Printing equipment and printing methods

Abstract

A printing device according to the present invention is used which has a substrate table having a horizontal surface and supporting a target object, an arc table having a curved surface part, and a control unit, and which transfers ink to the target object due to the control unit being brought into contact with the target object by oscillating the arc table having the curved surface part that holds the ink opposite the substrate table. Furthermore, a printing method is used to include: an application step for applying ink to the arc table; a receiving step for contacting the ink on the art table with the printing plate on the printing plate table and receiving a portion of the ink onto the printing plate; and a transferring step for transferring the ink remaining on the arc table to the target object on the substrate table.

Description

[Technical Field]

[0001] The present invention relates to a printing apparatus and a printing method. In particular, it relates to a printing apparatus and a printing method that uses a transfer roller. [Background technology]

[0002] One printing method used involved using a transfer roller (Patent Documents 1 and 2). This allowed for the printing of various patterns without exposure or development. [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2010-253770 [Patent Document 2] Japanese Patent Publication No. 2013-22944 [Overview of the project] [Problems that the invention aims to solve]

[0004] However, the methods described in Patent Documents 1 and 2 resulted in significant variations in the rotational speed of the rolls and misalignment. Therefore, the object of this invention is to provide a printing apparatus and a printing method that use a transfer roller and exhibit small positional misalignment. [Means for solving the problem]

[0005] To solve the above problems, a printing apparatus is used which comprises a base material table having a flat surface and holding an object, an arc table having a curved surface, and a control unit, wherein the control unit oscillates the arc table, with the curved surface that holds the ink facing the base material table, to bring it into contact with the object, thereby transferring the ink to the object. Also, a printing method is used which includes an application step of applying ink to an arc table, a reception step of bringing the ink on the arc table into contact with a printing plate on a printing plate table and receiving a part of the ink onto the printing plate, and a transfer step of transferring the ink remaining on the arc table to an object on a substrate table.

Effect of the Invention

[0006] According to the printing apparatus of the present invention, a printing apparatus and a printing method with small misregistration can be realized.

Brief Description of the Drawings

[0007] [Figure 1A] FIG. 1A is a top view of the printing apparatus according to the embodiment. [Figure 1B] FIG. 1B is a front view of the printing apparatus according to the embodiment. [Figure 1C] FIG. 1C is a side view of the printing apparatus according to the embodiment. [Figure 2A] FIG. 2A is a plan view of the arc table according to the embodiment. [Figure 2B] FIG. 2B is a side view of the arc table according to the embodiment. [Figure 3] FIG. 3 is a top view of the printing plate according to the embodiment. [Figure 4] FIG. 4 is a top view of the printing pattern according to the embodiment. [Figure 5] FIG. 5 is a diagram showing the printing process according to the embodiment. [Figure 6A] FIG. 6A is a side view of the arc swing unit according to the embodiment. [Figure 6B] FIG. 6B is a side view of the arc swing unit according to the embodiment. [Figure 7A] FIG. 7A is a perspective view of the arc swing unit according to the embodiment. [Figure 7B] FIG. 7B is a perspective view of the arc swing unit according to the embodiment. [Figure 8] [ FIG. 8 is a diagram for explaining control with a trochoid curve according to the embodiment. [Figure 9A]Figure 9A is a side view of the arc table and substrate table in the embodiment. [Figure 9B] Figure 9B is a side view of the arc table and substrate table in the embodiment. [Figure 10] Figure 10 shows the printing results of the example. [Modes for carrying out the invention]

[0008] (Embodiment) <Printing device> First, let's describe the printing device 100 as an example. Figures 1A to 1C are the top view, front view, and side view of the printing apparatus 100 according to the embodiment, respectively. The printing apparatus 100 has a base 19 that serves as the overall foundation. On the base 19 is a transport unit 16, and on the transport unit 16 are a coating table 11, a printing plate table 12, an arc oscillating unit 13, an alignment unit 14, and a substrate table 15.

[0009] The transport section 16 consists of two rails, on which the coating table 11, printing plate table 12, and substrate table 15 move. The arc-shaped oscillating unit 13 and alignment unit 14 are installed so as to straddle the transport section 16 and are fixed to the base 19. The coating table 11, printing plate table 12, and substrate table 15 can pass below the arc-shaped oscillating unit 13 and alignment unit 14. The control unit 34 controls the entire printing device 100. It is a personal computer, etc. It has a program and stores and controls various data. It controls the entire printing device 100. Mechanisms for moving each table, motors, etc. are not shown in the diagram.

[0010] The X direction is the direction in which the coating table 11, printing plate table 12, and substrate table 15 move. The Y direction is the horizontal direction, perpendicular to the X direction, and is the width direction of the coating table 11, printing plate table 12, and substrate table 15. The Z direction is the vertical direction (perpendicular to the X and Y directions). The printing apparatus 100 is a printing apparatus that uses a method of partially removing a uniform thickness ink film (solid film) on the surface of the arc table 23 of the arc oscillating unit 13 with a printing plate 22 to form an inverted pattern, and then transferring the inverted pattern to the object 25.

[0011] In other words, the printing device 100 forms an ink inversion pattern on the surface of the arc table 23 through contact between the arc table 23 and the printing plate 22. Subsequently, the ink on the arc table 23 is printed onto the object 25. The printing apparatus 100 can be used, for example, when manufacturing patterns for electronic devices (such as printed electronic devices). Furthermore, the printing apparatus 100 can be used, for example, in semiconductor manufacturing processes to form patterns such as wiring layers, insulating layers, plating seed layers, thin-film semiconductor layers, and resist layers on an object 25 (substrate). For example, silver nano-ink or copper nano-ink can be used as the material for the wiring layer.

[0012] Furthermore, a unit may be provided to clean the surfaces of the arc table 23 and the printing plate 22 periodically or after each use. As an alternative configuration of the printing apparatus 100, for example, the coating table 11, the printing plate table 12, and the substrate table 15 may be integrated into a single unit. In other words, the coating table 11, the printing plate table 12, and the substrate table 15 may be moved as a single unit. Alternatively, the arc-oscillating unit 13 and the alignment unit 14 may be installed on the transport section 16, and the coating table 11, printing plate table 12, and substrate table 15 may be fixed in place. In other words, the coating table 11, printing plate table 12, and substrate table 15 may be fixed in place, and the arc-oscillating unit 13 and the alignment unit 14 may be allowed to move above them.

[0013] <Arc Table 23> The arc table 23 may be a curved surface of a cylinder or a curved surface of an elliptical cylinder. The arc table 23 is shown in the plan view in Figure 2A and the side view in Figure 2B. The arc table 23 is part of a rotating body that transfers the ink inversion pattern to the object 25. The arc table 23 is supported by the arc oscillating unit 13. The arc table 23 may be part of a cylinder or part of an elliptical cylinder. To improve printing position accuracy, the larger the radius of curvature of the arc table, the smaller the change in printing position in response to printing pressure. For example, a radius of curvature of 1000 mm or more is good, and 2000 mm or more is preferable. The arc table 23 has a transfer sheet 31 on its surface, and ink is handled on the surface of the transfer sheet 31. If the arc table 23 itself, or the surface of the arc table 23, is made of the same material as the transfer sheet 31, the transfer sheet 31 is not necessary.

[0014] The transfer sheet 31 is a water-repellent blanket made of silicone, for example. The arc table 23 has a metal body around which the transfer sheet 31 is wrapped.

[0015] <Plate 22> Figure 3 shows a top view of the printing plate 22. The printing plate 22 can be a plate with an uneven surface shape (such as a master plate) or a planar plate (adhesion contrast plate). In this embodiment, a relief plate is used for the printing plate 22. The printing plate 22 is placed on the printing plate table 12. Furthermore, the printing plate 22 is moved in the X direction by the transport unit 16 while it is placed on the printing plate table 12.

[0016] The printing plate 22 has protrusions 28 formed on its surface that correspond to the inverted pattern of the pattern to be printed on the object 25. Furthermore, by bringing the protrusions 28 of the printing plate 22 into contact with the surface of the arc table 23, the printing plate 22 partially removes ink from the ink film on the surface of the arc table 23, forming a printed pattern 29, which is the inverted pattern corresponding to the recesses 27. Figure 4 shows a top view of the printed pattern 29. The shapes of the protrusions 28 and recesses 27 shown in Figure 3, and the printed pattern 29 shown in Figure 4 are examples, and any shape is acceptable, such as wiring for forming an electronic circuit. When using an adhesion contrast plate, areas where ink adheres easily and areas where ink does not adhere easily are provided, corresponding to the above pattern.

[0017] <Object 25> The object 25 is the object on which the pattern is formed. The object 25 is a substrate that can be printed on, for example, a flat plate, film, or sheet. The object 25 is placed on the substrate table 15. Furthermore, the object 25 is moved in the X direction by the transport unit 16 while it is placed on the substrate table 15.

[0018] The object 25 is transferred with the inverted pattern (printed pattern 29) formed on the surface of the arc table 23. In other words, the desired printed pattern 29 is printed on the object 25.

[0019] <Printing Plate Table 12> The printing plate table 12 is on which the printing plate 22 is placed and fixed in place. The printing plate table 12 fixes the printing plate 22 using, for example, an electrostatic chuck, a porous chuck, or a vacuum chuck. The printing plate table 12 is moved in the transport direction (X direction in Figure 1) by the transport unit 16 with the printing plate 22 fixed in place. The method of fixing other tables and the items fixed on them is the same as described above.

[0020] <Base material table 15> The substrate table 15 has a flat surface on which the object 25 is placed and fixed. Similar to the printing plate table 12, the substrate table 15 fixes the object 25 using, for example, an electrostatic chuck, a porous chuck, or a vacuum chuck. The substrate table 15 is moved in the transport direction (X direction in Figure 1) by the transport unit 16 while the object 25 is fixed.

[0021] Furthermore, the printing plate table 12 and the substrate table 15 may be configured to incorporate a mechanism (not shown) that allows the placed printing plate 22 or object 25 to be moved slightly in the X, Y, and Z directions, as well as in rotational directions around the X, Y, and Z axes. This allows the printing plate table 12 and the substrate table 15 to adjust for any misalignment of the printing plate 22 or object 25.

[0022] <Application Table 11> The coating table 11 has a die coater 21 (nozzle) on its upper surface. The discharge port of the die coater 21 (nozzle) faces upward. There is an ink supply unit (not shown) that coats the ink onto the arc table 23. The coating table 11 has a second recognition unit 24b that can measure the shape and oscillation of the arc oscillation unit 13. The printing plate table 12 may also have a second recognition unit 24b. The second recognition unit 24b is a laser displacement meter or the like.

[0023] <Alignment Unit 14> The alignment unit 14 has a first recognition unit 24a that detects the positions of the printing plate 22 and the object 25. The first recognition unit 24a detects the position of the pattern on the printing plate 22 and the object 25 using an imaging device such as a digital camera or an image sensor.

[0024] <Control Unit 34> The control unit 34 controls the entire printing apparatus 100 by means of controlling the operation of each table, the ejection of ink from the die coater, the alignment operation, and the operation of the arc table 23.

[0025] <Conveying section 16> The transport unit 16 is a mechanism that moves the printing plate table 12, the substrate table 15, and the coating table 11 downwards (in the X direction in Figure 1) from the arc table 23 and the first recognition unit 24a. This mechanism is a rail or the like. In this embodiment, the transport unit 16 uses a linear guide and a linear motor. However, the transport unit 16 may use any other known mechanism that can move the printing plate table 12, etc.

[0026] <Printing method> Figure 5 shows the printing process. It consists of a preparation process and a printing process. Each table is either waiting or moving on the transport unit 16, and is responsible for each process. The preparation process involves adjusting positions, taking measurements, and so on, before the printing process. In the initial state, the coating table 11, printing plate table 12, and substrate table 15 are all in standby positions. Their positions on the transport unit 16 are in this order along the X-axis.

[0027] A: Measurement of the shape of the arc table 23: The shape of the arc table 23 located in the arc oscillation unit 13 is measured. A laser displacement meter, which is the second recognition unit 24b, is mounted behind the coating table 11. The coating table 11 is moved, and the shape of the arc table 23 is measured from below using the laser displacement meter. The printing plate table 12 may also have the second recognition unit 24b, and the shape of the arc table 23 may be measured in the same manner as above while it is moving. This step can be omitted if the shape of the arc table 23 is known in advance.

[0028] B: Measurement of the oscillation of the arc table 23: Using the <trochoid control> described below, the arc table 23 is made to oscillate to a specified position, and the coating table 11 or printing plate table 12 equipped with a laser displacement meter is moved in sync with it, and the height of the arc table 23 is measured with the laser displacement meter. A: By performing the above synchronous measurement on the lowest point (bottom point) of the arc table 23 which has been determined in advance during the shape measurement of the arc table 23, the amount of variation in the contact amount (printing pressure) between the arc and the substrate can be estimated. A: If the shape measurement of the arc table 23 is omitted, the lowest point estimated from the design drawing may be used as a substitute. If the variation in the measured value is large, the oscillation of the arc is adjusted by the <correction method> described below.

[0029] A: Measurement of the shape of the arc table 23 and B: Measurement of the oscillation of the arc table 23 are performed primarily to determine the control parameters for the oscillation of the arc table 23. It is not necessary to perform these measurements for every print run, and it is sufficient to perform them when the device is started up. Furthermore, as will be described later, it is also possible to adjust the oscillation motion of the arc without using a laser displacement meter, in which case A: measurement of the shape of the arc table 23 and B: measurement of the oscillation of the arc table 23 may be omitted.

[0030] C: Alignment of the substrate table: The substrate table 15 is passed under the alignment unit 14 to recognize the position of the object 25 on the substrate table 15. The position of the object 25 is adjusted to a certain reference. The substrate table 15 has a mechanism that allows it to move in the horizontal (X, Y) direction and the θ direction. This step can be omitted if there is no pattern on the object 25. In other words, it can be omitted when printing at an arbitrary position on the object 25.

[0031] D: Alignment of the printing plate table: The printing plate table 12 is passed under the alignment unit 14 to recognize the position of the printing plate 22 on the printing plate table 12. The position of the printing plate 22 is adjusted to a certain reference. The printing plate table 12 has a mechanism that allows it to move in the horizontal (X, Y) direction and the θ direction. This is useful when removing the printing plate 22 for cleaning outside the device. This step can be omitted if the position of the printing plate 22 does not change. Needless to say, each stage, table, and transport unit is installed horizontally. In other words, they are installed vertically in the Z direction (height direction).

[0032] The printing process is the process of printing onto the object to be printed. In the preparation process, all positions have already been aligned. E: Coating process: The coating table 11 moves to the lower part of the arc table 23 of the arc oscillating unit 13. Then, using the <trochoidal control> described below, the coating table 11 moves while the arc table 23 is oscillating, thereby coating the transfer sheet 31 from the die coater 21. The ink is coated as a uniform film over the entire surface, rather than in a pattern. At this time, the arc table 23 may move vertically as described below.

[0033] F: Receiving process: The printing plate table 12 moves to the lower part of the arc table 23 of the arc oscillating unit 13. The arc table 23 moves in the Z and X directions and oscillates by the <trochoid control> described below, bringing the solid film of the transfer sheet 31 into contact with the printing plate 22 and removing the ink. The remaining pattern is the print pattern 29 to be printed.

[0034] G: Transfer process: The substrate table 15 is moved below the arc table 23. The arc table 23 is moved in the Z and X directions and oscillated by the <trochoidal control> described below, pressing it against the object 25 and printing the ink of the print pattern 29. Figures 6A and 6B show side views. Figure 6A shows the start of printing on the object 25 (not shown) on the substrate table 15, and Figure 6B shows the end of printing. The substrate table 15 does not move during printing, while the arc table 23 moves in the Z and X directions. This allows for printing with high positional accuracy. When printing again, it is preferable to clean the printing plate 22 and the arc table 23. Note that the base material table 15, the arc table 23, and the control unit 34 are essential elements, while the other elements are optional. These essential elements alone can solve the problem of this invention. The other elements are shown above as examples, but other elements may also be used.

[0035] <Regarding the rocking motion> The oscillation motion of the arc table 23 in steps B, E, F, and G described in the <Printing Method> section is described below. Figure 7A shows a perspective view of the arc oscillation unit 13. In the arc oscillation unit 13, the arc table 23 is held by four drive units 22a to 22d. Each drive unit can move in the X and Z directions. Each drive unit and the arc table 23 are connected by axes 32a to 32d, respectively. They are able to rotate around axes 32a to 32d. In the following description, unless one of the axes 32a to 32d is specifically identified, it will be referred to as axis 32.

[0036] Each of the drive units 22a to 22d, including the shaft 32, has three degrees of freedom as a standalone unit: translation along the X-axis, translation along the Z-axis, and rotation around the Y-direction as the rotational axis. Since the arc table 23 can be considered a rigid body, a constraint occurs when connected to the arc table 23, resulting in three degrees of freedom at one end. Therefore, one end can be driven using one of three types of positioning devices: translation only, or a combination of rotation and translation. For example, the Z-axis of drive unit 22a, the rotation center axis, and the Z-axis of drive unit 22d may be controlled by a drive device such as a motor, while the other axes may be left free using bearings or linear guides. However, since a more accurate positioning can be achieved by using only a translational motion type positioning device, it is preferable to control the X-axis and Z-axis of drive unit 22a and the Z-axis of drive unit 22d, or the Z-axis of drive unit 22a and the X-axis and Z-axis of drive unit 22d, with a drive device, while the other axes may be left free using bearings or linear guides. The same applies to combinations of drive unit 22b and drive unit 22c.

[0037] As shown in Figure 7B, the drive may be located at only one end. The shaft 32 extends to the other end, and both ends are controlled together by one drive unit. The drive shaft 32 causes one side of the arc table 23 to move horizontally and vertically, and in response, causes the other side to move vertically and horizontally. The arc table 23 and the drive shaft 32 are connected via bearings.

[0038] <Trochoid curve control> In the oscillation of the arc table 23 in processes B, E, F, and G, it is preferable to oscillate the axes 32a to 32d that hold both ends of the arc table 15 according to the trochoid curve 40. That is, the axes 32a and 32d shown in Figure 6B are oscillated along the trochoid curve 40 (the movement path of axes 32a and 32d from Figure 6A to Figure 6B). A trochoid curve is the curve traced by a fixed point inside or outside a circle when the circle is rolled along a certain curve (circles and straight lines are special cases of this curve) without slipping.

[0039] This will be explained in detail in Figure 8. Figure 8 corresponds to Figure 6B. Circle 42 is a circle containing the arc on the surface of the arc table 23. Circle 41 is a circle containing the arc on the surface of the arc table 23 in Figure 6A. As the arc table 23 moves from Figure 6A to Figure 6B, it moves from circle 41 to circle 42. By controlling axes 32d and 32a so that their paths follow a trochoid curve, the movement of the circles from Figure 6A to Figure 6B can be achieved.

[0040] By controlling the movement according to a trochoidal curve, the surface of the transfer sheet 31 can be moved without slipping on the surface of the object 25 while maintaining a constant amount of pressure, thus enabling the creation of a printed pattern 29 with minimal positional misalignment. As described in <Regarding the oscillating motion>, for example, by simply translating the drive units 22a to 22d in the X and Z directions respectively, the shaft 32 can be moved to follow a trochoidal curve. Furthermore, because a circular arc table 23 with a large radius of curvature can be used, even with a large amount of pressure, the dimensional change of the printed pattern can be suppressed, resulting in high positioning accuracy. In printing devices that rotate a cylindrical roll with a rotary motor, a higher torque rotary motor is required as the radius of curvature of the roll increases, and furthermore, fluctuations in the rotational speed of the rotary motor worsen the positioning accuracy of the roll surface in proportion to the radius of the roll. According to the present invention, positioning errors that occur in such roll-rotating printing devices can be avoided.

[0041] Regarding the trochoid curve control of shafts 32d and 32a, an example of the combination of drive units 22d and 22a will be described. For simplicity, the surface of the object 25 is a horizontal plane, and its height is set to z = 0. Each parameter is shown in FIGS. 9A and 9B. FIGS. 9A and 9B have different attitudes of the arc table 23.

[0042] The X-axis and Z-axis of the drive unit 22d are moved to follow the following equations,

Equation

Equation

Equation

Equation

[0043] Here, R and L are the radius of curvature and arc length of the arc table 23. W A and H A are the horizontal distance and vertical distance from the intersection of the perpendicular line passing through the center of the arc and the surface of the circle to the shaft 32d of the drive unit 22d when the arc is horizontal. Similarly, W B and H B are the horizontal distance and vertical distance from the intersection of the perpendicular line passing through the center of the arc and the surface of the circle to the shaft 32a of the drive unit 22a when the arc is horizontal. r A , θ A , r B , θ B and θ C are variables determined by the following equations.

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[0044] p is a parameter of the trochoid curve and can be the value of a virtual axis used to synchronously control each axis 32a to 32d of the drive unit 22a to 22d, and is the velocity (translational component) V of the circular arc oscillating on the straight line z=0. p , time t and p = V p t=x P They are in a relationship where x P is the x-component of the intersection point of the circular arc and the line z=0, and is the lowest point P of the circular arc. P This is the x-component of [the expression]. Other variables starting with Δ are correction parameters with the meanings shown in Table 1. They are used to change the path of axis 32 in order to fine-tune the positioning accuracy of the print pattern 29, and should be set to 0 if no correction is needed. xA M zA M xB M zB This is also a correction parameter, used to change the path of axis 32, and should be set to 1 if no correction is needed.

[0045] Preferably, the values ​​of the correction parameters can be set independently in the coating process, the receiving process, and the transfer process. For example, even if the flatness and orientation of the printing plate table 12 and the substrate table are different, the printing pressure can be made to be closer to constant by using the correction parameters. The similar drive units 22b and 22c can also be used to control the trochoids in a similar manner, thereby causing the arc drive unit 13 to oscillate. If the surface of the object 25 is curved, the control equations (1) to (4) of the trochoid curve should be modified to match the curve. [Table 1]

[0046] <Correction Method> The input values ​​R, L, and W are determined according to the above formulas (1) to (4). A H A , W B H B The drive units 22a~d were moved while changing the parameter p, while the true values ​​were R * , L * , W A * H A * , W B * H B * Suppose the input value differs from the actual value. In this case, the oscillation of the arc does not match the ideal motion. This section describes a method for appropriately determining correction parameters to approximate the ideal oscillation. Note that the true value changes due to machining errors, measurement errors, assembly errors, and distortions such as creep that occur over time, and cannot be easily measured. Therefore, the correction means described here is particularly important for accurate printing and solving the problems of the present invention.

[0047] First, let's explain the ends of axes 32d and 32a. The true distance between axes 32d and 32a is

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[0048] If correction is to be performed that also takes into account the effects of orientation errors of the printing plate table 12 and the substrate table 15, for example, a pressure-sensitive film (e.g., Fujifilm Prescale 5LW) or a pressure sensor sheet may be placed on the surface of the substrate table 15, and the correction parameters may be changed so that the pressure distribution is uniform. In this case, measurement with a laser displacement meter is not necessary. Also, if a laser displacement meter is not available, an inclinometer may be placed on the upper surface of the arc table 23, and α(z A ,z B While the correction parameters may be changed compared to the above, measurement using a laser displacement meter is preferred from the viewpoint of quantitative accuracy.

[0049] Point P, the lowest point of the arc P The x coordinate in the X direction P Regarding this, it is difficult to measure using the method described in "B: Measurement of oscillation of arc table 23" above, but the lowest point P can be measured using the method described above. P The coordinate z in the Z direction P After correcting to keep it constant, the amount of elongation in the X direction of the actual print pattern 29 is determined, and its scaling ratio is M xA Simply substitute the values. Thus, according to the correction method of the present invention, correction values ​​can be determined without essentially requiring human experience, and a printing method with high accuracy, minimal machine variation, and excellent reproducibility can be provided. Note that the correction parameter is not limited to the functional form defined in equations (1) to (4); for example, a higher-order correction may be performed by making the correction parameter a function of p.

[0050] <Examples> The following conditions were used to perform overlay printing (printing the same pattern repeatedly). The results are shown in Figure 10 and Table 3. Table 2 shows the correction values ​​for Example 1. Figure 10 is a plan view of the printed result. Example 1 involves setting the input values ​​of the trochoid curve control equations (1) to (4) to machine design values ​​(specifically R=2000mm, L=320mm, W=20 A =160mm, H A =90mm, W B =160mm, H B The result shown is when the arc table 23 is oscillated by trochoidal control, including the correction parameters shown in Table 2, with a length of 90 mm (printing result in Figure 10).

[0051] Example 2 involves setting the input values ​​of the trochoid curve control equations (1) to (4) to machine design values ​​(specifically R=2000mm, L=320mm, W=20 A =160mm, H A =90mm, W B =160mm, H B This is the case where the arc table 23 is oscillated by trochoidal control and printed without any corrections other than setting the thickness to 90 mm and setting ΔR = 1.264 mm as a correction parameter to account for the thickness of the transfer sheet 31. The comparative example involves printing using a different printing apparatus than that used in the examples, with a 255 mm diameter cylindrical roll rotated in synchronization with the translational motion of various tables using conventional control. In this case, the synchronization of the translational motion of the cylindrical roll and the various tables, as well as the printing pressure in the receiving and transfer processes, were carefully adjusted to minimize positional misalignment.

[0052] In Examples 1 and 2 and the Comparative Example, a complementary pattern, also arranged in a grid at a 5mm pitch, was overprinted onto a chromium pattern of a photomask arranged in a grid at a 5mm pitch using reverse offset printing with nano-silver ink. A silicon wafer with a textured surface created by dry etching was used as the printing plate 22. The photomask was aligned, and it was confirmed that the alignment error was sufficiently small. For each grid point, the centroid position of the photomask pattern and the printed pattern was determined by image analysis, and the positional misalignment was measured. The positional misalignment in the X direction at each grid point, defined as i as the address in the X direction and j as the address in the Y direction, was defined as Δx i,j , the positional displacement in the Y direction is Δy i,j The square root of the mean squared error

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[0053] From Table 3, Example 1 is the most preferred. Since the arc table 23 is controlled by corrected trochoidal control, positional displacement is almost eliminated. In Example 2, a slight misalignment occurs compared to Example 1. In the comparative example, the rotational motion of the cylindrical roll and the translational motion of the table were simply synchronized, resulting in positional misalignment due to rotational unevenness, with the misalignment in the printing flow direction being particularly large. [Table 2] [Table 3]

[0054] <Effects> In the printing apparatus 100 of this embodiment, the positional accuracy of printing can be improved for the following reasons. (1) Because an arc table was used instead of a cylindrical roll, a curved surface with a large radius of curvature could be used, resulting in less misalignment of the printed pattern 29 due to printing pressure. A cylindrical roll with a curved surface with a large radius of curvature would be heavy. (2) This is because the cylindrical roll is not moved by a rotating mechanism. Errors that occur in proportion to the radius of curvature of the cylindrical roll, such as angular transmission errors and angular velocity fluctuations, are eliminated, and the resulting misalignment of the roll surface is eliminated. (3) The number of axes controlling the oscillating motion of the arc is large, making correction easy. (3) This is so that the entire printing process can be carried out on a single transport unit 16. (4) During the receiving and transfer processes, only the arc table 23 is moved, while the printing plate table 12 and the substrate table 15 are fixed. This eliminates the need for the synchronized control of the rotation of the cylindrical roll and the translation of the printing plate table, which was necessary in the mechanism that rotates the cylindrical roll.

[0055] (Overall) The above embodiments can be combined in various ways. In this configuration, the transfer sheet 31 is set on the arc table 23 and the printing plate 22 is set on the printing plate table 12. Alternatively, the transfer sheet 31 may be set on the printing plate table 12 and the printing plate 22 on the arc table 23. In this case, the printing plate 22 is a printing plate having a printing pattern 29. Ink is supplied from the transfer sheet 31 to the printing plate 22, and printing is performed from the printing plate 22 to the object 25. In the trochoidal control example, we assumed that a circle moves, but it is also possible to assume that an ellipse moves. In this case, the ratio of the longer side to the shorter side of the ellipse, or its size, can be adjusted to achieve higher precision printing.

[0056] In the above embodiment, the transfer sheet 31 was set on the arc table 23, the object 25 was set on the base material table 15, and the ink from the transfer sheet 31 was transferred to the object 25. However, the transfer sheet 31 may be set on the base material table 15, the object 25 may be set on the arc table 23, and the ink from the transfer sheet 31 may be transferred to the object 25. In this case, it is necessary to form the printing pattern 29 on the transfer sheet 31 on the base material table 15. For example, a homogeneous ink layer may be formed on the transfer sheet 31, and the ink other than the printing pattern 29 may be removed with the printing plate 22. This is possible if the die coater 21 and the printing plate table 12 are positioned above the transfer sheet 31. Alternatively, for example, the printing pattern 29 may be formed on the transfer sheet 31 on the base material table 15 at a different location, and the base material table 15 may be placed in the transport unit 16. [Industrial applicability]

[0057] The printing apparatus of the present invention can be used for the manufacture of various devices, such as electrodes. Although inverted offset printing has been described in detail, the mechanism that prints by oscillating an arc using trochoidal control is essentially applicable to other transfer printing methods as well. By appropriately changing the apparatus configuration, it can also be used for letterpress printing, flexographic printing, adhesion contrast printing, gravure offset printing, and the like. [Explanation of symbols]

[0058] 11 Coating Table 12th printing plate table 13. Arc-shaped oscillating unit 14 Alignment Units 15 Substrate Table 16 Conveying section 19 units 21 Daikota 22 Printing plate 22a, 22b, 22c, 22d Drive unit 23 Arc Table 24a 1st recognition part 24b 2nd recognition part 25 Objects 27 recess 28 Convex part 29 Printing Patterns 31 Transfer Sheets 32, 32a, 32b, 32c, 32d axis 34 Control Unit 40 Trochoid curve 41.42 yen 100 Printing equipment

Claims

1. A substrate table having a flat surface, A curved table having a curved surface, It has a control unit and The control unit moves the arc table, which has the curved portion for holding ink facing the substrate table that holds the object, to bring it into contact with the object. Alternatively, the arc table that holds the object is placed opposite the substrate table that holds the ink, and the arc table is moved to bring it into contact with the object. This is a printing apparatus that transfers the ink to the object, A printing apparatus in which a plurality of axes that hold the arc table move horizontally and vertically, and the arc table and the axes are connected via bearings.

2. The printing apparatus according to claim 1, wherein the arc table is oscillated by moving the axis that holds the arc table according to a trochoid curve.

3. A substrate table having a flat surface, A curved table having a curved surface, It has a control unit and The control unit moves the arc table, which has the curved portion for holding ink facing the substrate table that holds the object, to bring it into contact with the object. Alternatively, the arc table that holds the object is placed opposite the substrate table that holds the ink, and the arc table is moved to bring it into contact with the object. This is a printing apparatus that transfers the ink to the object, The axis holding the arc table is moved according to a trochoid curve, thereby causing the arc table to oscillate. The aforementioned motion follows a trochoid curve with corrected parameters. The correction is a correction that sets the lowest surface of the arc table to a constant height in the printing apparatus.

4. The coating process involves applying ink to an arc-shaped table, A receiving step in which the ink on the arc table is brought into contact with the printing plate on the printing plate table, and a portion of the ink is received onto the printing plate, The process includes a transfer step of transferring the ink remaining on the arc table to an object on a substrate table, A printing method wherein the multiple axes that hold the arc table perform horizontal and vertical movements, and the arc table and the axes are connected via bearings.

5. The printing method according to claim 4, wherein the transfer step involves not moving the substrate table but oscillating the arc table.

6. The printing method according to claim 5, wherein the oscillating motion follows a trochoid curve.

7. A coating step of applying ink to an arc table, A receiving step in which the ink on the arc table is brought into contact with the printing plate on the printing plate table, and a portion of the ink is received onto the printing plate, The printing method includes a transfer step of transferring the ink remaining on the arc table to an object on a substrate table, In the transfer process, the substrate table is not moved, but the arc table is oscillating, and the oscillating motion follows a trochoidal curve. The aforementioned oscillating motion follows a trochoidal curve with corrected parameters. The correction is a printing method in which the lowest surface of the arc table is set to a constant height.

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