System and method for accessing protective X-ray enclosures

Abstract

Some embodiments include an X-ray device including an access port configured to receive a cathode within an interior volume of an enclosure of the X-ray device, a first vacuum seal configured to seal a cover over the access port, and a second seal configured to seal the cover over the access port, the second seal being maintained between the first vacuum seal and the interior volume of the enclosure while removing the first vacuum seal.

Description

Background Art

[0001] Unless otherwise indicated in this specification, the approaches described in this section are not prior art to the claims of the present disclosure and are not admitted to be prior art by inclusion in this section.

[0002] Components of an X-ray source can be vacuum-sealed within an enclosure. For example, the vacuum chamber of an X-ray tube can be permanently welded during manufacture. With a vacuum seal, the X-ray tube can withstand and dissipate the heat generated during operation, but the welded seal can interfere with post-manufacture testing, verification, and repair. It is difficult, time-consuming, and can introduce contaminants that may prevent the tube from being recovered to break the vacuum-sealed enclosure of an X-ray tube.

Brief Description of the Drawings

[0003] [Figure 1] Examples of X-ray apparatuses with overlapping covers of access ports according to some embodiments are shown. [Figure 2] Examples of X-ray apparatuses with overlapping covers of access ports according to some embodiments are shown. [Figure 3] Examples of X-ray apparatuses with overlapping covers of access ports according to some embodiments are shown. [Figure 4A] Examples of X-ray apparatuses with overlapping covers of recessed access ports according to some embodiments are shown. [Figure 4B] Examples of X-ray apparatuses with overlapping covers of recessed access ports according to some embodiments are shown. [Figure 5A] Examples of X-ray apparatuses with covers of overlapping lips of access ports according to some embodiments are shown. [Figure 5B] Examples of X-ray apparatuses with covers of overlapping lips of access ports according to some embodiments are shown. [Figure 6A]Examples of X-ray apparatuses with overlapping lip covers for recessed access ports, according to several embodiments, are shown. [Figure 6B] Examples of X-ray apparatuses with overlapping lip covers for recessed access ports, according to several embodiments, are shown. [Figure 7A] Examples of X-ray apparatuses with overlapping covers for access ports with secondary seals, according to several embodiments, are shown. [Figure 7B] Examples of X-ray apparatuses with overlapping covers for access ports with secondary seals, according to several embodiments, are shown. [Figure 8A] Examples of X-ray apparatuses with overlapping covers for access ports with secondary seals, according to several embodiments, are shown. [Figure 8B] Examples of X-ray apparatuses with overlapping covers for access ports with secondary seals, according to several embodiments, are shown. [Figure 9A] Examples of X-ray apparatuses having overlapping grooved covers for access ports with protrusions, according to several embodiments, are shown. [Figure 9B] Examples of X-ray apparatuses having overlapping grooved covers for access ports with protrusions, according to several embodiments, are shown. [Figure 10A] Examples of X-ray apparatuses having overlapping grooved covers for access ports with protrusions, according to several embodiments, are shown. [Figure 10B] Examples of X-ray apparatuses having overlapping grooved covers for access ports with protrusions, according to several embodiments, are shown. [Figure 11A] This shows an example of a resealable protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 11B] This shows an example of a resealable protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 12A]This shows an example of a resealable protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 12B] This shows an example of a resealable protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 13A] This shows an example of a temporary protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 13B] This shows an example of a temporary protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 13C] This shows an example of a temporary protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 13D] This shows an example of a temporary protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 14A] This shows an example of a temporary protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 14B] This shows an example of a temporary protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 15A] This shows an example of a temporary protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 15B] This shows an example of a temporary protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 15C] This shows an example of a temporary protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 16A] This shows an example of a temporary protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 16B] This shows an example of a temporary protective vacuum seal system for an X-ray apparatus enclosure with an access port. [Figure 16C]An example of a temporary protective vacuum seal system for an X-ray device enclosure with an access port is shown. [Figure 17A] An example of a protective vacuum seal system for a multi-emitter X-ray device inside an enclosure is shown. [Figure 17B] An example of a protective vacuum seal system for a multi-emitter X-ray device inside an enclosure is shown. [Figure 18] An example of a protective vacuum seal system for a multi-emitter X-ray device inside an enclosure with multiple access ports is shown. [Figure 19A] An example of a cathode module having multiple fasteners according to some embodiments is shown. [Figure 19B] An example of a cathode module having multiple fasteners according to some embodiments is shown. [Figure 20A] An example of a cathode module having at least one compression plate according to some embodiments is shown. [Figure 20B] An example of a cathode module having at least one compression plate according to some embodiments is shown. [Figure 21A] An example of a cathode module having at least one compression plate according to some embodiments is shown. [Figure 21B] An example of a cathode module having at least one compression plate according to some embodiments is shown. [Figure 22A] An example of a cathode module having at least one compression plate according to some embodiments is shown. [Figure 22B] An example of a cathode module having at least one compression plate according to some embodiments is shown. [Figure 23] An example of an X-ray device including an anode assembly according to some embodiments is shown. [Figure 24A] An example of an X-ray device having a segmented anode assembly according to some embodiments is shown. [Figure 24B]Examples of X-ray apparatuses having segmented anode assemblies according to several embodiments are shown. [Figure 25A] Examples of segmented anode assemblies according to several embodiments are shown. [Figure 25B] Examples of segmented anode assemblies according to several embodiments are shown. [Figure 25C] Examples of segmented anode assemblies according to several embodiments are shown. [Figure 26A] Examples of segmented anode assemblies according to several embodiments are shown. [Figure 26B] Examples of segmented anode assemblies according to several embodiments are shown. [Figure 26C] Examples of segmented anode assemblies according to several embodiments are shown. [Figure 27] This is a flowchart illustrating an example of a method for sealing the vacuum enclosure of an X-ray apparatus. [Figure 28] This is a flowchart illustrating an example of a method for sealing the vacuum enclosure of an X-ray apparatus. [Figure 29] This is a flowchart illustrating an exemplary method for manufacturing a cathode for an X-ray apparatus, according to several embodiments. [Figure 30] This is a flowchart illustrating an exemplary method for manufacturing an anode for an X-ray apparatus, according to several embodiments. [Figure 31] This is a flowchart illustrating examples of methods for manufacturing a cathode and sealing the vacuum enclosure of an X-ray apparatus, according to several embodiments. [Modes for carrying out the invention]

[0004] Components of an X-ray source, such as the cathode and anode, can be permanently vacuum-sealed within the enclosure by means of welding, brazing, permanent joining, etc. However, while conventional vacuum-sealing approaches may be sufficient for a single cathode (with one to three emitters) and a single anode assembly, they can complicate manufacturing and hinder post-manufacturing testing, verification, and repair of X-ray sources with multiple cathode modules, potentially rendering the X-ray source unusable due to a single failure mechanism. Vacuum-sealing the enclosure of an X-ray device can make access to the internal volume impossible, preventing the replacement or repair of a faulty component during initial verification testing or subsequent use. For example, opening many types of permanent vacuum seals may require delamination, milling, cutting, and / or other debris-generating processes. Debris generated when opening these types of vacuum seals can cause problems such as contaminating the enclosure (potentially generating arc discharges), damaging internal components, and interfering with electrical connections. Repairing this damage may be impractical or impossible. These problems can be exacerbated in implementations that include multiple X-ray emitter or cathode modules inside a vacuum enclosure. A multi-emitter X-ray source may contain many cathode modules (e.g., 6 or more, such as 96). Therefore, a malfunction in a single component inside the vacuum-sealed enclosure of an X-ray apparatus can render the entire X-ray apparatus inoperable and / or unsuitable for repair.

[0005] Some embodiments relate to protective vacuum seal systems for X-ray apparatus enclosures, such as X-ray sources, X-ray tubes, and X-ray tube bodies. The enclosure body may include access ports configured to provide access to components inside the enclosure. For example, the access ports may allow a cathode to be inserted into or removed from the enclosure. The protective vacuum seal system may be configured to vacuum seal the access ports. The protective vacuum seal system may be further configured to protect the interior from damage while the vacuum seal is being removed. As disclosed in more detail herein, the protective vacuum seal system may include a primary seal mechanism configured to form a primary vacuumable seal over the access ports, and a secondary seal mechanism configured to maintain a secondary seal or barrier over the access ports while the primary vacuum seal is being removed. The secondary seal may be configured to prevent contamination of the enclosure by debris generated when the primary vacuum seal is broken, for example.

[0006] In some embodiments, a protective vacuum seal system can allow for the evaluation, inspection, repair, and / or replacement of components of an X-ray apparatus after the enclosure has been vacuum-sealed. The protective vacuum seal system can be used to retrieve X-ray apparatuses that have failed during initial verification testing and / or during use. In response to verification failures, such as a low-performance emitter, the protective vacuum seal system can be used to safely open the access port, allowing for the repair and / or replacement of the faulty component(s). The access port can then be resealed using the protective vacuum seal system, allowing the X-ray apparatus to be used again without being discarded.

[0007] Figures 1 to 3 show examples of X-ray apparatuses with overlapping access port covers according to several embodiments. Figure 1 shows an example of a system 100 including an X-ray apparatus 101 according to several embodiments. The system 100 may include an imaging system, an irradiation system, etc. Figure 1 is a side cross-sectional view showing an example of an enclosure 102 of the X-ray apparatus 101. Figure 2 is a top view of the enclosure 102 shown in Figure 1. Referring to Figures 1 and 2, the enclosure 102 may be part of an X-ray source, an X-ray tube, an X-ray tube body, a vacuum tube, a vacuum chamber, etc. The enclosure 102 may include a body 104 that at least partially defines the internal volume 106 of the enclosure 102.

[0008] The enclosure 102 may comprise components of an X-ray source 110 or a plurality of X-ray sources 110 (indicated as X-ray sources 110 to 110-S), each X-ray source 110 comprising a cathode 120 and an anode 130 (shown in Figure 3), each having an emitter 122. The emitter 122 may comprise any suitable electron emission means, including but not limited to thermal ion emitters, filament emitters, field emitters, electron guns, etc. The field emitter may include various types of emitters. For example, the field emitter may include a nanotube emitter, a nanowire emitter, a spint array, etc. Conventionally, a nanotube has at least part of a structure with a hollow center, while a nanowire or nanorod has a substantially solid core. For simplicity of use, as used herein, nanotube also refers to nanowires and nanorods. Nanotubes exhibit a tubular structure on the nanometer scale (nm scale) with an aspect ratio of at least 100:1 (length:width or diameter). Spint arrays can include individual field emitters having small, sharp cones using electron-generating materials such as molybdenum (Mo) or tungsten (W). In some embodiments, field emitters are formed from conductive or semiconductor materials having high tensile strength and high thermal conductivity, such as carbon, metal oxides (e.g., Al2O3, titanium oxide (TiO2), zinc oxide (ZnO), or manganese oxide (MnxOy, where x and y are integers)), metals, sulfides, nitrides, and carbides, in pure or doped forms, etc. The cathode 120 may include a single emitter 122, but in other embodiments, the cathode 120 may include multiple emitters 122. The cathode 120 is configured to generate a focal spot of the electron beam at the corresponding anode 130. The X-ray source 110 may comprise and / or be operably coupled to a corresponding anode 130, as further disclosed herein (not shown in Figure 1 to avoid obscuring the details of the illustrated example). While an X-ray source 110 comprising a single cathode 120 and emitter 122 is used as an example, in other embodiments the cathode 120 may comprise multiple cathodes 120, multiple emitters 122, and so on.

[0009] The access port 108 may be formed in the main body 104. The access port 108 may include any suitable means for providing access to the internal volume 106 of the enclosure 102, including but not limited to openings, holes, voids, and / or similar in the enclosure 102. The access port 108 may be configured to allow visual inspection of the cathode and / or other components of the X-ray source 110, insertion into the enclosure 102, removal from the enclosure 102, physical manipulation, and / or access by other means.

[0010] As mentioned above, some approaches to vacuum seals can complicate manufacturing and hinder post-manufacturing testing, verification, and repair. These and other issues can be addressed by embodiments of the technology relating to access to protective seal enclosures disclosed herein. In the example shown in Figures 1 and 2, the seal system 150 is configured to vacuum seal the enclosure 102 of the X-ray apparatus 101. The seal system 150 can safely remove the vacuum seal without contaminating or damaging the X-ray source 110 (or other components inside the enclosure 102). Thus, the seal system 150 can enable repair and / or replacement of internal components of the X-ray apparatus 101, such as the cathode, without damaging the enclosure 102.

[0011] The sealing system 150 includes a primary seal 151 configured to form a vacuum seal on the enclosure 102 over the access port 108. As used herein, a vacuum seal refers to a seal configured to maintain a low pressure, near vacuum, or vacuum pressure difference between the internal volume 106 of the enclosure 102 and the external environment.

[0012] The primary seal 151 may be configured to vacuum seal the cover 154 to the access port 108. The cover 154 may include, but is not limited to, plates, lids, covers, windows, port holes, gaskets, and any other suitable means for vacuum sealing the access port 108. The cover 154 can seal the access port 108 by compressing the gasket. The cover 154 may be formed of a vacuum-compatible material, such as an airtight material, a non-porous material, a metal, bronze, brass, steel, iron, aluminum, lead, plastic, rubber, or silicon, which can maintain a low pressure or vacuum state inside the internal volume 106.

[0013] The primary seal 151 of the sealing system 150 may be configured to form a permanent or long-term vacuum seal between the cover 154 and the body 104. As used herein, a permanent or long-term seal refers to a seal configured to last for the usable life of the X-ray source 110. A permanent or long-term seal may be formed by one or more of the following: fusion, welding, fusion welding, solid phase welding, brazing, soldering, bonding, chemical bonding, permanent adhesion, and / or similar.

[0014] The sealing system 150 further comprises a secondary seal 152 configured to protect the inner volume 106 from contamination or damage while the primary seal 151 is removed. As disclosed in further detail herein, the secondary seal 152 may be configured to form and / or maintain a protective barrier between the primary seal 151 and the inner volume 106 of the enclosure 102. The secondary seal 152 may be positioned between the primary seal 151 and the inner volume 106 of the enclosure 102.

[0015] The secondary seal 152 may be configured to protect the internal volume 106 of the enclosure 102 from contamination and / or other damage while the primary seal 151 is being removed. The secondary seal 152 may or may not be a vacuum seal. The secondary seal 152 may be configured to be removed or released without contaminating and / or damaging the X-ray source 110 or other internal components. The secondary seal 152 may include, but is not limited to, one or more mechanical seals, including pressure seals, hydrostatic seals, contact seals, compression seals, clamps, bolts, friction seals, physical engagements, physical engagement seals, surface engagement seals, gaskets, rubber gaskets, silicone gaskets, adhesive gaskets, sheet gaskets, solid material gaskets, brazed gaskets, spiral gaskets, double jacket gaskets, Kammprofile gaskets, Fishbone gaskets, ring gaskets, O-rings, adhesive seals, peelable adhesive seals, adhesive materials, peelable adhesive materials, sealants, sealant materials, removable sealants, and / or similar.

[0016] The sealing system 150 can be used to vacuum seal the enclosure 102 so that the enclosure 102 can be accessed later without contaminating the internal volume 106. A secondary seal 152 may be located inside the primary seal 151 with respect to the access port 108. As a result, the secondary seal 152 is configured to a) protect the internal volume 106 from contamination while the primary seal 151 is removed, and b) allow the cover 154 to be removed or released from the body 104 without contaminating or damaging the internal volume 106. The secondary seal 152 may be configured to form and / or maintain a protective barrier by contact between two sufficiently long surfaces, such as the cover 154 and the body 104, or the various gaskets or seals described above. This secondary seal 152 may remain completely or sufficiently sealed while the primary seal 151 is removed. As a result, contamination can be substantially prevented by the secondary seal 152. Contamination can be removed from the outside of the enclosure 102 before the secondary seal 152 is destroyed.

[0017] In some embodiments, the primary seal 151 may be configured to surround the perimeter 109 of the access port 108. Thus, the primary seal 151 can vacuum seal the access port 108. The secondary seal 152 and / or the corresponding secondary seal 152 may also be configured to surround the perimeter 109 of the access port 108. In some embodiments, the secondary seal 152 may be located inside the primary seal 151 relative to the access port 108. In other words, the primary seal 151 may be formed along a first path around the perimeter of the access port 108, and the secondary seal 152 may be formed along a second path around the perimeter of the access port 108, with the second path located inside the first path between the first path and the access port 108. Thus, the secondary seal 152 and / or the corresponding secondary seal 152 can prevent debris generated during the removal of the primary seal 151 from contaminating the internal volume 106.

[0018] In some embodiments, the outer periphery of the cover 154 may be configured to overlap the body 104 of the enclosure 102 when placed over the access port 108. The primary seal 151 may include a first overlapping region 251, such as along the outer edge of the cover 154, and / or welding or other permanent joining within it. The secondary seal 152 may include, at least partially, a second overlapping region 252. The second overlapping region 252 may be located between the cover 154 and the body 104 of the enclosure 102, and between the access port 108 and the primary seal 151. In some embodiments, the second overlapping region 252 may be configured to have a threshold size or range (for example, a range measured from the primary seal 151 to the periphery 109 of the access port 108 at each point along the periphery 109 of the access port 108). The threshold size may be large enough to ensure that the secondary seal 152 can adequately protect the enclosure 102 from contamination while the primary seal 151 is removed. The threshold size may be determined by testing, experience, simulation, seal type, seal material, enclosure material, and / or similar factors. In some embodiments, the threshold size is at least 5 millimeters (mm), for example, the engagement and / or overlapping area of ​​the surfaces constituting the secondary seal 152 may be at least 5 mm at each point along the perimeter 109 of the access port 108. In other embodiments, the threshold width may be 10 mm or more (when used with materials and / or primary seal 151 that produce more fragments, faster-moving fragments, etc.).

[0019] The sealing system 150 facilitates verification testing and repair of the X-ray apparatus 101. The sealing system 150 can be used to vacuum seal the enclosure 102 for initial verification testing using the primary seal 151. Components identified as faulty during verification testing can be replaced by removing the primary seal 151. While the primary seal 151 is removed, the internal volume 106 of the enclosure 102 is protected from contamination by the secondary seal 152.

[0020] Figure 3 shows additional examples of System 100A and X-ray apparatus 101A according to several embodiments. System 100A may be similar to System 100 described above. The X-ray source 110 may include a cathode 120 and an anode 130. During operation, the cathode 120 directs the electron beam 124 to the target 132 of the anode 130, converting at least a portion of the energy into X-ray emission 134. In this example, a single target 132 and a single electron beam 124 are used, but in other embodiments, each anode 130 may include multiple targets 132, a single target with multiple focal points from multiple electron beams 124, and so on.

[0021] Figures 4A and 4B show examples of X-ray apparatuses with overlapping covers for recessed access ports, according to several embodiments. Referring to Figure 4A, system 100B, including the X-ray apparatus 101B, may be similar to systems 100 and 100A described above, including similar components. In some embodiments, the cover 154B of the sealing system 150B is configured to physically engage with the body 104. The body 104 has an engaging structure such as a notch 404. The notch 404 may be formed around the perimeter 109 of the access port 108. The notch 404 can be configured to engage with the cover 154B. The dimensions and / or configuration of the notch 404 may correspond to the dimensions and / or configuration of the cover 154B so that the cover 154B fits inside the notch 404.

[0022] The primary seal 151B may include the cover 154B and a portion of the body 104. The primary seal 151B may also include the vertical section 405 of the notch 404. Similarly, the secondary seal 152B may include the cover 154B and another portion of the body 104. The secondary seal 152B may also include the horizontal section 406 of the notch 404.

[0023] Referring to Figure 4B, the enclosure 102 is in a closed, vacuum-sealed state. In this example, the primary seal 151B includes a weld that seals the outer edge of the cover 154B to the body 104 in the vertical section 405 of the notch 404 formed in the body 104. The secondary seal 152B may be configured to maintain the secondary seal 152B between the primary seal 151B and the inner volume 106 while the primary seal 151B is removed, as disclosed herein.

[0024] Figures 5A to 5B show examples of X-ray apparatuses with overlapping lip covers for access ports according to several embodiments. Referring to Figures 5A to 5B, system 100C, which includes the X-ray apparatus 101C, may be similar to systems 100 and 100A described above, including similar components. The cover 154C of the sealing system 150C may include a lip 504 and a central section 506 configured to physically engage with or partially enter the access port 108. The central section 506 of the cover 154C may be configured to fit into and / or extend into the interior of the access port 108.

[0025] The primary seal 151C includes the outer edge of the cover 154C and a portion of the body 104. The secondary seal 152C includes a portion of the lip (or flange) 504, the central section 506 of the cover 154C, and a portion around the perimeter 109 of the access port 108.

[0026] Referring to Figure 5B, the enclosure 102 is in a closed, vacuum-sealed state. The primary seal 151C of the sealing system 150C is formed by welding the outer edge of the cover 154C to the body 104. The secondary seal 152C may include a mechanical seal maintained by an engagement between the body 104 and the lip 504, and / or an engagement between the central section 506 and the perimeter 109 of the access port 108.

[0027] Figures 6A to 6B show examples of X-ray apparatuses with overlapping lip covers for recessed access ports according to several embodiments. Referring to Figures 6A to 6B, system 100D, which includes the X-ray apparatus 101D, may be similar to systems 100, 100A, 100B, and 100C described above, which include similar components. The cover 154D is configured to physically engage with the access port 108 of the enclosure 102. The cover 154D may include a lip 504 and a central section 506. The body 104 may also be configured to physically engage with the cover 154D, with a notch 404D and the outer edge of the cover 154D engaging as a primary seal 151D. The secondary seal 152D may include the engagement between the lip 504 of the cover 154D and the notch 404 formed in the body 104, and a) the central section 506 and perimeter 109 of the access port 108.

[0028] Referring to Figure 6B, the enclosure 102 is in a closed, vacuum-sealed state. The primary seal 151D can be formed by welding the outer edge of the cover 154 to the body 104 to form the primary seal 151D. The secondary seal 152D may comprise a mechanical seal maintained by engagement between the lip 504 and the notch 404, and / or between the periphery of the access port 108 and the central section 506.

[0029] Figures 7A to 8B show examples of X-ray apparatuses with overlapping covers of access ports with secondary seals, according to several embodiments. Referring to Figures 7A to 7B, system 100E, including the X-ray apparatus 101E, may be similar to the system 100 described above, which includes similar components. The secondary seal 152E comprises a secondary seal member 702. The secondary seal member 702 may be configured to surround the access port 108. The secondary seal member 702 may include any temporary, non-fragile seal component disclosed herein, such as a mechanical seal, gasket, or O-ring. The secondary seal 152E may further comprise overlapping surfaces 704 of the cover 154E and body 104, the overlapping surfaces 704 being configured to engage with the secondary seal member 702, for example, by contacting or compressing the secondary seal member 702.

[0030] Referring to Figure 7B, the enclosure 102 is in a closed, vacuum-sealed state. The enclosure 102 can be sealed by a sealing system 150E similar to the sealing system 150 described above, using the primary seal 151E of the sealing system 150E formed by welding the outer edge of the cover 154E to the body 104. The secondary seal 152E can be configured to form and / or maintain a secondary seal 152E including a mechanical seal maintained by the engagement between the overlapping surface 704 of the cover 154E and the body 104, and the engagement between the overlapping surface 704 and the secondary sealing member 702.

[0031] Referring to Figures 8A to 8B, system 100F, including the X-ray apparatus 101F, may be similar to systems 100 and 100E described above, including similar components. The secondary seal 152F of the sealing system 150F comprises a mechanical gasket member such as an O-ring 802. The O-ring 802 may be configured to surround the access port 108 of the enclosure 102, as disclosed herein. The secondary seal 152F may further comprise a channel 804 formed inside the cover 154F (e.g., on the inner surface of the cover 154F), the channel 804 being configured to mate and / or physically engage with the O-ring 802 when the cover 154F is sealed over the access port 108. Alternatively, the channel 804 may be formed on the body 104 (e.g., the outer surface of the body 104), on both the body 104 and the cover 154F, etc.

[0032] Referring to Figure 8B, the enclosure 102 is in a closed, vacuum-sealed state. The primary seal 151F can be formed by welding the outer edge of the cover 154F to the body 104. The secondary seal 152F is maintained during the removal of the primary seal 151F by the engagement between the overlapping surfaces of the cover 154F and the body 104, and / or the engagement between the O-ring 802 and the channel 804 and the body 104, thereby protecting the internal volume 106 from contamination.

[0033] Figures 9A to 10B show examples of X-ray apparatuses having overlapping grooved covers with protrusions on access ports, according to several embodiments. Referring to Figures 9A to 9B, system 100G, including the X-ray apparatus 101G, may be similar to systems 100 and 100A to F described above, including similar components. The secondary seal 152G of the sealing system 150G includes a protrusion 902. The protrusion 902 extends around the access port 108 of the enclosure 102 and may be formed on the outer surface of the body 104. The secondary seal 152G may further include a channel 904 formed inside the cover 154G (e.g., on the inner surface of the cover 154G), the channel 904 being configured to mate and / or physically engage with the protrusion 902 when the cover 154G is sealed over the access port 108.

[0034] Referring to Figure 9B, the enclosure 102 is in a closed, vacuum-sealed state. The primary seal 151G can be formed by welding the outer edge of the cover 154G to the body 104. The secondary seal 152G is maintained during the removal of the primary seal 151G by the engagement between the overlapping surfaces of the cover 154G and the body 104, and / or the engagement between the projection 902 and the channel 904, thereby protecting the inner volume 106 from contamination.

[0035] Referring to Figures 10A to 10B, system 100H, including the X-ray apparatus 101H, may be similar to systems 100 and 100A to G described above, including similar components. The secondary seal 152H of the sealing system 150H comprises corresponding projections 1002 and channels 1004 formed on the body 104 and cover 154H, respectively. The projections 1002 may be configured to mate and / or physically engage with the corresponding channels 1004 when the cover 154H is positioned on the access port 108 of the enclosure 102 as shown in Figure 10B. The primary seal 151H may be formed by welding the outer edge of the cover 154H to the body 104. The secondary seal 152H can protect the inner volume 106 from contamination during removal of the primary seal 151H through physical engagement between the overlapping surfaces of the cover 154H and the body 104, and / or engagement between the projections 1002 and the corresponding channels 1004. In some embodiments, the secondary seal 152H may include additional temporary or short-term sealing mechanisms such as sealants or adhesives, gaskets, O-rings, and / or similar elements placed on overlapping surfaces, protrusions 1002, and / or channels.

[0036] Figures 11A to 12B show examples of resealable protective vacuum seal systems for X-ray apparatus enclosures with access ports. Referring to Figures 11A to 11B, system 100I, including the X-ray apparatus 101I, may be similar to systems 100 and 100A to H described above, including similar components. Seal system 150I comprises a releasable vacuum seal 1152 configured to vacuum seal the access port 108 of the enclosure 102. The releasable vacuum seal 1152 may comprise one or more releasable, temporary, short-term, removable, non-fragile, or safely removable sealing mechanisms, such as a mechanical sealing mechanism, a gasket, a brazed gasket, an O-ring, a sealant material, or a releasable adhesive. The releasable vacuum seal 1152 may be configured to vacuum seal the enclosure 102 independently of the enclosure 102 and / or other seals and / or sealing mechanisms of seal system 150I (e.g., independently of the primary vacuum seal 151).

[0037] In some embodiments, the releasable vacuum seal 1152 may be configured to vacuum seal a temporary cover 1154 over the access port 108. The temporary cover 1154 may be adapted for verification test operations, as further disclosed herein. Thus, verification testing of the X-ray apparatus 101I and / or the X-ray source 110 can proceed before and / or without the need for the manufacture of a permanent or long-term vacuum seal, such as the primary seal 151I shown in Figure 11B. The releasable vacuum seal 1152 can be removed without contaminating or damaging components within the internal volume 106 of the enclosure 102, such as the X-ray source 110. Thus, the sealing system 150I can enable the X-ray apparatus 101I and / or the X-ray source 110 to recover from verification failures. In response to the detection of a component malfunction, the releasable vacuum seal 1152 may be released, the temporary cover 1154 may be removed to expose the access port 108, the malfunctioning component may be repaired or replaced, and the releasable vacuum seal 1152 may be reapplied without contaminating or damaging the X-ray source 110 in the internal volume 106 of the enclosure 102.

[0038] The releasable vacuum seal 1152 comprises a channel 1155 formed in the body 104 (for example, around the access port 108 109) and an O-ring 1157 configured to physically engage and / or mat with the channel 1155. The releasable vacuum seal 1152 may further comprise a physical engagement seal between the overlapping surfaces of the temporary cover 1154 and the body 104 of the enclosure 102. In some embodiments, the overlapping surfaces may be adapted to facilitate and / or enhance the releasable vacuum seal 1152, for example, by roughening the surface, including a sealant or adhesive, including additional physical engagement members, and / or the like. In some embodiments, the releasable vacuum seal 1152 may comprise one or more fasteners such as clamps, bands, bolts (not shown in Figure 11A to avoid obscuring the details of the illustrated example). The fastener can be configured to secure the temporary cover 1154 over the access port 108, but a vacuum may be drawn into the inner volume 106 of the enclosure 102 and then released or removed. Alternatively, the fastener can be used to secure the temporary cover 1154 during verification testing.

[0039] As shown in Figure 11B, the sealing system 150I may further comprise a primary seal 151I and a secondary seal 152I. The primary seal 151I may be configured to replace a releasable vacuum seal 1152 with a permanent and long-term vacuum seal. More specifically, the releasable vacuum seal 1152 (and temporary cover 1154) may be configured to be removed and replaced with the primary seal 151I and a cover 1156 such as a product cover 1156. The releasable vacuum seal 1152 can be replaced with the primary seal 151I after successful verification testing of the X-ray apparatus 101I or the components of the composition. The primary seal 151I may comprise any suitable permanent or long-term sealing mechanism as disclosed herein. The secondary seal 152I may be similar to the various secondary seals 152A to 152H described herein.

[0040] In some embodiments, the temporary cover 1154 may be configured to facilitate verification testing of the X-ray source 110. For example, the temporary cover 1154 may include one or more test and diagnostic components or functions such as a temperature sensor or a viewport. The temporary cover 1154 can be used during verification testing of many different X-ray apparatuses 101I (and / or enclosures 102). Therefore, the releasable vacuum seal 1152 and / or temporary cover 1154 may be adapted to withstand a large number of vacuum sealing cycles. For example, the releasable vacuum seal 1152 may include a highly durable and robust vacuum sealing component, and the temporary cover 1154 may be formed from a thick, high-strength material, etc. (for example, it may be thicker, heavier, and / or more durable than the product cover 1156).

[0041] Referring to Figures 12A to 12B, System 100J, which includes the X-ray apparatus 101J, may be similar to Systems 100 and 100A to I described above, including similar components. System 100J includes a sealing system 150J comprising a releasable vacuum seal 1152J, a primary vacuum seal 151J, and a secondary seal 152J. The releasable vacuum seal 1152J may further comprise one or more fasteners configured to secure and / or clamp a temporary cover 1154J over the access port 108. The fasteners may include clamps, bolts, screws, clasps, clips, pins, ties, etc., that interact with the flange 153J of the body 104J. The releasable vacuum seal 1152J may be used to vacuum seal the enclosure 102 during verification testing of the X-ray apparatus 101J (and / or X-ray source 110), as disclosed herein.

[0042] The releasable vacuum seal 1152J may be replaced with the primary seal 151J, as shown in Figure 12B. The secondary seal 152J may be formed in the same manner as the various methods of forming I from the secondary seals 152 and 152A described above, and may be similar to or different from the releasable vacuum seal 1152J. In some embodiments, the fastener of the releasable vacuum seal 1152J may be removed from the secondary seal 152J, as the fastener is located outside the primary seal 151J relative to the access port 108 (rather than between the primary seal 151J and the access port 108).

[0043] Figures 13A, 13B, 13C, 13D, 14A, 14B, 15A, 15B, 15C, 16A, 16B, and 16C show examples of temporary protective vacuum seal systems for X-ray apparatus enclosures with access ports. Systems 100K to N may be similar to systems 100 and 100A to J described above, having similar components. For example, temporary covers 1154K to N and releasable vacuum seals 1152K to N may be similar to releasable vacuum seals 1152 and 1152J, etc. Covers 1156K to N may be similar to covers 154, 154A to H, 1156, and 1156J, etc. However, in some embodiments, secondary seals similar to secondary seals 152 and 152A to J may be omitted.

[0044] Referring to Figures 15A to 16C, in some embodiments, system 100M or 100N may include different types of access ports 108M-1 to 108M-2 and covers 1156M-1 and 1156M-2 (shown in Figures 15B and 15C) or access ports 108N-1 and 108N-2 (shown in Figures 16A and 16B). Multiple temporary covers 1154M or 1154N and multiple covers 1156M or 1156N may be used with those multiple access ports 108. In example, two covers 1156M or 1156N were used, but in other embodiments, the number of access ports 108 and the corresponding number of covers 1156M or 1156N may be greater than two.

[0045] Figures 17A and 17B show examples of protective vacuum seal systems for multi-emitter X-ray apparatuses inside enclosures. Referring to Figures 17A and 17B, system 100O, which includes the X-ray apparatus 101O, may be similar to systems 100 and 100A through N, etc., which include similar components. In some embodiments, the X-ray apparatus 101O may include a plurality of X-ray sources 110-1 through 110-S, each including its own cathode 120 and anode 130. Here, there are S X-ray sources 110, where S is an integer greater than 1.

[0046] Each cathode 120 may include a cathode stack 1722, and each cathode stack 1722 may include a plurality of plates 1724. Each cathode 120 may include P plates 1724-1 to 1724-P in an aligned vertical stack configuration. However, the plates 1724 may have any suitable physical arrangement, configuration, or array. The plates 1724 may include electrodes, grids, meshes, spacers, emitters, dielectrics, insulators, etc.

[0047] Due to space constraints and other factors, it may be difficult to precisely arrange the cathode plates 1724 within the enclosure 102. The X-ray apparatus 101O may include one or more cathode modules 1720, each cathode module 1720 comprising one or more cathodes 120. While one cathode module 1720 is used as an example, in other embodiments, the X-ray apparatus 101O may include any number of cathode modules 1720, each having one or more cathodes 120, including different numbers of cathodes 120 for different cathode modules 1720.

[0048] The cathode module 1720 can be assembled before being installed inside the enclosure 102. More specifically, cathodes 120-1 to 120-S can be pre-assembled inside the cathode module 1720 before the cathode module 1720 is installed inside the internal volume 106. As used herein, a pre-assembled cathode 120 refers to a cathode having a plurality of plates 1724 and / or other components fixed in a particular array, such as plates 1724-1 to 1724-P fixed in an array stack. In some embodiments, the plates 1724-1 to 1720-P of each cathode 120-1 to 120-S can be fixed in a particular array inside the cathode module 1720 by fasteners 1726 such as screws, bolts, rivets, pins, etc. The disclosure is not limited thereto.

[0049] In some embodiments, the cathode 120 may be mounted on each part or section of the board 1724. For example, cathode stacks 1722-1 to 17220S may share boards 1724-1 to 1724-P. The cathode 120 is mounted on each stack 1722 of board 1724. For example, stack 1722-1 of cathode 120-1 may include sections 1725-1-1 to 1725-1-P of boards 1724-1 to 1724-P, stack 1722-2 of cathode 120-2 may include sections 1725-1-1 to 1725-1-P, stack 1722-S of cathode 120-S may include sections 1725-S-1 to 1725-SP, and so on. The stack 1722 of cathode plates 1724-1 to 1724-P and the corresponding cathodes 120-1 to 120-S can be fastened in a specific arrangement by fasteners 1726. While cathodes 120 sharing all plates 1724 have been used as an example, in other embodiments, fewer than all, including only one of the plates 1724, may be shared among the cathodes 120.

[0050] During operation, the selected cathode 120 can be configured to generate an electron beam 124 that can be directed towards the target 132 of the corresponding anode 130. Precise targeting of the electron beam 124 can be based on the precise alignment between the cathode 120 and the corresponding anode 130 (and the precise alignment of the cathode stack 1722 itself). However, due to space constraints and other issues, it may be difficult to precisely align the cathodes 120 inside the enclosure 102. To address these and other issues, the cathode module 1720 and / or the enclosure 102 may be equipped with a cathode mount 1729. The cathode mount 1729 can be configured inside the enclosure 102 to set the location, orientation, and / or alignment of the cathode module 1720 and the corresponding pre-assembled cathodes 120-1 to 120-S. The cathode mount 1729 may be configured to precisely align the location and / or orientation of the electron beam 124 generated by each cathode 120 with the corresponding target 132. In some embodiments, the cathode mount 1729 is configured to securely fix the location, orientation, and / or alignment of the cathode module 1720 (and / or the corresponding cathodes 120-1 to 120-S). Alternatively or additionally, the cathode mount 1729 may be configured to precisely adjust the location, orientation, and / or alignment while the cathode module 1720 is placed inside and / or sealed inside the enclosure 102. The cathode mount 1729 may include fasteners similar to the fastener 1726 used to fix the cathode stack 1722 to a support structure 1920, flange, body 104 or part of the enclosure 102, insulating standoff, etc.

[0051] The enclosure 102 may include an access port 108 that can be selectively vacuum-sealed using a sealing system 150O. The sealing system 150O may comprise one or more of the protective vacuum sealing systems 150 disclosed herein, such as the protective vacuum sealing systems 150A to 150H shown in Figures 1 to 10B, the protective vacuum sealing systems 150I to 150N shown in Figures 11A to 16C, or similar systems including various releasable vacuum seals 1152.

[0052] Figure 18 shows an example of a protective vacuum seal system for a multi-emitter X-ray apparatus inside an enclosure with multiple access ports. In some embodiments, system 100P, which includes the X-ray apparatus 101P, may be similar to systems 100 and 100A through O, and may include similar components. The X-ray apparatus 110P may include multiple cathode modules 1720P-1 through 1720P-M, each including a cathode 120 corresponding to an anode 130, where M is any integer greater than 1. Thus, the X-ray source 110 may include an M×S X-ray source capable of producing an M×S X-ray emission beam.

[0053] The enclosure 102 may have M access ports 108-1 to 108-M, each access port 108 configured to provide access to the internal volume 106. In some embodiments, the access ports 108 may correspond to and be configured to allow access to the respective cathode modules 1720P and anodes 130. In some embodiments, the system 100P further comprises cathode mounts 1729P-1 to 1729P-M, which may be configured to fix the position, orientation, and / or arrangement of each cathode module 1720P-1 to 1720P-M inside the enclosure 102, as disclosed herein.

[0054] The sealing system 150P may be configured to vacuum seal each access port 108-1 to 108-M. The protective vacuum sealing systems 150P-1 to 150P-M may comprise one or more of the protective vacuum sealing systems 150, 150A to 150N, etc., as disclosed herein.

[0055] Cathode modules 1720P-1 to 1720P-M can each be provided with their respective electrical feedthroughs 1825-1 to 1825-M. The electrical feedthrough 1825 of cathode module 1720P can be configured to provide power, signal, and control voltages, such as emitter voltage and grid voltage from the control system, or voltage generators of system 100P, to their respective cathodes 120-1 to 120-S.

[0056] System 100P may further include internal electrical connections 1805 which can be coupled to each cathode module 1720P-1 through 1720P-M. The internal electrical connections 1805 can be coupled to each cathode 120 of each cathode module 1720P (e.g., in a daisy-chain configuration, series connection, etc.). In some embodiments, the internal electrical connections 1805 include a common internal ground which can be coupled to the grounding connection of each cathode 120 (e.g., to a grounding plate, etc.). The internal electrical connections 1805 can be coupled to a common electrical feedthrough 1815 of the X-ray apparatus 101P. Since the common electrical feedthrough 1815 is coupled to each cathode 120 by the internal electrical connections 1805 between the cathode modules 1720, a common voltage can be applied to the cathodes 120-1 through 120-S of each cathode module 1720P-1 through 1720P-M using the common electrical feedthrough 1815. Even if one or more of the individual electrical feedthroughs 1825-1 to 1825-M fail, a common voltage can be applied. The redundancy provided by the internal electrical connection 1805 and the common electrical feedthrough 1815 can be used to extend the usable life of the X-ray source 110.

[0057] Figures 19A and 19B show examples of cathode modules having multiple fasteners according to several embodiments. Figures 19A and 19B show top-to-front and top-view diagrams of cathode module 1720Q having cathode stacks 1722-1 to 1722-5. Five cathodes 120, each having six emitters 1927, are used as an example, but in other embodiments, the number of cathodes 120 and / or the number of emitters 1927 may differ. The cathodes 120 can be arranged in a substantially linear configuration. Internal electrical connections 1805Q-1 and 1805Q-2 may be coupled to their respective cathodes 120, a common electrical feedthrough 1815, and / or one or more other cathode modules 1720, as described above.

[0058] The cathode stack 1722 can be fixed to a support structure 1920 of the cathode module 1720Q. The support structure 1920 may include any suitable mechanism for fixing the cathode stack 1722 in a particular arrangement, such as a substrate, layer, plate, panel, sheet, or base. In some embodiments, the support structure 1920 may include a focusing electrode 1922 of the cathode stack 1722. The focusing electrode 1922 may be configured to focus and / or direct the electron beam 124 generated by each cathode 120 to the corresponding anode 130. The cathode mount 1925 may be configured to fix the cathode module 1720Q inside the enclosure 102 (for example, fixing the cathode module 1720Q to a cathode mount 1729 inside the enclosure 102, as disclosed herein). As will be described in more detail below, the cathode mount 1925 can be configured to arrange the cathode module 1720Q with other components such as the anode 130.

[0059] To distribute clamping force and / or other forces, each side of the cathode stack 1722 may be fastened by a group or set of fasteners 1726 (fastener set 1926). Each fastener set 1926 may be positioned between adjacent cathodes 120 of the cathode module 1720Q. The fasteners 1726 may be fastened to the support structure 1920 through openings formed by penetrating the plates of the cathode stack 1722. However, the disclosure is not limited in this respect, and fastener sets 1926, including any appropriate number of fasteners 1726 and / or any appropriate type of fasteners 1726, may be available. For example, the appropriate number of fasteners 1726 in a fastener set 1926 can be determined by testing, experience, simulation, design constraints, etc., to ensure consistent contact and / or load distribution along each side of the cathode stack 1722.

[0060] Using multiple fasteners 1726 can complicate manufacturing and potentially lead to defects. Drilling and tapping precisely aligned openings (e.g., screw holes) for each fastener 1726 in each fastener set 1926-1 through 1926-6 can be difficult. Furthermore, installing and tightening each fastener 1726 with the correct torque while maintaining the cathode alignment and avoiding damage can be cumbersome and time-consuming.

[0061] Figures 20A to 22B show examples of cathode modules having at least one compression plate according to several embodiments. The compression plate(s) 2026 may be configured to provide consistent contact along the sides of each cathode stack 1722 and distribute clamping and other forces, while reducing the amount of fasteners 1726 used to secure each cathode stack 1722 to the support structure 1920 with the desired precision.

[0062] Referring to Figures 20A and 20B, the cathode module 1720R may be the same as the cathode module 1720 described above. The cathode stack 1722 of the cathode module 1720R may be fixed and / or clamped to the support structure 1920R by a compression plate 2026. The compression plate 2026 may include plates, rigid plates, compression plates, sheets, clamps, panels, etc. The compression plate 2026 may be configured to evenly distribute or increase the uniformity of the clamping load and / or force across each side of each cathode stack 1722. The compression plate 2026 may be configured to align and fix the cathode plates 1724-1 to 1724-P and / or cathode stacks 1722-1 to 1722-M with the focusing electrode 1922R. The compression plate 2026 can be secured using a single opening and corresponding fastener 1726 positioned between adjacent cathodes 120 of the cathode module 1720R. For example, a single opening and corresponding fastener 1726 of the cathode stack 1722 can be positioned between each pair of adjacent cathodes 120 of the cathode module 1720R. Furthermore, a single opening and corresponding fastener 1726 can be positioned at each end of the cathode stack 1722. Thus, fasteners 1726 are positioned adjacent to both sides of each cathode stack 1722.

[0063] Referring to Figures 21A and 21B, the cathode module 1720S comprises a plurality of compression plates 2026S-1 to 2026S-6, each positioned along the side and / or between the respective cathode stacks 1722 or cathodes 120, such that the compression plates 2026S are positioned adjacent to both sides of each cathode stack 1722. Each compression plate 2026S-1 to 2026S-6 can be fixed and / or clamped to the support structure 1920S by one of the fasteners 1726-1 to 1726-6.

[0064] The compression plates 2026 can reduce the number of fastener openings formed through the cathode stacks 1722. The compression plates 2026 can reduce the number of fastener openings required to secure the cathode stacks 1722 of the cathode module 1720 by (F-1) × (S+1), where F is the number of fasteners 1726 required to secure the cathode stacks 1722 without the benefit of the compression plates 2026, and S is the number of cathode stacks 1722 implemented by the cathode module 1720 (e.g., 6 fastener openings compared to 18 fastener openings for F=3 and S=5 as shown in Figures 19A to 21B). In various embodiments described herein, the use of compression plates 2026, etc., allows a single fastener 1726 to be placed between the cathodes 120. Therefore, the cathode module 1720 can use fewer openings and fasteners.

[0065] While substantially linear or flat cathode modules 1720 have been used as examples, in other embodiments the cathode module 1720 may have a different configuration. Referring to Figures 22A to 22B, in some embodiments the cathode module 1720T may be configured to arrange cathodes 120-1 to 120-8 in a curved or arc-shaped manner. Cathode plates 1724-1 to 1724-P and the corresponding focusing electrodes 1922T may be formed in a curved or arc-shaped manner, resulting in the corresponding curvature or arc-shaped arrangement of the respective cathodes 120 and cathode stacks 1722.

[0066] Figure 22B shows an example of an X-ray source 110 comprising multiple cathode modules 1720T-1 and 1720T-2, each comprising its respective cathodes 120-1-1 to 120-1-8 and 120-2-1 to 120-2-8. Cathode modules 1720T-1 and 1720T-2 may be coupled to internal electrical connections 1805T-2. Cathode modules 1720T-1 and 1720T-2 may be coupled to other cathode modules 1720 and / or a common electrical feedthrough 1815 by internal electrical connections 1805T-1 and / or 1805T-3.

[0067] Figure 23 shows examples of X-ray apparatuses including anode assemblies according to several embodiments. System 100U may be similar to systems 100, 100A to P, etc. described above, including similar components. X-ray apparatus 101U may include cathode 2320U, which includes various cathodes 120, cathode module 1720, etc., as described above. X-ray apparatus 101U includes an anode assembly 2330 with a corresponding anode 130. The X cathodes 120 and anode 130 may be part of the X-ray apparatus 101U, where X is an integer greater than 1.

[0068] While operating, electrons emitted by the selected cathode 120 of the X-ray source 110 are directed towards the target 132 of the corresponding anode 130. The electrons can be accelerated into an electron beam 124 by the voltage difference generated between the cathode 120 and the anode 130. To maintain this voltage difference, the anode 130 can be electrically isolated from the cathode 120 and / or other components of the X-ray source 110, such as the body 104 of the enclosure 102. In some embodiments, the anode assembly 2330 can be fixed inside the enclosure 102 by a support 2335. The support 2335 can be further configured to electrically isolate the anode assembly 2330 from the enclosure 102 and / or other components of the X-ray source 110, and may include non-conductive electrical insulating materials such as ceramics, ceramic-ceramic composites, or porcelain. In some embodiments, the support 2335 may be configured to cool the anode assembly 2330, as in U.S. Patent Application Publication No. 17 / 173,036 filed February 10, 2021, the details of which are incorporated herein by reference.

[0069] The anode assembly 2330U is fixed inside the enclosure 102 by L supports 2335U-1 to 2335U-L to maintain the anodes 130 in alignment with each other and / or with other components of the X-ray source 110. In some embodiments, the anode assembly 2330U may contain 96 anodes 130 and be fixed inside the enclosure 102 by 8 supports 2335U (e.g., X=96 and L=8). The supports 2335U-1 to 2335U-L can be arranged in any suitable manner. In some embodiments, the supports 2335U may be separated by an offset distance 2304, for example, each support 2335U may be separated from an adjacent support 2335U by an offset distance 2304.

[0070] The use of multiple supports 2335U and / or other physical contacts with the enclosure 102 may have significant drawbacks. Thermal expansion of the anode assembly 2330U can cause strain on the structural elements of the X-ray apparatus 101U, potentially leading to damage or even structural failure. For example, when the anode 130 is targeted by the electron beam 124, a significant portion of the corresponding energy can be converted into heat (e.g., more than 90%). For example, the electron beam 124-4 can heat the anode 130-4, causing the anode assembly 2330U to thermally expand in directions 2316 and 2318. This thermal expansion increases the effective length of the anode assembly 2330U, thereby forcing supports 2335U-1 and 2335U-2 to move further apart. Therefore, thermal expansion of the anode assembly 2330U during operation can cause strain or even breakage of structural elements such as one or more anode supports 2335U, the body 104 of the enclosure 102, and the anode assembly 2330U itself. Furthermore, it may not be practical to mitigate the adverse effects of thermal expansion using a flexible mounting mechanism. For example, a flexible support mechanism may not be suitable for properly aligning and stabilizing and / or securing the anode 130 with the corresponding cathode 120. These and other issues can be addressed by segmenting the anode assembly 2330.

[0071] Figures 24A to 24B show examples of X-ray apparatus having a segmented anode assembly according to several embodiments. System 100V may be similar to system 100U described above. However, anode assembly 2330V includes a plurality of structurally independent anode modules 2430. The anode assembly 2330V shown in Figure 24A comprises X anodes 130 distributed across M structurally independent anode modules 2430-1 to 2430-M. Each of the M anode modules 2430 of anode assembly 2330 may contain each subset of the X anodes 130. In some embodiments, the number of anodes 130 may be the same for each anode module 2430, but in other embodiments, the number may differ.

[0072] The anode modules 2430 of the anode assembly 2330V can be configured to be structurally independent. In other words, each anode module 2430 of the anode assembly 2330 can be fixed and / or stabilized inside the enclosure 102 independently of any other anode module 2430 of the anode assembly 2330. In some embodiments, each anode module 2430 may be supported in the enclosure 102 by a single support 2335. Each of the supports 2335 may be structurally independent of any other(s) of the supports 2335. Although a single support 2335 is shown, in some embodiments, all of the anode modules 2430 may be supported by multiple supports 2335, respectively.

[0073] In some embodiments, the anode modules 2430 may be physically separated from one another by gaps 2402. The gaps 2402 can structurally separate each anode module 2430 from adjacent anode modules 2430. The gaps 2402 may be configured such that the thermal expansion of one or more anode modules 2430 does not come into contact with other anode modules 2430, and therefore the support 2335 and enclosure 102, or otherwise impose structural forces or strains. The size of the gaps 2402 can correspond to the maximum range of thermal expansion of the anode modules 2430, which can be determined by testing, experience, simulation, design considerations, etc. For example, the operating temperature range may include from about 25 degrees Celsius (°C) to about 1100 degrees Celsius. Over such a temperature range, the gaps 2402 may include from about 0.1 millimeters (mm) to about 10 mm.

[0074] In some embodiments, the support 2335 may include a feedthrough 2435. During operation, the feedthrough 2435 may be configured to maintain a voltage difference between the anode module 2430 and other components such as the cathode 120.

[0075] In some embodiments, the anode module 2430 may be coupled to a common anode feedthrough 2415 by flexible internal electrical connections 2405, as shown in Figure 24A or Figure 24B. The flexible internal electrical connections 2405 may be configured to maintain the structural independence of the anode module 2430. The flexible internal electrical connections 2405 may include flexible and / or non-structural components, such as cables, ribbons, ribbon cables, flexible wiring, and flexible conduits. In some embodiments, the support 2335 may not include the feedthrough 2435.

[0076] In Figures 23 to 24B, a single access port 108 was used as an example, but in some embodiments, there may be multiple access ports 108, such as multiple access ports 108-1 to 108-M, 108-1 to 108-N, etc.

[0077] Although the anode assembly 2330 is shown as substantially linear or flat, in other embodiments the anode assembly 2330 may have a different configuration or orientation. Figures 25A to 26C show examples of segmented anode assemblies according to several embodiments. Figures 25A, 25B, and 25C are perspective, top, and front views of an embodiment of anode module 2430W configured to arrange anodes 130-1 to 130-6 in a curved or arc-shaped configuration. The body 2504 of the anode module 2430W may include a guide opening 2508 that forms a collimator 2509 configured to direct X-ray radiation 134 emitted in a specific direction to each target 132-1 to 132-6.

[0078] The support 2335W may be the same as the support 2335 described above. The collar 2532 of the support 2335W may be attached to the body 2504 of the anode module 2430W (e.g., by welding, brazing, etc.). The body 2535 of the support 2335W may include a non-conductive electrical insulating material, such as a ceramic support member, such as a ceramic column, cylinder, or other suitable structure, as disclosed herein. The mounting member 2534 of the support 2335W may be configured to be mounted inside the enclosure 102 and may include, for example, screws, bolts, welded mounting, etc. In some embodiments, the anode module 2430W further comprises an anode feedthrough 2435W which may be formed inside or through the support 2335W. Alternatively or additionally, the anode module 2430W may be electrically coupled to a common anode feedthrough 2415 by one or more flexible internal electrical connections 2405W-1 and / or 2405W-2, which may be configured to maintain the structural independence of the anode module 2430W as disclosed herein.

[0079] Figures 26A, 26B, and 26C show an example of an anode assembly 2430X including two or more anode modules 2430X, including 2430X-1 and 2430X-2, where each anode module 2430X is similar to anode module 2430 or 2430W. In some embodiments, each anode module 2430X comprises its respective anode feedthrough 2435X. Alternatively, or further, the anode modules 2430X may be electrically interconnected by one or more flexible internal electrical connections 2405X-1 to 2405X-3 as disclosed herein.

[0080] Figure 27 is a flowchart of an example of method 2700 for operating the X-ray source 110 of the X-ray apparatus 101. Method 2700, and other methods disclosed herein, may be performed by one or more of the systems disclosed herein, 100 and / or 100A to X, X-ray apparatus 101 and / or 101A to X, and / or sealing systems 150 and / or 150A to V (and / or variations thereof). In 2710, the X-ray source 110 may be configured to produce X-ray emission 134 as disclosed herein. During operation of 2710, components of the X-ray source 110 may be vacuum-sealed inside the enclosure 102 by the sealing system 150. The sealing system 150 may be configured to vacuum-seal the access port 108 of the enclosure 102. In some embodiments, the X-ray source 110 may include one or more cathode modules 1720, each containing one or more cathodes 120 (e.g., cathodes 120-1 to 120-S). The X-ray source 110 may further include an anode assembly 2330 comprising a plurality of structurally independent anode modules 2430, as disclosed herein.

[0081] At 2720, a fault related to a component of the X-ray source 110 may be detected. The fault may be related to a component of the cathode 120 of the X-ray source 110, such as the emitter 122.

[0082] In 2730, the primary vacuum seal 151 can be removed from the access port 108 using the sealing system 150 while protecting the internal volume 106 of the enclosure 102 from contamination. In some embodiments, the sealing system 150 includes a secondary seal 152 positioned between the primary seal 151 and the access port 108, the secondary seal 152 configured to protect the internal volume 106 from contamination while the primary seal 151 is removed. Alternatively, the enclosure 102 may be vacuum sealed by a releasable vacuum seal 1152 of the sealing system 150. The releasable vacuum seal 1152 can be removed in 2730 without contaminating the enclosure 102, as disclosed herein.

[0083] In 2740, any component related to the fault detected in 2720 may be repaired and / or replaced via the access port 108, and the enclosure 102 may be resealed as disclosed herein.

[0084] Figure 28 is a flowchart showing an example of method 2800 for protective vacuum sealing. In 2810, the access port 108 of an enclosure 102 containing an X-ray source 110 can be vacuum sealed by a first vacuum seal 151 and a corresponding secondary seal 152. In 2810, a first cover 154 can be sealed over the access port 108 by the primary vacuum seal 151, and the secondary seal 152 can be positioned between the primary vacuum seal 151 and the inner volume 106 of the enclosure 102. The primary seal 151 can include a permanent, long-term seal such as a weld or permanent bond. Alternatively, the first vacuum seal may include a releasable vacuum seal 1152, which is configured to seal a temporary cover 1154 over the access port 108, as disclosed herein.

[0085] In 2820, the first vacuum seal may be removed from the access port 108 of the enclosure 102. Removing the first vacuum seal 151 may further include protecting the internal volume 106 of the enclosure 102 from contamination while the secondary seal 152 is being removed, as described above. In some embodiments, the internal volume 106 may be protected from contamination by the secondary seal 152 maintained between the primary vacuum seal 151 and the access port 108. The primary vacuum seal 151 may be removed by milling or other debris-generating process(s), and the secondary seal 152 may be configured to prevent the resulting debris from contaminating the enclosure 102. Alternatively, the first vacuum seal may comprise a releasable seal 1152 configured to be removed without using any debris-generating process. The releasable seal 1152 may comprise one or more mechanical seals, as disclosed herein.

[0086] In some embodiments, the first vacuum seal may be removed at 2820 in response to a malfunction of a component of the X-ray source 110. The malfunctioning component may be identified during initial verification testing of the X-ray apparatus 101, during use of the X-ray apparatus 101 in a production environment, etc.

[0087] In 2830, the access port 108 of the enclosure 102 may be resealed with a second vacuum seal. The access port 108 may be resealed in response to repairing and / or replacing one or more faulty components of the X-ray source 110 via the access port 108 (for example, in response to removing the first vacuum seal in 2820). The second vacuum seal may be configured to permanently seal a second cover 154 over the access port 108 (e.g., a fabrication cover 1156). In some embodiments, the second vacuum seal includes a primary vacuum seal 151 and a secondary seal (e.g., a secondary seal 152), as disclosed herein.

[0088] Figure 29 is a flowchart of an example of method 2900 for manufacturing an X-ray apparatus 101. In 2910 to 2920, a cathode module 1720 including a plurality of cathodes 120 can be assembled. In 2910, a plurality of openings may be formed through a cathode stack 1722 of the cathode module 1720. The openings may be formed through a plurality of plates 1724 including the cathode stack 1722, as disclosed herein. In 2920, the plurality of plates 1724 of the cathode stack 1722 may be fastened by a plurality of fasteners 1726 in a specific arrangement between the compression plate 2026 of the cathode module 1720 and the support structure 1920. The fasteners 1726 may be fastened to the support structure 1920 through each of the openings of the plurality of openings, as shown in Figures 20A to 22B.

[0089] In some embodiments, an opening is formed at 2910 through the cathode stack 1722 such that a single opening is located between each adjacent pair of cathodes 120 of the cathode module 1720. Assembling the cathode module 1720 may further include clamping the cathode stack between the compression plate 2026 and the support structure 1920 by a plurality of fasteners 1726. Alternatively, the cathode stack 1722 may be further clamped between the support structure 1920 and the plurality of compression plates 2026. In these embodiments, assembling the cathode module 1720 may further include clamping each compression plate 2026 between each adjacent pair of cathodes 120 by a single fastener 1726 fixed to the support structure 1920 through a single opening located between adjacent pairs of cathodes 120. The assembled cathode module 1720 may be configured to be installed in the inner volume 106 of the enclosure 102 of the X-ray source 110 via the access port 108, as disclosed herein (for example, the access port may be configured to house the pre-assembled cathode module 1720 in the inner volume 106).

[0090] Figure 30 is a flowchart of another example of method 2902 for manufacturing an X-ray apparatus 101. Method 2902 may include forming an anode assembly 2330 comprising a plurality of anodes 130, the plurality of anodes 130 distributed across a plurality of structurally independent anode modules 2430. In 2912, a plurality of anode modules 2430 of the anode assembly 2330 may be formed, each anode module 2430 comprising one or more anodes 130 (for example, each anode module 2430 comprising each subset of the anodes 130 of the anode assembly 2330). In 2922, each anode module 2430 of the anode assembly 2330 can be fixed inside the enclosure 102 of the X-ray source 110 by a single support 2335 of a plurality of supports 2335, for example, as disclosed herein, each anode module 2430 of the anode assembly 2330 formed in 2912 can be fixed inside the enclosure 102 by a separate, structurally independent support 2335. In some embodiments, each anode module 2430 of the anode assembly 2330 can be separated from other adjacent anode modules 2430 by one or more gaps 2402, as disclosed herein.

[0091] In some embodiments, the feedthrough 2435 of the anode module 2430 may be formed through a support 2335. Alternatively, the anode module 2430 may be coupled to a common anode feedthrough 2515 by a flexible internal electrical connection 2405, as disclosed herein.

[0092] Figure 31 is a flowchart of another example of method 2904 for manufacturing an X-ray apparatus 101. Method 2904 may include manufacturing an X-ray source 110 inside a vacuum-sealed enclosure 102. Method 2904 may further include verification testing of the X-ray source and / or recovery from failures in verification, as disclosed herein. In 2914, the cathode module 1720 of the X-ray source 110 may be assembled before installation in the enclosure 102. 2914 may include pre-assembling the cathode module 1720 separately and / or independently of the other components of the X-ray source 110. The cathode module 1720 may be assembled according to method 2900 in Figure 29.

[0093] In 2924, the assembled cathode module 1720 may be installed in the enclosure 102 of the X-ray source 110. The cathode module 1720 may be installed through the access port 108 of the enclosure 102. The assembled cathode module 1720 may be secured by cathode mount 1729 and / or one or more cathode mounts 1925 as disclosed herein. The assembled cathode module 1720 may be installed in the final stage of the manufacturing process of the X-ray source 110. As used herein, the final stage refers to a stage of the manufacturing process that follows the completion of one or more other stages or steps. For example, the pre-assembled cathode module 1720 may be installed following the anode assembly 2330 of the X-ray source 110, for example, following the completion of the anode assembly method 2902 in Figure 30.

[0094] In 2934, the access port 108 of the enclosure 102 may be vacuum-sealed by a sealing system 150 as disclosed herein. The sealing system 150 may comprise a primary vacuum seal 151 and a secondary seal 152, the secondary seal 152 configured to protect the internal volume 106 from contamination while the primary vacuum seal 151 is removed, as disclosed herein. Alternatively, the sealing system 150 may comprise a releasable vacuum seal 1152 as disclosed herein.

[0095] At 2944, the function of the X-ray source 110 within the vacuum-sealed enclosure 102 can be tested and / or verified. If the X-ray source 110 passes the verification test, the flow continues to 2964. However, if one or more components of the X-ray source 110 fail the verification test at 2944, the flow can continue to 2954. At 2954, one or more components of the X-ray source 110 can be repaired or replaced using the sealing system 150. In some embodiments, the vacuum seal on the access port 108 can be removed by breaking the primary seal 151 (for example, by removing the cover 154 from the access port 108 in a debris generation process). In these embodiments, the internal volume 106 of the enclosure 102 can be protected from contamination by the secondary seal 152. Alternatively, the access port 108 can be exposed by removing the releasable vacuum seal 1152, as disclosed herein. In 2954, the sealing system 150 may be further configured to allow the enclosure 102 to be resealed so that testing and verification can be resumed in 2944. Resealing the access port 108 may include reforming the primary seal 151 (for example, by welding a new cover 154 over the access port 108). Alternatively, the access port 108 may be vacuum-sealed by a releasable vacuum seal 1152 as disclosed herein (for example, by resealing a temporary cover 1154 over the access port 108).

[0096] With 2964, the testing and verification of the X-ray source 110 can be successfully completed. The manufacturing of the X-ray apparatus 101 can be completed. In some embodiments, the primary seal 151 and the corresponding secondary seal 152 formed by the sealing system 150 can be retained when the X-ray source 110 starts operating. In other embodiments, a releasable vacuum seal 1152 can be removed and replaced with the primary vacuum seal 151. The primary vacuum seal 151 can be configured to vacuum seal the product cover 1156 over the access port 108 (replacing a temporary cover 1154 used during testing and verification).

[0097] In the embodiment, the number of fasteners 1726 used to secure the cathode stack 1722 to the support structure 1920 of the assembled cathode module 1720 is greater than the number of cathode mounts 1729, 1925 used to mount, secure, or arrange the assembled cathode module 1720 within the enclosure 102 or on the body 104 of the enclosure 102. The number of fasteners 1726 used to secure the cathode stack 1722 to the support structure 1920 of the assembled cathode module 1720 may be twice, four times, or eight times greater than the number of cathode mounts 1729, 1925 used to mount, secure, or arrange the assembled cathode module 1720 within the enclosure 102 or on the body 104 of the enclosure 102.

[0098] The X-ray apparatus 101 includes access ports 108, 108M, 108N configured to receive a cathode 120 inside the inner volume of the enclosure 102 of the X-ray apparatus 101, first vacuum seals 151, 151A to N configured to seal a cover over access ports 108, 108M, 108N, and second seals 152, 152A to J configured to seal a cover over access ports 108, 108M, 108N, the second seals 152, 152A to J maintained between the first vacuum seals 151, 151A to N and the inner volume of the enclosure 102 while the first vacuum seals 151, 151A to N are removed.

[0099] In some embodiments, first vacuum seals 151, 151A to N are formed in a first path around access ports 108, 108M, 108N, and second seals 152, 152A to J include a physical overlap between the cover and enclosure 102 in a second path around access ports 108, 108M, 108N, with the second path positioned between the first path and the area around the access ports.

[0100] In some embodiments, access ports 108, 108M, and 108N are one of a plurality of access ports, each configured to receive a cathode 120 within the inner volume 106 of the enclosure 102 of the X-ray apparatus 101.

[0101] In some embodiments, the secondary seals 152, 152A to J include projections 1004 configured to engage with channels 1002 formed on the outer surface of the enclosure 102 and on the inner surfaces of one or more of the covers 154, 154A to H, 1154, 1154J to N.

[0102] In some embodiments, the X-ray apparatus 101 further comprises releasable mechanisms 1152, 1152J to N configured to seal temporary covers 1156, 1156J to N over access ports 108, 108M, 108N, and first vacuum seals 151, 151A to N configured to replace the releasable vacuum seals 1152, 1152J to N with permanent vacuum seals.

[0103] In some embodiments, cathode 120 is one of several cathodes 120 of the X-ray apparatus 101. Access ports 108, 108M, 108N are configured to accept T from pre-assembled cathode modules 1720, 1720O containing several cathodes 120, and the pre-assembled cathodes include a cathode stack 1722 containing several plates 1724 fixed in a specific arrangement.

[0104] In some embodiments, each of the cathodes 120 includes a plurality of emitters 1927.

[0105] In some embodiments, the X-ray apparatus 101 comprises a plurality of openings formed through a plurality of plates of a cathode stack 1722, a plurality of fasteners 1926, each fastener being fixed to a support structure 1920 of cathode modules 1720, 1720O to T through each of the plurality of openings formed through the cathode stack 1722, and compression plates 2026, 2026S to T, each compression plate 2026, 2026S to T, wherein a single opening among the plurality of openings formed through the cathode stack 1722 is positioned between adjacent pre-assembled cathodes of cathode modules 1720, 1720O to T, and the fasteners 1926 are configured to fix the cathode stack 1722 between the compression plates 2026, 2026S to T and the support structure 1920.

[0106] In some embodiments, the X-ray apparatus 101 comprises a plurality of cathode modules 1720, 1720O to T, each cathode module 1720, 1720O to T comprising one or more cathodes and compression plates 2026, 2026S to T configured to secure a cathode stack 1722 of one or more cathodes to a focusing electrode, and further comprising at least one internal electrical connection coupled between the plurality of cathode modules 1720, 1720O to T.

[0107] In some embodiments, the X-ray apparatus 101 further comprises an anode assembly including a plurality of anode modules 2430, 2430W to X, each anode module 2430, 2430W to X including one or more anodes, and a plurality of supports, each support configured to fix each of the plurality of anode modules of the anode assembly inside the inner volume of the enclosure 102, and each anode module of the anode assembly is fixed by a single support of the plurality of supports.

[0108] Some embodiments include a method of sealing the access ports 108, 108M, 108N of an enclosure 102 with first vacuum seals 151, 151A to N and secondary seals 152, 152A-J, 1152, 1152J to N, wherein the enclosure 102 has an internal volume containing an X-ray source, and sealing the access ports 108, 108M, 108N of the enclosure with first vacuum seals 151, 151A to N Removal includes removing the first vacuum seals 151, 151A to N while protecting the internal volume of the enclosure 102 from contamination with secondary seals 152, 152A to J, 1152, 1152J to N, and after removing the first vacuum seals 151, 151A to N, resealing the access ports 108, 108M, 108N of the enclosure 102 with the first vacuum seals 151, 151A to N.

[0109] In some embodiments, sealing the access ports 108, 108M, and 108N includes forming secondary seals 152, 152A to J, 1152, and 1152J to N between the first vacuum seals 151, 151A to N and the inner volume of the enclosure, and sealing the first cover over the access ports 108, 108M, and 108N with the first vacuum seals 151, 151A to N.

[0110] In some embodiments, resealing access ports 108, 108M, and 108N further includes reforming secondary seals 152, 152A to J, 1152, and 1152J to N.

[0111] In some embodiments, the first vacuum seals 151, 151A to N include welding to join the cover to the enclosure, and removing the first vacuum seals 151, 151A to N includes milling the welds.

[0112] In some embodiments, this method further includes forming releasable vacuum seals 1152, 1152J to N configured to seal a temporary cover over the access ports 108, 108M, 108N before sealing the access ports 108, 108M, 108N of the enclosure 102 with first vacuum seals 151, 151A to N and secondary seals 152, 152A to J, 1152, 1152J to N; testing the X-ray source 110; removing the releasable vacuum seals 1152, 1152J to N; and sealing the access ports 108, 108M, 108N with first vacuum seals 151, 151A to N after removing the releasable vacuum seals.

[0113] In some embodiments, the method further includes assembling T from cathode modules 1720, 1720O having a plurality of cathodes 120, wherein the cathodes 120 comprise a cathode stack 1722 having a plurality of plates 1724 fixed in a particular arrangement, and installing T from the assembled cathode modules 1720, 1720O into the internal volume of an enclosure 102 via access ports 108, 108M, 108N.

[0114] In some embodiments, assembling T from cathode modules 1720, 1720O involves forming multiple openings through the cathode stack 1722 such that a single opening through the cathode stack 1722 is formed between each pair of adjacent cathodes of T from cathode modules 1720, 1720O, and clamping T from one or more compression plates 2026, 2026S onto the cathode stack 1722 with a plurality of fasteners 1926, each fastener 1926 being installed through each of the multiple openings, and clamping. In some embodiments, a minimum number of fasteners can be used to attach T from cathode modules 1720, 1720O to the body 104 or enclosure 102.

[0115] In some embodiments, the method further comprises forming an anode assembly 2330U to X including a plurality of anode modules 2430, 2430W to X, wherein each anode module 2430 includes one or more anodes 130, and mounting each anode module 2430, 2430W to X of the anode assembly 2330U to X inside the enclosure 102 by a single support of a plurality of structurally independent supports.

[0116] Some embodiments include an X-ray apparatus 101, the X-ray apparatus 101 comprising means for generating X-rays, means for maintaining a vacuum around the means for generating X-rays, means for accessing an internal volume of the means for maintaining a vacuum around the means for generating X-rays, means for vacuum sealing the means for accessing the internal volume, and means for protecting the internal volume from contamination while removing the means for vacuum sealing the means for accessing the internal volume.

[0117] Examples of means for generating X-rays include an X-ray source 110, a cathode 120, an anode 130, etc. Examples of means for maintaining a vacuum around the means for generating X-rays include an enclosure 102, a body 104, a cover 154, etc. Examples of means for accessing the internal volume of the means for maintaining a vacuum around the means for generating X-rays include access ports 108, 108M, 108N, etc. Examples of means for vacuum sealing the means for accessing the internal volume include first vacuum seals 151, 151A to N, etc. Examples of means for protecting the internal volume from contamination while removing the means for vacuum sealing the means for accessing the internal volume include secondary seals 152, 152A to J, 1152, 1152J to N, etc.

[0118] In some embodiments, the X-ray apparatus 101 further includes means for temporarily vacuum sealing means for accessing the internal volume before installing means for vacuum sealing means for accessing the internal volume. Examples include releasable vacuum seals 1152, 1152J to N, temporary cover 1154, and the like.

[0119] Some embodiments include an X-ray apparatus 101, the X-ray apparatus 101 includes an enclosure 102, an anode assembly 2330U to X including a plurality of anode modules 2430, 2430W to X, 2430, 2430W to X, each anode module anode 130, and a plurality of supports 2335, 2335W to X, each support 2335, 2335W to X are configured to fix each anode module anode 1302430, 2430W to X of anode assembly 2330U to X inside the inner volume of enclosure 102, and each anode module 1302430, 2430W to X of anode assembly 2330U to X is fixed by multiple supports 2335, and each anode module 1302430, 2430W to X is fixed by a single support 2335, 2335W to X, and comprises multiple supports.

[0120] In some embodiments, each anode module anode 1302430, 2430W to X of anode assembly 2330U to X is structurally separated from adjacent anode modules 2430, 2430W to X of anode assembly 2330U to X by one or more gaps.

[0121] In some embodiments, the gap is configured to structurally isolate each anode module anode 2430, 2430W to X from the thermal expansion of any other anode module 2430, 2430W to X of anode assembly 2330U to X during operation.

[0122] In some embodiments, the X-ray apparatus 101 further includes flexible electrical connections that electrically connect pairs of anode modules 2430, 2430W to each other, for each adjacent pair of anode modules 2430, 2430W to X.

[0123] In some embodiments, the X-ray apparatus 101 further includes a common electrical feedthrough that penetrates the enclosure 102 and is electrically connected to one of the X's from the anode module 2430, 2430W.

[0124] In some embodiments, the support is further configured to electrically isolate the anode modules 2430, 2430W, from the anode assembly 2330U to X from the enclosure 102 and at least one of the cathodes.

[0125] In some embodiments, the support includes a ceramic support.

[0126] In some embodiments, each anode module 2430, 2430W to X of anode assembly 2330U to X has a respective feedthrough extending through a single support of anode module 2430, 2430W to X.

[0127] In some embodiments, each anode module anode 2430, 2430W to X includes a plurality of targets 132.

[0128] Some embodiments include a method which involves mounting a plurality of anode modules 2430, 2430W to X inside the enclosure of an X-ray apparatus, with each anode module 2430, 2430W to X using a single support, wherein a gap is formed between adjacent anode modules 2430, 2430W to X and between 2430, 2430W to X, and each anode module 2430, 2430W to X includes at least one anode 130, and electrically connecting each of the anode modules 2430, 2430W to X via the enclosure 102 of the X-ray apparatus 101.

[0129] In some embodiments, this method further includes electrically connecting adjacent anode modules 2430, 2430W to X together across the relevant gap.

[0130] In some embodiments, the method further includes electrically connecting each anode module 2430, 2430W to X via a single associated support.

[0131] In some embodiments, this method further includes electrically connecting each of the anode modules 2430, 2430W to the X-ray apparatus 101 via a single electrical feedthrough that penetrates the enclosure 102 of the X-ray apparatus 101.

[0132] Some embodiments include an X-ray apparatus 101, which includes means for containing a vacuum, means for generating an electron beam, a plurality of separate means for generating X-rays inside the vacuum, and means for individually supporting each of the separate means for generating X-rays inside the vacuum.

[0133] Examples of means for containing the vacuum include the enclosure 102, the main body 104, the cover 154, 154A to H, 1154, etc. Examples of means for generating the electron beam include the cathode 120, etc. Examples of separate means for generating X-rays inside the vacuum include the anode module 2430, 2430W to X, etc. Examples of means for individually supporting the means for generating X-rays inside the vacuum include the support 2335, 2335W to X, etc.

[0134] In some embodiments, the X-ray apparatus 101 further includes means for electrically connecting each of the means for individually supporting a plurality of separate means for generating X-rays in a vacuum, via means for individually supporting a plurality of separate means for generating X-rays in a vacuum. Examples of means for electrical connection include feedthroughs 2435.

[0135] In some embodiments, the X-ray apparatus 101 further comprises a single means for electrically connecting to a plurality of separate means for generating X-rays within a vacuum via means for containing a vacuum. An example of a single means for electrically connecting via means for containing a vacuum is a feedthrough 2415.

[0136] In some embodiments, the X-ray apparatus 101 further comprises at least one means for flexibly electrically connecting a pair of adjacent, separate means for generating X-rays within a vacuum. Examples of means for flexibly electrically connecting include flexible internal electrical connections 2405, etc.

[0137] Some embodiments include an X-ray apparatus 101, the X-ray apparatus 101, and a cathode stack 1722 comprising cathode modules 1720, 1720O to T, disposed inside the vacuum enclosure 102, and a cathode stack 1722 comprising a support structure, compression plates 2026, 2026S to T, and a cathode stack 1722 clamped between the support structure and the compression plates and 2026, 2026S to T, and a cathode stack 1722 comprising a plurality of plates 1724 fixed in a particular arrangement.

[0138] In some embodiments, cathode modules 1720, 1720O to T include a plurality of cathodes, each cathode 120 including at least one emitter 1927.

[0139] In some embodiments, the X-ray apparatus 101 further includes a plurality of openings formed through the cathode stack 1722, and a plurality of fasteners 1926, each fastener 1926 being fixed to a support structure from cathode modules 1720, 1720O to T through each of the openings of the plurality of openings.

[0140] In some embodiments, the single opening of a plurality of openings formed through the cathode stack 1722, and the corresponding single fastener 1926 of a plurality of fasteners 1926, are located between adjacent cathodes of cathode modules 1720, 1720O to T.

[0141] In some embodiments, compression plates 2026, 2026S to T are one of a plurality of compression plates 2026, 2026S to T, the cathode stack 1722 is clamped between the support structure and the compression plates 2026, 2026S to T, and each fastener 1926 of a plurality of fasteners 1926 is configured to secure the cathode stack 1722 in a specific arrangement between the support structure and each of the compression plates 2026, 2026S to T.

[0142] In some embodiments, cathode modules 1720, 1720O to T are one of a plurality of cathode modules 1720, 1720O to T arranged in a vacuum enclosure 102, and one or more internal electrical connections are configured to couple each cathode stack 1722 of the plurality of cathode modules 1720, 1720O to T to a common electrical feedthrough 1815.

[0143] In some embodiments, the cathode stack 1722 includes a grounding plate, which is electrically coupled to a common earth connection by internal electrical connections from cathode modules 1720, 1720O to T.

[0144] In some embodiments, the X-ray apparatus 101 further includes one or more internal electrical connections configured to couple the grounding plate of the cathode stack 1722 to the grounding plate of the cathode module 1720, 1720O to T adjacent to the grounding plate of the cathode stack 1722 of the cathode module 1720, 1720O to T inside the enclosure 102.

[0145] In some embodiments, the support structure includes a focusing electrode.

[0146] In some embodiments, the cathode module 1720, from 1720O to T, includes a nanotube emitter.

[0147] Some embodiments include a method, which involves stacking a plurality of plates on a support structure, the plurality of plates forming a plurality of cathodes for a plurality of X-ray sources, stacking at least one compression plate 2026, 2026S to T on the stacked plurality of plates of the support structure, and fixing the compression plates 2026, 2026S to T to the support structure to form cathode modules 1720, 1720O to T.

[0148] In some embodiments, the method further includes fixing T from compression plates 2026, 2026S to a support structure to form T from cathode modules 1720, 1720O, and then placing T from cathode modules 1720, 1720O into the inner volume of a vacuum enclosure 102.

[0149] In some embodiments, the support structure includes a focusing electrode, and stacking multiple plates on the support structure further includes aligning and fixing the multiple plates with respect to the focusing electrode.

[0150] In some embodiments, stacking at least one compression plate 2026, 2026S to T on a stacked plurality of plates of a support structure includes stacking a plurality of compression plates 2026, 2026S to T on a stacked plurality of plates of a support structure.

[0151] In some embodiments, the method further includes fastening each of the multiple compression plates 2026, 2026S to T to a support structure with a single fastener.

[0152] Some embodiments include an X-ray apparatus 101, which includes means for containing a vacuum, a plurality of means for emitting electrons within the vacuum, means for support, and means for clamping the plurality of means for emitting electrons within the vacuum to the means for support. Examples of means for containing a vacuum include an enclosure 102, a body 104, covers 154, 154A to H, 1154, etc. Examples of means for emitting electrons within the vacuum include a cathode 120, etc. Examples of support means include a support structure 1920, etc. Examples of means for clamping include a compression plate 2026, etc.

[0153] In some embodiments, the X-ray apparatus 101 further comprises a plurality of means for fixing clamping means to support means. Examples of fixing means include fasteners 1726, etc.

[0154] In some embodiments, a single means for fixing is positioned between each pair of means for emitting electrons in a vacuum.

[0155] In some embodiments, the X-ray apparatus 101 further includes means for attaching means for supporting means to means for maintaining a vacuum. Examples of means for attaching support means include fasteners 1726.

[0156] While structures, devices, methods, and systems are described according to specific embodiments, those skilled in the art will readily recognize that many modifications are possible to specific embodiments, and therefore any modifications should be considered to fall within the spirit and scope disclosed herein. Accordingly, many modifications can be made by those skilled in the art without departing from the spirit and scope of the appended claims.

[0157] The claims following the disclosure in this document are expressly incorporated herein into the disclosure, and each claim stands as a separate embodiment in itself. This disclosure includes all variations of the independent claims and their dependent claims. Furthermore, additional embodiments that can be derived from the following independent and dependent claims are also expressly incorporated herein into the description. These additional embodiments are determined by replacing the dependency of a given dependent claim with the phrase "any of the claims beginning with claim [x] and ending with the claim immediately preceding this claim," where the parenthetical term "[x]" is replaced with the number of the most recently described independent claim. For example, for a first set of claims beginning with independent claim 1, claim 4 may depend on either claims 1 and 3, and these separate dependencies may result in two different embodiments; claim 5 may depend on any one of claims 1, 3, or 4, and these separate dependencies may result in three different embodiments; claim 6 may depend on any one of claims 1, 3, 4, or 5, and these separate dependencies may result in four different embodiments, and so on.

[0158] The description in the claim of the term “First” relating to a feature or element does not necessarily imply the existence of a second or additional such feature or element. Where present, elements specifically described in means-plus-function form are intended to be interpreted in accordance with Section 112(f) of the U.S. Patent Act to encompass the corresponding structures, materials or functions and their equivalents described herein. Embodiments of the Invention for which exclusive ownership or privilege is claimed are defined as follows: (Other possible items) (Item 1) X-ray apparatus, An access port configured to receive a cathode inside the inner volume of the enclosure of the X-ray apparatus, A first vacuum seal configured to seal the cover over the access port, and A second seal configured to seal the cover over the access port, the second seal being maintained between the first vacuum seal and the inner volume portion of the enclosure while the first vacuum seal is being removed. X-ray equipment, including... (Item 2) The first vacuum seal is formed in the first path around the access port, The X-ray apparatus according to item 1, wherein the second seal includes a physical overlap between the cover and the enclosure in a second path around the access port, and the second path is located between the first path and the area around the access port. (Item 3) The X-ray apparatus according to item 1, wherein the access port is one of a plurality of access ports, each configured to receive a cathode inside the inner volume of the enclosure of the X-ray apparatus. (Item 4) The X-ray apparatus according to item 1, wherein the secondary seal comprises a projection configured to engage with a channel formed inside one or more of the outer surface of the enclosure and the inner surface of the cover. (Item 5) The access port is further provided with a retractable mechanism configured to seal a temporary cover over it, The X-ray apparatus according to item 1, wherein the first vacuum seal is configured to replace the releasable vacuum seal with a permanent vacuum seal. (Item 6) The cathode is one of several cathodes in the X-ray apparatus. The X-ray apparatus according to item 1, wherein the access port is configured to accept a pre-assembled cathode module comprising a plurality of cathodes, the pre-assembled cathode comprising a cathode stack comprising a plurality of plates fixed in a specific arrangement. (Item 7) The X-ray apparatus according to item 6, wherein each of the cathodes includes a plurality of emitters. (Item 8) Multiple openings formed by penetrating multiple plates of the cathode stack, A plurality of fasteners, each fastener being fixed to the support structure of the cathode module through each of the openings formed by penetrating the cathode stack, and A compression plate, wherein one of the plurality of openings formed through the cathode stack is positioned between adjacent pre-assembled cathodes of the cathode module, and the fastener is configured to fix the cathode stack between the compression plate and the support structure. An X-ray apparatus as described in item 6, comprising: (Item 9) A plurality of cathode modules, each cathode module comprising one or more cathodes and a compression plate configured to fix the cathode stack of the one or more cathodes to a focusing electrode, and At least one internal electrical connection coupled between the plurality of cathode modules An X-ray apparatus as described in any one of items 1 to 8, further comprising: (Item 10) an anode assembly comprising multiple anode modules, wherein each anode module comprises one or more anodes, and A plurality of supports, each support configured to fix each of the plurality of anode modules of the anode assembly inside the internal volume of the enclosure, and each anode module of the anode assembly is fixed by a single support of the plurality of supports. An X-ray apparatus as described in any one of items 1 to 8, further comprising: (Item 11) It is a method, The method of sealing the access port of an enclosure with a first vacuum seal and a secondary seal, wherein the enclosure has an internal volume containing an X-ray source, Removing the first vacuum seal from the access port of the enclosure, including protecting the internal volume of the enclosure from contamination while removing the first vacuum seal together with the secondary seal, and After removing the first vacuum seal, the access port of the enclosure is resealed with the first vacuum seal. Methods that include... (Item 12) Sealing the aforementioned access port To form the secondary seal between the first vacuum seal and the inner volume portion of the enclosure, and The method according to item 11, comprising sealing the first cover over the access port with the first vacuum seal. (Item 13) The method according to item 12, further comprising resealing the access port, which further includes reforming the secondary seal. (Item 14) The first vacuum seal includes welding to join the cover to the enclosure, The method according to item 11, wherein removing the first vacuum seal includes milling the weld. (Item 15) Before sealing the access port of the enclosure with the first vacuum seal and the secondary seal, To form a releasable vacuum seal configured to seal a temporary cover over the access port, To test the aforementioned X-ray source, To remove the aforementioned releasable vacuum seal, After removing the aforementioned releasable vacuum seal, the access port is sealed with the first vacuum seal. The method described in item 11, further including the method described in item 11. (Item 16) Assembling a cathode module comprising multiple cathodes, wherein the multiple cathodes comprise a cathode stack comprising multiple plates fixed in a specific arrangement, and The assembled cathode module is installed in the inner volume of the enclosure via the access port. The method described in item 11, further including the method described in item 11. (Item 17) Assembling the cathode module is To form a plurality of openings through the cathode stack such that a single opening through the cathode stack is formed between each pair of adjacent cathodes of the cathode module, and Clamping one or more compression plates onto the cathode stack with a plurality of fasteners, each fastener being installed through each of the openings of the plurality of openings, The method described in item 16, including the method described in item 16. (Item 18) Forming an anode assembly that includes multiple segments, wherein each anode module includes one or more anodes, and Each anode module of the anode assembly is mounted inside the enclosure by a single support of multiple structurally independent supports. The method described in any one of items 11 to 17, further including the method described in any one of items 11 to 17. (Item 19) X-ray apparatus, Means for generating X-rays, Means for maintaining a vacuum around the means for generating the X-rays, Means for accessing the inner volume of the means for maintaining the vacuum around the means for generating the X-rays, Means for vacuum sealing means for accessing the internal volume, and Means for protecting the inner volume from contamination while removing the means for accessing the inner volume and the means for vacuum sealing. Means for maintaining the vacuum, including An X-ray apparatus equipped with the following features. (Item 20) The X-ray apparatus according to item 19, further comprising means for temporarily vacuum sealing means for accessing the internal volume before attaching means for vacuum sealing means for accessing the internal volume. (Item 21) X-ray apparatus, Enclosure, an anode assembly comprising multiple anode modules, wherein each anode module comprises one or more anodes, and A plurality of supports, each support configured to fix each anode module of the anode assembly inside the internal volume of the enclosure, and each anode module of the anode assembly is fixed by a single support of the plurality of supports, An X-ray apparatus equipped with the following features. (Item 22) The X-ray apparatus according to item 21, wherein each anode module of the anode assembly is structurally separated from adjacent anode modules of the anode assembly by one or more gaps. (Item 23) The X-ray apparatus according to item 22, wherein the one or more gaps are configured to structurally isolate each anode module of the anode assembly from any other anode module of the anode assembly during operation. (Item 24) The X-ray apparatus according to item 22, further comprising flexible electrical connections that electrically connect each adjacent pair of anode modules among the anode modules to each other. (Item 25) The X-ray apparatus according to item 24, further comprising a common electrical feedthrough that penetrates the enclosure and is electrically connected to one of the anode modules. (Item 26) The X-ray apparatus according to item 21, wherein the support is further configured to electrically isolate the anode module of the anode assembly from at least one of the enclosure and the cathode. (Item 27) The X-ray apparatus according to item 26, wherein the support comprises a ceramic support. (Item 28) The X-ray apparatus according to any one of items 21 to 27, wherein each anode module of the anode assembly comprises a feedthrough extending through the single support of the anode module. (Item 29) An X-ray apparatus as described in any one of items 21 to 27, wherein each anode module includes multiple targets. (Item 30) It is a method, This involves mounting multiple anode modules inside the enclosure of an X-ray apparatus, with each anode module being supported by a single support. A gap is formed between adjacent anode modules. Each anode module contains at least one anode. The above-mentioned installation, To electrically connect each of the anode modules via the enclosure of the X-ray apparatus, Methods that include... (Item 31) The method according to item 30, further comprising electrically connecting adjacent anode modules to one another across the relevant gap. (Item 32) The method according to item 30 or 31, further comprising electrically connecting each anode module to the anode module via the associated single support. (Item 33) The method according to item 32, further comprising electrically connecting each of the anode modules via a single electrical feedthrough that penetrates the enclosure of the X-ray apparatus. (Item 34) X-ray apparatus, A means of containing a vacuum, Means for generating an electron beam, Multiple separate means for generating X-rays inside the vacuum, and Means for individually supporting each of the plurality of separate means for generating X-rays inside the vacuum X-ray equipment, including... (Item 35) The X-ray apparatus according to item 34, further comprising, for each of the means for individually supporting the plurality of separate means for generating X-rays inside the vacuum, means for electrically connecting to the plurality of separate means for generating X-rays inside the vacuum via the means for individually supporting the plurality of separate means for generating X-rays inside the vacuum. (Item 36) The X-ray apparatus according to item 34, further comprising a single means for electrically connecting to a plurality of separate means for generating X-rays within the vacuum via the means for containing the vacuum. (Item 37) The X-ray apparatus according to any one of items 34 to 36, further comprising at least one means for flexibly electrically connecting a pair of adjacent, separate means for generating X-rays within the vacuum. (Item 38) X-ray apparatus, Vacuum enclosure and, A cathode module disposed inside the vacuum enclosure, support structure, Compression plate, and A cathode stack clamped between the support structure and the compression plate, comprising a cathode stack including a plurality of plates fixed in a specific arrangement, The cathode module and, An X-ray apparatus equipped with the following features. (Item 39) The X-ray apparatus according to item 38, wherein the cathode module comprises a plurality of cathodes, each cathode comprising at least one emitter. (Item 40) Multiple openings formed through the cathode stack, A plurality of fasteners, each fastener being fixed to the support structure of the cathode module through each of the openings of the plurality of fasteners The X-ray apparatus described in item 38, further including the X-ray apparatus described in item 38. (Item 41) The X-ray apparatus according to item 40, wherein a single opening of the plurality of openings formed through the cathode stack, and a corresponding single fastener of the plurality of fasteners, are located between adjacent cathodes of the cathode module. (Item 42) The compression plate is one of a plurality of compression plates, The cathode stack is clamped between the support structure and the compression plate. The X-ray apparatus according to item 41, wherein each fastener of the plurality of fasteners is configured to fix the cathode stack in the particular arrangement between the support structure and one of the compression plates. (Item 43) The cathode module is one of a plurality of cathode modules arranged in the vacuum enclosure. The X-ray apparatus according to item 38, wherein one or more internal electrical connections are configured to couple each cathode stack of the plurality of cathode modules to a common electrical feedthrough. (Item 44) The cathode stack includes a grounding plate, The X-ray apparatus according to item 38, wherein the grounding plate is electrically coupled to a common ground connection by the internal electrical connection of the cathode module. (Item 45) The X-ray apparatus according to item 44, further comprising one or more internal electrical connections configured to connect the grounding plate of the cathode stack to the grounding plate of the cathode stack of the cathode module adjacent to the cathode module inside the vacuum enclosure. (Item 46) The X-ray apparatus according to any one of items 38 to 45, wherein the support structure comprises a focusing electrode. (Item 47) An X-ray apparatus according to any one of items 38 to 45, wherein the cathode of the cathode module includes a nanotube emitter. (Item 48) It is a method, The stacking of multiple plates in a support structure, wherein the multiple plates form multiple cathodes for multiple X-ray sources, The support structure is configured to stack at least one compression plate on top of the stacked plates, and The compression plate is fixed to the support structure to form a cathode module. Methods that include... (Item 49) The method of item 48, further comprising fixing the compression plate to the support structure to form the cathode module, and then placing the cathode module inside the internal volume of the vacuum enclosure. (Item 50) The support structure includes a focusing electrode. The method according to item 48, wherein stacking the plurality of plates on the support structure further includes aligning and fixing the plurality of plates with the focusing electrode. (Item 51) The method according to any one of items 48 to 50, wherein stacking the at least one compression plate on the stacked plurality of plates of the support structure includes stacking a plurality of compression plates on the stacked plurality of plates of the support structure. (Item 52) The method according to item 51, further comprising fixing each of the plurality of compression plates to the support structure with a single fastener. (Item 53) X-ray apparatus, A means of containing a vacuum, Multiple means for emitting electrons inside the vacuum, Means for support, and Means for clamping the plurality of means for emitting electrons inside the vacuum to the means for support, X-ray equipment, including... (Item 54) The X-ray apparatus according to item 53, further comprising a plurality of means for securing the clamping means to the supporting means. (Item 55) The X-ray apparatus according to item 54, wherein a single means for fixing is arranged between each pair of the plurality of means for emitting electrons in the vacuum. (Item 56) The X-ray apparatus according to any one of items 53 to 55, further comprising means for attaching the means for supporting to the means for maintaining the vacuum.

Claims

1. X-ray device, An access port configured to receive a cathode inside the inner volume of the enclosure of the X-ray apparatus, A first vacuum seal configured to seal the cover over the access port, and A second seal configured to seal the cover over the access port, the second seal being maintained between the first vacuum seal and the inner volume of the enclosure while the first vacuum seal is being removed. X-ray equipment, including...

2. The X-ray apparatus according to claim 1, wherein the access port is one of a plurality of access ports, each configured to receive a cathode inside the inner volume portion of the enclosure of the X-ray apparatus.

3. The X-ray apparatus according to claim 1, wherein the secondary seal comprises a projection configured to engage with a channel formed inside one or more of the outer surface of the enclosure and the inner surface of the cover.

4. The access port is further provided with a retractable mechanism configured to seal a temporary cover over it, The X-ray apparatus according to claim 1, wherein the first vacuum seal is configured to replace the releasable vacuum seal with a permanent vacuum seal.

5. The cathode is one of the multiple cathodes of the X-ray apparatus. The X-ray apparatus according to claim 1, wherein the access port is configured to accept a pre-assembled cathode module comprising a plurality of cathodes, the pre-assembled cathode comprising a cathode stack comprising a plurality of plates fixed in a specific arrangement.

6. The X-ray apparatus according to claim 5, wherein each of the cathodes includes a plurality of emitters.

7. Multiple openings formed by penetrating multiple plates of the cathode stack, A plurality of fasteners, each fastener being fixed to the support structure of the cathode module through each of the openings formed by penetrating the cathode stack, and A compression plate, wherein one of the plurality of openings formed through the cathode stack is positioned between adjacent pre-assembled cathodes of the cathode module, and the fastener is configured to fix the cathode stack between the compression plate and the support structure. The X-ray apparatus according to claim 5, comprising:

8. A plurality of cathode modules, each cathode module comprising one or more cathodes and a compression plate configured to fix the cathode stack of the one or more cathodes to a focusing electrode, and At least one internal electrical connection coupled between the plurality of cathode modules The X-ray apparatus according to any one of claims 1 to 7, further comprising the above.

9. an anode assembly comprising multiple anode modules, wherein each anode module comprises one or more anodes, and A plurality of supports, each support configured to fix each of the plurality of anode modules of the anode assembly inside the internal volume of the enclosure, and each anode module of the anode assembly is fixed by a single support of the plurality of supports. The X-ray apparatus according to any one of claims 1 to 7, further comprising the above.

10. The first vacuum seal is formed in the first path around the access port, The X-ray apparatus according to any one of claims 1 to 7, wherein the second seal includes a physical overlap between the cover and the enclosure in a second path around the access port, and the second path is located between the first path and the area around the access port.

11. It is a method, The method of sealing the access port of an enclosure with a first vacuum seal and a secondary seal, wherein the enclosure has an internal volume containing an X-ray source, Removing the first vacuum seal from the access port of the enclosure, including protecting the internal volume of the enclosure from contamination while removing the first vacuum seal together with the secondary seal, and After removing the first vacuum seal, the access port of the enclosure is resealed with the first vacuum seal. Methods that include...

12. The first vacuum seal includes welding to join the cover to the enclosure, The method according to claim 11, wherein removing the first vacuum seal includes milling the weld.

13. Before sealing the access port of the enclosure with the first vacuum seal and the secondary seal, To form a releasable vacuum seal configured to seal a temporary cover over the access port, To test the aforementioned X-ray source, To remove the aforementioned releasable vacuum seal, After removing the aforementioned releasable vacuum seal, the access port is sealed with the first vacuum seal. The method according to claim 11, further comprising:

14. Forming an anode assembly comprising a plurality of segments, wherein each anode module comprises one or more anodes, and Each anode module of the anode assembly is mounted inside the enclosure by a single support of multiple structurally independent supports. The method according to claim 11, further comprising:

15. Assembling a cathode module comprising multiple cathodes, wherein the multiple cathodes comprise a cathode stack comprising multiple plates fixed in a specific arrangement, and The assembled cathode module is installed in the inner volume of the enclosure via the access port. The method according to any one of claims 11 to 14, further comprising:

16. Assembling the cathode module is To form a plurality of openings through the cathode stack such that a single opening through the cathode stack is formed between each pair of adjacent cathodes of the cathode module, and Clamping one or more compression plates onto the cathode stack with a plurality of fasteners, each fastener being installed through each of the openings of the plurality of openings, The method according to claim 15, including the method described in claim 15.

17. The access port is sealed To form the secondary seal between the first vacuum seal and the inner volume portion of the enclosure, and The method according to any one of claims 11 to 14, comprising sealing the first cover over the access port with the first vacuum seal.

18. The method according to claim 17, further comprising resealing the access port by reforming the secondary seal.

19. X-ray device, Means for generating X-rays, Means for maintaining a vacuum around the means for generating the X-rays, Means for accessing the inner volume of the means for maintaining the vacuum around the means for generating the X-rays, Means for vacuum sealing means for accessing the internal volume, and Means for protecting the inner volume from contamination while removing the means for accessing the inner volume and the means for vacuum sealing. Means for maintaining the vacuum, including An X-ray apparatus equipped with the following features.

20. The X-ray apparatus according to claim 19, further comprising means for temporarily vacuum sealing means for accessing the internal volume before attaching means for vacuum sealing means for accessing the internal volume.

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