Vacuum valve assembly for semiconductor equipment

Abstract

To provide a vacuum valve assembly for semiconductor equipment capable of preventing leakage of fluid by firmly supporting a blade by a protection ring when the blade is closed to improve durability.SOLUTION: The vacuum valve assembly for semiconductor equipment according to the present invention includes a valve housing 1100 having a body housing 1110 and a cover 1120, a valve movement guide 1200 for guiding the movement of the body housing in a longitudinal direction, a valve means 1300 having left and right valve guides 1310 and a blade 1320 for opening and closing a flow path of an exhaust line, a valve driver 1400 for moving the valve means, and a protection ring means 1500 having a lower protection ring member, an upper protection ring member, and a link member, which are fixed to communicate with the exhaust line of the body housing.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a vacuum valve assembly for semiconductor equipment, and more particularly to a vacuum valve assembly for semiconductor equipment in which a protection ring firmly supports the blades when the blades are closed, improving durability and preventing fluid leakage, while also providing a robust structure that increases the strength of the protection ring when it is driven. Furthermore, a heater is installed in the body housing where the protection ring is installed, preventing powder from being generated when process gas flows through the through-hole, which can cause drive problems or blockages. [Background technology]

[0002] Generally, in the field of precision manufacturing of semiconductors, LCDs, LEDs, solar cells, etc., vacuum equipment is widely used to carry out manufacturing processes while maintaining the pressure inside the equipment lower than atmospheric pressure. Such vacuum equipment is equipped with a vacuum pump that sucks in and exhausts gases inside the vacuum equipment to maintain a low pressure inside the vacuum device, and an exhaust line that connects the vacuum pump to the vacuum equipment.

[0003] A gate valve is installed in this exhaust line to open and close the exhaust line itself. A conventional gate valve is installed midway along the exhaust line and includes a valve housing, a valve, and a valve driver.

[0004] First, the valve is a component that blocks the exhaust line and moves perpendicular to the exhaust line, the valve housing provides a path for the valve to move and is installed in the exhaust line to prevent exhaust gases from leaking out through the exhaust line, and finally, the valve driver is connected to the rear end of the valve and drives the valve.

[0005] However, a gate valve with this structure has a problem in that the space between the valve and the valve housing inside the gate valve is not sealed, and process by-products or contaminants discharged through the exhaust line accumulate inside the valve housing and on the surface of the valve.

[0006] If process by-products or contaminants accumulate inside the valve housing or on the valve, the valve housing or the valve may corrode, causing malfunctions and requiring frequent repairs, which can be fatal. There is also the problem of reduced exhaust capacity due to unnecessary friction.

[0007] To solve this problem, a "valve assembly" is known, as disclosed in Korean Patent Publication No. 10-2019-0041649. The valve assembly is inserted into the removed portion of the exhaust line of a vacuum chamber when that portion has been removed, and is installed with a valve housing that opens in the direction of communication of the exhaust line and has a certain internal space perpendicular to the communication direction; a valve that is installed horizontally movably within the valve housing and connects or disconnects the exhaust line as it moves horizontally within the valve housing; a valve driver that is installed in a part of the valve housing and connected to the valve, and moves the valve horizontally in a direction perpendicular to the exhaust line; and a valve movement guide that is installed within the valve housing and guides the movement path of the valve.

[0008] Therefore, it can be easily installed in the exhaust line of the vacuum chamber, and by horizontally moving the valve, it can completely block process contaminants and by-products from entering the inside of the gate valve, which is advantageous in that it has excellent exhaust efficiency.

[0009] However, the valve assembly of Korean Patent Publication No. 10-2019-0041649 closes the valve when a signal is sent due to a malfunction in the valve's vacuum pump, but it takes a long time to shut off the valve because multiple driving means are sequentially operated, and there are problems with contaminants and by-products flowing into the gate valve.

[0010] In order to improve the problems of the above-mentioned Korean Patent Publication No. 10-2019-0041649, the present applicant filed a patent application for a "vacuum valve assembly for semiconductor equipment" in Korean Patent Publication No. 10-2022-0104480, which has become known.

[0011] Therefore, in the event of a vacuum pump failure, the valve can be quickly operated to shut off the pump, preventing contaminants and by-products from entering the pump, improving productivity. In addition, the blade and protection ring operate synchronously with the cylinder as a single driving means, enabling vacuum pressure to be shut off in the shortest time possible before the airflow increases due to a vacuum pump failure.

[0012] However, Korean Patent Publication No. 10-2022-0104480 has the problem that when the blades are closed, the protection ring does not support the blades, causing the blades to bend under pressure during continuous use, resulting in fluid leakage. In addition, the link that drives the protection ring up and down is structurally weak and can be damaged by high pressure. There is also the problem that when process gas flows through the through-hole in the body housing, powder is generated, causing problems with driving or clogging.

[0013] On the other hand, in the prior art patent, when high-pressure working fluid is supplied into the cylinder through the porthole, the piston moves toward the porthole where relatively low pressure is created, discharging the working fluid through the porthole, and using a blade attached to the piston rod to close the flow path of the exhaust line. Conversely, when high-pressure working fluid is supplied through the porthole, the piston head is returned to its initial position.

[0014] At this time, the piston head moves in the opposite direction at a high speed due to the high pressure working fluid, and collides with the finishing member at a high speed, generating noise and vibration, which reduces the life of the cylinder itself.

[0015] In addition, generally, when high-pressure working fluid is supplied through a porthole, it is discharged from a low-pressure porthole. Therefore, when the piston returns to its original position, the supply and discharge of working fluid is performed by switching the pressure at one port. This results in a relatively slow response speed due to port switching, which causes a problem of slow overall cylinder operation speed, i.e., cylinder response speed. [Prior art documents] [Patent documents]

[0016] [Patent Document 1] Korean Patent Publication No. 10-2019-0041649 [Patent Document 2] Korean Patent Publication No. 10-2022-0104480 Summary of the Invention [Problem to be solved by the invention]

[0017] The present invention has been devised to solve the above-mentioned requirements, and its object is to provide a vacuum valve assembly for semiconductor equipment in which a protection ring firmly supports the blades when the blades are closed, thereby improving durability and preventing fluid leakage.

[0018] Another object of the present invention is to provide a vacuum valve assembly for semiconductor equipment having a robust structure so that the strength of the protection ring drive is increased.

[0019] Another object of the present invention is to provide a vacuum valve assembly for semiconductor equipment that can prevent drive interference or clogging caused by powder generated when process gas flows through a through-hole by installing a heater in the body housing where the protection ring is installed.

[0020] Another object of the present invention is to provide a vacuum valve assembly for semiconductor equipment that operates an actuator connected to a piston rod to close an exhaust through-hole at a movement speed of 0.1 seconds, primarily absorbs the impact caused by a collision between the piston rod and a cylinder when closing using a spring, secondarily absorbs the impact using an air cushion exhaust hole, and opens a port using the pressure of the spring used, thereby restoring the piston to its initial position. [Means for solving the problem]

[0021] In order to achieve the above object, the present invention provides a vacuum valve assembly for semiconductor equipment, comprising: a valve housing that is inserted into a removed portion of an exhaust line of a vacuum chamber and installed therein, the valve housing having a through hole formed therein in the exhaust line communication direction and configured to have a certain internal space in a direction perpendicular to the communication direction, and the cover having a cover through hole that communicates with an atmospheric side connecting pipe of the exhaust line; a valve movement guide unit that comprises post pins that are inserted into and stand on the inner wall surfaces on both sides of the body housing, and blade movement guide plates that are installed so as not to move in the longitudinal direction from the inner wall surfaces on both sides of the body housing by the post pins, and that are capable of guiding movement in the longitudinal direction of the body housing, and that have a pair of guide grooves formed therein so that when a blade that can guide movement in the longitudinal direction of the body housing is in a state where the exhaust line is almost closed, the blade moves toward the cover while moving toward the exhaust line closing side in a synchronized manner; and a valve movement guide unit that moves left and right along the guide grooves of the blade movement guide plates of the valve movement guide unit. a valve means comprising: left and right valve guides configured to be movable up and down, a blade having left and right ends fixed to the upper portions of the left and right valve guides and fixed to a valve driver on one side thereof, and having an annular packing attached to an opposite side thereof to which the left and right valve guides are not fixed, for opening and closing a flow path of an exhaust line; and a roller fitted to a pair of guide protrusions protruding outward from both ends on the outer surfaces of the left and right valve guides; a valve driver comprising: a cylinder installed outside one side of the body housing and operated in response to a signal from a control means (not shown); a connecting member assembled to an end of a rod protruding into the body housing; a roller assembled to the lower portion of the connecting member and rolling on the bottom surface inside the body housing as the rod moves; and a blade connecting member rotatably assembled to the upper portion of the connecting member and fixed to the lower portion of the blade;a lower protection ring member fixed to communicate with the exhaust line of the body housing and having a first exhaust through hole formed at its center; an upper protection ring member located at the top of the lower protection ring member and having a first exhaust through hole fitting portion at its lower portion which is fitted into the first exhaust through hole to seal, and having an annular O-ring attached to its upper surface which is sealed by being in close contact with the underside of the blade, and having a second exhaust through hole formed at the axial center of the exhaust through hole fitting portion; link assembly auxiliary members fixed to both sides of the upper protection ring member; ends installed on the link assembly auxiliary members and the lower protection ring member, and when the valve means moves to a side which blocks the exhaust line, the upper protection ring member is lifted upward as the left and right valve guides and the blades rise, and the upper protection ring member is connected downward as the left and right valve guides and the blades descend a protection ring means comprising: a link member consisting of a pair of link bars configured so that protrusions projecting from the outer surface are guided by protection ring interlocking grooves in the left and right valve guides so as to be moved up and down; a soft valve fixed to the body housing and having an opening and closing flow path that communicates with the body housing and the cover in response to the supply of fluid; a heating means comprising: a cartridge heater having a heater insertion hole formed with a certain length on the side opposite to where the cylinder is installed so as not to communicate with the through hole, a cover-side heater insertion hole formed with a certain depth on the side of the cover where the cover through hole is formed and parallel to the heater insertion hole, a cartridge heater fitted into the heater insertion hole and the cover-side heater insertion hole; and a heater power supply unit installed on the side of the body housing so as to supply a heat source to the cartridge heater;and a burn prevention means including a burn prevention upper cover member fixed to the top surface of the cover except for the cover through-hole to prevent an operator from coming into contact with the top surface of the cover and being burned, burn prevention side cover members fixed to both longitudinal side surfaces of the body housing to prevent an operator from coming into contact with the both longitudinal side surfaces of the body housing and a burn prevention end cover member fixed to the side wall where the cartridge heater is fitted into the body housing and configured to cover the heating means from the outside.

[0022] The protection ring expansion guide grooves formed on the side surfaces of the left and right valve guides further include portions extending upward with their ends inclined so that the protection ring means moves upward when the blades are fully closed and moves downward when the blades are moving in the opening direction, and the protection ring means is configured to closely contact and support the underside of the blades when the blades are fully closed.

[0023] This is achieved by a vacuum valve assembly for semiconductor equipment, further comprising: a pair of heater insertion holes formed with a certain length on a side of the body housing opposite to where the cylinder is installed so as not to communicate with the through-hole, for inserting a cartridge heater; a pair of cover-side heater insertion holes formed with a certain depth on the side of the cover where the cover through-hole is formed so as to be parallel to the heater insertion holes; and a heating means comprising a cartridge heater fitted into the heater insertion holes and the cover-side heater insertion holes, and a heater power supply installed on the side of the body housing so as to supply a heat source to the cartridge heater.

[0024] The heater power supply unit is achieved by a vacuum valve assembly for semiconductor equipment, which includes a heater box, a heater block, and a heater cable cover.

[0025] This can be achieved by a vacuum valve assembly for semiconductor equipment, further comprising burn prevention means including a burn prevention upper cover member fixed to the portion of the cover excluding the cover through-hole to prevent an operator from coming into contact with the top surface of the cover and being burned; burn prevention side cover members fixed to both longitudinal side surfaces of the body housing to prevent an operator from being burned; and burn prevention end cover members fixed to the side wall where the cartridge heater is fitted into the body housing and configured to cover the heating means from the outside.

[0026] the cylinder comprises a cylindrical body having a space and a second port passage for supplying and discharging hydraulic oil to the space; a first finishing member installed at one end of the cylindrical body and having a first port passage formed therein for variably supplying and discharging hydraulic oil; a second finishing member installed at the other end of the cylindrical body toward the first finishing member and having an air cushion discharge hole through which a piston rod passes and connected to the internal space of the cylindrical body for discharging hydraulic oil; and a shock absorbing device installed on a piston head installed inside the cylindrical body and moving together with the piston head to absorb shock and prevent vibration generation, wherein the shock absorbing device includes a spring member partially fitted into a mounting groove formed in the piston head; a chamber attached to the piston head, forming an internal spring mounting space, and having a through hole communicating with the spring mounting space; and a vibration prevention block fitted into the through hole formed in the chamber and abutting against the second finishing member to pressurize the spring member.

[0027] This is achieved by the vacuum valve assembly for semiconductor equipment, characterized in that a magnet ring is further provided on the piston head, so that the position of the piston head can be confirmed. [Effects of the Invention]

[0028] As described above, in the vacuum valve assembly for semiconductor equipment according to the present invention, the protection ring rises when the blades are closed to firmly support the blades, thereby improving durability against pressure and preventing fluid leakage.

[0029] The vacuum valve assembly for semiconductor equipment according to the present invention has the advantage of having a robust structure that increases the strength of the protection ring drive.

[0030] According to the vacuum valve assembly for semiconductor equipment of the present invention, by installing a heater in the body housing at the location where the protection ring is installed, it is possible to prevent powder from being generated when process gas flows through the through-hole, which can cause operational problems or blockages.

[0031] According to the present invention, when opening and closing the exhaust through-hole, the cylinder closing movement time is set to within 0.1 seconds, and vibration and noise generated by the collision between the cylinder and the piston head are primarily prevented by the spring, and the working fluid inside the cylinder is gradually discharged using the air cushion discharge hole when the piston is compressed, thereby secondarily preventing vibration and noise caused by impact.In addition, the port is opened by the pressure of the spring compressed by the piston head, allowing the piston head to move when opening. [Brief explanation of the drawings]

[0032] [Figure 1] 1 is a perspective view showing a vacuum valve assembly for semiconductor equipment according to an embodiment of the present invention; [Figure 2] 2 is an exploded perspective view showing the burn prevention means and heating means of FIG. 1 separated from the vacuum valve assembly means. FIG. [Figure 3] FIG. 3 is an exploded perspective view showing the vacuum valve assembly means of FIG. 2. [Figure 4] FIG. 4 is an exploded perspective view showing the protection ring means and the valve means of FIG. 3. [Figure 5] FIG. 5 is an exploded perspective view showing the protection ring means of FIG. 4. [Figure 6] 1 is a cross-sectional view showing the structure of a cylinder, which is the technical gist of the present invention. [Figure 7a] 1 is a cross-sectional view showing a state before pressure is applied to a piston of a cylinder device of the present invention that is excellent in high-speed driving and shock absorption. FIG. [Figure 7b] FIG. 1 is a cross-sectional view showing the state after pressure has been applied to the piston of a cylinder device of the present invention that is excellent in high-speed driving and shock absorption. [Figure 7c] 1 is a cross-sectional view showing the state of the cylinder device of the present invention, which is excellent in high-speed driving and shock absorption, before hydraulic oil is supplied through the second port flow path. FIG. [Figure 8a] FIG. 10 is a cross-sectional view showing the structure of another embodiment of a cylinder device according to the present invention that is excellent in high-speed driving and shock absorption, showing the state before the piston is pressurized. [Figure 8b] 8b is a cross-sectional view showing the state after the piston is pressurized in the cylinder device having the structure of FIG. 8a. FIG. [Figure 8c] 8b is a cross-sectional view showing the state of the cylinder device having the structure of FIG. 8a before the working fluid is supplied through the second port flow path. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0033] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a vacuum valve assembly for semiconductor equipment according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

[0034] Because components of embodiments of the present invention can be positioned in a variety of orientations, directional terminology is used for purposes of illustration and not limitation.

[0035] As shown in Figures 1 to 5, a vacuum valve assembly 1000 for semiconductor equipment according to one embodiment of the present invention includes a valve housing 1100, a valve movement guide portion 1200, a valve means 1300, a valve driving portion 1400, a protection ring means 1500, a soft valve 1600, a heating means 1700, and a burn prevention means 1800.

[0036] Here, the valve housing 1100 is inserted into the removed portion of the exhaust line of the vacuum chamber when a portion of the exhaust line has been removed, and is configured to have a through hole 1111 opening in the direction of communication of the exhaust line and a certain internal space 1112 perpendicular to the communication direction, and is composed of a body housing 1110 connected to the atmospheric side connecting pipe of the exhaust line, and a cover 1120 assembled on top of the body housing and having a cover through hole 1121 formed therein that communicates with the equipment side exhaust line connecting pipe.

[0037] Therefore, the body housing 1110 and the cover 1120 form a chamber inside, and the upper exhaust line is fixed to the cover 1120 via a flange (not shown), and the lower exhaust line is connected to the bottom of the body housing 1110 via a flange (not shown) so that they communicate with each other.

[0038] In addition, a soft valve first communication hole 1113 communicating with the through hole 1111 is formed on the outer surface of the body housing 1110, and a soft valve second communication hole 1122 communicating with the cover through hole 1121 is formed on the outer surface of the cover 1120.

[0039] Therefore, the soft valve first communication hole 1113 and the soft valve second communication hole 1122 are selectively communicated by the soft valve 1600 .

[0040] The valve movement guide part 1200 is composed of post pins 1210 that are fitted into and stand on the inner wall surfaces on both sides of the body housing, and a blade movement guide plate 1220 that is installed on the inner wall surfaces on both sides of the body housing by the post pins to prevent movement in the longitudinal direction and can guide movement in the longitudinal direction of the body housing, and that has a pair of guide grooves 1221 and 1222 formed therein so that when the blade described below reaches a state where it almost closes the exhaust line, the blade moves in the direction to close the exhaust line and also moves synchronously toward the cover side.

[0041] Therefore, the valve means 1300 is guided by the guide grooves 1221 and 1222 formed on the blade movement guide plate 1220 of the valve movement guide part 1200, allowing it to move not only left and right but also up and down, while a pair of guide protrusions and bushings protruding from the outer surfaces of the left and right valve guides of the valve means 1300, which will be described later, are fitted into the guide grooves 1221 and 1222, thereby guiding movement in the longitudinal direction of the body housing.

[0042] The valve means 1300 also includes a right valve guide 1310 that is installed to be able to move left and right and up and down along the guide grooves 1221 and 1222 of the blade movement guide plate 1220 of the valve movement guide unit 1200; a blade 1320 whose left and right ends are fixed to the upper parts of the left and right valve guides, one side of which is fixed to the valve driver 1400, and the opposite side to which the left and right valve guides 1310 are not fixed is equipped with an annular packing 1321 to open and close the flow path of the exhaust line; and rollers 1330 that are fitted into a pair of guide protrusions 1311 protruding outward from both ends on the outer surfaces of the left and right valve guides.

[0043] Therefore, with the blade 1320 positioned and fixed on the upper part of the left and right valve guides 1310, the guide protrusions 1311 are fitted into the guide grooves 1221 and 1222 of the blade movement guide plate 1220 via the rollers 1330, allowing the blade 1320 to move not only in the longitudinal direction of the body housing 1110 but also in the vertical direction.

[0044] In addition, on the side surfaces of the left and right valve guides 1310, a protection ring extension guide groove 1313 is formed, which is configured so that both ends are inclined and point upward so that the protection ring means 1500 moves upward when the blade 1320 is fully open or fully closed, and moves downward while the blade is moving.

[0045] Therefore, the protrusion of the protection ring means 1500 is fitted into the protection ring extension guide groove 1313, and the protection ring means 1500 expands upward or extends downward in accordance with the movement of the valve means 1300. As a result, as per the gist of the present invention, the protection ring extension guide groove 1313 faces upward in an inclined manner so that the protection ring means 1500 moves upward when the blade 1320 is fully closed. When the blade 1320 is fully closed, the protection ring means 1500 supports the underside of the blade 1320, and the blade 1320 has durability that prevents it from bending due to pressure, etc., and therefore, leakage, etc., does not occur.

[0046] A screw (not shown) is inserted into the blade 1320 side and fastened to the upper part of the left and right valve guides 1310, and a bushing 1350 is inserted into the protrusion 1312 protruding from the lower part of the left and right valve guides 1310 so that it can roll and rub along the side of the body housing 1110.

[0047] Meanwhile, the valve driving unit 1400 is composed of a cylinder 1 installed on the outside of one side of the body housing 1110 and operated upon receiving a signal from a control means (not shown), a connecting member 1420 assembled to the end of a rod protruding into the body housing 1110, a roller 1430 assembled to the bottom of the connecting member and rolling on the bottom surface inside the body housing when the rod moves, and a blade connecting member 1440 rotatably assembled to the other end of a hinge member (not shown) rotatably assembled to the top of the connecting member and fixed to the bottom of the blade 1320.

[0048] As shown in FIG. 6, the cylinder 1 of the present invention has a piston head 3 installed in the internal space of a cylindrical body 2 having a hydraulic oil supply hole 2a formed on one side of the body so as to reciprocate by supplying and discharging hydraulic fluid. A piston rod 4 is fixed to the piston head 3, and the piston rod 4 partially penetrates outside the cylindrical body, and a blade 1320 for opening and closing a cover through hole 1121 is connected to the end of the piston rod 4.

[0049] At the end of the cylinder 2 on the other side of the first finishing member 5, a second finishing member 6a is installed. The second finishing member 6a has a body 6a-5 that functions to seal the interior of the cylinder 2 like the first finishing member 5, and has a through hole 6a-2 through which the piston rod 4 passes. The body 6a-5 has an air cushion discharge hole 6a-1 that is connected to the internal space of the cylinder 2 and only discharges the working fluid, a discharge flow path 6a-1a that is connected to the air cushion discharge hole 6a-1, and a connecting portion 6a-3 to which a cap member 6b is connected.

[0050] Meanwhile, a spring member 7 is installed inside the cap member 6b installed at the connecting portion 6a-3, forming a pressure portion 6d-1 that pressurizes the spring member 7, and an actuator 6d is elastically installed therein, which penetrates the cap member 6b and is pushed into the inside of the cap member 6b by pressure applied by the piston head 3.

[0051] The structure includes a cap member 6b that is fixed to the connecting portion 6a-3, has a space portion 6b-4 formed inside, and has a locking piece 6b-3 formed in the space portion 6b-4 to lock an actuator 6d that is resiliently mounted by a spring member 7.

[0052] The operation of the cylinder 1, which is the technical gist of the present invention described above, is first in a state where the piston head 3 moves toward the first finishing member 5, as shown in Figure 7a, i.e., the piston rod 4 is folded into the internal space of the cylindrical body 2, the door 300 moves toward the cylinder device 1, and the cover through-hole 1121 is opened.

[0053] At this time, as shown in Figure 7b, when a high-pressure working fluid such as liquid, gas or air, preferably nitrogen gas, shown in red, is supplied through the first port passage 51 formed in the first finishing member 5, the high-pressure working fluid pushes and moves the piston head 3 and the piston rod 4 together in one direction.

[0054] The piston head 3 pressurizes and pushes out one of the working fluids supplied while filling the cylindrical body 2, preferably the working fluid on the opposite side of the piston head 3, which is at a lower pressure than nitrogen gas, and discharges it through the second port flow path 2a, and a portion of the working fluid is discharged through the air cushion discharge hole 6a-1.

[0055] The working fluid is discharged by the piston head 3 moving toward the second port flow path 2a, and when the piston head 3 comes into contact with the operating rod portion 6d-2 of the actuator 6d, the movement of the piston head 3 causes the actuator 6d, which is elastically supported by the spring member 7, to absorb the primary impact.

[0056] As described above, even after the actuator 6d absorbs the primary impact due to the movement of the piston head 3, if high-pressure working fluid is supplied through the first port flow path 51, the piston head 3 is gradually pushed and completely closes the second port flow path 2a.

[0057] Meanwhile, when the piston head 3 moves toward the second finishing member 6a and comes into contact with the operating rod portion 6d-2 of the actuator 6d installed in the cap member 6b connected to the second finishing member 6a and applies pressure in one direction, the pressure portion 6d-1 formed integrally with the operating rod portion 6d-2 presses the spring member 7 to absorb the impact and prevent the piston head 3 from colliding with the operating rod portion 6d-2. The remaining working fluid is gradually discharged through the air cushion discharge hole 6a-1, thereby preventing noise and vibration.

[0058] As described above, when high-pressure working fluid is supplied through the first port passage 51, the second exhaust through-hole 1532 is closed, and when the cylinder 1 is restored to its original position, the supply of working fluid that had been flowing in through the first port passage 51 is cut off.

[0059] When high-pressure working fluid is supplied through the first port passage 51 as described above, the second exhaust through-hole 1532 is closed, and when the cylinder is restored to its original position, as shown in Figure 7c, the supply to the first port passage 51 is cut off and port switching of the second port passage 2a is performed at the same time.

[0060] When port switching is performed so that high-pressure working fluid can be supplied through the second port flow path 2a, port switching is also performed in the first port flow path 51, switching the high-pressure state to a low-pressure state, and the working fluid that was being supplied through the first port flow path 51 begins to be discharged. However, first, the pressure that had been applying pressure to the spring member 7 is released instantaneously, and the working fluid is discharged by the volume of the distance the piston head 3 is pushed by the resilience of the spring member 7.

[0061] At this time, the piston head 3, which had been blocking the second port flow path 2a, is pushed toward the first port flow path 51 and moves, opening the second port flow path 2a. When the working fluid in a high-pressure state is supplied through the second port flow path 2a as shown in the figure, the piston head 3 moves easily.

[0062] That is, when the actuator 6d and the piston head 3 are in contact with each other, the piston head 3 is pushed out by the elastic force of the spring member 7, and the second port flow path 2a is instantly opened, so that the high-pressure working fluid is supplied into the cylindrical body 2 through the second port flow path 2a, which has the effect of quickly restoring (responding to) the piston head to its initial position.

[0063] In addition, a magnet ring 3-1 can be installed and used on the piston head 3. The magnet ring 3-1 is convenient because it allows the position of the piston head 3 to be confirmed when the operation of the cylinder 1 stops.

[0064] As shown in Figures 6 to 7a, the spring member 7 can be installed on the outside of the cylindrical body 2 and used, but as shown in Figure 8a, the spring member 7 can also be used so that it can operate together with the piston head 3.

[0065] As shown in Figure 8a, a cylinder device 1B having excellent high-speed driving shock absorption and having the structure of another embodiment of the present invention has a piston head 3 installed in the internal space of a cylindrical body 2 so that it operates by supplying and discharging working fluid, and a second port flow path 2a is formed on the side of the cylindrical body 2, which only supplies working fluid to the internal space of the cylindrical body 2.

[0066] At one end of the cylindrical body 2, a first finishing member 5 is installed, which has a first port flow path 51 formed therein for variably supplying and discharging the working fluid, and at the other end of the cylindrical body 2 on the side opposite to the first finishing member 5, a second finishing member 9 is installed, which has a second port flow path 2a formed therein through which the piston rod 4 passes and which is connected to the internal space of the cylindrical body 2 to discharge the working fluid, and an air cushion discharge hole 9-1 formed therein for reducing vibration and noise with the remaining amount of working fluid.

[0067] Meanwhile, a shock absorbing device 8 is installed on the piston head 3 installed inside the cylindrical body 2, and moves together with the piston head 3 to absorb shocks and prevent vibrations. The shock absorbing device 8, which moves in conjunction with the piston head 3, is composed of a spring member 7a, a part of which is fitted into a mounting groove formed in the piston head 3, a chamber 81 attached to the piston head 3, which defines a spring mounting space inside and has a through hole communicating with the spring mounting space, and a vibration prevention block 82 fitted into the through hole 81a formed in the chamber 81 and which pressurizes the spring member 7a while abutting against the second finishing member 9.

[0068] The operation of the cylinder 1b of another embodiment structure of the present invention, which has the impact absorbing device linked to the piston head 3, is first in a state where the piston head 3 moves toward the first finishing member 5, as shown in Figure 8a, i.e., the piston rod 4 is folded into the internal space of the cylindrical body 2, and the structure is in a state where the cover through hole 1121 is open.

[0069] At this time, as shown in Figure 8b, when a working fluid such as high-pressure gas or air, shown in red, is supplied through the first port passage 51 formed in the first finishing member 5, the high-pressure working fluid moves the piston head 3 and the piston rod 4, and at the same time as the piston head 3 moves, the working fluid filled in the cylindrical body 2 is pressurized and pushed out, thereby discharging the low-pressure working fluid through the second port passage 2a formed in the cylindrical body 2.

[0070] At the same time as the piston head 3 moves, a part of the working fluid filled in the cylindrical body 2 is discharged through the air cushion discharge hole 91 formed in the second finishing member 9 by the pressure force of the piston head 3.

[0071] That is, when the piston head 3 moves, most of the working fluid filled in the cylindrical body 2 is discharged to the second port flow path 2a, but a portion of the working fluid is discharged through the air cushion discharge hole 91.

[0072] In the present invention, it is explained that the working fluid filled in the cylindrical body 2 is simultaneously discharged through the second port flow path 2a and the air cushion discharge hole 91 as soon as the piston head 3 moves. However, it is also possible to configure the working fluid to be discharged through the air cushion discharge hole 91 when the primary working fluid is discharged through the second port flow path 2a and the pressure is equal to or greater than a set pressure.

[0073] On the other hand, as shown in FIG. 8b, when the working fluid is discharged through the air cushion discharge hole 91, the second port flow path 2a is closed, and the piston head 3, which is moved by the working fluid flowing in through the first port flow path 51, moves at a constant speed because the flow rate is equal to or less than the flow rate discharged through the air cushion discharge hole 51.

[0074] When the piston head 3 and the second finishing member 9 approach each other, the shock absorbing device 8 attached to one side of the piston head 3 prevents the second finishing member 9 and the piston head 3 from colliding with each other, thereby preventing the generation of vibration and noise.

[0075] 8b, in the shock absorbing device 8, when the piston head 3 moves toward the second finishing member 9, the vibration prevention block 82 is installed so as to penetrate the chamber 81, and the vibration prevention block 82 first comes into contact with the second finishing member 9. At this time, the piston head 3 continues to be pressurized and moves toward the second finishing member 9, so that the spring member 7a is pressurized inside the chamber 81.

[0076] Therefore, the vibration prevention block 82 prevents the generation of impact noise and vibration due to a collision, while the spring member 7a absorbs the pressure force of the piston head 3.

[0077] The length of the vibration prevention block 82 that passes through the chamber 81 is longer than the length of the chamber 81, preventing collision between the chamber 81 and the second finishing member 9, and the position at which the movement of the piston head 3 is completed is the same position as the second port flow path 2a, so the second port flow path 2a is temporarily closed.

[0078] However, at the moment when the supply of working fluid is interrupted by switching of the first port flow path 51 and switched to the exhaust port, as shown in FIG. 8c, the position of the piston head 3 is pushed toward the first port flow path 51 by the elastic force of the compressed spring member 7a, and the second port flow path 2a is opened, and high-pressure working fluid is supplied, which has the effect of quickly restoring (responding) the piston head 3 to its initial position.

[0079] Therefore, when the cylinders 1 and 1b are actuated and the piston rod advances toward the exhaust line, the blade 1320 can not only move to the side where it can block the exhaust line, but also rise by the connecting member 1420 and the blade connecting member 1440 and come into close contact with the underside of the cover 1120.

[0080] The protection ring means 1500 includes a lower protection ring member 1510 that is fixed to communicate with the exhaust line of the body housing 1110 and has a first exhaust through hole 1511 formed at its center, an upper protection ring member 1520 that is located at the top of the lower protection ring member and has a first exhaust through hole fitting portion 1521 at its bottom that is fitted into the first exhaust through hole 1511 to seal, and has an annular O-ring 1522 attached to its top surface so as to be tightly sealed against the underside of the blade, and a second exhaust through hole 1523 formed at the axial center of the O-ring 1522 and the exhaust through hole fitting portion 1521, and and a link member 1540 consisting of a pair of link bars 1541 whose ends are installed on the link assembly auxiliary member 1530 and the lower protection ring member 1510, and whose protrusions 1541a protruding from the outer surfaces are guided by the protection ring interlocking grooves (protection ring expansion and contraction guide grooves 1313) of the left and right valve guides 1310 so that when the valve means 1300 moves toward the side where the exhaust line is blocked, the upper protection ring member 1520 is lifted upward as the left and right valve guides 1310 and blade 1320 rise, and the upper protection ring member is lowered downward in conjunction with the left and right valve guides and blades descend.

[0081] Therefore, with the lower protection ring member 1510 fixed to the body housing 1110, the protrusion 1541 of the link member 1540 is fitted into the protection ring linkage groove (protection ring extension guide groove 1313) and moves up or down synchronously when the blade 1320 rises or falls, allowing the upper protection ring member 1520 to move up or down quickly.In addition, the seal of the first exhaust through-hole fitting portion 1521 and the O-ring 1522 prevent floating objects from remaining inside the valve housing 1100.

[0082] It is preferable that a bushing is fitted to the protrusion 1541. The link member 1540 is made up of a pair of link bars 1541 that are hinged to be rotatable at the center, and it is preferable that the link bars are configured with narrow widths at both ends and wide widths at the center, and in the present invention, the ends are configured in a stepped shape with narrow widths at the ends and wide widths at the center, so that when the pair of link bars rotate at the center, the strength of the center is higher than that of the both ends, resulting in excellent durability.

[0083] Meanwhile, the soft valve 1600 is fixed to the body housing 1110 and has an opening / closing passage that communicates with the body housing 1110 and the cover 1120 in response to the supply of fluid.

[0084] Therefore, the soft valve 1600 supplies or exhausts nitrogen through the soft valve first communication hole 1113, which is provided on the outer surface of the body housing 1110 and communicates with the through hole 1111, and the soft valve second communication hole 1122, which is provided on the outer surface of the cover 1120 and communicates with the cover through hole 1121, so that the inside of the valve housing 1100 can be easily adjusted to a vacuum state.

[0085] In addition, the heating means 1700 is composed of a heater insertion hole 1114 formed at a certain length on the side of the body housing 1110 opposite the side where the cylinder 1 is installed, for inserting a cartridge heater described later, so that it does not communicate with the through hole 1111, a cover side heater insertion hole 1123 formed at a certain depth on the side where the cover through hole 1121 of the cover 1120 is formed, so that the heater insertion hole 1114 is parallel to the heater insertion hole 1114, a cartridge heater 1710 inserted into the heater insertion hole 1114 and the cover side heater insertion hole 1123, and a heater power supply unit 1720 installed on the side of the body housing 1110 so as to supply a heat source to the cartridge heater.

[0086] Therefore, when power is supplied to the cartridge heater 1710 through the heater power supply unit 1720, the cartridge heater 1710 is heated to a certain temperature, and powder is not generated when process gas flows through the through hole of the valve housing 1100, thereby preventing the generation of powder from interfering with operation or causing clogging.

[0087] Here, the heater power supply unit 1720 has a structure including a heater box, a heater block, and a heater cable cover. Meanwhile, the burn prevention means 1800 includes a burn prevention upper cover member 1810 fixed to the top surface of the cover 1120 except for the cover through-hole 1121 to prevent an operator from coming into contact with the top surface of the cover 1120 and getting burned, burn prevention side cover members 1820 fixed to both longitudinal sides of the body housing 1110 to prevent an operator from coming into contact with both longitudinal sides of the body housing 1110 and getting burned, and a burn prevention end cover member 1830 fixed to the side wall where the cartridge heater 1710 is inserted into the body housing 1110 and configured to cover the heating means 1700 from the outside.

[0088] Therefore, the burn prevention upper cover member 1810, the burn prevention side cover member 1820 and the burn prevention end cover member 1830 of the burn prevention means 1800 prevent the worker from being burned in a safety accident.

[0089] In addition, the burn-preventing top cover member 1810, the burn-preventing side cover member 1820, and the burn-preventing end cover member 1830 may be formed of multiple fragments as in the embodiment of the present invention, or may each be formed of a single fragment, and each may have a slot hole for heat dissipation for heat dissipation.

[0090] The embodiments of the present invention described above and shown in the drawings should not be construed as limiting the technical idea of ​​the present invention. The scope of protection of the present invention is limited only by the matters set forth in the claims, and those skilled in the art may improve and modify the technical idea of ​​the present invention in various forms. Therefore, if such improvements and modifications are obvious to those skilled in the art, they also fall within the scope of protection of the present invention. [Explanation of symbols]

[0091] 1000 Vacuum valve assembly for semiconductor equipment 1100 valve housing 1110 Body Housing 1114 Heater insertion hole 1120 Cover 1123 Cover side heater insertion hole 1200 Valve moving guide 1300 Valve means 1310 Left and right valve guides 1320 Blade 1400 Valve drive unit 1410 Cylinder 1500 Protection Ring Means 1510 Lower protection ring member 1520 Upper protection ring member 1540 Link member 1541 Link Bar 1600 Soft Valve 1700 Heating Means 1710 Cartridge Heater 1720 Heater power supply unit 1800 Burn prevention measures

Claims

1. A vacuum valve assembly for semiconductor equipment, comprising: a valve housing that is inserted into a portion of an exhaust line of a vacuum chamber that has been removed, the valve housing having a cover with a through hole that opens in the direction of communication of the exhaust line and has a certain internal space in a direction perpendicular to the communication direction, the valve housing having a cover through hole that communicates with an atmospheric side connecting pipe of the exhaust line; a valve movement guide portion including a post pin inserted into and erected on the inner wall surfaces on both sides of the body housing, and a blade movement guide plate which is installed on the inner wall surfaces on both sides of the body housing by the post pin so as not to move in the longitudinal direction and which has a pair of guide grooves formed therein so that when a blade capable of guiding movement in the longitudinal direction of the body housing reaches a state in which the exhaust line is almost closed, the blade moves in the direction to close the exhaust line and also moves synchronously toward the cover; a valve means comprising: left and right valve guides configured to be able to move left and right and up and down along the guide grooves of the blade movement guide plates of the valve movement guide part; blades having left and right ends fixed to the upper parts of the left and right valve guides, one side fixed to a valve driving part, and an annular packing attached to the opposite side to which the left and right valve guides are not attached so as to open and close a flow path of an exhaust line; and rollers fitted into a pair of guide protrusions protruding outward from both ends on the outer surfaces of the left and right valve guides; a valve driving unit comprising: a cylinder installed on the outside of one side of the body housing and operated by receiving a signal from a control means; a connecting member assembled to an end of a rod protruding into the body housing; a roller assembled to the bottom of the connecting member and rolling on the bottom surface inside the body housing when the rod moves; and a blade connecting member rotatably assembled at one end to the top of the connecting member and fixed to the bottom of the blade; a protection ring means comprising: a lower protection ring member fixed to communicate with the exhaust line of the body housing and having a first exhaust through hole formed at its center; an upper protection ring member located above the lower protection ring member and having a first exhaust through hole fitting portion formed at its lower portion to be fitted into the first exhaust through hole and sealed, and an annular O-ring attached to its upper surface and sealed by being in close contact with the underside of the blade, and having a second exhaust through hole formed at the axial center of the exhaust through hole fitting portion; link assembly auxiliary members fixed to both sides of the upper protection ring member; and a link member consisting of a pair of link bars having ends attached to the link assembly auxiliary members and the lower protection ring member, the link members being configured so that when the valve means moves to a side blocking the exhaust line, the upper protection ring member is raised as the left and right valve guides and blades rise, and the upper protection ring member is lowered in conjunction with the left and right valve guides and blades descend; a soft valve fixed to the body housing and having an opening / closing passage that communicates with the body housing and the cover in response to the supply of fluid; a heater insertion hole formed with a certain length on the side opposite to where the cylinder is installed so as not to communicate with the through-hole, for inserting a cartridge heater therein; a cover-side heater insertion hole formed with a certain depth on the side where the cover through-hole is formed so as to be parallel to the heater insertion hole, a heating means comprising a cartridge heater fitted into the heater insertion hole and the cover-side heater insertion hole, and a heater power supply unit installed on the side of the body housing so as to supply a heat source to the cartridge heater; and a burn prevention upper cover member fixed to the top surface of the cover excluding the cover through-hole to prevent an operator from coming into contact with the top surface of the cover and being burned; a burn prevention side cover member fixed to both longitudinal side surfaces of the body housing to prevent an operator from coming into contact with the top surface of the cover and being burned; and a burn prevention end cover member fixed to the side wall where the cartridge heater is fitted into the body housing and configured to cover the heating means from the outside.

2. 2. The vacuum valve assembly for semiconductor equipment according to claim 1, wherein the protection ring expansion guide grooves formed on the side surfaces of the left and right valve guides further include portions extending upward with their ends inclined so that the protection ring means moves upward when the blades are fully closed and moves downward when the blades are moving in the opening direction, and wherein the protection ring means is configured to closely contact and support the underside of the blades when the blades are fully closed.

3. A pair of heater insertion holes for inserting a cartridge heater are formed with a certain length on a side of the body housing opposite to the side where the cylinder is installed so as not to communicate with the through-hole, a pair of cover-side heater insertion holes are formed at a certain depth on the side of the cover where the cover through-hole is formed, and are parallel to the heater insertion holes; 2. The vacuum valve assembly for semiconductor equipment according to claim 1, further comprising a heating means comprising: a cartridge heater fitted into the heater insertion hole and the cover-side heater insertion hole; and a heater power supply unit installed on a side of the body housing so as to supply a heat source to the cartridge heater.

4. 4. The vacuum valve assembly for semiconductor equipment according to claim 3, wherein the heater power supply unit includes a heater box, a heater block, and a heater cable cover.

5. a burn-preventing upper cover member fixed to the cover except for the cover through-hole to prevent an operator from being burned by contacting the upper surface of the cover; a burn prevention side cover member fixed to both longitudinal sides of the body housing to prevent burns caused by contact with the both longitudinal sides of the body housing; 2. The vacuum valve assembly for semiconductor equipment according to claim 1, further comprising a burn prevention means including a burn prevention end cover member fixed to a side wall where the cartridge heater is fitted into the body housing and configured to cover the heating means from the outside.

6. The cylinder is a cylindrical body having a space and a second port flow path for supplying and discharging hydraulic oil to and from the space; a first finishing member provided at one end of the cylindrical body and having a first port flow path formed therein for variably supplying and discharging hydraulic oil; a second finishing member having an air cushion discharge hole formed at an end of a cylinder on the other side of the first finishing member, through which a piston rod passes and which is connected to an internal space of the cylinder and through which hydraulic oil is discharged; a shock absorbing device that is provided on a piston head installed inside the cylindrical body and moves together with the piston head to absorb shock and prevent vibration generation, The impact absorbing device is a spring member a portion of which is fitted into a mounting groove formed in the piston head; a chamber attached to the piston head, forming a spring mounting space therein, and having a through hole communicating with the spring mounting space; 2. The vacuum valve assembly for semiconductor equipment according to claim 1, further comprising: a vibration prevention block fitted into a through hole formed in the chamber and abutting against the second finishing member to pressurize the spring member.

7. 7. The vacuum valve assembly for semiconductor equipment according to claim 6, wherein the piston head further comprises a magnet ring, so that the position of the piston head can be confirmed.

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