Vacuum sealing device and vacuum chamber device

Abstract

To achieve reduction of wear and maintain airtightness between a rotary member and a fixed member.SOLUTION: A vacuum seal device (15) includes: a first roll (21); a second roll (22) which contacts with the first roll; a first holding member (25) which holds the first roll and has a first space (25a) arranged coaxially with the first roll; and a second holding member (26) which holds the second roll (22) and has a second space (26a) arranged coaxially with the second roll. An inner peripheral surface (26c) of the first holding member faces an outer peripheral surface of the first roll. The vacuum seal device rotates the first roll and the second roll, matching rotation of the first roll with rotation of the second roll to cause a sheet material to pass therethrough.SELECTED DRAWING: Figure 2

Description

Technical Field

[0002] ,

[0001] The present invention relates to a vacuum sealing device and a vacuum chamber device.

Background Art

[0002] In order to take in and out a sheet material into and from a vacuum chamber, a vacuum sealing device is used. Patent Document 1 discloses a vacuum sealing device having a roll group that is disposed opposite to each other around the moving surface of a sheet-like member and is rotatably adhered to each other (see the abstract). Among the roll group, roll 18 is urged against a wear-resistant member 19 provided in the vacuum chamber, thereby maintaining airtightness between roll 18 and wear-resistant member 19 (see paragraph

[0024] and FIG. 2). Further, the rotating rolls 16, 17, 18 are in contact with the dust sealing material 38 (see paragraph

[0030] and FIGS. 2 and 5).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the technique of Patent Document 1, the rotating roll 18 and the fixed wear-resistant member 19 are in contact with each other, and a biasing force acts therebetween. For this reason, a large frictional force is generated between roll 18 and wear-resistant member 19, and roll 18 wears, making it easy to generate powder (dust). Further, due to the friction between the rotating rolls 16, 17, 18 and the dust sealing material 38, the rolls 16, 17, 18 or the dust sealing material 38 are likely to wear and become powder (dust). The dust thus generated may deteriorate the environment inside the vacuum chamber.

[0005] One aspect of the present invention aims to realize a vacuum sealing device and a vacuum chamber device that achieve both a reduction in friction between a rotating member and a stationary member and the maintenance of airtightness. [Means for solving the problem]

[0006] To solve the above problems, a vacuum sealing device according to one aspect of the present invention comprises: a first roll having a first outer surface made of a first elastic material and having a first central axis as the axis of rotational symmetry; a second roll made of a second elastic material and having a second outer surface in contact with the outer surface of the first roll, having a second central axis parallel to the first central axis and having a second central axis as the axis of rotational symmetry; a first space coaxial with the first roll that holds the first roll; and a definition of the first space, and the The device comprises a first holding member having a first inner surface facing the outer surface of the first roller, a second holding member having a second space coaxial with the second roller that holds the second roll, and a second inner surface that defines the second space and faces the second outer surface, and facing the first holding member with a gap between them, and by rotating the first roll and the second roller in correspondence, the sheet material is passed between the first roll and the second roll and the gap. [Effects of the Invention]

[0007] According to one aspect of the present invention, a vacuum sealing device and a vacuum chamber device can be realized that achieve both a reduction in friction between a rotating member and a stationary member and the maintenance of airtightness. [Brief explanation of the drawing]

[0008] [Figure 1] This figure shows a vacuum system according to an embodiment of the present invention. [Figure 2] A perspective view showing an example of a vacuum sealing device according to an embodiment of the present invention. [Figure 3] This is a partial cross-sectional view of a vacuum sealing device, seen from the side. [Figure 4] This is a partial cross-sectional view of a vacuum sealing device, seen from above. [Figure 5] This is a perspective view showing an example of a vacuum sealing device according to a modified example of the present invention. [Modes for carrying out the invention]

[0009] [Embodiment] The following describes in detail one embodiment of the present invention. Figure 1 shows a vacuum system 10 according to an embodiment of the present invention. Here, an XYZ coordinate system is set with the vertical direction as the Z axis and the transport direction of the sheet material Sh as the X axis. This XYZ coordinate system is the same in Figures 2 to 5 below.

[0010] The vacuum system 10 is a system that enables the processing of sheet material Sh under vacuum and includes a vacuum chamber device 11, a feed roller 12a, holding rollers 13a and 13b, and a winding roller 12b. The vacuum chamber device 11 includes a vacuum chamber 11a, a vacuum pump 14 for maintaining a vacuum inside the vacuum chamber 11a, a vacuum sealing device 15a for loading sheet material Sh into the vacuum chamber 11a, and a vacuum sealing device 15b for unloading sheet material Sh from inside the vacuum chamber 11a.

[0011] As the feed roller 12a and the winding roller 12b rotate in correspondence, the sheet material Sh is conveyed from the feed roller 12a towards the winding roller 12b (in the positive X-axis direction). The sheet material Sh fed out from the feed roller 12a is fed into the vacuum chamber 11a via the holding roller 13a and the vacuum sealing device 15a. Various processes (for example, surface coating) are performed on the sheet material Sh fed into the vacuum chamber 11a. After processing is complete, the sheet material Sh is discharged from the vacuum chamber 11a via the vacuum sealing device 15b and wound onto the winding roller 12b via the holding roller 13b.

[0012] Although the vacuum sealing devices 15a and 15b have different roles in loading and unloading the sheet material Sh, they can be substantially configured similarly. For this reason, in the following, the vacuum sealing devices 15a and 15b will be collectively referred to as the vacuum sealing device 15.

[0013] (Details of the vacuum sealing device 15) The details of the vacuum sealing device 15 are described below. Figures 2, 3, and 4 are perspective views, partial cross-sectional views from the side (negative Y-axis), and partial cross-sectional views from above (positive Z-axis), respectively, of the vacuum sealing device 15.

[0014] As shown in Figure 2, the vacuum sealing device 15 includes sheet rolls 21 and 22, backup rolls 23 and 24 (hereinafter also referred to as sheet rolls 21, etc.), and holding members 25 to 28.

[0015] The sheet rolls 21, etc., are arranged linearly in the Z-axis direction (up and down) (on a straight line perpendicular to the central axes C1 to C4 of the sheet rolls 21, etc.). The central axes C1 to C4 of the sheet rolls 21, etc., are parallel to each other (for example, parallel).

[0016] The sheet rolls 21, etc., are arranged vertically so as to contact each other in the order of backup roll 23, sheet roll 21, sheet roll 22, and backup roll 24. That is, the outer circumferential surface of sheet roll 21 (the first roll) (first outer circumferential surface: the side surface of the outer circumferential portion 21b described later) contacts the outer circumferential surface of sheet roll 22 (the second roll) (second outer circumferential surface: the side surface of the outer circumferential portion 22b described later) below, and the outer circumferential surface of backup roll 23 (the third roll) (third outer circumferential surface: the side surface of the outer circumferential shaft portion 23a described later) above. The outer circumferential surface of sheet roll 22 contacts the outer circumferential surface of backup roll 24 (the fourth roll) (fourth outer circumferential surface: the side surface of the outer circumferential shaft portion 24a described later) below.

[0017] Thus, the sheet rolls 21, 22 and the backup rolls 23, 24 are in contact with each other. Therefore, for example, when the sheet rolls 21, 22 are rotated correspondingly, the backup rolls 23, 24 also rotate along with this rotation. Specifically, the first rotation mechanism (a power source such as a motor) rotates the sheet roll 21. Also, the second rotation mechanism (a power source such as a motor) rotates the sheet roll 22 so as to correspond to the sheet roll 21. Here, the first and second rotation mechanisms may be composed of independent power sources. Also, the first and second rotation mechanisms may be composed of an integrated power source that operates in conjunction with each other by a connecting function such as a gear.

[0018] In addition to the sheet rolls 21, 22, at least one of the backup rolls 23, 24 may be rotated together. For example, the third rotation mechanism (a power source such as a motor) rotates the backup roll 23 so as to correspond to the sheet rolls 21, 22. Also, the fourth rotation mechanism (a power source such as a motor) rotates the backup roll 24 so as to correspond to the sheet rolls 21, 22 and the backup roll 23. Here, the first to fourth rotation mechanisms may be composed of independent power sources. Also, at least a part of the first to fourth rotation mechanisms may be composed of an integrated power source that operates in conjunction with each other by a connecting function such as a gear.

[0019] By bringing the sheet rolls 21, 22 into contact and rotating them correspondingly, the sheet material Sh can be passed between the sheet rolls 21, 22. Depending on the rotation directions of the sheet rolls 21, 22, the conveyance direction of the sheet material Sh can be either the positive X-axis direction or the negative X-axis direction. That is, the vacuum sealing device 15 can function as either the vacuum sealing device 15a for loading in FIG. 1 or the vacuum sealing device 15b for unloading.

[0020] As described below, the outer peripheral surfaces (the side surfaces of the outer peripheral portions 21b and 22b) of the sheet rolls 21 and 22 have elasticity. Therefore, when the sheet rolls 21 and 22 are rotated to pass the sheet material Sh, airtightness between the sheet rolls 21 and 22 can be maintained. For example, even if there are some irregularities on the sheet material Sh, the airtightness between the sheet rolls 21 and 22 is maintained by the deformation of the sheet rolls 21 and 22 according to the irregularities.

[0021] As described below, the backup rolls 23 and 24, particularly, their outer peripheral surfaces (the side surfaces of the outer peripheral shaft portions 23a and 24a described below) have rigidity. Therefore, the backup rolls 23 and 24 can correct the deflection of the rollers 21 and 22 and improve the airtightness between the sheet rolls 21 and 22. The details will be described later.

[0022] The sheet roll 21 and the backup roll 23 are held by the holding members 25, 27, and 28. The sheet roll 22 and the backup roll 24 are held by the holding members 26, 27, and 28. The holding members 25 and 26 are arranged to face each other with a gap in the Z-axis direction (up and down). The holding members 27 and 28 are arranged on both sides of the holding members 25 and 26 in the Y-axis direction.

[0023] Between the holding members 25 and 27, between the holding members 25 and 28, between the holding members 26 and 27, and between the holding members 26 and 28, they are sealed by the seal members CE1, CE2, CE3, and CE4, respectively. Note that the seal members CE1 to CE4 have openings for allowing the sheet rolls 21 and 22 and the backup rolls 23 and 24 to pass through airtightly.

[0024] As shown in Figures 3 and 4, the sheet roll 21 has a shaft portion 21a and an outer peripheral portion 21b. The shaft portion 21a and the outer peripheral portion 21b are rotationally symmetric with respect to the central axis C1. The shaft portion 21a is a substantially cylindrical member that rotates around the central axis C1. The outer peripheral portion 21b is a substantially cylindrical member that covers the shaft portion 21a and rotates together with the shaft portion 21a. A pair of rotating shafts 21c protrude from each end of the shaft portion 21a (sheet roll 21). The shaft portion 21a and the rotating shafts 21c are made of rigid materials such as metal or plastic, and the outer peripheral portion 21b is made of an elastic material such as rubber (e.g., nitrile rubber) or sponge. That is, the sheet roll 21 (first roll) has a first outer peripheral surface (side surface of the outer peripheral portion 21b) made of a first elastic material, and the first central axis (central axis C1) is the axis of rotational symmetry.

[0025] The sheet roll 22, like the sheet roll 21, has a shaft portion 22a and an outer peripheral portion 22b, with a pair of rotating shafts 22c protruding from each end of the shaft portion 22a (sheet roll 22). The sheet roll 22 (second roll) is made of a second elastic material and has a second outer peripheral surface (side surface of the outer peripheral portion 22b) that contacts the outer peripheral surface (first outer peripheral surface) of the sheet roll 21, and has a second central axis (central axis C2) that is parallel to the first central axis (central axis C1) as an axis of rotational symmetry. Since the sheet roll 22 has a configuration corresponding to that of the sheet roll 21, a detailed explanation is omitted.

[0026] The backup roll 23 has an outer circumferential shaft portion 23a. The outer circumferential shaft portion 23a is rotationally symmetrical with respect to the central axis C3. The outer circumferential shaft portion 23a is a substantially cylindrical member that rotates around the central axis C3. A pair of rotating shafts 23c protrude from each end on both sides of the outer circumferential shaft portion 23a (backup roll 23). The outer circumferential shaft portion 23a and the rotating shafts 23c are made of a rigid material such as metal or plastic. That is, the backup roll 23 (third roll) is made of the first rigid material, has a third outer circumferential surface that contacts the first outer circumferential surface (outer circumferential surface of the sheet roll 21), and has a third central axis (central axis C3) that is parallel to the first and second central axes (central axes C1, C2) as an axis of rotational symmetry.

[0027] The backup roll 24, like the backup roll 23, has an outer circumferential shaft portion 24a, with a pair of rotating shafts 24c protruding from each end of the outer circumferential shaft portion 24a (backup roll 23). The backup roll 24 (fourth roll) is made of a second rigid material and has a fourth outer circumferential surface that contacts the second outer circumferential surface (outer circumferential surface of the sheet roll 22). The fourth central axis (central axis C4) is a rotationally symmetric axis that is parallel to the first, second, and third central axes (central axes C1, C2, C3). Since the backup roll 24 has a configuration corresponding to the backup roll 23, a detailed explanation is omitted.

[0028] As shown in Figure 3, the holding member 25 has a space 25a (first space) for holding the sheet roll 21, a space 25b (third space) for holding the backup roll 23, an inner circumferential surface 25c (first inner circumferential surface) defining space 25a, and an inner circumferential surface 25d (third inner circumferential surface) defining space 25b. Space 25a communicates with space 25b and opens on the negative Z-axis side of the holding member 25.

[0029] Space 25a is approximately cylindrical in shape and coaxial with the central axis C1. The inner circumferential surface 25c (first inner circumferential surface) defines space 25a (first space) and faces the outer circumferential surface (first outer circumferential surface) of the sheet roll 21. The inner circumferential surface 25c of space 25a and the outer circumferential surface of the sheet roll 21 face each other, forming a gap G1 (first gap) between them. The gap G1 allows the sheet roll 21 to rotate relative to the holding member 25 while restricting the flow of gas (air) along the inner circumferential surface 25c of the holding member 25. The size of the gap G1 is determined by the difference between the radius of the approximately cylindrical space 25a and the radius of the approximately cylindrical sheet roll 21.

[0030] Space 25b is approximately cylindrical in shape and coaxial with the central axis C3. The inner circumferential surface 25d (third inner circumferential surface) defines space 25b (third space) and faces the outer circumferential surface (third outer circumferential surface) of the backup roll 23. The inner circumferential surface 25d of space 25b and the outer circumferential surface of the backup roll 23 face each other, forming a gap G3 (third gap) between them. The gap G3 allows the backup roll 23 to rotate relative to the holding member 25 while restricting the flow of gas (air) along the inner circumferential surface 25d of the holding member 25. The size of the gap G3 is determined by the difference between the radius of the approximately cylindrical space 25b and the radius of the approximately cylindrical backup roll 23.

[0031] The gaps G1 and G3 are in communication and function as a labyrinth seal as a whole. That is, as shown in Figure 3, when air enters gap G1 from the negative X-axis side of the sheet roll 21, this air moves through path d1 to the negative X-axis side of gap G3, through paths d2 and d3 to reach the positive X-axis side of gap G1, and through path d4 to reach the vacuum chamber 11a. In other words, air cannot reach the vacuum chamber 11a without passing through paths d1 to d4, and the inflow of air into the vacuum chamber 11a is restricted by passing through the long, narrow paths d1 to d4.

[0032] The holding member 26 has a space 26a (second space) for holding the sheet roll 22, a space 26b (fourth space) for holding the backup roll 24, an inner circumferential surface 26c (second inner circumferential surface) defining space 26a, and an inner circumferential surface 26d (fourth inner circumferential surface) defining space 26b. Space 26a communicates with space 26b and opens on the Z-axis positive side of the holding member 25.

[0033] Space 26a is approximately cylindrical in shape and coaxial with the central axis C2. The inner circumferential surface 26c (second inner circumferential surface) defines space 26a (second space) and faces the outer circumferential surface (second outer circumferential surface) of the sheet roll 22. The inner circumferential surface 26c of space 26a and the outer circumferential surface of the sheet roll 22 face each other, forming a gap G2 (second gap) between them. The gap G2 allows the sheet roll 22 to rotate relative to the holding member 26 while restricting the flow of gas (air) along the inner circumferential surface 26c of the holding member 26. The size of the gap G2 is determined by the difference between the radius of the approximately cylindrical space 26a and the radius of the approximately cylindrical sheet roll 22.

[0034] Space 26b is approximately cylindrical in shape and coaxial with the central axis C4. The inner circumferential surface 26d (fourth inner circumferential surface) defines space 26b (fourth space) and faces the outer circumferential surface (fourth outer circumferential surface) of the backup roll 24. The inner circumferential surface 26d of space 26b and the outer circumferential surface of the backup roll 24 face each other, forming a gap G4 (fourth gap) between them. The gap G4 allows the backup roll 24 to rotate relative to the holding member 26 while restricting the flow of gas (air) along the inner circumferential surface 26d of the holding member 26. The size of the gap G4 is determined by the difference between the radius of the approximately cylindrical space 26b and the radius of the approximately cylindrical backup roll 24.

[0035] The gaps G2 and G4 are connected and function as a labyrinth seal as a whole. Since the gaps G2 and G4 correspond to the gaps G1 and G3 of the retaining member 25, a detailed explanation is omitted.

[0036] As shown in Figure 4, the holding member 27 (third holding member) has a space 27a (fifth space) and a through hole 27b. The holding member 27 holds the end of the sheet roll 21 (shaft portion 21a and outer peripheral portion 21b) within the substantially cylindrical space 27a. The holding member 27 defines the space 27a and has an inner surface 27c facing the end (end face) of the sheet roll 21. The through hole 27b communicates with the space 27a and the rotating shaft 21c is located there. A rotating mechanism such as a motor can be connected to the rotating shaft 21c through the through hole 27b. The rotating member RM, the rotating sealing member CR, the fixing member ST, and the end sealing member CE0 are arranged within the space 27a and the through hole 27b.

[0037] The rotating member RM is, for example, a bearing mechanism, which rotatably fixes the rotating shaft 21c and the through hole 27b. The rotating sealing member CR is, for example, an oil seal (an O-ring, for instance), which rotatably seals the space between the rotating shaft 21c and the through hole 27b. The rotating sealing member CR is fixed to the holding member 27 by, for example, an O-ring shaped fixing member ST. The end sealing member CE0 is, for example, an O-ring, which seals the space between the end of the sheet roll 21 and the inner surface 27c.

[0038] As shown on the right side of Figure 4, if air enters the gap G1 on the negative X-axis side of the sheet roll 21, this air may travel through the gap G1 in the negative Y-axis direction (path d11), reach the end of the sheet roll 21, move along this end in the positive X-axis direction (path d12), reach the negative Y-axis end of the sheet roll 21, move through the gap G1 on the positive X-axis side (path d13), and enter the vacuum chamber 11a. Here, by sealing the gap G5 between the end of the sheet roll 21 and the inner surface 27c of the space 27a, it is possible to restrict the inflow of air through the gap G5 while allowing the sheet roll 21 to rotate.

[0039] The paths d11, d12, and d13 function as a kind of labyrinth seal. That is, air cannot reach the vacuum chamber 11a without passing through paths d11, d12, and d13, and the long, narrow paths d11, d12, and d13 restrict the inflow of air. In addition, the airtightness can be further improved by placing the end sealing member CE0 between the end of the sheet roll 21 and the inner surface 27c.

[0040] The holding member 27 also includes a space, a through hole, an inner surface, a rotating member RM, a rotating sealing member CR, a fixing member ST, and an end sealing member CE0, which correspond to the backup roll 23. Since the space, through hole, and inner surface correspond to space 27a, through hole 27b, and inner surface 27c, a detailed explanation is omitted.

[0041] The holding member 28 has a space 28a, a through hole 28b, an inner surface 28c, a rotating member RM, a rotating sealing member CR, a fixing member ST, and an end sealing member CE0, corresponding to the sheet roll 22. The holding member 28 also has a space, a through hole, an inner surface, a rotating member RM, a rotating sealing member CR, a fixing member ST, and an end sealing member CE0, corresponding to the backup roll 24. The space 28a, the through hole 28b, the inner surface 28c, etc. correspond to the space 27a, the through hole 27b, and the inner surface 27c of the holding member 27, so a detailed explanation is omitted.

[0042] Because the backup rolls 23 and 24 are rigid, they can correct the deflection of the sheet rolls 21 and 22 and improve the airtightness between the sheet rolls 21 and 22. Here, the sheet rolls 21 and 22 and the backup rolls 23 and 24 are arranged on a straight line perpendicular to the central axis C1 to C4. By pressing the rollers 21 and 22 from above and below with the backup rolls 23 and 24, the deflection of the rollers 21 and 22 can be corrected more effectively, improving the sealing performance.

[0043] Since the backup roll 23 has rigidity, it is easy to perform high-precision processing. Therefore, while making the backup roll 23 rotatable, the gap G2 between the backup roll 23 and the inner peripheral surface 25d of the holding member 25 can be reduced, making it difficult for air to pass through the gap G2, and the sealing performance can be further improved. That is, the gaps G3 and G4 between the backup rolls 23 and 24 are made smaller than the gaps G1 and G2 between the sheet rolls 21 and 22 (G3, G4 < G1, G2), and the labyrinth sealing performance at the gaps G1, G3 and the gaps G2, G4 can be improved. As an example, the gaps G1 and G2 can be set to 0.2 mm to 0.6 mm, and the gaps G3 and G4 can be set to 0.02 mm to 0.1 mm.

[0044] (Modified Example) FIG. 5 is a perspective view showing an example of the vacuum sealing device 15 according to a modified example of the present invention. The vacuum sealing device 15 according to the modified example does not have the backup rolls 23 and 24, and the holding members 25 to 28 do not have a space for holding the backup rolls 23 and 24. In this case, each of the gaps G1 and G3 functions as a labyrinth seal independently.

[0045] (Summary) As described above, in the present embodiment, the rotating members (sheet rolls 21 and 22, backup rolls 23 and 24) are rotatably sealed (labyrinth seal) by the surrounding gaps G1, G2, G3, and G4. As a result, both the rotatability of the sheet rolls 21 and 22 and the backup rolls 23 and 24 and the sealing are achieved. Since the rotating members do not need to substantially contact the fixed members (holding members 25 to 28), wear caused by friction between the rotating members and the fixed members can be reduced.

[0046] The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope shown in the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the present invention.

[0047] (Summary) The vacuum sealing device of embodiment 1 comprises: a first roll having a first outer surface made of a first elastic material and having a first central axis as the axis of rotational symmetry; a second roll made of a second elastic material and having a second outer surface in contact with the outer surface of the first roll, and having a second central axis parallel to the first central axis and having a second axis as the axis of rotational symmetry; a first holding member having a first space coaxial with the first roll and holding the first roll, and a first inner surface defining the first space and facing the first outer surface; and a second holding member having a second space coaxial with the second roll and holding the second roll, and a second inner surface defining the second space and facing the second outer surface, and facing the first holding member with a gap between them, wherein the sheet material is passed between the first roll and the second roll and the gap by rotating the first roll and the second roll in correspondence.

[0048] The vacuum sealing device of embodiment 2 is the vacuum sealing device described in embodiment 1, wherein a first gap is formed between the first outer surface and the first inner surface, allowing the first roll to rotate relative to the first holding member while restricting the flow of gas along the first inner surface. A second gap is formed between the second outer surface and the second inner surface, which allows the second roll to rotate relative to the second holding member while restricting the flow of gas along the second inner surface.

[0049] The vacuum sealing device of embodiment 3 is the vacuum sealing device described in embodiment 1 or 2, wherein the first and second elastic materials are rubber material or sponge material.

[0050] The vacuum sealing device of embodiment 4 is a vacuum sealing device according to any one of embodiments 1 to 3, comprising a first rotating mechanism for rotating the first roll and a second rotating mechanism for rotating the second roll in a manner corresponding to the first roll.

[0051] The vacuum sealing device of embodiment 5 is a vacuum sealing device according to any one of embodiments 1 to 4, comprising a third roll made of a first rigid material, having a third outer surface that contacts the first outer surface, and having a third central axis parallel to the first and second central axes as an axis of rotational symmetry, The first holding member has a third space coaxial with the third roll that holds the third roll, and a third inner surface that defines the third space and faces the third outer surface. The second holding member has a fourth space coaxial with the fourth roll that holds the fourth roll, and a fourth inner surface that defines the fourth space and faces the fourth outer surface. By rotating the first roll, the second, third, and fourth rolls rotate.

[0052] The vacuum sealing device of embodiment 6 is the vacuum sealing device of embodiment 5, wherein a third gap is formed between the third inner circumferential surface and the third outer circumferential surface, allowing the third roll to rotate relative to the first holding member while restricting the flow of gas along the third inner circumferential surface. A fourth gap is formed between the fourth inner surface and the fourth outer surface, which allows the fourth roll to rotate relative to the second holding member while restricting the flow of gas along the fourth inner surface.

[0053] The vacuum sealing device of embodiment 7 is the vacuum sealing device described in embodiment 5 or 6, wherein the first and second rigid materials are metal or plastic materials.

[0054] The vacuum sealing device of embodiment 8 is a vacuum sealing device according to any one of embodiments 5 to 7, wherein the first, second, third, and fourth rolls are arranged on a straight line perpendicular to the central axes of the first, second, third, and fourth rolls.

[0055] The vacuum sealing device of embodiment 9 is a vacuum sealing device according to any one of embodiments 5 to 8, further comprising: a third rotating mechanism for rotating the third roll in correspondence with the first and second rolls; and a fourth rotating mechanism for rotating the fourth roll in correspondence with the first, second, and third rolls.

[0056] The vacuum sealing device of embodiment 10 is a vacuum sealing device according to any one of embodiments 1 to 9, comprising: a third holding member having a rotating shaft protruding from the end of the first roll; a fifth space for holding the end; an inner surface defining the fifth space and facing the end; and a through hole in which the rotating shaft is arranged; a rotating sealing member that rotatably seals the space between the rotating shaft and the through hole; and an end sealing member that seals the space between the end and the inner surface. It is equipped with.

[0057] The vacuum chamber apparatus of embodiment 11 comprises a vacuum chamber, a vacuum pump for creating a vacuum inside the vacuum chamber, and one or more vacuum sealing devices as described in any of embodiments 1 to 10, wherein the sheet material is introduced into the vacuum chamber or taken out from the vacuum chamber by the vacuum sealing device. [Explanation of Symbols]

[0058] 10... Vacuum system, 11... Vacuum chamber device, 15... Vacuum sealing device, 21, 22... Sheet roll, 23, 24... Backup roll, 25, 26, 27, 28... Retaining member

Claims

1. A first roll having a first outer surface made of a first elastic material and having a first central axis as the axis of rotational symmetry, A second roll is made of a second elastic material and has a second outer surface that contacts the outer surface of the first roll, and the second central axis is parallel to the first central axis and is a rotationally symmetric axis, A third roll is made of a first rigid material, has a third outer surface that contacts the first outer surface, and has a third central axis parallel to the first and second central axes as an axis of rotational symmetry, A fourth roll is made of a second rigid material and has a fourth outer surface that contacts the second outer surface, and the fourth central axis is parallel to the first, second, and third central axes, with the fourth central axis being the axis of rotational symmetry. A first holding member having a first space coaxial with the first roll that holds the first roll, a first inner surface that defines the first space and faces the first outer surface, a third space coaxial with the third roll that holds the third roll, and a third inner surface that defines the third space and faces the third outer surface, A second holding member having a second space coaxial with the second roll for holding the second roll, a second inner surface defining the second space and facing the second outer surface, a fourth space coaxial with the fourth roll for holding the fourth roll, and a fourth inner surface defining the fourth space and facing the fourth outer surface, and facing the first holding member with a gap between them, Equipped with, By rotating the first roll and the second roll in correspondence, the sheet material is passed between the first roll and the second roll and the gap between them. A vacuum sealing device in which the second, third, and fourth rolls rotate by rotating the first roll.

2. A first gap is formed between the first outer surface and the first inner surface, which allows the first roll to rotate relative to the first holding member while restricting the flow of gas along the first inner surface. The vacuum sealing device according to claim 1, wherein a second gap is formed between the second outer surface and the second inner surface, allowing the second roll to rotate relative to the second holding member while restricting the flow of gas along the second inner surface.

3. The vacuum sealing device according to claim 1, wherein the first and second elastic materials are rubber material or sponge material.

4. A first rotating mechanism for rotating the first roll, A second rotating mechanism for rotating the second roll so as to correspond to the first roll, The vacuum sealing device according to claim 1, comprising:

5. Between the third inner surface and the third outer surface, there is a third gap that allows the third roll to rotate relative to the first holding member while restricting the flow of gas along the third inner surface. The vacuum sealing device according to claim 1, wherein a fourth gap is formed between the fourth inner surface and the fourth outer surface, allowing the fourth roll to rotate relative to the second holding member while restricting the flow of gas along the fourth inner surface.

6. The vacuum sealing device according to claim 1, wherein the first and second rigid materials are metal or plastic materials.

7. The vacuum sealing device according to claim 1, wherein the first, second, third, and fourth rolls are arranged on a straight line perpendicular to the central axes of the first, second, third, and fourth rolls.

8. A third rotating mechanism for rotating the third roll in correspondence with the first and second rolls, A fourth rotating mechanism for rotating the fourth roll in correspondence with the first, second, and third rolls, The vacuum sealing device according to claim 1, comprising:

9. A rotating shaft protruding from the end of the first roll, A third retaining member having a fifth space for holding the end, an inner surface that defines the fifth space and faces the end, and a through hole in which the rotating shaft is positioned. A rotating sealing member that rotatably seals the space between the rotating shaft and the through hole, An end sealing member that seals the space between the end and the inner surface, A vacuum sealing device according to any one of claims 1 to 4, comprising:

10. Vacuum chamber and, A vacuum pump to create a vacuum inside the vacuum chamber, One or more vacuum sealing devices according to any one of claims 1 to 4, Equipped with, A vacuum chamber apparatus that uses one or more vacuum sealing devices to introduce the sheet material into the vacuum chamber or to lead it out from the vacuum chamber.

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