Current control method and energy radiation system

Abstract

The present application relates to a current control method and an energy radiation system. The method includes steps of providing high-frequency power to each coil of a radio frequency energy radiation unit by a current control device, and adjusting a ratio of currents and / or a phase angle of currents between the high-frequency powers transmitted to each coil by the current control device. In an unfavorable state, there are performance differences in each coil due to the manufacturing process, and the magnetic induction intensities generated by each coil with the same current are different. In the current control method of the present application, by collecting the magnetic induction intensities generated by each coil with the same current, the current control device adjusts the ratio of currents and / or the phase angle between the currents output to each coil based on the differences in the magnetic induction intensities, and adjusts the ratio of currents and / or the phase angle of the currents to adjust so as to equalize the magnetic induction intensities generated by each coil, and further improve the output accuracy of the multi-coil radio frequency energy radiation unit.

Description

Technical Field

[0001] This application relates to radio frequency power supplies, particularly current control methods and energy radiation systems.

Background Art

[0002] The plasma source mechanism transmits information to a certain distance away without requiring a transmission line by transmitting radio waves. The energy radiation device in the plasma source mechanism includes a plurality of coils. However, in an energy radiation device including a plurality of coils, since the manufacturing process of the coils cannot be made exactly the same, the magnetic induction intensity due to the same current flowing through each coil is different, which affects the output accuracy of the plasma source mechanism. Therefore, in the realization process, the inventor has discovered that there is at least a problem that the output electromagnetic waves of the conventional plasma source mechanism are not uniform.

Summary of the Invention

Problems to be Solved by the Invention

[0003] Based on this, there is a need to provide a current control method and an energy radiation system for the problem that the output accuracy of the conventional multi-coil energy radiation structure is not high.

Means for Solving the Problems

[0004] To achieve the above object, according to one aspect, an embodiment of this application is a current control method for a plasma source mechanism used in a radio frequency energy radiation unit of a plasma source mechanism, comprising: providing high-frequency power to each coil of the radio frequency energy radiation unit by a current control device; adjusting, by the current control device, at least one of the following power parameters between the high-frequency powers transmitted to each coil, the steps comprising: adjusting the ratio of the currents of each coil; adjusting the phase angle of the currents of each coil, and providing a current control method for a plasma source mechanism.

[0005] In one embodiment, prior to the step of adjusting at least one of the following power parameters between the high-frequency power transmitted to each coil, The current control device acquires the magnetic induction strength generated by the current flowing through each coil, The method further includes the step of adjusting the ratio of currents transmitted to each coil and the phase angle of the currents based on the magnetic induction strength of each coil using a current control device.

[0006] In one embodiment, the current control device obtains the magnetic induction strength generated by each coil with the same ratio of current.

[0007] In one embodiment, the current control device equalizes the magnetic induction strength generated by each coil with the adjusted current by adjusting the ratio of the currents transmitted to each coil.

[0008] In one embodiment, the current control device includes a power supply and a multi-output matching module. In the step of adjusting the ratio of currents in each coil, The power supply outputs current to the multi-output matching module. The multi-output matching module adjusts the ratio of current transmitted to each coil, and according to this ratio, the current transmitted by the power supply is divided and output to each coil.

[0009] In one embodiment, the current control device includes a power supply and a multi-output matching module. In the step of adjusting the ratio of currents in each coil, A master power supply controls at least one slave power supply to output power to each multi-output matching module, and the current that each multi-output matching module delivers to each coil satisfies the current ratio.

[0010] In one embodiment, in the step of adjusting the ratio of the currents in each coil, The master power supply outputs power to the first multi-output matching module. The master power supply controls the slave power supplies to output power to the second multi-output matching module. The currents transmitted to each coil via the first multi-output matching module and the second multi-output matching module satisfy the current ratio.

[0011] In one embodiment, the current control device includes a master power supply, at least one slave power supply, and at least one multi-output matching module. The master power supply is connected to each slave power supply, and each slave power supply is connected to the corresponding multi-output matching module. In the step of adjusting the ratio of currents in each coil, The master power supply controls each slave power supply to adjust the ratio of current output to each multi-output matching module.

[0012] In one embodiment, the current control device includes a phase-shift controlled power supply and a multi-output matching module. In the step of adjusting the phase angle of the current in each coil, The phase-shift controlled power supply modulates the phase angle of the current output to the multi-output matching module.

[0013] In one embodiment, the current control device includes a power supply and a multi-output matching module. In the step of adjusting the phase angle of the current in each coil, The master power supply controls the phase angle of the current that at least one slave power supply outputs to each multi-output matching module.

[0014] In one embodiment, in the step of adjusting the phase angle of the current in each coil, The master power supply outputs the first current to the first multi-output matching module. The master power supply controls the slave power supplies to output a second current to the second multi-output matching module, and the phase angles of the second current and the first current are either the same or different.

[0015] In one embodiment, the multi-output matching module includes a variable capacitor, In the step where the multi-output matching module adjusts the ratio between each current, A multi-output matching module adjusts the ratio between each output current by changing the capacitance value of a variable capacitor.

[0016] In another embodiment, the present invention provides an energy radiation system comprising a radio frequency energy radiation unit and a current control device, The radio frequency energy radiation unit includes at least two coils, and each current control device is connected to each coil. The current control device provides an energy radiation system used to realize the current control method of the plasma source mechanism described above.

[0017] In one embodiment, the current control device is further used to adjust the phase angle of the current transmitted to each coil based on the magnetic induction strength of each coil. [Effects of the Invention]

[0018] One of the above technical proposals has the following advantages and beneficial effects.

[0019] In the current control method for the plasma source mechanism of the present invention, a current control device supplies high-frequency power to each coil of the radio frequency energy radiation unit, and the current control device adjusts the ratio of currents and / or the phase angle of the currents between the high-frequency powers transmitted to each coil. In undesirable conditions, there may be performance differences in each coil due to the manufacturing process, resulting in different magnetic induction intensities generated by each coil with the same current. In the current control method of the present invention, by collecting the magnetic induction intensities generated by each coil with the same current, the current control device adjusts the ratio of currents and / or the phase angle of the currents output to each coil based on the differences in each magnetic induction intensity, thereby equalizing the magnetic induction intensities generated by each coil and further improving the output accuracy of the multi-coil radio frequency energy radiation unit. [Brief explanation of the drawing]

[0020] [Figure 1] This is a schematic diagram of the plasma source mechanism implemented in this invention. [Figure 2] This is a schematic diagram of the plasma source mechanism implemented in this invention. [Figure 3] This is a schematic diagram of the plasma source mechanism implemented in this invention. [Figure 4] This is a schematic diagram of the plasma source mechanism as implemented in this invention. [Figure 5] This is a schematic diagram of the plasma source mechanism implemented in this invention. [Figure 6] This is a schematic diagram of the plasma source mechanism implemented in this invention. [Figure 7] This is a schematic diagram of the plasma source mechanism implemented in this invention. [Figure 8] This is a schematic diagram of the structure of the dual output matching module according to the present invention. [Figure 9] This is a flowchart of the current control method according to the present invention. [Figure 10] This is a schematic diagram of the plasma source mechanism implemented in this invention. [Figure 11] This is a schematic diagram of the plasma source mechanism implemented in this invention. [Figure 12] This is a schematic diagram of the current distribution of the plasma source mechanism according to the present invention. [Figure 13] This is a schematic diagram of the current distribution of another plasma source mechanism based on the present invention. [Figure 14] This is a schematic diagram of the plasma source mechanism implemented in this invention. [Figure 15] This is a schematic diagram of the master-slave control of the plasma source mechanism according to the present invention. [Figure 16] This is another flowchart of the current control method according to the present invention. [Figure 17] This is a schematic diagram of the plasma source mechanism as implemented in this invention. [Figure 18] This is a schematic diagram of the current flow in the plasma source mechanism according to the present invention. [Figure 19]This is an equivalent circuit diagram of the dual output matching module implemented in this invention. [Modes for carrying out the invention]

[0021] To facilitate understanding of this application, the application will be described more comprehensively below with reference to the relevant drawings. The drawings show the best embodiment of the application. However, the application is not limited to the embodiments described herein and may be carried out in many different forms. Conversely, the purpose of providing these embodiments is to make the disclosure of the application more thorough and comprehensive.

[0022] When one element is considered to be "connected" to another, it should be noted that the other element may be directly connected to the other element, be joined together as one, or an intermediate element may exist simultaneously. The terms "attachment," "one end," "the other end," and similar expressions used herein are for illustrative purposes only.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art. Terms used in this specification are for illustrative purposes only and are not intended to limit this application. The terms "and / or" as used herein include any and all combinations of one or more related items.

[0024] The plasma source mechanism is for emitting radio waves. The energy radiator 2 in the plasma source mechanism includes two or more coils. Due to differences in the manufacturing process, there are performance differences in each coil, resulting in differences in the magnetic induction strength generated by each coil when the same current is applied, and thus the output accuracy of the energy radiator 2 is not high. To solve this problem, a plasma source mechanism used in a vacuum chamber apparatus having a vacuum chamber is provided, as shown in Figure 1-6. The plasma source mechanism includes an energy radiator 2 and a current control device 1. The energy radiator 2 is mounted in an external housing outside the vacuum chamber of the vacuum chamber apparatus. In one example, the current control device 1 includes a power supply and a multi-output matching module 13. The power supply is connected to the multi-output matching module 13, and each output terminal of the multi-output matching module 13 is connected to a plurality of coils of the energy radiator 2. The current provided by the current control device 1 is transmitted to the plurality of coils via the multi-output matching module 13, and the plurality of coils obtain currents of the same or different ratios and currents of the same or different phase angles. The current control device 1 can adjust the ratio of the current output to the coils and can also adjust the phase angle output to the coils. Specifically, the ratio of the currents output to each coil may be the same or different, and the phase angles of each coil may be the same or different. Specifically, in one example, the power supply provides a first current to the multi-output matching module 13, the multi-output matching module 13 adjusts the first current to form a plurality of second currents and transmits them to a plurality of coils, and the plurality of second currents are currents of the same or different ratios to each other.

[0025] In one example, as shown in Figure 1, the current control device 1 includes one multi-output matching module 13. In another example, as shown in Figure 2, the current control device 1 includes at least two multi-output matching modules 13, for example, two, three, four...N multi-output matching modules 13, the specific number of which can be determined according to actual demand. When there are multiple multi-output matching modules 13, the power supply provides each multi-output matching module 13 with the same or different ratios of current. Similarly, when there are multiple multi-output matching modules 13, the multi-output matching modules 13 receive currents from the power supply with the same or different phase angles.

[0026] Power supply 11 is used to modulate the current required for the energy radiating device 2, and the multi-output matching module 13 is used to divide the current transmitted by power supply 11 according to the ratio. The power supply may be a single power supply or a battery pack with multiple power supplies connected. In one example, as shown in Figure 3, the power supply includes a master power supply 111, at least one slave power supply 113, and at least one multi-output matching module 13. Each output terminal of the master power supply 111 is connected to a slave power supply 113, and each slave power supply 113 is connected to a multi-output matching module 13. When there is one multi-output matching module 13, the master power supply 111 can control the slave power supplies 113 to adjust the magnitude of the current output to each multi-output matching module 13. When there are two or more multi-output matching modules 13, the master power supply 111 can control the slave power supplies 113 to adjust the ratio and magnitude of the current output to each multi-output matching module 13. Of course, in this embodiment, as shown in Figure 3, the master power supply is connected to all the slave power supplies and some of the multi-output matching modules 13, and the slave power supplies are connected to some other multi-output matching modules 13. In this example, the master power supply simultaneously has the function of controlling the slave power supplies and outputting current to the multi-output matching modules 13.

[0027] To apply this to AC electricity, since the current value in AC electricity changes according to the change in phase angle, the magnetic induction strength of each coil is further equalized by changing the phase angle of each current output to the multi-output matching module 13. In one example, as shown in Figure 4, the power supply includes a master power supply and at least one slave power supply, the master power supply and slave power supplies are each connected to the input terminal of the multi-output matching module 13 and supply current, and the master power supply controls the phase angle at which each slave power supply outputs current. For example, at least one of the master power supply 111 and the slave power supply 113 is a phase-shift control power supply. For example, the master power supply 111 is a phase-shift control power supply and transmits a current with an adjusted phase angle to the corresponding slave power supply 113 via its output terminal. The slave power supply 113 is a phase control power supply and adjusts the phase angle of the current it outputs after receiving a control command from the master power supply 111. Alternatively, for example, the power supply may be directly controlled by the controller 115, and as shown in Figure 5, it may include the controller 115 and at least one slave power supply, each of which is connected to the input terminal of the multi-output matching module 13 and supplies current, and the controller 115 adjusts the phase angle at which at least one slave power supply outputs current, and in this example, it is sufficient to ensure that one slave power supply is controlled by the controller 115 to change the phase angle of the current. Alternatively, for example, the power supply may include the controller 115 and multiple slave power supplies, each of which is connected to the multi-output matching module 13, and the controller 115 controls the multiple power supplies to supply current with the same or different phase angles. In one example, the number of multi-output matching modules 13 is single and has two or more input terminals, each input terminal corresponding to an output terminal of a different multi-output matching module 13, and the two input terminals obtain currents from the power supply at the same or different phase angles. The number of input terminals can be one, two, three, four...N, and the specific number can be determined according to the actual demand. In one example, the number of output terminals of the multi-output matching module 13 is two, i.e., it is a dual output matching module. Similarly, in one example, the multi-output matching module 13 has one input terminal, which may be connected to one output terminal of the power supply, or it may be connected to at least two output terminals of the power supply simultaneously. In another example, the multi-output matching module 13 has at least two input terminals, each input terminal may be connected in a one-to-one correspondence to an output terminal of the power supply, or it may be connected to an unspecified number of output terminals of the power supply.

[0028] One example provides a dual output matching module structure, the dual output matching module including capacitance C0, variable capacitance C1, variable capacitance C2, and variable capacitance C3. One end of capacitance C0 is connected to one end of variable capacitance C1, and the other end is connected to one end of variable capacitance C2. One end of variable capacitance C3 is connected to the other end of variable capacitance C1, and the other end of variable capacitance C3 is connected to the other end of variable capacitance C2.

[0029] The current control device 1 adjusts the current by the following steps, thereby equalizing the magnetic induction strength generated by each coil.

[0030] In step S1, the current control device 1 obtains the magnetic induction strength generated by each coil of the energy radiator 2 with the same current.

[0031] By using a magnetic induction strength detector, the magnetic induction strength generated by each coil with the same current can be detected. In one example, the magnetic induction strength generated by each coil with the same current can be detected in advance and stored in the current control device 1. When it is necessary to control the energy radiation device 2 to generate radio waves, the current control device 1 recalls the stored magnetic induction strength. Furthermore, the current control device 1 can simultaneously store the magnetic induction strength of each coil of multiple different energy radiation devices 2. In another example, the current control device 1 can detect the magnetic induction strength in real time using the magnetic induction strength detector and dynamically adjust the current output to the coils based on the magnetic induction strength acquired in real time. The current control device 1 is used to transmit current to each coil and to adjust the ratio of the currents transmitted to each coil.

[0032] In step S3, the current control device 1 adjusts the ratio of the currents transmitted to each coil based on the magnetic induction strength of each coil, thereby equalizing the magnetic induction strength generated by each coil with the adjusted current.

[0033] The current control device 1 modulates the magnetic induction strength of each coil, either stored in memory or acquired in real time, to a total current of a magnitude corresponding to the sum of the magnetic induction strengths. Based on the magnetic induction strength, it obtains the ratio of the currents output to each coil, and according to this ratio, divides the total current into sub-currents transmitted to each coil, transmitting the corresponding sub-currents to the corresponding coils.

[0034] In one example, as shown in Figure 1, the current control device 1 includes a power supply 11 and one multi-output matching module 13. In this example, the number of output terminals of the multi-output matching module 13 is equal to the number of coils in the energy radiator 2, and the output terminals of the multi-output matching module 13 are connected to the coils in the energy radiator 2 in a one-to-one correspondence. The multi-output matching module 13 includes at least two output terminals.

[0035] In this example, the step of adjusting the ratio of currents transmitted to each coil by the current control device 1 based on each magnetic induction strength includes the following steps: In step S21, the power supply 11 modulates the current output to the multi-output matching module 13 based on each magnetic induction strength. The power supply 11 obtains the sum of each magnetic induction strength, modulates it to a current of a magnitude corresponding to the sum of each magnetic induction strength, and transmits this current to the multi-output matching module 13.

[0036] In step S31, the multi-output matching module 13 adjusts the ratio of currents transmitted to each coil based on the magnetic induction strength, and divides the current transmitted by the power supply 11 according to this ratio, outputting it to each coil. The multi-output matching module 13 processes the ratio of currents to be output to each coil based on the difference in magnetic induction strength, and divides the current transmitted by the power supply 11 according to this ratio, transmitting the corresponding divided currents to the corresponding coils. The number of divided currents is equal to the number of coils.

[0037] In another example, as shown in Figure 2, the current control device 1 includes a power supply 11 and at least two multi-output matching modules 13. In this example, the sum of the number of output terminals connected to the energy radiator 2 of each multi-output matching module 13 is equal to the number of coils in the energy radiator 2, and the output terminals of the multi-output matching modules 13 are connected in a one-to-one correspondence with the coils in the energy radiator 2.

[0038] In this example, the step of adjusting the ratio of currents transmitted to each coil by the current control device 1 based on each magnetic induction strength includes the following steps: In step S31, the power supply 11 adjusts the ratio of the currents output to each multi-output matching module 13 based on each magnetic induction strength. The power supply 11 obtains the sum of the magnetic induction strengths and modulates it to a total current of a magnitude corresponding to the sum of the magnetic induction strengths. The power supply 11 obtains the sum of the magnetic induction strengths of the coils connected to each multi-output matching module 13 individually, obtains the ratio of the currents output to each multi-output matching module 13 based on the sum of the magnetic induction strengths corresponding to each multi-output matching module 13, divides the total current based on this ratio, and transmits the divided currents to the corresponding multi-output matching modules 13. The number of divided currents is equal to the number of multi-output matching modules 13.

[0039] In step S33, each multi-output matching module 13 adjusts the ratio of the currents transmitted to each coil connected to it based on the magnetic induction strength of the coils connected to it, divides the current transmitted by the power supply 11 according to the ratio, and outputs it to the coils connected to it. Each multi-output matching module 13 obtains the ratio of the currents output to each coil connected to it based on the magnetic induction strength of each coil connected to it, divides the corresponding input current according to the ratio, and outputs the divided current to the corresponding coil.

[0040] In order to enable the multi-output matching module 13 to adjust the ratio between output currents, in one example, the multi-output matching module 13 includes a variable capacitor. The variable capacitor is a capacitance that can be changed under controlled conditions.

[0041] In the step where the multi-output matching module 13 adjusts the ratio between each current, the multi-output matching module 13 adjusts the ratio between each output current by changing the capacitance value of the variable capacitor.

[0042] To ensure that the trailing end of the circuit receives a sufficiently large current, in one example, the current control device 1 further includes a power amplification module 15, as shown in Figure 7. The power amplification module 15 is used to amplify the current.

[0043] In the step where the power supply 11 adjusts the current it outputs to the multi-output matching module 13 based on each magnetic induction strength, the power supply 11 adjusts the current it outputs to the power amplification module 15 based on each magnetic induction strength, and the power amplification module 15 adjusts the current transmitted by the power supply 11 and transmits it to the multi-output matching module 13.

[0044] To understand the principle of the current control device 1 of this application in more detail, the current control device 1 shown in Figure 7 will be used as an example for explanation below.

[0045] The first output terminal of power supply 11 is connected to power amplification module 1, and the second output terminal is connected to power amplification module 2. Based on the sum of the magnetic induction strengths of coil 1 and coil 2 connected to dual output matching module 1, and the sum of the magnetic induction strengths of coil 1 and coil 2 connected to dual output matching module 2, the current I at the first output terminal of power supply 11 is determined. ps1 and the current I at the second output terminal ps2 Current ratio I ps1 / I ps2 The current ratio is adjusted, and based on this ratio, the total current output by the power supply 11 is divided and output to power amplification module 1 and power amplification module 2, respectively.

[0046] Power amplification module 1 controls current I ps1 The current I1 is amplified and output, and its output terminal is connected to the input terminal of dual output matching module 1, and power amplification module 2 amplifies the current I ps2 The current I2 is amplified and output, and its output terminal is connected to the input terminal of the dual output matching module 2.

[0047] The dual-output integration module 1 shunts the current I1 output by the power amplification module 1 based on the magnetic induction intensity of coil 1 and the magnetic induction intensity of coil 2. The first output terminal of the power amplification module 1 is connected to coil 1, and the second output terminal is connected to coil 2. The current flowing into coil 1 is I u1 , and the current flowing into coil 2 is I u2 . Let I1 = I u1 + I u2 . The dual-output integration module 2 shunts the current I2 output by the power amplification module 2 based on the magnetic induction intensity of coil 3 and the magnetic induction intensity of coil 4. The first output terminal of the power amplification module 2 is connected to coil 3, and the second output terminal is connected to coil 4. The current flowing into coil 1 is I d1 , and the current flowing into coil 2 is I d2 . Let I2 = I d1 + I d2 .

[0048] The above dual-output integration module 1 includes four capacitors C u0 , C u1 , C u2 , and C u3 . C u1 , C u2 , C u3 are variable capacitors. By adjusting the variable capacitors C u1 , C u2 , C u3 , the current ratio I u1 at the first output terminal of the dual-output integration module 1 and the current I u2 at the second output terminal of the dual-output integration module 1, i.e., I u1 / I u2 can be adjusted.

[0049] The above dual-output integration module 2 includes four capacitors C d0 , C d1 , C d2 , and C d3 . C d1 , C d2 , C d3 are variable capacitors. C d1 , Cd2 , C d3 By adjusting the current I at the first output terminal of the dual output matching module 2, d1 and the current I at the second output terminal of the dual output matching module 2 d2 Current ratio I d1 / I d2 It can be adjusted.

[0050] The above coil module includes coil 1, coil 2, coil 3, and coil 4, and coil 1 is connected to the first output terminal of the dual output matching module 1, and the current flowing through coil 1 is I u1 Coil 2 is connected to the second output terminal of the dual output matching module 1, and the current flowing through coil 2 is I u2 Coil 3 is connected to the first output terminal of the dual output matching module 2, and the current flowing through coil 3 is I d1 Coil 4 is connected to the second output terminal of the dual output matching module 2, and the current flowing through coil 4 is I u2 That is the case.

[0051] The current control device 1 of the energy radiation device 2 of the present invention includes a power supply 11 and at least one multi-output matching module 13, the power supply 11 being connected to the multi-output matching module 13, and each output terminal of the multi-output matching module 13 being connected in a one-to-one correspondence to each coil of the energy radiation device 2. In undesirable conditions, there may be performance differences in each coil due to the manufacturing process, and each coil may generate a different magnetic induction intensity with the same current. The current control device 1 of the present invention adjusts the ratio of the currents output to each coil based on the difference in magnetic induction intensity of each coil, thereby adjusting the current to equalize the magnetic induction intensity generated by each coil, and further improves the output accuracy of the structure of the multi-coil energy radiation device 2.

[0052] In one embodiment, a plasma source mechanism is provided that includes an energy radiator 2 and a current control device 1. The energy radiator 2 includes at least two coils, for example, two, three, four...N coils. A power supply 11 in the current control device 1 is connected to each coil via a multi-output matching module 13. The current control device 1 is used to equalize the magnetic induction strength generated by each coil with the adjusted current by obtaining the magnetic induction strength generated by each coil of the energy radiator 2 with the same current and adjusting the ratio of the currents transmitted to each coil based on each magnetic induction strength.

[0053] Based on the number of output ports of the multi-output matching module 13, there are two cases: In the first case, as shown in Figure 1, the current control device 1 includes a power supply 11 and one multi-output matching module 13, the power supply 11 is connected to the multi-output matching module 13, and each multi-output matching module 13 is connected to a coil. The number of output terminals of the multi-output matching module 13 is exactly the same as the number of coils. In the second case, as shown in Figure 2, the current control device 1 includes a power supply 11 and at least two multi-output matching modules 13, the power supply 11 is connected to each multi-output matching module 13, and each multi-output matching module 13 is connected to a corresponding number of coils. Each multi-output matching module 13 includes at least two output terminals, and the sum of the output terminals of each multi-output matching module 13 is equal to the number of coils. In one example, the multi-output matching module 13 is a dual output matching module, i.e., it includes two output terminals. Taking the example that the energy radiation device 2 includes four coils, the current control device 1 includes two multi-output matching modules 13, each multi-output matching module 13 connected to two coils, i.e., in this example, the multi-output matching modules 13 are dual-output matching modules. Furthermore, in this example, the winding directions of the two coils connected to the multi-output matching modules 13 are opposite; in other words, of the two coils connected to one multi-output matching module 13, one coil is wound clockwise and the other coil is wound counterclockwise.

[0054] In one example, as shown in Figure 8, the dual output matching module includes a capacitor C0, a variable capacitor C1, a variable capacitor C2, and a variable capacitor C3. One end of capacitor C0 is connected to one end of variable capacitor C1, and the other end is connected to one end of variable capacitor C2. One end of variable capacitor C3 is connected to the other end of variable capacitor C1, and the other end of variable capacitor C3 is connected to the other end of variable capacitor C2. By adjusting the capacitance values ​​of variable capacitors C1, C2, and C3, the ratio of the current output by the two output terminals of the dual output matching module can be changed.

[0055] To ensure that the trailing end of the circuit receives a sufficiently large current, the current control device 1 further includes a power amplification module 15, and the power supply 11 is connected to the multi-output matching module 13 via the power amplification module 15.

[0056] To directly detect magnetic induction intensity, the plasma source mechanism of the present invention further includes magnetic induction intensity detectors, wherein the number of magnetic induction intensity detectors is equal to the number of coils, and the magnetic induction intensity detectors and coils are provided in a one-to-one correspondence, and the magnetic induction intensity detectors are connected to a current control device 1. The magnetic induction intensity detectors detect the magnetic induction intensity of the corresponding coils and transmit the magnetic induction intensity to the current control device 1.

[0057] To further understand the structure of the plasma source mechanism of this application, a specific embodiment is provided and explained as shown in Figure 7.

[0058] The plasma source mechanism includes a power supply 11, an energy radiator 2, a power amplification module 1, a power amplification module 2, a dual output matching module 1, and a dual output matching module 2. The energy radiator 2 includes coils 1, 2, 3, and 4. Power supply 11 is connected to power amplification module 1 and power amplification module 2, respectively. Power amplification module 1 is connected to coils 1 and 2, respectively. Power amplification module 2 is connected to coils 3 and 4, respectively.

[0059] Power supply 11 adjusts the current ratio between the current output to power amplification module 1 and the current output to power amplification module 2 based on the sum of the magnetic induction strengths of coil 1 and coil 2, and the sum of the magnetic induction strengths of coil 3 and coil 4. Dual output matching module 1 adjusts the current ratio between the current output to coil 1 and the current output to coil 2 based on the magnetic induction strengths of coil 1 and coil 2. Dual output matching module 2 adjusts the current ratio between the current output to coil 3 and the current output to coil 4 based on the magnetic induction strengths of coil 3 and coil 4.

[0060] In the plasma source mechanism of the present invention, the magnetic induction strength generated by each coil is adjusted by adjusting the current, thereby improving the output accuracy and stability of the radio frequency power supply. To realize this function, the cooperative adjustment of the multi-output matching module 13 and the power supply 11 is necessary, and the principle is as follows: By adjusting the adjustable capacitance C in the multi-output matching module 13, the multiple current outputs of the multi-output matching module 13 are changed, thereby making the magnetic induction strength generated by each coil connected to the dual-output matching module the same. The power supply 11 adjusts the ratio of the two currents at its output terminals, thereby further adjusting the ratio of the currents at each input terminal of the dual-output matching module, and thus making the magnetic induction strength of coils connected to different dual-output matching modules the same.

[0061] Referring to Figures 9 to 19, in some other embodiments, the plasma source mechanism is for emitting radio waves, and the radio frequency energy radiation unit 25 of the plasma source mechanism includes at least two coils, and due to differences in the manufacturing process, there are differences in the performance of each coil, and when the same current is passed through, there are differences in the magnetic induction strength generated by each coil, so the output accuracy of the radio frequency energy radiation unit 25 is not high. To solve this problem, in one embodiment, as shown in Figure 9, a current control method for the radio frequency energy radiation unit 25 is provided, and the current control method includes the following steps.

[0062] In step S1, the current control device supplies high-frequency power to each coil of the radio frequency energy radiation unit 25.

[0063] The current control device can generate high-frequency power and transmit it to each coil in the radio frequency energy radiation unit 25 so that the coils radiate an electromagnetic field with high-frequency power.

[0064] In step S3, the current control device supplies high-frequency power to each coil of the radio frequency energy radiation unit 25.

[0065] The current control device adjusts at least one of the following power parameters between the high-frequency powers transmitted to each coil, and includes the steps of adjusting the ratio of the currents in each coil and adjusting the phase angle of the currents in each coil. The current control device equalizes the magnetic induction strength generated by each coil with the adjusted current by adjusting the ratio or phase angle of the currents transmitted to each coil.

[0066] There are several methods for adjusting the ratio of current in each coil.

[0067] In one example, the current control device includes a power supply 21 and a multi-output matching module 13. In this example, in the step of adjusting the ratio of currents to each coil, the power supply 21 outputs current to the multi-output matching module 13, the multi-output matching module 13 adjusts the ratio of currents transmitted to each coil, and according to the ratio, divides the current transmitted by the power supply and outputs it corresponding to each coil. The number of multi-output matching modules 13 is determined according to the actual demand, and is, for example, multiple. If there are multiple multi-output matching modules 13, the power supply can provide each multi-output matching module 13 with the same ratio of current, or it can provide each multi-output matching module 13 with different ratios of current. That is, the power supply can adjust the ratio of currents it outputs to the multi-output matching modules 13 connected to it.

[0068] In one example, the current control device includes a power supply and a multi-output matching module 13. In this example, in the step of adjusting the ratio of currents in each coil, the master power supply 111 controls at least one slave power supply 113 to output power to each multi-output matching module 13, and the current transmitted by each multi-output matching module 13 to each coil satisfies the current ratio. In this example, the power supply includes a master power supply 111 and slave power supplies 113, with the master power supply 111 connected only to the slave power supplies 113. The master power supply 111 is used to control the slave power supplies 113, and if there are multiple slave power supplies 113, the master power supply 111 can control the ratio of currents output by each slave power supply 113. The multi-output matching module 13 divides the current input by the slave power supplies 113 and transmits it to each coil connected to it according to the current ratio.

[0069] In one example, the current control device includes a power supply and a multi-output matching module 13. The power supply includes a master power supply 111 and a slave power supply 113. The multi-output matching module 13 includes a first multi-output matching module 13 connected to the master power supply 111 and a second multi-output matching module 13 connected to the slave power supply 113.

[0070] In the step of adjusting the ratio of currents in each coil, the master power supply 111 outputs power to the first multi-output matching module 13, and the master power supply controls the slave power supply 113 to output power to the second multi-output matching module 13, so that the currents transmitted to each coil via the first multi-output matching module 13 and the second multi-output matching module 13 satisfy the current ratio. In this example, the master power supply 111 is not only used for control but is also directly connected to the multi-output matching module 13 to supply power to the multi-output matching module 13.

[0071] If both the power supply and the multi-output matching module 13 are multiple, the power supplies are connected to the multi-output matching module 13 in a one-to-one, one-to-many, or two-to-one configuration, and each power supply provides the multi-output matching module 13 to which it is connected with the same or different ratios of current.

[0072] Furthermore, the current control device can not only radiate high-frequency power, but can also adjust the power parameters of the high-frequency power output to each coil. Specifically, these power parameters include the ratio of currents and the phase angle of the currents.

[0073] In order to adjust the magnetic induction strength generated by each coil, one example further includes the following steps prior to the step of adjusting at least one of the following power parameters among the high-frequency powers transmitted to each coil. The current control device acquires the magnetic induction strength generated by the current flowing through each coil. In one example, the current control device acquires the magnetic induction strength generated by each coil when the current ratio is the same.

[0074] The current control device adjusts the ratio of currents transmitted to each coil and the phase angle of the currents based on the magnetic induction strength of each coil.

[0075] In one example, the current control method includes the following steps: In step S5, the current control device obtains the magnetic induction strength generated by each coil of the radio frequency energy radiation unit 25 with the same current.

[0076] By using a magnetic induction strength detector, the magnetic induction strength generated by each coil with the same current can be detected. In one example, the magnetic induction strength generated by each coil with the same current can be detected in advance and stored in the current control device. When it is necessary to control the radio frequency energy radiation unit 25 to generate radio waves, the current control device retrieves the stored magnetic induction strength. Furthermore, the current control device can simultaneously store the magnetic induction strength of each coil of multiple different radio frequency energy radiation units 25. In another example, the current control device can detect the magnetic induction strength in real time using the magnetic induction strength detector and dynamically adjust the current output to the coils based on the magnetic induction strength acquired in real time. The current control device is used to transmit current to each coil and to adjust the ratio of the currents transmitted to each coil.

[0077] In step S6, the current control device equalizes the magnetic induction strength generated by each coil with the adjusted current by adjusting the ratio of the currents transmitted to each coil based on the magnetic induction strength of each coil.

[0078] The current control device modulates the total current to a magnitude corresponding to the sum of the magnetic induction strengths of each coil, based on the stored magnetic induction strength of each coil or the magnetic induction strength acquired in real time. Based on each magnetic induction strength, it obtains the ratio of the currents output to each coil, and according to this ratio, it divides the total current into sub-currents transmitted to each coil, transmitting the corresponding sub-currents to the corresponding coils.

[0079] In one example, as shown in Figure 10, the current control device includes a power supply and one multi-output matching module 13. In this example, the number of output terminals of the multi-output matching module 13 is equal to the number of coils in the radio frequency energy radiation unit 25, and the output terminals of the multi-output matching module 13 are connected to the coils in the radio frequency energy radiation unit 25 in a one-to-one correspondence. The multi-output matching module 13 includes at least two output terminals.

[0080] In this example, the step of adjusting the ratio of currents transmitted to each coil based on the magnetic induction strength of the current control device includes the following steps: In step S21, the power supply modulates the current output to the multi-output matching module 13 based on each magnetic induction strength. The power supply obtains the sum of each magnetic induction strength, modulates it to a current of a magnitude corresponding to the sum of each magnetic induction strength, and transmits this current to the multi-output matching module 13.

[0081] In step S23, the multi-output matching module 13 adjusts the ratio of currents transmitted to each coil based on each magnetic induction strength, and divides the current transmitted by the power supply according to this ratio, outputting it to each coil. The multi-output matching module 13 processes the ratio of currents to be output to each coil based on the difference in each magnetic induction strength, and divides the current transmitted by the power supply according to this ratio, transmitting the corresponding divided currents to the corresponding coils. The number of divided currents is equal to the number of coils.

[0082] In another example, as shown in Figure 11, the current control device includes a power supply and at least two multi-output matching modules 13. In this example, the sum of the number of output terminals connected to the radio frequency energy radiation unit 25 of each multi-output matching module 13 is equal to the number of coils in the radio frequency energy radiation unit 25, and the output terminals of the multi-output matching modules 13 are connected in a one-to-one correspondence with the coils in the radio frequency energy radiation unit 25.

[0083] In this example, the step of adjusting the ratio of currents transmitted to each coil based on the magnetic induction strength of the current control device includes the following steps:

[0084] In step S31, the power supply adjusts the ratio of the currents output to each multi-output matching module 13 based on each magnetic induction strength (first current division in Figures 12 and 13). The power supply obtains the sum of each magnetic induction strength and modulates it to a total current of a magnitude corresponding to the sum of each magnetic induction strength. The power supply obtains the sum of the magnetic induction strengths of the coils connected to each multi-output matching module 13 individually, obtains the ratio of the currents output to each multi-output matching module 13 based on the sum of magnetic induction strengths corresponding to each multi-output matching module 13, divides the total current based on this ratio, and transmits the divided currents to the corresponding multi-output matching modules 13. The number of divided currents is equal to the number of multi-output matching modules 13.

[0085] In step S33, each multi-output matching module 13 adjusts the ratio of the currents transmitted to each coil connected to it based on the magnetic induction strength of the coils connected to it (second current division in Figures 12 and 13), divides the current transmitted by the power supply according to this ratio, and outputs it to the coils connected to it. Each multi-output matching module 13 obtains the ratio of the currents output to each coil connected to it based on the magnetic induction strength of each coil connected to it, divides the corresponding input current according to this ratio, and outputs the divided current to the corresponding coil. Note that the first current division in step S31 and the second current division in step S33 may be used independently or in combination.

[0086] In yet another example, as shown in Figure 14, the current control device includes a master power supply 111, at least one slave power supply 113, and at least one multi-output matching module 13, where the master power supply 111 is connected to each slave power supply 113, and each slave power supply 113 is connected to the corresponding multi-output matching module 13. In this example, the master power supply 111 is used to control the slave power supplies 113, and the slave power supplies 113 directly transmit current to the multi-output matching modules 13. The number of slave power supplies 113 can be determined according to the actual demand and the number of multi-output matching modules 13. In one example, the slave power supplies 113 may be connected to one multi-output matching module 13, or to two or more multi-output matching modules 13. The number of multi-output matching modules 13 connected to the slave power supplies 113 may be equal or not.

[0087] In this example, in the step of adjusting the ratio of currents output to each multi-output matching module 13 based on each magnetic induction strength, the master power supply 111 controls each slave power supply 113 to adjust the ratio of currents output to each multi-output matching module 13 based on each magnetic induction strength (as shown in Figure 13). The master power supply 111 obtains the sum of each magnetic induction strength and modulates it to a total current of a magnitude corresponding to the sum of each magnetic induction strength. The power supply obtains the sum of the magnetic induction strengths of the coils connected to each slave power supply 113 individually, obtains the ratio of currents output to each slave power supply 113 based on the sum of magnetic induction strengths corresponding to each slave power supply 113, divides the total current based on this ratio, and transmits the divided current to the corresponding slave power supply 113. The number of divided currents is equal to the number of slave power supplies 113. In one example, the slave power supply 113 is connected to at least two multi-output matching modules 13. The sum of the magnetic induction strengths of the coils connected to each multi-output matching module 13 connected to the slave power supply 113 is obtained individually. Based on the sum of magnetic induction strengths corresponding to each multi-output matching module 13, the ratio of the currents output to each multi-output matching module 13 connected to the slave power supply 113 is obtained. Based on this ratio, the current of the slave power supply 113 transmitted to the master power supply 111 is divided, and the divided current is transmitted to the corresponding multi-output matching modules 13. The number of divided currents is equal to the number of multi-output matching modules 13 connected to the slave power supply 113.

[0088] Furthermore, equalizing the magnetic induction intensity generated by each coil with the adjusted current means controlling the magnetic induction intensity generated by each coil to be approximately equal, perfectly equal, or within a certain range.

[0089] In one embodiment, the current control device includes a phase-shift controlled power supply and a multi-output matching module 13. In the step of adjusting the phase angle of the current in each coil, a phase-shift control power supply modulates the phase angle of the current output to the multi-output matching module 13. In this example, the number of multi-output matching modules 13 is single and has two or more input terminals, each input terminal corresponding to the output terminal of a different multi-output matching module 13, and the two input terminals obtain currents of the same or different phase angles from the power supply. In one example, the phase-shift control power supply includes a master power supply 111 and at least one slave power supply 113, each connected to and supplying current to the input terminal of the multi-output matching module 13, and the master power supply 111 controls the phase angle at which each slave power supply 113 outputs current. In another example, the phase-shift control power supply includes a controller and at least one slave power supply 113, each connected to and supplying current to the input terminal of the multi-output matching module 13, and the controller adjusts the phase angle at which at least one slave power supply 113 outputs current. In yet another example, a phase-shift controlled power supply includes a controller and multiple slave power supplies 113, each connected to a multi-output matching module 13, and the controller controls the multiple power supplies to provide currents with the same or different phase angles. There are multiple multi-output matching modules 13, which obtain currents with the same or different phase angles from the power supplies. Note that currents with the same or different phase angles are provided by the same or different power supplies.

[0090] There are several methods for adjusting the phase angle of the current in each coil.

[0091] In one example, the power supply includes a master power supply 111 and slave power supplies 113, the master power supply 111 being used to control the slave power supplies 113 to adjust the phase angle of the current. In the step of adjusting the phase angle of the current of each coil, the master power supply 111 controls the phase angle of the current that at least one slave power supply 113 outputs to each multi-output matching module 13.

[0092] In one example, the power supply includes a master power supply 111 and a slave power supply 113, where the master power supply 111 is used not only to control the slave power supply 113 to adjust the phase angle of the current, but is also directly connected to a multi-output matching module 13 to input currents with different phase angles (shown in Figure 15). In this example, the multi-output matching module 13 includes a first multi-output matching module 13 connected to the master power supply 111, and a second multi-output matching module 13 connected to the slave power supply 113. In the step of adjusting the phase angle of the current in each coil, the master power supply 111 outputs a first current to the first multi-output matching module 13, and the master power supply controls the slave power supply 113 to output a second current to the second multi-output matching module 13, where the phase angles of the second current and the first current are the same or different.

[0093] In one example, a single control device can be connected to the power supply, and this control device can control the power supply to adjust the phase angle of the current output to each multi-output matching module 13. In one embodiment, as shown in Figure 16, a current control method for a radio frequency energy radiation unit 25 is provided, the current control method comprising the following steps: In step S51, the current control device acquires the magnetic induction strength generated by each coil of the radio frequency energy radiation unit 25 with the same current. Step S51 is the same as step S1 in the previously described embodiment and will not be explained further here.

[0094] In step S53, the current control device adjusts the ratio of the currents transmitted to each coil and the phase angle of the currents transmitted to each coil based on the magnetic induction strength of each coil, thereby equalizing the magnetic induction strength generated by each coil with the adjusted current.

[0095] Furthermore, within one cycle of alternating current, the current value changes with the change in phase angle, and consequently, the magnetic induction strength generated by the coil changes with time. In this invention, the current transmitted to each coil is determined by dividing a single total current according to a ratio, and the waveform of the current transmitted to each coil is the same. Changing the phase angle difference of the current transmitted to each coil may result in the current values ​​corresponding to different phase angles not being equal. Therefore, the instantaneous magnetic induction strength generated by each coil can be adjusted. For example, if the magnetic induction strength generated by one coil is large compared to other coils at a certain moment, and the subsequent current is to be small, the phase angle can be adjusted forward or backward based on the waveform characteristics of the current. Alternatively, if the magnetic induction strength generated by one coil is small compared to other coils at a certain moment, and the subsequent current is to be large, the phase angle can be adjusted forward or backward based on the waveform characteristics of the current.

[0096] In this embodiment, the control for homogenizing the magnetic induction strength of the coils is further enhanced by a combination of controlling the ratio of currents and controlling the phase angle of currents. For example, the control of the ratio of currents may be the primary control, with the control of the phase angle of currents being used as a secondary adjustment. Specifically, the current control device adjusts the ratio of currents transmitted to each coil based on each magnetic induction strength, and adjusts the phase angle of the currents transmitted to each coil based on each magnetic induction strength and ratio. Alternatively, the control of the phase angle of currents may be the primary control, with the control of the ratio of currents being used as a secondary adjustment. Specifically, the current control device adjusts the phase angle of the currents transmitted to each coil based on each magnetic induction strength, and adjusts the ratio of currents transmitted to each coil based on each magnetic induction strength and phase angle. Of course, the control of the ratio of currents and the control of the phase angle of currents may be at the same level. Specifically, the current control device simultaneously adjusts the phase angle of the currents transmitted to each coil and the ratio of currents transmitted to each coil based on each magnetic induction strength.

[0097] In one example, the current control device includes a phase-shift control power supply and one multi-output matching module 13. In this example, the number of output terminals of the multi-output matching module 13 is equal to the number of coils in the radio frequency energy radiation unit 25, and the output terminals of the multi-output matching module 13 are connected in a one-to-one correspondence to the coils in the radio frequency energy radiation unit 25. The multi-output matching module 13 includes at least two output terminals. The phase-shift control power supply can modulate the current and adjust the phase angle of the current.

[0098] In this example, in the step where the current control device adjusts the phase angle of the current transmitted to each coil based on each magnetic induction strength, the phase shift control power supply modulates the phase angle of the current output to the multi-output matching module 13 based on each magnetic induction strength. The phase shift control power supply initially adjusts the sum of the magnetic induction strengths of the coils connected to each multi-output matching module 13 by adjusting the phase angle of the current in each multi-output matching module 13 based on each magnetic induction strength.

[0099] In this example, the step of the current control device adjusting the ratio of currents transmitted to each coil based on each magnetic induction strength includes the step of modulating the current output to the multi-output matching module 13 by the phase-shift control power supply based on each magnetic induction strength, and the step of the multi-output matching module 13 adjusting the ratio of currents transmitted to each coil based on each magnetic induction strength, and dividing the current transmitted by the phase-shift control power supply according to the ratio and outputting it in accordance with each coil.

[0100] The phase-shift control power supply obtains the sum of the magnetic induction intensities, modulates it to a current of a magnitude corresponding to the sum of the magnetic induction intensities, and transmits this current to the multi-output matching module 13. The multi-output matching module 13 processes the difference in the magnetic induction intensities into a ratio of currents to be output to each coil, and then, according to this ratio, divides the current transmitted by the phase-shift control power supply and transmits the corresponding divided currents to the corresponding coils. The number of divided currents is equal to the number of coils.

[0101] In another example, the current control device includes a phase-shift control power supply and at least two multi-output matching modules 13. In this example, the sum of the number of output terminals connected to the radio frequency energy radiation unit 25 of each multi-output matching module 13 is equal to the number of coils in the radio frequency energy radiation unit 25, and the output terminals of the multi-output matching modules 13 are connected in a one-to-one correspondence with the coils in the radio frequency energy radiation unit 25. The phase-shift control power supply can modulate the current and adjust the phase angle of the current.

[0102] In this example, in the step where the current control device adjusts the phase angle of the current transmitted to each coil based on each magnetic induction strength, the phase shift control power supply modulates the phase angle of the current output to each multi-output matching module 13 based on each magnetic induction strength. The phase shift control power supply obtains the sum of the magnetic induction strengths of the coils connected to each multi-output matching module 13 individually, and adjusts the phase angle of the current transmitted to each multi-output matching module 13 based on the difference between the sums of magnetic induction strengths corresponding to each multi-output matching module 13.

[0103] In this example, in the step where the current control device adjusts the ratio of currents transmitted to each coil based on the magnetic induction strength, the phase shift control power supply adjusts the ratio of currents output to each multi-output matching module 13 based on the magnetic induction strength, and the multi-output matching module 13 adjusts the ratio of currents transmitted to each coil connected to the multi-output matching module 13 based on the magnetic induction strength of the coils connected to the multi-output matching module 13, and according to the ratio, divides the current transmitted by the phase shift control power supply and outputs it in accordance with the coils connected to the multi-output matching module 13.

[0104] The phase-shift control power supply obtains the sum of each magnetic induction strength and modulates it to a total current of a magnitude corresponding to the sum of each magnetic induction strength. The phase-shift control power supply obtains the sum of the magnetic induction strengths of the coils connected to each multi-output matching module 13 individually, obtains the ratio of the currents output to each multi-output matching module 13 based on the sum of magnetic induction strengths corresponding to each multi-output matching module 13, divides the total current based on this ratio, and transmits the divided currents to the corresponding multi-output matching modules 13. The number of divisions and the number of multi-output matching modules 13 are equal. Each multi-output matching module 13 obtains the ratio of the currents output to each coil connected to it based on the magnetic induction strength of each coil connected to it, divides the corresponding input current according to this ratio, and outputs the divided currents to the corresponding coils.

[0105] In yet another example, the current control device includes a phase-shift control power supply, at least one slave power supply 113, and at least one multi-output matching module 13, wherein the phase-shift control power supply is connected to each slave power supply 113, and each slave power supply 113 is connected to the corresponding multi-output matching module 13. In this example, there are two types of power supplies, one of which is a master power supply 111 that can control the slave power supplies 113, modulate the current, and shunt the current, and the other is a slave power supply 113 that can adjust the phase angle of the current and shunt the current. The number of slave power supplies 113 is determined according to the actual demand and the number of multi-output matching modules 13. In one example, the slave power supplies 113 may be connected to one multi-output matching module 13, or to two or more multi-output matching modules 13. The number of multi-output matching modules 13 connected to the slave power supplies 113 may be equal or not.

[0106] In this example, in the step where the current control device adjusts the phase angle of the current transmitted to each coil based on the magnetic induction strength, the master power supply 111 controls each slave power supply 113 to adjust the phase angle of the current transmitted to the corresponding multi-output matching module 13 based on the magnetic induction strength. The phase shift control power supply independently obtains the sum of the magnetic induction strengths of the coils connected to each multi-output matching module 13, and controls the slave power supply 113 to adjust the phase angle of the current transmitted to each multi-output matching module 13 based on the difference between the sums of magnetic induction strengths corresponding to each multi-output matching module 13.

[0107] In this example, in the step where the current control device adjusts the ratio of currents output to each multi-output matching module 13 based on each magnetic induction strength, the master power supply 111 controls each slave power supply 113 to adjust the ratio of currents output to each multi-output matching module 13 based on each magnetic induction strength. The master power supply 111 obtains the sum of each magnetic induction strength and modulates it to a total current of a magnitude corresponding to the sum of each magnetic induction strength. The power supply obtains the sum of the magnetic induction strengths of the coils connected to each slave power supply 113 individually, obtains the ratio of currents output to each slave power supply 113 based on the sum of magnetic induction strengths corresponding to each slave power supply 113, divides the total current based on the ratio, and transmits the divided currents to the corresponding slave power supplies 113. The number of divided currents is equal to the number of slave power supplies 113. In one example, the slave power supply 113 is connected to at least two multi-output matching modules 13. The sum of the magnetic induction strengths of the coils connected to each multi-output matching module 13 connected to the slave power supply 113 is obtained individually. Based on the sum of magnetic induction strengths corresponding to each multi-output matching module 13, the ratio of the currents output to each multi-output matching module 13 connected to the slave power supply 113 is obtained. Based on this ratio, the current of the slave power supply 113 transmitted to the master power supply 111 is divided, and the divided current is transmitted to the corresponding multi-output matching modules 13. The number of divided currents is equal to the number of multi-output matching modules 13 connected to the slave power supply 113.

[0108] In order to enable the multi-output matching module 13 to adjust the ratio between output currents, in one example, the multi-output matching module 13 includes a variable capacitor. The variable capacitor is a capacitance that can be changed under controlled conditions.

[0109] In the step where the multi-output matching module 13 adjusts the ratio between each current, the multi-output matching module 13 adjusts the ratio between each output current by changing the capacitance value of the variable capacitor.

[0110] To ensure that the trailing end of the circuit receives a sufficiently large current, in one example, the current control device further includes a power amplification module 15, as shown in Figure 17. The power amplification module 15 is used to amplify the current.

[0111] In the step where the phase-shift control power supply 21 adjusts the current output to the multi-output matching module 13 based on each magnetic induction strength, the phase-shift control power supply 21 adjusts the current output to the power amplification module 15 based on each magnetic induction strength, and the power amplification module 15 adjusts the current transmitted by the phase-shift control power supply 21 and transmits it to the multi-output matching module 13.

[0112] To understand the principle of the current control method of this invention in more detail, the current control system shown in Figure 18 will be explained below as an example.

[0113] The first output terminal of the phase-shift control power supply 21 is connected to the power amplification module 1, and the second output terminal is connected to the power amplification module 2. Based on the sum of the magnetic induction strengths of coil 1 and coil 2 connected to the dual output matching module 1, and the sum of the magnetic induction strengths of coil 1 and coil 2 connected to the dual output matching module 2, the current I at the first output terminal of the phase-shift control power supply 21 is controlled. ps1 and the current I at the second output terminal ps2 Current ratio I ps1 / I ps2The current ratio is adjusted, and based on this ratio, the total current output by the phase-shift control power supply 21 is divided and output to power amplification module 1 and power amplification module 2, respectively.

[0114] Power amplification module 1 controls current I ps1 The current I1 is amplified and output, and its output terminal is connected to the input terminal of dual output matching module 1, and power amplification module 2 amplifies the current I ps2 The current I2 is amplified and output, and its output terminal is connected to the input terminal of the dual output matching module 2.

[0115] The dual output matching module 1 divides the current I1 output by the power amplification module 1 based on the magnetic induction strength of coil 1 and coil 2. The first output terminal of the power amplification module 1 is connected to coil 1, and the second output terminal is connected to coil 2, and the current flowing into coil 1 is divided by I1. u1 The current flowing into coil 2 is I u2 Let I1 = I u1 +I u2 That is the case. The dual output matching module 2 divides the current I2 output by the power amplification module 2 based on the magnetic induction strength of coil 3 and coil 4. The first output terminal of the power amplification module 2 is connected to coil 3, and the second output terminal is connected to coil 4, and the current flowing into coil 1 is divided by I2. d1 The current flowing into coil 2 is I d2 Let I² = I d1 +I d2 That is the case.

[0116] The dual output matching module 1 described above has four capacitors C u0 , C u1 , C u2 , and C u3 Includes C u1 , C u2 , C u3 This is a variable capacitance, and the variable capacitance C u1 , C u2 , C u3By adjusting, the current I at the first output terminal of the dual-output matching module 1 u1 and the current I at the second output terminal of the dual-output matching module 1 u2 and the current ratio I u1 / I u2 can be adjusted.

[0117] The above dual-output matching module 2 includes four capacitors C d0 , C d1 , C d2 and C d3 , and C d1 , C d2 , C d3 are variable capacitors. By adjusting the variable capacitors C d1 , C d2 , C d3 the current ratio I d1 between the current I at the first output terminal of the dual-output matching module 2 and the current I d2 at the second output terminal of the dual-output matching module 2 d1 / I d2 can be adjusted.

[0118] The above coil module includes coil 1, coil 2, coil 3 and coil 4. Coil 1 is connected to the first output terminal of the dual-output matching module 1, and the current flowing through coil 1 is I u1 , coil 2 is connected to the second output terminal of the dual-output matching module 1, and the current flowing through coil 2 is I u2 , coil 3 is connected to the first output terminal of the dual-output matching module 2, and the current flowing through coil 3 is I d1 , coil 4 is connected to the second output terminal of the dual-output matching module 2, and the current flowing through coil 4 is I u2 .

[0119] As shown in FIG. 19, it is an equivalent circuit of the current control system shown in FIG. 18, and the ratio between currents is adjusted based on the following formula.

[0120] In an undesirable state,

Equation

[0121] In a favorable state, L1=L2=L, C1=C2=C,

number

[0122] The magnetic field generated by coil i is

number

[0123] In the current control method for the radio frequency energy radiation unit 25 of the present invention, after the current control device obtains the magnetic induction strength generated by each coil of the radio frequency energy radiation unit 25 with the same current, the current control device adjusts the ratio of currents transmitted to each coil based on each magnetic induction strength, outputs each of the adjusted currents corresponding to each coil, and equalizes the magnetic induction strength generated by each coil with the adjusted current. In undesirable conditions, there may be performance differences in each coil due to the manufacturing process, and the magnetic induction strength generated by each coil with the same current will differ. In the current control method of the present invention, by collecting the magnetic induction strength generated by each coil with the same current, the current control device adjusts the ratio of currents output to each coil based on the difference in each magnetic induction strength, and adjusts the current to equalize the magnetic induction strength generated by each coil, and further improves the output accuracy of the structure of the multi-coil radio frequency energy radiation unit 25.

[0124] In one embodiment, as shown in Figure 10-15, an energy radiation system is provided that includes a radio frequency energy radiation unit 25 and a current control device. The radio frequency energy radiation unit 25 includes at least two coils, for example, two, three, four...N coils. A current control device is connected to each coil. The current control device is used to equalize the magnetic induction strength generated by each coil with the adjusted current by obtaining the magnetic induction strength generated by each coil of the radio frequency energy radiation unit 25 with the same current and adjusting the ratio of the currents transmitted to each coil based on each magnetic induction strength. In one example, the current control device is further used to adjust the phase angle of the currents transmitted to each coil based on each magnetic induction strength. In another example, the current control device is further used to equalize the magnetic induction strength generated by each coil with the adjusted current by adjusting the ratio of the currents transmitted to each coil and adjusting the phase angle of the currents transmitted to each coil based on each magnetic induction strength. The current control device in the embodiment and the current control device in the current control method of the present application are the same, and details should be referred to in the respective embodiments of the current control method of the present application; no further explanation is provided here.

[0125] Based on the number of output ports of the multi-output matching module 13, there are two cases: In the first case, as shown in Figure 10, the current control device includes a phase-shift control power supply 21 and one multi-output matching module 13, the phase-shift control power supply 21 is connected to the multi-output matching module 13, and each multi-output matching module 13 is connected to a coil. The number of output terminals of the multi-output matching module 13 is exactly the same as the number of coils. In the second case, as shown in Figure 11, the current control device includes a phase-shift control power supply 21 and at least two multi-output matching modules 13, the phase-shift control power supply 21 is connected to each multi-output matching module 13, and each multi-output matching module 13 is connected to a corresponding number of coils. Each multi-output matching module 13 includes at least two output terminals, and the sum of the output terminals of each multi-output matching module 13 is equal to the number of coils. In one example, the multi-output matching module 13 is a dual output matching module, i.e., includes two output terminals.

[0126] In one example, as shown in Figure 8, the dual output matching module includes a capacitor C0, a variable capacitor C1, a variable capacitor C2, and a variable capacitor C3, where one end of capacitor C0 is connected to one end of variable capacitor C1 and the other end is connected to one end of variable capacitor C2, one end of variable capacitor C3 is connected to the other end of variable capacitor C1 and the other end of variable capacitor C3 is connected to the other end of variable capacitor C2. By adjusting the capacitance values ​​of variable capacitors C1, C2, and C3, the ratio of the current output by the two output terminals of the dual output matching module can be changed, and as shown in Figure 11, the current I is divided into I1 and I2 according to this ratio.

[0127] To ensure that the trailing end of the circuit receives a sufficiently large current, the current control device further includes a power amplification module 15, as shown in Figure 12, and the phase shift control power supply 21 is connected to the multi-output matching module 13 via the power amplification module 15.

[0128] To further understand the structure of the energy radiation system of this invention, a specific embodiment is provided and explained as shown in Figure 13.

[0129] The energy radiation system includes a phase-shift control power supply 21, a radio frequency energy radiation unit 25, a power amplification module 1, a power amplification module 2, a dual output matching module 1, and a dual output matching module 2. The radio frequency energy radiation unit 25 includes coils 1, 2, 3, and 4. The phase-shift control power supply 21 is connected to power amplification modules 1 and 2, respectively; power amplification module 1 is connected to coils 1 and 2, respectively; and power amplification module 2 is connected to coils 3 and 4, respectively.

[0130] The phase-shift control power supply 21 adjusts the current ratio between the current output to power amplification module 1 and the current output to power amplification module 2 based on the sum of the magnetic induction strengths of coil 1 and coil 2, and the sum of the magnetic induction strengths of coil 3 and coil 4. The dual output matching module 1 adjusts the current ratio between the current output to coil 1 and the current output to coil 2 based on the magnetic induction strengths of coil 1 and coil 2. The dual output matching module 2 adjusts the current ratio between the current output to coil 3 and the current output to coil 4 based on the magnetic induction strengths of coil 3 and coil 4.

[0131] In the energy radiation system of the present invention, the magnetic induction strength generated by each coil is adjusted by adjusting the current, thereby improving the output accuracy and stability of the radio frequency power supply. To realize this function, the cooperative adjustment of the multi-output matching module 13 and the phase-shift control power supply 21 is necessary, and the principle is as follows: By adjusting the adjustable capacitance C in the multi-output matching module 13, the multiple current outputs of the multi-output matching module 13 are changed, thereby making the magnetic induction strength generated by each coil connected to the dual-output matching module the same. The phase-shift control power supply 21 adjusts the ratio of the two currents at its output terminals, thereby further adjusting the ratio of the currents at each input terminal of the dual-output matching module, and thus making the magnetic induction strength of coils connected to different dual-output matching modules the same.

[0132] The technical features of the embodiments described above can be combined in any way for the sake of brevity, and not all possible combinations of the technical features in the embodiments described above have been described. However, as long as these combinations of technical features are inconsistent, they should be considered to fall within the scope described herein.

[0133] The embodiments described above represent only a few embodiments of the present application, and while their descriptions are more specific and detailed, they should not be understood as limiting the scope of the patent application. Those skilled in the art should point out that several modifications and improvements can be made without departing from the spirit of the present application, and these fall within the scope of protection. Therefore, the scope of protection of the present patent must be in accordance with the attached claims.

Claims

1. A method for controlling the current of a plasma source mechanism used in a radio frequency energy radiation unit of a plasma source mechanism, The steps include: providing high-frequency power to each coil of the radio frequency energy radiation unit using a current control device; The current control device adjusts at least one of the following power parameters between the high-frequency power transmitted to each of the coils, the step of adjusting the ratio of the currents in each of the coils, and the step of adjusting the phase angle of the currents in each of the coils, Before the step of adjusting at least one of the following power parameters between the high-frequency power transmitted to each of the coils, The current control device acquires the magnetic induction strength generated by the current flowing through each of the coils, A method for controlling the current of a plasma source mechanism, further comprising the step of adjusting the ratio between the currents transmitted to each coil and the phase angle of the currents based on the magnetic induction strength of each coil using the current control device.

2. The current control device is characterized in that it acquires the magnetic induction strength generated by each of the coils with the same ratio of current, as described in claim 1, for current control of a plasma source mechanism.

3. The current control device is characterized in that it adjusts the ratio of the currents transmitted to each of the coils to equalize the magnetic induction strength generated by each of the coils with the adjusted current, as described in claim 1.

4. The current control device includes a power supply and a multi-output matching module, In the step of adjusting the ratio of currents in each of the coils, The current control method for a plasma source mechanism according to claim 1, characterized in that the power supply outputs current to the multi-output matching module, the multi-output matching module adjusts the ratio of currents transmitted to each of the coils, and according to the ratio, the current transmitted by the power supply is divided and output to each of the coils.

5. The current control device includes a power supply and a multi-output matching module, In the step of adjusting the ratio of currents in each of the coils, The current control method for a plasma source mechanism according to claim 1, characterized in that a master power supply controls at least one slave power supply to output power to each of the multi-output matching modules, and the current transmitted by each of the multi-output matching modules to each of the coils satisfies the ratio of the currents.

6. In the step of adjusting the ratio of currents in each of the coils, The master power supply outputs power to the first multi-output matching module. The master power supply controls the slave power supply to output power to the second multi-output matching module. The current control method for a plasma source mechanism according to claim 1, characterized in that the current transmitted to each of the coils via the first multi-output matching module and the second multi-output matching module satisfies the ratio of the currents.

7. The current control device includes a master power supply, at least one slave power supply, and at least one multi-output matching module. The master power supply is connected to each of the slave power supplies, and each of the slave power supplies is connected to the corresponding multi-output matching module. In the step of adjusting the ratio of currents in each of the coils, The current control method for a plasma source mechanism according to claim 1, characterized in that the master power supply controls each of the slave power supplies to adjust the ratio of the currents output to each of the multi-output matching modules.

8. The current control device includes a phase-shift controlled power supply and a multi-output matching module. In the step of adjusting the phase angle of the current in each of the coils, The current control method for a plasma source mechanism according to claim 1, characterized in that the phase angle of the current output to the multi-output matching module is modulated by the phase-shift control power supply.

9. The current control device includes a power supply and a multi-output matching module, In the step of adjusting the phase angle of the current in each of the coils, The current control method for a plasma source mechanism according to claim 1, characterized in that a master power supply controls the phase angle of the current output by at least one slave power supply to each of the multi-output matching modules.

10. In the step of adjusting the phase angle of the current in each of the coils, The master power supply outputs the first current to the first multi-output matching module. The current control method for a plasma source mechanism according to claim 1, characterized in that the master power supply controls the slave power supply to output a second current to a second multi-output matching module, and the phase angles of the second current and the first current are the same or different.

11. The multi-output matching module includes a variable capacitor, In the step where the multi-output matching module adjusts the ratio between each current, The current control method for a plasma source mechanism according to any one of claims 4-5, 7-9, characterized in that the multi-output matching module adjusts the ratio between each output current by changing the capacitance value of the variable capacitor.

12. An energy radiation system, comprising a radio frequency energy radiation unit and a current control device, The radio frequency energy radiation unit includes at least two coils, and each of the current control devices is connected to each of the coils. The energy radiation system is characterized in that the current control device is used to realize the current control method for a plasma source mechanism described in any one of claims 1 to 10.

13. The energy radiation system according to claim 12, further characterized in that the current control device is used to adjust the phase angle of the current transmitted to each coil based on each of the magnetic induction strengths.

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