Inductor components

Abstract

Provided is an inductor component with which it is possible to obtain inductance with high efficiency. The inductor component comprises an element body having a first main surface and a second main surface opposite each other, a coil provided on the element body and wound spirally along an axis, and a first external electrode and a second external electrode that are provided on the element body and electrically connected to the coil. The axis of the coil is disposed parallel to the first main surface. The coil includes: a plurality of first coil wires provided on the first main surface-side with respect to the axis and arrayed along the axis on a plane parallel to the first main surface; a plurality of second coil wires provided on the second main surface-side with respect to the axis and arrayed along the axis on a plane parallel to the second main surface; a plurality of first through-wires extending from the first coil wires toward the second coil wires and arrayed along the axis; and a plurality of second through-wires extending from the first coil wires toward the second coil wires, provided on the opposite side from the first through-wires with respect to the axis, and arrayed along the axis. The first coil wires, the first through-wires, the second coil wires, and the second through-wires are connected in this order to form at least a part of the spiral. When viewed from a direction orthogonal to the first main surface, at least one of the plurality of first coil wires and the plurality of second coil wires is a bent wire having a first portion and a second portion with different angles to the axis.

Description

Technical Field

[0001] The present disclosure relates to an inductor component.

Background Art

[0002] Conventionally, as an inductor component, there is one described in Japanese Patent No. 6652280 (Patent Document 1). The inductor component has a body, a coil provided in the body and wound along the axial direction, and a first external electrode and a second external electrode provided on the body and electrically connected to the coil.

[0003] The coil has a plurality of coil patterns laminated along the axis. Axially adjacent coil patterns are connected via conductive vias. The coil pattern has a wiring portion extending in a direction orthogonal to the axis and a pad portion provided at an end of the wiring portion and connected to the conductive via. The width of the pad portion is wider than the width of the wiring portion in order to improve the connectivity between the pad portion and the conductive via.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, in the conventional inductor component as described above, since the width of the pad portion is wider than the width of the wiring portion, a part of the pad portion is located inside the coil in the radial direction of the coil compared to the wiring portion. For this reason, the inner diameter of the coil becomes small, and it cannot be said that the acquisition efficiency of inductance is necessarily high.

[0006] Therefore, an object of the present disclosure is to provide an inductor component capable of increasing the acquisition efficiency of inductance.

Means for Solving the Problems

[0007] To solve the aforementioned problems, an inductor component according to one aspect of this disclosure is provided. A base body including a first principal surface and a second principal surface that are opposite to each other, A coil provided on the aforementioned body and wound spirally along the axis, A first external electrode and a second external electrode are provided on the base body and electrically connected to the coil. Equipped with, The shaft of the coil is arranged parallel to the first main surface. The aforementioned coil is A plurality of first coil wirings are provided on the first main surface side with respect to the shaft and are arranged along the shaft on a plane parallel to the first main surface, A plurality of second coil wirings are provided on the second main surface side with respect to the shaft and are arranged along the shaft on a plane parallel to the second main surface, A plurality of first through-wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis, A plurality of second through-wirings extend from the first coil wiring toward the second coil wiring, are provided on the opposite side of the axis from the first through-wiring, and are arranged along the axis. Includes, The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a portion of the helical shape. Viewed from a direction perpendicular to the first main surface, at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having a first portion and a second portion that are at different angles with respect to the axis.

[0008] Here, the angle of the first part with respect to the axis refers to the angle between the center line (or extension of the center line) of the first part and the axis. For example, when the center line and the axis intersect, the angle between the center line and the axis is the smaller of the angles of intersection between the center line and the axis. When the center line and the axis are parallel, the angle between the center line and the axis is 0°. The same applies to the second part. "An external electrode is provided on the base body" specifically means that the external electrode is provided on the outer surface of the base body. For example, this includes cases where the external electrode is provided directly on the outer surface of the base body, where the external electrode is provided on the outside of the base body via another component on the base body, or where a part of the external electrode is embedded in the base body and provided on the outer surface of the external electrode.

[0009] According to the above embodiment, the coil includes a first coil wiring, a first through wiring, a second coil wiring, and a second through wiring. The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a portion of a spiral, which allows the inner diameter of the coil to be increased and the efficiency of inductance acquisition to be increased. Furthermore, by increasing the efficiency of inductance acquisition, the Q value can be increased.

[0010] Furthermore, since at least one of the multiple first coil wirings and multiple second coil wirings is a bent wiring having first and second parts with different angles to the axis, the length of the coil wiring can be changed without changing the size of the inductor component, and the inductance can be easily adjusted.

[0011] Preferably, in one embodiment of the inductor component, when viewed from a direction perpendicular to the first main surface, the first portion is a portion perpendicular to the axis or parallel to the axis, and the second portion is a portion that intersects the axis at an acute angle.

[0012] According to the above embodiment, the length of the bent wiring can be easily increased.

[0013] Preferably, in one embodiment of the inductor component, the base material includes SiO2.

[0014] According to the above embodiment, insulation and rigidity can be imparted to the base body.

[0015] Preferably, in one embodiment of the inductor component, in the two bent wirings adjacent in the axial direction, when viewed from the direction orthogonal to the first main surface, the distance between the second portions of one of the bent wirings and the distance between the second portions of the other bent wiring is smaller than the distance between the first portions of one of the bent wirings and the first portions of the other bent wiring.

[0016] Here, the distance between the two second portions refers to the shortest distance between the two second portions when viewed from the direction orthogonal to the first main surface. The same applies to the first portion.

[0017] According to the embodiment, since the distance between the two second portions adjacent in the axial direction is short, leakage magnetic flux can be suppressed.

[0018] Preferably, in one embodiment of the inductor component, the bent wiring is provided at least on the first coil wiring, when viewed from the direction orthogonal to the first main surface, at least one of the plurality of second coil wirings extends in a direction connecting the centers of the first through wiring and the second through wiring connected to the same second coil wiring in a straight line.

[0019] According to the embodiment, the length of the second coil wiring can be easily shortened.

[0020] Preferably, in one embodiment of the inductor component, the bent wiring is provided at least on the first coil wiring, one of the plurality of first coil wirings has a first end connected to the first external electrode and a second end connected to the first through wiring, when viewed from the direction orthogonal to the first main surface, the one first coil wiring extends in a direction connecting the first end and the second end in a straight line.

[0021] According to the above embodiment, the length of the first coil wiring constituting the outermost turn in the axial direction can be shortened, the DC resistance of the coil can be reduced, and the coil can be made smaller.

[0022] Preferably, in one embodiment of the inductor component, Viewed from a direction perpendicular to the first main surface, the first portion is the portion perpendicular to the axis, Viewed from a direction perpendicular to the first main surface, the length of the first portion is less than half the width of the base body in the direction perpendicular to the axis.

[0023] According to the above embodiment, the possibility of contact between two bent wirings adjacent to each other in the axial direction can be reduced.

[0024] Preferably, in one embodiment of the inductor component, Viewed from a direction perpendicular to the first main surface, the first portion is the portion perpendicular to the axis, and the second portion is the portion that intersects the axis at an acute angle. When viewed from a direction perpendicular to the first main surface, the width of the second portion is 0.5 times or more and 0.95 times or less the width of the first portion.

[0025] According to the above embodiment, the width of the second portion is 0.95 times or less the width of the first portion, so the width of the second portion can be made narrower, which in turn allows the length of the second portion to be increased and the inductance to be increased. Also, since the width of the second portion is 0.5 times or more the width of the first portion, cutting of the second portion can be prevented.

[0026] Preferably, in one embodiment of the inductor component, the shape of the coil is 180° rotationally symmetric with respect to the midpoint of the coil's axial direction when viewed from a direction perpendicular to the first main surface.

[0027] According to the above embodiment, the directionality of the inductor component can be eliminated.

[0028] Preferably, in one embodiment of the inductor component, the length of the bent wiring between the centers of the first through-wiring and the second through-wiring connected to the bent wiring, when viewed from a direction perpendicular to the first main surface, is 4% or more greater than the length of the straight line connecting the centers of the first through-wiring and the second through-wiring connected to the same bent wiring.

[0029] According to the above embodiment, the length of the bent wiring can be increased, thereby increasing the inductance.

[0030] Preferably, in one embodiment of the inductor component, Viewed from a direction perpendicular to the first main surface, the first portion is the portion perpendicular to the axis, and the second portion is the portion that intersects the axis at an acute angle. When viewed from a direction perpendicular to the first main surface, the first angle θ1 is the angle of the second portion with respect to the axis, and the second angle θ2 is the angle with respect to the axis of the straight line connecting the centers of the first and second through-wirings connected to the bent wiring having the same second portion, then the second angle θ2 is greater than the first angle θ1, the first angle θ1 is greater than 45° and less than 80°, and the difference between the second angle θ2 and the first angle θ1 is greater than 1° and less than 45°.

[0031] According to the above embodiment, since the first angle θ1 is greater than 45°, the width of the second portion can be secured, and the efficiency of inductance acquisition can be ensured. Since the first angle θ1 is less than 80°, the length of the second portion can be increased, and the inductance can be improved.

[0032] Since the difference between the second angle θ2 and the first angle θ1 is greater than 1°, the length of the second section can be increased, improving the inductance. Since the difference between the second angle θ2 and the first angle θ1 is less than 45°, the width of the second section can be ensured.

[0033] Preferably, in one embodiment of the inductor component, The bent wiring is provided at least on the first coil wiring, Of the plurality of first coil wirings, the outermost first coil wiring located on the outermost side in the axial direction is not the bent wiring, Viewed from a direction perpendicular to the first main surface, the maximum axial length of the outermost first coil wiring is greater than the maximum axial length of the first coil wiring adjacent to the outermost first coil wiring in the axial direction.

[0034] According to the above embodiment, the width of the outermost first coil wiring can be increased to reduce the DC resistance of the coil. Furthermore, the width of the outermost first coil wiring can be increased by effectively utilizing the dead space in the outermost region of the coil in the axial direction of the base body.

[0035] Preferably, in one embodiment of the inductor component, A base body including a first principal surface and a second principal surface that are opposite to each other, A coil provided on the aforementioned body and wound spirally along the axis, A first external electrode and a second external electrode are provided on the base body and electrically connected to the coil. Equipped with, The shaft of the coil is arranged parallel to the first main surface. The aforementioned coil is A plurality of first coil wirings are provided on the first main surface side with respect to the shaft and are arranged along the shaft on a plane parallel to the first main surface, A plurality of second coil wirings are provided on the second main surface side with respect to the shaft and are arranged along the shaft on a plane parallel to the second main surface, A plurality of first through-wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis, A plurality of second through-wirings extend from the first coil wiring toward the second coil wiring, are provided on the opposite side of the axis from the first through-wiring, and are arranged along the axis. Includes, The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a portion of the helical shape. Viewed from a direction perpendicular to the first main surface, at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having a curved portion.

[0036] According to the above embodiment, the coil includes a first coil wiring, a first through wiring, a second coil wiring, and a second through wiring. The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a portion of a spiral, which allows the inner diameter of the coil to be increased and the inductance acquisition efficiency to be increased. Furthermore, by increasing the inductance acquisition efficiency, the Q value can be increased.

[0037] Furthermore, since at least one of the multiple first coil wirings and multiple second coil wirings is a bent wiring with a curved portion, the length of the coil wiring can be changed without changing the size of the inductor component, and the inductance can be easily adjusted.

[0038] Preferably, in one embodiment of the inductor component, There are multiple instances of the aforementioned bent wiring. When viewed from a direction perpendicular to the first main surface, all of the curved portions are curved so as to protrude to one side in the axial direction.

[0039] According to the above embodiment, since all curved portions are curved to protrude to one side in the axial direction, no reverse magnetic field is generated in any of the curved portions, and the acquisition efficiency of the inductor can be increased.

[0040] Preferably, in one embodiment of the inductor component, the side surface of the curved portion has a recess when viewed from a direction perpendicular to the first main surface.

[0041] According to the above embodiment, since the side surface of the curved portion has a recess, the width of the curved portion can be reduced, thereby reducing the possibility of contact between two adjacent bent wirings in the axial direction.

[0042] Preferably, in one embodiment of the inductor component, the bent wiring consists only of the curved portion.

[0043] According to the above embodiment, since the bent wiring does not include straight sections, the length of the coil can be increased. [Effects of the Invention]

[0044] According to an inductor component in one aspect of this disclosure, the efficiency of acquiring inductance can be increased. [Brief explanation of the drawing]

[0045] [Figure 1] This is a schematic bottom view of the inductor component of the first embodiment, viewed from the bottom side. [Figure 2] This is a cross-sectional view taken along line II-II in Figure 1. [Figure 3] This is a cross-sectional view taken along line III-III in Figure 1. [Figure 4A] This is a schematic bottom view of the bottom wiring, seen from the bottom. [Figure 4B] This is a schematic bottom view of the top wiring as seen from the bottom. [Figure 5A] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 5B] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 5C] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 5D] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 5E] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 5F] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 5G] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 5H] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 5I]This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 5J] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 5K] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 5L] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 5M] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 6A] This is a cross-sectional view showing a first modified example of an inductor component. [Figure 6B] This is a cross-sectional view showing a second modified example of an inductor component. [Figure 6C] This is a cross-sectional view showing a third modified example of an inductor component. [Figure 6D] This is a cross-sectional view showing a fourth modified example of an inductor component. [Figure 7A] This is a schematic bottom view showing the bottom wiring of the inductor component as viewed from the bottom, illustrating a fifth modified example. [Figure 7B] This is a schematic bottom view showing the top wiring of the inductor component as viewed from the bottom, illustrating a fifth modified example. [Figure 8] This is a schematic bottom view of the inductor component of the second embodiment, viewed from the bottom side. [Figure 9] This is a cross-sectional view taken along line IX-IX in Figure 8. [Figure 10] This is a schematic bottom view of the top wiring as seen from the bottom. [Figure 11A] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 11B] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 11C] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 11D] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 11E] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 11F]This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 11G] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 11H] This is a schematic cross-sectional view illustrating a manufacturing method for inductor components. [Figure 12A] This is a cross-sectional view showing a first modified example of an inductor component. [Figure 12B] This is a cross-sectional view showing a second modified example of an inductor component. [Figure 12C] This is a cross-sectional view showing a third modified example of an inductor component. [Figure 13] This is a schematic bottom view showing a third embodiment of the inductor component, viewed from the bottom. [Figure 14] This is a schematic bottom view showing the top wiring of a fourth embodiment of an inductor component, viewed from the bottom. [Modes for carrying out the invention]

[0046] Hereinafter, an inductor component, which is one aspect of this disclosure, will be described in detail with reference to the illustrated embodiment. Note that the drawings include some schematic representations and may not reflect actual dimensions or proportions.

[0047] <First Embodiment> The inductor component 1 according to the first embodiment will be described below. Figure 1 is a schematic bottom view of the inductor component 1 as seen from the bottom. Figure 2 is a cross-sectional view taken along line II-II in Figure 1. Figure 3 is a cross-sectional view taken along line III-III in Figure 1. In Figure 1, for convenience, the external electrodes are shown as dashed lines. Also, in Figure 1, the element 10 is shown as transparent to allow for easy understanding of its structure, but it may be semi-transparent or opaque.

[0048] 1.Overview configuration The general configuration of inductor component 1 will now be described. Inductor component 1 is a surface-mount type inductor component used, for example, in a high-frequency signal transmission circuit. As shown in Figures 1, 2, and 3, inductor component 1 comprises a base body 10, a coil 110 provided on the base body 10 and wound spirally along axis AX, and a first external electrode 121 and a second external electrode 122 provided on the base body 10 and electrically connected to the coil 110.

[0049] The base body 10 has length, width and height. The base body 10 has first end faces 100e1 and second end faces 100e2 at both ends in the length direction, first side faces 100s1 and second side faces 100s2 at both ends in the width direction, and bottom faces 100b and top faces 100t at both ends in the height direction. In other words, the outer surface 100 of the base body 10 includes the first end faces 100e1 and second end faces 100e2, the first side faces 100s1 and second side faces 100s2, the bottom face 100b and top face 100t. The bottom face 100b corresponds to an example of the "first main face" described in the claims, and the top face 100t corresponds to an example of the "second main face" described in the claims.

[0050] As shown in the drawing, for the sake of explanation, the X direction will be defined as the longitudinal direction of the body 10, from the first end face 100e1 to the second end face 100e2. The Y direction will be defined as the width direction of the body 10, from the first side surface 100s1 to the second side surface 100s2. The Z direction will be defined as the height direction of the body 10, from the bottom surface 100b to the top surface 100t. The X, Y, and Z directions are mutually orthogonal directions, and when arranged in the order X, Y, Z, they form a right-handed system.

[0051] In this specification, the "outer surface 100 of the element 10," including the first end face 100e1, the second end face 100e2, the first side face 100s1, the second side face 100s2, the bottom face 100b, and the top face 100t, does not simply mean a surface facing the outer periphery of the element 10, but rather a surface that forms the boundary between the outside and inside of the element 10. Furthermore, "above the outer surface 100 of the element 10" does not refer to an absolute, unidirectional direction such as vertically upward as defined by the direction of gravity, but rather to a direction toward the outside, with respect to the outer surface 100 as the reference point, between the outside and inside that are bounded by the outer surface 100. Therefore, "above the outer surface 100" is a relative direction determined by the orientation of the outer surface 100. In addition, "above" an element includes not only a position above the element at a distance, i.e., a position above the element via another object or at a distance above it, but also a position directly above the element in contact with it.

[0052] The axis AX of the coil 110 is positioned parallel to the bottom surface 100b. The coil 110 includes a plurality of bottom wirings 11b provided on the bottom surface 100b side with respect to the axis AX and arranged along the axis AX on a plane parallel to the bottom surface 100b, a plurality of top wirings 11t provided on the top surface 100t side with respect to the axis AX and arranged along the axis AX on a plane parallel to the top surface 100t, a plurality of first through wirings 13 extending from the bottom wirings 11b toward the top wirings 11t and arranged along the axis AX, and a plurality of second through wirings 14 extending from the bottom wirings 11b toward the top wirings 11t, provided on the opposite side of the axis AX from the first through wirings 13 and arranged along the axis AX. The bottom wirings 11b, the first through wirings 13, the top wirings 11t, and the second through wirings 14 are connected in this order to form at least a portion of a spiral.

[0053] The bottom wiring 11b corresponds to an example of the "first coil wiring" described in the claims, and the top wiring 11t corresponds to an example of the "second coil wiring" described in the claims. The axis AX is the intersection of a first plane passing through the center between the bottom wiring 11b and the top wiring 11t and a second plane passing through the center between the first through wiring 13 and the second through wiring 14. In other words, the axis AX is a straight line passing through the center of the inner diameter portion of the coil 110. The axis AX of the coil 110 does not have dimensions in the direction perpendicular to the axis AX.

[0054] According to the above configuration, the coil 110 includes bottom wiring 11b, first through wiring 13, top wiring 11t, and second through wiring 14. The bottom wiring 11b, first through wiring 13, top wiring 11t, and second through wiring 14 are connected in this order to form at least a portion of a spiral, which allows the inner diameter of the coil 110 to be increased and the efficiency of inductance acquisition to be increased. Furthermore, by increasing the efficiency of inductance acquisition, the Q value can be increased.

[0055] Specifically, the pad portion of conventional inductor components and the bottom wiring 11b and top wiring 11t of this embodiment are "receiving portions" for wiring that penetrates the main body (conductive vias of conventional inductor components and the first through-wiring 13 and second through-wiring 14 of this embodiment), and therefore have a shape that spreads perpendicular to the direction in which the wiring penetrates the main body. In the configuration of conventional inductor components, since the conductive vias extend in a direction parallel to the coil axis, the pad portion tends to spread in a direction perpendicular to the coil axis, resulting in a structure that blocks the magnetic flux generated in the axial direction of the coil.

[0056] In contrast, in this embodiment, since the first through-wiring 13 and the second through-wiring 14 extend in a direction perpendicular to the axis AX of the coil 110, the bottom wiring 11b and the top wiring 11t spread in a direction parallel to the axis AX of the coil 110. Therefore, the bottom wiring 11b and the top wiring 11t are less likely to have a structure that blocks the magnetic flux generated in the direction of the axis AX. In other words, in this embodiment, a structure that does not easily block the magnetic flux can be made, and the inductance acquisition efficiency and Q value can be improved.

[0057] Figure 4A is a schematic bottom view of the bottom wiring 11b as seen from the bottom. For convenience, in Figure 4A, the first through wiring 13 and the second through wiring 14 are drawn with dashed lines, and the via portion 121v of the first external electrode 121 connected to the bottom wiring 11b and the via portion 122v of the second external electrode 122 connected to the bottom wiring 11b are also drawn with dashed lines. The base body 10 is drawn transparently.

[0058] As shown in Figure 4A, when viewed from a direction perpendicular to the base surface 100b (Z direction), at least one of the multiple base surface wirings 11b is a bent wiring 11b1 having a first part 111 and a second part 112 that have different angles with respect to axis AX. The angle of the first part 111 with respect to axis AX is the angle α between the extension of the first center line C1 in the width direction of the first part 111 and axis AX when viewed from a direction perpendicular to the base surface 100b. The angle of the second part 112 with respect to axis AX is the angle β between the second center line C2 in the width direction of the second part 112 and axis AX when viewed from a direction perpendicular to the base surface 100b. The first center line C1 coincides with the extension direction of the first part 111, and the second center line C2 coincides with the extension direction of the second part 112. The first center line C1 and the second center line C2 are shown by thick dashed lines.

[0059] According to the above configuration, at least one of the multiple bottom wirings 11b is a bent wiring 11b1 having a first portion 111 and a second portion 112 that have different angles with respect to the axis AX. Therefore, the length of the wiring of the coil 110 can be changed without changing the size of the inductor component 1, and the inductance can be easily adjusted.

[0060] Specifically, the length of the bent wiring 11b1 can be made longer than the straight wiring that connects the first through-wiring 13 and the second through-wiring 14 at the shortest distance. In this way, the inductance can be adjusted without changing the number of turns or the pitch of the through-wiring by adjusting the length of the wiring of the coil 110 without changing the size of the inductor component 1. For example, an inductor necessary for impedance matching can be easily obtained. The length of the bottom wiring 11b (including the bent wiring 11b1) is the dimension in the extending direction of the bottom wiring 11b when viewed from a direction perpendicular to the bottom surface 100b, and refers to the length of the center line of the bottom wiring 11b.

[0061] Furthermore, at least one of the multiple top-facing wirings 11t may be a bent wiring having a first part and a second part with different angles to the axis AX, allowing the length of the wiring of the coil 110 to be changed without changing the size of the inductor component 1, and allowing the inductance to be easily adjusted. In short, at least one of the multiple bottom-facing wirings 11b and the multiple top-facing wirings 11t should be a bent wiring.

[0062] 2.Each part configuration (Inductor component 1) The volume of inductor component 1 is 0.08 mm³. 3 The following conditions apply, and the size of the longest side of the inductor component 1 is 0.65 mm or less. The size of the longest side of the inductor component 1 refers to the largest value among the length, width, and height of the inductor component 1, and in this embodiment, it refers to the length in the X direction. With the above configuration, the volume of the inductor component 1 is small and the longest side of the inductor component 1 is short, so the weight of the inductor component 1 is reduced. Therefore, even if the external electrodes 121 and 122 are small, the required mounting strength can be obtained. In addition, the thickness of the inductor component 1 is preferably 200 μm or less. This makes the inductor component 1 thinner.

[0063] Specifically, the dimensions of inductor component 1 (length (X direction) × width (Y direction) × height (Z direction)) are 0.6 mm × 0.3 mm × 0.3 mm, 0.4 mm × 0.2 mm × 0.2 mm, 0.25 mm × 0.125 mm × 0.120 mm, etc. Also, the width and height do not have to be equal; for example, they may be 0.4 mm × 0.2 mm × 0.3 mm.

[0064] (Base model 10) The base material 10 contains SiO2. This allows the base material 10 to be given insulation and rigidity. The base material 10 is composed of, for example, a glass sintered body. The glass sintered body may also contain alumina, which can further increase the strength of the base material.

[0065] A glass sintered body is constructed, for example, by laminating insulating layers containing multiple glass particles. The lamination direction of the multiple insulating layers is the Z direction. That is, the insulating layers are layered and have main surfaces extending in the XY plane. Note that in the base body 10, the interfaces between the multiple insulating layers may not be clearly defined due to firing or other processes.

[0066] The element 10 may be composed of, for example, a glass substrate. The glass substrate may be a single-layer glass substrate, and since the majority of the element is glass, losses such as eddy current losses at high frequencies can be suppressed.

[0067] (Coil 110) The coil 110 comprises a plurality of bottom wirings 11b, a plurality of top wirings 11t, a plurality of first through wirings 13, and a plurality of second through wirings 14. The bottom wirings 11b, the first through wirings 13, the top wirings 11t, and the second through wirings 14 are connected in order to form at least a portion of the coil 110 wound in the direction of axis AX.

[0068] According to the above configuration, since the coil 110 is a so-called helical coil 110, the area in which the bottom wiring 11b, top wiring 11t, first through wiring 13 and second through wiring 14 run parallel along the winding direction of the coil 110 in a cross section perpendicular to the axis AX can be reduced, and the stray capacitance in the coil 110 can be reduced.

[0069] Here, a helical shape refers to a shape in which the total number of turns of the coil is greater than 1 turn, and the number of turns of the coil in a cross section perpendicular to the axis is less than 1 turn. "One turn or more" means that in a cross section perpendicular to the axis, the coil wiring has portions that run parallel in the winding direction and adjacent to each other in the radial direction when viewed from the axial direction, while "less than 1 turn" means that in a cross section perpendicular to the axis, the coil wiring does not have portions that run parallel in the winding direction and adjacent to each other in the winding direction when viewed from the axial direction.

[0070] As shown in Figure 4A, the multiple bottom wirings 11b are arranged along the X direction. The multiple bottom wirings 11b include bent wirings 11b1 and straight wirings 11b2. The straight wirings 11b2 are located at each end in the axial direction AX. The bent wirings 11b1 are located between the straight wirings 11b2 at both ends.

[0071] One of the straight wires 11b2 has a first end connected to the via portion 121v of the first external electrode 121 and a second end connected to the first through wire 13. When viewed from a direction perpendicular to the bottom surface 100b, the straight wire 11b2 extends in a direction that connects the first end and the second end in a straight line. This makes it possible to shorten the length of the bottom wire 11b (straight wire 11b2) that constitutes the outermost turn in the axial direction, reduce the DC resistance of the coil 110, and make the coil 110 smaller.

[0072] Similarly, the other straight wire 11b2 has a first end connected to the via portion 122v of the second external electrode 122 and a second end connected to the second through wire 14. The other straight wire 11b2 extends in a direction that connects the first end and the second end in a straight line when viewed from a direction perpendicular to the bottom surface 100b.

[0073] The bent wiring 11b1 has a first part 111, a second part 112, and a third part 113. The first part 111, the second part 112, and the third part 113 are connected in series in order. In Figure 4A, for convenience, the boundary lines between the first part 111 and the second part 112, and the boundary lines between the second part 112 and the third part 113 in one bent wiring 11b1 are shown with dotted lines.

[0074] Viewed from a direction perpendicular to the base surface 100b, the angle α of the first part 111 with respect to axis AX is different from the angle β of the second part 112 with respect to axis AX, as described above. Viewed from a direction perpendicular to the base surface 100b, the angle γ of the third part 113 with respect to axis AX is different from the angle β of the second part 112 with respect to axis AX. The angle γ of the third part 113 with respect to axis AX is the angle between the extension of the third centerline C3 in the width direction of the third part 113 and axis AX. The third centerline C3 coincides with the extension direction of the third part 113. The third centerline C3 is shown by a thick dashed line. The first part 111 is perpendicular to the axis AX, meaning that angle α is 90°. The second part 112 is acutely intersecting with the axis AX, meaning that angle β is acute. The third part 113 is perpendicular to the axis AX, meaning that angle γ is 90°. With the above configuration, the length of the bent wiring 11b1 can be easily increased. Note that angle α only needs to be different from angle β, and the first part 111 may be parallel to the axis AX, or it may be acutely intersecting with the axis AX. Also, the third part 113 may be parallel to the axis AX, or it may be acutely intersecting with the axis AX, or it may not be provided at all. In addition, the bent wiring 11b1 may have other parts besides the first part 111 to the third part 113.

[0075] Preferably, in two adjacent bent wirings 11b1 in the axial AX direction, the second distance d2 between the second portion 112 of one bent wiring 11b1 and the second portion 112 of the other bent wiring 11b1, when viewed from a direction perpendicular to the bottom surface 100b, is smaller than the first distance d1 between the first portion 111 of one bent wiring 11b1 and the first portion 111 of the other bent wiring 11b1. The second distance d2 refers to the shortest distance between the two second portions 112 when viewed from a direction perpendicular to the bottom surface 100b. The first distance d1 refers to the shortest distance between the two first portions 111 when viewed from a direction perpendicular to the bottom surface 100b. With the above configuration, since the second distance d2 is short, leakage flux can be suppressed. Similarly, preferably, the second distance d2 is smaller than the third distance d3 between the third portion 113 of one bent wiring 11b1 and the third portion 113 of the other bent wiring 11b1.

[0076] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the length of the first portion 111 is less than half the width of the base body 10 in the direction perpendicular to the axis AX (Y direction). The length of the first portion 111 is the length of the first centerline C1 of the first portion 111. According to the above configuration, the possibility of contact between two adjacent bent wirings 11b1 in the direction of axis AX can be reduced. Similarly, preferably, the length of the third portion 113 is less than half the width of the base body 10 in the direction perpendicular to axis AX.

[0077] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the width of the second portion 112 in the direction perpendicular to the second center line C2 is 0.5 times or more and 0.95 times or less the width of the first portion 111 in the direction perpendicular to the first center line C1. With the above configuration, since the width of the second portion 112 is 0.95 times or less the width of the first portion 111, the width of the second portion 112 can be made narrower, thereby increasing the length of the second portion 112 and increasing the inductance. Also, since the width of the second portion 112 is 0.5 times or more the width of the first portion 111, cutting of the second portion 112 can be prevented. Similarly, preferably, when viewed from a direction perpendicular to the bottom surface 100b, the width of the second portion 112 in the direction perpendicular to the second center line C2 is 0.5 times or more and 0.95 times or less the width of the third portion 113 in the direction perpendicular to the third center line C3.

[0078] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the first length L1 of the bent wiring 11b1 between the centers of the first through-wiring 13 and the second through-wiring 14 connected to the bent wiring 11b1 is 4% or more greater than the second length L2 obtained by drawing a straight line connecting the centers of the first through-wiring 13 and the second through-wiring 14 connected to the same bent wiring 11b1. In Figure 4A, the first length L1 is shown by a dashed line and the second length L2 is shown by a double dashed line. The first length L1 is the length between the centers of the first through-wiring 13 and the second through-wiring 14 within the length of the centerlines of the bent wiring 11b1 (first centerline C1, second centerline C2, and third centerline C3). With the above configuration, the length of the bent wiring 11b1 can be increased, so the inductance can be increased.

[0079] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the first angle θ1 is defined as the angle β of the second portion 112 (second center line C2) with respect to axis AX, and the second angle θ2 is defined as the angle with respect to axis AX of the straight line N connecting the centers of the first through-wiring 13 and the second through-wiring 14, which are connected to the bent wiring 11b1 having the same second portion 112. In this case, the second angle θ2 is greater than the first angle θ1. The first angle θ1 is greater than 45° and less than 80°. The third angle θ3, which is the difference between the second angle θ2 and the first angle θ1, is greater than 1° and less than 45°.

[0080] According to the above configuration, since the first angle θ1 is greater than 45°, the width of the second section 112 can be secured, and the efficiency of inductance acquisition can be ensured. On the other hand, since the first angle θ1 is less than 80°, the length of the second section 112 can be increased, and the inductance can be improved.

[0081] In contrast, when the first angle θ1 is less than 45°, the areas of the first portion 111 and the third portion 113 of the bent wiring 11b1 become larger, the width of the second portion 112 connecting the first portion 111 and the third portion 113 becomes extremely narrow, and the risk of breakage of the second portion 112 increases. Also, the distance between adjacent first through-wirings 13 and adjacent second through-wirings 14 in the axial AX direction becomes wider, the coil length increases and the efficiency of inductance acquisition decreases. Also, the distance between the first through-wirings 13 and the second through-wirings 14 becomes shorter, the coil diameter decreases and the efficiency of inductance acquisition decreases. On the other hand, when the first angle θ1 is greater than 80°, the first through-wirings 13 and the second through-wirings 14 are connected by a distance close to the shortest distance, and the length of the bottom wiring 11b cannot be increased.

[0082] According to the above configuration, since the third angle θ3 is greater than 1°, the length of the second section 112 can be increased, thereby improving the inductance. On the other hand, since the third angle θ3 is less than 45°, the width of the second section 112 can be secured.

[0083] In contrast, when the third angle θ3 is 0°, it means that the first through-wiring 13 and the second through-wiring 14 are connected by the shortest distance, resulting in straight wiring 11b2 instead of bent wiring 11b1, and the length of the bottom wiring 11b cannot be increased. On the other hand, when the third angle θ3 is greater than 45°, it means that the second part 112 is approaching parallel to the axis AX, and as with the case where the first angle θ1 is less than 45°, the line width of the second part 112 becomes thinner, increasing the risk of breakage.

[0084] Figure 4B is a schematic bottom view of the top wiring 11t as seen from the bottom. In Figure 4B, for convenience, the first through-wiring 13 and the second through-wiring 14 are drawn with dashed lines, and the base body 10 is drawn transparently.

[0085] As shown in Figure 4B, the top wiring 11t extends in only one direction. Specifically, the top wiring 11t extends in a direction that connects the centers of the first through-wiring 13 and the second through-wiring 14, which are connected to the same top wiring 11t, with a straight line. In other words, the top wiring 11t has a shape that extends in the Y direction. There are no bent wires in the top wiring 11t. Therefore, the length of the top wiring 11t can be easily shortened.

[0086] All top surface wirings 11t are arranged parallel to each other along the X direction. According to the above configuration, since the top surface wirings 11t extend in only one direction and all top surface wirings 11t are arranged parallel to each other, fine top surface wirings 11t can be formed by using, for example, deformed illumination in the photolithography process, and the inductor component 1 can be miniaturized. At least one of the top surface wirings 11t may have a shape that extends in the Y direction.

[0087] The bottom wiring 11b and top wiring 11t are made of good conductive materials such as copper, silver, gold, or alloys thereof. The bottom wiring 11b and top wiring 11t may be metal films formed by plating, vapor deposition, sputtering, etc., or they may be metal sintered bodies formed by applying and sintering a conductive paste. Furthermore, the bottom wiring 11b and top wiring 11t may have a multilayer structure in which multiple metal layers are laminated. The thickness of the bottom wiring 11b and top wiring 11t is preferably 5 μm or more and 50 μm or less.

[0088] As shown in Figure 1, the first through-hole 13 is positioned within the through-hole V of the base body 10 on the first side surface 100s1 side with respect to the axis AX, and the second through-hole 14 is positioned within the through-hole V of the base body 10 on the second side surface 100s2 side with respect to the axis AX. The first through-hole 13 and the second through-hole 14 extend in directions perpendicular to the bottom surface 100b and the top surface 100t, respectively. This allows the lengths of the first through-hole 13 and the second through-hole 14 to be shortened, thereby suppressing the DC resistance (Rdc). All of the first through-hole 13 and all of the second through-hole 14 are positioned parallel to each other along the X direction.

[0089] Preferably, the first through-wiring 13 contains SiO2. This allows the coefficient of thermal expansion of the first through-wiring 13 to match that of the base material 10 when the base material 10 contains SiO2, thereby suppressing cracks between the first through-wiring 13 and the base material 10. The first through-wiring 13 uses, for example, a conductive paste. The conductive material can be Ag, Cu, etc. Preferably, similarly, the second through-wiring 14 also contains SiO2.

[0090] Preferably, at least one of the bottom wiring 11b, top wiring 11t, first through wiring 13, and second through wiring 14 includes a void or resin portion. This allows the void or resin portion to absorb stress caused by the difference in the coefficient of thermal expansion between the wiring and the base body 10, thereby relieving the stress. As a method for forming the void, for example, a material that burns away by sintering can be used for the wiring material, and the void can be formed by sintering the wiring. As a method for forming the resin portion, for example, a conductive paste can be used for the wiring material to form the resin portion.

[0091] Preferably, at least one of the bottom wiring 11b and the top wiring 11t contains SiO2. This allows the coefficient of thermal expansion of the wiring to be matched with the coefficient of thermal expansion of the base material 10 when the base material 10 contains SiO2, thereby suppressing cracks between the wiring and the base material 10.

[0092] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the shape of the coil 110 is 180° rotationally symmetric about the midpoint of the coil 110 in the axial direction AX. With the above configuration, the directionality of the inductor component 1 can be eliminated.

[0093] (First external electrode 121 and second external electrode 122) As shown in Figure 1, the first external electrode 121 is connected to the first end of the coil 110, and the second external electrode 122 is connected to the second end of the coil 110. The first external electrode 121 is positioned on the first end face 100e1 side with respect to the center in the X direction of the base body 10 so as to be exposed from the outer surface 100 of the base body 10. The second external electrode 122 is positioned on the second end face 100e2 side with respect to the center in the X direction of the base body 10 so as to be exposed from the outer surface 100 of the base body 10.

[0094] When viewed from a direction perpendicular to the bottom surface 100b, the first external electrode 121 and the second external electrode 122 are located inside the outer surface 100 of the base body 10. In other words, the first external electrode 121 and the second external electrode 122 are located inside the first end face 100e1, the second end face 100e2, the first side surface 100s1, and the second side surface 100s2 of the base body 10.

[0095] According to the above configuration, since the first external electrode 121 and the second external electrode 122 do not come into contact with the outer surface 100 of the base body 10, the load on the first external electrode 121 and the second external electrode 122 can be reduced when the inductor components are separated into individual pieces, and deformation and peeling of the first external electrode 121 and the second external electrode 122 can be suppressed. For this reason, even if the inductor components are made smaller, deformation and peeling of the first external electrode 121 and the second external electrode 122 can be prevented.

[0096] The first external electrode 121 may be provided continuously with the bottom surface 100b and the first end surface 100e1. In this case, since the first external electrode 121 is a so-called L-shaped electrode, a solder fillet can be formed on the first external electrode 121 when mounting the inductor component 1 onto the mounting board. Similarly, the second external electrode 122 may be provided continuously with the bottom surface 100b and the second end surface 100e2.

[0097] The first external electrode 121 has a bottom portion 121b provided on the bottom surface 100b and a via portion 121v embedded in the bottom surface 100b. The via portion 121v is connected to the bottom portion 121b. The via portion 121v is connected to the end of the bottom wiring 11b located on the first end surface 100e1 side in the axial AX direction.

[0098] The second external electrode 122 has a bottom portion 122b provided on the bottom surface 100b and a via portion 122v embedded in the bottom surface 100b. The via portion 122v is connected to the bottom portion 122b. The via portion 122v is connected to the end of the bottom wiring 11b located on the second end surface 100e2 side in the axial AX direction.

[0099] As shown in Figure 3, the first external electrode 121 has a base layer 121e1 and a plating layer 121e2 covering the base layer 121e1. The base layer 121e1 contains, for example, a conductive material such as Ag or Cu. The plating layer 121e2 contains, for example, a conductive material such as Ni or Sn. Part of the bottom portion 121b and the via portion 121v are made of the base layer 121e1. The other part of the bottom portion 121b is made of the plating layer 121e2. Similarly, the second external electrode 122 has a base layer and a plating layer covering the base layer. Note that the first external electrode 121 and the second external electrode 122 may be made of a single layer of conductive material.

[0100] (Manufacturing method for inductor component 1) Next, the manufacturing method of the inductor component 1 will be explained using Figures 5A to 5M. Figures 5A to 5H, 5K, and 5L correspond to the II-II cross section of Figure 1. Figures 5I, 5J, and 5M correspond to the III-III cross section of Figure 1.

[0101] As shown in Figure 5A, a first insulating layer 1011 is provided on the base substrate 1000 by printing. The material of the base substrate 1000 is, for example, a glass substrate, a silicon substrate, or an alumina substrate, and the material of the first insulating layer 1011 is, for example, a resin such as epoxy or polyimide, or an inorganic insulating film such as SiO or SiN.

[0102] As shown in Figure 5B, a second insulating layer 1012 is provided on the first insulating layer 1011 by printing. A groove 1012a is provided in the second insulating layer 1012. At this time, the groove 1012a is formed by, for example, a photolithography process. Alternatively, the groove may be formed from the beginning as a printed pattern.

[0103] As shown in Figure 5C, a top conductor layer 1011t is formed in the groove 1012a by printing. The material of the top conductor layer 1011t is, for example, Ag, Cu, Au, Al, or an alloy containing at least one of these elements, or solder paste. In this case, for example, the top conductor layer 1011t is formed as a printed pattern so that it remains only in the groove 1012a. Alternatively, the top conductor layer 1011t may be printed on the second insulating layer 1012 and then left only in the groove 1012a by a photolithography process.

[0104] As shown in Figure 5D, a third insulating layer 1013 is provided on the second insulating layer 1012 by printing. A first groove 1013a and a second groove 1013b are provided in the third insulating layer 1013. The first groove 1013a and the second groove 1013b are formed in the same manner as in Figure 5B.

[0105] As shown in Figure 5E, the first through-conductor layer 1131 is printed into the first groove 1013a, and the second through-conductor layer 1141 is printed into the second groove 1013b. The first through-conductor layer 1131 and the second through-conductor layer 1141 are formed in the same manner as in Figure 5C.

[0106] Repeating the above process, as shown in Figure 5F, a fourth insulating layer 1014 is provided on the third insulating layer 1013, and a second first through-conductor layer 1132 and a second second through-conductor layer 1142 are provided in each of the two grooves provided in the fourth insulating layer 1014. Furthermore, a fifth insulating layer 1015 is provided on the fourth insulating layer 1014, and a third first through-conductor layer 1133 and a third second through-conductor layer 1143 are provided in each of the two grooves provided in the fifth insulating layer 1015.

[0107] As shown in Figure 5G, a sixth insulating layer 1016 is provided on the fifth insulating layer 1015, and a bottom conductor layer 1011b is provided in a groove in the sixth insulating layer 1016. The material of the bottom conductor layer 1011b is the same as the material of the top conductor layer 1011t. As shown in Figure 5H, a seventh insulating layer 1017 is provided on the sixth insulating layer 1016.

[0108] As shown in Figure 5I, a groove 1017a is provided in the seventh insulating layer 1017 so that a portion of the bottom conductor layer 1011b is exposed. As shown in Figure 5J, a base conductor layer 1121e1 is provided on the seventh insulating layer 1017 and within the groove 1017a. The material of the base conductor layer 1121e1 is, for example, a resin paste such as Ag or Cu.

[0109] As shown in Figure 5K, the entire laminate is sintered in a furnace at a high temperature (e.g., 500°C or higher). The first to seventh insulating layers 1011 to 1017 are sintered to form the base body 10, the top conductor layer 1011t is sintered to form the top wiring 11t, the bottom conductor layer 1011b is sintered to form the bottom wiring 11b, the first through-conductor layers 1131 to 1133 from the first to third layers are sintered to form the first through-conductor 13, the second through-conductor layers 1141 to 1143 from the first to third layers are sintered to form the second through-conductor 14, and the base conductor layer 1121e1 is sintered to form the base layer 121e1. Therefore, the strength can be improved by sintering the insulating layers, and by sintering the conductor layers, unwanted resin components contained in the conductor layers are volatilized, and the conductor materials contained in the conductor layers fuse together, achieving high conductivity. The base substrate 1000 may be removed by decomposing its surface during sintering, or by mechanically removing it by grinding before or after sintering, or by chemically removing it by etching before or after sintering.

[0110] As shown in Figure 5L, the parts are separated along the cut line C. As shown in Figure 5M, a plating layer 121e2 is formed by barrel plating to cover the base layer 121e1, thereby forming the first external electrode 121. This completes the manufacture of the inductor component 1, as shown in Figure 2.

[0111] 3. Variant (First variation) Figure 6A is a diagram corresponding to the II-II cross-section in Figure 1, showing a first modified example of the inductor component. As shown in Figure 6A, in the inductor component 1A of the first modified example, the first through-wiring 13 and the second through-wiring 14 are not parallel when viewed from a direction parallel to the axis AX of the coil 110. This allows the distance between the first through-wiring 13 and the second through-wiring 14 to be increased, the inner diameter of the coil 110 to be increased, and the Q value to be improved.

[0112] Specifically, the first through-wiring 13 and the second through-wiring 14 are bent at the center such that the distance between them increases towards the center in the Z direction. In other words, the first through-wiring 13 and the second through-wiring 14 each have a shape that widens radially outward from the coil 110 towards the center in the Z direction. Furthermore, the first through-wiring 13 and the second through-wiring 14 each have a stepped shape along the Z direction. With the above configuration, when the first through-wiring 13 and the second through-wiring 14 are each formed by stacking multiple conductor layers, the first through-wiring 13 and the second through-wiring 14 can be easily formed in a stepped shape by stacking the conductor layers of each layer with a staggered arrangement.

[0113] (Second variation) Figure 6B is a diagram corresponding to the II-II cross-section in Figure 1, showing a second modified example of the inductor component. As shown in Figure 6B, in the inductor component 1B of the second modified example, the first through-wiring 13 and the second through-wiring 14 are not parallel when viewed from a direction parallel to the axis AX of the coil 110. This allows the distance between the first through-wiring 13 and the second through-wiring 14 to be increased, the inner diameter of the coil 110 can be increased, and the Q value can be improved.

[0114] Specifically, the first through-wiring 13 and the second through-wiring 14 are inclined such that the distance between them increases towards the top surface wiring 11t in the Z direction. In other words, the first through-wiring 13 and the second through-wiring 14 each have a shape that extends radially outward from the coil 110 by the amount of the top surface wiring 11t in the Z direction. Thus, the coil 110 has a trapezoidal shape when viewed from the axis AX direction. With the above configuration, the first through-wiring 13 and the second through-wiring 14 can be formed in a straight line and shortened, and the DC resistance of the first through-wiring 13 and the second through-wiring 14 can be reduced.

[0115] (Third variation) Figure 6C is a diagram corresponding to the II-II cross-section in Figure 1, showing a third modified example of the inductor component. As shown in Figure 6C, the inductor component 1C of the third modified example includes a first coil 110A and a second coil 110B, compared to the inductor component 1A of the first modified example shown in Figure 6A.

[0116] In the first coil 110A, the first through-wiring 13 and the second through-wiring 14 are not parallel when viewed from a direction parallel to the axis AX. This allows the distance between the first through-wiring 13 and the second through-wiring 14 to be increased, the inner diameter of the coil 110A can be increased, and the Q value can be improved.

[0117] Specifically, the first through-wiring 13 has the same configuration as the first through-wiring 13 of the inductor component 1A of the first modified example. On the other hand, the second through-wiring 14 has a straight shape parallel to the Z direction. In other words, the first through-wiring 13 is bent in the center such that the distance between the first through-wiring 13 and the second through-wiring 14 widens towards the center in the Z direction. The first through-wiring 13 has a stepped shape along the Z direction. According to the above configuration, when the first through-wiring 13 is formed by stacking multiple conductor layers, the first through-wiring 13 can be easily formed in a stepped shape by stacking the conductor layers of each layer with a staggered arrangement.

[0118] In the second coil 110B, the first through-wiring 13 and the second through-wiring 14 are not parallel when viewed from a direction parallel to the axis AX. This allows the distance between the first through-wiring 13 and the second through-wiring 14 to be increased, the inner diameter of the coil 110B can be increased, and the Q value can be improved.

[0119] Specifically, the second through-wiring 14 has the same configuration as the second through-wiring 14 of the inductor component 1A of the first modified example. On the other hand, the first through-wiring 13 has a straight shape parallel to the Z direction. That is, the second through-wiring 14 is bent in the center such that the distance between the first through-wiring 13 and the second through-wiring 14 widens towards the center in the Z direction. The second through-wiring 14 has a stepped shape along the Z direction. According to the above configuration, when the second through-wiring 14 is formed by stacking multiple conductor layers, the second through-wiring 14 can be easily formed in a stepped shape by stacking the conductor layers of each layer with a staggered arrangement.

[0120] (Fourth variation) Figure 6D is a diagram corresponding to the II-II cross-section in Figure 1, showing a fourth modified example of the inductor component. As shown in Figure 6D, the inductor component 1D of the fourth modified example includes a first coil 110A and a second coil 110B, compared to the inductor component 1B of the second modified example shown in Figure 6B.

[0121] In the first coil 110A, the first through-wiring 13 and the second through-wiring 14 are not parallel when viewed from a direction parallel to the axis AX. This allows the distance between the first through-wiring 13 and the second through-wiring 14 to be increased, the inner diameter of the coil 110A can be increased, and the Q value can be improved.

[0122] Specifically, the first through-wiring 13 has the same configuration as the first through-wiring 13 of the inductor component 1B of the second modified example. On the other hand, the second through-wiring 14 has a linear shape parallel to the Z direction. In other words, the first through-wiring 13 is inclined such that the distance between the first through-wiring 13 and the second through-wiring 14 becomes wider towards the top surface wiring 11t side in the Z direction. With the above configuration, the first through-wiring 13 and the second through-wiring 14 can be formed in a linear shape and shortened, and the DC resistance of the first through-wiring 13 and the second through-wiring 14 can be reduced.

[0123] In the second coil 110B, the first through-wiring 13 and the second through-wiring 14 are not parallel when viewed from a direction parallel to the axis AX. This allows the distance between the first through-wiring 13 and the second through-wiring 14 to be increased, the inner diameter of the coil 110B can be increased, and the Q value can be improved.

[0124] Specifically, the second through-wiring 14 has the same configuration as the second through-wiring 14 of the inductor component 1B of the second modified example. On the other hand, the first through-wiring 13 has a linear shape parallel to the Z direction. That is, the second through-wiring 14 is inclined such that the distance between the first through-wiring 13 and the second through-wiring 14 becomes wider towards the top surface wiring 11t side in the Z direction. With the above configuration, the first through-wiring 13 and the second through-wiring 14 can be formed in a linear shape, and the electrical resistance of the first through-wiring 13 and the second through-wiring 14 can be reduced.

[0125] (Fifth variation) Figure 7A is a schematic bottom view of the bottom wiring 11b, showing a fifth modified example of the inductor component, as seen from the bottom. In Figure 7A, for convenience, the first through-wiring 13 and the second through-wiring 14 are drawn with dashed lines, and the via portion 121v of the first external electrode 121 connected to the bottom wiring 11b and the via portion 122v of the second external electrode 122 connected to the bottom wiring 11b are also drawn with dashed lines. The element 10 is drawn transparently.

[0126] As shown in Figure 7A, in the inductor component 1E of the fifth modified example, the outermost bottom wiring 11b located in the axial direction AX among the multiple bottom wirings 11b is a wide wiring 11b3, not a bent wiring. The bottom wiring 11b located between the wide wirings 11b3 at both ends is a bent wiring 11b1.

[0127] Viewed from a direction perpendicular to the base surface 100b, the maximum length M1 of the wide wiring 11b3 in the axial AX direction is greater than the maximum length M2 of the adjacent base wiring 11b (bent wiring 11b1) in the axial AX direction of the wide wiring 11b3.

[0128] According to the above configuration, the width of the outermost bottom wiring 11b can be increased, thereby reducing the DC resistance of the coil. In addition, the dead space in the outermost region of the coil in the axial direction AX of the base body can be effectively utilized to increase the width of the outermost bottom wiring 11b.

[0129] Figure 7B is a schematic bottom view of the top wiring 11t, showing a fifth modified example of the inductor component, as seen from the bottom. In Figure 7B, for convenience, the first through-wiring 13 and the second through-wiring 14 are drawn with dashed lines, and the element 10 is drawn transparently.

[0130] As shown in Figure 7B, the outermost top surface wiring 11t located in the axial direction AX among the multiple top surface wirings 11t is a wide wiring 11t3. The top surface wiring 11t located between the wide wirings 11t3 at both ends is a straight wiring 11t2.

[0131] Viewed from a direction perpendicular to the bottom surface 100b, the maximum length M3 of the wide wiring 11t3 in the axial AX direction is greater than the maximum length M4 of the top wiring 11t (straight wiring 11t2) adjacent to the wide wiring 11t3 in the axial AX direction.

[0132] With the above configuration, the width of the outermost top surface wiring 11t can be increased, thereby reducing the DC resistance of the coil. In addition, the width of the outermost top surface wiring 11t can be increased by effectively utilizing the dead space in the outermost region of the coil in the axial direction AX of the base body.

[0133] Furthermore, the bent wiring only needs to be provided on the bottom wiring 11b, and may also be provided on both the bottom wiring 11b and the top wiring 11t.

[0134] <Second Embodiment> Figure 8 is a schematic bottom view of the second embodiment of the inductor component, viewed from the bottom. Figure 9 is a cross-sectional view taken along line IX-IX in Figure 8. In Figure 8, for convenience, the insulating layer is omitted, and the external electrodes are shown as dashed lines. Also, in Figure 8, the component 10 is depicted transparently to facilitate understanding of its structure. The second embodiment differs from the first embodiment mainly in the shape of the coil, the position of the coil axis, the material of the component, and the presence of an insulating layer. These differing configurations will be described below. Other configurations are the same as those of the first embodiment, and their description will be omitted.

[0135] 1.Each part configuration (Inductor component 1F) As shown in Figure 8, in the inductor component 1F, the axis AX of the coil 110 is perpendicular to the X direction. More specifically, the axis AX is parallel to the Y direction and passes through the center of the element 10 in the X direction. This reduces interference of the magnetic flux of the coil 110 by the first external electrode 121 and the second external electrode 122, thereby improving the efficiency of inductance acquisition.

[0136] The length of coil 110 in the axial direction AX is shorter than the inner diameter of coil 110. The length of coil 110 in the axial direction AX is also called the coil length. According to this, the Q value can be improved because the coil length is short and the coil inner diameter is large. The inner diameter of the coil refers to the equivalent diameter of a circle based on the minimum area of ​​the region enclosed by coil 110 when viewed through from the axial direction AX.

[0137] (Base model 10) The element 10 is an inorganic insulator. Preferably, the material of the element 10 is glass, as glass has high insulating properties, which can suppress eddy currents and increase the Q value. Preferably, the element 10 contains the element Si, which increases the thermal stability of the element 10, thereby suppressing changes in the dimensions of the element 10 due to heat and reducing variations in electrical properties.

[0138] The base body 10 is preferably a single-layer glass plate. This ensures the strength of the base body 10. In addition, since a single-layer glass plate has low dielectric loss, the Q value at high frequencies can be increased. Furthermore, since there is no sintering process like in a sintered body, deformation of the base body 10 during sintering can be suppressed, which suppresses pattern misalignment and allows for the provision of an inductor component with a small inductance tolerance.

[0139] From the viewpoint of manufacturing methods, a photosensitive glass plate, such as Foturan II (a registered trademark of Schott AG), is preferred as the material for the single-layer glass plate. In particular, it is preferable that the single-layer glass plate contains cerium oxide (ceria: CeO2), in which case the cerium oxide acts as a sensitizer, making processing by photolithography easier.

[0140] However, since single-layer glass plates can be processed by mechanical processes such as drilling and sandblasting, dry / wet etching using photoresist / metal masks, and laser processing, they may be glass plates that do not have photosensitivity. Furthermore, single-layer glass plates may be made by sintering glass paste or by known methods such as the float method.

[0141] (Insulator 22) As shown in Figure 9, the inductor component 1F has an insulator 22. The insulator 22 covers the bottom surface 100b and the top surface 100t of the main body 10, respectively. Note that the insulator 22 may be provided only on the bottom surface 100b of the two top surfaces 100t.

[0142] The insulator 22 is a component that protects the wiring (bottom wiring 11b, top wiring 11t) from external forces by covering it, preventing damage to the wiring and improving the insulation properties of the wiring. Preferably, the insulator 22 is an organic insulator. For example, the insulator 22 may be a resin film such as epoxy or polyimide, which is easy to form. In particular, it is preferable that the insulator 22 be made of a material with a low dielectric constant, so that when the insulator 22 is present between the coil 110 and the external electrodes 121, 122, the stray capacitance formed between the coil 110 and the external electrodes 121, 122 can be reduced. The insulator 22 can be formed, for example, by laminating a resin film such as ABF GX-92 (manufactured by Ajinomoto Fine Techno Co., Ltd.), or by applying and heat-curing a paste-like resin. The insulator 22 may also be an inorganic film such as an oxide, nitride, or oxynitride of silicon or hafnium, which has excellent insulating properties and can be made into a thin film.

[0143] Preferably, when the base material 10 is an inorganic insulator and the insulator 22 is an organic insulator, the organic insulator is located inside the outer surface 100 of the inorganic insulator when viewed from a direction perpendicular to the bottom surface 100b. As a result, because an organic insulator is present, it is easy to impart fluidity to the organic insulator, and when wiring (bottom wiring 11b, top wiring 11t) is covered with the organic insulator, the organic insulator can be easily filled between adjacent wiring, thereby improving insulation performance. Furthermore, since the organic insulator is not in contact with the outer surface of the inorganic insulator, the load on the organic insulator can be reduced when individual inductor components are formed, and deformation and peeling of the organic insulator can be suppressed.

[0144] (Coil 110) As shown in Figure 8, all bottom wirings 11b are arranged parallel to each other along the Y direction. The bottom wirings 11b extend in only one direction. That is, the bottom wirings 11b have a shape that extends in the X direction. Specifically, one of the bottom wirings 11b at both ends in the axial AX direction has a first end connected to the via portion 121v of the first external electrode 121 and a second end connected to the second through wiring 14. When viewed from a direction perpendicular to the bottom surface 100b, the bottom wiring 11b extends in a direction that connects the first end and the second end with a straight line.

[0145] The bottom wiring 11b at the other end in the axial direction AX has a first end connected to the via portion 122v of the second external electrode 122 and a second end connected to the first through wiring 13. The other bottom wiring 11b extends in a direction that connects the first end and the second end in a straight line when viewed from a direction perpendicular to the bottom surface 100b.

[0146] The other bottom wiring 11b has a first end connected to the first through wiring 13 and a second end connected to the second through wiring 14. The other bottom wiring 11b extends in a direction that connects the first end and the second end in a straight line when viewed from a direction perpendicular to the bottom surface 100b.

[0147] Thus, the bottom wiring 11b is a straight wire, not a bent wire. Therefore, the length of the bottom wiring 11b can be easily shortened.

[0148] The first through-hole 13 is positioned within the through-hole V of the base body 10, on the side of the first end face 100e1 relative to the axis AX, and the second through-hole 14 is positioned within the through-hole V of the base body 10, on the side of the second end face 100e2 relative to the axis AX. The first through-hole 13 and the second through-hole 14 extend in directions perpendicular to the bottom surface 100b and the top surface 100t, respectively. Multiple first through-holes 13 and multiple second through-holes 14 are arranged parallel to each other along the Y direction.

[0149] Figure 10 is a schematic bottom view of the top wiring 11t as seen from the bottom. For convenience, in Figure 10, the first through-wiring 13 and the second through-wiring 14 are drawn with dashed lines, and the base body 10 is drawn transparently.

[0150] As shown in Figure 10, multiple top-surface wirings 11t are arranged along the Y direction. The top-surface wirings 11t are bent wirings 11t1. The bent wiring 11t1 has a first part 111, a second part 112, and a third part 113. The first part 111, the second part 112, and the third part 113 are connected in series in order.

[0151] The bent wiring 11t1 (first part 111, second part 112, and third part 113) of the top wiring 11t has the same configuration and effect as the bent wiring 11b1 (first part 111, second part 112, and third part 113) of the bottom wiring 11b described in the first embodiment. The bent wiring 11t1 of the top wiring 11t will be described below, but its detailed configuration (definitions, etc.) is the same as the bent wiring 11b1 of the bottom wiring 11b described in the first embodiment, so the explanation will be omitted.

[0152] Viewed from a direction perpendicular to the base surface 100b, the angle of the first part 111 with respect to axis AX is different from the angle β of the second part 112 with respect to axis AX. Viewed from a direction perpendicular to the base surface 100b, the angle γ of the third part 113 with respect to axis AX is different from the angle β of the second part 112 with respect to axis AX. With the above configuration, the length of the bent wiring 11t1 can be easily increased.

[0153] Preferably, in two adjacent bent wirings 11t1 in the axial AX direction, the second distance d2 between the second portion 112 of one bent wiring 11t1 and the second portion 112 of the other bent wiring 11t1, when viewed from a direction perpendicular to the bottom surface 100b, is smaller than the first distance d1 between the first portion 111 of one bent wiring 11t1 and the first portion 111 of the other bent wiring 11t1. According to the above configuration, since the second distance d2 is short, leakage flux can be suppressed. Similarly, preferably, the second distance d2 is smaller than the third distance d3 between the third portion 113 of one bent wiring 11t1 and the third portion 113 of the other bent wiring 11t1.

[0154] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the length of the first portion 111 is less than half the width of the base body 10 in the direction perpendicular to the axis AX (X direction). The length of the first portion 111 is the length of the first centerline C1 of the first portion 111. According to the above configuration, the possibility of contact between two adjacent bent wirings 11t1 in the direction of axis AX can be reduced. Similarly, preferably, the length of the third portion 113 is less than half the width of the base body 10 in the direction perpendicular to the axis AX.

[0155] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the width of the second portion 112 in the direction perpendicular to the second center line C2 is 0.5 times or more and 0.95 times or less the width of the first portion 111 in the direction perpendicular to the first center line C1. According to the above configuration, since the width of the second portion 112 is 0.95 times or less the width of the first portion 111, the width of the second portion 112 can be made narrower, thereby increasing the length of the second portion 112 and increasing the inductance. On the other hand, since the width of the second portion 112 is 0.5 times or more the width of the first portion 111, cutting of the second portion 112 can be prevented. Similarly, preferably, when viewed from a direction perpendicular to the bottom surface 100b, the width of the second portion 112 in the direction perpendicular to the second center line C2 is 0.5 times or more and 0.95 times or less the width of the third portion 113 in the direction perpendicular to the third center line C3.

[0156] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the first length of the bent wiring 11t1 between the centers of the first through-wiring 13 and the second through-wiring 14 connected to the bent wiring 11t1 is 4% or more greater than the second length obtained by drawing a straight line between the centers of the first through-wiring 13 and the second through-wiring 14 connected to the same bent wiring 11t1. The first length is the length between the centers of the first through-wiring 13 and the second through-wiring 14 out of the length of the centerlines of the bent wiring 11t1 (first centerline C1, second centerline C2, and third centerline C3). With the above configuration, the length of the bent wiring 11t1 can be increased, so the inductance can be increased.

[0157] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the first angle is defined as the angle of the second portion 112 (second center line C2) with respect to the axis AX, and the second angle is defined as the angle of the straight line connecting the centers of the first through-wiring 13 and the second through-wiring 14, which are connected to the bent wiring 11t1 having the same second portion 112, with respect to the axis AX. In this case, the second angle is greater than the first angle. The first angle is greater than 45° and less than 80°. The third angle, which is the difference between the second angle and the first angle, is greater than 1° and less than 45°.

[0158] According to the above configuration, since the first angle is greater than 45°, the width of the second section 112 can be secured, and the efficiency of inductance acquisition can be ensured. Since the first angle is less than 80°, the length of the second section 112 can be increased, and the inductance can be improved. Since the third angle is greater than 1°, the length of the second section 112 can be increased, and the inductance can be improved. Since the third angle is less than 45°, the width of the second section 112 can be secured.

[0159] (First external electrode 121 and second external electrode 122) As shown in Figure 9, the outer surface of the first external electrode 121 has a recess 121a. The recess 121a is located on the upper surface of the first external electrode 121, overlapping with the via portion 121v when viewed from a direction perpendicular to the bottom surface 100b. As a result, when the inductor component 1F is mounted on the substrate, solder enters the recess 121a of the first external electrode 121, improving the connection strength between the first external electrode 121 and the solder.

[0160] Similarly, the outer surface of the second external electrode 122 may have a recess. This allows solder to enter the recess of the second external electrode 122 when the inductor component 1F is mounted on the substrate, improving the connection strength between the second external electrode 122 and the solder. The upper surfaces of the first external electrode 121 and the second external electrode 122 may also be formed to be flat.

[0161] (Manufacturing method for inductor component 1F) Next, the manufacturing method of inductor component 1F will be explained using Figures 11A to 11H. Figures 11A to 11H correspond to the IX-IX cross section in Figure 8.

[0162] As shown in Figure 11A, copper foil 2001 is printed onto the base substrate 2000. The material of the base substrate 2000 is the same as that of the base substrate 1000 in the first embodiment.

[0163] As shown in Figure 11B, a glass substrate 2010, which will become the base body 10, is placed on the base substrate 2000. For example, the base substrate 2000 and the glass substrate 2010 are brought into close contact using conductive tape, pins, frames, or other jigs. The glass substrate 2010 has through holes V. The glass substrate 2010 is, for example, a TGV (Through Glass Via) substrate. A TGV substrate is a substrate in which through holes have been formed in advance by a laser or photolithography. The glass substrate 2010 may also be, for example, a TSV (Through Silicon Via) substrate, or any other material. Furthermore, Ti / Cu or other necessary conductive materials may be deposited on the surface of the glass substrate 2010 in advance as a seed by sputtering or other methods.

[0164] As shown in Figure 11C, a first through-conductor layer 2013, which will become the first through-wiring 13, is formed in the through-hole V of the glass substrate 2010. Although not shown, a second through-conductor layer, which will become the second through-wiring 14, is similarly formed in the through-hole V. Specifically, the first through-conductor layer 2013 is formed by electroplating the through-hole V of the glass substrate 2010 by supplying power from the copper foil 2001 on the base substrate 2000. Alternatively, a seed layer may be formed on the surface of the glass substrate 2010 or the inner surface of the through-hole V by sputtering, and the through-conductor layer may be formed using known methods such as filled plating, conformal plating, or a printed filling method of conductive paste. If there is unwanted plating growth on the surface of the glass substrate 2010, the unwanted parts are removed by polishing, CMP, wet etching (etch back), or dry etching.

[0165] As shown in Figure 11D, the base substrate 2000 is peeled off from the glass substrate 2010. At this time, the base substrate 2000 may be removed mechanically by grinding or other means, or chemically by etching or other means.

[0166] As shown in Figure 11E, a bottom conductor layer 2011b, which will become the bottom wiring 11b, and a top conductor layer 2011t, which will become the top wiring 11t, are formed on the glass substrate 2010. Specifically, a seed layer (not shown) is provided over the entire surface of the glass substrate 2010, and a patterned photoresist is formed on the seed layer. A copper layer is formed on the seed layer at the openings in the photoresist by electroplating. The photoresist and seed layer are removed by wet etching or dry etching. This forms a bottom conductor layer 2011b and a top conductor layer 2011t patterned in any shape. At this time, the bottom conductor layer 2011b and the top conductor layer 2011t may be formed one at a time, or both may be formed simultaneously.

[0167] As shown in Figure 11F, insulating layers 2022, which will serve as insulators 22, are provided on the top and bottom surfaces of the glass substrate 2010 so as to cover the conductive layer. At this time, the insulating layer 2022 on the bottom surface and the insulating layer 2022 on the top surface may be formed one at a time, or both may be formed simultaneously. Subsequently, holes 2022a are made on the bottom conductive layer 2011b of the insulating layer 2022 on the bottom surface using photolithography or laser processing.

[0168] As shown in Figure 11G, a first external electrode conductor layer 2121, which will become the first external electrode 121, is provided on the bottom insulating layer 2022. At this time, the first external electrode conductor layer 2121 is connected to the bottom conductor layer 2011b via a hole 2022a. Specifically, a Pd catalyst (not shown) is provided on the bottom insulating layer 2022, and Ni and Au plating layers are formed by electroless plating. A patterned photoresist is formed on the plating layers. The plating layer at the openings of the photoresist is removed by wet etching or dry etching. This forms the first external electrode conductor layer 2121 patterned in any shape. Alternatively, a seed layer (not shown) is provided on the bottom insulating layer 2022, and a patterned photoresist is formed on the seed layer. Next, the seed layer at the openings of the photoresist is removed by wet etching or dry etching. A Ni and Au plating layer may be formed on the remaining seed layer by electroless plating. Although not shown in the diagram, a second external electrode conductor layer, which will become the second external electrode 122, is similarly provided on the insulating layer 2022 on the bottom side.

[0169] Here, since the first external electrode conductor layer 2121 is formed to conform to the shape of the upper surface of the bottom insulating layer 2022, the upper surface of the first external electrode conductor layer 2121 has a recess in the region that overlaps with the hole 2022a.

[0170] As shown in Figure 11H, the components are separated along the cut line C. This allows for the manufacture of the inductor component 1F, as shown in Figure 9.

[0171] 2. Variations (First variation) Figure 12A is a diagram corresponding to the IX-IX cross-section in Figure 8, showing a first modified example of the inductor component. As shown in Figure 12A, in the inductor component 1G of the first modified example, the first through-wiring 13 extends in a direction perpendicular to the bottom wiring 11b, and the cross-sectional area of ​​each end 13e in the direction of extension of the first through-wiring 13 is larger than the cross-sectional area of ​​the central part 13m in the direction of extension of the first through-wiring 13. In other words, in a cross-section along the direction of extension of the first through-wiring 13, the width in the direction perpendicular to the direction of extension of the first through-wiring 13 increases continuously from the central part 13m toward both ends 13e.

[0172] According to this, the cross-sectional area of ​​the end portion 13e of the first through-wiring 13 can be increased, and the connectivity between the first through-wiring 13 and at least one of the bottom wiring 11b and the top wiring 11t can be improved. Furthermore, when forming a through-hole V as a hole portion in the base body 10 and filling this through-hole V with conductive material by fill plating or the like to form the first through-wiring 13 in the through-hole V, it is easier to fill the opening side of the through-hole V with conductive material. And since the cross-sectional area of ​​the end portion 13e of the first through-wiring 13 is large and the cross-sectional area of ​​the central portion 13m of the first through-wiring 13 is small, it is easy to form the first through-wiring 13.

[0173] Furthermore, the cross-sectional area of ​​one end 13e of the first through-wiring 13 may be larger than the cross-sectional area of ​​the central part 13m of the first through-wiring 13. Similarly, the cross-sectional area of ​​at least one end of the second through-wiring 14 may be larger than the cross-sectional area of ​​the central part 13m of the first through-wiring 13.

[0174] (Second variation) Figure 12B is a diagram corresponding to the IX-IX cross-section in Figure 8, showing a second modified example of the inductor component. As shown in Figure 12B, in the inductor component 1H of the second modified example, the first through-wiring 13 has a conductive layer 13s located on the outer circumference when viewed from the direction in which the first through-wiring 13 extends, and a non-conductive layer 13u located inside the conductive layer 13s. With this configuration, when used in the high-frequency band, the current mainly flows on the surface of the first through-wiring 13 due to the skin effect, so providing the conductive layer 13s on the outer circumference does not lower the Q value. In addition, by providing the non-conductive layer 13u on the inside, stress can be relieved, and manufacturing costs can be reduced by not using a conductor.

[0175] An example of a method for forming conductive layers 13s and non-conductive layers 13u is described. A seed layer is provided on the inner surface of the through-hole V of the base body 10 by sputtering or electroless plating. Then, a plating layer is formed on the seed layer by electroplating. In this way, multiple conductive layers 13s, such as Ti / Cu / electrolytic Cu or Pd / electroless Cu / electrolytic Cu, can be formed on the outer circumference of the first through-wiring 13. Subsequently, the inside of the conductive layers 13s is sealed with resin by printing or heat pressing to form a non-conductive layer 13u made of resin. In this way, while current is flowing through the surface (conductive layer 13s) of the first through-wiring 13, stress can be relieved by the non-conductive layer 13u inside the first through-wiring 13.

[0176] Similarly, the second through-wiring 14 may have a conductive layer located on the outer periphery when viewed from the direction in which the second through-wiring 14 extends, and a non-conductive layer located inside the conductive layer. Note that the cross-sectional area of ​​each end of the first through-wiring 13 in the direction of extension is larger than the cross-sectional area of ​​the central part of the first through-wiring 13 in the direction of extension, but the cross-sectional area of ​​each end of the first through-wiring 13 in the direction of extension may be the same as the cross-sectional area of ​​the central part of the first through-wiring 13 in the direction of extension.

[0177] (Third variation) Figure 12C is a diagram corresponding to the IX-IX cross-section in Figure 8, showing a third modified example of the inductor component. As shown in Figure 12C, in the inductor component 1I of the third modified example, the first external electrode 121 is connected to the first through-wiring 13, which is the rightmost in the figure, instead of the bottom wiring 11b. That is, the first end of the first through-wiring 13 is connected to the first external electrode 121, and the second end of the first through-wiring 13 is connected to the top wiring 11t, which is the rightmost in the figure. With this, even if the number of turns of the coil 110 is changed, the coil 110 can be easily connected to the first external electrode 121.

[0178] Similarly, although not shown in the diagram, the second external electrode 122 is connected to the second through-wiring 14, which is the leftmost wire in the diagram, rather than to the bottom wiring 11b. That is, the first end of the second through-wiring 14 is connected to the second external electrode 122, and the second end of the second through-wiring 14 is connected to the top wiring 11t, which is the leftmost wire in the diagram.

[0179] The quantity of bottom wiring 11b is less than the quantity of top wiring 11t; there are 2 bottom wirings 11b and 3 top wirings 11t. The bottom wiring 11b is bent wiring, while the top wiring 11t is straight wiring.

[0180] <Third Embodiment> Figure 13 is a schematic bottom view of the third embodiment of the inductor component, viewed from the bottom. For convenience, the external electrodes are shown as dashed lines in Figure 13. Also, in Figure 13, the component 10 is depicted transparently to facilitate understanding of its structure. The third embodiment differs from the first embodiment in the shape of the bottom and top wiring, and these differing configurations are described below. Other configurations are the same as those of the first embodiment, and their description is omitted.

[0181] As shown in Figure 13, in the inductor component 1J of the third embodiment, all bottom wiring 11b and all top wiring 11t, viewed from a direction perpendicular to the bottom surface 100b (Z direction), are bent wirings having curved portions 115. Specifically, the bent wiring includes a curved portion 115 and a straight portion. The straight portions are located at each end of the bent wiring, and the curved portion 115 is located between the straight portions at both ends. The angles of the straight portions at both ends with respect to the axis AX are different from each other.

[0182] According to the above configuration, since the bottom wiring 11b and top wiring 11t are bent wirings, the length of the wiring of the coil 110 can be changed without changing the size of the inductor component 1J, and the inductance can be easily adjusted. At least one of the multiple bottom wirings 11b and multiple top wirings 11t is a bent wiring having a curved portion 115.

[0183] Preferably, there are multiple bent wirings, and when viewed from a direction perpendicular to the bottom surface 100b, all the curved portions 115 of the bent wirings are curved so as to protrude to one side in the axial direction. With the above configuration, no reverse magnetic field is generated in any of the curved portions 115, and the acquisition efficiency of the inductor can be increased.

[0184] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the side surface of the curved portion 115 of the bottom wiring 11b has a recess 115a. The recess 115a is provided on the protruding side surface of the curved portion 115. The recess 115a is provided at a position facing the first through wiring 13 connected to adjacent bottom wiring 11b in the axial direction AX. With the above configuration, since the side surface of the curved portion 115 has a recess 115a, the width of the curved portion 115 can be reduced, and the possibility of contact between two adjacent bent wirings in the axial direction can be reduced. Note that the side surface of the curved portion 115 of the top wiring 11t may also have a recess 115a.

[0185] Preferably, the bent wiring consists only of the curved portion 115. With the above configuration, since the bent wiring does not include a straight portion, the length of the coil 110 can be made longer. At least one of the multiple bent wirings may consist only of the curved portion 115.

[0186] Furthermore, the radius of curvature of all curved sections 115 may be the same, or the radii of curvature of at least two curved sections 115 may be different from each other. Also, a single curved section 115 may have multiple different radii of curvature, in which case the radii of curvature may change continuously or in steps.

[0187] <Fourth Embodiment> Figure 14 is a schematic bottom view of the fourth embodiment of the inductor component, viewed from the bottom. In Figure 14, the top wiring 11t is shown as viewed from the bottom. For convenience, the first through-wiring 13 and the second through-wiring 14 are drawn with dashed lines, and the base body 10 is drawn transparently. The fourth embodiment differs from Figure 10 of the second embodiment in the shape of the top wiring, and these differences in configuration will be explained below. The other configurations are the same as those of the second embodiment, and their explanation will be omitted.

[0188] As shown in Figure 14, in the inductor component 1K of the fourth embodiment, when viewed from a direction perpendicular to the bottom surface 100b (Z direction), all top surface wiring 11t are bent wirings having curved portions 115.

[0189] Specifically, the top surface wiring 11t on one side (upper side in the figure) in the direction of axis AX includes a curved portion 115 and a straight portion. The straight portion is located at the end of the top surface wiring 11t on the side of the first through-wiring 13. The curved portion 115 is located at the end of the top surface wiring 11t on the side of the second through-wiring 14. The curved portion 115 is curved so as to protrude upward in the figure.

[0190] The top surface wiring 11t on the other side (lower side in the figure) in the direction of axis AX includes a curved section 115 and a straight section. The straight section is located at the end of the top surface wiring 11t on the side of the first through-wiring 13 and the end of the top surface wiring 11t on the side of the second through-wiring 14. The curved section 115 is located between the straight sections at both ends. The curved section 115 is curved in a meandering manner.

[0191] According to the above configuration, since the top wiring 11t is a bent wiring, the length of the wiring of the coil 110 can be changed without changing the size of the inductor component 1K, and the inductance can be easily adjusted. At least one of the multiple bottom wirings 11b and multiple top wirings 11t is a bent wiring having a curved portion 115.

[0192] Preferably, similar to the third embodiment, there are multiple bent wirings, and when viewed from a direction perpendicular to the bottom surface 100b, all the curved portions 115 of the bent wirings are curved to protrude to one side in the axial direction. With the above configuration, no reverse magnetic field is generated in any of the curved portions 115, and the acquisition efficiency of the inductor can be increased.

[0193] Preferably, similar to the third embodiment, the side surface of the curved portion 115 has a recess when viewed from a direction perpendicular to the bottom surface 100b. With the above configuration, since the side surface of the curved portion 115 has a recess, the width of the curved portion 115 can be reduced, and the possibility of contact between two adjacent bent wirings in the axial direction can be reduced.

[0194] Preferably, as in the third embodiment, the bent wiring consists only of the curved portion 115. With the above configuration, since the bent wiring does not include a straight portion, the length of the coil 110 can be made longer. At least one of the multiple bent wirings may consist only of the curved portion 115.

[0195] This disclosure is not limited to the embodiments described above, and design modifications are possible without departing from the gist of this disclosure. For example, the features of each of the first to fourth embodiments may be combined in various ways. For example, two or more types of bent wiring from each of the first to fourth embodiments may be mixed together.

[0196] This disclosure includes the following aspects. <1> A base body including a first principal surface and a second principal surface that are opposite to each other, A coil provided on the aforementioned body and wound spirally along the axis, A first external electrode and a second external electrode are provided on the base body and electrically connected to the coil. Equipped with, The shaft of the coil is arranged parallel to the first main surface. The aforementioned coil is A plurality of first coil wirings are provided on the first main surface side with respect to the shaft and are arranged along the shaft on a plane parallel to the first main surface, A plurality of second coil wirings are provided on the second main surface side with respect to the shaft and are arranged along the shaft on a plane parallel to the second main surface, A plurality of first through-wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis, A plurality of second through-wirings extend from the first coil wiring toward the second coil wiring, are provided on the opposite side of the axis from the first through-wiring, and are arranged along the axis. Includes, The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a portion of the helical shape. An inductor component in which, when viewed from a direction perpendicular to the first main surface, at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having first and second portions that are at different angles to the axis. <2> Viewed from a direction perpendicular to the first main surface, the first portion is a portion perpendicular to the axis or parallel to the axis, and the second portion is a portion that intersects the axis at an acute angle. <1> The inductor components listed below. <3> The aforementioned substrate contains SiO2, <1> or <2> The inductor components listed below. <4> In two bent wirings adjacent to each other in the axial direction, the distance between the second portion of one bent wiring and the second portion of the other bent wiring, viewed from a direction perpendicular to the first main surface, is smaller than the distance between the first portion of one bent wiring and the first portion of the other bent wiring. <1> from <3> An inductor component listed in any one of the following. <5> The bent wiring is provided at least on the first coil wiring, Viewed from a direction perpendicular to the first main surface, at least one of the plurality of second coil wirings extends in a direction that connects the centers of the first through wiring and the second through wiring, respectively, that are connected to the same second coil wiring. <1> from <4> An inductor component listed in any one of the following. <6> The bent wiring is provided at least on the first coil wiring, One of the plurality of first coil wirings has a first end connected to the first external electrode and a second end connected to the first through wiring, Viewed from a direction perpendicular to the first main surface, the one first coil wiring extends in a direction that connects the first end and the second end in a straight line. <1> from <5> An inductor component listed in any one of the following. <7> Viewed from a direction perpendicular to the first main surface, the first portion is the portion perpendicular to the axis, Viewed from a direction perpendicular to the first main surface, the length of the first portion is less than half the width of the body in the direction perpendicular to the axis. <1> from <6> An inductor component listed in any one of the following. <8> Viewed from a direction perpendicular to the first main surface, the first portion is the portion perpendicular to the axis, and the second portion is the portion that intersects the axis at an acute angle. When viewed from a direction perpendicular to the first main surface, the width of the second portion is 0.5 times or more and 0.95 times or less the width of the first portion. <1> from <7> An inductor component listed in any one of the following. <9> Viewed from a direction perpendicular to the first principal surface, the shape of the coil is 180° rotationally symmetric about the midpoint of the coil's axial direction. <1> from <8> An inductor component listed in any one of the following. <10> When viewed from a direction perpendicular to the first main surface, the length of the bent wiring between the centers of the first and second through-wirings connected to the bent wiring is 4% or more greater than the length of the straight line connecting the centers of the first and second through-wirings connected to the same bent wiring. <1> from <9> An inductor component listed in any one of the following. <11> Viewed from a direction perpendicular to the first main surface, the first portion is the portion perpendicular to the axis, and the second portion is the portion that intersects the axis at an acute angle. When viewed from a direction perpendicular to the first main surface, the angle of the second portion with respect to the axis is defined as the first angle θ1, and the angle of the straight line connecting the centers of the first and second through-wirings connected to the bent wiring having the same second portion is defined as the second angle θ2, then the second angle θ2 is greater than the first angle θ1, the first angle θ1 is greater than 45° and less than 80°, and the difference between the second angle θ2 and the first angle θ1 is greater than 1° and less than 45°. <1> from <10> An inductor component listed in any one of the following. <12> The bent wiring is provided at least on the first coil wiring, Of the plurality of first coil wirings, the outermost first coil wiring located on the outermost side in the axial direction is not the bent wiring, Viewed from a direction perpendicular to the first main surface, the maximum axial length of the outermost first coil wiring is greater than the maximum axial length of the first coil wiring adjacent to the outermost first coil wiring in the axial direction. <1> from <11> An inductor component listed in any one of the following. <13> A base body including a first principal surface and a second principal surface that are opposite to each other, A coil provided on the aforementioned body and wound spirally along the axis, A first external electrode and a second external electrode are provided on the base body and electrically connected to the coil. Equipped with, The shaft of the coil is arranged parallel to the first main surface. The aforementioned coil is A plurality of first coil wirings are provided on the first main surface side with respect to the shaft and are arranged along the shaft on a plane parallel to the first main surface, A plurality of second coil wirings are provided on the second main surface side with respect to the shaft and are arranged along the shaft on a plane parallel to the second main surface, A plurality of first through-wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis, A plurality of second through-wirings extend from the first coil wiring toward the second coil wiring, are provided on the opposite side of the axis from the first through-wiring, and are arranged along the axis. Includes, The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a portion of the helical shape. An inductor component in which, when viewed from a direction perpendicular to the first main surface, at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having a curved portion. <14> There are multiple instances of the aforementioned bent wiring. When viewed from a direction perpendicular to the first main surface, all of the curved portions are curved so as to protrude to one side in the axial direction. <13> The inductor components listed below. <15> Viewed from a direction perpendicular to the first main surface, the side surface of the curved portion has a recess. <13> or <14> The inductor components listed below. <16> The aforementioned bent wiring consists only of the curved portion. <13> from <15> An inductor component listed in any one of the following. [Explanation of Symbols]

[0197] 1.1A-1K Inductor Component 10 Base Body 11b Bottom wiring (first coil wiring) 11t Top-mounted wiring (second coil wiring) 11b1, 11t1 bent wiring 11b2, 11t2 straight wiring 11b3, 11t3 wide wiring 13. First Through Wiring 13e end 13m central part 13s conductive layer 13u non-conductive layer 14. Second through-wiring 22 Insulator 100b Base (First main surface) 100t Top surface (second main surface) 110, 110A, 110B coils 111 Part 1 112 Part 2 113 Part 3 115 Curved section 115a recess 121 1st external electrode 121a Recess 121b Bottom part 121V via section 121e1 Base layer 121e2 Plating layer 122 2nd external electrode 122b Bottom part 122V via section AX axis α Angle between the first part and the axis β Angle between the second part and the axis γ Angle between the third part and the axis θ1, θ2, θ3 1st, 2nd, 3rd angle C1,C2,C3 1st, 2nd, 3rd center line d1,d2,d3 1st, 2nd, 3rd distance L1, L2 First and second lengths M1,M2,M3,M4 Maximum length N straight line

Claims

1. A base body including a first principal surface and a second principal surface that are opposite to each other, A coil provided on the aforementioned body and wound spirally along the axis, A first external electrode and a second external electrode are provided on the aforementioned body and electrically connected to the coil. Equipped with, The shaft of the coil is arranged parallel to the first main surface. The aforementioned coil is A plurality of first coil wirings are provided on the first main surface side with respect to the shaft and are arranged along the shaft on a plane parallel to the first main surface, A plurality of second coil wirings are provided on the second main surface side with respect to the shaft and are arranged along the shaft on a plane parallel to the second main surface, A plurality of first through-wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis, A plurality of second through-wirings extend from the first coil wiring toward the second coil wiring, are provided on the opposite side of the shaft from the first through-wiring, and are arranged along the shaft. Includes, The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a portion of the helical shape. An inductor component in which, when viewed from a direction perpendicular to the first main surface, at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having a curved portion, and when viewed from a direction perpendicular to the first main surface, the side surface of the curved portion has a recess.

2. The inductor component according to claim 1, wherein the base body includes SiO2.

3. There are multiple instances of the aforementioned bent wiring. The inductor component according to claim 1 or 2, wherein, when viewed from a direction perpendicular to the first main surface, all of the curved portions are curved to protrude to one side in the direction along the axis.

4. The inductor component according to claim 1 or 2, wherein the bent wiring consists only of the curved portion.

Images