Conveying device

Abstract

To provide a transport device which can detect a position and / or posture of a movable element over a wide range and with high accuracy when an incremental encoder is used.SOLUTION: A transport device includes: a stator; a movable element which has a first scale and can move in a first direction along the stator; a plurality of first detectors which are installed to face the first scale and detect a position of a second direction intersecting the first direction of the movable element; and a control part for controlling the position and / or posture of the movable element. The first scale and the first detectors configure an incremental encoder, the plurality of first detectors are arranged along the first direction in the stator by leaving prescribed intervals, and the control part corrects position information of the movable element by a detection value of one first detector on the basis of position information of the movable element by a detection value of the other first detector.SELECTED DRAWING: Figure 8B

Description

[Technical Field]

[0001] This invention relates to a conveying device. [Background technology]

[0002] In general, transport devices are used in production systems such as production lines for assembling industrial products and semiconductor lithography equipment. In particular, transport devices in production lines transport workpieces, such as parts, between multiple stations within or between automated production lines. They may also be used as transport devices within production equipment (process equipment). As a transport device, a transport device using a movable magnet linear motor has already been proposed.

[0003] In a conveying system using a movable magnet linear motor, permanent magnets are arranged on the movable element, and the stator is installed on a frame opposite the permanent magnets. Furthermore, the conveying system is equipped with sensors on the frame on which the stator is installed to detect the movable element. Based on the detection data from these sensors, the position and orientation of the movable element are calculated, and the linear motor is driven and controlled based on that position and orientation.

[0004] Generally, sensors used to detect movable elements include eddy current sensors, laser displacement sensors, magnetic sensors, and other distance measuring sensors. For example, Patent Document 1 describes a method of detecting and controlling a movable element using a Hall element, which is a magnetic sensor. [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] Patent No. 6538710 [Overview of the project] [Problems that the invention aims to solve]

[0006] In the conveying device described in Patent Document 1, in the method for detecting the position of the mover using a Hall element, the detection range of the sensor is narrow, and it is difficult to secure a wide movable range for the mover. Further, in the case of an eddy current sensor or a laser displacement meter, when trying to increase the detection range of the mover, there are problems such as an increase in the sensor size or a decrease in the resolution.

[0007] On the other hand, it is conceivable to detect the position and orientation of the mover using an incremental encoder. However, in this case, when the detector of the encoder that detects the scale of the mover switches, the initial value of the encoder becomes indeterminate, which may result in a decrease in the detection accuracy of the position and orientation of the mover or make detection difficult.

[0008] An object of the present invention is to provide a conveying device capable of detecting the position and / or orientation of a mover over a wide range and with high accuracy when using an incremental encoder.

Means for Solving the Problems

[0009] According to one aspect of the present invention, there are provided a stator, a mover having a first scale and movable along a first direction along the stator, a plurality of first detectors installed to face the first scale and detecting the position of the mover in a second direction intersecting the first direction, and a control unit for controlling the position and / or orientation of the mover. The first scale and the first detectors constitute an incremental encoder. The plurality of first detectors are arranged at predetermined intervals along the first direction in the stator. The control unit corrects the position information of the mover based on the detection value of one first detector using the position information of the mover based on the detection value of another first detector. A conveying device is provided characterized by this.

Effects of the Invention

[0010] According to the present invention, when using an incremental encoder, it is possible to detect the position and / or orientation of the mover over a wide range and with high accuracy. [Brief explanation of the drawing]

[0011] [Figure 1] This is a schematic diagram showing a transport device according to one embodiment of the present invention. [Figure 2A] This is a schematic diagram showing a transport device according to one embodiment of the present invention. [Figure 2B] This is a schematic diagram showing a transport device according to one embodiment of the present invention. [Figure 3] This is a schematic diagram showing a control unit for controlling a transport device according to one embodiment of the present invention. [Figure 4] This is a schematic diagram showing a method for controlling the position of a movable element in a conveying device according to one embodiment of the present invention. [Figure 5] This is a schematic diagram illustrating the position detection in the transport direction of a transport device according to one embodiment of the present invention. [Figure 6] This is a schematic diagram illustrating the movable element correction process in a transport device according to one embodiment of the present invention, in a direction perpendicular to the transport direction. [Figure 7] This is a schematic diagram illustrating the movable element correction process in a conveying device according to one embodiment of the present invention, in a direction different from that of Figure 6, which is orthogonal to the conveying direction. [Figure 8A] This is a schematic diagram illustrating the acquisition of a correction value that converts the detected value of a sensor in a direction perpendicular to the transport direction in a transport device according to one embodiment of the present invention into a relative distance with respect to the movable element. [Figure 8B] This is a schematic diagram illustrating the acquisition of a correction value that converts the detected value of a sensor in a direction perpendicular to the transport direction in a transport device according to one embodiment of the present invention into a relative distance with respect to the movable element. [Figure 8C] This is a schematic diagram illustrating the acquisition of a correction value that converts the detected value of a sensor in a direction perpendicular to the transport direction in a transport device according to one embodiment of the present invention into a relative distance with respect to the movable element. [Figure 8D] This is a schematic diagram illustrating the acquisition of a correction value that converts the detected value of a sensor in a direction perpendicular to the transport direction in a transport device according to one embodiment of the present invention into a relative distance with respect to the movable element. [Figure 9A]This is a schematic diagram illustrating the acquisition of a correction value for converting the detected values ​​of sensors in directions different from those orthogonal to the transport direction in Figures 8A to 8D of a transport device according to one embodiment of the present invention into the relative distance with respect to the movable element. [Figure 9B] This is a schematic diagram illustrating the acquisition of a correction value for converting the detected values ​​of sensors in directions different from those orthogonal to the transport direction in Figures 8A to 8D of a transport device according to one embodiment of the present invention into the relative distance with respect to the movable element. [Figure 9C] This is a schematic diagram illustrating the acquisition of a correction value for converting the detected values ​​of sensors in directions different from those orthogonal to the transport direction in Figures 8A to 8D of a transport device according to one embodiment of the present invention into the relative distance with respect to the movable element. [Figure 10] This is a schematic diagram illustrating the process for calculating the movable element attitude in a direction perpendicular to the transport direction in one embodiment of the present invention. [Figure 11A] This is a schematic diagram illustrating the process for calculating the movable element attitude in a direction different from that of Figure 10, which is orthogonal to the transport direction, in one embodiment of the present invention. [Figure 11B] This is a schematic diagram illustrating the process for calculating the movable element attitude in a direction different from that of Figure 10, which is orthogonal to the transport direction, in one embodiment of the present invention. [Figure 12] This is a schematic diagram illustrating a method for independently applying force to a permanent magnet in the X and Z directions in a conveying device according to one embodiment of the present invention. [Modes for carrying out the invention]

[0012] [One embodiment] A transport device according to one embodiment of the present invention will be described with reference to Figures 1 to 12.

[0013] First, the configuration of the conveying device according to this embodiment will be explained using Figures 1, 2A, and 2B. Figures 1, 2A, and 2B are schematic diagrams showing the conveying device according to this embodiment. Figure 1 is a schematic diagram of the stator 201 and movable element 301 according to this embodiment, viewed from the Y direction. Figure 2A is a schematic diagram of the stator 201 and movable element 301 according to this embodiment, viewed from the X direction. Figure 2B is a schematic diagram showing the arrangement of permanent magnets 303 on the upper surface of the movable element 301. The left half of Figure 2A shows a cross-section (A) along the line (A)-(A) in Figure 2B. The right half of Figure 2A shows a cross-section (B) along the line (B)-(B) in Figure 2B.

[0014] As shown in Figures 1, 2A, and 2B, the conveying device 1 according to this embodiment has a stator 201 that constitutes a conveying path and a movable element 301 that constitutes a trolley, slider, or carriage. Although Figures 1, 2A, and 2B show one movable element 301 relative to the stator 201, the device is not limited to this. In the conveying device 1, multiple movable elements 301 can be conveyed along the stator 201.

[0015] The conveying device 1 according to this embodiment can be used to transport a workpiece 302 held by a movable element 301 to a production device 3 by transporting the movable element 301 with a stator 201. Furthermore, the conveying device 1 according to this embodiment can also be used as a conveying device within a production device (process device). By performing processing, inspection, and other operations (process operations) on the workpiece 302 held by the movable element 301 transported by the conveying device 1 according to this embodiment, it is possible to manufacture goods with high precision.

[0016] In this specification, a system including the transport device 1 and the production device 3 according to the embodiment may be referred to as a production system. In this specification, the production device 3 refers to a device for performing processing, inspection, and other operations on a workpiece 302, and examples include an inspection device, an assembly device, a semiconductor exposure device, a deposition device, and so on. The production system according to this embodiment may have a plurality of production devices 3, and the plurality of production devices 3 may be production devices for performing the same operation on the workpiece 302, or production devices for performing different operations.

[0017] Here, we define the coordinate axes, directions, etc., used in the following explanation. First, we take the X-axis along the horizontal direction, which is the transport direction of the movable element 301, and define the transport direction of the movable element 301 as the X direction. We also take the Z-axis along the vertical direction, which is perpendicular to the X direction, and define the vertical direction as the Z direction. Furthermore, we take the Y-axis along the direction perpendicular to the X and Z directions, and define the direction perpendicular to the X and Z directions as the Y direction. In addition, we define the rotation around the X-axis as Wx, the rotation around the Y-axis as Wy, and the rotation around the Z-axis as Wz. We also use "*" as the symbol for multiplication and "^" as the symbol for exponentiation. Furthermore, we describe the Y- side of the movable element 301 as the R side and the Y+ side as the L side. Note that the transport direction of the movable element 301 does not necessarily have to be horizontal, but in that case, the transport direction can be defined as the X direction and the Y and Z directions can be defined in the same way. Also, the X, Y, and Z directions are not necessarily limited to directions that are perpendicular to each other, but can also be defined as directions that intersect each other.

[0018] In this embodiment, the transport device 1 is exemplified as a transport device using a movable magnet type linear motor (moving permanent magnet type linear motor, movable field type linear motor), but is not limited thereto. The transport device 1 may also be a transport device using a movable coil type linear motor (moving coil type linear motor, fixed field type linear motor). Furthermore, the transport device 1 is configured as a magnetic levitation type transport device that transports the movable element 301 on the stator 201 without contact, without having a guide device such as a linear guide.

[0019] As shown in Figure 2B, the movable element 301 has permanent magnets 303aR, 303bR, 303cR, 303dR, 303aL, 303bL, 303cL, and 303dL. The permanent magnets 303 are mounted on the upper surface of the movable element 301.

[0020] Specifically, permanent magnets 303aR, 303bR, 303cR, and 303dR are attached to the upper surface of the right side of the movable element 301. Also, permanent magnets 303aL, 303bL, 303cL, and 303dL are attached to the upper surface of the left side of the movable element 301. In the following, unless otherwise specified, the permanent magnets of the movable element 301 will simply be referred to as "permanent magnet 303". Furthermore, while it is not necessary to distinguish between the right and left sides, if it is necessary to individually identify each permanent magnet 303, each permanent magnet 303 will be individually identified using the code from the end of the code for each permanent magnet 303, excluding R or L, and including a lowercase alphabet as an identifier. In this case, each permanent magnet 303 will be individually identified as "permanent magnet 303a", "permanent magnet 303b", "permanent magnet 303c", or "permanent magnet 303d".

[0021] The permanent magnets 303aR and 303dR are attached to one end and the other end in the X direction on the upper surface of the R side of the movable element 301 along the X direction. The permanent magnets 303bR and 303cR are attached between the permanent magnets 303aR and 303dR on the upper surface of the R side of the movable element 301. The permanent magnets 303aR, 303bR, 303cR, and 303dR are arranged, for example, at equal pitches in the X direction. Furthermore, the centers of the permanent magnets 303aR, 303bR, 303cR, and 303dR are arranged such that they lie on a straight line along the X direction passing through, for example, the center of the upper surface of the R side of the movable element 301.

[0022] Permanent magnets 303aL and 303dL are attached to one end and the other end in the X direction on the upper surface of the L side of the movable element 301 along the X direction. Permanent magnets 303bL and 303cL are attached between permanent magnets 303aL and 303dL on the upper surface of the L side of the movable element 301. Permanent magnets 303aL, 303bL, 303cL, and 303dL are arranged, for example, at equal pitches in the X direction. Furthermore, the centers of the permanent magnets 303aL, 303bL, 303cL, and 303dL are arranged such that they lie on a straight line along the X direction passing through, for example, the center of the upper surface of the L side of the movable element 301. In addition, permanent magnets 303aL, 303bL, 303cL, and 303dL are located in the same positions as permanent magnets 303aR, 303bR, 303cR, and 303dR, respectively, in the X direction. Permanent magnet 303a is a group of first permanent magnets consisting of multiple first permanent magnets. Permanent magnet 303d is a group of first permanent magnets consisting of multiple first permanent magnets.

[0023] In this embodiment, the example shows that the magnet group is installed on the upper surface of the movable element 301, but the magnet group may also be installed on the side surface of the movable element 301.

[0024] The permanent magnets 303aR, 303bR, 303cR, and 303dR, which are located on the R-side portion of the upper surface of the movable element 301, are each positioned at a distance of rx3 from the origin O, which is the center of the movable element 301, on the R side in the Y direction.

[0025] Furthermore, the permanent magnets 303aL, 303bL, 303cL, and 303dL, which are located on the L-side portion of the upper surface of the movable element 301, are positioned at a distance of rx3 from the origin O in the L-side in the Y-direction.

[0026] Permanent magnets 303a and 303d are mounted at a distance of rz3 on one and the other side of the X direction from the origin O, respectively. Permanent magnets 303c and 303b are mounted at a distance of ry3 on one and the other side of the X direction from the origin O, respectively. On the upper surface of the movable element 301, the central portion between the R-side portion and the L-side portion where the permanent magnets 303 are arranged as described above is the portion on which the workpiece 302 to be transported is placed.

[0027] Permanent magnets 303aR, 303dR, 303aL, and 303dL are sets of two permanent magnets arranged along the Y direction. Permanent magnets 303a and 303d are composed of two permanent magnets arranged along the Y direction such that the polarity of the outer magnetic poles facing the stator 201 is alternately different. Note that the number of permanent magnets arranged along the Y direction that make up permanent magnets 303a and 303d is not limited to two, but can be multiple. Also, the direction in which the permanent magnets that make up permanent magnets 303a and 303d are arranged does not necessarily have to be the Y direction perpendicular to the transport direction X direction, but can be a direction (second direction) that intersects the X direction (first direction). In other words, permanent magnets 303a and 303d can be a group of magnets consisting of multiple permanent magnets arranged along a direction (second direction) that intersects the X direction (second direction) such that the polarity of the magnetic poles is alternate.

[0028] On the other hand, permanent magnets 303bR, 303cR, 303bL, and 303cL are sets of three permanent magnets arranged along the X direction. Permanent magnets 303b and 303c are composed of three permanent magnets arranged along the X direction such that the polarity of the outer magnetic poles facing the stator 201 is alternately different. Note that the number of permanent magnets arranged along the X direction that make up permanent magnets 303b and 303c is not limited to three, but can be any number. That is, permanent magnets 303b and 303c can be groups of magnets consisting of multiple permanent magnets arranged along the X direction such that the polarity of the magnetic poles is alternate. Permanent magnet 303b is a second group of permanent magnets consisting of multiple second permanent magnets. Permanent magnet 303c is a second group of permanent magnets consisting of multiple second permanent magnets.

[0029] Each permanent magnet 303 is attached to a yoke 307 provided on the upper surfaces of the right and left sides of the movable element 301. The yoke 307 is made of a material with high magnetic permeability, such as iron. In this specification, a material with high magnetic permeability means a material with a magnetic permeability of 5000 or more.

[0030] Thus, the movable element 301, on which the permanent magnet 303 is positioned, moves along the stator 201 while its posture is controlled in six axes by the electromagnetic force acting on the permanent magnet 303 by multiple coils 202 of the stator 201, as will be described later.

[0031] The movable element 301 is movable in the X direction along a plurality of coils 202 arranged in two rows in the stator 201 described below. The movable element 301 can be transported with a workpiece 302 to be transported placed on its upper surface. The movable element 301 may have a holding mechanism for holding the workpiece 302 on the movable element 301, for example, a workpiece holder.

[0032] The movable element 301, which is transported along the stator 201, has an X linear scale 304, a Y linear scale 305, and Z linear scales 306L and 306R. The X linear scale 304, Y linear scale 305, and Z linear scales 306L and 306R are each mounted, for example, on the bottom of the movable element 301 along the X direction. The Z linear scales 306L and 306R are mounted on both sides of the X linear scale 304 and Y linear scale 305, respectively. In the movable element 301 facing the X direction, the X linear scale 304, Y linear scale 305, and Z linear scales 306L and 306R have scales formed at predetermined intervals in the X, Y, and Z directions, respectively. The X linear scale 304, together with the X sensor 101 described later, constitutes an incremental linear encoder that detects the displacement of the movable element 301 in the X direction. The Y linear scale 305, together with the Y sensor 102 described later, constitutes an incremental linear encoder that detects the displacement of the movable element 301 in the Y direction. The Z linear scales 306L and 306R, together with the Z sensors 103L and 103R described later, respectively, constitute incremental linear encoders that detect the displacement of the movable element 301 in the Z direction.

[0033] The stator 201 has a plurality of coils 202 arranged in two rows along the X direction, which is the transport direction of the movable element 301. In the stator 201, the plurality of coils 202 are located above the upper surface of the movable element 301 and are mounted so as to face the movable element 301. The stator 201 extends in the X direction, which is the transport direction, and forms a transport path, which is the space that the movable element 301 transports.

[0034] Multiple coils 202 are mounted on the stator 201 in two rows along the X direction so that they can face the permanent magnets 303 on the R and L sides of the movable element 301. Multiple coils 202 arranged in one row on the R side are positioned along the X direction so that they can face the permanent magnets 303aR, 303bR, 303cR, and 303dR on the R side of the movable element 301. Similarly, multiple coils 202 arranged in one row on the L side are positioned along the X direction so that they can face the permanent magnets 303aL, 303bL, 303cL, and 303dL on the L side of the movable element 301.

[0035] In this embodiment, the rows of coils 202 on the right and left sides of the movable element 301 are arranged to face the permanent magnets 303a, 303d and 303b, 303c, respectively, which have different arrangement directions for the multiple permanent magnets that constitute them. Therefore, with a small number of rows of coils 202, it is possible to apply forces to the movable element 301 in the transport direction and forces different from the transport direction, as will be described later, thereby enabling transport control and attitude control of the movable element 301.

[0036] Multiple coils 202 are arranged at predetermined intervals in the X direction. Each coil 202 is mounted so that its central axis faces the Z direction. Note that the coils 202 may be core-type or coreless coils.

[0037] Multiple coils 202 are configured to be current-controlled in units of, for example, three. The unit in which the energization of the coils 202 is controlled is referred to as a "coil unit 203". When energized, the coils 202 generate an electromagnetic force between themselves and the permanent magnets 303 of the movable element 301, thereby applying a force to the movable element 301.

[0038] In Figure 2B, permanent magnets 303a and 303d are each composed of magnet groups in which two permanent magnets are arranged in the Y direction. In contrast, each coil 202 is positioned such that the Y-direction centers of the two permanent magnets 303a and 303d coincide with the Y-direction center of the coil 202. By energizing the coils 202 facing the permanent magnets 303a and 303d, a force is generated in the Y direction relative to the permanent magnets 303a and 303d.

[0039] Furthermore, the permanent magnets 303b and 303c are composed of a group of magnets in which three permanent magnets are arranged in the X direction. By energizing the coil 202 opposite to the permanent magnets 303b and 303c, forces are generated on the permanent magnets 303b and 303c in the X and Z directions.

[0040] As shown in Figure 2A, the stator 201 has an X sensor 101, a Y sensor 102, and Z sensors 103L and 103R. Multiple X sensors 101, Y sensors 102, and Z sensors 103L and 103R are installed at the bottom of the stator 201 so as to face the X linear scale 304, Y linear scale 305, and Z linear scales 306L and 306R of the movable element 301, respectively.

[0041] The X sensor 101 is, for example, an encoder head, which is a detector for a linear encoder that detects an X linear scale 304 attached to the movable element 301 to determine the position of the movable element 301 in the transport direction. Together with the X linear scale 304 attached to the movable element 301, the X sensor 101 constitutes an incremental linear encoder that detects the displacement of the movable element 301. Multiple X sensors 101 are arranged on the stator 201 at predetermined intervals along the X direction. The predetermined interval at which multiple X sensors 101 are arranged in the X direction is preferably less than or equal to the length of the X linear scale 304 along the X direction so that multiple X sensors 101 can simultaneously detect the X linear scale 304. Note that it is also possible to configure the X sensor 101 to be something other than a linear encoder, such as a laser interferometer.

[0042] The Y sensor 102 is an encoder head, which is a detector for a linear encoder that detects the distance in the Y direction from the movable element 301 by detecting the Y linear scale 305 attached to the movable element 301. Together with the Y linear scale 305 attached to the movable element 301, the Y sensor 102 constitutes an incremental linear encoder that detects the displacement of the movable element 301. Multiple Y sensors 102 are arranged on the stator 201 at predetermined intervals along the X direction. Preferably, the predetermined interval at which multiple Y sensors 102 are arranged in the X direction is less than or equal to the length of the Y linear scale 305 along the X direction so that multiple Y sensors 102 can simultaneously detect the Y linear scale 305.

[0043] The Z sensors 103L and 103R are encoder heads that are detectors for a linear encoder that detects the distance in the Z direction from the movable element 301 by detecting the Z linear scales 306L and 306R, respectively, which are attached to the movable element 301. Together with the Z linear scales 306L and 306R, respectively, which are attached to the movable element 301, the Z sensors 103L and 103R constitute an incremental linear encoder that detects the displacement of the movable element 301. The multiple Z sensors 103L and 103R are each arranged on the stator 201 at predetermined intervals along the X direction. The predetermined interval at which the multiple Z sensors 103L and 103R are arranged in the X direction is preferably less than or equal to the length of the Z linear scales 305L and 305R along the X direction, so that the multiple Z sensors 103L and 103R can simultaneously detect the Z linear scales 306L and 306R.

[0044] Multiple X sensors 101 are mounted on the stator 201 along the X direction (first direction) so that each can face the X linear scale 304 of the movable element 301. Each X sensor 101 can detect the relative position of the movable element 301 with respect to the X sensor 101 by reading the X linear scale 304 attached to the movable element 301 and output the detected value.

[0045] Multiple Y sensors 102 are mounted on the stator 201 along the X direction (first direction) so that each can face the Y linear scale 305 of the movable element 301. Each Y sensor 102 can read the Y linear scale 305 attached to the movable element 301, detect the displacement in the Y direction, and output the detected value. This makes it possible to detect the Y-direction orientation of the movable element 301. Note that the Y sensors 102 do not necessarily need to detect the relative distance in the Y direction perpendicular to the X direction, which is the transport direction; it is sufficient if the distance is in a direction (second direction) that intersects the X direction (first direction).

[0046] Multiple Z sensors 103 are mounted in two rows on the stator 201 along the X direction so that each can face the Z linear scale 306 of the movable element 301. Each Z sensor 103 can detect and output the displacement in the Z direction between itself and the Z linear scale 306 attached to the movable element 301. This makes it possible to detect the orientation of the movable element 301 in the Z direction, which is the vertical direction. Note that the Z sensors 103 do not necessarily need to detect the relative distance in the Z direction which is perpendicular to the X direction which is the transport direction; it is sufficient if the Z sensor detects the distance in the direction that intersects the X direction (first direction) and the Y direction (second direction) (third direction).

[0047] In this embodiment, the X sensor 101, Y sensor 102, and Z sensor 103 are installed at the bottom of the stator 201, and the X linear scale 304, Y linear scale 305, and Z linear scale 306 are installed on the bottom surface of the movable element 301. However, the installation positions of each sensor and each scale are not limited to this example. The X linear scale 304, Y linear scale 305, and Z linear scale 306 may be installed at any position on the movable element 301. The X sensor 101, Y sensor 102, and Z sensor 103 may be installed at any position on the stator 201, as long as they are able to face the X linear scale 304, Y linear scale 305, and Z linear scale 306, respectively.

[0048] Furthermore, it is not necessary for both the Y sensor 102 and the Z sensor 103 to be installed on the stator 201; either one may be installed. Even in this case, the effects of the present invention can be achieved. For example, even if the Y sensor 102 is not installed, the configuration can be made so that the Y-direction control of the movable element 301 is not performed solely by the magnetic attraction force. Similarly, even if the Z sensor 103 is not installed, the configuration can be made so that the Z-direction control of the movable element 301 is not performed solely by the magnetic attraction force. Alternatively, the Z-direction levitation can be achieved using another method, such as air. Moreover, the present invention can also be applied to XY stages and the like that do not perform Z-direction levitation control.

[0049] Next, the control unit that controls the transport device 1 according to this embodiment will be further explained with reference to Figure 3. Figure 3 is a schematic diagram showing the control unit 4 that controls the transport device 1 according to this embodiment. The control unit 4 constitutes a part of the transport device 1.

[0050] As shown in Figure 3, the control unit 4 comprises an integrated controller 401, a coil controller 402, and a sensor controller 404, and functions as a control unit for controlling the transport device 1, which includes a movable element 301 and a stator 201. The coil controller 402 is communicated to the integrated controller 401. The sensor controller 404 is also communicated to the integrated controller 401.

[0051] Multiple current controllers 403 are communicated to the coil controller 402. The coil controller 402 and the multiple current controllers 403 connected to it are provided corresponding to each of the two rows of coils 202. A coil unit 203 is connected to each current controller 403. The current controller 403 can control the magnitude of the current in each coil 202 of the connected coil unit 203.

[0052] The coil controller 402 commands each connected current controller 403 to a target current value. The current controller 403 controls the amount of current in the connected coil 202.

[0053] Multiple X sensors 101, multiple Y sensors 102, and multiple Z sensors 103 are connected to the sensor controller 404 in a way that allows them to communicate with each other.

[0054] Multiple X sensors 101 are mounted on the stator 201 at intervals such that at least one of them can always measure the position of one of the movable elements 301 while the movable elements 301 are being transported. Similarly, multiple Y sensors 102 are mounted on the stator 201 at intervals such that at least two of them can always measure the Y linear scale 305 of one of the movable elements 301. Furthermore, multiple Z sensors 103 are mounted on the stator 201 at intervals such that three of the two rows of sensors can always measure the Z linear scale 306 of one of the movable elements 301.

[0055] The integrated controller 401 determines current command values ​​to be applied to the multiple coils 202 based on the outputs from the X sensor 101, Y sensor 102, and Z sensor 103, and transmits them to the coil controller 402. The coil controller 402 commands the current value to the current controller 403 as described above, based on the current command values ​​from the integrated controller 401. As a result, the integrated controller 401 functions as a control unit, transporting the movable element 301 along the stator 201 without contact, and controlling the posture of the transported movable element 301 in six axes.

[0056] The method for controlling the attitude of the movable element 301, executed by the integrated controller 401, will be described below with reference to Figure 4. Figure 4 is a schematic diagram showing the method for controlling the attitude of the movable element 301 in the transport device 1 according to this embodiment. Figure 4 shows an overview of the method for controlling the attitude of the movable element 301, focusing mainly on the data flow. The integrated controller 401 executes processing using the movable element position calculation function 501, the movable element correction processing function 502, the movable element attitude calculation function 503, the movable element attitude control function 504, and the coil current calculation function 505, as described below. As a result, the integrated controller 401 controls the transport of the movable element 301 while controlling the attitude of the movable element 301 in 6 axes. Note that instead of the integrated controller 401, the coil controller 402 can be configured to perform the same processing as the integrated controller 401.

[0057] First, the movable element position calculation function 501 calculates the number and position of the movable elements 301 on the stator 201 that constitute the transport path from the measured values ​​from multiple X sensors 101 and the information of their mounting positions. As a result, the movable element position calculation function 501 updates the movable element position information (X) and the number information of the movable elements 301 in the movable element information 506a. The movable element position information (X) indicates the position of the movable element 301 on the stator 201 in the X direction, which is the transport direction. The movable element information 506a is prepared for each movable element 301 on the stator 201, for example, as shown in Figure 4 as POS-1, POS-2, ...

[0058] Next, the movable element correction processing function 502 identifies the Y sensor 102 and Z sensor 103 capable of measuring each movable element 301 from the movable element position information (X) of the movable element information 506a updated by the movable element position calculation function 501. At this time, the movable element correction processing function 502 calculates a correction value (offset value) 508 for converting the detected value into a relative distance with the movable element, based on the sensor installation position information 507 on the stator 201 of the identified Y sensor 102 and Z sensor 103 and the movable element position information (X). Furthermore, the movable element correction processing function 502 adds the calculated correction value to the detected value to convert it into a relative distance.

[0059] The movable element attitude calculation function 503 calculates attitude information (Y, Z, Wx, Wy, Wz) based on the detected values ​​output from the identified Y sensor 102 and Z sensor 103 and the correction values ​​calculated by the movable element correction processing function 502, and updates the movable element information 506 to become movable element information 506c. The movable element information 506c updated by the movable element attitude calculation function 503 includes movable element position information (X) and attitude information (Y, Z, Wx, Wy, Wz).

[0060] Next, the movable element attitude control function 504 calculates applied force information 509 for each movable element 301 from the current movable element information 506c, which includes movable element position information (X) and attitude information (Y, Z, Wx, Wy, Wz), and the attitude target value. The applied force information 509 is information regarding the magnitude of the force to be applied to each movable element 301. The applied force information 509 includes information regarding the three-axis components of the force T to be applied (Tx, Ty, Tz) and the three-axis components of the torque (Twx, Twy, Twz), which will be described later. The applied force information 509 is prepared for each movable element 301 on the stator 201, for example, as shown in Figure 4 as TRQ-1, TRQ-2, ...

[0061] Next, the coil current calculation function 505 determines the current command value 510 to be applied to each coil 202 based on the applied force information 509 and the movable element information 506c.

[0062] Thus, the integrated controller 401 determines the current command value 510 by executing processing using the movable element position calculation function 501, the movable element correction processing function 502, the movable element attitude calculation function 503, the movable element attitude control function 504, and the coil current calculation function 505. The integrated controller 401 transmits the determined current command value 510 to the coil controller 402.

[0063] Here, the processing by the movable element position calculation function 501 will be explained using Figure 5. Figure 5 is a schematic diagram illustrating the processing by the movable element position calculation function. Also, Figure 5 shows the positional relationship of the X linear scales 304a, 304b and X sensors 101a, 101b, and 101c on the bottom surface of the movable elements 301a and 301b when viewed from the -Z direction.

[0064] In Figure 5, reference point Oe is the position reference of the stator 201 to which the X sensor 101 is attached. Reference point Os is the position reference of the X linear scale 304 attached to the movable element 301. Figure 5 shows a case where two movable elements 301a and 301b are transported as the movable element 301, and three X sensors 101a, 101b, and 101c are arranged as the X sensor 101. Note that the X linear scales 304a and 304b are attached to the same position along the X direction on each movable element 301a and 301b.

[0065] For example, one X sensor 101c is positioned opposite the X linear scale 304b of the movable element 301b shown in Figure 5. The X sensor 101c reads the linear scale 304b of the movable element 301b and outputs the distance Pc. The position of the X sensor 101c on the X axis with the reference point Oe as the origin is Sc. Therefore, the position Pos(301b) of the movable element 301b can be calculated by the following equation (1). Pos(301b)=Sc-Pc...Equation (1)

[0066] For example, the X-linear scale 304a of the movable element 301a shown in Figure 5 has two X-sensors 101a and 101b facing each other. X-sensor 101a reads the X-linear scale 304a of the movable element 301a and outputs the distance Pa. The position of X-sensor 101a on the X-axis with the reference point Oe as the origin is Sa. Therefore, the position Pos(301a) of the movable element 301a on the X-axis based on the output of the detected value of X-sensor 101a can be calculated by the following equation (2). Pos(301a) = Sa - Pa …Equation (2)

[0067] Furthermore, the X sensor 101b reads the X linear scale 304a of the movable element 301a and outputs the distance Pb. Also, the position on the X axis with the reference point Oe of the X sensor 101b as the origin is Sb. Therefore, the position Pos(301a)' of the movable element 301a on the X axis based on the output of the detected value of the X sensor 101b can be calculated by the following equation (3). Pos(301a)′=Sb-Pb…Equation (3)

[0068] Here, since the installation positions of each X sensor 101a and 101b have been accurately measured in advance, the difference between the two values ​​Pos(301a) and Pos(301a)' is sufficiently small. When the difference in the position of the movable element 301 on the X axis based on the outputs of the two X sensors 101 is sufficiently small, it can be determined that the two X sensors 101 are observing the X linear scale 304 of the same movable element 301.

[0069] Furthermore, if multiple X sensors 101 are facing the same movable element 301, the observed position of the movable element 301 can be uniquely determined, for example, by calculating the average position based on the outputs of the multiple X sensors 101. Alternatively, the position of the movable element 301 may be determined based on the output of the detected value of any of the X sensors 101.

[0070] The movable element position calculation function 501 calculates and determines the position X of the movable element 301 in the X direction as movable element position information based on the output of the X sensor 101 as described above. The movable element correction processing function 502 identifies the Y sensor 102 and Z sensor 103 that can measure each movable element 301 from the movable element position information (X) of the movable element information 506a updated by the movable element position calculation function 501.

[0071] Next, the processing performed by the movable element correction processing function 502 will be explained using Figure 6. Figure 6 shows the positional relationship between the Y linear scale 305 and the Y sensors 102a, 102b, and 102c on the bottom surface of the movable element 301a when the movable element 301 is viewed from the -Z direction.

[0072] For example, the movable element 301a shown in Figure 6 has a movable element position information (X) calculated as PosXa. The movable element correction processing function 502 identifies the two Y sensors 102a and 102b as Y sensors capable of measuring the movable element 301a, based on the relationship between PosXa and the sensor installation position information 507, Sa and Sb, which indicate the installation positions of the respective Y sensors 102a and 102b. The movable element correction processing function 502 also identifies the Y sensor 102c as a Y sensor capable of measuring the movable element 301a, based on the relationship between PosXa and the sensor installation position information 507, Sc, which indicates the installation position of the Y sensor 102c. Here, the Y sensor 102c that is capable of measuring is the Y sensor that can measure the movable element 301a when the movable element 301a is transported, for example, in the +X direction.

[0073] The movable element correction processing function 502 converts the detected values ​​of the Y linear scale 305 of the two measurable Y sensors 102a, 102b, and the measurable Y sensor 102c, as identified above, into relative distances with the movable element 301a in the Y direction. The movable element correction processing function 502 outputs a movable element correction 508 that includes the relative distances with the movable element 301a in the Y direction, converted from the detected values ​​of each Y sensor 102a, 102b, and 102c.

[0074] The movable element correction processing function 502 performs the same processing for the Z sensor 103. Although the following explanation uses the R-side Z sensor 103 as an example, the same processing can be performed for the L-side Z sensor 103. Figure 7 shows the positional relationship between the Z linear scale 306R and the Z sensors 103Ra, 103Rb, and 103Rc on the bottom surface of the movable element 301a when viewed from the -Y direction.

[0075] For example, the movable element 301a shown in Figure 7 has its movable element position information (X) calculated as PosXa. The movable element correction processing function 502 identifies the two Z sensors 103Ra and 103Rb as Z sensors capable of measuring the movable element 301a, based on the relationship between PosXa and the sensor installation position information 507, SRa and SRb, which indicate the installation positions of the Z sensors 103Ra and 103Rb, respectively.

[0076] Furthermore, the movable element correction processing function 502 identifies the Z sensor 103Rc as a Z sensor capable of measuring the movable element 301a based on the relationship between PosXa and SRc, which is sensor installation position information 507 indicating the installation position of the Z sensor 103Rc. Here, the Z sensor 103Rc that is capable of measuring is a Z sensor that can measure the movable element 301a when the movable element 301a is transported, for example, in the +X direction.

[0077] The movable element correction processing function 502 converts the detected values ​​of the Z linear scale 306R of the two measurable Z sensors 103Ra and 103Rb, and the measurable Z sensor 103Rc, as identified above, into relative distances with the movable element 301a in the Z direction. The movable element correction processing function 502 outputs a movable element correction 508 that includes the relative distances with the movable element 301a in the Z direction converted from the detected values ​​of each Z sensor 103Ra, 103R, and 102Rc.

[0078] The relative distance of each sensor to the movable element 301 calculated in the movable element correction processing function 502 described above is used in the calculation of the movable element 301's attitude information in the movable element attitude calculation function 503. This makes it possible to continuously calculate the movable element information 506, including the position and attitude of the movable element 301, even when the sensors used to calculate the movable element information 506 are switched due to the transport of the movable element 301.

[0079] Furthermore, as the movable element 301 is transported in the X direction, the Y sensor 102 begins to detect the Y linear scale 305 of the movable element 301, which it had not detected before. The detected value of the Y sensor 102, once it begins to detect the Y linear scale 305, can be converted to a relative distance to the movable element 301 using a correction value. The correction value used for this conversion can be set based on the relative distance to the movable element 301 calculated from the detected values ​​of multiple Y sensors 102 capable of detecting the Y linear scale 305. The method for obtaining the correction value used to convert the detected value of the Y sensor 102 to a relative distance to the movable element 301 will be explained below using Figures 8A to 8D. Figures 8A to 8D show the Y linear scale 305 of the movable element 301, the Y sensor 102, etc. In Figures 8A and 8B, the main body of the movable element 301 is omitted.

[0080] For example, as shown in Figures 8A and 8B, Y sensors 102b and 102e, among the multiple Y sensors 102, begin detecting the Y linear scale 305 of the movable element 301 as the movable element 301 is transported in the X direction. Y sensor 102b begins detecting the Y linear scale 305 when Y sensor 102a detects the Y linear scale 305. Y sensor 102e begins detecting the Y linear scale 305 when Y sensors 102c and 102d detect the Y linear scale 305. The detected values ​​of these Y sensors 102b and 102e can be converted to relative distances to the movable element 301, respectively, using a correction value set based on the relative distance to the movable element 301 calculated from the detected values ​​of multiple Y sensors 102 capable of detecting the Y linear scale 305.

[0081] In the examples shown in Figures 8A and 8B, as the movable element 301 is transported along the X direction, which is the transport direction, the Y linear scale 305 of the movable element 301 moves. At this time, the detection values ​​Da to De of the Y sensors 102a to 102e vary due to variations in the installation of the Y sensors 102a to 102e and noise when the Y linear scale 305 begins to detect.

[0082] First, the method for setting the initial correction value of the Y sensor 102 will be explained using Figure 8C. The initial correction value can be set for each Y sensor 102 as follows.

[0083] For example, as shown in Figure 8C, the movable element 301 is positioned at a predetermined location where the Y sensors 102f and 102g, for which the initial values ​​of the correction value should be set, can detect the Y linear scale 305, and the movable element 301 is restricted in the Y direction by the abutment 210. At this time, the movable element 301 can be restricted in the Y direction so that the relative distance between the Y sensors 102f and 102g and the movable element 301 becomes a known value, for example, zero. In this state, the Y sensors 102f and 102g detect the Y linear scale 305. Alternatively, instead of detection under restriction in the Y direction, the Y sensors 102f and 102g can detect the Y linear scale 305, and the movable element 301 at a predetermined position can be measured separately by another Y sensor capable of measuring the absolute value of the distance, such as an eddy current sensor. Based on the detected values ​​Df and Dg from the Y sensors 102f and 102g obtained in this way, and known relative distance values ​​or measured values ​​from other Y sensors, a correction value Offset is used to convert each detected value Df and Dg into relative distances Vf and Vg with the movable element 301. f Offset g This can be obtained. Furthermore, for other Y sensors 102a, 102b, etc., the correction values ​​Offset are used to convert their detected values ​​Da, Db, etc. into relative distances Va, Vb, etc., respectively. a Offset b You can obtain things like this.

[0084] For example, in the method of restricting the movable element 301 in the Y direction by the abutment 210 shown in Figure 8C, the detected values ​​Df and Dg at the predetermined abutment position are used to convert the correction value Offset to the relative distance Vf and Vg as follows. f Offset g You can obtain this. Offset f =-Df Offset g =-Dg

[0085] In the above description, an example is shown where two Y sensors 102f and 102g detect the Y linear scale 305 at a predetermined position and the relative distance is set to zero at the abutting position. However, the present invention is not limited to this example. It is also possible to set a correction value so that a desired relative distance is output at the abutting position. Further, the correction value may be calculated in consideration of the detection position of the Y sensor 102 at the predetermined position, the rotation amount θ around the Z axis of the mover 301 at the abutting position (the angular deviation at the abutting position), and the like.

[0086] Next, processing including setting a correction value when the Y sensors 102b and 102e start to detect the Y linear scale 305 that moves as the mover 301 is conveyed along the X direction will be described with reference to FIGS. 8A and 8B.

[0087] FIG. 8A shows an example in the case where the Y linear scale 305 moves along the X direction, which is the conveyance direction, as the mover 301 is conveyed along the X direction, or in the case where the inclination of the mover 301 or the Y linear scale 305 during conveyance of the mover 301 is not considered. In FIG. 8A, the Y sensors 102a and 102b are installed at positions Sa and Sb in the X direction, respectively.

[0088] In the case shown in FIG. 8A, the detected value Da of the Y sensor 102a is converted into the relative distance Va from the mover 301 using the correction value Offset a . The position Y of the mover 301 in the Y direction is calculated as Pos Y = Va. As the mover 301 is conveyed in the X direction, when the Y sensor 102b becomes able to detect the Y linear scale 305, the correction value Offset b of the Y sensor 102b can be set as follows, for example, based on the position Y of the mover 301, which is Pos Y . Offset b = Pos Y - Db

[0089] By setting the correction value in this way, the relative distance Vb from the mover 301 can also be calculated in the Y sensor 102b.

[0090] Thus, the relative distance Vb, which is the position information of the movable element 301 based on the detected value Db of the Y sensor 102b, is corrected based on the relative distance Va, which is the position information of the movable element 301 based on the detected value Da of the other Y sensor 102a. Therefore, in this embodiment, the initial value of the encoder does not become undefined when the Y sensor 102 that detects the Y linear scale 305 is switched, and the position and orientation of the movable element 301 can be detected over a wide range and with high accuracy.

[0091] Furthermore, it may not be possible to arrange the Y sensors 102 at intervals narrower than the length of the Y linear scale 305. Figure 8D shows an example where the Y sensors 102 cannot be arranged at intervals shorter than the length of the Y linear scale 305. In Figure 8D, the Y sensors 102h and 102j, which are adjacent to each other in the X direction, are arranged at intervals wider than the length of the Y linear scale 305.

[0092] As shown in Figure 8D, the movable element 301 is restricted in the Y direction in the section from the position PosXh where the Y sensor 102h stops detecting the Y linear scale 305 to the position PosXj where the Y sensor 102j starts detecting the Y linear scale 305. Specifically, for example, the movable element 301 is restricted in the Y direction by a positioning mechanism 211 that restricts the Y-direction position of the movable element 301. This ensures the Y-direction position of the movable element 301 in the section from PosXh to PosXj.

[0093] By guaranteeing the position in the Y direction, at the X-direction position PosXh of the movable element 301, the relative distance Vh to the movable element 301 is obtained from the detected value Dh of the Y sensor 102h, and the Y-direction position Pos Y (=Vh) is calculated. Then, the Y sensor 102j, which begins to detect the Y linear scale 305, uses the detected value Dj of the Y sensor 102j to calculate the correction value Offset of the Y sensor 102j. j For example, you can set it as follows:

[0094] Offset j=Pos Y -Dj This makes it possible to calculate the relative distance Vj to the movable element 301 even when the movable element 301 is at its X-direction position PosXj.

[0095] In the case shown in Figure 8D, an example of Y-direction regulation by the positioning mechanism 211 is shown. However, the Y-direction position of the movable element 301 in the section from PosXh to PosXj may also be guaranteed by detecting and controlling the Y-direction position of the movable element 301 using another sensor.

[0096] Figure 8B shows that as the movable element 301 is transported, the Y linear scale 305 moves in the X direction to the Pos θ An example of tilted movement is shown. In Figure 8B, Y sensors 102c, 102d, and 102e are installed at positions Sc, Sd, and Se in the X direction, respectively.

[0097] As shown in Figure 8B, the position of the movable element 301 in the Y direction is determined by the relative distances Vc and Vd calculated from the detected values ​​Dc and Dd of the Y sensors 102c and 102d, respectively, and the position of the movable element 301 in the Y direction is determined by Pos Y , posture θ is Pos θ This is calculated. Also, the position of the movable element 301 in the X direction is determined by the output of the X sensor 101. X As the movable element 301 is transported, the Y sensor 102e becomes capable of detecting the Y linear scale 305, and the position Pos Y , and posture Pos θ Based on this, the correction value Offset for Y sensor 102e e The value can be set as follows: Offset e =Pos Y +Pos θ *(Se-Pos X )-De

[0098] This makes it possible to calculate the relative distance Ve between the Y sensor 102e and the movable element 301.

[0099] Thus, the relative distance Ve, which is the position information of the movable element 301 based on the detected value De of the Y sensor 102e, is corrected based on the relative distances Vc and Vd, which are the position information of the movable element 301 based on the detected values ​​Dc and Dd of the other Y sensors 102c and 102d. Therefore, in this embodiment, the initial value of the encoder does not become undefined when the Y sensor 102 that detects the Y linear scale 305 is switched, and the position and orientation of the movable element 301 can be detected over a wide range and with high accuracy.

[0100] Similar to the Y sensor 102, a correction value can be set for the Z sensor 103 to convert its detected value into a relative distance with respect to the movable element 301. The method for obtaining the correction value used to convert the detected value of the Z sensor 103 into a relative distance with respect to the movable element 301 will be explained below using Figures 9A to 9C. Figures 9A to 9C show the Z linear scale 306, Z sensor 103, etc. of the movable element 301. In Figures 9A and 9B, the main body of the movable element 301 is omitted.

[0101] Figures 9A to 9C show examples in which the Z linear scales 306R and 306L move along the X direction in which the movable element 301 is transported. Figure 9A shows the case where the Z linear scale 306L, installed on the +Y side of the movable element 301, is detected by the Z sensors 103a and 103b. Figure 9B shows the case where the Z linear scale 306R, installed on the -Y side of the movable element 301, is detected by the Z sensors 103c and 103d. Figure 9C shows the case in which the movable element 301 is restricted in the Z direction at the abutment position. In this case, the detection values ​​Da to Df of the Z sensors 103a to 103f vary due to variations in the installation positions of the Z sensors 103a to 103f and noise when the detection of the Z linear scale 306 begins.

[0102] First, the method for setting the initial correction value of the Z sensor 103 will be explained using Figure 9C. The initial correction value can be set for each Z sensor 103 as follows.

[0103] For example, as shown in Figure 9C, the movable element 301 is positioned at a predetermined location where the Z sensors 103e and 103f, which should set the initial values ​​of the correction value, can detect the Z linear scale 306R, and the movable element 301 is restricted in the Z direction by the abutment 212. At this time, the movable element 301 can be restricted in the Z direction so that the relative distance between the Z sensors 103e and 103f and the movable element 301 becomes a known value, for example, zero. In this state, the Z sensors 103e and 103f detect the Z linear scale 306R. Alternatively, the movable element 301 at a predetermined position can be measured separately using another Z sensor capable of measuring the absolute value of the distance, such as an eddy current sensor.

[0104] Based on the detected values ​​De and Df from the Z sensors 103e and 103f obtained in this way, and known relative distance values ​​or measured values ​​from other Z sensors, a correction value Offset is used to convert each detected value De and Df into relative distances Ve and Vf with the movable element 301. e Offset f This can be obtained. Furthermore, for other Z sensors 103a, 103b, etc., the correction values ​​Offset are used to convert their detected values ​​Da, Db, etc. into relative distances Va, Vb, etc., respectively. a Offset b These can be obtained. In addition, the correction value for the Z sensor 103 that detects the Z linear scale 306L on the left side can be obtained using the same method as the sensor 103 on the right side.

[0105] For example, in the method of restricting the movable element 301 in the Z direction by the abutment 212 shown in Figure 9C, the detected values ​​De and Df at the predetermined abutment position are used to convert the correction values ​​Offset into the relative distances Ve and Vg. e Offset f You can obtain this. Offset e =-De Offset f =-Df

[0106] In the above example, the Z sensors 103e and 103f detect the Z linear scale 306R at predetermined positions, and the relative distance at the abutment position is set to zero. However, the example is not limited to this. It is also possible to set a correction value to output a desired relative distance at the abutment position. Furthermore, the detection position of the Z sensor 103 at the predetermined position and the rotation amount of the movable element 301 around the X and Y axes at the abutment position, which is the posture Pos wx Pos wy The correction value may be calculated taking into consideration factors such as (variations in horizontality at the aforementioned abutment position).

[0107] Next, the process including setting a correction value when the Z sensor 103d begins to detect the Z linear scale 306R that moves along with the transport of the movable element 301 along the X direction will be explained using Figures 9A and 9B. In Figures 9A and 9B, the Z sensors 103a, 103b, 103c, and 103d are installed at positions Sxa, Sxb, Sxc, and Sxd in the X direction, respectively. The Z sensor 103d begins to detect the Z linear scale 306R when the Z sensors 103a and 103b have detected the Z linear scale 306L and the Z sensor 103c has detected the Z linear scale 306R.

[0108] As shown in Figures 9A and 9B, the detected values ​​Da, Db, and Dc of the Z sensors 103a, 103b, and 103c are each corrected by the offset value a Offset b Offset c These are used to convert the relative distances Va, Vb, and Vc with respect to the movable element 301, respectively. Based on the relative distances Va, Vb, and Vc, the position Z in the Z direction of the movable element 301 and the attitudes θx and θy, which are the rotation amounts around the X and Y axes, are converted to Pos z Pos wx Pos wy This is the result.

[0109] As the movable element 301 is transported, the Z sensor 103d becomes capable of detecting the Z linear scale 306R, and the correction value Offset of the Z sensor 103d dThe position and orientation of the movable element 301 Pos z Pos wx Pos wy Based on this, you can set it as follows, for example: Offset d =Pos Z +Pos wx *(Sxd-Pos X )+Pos wy *(Syd-Pos Y )-Dd

[0110] By setting the correction values ​​in this way, the relative distance Vd between the Z sensor 103d and the movable element 301 can also be calculated. Here, Sxd is the installation position of the Z sensor 103d in the X direction, and Syd is the installation position of the Z sensor 103d in the Y direction. Also, Pos X This is the position of the movable element 301 in the X direction.

[0111] Thus, the relative distance Vd, which is the position information of the movable element 301 based on the detected value Dd of the Z sensor 103d, is corrected based on the relative distances Va, Vb, and Vc, which are the position information of the movable element 301 based on the detected values ​​Da, Db, and Dc of the other Z sensors 103a, 103b, and 103c. Therefore, in this embodiment, the initial value of the encoder does not become undefined when the Z sensor 103 that detects the Z linear scale 306 is switched, and the position and orientation of the movable element 301 can be detected over a wide range and with high accuracy.

[0112] In the example above, the correction value for Z sensor 103d was set so that the detected value of Z sensor 103d is converted to a value on the regression plane calculated from the relative distances detected by Z sensors 103a, 103b, and 103c, but this is not the only option. For example, the correction value may be set so that the detected value is converted to a value on the regression line calculated from the relative distances of Z sensors 103 that detect only one of the Z linear scales 306R or 306L. In this case, if the tilt of the movable element 301 is also considered, it is desirable that one side of the Z linear scale 306 is detected by at least two Z sensors 103.

[0113] Furthermore, although the above explanation described an example where only the Z sensor 103d newly begins detecting the Z linear scale 306R on the R side, it is not limited to this. Correction values ​​can also be obtained in the same way when another Z sensor 103 newly begins detecting the Z linear scale 306L on the L side, or when multiple Z sensors 103 on both the R and L sides simultaneously begin detecting the Z linear scales 306R and 306L. This makes it possible to calculate the relative distance of the Z sensor 103 to the movable element 301 in these cases as well.

[0114] The movable element correction processing function 502 can convert the detected values ​​of the Y sensor 102 and Z sensor 103 into relative distances with respect to the movable element 301 using the correction values ​​set for the Y sensor 102 and Z sensor 103 as described above. The movable element correction processing function 502 can also, if necessary, set a correction value for either the Y sensor 102 or the Z sensor 103 and convert its detected value into a relative distance.

[0115] Next, the processing performed by the movable element attitude calculation function 503 will be explained using Figures 10 to 11B. Figures 10 to 11B are schematic diagrams illustrating the processing performed by the movable element attitude calculation function 503. The movable element attitude calculation function 503 calculates the position and attitude of the movable element 301 using the position X in the X direction of the movable element 301 obtained as described above, as well as the relative distances of the Y sensor 102 and Z sensor 103 to the movable element 301.

[0116] Figure 10 shows a case where the movable element 301c is transported as the movable element 301, and Y sensors 102a, 102b, and 102c are arranged as the Y sensor 102. The three Y sensors 102a, 102b, and 102c face the Y linear scale 305c of the movable element 301c. Here, the detected values ​​output by the three Y sensors 102a, 102b, and 102c are denoted as Ya, Yb, and Yc, respectively. Also, the black circles in the figure indicate the relative distance to the movable element 301c, converted from the detected values ​​of the Y sensors 102a, 102b, and 102c. Then, the Y-direction position of the movable element 301c and the rotation amount Wz around the Z axis can be considered as the intercept and slope of the regression line.

[0117] The parameters a and b of the regression line Y = a*X + b, which shows the movable element position information (Y, Wz), can be calculated, for example, using the least squares method, as the parameters a and b that minimize the squared error E1 with load, as shown in equation (4). In this case, the slope a of the regression line is tan(Wz), and the intercept b is position Y. In equation (4), Pa, Pb, and Pc are the X-direction positions of the Y sensors 102a, 102b, and 102c as seen from the center of the movable element 301c located at position PosXc in the X direction, respectively. E1=(Ya-(a*Pa+b))^2+(Yb-(a*Pb+b))^2+(Yc-(a*Pc+b))^2...Equation (4)

[0118] While the movable element position information (Y, Wz) of the movable element 301 can be calculated if at least two Y sensors 102 face the Y linear scale 305, as mentioned above, depending on the position of the movable element 301, there may be three or more Y sensors 102 facing it. In that case as well, the tilt of the Y linear scale 305, i.e., the amount of rotation Wz of the movable element 301 around the Z axis, and the position Y of the movable element 301 in the Y direction can be calculated using the least squares method or similar.

[0119] Furthermore, Figures 11A and 11B show the case where the movable element 301d is transported as the movable element 301, and the Z sensors 103d, 103e, and 103f are arranged as the Z sensors 103. The three Z sensors 103d, 103e, and 103f face the Z linear scale 306 of the movable element 301d. That is, Z sensors 103d and 103e face the R-side Z linear scale 306R, and Z sensor 103f faces the L-side Z linear scale 306L. Here, the detected values ​​output by the three Z sensors 106d, 106e, and 106f are denoted as Zd, Ze, and Zf, respectively. Also, the black circles in the figures indicate the relative distance to the movable element 301d, converted from the detected values ​​of the Z sensors 106d, 106e, and 106f. Then, the position Z in the Z direction, the amount of rotation Wy around the Y axis, and the amount of rotation Wx around the X axis of the movable element 301 can be determined as parameters of the regression plane, respectively.

[0120] The parameters d, e, and f of the regression plane Z = d*X + e*Y + f, which shows the movable element position information (Z, Wx, Wy), can be calculated, for example, using the least squares method, as the parameters d, e, and f that minimize the squared error E2 with load, as shown in equation (5). In this case, d is tan(Wy), e is tan(Wx), and f is position Z. In equation (5), PdX and PeX are the X-direction positions of the Z sensors 103d and 103e as seen from the center of the movable element 301d located at position PosXd in the X direction, respectively. Also, PdY and PfY are the Y-direction positions of the Z sensors 103d and 103f as seen from the center of the movable element 301d located at position PosYd in the Y direction, respectively. E2=(Zd-(d*PdX+e*PdY+f))^2+(Ze-(d*PeX+e*PeY+f))^2+(Zf-(d*PfX+e*PfY+f))^2...Equation (5)

[0121] Depending on the position of the movable element 301, there may be cases where four or more Z sensors 103 face the Z linear scale 306. In that case as well, the tilt of the Z linear scale 306, i.e., the amount of rotation Wx around the X axis and the amount of rotation Wy around the Y axis, and the position Z of the movable element 301 in the Z direction can be calculated using the least squares method or similar.

[0122] Furthermore, from the viewpoint of the accuracy of detecting the attitude of the movable element 301, it is desirable that at least one Z sensor 103 be installed on one of the R side and two on the other side, so as to be able to detect the Z linear scale 306 along the X direction, which is the transport direction. In this embodiment, an example is shown in which at least two Z sensors 103 are installed on the R side and at least one on the L side, but at least two Z sensors 103 may be installed on the L side and at least one on the R side.

[0123] As described above, the movable element attitude calculation function 503 can calculate the position Y in the Y direction, the position Z in the Z direction, and the rotation amounts Wx, Wy, and Wz around each axis as attitude information for the movable element 301.

[0124] Using the movable element information 506 calculated above, the movable element attitude control function 504 calculates the force T to be applied to the movable element 301. The coil current calculation function 505 determines the amount of current to be applied to each coil 202 from the force acting on each permanent magnet 303 when force T is applied to the movable element 301.

[0125] Next, the process using the coil current calculation function 505 will be explained using Figure 2B. In the force notation used below, the directions in which the forces act in the X, Y, and Z directions are indicated by x, y, and z, respectively. In Figure 2B, the Y- side (R side) is indicated by R, the Y+ side (L side) is indicated by L, the X+ side is indicated by f, and the X- side is indicated by b.

[0126] In Figure 2B, the forces acting on each permanent magnet 303 on the R side and L side are denoted as follows. The force acting on each permanent magnet 303 is the electromagnetic force that the permanent magnet 303 receives from multiple coils 202 to which current is applied. The permanent magnet 303 receives electromagnetic forces in the X direction, which is the transport direction of the movable element 301, as well as electromagnetic forces in the Y and Z directions, which are different from the X direction, from the multiple coils 202 to which current is applied.

[0127] The forces acting on the permanent magnet 303 on the R side are expressed as follows: FzfR: Force acting in the Z direction of the R-side permanent magnet 303bR FxfR: Force acting in the X direction on the R-side permanent magnet 303bR FyfR: Force acting in the Y direction on the R side of permanent magnet 303aR FxbR: Force acting in the X direction on the R side permanent magnet 303cR FybR: Force acting in the Y direction of the 303dR permanent magnet on the R side FzbR: Force acting in the Z direction on the R side of the 303cR permanent magnet

[0128] The forces acting on the permanent magnet 303 on the left side are expressed as follows: FzfL: Force acting in the Z direction of permanent magnet 303bL on the L side FxfL: Force acting in the X direction of permanent magnet 303bL on the L side FyfL: Force acting in the Y direction of permanent magnet 303aL on the L side FxbL: Force acting in the X direction on the L-side permanent magnet 303cL FybL: Force acting in the Y direction of the 303dL permanent magnet on the L side. FzbL: Force acting in the Z direction of the permanent magnet 303cL on the L side.

[0129] Furthermore, the force T applied to the movable element 301 is expressed by the following equation (6). Tx, Ty, and Tz are the three-axis components of the force, which are the X, Y, and Z components of the force, respectively. Also, Twx, Twy, and Twz are the three-axis components of the moment, which are the X, Y, and Z components of the moment, respectively. The conveying device 1 according to this embodiment controls the conveying of the movable element 301 while controlling the posture of the movable element 301 in six axes by controlling these six-axis components of force T (Tx, Ty, Tz, Twx, Twy, Twz). T=(Tx,Ty,Tz,Twx,Twy,Twz)…Equation (6)

[0130] Then, Tx, Ty, Tz, Twx, Twy, and Twz are calculated by the following equations (7a), (7b), (7c), (7d), (7e), and (7f), respectively. Tx=FxfR+FxbR+FxfL+FxbL…Formula (7a) Ty=FyfL+FyfR+FybL+FybR…Formula (7b) Tz=FzbR+FzbL+FzfR+FzfL…Formula (7c) Twx={(FzfL+FzbL)-(FzfR+FzbR)}*rx3 …Equation (7d) Twy={(FzfL+FzfR)-(FzbL+FzbR)}*ry3 …Equation (7e) Twz={(FyfL+FyfR)-(FybL+FybR)}*rz3 …Equation (7f)

[0131] In this case, the forces acting on the permanent magnet 303 can be limited by the following equations (7g), (7h), (7i), and (7j). By introducing these limitations, the combination of forces acting on each permanent magnet 303 to obtain a force T having a predetermined six-axis component can be uniquely determined. FxfR=FxbR=FxfL=FxbL …Formula (7g) FyfL = FyfR …Equation (7h) FybL=FybR…Formula (7i) FzbR = FzbL …Equation (7j)

[0132] Next, we will explain how the coil current calculation function 505 determines the amount of current to be applied to each coil 202 from the force acting on each permanent magnet 303.

[0133] First, we will explain the case where a force in the Z direction is applied to permanent magnets 303a and 303d, whose N and S poles are alternately arranged in the Y direction. Note that the coil 202 is positioned so that its Z-direction center is located at the Y-direction center of the permanent magnets 303a and 303d. As a result, almost no force is generated acting on the permanent magnets 303a and 303d in the X and Z directions.

[0134] Let X be the position of the movable element 301 and j be the number of the coils 202 in the row. Let Fy(j, X) be the magnitude of the force acting on coil 202(j) in the Y direction per unit current, and let i(j) be the current applied to coil 202(j). Note that coil 202(j) is the j-th coil 202. In this case, the current i(j) can be determined to satisfy the following equation (8). Note that the following equation (8) is for permanent magnet 303dR. The current applied to coil 202 can be determined similarly for the other permanent magnets 303aR, 303aL, and 303dL. ΣFy(j,X)*i(j)=FybR...Equation (8)

[0135] Furthermore, when multiple coils 202 exert force on the permanent magnet 303, the force acting on the permanent magnet 303 can be uniquely determined by apportioning the current according to the magnitude of the force per unit current exerted by each coil 202.

[0136] Furthermore, as shown in Figure 2B, the permanent magnets 303 are arranged symmetrically on the left and right sides of the movable element 301. This symmetrical arrangement of the permanent magnets 303 makes it possible to cancel out the multi-component forces acting on the permanent magnets 303, such as the Wx force acting on permanent magnets 303a and 303d, i.e., the moment component around the X axis, with the forces on the left and right sides. As a result, more precise control of the attitude of the movable element 301 becomes possible.

[0137] Next, a method for independently applying force in the X and Z directions to a permanent magnet 303b, in which the polarities of the N pole, S pole, and N pole are alternately arranged in the X direction, will be described. Figure 12 is a schematic diagram illustrating the method for independently applying force in the X and Z directions to the permanent magnet 303b. The coil current calculation function 505 determines the current command value to be applied to the coil 202 in order to independently apply force in the X and Z directions to the permanent magnet 303b, according to the following. Note that force can also be independently applied in the X and Z directions to the permanent magnet 303c, similar to the permanent magnet 303b.

[0138] Let X be the position of the movable element 301 and j be the number of the coils 202 in the row. Let Fx(j, X) and Fz(j, X) be the magnitudes of the forces acting on coil 202(j) in the X and Z directions per unit current, respectively. Let i(j) be the magnitude of the current in coil 202(j). Note that coil 202(j) is the j-th coil 202.

[0139] The upper diagram in Figure 12 shows the six coils 202 facing the permanent magnet 303bR, with the X-axis running horizontally and the Y-axis running vertically. The middle diagram in Figure 12 is a view of the upper diagram in Figure 12 from the Y-direction. The coils 202 are numbered j from 1 to 6 in the order they are arranged in the X-direction, and each coil 202 will be identified below, for example, as coil 202(1).

[0140] As shown in the upper and middle diagrams of Figure 12, the coils 202 are arranged at a pitch of distance L. On the other hand, the permanent magnets 303 of the movable element 301 are arranged at a pitch of distance 3 / 2*L.

[0141] The lower graph in Figure 12 schematically shows the magnitudes of the force Fx in the X direction and the force Fz in the Z direction generated when a unit current is applied to each of the coils 202 shown in the upper and middle figures of Figure 12.

[0142] For simplicity, in Figure 12, the origin Oc of the X-direction position of coil 202 is set to be midway between coil 202(3) and coil 202(4), and the origin is set to the X-direction center Om of the permanent magnet 303bR. Therefore, Figure 12 shows the case where Oc and Om coincide, i.e., X=0.

[0143] In this case, for example, the force per unit current acting on coil 202(4) is Fx(4,0) in the X direction and Fz(4,0) in the Z direction. Also, the force per unit current acting on coil 202(5) is Fx(5,0) in the X direction and Fz(5,0) in the Z direction.

[0144] Here, let i(1) to i(6) be the current values ​​applied to coils 202(1) to 202(6), respectively. Then, the magnitude of the force FxfR acting in the X direction and the magnitude of the force FzfR acting in the Y direction with respect to the permanent magnet 303bR are generally expressed by the following equations (9) and (10), respectively. FxfR=Fx(1,X)*i(1)+Fx(2,X)*i(2)+Fx(3,X)*i(3)+Fx(4,X)*i(4)+Fx(5,X)*i(5)+Fx(6,X)*i(6)...Formula (9) FzfR=Fz(1,X)*i(1)+Fz(2,X)*i(2)+Fz(3,X)*i(3)+Fz(4,X)*i(4)+Fz(5,X)*i(5)+Fz(6,X)*i(6)...Formula (10)

[0145] By determining the current command values ​​so that current values ​​i(1) to i(6) satisfying equations (9) and (10) above are applied to coils 202(1) to 202(6), a force can be applied independently to the permanent magnet 303bR in the X and Z directions. The coil current calculation function 505 can determine the current command value to be applied to coil 202(j) as described above in order to apply a force independently to the permanent magnet 303 in the X and Z directions.

[0146] For simplicity, let's consider the case in Figure 12 where only coils 202(3), 202(4), and 202(5) from coils 202(1) to 202(6) are used with respect to the permanent magnet 303bR, and the current values ​​of these three coils are controlled to be 0. In this example, the force FxfR acting in the X direction and the force FzfR acting in the Z direction with respect to the permanent magnet 303bR are expressed by equations (11) and (12), respectively. FxfR=Fx(3,X)*i(3)+Fx(4,X)*i(4)+Fx(5,X)*i(5)...Equation (11) FzfR=Fz(3,X)*i(3)+Fz(4,X)*i(4)+Fz(5,X)*i(5)...Equation (12)

[0147] Furthermore, the current values ​​of coils 202(1) to 202(6) can be set to satisfy equations (13) and (14). i(3)+i(4)+i(5)=0 …Equation (13) i(1)=i(2)=i(6)=0 …Equation (14)

[0148] Therefore, once the required force magnitudes (FxfR, FzfR) for the permanent magnet 303bR are determined, the current values ​​i(1), i(2), i(3), i(4), i(5), and i(6) can be uniquely determined. Forces are applied to the movable element 301 in the X and Z directions based on these determined current command values. The force applied to the movable element 301 in the X direction provides a thrust force that moves it in the X direction, causing it to move in that direction. Furthermore, the force applied to the movable element 301 in the X and Z directions based on these determined current command values ​​controls the attitude of the movable element 301.

[0149] In this way, the integrated controller 401 controls each of the six axial components of the force applied to the movable element 301 by controlling the current applied to the multiple coils 202.

[0150] Furthermore, if the center Oc of the coil 202 moves relative to the center Om of the permanent magnet 303bR due to the transport of the movable element 301, i.e., if X≠0, then the coil 202 corresponding to the moved position can be selected. In addition, the same calculation as above can be performed based on the force per unit current generated in the coil 202.

[0151] As described above, the integrated controller 401 controls the attitude of the movable element 301 on the stator 201 in six axes by determining and controlling the current command values ​​of the currents applied to the multiple coils 202, while also controlling the contactless transport of the movable element 301 on the stator 201. In other words, the integrated controller 401 functions as a transport control means for controlling the transport of the movable element 301, and controls the contactless transport of the movable element 301 on the stator 201 by controlling the electromagnetic force received by the permanent magnet 303 by the multiple coils 202. Furthermore, the integrated controller 401 functions as an attitude control means for controlling the attitude of the movable element 301, and controls the attitude of the movable element 301 on the stator 201 in six axes. Note that all or part of the functions of the integrated controller 401 as a control device can be replaced by a coil controller 402 or other control devices.

[0152] Thus, according to this embodiment, by using a plurality of coils 202 arranged in two rows, it is possible to apply six-axis forces to the movable element 301, consisting of three force components (Tx, Ty, Tz) and three moment components (Twx, Twy, Twz). This makes it possible to control the transport of the movable element 301 while controlling its posture in six axes. According to this embodiment, it is possible to control the transport of the movable element 301 while controlling its posture in six axes using two rows of coils 202, which is fewer than the number of six-axis components of the force to be controlled.

[0153] Therefore, according to this embodiment, the number of rows of coils 202 can be reduced, allowing for contactless transport of the movable element 301 while controlling its posture, without increasing the size or complexity of the system. Furthermore, because the number of rows of coils 202 can be reduced according to this embodiment, a small, inexpensive magnetic levitation transport device can be constructed.

[0154] Furthermore, according to this embodiment, even if the Y sensor 102 and Z sensor 103 are switched in accordance with the transport of the movable element 301, the position and orientation of the movable element 301 in a direction intersecting the transport direction can be detected over a wide range and with high accuracy. In addition, the detection range can be easily expanded without reducing the resolution simply by widening the detection width of the linear scale.

[0155] [Modified Embodiment] The present invention is not limited to the embodiments described above and can be modified in various ways. For example, in the above embodiment, a case in which the conveying device 1 is configured with a moving magnet type linear motor having a permanent magnet 303 on the movable element 301 and a coil 202 on the stator 201 was described, but it is not limited to this. The conveying device 1 can also be configured with a moving coil type linear motor having a permanent magnet 303 on the stator 201 and a coil 202 on the movable element 301.

[0156] Furthermore, the conveying device according to the present invention can be used in a manufacturing system for producing articles such as electronic devices, as a conveying device that conveys a workpiece together with a movable element to the work area of ​​each process device, such as a machine tool, that performs each work process on the workpiece. The process device that performs the work process may be any device, such as a device that assembles parts on the workpiece, or a device that performs painting. Also, the article to be manufactured is not limited to a specific item, but may be any part. [Explanation of Symbols]

[0157] 1. Conveying device 3 Production equipment 4. Control Unit 101 X sensor 102 Y sensor 103 Z sensor 201 Stator 202 coils 301 Mover 302 Work 303 Permanent Magnet 304 X linear scale 305 Y Linear Scale 306 Z Linear Scale 401 Integrated Controller 402 Coil Controller 403 Coil Unit Controller 404 Sensor Controller

Claims

1. Stator and, A movable element having a first scale and movable along the stator in a first direction, A plurality of detectors positioned to face the first scale, wherein at least two of the plurality of detectors, which face the first scale due to the movement of the movable element, detect the position of the movable element in a second direction intersecting the first direction, The movable element comprises a control unit that controls the position and / or orientation of the movable element, The first scale and the detector constitute an incremental encoder. The aforementioned plurality of detectors, In the stator, arranged at predetermined intervals along the first direction, The system includes a first detector capable of detecting the first scale, and a second detector that begins to detect the first scale when the first detector is detecting the first scale, When the second detector begins detecting the first scale due to the movement of the movable element, the control unit corrects the position information of the movable element in the second direction based on the detection value of the second detector using the detection value of the first detector, which has already detected the first scale. A conveying device characterized by the following features.

2. The plurality of detectors include a third detector capable of detecting the first scale, The second detector begins detecting the first scale when the third detector is detecting the first scale. The control unit corrects the position information of the movable element based on the detection value of the second detector, based on the position information of the movable element based on the detection value of the first detector and the position information of the movable element based on the detection value of the third detector. The conveying device according to feature 1.

3. The movable element has a second scale, The transport device is installed so as to face the second scale and has a plurality of fourth detectors that detect the position of the movable element in a third direction that intersects the first direction and the second direction. The second scale and the fourth detector constitute an incremental encoder. The plurality of fourth detectors are arranged in the stator at predetermined intervals along the first direction, The control unit corrects the position information of the movable element based on the detection value of one of the fourth detectors based on the position information of the movable element based on the detection value of the other fourth detector. The conveying device according to feature 1 or 2.

4. The control unit controls the attitude of the movable element based on the position information of the movable element, which is based on the detection value of at least one of the plurality of detectors. The conveying device according to any one of claims 1 to 3.

5. The predetermined interval between the plurality of detectors arranged along the first direction is less than or equal to the length of the first scale along the first direction. The conveying device according to any one of claims 1 to 4, characterized in that

6. The movable element has a plurality of permanent magnets, The stator has a plurality of coils, The control unit controls the force acting between the plurality of permanent magnets and the plurality of coils. The conveying device according to any one of claims 1 to 5.

7. The movable element has a plurality of coils, The stator has a plurality of permanent magnets, The control unit controls the force acting between the plurality of permanent magnets and the plurality of coils. The conveying device according to any one of claims 1 to 5.

8. A control method for a transport device comprising a stator, a movable element having a first scale and movable along the stator in a first direction, and a plurality of detectors positioned to face the first scale and detecting the position of the movable element in a second direction intersecting the first direction, wherein the first scale and the detectors constitute an incremental encoder, and the plurality of detectors are arranged at predetermined intervals along the first direction on the stator, When the second detector among the plurality of detectors begins detecting the first scale due to the movement of the movable element, the position information of the movable element in the second direction, based on the detection value of the second detector, is corrected using the detection value of the first detector, which has already detected the first scale. A control method for a conveying device characterized by the following features.

9. A conveying device according to any one of claims 1 to 7, A production apparatus that performs work on a workpiece conveyed by the aforementioned movable element. A production system characterized by having the following features.

10. A method for manufacturing an article using the production system described in claim 9, The process of transporting the workpiece using the movable element, The process involves performing the aforementioned operation on the workpiece conveyed by the aforementioned movable element using the aforementioned production apparatus. A method for manufacturing an article, characterized by having the following:

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