Micro-Raman spectrometer and control method for the micro-Raman spectrometer.

Abstract

A micro-Raman apparatus (100) comprises a light source unit (110), an objective lens unit (140), a detection device (160), a drive device (180), and a control device (200) for controlling the drive device (180). The light source unit (110) includes a plurality of light source devices (111-114) configured so as to generate mutually different wavelengths of light. The objective lens unit (140) condenses and radiates light from the light source unit (110) to a sample (SMP) to be analyzed. The detection device (160) detects Raman scattered light generated from the sample (SMP). The drive device (180) changes a relative distance between the sample (SMP) and the objective lens unit (140). The control device (200) is configured so as to correct the relative distance in accordance with the wavelength of light radiated from the light source device that is used.

Description

Technical Field

[0001] The present disclosure relates to a microscopic Raman apparatus and a method for controlling the microscopic Raman apparatus, and more particularly, to focusing control in a microscopic Raman apparatus.

Background Art

[0002] Japanese Patent Application Laid-Open No. 2021-117022 (Patent Document 1) discloses a microscopic Raman spectroscopic analyzer (hereinafter also referred to as a "microscopic Raman apparatus"). The microscopic Raman apparatus described in Patent Document 1 includes an excitation laser light source and a spectroscopic detector. In the microscopic Raman apparatus of Patent Document 1, when a laser beam from the laser light source irradiates a sample, Raman scattered light is generated from the sample. The generated Raman scattered light is dispersed by the spectroscopic detector, and by detecting the intensity distribution of the dispersed Raman scattered light, analysis of the components contained in the sample and the like are performed.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In a microscopic Raman apparatus, a configuration in which an optical microscope and a Raman spectroscopic apparatus are generally combined is used. In such a configuration, a visible light source used in the optical microscope and a laser light source used in the Raman spectroscopic apparatus are used in the same optical system. Further, in some microscopic Raman apparatuses, there are those configured to have a plurality of laser light sources having different wavelengths from each other and to be able to perform analysis by switching these laser light sources.

[0005] In a micro-Raman spectrometer, light emitted from a light source is focused by an objective lens and directed onto the sample. As described above, in a micro-Raman spectrometer that uses multiple light sources in the same optical system, the focusing position of the objective lens changes depending on the relative difference in wavelength of the light from the light sources. Therefore, when the light source is switched, it is necessary to adjust the focal length (i.e., focus) between the objective lens and the sample each time.

[0006] Performing such adjustments each time the light source is switched would be time-consuming and place a heavy burden on the operator. Furthermore, since focusing the laser light source requires experience and skill, manual focusing could lead to variations in measurement results depending on the operator performing the adjustment.

[0007] Furthermore, since the height from the sample stage differs for each object being measured, and automatic adjustment of the focal length requires calculations based on the captured image, there are inherent difficulties in automatically adjusting the focal length itself.

[0008] This disclosure was made to solve these problems, and its purpose is to facilitate focus adjustment when switching light sources in a micro-Raman apparatus having multiple light source devices, and to reduce variability in measurement results. [Means for solving the problem]

[0009] A micro-Raman apparatus according to a certain aspect of the present disclosure comprises a light source unit, an objective lens unit, a detection device, a drive unit, and a control device for controlling the drive unit. The light source unit includes a plurality of light source devices configured to generate light of different wavelengths. The objective lens unit focuses and irradiates the sample to be analyzed with light from the light source unit. The detection device detects the Raman scattered light generated from the sample. The drive unit changes the relative distance between the sample and the objective lens unit. The control device is configured to correct the relative distance according to the wavelength of light emitted from the light source devices being used.

[0010] A control method for a micro-Raman apparatus relating to another aspect of the present disclosure relates to a control method for a micro-Raman apparatus comprising a light source unit, an objective lens unit, a detection device, and a drive device. The light source unit includes a plurality of light source devices configured to generate light of different wavelengths. The objective lens unit focuses the light from the light source unit and irradiates the sample to be analyzed. The detection device detects the Raman scattered light generated from the sample. The drive device changes the relative distance between the sample and the objective lens unit. The control method includes (a) acquiring information on the plurality of light source devices, (b) calculating a correction value for the relative distance according to the wavelength of the light emitted from the light source devices used, and (c) driving the drive device based on the correction value to change the relative distance. [Effects of the Invention]

[0011] According to the micro-Raman apparatus described herein, in a configuration equipped with multiple light source devices, it is possible to easily adjust the focus when switching between light source devices and to reduce variability in measurement results. [Brief explanation of the drawing]

[0012] [Figure 1] This is a schematic diagram showing the configuration of the micro-Raman spectrometer of Embodiment 1. [Figure 2] This figure shows an example of the configuration of the light source device according to Embodiment 1. [Figure 3] This is a diagram illustrating the overview of focus correction control in Embodiment 1. [Figure 4] This figure shows an example of information stored in the storage device in Embodiment 1. [Figure 5] This diagram illustrates the modification of the stage's drive range associated with focus correction control. [Figure 6] This flowchart shows the details of the focus correction control in Embodiment 1. [Figure 7] This diagram shows the configuration of the micro-Raman spectrometer in Embodiment 2. [Figure 8] This is a diagram illustrating the overview of focus correction control in Embodiment 2. [Figure 9] It is a diagram showing an example of information stored in the storage device in Embodiment 2. [Figure 10] It is a flowchart showing details of the focus correction control in Embodiment 2.

Embodiments for Carrying Out the Invention

[0013] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are denoted by the same reference numerals and their description will not be repeated.

[0014] [Embodiment 1] (Configuration of the Micro-Raman Device) FIG. 1 is a schematic diagram showing the configuration of a micro-Raman device 100 according to Embodiment 1. Referring to FIG. 1, the micro-Raman device 100 includes, as an optical system configuration, a light source unit 110, a collimator lens 120, beam splitters 130 and 135, an objective lens unit 140, a stage 150 for placing a sample SMP, a detection device 160, a filter 162, condenser lenses 164 and 175, a slit 166, an imaging device 170, and a driving device 180. The micro-Raman device 100 further includes a control device 200 for comprehensively controlling the entire device. In FIG. 1, the placement surface of the stage 150 is taken as the XY plane, and the normal direction of the placement surface is taken as the Z-axis direction.

[0015] As will be described later with reference to FIG. 2, the light source unit 110 includes a plurality of light source devices. As the plurality of light source devices, for example, a visible light source, a laser light source, an infrared light source, and / or an ultraviolet light source can be used.

[0016] The light emitted from the light source unit 110 is made substantially parallel by the collimator lens 120 and travels in the positive direction of the Z-axis in FIG. 1. The light passing through the collimator lens 120 further passes through the beam splitters 130 and 135 and enters the objective lens unit 140. The light is condensed in the objective lens unit 140 and irradiates the sample SMP placed on the stage 150.

[0017] When the light source device is a visible light source, the light reflected by the sample SMP passes through the objective lens unit 140 and is reflected by the reflecting surface of the beam splitter 135. Then, it is condensed by the condenser lens 175 and irradiated onto the imaging device 170. The imaging device 170 is, for example, a CCD camera. The image of the sample SMP captured by the imaging device 170 is output to the control device 200. In this case, the microscopic Raman device 100 functions as an optical microscope.

[0018] When the light source device is a laser light source, Raman scattered light corresponding to the irradiated laser light is generated from the sample SMP when the sample SMP is irradiated with the laser light. The generated Raman scattered light passes through the beam splitter 135 and is reflected by the reflecting surface of the beam splitter 130. The Raman scattered light reflected by the beam splitter 130 enters the filter 162. In this case, the microscopic Raman device 100 functions as a Raman spectrometer.

[0019] The filter 162 is a long-pass filter, which is an optical filter that allows light on the long wavelength side to pass through and blocks light on the short wavelength side. The cut-off wavelength of the filter 162 is set slightly on the long wavelength side of the wavelength of the laser light (irradiation light) irradiated from the light source device. Thereby, the filter 162 blocks the reflected light by the sample SMP and the Raman scattered light (anti-Stokes light) on the short wavelength side of the irradiation light, and allows the Raman scattered light on the long wavelength side of the irradiation light (Stokes light) to pass through. When a plurality of laser light sources with different wavelengths are used, filters suitable for each laser light source are selectively used.

[0020] The Raman scattered light that has passed through the filter 162 is condensed by the condenser lens 164. A diaphragm 166 with a small aperture (pinhole) is disposed at the condensing point 167 of the Raman scattered light. The Raman scattered light that has passed through the pinhole of the diaphragm 166 enters the detection device 160.

[0021] The detection device 160 includes a spectrometer and a line sensor for detecting the intensity of the dispersed scattered light, although these are not shown in the diagram. The spectrometer is typically a diffraction grating. A CCD detector is used as the line sensor. The spectral intensity detected by the detection device 160 is output to the control device 200.

[0022] Furthermore, when an infrared or ultraviolet light source is used as the light source, the reflected light from the sample SMP is spectrally analyzed and measured by the detection device 160, and the substances contained in the sample SMP are identified from the absorbance of the sample SMP.

[0023] The control unit 200 includes a CPU 201, which is an arithmetic unit, and a storage device 202. The storage device 202 includes non-volatile memory or volatile memory such as ROM (Read Only Memory) or RAM (Random Access Memory), and / or a mass storage device such as HDD (Hard Disk Drive) or SSD (Solid State Drive). The CPU 201 reads programs and data stored in the storage device 202 and comprehensively controls the micro-Raman apparatus 100.

[0024] The control device 200 is connected to an input device 210 and a display device 220. The input device 210 is, for example, a keyboard, mouse, pointing device, or touch panel, and accepts user input. The display device 220 is, for example, a liquid crystal display (LCD) or an organic electroluminescent (EL) display, and displays images of sample SMPs captured by the imaging device 170, the intensity distribution of Raman scattered light detected by the detection device 160, and the operating status of the device.

[0025] The stage 150 is configured to move in the X, Y, and Z directions by a drive device 180 that operates according to commands from the control device 200. By moving the stage 150 in the X and / or Y directions, the measurement position on the sample SMP can be changed. Furthermore, by moving the stage 150 in the Z direction, the relative distance between the objective lens unit 140 and the sample SMP can be changed, thereby adjusting the focus of the objective lens unit 140. Alternatively, instead of moving the stage 150, the measurement position and focus adjustment may be performed by moving the optical system including the objective lens unit 140.

[0026] Figure 2 is a diagram illustrating an example of the configuration of the light source unit 110 in the micro-Raman spectrometer 100 of Embodiment 1. In the example in Figure 2, the light source unit 110 includes a plurality of light source devices, including a visible light source 111, laser light sources 112 and 113, and an infrared light source 114, and mirrors M1 to M4. The laser light sources 112 and 113 are laser light sources with different wavelengths.

[0027] Mirror M1 is positioned on the optical axis connecting the visible light source 111 and the objective lens section 140. Mirror M1 allows visible light L1 from the visible light source 111 to pass through, and reflects light L2 to L4 from mirrors M2 to M4. Mirror M2 is positioned on the optical axis of the laser light source 112 and reflects laser light L2 from the laser light source 112, while also allowing light L3 and L4 from mirrors M3 and M4 to pass through. Mirror M3 is positioned on the optical axis of the laser light source 113 and reflects laser light L3 from the laser light source 113, while also allowing infrared light L4 from mirror M4 to pass through. Mirror M4 is positioned on the optical axis of the infrared light source 114 and reflects infrared light L4 from the infrared light source 114.

[0028] The visible light L1 that passes through mirror M1, and the laser light L2, L3 and infrared light L4 reflected by mirror M1, pass through beam splitters 130, 135 and objective lens section 140 and irradiate the sample SMP.

[0029] Reflected light L5 from the sample SMP with respect to visible light L1 from the visible light source 111 passes through the objective lens section 140, is further reflected by the beam splitter 135, and enters the imaging device 170. Raman scattered light L6 and L7 from laser light L2 and L3 from laser light sources 112 and 113 passes through the objective lens section 140 and the beam splitter 135, is reflected by the beam splitter 130, and enters the detection device 160. Reflected light L8 from the sample SMP with respect to infrared light L4 from the infrared light source 114 passes through the objective lens section 140 and the beam splitter 135, is reflected by the beam splitter 130, and enters the detection device 160.

[0030] Switching between each light source device can be done by switching the power supply to and from each light source device, or by opening and closing a shutter (not shown) placed between each light source device and its corresponding mirror. Note that the configuration of the light source unit 110 shown in Figure 2 is just one example, and other configurations may be used as long as multiple light source devices can be switched between.

[0031] (Explanation of focus correction control) In the above-described micro-Raman spectrometer 100, multiple light sources such as a visible light source, a laser light source, an infrared light source, and / or an ultraviolet light source are used as the light source unit 110 that irradiates the sample SMP. Since the wavelengths of light used in these different light sources are different from each other, when the light source unit being used is switched, the focusing position (focal length) of the objective lens unit 140 changes due to the relative difference in the wavelengths of light from the light sources. Therefore, when the light source unit is switched, it is necessary to adjust the focal length (focus adjustment) between the objective lens unit 140 and the sample SMP each time.

[0032] Performing such focus adjustments each time the light source is switched would be time-consuming, increasing the total working time and placing a heavy burden on the operator. Furthermore, when using a laser light source, it is necessary to adjust the focus while observing the peak intensity of the generated Raman scattered light. However, this adjustment requires experience and skill, and if this focus adjustment is performed manually, there is a possibility of variability in the measurement results depending on the operator performing the adjustment.

[0033] Furthermore, since the height from the sample stage differs for each object being measured, and automatic adjustment of the focal length requires calculations based on the captured image, there are inherent difficulties in automatically adjusting the focal length itself.

[0034] Therefore, in this embodiment 1, a correction value corresponding to the relative wavelength of the light source to be used is stored in a memory device in advance, and when switching light sources, focus correction control is performed to automatically adjust the focus according to the correction value of the light source to be used. By performing such focus correction control, the workload and working time can be reduced and the variability in measurement results can be reduced compared to when focus adjustment is performed manually.

[0035] Figure 3 is a diagram illustrating the overview of focus correction control in Embodiment 1. The left figure (A) in Figure 3 shows the state when the sample SMP is in focus when using the visible light source 111. Let z be the coordinate of the stage 150 at this time.

[0036] In the state shown in left figure (A), when the visible light source 111 is switched to the laser light source 112 (middle figure (B)), the difference in wavelength between the visible light L1 and the laser light L2 causes the focusing position of the laser light L2 by the objective lens 140 to change by "a" units above its position on the sample SMP in left figure (A). In other words, the image becomes out of focus.

[0037] As shown in Figure 3, right (C), the control device 200 pre-stores a correction amount in the storage device 202 that corresponds to the amount of deviation "a" between the focal position of the laser beam L2 and the focal position of the visible light L1. When the light source device being used is switched, the control device 200 moves the stage 150 to a position (coordinate z+a) that takes this correction amount into account.

[0038] Figure 4 shows an example of information stored in the memory device 202. In the example in Figure 4, the information includes the wavelength of light emitted from each light source device and a reference correction value for the focal position. Here, the reference correction value is, for example, the focal position in the case of the visible light source 111 (light source 1) is used as the reference (correction value = 0), and the amount of deviation from the focal length in the case of the visible light source 111 is used as the correction value for each light source device. The correction value for each light source device may be calculated and set by theoretical calculation based on the relative wavelength of each light source device, or it may be set as the amount of deviation obtained when experimentally adjusted using a reference sample, etc. Alternatively, only the wavelength of each light source device may be stored in the memory device 202, and the correction value may be calculated each time the light source device is switched based on the wavelength difference before and after switching.

[0039] During the initial measurement of the target sample SMP, the sample thickness is unknown, so the focus is adjusted manually by the operator or using the autofocus function. Subsequently, when the light source device to be used is switched, the CPU 201 of the control device 200 refers to the information stored in the storage device 202 and drives the stage 150 based on the difference in the reference correction value of the light source device before and after the switch. Through this control, the focus is automatically adjusted to a focal position suitable for the light source device being used. The user can enable (ON) or disable (OFF) this automatic focus correction function by setting a hardware switch or a software switch on the display screen.

[0040] If the position of stage 150 is automatically adjusted by focus correction control, and the coordinates of stage 150 displayed on the display device 220 change, the user may mistakenly believe that the focus position has shifted due to their own incorrect operation. Therefore, it is preferable that focus correction control is not reflected in the display of the stage position on the display device 220, and that the display coordinates of stage 150 are not changed.

[0041] On the other hand, if the displayed position of stage 150 differs from its actual position, operating stage 150 based on that displayed position may cause the displayed range of motion of stage 150 to exceed the mechanical range of motion, as shown in the upper part of Figure 5. For example, if the focal position is corrected by a correction amount a in the positive Z-axis direction (the upward direction of the machine) as shown in Figure 3, the upper limit of the range of motion may exceed the mechanical upper limit. Therefore, as shown in the lower part of Figure 5, if the position of stage 150 is changed by a correction amount a due to focus correction control, the range of motion is changed in accordance with the correction amount a. Specifically, the upper limit of the range of motion, max, is changed to (max-a), and the lower limit, min, is changed to (min-a). This prevents movement exceeding the mechanical range of motion when the user manually raises or lowers stage 150 after focus correction control has been performed, thereby preventing damage to the machine.

[0042] Furthermore, it is preferable that the display changes of the stage 150 coordinates associated with the focus correction control described above be automatically reset when the sample being measured is changed, and / or when focus adjustment is performed manually or by the autofocus function. Alternatively, it may be possible to reset it by user operation.

[0043] Figure 6 is a flowchart detailing the focus correction control in Embodiment 1. The flowcharts shown in Figure 6 and Figure 10 (described later) are, in one example, realized by the CPU 201 executing a program stored in the storage device 202 of the control device 200. Note that some or all of the processing in the flowchart may be realized by hardware circuits within the control device 200.

[0044] Referring to Figure 6, the control device 200 determines in step 100 (hereinafter, "step" is abbreviated as S) whether or not it is the first measurement of the sample SMP to be measured. If it is the first measurement (YES in S100), the objective lens unit 140 has not been focused for the sample SMP, so the process proceeds to S170, and the control device 200 focuses the objective lens unit 140 using the existing autofocus function. Alternatively, the control device 200 outputs a message to the display device 220 prompting the user to perform manual focus adjustment.

[0045] If it is not the first measurement, i.e., if the sample SMP to be measured has already been focused (NO in S100), the control device 200 proceeds to S110 to determine whether the light source device to be used has been switched. The detection of the light source switch may be based on the user's input to the input device 210, or it may be automatically detected based on the ON / OFF operation of the light source device or the opening and closing operation of the shutter.

[0046] If the light source has not been switched (NO in S110), the subsequent processing is skipped and the measurement continues while maintaining the current settings. If the light source has been switched (YES in S110), the process proceeds to S120, where the control device 200 determines whether the automatic focus correction function is enabled.

[0047] If the automatic correction function is disabled (NO in S120), the subsequent processing is skipped. In this case, the user manually adjusts the focus. If the automatic correction function is enabled (YES in S120), the process proceeds to S130, where the control device 200 reads the information stored in the memory device 202 (Figure 4) and obtains the wavelength / or reference correction value for the light source device before and after switching. Then, in S140, the control device 200 uses the acquired information to calculate a correction value based on the wavelength difference of the light source device before and after switching. Furthermore, in S150, the control device 200 corrects the movable range of the stage 150 in the Z-axis direction, as explained in Figure 5. After that, in S160, the control device 200 drives the Z-axis of the stage 150 based on the calculated correction value to adjust the focus.

[0048] By controlling the system according to the above process, a micro-Raman microscope with multiple light sources can automatically adjust the focus according to the light source being used. This reduces the workload and working time for the operator, as well as reducing variability in measurement results, compared to manual focus adjustment.

[0049] In Embodiment 1, the "visible light source 111" corresponds to the "first light source device" in this disclosure. In Embodiment 1, the "laser light source 112" and "laser light source 113" correspond to the "second light source device" and "third light source device," respectively, in this disclosure. In Embodiment 1, the "infrared light source 114" corresponds to the "fourth light source device" in this disclosure.

[0050] [Embodiment 2] In Embodiment 1, a configuration was described in which, when the light source device being used is switched, the focus is automatically adjusted according to the wavelength of light from each light source device.

[0051] On the other hand, in micro-Raman microscopes, multiple objective lenses may be provided to change the magnification of the measurement area of ​​the sample being measured. Even when using the same light source, switching objective lenses requires refocusing because the size and focal length of the lenses used will differ.

[0052] Embodiment 2 describes a configuration in which a micro-Raman microscope equipped with multiple objective lenses automatically adjusts the focus according to the objective lens used for measurement.

[0053] Figure 7 shows the configuration of the micro-Raman apparatus 100A of Embodiment 2. In the micro-Raman apparatus 100A, the objective lens section 140 in the micro-Raman apparatus 100 described in Figure 2 is replaced by the objective lens section 140A. In Figure 7, explanations of elements that overlap with those in Figure 2 will not be repeated.

[0054] Referring to Figure 7, the objective lens section 140A of the micro-Raman spectrometer 100A includes objective lenses 141 to 143 with different focal lengths. The objective lenses 141 to 143 are mounted on a rotating or sliding holder (not shown), and the system is configured to allow switching to the desired objective lens by moving the holder.

[0055] Generally, the focal length of an objective lens increases as the magnification increases. Therefore, even if the focus is adjusted correctly with one objective lens, the focal point will change when switching to a different objective lens.

[0056] For example, as shown in the left figure (A) of Figure 8, when focusing is completed with objective lens 142, switching to objective lens 141, which has a shorter focal length than objective lens 142 (middle figure (B)), changes the focusing position to a position "b" higher than the position on the sample SMP in the left figure (A). Conversely, switching to objective lens 143, which has a longer focal length than objective lens 142, changes the focusing position to a position lower than the position on the sample SMP.

[0057] Since the specifications for the focal positions of the objective lenses are known in advance, the difference in focal positions between the objective lenses being used is stored as a correction value in the memory device 202. When switching objective lenses, the stage 150 is moved according to this correction value, allowing for automatic focus adjustment as shown in Figure 8, right (C).

[0058] Figure 9 shows an example of information stored in the storage device 202 in Embodiment 2. In the example in Figure 9, the information includes the wavelength of light emitted from each light source device and a reference correction value corresponding to each objective lens. The reference correction value is set with the focal position when using the objective lens 141 (lens 1) with the shortest focal position in the visible light source 111 as the reference (correction value = 0), taking into account the amount of shift in focal length when the objective lens is switched and the amount of shift when the light source device is switched. The control device 200 can automatically perform focus correction control using the correction values ​​shown in Figure 9.

[0059] Furthermore, in Embodiment 2, as in Embodiment 1, the display of the stage position during focus correction control is maintained, and the operable range is modified. As mentioned above, since the instrument size (length in the optical axis direction) of the objective lens changes depending on the magnification, it is preferable to set the operable range while also considering the instrument size of the objective lens when modifying the operable range. As the magnification increases, the instrument size increases, making it easier for the sample SMP and the objective lens to come into contact. Therefore, the lower limit of the operable range in particular needs to be set considering the instrument size in addition to the difference in focal length.

[0060] Figure 10 is a flowchart detailing the focus correction control in Embodiment 2. Note that the flowchart in Figure 10 describes the case where only the objective lens is switched, without switching the light source device being used.

[0061] Referring to Figure 10, the control device 200 determines in S200 whether or not it is the first measurement of the sample SMP to be measured. If it is the first measurement (YES in S200), the objective lens unit 140A has not been focused for the sample SMP, so the process proceeds to S270, and the control device 200 focuses the objective lens unit 140 using the existing autofocus function. Alternatively, the control device 200 outputs a message to the display device 220 prompting the user to perform manual focus adjustment.

[0062] If this is not the first measurement, i.e., if the sample SMP to be measured has already been focused (NO in S200), the control device 200 proceeds to S210 to determine whether or not the objective lens to be used has been switched.

[0063] If the objective lens has not been switched (NO in S210), the subsequent processing is skipped, and the measurement continues while maintaining the current settings. If the objective lens has been switched (YES in S210), the process proceeds to S220, where the control device 200 determines whether the automatic focus correction function is enabled.

[0064] If the automatic correction function is disabled (NO in S220), the subsequent processing is skipped. In this case, the user manually adjusts the focus. If the automatic correction function is enabled (YES in S220), the process proceeds to S230, where the control device 200 reads the information stored in the memory device 202 (Figure 9) and obtains a reference correction value corresponding to the type (focal length) of the objective lens before and after the switch. Then, in S240, the control device 200 uses the acquired information to calculate a correction value based on the difference in focal length of the objective lens before and after the switch.

[0065] Furthermore, in S250, the control device 200 corrects the movable range of the stage 150 in the Z-axis direction. At this time, the movable range is set considering the size of the objective lens in addition to the correction value based on the focal length. Subsequently, in S260, the control device 200 drives the Z-axis of the stage 150 based on the calculated correction value to adjust the focus.

[0066] Furthermore, even when the light source device is switched in addition to the objective lens, the correction values ​​shown in Figure 9 can be used to adjust the focus according to the wavelength of light emitted from the light source device and the type of objective lens.

[0067] By controlling the system according to the above process, a micro-Raman microscope with multiple objective lenses can automatically adjust the focus according to the objective lens being used. This reduces the workload and working time for the operator compared to manual focus adjustment, and also reduces variability in measurement results.

[0068] [Pattern] Those skilled in the art will understand that the above-described exemplary embodiments are specific examples of the following embodiments.

[0069] (Section 1) A micro-Raman apparatus according to one embodiment comprises a light source unit, an objective lens unit, a detection device, a drive unit, and a control device for controlling the drive unit. The light source unit includes a plurality of light source units configured to generate light of different wavelengths. The objective lens unit focuses and irradiates the sample to be analyzed with light from the light source unit. The detection device detects the Raman scattered light generated from the sample. The drive unit changes the relative distance between the sample and the objective lens unit. The control device is configured to correct the relative distance according to the wavelength of the light emitted from the light source unit being used.

[0070] According to the micro-Raman apparatus described in paragraph 1, in a configuration equipped with multiple light sources, the relative distance between the objective lens and the sample is corrected according to the wavelength of the light source being used. That is, when a light source is switched, the focus is automatically adjusted according to the difference in wavelength of the light source before and after the switch. Therefore, in a micro-Raman apparatus with multiple light sources, focus adjustment associated with light source switching can be easily performed, and variability in measurement results can be reduced.

[0071] (Section 2) In the micro-Raman apparatus described in Section 1, the control device includes a processor and a memory device that stores correction values ​​from a reference distance between the sample and the objective lens for each of the plurality of light source devices. The processor obtains the correction value corresponding to the light source device being used from the memory device and corrects the relative distance.

[0072] According to the micro-Raman apparatus described in paragraph 2, the control device's processor can adjust the focus based on correction values ​​stored in the memory. Therefore, it is possible to easily adjust the focus when switching light sources and reduce variability in measurement results.

[0073] (3) In the micro-Raman apparatus described in paragraph 1, the control device includes a processor and a memory device in which the wavelengths of each of the multiple light sources are stored.

[0074] When a light source device is changed, the processor retrieves the wavelengths of the light source device before and after the change from the storage device and corrects the relative distance according to the relative difference in wavelengths between the light sources.

[0075] According to the micro-Raman apparatus described in paragraph 3, the processor can adjust the focus based on the wavelength information of each light source stored in the memory. Therefore, it is possible to easily adjust the focus when switching light sources and reduce the variability of measurement results.

[0076] (Article 4) In the micro-Raman apparatus described in any one of paragraphs 1 to 3, the plurality of light source devices include a first light source device that generates visible light and a second light source device that generates laser light of a first wavelength.

[0077] According to the micro-Raman apparatus described in Section 4, the focus difference between the visible light source and the laser light source can be automatically adjusted.

[0078] (Clause 5) In the micro-Raman apparatus described in paragraph 4, the plurality of light source devices further include a third light source device that generates laser light of a second wavelength different from the first wavelength.

[0079] According to the micro-Raman apparatus described in Section 5, the focus difference between the visible light source and two laser light sources of different wavelengths can be automatically adjusted.

[0080] (Section 6) In the micro-Raman apparatus described in Section 4 or 5, the plurality of light source devices further include a fourth light source device that generates infrared light.

[0081] According to the micro-Raman apparatus described in Section 6, when using an infrared light source, the focus difference between the infrared light source and the visible light source and / or laser light source can be automatically adjusted.

[0082] (Clause 7) In the micro-Raman apparatus described in any one of paragraphs 1 to 3, the plurality of light source devices include a second light source device that generates laser light of a first wavelength and a third light source device that generates laser light of a second wavelength different from the first wavelength.

[0083] According to the micro-Raman apparatus described in Section 7, the focus difference between two laser light sources of different wavelengths can be automatically adjusted.

[0084] (Section 8) The micro-Raman apparatus described in any one of Sections 1 to 7 further comprises a stage for placing the above-mentioned sample. A drive device drives the stage to change the above-mentioned relative distance.

[0085] According to the micro-Raman apparatus described in Section 8, the control device can adjust the focus by moving the stage on which the sample is placed using a drive device.

[0086] (Section 9) The micro-Raman apparatus described in Section 8 further comprises a display device for indicating the position of the stage. The control device shall not reflect in the display of the stage position on the display device any correction of the relative distance due to a change in the light source device used.

[0087] According to the micro-Raman apparatus described in paragraph 9, even when the focus is automatically adjusted by switching the light source device, the display of the stage position on the display device does not change. This prevents the user from mistakenly believing that they have performed an incorrect operation.

[0088] (Section 10) In the micro-Raman apparatus described in any one of Sections 1 to 9, the control device is configured to be able to set whether or not to perform relative distance correction according to the light source device used.

[0089] According to the micro-Raman apparatus described in paragraph 10, the user can set whether or not to perform automatic focusing when switching light sources. This makes it possible to prevent risks such as collision between the objective lens and the sample when automatic focusing is performed.

[0090] (Section 11) In the micro-Raman apparatus described in any one of Sections 1 to 10, the objective lens section includes a plurality of objective lenses having different focal lengths. The control device is configured to correct the relative distances according to the objective lenses being used.

[0091] According to the micro-Raman apparatus described in paragraph 11, in a configuration having multiple objective lenses, the focus can be automatically adjusted according to the objective lens. Therefore, in a micro-Raman apparatus having multiple objective lenses, the focus can be easily adjusted when switching objective lenses, and the variability of measurement results can be reduced.

[0092] (Section 12) A control method for a micro-Raman apparatus according to another embodiment relates to a control method for a micro-Raman apparatus comprising a light source unit, an objective lens unit, a detection device, and a drive device. The light source unit includes a plurality of light source units configured to generate light of different wavelengths. The objective lens unit focuses the light from the light source unit and irradiates the sample to be analyzed. The detection device detects the Raman scattered light generated from the sample. The drive device changes the relative distance between the sample and the objective lens unit. The control method includes (a) acquiring information on the plurality of light source units, (b) calculating a correction value for the relative distance according to the wavelength of the light emitted from the light source units used, and (c) driving the drive device based on the correction value to change the relative distance.

[0093] According to the control method for the micro-Raman apparatus described in paragraph 12, in a configuration equipped with multiple light source devices, the relative distance between the objective lens and the sample is corrected according to the wavelength of the light source device being used. That is, when a light source device is switched, the focus is automatically adjusted according to the difference in wavelength of the light source before and after the switch. Therefore, in a micro-Raman apparatus with multiple light source devices, focus adjustment associated with light source switching can be easily performed, and the variability of measurement results can be reduced.

[0094] The embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. The scope of the present invention is indicated by the claims rather than by the description of the embodiments above, and all modifications within the meaning and scope of the claims are intended to be included. [Explanation of Symbols]

[0095] 100,100A Micro-Raman spectrometer, 110 Light source unit, 111 Visible light source, 112,113 Laser light source, 114 Infrared light source, 120 Collimator lens, 130,135 Beam splitter, 140,140A Objective lens unit, 141~143 Objective lens, 150 Stage, 180 Drive unit, 160 Detection unit, 162 Filter, 164,175 Focusing lens, 166 Slit, 167 Focusing point, 170 Imaging unit, 200 Control unit, 201 CPU, 202 Memory device, 210 Input device, 220 Display device, M1~M4 Mirror, SMP sample.

Claims

1. A light source unit including multiple light source devices configured to generate light of different wavelengths from each other, The sample to be analyzed is provided with an objective lens unit that focuses and illuminates the light from the light source unit, A detection device for detecting Raman scattered light generated from the aforementioned sample, A drive device for changing the relative distance between the sample and the objective lens portion, The system includes a control device for controlling the aforementioned drive device, The control device is configured to correct the relative distance according to the wavelength of light emitted from the light source device being used. The light source unit is configured to allow switching between the multiple light source devices to be used. The control device is Processor and Each of the plurality of light source devices includes a storage device that stores a correction value from a reference distance between the sample and the objective lens portion, The processor obtains a correction value corresponding to the light source device to be used from the storage device and corrects the relative distance using the obtained correction value, in a micro-Raman apparatus.

2. A light source unit including multiple light source devices configured to generate light of different wavelengths from each other, The sample to be analyzed is provided with an objective lens unit that focuses and illuminates the light from the light source unit, A detection device for detecting Raman scattered light generated from the aforementioned sample, A drive device for changing the relative distance between the sample and the objective lens portion, The system includes a control device for controlling the aforementioned drive device, The control device is configured to correct the relative distance according to the wavelength of light emitted from the light source device being used. The light source unit is configured to allow switching between the multiple light source devices to be used. The control device is Processor and The system includes a memory device in which the wavelengths of each of the plurality of light sources are stored. The processor, when the light source device being used is changed, obtains the wavelengths of the light source device before and after the change from the storage device, and corrects the relative distance according to the relative difference in wavelengths between the light source devices, in a micro-Raman apparatus.

3. The plurality of light source devices are A first light source device that generates visible light, The micro-Raman apparatus according to claim 1, further comprising a second light source device for generating laser light of a first wavelength.

4. The micro-Raman apparatus according to claim 3, wherein the plurality of light source devices further include a third light source device that generates laser light of a second wavelength different from the first wavelength.

5. The micro-Raman apparatus according to claim 3, wherein the plurality of light source devices further include a fourth light source device that generates infrared light.

6. The plurality of light source devices are A second light source device that generates laser light of a first wavelength, The micro-Raman apparatus according to claim 1, further comprising a third light source device that generates laser light of a second wavelength different from the first wavelength.

7. The system further comprises a stage for placing the aforementioned sample, The drive device drives the stage to change the relative distance, as described in claim 1.

8. The system further includes a display device for displaying the position of the stage, The micro-Raman apparatus according to claim 7, wherein the control device does not reflect in the display of the stage position on the display device the correction of the relative distance due to a change in the light source device used.

9. The micro-Raman apparatus according to claim 1, wherein the control device is configured to be able to set whether or not to perform the correction of the relative distance according to the light source device used.

10. The objective lens section includes a plurality of objective lenses having different focal lengths. The micro-Raman apparatus according to claim 1, wherein the control device is configured to correct the relative distance according to the objective lens used.

11. A method for controlling a micro-Raman spectrometer, The aforementioned Raman microscope is, A light source unit including multiple light source devices configured to generate light of different wavelengths from each other, An objective lens unit that collects light from the light source unit and irradiates it onto the sample to be analyzed, A detection device for detecting Raman scattered light generated from the aforementioned sample, The system includes a drive device for changing the relative distance between the sample and the objective lens, and a storage device for each of the plurality of light source devices, in which a correction value from a reference distance between the sample and the objective lens is stored. The light source unit is configured to allow switching between the multiple light source devices to be used. The control method described above is The steps include: acquiring information on the multiple light source devices; The steps include: obtaining the correction value corresponding to the light source device to be used from the storage device; A method for controlling a micro-Raman spectrometer, comprising the step of driving the drive device based on the acquired correction value to change the relative distance.

12. A method for controlling a micro-Raman spectrometer, The aforementioned Raman microscope is, A light source unit including multiple light source devices configured to generate light of different wavelengths from each other, An objective lens unit that collects light from the light source unit and irradiates it onto the sample to be analyzed, A detection device for detecting Raman scattered light generated from the aforementioned sample, A drive device for changing the relative distance between the sample and the objective lens portion, The system includes a memory device in which the wavelengths of each of the plurality of light sources are stored. The control method described above is The steps include: acquiring information on the multiple light source devices; When the light source device to be used is changed, the step of obtaining the wavelength of the light source device before and after the change from the storage device, A method for controlling a micro-Raman spectrometer, comprising the steps of driving the drive device to change the relative distance in accordance with the relative difference in wavelength between the light source devices before and after the change.

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