22A includes a light receiving element PD, a transistor M11, a transistor M12, a transistor M13, a transistor M14, and a capacitor C2. Here, an example is shown in which a photodiode is used as the light receiving element PD.

[0451] The anode of the light-receiving element PD is electrically connected to the wiring V1, and the cathode is electrically connected to one of the source and drain of the transistor M11. The gate of the transistor M11 is electrically connected to the wiring TX, and the other of the source and drain is electrically connected to one electrode of the capacitor C2, one of the source and drain of the transistor M12, and the gate of the transistor M13. The gate of the transistor M12 is electrically connected to the wiring RES, and the other of the source and drain is electrically connected to the wiring V2. The source and drain of the transistor M13 is electrically connected to the wiring V3, and the other of the source and drain is electrically connected to one of the source and drain of the transistor M14. The gate of the transistor M14 is electrically connected to the wiring SE, and the other of the source and drain is electrically connected to the wiring OUT1.

[0452] A constant potential is supplied to the wiring V1, wiring V2, and wiring V3. When the light receiving element PD is driven with a reverse bias, a potential higher than the potential of the wiring V1 is supplied to the wiring V2. The transistor M12 is controlled by a signal supplied to the wiring RES and has a function of resetting the potential of a node connected to the gate of the transistor M13 to the potential supplied to the wiring V2. The transistor M11 is controlled by a signal supplied to the wiring TX and has a function of controlling the timing at which the potential of the node changes depending on the current flowing through the light receiving element PD. The transistor M13 functions as an amplifying transistor that outputs according to the potential of the node. The transistor M14 is controlled by a signal supplied to the wiring SE and functions as a selection transistor that reads out an output according to the potential of the node to an external circuit connected to the wiring OUT1.

[0453] 22B includes a light-emitting element EL, transistors M15, M16, and M17, and a capacitor C3. Here, an example is shown in which a light-emitting diode is used as the light-emitting element EL. In particular, it is preferable to use an organic EL element as the light-emitting element EL.

[0454] The transistor M15 has a gate electrically connected to the wiring VG, one of its source and drain electrically connected to the wiring VS, and the other of its source and drain electrically connected to one electrode of the capacitor C3 and the gate of the transistor M16. One of the source and drain of the transistor M16 is electrically connected to the wiring V4, and the other is electrically connected to the anode of the light-emitting element EL and one of the source and drain of the transistor M17. The transistor M17 has a gate electrically connected to the wiring MS, and the other of its source and drain electrically connected to the wiring OUT2. The cathode of the light-emitting element EL is electrically connected to the wiring V5.

[0455] A constant potential is supplied to the wiring V4 and the wiring V5. The anode side of the light-emitting element EL can be set to a high potential, and the cathode side can be set to a lower potential than the anode side. The transistor M15 is controlled by a signal supplied to the wiring VG and functions as a selection transistor for controlling the selection state of the pixel circuit PIX2. The transistor M16 also functions as a drive transistor that controls the current flowing through the light-emitting element EL depending on the potential supplied to its gate. When the transistor M15 is in a conductive state, the potential supplied to the wiring VS is supplied to the gate of the transistor M16, and the light emission brightness of the light-emitting element EL can be controlled depending on the potential. The transistor M17 is controlled by a signal supplied to the wiring MS and has the function of outputting the potential between the transistor M16 and the light-emitting element EL to the outside via the wiring OUT2.

[0456] Here, it is preferable that the transistors M11, M12, M13, and M14 included in the pixel circuit PIX1, and the transistors M15, M16, and M17 included in the pixel circuit PIX2 are transistors that use a metal oxide (oxide semiconductor) in the semiconductor layer in which the channel is formed.

[0457] A transistor using a metal oxide, which has a wider band gap and a lower carrier density than silicon, can achieve an extremely small off-state current. Therefore, the small off-state current allows charge stored in a capacitor connected in series with the transistor to be held for a long period of time. Therefore, it is preferable to use a transistor including an oxide semiconductor for the transistor M11, the transistor M12, and the transistor M15, which are connected in series with the capacitor C2 or the capacitor C3. Furthermore, by using a transistor including an oxide semiconductor for other transistors as well, manufacturing costs can be reduced.

[0458] For example, the off-state current of an OS transistor per 1 μm channel width at room temperature is 1 aA (1×10 -18 A) Below, 1zA(1×10 -21 A) or less, or 1yA (1 x 10 -24 A) or less. Note that the off-state current of a Si transistor per 1 μm of channel width at room temperature is 1 fA (1×10 -15 A) More than 1pA (1×10 -12 Therefore, it can be said that the off-state current of an OS transistor is about 10 orders of magnitude lower than that of a Si transistor.

[0459] Alternatively, the transistors M11 to M17 may be transistors in which silicon is used as a semiconductor in which a channel is formed. In particular, using silicon with high crystallinity, such as single crystal silicon or polycrystalline silicon, is preferable because high field-effect mobility can be achieved and higher-speed operation is possible.

[0460] Alternatively, a structure may be used in which at least one of the transistors M11 to M17 includes an oxide semiconductor and the remaining transistors include silicon.

[0461] Although the transistors are shown as n-channel transistors in FIGS. 22A and 22B, p-channel transistors can also be used.

[0462] The transistors of the pixel circuit PIX1 and the transistors of the pixel circuit PIX2 are preferably formed side by side on the same substrate. In particular, it is preferable that the transistors of the pixel circuit PIX1 and the transistors of the pixel circuit PIX2 are mixed and periodically arranged in one region.

[0463] It is also preferable to provide one or more layers having a transistor and / or a capacitor at a position overlapping the light receiving element PD or the light emitting element EL, thereby reducing the effective area occupied by each pixel circuit and realizing a high-definition light receiving section or display section.

[0464] To increase the emission luminance of the light-emitting element EL included in the pixel circuit, it is necessary to increase the amount of current flowing through the light-emitting element EL. To achieve this, it is necessary to increase the source-drain voltage of the drive transistor included in the pixel circuit. Because OS transistors have a higher source-drain withstand voltage than Si transistors, a high voltage can be applied between the source and drain of the OS transistor. Therefore, by using an OS transistor as the drive transistor included in the pixel circuit, it is possible to increase the amount of current flowing through the light-emitting element and increase the emission luminance of the light-emitting element.

[0465] Furthermore, when the transistor operates in the saturation region, the OS transistor can reduce the change in source-drain current relative to a change in gate-source voltage compared to a Si transistor. Therefore, by using an OS transistor as a driving transistor included in a pixel circuit, the current flowing between the source and drain can be precisely controlled by changing the gate-source voltage, thereby controlling the amount of current flowing to the light-emitting element. This allows for a greater number of gray levels to be achieved in the pixel circuit.

[0466] Furthermore, in terms of the saturation characteristics of the current that flows when the transistor operates in the saturation region, an OS transistor can pass a more stable current (saturation current) than a Si transistor, even when the source-drain voltage gradually increases. Therefore, by using an OS transistor as a drive transistor, a stable current can be passed through a light-emitting element, for example, even when the current-voltage characteristics of the light-emitting element containing an EL material vary. In other words, when the OS transistor operates in the saturation region, the source-drain current remains almost unchanged even when the source-drain voltage increases, thereby stabilizing the light-emitting brightness of the light-emitting element.

[0467] As described above, by using an OS transistor as the driving transistor included in the pixel circuit, it is possible to achieve "suppression of black floating," "increase in light emission brightness," "multiple gradations," and "suppression of variations in light-emitting elements."

[0468] Furthermore, the display device of one embodiment of the present invention can vary its refresh rate. For example, the refresh rate can be adjusted (for example, within a range of 0.01 Hz to 240 Hz) depending on the content displayed on the display device, thereby reducing power consumption. Furthermore, driving that reduces the power consumption of the display device by driving it at a reduced refresh rate may be referred to as idling stop (IDS) driving.

[0469] The drive frequency of the touch sensor or near-touch sensor may be changed depending on the refresh rate. For example, if the refresh rate of the display device is 120 Hz, the drive frequency of the touch sensor or near-touch sensor may be configured to be higher than 120 Hz (typically 240 Hz). This configuration enables low power consumption and an increased response speed of the touch sensor or near-touch sensor.

[0470] This embodiment mode can be implemented by appropriately combining at least a part thereof with other embodiment modes described in this specification.

[0471] (Sixth embodiment) In this embodiment, a light-emitting element (also referred to as a light-emitting device) and a light-receiving element (also referred to as a light-receiving device) that can be used for the light-emitting and receiving device of one embodiment of the present invention will be described.

[0472] In this specification, etc., an element fabricated using a metal mask or FMM (fine metal mask, high-resolution metal mask) may be referred to as an element with an MM (metal mask) structure. Also, in this specification, etc., an element fabricated without using a metal mask or FMM may be referred to as an element with an MML (metal maskless) structure.

[0473] In this specification, a structure in which different light-emitting layers are created for each color light-emitting element (here, blue (B), green (G), and red (R)), or in which the light-emitting layers are painted differently, may be referred to as an SBS (Side By Side) structure. In this specification, a light-emitting element that can emit white light may be referred to as a white light-emitting element. In addition, a white light-emitting element can be combined with a colored layer (for example, a color filter) to form a light-emitting element that displays full color.

[0474] Furthermore, light-emitting elements can be broadly classified into a single structure and a tandem structure. A single-structure element has one light-emitting unit between a pair of electrodes, and the light-emitting unit preferably includes one or more light-emitting layers.

[0475] To obtain white light emission using two light-emitting layers in a single structure, the two light-emitting layers may be selected so that the emission colors of the two light-emitting layers are complementary to each other. For example, by making the emission color of the first light-emitting layer and the emission color of the second light-emitting layer complementary to each other, a configuration in which the light-emitting device as a whole emits white light can be obtained. More specifically, for example, a light-emitting device may have a first light-emitting layer and a second light-emitting layer, where the first light-emitting layer contains a light-emitting material that emits light of a first color, and the second light-emitting layer contains a light-emitting material that emits light of a second color, and the first color and the second color are complementary to each other. Furthermore, in the case of a light-emitting device having three or more light-emitting layers, the emission colors of the three or more light-emitting layers may be combined to enable the light-emitting device as a whole to emit white light.

[0476] A tandem-structured element preferably has two or more light-emitting units between a pair of electrodes, and each light-emitting unit preferably includes one or more light-emitting layers. By using light-emitting layers that emit light of the same color in each light-emitting unit, the luminance per given current can be increased, and the light-emitting element can be made more reliable than a single-structure element. To obtain white light emission in a tandem structure, the light from the light-emitting layers of the multiple light-emitting units can be combined to obtain white light emission. The combination of light-emitting colors that can produce white light emission is the same as in the single-structure element. In a tandem-structured element, it is preferable to provide an intermediate layer, such as a charge-generating layer, between the multiple light-emitting units.

[0477] Furthermore, when comparing the above-mentioned white light-emitting element (single structure or tandem structure) with a light-emitting element having an SBS structure, the light-emitting element having an SBS structure can reduce power consumption compared to the white light-emitting element. If you want to keep power consumption low, it is preferable to use a light-emitting element having an SBS structure. On the other hand, the manufacturing process of a white light-emitting element is simpler than that of a light-emitting element having an SBS structure, so it is preferable because it can reduce manufacturing costs or increase manufacturing yields.

[0478] [Element structure] Next, detailed structures of a light-emitting element, a light-receiving element, and a light-emitting and light-emitting element that can be used in the display device of one embodiment of the present invention will be described.

[0479] The display device of one embodiment of the present invention may be any of a top emission type that emits light in a direction opposite to a substrate on which a light-emitting element is formed, a bottom emission type that emits light toward a substrate on which a light-emitting element is formed, and a dual emission type that emits light to both sides.

[0480] In this embodiment, a top-emission display device will be described as an example.

[0481] In this specification, unless otherwise specified, even when describing a configuration having multiple elements (light-emitting elements, light-emitting layers, etc.), when describing matters common to each element, the alphabet will be omitted.

[0482] 23A includes a plurality of light-emitting elements 550W that emit white light. A coloring layer 545R that transmits red light, a coloring layer 545G that transmits green light, or a coloring layer 545B that transmits blue light is provided on each light-emitting element 550W. The coloring layer 545R, the coloring layer 545G, and the coloring layer 545B can be provided so as to overlap the light-emitting element 550W with the protective layer 540 interposed therebetween.

[0483] 23A has a light-emitting unit 512W between a pair of electrodes (electrode 501 and electrode 502). The electrode 501 functions as a pixel electrode and is provided for each light-emitting element. The electrode 502 functions as a common electrode and is provided in common to multiple light-emitting elements.

[0484] That is, the light-emitting element 550W shown in Fig. 23A is a light-emitting element having one light-emitting unit. Note that a structure having one light-emitting unit between a pair of electrodes, such as the light-emitting element 550W shown in Fig. 23A, is referred to as a single structure in this specification.

[0485] A conductive film that transmits visible light is used for the electrode 502 on the side from which light is extracted, and a conductive film that reflects visible light is preferably used for the electrode 501 on the side from which light is not extracted.

[0486] The light-emitting element included in the display device of this embodiment preferably has a micro-optical resonator (microcavity) structure. Therefore, one of a pair of electrodes included in the light-emitting element preferably has an electrode that is transparent and reflective to visible light (semi-transmissive / semi-reflective electrode), and the other preferably has an electrode that is reflective to visible light (reflective electrode). When the light-emitting element has a microcavity structure, light emitted from the light-emitting layer can be resonated between both electrodes, thereby intensifying the light emitted from the light-emitting element.

[0487] The semi-transmitting / semi-reflective electrode can have a laminated structure of a reflective electrode and an electrode that is transparent to visible light (also called a transparent electrode).

[0488] The light transmittance of the transparent electrode is 40% or more. For example, it is preferable to use an electrode with a visible light (light with a wavelength of 400 nm or more and less than 750 nm) transmittance of 40% or more for the light emitting element. The visible light reflectance of the semi-transmissive / semi-reflective electrode is 10% or more and 95% or less, preferably 30% or more and 80% or less. The visible light reflectance of the reflective electrode is 40% or more and 100% or less, preferably 70% or more and 100% or less. In addition, the resistivity of these electrodes is 1×10 -2 When the light-emitting element emits near-infrared light (light with a wavelength of 750 nm or more and 1300 nm or less), the transmittance or reflectance of these electrodes for near-infrared light preferably satisfies the above-mentioned numerical range, similar to the transmittance or reflectance for visible light.

[0489] The light-emitting units 512W shown in FIG. 23A can be formed as island-shaped layers. That is, the light-emitting units 512W shown in FIG. 23A correspond to the stack of organic layer 112a, organic layer 115, and organic layer 116, the stack of organic layer 112b, organic layer 115, and organic layer 116, or the stack of organic layer 112c, organic layer 115, and organic layer 116 shown in FIG. 1B and other figures. The light-emitting element 550W corresponds to the light-emitting element 140a, light-emitting element 140b, or light-emitting element 140c. The electrode 501 corresponds to the pixel electrode 111a, pixel electrode 111b, or pixel electrode 111c. The electrode 502 corresponds to the common electrode 113.

[0490] The light-emitting unit 512W includes a layer 521, a layer 522, a light-emitting layer 523Q_1, a light-emitting layer 523Q_2, a light-emitting layer 523Q_3, a layer 524, etc. The light-emitting element 550W includes a layer 525 between the light-emitting unit 512W and the electrode 502, etc.

[0491] FIG. 23A shows an example in which the light-emitting unit 512W does not have the layer 525, and the layer 525 is provided in common to each light-emitting element. In this case, the layer 525 can be called a common layer. By providing one or more common layers to multiple light-emitting elements in this way, the manufacturing process can be simplified, thereby reducing manufacturing costs. Note that the layer 525 may be provided for each light-emitting element. In other words, the layer 525 may be included in the light-emitting unit 512W.

[0492] The layer 521 includes, for example, a layer containing a substance with a high hole-injection property (hole-injection layer). The layer 522 includes, for example, a layer containing a substance with a high hole-transport property (hole-transport layer). The layer 524 includes, for example, a layer containing a substance with a high electron-transport property (electron-transport layer). The layer 525 includes, for example, a layer containing a substance with a high electron-injection property (electron-injection layer). Note that a structure in which the layer 521 includes the electron-injection layer, the layer 522 includes the electron-transport layer, the layer 524 includes the hole-transport layer, and the layer 525 includes the hole-injection layer may be used.

[0493] The hole injection layer is a layer that injects holes from the anode into the hole transport layer and contains a material with high hole injection properties, such as an aromatic amine compound and a composite material containing a hole transport material and an acceptor material (electron acceptor material).

[0494] In the light-emitting element, the hole transport layer is a layer that transports holes injected from the anode by the hole injection layer to the light-emitting layer. The hole transport layer is a layer that transports holes injected from the anode by the hole injection layer to the light-emitting layer. The hole transport layer is a layer that contains a hole transporting material. Examples of the hole transporting material include 10 -6 cm 2 A material having a hole mobility of 1 / Vs or more is preferred. Note that other materials can also be used as long as they have a higher hole transporting property than electron transporting property. As the hole transporting material, a material having a high hole transporting property, such as a π-electron-rich heteroaromatic compound (e.g., a carbazole derivative, a thiophene derivative, a furan derivative, etc.) or an aromatic amine (a compound having an aromatic amine skeleton), is preferred.

[0495] In the light-emitting element, the electron transport layer is a layer that transports electrons injected from the cathode by the electron injection layer to the light-emitting layer. The electron transport layer is a layer that contains an electron transporting material. The electron transporting material is a material having a molecular weight of 1×10 -6 cm 2 A substance having an electron mobility of 1 / Vs or more is preferred. Note that other substances can also be used as long as they have a higher electron transporting property than holes. Examples of electron-transporting materials that can be used include metal complexes having a quinoline skeleton, metal complexes having a benzoquinoline skeleton, metal complexes having an oxazole skeleton, and metal complexes having a thiazole skeleton, as well as oxadiazole derivatives, triazole derivatives, imidazole derivatives, oxazole derivatives, thiazole derivatives, phenanthroline derivatives, quinoline derivatives having a quinoline ligand, benzoquinoline derivatives, quinoxaline derivatives, dibenzoquinoxaline derivatives, pyridine derivatives, bipyridine derivatives, pyrimidine derivatives, and π-electron-deficient heteroaromatic compounds including nitrogen-containing heteroaromatic compounds.

[0496] The electron transport layer may have a laminated structure, and may have a hole blocking layer in contact with the light-emitting layer for blocking holes that pass through the light-emitting layer from the anode side to the cathode side.

[0497] The electron injection layer is a layer that injects electrons from the cathode to the electron transport layer and contains a material with high electron injection properties. Examples of the material with high electron injection properties include alkali metals, alkaline earth metals, and compounds thereof. Examples of the material with high electron injection properties include a composite material containing an electron transport material and a donor material (electron donor material).

[0498] The electron injection layer may be formed of, for example, lithium, cesium, ytterbium, lithium fluoride (LiF), cesium fluoride (CsF), calcium fluoride (CaF x , where X is an arbitrary number), 8-(quinolinolato)lithium (abbreviation: Liq), 2-(2-pyridyl)phenolatolithium (abbreviation: LiPP), 2-(2-pyridyl)-3-pyridinolatolithium (abbreviation: LiPPy), 4-phenyl-2-(2-pyridyl)phenolatolithium (abbreviation: LiPPP), lithium oxide (LiO x The electron injection layer may be formed of an alkali metal, an alkaline earth metal, such as cesium carbonate, or a compound thereof. The electron injection layer may have a stacked structure of two or more layers. For example, the stacked structure may have a structure in which lithium fluoride is used in the first layer and ytterbium is provided in the second layer.

[0499] Alternatively, an electron transporting material may be used for the electron injection layer. For example, a compound having an unshared electron pair and an electron-deficient heteroaromatic ring may be used as the electron transporting material. Specifically, a compound having at least one of a pyridine ring, a diazine ring (pyrimidine ring, pyrazine ring, pyridazine ring), and a triazine ring may be used.

[0500] The lowest unoccupied molecular orbital (LUMO) of an organic compound having an unshared electron pair is preferably -3.6 eV or more and -2.3 eV or less. Generally, the highest occupied molecular orbital (HOMO) level and the LUMO level of an organic compound can be estimated by CV (cyclic voltammetry), photoelectron spectroscopy, optical absorption spectroscopy, inverse photoelectron spectroscopy, etc.

[0501] Examples of organic compounds with lone electron pairs include 4,7-diphenyl-1,10-phenanthroline (abbreviated as BPhen), 2,9-di(naphthalen-2-yl)-4,7-diphenyl-1,10-phenanthroline (abbreviated as NBPhen), diquinoxalino[2,3-a:2',3'-c]phenazine (abbreviated as HATNA), and 2,4,6-tris[3'-(pyridin-3-yl)biphenyl-3-yl]-1,3,5-triazine (abbreviated as TmPPYTz). NBPhen has a higher glass transition temperature (Tg) and better heat resistance than BPhen.

[0502] 23A, the layer 521 and the layer 522 are shown separately, but this is not limiting. For example, when the layer 521 has a function as both a hole injection layer and a hole transport layer, or when the layer 521 has a function as both an electron injection layer and an electron transport layer, the layer 522 may be omitted.

[0503] The light-emitting layer 523Q_1, the light-emitting layer 523Q_2, and the light-emitting layer 523Q_3 are layers containing a light-emitting substance. The light-emitting layer can contain one or more types of light-emitting substances. As the light-emitting substance, a substance that emits light of a color such as blue, purple, blue-purple, green, yellow-green, yellow, orange, or red is appropriately used. Furthermore, a substance that emits near-infrared light can also be used as the light-emitting substance.

[0504] Examples of light-emitting materials include fluorescent materials, phosphorescent materials, TADF materials, and quantum dot materials.

[0505] Examples of fluorescent materials include pyrene derivatives, anthracene derivatives, triphenylene derivatives, fluorene derivatives, carbazole derivatives, dibenzothiophene derivatives, dibenzofuran derivatives, dibenzoquinoxaline derivatives, quinoxaline derivatives, pyridine derivatives, pyrimidine derivatives, phenanthrene derivatives, and naphthalene derivatives.

[0506] Examples of phosphorescent materials include organometallic complexes (particularly iridium complexes) having a 4H-triazole skeleton, a 1H-triazole skeleton, an imidazole skeleton, a pyrimidine skeleton, a pyrazine skeleton, or a pyridine skeleton; organometallic complexes (particularly iridium complexes) having a phenylpyridine derivative having an electron-withdrawing group as a ligand; platinum complexes; and rare earth metal complexes.

[0507] The light-emitting layer may contain one or more organic compounds (host materials, assist materials, etc.) in addition to a light-emitting substance (guest material). One or more organic compounds may be a hole-transporting material or an electron-transporting material, or both. Alternatively, a bipolar material or a TADF material may be used as the one or more organic compounds.

[0508] The light-emitting layer preferably contains, for example, a phosphorescent material and a hole-transporting material and an electron-transporting material that are a combination that easily forms an exciplex. This configuration allows for efficient emission using Exciplex-Triplet Energy Transfer (ExTET), which is energy transfer from the exciplex to the light-emitting material (phosphorescent material). By selecting a combination that forms an exciplex that emits light that overlaps with the wavelength of the lowest-energy absorption band of the light-emitting material, the energy transfer becomes smooth, allowing for efficient emission. This configuration simultaneously enables high efficiency, low-voltage operation, and long life of the light-emitting device.

[0509] As a combination of materials that form an exciplex, it is preferable that the HOMO level (highest occupied molecular orbital level) of the hole-transporting material is equal to or higher than the HOMO level of the electron-transporting material. It is also preferable that the LUMO level (lowest unoccupied molecular orbital level) of the hole-transporting material is equal to or higher than the LUMO level of the electron-transporting material. The LUMO level and HOMO level of the material can be derived from the electrochemical properties (reduction potential and oxidation potential) of the material measured by cyclic voltammetry (CV).

[0510] The formation of exciplexes can be confirmed, for example, by comparing the emission spectra of the hole-transporting material, the electron-transporting material, and the mixed film of these materials and observing the phenomenon that the emission spectrum of the mixed film is shifted to longer wavelengths than the emission spectra of each material (or has a new peak at longer wavelengths). Alternatively, it can be confirmed by comparing the transient photoluminescence (PL) of the hole-transporting material, the transient PL of the electron-transporting material, and the mixed film of these materials and observing differences in transient response, such as the transient PL lifetime of the mixed film having a longer-lived component or a larger proportion of delayed components than the transient PL lifetimes of the individual materials. The above-mentioned transient PL can also be interpreted as transient electroluminescence (EL). In other words, the formation of exciplexes can also be confirmed by comparing the transient EL of the hole-transporting material, the transient EL of the electron-transporting material, and the mixed film of these materials and observing differences in transient response.

[0511] 23A, by selecting light-emitting layers such that the light emitted from the light-emitting layer 523Q_1, the light-emitting layer 523Q_2, and the light-emitting layer 523Q_3 has a complementary color relationship, white light can be emitted from the light-emitting element 550W. Note that, although an example in which the light-emitting unit 512W has three light-emitting layers is shown here, the number of light-emitting layers is not limited, and may be, for example, two.

[0512] By providing a coloring layer 545R, a coloring layer 545G, or a coloring layer 545B on such a light-emitting element 550W capable of emitting white light, red light, green light, or blue light can be emitted for each pixel, thereby achieving a full-color display. While FIG. 27A and other figures illustrate an example in which a coloring layer 545R that transmits red light, a coloring layer 545G that transmits green light, and a coloring layer 545B that transmits blue light are provided, the present invention is not limited to this. The visible light of at least two or more different colors transmitted by the coloring layers may be visible light of at least two or more different colors, and may be appropriately selected from, for example, red, green, blue, cyan, magenta, or yellow.

[0513] Therefore, even if the layers 521, 522, 524, 525, the light-emitting layers 523Q_1, 523Q_2, and 523Q_3 have the same structure (material, film thickness, etc.) in each pixel, full-color display can be achieved by providing colored layers as appropriate. Therefore, the display device according to one embodiment of the present invention does not require a separate light-emitting element for each pixel, which simplifies the manufacturing process and reduces manufacturing costs. However, the present invention is not limited thereto. One or more of the layers 521, 522, 524, 525, the light-emitting layers 523Q_1, 523Q_2, and 523Q_3 may have different structures depending on the pixel.

[0514] 24B to 24F show an example of the configuration of a light receiving element 550S that can be applied to a display device. Among the components shown in Fig. 24B to 24F, the same components as those shown in Fig. 23 are denoted by the same reference numerals.

[0515] 24B has a light receiving unit 555 between a pair of electrodes (electrode 501, electrode 502). The electrode 501 functions as a pixel electrode and is provided for each light receiving element. The electrode 502 functions as a common electrode and is provided in common to a plurality of light emitting elements and light receiving elements.

[0516] The light-receiving units 555 shown in Fig. 24B can be formed as island-shaped layers. That is, the light-receiving units 555 shown in Fig. 24B correspond to the organic layer 155 shown in Fig. 1B and the like. The light-receiving elements 550S correspond to the light-receiving elements 140S. The electrode 501 corresponds to the pixel electrode 111S. The electrode 502 corresponds to the common electrode 113.

[0517] The light-receiving unit 555 includes a layer 521, a layer 522, an active layer 526, a layer 524, and the like. The layers 521, 522, and 524 are the same as those used in the light-emitting unit 512W. The light-receiving element 550S also includes a layer 525 and the like between the light-receiving unit 555 and the electrode 502. A protective layer 540 is provided on the electrode 502. Here, the layer 525, the electrode 502, and the protective layer 540 are films provided in common to the light-emitting element 550W and the light-receiving element 550S, as shown in FIG. 23A and the like.

[0518] The active layer 526 includes a semiconductor. Examples of the semiconductor include inorganic semiconductors such as silicon and organic semiconductors including organic compounds. In this embodiment, an example in which an organic semiconductor is used as the semiconductor included in the active layer 526 is shown. By using an organic semiconductor, the light-emitting layer and the active layer 526 can be formed by the same method (for example, vacuum deposition), which is preferable because it allows the use of a common manufacturing device.

[0519] For example, a pn-type or pin-type photodiode can be used as the active layer 526. Below are listed n-type and p-type semiconductor materials that can be used as the active layer 526. The n-type and p-type semiconductor materials may be stacked in layers or may be mixed together to form a single layer.

[0520] The active layer 526 has an n-type semiconductor material, such as fullerene (e.g., C 60 , C 70Examples of electron-accepting organic semiconductor materials include fullerene derivatives and other fullerenes. Fullerenes have a soccer ball-like shape, which is energetically stable. Fullerenes have deep (low) HOMO and LUMO levels. Because fullerenes have a deep LUMO level, they have extremely high electron-accepting (acceptor) properties. Normally, when the π-electron conjugation (resonance) spreads across a plane, as in benzene, the electron-donating (donor) properties increase, but fullerenes have a spherical shape, so they have high electron-accepting properties despite the wide spread π-electron conjugation. High electron-accepting properties allow charge separation to occur quickly and efficiently, making them useful as light-receiving elements. C 60 , C 70 Both have a wide absorption band in the visible light region, especially C 70 is C 60 It is preferable because it has a larger π-electron conjugated system and a broad absorption band in the long wavelength region compared to [6,6]-Phenyl-C71-butyric acid methyl ester (abbreviation: PC70BM), [6,6]-Phenyl-C61-butyric acid methyl ester (abbreviation: PC60BM), and 1',1'',4',4''-Tetrahydro-di[1,4]methanonaphthaleno[1,2:2',3',56,60:2'',3''][5,6]fullerene-C60 (abbreviation: ICBA).

[0521] Furthermore, examples of n-type semiconductor materials include perylene tetracarboxylic acid derivatives such as N,N'-dimethyl-3,4,9,10-perylene tetracarboxylic acid diimide (abbreviation: Me-PTCDI).

[0522] Furthermore, examples of n-type semiconductor materials include 2,2'-(5,5'-(thieno[3,2-b]thiophene-2,5-diyl)bis(thiophene-5,2-diyl))bis(methane-1-yl-1-ylidene)dimalononitrile (abbreviation: FT2TDMN).

[0523] Furthermore, examples of n-type semiconductor materials include metal complexes having a quinoline skeleton, metal complexes having a benzoquinoline skeleton, metal complexes having an oxazole skeleton, metal complexes having a thiazole skeleton, oxadiazole derivatives, triazole derivatives, imidazole derivatives, oxazole derivatives, thiazole derivatives, phenanthroline derivatives, quinoline derivatives, benzoquinoline derivatives, quinoxaline derivatives, dibenzoquinoxaline derivatives, pyridine derivatives, bipyridine derivatives, pyrimidine derivatives, naphthalene derivatives, anthracene derivatives, coumarin derivatives, rhodamine derivatives, triazine derivatives, and quinone derivatives.

[0524] Examples of the p-type semiconductor material of the active layer 526 include electron-donating organic semiconductor materials such as copper(II) phthalocyanine (CuPc), tetraphenyldibenzoperiflanthene (DBP), zinc phthalocyanine (ZnPc), tin phthalocyanine (SnPc), quinacridone, and rubrene.

[0525] Examples of p-type semiconductor materials include carbazole derivatives, thiophene derivatives, furan derivatives, and compounds having an aromatic amine skeleton. Examples of p-type semiconductor materials include naphthalene derivatives, anthracene derivatives, pyrene derivatives, triphenylene derivatives, fluorene derivatives, pyrrole derivatives, benzofuran derivatives, benzothiophene derivatives, indole derivatives, dibenzofuran derivatives, dibenzothiophene derivatives, indolocarbazole derivatives, porphyrin derivatives, phthalocyanine derivatives, naphthalocyanine derivatives, quinacridone derivatives, rubrene derivatives, tetracene derivatives, polyphenylenevinylene derivatives, polyparaphenylene derivatives, polyfluorene derivatives, polyvinylcarbazole derivatives, and polythiophene derivatives.

[0526] The HOMO level of the electron-donating organic semiconductor material is preferably shallower (higher) than the HOMO level of the electron-accepting organic semiconductor material, and the LUMO level of the electron-donating organic semiconductor material is preferably shallower (higher) than the LUMO level of the electron-accepting organic semiconductor material.

[0527] It is preferable to use a spherical fullerene as the electron-accepting organic semiconductor material and a planar organic semiconductor material as the electron-donating organic semiconductor material. Molecules with similar shapes tend to aggregate together, and when molecules of the same type aggregate, the energy levels of their molecular orbitals become close, which can improve carrier transport properties.

[0528] For example, the active layer 526 is preferably formed by co-evaporating an n-type semiconductor and a p-type semiconductor, or alternatively, the active layer 526 may be formed by laminating an n-type semiconductor and a p-type semiconductor.

[0529] The light-emitting element and the light-receiving element can be made of either a low-molecular-weight compound or a high-molecular-weight compound, and may contain an inorganic compound. The layers constituting the light-emitting element and the light-receiving element can be formed by a method such as vapor deposition (including vacuum vapor deposition), a transfer method, a printing method, an inkjet method, or a coating method.

[0530] For example, polymer compounds such as poly(3,4-ethylenedioxythiophene) / poly(styrenesulfonic acid) (PEDOT / PSS) and inorganic compounds such as molybdenum oxide and copper iodide (CuI) can be used as hole transporting or electron blocking materials. Furthermore, inorganic compounds such as zinc oxide (ZnO) and organic compounds such as polyethyleneimine ethoxylate (PEIE) can be used as electron transporting or hole blocking materials. The light-receiving device may have, for example, a mixed film of PEIE and ZnO.

[0531] Furthermore, a polymer compound such as Poly[[4,8-bis[5-(2-ethylhexyl)-2-thienyl]benzo[1,2-b:4,5-b']dithiophene-2,6-diyl]-2,5-thiophenediyl[5,7-bis(2-ethylhexyl)-4,8-dioxo-4H,8H-benzo[1,2-c:4,5-c']dithiophene-1,3-diyl]]polymer (abbreviated as PBDB-T) or a PBDB-T derivative, which functions as a donor, can be used for the active layer 526. For example, a method of dispersing an acceptor material in PBDB-T or a PBDB-T derivative can be used.

[0532] Furthermore, three or more types of materials may be mixed in the active layer 526. For example, in order to expand the wavelength range, a third material may be mixed in addition to an n-type semiconductor material and a p-type semiconductor material. In this case, the third material may be a low-molecular-weight compound or a high-molecular-weight compound.

[0533] As shown in FIG. 23B, the light-receiving unit 555 can be stacked in the following order: layer 521 (hole injection layer), layer 522 (hole transport layer), active layer 526, layer 524 (electron transport layer), and layer 525 (electron injection layer). This is the same stacking order as that of the light-emitting unit 512W shown in FIG. 23A. In this case, in both the light-emitting element 550W and the light-receiving element 550S, the electrode 501 can function as an anode, and the electrode 502 can function as a cathode. That is, by applying a reverse bias between the electrode 501 and the electrode 502 and driving the light-receiving element 550S, the light incident on the light-receiving element 550S can be detected, an electric charge can be generated, and the electric charge can be extracted as a current.

[0534] However, the present invention is not limited to this. For example, a configuration in which the layer 521 has an electron injection layer, the layer 522 has an electron transport layer, the layer 524 has a hole transport layer, and the layer 525 has a hole injection layer may be used. In this case, in the light-receiving element 550S, the electrode 501 can function as a cathode, and the electrode 502 can function as an anode. As shown in the previous embodiment, in the present invention, the light-emitting element 550W and the light-receiving element 550S can be formed separately. Therefore, even if the light-emitting element 550W and the light-receiving element 550S have significantly different configurations, they can be manufactured relatively easily.

[0535] 23B, it is not necessary to provide all of the layers 521, 522, 524, and 525. For example, as shown in FIG. 23C, a configuration may be adopted in which the layer 521 having a hole injection layer is not provided and the layer 522 having a hole injection layer is in contact with the electrode 501. Note that, as shown in FIGS. 23B and 23C, it is preferable to provide at least one of the layer 522 having a hole transport layer and the layer 524 having an electron transport layer in contact with the active layer 526. This can prevent leakage current from occurring between the electrode 501 and the electrode 502 in the light-receiving element 550S, thereby preventing a decrease in imaging sensitivity.

[0536] Furthermore, it is also possible to have a configuration in which either layer 522 or layer 524 is not provided. For example, as shown in Figure 23D, a configuration in which active layer 526 is in contact with layer 525 may be used without providing layer 524 having an electron transport layer.

[0537] Furthermore, the light-receiving unit 555 may be configured with only the active layer 526. For example, as shown in Fig. 23E, the layer 522 having the hole transport layer may not be provided, and the active layer 526 may be configured to be in contact with the electrode 501.

[0538] Furthermore, when layer 525 is not a common layer but is provided for each light-emitting element, light-receiving element 550S may be configured without layer 525. For example, as shown in FIG. 23F, a configuration may be adopted in which active layer 526 is in contact with electrode 502 without providing layer 525 having an electron injection layer.

[0539] This embodiment mode can be combined with other embodiment modes as appropriate.

[0540] (Embodiment 7) In this embodiment, a high-definition display device will be described.

[0541] [Display panel configuration example] Wearable electronic devices for VR, AR, and other applications can provide 3D images by using parallax. In this case, it is necessary to display an image for the right eye within the field of view of the right eye, and an image for the left eye within the field of view of the left eye. Here, the shape of the display unit of the display device may be a horizontally long rectangle, but pixels located outside the fields of view of the right and left eyes do not contribute to the display, so those pixels always display black.

[0542] Therefore, it is preferable to divide the display section of the display panel into two areas, one for the right eye and one for the left eye, and not place pixels in the outer area that does not contribute to display. This reduces the power consumption required to write pixels. Also, since the load on the source lines, gate lines, etc. is reduced, a high frame rate display becomes possible. This allows for smoother video display, enhancing the sense of realism.

[0543] Fig. 24A shows an example of the configuration of a display panel. In Fig. 24A, a display unit 702L for the left eye and a display unit 702R for the right eye are arranged inside a substrate 701. In addition to the display units 702L and 702R, a drive circuit, wiring, an IC, an FPC, and the like may also be arranged on the substrate 701.

[0544] The display unit 702L and the display unit 702R shown in FIG. 24A have a square top surface shape.

[0545] The top surface shape of display unit 702L and display unit 702R may also be another regular polygon. FIG. 24B shows an example of a regular hexagon, FIG. 24C shows an example of a regular octagon, FIG. 24D shows an example of a regular decagon, and FIG. 24E shows an example of a regular dodecagon. In this way, by using a polygon with an even number of corners, the shape of the display unit can be made symmetrical. Note that polygons that are not regular polygons may also be used. Also, regular polygons or polygons with rounded corners may be used.

[0546] Since the display unit is made up of pixels arranged in a matrix, the straight line portions of the outline of each display unit may not be straight lines in the strict sense, but may have stepped portions. In particular, straight line portions that are not parallel to the pixel arrangement direction will have a stepped top surface shape. However, since the user does not see the pixel shapes when viewing, even if the diagonal outline of the display unit is strictly stepped, it can be considered to be a straight line. Similarly, even if the curved portion of the outline of the display unit is strictly stepped, it can be considered to be a curve.

[0547] FIG. 24F shows an example in which the top surfaces of display units 702L and 702R are circular.

[0548] The top surface shape of the display units 702L and 702R may be asymmetrical, and may not be a regular polygon.

[0549] FIG. 24G shows an example in which the top surface shapes of display units 702L and 702R are asymmetrical octagons. FIG. 24H shows an example in which the top surface shapes of display units 702L and 702R are asymmetrical. Even when the top surfaces of display units 702L and 702R are asymmetrical, it is preferable that display units 702L and 702R be symmetrically positioned. This allows for a natural image to be displayed.

[0550] Although the above description has been given of a configuration in which the display section is divided into two, it may be formed as a continuous shape.

[0551] Fig. 24I shows an example in which two circular display units 702 in Fig. 24F are connected together, and Fig. 24J shows an example in which two regular octagonal display units 702 in Fig. 24C are connected together.

[0552] The above is a description of an example of the configuration of the display panel.

[0553] At least a part of the configuration examples exemplified in this embodiment and the corresponding drawings can be combined as appropriate with other configuration examples or drawings.

[0554] This embodiment mode can be implemented by appropriately combining at least a part thereof with other embodiment modes described in this specification.

[0555] (Embodiment 8) In this embodiment, a metal oxide (also referred to as an oxide semiconductor) that can be used for the OS transistor described in the above embodiment will be described.

[0556] The metal oxide used in the OS transistor preferably contains at least indium or zinc, and more preferably contains indium and zinc. For example, the metal oxide preferably contains indium, M (where M is one or more selected from gallium, aluminum, yttrium, tin, silicon, boron, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, and cobalt), and zinc. In particular, M is preferably one or more selected from gallium, aluminum, yttrium, and tin, and more preferably gallium.

[0557] Furthermore, the metal oxide can be formed by a sputtering method, a chemical vapor deposition (CVD) method such as a metal organic chemical vapor deposition (MOCVD) method, or an atomic layer deposition (ALD) method.

[0558] Hereinafter, an oxide containing indium (In), gallium (Ga), and zinc (Zn) will be described as an example of a metal oxide. Note that an oxide containing indium (In), gallium (Ga), and zinc (Zn) may be referred to as an In-Ga-Zn oxide.

[0559] <Classification of crystal structures> Examples of the crystalline structure of oxide semiconductors include amorphous (including completely amorphous), c-axis-aligned crystalline (CAAC), nanocrystalline (nc), cloud-aligned composite (CAC), single crystal, and polycrystal.

[0560] The crystalline structure of a film or substrate can be evaluated using an X-ray diffraction (XRD) spectrum. For example, it can be evaluated using an XRD spectrum obtained by GIXD (Grazing-Incidence XRD) measurement. The GIXD method is also called the thin film method or the Seemann-Bohlin method. In the following, the XRD spectrum obtained by GIXD measurement may be simply referred to as the XRD spectrum.

[0561] For example, in the case of a quartz glass substrate, the peak shape of the XRD spectrum is nearly symmetrical. On the other hand, in the case of an In-Ga-Zn oxide film having a crystalline structure, the peak shape of the XRD spectrum is asymmetrical. The asymmetrical peak shape of the XRD spectrum clearly indicates the presence of crystals in the film or substrate. In other words, if the peak shape of the XRD spectrum is not symmetrical, the film or substrate cannot be said to be in an amorphous state.

[0562] The crystalline structure of a film or substrate can be evaluated by a diffraction pattern (also called a nanobeam electron diffraction pattern) observed by nanobeam electron diffraction (NBED). For example, a halo is observed in the diffraction pattern of a quartz glass substrate, confirming that the quartz glass is in an amorphous state. Furthermore, a spot-like pattern is observed in the diffraction pattern of an In-Ga-Zn oxide film formed at room temperature, rather than a halo. Therefore, it is presumed that the In-Ga-Zn oxide formed at room temperature is neither single crystal nor polycrystalline, nor in an amorphous state, but is in an intermediate state, and it cannot be concluded that it is in an amorphous state.

[0563] <<Structure of oxide semiconductor>> Note that oxide semiconductors may be classified differently from the above when focusing on their structures. For example, oxide semiconductors are divided into single-crystal oxide semiconductors and other non-single-crystal oxide semiconductors. Examples of non-single-crystal oxide semiconductors include the above-mentioned CAAC-OS and nc-OS. Non-single-crystal oxide semiconductors include polycrystalline oxide semiconductors, amorphous-like oxide semiconductors (a-like OSs), amorphous oxide semiconductors, and the like.

[0564] Here, the above-mentioned CAAC-OS, nc-OS, and a-like OS will be described in detail.

[0565] [CAAC-OS] CAAC-OS is an oxide semiconductor having multiple crystalline regions, each with its c-axis aligned in a specific direction. The specific direction can be the thickness direction of the CAAC-OS film, the normal direction to the surface on which the CAAC-OS film is formed, or the normal direction to the surface of the CAAC-OS film. A crystalline region is a region with periodic atomic arrangement. If the atomic arrangement is considered as a lattice arrangement, a crystalline region can also be a region with a uniform lattice arrangement. Furthermore, CAAC-OS has a region where multiple crystalline regions are connected in the ab-plane direction, and the region may have distortion. Note that distortion refers to a location where the lattice arrangement changes between a region with a uniform lattice arrangement and a region with a different uniform lattice arrangement in the region where multiple crystalline regions are connected. In other words, CAAC-OS is an oxide semiconductor with a c-axis aligned but no clear orientation in the ab-plane direction.

[0566] Each of the multiple crystalline regions is composed of one or more minute crystals (crystals with a maximum diameter of less than 10 nm). When a crystalline region is composed of one minute crystal, the maximum diameter of the crystalline region is less than 10 nm. When a crystalline region is composed of many minute crystals, the size of the crystalline region may be several tens of nm.

[0567] In the In-Ga-Zn oxide, the CAAC-OS tends to have a layered crystal structure (also referred to as a layered structure) in which a layer containing indium (In) and oxygen (hereinafter referred to as an In layer) and a layer containing gallium (Ga), zinc (Zn), and oxygen (hereinafter referred to as a (Ga,Zn) layer) are stacked. Note that indium and gallium are mutually substituted. Therefore, the (Ga,Zn) layer may contain indium. The In layer may contain gallium. The In layer may contain zinc. The layered structure is observed as a lattice image in a high-resolution transmission electron microscope (TEM) image, for example.

[0568] When the CAAC-OS film is subjected to structural analysis using, for example, an XRD apparatus, a peak indicating c-axis orientation is detected at or near 2θ=31° in out-of-plane XRD measurement using θ / 2θ scan. Note that the position of the peak indicating c-axis orientation (2θ value) may vary depending on the type and composition of the metallic elements constituting the CAAC-OS.

[0569] For example, in the electron diffraction pattern of a CAAC-OS film, multiple bright spots are observed, and the spots are observed at positions that are point-symmetric with respect to the spot of the incident electron beam that has passed through the sample (also called the direct spot).

[0570] When the crystalline region is observed from the specific direction, the lattice arrangement within the crystalline region is basically a hexagonal lattice, but the unit cell is not necessarily a regular hexagon and may be non-regular hexagonal. The distortion may also have a pentagonal, heptagonal, or other lattice arrangement. In the CAAC-OS, no clear grain boundaries are observed even near the distortion. This indicates that the formation of grain boundaries is suppressed by the distortion of the lattice arrangement. This is thought to be because the CAAC-OS can tolerate distortion due to the lack of close-packed oxygen atom arrangement in the ab-plane direction and the change in interatomic bond distance caused by metal atom substitution.

[0571] A crystal structure with clear grain boundaries is called polycrystalline. Grain boundaries act as recombination centers, trapping carriers and potentially causing a decrease in the on-state current and field-effect mobility of a transistor. Therefore, CAAC-OS, which lacks clear grain boundaries, is one of the crystalline oxides with a crystal structure suitable for use in the semiconductor layer of a transistor. Zn is preferred for use in CAAC-OS. For example, In-Zn oxide and In-Ga-Zn oxide are suitable because they can suppress the generation of grain boundaries more effectively than In oxide.

[0572] CAAC-OS is an oxide semiconductor with high crystallinity and no clear crystal grain boundaries. Therefore, it can be said that the CAAC-OS is less susceptible to a decrease in electron mobility due to crystal grain boundaries. Furthermore, since the crystallinity of an oxide semiconductor can be reduced by impurities or defects, the CAAC-OS can be said to be an oxide semiconductor with few impurities and defects (such as oxygen vacancies). Therefore, oxide semiconductors with CAAC-OS have stable physical properties. Therefore, oxide semiconductors with CAAC-OS are heat-resistant and highly reliable. Furthermore, the CAAC-OS is stable even under high temperatures (so-called thermal budgets) during the manufacturing process. Therefore, using a CAAC-OS for an OS transistor can increase the flexibility of the manufacturing process.

[0573] [nc-OS] The nc-OS has periodic atomic arrangement in a microscopic region (e.g., a region of 1 nm to 10 nm, particularly a region of 1 nm to 3 nm). In other words, the nc-OS has microcrystalline structures. The size of the microcrystalline structures is, for example, 1 nm to 10 nm, particularly 1 nm to 3 nm, and therefore these microcrystalline structures are also called nanocrystalline structures. Furthermore, the nc-OS exhibits no regularity in the crystal orientation between different nanocrystalline structures. Therefore, the entire film lacks orientation. Therefore, depending on the analytical method, the nc-OS may be indistinguishable from an a-like OS or an amorphous oxide semiconductor. For example, when a structural analysis of an nc-OS film is performed using an XRD system, no peaks indicating crystallinity are detected in out-of-plane XRD measurements using θ / 2θ scanning. Furthermore, when an nc-OS film is subjected to electron diffraction (also known as selected-area electron diffraction) using an electron beam with a probe diameter larger than that of nanocrystalline structures (e.g., 50 nm or larger), a halo-like diffraction pattern is observed. On the other hand, when electron diffraction (also called nanobeam electron diffraction) is performed on an nc-OS film using an electron beam with a probe diameter close to or smaller than the size of the nanocrystals (for example, 1 nm to 30 nm), an electron diffraction pattern can be obtained in which multiple spots are observed within a ring-shaped region centered on the direct spot.

[0574] [a-like OS] The a-like OS is an oxide semiconductor having a structure between the nc-OS and the amorphous oxide semiconductor. The a-like OS has a pore or low-density region. That is, the a-like OS has lower crystallinity than the nc-OS and CAAC-OS. Furthermore, the a-like OS has a higher hydrogen concentration in the film than the nc-OS and CAAC-OS.

[0575] <<Oxide semiconductor structure>> Next, the above-mentioned CAC-OS will be described in detail, which relates to the material composition.

[0576] [CAC-OS] CAC-OS is a material structure in which elements constituting a metal oxide are unevenly distributed in a size range of 0.5 nm to 10 nm, preferably 1 nm to 3 nm, or a similar size range. Hereinafter, a metal oxide in which one or more metal elements are unevenly distributed and the regions containing the metal elements are mixed in a size range of 0.5 nm to 10 nm, preferably 1 nm to 3 nm, or a similar size range, is also referred to as a mosaic or patch state.

[0577] Furthermore, CAC-OS has a mosaic structure in which the material is separated into first and second regions, and the first regions are distributed throughout the film (hereinafter also referred to as a cloud structure). That is, CAC-OS is a composite metal oxide having a structure in which the first and second regions are mixed.

[0578] Here, the atomic ratios of In, Ga, and Zn to the metal elements constituting the CAC-OS in the In-Ga-Zn oxide are denoted as [In], [Ga], and [Zn], respectively. For example, in the CAC-OS in the In-Ga-Zn oxide, the first region is a region where [In] is larger than [In] in the composition of the CAC-OS film. The second region is a region where [Ga] is larger than [Ga] in the composition of the CAC-OS film. Alternatively, for example, the first region is a region where [In] is larger than [In] in the second region and [Ga] is smaller than [Ga] in the second region. The second region is a region where [Ga] is larger than [Ga] in the first region and [In] is smaller than [In] in the first region.

[0579] Specifically, the first region is a region whose main component is indium oxide, indium zinc oxide, or the like. The second region is a region whose main component is gallium oxide, gallium zinc oxide, or the like. In other words, the first region can be rephrased as a region whose main component is In. The second region can be rephrased as a region whose main component is Ga.

[0580] It should be noted that there are cases where a clear boundary between the first region and the second region cannot be observed.

[0581] In addition, CAC-OS in In-Ga-Zn oxide refers to a material structure containing In, Ga, Zn, and O, in which some regions primarily composed of Ga and other regions primarily composed of In are randomly arranged in a mosaic pattern. Therefore, it is presumed that CAC-OS has a structure in which metal elements are distributed nonuniformly.

[0582] CAC-OS can be formed, for example, by a sputtering method without heating the substrate. When forming CAC-OS by a sputtering method, any one or more of an inert gas (typically argon), oxygen gas, and nitrogen gas may be used as the deposition gas. The lower the flow rate of oxygen gas relative to the total flow rate of deposition gas during deposition, the better. For example, the flow rate of oxygen gas relative to the total flow rate of deposition gas during deposition is set to 0% or more and less than 30%, preferably 0% or more and 10% or less.

[0583] Furthermore, for example, in the case of CAC-OS in an In-Ga-Zn oxide, EDX mapping obtained using EDX (Energy Dispersive X-ray spectroscopy) confirms that the CAC-OS has a structure in which a region containing In as a main component (first region) and a region containing Ga as a main component (second region) are unevenly distributed and mixed.

[0584] Here, the first region has higher conductivity than the second region. That is, the flow of carriers through the first region causes the metal oxide to exhibit conductivity. Therefore, the first region is distributed in a cloud-like manner in the metal oxide, thereby achieving a high field-effect mobility (μ).

[0585] On the other hand, the second region has higher insulating properties than the first region. That is, the second region is distributed in the metal oxide, thereby suppressing leakage current.

[0586] Therefore, when CAC-OS is used in a transistor, the conductivity due to the first region and the insulating property due to the second region act complementarily, thereby providing the CAC-OS with a switching function (the ability to turn on / off). In other words, CAC-OS has a conductive function in part of the material and an insulating function in part of the material, and the material as a whole functions as a semiconductor. By separating the conductive function from the insulating function, both functions can be maximized. Therefore, by using CAC-OS in a transistor, a high on-current (I on ), high field-effect mobility (μ), and good switching behavior can be achieved.

[0587] Furthermore, a transistor using CAC-OS has high reliability, making it ideal for various semiconductor devices such as display devices.

[0588] Oxide semiconductors have a variety of structures, each with different characteristics. The oxide semiconductor of one embodiment of the present invention may include two or more of an amorphous oxide semiconductor, a polycrystalline oxide semiconductor, an a-like OS, a CAC-OS, an nc-OS, and a CAAC-OS.

[0589] <Transistors containing oxide semiconductors> Next, a case where the oxide semiconductor is used in a transistor will be described.

[0590] By using the oxide semiconductor for a transistor, a transistor with high field-effect mobility and high reliability can be realized.

[0591] For the transistor, an oxide semiconductor with a low carrier concentration is preferably used. For example, the carrier concentration of the oxide semiconductor is 1×10 17 cm -3 Less than 1 × 10 15 cm -3 or less, more preferably 1 × 10 13 cm -3Less than or equal to 1×10 11 cm -3 or less, more preferably 1 × 10 10 cm -3 Less than 1 x 10 -9 cm -3 That is all. Note that in order to reduce the carrier concentration of an oxide semiconductor film, the impurity concentration in the oxide semiconductor film may be reduced to reduce the density of defect states. In this specification and the like, a semiconductor having a low impurity concentration and a low density of defect states is referred to as a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor. Note that an oxide semiconductor having a low carrier concentration may also be referred to as a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor.

[0592] Furthermore, a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor film has a low density of defect states, and therefore the density of trap states may also be low.

[0593] Furthermore, charges trapped in the trap states of an oxide semiconductor take a long time to disappear and may behave like fixed charges. Therefore, a transistor in which a channel formation region is formed in an oxide semiconductor with a high density of trap states may have unstable electrical characteristics.

[0594] Therefore, reducing the impurity concentration in the oxide semiconductor is effective for stabilizing the electrical characteristics of a transistor. Furthermore, in order to reduce the impurity concentration in the oxide semiconductor, it is preferable to also reduce the impurity concentration in adjacent films. Examples of impurities include hydrogen, nitrogen, alkali metals, alkaline earth metals, iron, nickel, and silicon. Note that impurities in an oxide semiconductor refer to, for example, elements other than the main components constituting the oxide semiconductor. For example, an element with a concentration of less than 0.1 atomic % can be considered an impurity.

[0595] <Impurities> Here, the influence of each impurity in an oxide semiconductor will be described.

[0596] When an oxide semiconductor contains silicon or carbon, which is one of the Group 14 elements, defect levels are formed in the oxide semiconductor. Therefore, the concentration of silicon or carbon in the oxide semiconductor and the concentration of silicon or carbon near the interface with the oxide semiconductor (concentration obtained by secondary ion mass spectrometry (SIMS)) are calculated to be 2×10 18 atoms / cm 3 Less than or equal to 2 x 10 17 atoms / cm 3 The following applies.

[0597] Furthermore, when an oxide semiconductor contains an alkali metal or alkaline earth metal, defect levels may be formed and carriers may be generated. Therefore, a transistor using an oxide semiconductor containing an alkali metal or alkaline earth metal is likely to have normally-on characteristics. Therefore, when the concentration of the alkali metal or alkaline earth metal in the oxide semiconductor obtained by SIMS is 1×10 18 atoms / cm 3 Less than or equal to 2 x 10 16 atoms / cm 3 Do the following:

[0598] Furthermore, when nitrogen is contained in an oxide semiconductor, electrons serving as carriers are generated, the carrier concentration increases, and the semiconductor is likely to become n-type. As a result, a transistor using an oxide semiconductor containing nitrogen as a semiconductor tends to have normally-on characteristics. Alternatively, when nitrogen is contained in an oxide semiconductor, trap states may be formed. As a result, the electrical characteristics of the transistor may become unstable. For this reason, the nitrogen concentration in the oxide semiconductor obtained by SIMS is set to 5×10 19 atoms / cm 3 Less than 5 x 10 18 atoms / cm 3 Less than or equal to 1×10 18 atoms / cm 3 Less than 5 × 10, more preferably 17 atoms / cm 3 Do the following:

[0599] Furthermore, hydrogen contained in an oxide semiconductor may react with oxygen bonded to a metal atom to form water, which may form an oxygen vacancy. When hydrogen enters the oxygen vacancy, electrons serving as carriers may be generated. Furthermore, some of the hydrogen may bond with oxygen bonded to a metal atom to generate electrons serving as carriers. Therefore, a transistor using an oxide semiconductor containing hydrogen is likely to have normally-on characteristics. For this reason, it is preferable to reduce the amount of hydrogen in the oxide semiconductor as much as possible. Specifically, the hydrogen concentration in the oxide semiconductor obtained by SIMS is measured to be 1×10 20 atoms / cm 3 Less than 1 x 10 19 atoms / cm 3 less than 5 × 10 18 atoms / cm 3 less than 1×10 18 atoms / cm 3 Make it less than.

[0600] When an oxide semiconductor with sufficiently reduced impurities is used for a channel formation region of a transistor, stable electrical characteristics can be obtained.

[0601] This embodiment mode can be implemented by appropriately combining at least a part thereof with other embodiment modes described in this specification.

[0602] (Embodiment 9) In this embodiment, electronic devices of one embodiment of the present invention will be described with reference to FIGS.

[0603] The electronic devices of this embodiment include the display device of one embodiment of the present invention. The display device of one embodiment of the present invention can easily achieve high definition, high resolution, and a large size. Therefore, the display device of one embodiment of the present invention can be used as a display portion of various electronic devices.

[0604] Furthermore, the display device of one embodiment of the present invention can be manufactured at low cost, which leads to a reduction in the manufacturing cost of electronic devices.

[0605] Examples of electronic devices include electronic devices with relatively large screens such as television sets, desktop or notebook personal computers, computer monitors, digital signage, large game machines such as pachinko machines, as well as digital cameras, digital video cameras, digital photo frames, mobile phones, portable game machines, personal digital assistants, and sound playback devices.

[0606] In particular, the display device of one embodiment of the present invention can achieve high resolution and is therefore suitable for use in electronic devices having a relatively small display area. Examples of such electronic devices include information terminals (wearable devices) such as wristwatches and bracelets, as well as head-mounted wearable devices such as VR devices and glasses-type AR devices. Further examples of wearable devices include SR devices and MR devices.

[0607] The display device of one embodiment of the present invention preferably has an extremely high resolution such as HD (1280 × 720 pixels), FHD (1920 × 1080 pixels), WQHD (2560 × 1440 pixels), WQXGA (2560 × 1600 pixels), 4K2K (3840 × 2160 pixels), or 8K4K (7680 × 4320 pixels). A resolution of 4K2K, 8K4K, or higher is particularly preferable. Furthermore, the pixel density (resolution) of the display device of one embodiment of the present invention is preferably 300 ppi or higher, more preferably 500 ppi or higher, more preferably 1000 ppi or higher, more preferably 2000 ppi or higher, more preferably 3000 ppi or higher, more preferably 5000 ppi or higher, and even more preferably 7000 ppi or higher. By using a display device with such high resolution or high definition, it is possible to further enhance the sense of presence and depth in electronic devices for personal use such as portable or home use.

[0608] The electronic device of this embodiment can be incorporated along the curved surface of the inner or outer wall of a house or building, or the interior or exterior of an automobile.

[0609] The electronic device of this embodiment may have an antenna. By receiving a signal through the antenna, images, information, and the like can be displayed on a display portion. In addition, when the electronic device has an antenna and a secondary battery, the antenna may be used for contactless power transmission.

[0610] The electronic device of this embodiment may have a sensor (including the function of sensing, detecting, or measuring force, displacement, position, velocity, acceleration, angular velocity, rotation speed, distance, light, liquid, magnetism, temperature, chemical substance, sound, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, odor, or infrared light).

[0611] The electronic device of the present embodiment can have various functions, such as a function to display various information (still images, videos, text images, etc.) on a display unit, a touch panel function, a function to display a calendar, date, time, etc., a function to execute various software (programs), a wireless communication function, a function to read out programs or data recorded on a recording medium, etc.

[0612] Electronic device 6500 shown in FIG. 25A is a portable information terminal that can be used as a smartphone.

[0613] The electronic device 6500 includes a housing 6501, a display portion 6502, a power button 6503, a button 6504, a speaker 6505, a microphone 6506, a camera 6507, and a light source 6508. The display portion 6502 has a touch panel function.

[0614] The display device of one embodiment of the present invention can be applied to the display portion 6502.

[0615] FIG. 25B is a schematic cross-sectional view including the end of the housing 6501 on the microphone 6506 side.

[0616] A light-transmitting protective member 6510 is provided on the display surface side of the housing 6501, and a display panel 6511, optical members 6512, a touch sensor panel 6513, a printed circuit board 6517, a battery 6518, etc. are arranged in the space surrounded by the housing 6501 and the protective member 6510.

[0617] A display panel 6511, an optical member 6512, and a touch sensor panel 6513 are fixed to the protective member 6510 by adhesive layers (not shown).

[0618] In an area outside the display unit 6502, a part of the display panel 6511 is folded back, and an FPC 6515 is connected to the folded back part. An IC 6516 is mounted on the FPC 6515. The FPC 6515 is connected to a terminal provided on a printed circuit board 6517.

[0619] The flexible display (flexible display device) of one embodiment of the present invention can be applied to the display panel 6511. Therefore, an extremely lightweight electronic device can be realized. In addition, since the display panel 6511 is extremely thin, a large-capacity battery 6518 can be mounted thereon while keeping the thickness of the electronic device small. Furthermore, by folding back a part of the display panel 6511 and arranging a connection portion with the FPC 6515 on the back side of the pixel portion, an electronic device with a narrow frame can be realized.

[0620] 26A shows an example of a television device. A television device 7100 has a display unit 7000 built into a housing 7101. Here, the housing 7101 is supported by a stand 7103.

[0621] The display device of one embodiment of the present invention can be applied to the display portion 7000.

[0622] 26A can be operated using operation switches provided on the housing 7101 and a separate remote control 7111. Alternatively, a touch sensor may be provided in the display unit 7000, and the television 7100 may be operated by touching the display unit 7000 with a finger or the like. The remote control 7111 may have a display unit that displays information output from the remote control 7111. The channel and volume can be controlled using operation keys or a touch panel provided on the remote control 7111, and the video displayed on the display unit 7000 can be controlled.

[0623] The television device 7100 is configured to include a receiver, a modem, and the like. The receiver can receive general television broadcasts. In addition, by connecting to a wired or wireless communication network via the modem, it is possible to perform one-way (from sender to receiver) or two-way (between sender and receiver, or between receivers, etc.) information communication.

[0624] 26B shows an example of a laptop personal computer 7200. The laptop personal computer 7200 includes a housing 7211, a keyboard 7212, a pointing device 7213, an external connection port 7214, and the like. A display portion 7000 is incorporated in the housing 7211.

[0625] The display device of one embodiment of the present invention can be applied to the display portion 7000.

[0626] 26C and 26D show an example of digital signage.

[0627] 26C includes a housing 7301, a display unit 7000, and a speaker 7303. The digital signage 7300 may further include an LED lamp, operation keys (including a power switch or an operation switch), a connection terminal, various sensors, a microphone, and the like.

[0628] 26D shows a digital signage 7400 attached to a cylindrical pillar 7401. The digital signage 7400 has a display unit 7000 provided along the curved surface of the pillar 7401.

[0629] 26C and 26D, the display device of one embodiment of the present invention can be applied to the display portion 7000.

[0630] The larger the display unit 7000, the more information can be provided at one time. Also, the larger the display unit 7000, the more easily it will attract people's attention, which can increase the advertising effectiveness of, for example, advertisements.

[0631] Applying a touch panel to the display unit 7000 is preferable because it not only displays images or videos on the display unit 7000 but also allows the user to intuitively operate it. Furthermore, when used to provide information such as route information or traffic information, intuitive operation can improve usability.

[0632] 26C and 26D, it is preferable that the digital signage 7300 or the digital signage 7400 can wirelessly link with an information terminal 7311 or an information terminal 7411 such as a smartphone carried by a user. For example, advertising information displayed on the display unit 7000 can be displayed on the screen of the information terminal 7311 or the information terminal 7411. Furthermore, the display on the display unit 7000 can be switched by operating the information terminal 7311 or the information terminal 7411.

[0633] Furthermore, it is also possible to cause the digital signage 7300 or the digital signage 7400 to execute a game using the screen of the information terminal 7311 or the information terminal 7411 as an operation means (controller), thereby allowing an unspecified number of users to simultaneously participate in and enjoy the game.

[0634] FIG. 27A is a diagram showing the appearance of the camera 8000 with the viewfinder 8100 attached.

[0635] The camera 8000 includes a housing 8001, a display unit 8002, operation buttons 8003, a shutter button 8004, etc. A detachable lens 8006 is attached to the camera 8000. Note that the lens 8006 and the housing of the camera 8000 may be integrated together.

[0636] The camera 8000 can capture an image by pressing a shutter button 8004 or touching a display unit 8002 that functions as a touch panel.

[0637] The housing 8001 has a mount with electrodes, and can be connected to a finder 8100 as well as a strobe device and the like.

[0638] The finder 8100 includes a housing 8101, a display portion 8102, a button 8103, and the like.

[0639] The housing 8101 is attached to the camera 8000 by a mount that engages with the mount of the camera 8000. The viewfinder 8100 can display an image received from the camera 8000 on a display unit 8102.

[0640] The button 8103 has a function such as a power button.

[0641] The display device of one embodiment of the present invention can be applied to a display portion 8002 of a camera 8000 and a display portion 8102 of a finder 8100. Note that the camera 8000 may have a built-in finder.

[0642] FIG. 27B is a diagram showing the appearance of the head mounted display 8200.

[0643] The head-mounted display 8200 includes a mounting portion 8201, a lens 8202, a main body 8203, a display portion 8204, and a cable 8205. The mounting portion 8201 has a built-in battery 8206.

[0644] A cable 8205 supplies power from a battery 8206 to the main body 8203. The main body 8203 includes a wireless receiver or the like, and can display received video information on a display portion 8204. The main body 8203 also includes a camera, and can use information on the movement of the user's eyeballs or eyelids as an input means.

[0645] The wearing unit 8201 may have a function of recognizing the line of sight by providing a plurality of electrodes at positions that come into contact with the user, capable of detecting a current that flows in accordance with the movement of the user's eyeballs. The wearing unit 8201 may also have a function of monitoring the user's pulse rate based on the current that flows through the electrodes. The wearing unit 8201 may also have various sensors, such as a temperature sensor, a pressure sensor, and an acceleration sensor, and may also have a function of displaying the user's biological information on the display unit 8204 and a function of changing the image displayed on the display unit 8204 in accordance with the movement of the user's head.

[0646] The display device of one embodiment of the present invention can be applied to the display portion 8204.

[0647] 27C to 27E are diagrams showing the appearance of a head mounted display 8300. The head mounted display 8300 includes a housing 8301, a display portion 8302, a band-shaped fixture 8304, and a pair of lenses 8305.

[0648] A user can view the display on the display portion 8302 through the lens 8305. Note that it is preferable to arrange the display portion 8302 in a curved manner because the user can feel a high sense of presence. In addition, by viewing different images displayed in different regions of the display portion 8302 through the lens 8305, it is possible to perform 3D display using parallax. Note that the present invention is not limited to a configuration in which one display portion 8302 is provided, and two display portions 8302 may be provided, with one display portion being provided for each eye of the user.

[0649] The display device of one embodiment of the present invention can be applied to the display portion 8302. The display device of one embodiment of the present invention can also achieve extremely high resolution. For example, even when the display is enlarged and viewed using the lens 8305 as shown in FIG. 27E, the pixels are hardly visible to the user. That is, the display portion 8302 allows the user to view a highly realistic image.

[0650] 27F is a diagram showing the appearance of a goggle-type head-mounted display 8400. The head-mounted display 8400 includes a pair of housings 8401, a mounting portion 8402, and a cushioning member 8403. A display portion 8404 and a lens 8405 are provided in each of the pair of housings 8401. By displaying different images on the pair of display portions 8404, a 3D display using parallax can be performed.

[0651] A user can view the display portion 8404 through the lens 8405. The lens 8405 has a focus adjustment mechanism, and its position can be adjusted according to the user's eyesight. The display portion 8404 is preferably a square or a horizontally long rectangle. This can enhance the sense of realism.

[0652] The wearing part 8402 is preferably adjustable to fit the size of the user's face and has plasticity and elasticity to prevent it from slipping off. Furthermore, a part of the wearing part 8402 preferably has a vibration mechanism that functions as a bone conduction earphone. This allows the user to enjoy video and audio simply by wearing the earphone, without the need for separate audio equipment such as earphones or speakers. The housing 8401 may also have a function to output audio data via wireless communication.

[0653] The mounting unit 8402 and the buffer member 8403 are portions that come into contact with the user's face (forehead, cheeks, etc.). The close contact of the buffer member 8403 with the user's face can prevent light leakage and enhance the sense of immersion. The buffer member 8403 is preferably made of a soft material so that it can be in close contact with the user's face when the user wears the head-mounted display 8400. For example, materials such as rubber, silicone rubber, urethane, and sponge can be used. Furthermore, using a sponge or the like with its surface covered with cloth or leather (natural leather or synthetic leather) can prevent gaps from forming between the user's face and the buffer member 8403, thereby effectively preventing light leakage. Furthermore, using such materials is preferable because they feel pleasant to the touch and do not cause the user to feel cold when worn in cold seasons. It is preferable that components that come into contact with the user's skin, such as the buffer member 8403 or the mounting unit 8402, be removable for easy cleaning or replacement.

[0654] The electronic device shown in Figures 28A to 28F has a housing 9000, a display unit 9001, a speaker 9003, operation keys 9005 (including a power switch or an operation switch), a connection terminal 9006, a sensor 9007 (including the function of detecting, detecting, or measuring force, displacement, position, velocity, acceleration, angular velocity, rotation speed, distance, light, liquid, magnetism, temperature, chemical substance, sound, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, odor, or infrared rays), a microphone 9008, etc.

[0655] 28A to 28F have various functions. For example, they may have a function to display various information (still images, videos, text images, etc.) on a display unit, a touch panel function, a function to display a calendar, date, or time, a function to control processing using various software (programs), a wireless communication function, a function to read and process programs or data recorded on a recording medium, etc. Note that the functions of the electronic device are not limited to these, and the electronic device may have various other functions. The electronic device may have multiple display units. Furthermore, the electronic device may have a function to include a camera or the like to capture still images or videos and store them on a recording medium (external or built-in to the camera), a function to display the captured images on the display unit, etc.

[0656] The display device of one embodiment of the present invention can be applied to the display portion 9001 .

[0657] The electronic devices shown in FIGS. 28A to 28F will be described in detail below.

[0658] FIG. 28A is a perspective view showing a mobile information terminal 9101. The mobile information terminal 9101 can be used as, for example, a smartphone. The mobile information terminal 9101 may be provided with a speaker 9003, a connection terminal 9006, a sensor 9007, and the like. The mobile information terminal 9101 can display text and image information on multiple surfaces thereof. FIG. 28A shows an example in which three icons 9050 are displayed. Information 9051, indicated by a dashed rectangle, can also be displayed on another surface of the display unit 9001. Examples of the information 9051 include notifications of incoming emails, SNS messages, phone calls, etc., the title of the email or SNS message, the sender's name, the date and time, the remaining battery level, and the strength of antenna reception. Alternatively, an icon 9050 or the like may be displayed in the position where the information 9051 is displayed.

[0659] 28B is a perspective view showing mobile information terminal 9102. Mobile information terminal 9102 has a function of displaying information on three or more sides of display unit 9001. Here, an example is shown in which information 9052, information 9053, and information 9054 are displayed on different sides. For example, while carrying mobile information terminal 9102 in a breast pocket of clothes, the user can check information 9053 displayed in a position that can be observed from above mobile information terminal 9102. The user can check the display without taking mobile information terminal 9102 out of the pocket and decide, for example, whether to answer a call.

[0660] FIG. 28C is a perspective view showing a wristwatch-type mobile information terminal 9200. The mobile information terminal 9200 can be used as, for example, a smart watch (registered trademark). The display surface of the display unit 9001 is curved, and a display can be performed along the curved display surface. The mobile information terminal 9200 can also perform hands-free communication by communicating with, for example, a headset capable of wireless communication. The mobile information terminal 9200 can also perform data transmission and reception with another information terminal and charge itself via a connection terminal 9006. Note that charging may be performed by wireless power supply.

[0661] 28D to 28F are perspective views showing a foldable mobile information terminal 9201. FIG. 28D is a perspective view of the mobile information terminal 9201 in an unfolded state, FIG. 28F is a perspective view of the mobile information terminal 9201 in a folded state, and FIG. 28E is a perspective view of a state in the process of changing from one of FIG. 28D and FIG. 28F to the other. The mobile information terminal 9201 is highly portable when folded, and has a seamless, wide display area when unfolded, providing excellent viewability of the display. The display unit 9001 of the mobile information terminal 9201 is supported by three housings 9000 connected by hinges 9055. For example, the display unit 9001 can be bent with a curvature radius of 0.1 mm or more and 150 mm or less.

[0662] At least a part of the configuration examples exemplified in this embodiment and the corresponding drawings can be combined as appropriate with other configuration examples or drawings.

[0663] This embodiment mode can be implemented by appropriately combining at least a part thereof with other embodiment modes described in this specification. [Explanation of symbols]

[0664] 100: display device, 100C: display device, 100D: display device, 100E: display device, 100F: display device, 100G: display device, 101: layer, 105: insulating layer, 110: pixel, 110a: sub-pixel, 110b: sub-pixel, 110c: sub-pixel, 110S: sub-pixel, 111: pixel electrode, 111a: pixel electrode, 111b: pixel electrode, 111c: pixel electrode, 111C: connection electrode, 111S: pixel electrode, 112: organic layer, 112a: organic layer, 112b: organic layer, 112c: organic layer, 112W: organic layer, 113: common electrode, 114: organic layer, 115: organic layer, 116: organic layer, 120: slit, 121: protective layer, 122: resin layer, 125: insulating layer, 125f: insulating film, 126: resin layer, 128: substrate, 129: colored layer, 129a: colored layer, 129b: colored layer, 129c: colored layer, 129d: black matrix, 130: connecting portion, 135a: layer, 135b: layer, 135B: layer, 135c: layer, 135G: layer, 135R: layer, 135S: layer, 136: substrate, 137: substrate, 140: light-emitting element, 140a: light-emitting element, 140b: light-emitting element, 140c: light-emitting element, 140S: light-receiving element, 140S1: light-receiving element, 140S2: light-receiving element Optical element, 143: resist mask, 144: sacrificial film, 145: sacrificial layer, 146: sacrificial film, 147: sacrificial layer, 151S: FMM, 151W: FMM, 155: organic layer, 161: conductive layer, 162: conductive layer, 163: resin layer, 200: display panel, 201: substrate, 202: substrate, 203: functional layer, 211: light-emitting element, 211B: light-emitting element, 211G: light-emitting element, 211R: light-emitting element, 211W: light-emitting element, 212: light-receiving element, 218: area, 220: finger, 221: contact portion, 222: fingerprint, 223: imaging range, 225: stylus, 226: trajectory, 240: capacitance, 241: conductive layer, 242: transistor, 243: insulating layer, 244: connection portion, 245: conductive layer, 251: conductive layer, 252: conductive layer, 254: insulating layer, 255a: insulating layer, 255b: insulating layer, 256: plug, 258: transistor, 259: transistor, 260: transistor, 261: insulating layer, 262: insulating layer, 263: insulating layer, 264: insulating layer, 265: insulating layer, 268: insulating layer, 271: plug, 272a: conductive layer, 272b: conductive layer, 273: conductive layer, 274: plug, 274a: conductive layer, 274b: conductive layer, 275: insulating layer, 278: connection portion,280: display module, 281: semiconductor layer, 281i: channel formation region, 281n: low resistance region, 282: circuit section, 283: pixel circuit section, 283a: pixel circuit, 284: pixel section, 284a: pixel, 285: terminal section, 286: wiring section, 288: display section, 290: FPC, 291: substrate, 292: connection layer, 293: substrate, 294: insulating layer, 301: substrate, 301A: substrate, 301B: substrate, 310: transistor, 310A: transistor, 310B: transistor, 311: conductive layer, 312: low resistance region, 313: insulating layer, 314: insulating layer, 315: Element isolation layer, 320: transistor, 321: semiconductor layer, 323: insulating layer, 324: conductive layer, 325: conductive layer, 326: insulating layer, 327: conductive layer, 328: insulating layer, 329: insulating layer, 331: substrate, 332: insulating layer, 335: insulating layer, 336: insulating layer, 341: conductive layer, 342: conductive layer, 343: plug, 344: insulating layer, 345: insulating layer, 346: insulating layer, 347: bump, 348: adhesive layer, 400: display device, 411a: conductive layer, 411b: conductive layer, 411c: conductive layer, 412b: EL layer, 412S: PD layer, 413: common electrode, 414: organic layer, 4 15b: layer, 415S: layer, 416: protective layer, 417: light-shielding layer, 418: colored layer, 421: insulating layer, 422: resin layer, 430b: light-emitting element, 440: light-receiving element, 442: adhesive layer, 451: substrate, 452: substrate, 453: substrate, 454: substrate, 455: adhesive layer, 462: display unit, 464: circuit, 465: wiring, 466: conductive layer, 471: conductive layer, 472: FPC, 473: IC, 500: display device, 501: electrode, 502: electrode, 512W: light-emitting unit, 521: layer, 522: layer, 523Q_1: light-emitting layer, 523Q_2: light-emitting layer, 523Q_3: light-emitting layer , 524: layer, 525: layer, 526: active layer, 540: protective layer, 545B: colored layer, 545G: colored layer, 545R: colored layer, 550S: light receiving element, 550W: light emitting element, 555: light receiving unit, 701: substrate, 702: display unit, 702L: display unit, 702R: display unit, 6500: electronic device, 6501: housing, 6502: display unit, 6503: power button, 6504: button, 6505: speaker, 6506: microphone, 6507: camera, 6508: light source, 6510: protective member, 6511: display panel, 6512: optical member, 6513: touch sensor panel,6515: FPC, 6516: IC, 6517: Printed circuit board, 6518: Battery, 7000: Display unit, 7100: Television device, 7101: Housing, 7103: Stand, 7111: Remote control unit, 7200: Notebook personal computer, 7211: Housing, 7212: Keyboard, 7213: Pointing device, 7214: External connection port, 7300: Digital sign signage, 7301: housing, 7303: speaker, 7311: information terminal, 7400: digital signage, 7401: pillar, 7411: information terminal, 8000: camera, 8001: housing, 8002: display, 8003: operation buttons, 8004: shutter button, 8006: lens, 8100: viewfinder, 8101: housing, 8102: display, 8103: button, 8200: head mount head-mounted display, 8201: mounting part, 8202: lens, 8203: main body, 8204: display part, 8205: cable, 8206: battery, 8300: head-mounted display, 8301: housing, 8302: display part, 8304: fixture, 8305: lens, 8400: head-mounted display, 8401: housing, 8402: mounting part, 8403: cushioning material, 8404: display part, 84 05: Lens, 9000: Housing, 9001: Display, 9003: Speaker, 9005: Operation keys, 9006: Connection terminal, 9007: Sensor, 9008: Microphone, 9050: Icon, 9051: Information, 9052: Information, 9053: Information, 9054: Information, 9055: Hinge, 9101: Portable information terminal, 9102: Portable information terminal, 9200: Portable information terminal, 9201: Portable information terminal,

Claims

1. a first light-emitting element and a light-receiving element; the first light-emitting element includes a first pixel electrode, a first organic layer, and a common electrode stacked in this order; the light receiving element includes a second pixel electrode, a second organic layer, and the common electrode stacked in this order; the first organic layer includes a first light-emitting layer and a second light-emitting layer; the first light-emitting layer comprises a first light-emitting material; the second light-emitting layer has a second light-emitting material different from the first light-emitting material; the second organic layer includes a photoelectric conversion layer, a first layer and a second layer in a region between the first light-emitting element and the light-receiving element; the first layer overlaps the second organic layer and contains the same material as the first organic layer; the second layer overlaps the first organic layer and contains the same material as the second organic layer; an end of the first organic layer and an end of the first layer are provided opposite to each other in a region between the first light-emitting element and the light-receiving element; an end of the second organic layer and an end of the second layer are provided opposite to each other in a region between the first light-emitting element and the light-receiving element; the first layer has a portion overlapping the second pixel electrode and the second organic layer; The second layer has a portion overlapping the first pixel electrode and the first organic layer.

2. In claim 1, the first organic layer has two light-emitting materials; A display device in which the two light-emitting materials emit light in complementary colors.

3. In claim 1 or claim 2, a second light-emitting element; the second light-emitting element includes a third pixel electrode, a third organic layer, and the common electrode stacked in this order; the third organic layer includes a third light-emitting layer and a fourth light-emitting layer, the third light-emitting layer contains the first light-emitting material; the fourth light-emitting layer contains the second light-emitting material; a third layer and a fourth layer are provided in a region between the second light-emitting element and the light-receiving element; the third layer overlaps the third organic layer and contains the same material as the second organic layer; the fourth layer overlaps the second organic layer and contains the same material as the third organic layer; an end of the second organic layer and an end of the third layer are provided opposite to each other in a region between the second light-emitting element and the light-receiving element; an end of the third organic layer and an end of the fourth layer are provided opposite to each other in a region between the second light-emitting element and the light-receiving element; the third layer has a portion overlapping the third pixel electrode and the third organic layer, The fourth layer has a portion overlapping the second pixel electrode and the second organic layer.

4. In claim 3, A display device in which, in a plan view, the light receiving element is sandwiched between the first light emitting element and the second light emitting element.

5. In claim 3, a first colored layer overlapping the first light-emitting element and a second colored layer overlapping the second light-emitting element; The second colored layer transmits light in a wavelength range different from that of the first colored layer.

6. In claim 3, a first colored layer overlapping the first light-emitting element and a second colored layer overlapping the second light-emitting element; The first colored layer and the second colored layer transmit light in the same wavelength range.

7. In claim 1 or claim 2, having a resin layer, the resin layer is located in a region between the first light-emitting element and the light-receiving element, an end of the first organic layer and an end of the first layer face each other with the resin layer interposed therebetween; an end portion of the second organic layer and an end portion of the second layer face each other with the resin layer interposed therebetween.

8. In claim 1 or claim 2, a first insulating layer; the first insulating layer is located between the first light-emitting element and the light-receiving element, A display device, wherein the first insulating layer contacts an edge of the first organic layer, an edge of the second organic layer, an edge of the first layer, and an edge of the second layer.

Images