Shadowing lift to improve wafer edge performance

Abstract

A method and apparatus for processing a substrate is described herein. The described method and apparatus allows for the raising and lowering of a shadow ring in a process chamber, either simultaneously with or separately from a plurality of substrate lift pins. The shadow ring can be raised and lowered using a shadow ring lift assembly to a predetermined height above the substrate during a radical processing step. The shadow ring lift assembly can also raise and lower a plurality of substrate lift pins to raise both the shadow ring and the substrate lift pins to a transfer position when the substrate is transferred in and out of the process chamber.

Description

Technical Field

[0001] Embodiments of this specification relate to systems and methods used in the manufacture of electronic devices, and more particularly, to systems and methods used to form tungsten features in semiconductor devices.

Background Art

[0002] Tungsten (W) is widely used in the manufacture of integrated circuit (IC) devices to form conductive features that require relatively low electrical resistance and relatively high resistance to electromigration. For example, tungsten can be used as a metal fill material to form source contacts, drain contacts, metal gate fills, gate contacts, interconnects (e.g., horizontal features formed on the surface of a dielectric material layer), and vias (e.g., vertical features formed through a dielectric material layer to connect other interconnect features disposed above and below the dielectric material layer). Due to its relatively low resistivity, tungsten is also commonly used to form bit lines and word lines used to address individual memory cells within a memory cell array of a dynamic random access memory (DRAM) device.

Summary of the Invention

Problems to be Solved by the Invention

[0003] As circuit density increases and device features continue to shrink to meet the requirements of next-generation semiconductor devices, it is becoming increasingly difficult to reliably create tungsten features. Problems such as voids and seams formed during conventional tungsten deposition processes are exacerbated as feature sizes decrease, negatively impacting device performance and reliability, or even rendering the device inoperable.

[0004] Shadowing is utilized around the substrate edge during chemical vapor deposition (CVD) tungsten (W) film deposition to prevent deposition near the bevel edge of the substrate during seam-suppressed tungsten film processes. However, shadowing has been shown to interfere with the effective processing of the substrate edge during the nitrogen radical treatment process performed after CVD deposition. This interference with effective processing of the substrate edge leads to non-uniformity from the center to the edge of the seam-suppressed tungsten film, resulting from weak incubation delays near the substrate edge.

[0005] Therefore, what is needed in this field is a processing system and method to solve the above-mentioned problems. [Means for solving the problem]

[0006] Embodiments of this disclosure are generally directed toward process chambers for substrate processing. The processing chamber includes a chamber body, a substrate support disposed within the chamber body and having an upper surface, a plurality of substrate lift pins disposed through the substrate support, and a shadowing lift. The shadowing lift is configured to raise and lower a shadowing positioned around the edge of the upper surface of the substrate support.

[0007] In another embodiment, a different process chamber for substrate processing is described. The processing chamber includes a chamber body, a substrate support disposed within the chamber body and having an upper surface, a showerhead disposed within the chamber body and above the upper surface of the substrate support, a plurality of substrate lift pins disposed through the substrate support, an annular liner disposed within the chamber body and surrounding the substrate support, and a shadowing spacer disposed in part of the annular liner. The shadowing spacer is configured to hold a shadowing positioned around the edge of the upper surface of the substrate support at a first height from the showerhead.

[0008] In yet another embodiment, a method for processing the substrate is described. This method includes raising the shadow ring to a processing position such that the shadow ring and the top surface of the substrate are separated by a processing interval, performing a nucleation process on the substrate in a process chamber, performing a differential suppression process on the substrate in a process chamber, positioning the shadow ring and multiple substrate lift pins in a deposition position, and performing a deposition process on the substrate in a process chamber. The differential suppression process is performed while the shadow ring is in the processing position. While in the deposition position, the shadow ring and the top surface of the substrate are separated by a deposition interval less than the processing interval.

[0009] In yet another embodiment, a method for processing a substrate is described, which includes performing a nucleation process on the substrate, performing a differential suppression process on the substrate in a first process chamber, transferring the substrate to a second process chamber, and performing a deposition process on the substrate in the process chamber. During the differential suppression process, the distance between the bottom surface of the shadowing ring and the top surface of the substrate is the processing interval. During the deposition process, the distance between the bottom surface of the second shadowing ring and the top surface of the substrate is a deposition interval that is less than the processing interval.

[0010] To allow for a more detailed understanding of the features enumerated above in this disclosure, a more detailed description of the disclosure, which has been briefly summarized above, can be given with reference to embodiments, some of which are shown in the accompanying drawings. However, it should be noted that the accompanying drawings only illustrate exemplary embodiments of this specification and should therefore not be considered to limit its scope, as other equally effective embodiments may be permitted. [Brief explanation of the drawing]

[0011] [Figure 1A] This figure schematically illustrates an embodiment of a processing system that can be used to process a substrate according to an embodiment of the present disclosure. [Figure 1B] This figure schematically illustrates an embodiment of a processing system that can be used to process a substrate according to an embodiment of the present disclosure. [Figure 2A] This is a schematic close-up cross-sectional view of the shadowing spacer shown in Figure 1B according to an embodiment of the present disclosure. [Figure 2B] This is a partial top view of a portion of the shadowing spacer shown in Figure 1B, according to an embodiment of the present disclosure. [Figure 3] This figure schematically illustrates another embodiment of a processing system that can be used to process a substrate according to embodiments of the present disclosure. [Figure 4A] This is a schematic close-up cross-sectional view of the shadowing lift assembly of Figure 3 at different processing locations according to embodiments of the present disclosure. [Figure 4B] This is a schematic close-up cross-sectional view of the shadowing lift assembly of Figure 3 at different processing locations according to embodiments of the present disclosure. [Figure 4C] This is a schematic close-up cross-sectional view of the shadowing lift assembly of Figure 3 at different processing locations according to embodiments of the present disclosure. [Figure 5A] This is a graph of line scan measurements across the diameter of a substrate after undergoing a first or second process according to an embodiment of the present disclosure. [Figure 5B] This is a graph of line scan measurements across the diameter of a substrate after undergoing a first or second process according to an embodiment of the present disclosure. [Figure 6A] Figures 5A and 5B show graphs of line scan measurements taken 10 mm outside the substrate according to an embodiment of the present disclosure. [Figure 6B] Figures 5A and 5B show graphs of line scan measurements taken 10 mm outside the substrate according to an embodiment of the present disclosure. [Figure 7A] This is a graph of film saturation in different parts of the substrate while the shadowing locations are alternating, according to an embodiment of the present disclosure. [Figure 7B] This is a graph of film saturation in different parts of the substrate while the shadowing locations are alternating, according to an embodiment of the present disclosure. [Figure 7C]A graph of film saturation of different parts of a substrate while alternating the location of the shadow ring, according to an embodiment of the present disclosure. [Figure 8A] A diagram showing a method of processing a substrate, according to an embodiment of the present disclosure. [Figure 8B] A diagram showing a method of processing a substrate, according to an embodiment of the present disclosure. [Figure 8C] A diagram showing a method of processing a substrate, according to an embodiment of the present disclosure. [Figure 8D] A diagram showing a method of processing a substrate, according to an embodiment of the present disclosure. [Figure 9A] A schematic cross-sectional view of a part of a substrate showing various aspects of the method described in FIGS. 8A to 8D. [Figure 9B] A schematic cross-sectional view of a part of a substrate showing various aspects of the method described in FIGS. 8A to 8D. [Figure 9C] A schematic cross-sectional view of a part of a substrate showing various aspects of the method described in FIGS. 8A to 8D.

Mode for Carrying Out the Invention

[0012] For ease of understanding, the same reference numbers are used, if possible, to designate the same elements common to the figures. It is intended that elements and features of one embodiment can be beneficially incorporated into other embodiments without further elaboration.

[0013] This disclosure is directed to apparatus and methods for moving a shadowing within a substrate processing chamber. By moving the shadowing, it is possible to position the shadowing near the surface of the substrate during one process step and far from the surface of the substrate during another process step. In embodiments described herein, it is beneficial to have the shadowing near the surface of the substrate during chemical vapor deposition (CVD) tungsten (W) film deposition to prevent deposition near the bevel edges of the substrate during a seam-suppression tungsten film process. However, it has been shown that if the shadowing is very close to the top surface of the substrate, it hinders effective processing of the substrate edges during a subsequent nitrogen radical treatment step. The nitrogen radical treatment step is performed in the same process chamber after CVD deposition. This hindering effective processing of the substrate edges leads to center-to-edge non-uniformity of the seam-suppression tungsten film due to weak incubation delays near the substrate edges.

[0014] As discussed herein, it has been found that changing the relative position of the shadowing with respect to the upper surface of the substrate during the radical treatment process compared to the deposition process improves the uniformity of substrate treatment near the edges. Therefore, various apparatuses and methods for changing the distance between the shadowing and the upper surface of the substrate are described herein. In the embodiments described herein, the shadowing may also be referred to as non-contact shadowing.

[0015] Figure 1A schematically shows one embodiment of a processing system 100a that can be used to carry out the bottom-up tungsten gap-filling substrate processing method described herein. Here, the processing system 100a is configured to provide different processing conditions desirable for each of the nucleation process, suppression process, selective gap-filling process, and over-baden deposition process, within a single processing chamber 102, i.e., without transferring the substrate between multiple processing chambers.

[0016] The processing system 100a includes a processing chamber 102, a gas supply system 104 fluidly coupled to the processing chamber 102, and a system controller 108. The processing chamber 102 includes a chamber lid assembly 110, one or more side walls 112, and a chamber base 114, which together define a processing volume section 115. The processing volume section 115 is fluidly coupled to an exhaust section 117, such as one or more vacuum pumps, used to maintain the processing volume section 115 under near-atmospheric pressure conditions and to discharge the processing gas and processing by-products therefrom.

[0017] The chamber lid assembly 110 includes a lid plate 116 and a shower head 118 coupled to the lid plate 116, which together define a gas distribution volume 119. Here, the lid plate 116 is maintained at a desired temperature using one or more heaters 129 thermally coupled to it. The shower head 118 faces a substrate support assembly 120 located in the processing volume 115. As will be discussed below, the substrate support assembly 120 is configured to move a substrate support 122, and therefore a substrate 130 placed on the substrate support 122, between a raised substrate processing position (as shown) and a lowered substrate transfer position (not shown). When the substrate support assembly 120 is in the raised substrate processing position, the shower head 118 and the substrate support 122 define a processing region 121.

[0018] Here, the gas supply system 104 is fluidly coupled to the processing chamber 102 via a gas inlet positioned through the lid plate 116. The processing gas or cleaning gas supplied by using the gas supply system 104 flows into the gas distribution volume section 119 through the gas inlet 123 and is distributed to the processing area 121 through multiple openings in the shower head 118. In some embodiments, the chamber lid assembly 110 further includes a perforated blocker plate 125 positioned between the gas inlet 123 and the shower head 118. In these embodiments, the gas flowing into the gas distribution volume section 119 is first diffused by the blocker plate 125 and then, in addition to the shower head 118, supplied to the processing area 121 with a more uniform or desired gas flow.

[0019] Here, the processing gas and processing by-products are discharged radially outward from the processing region 121 through an annular channel 126 surrounding the processing region 121. The annular channel 126 may be formed in a first annular liner 127 positioned radially inward of one or more sidewalls 112 (as shown in the figure), or it may be formed in one or more sidewalls 112. In some embodiments, the processing chamber 102 includes one or more second liners 128 used to protect the inner surface of one or more sidewalls 112 or the chamber base 114 from corrosive gases and / or undesirable material deposits.

[0020] In some embodiments, a purge gas source 137, fluidly connected to the processing volume 115, is used to flow a chemically inert purge gas, such as argon (Ar), into a region located directly beneath the substrate support 122, for example, through an opening in the chamber base 114 surrounding the support shaft 162 of the substrate support 122. The purge gas can be used to create a region of positive pressure (compared to the pressure in the processing area 121) beneath the substrate support 122 during substrate processing. Generally, the purge gas flows through the chamber base 114 and upward from there, around the edges of the substrate support 122, and is discharged from the processing volume 115 through annular channels 126. The purge gas reduces unwanted material deposition on the surface directly beneath the substrate support 122 by reducing and / or preventing the flow of material precursor gas to that area.

[0021] Here, the substrate support assembly 120 includes a movable support shaft 162 that extends in a sealed manner through the chamber base 114, such as being surrounded by a bellows 165 in the region below the chamber base 114, and a substrate support 122 positioned on the movable support shaft 162. To facilitate the transfer of substrates to and from the substrate support 122, the substrate support assembly 120 includes a lift pin assembly 166, which includes a plurality of substrate lift pins 167 that are coupled to or engaged with a lift hoop 168. The plurality of substrate lift pins 167 are movably positioned at an opening formed through the substrate support 122.

[0022] When the substrate support 122 is positioned in a lowered substrate transfer position (not shown), a plurality of substrate lift pins 167 extend above the substrate receiving surface of the substrate support 122, from which the substrate 130 is lifted, allowing the substrate handler (not shown) to access the (inactive) back surface of the substrate 130. When the substrate support 122 is in an elevated or processing position (as shown), the plurality of substrate lift pins 167 retract directly below the substrate receiving surface of the substrate support 122, allowing the substrate 130 to rest on it.

[0023] Multiple substrate lift pins 167 are raised and lowered by a lift pin actuator 170. The lift pin actuator 170 can be a motor or other actuator, such as a stepping motor, servo motor, or direct drive motor. In some embodiments, the lift pin actuator 170 is electrically coupled to a system controller, such as a system controller 108. The lift pin actuator 170 may be coupled to the lift pin assembly via one or more pin lift shafts 173. The pin lift shafts 173 may be coupled to a lift hoop 168. In embodiments described herein, the lift hoop 168 may be a plate or disk supported by one or more pin lift shafts 173 and configured to support at least the lift pin assembly 166.

[0024] Here, the substrate 130 is transferred to and from the substrate support 122 through a door 171, for example, a slit valve, located in one of the one or more side walls 112. Here, one or more openings in the area surrounding the door 171, for example, an opening in the door housing, are fluidly coupled to a purge gas source 137, for example, an Ar gas source. The purge gas is used to prevent the processing gas and cleaning gas from coming into contact with the seal surrounding the door and / or degrading the seal surrounding the door, thereby extending the service life of the door.

[0025] Here, the substrate support 122 is configured for use as a vacuum chuck, in which the substrate 130 is fixed to the substrate support 122 by applying a vacuum to the interface between the substrate 130 and the substrate receiving surface. The vacuum is applied using a vacuum source 172 that is fluidly coupled to one or more channels or ports formed in the substrate receiving surface of the substrate support 122. In other embodiments, for example, if the processing chamber 102 is configured for direct plasma processing, the substrate support 122 may be configured for use as an electrostatic chuck. In some embodiments, the substrate support 122 includes one or more electrodes (not shown) coupled to a bias voltage power supply (not shown), such as a continuous-wave (CW) RF power supply or a pulsed RF power supply, which supplies a bias voltage to it.

[0026] As shown in the figure, the substrate support assembly 120 features a dual-zone temperature control system for independent temperature control in different regions of the substrate support 122. The different temperature control regions of the substrate support 122 correspond to different regions of the substrate 130 placed thereon. Here, the temperature control system includes a first heater 163 and a second heater 164. The first heater 163 is located in the central region of the substrate support 122, and the second heater 164 is located radially outward from the central region so as to surround the first heater 163. In other embodiments, the substrate support 122 may have a single heater or three or more heaters.

[0027] The substrate support assembly 120 further includes an annular shadow ring 135 used to prevent undesirable material deposition on the circumferential bevel edge of the substrate 130. During substrate transfer to and from the substrate support 122, i.e., when the substrate support assembly 120 is in a lowered position (not shown), the shadow ring 135 rests on an annular ledge in the processing volume 115. When the substrate support assembly 120 is raised or placed in a processing position, the radially outer surface of the substrate support 122 engages with the annular shadow ring 135 such that the shadow ring 135 surrounds the substrate 130 placed on the substrate support 122. Here, the shadow ring 135 is shaped such that when the substrate support assembly 120 is in the raised substrate processing position, the radially inward-facing portion of the shadow ring 135 is positioned over the bevel edge of the substrate 130.

[0028] In some embodiments, the substrate support assembly 120 further includes an annular purge ring 136 positioned on the substrate support 122 so as to surround the substrate 130. In those embodiments, a shadow ring 135 may be positioned on the purge ring 136 when the substrate support assembly 120 is in the raised substrate processing position. Generally, the purge ring 136 features a plurality of radially inward-facing openings fluidly connected to a purge gas source 137. During substrate processing, the purge gas flows into an annular region defined by the shadow ring 135, the purge ring 136, the substrate support 122, and the bevel edge of the substrate 130, preventing the processing gas from entering the annular region and causing undesirable material deposition on the bevel edge of the substrate 130.

[0029] In some embodiments, the processing chamber 102 is configured for direct plasma processing. In those embodiments, the showerhead 118 is electrically coupled to a first power supply 131, such as an RF power supply, which supplies power to ignite and maintain the plasma of the processing gas flowing into the processing area 121 via capacitive coupling with the processing gas. In some embodiments, the processing chamber 102 includes an inductive plasma generator (not shown), the plasma being formed by inductively coupling RF power to the processing gas.

[0030] Here, the processing system 100a may be configured to perform each of the tungsten nucleation, suppression, and bulk tungsten deposition processes of the void-free and seam-free tungsten gap-filling process without removing the substrate 130 from the processing chamber 102. The gas used to perform each of the gap-filling processes and to clean residues from the internal surface of the processing chamber is supplied to the processing chamber 102 using a gas supply system 104 that is fluidly coupled to it.

[0031] Generally, the gas supply system 104 includes one or more remote plasma sources, hereby first and second radical generators 106A-106B, a deposition gas source 140, and a conduit system 194 that fluidly connects the radical generators 106A-106B and the deposition gas source 140 to the lid assembly 110. The gas supply system 104 further includes a number of isolation valves, hereby first and second valves 190A-190B, respectively, positioned between the radical generators 106A-106B and the lid plate 116, which can be used to fluidly separate each of the radical generators 106A-106B from the processing chamber 102 and from each other.

[0032] Each of the radical generators 106A to 106B is coupled to its respective power supply 193A to 193B. The power supplies 193A to 193B are used to ignite and maintain the plasma of the gas supplied to the plasma chamber volume in the radical generators 106A to 106B from the corresponding first gas source 187A or second gas source 187B, which is fluidically coupled to the plasma chamber volume in the radical generators 106A to 106B. In some embodiments, the first radical generator 106A generates radicals used in a differential suppression process. For example, the first radical generator 106A can be used to ignite and maintain a processing plasma from a non-halogen-containing mixed gas supplied from the first gas source 187A to the first plasma chamber volume. The second radical generator 106B can be used to generate cleaning radicals used in a chamber cleaning process by igniting and maintaining a cleaning plasma from a halogen-containing mixed gas supplied from the second gas source 187B to the second plasma chamber volume.

[0033] In some embodiments, the first radical generator 106A is also fluidically coupled to a second gas source 187B, which supplies a halogen-containing conditioning gas to the first plasma chamber volume for use in the plasma source condition process. In those embodiments, the gas supply system 104 may further include a plurality of diverter valves 191 that are operable to guide the halogen-containing mixed gas from the second gas source 187B to the first plasma chamber volume of the radical generator 106A.

[0034] Suitable remote plasma sources that can be used with one or both of the radical generators 106A-106B include radio frequency (RF) or very high frequency (VHRF) capacitively coupled plasma (CCP) sources, inductively coupled plasma (ICP) sources, microwave-inductive (MW) plasma sources, electron cyclotron resonance (ECR) chambers, or high-density plasma (HDP) chambers.

[0035] The operation of the processing system 100a is facilitated by a system controller 108. The system controller 108 includes a programmable central processing unit, here a CPU 195, which is operable by memory 196 (e.g., non-volatile memory) and support circuitry 197. The CPU 195 is one of any form of general-purpose computer processor used in industrial environments, such as a logic control unit (PLC) that can be programmed to control various chamber components and subprocessors. Memory 196 coupled to the CPU 195 facilitates the operation of the processing chamber. Support circuitry 197 conventionally includes caches, clock circuits, input / output subsystems, power supplies, etc., and combinations thereof, coupled to the CPU 195 and various components of the processing system 100 to facilitate control of board processing operations.

[0036] Here, the instructions in memory 196 are in the form of a program product, such as a program that implements the method of the present disclosure. In one example, the present disclosure may be implemented as a program product stored on a computer-readable storage medium for use in a computer system. The program of the program product defines the function of the embodiment (including the method of the present specification). Thus, a computer-readable storage medium is an embodiment of the present disclosure if it holds computer-readable instructions that direct the function of the method of the present specification.

[0037] Advantageously, the processing system 100 described above can be used to carry out each of the nucleation, suppression, gap-filling deposition, and overbaden deposition processes, thereby providing a single-chamber, seam-free tungsten gap-filling solution.

[0038] Figure 1B schematically shows another embodiment of processing system 100b that can be used to carry out the bottom-up tungsten gap-filling substrate processing method described herein. Here, processing system 100b is similar to processing system 100a, but further includes a shadowing spacer 150 positioned above a portion of the first annular liner 127. The shadowing spacer 150 is radially inward of the annular channel 126. The shadowing spacer 150 is configured to separate the shadowing 135 from the upper surface of the substrate 130. By separating the shadowing spacer 150 from the upper surface of the substrate 130, the radicals generated during the differential suppression process / radical processing step can be processed more uniformly on the substrate surface near the bevel edge of the substrate compared to the central portion. The shadowing spacer 150 is further described with reference to Figures 2A-2B.

[0039] In some embodiments, a substrate, such as substrate 130, is transferred between a first processing system 100a in Figure 1A and a second processing system 100b in Figure 1B. The first processing system 100a is utilized during the deposition of a chemical vapor deposition (CVD) tungsten (W) film. The first processing system 100a is beneficial in that the shadowing 135 is positioned adjacent to the upper surface of substrate 130, and therefore deposition near the bevel edge of the substrate is prevented during the seam-suppressed tungsten film process. However, it has been shown that the shadowing being too close to the upper surface of the substrate hinders effective processing of the substrate edges during subsequent nitrogen radical treatment steps, such as the differential suppression process of activities 805, 853 (Figures 8A-8D). Therefore, substrate 130 is moved to a second processing system, such as the second processing system 100b in Figure 1B, before the nitrogen radical treatment steps are performed.

[0040] Figure 2A shows a schematic close-up cross-sectional view of a portion of the processing system 100b of Figure 1B, including the shadowing spacer 150. The shadowing spacer 150 is positioned on the ledge 252 of the first annular liner 127. The upper spacer surface 256 contacts the bottom shadowing surface 254 of the shadowing 135, holding the shadowing 135 in an elevated position above the edge of the substrate 130. In the embodiments described herein, the shadowing spacer 150 separates the substrate 130 and the shadowing 135, allowing for improved treatment of radicals on the upper surface of the substrate 130. However, the distance between the bottom surface of the showerhead 118 and the upper surface of the substrate 130 remains the same during both the nucleation process and the differential suppression process.

[0041] In some embodiments, the distance D between the bottom surface of the shower head 118 and the top surface of the substrate 130 is less than about 25 mm, e.g., less than about 20 mm, e.g., less than about 15 mm, e.g. Once the shadow ring 135 is positioned at a second height H2 above the substrate 130, the processing steps described herein may be performed to process the edges of the substrate 130 more uniformly. The shadow ring spacer 150 has a height H3. The height H3 of the shadow ring spacer 150 can vary depending on the structure of the first annular liner 127 and the processing chamber 102. In some embodiments, the height H3 is about 9 mm to about 15 mm, for example about 10 mm to about 14 mm, for example about 11 mm to about 13 mm, for example about 12 mm to about 13 mm, for example about 12.7 mm, etc.

[0042] In the first processing system 100a without the shadowing spacer 150, the vertical gap between the shadowing ring 135 and the substrate 130 (similar to H2 in Figure 2A) is less than about 2 mm, for example less than about 1.5 mm, for example less than about 1 mm. The shadowing spacer 150 is located radially inward of one or more exhaust passages 210 that are fluidly coupled to the exhaust section 117. One or more exhaust passages 210 are located around the processing area 121. An annular channel 126 may be located between one or more exhaust passages 210 and the shadowing spacer 150. In some embodiments, there are multiple shadowing spacers 150 located around the first annular liner 127. The inner surface 212 of the shadowing spacer 150 is located radially outward of the annular purge ring 136 and the substrate support assembly 120.

[0043] Figure 2B shows a partial top view of a portion of the processing system shown in Figure 1B according to an embodiment of the present disclosure. For clarity, Figure 2B shows the shadowing spacers 150 without the shadowing 135. As shown in Figure 2B, the shadowing spacers 150 are discrete spacers arranged along a portion of the ledge 252 of the first annular liner 127. In embodiments described herein, there may be a plurality of shadowing spacers 150 arranged radially around the ledge 252, for example, three or more shadowing spacers 150 evenly spaced along the ledge 252. The upper spacer surface 256 is arranged along a portion of the upper part of the shadowing spacer 150 and may be a groove formed in the shadowing spacer 150. The height H3 of the shadowing spacer 150 may vary depending on the structure of the first annular liner 127 and the processing chamber 102. In some embodiments, the height H3 is about 9 mm to about 15 mm, for example, about 10 mm to about 14 mm.

[0044] Figure 3 schematically shows another embodiment of the processing system 100c that can be used to process the substrate 130. The processing system 100c in Figure 3 is similar to the processing system 100b in Figure 1B, except that instead of the shadowing spacer 150, the processing system 100c includes a shadowing lift assembly 300. The shadowing lift assembly 300 is integrated with the lift pin assembly 166, so that the lift hoop 168 can be detachably coupled to both a plurality of substrate lift pins 167 and a plurality of shadowing lift pins 302. The shadowing lift assembly 300 is configured to raise and lower the shadowing 135 between or during processing steps. Both the shadowing 135 and the substrate lift pins 167 can be raised and lowered simultaneously or separately, as described herein.

[0045] Figures 4A to 4C show schematic close-up cross-sectional views of a portion of the processing system 100c of Figure 3 while the lift pin assembly 166 is positioned in different locations. As shown in Figures 4A to 4C, the shadowing lift assembly 300 includes a lift hoop 168, a lift pin assembly 166, shadowing lift pins 302, a shadowing lift plate 312, one or more shadowing lift arms 304 extending from the shadowing lift plate 312, and a plurality of lift pin housings 306 extending through the shadowing lift plate 312. The plurality of lift pin housings 306 are openings that penetrate the shadowing lift plate 312 and include side walls extending downward from the shadowing lift plate 312 to provide guides for the substrate lift pins 167.

[0046] Each bottom surface of the lift pin housing 306 is coupled to the lift hoop 168 and positioned above the lift hoop 168. In some embodiments, the lift pin housing 306 is positioned through the lift hoop 168, forming an opening through the lift hoop 168. In some embodiments, the lift pin housing 306 is positioned both partially above and partially below the lift hoop 168, and as a result, the lift pin housing 306 is a shaft positioned through the lift hoop 168. The lift pin housing 306 can be mechanically coupled to each of the shadowing lift arms 304. The shadowing lift arms 304 extend outward from the shadowing lift plate 312 and couple the shadowing lift pins 302 to the shadowing lift plate 312 and the lift pin housing 306, and subsequently allow the movement of the shadowing lift pins 302 as the lift hoop 168 moves in upward and downward movements.

[0047] The lift hoop 168 can be coupled to one or more pin lift shafts 173 and lift pin actuators 170 to allow vertical movement of the lift hoop 168. The lift hoop 168 can then provide movement to one or both of the lift pin assembly 166 or the shadowing lift assembly 300. The lift pin actuator 170 can be a motor or a pneumatic actuator. A controller 108 (Figure 3) can control the lift pin actuator 170 to position the lift hoop 168, substrate lift pins 167, shadowing lift pins 302, and lift pin housing 306, as described with reference to Figures 4A to 4C. In some embodiments, a shadowing lift plate 312 is coupled to the lift hoop 168 and positioned on the lift hoop 168, and the bottom surfaces of each of the lift pin housings 306 do not contact the lift hoop 168.

[0048] The lift pin assembly 166 includes a lift pin base 310 coupled to each lift pin 167. The lift pins 167 are configured to extend through a portion of the substrate support 122 and contact the back side of the substrate 130. The lift pins 167 are configured to rest on slots located within the substrate support 122. The bottom distal end of the lift pin 167 is coupled to the lift pin base 310. The lift pin base 310 can be a cylindrical base and is configured to have a diameter substantially similar to that of each hollow inner surface 308 of the lift pin housing 306. Each of the lift pin housings 306 has a hollow inner surface 308 in which the lift pin base 310 can move. In one embodiment, the lift pin housing 306 surrounds the entire perimeter of the lift pin base 310. In other embodiments, the lift pin housing 306 surrounds the perimeter of the lift pin base 310.

[0049] As shown in Figure 4A, the substrate support 122, shadowing lift assembly 300, and lift pin assembly 166 are in the substrate transfer position, and as a result, the substrate 130 is lifted from the substrate support 122 and the shadowing 135 is in the transfer position. In the substrate transfer position, the substrate 130 can be moved in and out of the processing system 100c using a transfer robot (not shown). The substrate 130 is at the same height as the opening 314 which is located through the side of the processing chamber 102. As described with respect to Figures 1A, 1B, and 3, the opening 314 may include a slit valve or door located therein. Although not evident from Figure 4A, it should be noted that the shadowing lift pin 302 is offset from the opening 314 to allow the movement of the substrate 130 in and out of the processing chamber 102.

[0050] While in the substrate transfer position, the lift hoop 168 contacts the lift pin base 310 and the lift pin housing 306. The lift hoop 168 is a ring connected to one or more lift pin shafts 173 and is used as a base for lifting the substrate and the shadow ring 135. While in the substrate transfer position, the first distance D1 between the bottom surface of the shower head 118 and the top surface of the substrate support 122 is about 40 mm to about 80 mm, for example about 50 mm to about 70 mm, for example about 55 mm to about 65 mm. While in the substrate transfer position, the shadow ring 135 and the shadow ring lift pins 302 can be in various positions above the substrate support 122 and the substrate 130. As described herein, the height of the shadow ring 135 depends at least in part on the position of the substrate lift pins 167 while transferring the substrate 130 in and out of the processing area 121.

[0051] While in the substrate transfer position, the shadowing lift pins 302 contact the bottom surface of the shadowing 135. Each of the shadowing lift pins 302 is positioned radially outward of the substrate 130 and is positioned obtusely around the substrate support 122 so as to allow the substrate 130 to pass between them and enter the opening 314 during substrate transfer.

[0052] As shown in Figure 4B, the shadowing lift assembly 300 and the lift pin assembly 166 are in the processing position. While in the processing position, the lift hoop 168 is positioned so that the shadowing 135 is above the substrate 130, while the substrate lift pin 167 is in the lowered position. The lowered position of the substrate lift pin 167 is such that the top of the substrate lift pin 167 is either parallel to the substrate support surface and the substrate 130 or positioned below the substrate support surface and the substrate 130. The substrate support 122 is positioned in the raised position while in the processing position such that the substrate support surface of the substrate support 122 is positioned at a second distance D2 from the bottom surface of the shower head 118. The second distance D2 is less than approximately 25 mm, for example less than approximately 20 mm, for example less than approximately 15 mm, for example approximately 10 mm to approximately 15 mm.

[0053] The upper surface of the shadow ring 135 is separated from the bottom surface of the shower head 118 by a first height H1. The first height H1 is less than approximately 11 mm, for example, approximately 1 mm to approximately 10 mm. The bottom shadow ring surface 154 is positioned at a second height H2 from the upper surface of one or both of the purge ring 136 and the substrate 130. The second height H2 can vary between approximately 1 mm and approximately 11 mm, for example, approximately 1 mm to approximately 10 mm, for example, approximately 5 mm to approximately 8 mm. During the processing step in which the shadow ring 135 is raised (as shown in Figure 4B), the second height H2 is approximately 5 mm to approximately 11 mm, for example, approximately 6 mm to approximately 10 mm, for example, approximately 6 mm to approximately 8 mm, for example, approximately 6.35 mm.

[0054] While in the processing position, the substrate lift pins 167 are freely suspended from the substrate support 122, and as a result, the lift pin base 310 does not contact the upper surface of the lift hoop 168, but is still positioned within the hollow inner surface 308 of the lift pin housing 306. A gap can be provided between the lift pin base 310 and the lift hoop 168, and as a result, the substrate lift pins 167 are at least partially positioned within the lift pin housing 306 but are not mechanically supported by the lift hoop 168. One or more of the shadowing lift plate 312 and / or the lift pin housing 306 are in contact with the lift hoop 168 while in the processing position, and as a result, the shadowing lift plate 312 and the shadowing lift pins 302 are in the raised position. While in the raised position, the shadowing lift plate 312 and one or more shadowing lift arms 304 are separated from the lower wall 316 of the chamber base 114.

[0055] As shown in Figure 4C, both the shadow ring 135 and the substrate lift pins 167 are shown in the deposition position, and as a result, the shadow ring 135 is configured to protect the substrate 130 during the deposition process. The shadow ring 135 is in a lower position than the processing position in Figure 4B, and as a result, the lift hoop 168 and lift pin housing 306 are lowered. The substrate lift pins 167 are free to hang from the substrate support 122, as in the processing position in Figure 4B. The substrate lift pins 167 do not move while the shadow ring 135 is being lowered from the processing position to the deposition position, or while the shadow ring 135 is being raised from the deposition position to the processing position.

[0056] While in the stacked position, the shadowing lift pin 302 may still be in contact with the bottom of the shadowing ring 135, or it may be separated from the shadowing ring 135. While in the lowered position, the second height H2 described with respect to Figure 4B is reduced to less than about 1 mm, for example less than about 0.5 mm, for example less than about 0.3 mm, for example about 0.2 mm to about 0.3 mm, etc. In some embodiments, the shadowing lift plate 312 and / or shadowing lift arm 304 are positioned on and in contact with the lower wall 316 of the chamber base 114. By contacting the lower wall 316 of the chamber base 114, the shadowing lift plate 312 can engage with and disengage from the lift hoop 168.

[0057] The positioning of the shadowing lift plate 312, the lift hoop 168, and the lift pin base 310 can be adjusted for the lengths of the substrate lift pins 167 and the shadowing lift pins 302, as well as for a desired second distance D2 between processing and deposition on the substrate 130.

[0058] Figures 5A and 5B are graphs of line scan measurements over the diameter of the substrate after the first and second processes. The line scan measurements measure the tungsten(W) film thickness after the nucleation process, processing process, and bulk deposition, similar to those described in Figures 8A to 8D and 9A to 9C. Figure 5A shows the line scan measurements over the diameter of the substrate after the first process using the first process strategy. Figure 5B shows the line scan measurements over the diameter of the substrate after the second process using the second process strategy. The first and second processes include a nucleation process to create a nucleated layer on the substrate, a processing process to form a gradient within the substrate trench, and a bulk deposition process to deposit material into the trench in a bottom-up filling process. The line scan measurements described herein measure the tungsten(W) film thickness after the bulk deposition process. The first and second processes use different precursor concentrations and flow rates during nucleation and substrate processing. Three different tests were performed using each of the first and second processes. The radical treatment process described herein may include differential suppression processes, as described in methods 800, 825, 850, and 875 in Figures 8A to 8D. The first test was performed without the use of the shadowing 135 during the radical treatment process (no NCSR). The second test was performed with the shadowing 135 positioned adjacent to the substrate 130 during the radical treatment process, such as at the location in Figure 1A or Figure 4C (with NCSR). The third test was performed with a spacer (250 mil NCSR spacer), such as a shadowing spacer 150 or shadowing lift pin 302, to separate the shadowing 135 from the substrate 130 by approximately 250 mil during the radical treatment process.

[0059] As shown in the figure, in both the first and second processes, the tungsten (W) film thickness is more uniform near the substrate edge than when the shadowing 135 is not used, or when the shadowing 135 with a shadowing spacer 150 (or shadowing lift pin 302) is used.

[0060] Figures 6A and 6B show graphs of the line scan measurements from Figures 5A and 5B, respectively, at 10 mm outside the substrate. As can be seen in Figures 6A and 6B, the nitrogen concentration near the substrate edge is more uniform in tests performed without shadowing or with shadowing spaced away from the substrate. This is particularly dominant in the first process (Figure 6A), while the process using shadowing adjacent to the substrate (with NCSR) shows a sharp increase in nitrogen concentration near the substrate edge.

[0061] Figures 7A–7C show graphs of film thickness reduction across the substrate after nitrogen saturation in the film, either altering the location of the shadowing or removing all of the shadowing during the nitrogen treatment process. Figure 7A shows the film thickness reduction at different locations on the substrate when shadowing spacers such as shadowing spacer 150 or shadowing lift pin 302 are used. Therefore, the shadowing is further away from the substrate than in the absence of shadowing spacers or shadowing lift pins. After performing each test, the film thickness reduction on the substrate was measured in four different regions. The four regions are the central region (the central region of the substrate), Zone 1 (the annular region radially outside the central region), Zone 2 (the annular region radially outside Zone 1), and the edge (the annular region radially outside Zone 2). Film thickness reduction was determined after performing film treatment processes using different process strategies, including Strategy 1 (R1), Strategy 2 (R2), Strategy 3 (R3), Strategy 4 (R4), and Strategy 5 (R5). As shown in Figure 7A, the film thickness reduction near the substrate edge is significantly smaller than the concentration in the center, zone 1, or zone 2 in all of R1, R2, R3, R4, and R5.

[0062] Figure 7B similarly shows the film thickness reduction at different locations on the substrate when different process strategies are used, except that shadowing is not utilized during nitrogen treatment of the film. The same process strategy and zone distribution as in Figure 7A are used, the only difference being that shadowing is removed from around the edges of the substrate. As shown in Figure 7B, by removing shadowing, the difference in film thickness reduction between the edges and each of the centers, zone 1, and zone 2 is reduced. This result is observed regardless of the process strategy used (R1, R2, R3, R4, and R5).

[0063] Figure 7C shows the film thickness reduction when shadowing is used adjacent to the substrate. The results shown in Figure 7C can be used as a baseline for comparing the differences in film thickness reduction across different parts of the substrate. Some of the same process strategies (R1, R3, and R5) as in Figures 7A and 7B are used, with a sixth strategy (R6) added. As shown in Figure 7C, when shadowing is used adjacent to the substrate without spacers, the film thickness reduction across different regions (center, zone 1, zone 2, and edge) is less uniform than when spacers are used or when shadowing is completely removed.

[0064] Each of Figures 7A to 7C includes the same scaling along the film thickness reduction axis. As shown, tests performed with and without shadowing spacers show a more uniform film thickness reduction near the edges of the substrate compared to the film thickness reduction near the internal regions of the substrate (central region, zone 1, and zone 2).

[0065] Figure 8A shows a method 800 for processing a substrate according to one embodiment, which can be carried out using processing system 100c. Figures 9A to 9C are schematic cross-sectional views of a portion of the substrate 900 showing aspects of method 800 at different stages of the void-free and seam-free tungsten gap-filling process.

[0066] In activity 801, method 800 includes receiving the substrate into the processing volume section 115 of the processing chamber 102. The substrate may be moved into the processing volume section 115 by one or more transfer devices or robots (not shown). In activity 802, method 800 includes lowering a shadow ring and a plurality of substrate lift pins relative to the top surface of the substrate. The shadow ring and the plurality of substrate lift pins are lowered from a transfer position (similar to the transfer position in Figure 4A) to a stacking position (similar to the stacking position in Figure 4C). While in the stacking position, the shadow ring is adjacent to the top surface of the substrate 900, and as a result, the bottom surface of the shadow ring is at a first gap from the top surface of the substrate 900. The first gap is less than about 1 mm from the top surface of the substrate 900, for example less than about 0.5 mm, for example less than about 0.3 mm, for example about 0.2 mm to about 0.3 mm. The first gap is also sometimes called the stacking gap. Shadowing can help control the nucleation layer 904, such as the one formed in activity 803.

[0067] Lowering the shadow ring and multiple substrate lift pins relative to the top surface of the substrate may include moving a substrate support assembly, such as the substrate support assembly 120 on which the substrate is placed. In some embodiments, the substrate support assembly is moved vertically upward toward the showerhead while the shadow ring and multiple substrate lift pins remain in place. In some embodiments, the shadow ring and multiple substrate lift pins move vertically upward as a whole during activity 802, but vertically downward relative to the top surface of the substrate 900 and the substrate support assembly 120.

[0068] In activity 803, method 800 includes forming a nucleation layer 904 on a substrate using a nucleation process. A portion of an exemplary substrate 900 on which the nucleation layer 904 is formed is schematically shown in Figure 9A.

[0069] Here, the substrate 900 is characterized by a patterned surface 901 including a dielectric material layer 902 having a plurality of openings 905 (one shown) formed thereon. In some embodiments, the plurality of openings 905 include one or a combination of high aspect ratio via or trench openings having a width of about 1 μm or less, for example, about 800 nm or less or about 500 nm or less, and a depth of about 2 μm or more, for example, about 3 μm or more or about 4 μm or more. In some embodiments, individual openings 905 may have an aspect ratio (depth-to-width ratio) of about 5:1 or more, for example, about 10:1 or more, about 15:1 or more, or between about 10:1 and about 40:1, for example, between about 15:1 and about 40:1. As shown in the figure, the patterned surface 901 conformally lines the opening 905 and includes a barrier or adhesive layer 903 (e.g., a titanium nitride (TiN) layer) deposited on the dielectric material layer 902 to facilitate the subsequent deposition of the tungsten nucleation layer 904. In some embodiments, the adhesive layer 903 is deposited to a thickness between about 2 angstroms (Å) and about 100 Å.

[0070] In some embodiments, Method 800 includes depositing an adhesive layer 903 using a second processing chamber of a multi-chamber processing system before receiving the substrate into the processing chamber 202. In some embodiments, Method 800 includes sequentially depositing the adhesive layer 903 and the nucleating layer 904 in the same processing chamber 102. In some embodiments, the adhesive layer 903 functions as a nucleating layer that allows for subsequent bulktungsten deposition thereon. In embodiments where the adhesive layer 903 functions as a nucleating layer, Method 800 may not include Activity 803.

[0071] In some embodiments, the nucleation layer 904 is deposited using an atomic layer deposition (ALD) process. Generally, the ALD process involves repeating a cycle of alternately exposing the substrate 900 to a tungsten-containing precursor and the substrate 900 to a reducing agent, and purging the processing area 121 between alternating exposures. Examples of suitable tungsten-containing precursors include tungsten halides such as tungsten hexafluoride (WF6), tungsten hexachloride (WCl6), or combinations thereof. Examples of suitable reducing agents include hydrogen gas (H2), borane, e.g., B2H6, and silane, e.g., SiH4, Si2H6, or combinations thereof. In some embodiments, the tungsten-containing precursor includes WF6, and the reducing agent includes B2H6, SiH4, or combinations thereof. In some embodiments, the tungsten-containing precursor includes organometallic precursors and / or fluorine-free precursors, such as MDNOW (methylcyclopentadienyl-dicarbonylnitrosyl-tungsten), EDNOW (ethylcyclopentadienyl-dicarbonylnitrosyl-tungsten), tungsten hexacarbonyl (W(CO)6), or combinations thereof.

[0072] During the nucleation process, the processing volume section 115 is generally maintained at a pressure of less than about 120 Torr, for example, between about 900 mTorr and about 120 Torr, between about 1 Torr and about 100 Torr, or for example, between about 1 Torr and about 50 Torr. Exposure of the substrate 900 to the tungsten-containing precursor includes flowing the tungsten-containing precursor from the deposition gas source 140 to the processing area 121 at a flow rate of more than about 10 sccm, for example, between about 10 sccm and about 1000 sccm, for example, between about 10 sccm and about 750 sccm, or between about 10 sccm and about 500 sccm. Exposure of the substrate 900 to the reducing agent includes flowing the reducing agent from the deposition gas source 140 to the processing area 121 at a flow rate of between about 10 sccm and about 1000 sccm, for example, between about 10 sccm and about 750 sccm. It should be noted that the flow rates for the various deposition and processing processes described herein are for processing system 100c configured to process substrates with a diameter of 300 mm. Appropriate scaling may be used in processing systems configured to process substrates of different sizes.

[0073] Here, the tungsten-containing precursor and the reducing agent are each flowed through the processing area 121 for periods of approximately 0.1 seconds and approximately 10 seconds, for example, approximately 0.5 seconds and approximately 5 seconds. The processing area 121 can be purged between alternating exposures by flowing an inert purge gas, such as argon (Ar), into the processing area 121 for periods of approximately 0.1 seconds and approximately 10 seconds, for example, approximately 0.5 seconds and approximately 5 seconds. The purge gas can be supplied from the deposition gas source 140 or the bypass gas source 138. Generally, the repetition of the nucleation process cycle continues until the nucleation layer 904 has a thickness of approximately 10 Å and approximately 200 Å, for example, approximately 10 Å and approximately 150 Å, or approximately 20 Å and approximately 150 Å. If shadowing adjacent to the substrate 900 is present during activity 803, the deposition rate near the bevel edge of the substrate 900 is reduced.

[0074] In activity 804, method 800 includes raising the shadow ring from a deposition position (similar to the deposition position in Figure 4C) to a processing position (similar to the processing position in Figure 4B). The processing position includes the substrate lift pin being in a lowered position, while the shadow ring is in an elevated position relative to the substrate 900. The positioning of the shadow ring may be adjusted to be higher or lower as desired. The shadow ring is raised before activity 805. Raising the shadow ring includes acting the lift hoop vertically upward and raising the shadow ring using the shadow ring lift pin. While the shadow ring is acting between the deposition position and the processing position, the substrate lift pin can remain in place. Thus, the substrate remains on the substrate support 122 and in contact with the substrate support 122 during the processing step. During the raising of the shadow ring, the substrate support remains stationary, which can increase the overall distance between the shadow ring and the upper surface of the substrate support. In embodiments described herein, the distance between the bottom of the shadow ring and the top surface of the substrate is a second height H2 such as about 0.5 mm to about 11 mm, e.g., about 1 mm to about 11 mm, e.g., about 5 mm to about 10 mm, e.g., about 6 mm to about 6.5 mm, e.g., about 6.35 mm. In some embodiments, the second height H2 is defined as the processing interval. It has been shown that raising the shadow ring improves the uniformity of the processing performed during activity 805. In embodiments described herein, the raising of the shadow ring is about 9 mm to about 15 mm, e.g., about 10 mm to about 14 mm, e.g., about 11 mm to about 13 mm.

[0075] In activity 805, method 800 includes treating the nucleation layer 904 to suppress tungsten deposition on the field surface of the substrate 900 and to form differential suppression profiles within a plurality of openings 905 by using a differential suppression process. Generally, forming differential suppression profiles involves exposing the nucleation layer 904 to an activated nuclide of a treatment gas, e.g., a treatment radical 906 shown in Figure 9B. Suitable treatment gases that can be used in the suppression process include N2, H2, NH3, NH4, O2, CH4, or combinations thereof. In some embodiments, the treatment gas includes nitrogen such as N2, H2, NH3, NH4, or combinations thereof, and the activated nuclide includes nitrogen radicals, e.g., atomic nitrogen. In some embodiments, the treatment gas is combined with an inert carrier gas such as Ar, He, or combinations thereof to form a treatment mixed gas.

[0076] Although not bound by theory, it is thought that the activated nitrogen nuclide (treated radical 906) is incorporated into a portion of the nucleation layer 904 by adsorption of the activated nitrogen nuclide and / or by reaction with metallic tungsten in the nucleation layer 904, thereby forming a tungsten nitride (WN) surface. The adsorbed nitrogen and / or nitrided surface of the tungsten nucleation layer 904 preferably delays (inhibits) further tungsten nucleation, and therefore subsequent tungsten deposition thereon.

[0077] Generally, the diffusion of treated radicals 906 into multiple openings 905 is controlled to produce a desired suppression gradient within the openings 905 of the feature area. Here, the diffusion of treated radicals 906 is controlled such that the tungsten growth suppression effect at the walls of the openings 905 decreases with increasing distance from the field of the patterned surface 901 (Figures 9B-9C). As a result, tungsten nucleation is more easily established at or near the bottom of the feature area, and once established, tungsten growth (deposition of gap-filling material 908) within the openings 905 is accelerated from the point of nucleation (e.g., from unsuppressed or low-suppression areas at the bottom of the openings 905), enabling bottom-up seamless tungsten gap-filling. The direction of the suppression gradient from high-suppression areas to unsuppressed or low-suppression areas is indicated by arrow 917 (Figure 9C). The diffusion of the treated radicals 906 into the opening 905 generally depends at least partially on the size and aspect ratio of the opening 905 and, in particular, can be regulated by controlling the energy, flux, and, depending on the embodiment, the directionality of the treated radicals 906 on the patterned surface 901.

[0078] In some embodiments, exposing the nucleating layer 904 to the treatment radicals 906 includes forming a treatment plasma of substantially halogen-free treatment mixed gas using a first radical generator 106A and flowing the treatment plasma ejecta into a treatment area 121. In some embodiments, the flow rate of the treatment mixed gas to the first radical generator 106A, and therefore the flow rate of the treatment plasma ejecta into the treatment area 121, is between about 1 sccm and about 3000 sccm, for example, between about 1 sccm and about 2500 sccm, between about 1 sccm and about 2000 sccm, between about 1 sccm and about 1000 sccm, between about 1 sccm and about 500 sccm, between about 1 sccm and about 250 sccm, between about 1 sccm and about 100 sccm, or between about 1 sccm and about 75 sccm, for example, between about 1 sccm and about 50 sccm.

[0079] In some embodiments, the concentration of substantially halogen-free process gas in the process gas mixture is between about 0.5 vol% and about 50 vol%, for example between about 0.5 vol% and about 40 vol%, between about 0.5 vol% and about 30 vol%, between about 0.5 vol% and about 20 vol%, or, for example, between about 0.5 vol% and about 10 vol%, for example between about 0.5 vol% and about 5 vol%.

[0080] In some embodiments, for example, when the substantially halogen-free treatment gas contains N2, NH3, and / or NH4, the first radical generator 106A can be used to activate atomic nitrogen in amounts between approximately 0.02 mg and approximately 150 mg, for example, between approximately 0.02 mg and approximately 150 mg, or between approximately 0.02 mg and approximately 100 mg, or between approximately 0.1 mg and approximately 100 mg, or between approximately 0.1 mg and approximately 100 mg, or between approximately 1 mg and approximately 100 mg, during the suppression treatment process of a 300 mm diameter substrate. In some embodiments, the first radical generator 106A can be used to activate atomic nitrogen in amounts of approximately 0.02 mg or more, for example, approximately 0.2 mg or more, approximately 0.4 mg or more, approximately 0.6 mg or more, approximately 0.8 mg or more, approximately 1 mg or more, approximately 1.2 mg or more, approximately 1.4 mg or more, approximately 1.6 mg or more, approximately 1.8 mg or more, approximately 2 mg or more, approximately 2.2 mg or more, approximately 2.4 mg or more, approximately 2.6 mg or more, approximately 2.8 mg or more, or approximately 3 mg or more, during the suppression treatment process of a 300 mm diameter substrate. Appropriate scaling may be used in a processing system configured to process substrates of different sizes.

[0081] In other embodiments, the treatment radicals 906 can be formed using a remote plasma (not shown) that is ignited and maintained in a portion of the treatment volume section 115 separated from the treatment area 121 by the showerhead 118, for example, between the showerhead 118 and the lid plate 116. In those embodiments, the activated treatment gas can be passed through an ion filter before the treatment radicals 906 reach the surface of the treatment area 121 and the substrate 900 in order to remove substantially all ions from it. In some embodiments, the showerhead 118 may be used as an ion filter. In other embodiments, the plasma used to form the treatment radicals is an in-site plasma formed in the treatment area 121 between the showerhead 118 and the substrate 900. In some embodiments, for example, when using an in-site treatment plasma, the substrate 900 can be biased to control the directionality and / or accelerate ions formed from the treatment gas, such as charged treatment radicals, toward the substrate surface.

[0082] Following the differential suppression process of activity 805, the shadowing 135 is lowered to a deposition position similar to the position shown in Figure 4C. The shadowing 135 is lowered to the deposition position during activity 806. The shadowing 135 is lowered by lowering the lift hoop 168. The lift pins remain in place relative to the substrate support 122 and can hang freely from the substrate support 122. While in the deposition position, the shadowing is adjacent to the top surface of the substrate 900, and as a result, the bottom surface of the shadowing is at a first gap from the top surface of the substrate 900. The first gap is less than about 1 mm from the top surface of the substrate 900, for example less than about 0.5 mm, for example less than about 0.3 mm, for example about 0.2 mm to about 0.3 mm. The shadowing can help control the deposition of gap-filling material 908 onto the bevel edge of the substrate 900 during activity 807.

[0083] In Activity 807, Method 300 includes selectively depositing tungsten gap-filling material 908 into a plurality of openings 905 according to the differential suppression profile established by the suppression treatment in Activity 805 (Figure 9C). In one embodiment, the tungsten gap-filling material 908 is formed using a low-stress chemical vapor deposition (CVD) process that includes simultaneously (parallel) flowing a tungsten-containing precursor gas and a reducing agent into a processing area 121 and exposing the substrate 900 to it. The tungsten-containing precursor and reducing agent used in the tungsten gap-filling CVD process may include any combination of tungsten-containing precursors and reducing agents described in Activity 803. In some embodiments, the tungsten-containing precursor includes WF6, and the reducing agent includes H2, B2H6, SiH4, or a combination thereof.

[0084] Here, the tungsten-containing precursor is flowed into the processing area 121 at a rate between approximately 50 sccm and approximately 1000 sccm, or greater than approximately 50 sccm, or less than approximately 1000 Torr, or between approximately 100 sccm and approximately 900 sccm. The reducing agent is flowed into the processing area 121 at a rate greater than approximately 500 sccm, for example greater than approximately 750 sccm, greater than approximately 1000 sccm, or between approximately 500 sccm and approximately 10000 sccm, for example between approximately 1000 sccm and approximately 9000 sccm, or between approximately 1000 sccm and approximately 8000 sccm.

[0085] In some embodiments, tungsten gap-filling CVD process conditions are selected to provide tungsten features with relatively lower residual film stress compared to conventional tungsten CVD processes. For example, in some embodiments, the tungsten gap-filling CVD process includes heating the substrate to a temperature of about 250°C or higher, for example, about 300°C or higher, or between about 250°C and about 600°C, or between about 300°C and about 500°C. During the CVD process, the processing area 121 is generally maintained at a pressure of less than about 500 Torr, less than about 600 Torr, less than about 500 Torr, less than about 400 Torr, or between about 1 Torr and about 500 Torr, for example, between about 1 Torr and about 450 Torr, or between about 1 Torr and about 400 Torr, or for example, between about 1 Torr and about 300 Torr.

[0086] In another embodiment, the tungsten gap-filling material 908 is deposited in activity 807 using an atomic layer deposition (ALD) process. The tungsten gap-filling ALD process involves repeatedly exposing the substrate 900 alternately to a tungsten-containing precursor gas and a reducing agent, and purging the processing area 121 between alternating exposures. The tungsten-containing precursor and reducing agent used in the tungsten gap-filling ALD process may include any combination of the tungsten-containing precursor and reducing agent described in activity 803. In some embodiments, the tungsten-containing precursor comprises WF6 and the reducing agent comprises H2.

[0087] Here, the tungsten-containing precursor and the reducing agent are each passed through the processing area 121 for periods of approximately 0.1 seconds and approximately 10 seconds, for example, approximately 0.5 seconds and approximately 5 seconds. The processing area 121 is generally purged between alternating exposures by passing an inert purge gas such as argon (Ar) through the processing area 121 for periods of approximately 0.1 seconds and approximately 10 seconds, for example, approximately 0.5 seconds and approximately 5 seconds.

[0088] Exposure of the substrate 900 to a tungsten-containing precursor may include flowing the tungsten-containing precursor from the deposition gas source 140 to the processing area 121 at flow rates between approximately 10 sccm and approximately 1000 sccm, for example, between approximately 100 sccm and approximately 1000 sccm, between approximately 200 sccm and approximately 1000 sccm, between approximately 400 sccm and approximately 1000 sccm, or between approximately 500 sccm and approximately 900 sccm. Exposure of the substrate 900 to a reducing agent may include flowing the reducing agent from the deposition gas source 140 to the processing area 121 at flow rates between approximately 500 sccm and approximately 10000 sccm, for example, between approximately 500 sccm and approximately 8000 sccm, between approximately 500 sccm and approximately 5000 sccm, or between approximately 1000 sccm and approximately 4000 sccm.

[0089] In some embodiments, the tungsten gap-filling ALD process includes heating the substrate to a temperature of about 250°C or higher, for example, about 300°C or higher, or between about 250°C and about 600°C, or between about 300°C and about 500°C. In some embodiments, the ALD process includes maintaining the processing area 121 at a pressure of less than about 150 Torr, less than about 100 Torr, less than about 50 Torr, for example, less than about 30 Torr, or between about 0.5 Torr and about 50 Torr, for example, between about 1 Torr and about 20 Torr.

[0090] In other embodiments, the tungsten gap-filling material 908 is deposited using a pulsed CVD method, which involves repeatedly exposing the substrate 900 to a tungsten-containing precursor gas and a reducing agent in alternating cycles without purging the processing area 121. The processing conditions for the tungsten gap-filling pulsed CVD method can be the same, substantially the same, or within the same range as those described above for the tungsten gap-filling ALD process.

[0091] In activity 808, method 800 includes raising both the shadowing and the substrate lift pins relative to the upper surface of the substrate. During activity 808, the shadowing and substrate lift pins may be raised to a transport position, such as the transport position in Figure 4A. The substrate and substrate support may also be lowered to the transport position in Figure 4A before or after the raising of the shadowing and substrate lift pins relative to the substrate support. Activity 808 is performed after the deposition process of activity 807. The shadowing and substrate lift pins may be lifted from either a processing position (Figure 4B) or a lowered position (Figure 4C) to a transport position. As described herein, the shadowing and substrate lift pins are positioned such that a lift hoop, such as a lift hoop 168, is in contact with the base of each of the substrate lift pins, such as a lift pin base 310. By acting on the lift hoops, the substrate support and the shadowing are further separated, and as a result, the shadowing is separated from the upper surface of the substrate support. The substrate lift pins are operated such that the top of each substrate lift pin is positioned above the top surface of the substrate support, and the substrate 900 is separated from the top surface of the substrate support. Separating the substrate 900 from the substrate support then allows the substrate 900 to be removed from the processing area of ​​the process chamber through an opening formed between the shadow ring and the substrate support.

[0092] In some embodiments, the substrate support is actuated vertically downward during activity 808, so that the upper surface of the substrate support is aligned with or below an opening, such as the opening 314 in the side wall of the process chamber. When the substrate support is actuated vertically downward, the lift pins and shadow rings may rise relative to the upper surface of the substrate without moving. In some embodiments, the lift pins and shadow rings are actuated vertically downward away from the showerhead, while the substrate support moves downward by a greater amount or at a greater overall speed. Therefore, even when both the lift pins and shadow rings are actuated downward, the lift pins and shadow rings may be actuated away from the upper surface of the substrate support. In some embodiments, the shadow rings and lift pins may remain in place, while the substrate support moves downward until the lift pins are positioned so that their upper portion is above the substrate support surface of the substrate support.

[0093] Figure 8B shows a method 825 for processing a substrate according to one embodiment, which can be performed using processing system 100c. Figures 9A-9C are schematic cross-sectional views of a portion of the substrate 900 showing aspects of method 825 at different stages of the void-free and seam-free tungsten gap-filling process. Method 825 is similar to method 800 in Figure 8A, except that activities 802 and 804 are omitted, while activity 809 is added. Activity 809 replaces activity 802. Activity 809 is performed after the substrate is received into the processing volume during activity 801 and before the nucleation process of activity 803 is performed.

[0094] Activity 809 includes raising the shadow ring to the processing position and lowering a plurality of substrate lift pins relative to the top surface of the substrate. The plurality of substrate lift pins are lowered from the transport position (similar to the transport position in Figure 4A) to the processing position (similar to the deposition position in Figure 4B). While in the processing position, the shadow ring is at a second height H2 above the top surface of the substrate 900 / the top surface of the substrate support, and as a result, the bottom surface of the shadow ring is at a first distance from the top surface of the substrate 900 / the top surface of the substrate support. The second height is less than approximately 12 mm from the top surface of the substrate 900 or the top surface of the substrate support, for example, approximately 2 mm to approximately 11 mm, for example, approximately 2 mm to approximately 10 mm.

[0095] The shadowing is separated from the upper surface of the substrate 900 to allow for improved nitrogen treatment during the differential suppression process of activity 805. Due to the small thickness of the nucleation layer 904 formed in activity 803, the nucleation layer 904 has been shown to remain relatively uniform regardless of whether the shadowing is separated from the upper surface of the substrate or located adjacent to the upper surface of the substrate. Therefore, in some embodiments, the position of the shadowing is kept constant between the nucleation process of activity 803 and the differential suppression process of activity 804. By keeping the shadowing in a constant position between activities 803 and 804, the overall process time can be reduced.

[0096] The rising of the shadowing relative to the top surface of the substrate and the lowering of the multiple substrate lift pins may include moving a substrate support assembly, such as the substrate support assembly 120 on which the substrate is placed. In some embodiments, the substrate support assembly is moved vertically upward toward the showerhead, while the shadowing and multiple substrate lift pins remain in place. In some embodiments, the shadowing and multiple substrate lift pins move vertically upward as a whole during activity 802, but vertically downward relative to the top surface of the substrate 900 and the substrate support assembly 120.

[0097] Figure 8C is another diagram showing a method 850 for processing a substrate according to one embodiment, performed using processing system 100a in Figure 1A and processing system 100b in Figure 1B. Figures 9A to 9C can also be used as schematic cross-sectional views of a portion of the substrate 900 showing aspects of method 850 at different stages of the void-free and seam-free tungsten gap-filling process.

[0098] In activity 851, the substrate 900 is positioned in a first processing chamber of a first processing system, such as processing chamber 102. The first processing system may be processing system 100b in Figure 1B. The first processing system includes a shadowing ring positioned within the processing chamber and spacers, such as a shadowing ring spacer 150, for further separating the shadowing ring from the substrate 900. The substrate 900 can be positioned within the first processing chamber by one or more transfer devices, such as a robot. Once the substrate 900 is positioned on the substrate support surface of a substrate support, such as a substrate support 122, the substrate support 122 may be actuated upward to the processing position. The processing position is similar to that shown in Figure 1B. The shadowing ring is separated from the first annular liner 127 using spacers. The spacers also provide a gap between the substrate and the bottom surface of the shadowing ring. The spacers can increase the distance between the shadowing ring and the substrate while maintaining the same distance between the substrate and the showerhead for the nucleation process and differential suppression process (processing process) as well as the bulk deposition process. In some embodiments, the second processing chamber does not include either the shadowing spacer 150 or the shadowing 135.

[0099] Following activity 851, a nucleation process is performed on the substrate 900 during activity 852. Activity 852 is similar to the nucleation process performed during activity 803 in method 800 in Figure 8A. The nucleation process is performed in the first processing chamber in a processing position such that the substrate support is in an elevated position and the shadowing is separated from the upper surface of the substrate.

[0100] Following activity 852, a differential suppression process is performed on the substrate 900 during activity 853. The differential suppression process is a processing step, similar to the differential suppression process of activity 805 in method 800 in Figure 8A. The differential suppression process is performed in the processing position in the first processing chamber, and as a result, the substrate support is in the raised position of activity 852.

[0101] In some embodiments, shadowing and spacers are absent during the nucleation process of activity 852 or the differential suppression process of activity 853, and as a result, the first processing chamber does not contain shadowing and spacers. In these embodiments, the volume between the substrate 900 and a showerhead such as a showerhead 118 or another part of the plate stack does not include any other chamber components, and the showerhead has a straight line of sight to each part of the substrate 900.

[0102] Following the differential suppression process of activity 853, the substrate 900 is transferred to a second processing chamber, such as processing chamber 102 of the second processing system, during activity 854. The second processing system is similar to processing system 100a in Figure 1A. The substrate 900 is moved between the first and second processing chambers using a transfer device such as a robot. In some embodiments, the substrate 900 may be moved through the transfer chamber while passing between the first and second processing chambers. The second processing system does not include spacers. The absence of spacers allows for a reduction in the distance between the shadowing and the substrate while maintaining the same distance between the substrate and the showerhead for both the processing processes of activities 852 and 853 and the deposition process of activity 855.

[0103] After the substrate 900 is transferred to the second processing chamber during activity 854, a deposition process is performed on the substrate during activity 855. The deposition process is a bulk deposition process and can be similar to the deposition process 807 in Figure 8A. The deposition process in activity 855 is performed in the second processing chamber to reduce the deposition rate near the bevel edges of the substrate 900. The second processing chamber is configured such that the distance between the top surface of the substrate 900 and the bottom surface of the shadowing decreases during activity 855 compared to the distance between activities 852 and 853.

[0104] By running the processing processes for activities 852 and 853 in a separate chamber from the deposition process for activity 855, the shadowing interval can be changed between the two processes without reconfiguring the processing chamber or process parameters.

[0105] Figure 8D is another diagram showing a method 875 for processing a substrate according to one embodiment, performed using processing systems 100a and 100b of Figures 1A and 1B. Figures 9A and 9C can also be used as schematic cross-sectional views of a portion of the substrate 900 showing aspects of method 875 at different stages of the void-free and seam-free tungsten gap-filling process.

[0106] In activity 856, the substrate 900 is positioned in a first processing chamber of a first processing system, such as processing chamber 102. The first processing system may be processing system 100a as shown in Figure 1A. The first processing system includes a shadow ring positioned within the processing chamber, but does not include spacers to further separate the shadow ring from the substrate 900. The substrate 900 can be positioned within the first processing chamber by one or more transfer devices, such as a robot. Once the substrate 900 is positioned on the substrate support surface of a substrate support, such as a substrate support 122, the substrate support 122 may be moved upward to the processing position. The processing position is similar to that shown in Figure 1A.

[0107] Following activity 856, a nucleation process is performed on the substrate 900 during activity 852. Activity 852 is similar to the nucleation process performed during activity 803 in method 800 in Figure 8A. The nucleation process is performed in the first processing chamber.

[0108] Following the nucleation process of activity 852, the substrate 900 is transferred to a second processing chamber of a second processing system, such as processing chamber 102, during activity 857. The second processing system is similar to processing system 100b in Figure 1B. The substrate 900 is moved between the first and second processing chambers using a transfer device such as a robot. In some embodiments, the substrate 900 may be moved through the transfer chamber while passing between the first and second processing chambers. The second processing system includes spacers, such as shadowing spacers 150, which separate the shadowing ring from the first annular liner 127. The spacers also provide a gap between the substrate and the bottom surface of the shadowing ring. The spacers can increase the distance between the shadowing ring and the substrate while maintaining the same distance between the substrate and the showerhead for both the nucleation process and the differential suppression process (processing process). In some embodiments, the second processing chamber does not include either the shadowing spacers 150 or the shadowing ring 135.

[0109] Following activity 857, a differential suppression process is performed on the substrate 900 during activity 853. The differential suppression process is a processing step, similar to the differential suppression process of activity 805 in method 800 shown in Figure 8A. The differential suppression process is performed in the second processing chamber at the processing position, and as a result, the substrate support is in the raised position.

[0110] By running the nucleation process of activity 852 and the differential suppression process of activity 853 in separate chambers, the shadowing interval can be changed between the two processes without reconfiguring the processing chamber or process parameters.

[0111] In some embodiments, shadowing and spacers are absent during the differential suppression process of activity 853, and as a result, the second processing chamber does not contain shadowing and spacers. In these embodiments, the volume between the substrate 900 and a shower head such as a shower head 118 or another part of the plate stack does not include any other chamber components, and the shower head has a straight line of sight to each part of the substrate 900.

[0112] Following the differential suppression process of activity 853, the substrate 900 is transferred to a third processing chamber of the third processing system, such as processing chamber 102, during activity 858. The third processing system is similar to processing system 100a in Figure 1A. The substrate 900 is moved between the second and third processing chambers using a transfer device such as a robot. In some embodiments, the substrate 900 may be moved through the transfer chamber while passing between the second and third processing chambers. The third processing system does not include spacers. The absence of spacers allows for a reduction in the distance between the shadowing and the substrate while maintaining the same distance between the substrate and the showerhead for both the processing processes of activities 852 and 853 and the deposition process of activity 855. In some embodiments, the third processing system is the same as the first processing system, and as a result, only the first and second processing systems are utilized. The third processing system is the same as the first processing system if the substrate support is configured to be at the same temperature between both the nucleation process and the bulk deposition process. In embodiments where the substrate support is maintained at different temperatures during the nucleation and bulk deposition processes, three different processing systems are utilized.

[0113] After the substrate 900 is transferred to the third processing chamber during activity 858, the deposition process is performed on the substrate during activity 855. The deposition process is a bulk deposition process and can be similar to the deposition process 807 in Figure 8A. The deposition process in activity 855 is performed in the third processing chamber to reduce the deposition rate near the bevel edges of the substrate 900. The third processing chamber is configured such that the distance between the top surface of the substrate 900 and the bottom surface of the shadowing is reduced during activity 855 compared to the distance during activity 853.

[0114] The apparatus and methods described herein allow the distance between the substrate and the shadowing to be varied between different process steps. As described herein, reducing the distance between the substrate and the shadowing during the deposition process is beneficial, but when the shadowing is close to the substrate, it can lead to uneven processing during subsequent process activities. The processing may include both a nucleation step and a differential suppression step, or just a differential suppression step. In the embodiments described herein, the proximity of the shadowing to the substrate is varied between the deposition and processing steps to increase the distance between the shadowing and the substrate during the processing / differential suppression step. In a process that includes both a nucleation and a differential suppression step, the shadowing may be in an elevated position during both steps. In a process that includes only a differential suppression step, the shadowing may be in a lowered position during the nucleation step, an elevated position during the differential suppression step, and a lowered position during the deposition step. Embodiments described herein demonstrate improved processing results while reducing film deposition on the bevel edges of the substrate.

[0115] While the foregoing applies to embodiments of the present disclosure, other and further embodiments of the present disclosure may be devised without departing from the basic scope of the present disclosure, and the scope of the present disclosure is determined by the following claims.

Claims

1. A process chamber for substrate processing, Chamber body and A substrate support having an upper surface is disposed within the chamber body. Includes, The substrate support is A purging ring that defines the radially outer edge of the substrate support, A plurality of substrate lift pins are arranged through the substrate support and positioned radially inward of the purge ring, A shadowing lift assembly configured to raise and lower a shadowing positioned around the radially outer edge of the substrate support, Includes, The shadowing lift assembly is A lift hoop configured to support the plurality of substrate lift pins, The substrate support, the plurality of substrate lift pins, and the plurality of shadowing lift pins arranged radially outward from the lift hoop Includes, A process chamber in which, when the substrate support is positioned in a lowered substrate transfer position, the plurality of substrate lift pins extend above the substrate receiving surface of the substrate support, and when the substrate support is in an elevated or processing position, the plurality of substrate lift pins retract directly below the substrate receiving surface of the substrate support.

2. The process chamber according to claim 1, wherein the shadowing lift assembly is further configured to raise and lower the plurality of substrate lift pins.

3. The shadowing lift assembly is a lift pin housing, which is positioned around the lift pin base of each of the plurality of substrate lift pins and is configured to allow the plurality of substrate lift pins to be raised and lowered within the lift pin housing. It further includes, The plurality of shadowing lift pins are arranged radially outward from the lift pin housing and configured to contact the bottom surface of the shadowing, The process chamber according to claim 2, wherein the lift hoops are configured to support each of the lift pin housings.

4. The process chamber according to claim 3, further comprising a controller configured to change the position of both the plurality of substrate lift pins and the plurality of shadowing lift pins in the lift hoop.

5. The process chamber according to claim 3, comprising the lift pin base configured such that each of the plurality of substrate lift pins is located in one of the lift pin housings.

6. The process chamber according to claim 1, further comprising a shower head disposed above the substrate support.

7. The process chamber according to claim 6, further comprising one or more gas sources and one or more radical generators, wherein the one or more gas sources and the one or more radical generators are configured to supply one or more deposition gases or one or more plasmas to the processing volume section of the chamber body through the shower head.

8. The process chamber according to claim 1, wherein a lift pin actuator is coupled to the shadowing lift assembly and configured to actuate the shadowing lift assembly vertically.

9. A process chamber for substrate processing, Chamber body and A substrate support having an upper surface is disposed within the chamber body. Includes, The substrate support is A purging ring that defines the radially outer edge of the substrate support, A plurality of substrate lift pins are arranged through the substrate support and positioned radially inward of the purge ring, A shadowing lift assembly configured to raise and lower a shadowing positioned around the radially outer edge of the substrate support, Includes, The shadowing lift assembly is A plurality of lift pin housings, each of which is positioned around the plurality of substrate lift pins, Shadow ring lift arms extending radially outward from the plurality of lift pin housings, A lift hoop configured to support the plurality of substrate lift pins, The substrate support, the plurality of substrate lift pins, the lift hoop, and the plurality of shadowing lift pins arranged radially outward of the shadowing lift arm Includes, A process chamber in which, when the substrate support is positioned in a lowered substrate transfer position, the plurality of substrate lift pins extend above the substrate receiving surface of the substrate support, and when the substrate support is in an elevated or processing position, the plurality of substrate lift pins retract directly below the substrate receiving surface of the substrate support.

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