Coil components

Abstract

To enhance a magnetic characteristic in a coil component having a structure that a coil part formed by alternately laminating an inter-layer insulation film and a conductive layer is embedded in a magnetic element body.SOLUTION: A coil component 1 comprises: a magnetic element body M; and a coil part 3 that is embedded into the magnetic element body M, and in which inter-layer insulation films 10 to 14 and conductive layers C0 to C3 are alternately laminated. Each of the conductive layers C0 to C3 includes a coil pattern. The conductive layer C3 includes a clearance region CL. The magnetic element body M contains: a magnetic resin layer M1 provided in an inner diameter region of the coil part 3; a magnetic resin layer M2 provided in an outer side region of the coil part 3; magnetic resin layers M3 and M4 covering the coil part 3 from a shaft direction; and a magnetic resin layer M5 that is embedded into the clearance region CL, and is contacted to the magnetic resin layers M1 and M2. In the other conductive layers C0 to C2, the clearance region CL is not provided. Thus, since a volume of the magnetic element body M is increased, a magnetic characteristic is enhanced.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present disclosure relates to a coil component, and particularly to a coil component having a structure in which a coil portion formed by alternately laminating an interlayer insulating film and a conductor layer is embedded in a magnetic element body.

Background Art

[0002] Patent Document 1 discloses a coil component having a structure in which a coil portion formed by alternately laminating an interlayer insulating film and a conductor layer is embedded in a magnetic element body. In Patent Document 1, each coil pattern located in a conductor layer is less than one turn. And, among portions where no coil pattern is provided, a dummy pattern for eliminating a step is provided in a portion overlapping with the coil pattern of another conductor layer.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] [[ID=�5]]In the coil component described in Patent Document 1, a magnetic resin layer embedded in the inner diameter region of the coil portion and a magnetic resin layer embedded in the outer region in the radial direction of the coil portion are magnetically connected via a magnetic resin layer covering the coil portion from the axial direction.

[0005] In the present disclosure, a technique for further enhancing magnetic characteristics in a coil component having a structure in which a coil portion formed by alternately laminating an interlayer insulating film and a conductor layer is embedded in a magnetic element body is described.

Means for Solving the Problems

[0006] A coil component according to one aspect of the present disclosure comprises a magnetic element and a coil portion embedded in the magnetic element, wherein a plurality of interlayer insulating films and a plurality of conductor layers are alternately stacked, each of the plurality of conductor layers having a coil pattern, and of the plurality of conductor layers, one or more first conductor layers have a clearance region where no coil pattern exists, extending radially outward from the central axis of the coil portion, the magnetic element includes a first magnetic resin layer provided in the inner diameter region of the coil portion, a second magnetic resin layer provided in the radial outer region of the coil portion, a third magnetic resin layer covering the coil portion from one side in the axial direction, a fourth magnetic resin layer covering the coil portion from the other side in the axial direction, and a fifth magnetic resin layer embedded in the clearance region and in contact with the first magnetic resin layer and the second magnetic resin layer, and of the plurality of conductor layers, the conductor layers other than the first conductor layer do not have a clearance region.

[0007] According to this disclosure, since the volume of the magnetic element is increased, it becomes possible to provide a coil section with enhanced magnetic properties.

[0008] In this disclosure, the first conductor layer may be provided on only one of the multiple conductor layers. This facilitates pattern design.

[0009] In this disclosure, the first conductor layer may be located at one end in the axial direction of the plurality of conductor layers. This allows the fifth magnetic resin layer and the third magnetic resin layer to be integrated, thereby further enhancing the magnetic properties.

[0010] A coil component according to one aspect of this disclosure may further include terminal electrodes covering a third magnetic resin layer and a conductor post embedded in the third magnetic resin layer, one end of which is connected to one end of a coil pattern located in the first conductor layer, and the other end of which is connected to the terminal electrode. This makes it possible to use the surface of the third magnetic resin layer as a mounting surface.

[0011] In this disclosure, the magnetic element is rectangular in shape, with a first direction as the longer side and a second direction perpendicular to the first direction as the shorter side when viewed from the axial direction, and the clearance region may be provided along the first direction. Since the magnetic flux density is high along the longer side of the magnetic element, the magnetic properties are further enhanced.

[0012] A coil component according to another aspect of the present disclosure comprises a magnetic element and a coil portion embedded in the magnetic element, wherein a plurality of interlayer insulating films and a plurality of conductor layers are alternately stacked, each of the plurality of conductor layers having a coil pattern, and a first conductor layer included in the plurality of conductor layers has a clearance region where no coil pattern exists, extending radially outward from the central axis of the coil portion, and the magnetic element includes a first magnetic resin layer provided in the inner diameter region of the coil portion, a second magnetic resin layer provided in the radial outer region of the coil portion, a third magnetic resin layer covering the coil portion from one side in the axial direction, a fourth magnetic resin layer covering the coil portion from the other side in the axial direction, and a fifth magnetic resin layer embedded in the clearance region and in contact with the first magnetic resin layer and the second magnetic resin layer, wherein only the first conductor layer among the plurality of conductor layers is provided with a clearance region in which the fifth magnetic resin layer is embedded.

[0013] According to this disclosure, since the volume of the magnetic element is increased, it becomes possible to provide a coil section with enhanced magnetic properties.

[0014] A coil component according to yet another aspect of the present disclosure comprises a magnetic element and a coil portion embedded in the magnetic element, wherein a plurality of interlayer insulating films and a plurality of conductor layers are alternately laminated, each of the plurality of conductor layers having a coil pattern, and a first conductor layer included in the plurality of conductor layers has a clearance region where no coil pattern exists, extending radially outward from the central axis of the coil portion, and the magnetic element includes a first magnetic resin layer provided in the inner diameter region of the coil portion, a second magnetic resin layer provided in the radial outer region of the coil portion, a third magnetic resin layer covering the coil portion from one side in the axial direction, a fourth magnetic resin layer covering the coil portion from the other side in the axial direction, and a fifth magnetic resin layer embedded in the clearance region and in contact with the first magnetic resin layer and the second magnetic resin layer, wherein in the conductor layers other than the first conductor layer, the first magnetic resin layer and the second magnetic resin layer are separated by the coil pattern included in the conductor layer.

[0015] According to this disclosure, since the volume of the magnetic element is increased, it becomes possible to provide a coil section with enhanced magnetic properties.

[0016] In this disclosure, the plurality of conductor layers include two first conductor layers, and the two first conductor layers may be adjacent in the axial direction. Furthermore, the clearance regions of the two first conductor layers may have different planar positions when viewed from the axial direction. This makes pattern design easier. Moreover, the two first conductor layers may be inner layers that are not located at the ends in the axial direction among the plurality of conductor layers. This increases the overall mechanical strength. [Effects of the Invention]

[0017] Thus, according to this disclosure, a technology is provided for further enhancing the magnetic properties of a coil component having a structure in which a coil portion, in which interlayer insulating films and conductive layers are alternately stacked, is embedded with a magnetic element. [Brief explanation of the drawing]

[0018] [Figure 1]FIG. 1 is a schematic perspective view for explaining the appearance of the coil component 1 according to an embodiment of the present disclosure. [Figure 2] FIG. 2 is a schematic cross-sectional view of the coil component 1. [Figure 3] FIG. 3 is a schematic plan view for explaining the pattern shape of the conductor layer C0. [Figure 4] FIG. 4 is a schematic plan view for explaining the pattern shape of the conductor layer C1. [Figure 5] FIG. 5 is a schematic plan view for explaining the pattern shape of the conductor layer C2. [Figure 6] FIG. 6 is a schematic plan view for explaining the pattern shape of the conductor layer C3. [Figure 7] FIG. 7 is a process diagram for explaining the manufacturing method of the coil component 1. [Figure 8] FIG. 8 is a process diagram for explaining the manufacturing method of the coil component 1. [Figure 9] FIG. 9 is a process diagram for explaining the manufacturing method of the coil component 1. [Figure 10] FIG. 10 is a process diagram for explaining the manufacturing method of the coil component 1. [Figure 11] FIG. 11 is a process diagram for explaining the manufacturing method of the coil component 1. [Figure 12] FIG. 12 is a process diagram for explaining the manufacturing method of the coil component 1. [Figure 13] FIG. 13 is a process diagram for explaining the manufacturing method of the coil component 1. [Figure 14] FIG. 14 is a process diagram for explaining the manufacturing method of the coil component 1. [Figure 15] FIG. 15 is a process diagram for explaining the manufacturing method of the coil component 1. [Figure 16] FIG. 16 is a schematic plan view for explaining the shape of the conductor layer C3 in the manufacturing process. [Figure 17] FIG. 17 is a schematic plan view for explaining the pattern shape of the conductor layer C0 according to a modification. [Figure 18]Figure 18 is a schematic plan view illustrating the pattern shape of the conductor layer C1 in a modified example. [Figure 19] Figure 19 is a schematic plan view illustrating the pattern shape of the conductor layer C2 in a modified example. [Figure 20] Figure 20 is a schematic plan view illustrating the pattern shape of the conductor layer C3 in a modified example. [Modes for carrying out the invention]

[0019] The embodiments of this disclosure will be described in detail below with reference to the attached drawings.

[0020] Figure 1 is a schematic perspective view illustrating the appearance of a coil component 1 according to one embodiment of the present disclosure.

[0021] As shown in Figure 1, the coil component 1 according to this embodiment is a chip-type coil component having a structure in which a coil portion 3 with the coil axis in the Z direction is embedded in a magnetic element M. The magnetic element M is rectangular in shape, with the X direction as the longer side and the Y direction as the shorter side when viewed from the Z direction. The magnetic element M has a mounting surface 4 and a top surface 5 that are perpendicular to the coil axis and constitute the XY plane. The mounting surface 4 and the top surface 5 are located on opposite sides of each other. Terminal electrodes E1 and E2 are provided on the mounting surface 4, and during mounting, the terminal electrodes E1 and E2 are soldered to the circuit board so that the mounting surface 4 faces the circuit board. In other words, the vertical direction of the coil component 1 shown in Figure 1 is 180° different from when it is mounted.

[0022] Figure 2 is a schematic cross-sectional view of the coil component 1 according to this embodiment.

[0023] As shown in Figure 2, the coil component 1 according to this embodiment has a coil section 3 consisting of interlayer insulating films 10 to 14 and conductor layers C0 to C3 that are alternately stacked in the coil axis direction (Z direction). The conductor layers C0 to C3 are made of Cu or the like. The magnetic element M consists of magnetic resin layers M4 and M10. Of these, the magnetic resin layer M10 includes a magnetic resin layer M1 located in the inner diameter region of the coil section 3, a magnetic resin layer M2 located in the outer radial region of the coil section 3, and a magnetic resin layer M3 located on one side of the coil section 3 in the coil axis direction (for example, the side on which the terminal electrode E2, described later, is provided). The magnetic resin layer M4 is provided on the other side of the coil section 3 in the coil axis direction (for example, the side facing the terminal electrode and on which the cover insulating film 22, described later, is provided). Hereinafter, the magnetic resin layer M1 may be referred to as the first magnetic resin layer, the magnetic resin layer M2 as the second magnetic resin layer, the magnetic resin layer M3 as the third magnetic resin layer, and the magnetic resin layer M4 as the fourth magnetic resin layer. The magnetic resin layers M4 and M10 consist of a composite magnetic material containing a magnetic filler and a binder resin. The composite magnetic material constituting magnetic resin layer M4 and the composite magnetic material constituting magnetic resin layer M10 may be the same material or may be different materials. As the magnetic filler, metallic magnetic materials such as iron (Fe) or permalloy-based materials can be used. As the binder resin, epoxy resin can be used.

[0024] Conductor posts P1 and P2 are embedded in the magnetic resin layer M3. Conductor posts P1 and P2 are made of Cu or the like and are pillar-shaped conductors extending in the Z direction. One end of conductor post P1, the lower surface B, is connected to one end of a coil formed by conductor layers C0 to C3, and one end of conductor post P2, the lower surface B, is connected to the other end of the coil formed by conductor layers C0 to C3. On the other hand, the other ends of conductor posts P1 and P2, the upper surfaces T, are exposed from the mounting surface 4 so as to be in the same plane as the mounting surface 4 and are connected to terminal electrodes E1 and E2, respectively. The side surfaces S (surfaces along the Z direction) of conductor posts P1 and P2 are covered with a post protective film 15. As a result, the post protective film 15 is interposed between the conductor posts P1 and P2 and the magnetic element M, preventing contact between the conductor posts P1 and P2 and the magnetic element M, and ensuring insulation between the two. Furthermore, when the coil component 1 of this embodiment, which has conductive posts P1 and P2, is mounted on a circuit board or the like, the conductive posts P1 and P2 relieve stress, reducing damage to the coil portion 3. This also improves the mounting reliability of the coil component 1.

[0025] The mounting surface 4 and the top surface 5 of the magnetic element M are covered with cover insulating films 21 and 22, respectively. Of these, the cover insulating film 22 covers almost the entire top surface 5, while the cover insulating film 21 has openings 21a and 21b, respectively, at positions that overlap with the conductor posts P1 and P2. As a result, the top surfaces T (XY plane) of the conductor posts P1 and P2 are exposed through the openings 21a and 21b of the cover insulating film 21, respectively. Terminal electrodes E1 and E2 are provided on the cover insulating film 21. The terminal electrodes E1 and E2 are composed of a resin electrode 31 containing metal powder, such as Ag, and a binder resin, and a Ni film 32 and a Sn film 33 formed on the surface of the resin electrode 31. The terminal electrodes E1 and E2 are connected to the top surfaces T of the conductor posts P1 and P2, respectively, via the openings 21a and 21b of the cover insulating film 21. While it is not essential to cover the mounting surface 4 and top surface 5 of the magnetic element M with cover insulating films 21 and 22, providing the cover insulating film 21 prevents contact between the terminal electrodes E1 and E2 and the magnetic element M, thereby increasing reliability. Furthermore, providing the cover insulating film 22 also increases reliability and allows for the placement of directional marks on the top surface 5.

[0026] Figures 3 to 6 are schematic plan views illustrating the pattern shapes of the conductor layers C0 to C3, respectively.

[0027] As shown in Figure 3, a coil pattern 100 is provided in the conductor layer C0. The coil pattern 100 is a pattern that makes approximately one turn, and both ends are connected to the conductor layer C1 via vias 11a and 11b provided in the interlayer insulating film 11. A magnetic resin layer M1 is provided in the inner diameter region of the coil pattern 100, and a magnetic resin layer M2 is provided in the outer region of the coil pattern 100. The gap between one end and the other end of the coil pattern 100 is filled with the interlayer insulating film 11. Therefore, within the plane of the conductor layer C0, the magnetic resin layer M1 and the magnetic resin layer M2 are separated.

[0028] As shown in Figure 4, the conductor layer C1 is provided with a coil pattern 110 and a connection pattern 111. The coil pattern 110 is a pattern that makes approximately one turn, and one end of it is connected to the other end of the coil pattern 100 of the conductor layer C0 via a via 11b provided in the interlayer insulating film 11, and the other end is connected to the conductor layer C2 via a via 12b provided in the interlayer insulating film 12. The connection pattern 111 is provided in a position that overlaps with one end of the coil pattern 100 provided in the conductor layer C0, and is connected to one end of the coil pattern 100 of the conductor layer C0 via a via 11a provided in the interlayer insulating film 11, and is connected to the conductor layer C2 via a via 12a provided in the interlayer insulating film 12. A magnetic resin layer M1 is provided in the inner diameter region of the coil pattern 110, and a magnetic resin layer M2 is provided in the outer region of the coil pattern 110. The gap between one end and the other end of the coil pattern 110 is filled with the interlayer insulating film 12. Therefore, within the plane of the conductive layer C1, the magnetic resin layer M1 and the magnetic resin layer M2 are separated.

[0029] As shown in Figure 5, the conductor layer C2 is provided with a coil pattern 120 and a connection pattern 121. The coil pattern 120 is a pattern that makes approximately one turn, and one end of it is connected to the other end of the coil pattern 110 of the conductor layer C1 via a via 12b provided in the interlayer insulating film 12, and the other end is connected to the conductor layer C3 via a via 13b provided in the interlayer insulating film 13. The connection pattern 121 is provided in a position that overlaps with the connection pattern 111 provided in the conductor layer C1, and is connected to the connection pattern 111 of the conductor layer C1 via a via 12a provided in the interlayer insulating film 12, and is also connected to the conductor layer C3 via a via 13a provided in the interlayer insulating film 13. A magnetic resin layer M1 is provided in the inner diameter region of the coil pattern 120, and a magnetic resin layer M2 is provided in the outer region of the coil pattern 120. The gap between one end and the other end of the coil pattern 120 is filled with the interlayer insulating film 13. Within the plane of the conductive layer C2, the magnetic resin layer M1 and the magnetic resin layer M2 are separated.

[0030] As shown in Figure 6, the conductor layer C3 is provided with a coil pattern 130 and a connection pattern 131. The coil pattern 130 is a pattern that circles approximately 0.5 turns, and one end is connected to the other end of the coil pattern 120 of the conductor layer C2 via a via 13b provided in the interlayer insulating film 13, and the other end is connected to the conductor post P2 via a via 14b provided in the interlayer insulating film 14. The connection pattern 131 is provided in a position that overlaps with the connection pattern 121 provided in the conductor layer C2, and is connected to the connection pattern 121 of the conductor layer C2 via a via 13a provided in the interlayer insulating film 13, and is also connected to the conductor post P1 via a via 14a provided in the interlayer insulating film 14. A magnetic resin layer M1 is provided in the inner diameter region of the coil pattern 130, and a magnetic resin layer M2 is provided in the outer region of the coil pattern 130. A clearance region CL is provided between one end and the other end of the coil pattern 130 where no coil pattern exists. The clearance region CL is a region that divides the coil pattern 130 radially outward from the central axis of the coil portion 3, and in the example shown in Figure 6, it is provided along the long side (X direction) and the short side (Y direction). The clearance region CL is not filled by the interlayer insulating film 14, but is filled by the magnetic resin layer M5, which is part of the magnetic resin layer M10. The magnetic resin layer M5 is in contact with the magnetic resin layers M1 and M2. As a result, within the plane of the conductor layer C3, the magnetic resin layers M1 and M2 are connected via the magnetic resin layer M5.

[0031] As a result, coil patterns 100, 110, 120, and 130 are connected in series between terminal electrodes E1 and E2, forming a coil of approximately 3.5 turns in total. The coil component 1 according to this embodiment is an embedded type coil component having a structure in which a coil section 3, which is made up of alternately stacked interlayer insulating films 10 to 14 and conductor layers C0 to C3, is embedded in a magnetic element M. Its structure differs from that of a laminated type coil component, in which a magnetic sheet made of ceramic or the like and a coil pattern are alternately stacked. For example, in a laminated type coil component, a magnetic sheet is interposed between adjacent coil patterns in the stacking direction, but in the coil component 1 according to this embodiment, adjacent coil patterns in the stacking direction are insulated by an interlayer insulating film, and no magnetic element M is interposed between them. It also differs in structure from a sheet coil of the type in which a coil pattern is formed on a printed circuit board.

[0032] In this embodiment, the magnetic resin layer M1 located in the inner diameter region of the coil portion 3 and the magnetic resin layer M2 located in the outer region are connected not only via magnetic resin layers M3 and M4, but also via magnetic resin layer M5 located in the clearance region CL of the conductor layer C3. This increases the volume of the magnetic element M, making it possible to obtain higher magnetic properties. Moreover, since the conductor layer C3 in which the clearance region CL is formed is located at one end in the Z direction, the magnetic resin layers M3 and M5 are integrated, thereby further enhancing the magnetic properties. In contrast, the other conductor layers C0 to C2 do not have a clearance region CL in which the magnetic resin layer M5 is embedded, and coil patterns 100, 110, and 120 of approximately 1 turn each are arranged there, making it possible to secure a sufficient number of turns. Note that the coil patterns 100, 110, and 120 provided in the conductor layers C0 to C2 may each have more than 1 turn.

[0033] Next, a description will be given of the method for manufacturing the coil component 1 according to this embodiment.

[0034] Figures 7 to 15 are process diagrams illustrating the manufacturing method of the coil component 1 according to this embodiment. Although only the portion corresponding to one coil component 1 is shown in Figures 7 to 15, in reality, multiple coil components 1 are manufactured simultaneously using a substrate assembly.

[0035] First, a support substrate 40 is prepared (Figure 7), and a coil section 3 is formed by alternately forming interlayer insulating films 10-14 and conductor layers C0-C3 on its surface. Then, vias 14a and 14b are formed in the interlayer insulating film 14, and conductor posts P1 and P2 are formed (Figure 8). The conductor layers C0-C3 and conductor posts P1 and P2 can be formed by electroplating. Furthermore, conductor layers C0-C3 include sacrificial patterns 41 located in the inner diameter region and the outer region of the coil section 3. Here, in conductor layers C0-C2, the sacrificial patterns 41 located in the inner diameter region of coil patterns 100, 110, and 120 and the sacrificial patterns 41 located in the outer region of coil patterns 100, 110, and 120 are not in contact and are separated from each other, whereas, as shown in Figure 16, in conductor layer C3, the sacrificial pattern 41 located in the inner diameter region of coil pattern 130 and the sacrificial pattern 41 located in the outer region of coil pattern 13 are integrated via a clearance region CL.

[0036] Next, a post protective film 15 is formed to cover the entire exposed surface of the conductor posts P1 and P2 (Figure 9). The entire exposed surface of the conductor posts P1 and P2 refers to the side surface S along the Z direction and the top surface T that constitutes the XY plane. Next, the sacrificial pattern 41 is removed by wet etching in this state (Figure 10). The conductor pattern constituting the coil portion 3 is covered by the interlayer insulating films 10 to 14 and is therefore not etched. Similarly, the conductor posts P1 and P2 are covered by the post protective film 15 and are therefore not etched. As a result, a space 42 is formed in the inner diameter region and the outer region of the coil portion 3. A space 42 is also formed in the clearance region CL of the conductor layer C3.

[0037] Next, the space 42 formed by the removal of the sacrificial pattern 41 is filled with magnetic resin layer M10 (Figure 11). As a result, the inner diameter region of the coil portion 3 is filled with magnetic resin layer M1, the radial outer region of the coil portion 3 is filled with magnetic resin layer M2, and one side of the coil portion 3 in the coil axis direction is filled with magnetic resin layer M3. Furthermore, the clearance region CL of the conductor layer C3 is filled with magnetic resin layer M5. There are no boundaries between these magnetic resin layers M1-M3 and M5; they are integrated. Next, the surface of magnetic resin layer M3 is polished until the conductor posts P1 and P2 are exposed (Figure 12). This process makes the mounting surface 4 of magnetic resin layer M3 and the upper surfaces T of conductor posts P1 and P2 the same plane. In addition, the flatness of the mounting surface 4 side of magnetic resin layer M3 is significantly improved compared to before polishing.

[0038] Next, after removing the support substrate 40, a magnetic resin layer M4 is formed on the lower side of the magnetic resin layer M10 so as to cover the interlayer insulating film 10 (Figure 13). After that, the upper surface 5 may be smoothed by polishing the surface of the magnetic resin layer M4. Next, cover insulating films 21 and 22 are formed on the mounting surface 4 and the upper surface 5 of the magnetic element M, respectively, and then openings 21a and 21b are formed in the cover insulating film 21 so as to expose a portion of the upper surface T of the conductor posts P1 and P2 (Figure 14).

[0039] Next, terminal electrodes E1 and E2 are formed on the cover insulating film 21 so that they are connected to conductor posts P1 and P2, respectively (Figure 15). Then, by dicing, the coil component 1 according to this embodiment is completed.

[0040] Thus, in this embodiment, since the sacrificial pattern 41 is placed in the clearance region CL of the conductor layer C3, it is possible to prevent the occurrence of steps (recesses where the conductor pattern is not formed) without placing dummy patterns or the like in this area. After the sacrificial pattern 41 is removed, the magnetic resin layer M5 is embedded in the clearance region CL, so that the magnetic resin layer M1 located in the inner diameter region of the coil portion 2 and the magnetic resin layer M2 located in the outer region of the coil portion 2 are connected via the magnetic resin layer M5.

[0041] Figures 17 to 20 are schematic plan views illustrating the pattern shapes of the conductor layers C0 to C3 according to modified examples.

[0042] As shown in Figure 17, the modified conductor layer C0 is provided with a coil pattern 100 that makes approximately one turn, similar to the conductor layer C0 shown in Figure 3, and both ends of the coil pattern are connected to the conductor layer C1 via vias 11a and 11b provided in the interlayer insulating film 11. A magnetic resin layer M1 is provided in the inner diameter region of the coil pattern 100, and a magnetic resin layer M2 is provided in the outer region of the coil pattern 100. The gap between one end and the other end of the coil pattern 100 is filled with the interlayer insulating film 11. Therefore, the magnetic resin layer M1 and the magnetic resin layer M2 are separated within the plane of the conductor layer C0.

[0043] As shown in Figure 18, the modified conductor layer C1 is provided with a coil pattern 110 and a connection pattern 111. The coil pattern 110 is a pattern that circles approximately 3 / 4 turns, and one end is connected to the other end of the coil pattern 100 of the conductor layer C0 via a via 11b provided in the interlayer insulating film 11, and the other end is connected to the conductor layer C2 via a via 12b provided in the interlayer insulating film 12. The connection pattern 111 is provided in a position that overlaps with one end of the coil pattern 100 provided in the conductor layer C0, and is connected to one end of the coil pattern 100 of the conductor layer C0 via a via 11a provided in the interlayer insulating film 11, and is connected to the conductor layer C2 via a via 12a provided in the interlayer insulating film 12. A magnetic resin layer M1 is provided in the inner diameter region of the coil pattern 110, and a magnetic resin layer M2 is provided in the outer region of the coil pattern 110. A clearance region CL is provided between one end and the other end of the coil pattern 110 where no coil pattern exists. The clearance region CL is not filled by the interlayer insulating film 12, but is filled by the magnetic resin layer M5, which is part of the magnetic resin layer M10. The magnetic resin layer M5 is in contact with the magnetic resin layers M1 and M2. As a result, within the plane of the conductor layer C1, the magnetic resin layers M1 and M2 are connected via the magnetic resin layer M5.

[0044] As shown in Figure 19, the modified conductor layer C2 is provided with a coil pattern 120 and a connection pattern 121. The coil pattern 120 is a pattern that circles approximately 3 / 4 turns, and one end is connected to the other end of the coil pattern 110 of the conductor layer C1 via a via 12b provided in the interlayer insulating film 12, and the other end is connected to the conductor layer C3 via a via 13b provided in the interlayer insulating film 13. The connection pattern 121 is provided in a position that overlaps with the connection pattern 111 provided in the conductor layer C1, and is connected to the connection pattern 111 of the conductor layer C1 via a via 12a provided in the interlayer insulating film 12, and is also connected to the conductor layer C3 via a via 13a provided in the interlayer insulating film 13. A magnetic resin layer M1 is provided in the inner diameter region of the coil pattern 120, and a magnetic resin layer M2 is provided in the outer region of the coil pattern 120. A clearance region CL is provided between one end and the other end of the coil pattern 120 where no coil pattern exists. The clearance region CL is not filled by the interlayer insulating film 13, but is filled by the magnetic resin layer M5, which is part of the magnetic resin layer M10. The magnetic resin layer M5 is in contact with the magnetic resin layers M1 and M2. As a result, within the plane of the conductor layer C2, the magnetic resin layers M1 and M2 are connected via the magnetic resin layer M5.

[0045] As shown in Figure 20, the conductor layer C3 is provided with a coil pattern 130 and a connection pattern 131. The coil pattern 130 is a pattern that makes approximately one turn, and one end of it is connected to the other end of the coil pattern 120 of the conductor layer C2 via a via 13b provided in the interlayer insulating film 13, and the other end is connected to the conductor post P2 via a via 14b provided in the interlayer insulating film 14. The connection pattern 131 is provided in a position that overlaps with the connection pattern 121 provided in the conductor layer C2, and is connected to the connection pattern 121 of the conductor layer C2 via a via 13a provided in the interlayer insulating film 13, and is also connected to the conductor post P1 via a via 14a provided in the interlayer insulating film 14. A magnetic resin layer M1 is provided in the inner diameter region of the coil pattern 130, and a magnetic resin layer M2 is provided in the outer region of the coil pattern 130. The gap between one end and the other end of the coil pattern 130 is filled with the interlayer insulating film 14. Therefore, within the plane of the conductive layer C3, the magnetic resin layer M1 and the magnetic resin layer M2 are separated.

[0046] In this modified example, magnetic resin layers M1 and M2 are connected via magnetic resin layer M5 located in the clearance region CL of conductor layers C1 and C2. Here, since conductor layers C1 and C2, which have a clearance region CL, are inner layers not located at the ends in the axial direction among the multiple conductor layers C0 to C3, the coil patterns 100 and 130 of conductor layers C0 and C3, which are located at the ends in the axial direction, can both be approximately one turn, thereby increasing the overall mechanical strength. Furthermore, since conductor layers C1 and C2, which have a clearance region CL, are adjacent in the axial direction, and the planar positions of these clearance regions CL are different from each other, pattern design is also easy. In this case, the clearance region CL of conductor layer C1 and the clearance region CL of conductor layer C2 do not need to overlap in a planar view from the axial direction.

[0047] While embodiments of the technology described herein have been explained above, it goes without saying that the technology described herein is not limited to the embodiments described above, and various modifications are possible without departing from its spirit, and these modifications are also included within the scope of the technology described herein.

[0048] For example, in the above embodiment, the coil section 3 is composed of four conductor layers C0 to C3, but the number of conductor layers included in the coil section is not particularly limited. Also, in the above embodiment, the number of turns of the coil patterns 100, 110, and 120 provided in each conductor layer C0 to C2 is approximately 1 turn, but the number of turns of the coil patterns provided in each conductor layer is not particularly limited. [Explanation of Symbols]

[0049] 1. Coil component 3. Coil section 4. Implementation aspects 5 Top side 10-14 interlayer insulating film 11a, 11b, 12a, 12b, 13a, 13b, 14a, 14b Via 15 Post-protective film 21,22 Cover insulating film 21a,21b opening 31 Resin electrodes 32 Ni film 33 Sn film 40 Support substrate 41 Sacrifice Patterns 42 Space 100, 110, 120, 130 coil patterns 111,121,131 Connection Patterns B Underside of conductor post C0~C3 Conductor Layers CL Clearance Area E1,E2 terminal electrode M magnetic element M1~M5,M10 Magnetic resin layer P1, P2 Conductor Posts S side of conductor post Top surface of the T conductor post

Claims

1. Magnetic element and, The magnetic element comprises a coil portion embedded in it, in which multiple interlayer insulating films and multiple conductor layers are alternately stacked, Each of the plurality of conductor layers has a coil pattern, Of the plurality of conductor layers, one or more first conductor layers have a clearance region where the coil pattern is absent, extending radially outward from the central axis of the coil portion. The magnetic element includes a first magnetic resin layer provided in the inner diameter region of the coil portion, a second magnetic resin layer provided in the outer radial region of the coil portion, a third magnetic resin layer covering the coil portion from one side in the axial direction, a fourth magnetic resin layer covering the coil portion from the other side in the axial direction, and a fifth magnetic resin layer embedded in the clearance region and in contact with the first magnetic resin layer and the second magnetic resin layer. A coil component in which, among the plurality of conductor layers, the conductor layers other than the first conductor layer are not provided with the clearance region in which the fifth magnetic resin layer is embedded.

2. The coil component according to claim 1, wherein the first conductor layer is provided on only one of the plurality of conductor layers.

3. The coil component according to claim 2, wherein the first conductor layer is located at one end of the plurality of conductor layers in the axial direction.

4. The terminal electrode covering the third magnetic resin layer, The coil component according to claim 3, further comprising: a conductor post embedded in the third magnetic resin layer, one end of which is connected to one end of the coil pattern located in the first conductor layer, and the other end of which is connected to the terminal electrode.

5. The magnetic element is rectangular in shape, with the first direction being the longer side and the second direction perpendicular to the first direction being the shorter side when viewed from the axial direction. The coil component according to any one of claims 1 to 4, wherein the clearance region is provided along the first direction.

6. Magnetic element and, The magnetic element comprises a coil portion embedded in it, in which multiple interlayer insulating films and multiple conductor layers are alternately stacked, Each of the plurality of conductor layers has a coil pattern, The first conductor layer included in the plurality of conductor layers has a clearance region where the coil pattern does not exist, extending radially outward from the central axis of the coil portion. The magnetic element includes a first magnetic resin layer provided in the inner diameter region of the coil portion, a second magnetic resin layer provided in the outer radial region of the coil portion, a third magnetic resin layer covering the coil portion from one side in the axial direction, a fourth magnetic resin layer covering the coil portion from the other side in the axial direction, and a fifth magnetic resin layer embedded in the clearance region and in contact with the first magnetic resin layer and the second magnetic resin layer. A coil component in which, among the plurality of conductor layers, the clearance region in which the fifth magnetic resin layer is embedded is provided only in the first conductor layer.

7. Magnetic element and, The magnetic element comprises a coil portion embedded in it, in which multiple interlayer insulating films and multiple conductor layers are alternately stacked, Each of the plurality of conductor layers has a coil pattern, The first conductor layer included in the plurality of conductor layers has a clearance region where the coil pattern does not exist, extending radially outward from the central axis of the coil portion. The magnetic element includes a first magnetic resin layer provided in the inner diameter region of the coil portion, a second magnetic resin layer provided in the outer radial region of the coil portion, a third magnetic resin layer covering the coil portion from one side in the axial direction, a fourth magnetic resin layer covering the coil portion from the other side in the axial direction, and a fifth magnetic resin layer embedded in the clearance region and in contact with the first magnetic resin layer and the second magnetic resin layer. A coil component in which, among the plurality of conductor layers, the conductor layers other than the first conductor layer are separated from the first magnetic resin layer by the coil pattern contained in the conductor layer.

8. The plurality of conductor layers include two of the first conductor layer, The coil component according to claim 7, wherein the two first conductive layers are adjacent in the axial direction.

9. The coil component according to claim 8, wherein the clearance regions of the two first conductive layers have different planar positions when viewed from the axial direction.

10. The coil component according to claim 8 or 9, wherein the first conductor layer of the two layers is an inner layer among a plurality of conductor layers that is not located at the end in the axial direction.

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