Electro-optic polymer element

Abstract

To provide an electro-optical polymer element the optical modulation efficiency of which is improved.SOLUTION: An electro-optical polymer element 1 comprises an optical waveguide 15 and a first antenna electrode 21. The optical waveguide 15 includes a core layer 17 that is formed from an electro-optical polymer. The first antenna electrode 21 includes a first upper antenna electrode 26 and a first lower antenna electrode 22. The electro-optical molecules of the electro-optical polymer are oriented along the normal direction of a first principal plane 15a of the optical waveguide 15. In the plan view of the first principal plane 15a, a first edge 27 of the first upper antenna electrode 26 and a second edge 23 of the first lower antenna electrode 22 each overlap the core layer 17, or are separate from the core layer 17 in the width direction of the core layer 17 by a distance of 20 μm or less.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] This disclosure relates to an electro-optic polymer element. [Background technology]

[0002] Takahiro Kaji et al., "W-band optical modulators using electro-optic polymer waveguides and patch antenna arrays", Optics Express, September 13, 2021, Vol.29 No.19, pp.29604-29614 (Non-Patent Literature 1), discloses an optical modulator comprising a substrate, a ground electrode, a lower cladding layer, a core layer, an upper cladding layer, and a plurality of pairs of rectangular antenna electrodes. The substrate includes a main surface. The core layer is formed of an electro-optic polymer. The electro-optic polymer contains electro-optic molecules, which are oriented in the direction normal to the main surface of the substrate. [Prior art documents] [Non-patent literature]

[0003] [Non-Patent Document 1] Takahiro Kaji et al., "W-band optical modulators using electro-optic polymer waveguides and patch antenna arrays", Optics Express, September 13, 2021, Vol.29 No.19, pp.29604-29614. [Overview of the project] [Problems that the invention aims to solve]

[0004] However, in the optical modulator described in Non-Patent Document 1, multiple pairs of rectangular antenna electrodes are positioned above the core layer. Therefore, when the multiple pairs of rectangular antenna electrodes receive RF (Radio Frequency) electromagnetic waves, it is difficult to increase the component of the electric field applied from the multiple pairs of rectangular antenna electrodes to the core layer that aligns with the orientation of the electro-optic molecules, resulting in insufficient optical modulation efficiency for the optical modulator. This disclosure has been made in view of the above problems, and its purpose is to provide an electro-optic polymer element with improved optical modulation efficiency. [Means for solving the problem]

[0005] The electro-optic polymer element of this disclosure comprises an optical waveguide and a first antenna electrode. The optical waveguide has a first principal surface and a second principal surface opposite to the first principal surface. The optical waveguide includes a core layer formed of an electro-optic polymer. The first antenna electrode includes a first upper antenna electrode and a first lower antenna electrode. The electro-optic polymer includes electro-optic molecules. The electro-optic molecules are oriented along the direction normal to the first principal surface. The first upper antenna electrode is provided on the first principal surface. The first upper antenna electrode includes a first edge that is proximal to the centerline of the core layer in the width direction of the core layer in a plan view of the first principal surface. The width direction of the core layer is perpendicular to the longitudinal direction of the core layer in a plan view of the first principal surface. The first lower antenna electrode is provided on a second principal surface. The first lower antenna electrode includes a second edge that is proximal to the centerline of the core layer in a plan view of the first principal surface. In a plan view of the first main surface, the first centerline of the first upper antenna electrode in the width direction of the core layer is offset in the first width direction relative to the centerline of the core layer in the width direction of the core layer. The first width direction is one side of the width direction of the core layer. In a plan view of the first main surface, the second centerline of the first lower antenna electrode in the width direction of the core layer is offset in the second width direction, opposite to the first width direction, relative to the centerline of the core layer. The second width direction is the other side of the width direction of the core layer. In a plan view of the first main surface, the first edge overlaps the core layer or is at a distance of 20 μm or less from the core layer in the width direction of the core layer. In a plan view of the first main surface, the second edge overlaps the core layer or is at a distance of 20 μm or less from the core layer in the width direction of the core layer. The first distance between the first upper antenna electrode and the core layer in the normal direction of the first main surface is 20 μm or less. The second distance between the first lower antenna electrode and the core layer in the direction normal to the first main surface is 20 μm or less. [Effects of the Invention]

[0006] According to the electro-optic polymer element of this disclosure, the optical modulation efficiency of the electro-optic polymer element can be improved. [Brief explanation of the drawing]

[0007] [Figure 1]It is a schematic plan view of the electro-optical polymer device of Embodiment 1. [Figure 2] It is a schematic cross-sectional view of the electro-optical polymer device of Embodiment 1 taken along the sectional line II-II shown in FIG. 1. [Figure 3] It is a schematic cross-sectional view of the electro-optical polymer device of Embodiment 1 taken along the sectional line III-III shown in FIG. 1. [Figure 4] It is a schematic cross-sectional view showing one step of the manufacturing method of the electro-optical polymer device of Embodiment 1. [Figure 5] It is a schematic cross-sectional view showing the next step of the step shown in FIG. 4 in the manufacturing method of the electro-optical polymer device of Embodiment 1. [Figure 6] It is a schematic cross-sectional view showing the next step of the step shown in FIG. 5 in the manufacturing method of the electro-optical polymer device of Embodiment 1. [Figure 7] It is a schematic cross-sectional view showing the next step of the step shown in FIG. 6 in the manufacturing method of the electro-optical polymer device of Embodiment 1. [Figure 8] It is a schematic cross-sectional view showing one step of the method for preparing an electro-optical polymer layer in which electro-optical molecules are aligned in the manufacturing method of the electro-optical polymer device of Embodiment 1. [Figure 9] It is a schematic cross-sectional view showing the next step of the step shown in FIG. 9 in the method for preparing an electro-optical polymer layer in which electro-optical molecules are aligned in the manufacturing method of the electro-optical polymer device of Embodiment 1. [Figure 10] It is a schematic cross-sectional view showing the next step of the steps shown in FIGS. 7 and 9 in the manufacturing method of the electro-optical polymer device of Embodiment 1. [Figure 11] It is a schematic cross-sectional view showing the next step of the step shown in FIG. 10 in the manufacturing method of the electro-optical polymer device of Embodiment 1. [Figure 12] It is a schematic cross-sectional view showing the next step of the step shown in FIG. 11 in the manufacturing method of the electro-optical polymer device of Embodiment 1. [Figure 13] It is a schematic cross-sectional view showing the next step of the step shown in FIG. 12 in the manufacturing method of the electro-optical polymer device of Embodiment 1. [Figure 14] It is a schematic diagram for explaining the operation of the electro-optical polymer device of Embodiment 1. [Figure 15] It is a schematic cross-sectional view of the electro-optical polymer device of the first modification example of Embodiment 1. [Figure 16] It is a schematic cross-sectional view of the electro-optical polymer device of the first modification example of Embodiment 1. [Figure 17] It is a schematic cross-sectional view of the electro-optical polymer device of the second modification example of Embodiment 1. [Figure 18] It is a schematic cross-sectional view of the electro-optical polymer device of the second modification example of Embodiment 1. [Figure 19] It is a schematic plan view of the electro-optical polymer device of the third modification example of Embodiment 1. [Figure 20] It is a schematic cross-sectional view of the electro-optical polymer device of the third modification example of Embodiment 1 taken along the cross-section line XX-XX shown in FIG. 19. [Figure 21] It is a schematic cross-sectional view of the electro-optical polymer device of the third modification example of Embodiment 1 taken along the cross-section line XXI-XXI shown in FIG. 19. [Figure 22] It is a schematic plan view of the electro-optical polymer device of Embodiment 2. [Figure 23] It is a schematic cross-sectional view of the electro-optical polymer device of Embodiment 2 taken along the cross-section line XXIII-XXIII shown in FIG. 22. [Figure 24] It is a schematic cross-sectional view of the electro-optical polymer device of Embodiment 2 taken along the cross-section line XXIV-XXIV shown in FIG. 22. [Figure 25] It is a schematic cross-sectional view of the electro-optical polymer device of the modification example of Embodiment 2. [Figure 26] It is a schematic cross-sectional view of the electro-optical polymer device of the modification example of Embodiment II. [Figure 27] It is a schematic plan view of the electro-optical polymer device of Embodiment 3. [Figure 28] It is a schematic cross-sectional view of the electro-optical polymer device of Embodiment 3 taken along the cross-section line XXVIII-XXVIII shown in FIG. 27. [Figure 29]This is a schematic cross-sectional view of the electro-optic polymer element of Embodiment 3 along the cross-sectional line XXIX-XXIX shown in Figure 27. [Figure 30] This is a schematic cross-sectional view of an electro-optic polymer element, a modified example of Embodiment 3. [Figure 31] This is a schematic cross-sectional view of an electro-optic polymer element, a modified example of Embodiment 3. [Figure 32] This is a schematic plan view of the electro-optic polymer element according to Embodiment 4. [Figure 33] This is a schematic plan view of an electro-optic polymer element, a modified example of Embodiment 4. [Figure 34] This is a top surface microscope image of an electro-optic polymer element according to an embodiment of the present disclosure. [Figure 35] This is a cross-sectional scanning electron microscope (SEM) image of an electro-optic polymer element according to an embodiment of the present disclosure. [Figure 36] This figure shows the spectrum of the output light from the electro-optic polymer element of an embodiment of the present disclosure. [Modes for carrying out the invention]

[0008] The embodiments are described below. Note that identical components will be given the same reference numerals, and their descriptions will not be repeated.

[0009] (Embodiment 1) The electro-optic polymer element 1 of Embodiment 1 will be described with reference to Figures 1 to 3. The electro-optic polymer element 1 is, for example, a device for detecting electromagnetic waves 40. The electro-optic polymer element 1 comprises a substrate 10, a ground electrode 11, a spacer layer 12, an optical waveguide 15, a first antenna electrode 21, and a second antenna electrode 31.

[0010] Referring to Figures 2 and 3, the substrate 10 includes a main surface 10a. The main surface 10a extends in the x-direction and the y-direction perpendicular to the x-direction. The normal direction of the main surface 10a is the z-direction perpendicular to the x-direction and the y-direction. The substrate 10 is not particularly limited, but is formed of a semiconductor material such as silicon (Si). The substrate 10 may be formed of glass such as BK7 or quartz glass, or of an oxide such as silicon dioxide (SiO2) or aluminum oxide (Al2O3), or of a fluoropolymer such as polytetrafluoroethylene (PTFE) or CYTOP (Asahi Glass, registered trademark), or of a resin such as polycarbonate, polymethyl methacrylate (PMMA), or cycloolefin polymer (e.g., ZEONEX (Nippon Zeon, registered trademark) or ZEONOR (Nippon Zeon, registered trademark)).

[0011] The ground electrode 11 is provided on the main surface 10a of the substrate 10. In the z-direction, the ground electrode 11 is positioned between the substrate 10 and the spacer layer 12. In the z-direction, the ground electrode 11 is positioned on the opposite side of the first upper antenna electrode 26 with respect to the first lower antenna electrode 22, and is spaced apart from the first lower antenna electrode 22. In the z-direction, the ground electrode 11 is positioned on the opposite side of the second upper antenna electrode 36 with respect to the second lower antenna electrode 32, and is spaced apart from the second lower antenna electrode 32. In a plan view of the first main surface 15a of the optical waveguide 15, the ground electrode 11 overlaps the first antenna electrode 21 and the second antenna electrode 31.

[0012] The ground electrode 11 is formed of a conductive material such as gold (Au). The ground electrode 11 may be formed of a metallic material such as silver (Ag), copper (Cu), platinum (Pt), aluminum (Al), chromium (Cr), or titanium (Ti), or it may be formed of a transparent conductive material such as indium tin oxide (ITO), indium zinc oxide (IZO), or IGZO (InGaZnO). The ground electrode 11 has a thickness of, for example, 200 nm in the direction normal to the first main surface 15a of the optical waveguide 15 (z direction). The ground electrode 11 may have a thickness of 10 mm or less, 1 mm or less, 100 μm or less, 10 μm or less, or 1 μm or less in the direction normal to the first main surface 15a (z direction). To improve the adhesion between the ground electrode 11 and the spacer layer 12, the ground electrode 11 may be covered with, for example, a silicon dioxide (SiO2) film (not shown).

[0013] The spacer layer 12 is provided on the ground electrode 11. The spacer layer 12 is positioned between the ground electrode 11 and the first lower antenna electrode 22, and also between the ground electrode 11 and the second lower antenna electrode 32. The spacer layer 12 is positioned between the ground electrode 11 and the optical waveguide 15. The spacer layer 12 may have a refractive index smaller than that of the core layer 17. The spacer layer 12 has a thickness of, for example, 40 μm in the direction normal to the first main surface 15a of the optical waveguide 15 (z-direction). The spacer layer 12 may have a thickness of 10 mm or less, 1 mm or less, 500 μm or less, 100 μm or less, or 10 μm or less in the direction normal to the first main surface 15a (z-direction).

[0014] The spacer layer 12 may be formed of the same material as the lower cladding layer 16 of the optical waveguide 15. For example, the spacer layer 12 may be made of 10 4 It is made of a material having an electrical resistivity greater than Ω·m. The spacer layer 12 is 10 6 It may be formed from a material having an electrical resistivity greater than Ω·m, 10 8It may be formed from a material having an electrical resistivity greater than Ω·m, 10 9 It may be formed from a material having an electrical resistivity greater than Ω·m, 10 10 It may be formed from a material having an electrical resistivity greater than Ω·m, 10 12 It may be formed from a material having an electrical resistivity greater than Ω·m. This can reduce the absorption of electromagnetic waves 40 (see Figures 2, 3, and 14) by the spacer layer 12.

[0015] The spacer layer 12 is not particularly limited, but may be formed from a resin such as cycloolefin polymer (e.g., ZEONEX (registered trademark of Nippon Zeon), ZEONOR (registered trademark of Nippon Zeon), or ARTON (registered trademark of JSR), etc.), cycloolefin copolymer (e.g., TOPAS (registered trademark of Topas Advanced Polymers GmbH) or APEL (registered trademark of Mitsui Chemicals), etc.), polyethylene, polystyrene, polycarbonate, or polymethyl methacrylate (PMMA). The spacer layer 12 may be formed from a semiconductor material such as silicon (Si), from a glass such as BK7 or quartz glass, from an oxide such as silicon dioxide (SiO2) or aluminum oxide (Al2O3), or from a fluororesin such as polytetrafluoroethylene (PTFE) or CYTOP (registered trademark of Asahi Glass).

[0016] The optical waveguide 15 has a first main surface 15a and a second main surface 15b opposite to the first main surface 15a. The first main surface 15a and the second main surface 15b extend in the x and y directions, respectively. The normal direction of the first main surface 15a and the normal direction of the second main surface 15b are both in the z direction. The first main surface 15a of the optical waveguide 15 is the main surface of the optical waveguide 15 that is close to the first upper antenna electrode 26. The second main surface 15b of the optical waveguide 15 is the main surface of the optical waveguide 15 that is close to the first lower antenna electrode 22, the second lower antenna electrode 32, the ground electrode 11 and the substrate 10. The second main surface 15b of the optical waveguide 15 faces the first lower antenna electrode 22, the second lower antenna electrode 32, the ground electrode 11, and the main surface 10a of the substrate 10. The optical waveguide 15 includes a core layer 17, an upper cladding layer 18, and a lower cladding layer 16.

[0017] The core layer 17 has a higher refractive index than the lower cladding layer 16 and the upper cladding layer 18. For example, the core layer 17 has a refractive index of 1.6. The core layer 17 may have a refractive index of 2.5 or less, a refractive index of 2.0 or less, or a refractive index of 1.8 or less. Referring to Figure 1, the longitudinal direction of the core layer 17 is the x-direction. The width direction (±y direction) of the core layer 17 is perpendicular to the longitudinal direction (x direction) of the core layer 17 in a plan view of the first main surface 15a of the optical waveguide 15. The center line 17c of the core layer 17 is the center line of the core layer 17 in the width direction (±y direction) of the core layer 17 in a plan view of the first main surface 15a. The center line 17c of the core layer 17 extends in the longitudinal direction (x direction) of the core layer 17.

[0018] The core layer 17 has a width of, for example, 1.6 μm in the width direction (±y direction) of the core layer 17. The core layer 17 may have a width of 100 μm or less, 10 μm or less, 5 μm or less, or 2 μm or less in the width direction (±y direction) of the core layer 17. The core layer 17 has a height of, for example, 2 μm in the normal direction (z direction) of the first main surface 15a of the optical waveguide 15. The core layer 17 may have a height of 20 μm or less, 5 μm or less, 2 μm or less, or 0.1 μm or less in the normal direction (z direction) of the first main surface 15a. Referring to Figures 2 and 3, the core layer 17 is, for example, a ridge-type core layer.

[0019] The core layer 17 is formed of an electro-optic polymer. The electro-optic polymer contains electro-optic molecules. The electro-optic molecules are oriented along the direction normal to the first principal surface 15a (z-direction) (see arrows in Figures 2 and 3 in the core layer 17).

[0020] In this specification, "electro-optic polymer" (hereinafter sometimes referred to as "EO polymer") is a polymer that exhibits a second-order nonlinear optical effect and includes (1) a guest-host type electro-optic polymer obtained by mixing a matrix polymer and electro-optic molecules, (2) a side-chain type electro-optic polymer in which electro-optic molecules are covalently bonded to the side chains of a base polymer, (3) a main-chain type electro-optic polymer in which electro-optic molecules are covalently bonded to the main chain of a base polymer, (4) a cross-link type electro-optic polymer crosslinked between matrix polymers or between base polymers, or between a matrix polymer or base polymer and electro-optic molecules, etc., or (5) a molecular glass type electro-optic polymer. A guest-host type electro-optic polymer can also be understood as a composition containing a matrix polymer and electro-optic molecules.

[0021] "Matrix polymer" refers to the polymer that forms the base of the electro-optic polymer. The matrix polymer includes an organic polymer that serves as the host for a guest-host type electro-optic polymer. "Base polymer" refers to the polymer that forms the basic skeleton of the electro-optic polymer. The base polymer includes an organic polymer that forms the polymer backbone in side-chain type, back-chain type, or cross-link type electro-optic polymers. As the matrix polymer and base polymer, transparent polymers that do not scatter are preferred for use as optical materials. Examples include (meth)acrylate polymers (e.g., polymethyl methacrylate (PMMA)), polyamides, polyimides, polycarbonates (e.g., poly[Bisphenol A carbonate-co-4,4'-(3,3,5-trimethylcyclo-hexylidene)diphenol carbonate], polydicyclopentanyl methacrylate (poly DCPMA), polyadamantyl methacrylate (poly AdMA), poly(DCPMA-co-MMA), poly(AdMA-co-MMA)), cycloolefin polymers, cycloolefin copolymers, polystyrene, polyethylene, polymethylpentene, polypropylene, polyvinyl alcohol (PVA), polyethylene terephthalate, polysulfone, polyethersulfone, polyester, polyolefin, polyphenylene sulfide, polyurea, silicone resins, epoxy resins, fluororesins, and the like. The above organic polymers may be used individually or in combination of multiple types.

[0022] "Electro-optic molecules" refer to compounds that exhibit second-order nonlinear optical effects. Examples of electro-optic molecules include compounds that exhibit second-order nonlinear optical effects as described in U.S. Patent No. 6067186, Japanese Patent Publication No. 2004-501159, International Publication No. WO2011 / 024774A1, "Organic Materials for Nonlinear Optics" (edited by the Chemical Society of Japan, Quarterly Review of Chemistry No. 15 (1992)), "Organic Nonlinear Optical Materials" (Ch. Bosshard, et. al., Gordon and Breach Publishers (1995)), "Latest Technologies in Organic Optical Materials for Information and Communication" (supervised by Toshikuni Kaino, CMC Publishing (2007)), and "Molecular Nonlinear Optics" (ed. J. Zyss, Academic Press (1994)).

[0023] Electro-optic molecules are not particularly limited as long as they are compounds that exhibit a second-order nonlinear optical effect, but it is preferable that they have a conjugated chemical structure and further have electron-donating and electron-withdrawing groups within the molecule. Examples of conjugated chemical structures include aromatic compounds such as benzene, naphthalene, anthracene, perylene, biphenyl, indene, and stilbene; heterocyclic compounds such as furan, pyran, pyrrole, imidazole, pyrazole, thiophene, thiazole, pyridine, pyridazine, pyrimidine, pyrazine, quinoline, and coumarin; and compounds in which these compounds are linked to each other via carbon-carbon unsaturated bonds or nitrogen-nitrogen unsaturated bonds.

[0024] Examples of electron-donating groups include amino groups, alkoxy groups, allyloxy groups, and thioether groups, which may be substituted with alkyl, aryl, or acyl groups. Examples of electron-withdrawing groups include nitro groups, cyano groups, dicyanovinyl groups, tricyanovinyl groups, halogen atoms, carbonyl groups, sulfone groups, perfluoroalkyl groups, tricyanovinylfurans, and tricyanofurans.

[0025] Examples of electro-optic molecules include those represented by the following structural formulas [A-1] to [A-7]. These can be used individually or in combination of two or more types.

[0026] [ka]

[0027] [ka]

[0028] The content of electro-optic molecules is not particularly limited, but is usually about 1-70% by mass, preferably about 5-60% by mass, and more preferably about 10-50% by mass, relative to the total amount of the matrix polymer or base polymer and the electro-optic molecules (corresponding to the total mass of the electro-optic polymer). The above content is the same whether the electro-optic polymer is in the form of a side chain type or a main chain type. Here, in the case of a side chain type electro-optic polymer, the content of electro-optic molecules shall be determined based on the electro-optic molecules from which the side chain portion originates. In the case of a main chain type electro-optic polymer, the content of electro-optic dyes shall be determined based on the electro-optic molecular portion in the main chain.

[0029] The electro-optic polymer may be, for example, a side-chain type electro-optic polymer having repeating units represented by formulas (1) to (3). In the formulas, p, q, and r are each positive integers. Here, the side-chain type electro-optic polymer may be a copolymer of repeating units constituting a base polymer that does not contain the electro-optic molecular portion as a side chain (for example, repeating units represented by formulas (1) and (3)) and repeating units constituting a base polymer that does contain the electro-optic molecular portion as a side chain (for example, repeating units represented by formula (2)). In this case, the copolymer may be a random copolymer, a block copolymer, or a graft copolymer.

[0030]

Chem.

[0031] Referring to FIGS. 2 and 3, the lower cladding layer 16 is disposed between the first lower antenna electrode 22 and the core layer 17 in the normal direction (z direction) of the first main surface 15a. The lower cladding layer 16 is disposed between the second lower antenna electrode 32 and the core layer 17 in the normal direction (z direction) of the first main surface 15a. The lower cladding layer 16 is disposed between the spacer layer 12 and the core layer 17 in the normal direction (z direction) of the first main surface 15a. The lower cladding layer 16 has a refractive index smaller than that of the core layer 17. When the optical waveguide 15 includes the lower cladding layer 16, the second main surface 15b of the optical waveguide 15 is formed by the lower cladding layer 16. The lower cladding layer 16 reduces the absorption of the light 45 propagating through the core layer 17 by the first lower antenna electrode 22 and the second lower antenna electrode 32.

[0032] The lower cladding layer 16 is formed of a material having an electrical resistivity greater than, for example, 10 4 Ω·m. The lower cladding layer 16 may be formed of a material having an electrical resistivity greater than 10 6 Ω·m, may be formed of a material having an electrical resistivity greater than 10 8 Ω·m, may be formed of a material having an electrical resistivity greater than 10 9 Ω·m, may be formed of a material having an electrical resistivity greater than 10 10 Ω·m, may be formed of a material having an electrical resistivity greater than 10 12 Ω·m. Therefore, the absorption of the electromagnetic wave 40 (see FIGS. 2, 3 and 14) by the lower cladding layer 16 can be reduced.

[0033] The lower cladding layer 16 is not particularly limited, but may be formed from a resin such as cycloolefin polymer (e.g., ZEONEX (registered trademark of Nippon Zeon), ZEONOR (registered trademark of Nippon Zeon), or ARTON (registered trademark of JSR), etc.), cycloolefin copolymer (e.g., TOPAS (registered trademark of Topas Advanced Polymers GmbH), or APEL (registered trademark of Mitsui Chemicals), etc.), polyethylene, polystyrene, polycarbonate, or polymethyl methacrylate (PMMA). The lower cladding layer 16 may be formed from a semiconductor material such as silicon (Si), from a glass such as BK7 or quartz glass, from an oxide such as silicon dioxide (SiO2) or aluminum oxide (Al2O3), or from a fluororesin such as polytetrafluoroethylene (PTFE) or CYTOP (registered trademark of Asahi Glass).

[0034] The upper cladding layer 18 is positioned between the first upper antenna electrode 26 and the core layer 17 in the direction normal to the first main surface 15a (z-direction). The upper cladding layer 18 is positioned between the second upper antenna electrode 36 and the core layer 17 in the direction normal to the first main surface 15a (z-direction). The upper cladding layer 18 has a lower refractive index than the core layer 17. When the optical waveguide 15 includes the upper cladding layer 18, at least a portion of the first main surface 15a of the optical waveguide 15 is formed by the upper cladding layer 18. The upper cladding layer 18 reduces the absorption of light 45 propagating through the core layer 17 by the first upper antenna electrode 26 and the second upper antenna electrode 36.

[0035] The upper cladding layer 18 is, for example, 10 4 It is made of a material having an electrical resistivity greater than Ω·m. The upper cladding layer 18 is 10 6 It may be formed from a material having an electrical resistivity greater than Ω·m, 10 8 It may be formed from a material having an electrical resistivity greater than Ω·m, 10 9 It may be formed from a material having an electrical resistivity greater than Ω·m, 10 10It may be formed from a material having an electrical resistivity greater than Ω·m, 10 12 It may be formed from a material having an electrical resistivity greater than Ω·m. This can reduce the absorption of electromagnetic waves 40 (see Figures 2, 3, and 14) by the upper cladding layer 18.

[0036] The upper cladding layer 18 may be formed from the same material as the lower cladding layer 16, or from a different material than the lower cladding layer 16. The upper cladding layer 18 is not particularly limited, but for example, it is formed from an ultraviolet curing resin (e.g., FE4048, manufactured by NTT-AT). The upper cladding layer 18 may be formed from a resin such as a cycloolefin polymer (e.g., ZEONEX (registered trademark of Nippon Zeon), ZEONOR (registered trademark of Nippon Zeon), or ARTON (registered trademark of JSR), etc.), a cycloolefin copolymer (e.g., TOPAS (registered trademark of Topas Advanced Polymers GmbH), or APEL (registered trademark of Mitsui Chemicals), etc.), polyethylene, polystyrene, polycarbonate, or polymethyl methacrylate (PMMA); it may be formed from a semiconductor material such as silicon (Si); it may be formed from glass such as BK7 or quartz glass; it may be formed from an oxide such as silicon dioxide (SiO2) or aluminum oxide (Al2O3); or it may be formed from a fluororesin such as polytetrafluoroethylene (PTFE) or CYTOP (registered trademark of Asahi Glass).

[0037] The first antenna electrode 21 is formed of a conductive material such as gold (Au). The first antenna electrode 21 may also be formed of a metallic material such as silver (Ag), copper (Cu), platinum (Pt), aluminum (Al), chromium (Cr), or titanium (Ti), or a transparent conductive material such as ITO, IZO, or IGZO. Referring to Figures 1 to 3, the first antenna electrode 21 includes a first upper antenna electrode 26 and a first lower antenna electrode 22.

[0038] The first upper antenna electrode 26 is provided on the first main surface 15a of the optical waveguide 15. The first upper antenna electrode 26 has a thickness of, for example, 200 nm in the direction normal to the first main surface 15a (z-direction). The first upper antenna electrode 26 may have a thickness of 100 μm or less, 10 μm or less, or 1 μm or less in the direction normal to the first main surface 15a (z-direction). The first distance t1 between the first upper antenna electrode 26 and the core layer 17 in the direction normal to the first main surface 15a (z-direction) is, for example, 20 μm or less. The first distance t1 may be 10 μm or less, or 5 μm or less.

[0039] The first upper antenna electrode 26 includes a first edge 27 that is proximal to the centerline 17c of the core layer 17 in a plan view of the first main surface 15a. The first edge 27 extends along the longitudinal direction (x direction) of the core layer 17. In a plan view of the first main surface 15a, the first centerline 26c of the first upper antenna electrode 26 in the width direction (±y direction) of the core layer 17 is offset in the first width direction (+y direction) relative to the centerline 17c of the core layer 17. The first width direction is one side of the width direction (±y direction) of the core layer 17. In a plan view of the first main surface 15a, the first edge 27 overlaps with the core layer 17. More specifically, in a plan view of the first main surface 15a, the first edge 27 coincides with the centerline 17c of the core layer 17.

[0040] The portion of the first upper antenna electrode 26 that is far from the center line 17c of the core layer 17 in the width direction (±y direction) of the core layer 17 mainly functions as an antenna that receives electromagnetic waves 40 (see Figures 2, 3 and 14). The portion of the first upper antenna electrode 26 that is close to the center line 17c of the core layer 17 in the width direction (±y direction) of the core layer 17 mainly functions as a modulation electrode that applies an electric field to the core layer 17 based on the electromagnetic waves 40 received by the antenna. In this specification, "electromagnetic waves" means electromagnetic waves having a frequency of 0.2 GHz or more and 100 THz or less, and includes terahertz waves, microwaves, millimeter waves, infrared light, etc. The first upper antenna electrode 26 includes a rectangular antenna. That is, in a plan view of the first main surface 15a, the portion of the first upper antenna electrode 26 that functions as an antenna has a rectangular shape. The shape of the first upper antenna electrode 26 is not particularly limited.

[0041] The first lower antenna electrode 22 is provided on the spacer layer 12. The first lower antenna electrode 22 is provided, for example, in a recess 13 (see Figure 2) formed in the spacer layer 12. The first lower antenna electrode 22 is provided on the second main surface 15b of the optical waveguide 15. The first lower antenna electrode 22 has a thickness of, for example, 200 nm in the direction normal to the first main surface 15a (z-direction). The first lower antenna electrode 22 may have a thickness of 100 μm or less, 10 μm or less, or 1 μm or less in the direction normal to the first main surface 15a (z-direction). The second distance t2 between the first lower antenna electrode 22 and the core layer 17 in the direction normal to the first main surface 15a (z-direction) is, for example, 20 μm or less. The second distance t2 may be 10 μm or less, or 5 μm or less.

[0042] The first lower antenna electrode 22 includes a second edge 23 that is proximal to the centerline 17c of the core layer 17 in a plan view of the first main surface 15a. The second edge 23 extends along the longitudinal direction (x direction) of the core layer 17. In a plan view of the first main surface 15a, the second centerline 22c of the first lower antenna electrode 22 in the width direction (±y direction) of the core layer 17 is offset in the second width direction (-y direction) relative to the centerline 17c of the core layer 17. The second width direction is opposite to the first width direction (+y direction) and is the other side of the width direction (±y direction) of the core layer 17. In a plan view of the first main surface 15a, the first lower antenna electrode 22 is positioned symmetrically with respect to the first upper antenna electrode 26 with respect to the centerline 17c of the core layer 17. In a plan view of the first main surface 15a, the second edge 23 overlaps the core layer 17. More specifically, in a plan view of the first main surface 15a, the second edge 23 coincides with the centerline 17c of the core layer 17.

[0043] The portion of the first lower antenna electrode 22 that is far from the center line 17c of the core layer 17 in the width direction (±y direction) of the core layer 17 mainly functions as an antenna that receives electromagnetic waves 40. The portion of the first lower antenna electrode 22 that is close to the center line 17c of the core layer 17 in the width direction (±y direction) of the core layer 17 mainly functions as a modulation electrode that applies an electric field to the core layer 17 based on the electromagnetic waves 40 received by the antenna. The first lower antenna electrode 22 includes a rectangular antenna. That is, in a plan view of the first main surface 15a, the portion of the first lower antenna electrode 22 that functions as an antenna has a rectangular shape. The shape of the first lower antenna electrode 22 is not particularly limited. In a plan view of the first main surface 15a, at least a part of the first lower antenna electrode 22 is exposed from the first upper antenna electrode 26. Specifically, in a plan view of the first main surface 15a, at least a part of the portion of the first lower antenna electrode 22 that functions as an antenna is exposed from the first upper antenna electrode 26.

[0044] The second antenna electrode 31 is formed of a conductive material such as gold (Au). The second antenna electrode 31 may be formed of a metallic material such as silver (Ag), copper (Cu), platinum (Pt), aluminum (Al), chromium (Cr), or titanium (Ti), or a transparent conductive material such as ITO, IZO, or IGZO. Referring to Figure 1, the second antenna electrode 31 is spaced apart from the first antenna electrode 21 in the longitudinal direction (x direction) of the core layer 17. Referring to Figures 1 to 3, the second antenna electrode 31 includes a second upper antenna electrode 36 and a second lower antenna electrode 32.

[0045] The second upper antenna electrode 36 is provided on the first main surface 15a of the optical waveguide 15. The second upper antenna electrode 36 has a thickness of, for example, 200 nm in the direction normal to the first main surface 15a (z-direction). The second upper antenna electrode 36 may have a thickness of 100 μm or less, 10 μm or less, or 1 μm or less in the direction normal to the first main surface 15a (z-direction). The third distance t3 between the second upper antenna electrode 36 and the core layer 17 in the direction normal to the first main surface 15a (z-direction) is, for example, 20 μm or less. The third distance t3 may be 10 μm or less, or 5 μm or less.

[0046] The second upper antenna electrode 36 includes a third edge 37 that is proximal to the centerline 17c of the core layer 17 in a plan view of the first main surface 15a. The third edge 37 extends along the longitudinal direction (x direction) of the core layer 17. In a plan view of the first main surface 15a, the third centerline 36c of the second upper antenna electrode 36 in the width direction (±y direction) of the core layer 17 is offset in the second width direction (-y direction) relative to the centerline 17c of the core layer 17. In a plan view of the first main surface 15a, the third edge 37 overlaps with the core layer 17. More specifically, in a plan view of the first main surface 15a, the third edge 37 coincides with the centerline 17c of the core layer 17.

[0047] The portion of the second upper antenna electrode 36 that is far from the center line 17c of the core layer 17 in the width direction (±y direction) of the core layer 17 mainly functions as an antenna that receives electromagnetic waves 40. The portion of the second upper antenna electrode 36 that is close to the center line 17c of the core layer 17 in the width direction (±y direction) of the core layer 17 mainly functions as a modulation electrode that applies an electric field to the core layer 17 based on the electromagnetic waves 40 received by the antenna. The second upper antenna electrode 36 includes a rectangular antenna. That is, in a plan view of the first main surface 15a, the portion of the second upper antenna electrode 36 that functions as an antenna has a rectangular shape. The shape of the second upper antenna electrode 36 is not particularly limited.

[0048] The second lower antenna electrode 32 is provided on the spacer layer 12. The second lower antenna electrode 32 is provided, for example, in a recess 14 (see Figure 3) formed in the spacer layer 12. The second lower antenna electrode 32 is provided on the second main surface 15b of the optical waveguide 15. The second lower antenna electrode 32 has a thickness of, for example, 200 nm in the direction normal to the first main surface 15a (z-direction). The second lower antenna electrode 32 may have a thickness of 100 μm or less, 10 μm or less, or 1 μm or less in the direction normal to the first main surface 15a (z-direction). The fourth distance t4 between the second lower antenna electrode 32 and the core layer 17 in the direction normal to the first main surface 15a (z-direction) is, for example, 20 μm or less. The fourth distance t4 may be 10 μm or less, or 5 μm or less.

[0049] The second lower antenna electrode 32 includes a fourth edge 33 that is proximal to the centerline 17c of the core layer 17 in a plan view of the first main surface 15a. The fourth edge 33 extends along the longitudinal direction (x direction) of the core layer 17. In a plan view of the first main surface 15a, the fourth centerline 32c of the second lower antenna electrode 32 in the width direction (±y direction) of the core layer 17 is offset in the first width direction (+y direction) relative to the centerline 17c of the core layer 17. In a plan view of the first main surface 15a, the second lower antenna electrode 32 is positioned symmetrically with respect to the second upper antenna electrode 36 with respect to the centerline 17c of the core layer 17. In a plan view of the first main surface 15a, the fourth edge 33 overlaps with the core layer 17. More specifically, in a plan view of the first main surface 15a, the fourth edge 33 coincides with the centerline 17c of the core layer 17.

[0050] The portion of the second lower antenna electrode 32 that is far from the center line 17c of the core layer 17 in the width direction (±y direction) of the core layer 17 mainly functions as an antenna that receives electromagnetic waves 40. The portion of the second lower antenna electrode 32 that is close to the center line 17c of the core layer 17 in the width direction (±y direction) of the core layer 17 mainly functions as a modulation electrode that applies an electric field to the core layer 17 based on the electromagnetic waves 40 received by the antenna. The second lower antenna electrode 32 includes a rectangular antenna. That is, in a plan view of the first main surface 15a, the portion of the second lower antenna electrode 32 that functions as an antenna has a rectangular shape. The shape of the second lower antenna electrode 32 is not particularly limited. In a plan view of the first main surface 15a, at least a part of the second lower antenna electrode 32 is exposed from the second upper antenna electrode 36. Specifically, in a plan view of the first main surface 15a, at least a part of the portion of the second lower antenna electrode 32 that functions as an antenna is exposed from the second upper antenna electrode 36.

[0051] The arrangement pitch P of the first antenna electrode 21 and the second antenna electrode 31 in the longitudinal direction (x direction) of the core layer 17 is appropriately determined according to the wavelength of the electromagnetic wave 40 received by the first antenna electrode 21 and the second antenna electrode 31 and the refractive index of the core layer 17 with respect to the light propagating through the core layer 17. The arrangement pitch P is, for example, 0.5 μm or more and 50 mm or less.

[0052] In the electro-optic polymer element 1, multiple antenna electrode pairs 20a and 20b are periodically arranged along the longitudinal direction (x-direction) of the core layer 17. Each of the multiple antenna electrode pairs 20a and 20b includes a first antenna electrode 21 and a second antenna electrode 31. The arrangement period Q of the multiple antenna electrode pairs 20a and 20b in the longitudinal direction (x-direction) of the core layer 17 is appropriately determined according to the wavelength of the electromagnetic wave 40 received by the multiple antenna electrode pairs 20a and 20b and the refractive index of the core layer 17 with respect to the light propagating through the core layer 17. The arrangement period Q is, for example, 1 μm or more and 100 mm or less. The arrangement period Q of the multiple antenna electrode pairs 20a and 20b is, for example, twice the arrangement pitch P between the first antenna electrode 21 and the second antenna electrode 31.

[0053] An example of a method for manufacturing the electro-optic polymer element 1 of this embodiment will be described with reference to Figures 1, 2, and 4 through 13.

[0054] Referring to Figure 4, a ground electrode 11 is formed on the main surface 10a of the substrate 10 by sputtering or the like. To improve the adhesion between the ground electrode 11 and the spacer layer 12, the ground electrode 11 may be covered with, for example, a silicon dioxide film (not shown). Referring to Figure 5, the ground electrode 11 and the spacer layer 12 are pre-treated to improve the adhesion between them. For example, the surfaces of the ground electrode 11 and the spacer layer 12 are subjected to oxygen plasma treatment using a reactive ion etching (RIE) apparatus or the like. The spacer layer 12 is pressed onto the substrate 10 while heating the spacer layer 12 and the substrate 10 at a temperature lower than the glass transition temperature of the spacer layer 12 (for example, 100°C). In this way, the spacer layer 12 is formed on the ground electrode 11. The spacer layer 12 may be formed by spin coating or the like. A resist pattern (not shown) is formed on the spacer layer 12 by photolithography or the like. A portion of the spacer layer 12 is removed using a resist pattern by reactive ion etching or the like to form recesses 13 and 14 (not shown).

[0055] Referring to Figure 6, the first lower antenna electrode 22 and the second lower antenna electrode 32 (not shown) are formed on the spacer layer 12 by sputtering or the like. Specifically, the first lower antenna electrode 22 is formed in the recess 13, and the second lower antenna electrode 32 is formed in the recess 14 (not shown).

[0056] Referring to Figure 7, in order to improve the adhesion between the first lower antenna electrode 22 and the lower cladding layer 16, the adhesion between the second lower antenna electrode 32 and the lower cladding layer 16, and the adhesion between the spacer layer 12 and the lower cladding layer 16, the first lower antenna electrode 22, the second lower antenna electrode 32, the spacer layer 12, and the lower cladding layer 16 are pre-treated. For example, the surfaces of the first lower antenna electrode 22, the second lower antenna electrode 32, the spacer layer 12, and the lower cladding layer 16 are subjected to oxygen plasma treatment using a reactive ion etching (RIE) apparatus or the like. The lower cladding layer 16 is pressed onto the substrate 10 while heating the lower cladding layer 16 and the substrate 10 at a temperature lower than the glass transition temperature of the spacer layer 12 and the glass transition temperature of the lower cladding layer 16 (for example, 100°C). In this way, a lower cladding layer 16 is formed on the first lower antenna electrode 22, the second lower antenna electrode 32, and the spacer layer 12. The lower cladding layer 16 may be formed by a spin coating method or the like.

[0057] A method for preparing an electro-optic polymer layer 55 with oriented electro-optic molecules will be described with reference to Figures 8 and 9.

[0058] Referring to Figure 8, a lower electrode 51 is formed on the support 50 by sputtering or the like. The support 50 is not particularly limited, but is formed of a semiconductor material such as silicon (Si), or a material containing glass such as BK7 or quartz glass. The lower electrode 51 is formed of a conductive material such as IZO. An electro-optic polymer is applied to the lower electrode 51 by spin coating or the like. The electro-optic polymer is heat-annealed. In this way, an electro-optic polymer layer 52 is formed. The electro-optic polymer layer 52 is formed of an electro-optic polymer containing electro-optic molecules. The electro-optic molecules are not yet oriented. An upper electrode 53 is formed on the electro-optic polymer layer 52 by sputtering or the like. The upper electrode 53 is formed of a conductive material such as IZO.

[0059] Referring to Figure 9, the lower electrode 51 and the upper electrode 53 are connected to the power supply 54. The electro-optic polymer layer 52 is subjected to a polling process. Specifically, a voltage (e.g., an electric field strength of 100 V / μm) is applied between the lower electrode 51 and the upper electrode 53 while heating the electro-optic polymer layer 52 to a temperature near its glass transition temperature (e.g., 150°C). This polling process causes the electro-optic molecules contained in the electro-optic polymer layer 52 to orient along the direction in which the upper electrode 53 and the lower electrode 51 are separated from each other (the normal direction (z direction) of the first main surface 15a). In this way, an electro-optic polymer layer 55 with oriented electro-optic molecules is obtained.

[0060] Referring to Figure 10, the upper electrode 53 is removed by wet etching or the like. Then, to increase the bonding strength between the electro-optic polymer layer 55 and the lower cladding layer 16, the electro-optic polymer layer 55 and the lower cladding layer 16 are pre-treated. For example, the surface of the electro-optic polymer layer 55 from which the upper electrode 53 has been removed is subjected to oxygen plasma treatment using a reactive ion etching (RIE) apparatus or the like. The surface of the lower cladding layer 16 is subjected to oxygen plasma treatment using a reactive ion etching (RIE) apparatus or the like, and then surface treatment is performed with a silane coupling agent having an amino group or the like. The support 50 and the substrate 10 are pressed together while heating the support 50 and the substrate 10 at a temperature lower than the glass transition temperature of the electro-optic polymer layer 55 (for example, 100°C). Referring to Figure 11, the support 50 and the lower electrode 51 are removed from the electro-optic polymer layer 55. In this way, the electro-optic polymer layer 55 with oriented electro-optic molecules is transferred onto the lower cladding layer 16.

[0061] Referring to Figure 12, a resist pattern (not shown) is formed on the electro-optic polymer layer 55 by photolithography or the like. The electro-optic polymer layer 55, on which electro-optic molecules are oriented using the resist pattern, is processed by dry etching or the like to form a core layer 17. Referring to Figure 13, an ultraviolet-curable resin is applied to the core layer 17 by spin coating or the like. The ultraviolet-curable resin is cured by irradiating it with ultraviolet light. In this way, an upper cladding layer 18 is formed. A resist pattern (not shown) is formed on the upper cladding layer 18 by photolithography or the like. A first upper antenna electrode 26 and a second upper antenna electrode 36 (not shown) are formed by sputtering or the like. In this way, the electro-optic polymer element 1 shown in Figures 1 to 3 is obtained.

[0062] In one example of the manufacturing method for the electro-optic polymer element 1 of this embodiment, the electro-optic polymer layer 55 is subjected to polling using an upper electrode 53 and a lower electrode 51 separate from the first antenna electrode 21 and the second antenna electrode 31. Therefore, the electrical resistivity of the lower cladding layer 16 and the electrical resistivity of the upper cladding layer 18 can be made higher than the electrical resistivity of the core layer 17 (electro-optic polymer layer 55). For example, the electrical resistivity of the core layer 17 (electro-optic polymer layer 55) is 10 6 Ω m or more 10 8 While the resistivity is less than or equal to Ω·m, the electrical resistivity of the lower cladding layer 16 and the electrical resistivity of the upper cladding layer 18 are, each, 10 8 It is greater than Ω·m. And, generally, as the electrical resistivity of a layer increases, the absorption of electromagnetic waves in that layer decreases. Therefore, the absorption of electromagnetic waves 40 by the lower cladding layer 16 and the upper cladding layer 18 can be reduced.

[0063] In contrast, in the comparative example's method for manufacturing an electro-optic polymer element, at least one of the upper cladding layer 18 or the lower cladding layer 16 is placed between the pair of polling electrodes in addition to the electro-optic polymer layer 55. The polling process of the electro-optic polymer layer 55 applies the polling field not only to the core layer 17 but also to at least one of the upper cladding layer 18 or the lower cladding layer 16. Therefore, if at least one of the upper cladding layer 18 or the lower cladding layer 16 has a higher electrical resistivity than the electro-optic polymer layer 55, the polling voltage is not efficiently applied to the electro-optic polymer layer 55. Consequently, the electro-optic molecules in the electro-optic polymer layer 55 cannot be sufficiently oriented. The performance of the electro-optic polymer element manufactured by the comparative example's method is lower than that of the electro-optic polymer element 1 manufactured by the method of this embodiment.

[0064] The operation and function of the electro-optic polymer element 1 of this embodiment will be explained with reference to Figures 1 to 3 and Figure 14.

[0065] Light 45 is incident on the core layer 17. Light 45 propagates through the core layer 17. Light 45 is, for example, a laser light having a near-infrared wavelength (e.g., 1.535 μm), although it is not particularly limited. Electromagnetic waves 40 are incident on the electro-optic polymer element 1. Electromagnetic waves 40 include an electric field component along the width direction (±y direction) of the core layer 17.

[0066] The first antenna electrodes 21 (first upper antenna electrode 26 and first lower antenna electrode 22) receive electromagnetic waves 40. In this embodiment, in a plan view of the first main surface 15a, the second center line 22c of the first lower antenna electrode 22 is offset in the opposite direction to the first center line 26c of the first upper antenna electrode 26 relative to the center line 17c of the core layer 17. The electromagnetic waves 40 can reach the first lower antenna electrode 22 without being blocked by the first upper antenna electrode 26. Therefore, the first antenna electrode 21 can efficiently receive the electric field component of the electromagnetic waves 40 that is aligned with the width direction (±y direction) of the core layer 17.

[0067] Furthermore, the first antenna electrodes 21 (first upper antenna electrode 26 and first lower antenna electrode 22) apply an electric field to the core layer 17 based on the electromagnetic wave 40 received by the first antenna electrodes 21. This electric field is concentrated at the portion of the first edge 27 of the first upper antenna electrode 26 that contacts the optical waveguide 15 (the corner of the first upper antenna electrode 26) and at the portion of the second edge 23 of the first lower antenna electrode 22 that contacts the optical waveguide 15 (the corner of the first lower antenna electrode 22). In this embodiment, in a plan view of the first main surface 15a, the first edge 27 of the first upper antenna electrode 26 and the second edge 23 of the first lower antenna electrode 22 overlap the core layer 17. Therefore, the core layer 17 is located on a straight line connecting the portion of the first edge 27 of the first upper antenna electrode 26 that contacts the optical waveguide 15 (the corner of the first upper antenna electrode 26) and the portion of the second edge 23 of the first lower antenna electrode 22 that contacts the optical waveguide 15 (the corner of the first lower antenna electrode 22). Furthermore, the direction of the electric field applied to the core layer 17 by the first upper antenna electrode 26 and the first lower antenna electrode 22 becomes more parallel to the orientation direction of the electro-optic molecules (the normal direction (z direction) of the first main surface 15a). The component of the electric field applied to the core layer 17 from the first antenna electrode 21 that is aligned with the orientation direction (z direction) of the electro-optic molecules can be increased.

[0068] In this way, the light 45 propagating through the core layer 17 is efficiently modulated by the electric field based on the electromagnetic wave 40 received by the first antenna electrode 21. The optical modulation efficiency of the electro-optic polymer element 1 is improved.

[0069] The second antenna electrode 31 (second upper antenna electrode 36 and second lower antenna electrode 32) also receives electromagnetic waves 40, similar to the first antenna electrode 21 (first upper antenna electrode 26 and first lower antenna electrode 22). The light 45 propagating through the core layer 17 is efficiently modulated by the electric field based on the electromagnetic waves 40 received by the first antenna electrode 21 and the second antenna electrode 31. The optical modulation efficiency of the electro-optic polymer element 1 is improved.

[0070] For example, as shown in Figure 14, when light 45 propagating through the core layer 17 reaches the first antenna electrode 21, the peak 41a of the electromagnetic wave 40 reaches the first antenna electrode 21. When light 45 propagating through the core layer 17 reaches the second antenna electrode 31, the trough 42a of the electromagnetic wave 40 reaches the second antenna electrode 31. In this way, light 45 propagating through the core layer 17 is modulated at the first antenna electrode 21 and the second antenna electrode 31 by the electric field based on the peak 41a of the electromagnetic wave 40 and the electric field based on the trough 42a of the electromagnetic wave 40.

[0071] Furthermore, in the electro-optic polymer element 1, multiple antenna electrode pairs 20a and 20b are periodically arranged along the longitudinal direction (x-direction) of the core layer 17. Each of the multiple antenna electrode pairs 20a and 20b includes a first antenna electrode 21 and a second antenna electrode 31. The light 45 propagating through the core layer 17 is efficiently modulated by the electric field based on the electromagnetic wave 40 received by the multiple antenna electrode pairs 20a and 20b. The optical modulation efficiency of the electro-optic polymer element 1 is improved.

[0072] For example, as shown in Figure 14, when light 45 propagating through the core layer 17 reaches the first antenna electrode 21 of the antenna electrode pair 20a, the peak 41a of the electromagnetic wave 40 reaches the first antenna electrode 21 of the antenna electrode pair 20a. When light 45 propagating through the core layer 17 reaches the second antenna electrode 31 of the antenna electrode pair 20a, the trough 42a of the electromagnetic wave 40 reaches the second antenna electrode 31 of the antenna electrode pair 20a. When light 45 propagating through the core layer 17 reaches the first antenna electrode 21 of the antenna electrode pair 20b, the peak 41b of the electromagnetic wave 40 reaches the first antenna electrode 21 of the antenna electrode pair 20b. When light 45 propagating through the core layer 17 reaches the second antenna electrode 31 of the antenna electrode pair 20b, the trough 42b of the electromagnetic wave 40 reaches the second antenna electrode 31 of the antenna electrode pair 20b. In this way, the light 45 propagating through the core layer 17 is repeatedly modulated at the first antenna electrode 21 and the second antenna electrode 31 of the multiple antenna electrode pairs 20a and 20b by the electric fields based on the peaks 41a and 41b of the electromagnetic wave 40 and the electric fields based on the troughs 42a and 42b of the electromagnetic wave 40.

[0073] (modified version) The core layer 17 may be a channel-type core layer as shown in Figures 15 and 16, or it may be a rib-type core layer, etc. The core layer 17 may also be a photobleached core layer manufactured by photobleaching electro-optic molecules in a portion of the core layer 17 that is a certain distance or more from the center line 17c of the core layer 17 in the width direction (±y direction) of the core layer 17 to reduce the refractive index of that portion.

[0074] As shown in Figures 17 and 18, the first upper antenna electrode 26, the first lower antenna electrode 22, the second upper antenna electrode 36 (not shown), and the second lower antenna electrode 32 (not shown) may be in contact with the core layer 17. That is, the lower cladding layer 16 may be omitted, and the upper cladding layer 18 may not be provided on the core layer 17. Therefore, the component of the electric field applied to the core layer 17 from the first antenna electrode 21 and the second antenna electrode 31 that is aligned with the orientation direction of the electro-optic molecules (z-direction) can be increased.

[0075] As shown in Figures 19 and 20, in the width direction (±y direction) of the core layer 17, the first edge 27 of the first upper antenna electrode 26 and the second edge 23 of the first lower antenna electrode 22 may be on opposite sides of each other with respect to the center line 17c of the core layer 17. In the width direction (±y direction) of the core layer 17, the third edge 37 of the second upper antenna electrode 36 and the fourth edge 33 of the second lower antenna electrode 32 may be on opposite sides of each other with respect to the center line 17c of the core layer 17. In a plan view of the first main surface 15a, the first lower antenna electrode 22 may be arranged symmetrically with respect to the first upper antenna electrode 26 with respect to the center line 17c of the core layer 17.

[0076] Specifically, in a plan view of the first main surface 15a, the first edge 27 of the first upper antenna electrode 26 may overlap with the core layer 17 and be offset in the first width direction (+y direction) with respect to the center line 17c of the core layer 17. In a plan view of the first main surface 15a, the second edge 23 of the first lower antenna electrode 22 may overlap with the core layer 17 and be offset in the second width direction (-y direction) with respect to the center line 17c of the core layer 17. In a plan view of the first main surface 15a, the third edge 37 of the second upper antenna electrode 36 may overlap with the core layer 17 and be offset in the second width direction (-y direction) with respect to the center line 17c of the core layer 17. In a plan view of the first main surface 15a, the fourth edge 33 of the second lower antenna electrode 32 may overlap with the core layer 17 and be offset in the first width direction (+y direction) with respect to the center line 17c of the core layer 17.

[0077] The optical waveguide 15 may include only the upper cladding layer 18 or the lower cladding layer 16. The optical waveguide 15 may not include both the upper cladding layer 18 and the lower cladding layer 16. Three or more pairs of antenna electrodes 20a, 20b may be arranged on the electro-optic polymer element 1, or one pair of antenna electrodes 20a, 20b may be arranged on the electro-optic polymer element 1. The second antenna electrode 31 may be omitted, and one first antenna electrode 21 may be arranged on the electro-optic polymer element 1.

[0078] The effects of the electro-optic polymer element 1 of this embodiment will be explained. The electro-optic polymer element 1 of this embodiment comprises an optical waveguide 15 and a first antenna electrode 21. The optical waveguide 15 has a first main surface 15a and a second main surface 15b opposite to the first main surface 15a. The optical waveguide 15 includes a core layer 17 formed of an electro-optic polymer. The first antenna electrode 21 includes a first upper antenna electrode 26 and a first lower antenna electrode 22. The electro-optic polymer contains electro-optic molecules. The electro-optic molecules are oriented along the normal direction (z direction) of the first main surface 15a. The first upper antenna electrode 26 is provided on the first main surface 15a. The first upper antenna electrode 26 includes a first edge 27 that is proximal to the center line 17c of the core layer 17 in the width direction (±y direction) of the core layer 17 in a plan view of the first main surface 15a. The width direction of the core layer 17 is perpendicular to the longitudinal direction (x direction) of the core layer 17 in a plan view of the first main surface 15a. The first lower antenna electrode 22 is provided on the second main surface 15b. The first lower antenna electrode 22 includes a second edge 23 that is proximal to the center line 17c of the core layer 17 in a plan view of the first main surface 15a. In a plan view of the first main surface 15a, the first center line 26c of the first upper antenna electrode 26 in the width direction of the core layer 17 is offset in the first width direction (+y direction) relative to the center line 17c of the core layer 17 in the width direction. The first width direction is one side of the width direction of the core layer 17. In a plan view of the first main surface 15a, the second center line 22c of the first lower antenna electrode 22 in the width direction of the core layer 17 is offset in the second width direction (-y direction) opposite to the first width direction relative to the center line 17c of the core layer 17. The second width direction is the other side of the width direction of the core layer 17. In a plan view of the first main surface 15a, the first edge 27 and the second edge 23 overlap the core layer 17. The first distance t1 between the first upper antenna electrode 26 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 20 μm or less. The second distance t2 between the first lower antenna electrode 22 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 20 μm or less.

[0079] In this embodiment, in a plan view of the first main surface 15a, the second centerline 22c of the first lower antenna electrode 22 is offset in the opposite direction to the first centerline 26c of the first upper antenna electrode 26 relative to the centerline 17c of the core layer 17. The electromagnetic wave 40 can reach the first lower antenna electrode 22 without being blocked by the first upper antenna electrode 26. Therefore, the first upper antenna electrode 26 and the first lower antenna electrode 22 can efficiently receive the electric field component of the electromagnetic wave 40 along the width direction (±y direction) of the core layer 17. Also in this embodiment, in a plan view of the first main surface 15a, the first edge 27 of the first upper antenna electrode 26 and the second edge 23 of the first lower antenna electrode 22 overlap the core layer 17. The first distance t1 is 20 μm or less, and the second distance t2 is 20 μm or less. Therefore, the component of the electric field applied from the first antenna electrode 21 to the core layer 17 that is aligned with the orientation direction (z-direction) of the electro-optic molecules can be increased. In this way, the optical modulation efficiency of the electro-optic polymer element 1 is improved.

[0080] In the electro-optic polymer element 1 of this embodiment, in a plan view of the first main surface 15a, the first edge 27 and the second edge 23 coincide with the center line 17c of the core layer 17.

[0081] Therefore, the component of the electric field applied from the first antenna electrode 21 to the core layer 17 that aligns with the orientation direction (z-direction) of the electro-optic molecules can be further increased. This improves the optical modulation efficiency of the electro-optic polymer element 1.

[0082] In the electro-optic polymer element 1 of this embodiment, the first edge 27 and the second edge 23 of the core layer 17 are on opposite sides of each other with respect to the center line 17c of the core layer 17 in the width direction (±y direction).

[0083] Therefore, the electromagnetic wave 40 can reach the first lower antenna electrode 22 without being blocked by the first upper antenna electrode 26. The first upper antenna electrode 26 and the first lower antenna electrode 22 can efficiently receive the electric field component of the electromagnetic wave 40 that is aligned with the width direction (±y direction) of the core layer 17. In addition, the component of the electric field applied from the first antenna electrode 21 to the core layer 17 that is aligned with the orientation direction (z direction) of the electro-optic molecules can be increased throughout the entire core layer 17. The optical modulation efficiency of the electro-optic polymer element 1 is improved.

[0084] The electro-optic polymer element 1 of this embodiment further comprises a ground electrode 11 and a spacer layer 12. The ground electrode 11 is positioned in the direction normal to the first main surface 15a (z-direction) on the opposite side of the first upper antenna electrode 26 with respect to the first lower antenna electrode 22, and overlaps the first upper antenna electrode 26 and the first lower antenna electrode 22 in a plan view of the first main surface 15a. The spacer layer 12 is positioned between the ground electrode 11 and the first lower antenna electrode 22. The spacer layer 12 is 10 4 It is made of a material having an electrical resistivity greater than Ω·m.

[0085] Therefore, the component of the electric field applied from the first antenna electrode 21 to the core layer 17 that is aligned with the orientation direction (z-direction) of the electro-optic molecules can be increased. This improves the optical modulation efficiency of the electro-optic polymer element 1.

[0086] The electro-optic polymer element 1 of this embodiment further comprises a second antenna electrode 31. The second antenna electrode 31 is positioned at a distance from the first antenna electrode 21 in the longitudinal direction (x direction) of the core layer 17. The second antenna electrode 31 includes a second upper antenna electrode 36 and a second lower antenna electrode 32. The second upper antenna electrode 36 is provided on the first main surface 15a. The second upper antenna electrode 36 includes a third edge 37 that is close to the center line 17c of the core layer 17 in a plan view of the first main surface 15a. The second lower antenna electrode 32 is provided on the second main surface 15b. The second lower antenna electrode 32 includes a fourth edge 33 that is close to the center line 17c of the core layer 17 in a plan view of the first main surface 15a. In a plan view of the first main surface 15a, the third centerline 36c of the second upper antenna electrode 36 in the width direction (±y direction) of the core layer 17 is offset in the second width direction (-y direction) relative to the centerline 17c of the core layer 17. In a plan view of the first main surface 15a, the fourth centerline 32c of the second lower antenna electrode 32 in the width direction of the core layer 17 is offset in the first width direction (+y direction) relative to the centerline 17c of the core layer 17. In a plan view of the first main surface 15a, the third edge 37 and the fourth edge 33 overlap the core layer 17. The third distance t3 between the second upper antenna electrode 36 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 20 μm or less. The fourth distance t4 between the second lower antenna electrode 32 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 20 μm or less.

[0087] Therefore, the light 45 propagating through the core layer 17 is modulated not only by the electric field applied to the core layer 17 from the first antenna electrode 21, but also by the electric field applied to the core layer 17 from the second antenna electrode 31. This improves the optical modulation efficiency of the electro-optic polymer element 1.

[0088] In the electro-optic polymer element 1 of this embodiment, a plurality of antenna electrode pairs 20a and 20b are periodically arranged along the longitudinal direction (x direction) of the core layer 17. Each of the plurality of antenna electrode pairs 20a and 20b includes a first antenna electrode 21 and a second antenna electrode 31.

[0089] Therefore, the light 45 propagating through the core layer 17 is repeatedly modulated by the electric field applied to the core layer 17 from multiple antenna electrode pairs 20a and 20b. This improves the optical modulation efficiency of the electro-optic polymer element 1.

[0090] In the electro-optic polymer element 1 of this embodiment, the optical waveguide 15 includes at least one of the upper cladding layer 18 or the lower cladding layer 16. The upper cladding layer 18 is located between the first upper antenna electrode 26 and the core layer 17 in the direction normal to the first main surface 15a (z-direction), and has a refractive index smaller than that of the core layer 17. The lower cladding layer 16 is located between the first lower antenna electrode 22 and the core layer 17 in the direction normal to the first main surface 15a (z-direction), and has a refractive index smaller than that of the core layer 17. At least one of the upper cladding layer 18 or the lower cladding layer 16 is 10 4 It is made of a material having an electrical resistivity greater than Ω·m.

[0091] At least one of the upper cladding layer 18 or the lower cladding layer 16 reduces the absorption of light 45 propagating through the core layer 17 by the first lower antenna electrode 22 and the second lower antenna electrode 32. Furthermore, the absorption of electromagnetic waves 40 by at least one of the upper cladding layer 18 or the lower cladding layer 16 is reduced. The component of the electric field applied from the first antenna electrode 21 to the core layer 17 that aligns with the orientation direction (z-direction) of the electro-optic molecules can be further increased. The optical modulation efficiency of the electro-optic polymer element 1 is improved.

[0092] (Embodiment 2) The electro-optic polymer element 1b of Embodiment 2 will be described with reference to Figures 22 to 24. The electro-optic polymer element 1b of this embodiment has the same configuration as the electro-optic polymer element 1 of Embodiment 1, but differs from the electro-optic polymer element 1 of Embodiment 1 mainly in the following points.

[0093] In the electro-optic polymer element 1b, in a plan view of the first main surface 15a, the first edge 27 of the first upper antenna electrode 26 and the second edge 23 of the first lower antenna electrode 22 are on opposite sides of each other with respect to the center line 17c of the core layer 17, and are separated from the core layer 17 in the width direction (±y direction).

[0094] Specifically, the first edge 27 of the first upper antenna electrode 26 is offset in the first width direction (+y direction) with respect to the center line 17c of the core layer 17. The first edge 27 of the first upper antenna electrode 26 is offset in the same direction as the first center line 26c of the first upper antenna electrode 26 with respect to the center line 17c of the core layer 17. In a plan view of the first main surface 15a, the distance d1 between the first edge 27 of the first upper antenna electrode 26 and the core layer 17 is greater than 0 μm and 20 μm or less. The distance d1 may be 10 μm or less, or 5 μm or less.

[0095] The second edge 23 of the first lower antenna electrode 22 is offset in the second width direction (-y direction) with respect to the center line 17c of the core layer 17. The second edge 23 of the first lower antenna electrode 22 is offset in the same direction as the second center line 22c of the first lower antenna electrode 22 with respect to the center line 17c of the core layer 17. In a plan view of the first main surface 15a, the distance d2 between the second edge 23 of the first lower antenna electrode 22 and the core layer 17 is greater than 0 μm and 20 μm or less. The distance d2 may be 10 μm or less, or 5 μm or less.

[0096] In a plan view of the first main surface 15a, the third edge 37 of the second upper antenna electrode 36 and the fourth edge 33 of the second lower antenna electrode 32 are on opposite sides of each other with respect to the center line 17c of the core layer 17, and are separated from the core layer 17 in the width direction (±y direction).

[0097] Specifically, the third edge 37 of the second upper antenna electrode 36 is offset in the second width direction (-y direction) with respect to the center line 17c of the core layer 17. The third edge 37 of the second upper antenna electrode 36 is offset in the same direction as the third center line 36c of the second upper antenna electrode 36 with respect to the center line 17c of the core layer 17. In a plan view of the first main surface 15a, the distance d3 between the third edge 37 of the second upper antenna electrode 36 and the core layer 17 is greater than 0 μm and 20 μm or less. The distance d3 may be 10 μm or less, or 5 μm or less.

[0098] The fourth edge 33 of the second lower antenna electrode 32 is offset in the first width direction (+y direction) with respect to the center line 17c of the core layer 17. The fourth edge 33 of the second lower antenna electrode 32 is offset in the same direction as the fourth center line 32c of the second lower antenna electrode 32 with respect to the center line 17c of the core layer 17. In a plan view of the first main surface 15a, the distance d4 between the fourth edge 33 of the second lower antenna electrode 32 and the core layer 17 is greater than 0 μm and 20 μm or less. The distance d4 may be 10 μm or less, or 5 μm or less.

[0099] The electro-optic polymer element 1b of this embodiment performs the same function as the electro-optic polymer element 1 of Embodiment 1, as described below.

[0100] For example, in the electro-optic polymer element 1b, the first edge 27 and the second edge 23 of the core layer 17 are on opposite sides of each other with respect to the center line 17c of the core layer 17 in the width direction (±y direction). Therefore, the core layer 17 is located on a straight line connecting the portion of the first edge 27 of the first upper antenna electrode 26 that contacts the optical waveguide 15 (the corner of the first upper antenna electrode 26) and the portion of the second edge 23 of the first lower antenna electrode 22 that contacts the optical waveguide 15 (the corner of the first lower antenna electrode 22). Furthermore, in a plan view of the first main surface 15a, the distance d1 between the first edge 27 of the first upper antenna electrode 26 and the core layer 17 is 20 μm or less, and the distance d2 between the second edge 23 of the first lower antenna electrode 22 and the core layer 17 is 20 μm or less. Therefore, the direction of the electric field applied to the core layer 17 by the first upper antenna electrode 26 and the first lower antenna electrode 22 becomes more parallel to the orientation direction of the electro-optic molecules (normal direction of the first main surface 15a (z direction)). The component of the electric field applied to the core layer 17 from the first antenna electrode 21 that is aligned with the orientation direction of the electro-optic molecules (z direction) can be increased.

[0101] The second antenna electrodes 31 (second upper antenna electrode 36 and second lower antenna electrode 32), like the first antenna electrodes 21 (first upper antenna electrode 26 and first lower antenna electrode 22), can also increase the component of the electric field applied from the second antenna electrodes 31 to the core layer 17 that is aligned with the orientation direction of the electro-optic molecules (z-direction). In this way, the light 45 propagating through the core layer 17 is efficiently modulated by the electric field based on the electromagnetic wave 40 received by the first antenna electrodes 21 and the second antenna electrodes 31. The optical modulation efficiency of the electro-optic polymer element 1b is improved.

[0102] (modified version) As shown in Figures 25 and 26, in the first modified example of this embodiment, the first upper antenna electrode 26, the first lower antenna electrode 22, the second upper antenna electrode 36 (not shown), and the second lower antenna electrode 32 (not shown) may be in contact with the core layer 17. That is, the lower cladding layer 16 may be omitted, and the upper cladding layer 18 may not be provided on the core layer 17. As a result, the component of the electric field applied to the core layer 17 from the first antenna electrode 21 and the second antenna electrode 31 that is aligned with the orientation direction of the electro-optic molecules (z-direction) can be increased.

[0103] In the second modification of this embodiment, in a plan view of the first main surface 15a, the first edge 27 is located at a distance of 20 μm or less from the core layer 17 in the width direction (±y direction), and the second edge 23 may overlap the core layer 17. In the third modification of this embodiment, in a plan view of the first main surface 15a, the first edge 27 overlaps the core layer 17, and the second edge 23 is located at a distance of 20 μm or less from the core layer 17 in the width direction (±y direction). The second and third modifications of this embodiment can increase the component of the electric field applied to the core layer 17 from the first antenna electrode 21 and the second antenna electrode 31 that is aligned with the orientation direction (z direction) of the electro-optic molecules.

[0104] The electro-optic polymer element 1b of this embodiment provides the same effects as the electro-optic polymer element 1 of Embodiment 1, as described below.

[0105] In the electro-optic polymer element 1b of this embodiment, in a plan view of the first main surface 15a, the first edge 27 overlaps with the core layer 17, or is located at a distance of 20 μm or less from the core layer 17 in the width direction (±y direction). In a plan view of the first main surface 15a, the second edge 23 overlaps with the core layer 17, or is located at a distance of 20 μm or less from the core layer 17 in the width direction (±y direction). The first distance t1 between the first upper antenna electrode 26 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 20 μm or less. The second distance t2 between the first lower antenna electrode 22 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 20 μm or less.

[0106] Therefore, the electromagnetic wave 40 can reach the first lower antenna electrode 22 without being blocked by the first upper antenna electrode 26. The first upper antenna electrode 26 and the first lower antenna electrode 22 can efficiently receive the electric field component of the electromagnetic wave 40 that is aligned with the width direction (±y direction) of the core layer 17. In addition, the component of the electric field applied from the first antenna electrode 21 to the core layer 17 that is aligned with the orientation direction (z direction) of the electro-optic molecules can be increased.

[0107] In the electro-optic polymer element 1b of this embodiment, the first edge 27 and the second edge 23 of the core layer 17 are on opposite sides of each other with respect to the center line 17c of the core layer 17 in the width direction (±y direction).

[0108] Therefore, the component of the electric field applied from the first antenna electrode 21 to the core layer 17 that is aligned with the orientation direction of the electro-optic molecules can be increased throughout the core layer 17. The optical modulation efficiency of the electro-optic polymer element 1b is improved.

[0109] In the electro-optic polymer element 1b of this embodiment, in a plan view of the first main surface 15a, the third edge 37 overlaps with the core layer 17, or is located at a distance of 20 μm or less from the core layer 17 in the width direction (±y direction). In a plan view of the first main surface 15a, the fourth edge 33 overlaps with the core layer 17, or is located at a distance of 20 μm or less from the core layer 17 in the width direction (±y direction). The third distance t3 between the second upper antenna electrode 36 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 20 μm or less. The fourth distance t4 between the second lower antenna electrode 32 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 20 μm or less.

[0110] Therefore, the light 45 propagating through the core layer 17 is modulated not only by the electric field applied to the core layer 17 from the first antenna electrode 21, but also by the electric field applied to the core layer 17 from the second antenna electrode 31. This improves the optical modulation efficiency of the electro-optic polymer element 1b.

[0111] (Embodiment 3) The electro-optic polymer element 1c of Embodiment 3 will be described with reference to Figures 27 to 29. The electro-optic polymer element 1c of this embodiment has a similar configuration to the electro-optic polymer element 1b of Embodiment 2, but differs from the electro-optic polymer element 1b of Embodiment 2 mainly in the following points.

[0112] The first edge 27 of the first upper antenna electrode 26 is offset in the first width direction (-y direction) with respect to the center line 17c of the core layer 17. The first edge 27 of the first upper antenna electrode 26 is offset in the opposite direction to the center line 26c of the first upper antenna electrode 26 with respect to the center line 17c of the core layer 17. In a plan view of the first main surface 15a, the distance d1 between the first edge 27 of the first upper antenna electrode 26 and the core layer 17 is greater than 0 μm and 20 μm or less, similar to Embodiment 2. The distance d1 may be 10 μm or less, or 5 μm or less, similar to Embodiment 2.

[0113] The second edge 23 of the first lower antenna electrode 22 is offset in the first width direction (+y direction) with respect to the center line 17c of the core layer 17. The second edge 23 of the first lower antenna electrode 22 is offset in the opposite direction to the second center line 22c of the first lower antenna electrode 22 with respect to the center line 17c of the core layer 17. In a plan view of the first main surface 15a, the distance d2 between the second edge 23 of the first lower antenna electrode 22 and the core layer 17 is greater than 0 μm and 20 μm or less, similar to Embodiment 2. The distance d2 may be 10 μm or less, or 5 μm or less, similar to Embodiment 2.

[0114] As the overlap between the first upper antenna electrode 26 and the first lower antenna electrode 22 in a plan view of the first main surface 15a increases, the size of the first antenna electrode 21 decreases. The electro-optic polymer element 1c can be miniaturized.

[0115] The third edge 37 of the second upper antenna electrode 36 is offset in the first width direction (+y direction) with respect to the center line 17c of the core layer 17. The third edge 37 of the second upper antenna electrode 36 is offset in the opposite direction to the third center line 36c of the second upper antenna electrode 36 with respect to the center line 17c of the core layer 17. In a plan view of the first main surface 15a, the distance d3 between the third edge 37 of the second upper antenna electrode 36 and the core layer 17 is greater than 0 μm and 20 μm or less, similar to Embodiment 2. The distance d3 may be 10 μm or less, or 5 μm or less, similar to Embodiment 2.

[0116] The fourth edge 33 of the second lower antenna electrode 32 is offset in the second width direction (-y direction) with respect to the center line 17c of the core layer 17. The fourth edge 33 of the second lower antenna electrode 32 is offset in the opposite direction to the fourth center line 32c of the second lower antenna electrode 32 with respect to the center line 17c of the core layer 17. In a plan view of the first main surface 15a, the distance d4 between the fourth edge 33 of the second lower antenna electrode 32 and the core layer 17 is greater than 0 μm and 20 μm or less, similar to Embodiment 2. The distance d4 may be 10 μm or less, or 5 μm or less, similar to Embodiment 2.

[0117] As the overlap between the second upper antenna electrode 36 and the second lower antenna electrode 32 in a plan view of the first main surface 15a increases, the size of the second antenna electrode 31 decreases. The electro-optic polymer element 1c can be miniaturized.

[0118] (modified version) In the first modified example of this embodiment, as shown in Figures 28 and 29, the first upper antenna electrode 26, the first lower antenna electrode 22, the second upper antenna electrode 36 (not shown), and the second lower antenna electrode 32 (not shown) may be in contact with the core layer 17. That is, the lower cladding layer 16 may be omitted, and the upper cladding layer 18 may not be provided on the core layer 17. As a result, the component of the electric field applied to the core layer 17 from the first antenna electrode 21 and the second antenna electrode 31 that is aligned with the orientation direction of the electro-optic molecules (z-direction) can be increased.

[0119] In the second modification of this embodiment, in a plan view of the first main surface 15a, the first edge 27 is located at a distance of 20 μm or less from the core layer 17 in the width direction (±y direction), and the second edge 23 may overlap the core layer 17. In the third modification of this embodiment, in a plan view of the first main surface 15a, the first edge 27 overlaps the core layer 17, and the second edge 23 is located at a distance of 20 μm or less from the core layer 17 in the width direction (±y direction). The second and third modifications of this embodiment can increase the component of the electric field applied to the core layer 17 from the first antenna electrode 21 and the second antenna electrode 31 that is aligned with the orientation direction (z direction) of the electro-optic molecules.

[0120] The electro-optic polymer element 1c of this embodiment provides the same effects as the electro-optic polymer element 1b of Embodiment 2, as described below.

[0121] In the electro-optic polymer element 1c of this embodiment, in a plan view of the first main surface 15a, the first edge 27 overlaps with the core layer 17, or is located at a distance of 20 μm or less from the core layer 17 in the width direction (±y direction). In a plan view of the first main surface 15a, the second edge 23 overlaps with the core layer 17, or is located at a distance of 20 μm or less from the core layer 17 in the width direction (±y direction). The first distance t1 between the first upper antenna electrode 26 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 20 μm or less. The second distance t2 between the first lower antenna electrode 22 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 20 μm or less.

[0122] Therefore, the electromagnetic wave 40 can reach the first lower antenna electrode 22 without being blocked by the first upper antenna electrode 26. The first upper antenna electrode 26 and the first lower antenna electrode 22 can efficiently receive the electric field component of the electromagnetic wave 40 that is aligned with the width direction (±y direction) of the core layer 17. In addition, the component of the electric field applied from the first antenna electrode 21 to the core layer 17 that is aligned with the orientation direction (z direction) of the electro-optic molecules can be increased.

[0123] In the electro-optic polymer element 1c of this embodiment, the first edge 27 and the second edge 23 of the core layer 17 are on opposite sides of each other with respect to the center line 17c of the core layer 17 in the width direction (±y direction).

[0124] Therefore, the component of the electric field applied from the first antenna electrode 21 to the core layer 17 that is aligned with the orientation direction of the electro-optic molecules can be increased throughout the core layer 17. The optical modulation efficiency of the electro-optic polymer element 1c is improved. In addition, the overlap between the first upper antenna electrode 26 and the first lower antenna electrode 22 in a plan view of the first main surface 15a becomes larger, so the size of the first antenna electrode 21 can be reduced. The electro-optic polymer element 1c can be miniaturized.

[0125] In the electro-optic polymer element 1c of this embodiment, in a plan view of the first main surface 15a, the third edge 37 overlaps with the core layer 17, or is located at a distance of 20 μm or less from the core layer 17 in the width direction (±y direction). In a plan view of the first main surface 15a, the fourth edge 33 overlaps with the core layer 17, or is located at a distance of 20 μm or less from the core layer 17 in the width direction (±y direction). The third distance t3 between the second upper antenna electrode 36 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 20 μm or less. The fourth distance t4 between the second lower antenna electrode 32 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 20 μm or less.

[0126] Therefore, the light 45 propagating through the core layer 17 is modulated not only by the electric field applied to the core layer 17 from the first antenna electrode 21, but also by the electric field applied to the core layer 17 from the second antenna electrode 31. This improves the optical modulation efficiency of the electro-optic polymer element 1c.

[0127] (Embodiment 4) Referring to Figure 32, the electro-optic polymer element 1d of Embodiment 4 will be described. The electro-optic polymer element 1d of this embodiment has the same configuration as the electro-optic polymer element 1 of Embodiment 1 and provides the same effects as the electro-optic polymer element 1 of Embodiment 1, but differs from the electro-optic polymer element 1 of Embodiment 1 mainly in the following points.

[0128] In the electro-optic polymer element 1d, the first upper antenna electrode 26, the first lower antenna electrode 22, the second upper antenna electrode 36, and the second lower antenna electrode 32 each include a bowtie antenna.

[0129] Specifically, the first upper antenna electrode 26 includes an antenna 29 and a modulation electrode 28. The antenna 29 receives electromagnetic waves 40 (see Figures 2, 3, and 14). The antenna 29 is a bowtie antenna. The shape of the antenna 29 is not particularly limited. In a plan view of the first main surface 15a, the antenna 29 may have a larger area than the modulation electrode 28. In a plan view of the first main surface 15a, the modulation electrode 28 may have an elongated stripe shape in the longitudinal direction (x direction) of the core layer 17. The shape of the modulation electrode 28 is not particularly limited. The modulation electrode 28 is connected to the antenna 29 and is located closer to the center line 17c of the core layer 17 than the antenna 29 in the width direction (±y direction) of the core layer 17. The modulation electrode 28 applies an electric field to the core layer 17 based on the electromagnetic waves 40 received by the antenna 29.

[0130] The first lower antenna electrode 22 includes an antenna 25 and a modulation electrode 24. The antenna 25 receives electromagnetic waves 40 (see Figures 2, 3, and 14). The antenna 25 is a bowtie antenna. The shape of the antenna 25 is not particularly limited. In a plan view of the first main surface 15a, the antenna 25 may have a larger area than the modulation electrode 24. In a plan view of the first main surface 15a, the modulation electrode 24 may have an elongated stripe shape in the longitudinal direction (x direction) of the core layer 17. The shape of the modulation electrode 24 is not particularly limited. The modulation electrode 24 is connected to the antenna 25 and is closer to the center line 17c of the core layer 17 than the antenna 25 in the width direction (±y direction) of the core layer 17. The modulation electrode 24 applies an electric field to the core layer 17 based on the electromagnetic waves 40 received by the antenna 25.

[0131] The second upper antenna electrode 36 includes an antenna 39 and a modulation electrode 38. The antenna 39 receives electromagnetic waves 40 (see Figures 2, 3, and 14). The antenna 39 is a bowtie antenna. The shape of the antenna 39 is not particularly limited. In a plan view of the first main surface 15a, the antenna 39 may have a larger area than the modulation electrode 38. In a plan view of the first main surface 15a, the modulation electrode 38 may have an elongated stripe shape in the longitudinal direction (x direction) of the core layer 17. The shape of the modulation electrode 38 is not particularly limited. The modulation electrode 38 is connected to the antenna 39 and is closer to the center line 17c of the core layer 17 than the antenna 39 in the width direction (±y direction) of the core layer 17. The modulation electrode 38 applies an electric field to the core layer 17 based on the electromagnetic waves 40 received by the antenna 39.

[0132] The first lower antenna electrode 22 includes an antenna 35 and a modulation electrode 34. The antenna 35 receives electromagnetic waves 40 (see Figures 2, 3, and 14). The antenna 35 is a bowtie antenna. The shape of the antenna 35 is not particularly limited. In a plan view of the first main surface 15a, the antenna 35 may have a larger area than the modulation electrode 34. In a plan view of the first main surface 15a, the modulation electrode 34 may have an elongated stripe shape in the longitudinal direction (x direction) of the core layer 17. The shape of the modulation electrode 34 is not particularly limited. The modulation electrode 34 is connected to the antenna 35 and is closer to the center line 17c of the core layer 17 than the antenna 35 in the width direction (±y direction) of the core layer 17. The modulation electrode 34 applies an electric field to the core layer 17 based on the electromagnetic waves 40 received by the antenna 35.

[0133] (modified version) As shown in Figure 33, the first upper antenna electrode 26, the first lower antenna electrode 22, the second upper antenna electrode 36, and the second lower antenna electrode 32 may each include a metamaterial antenna. Specifically, antennas 25, 29, 35, and 39 are each metamaterial antennas.

[0134] (Examples) The electro-optic polymer elements of the embodiments of this disclosure will be described with reference to Figures 34 to 36. The electro-optic polymer elements of these embodiments are configured similarly to the electro-optic polymer elements of the third modified embodiment of Embodiment 2 and are manufactured by the manufacturing method shown in Figures 4 to 13.

[0135] The core layer 17 is a ridge-type core layer. The height of the core layer 17 in the direction normal to the first main surface 15a (z-direction) is 2 μm. The width of the core layer 17 is 1.6 μm. As the electro-optic polymer forming the core layer 17, a side-chain type electro-optic polymer having repeating units represented by the above formulas (1) to (3) is used. The electro-optic coefficient of the electro-optic polymer at a wavelength of 1550 nm, estimated by transmission ellipsometry, is 36 pm / V. The lower cladding layer 16 is formed of a cycloolefin polymer (ZEONEX (Zeon Corporation, registered trademark)). The electrical resistivity of the cycloolefin polymer is 10 12 It is greater than Ω·m. The upper cladding layer 18 is formed of UV-curing resin (FE4048, manufactured by NTT-AT).

[0136] The ground electrode 11, the first upper antenna electrode 26, the first lower antenna electrode 22, the second upper antenna electrode 36, and the second lower antenna electrode 32 are made of gold (Au). The substrate 10 is made of silicon (Si). Referring to Figure 35, a silicon dioxide (SiO2) film 19a is formed on the surface of the substrate 10, and the silicon dioxide (SiO2) film 19a is placed between the substrate 10 and the ground electrode 11. A silicon dioxide (SiO2) film 19b covers the ground electrode 11. The silicon dioxide (SiO2) film 19b is placed between the ground electrode 11 and the spacer layer 12. The spacer layer 12 is made of cycloolefin polymer (ZEONOR (Zeon Corporation, registered trademark)). A protective layer 18c is formed on the first upper antenna electrode 26, the second upper antenna electrode 36, and the upper cladding layer 18. The protective layer 18c is formed of UV-curing resin (FE4048, manufactured by NTT-AT Corporation).

[0137] Referring to Figure 35, the first distance t1 between the first upper antenna electrode 26 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 3 μm. The second distance t2 between the first lower antenna electrode 22 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 2.5 μm. The third distance t3 between the second upper antenna electrode 36 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 2.5 μm, the same as the second distance t2. The fourth distance t4 between the second lower antenna electrode 32 and the core layer 17 in the normal direction (z direction) of the first main surface 15a is 3 μm, the same as the first distance t1.

[0138] In a plan view of the first main surface 15a, the first edge 27 of the first upper antenna electrode 26 overlaps with the core layer 17. The distance between the first edge 27 of the first upper antenna electrode 26 and the center line 17c of the core layer 17 is 0.4 μm. The second edge 23 of the first lower antenna electrode 22 is separated from the core layer 17 in the width direction (±y direction) of the core layer 17. In a plan view of the first main surface 15a, the distance d2 between the second edge 23 of the first lower antenna electrode 22 and the core layer 17 is 1.3 μm. In a plan view of the first main surface 15a, the third edge 37 of the second upper antenna electrode 36 overlaps with the core layer 17, similar to the first edge 27. The distance between the third edge 37 of the second upper antenna electrode 36 and the center line 17c of the core layer 17 is 0.4 μm. In a plan view of the first main surface 15a, the distance d4 between the fourth edge 33 of the second lower antenna electrode 32 and the core layer 17 is 1.3 μm, the same as the distance d2.

[0139] Referring to Figure 34, the arrangement pitch P between the first antenna electrode 21 and the second antenna electrode 31 is 0.59 mm. The arrangement period Q of the multiple antenna electrode pairs 20a and 20b is 1.18 mm.

[0140] In this embodiment, light 45 is a laser beam having a power of 8 mW and a wavelength of 1.535 μm. The laser beam is incident on the electro-optic polymer element through a tapered lensed fiber (not shown). The polarization direction of the laser beam is the normal direction (z direction) to the first principal surface 15a. An electromagnetic wave having a frequency of 150 GHz is irradiated onto the electro-optic polymer element from above (see Figures 2 and 3, etc.). The power density of the electromagnetic wave at the surface of the electro-optic polymer element into which the electromagnetic wave is incident is 34.3 W / m². 2 The laser light incident on the electro-optic polymer element is modulated by the electro-optic polymer element. The modulated light from the electro-optic polymer element is output from the electro-optic polymer element through a tapered lensed fiber (not shown). The spectrum of the output light from the electro-optic polymer element is measured using an optical spectrum analyzer. As shown in Figure 36, in the spectrum of the output light from the electro-optic polymer element, an optical modulation sideband with a carrier sideband ratio of 45 dB was observed at a frequency 150 GHz away from the frequency of the laser light incident on the electro-optic polymer element.

[0141] Embodiments 1-4 and their variations disclosed herein should be considered in all respects as illustrative and not restrictive. To the extent that they do not contradict each other, at least two of Embodiments 1-4 and their variations disclosed herein may be combined. For example, in Embodiments 2 and 3, the first upper antenna electrode 26, the first lower antenna electrode 22, the second upper antenna electrode 36, and the second lower antenna electrode 32 may each include a bowtie antenna or a metamaterial antenna, as in Embodiment 4. The scope of this disclosure is indicated by the claims rather than the foregoing description and is intended to include all modifications within the meaning and scope equivalent to the claims. [Explanation of symbols]

[0142] 1,1b,1c,1d Electro-optic polymer element, 10 Substrate, 10a Main surface, 11 Ground electrode, 12 Spacer layer, 13,14 Recess, 15 Optical waveguide, 15a First main surface, 15b Second main surface, 16 Lower cladding layer, 17 Core layer, 17c Center line, 18 Upper cladding layer, 18c Protective layer, 19a,19b Silicon dioxide film, 20a,20b Antenna electrode pair, 21 First antenna electrode, 22 First lower antenna electrode, 22c Second center line, 23 Second edge, 24 Modulation electrode, 25 Antenna, 26 First upper antenna electrode, 26c First center line, 27 First edge, 28 Modulation electrode, 29 Antenna, 31 Second antenna electrode, 32 Second lower antenna electrode, 32c Fourth center line, 33 Fourth edge, 34 Modulation electrode, 35 Antenna, 36 Second upper antenna electrode, 36c Third center line, 37 Third edge, 38 Modulation electrode, 39 Antenna, 40 Electromagnetic wave, 41a, 41b Peaks, 42a, 42b Valleys, 45 Light, 50 Support, 51 Lower electrode, 52, 55 Electro-optic polymer layer, 53 Upper electrode, 54 Power supply.

Claims

1. An optical waveguide having a first main surface and a second main surface opposite to the first main surface, and including a core layer formed of an electro-optic polymer, A first antenna electrode including a first upper antenna electrode and a first lower antenna electrode, The core layer comprises a second antenna electrode positioned at a distance from the first antenna electrode in the longitudinal direction of the core layer, The electro-optic polymer contains electro-optic molecules, which are oriented along the direction normal to the first principal surface. The first upper antenna electrode is provided on the first main surface and includes a first edge that is proximal to the center line of the core layer in the width direction of the core layer in a plan view of the first main surface, and the width direction of the core layer is perpendicular to the longitudinal direction of the core layer in a plan view of the first main surface. The first lower antenna electrode is provided on the second main surface and includes a second edge that is proximal to the center line of the core layer in the plan view of the first main surface. In the plan view of the first main surface, the first center line of the first upper antenna electrode in the width direction of the core layer is offset in the first width direction from the center line of the core layer in the width direction of the core layer, and the first width direction is one side of the width direction. In the plan view of the first main surface, the second center line of the first lower antenna electrode in the width direction of the core layer is offset from the center line of the core layer in a second width direction opposite to the first width direction, and the second width direction is the other side of the width direction. In the plan view of the first main surface, the first edge overlaps the core layer, or is separated from the core layer by a distance of 20 μm or less in the width direction of the core layer. In the plan view of the first main surface, the second edge overlaps the core layer, or is separated from the core layer by a distance of 20 μm or less in the width direction of the core layer. The first distance between the first upper antenna electrode and the core layer in the direction normal to the first main surface is 20 μm or less. The second distance between the first lower antenna electrode and the core layer in the direction normal to the first main surface is 20 μm or less. The second antenna electrode is positioned at a distance from the first antenna electrode in the longitudinal direction of the core layer. The aforementioned second antenna electrode includes a second upper antenna electrode and a second lower antenna electrode. The second upper antenna electrode is provided on the first main surface and includes a third edge that is proximal to the center line of the core layer in the plan view of the first main surface. The second lower antenna electrode is provided on the second main surface and includes a fourth edge that is proximal to the center line of the core layer in the plan view of the first main surface. In the plan view of the first main surface, the third center line of the second upper antenna electrode in the width direction of the core layer is offset in the second width direction with respect to the center line of the core layer. In the plan view of the first main surface, the fourth center line of the second lower antenna electrode in the width direction of the core layer is offset in the first width direction with respect to the center line of the core layer. In the plan view of the first main surface, the third edge overlaps the core layer, or is separated from the core layer by a distance of 20 μm or less in the width direction of the core layer. In the plan view of the first main surface, the fourth edge overlaps the core layer, or is separated from the core layer by a distance of 20 μm or less in the width direction of the core layer. The third distance between the second upper antenna electrode and the core layer in the direction normal to the first main surface is 20 μm or less. An electro-optic polymer element in which the fourth distance between the second lower antenna electrode and the core layer in the direction normal to the first main surface is 20 μm or less.

2. In the width direction of the core layer, the first edge and the second edge coincide with the center line of the core layer. The electro-optic polymer element according to claim 1, wherein in the width direction of the core layer, the third edge and the fourth edge coincide with the center line of the core layer.

3. In the width direction of the core layer, the first edge and the second edge are on opposite sides of each other with respect to the center line of the core layer, The electro-optic polymer element according to claim 1, wherein in the width direction of the core layer, the third edge and the fourth edge are on opposite sides of each other with respect to the center line of the core layer.

4. Ground electrode and The system further comprises a spacer layer disposed between the ground electrode and the first lower antenna electrode, The ground electrode is positioned in the direction normal to the first main surface on the opposite side of the first upper antenna electrode with respect to the first lower antenna electrode, and in the plan view of the first main surface, it overlaps with the first upper antenna electrode and the first lower antenna electrode. The spacer layer is 10 ４ An electro-optic polymer element according to any one of claims 1 to 3, which is formed of a material having an electrical resistivity greater than Ω·m.

5. Multiple pairs of antenna electrodes are periodically arranged along the longitudinal direction of the core layer, The electro-optic polymer element according to any one of claims 1 to 4, wherein each of the plurality of antenna electrode pairs includes the first antenna electrode and the second antenna electrode.

6. The optical waveguide includes at least one of the upper cladding layer or the lower cladding layer. The upper cladding layer is positioned between the first upper antenna electrode and the core layer in the direction normal to the first main surface, and has a lower refractive index than the core layer. The lower cladding layer is positioned between the first lower antenna electrode and the core layer in the direction normal to the first main surface, and has a lower refractive index than the core layer. The upper cladding layer or the lower cladding layer, at least one of them, 10 ４ An electro-optic polymer element according to any one of claims 1 to 5, which is formed of a material having an electrical resistivity greater than Ω·m.

7. The electro-optic polymer element according to any one of claims 1 to 6, wherein the first upper antenna electrode and the first lower antenna electrode each include a rectangular antenna, a bowtie antenna, or a metamaterial antenna.

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