Monitoring of material processing using imaging signal density determined from inline coherent imaging (ICI).

Abstract

To provide systems, methods and apparatuses for monitoring material processing using imaging signal density calculated for an imaging beam directed to a workpiece or processing region, e.g., during inline coherent imaging (ICI).SOLUTION: The imaging signal density may be used, e.g., to monitor laser and electron beam welding processes such as full or partial penetration welding. For example, the imaging signal density is indicative of weld penetration as a result of reflections from a keyhole floor and / or from a subsurface structure beneath the keyhole. The monitoring may include, e.g., automated pass / fail or quality assessment of the welding or material processing or parts produced thereby. The imaging signal density may also be used to control the welding or material processing, e.g., using imaging signal density data as feedback. The imaging signal density may be used alone or together with other measurements or metrics, such as distance or depth measurements.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] This application claims priority to U.S. Provisional Application No. 62 / 782,071, filed Dec. 19, 2018, the entire content of which is incorporated herein by reference.

[0002] The present disclosure relates to monitoring of material processing, and more particularly to monitoring of material processing using imaging signal density determined from inline coherent imaging (ICI).

Background Art

[0003] Using inline coherent imaging (ICI), various types of processes can be monitored by detecting reflections from a workpiece in-line with a process beam directed at the workpiece. ICI generally includes directing an imaging beam at the workpiece together with the processing beam, receiving the reflection of the imaging beam using an interferometer, and generating an output indicative of a characteristic of the process and / or workpiece, such as weld keyhole depth. Examples of ICI are described in more detail in Applicant's Patent Documents 1, Patent Document 2, and Patent Document 3, which are incorporated herein by reference in their entirety.

[0004] Laser welding is an example of a process that can be effectively monitored with ICI. All types of laser welding often contain defects due to out-of-tolerance process parameters, variations in input materials, and natural variations and instabilities in the molten pool and vapor channels or keyholes. Direct measurement of vapor channel and keyhole penetration is crucial for defect detection, and ICI is the technology that first made this industrially feasible. While ICI is highly effective for detecting defects in vapor channels in blind or partial penetration welds, it has not been as effective for full penetration welding processes. ICI is typically used to measure the optical path length to the backscatter interface (e.g., the bottom of the keyhole), but this yields unreliable data when the keyhole completely penetrates the material.

[0005] Current laser welding methods present unique challenges for monitoring with ICI. For example, in wobble welding, the process beam moves rapidly in an oscillating pattern during welding. When monitoring wobble welding with ICI, the challenge lies in aligning the imaging beam with the keyhole, phase change region (PCR), or other workpiece sub-regions, as the process beam is moving in an oscillating pattern. [Prior art documents] [Patent Documents]

[0006] [Patent Document 1] U.S. Patent No. 8822875 [Patent Document 2] U.S. Patent No. 9757817 [Patent Document 3] U.S. Patent No. 10124410 [Patent Document 4] U.S. Patent Application Publication No. 2016 / 0368089 [Patent Document 5] U.S. Patent Application Publication No. 2020 / 0023461 [Patent Document 6] International Publication No. 2018 / 136622 [Overview of the project] [Means for solving the problem]

[0007] A method according to one aspect of the present disclosure comprises generating a process beam and directing the process beam towards a workpiece for material processing; generating an imaging beam and directing the imaging beam towards the workpiece; generating an interference output from at least one component of the imaging beam reflected from the workpiece; detecting the interference output and generating interference data; and determining the imaging signal density from the interference data.

[0008] A method relating to another aspect of the present disclosure comprises generating a plurality of A scans of a workpiece (the plurality of A scans are spaced apart by distance or time) using inline coherent imaging (ICI), and determining the ICI signal density by determining whether each A scan contains a measurement point that exceeds a signal intensity threshold, and calculating the percentage of A scans that satisfy this condition within the bin of A scans.

[0009] A system according to a further aspect of the present disclosure comprises a material processing system configured to generate a process beam and direct the process beam toward a workpiece, and an in-line coherent imaging (ICI) system configured to generate an imaging beam, direct the imaging beam toward the workpiece together with the process beam, generate an interference output from the reflection of the imaging beam, detect the interference output, and generate ICI data. The system also comprises a monitoring system programmed to receive the ICI data and determine at least the ICI imaging signal density.

[0010] The above features and advantages, as well as other features and advantages, will be better understood by reading the following detailed description along with the attached drawings. [Brief explanation of the drawing]

[0011] [Figure 1] This is a schematic diagram of a material processing system equipped with an in-line coherent imaging (ICI) system capable of monitoring material processing using the imaging signal density according to the embodiment of this disclosure. [Figure 2] Figure 2A is a flowchart of a method for monitoring material processing using the imaging signal density according to the embodiment of this disclosure. Figure 2B is a flowchart of a method for determining the imaging signal density according to the embodiment of this disclosure. [Figure 3] Figures 3A to 3C show different signal density algorithms for determining the imaging signal density according to the embodiments of this disclosure. [Figure 4] Figure 4A is an image showing a plot of keyhole signal density as a function of position along the weld according to an embodiment of the present disclosure. Figure 4B is an image showing a plot of raw keyhole data from a series of A-scans along multiple A-lines along the weld according to an embodiment of the present disclosure, showing keyhole depth as a function of position along the weld. [Figure 5] Figures 5A to 5E illustrate laser-weldable and monitorable components according to the embodiments of this disclosure. [Figure 6] This image shows raw ICI data indicating depth as a function of weld length for a laser-butt welded part according to an embodiment of this disclosure. [Figure 7] The graphs of welding laser power and imaging signal fill factor (density) are shown as functions of distance (welding length) according to the embodiments of this disclosure. [Figure 8] Figures 8A to 8E show raw ICI data, which represents depth as a function of weld length, evaluated using only the imaging signal density (or fill factor) for the purpose of pass / fail quality assurance according to the embodiments of this disclosure. [Figure 9] This image shows raw ICI data indicating depth as a function of weld length, evaluated using imaging signal density (or fill factor) and distance measurement results, for the purpose of pass / fail quality assurance according to the embodiments of this disclosure. [Figure 10] Figures 10A and 10B are schematic diagrams of weld penetration in other component shapes having a subsurface pocket that can be monitored using the imaging signal density according to an embodiment of the present disclosure. [Figure 11] Figures 11A to 11C are images of welding routes of butt welding performed using different laser powers that can be monitored using the imaging signal density according to an embodiment of the present disclosure. [Figure 12] Figures 12A to 12C are plots of ICI keyhole measurement results of the butt welding shown in Figures 11A to 11C as a function of the welding length. [Figure 13] A plot showing the fill factor (or imaging signal density) of the welded part shown in Figures 11A to 11C as a function of the distance along the welded part. [Figure 14] A plot showing the ICI keyhole measurement results (upper figure) and the imaging signal density of low-speed butt welding. [Figure 15A] A plot of depth tracking A-scan measurement results as a function of the welding length for a battery tab oscillatory welding process in which the keyhole alignment with respect to the imaging beam position changes periodically according to an oscillatory welding pattern is shown. [Figure 15B] A signal density plot corresponding to the depth tracking data of Figure 15A is shown together with a dashed line indicating a constant signal density threshold level used in a subsequent processing step. [Figure 15C] A plot of the depth tracking A-scan measurement results of Figure 15A classified into "surface" and "keyhole" depth measurement results according to the signal density and threshold level of Figure 15B is shown, and the classified channels are identified in the areas surrounded on the graph. [Figure 15D] A plot of the keyhole depth based on the local surface height obtained by subtracting the keyhole depth and the surface data of Figure 15C is shown, and the local surface height is represented by a dashed line at a depth of zero.

Mode for Carrying Out the Invention

[0012] The systems, methods, and apparatus relating to this disclosure are used, for example, to monitor material processing using the imaging signal density calculated for an imaging beam directed at a workpiece or processing area during inline coherent imaging (ICI). The imaging signal density can be used to monitor laser welding processes, such as full penetration welding or partial penetration welding, performed using pulsed welding, spot welding, and / or oscillating welding, as well as electron beam welding processes. For example, the imaging signal density may indicate weld penetration as a result of reflections from the keyhole floor and / or from subsurface structures below the keyhole. Monitoring may include automated pass / fail evaluation and quality assessment of welding or material processing, and the parts produced thereby. Furthermore, the imaging signal density can be used to control welding, material processing, and / or monitoring, for example, by using the imaging signal density data output as feedback. The imaging signal density can be used alone or in conjunction with other measurement results or metrics, such as distance or depth measurements.

[0013] In this application, inline coherent imaging (ICI) refers to a process in which an imaging beam is directed toward the workpiece together with the process beam, i.e., "inline," for the purpose of measuring the characteristics of the process and / or workpiece. The term "inline" does not necessarily require that the imaging beam and the process beam be coaxial. The imaging beam may be coaxial with the process beam, or it may be offset or angled relative to the process beam. In this application, the term "woboll welding" refers to a welding process in which the process beam is moved in a relatively small, repetitive motion while translating it across the welding site (for example, by moving the workpiece and / or the beam transmission system).

[0014] In this application, signal density (also referred to as fill factor) refers to the percentage of measurement results showing a signal exceeding a signal intensity threshold (e.g., in dB). The ICI signal density can be determined, for example, by generating multiple axial scans or A-scans of a workpiece or machining area using ICI, determining whether each A-scan contains measurement points exceeding the signal intensity threshold, and calculating the percentage of A-scans that satisfy this condition to calculate the imaging signal density. The percentage can be calculated within a predetermined distance or time, or within a predetermined number of A-scans (referred to as a signal density window or bin), as will be described in detail below. Multiple A-scans can be generated along multiple spaced axial lines or A-lines along the workpiece, or at a single location.

[0015] This method recognizes that the signal density from a specific depth region within a phase transition region (PCR) formed during welding may be relevant to evaluating the penetration and quality of the weld. For example, an increasing or high signal density from a certain region beginning at the top surface of the workpiece and substantially ending at the known thickness of the workpiece suggests that a keyhole or vapor channel is closing or has closed. Conversely, an increasing or high signal appearing from a distance substantially deeper than the known thickness of a feature portion of the workpiece being welded may indicate that a vapor channel is opening or has opened, revealing other features of the workpiece (e.g., the bottom of a gas release pocket) or other features of equipment, parts, or assemblies (e.g., a backing plate or sacrificial material intentionally positioned to produce strong reflections for an ICI system), thereby enabling the method of this disclosure as described in detail below.

[0016] Referring to Figure 1, the imaging signal density is available for monitoring material processing according to the embodiment of this disclosure in a material processing system 110 using an inline coherent imaging (ICI) system 120. The material processing system 110 generates a process beam 112 directed toward a workpiece 102 to process (e.g., weld) the workpiece. The inline coherent imaging (ICI) system 120 generates an imaging beam 122 "inline" with the process beam 112 directed toward a sample or workpiece 102 to image the workpiece and generate ICI data that characterizes the workpiece and / or material processing. The monitoring / control system 130 receives the ICI data from the ICI system 120 and determines the ICI imaging signal density and other measurements for the purpose of monitoring and / or controlling the material processing.

[0017] The material processing system 110 includes a process beam source 114 (such as a laser or electron source) for generating a process beam 112. The material processing system 110 also includes an optical system 116 (such as a collimator and / or lens) for transmitting the process beam 112 to the workpiece 102 for material processing. In one exemplary embodiment, the material processing system 110 is a laser or electron beam welding system that can use the process beam to form vapor channels or keyholes during the welding process. An example of the material processing system 110 is a laser welding system from IPG Photonics, in which the process beam source 114 includes a fiber laser. Other material processing systems are also within the scope of this disclosure.

[0018] Another example of the material processing system 110 is an oscillating welding system in which the process beam rapidly moves in an oscillating pattern while scanning the weld site on the workpiece. In an oscillating welding system, the optical system 116 may also include a movable mirror or other active deflectors or scanning actuators for moving the process beam in an oscillating pattern. An example of "wobble" movement is the repetitive motion of the laser beam (e.g., repetitive motion along one or more axes) within a relatively small field of view defined by a scanning angle of less than 10° or a maximum beam angle displacement of less than ±5°. Examples of oscillating welding systems are described in detail in the applicant's Patent Document 4, which is incorporated entirely in this application by reference, and in U.S. Patent Application No. 16 / 515892 filed July 18, 2019 (Patent Document 5).

[0019] The ICI system 120 includes an imaging beam source 124 (such as a semi-coherent light source) for generating an imaging beam 122, and an optical system 126 (such as a collimator and / or lens) for directing the imaging beam 122 towards the workpiece. The ICI system 120 also includes an interferometer 128 (such as a Michelson interferometer) for generating an interference output from the reflected imaging beam 122, and a detector 129 (such as a spectrometer or camera) for detecting the interference output and generating ICI data (i.e., interferogram data). The interference output may be based on at least one optical path length to the workpiece and at least one other optical path length. In an exemplary embodiment, the optical system 126 may transmit the imaging beam 122 into a keyhole formed during the welding process to image one or more locations within the keyhole. In other embodiments, the ICI system 120 may include a directional element (such as a movable mirror) (not shown) for directing the imaging beam 122 to various locations within the keyhole or to various locations on the workpiece. One example of an ICI system is an ICI welding monitoring system equipped with OmniWELD software from IPG Photonics.

[0020] Furthermore, embodiments of this disclosure can be used in any material processing systems and ICI systems, such as those described in detail in the applicant's Patent Documents 1, 2, and 3, which are incorporated in their entirety by reference in this application.

[0021] The monitoring / control system 130 includes software and hardware (e.g., a general-purpose computer) programmed to calculate at least the imaging signal density and other measurements from the ICI data. The monitoring / control system 130 may also record the raw ICI data, the calculated imaging signal density, and other measurements. Furthermore, the monitoring / control system 130 may monitor the process and / or workpiece during machining. The monitoring / control system 130 may monitor the ICI imaging signal density to determine the properties of the process and / or material for inspection or quality assurance purposes (e.g., pass / fail). The monitoring / control system 130 may also control material machining in response to analog or digital feedback (i.e., direct data output) including the ICI imaging signal density. The monitoring / control system 130 may also determine and use other measurements and metrics, including (but not limited to) keyhole depth, seam profile, workpiece height, finish weld surface height, bead profile, and other distance measurements. Furthermore, the monitoring / control system 130 can control monitoring using ICI of the relative position of the imaging beam to the process beam, etc. (but not limited to this).

[0022] Referring to Figure 2A, a method 210 for calculating the ICI imaging signal density is shown and described in detail. Generally, an imaging beam is generated 212 (e.g., using the imaging beam source 124 of the ICI system 120) and directed 213 (e.g., together with the process beam). In one example of a keyhole welding process, the imaging beam may be directed into the weld keyhole and to other locations before and after the keyhole. The imaging beam may also be directed into multiple different locations within and before and after the keyhole. To improve the measurement results, the imaging beam may be aligned within the keyhole or other processing areas.

[0023] An interference output is generated from at least one component of the imaging beam reflected from the workpiece and / or the processing area (e.g., using the interferometer 128 of the ICI system 120). The interference output is based on at least one optical path length to the workpiece (e.g., the sample arm) and at least one other optical path length (e.g., the reference arm). In the example of keyhole welding, the imaging beam may be backscattered from the sides of the keyhole, the floor (bottom) of the keyhole, and / or subsurface structures (e.g., shelves below the keyhole).

[0024] Interference output is detected 216 (e.g., using detector 129) to generate interference data (interferogram data, etc.), and the imaging signal density is determined from the interference output 218 (e.g., in monitoring / control system 130). In the example of keyhole welding, as will be described in detail below, the interference data and imaging signal density indicate at least the depth of the keyhole and the degree of keyhole penetration into the workpiece. The imaging signal density can then be used to provide automatic pass / fail or quality assurance for the workpiece or processed area (weld area, etc.). The imaging signal density data can also be directly output to the material processing system 110 to provide feedback control for material processing. Additionally or alternatively, the imaging signal density can be fed back to the monitoring system 130 to adjust, for example, the monitoring position or the position of the imaging beam relative to the process beam or workpiece.

[0025] Referring to Figure 2B, a method 220 for determining the imaging signal density is shown and described in detail. In this embodiment, the method generates multiple A-scans of the workpiece using ICI in each of a plurality of A-lines that are spaced apart or time-spaced across the machining area of ​​the workpiece 222. In the example of keyhole welding, a series of A-scans may be generated along the length of the weld as the weld beam performs welding.

[0026] The ICI signal density is calculated by determining whether each of multiple A-scans contains a measurement point that exceeds a signal intensity threshold (e.g., in dB), and by calculating the percentage of A-scans that satisfy this condition within a bin or window of A-scans for a given distance or time.224 The signal density can be calculated for multiple signal density bins located along the work area and expressed as a function of position along the work area. In the example of keyhole welding, this percentage of measurement results made within a specific range (i.e., within a bin or window) of all possible measurement results within the area represents the keyhole signal density as a function of weld length. The signal intensity threshold (also called the measurement threshold or tracking threshold) and / or signal density bin size can be user-defined. As will be described in detail below, various algorithms can be used to calculate the image signal density with various arrangement configurations of signal density bins or windows along the work area (e.g., along the length of the weld). In addition, known smoothing algorithms (moving average, median, quantile filter) can be used to smooth the calculation of the image signal density.

[0027] Referring to Figures 3A to 3C, an example of an algorithm for calculating imaging signal density using signal density bins or windows is described in detail. Figures 3A to 3C show different algorithms for different arrangement configurations of signal density bins or windows over the length of the work area (e.g., the length of the weld). Each signal density bin or window includes a fixed length (e.g., 5 μm) or fixed time containing a fixed number of A-line measurement points (i.e., A-scans), resulting in a uniform sample interval over the work area. To calculate the imaging signal density, the number of measurement results detected within the window (i.e., measurement results exceeding the threshold in dB units) is divided by the total number of possible measurement results within the window and multiplied by 100%.

[0028] In the illustrated example, for simplicity and clarity, each window contains three (3) measurement points or A-scans, but a signal density window or bin may contain a different number of measurement points, and the window length can be defined by the user. If measurement results are detected at all three (3) measurement points or A-scans, the signal density in that window or bin is 100%. If measurement results are detected at one (1) of the three (3) measurement points, the signal density in that window or bin is 33%. The calculated percentage can then be plotted as a function of position along the machining area.

[0029] In Figure 3A, the signal density algorithm uses multiple fixed windows arranged end-to-end (i.e., non-overlapping) along the length of the machining region, with each window's end connected to the other. In the illustrated example, for every three (3-point) measurement points, the signal density is calculated based on the previous three (3-point) measurement points (i.e., within the window extending backward). Using this algorithm, the window length for signal density can be set as a multiple of the sample interval along the machining region, so that each window has a number that matches all possible measurement points within that window. According to this algorithm, the window start position along the machining region can be plotted as the x-value of the measurement, and the percentage as the y-value.

[0030] In Figures 3B and 3C, the signal density algorithm arranges the signal density windows so that each signal density window has a uniform total number of measurable values. In the signal density algorithm shown in Figure 3B, the signal density is calculated at each measurement point (i.e., each location where a detected or undetected measurement is made). In the illustrated example, at each measurement point, the signal density is calculated based on the three (3 points) measurement points up to that point (i.e., within the backward-extending window). In the signal density algorithm shown in Figure 3C, the signal density is calculated at each tracking measurement location (i.e., each location where a measurement is detected that exceeds the threshold). In the illustrated example, at each measurement point where a measurement result exceeding the threshold is detected, the signal density is calculated based on the three (3 points) measurement points up to that point (i.e., within the backward-extending window). The example in Figure 3C results in fewer signal density calculations and signal density windows with a uniform total number of measurements. While these configurations show a backward-extending window, the window may be centered at the measurement points, extend forward, or have other configurations.

[0031] In some embodiments, the ICI signal density is calculated using multiple different intensity threshold levels. The signal density calculations for each threshold can be used independently or collectively to enable the detection of more specific process phenomena. For example, in a particular full-penetration keyhole welding application, a "good" weld may have signal density measurement results for a specific percentage range (e.g., 10-20%) using a certain threshold level (e.g., 15 dB) and signal density measurement results for another specific percentage range (e.g., 5-8%) using another threshold level (e.g., 20 dB).

[0032] In some embodiments, the ICI signal density is calculated using a dynamic intensity threshold level. The dynamic intensity threshold level may be specified as a function of the weld path position or as a function of the acquisition time. The user may configure custom dynamic limits according to specific knowledge of process conditions. In some embodiments, the intensity threshold level may be modified according to the DC (0 delay) signal level of the A line itself. In other embodiments, the intensity threshold level may be modified according to the interface strength measured from other areas on the workpiece. In further embodiments, the intensity threshold level may be modified according to the interface strength measured before processing. Such dynamic limits can be used to compensate for changes in process conditions (e.g., changes in workpiece shape, material type, beam energy, feed rate, workpiece surface contamination, etc.) or changes in processing equipment (e.g., contamination of the cover glass).

[0033] In other embodiments, the region over which signal density should be considered can be narrowed using other measurement results (e.g., upper / lower keyhole depth, keyhole signal density, etc.). For example, ICI signal density can be calculated for multiple different A-line depth bands. The ICI signal density within each depth band can be used independently or collectively to enable the detection of more specific process phenomena. For example, in certain full-penetration keyhole welding applications, a "good" weld may require signal density measurements within a specific percentage range near the surface of the material (i.e., the depth of the keyhole shoulder) and signal density within another specific range near the bottom of the material. In some embodiments, the depth band region may be specifically configured to measure DC (0 delay) intensity levels.

[0034] The imaging signal density can be used in a quality assurance algorithm to determine whether a weld is pass or fail, as will be described in detail below. An imaging signal density exceeding a predetermined density limit or threshold over a predetermined distance or period may indicate, for example, loss of penetration or partial penetration resulting in a poor weld. In other embodiments, the quality assurance algorithm may determine pass or fail based on whether the imaging signal density is within a predetermined range with upper and lower limits.

[0035] In other embodiments, imaging signal density can be used to monitor the integrity of a system (ICI system or material processing system). Degradation or damage to system components can be measured using signal density measured from the workpiece surface, from a specific location within the material processing system, or from a specific location within the ICI system. Degradation or damage to components of the material processing system (e.g., cover glass, focusing optics, etc.) or components of the ICI system (e.g., transmission fiber, interference optics, etc.) can result in a decrease in the transmission or reflection of the imaging beam at a specific stage of the optical path, which can be detected by a decrease in ICI signal density over time.

[0036] In further embodiments, ICI signal density can be used to monitor the integrity of the processing cell. Damage or contamination can be indicated by measuring the signal density of specific parts of the cell (e.g., fasteners, jigs, equipment, mechanical systems, etc.).

[0037] In some embodiments, A-line averaging, smoothing, or other aggregation operations may be performed before calculating the signal density. Such operations can make the signal density measurement more robust to speckle and process instability. In some embodiments, the ICI system beam transmission optics may include certain optics, such as diffusers, to reduce speckle.

[0038] Referring to Figures 4A and 4B, the calculated signal density and raw ICI data along the workpiece region can be stored and displayed by plotting them as a function of position along the workpiece region (e.g., along the weld). Figure 4A shows an example of keyhole signal density as a function of position along the weld during a keyhole welding process. Figure 4B shows raw keyhole data showing keyhole depth as a function of position along the weld. As illustrated, the imaging signal density is high at the beginning and end of the weld, when the imaging beam is reflected from the top surface of the workpiece before the keyhole opens and after the keyhole closes. The imaging signal density decreases as the keyhole depth increases toward full penetration and increases again after full penetration when the imaging beam is reflected from the subsurface shelf (as shown by the bright signal in the raw data). In this example, the plots can be used to monitor the weld and the welding process. For example, the signal density plot in Figure 4A can be used for quality assurance and to identify defects, and the raw keyhole data plot in Figure 4B can be used to verify that the keyhole signal density plot is as expected.

[0039] Referring to Figures 5A to 5E, the system and method of this disclosure can be used to monitor weld penetration in a butt weld application in which a part has a subsurface shelf below the weld area along the process axis. As shown in Figure 5A, the weld is via a press-fit butt joint, and the process beam and imaging beam are directed to the weld area (indicated by arrows) of part 502. Figure 5B shows part 502 and the weld area 503 before keyhole formation with a process beam power of 0W. The part has a gap 505 and a subsurface shelf 506 below the weld area 503 (e.g., located approximately 8 mm below the top surface). Figure 5C shows a keyhole 508 with full penetration at a process beam power of 1150–1900W. In this case, the keyhole 508 exposes the shelf 506, and the imaging beam passes through the keyhole 508, is reflected from the shelf 506, and returns through the keyhole 508. Figure 5D shows the keyhole 508 with partial penetration at a process beam power reduced to 900W. In this case, the keyhole 508 is closed, and the imaging beam 522 is reflected from the bottom 509 of the keyhole 508.

[0040] Figure 5E illustrates how ICI is used to monitor full penetration in a butt welding application. The ICI system has a standard field of view (e.g., approximately 12 mm in total) for typical keyhole welding monitoring. However, the entire field of view of the ICI overlaps, so that the lower half of the surface appears to overlap with the upper half. This dual field of view can be used to resolve reflections from the shelf 506 below the welding path along the process axis. Full penetration of the keyhole 508 provides a clear path for the imaging beam, allowing the lower surface to be imaged and made visible in the ICI data (within the dual field of view overlapping the standard field of view).

[0041] Referring to Figures 6-9, ICI data can be used to calculate signal density and implement a quality assurance algorithm that passes or fails a butt weld based on full penetration, partial penetration, over-penetration, and / or loss of penetration in the weld. Figure 6 shows the raw ICI data generated along the weld length for different laser powers, representing different penetration states during welding. In this example, the laser was controlled to increase the power from 0W to 1900W at 200ms, giving power steps of 450ms at 1900W, 400ms at 1650W, 400ms at 1400W, 400ms at 1150W, and 400ms at 900W, and then decrease to 0W at 400ms. Figure 6 also shows the desired pass / fail outcome of the weld quality assurance algorithm. The arrows indicate where the raw data shows the shelf surface below keyhole penetration and the keyhole bottom after loss of penetration. A clear change in the shelf signal can be seen as the power changes.

[0042] This change in shelf signal can be quantified by calculating the imaging signal density as described above. Figure 7 shows the signal density (also called the fill factor) as a function of distance along the weld, along with the laser power as a function of distance along the weld. In this example, the signal density (or fill factor) is the moving percentage of measurements exceeding a 12 dB intensity threshold. The change in signal density can be observed for each power step, and a signal density of approximately 100% can be seen before and after welding when the imaging beam measures the solid top surface of the part.

[0043] Figures 8A–8E show the results of a quality assurance algorithm based on signal density (fill factor). In this example, the quality assurance algorithm rejects a weld if the signal density around a narrow depth band (e.g., 200 μm) around the shelf signal over a specific characteristic distance (e.g., 1–2 mm) exceeds a certain percentage (e.g., 10%). Figure 8A correctly indicates that the weld is passable, as the power is 1900 W and the signal density in the narrow depth band indicates that full penetration is achieved. Figures 8B–8D correctly indicate that the weld is failable because the signal density in the narrow depth band is too high, which indicates that the power is too low. In this case, a high signal density indicates too low power, as low power results in less disturbance at the shelf and more reflections from the shelf. Figure 8E shows how the weld is incorrectly passed because the signal density remains below the threshold, resulting in a partial penetration keyhole signal that is not dense enough to distinguish it from the weak shelf signal observed in the correct process state (Figure 8A).

[0044] Using other measurement results, welds in the condition shown in Figure 8E can be correctly rejected. In particular, the quality assurance algorithm can determine the pass or fail of a weld by using the maximum signal density, as described above, along with distance measurement results such as the maximum continuous distance outside the boundary. For example, as shown in Figure 9, a weld will be rejected as a result of a distance measured continuously over 4 mm outside the boundary or outside the narrow depth band of 200 μm between 2050 μm and 2250 μm around the shelf signal location (in the condition shown in Figure 8E). Measurement points outside the boundary in the 1900 W region (in the condition shown in Figure 8A) are not significant enough to cause defects, and the weld in that condition will be correctly rejected using this quality assurance algorithm. Therefore, the automatic quality assurance algorithm can reject a weld by applying the "OR" logical operation to the maximum signal density and maximum distance measurement results described above. In addition, the minimum signal density may also be used in certain applications.

[0045] Figures 10A and 10B illustrate other part shapes in which weld penetration can be monitored during butt welding applications using ICI and imaging signal density. The subsurface pocket defined by the part shape in Figure 10A has a flat pocket floor that reflects most of the imaging beam back to the ICI system when the keyhole is open. The subsurface pocket defined by the part shape in Figure 10B has a pocket floor containing a V-shaped groove that ends in a butt joint with its center directly along the process axis, scattering light within the pocket when the keyhole is open and returning a smaller amount of imaging beam to the ICI system. Even with this shape, where a relatively weak signal is returned from the pocket floor, weld penetration can still be monitored using imaging signal density.

[0046] In some embodiments, the component geometry may be modified or designed to improve subsurface reflectivity. If the subsurface structure has a geometric shape that does not provide good reflectivity (for example, as shown in Figure 10B), the subsurface structure may be modified to improve reflectivity. For example, a polymer layer or other coating may be used on the pocket bed to improve the reflectivity of the subsurface structure and increase the signal intensity returned from the pocket bed. The layer and / or coating may be designed to be consumed, evaporated, or otherwise removed by the process beam during the process. If no subsurface structure is present along the process axis, the component geometry may be modified or designed to form a subsurface structure that can reflect the imaging beam passing through the keyhole.

[0047] When backing plates or sacrificial materials are intentionally placed to generate strong reflections for the ICI system, it is particularly useful that such materials and backing plates are easily recoverable, replaceable, or cleanable, and that they withstand the energy of lasers or electron beams and / or the adhesion of sputter. One example is to flow water over or under the copper surface. In this embodiment, the ICI system can image the water and the copper surface to confirm that the weld is fully penetrated. In other embodiments, the copper surface is completely omitted, and the ICI system images a water jet or mist (or other fluid) passing beneath the weld joint. If a light-scattering medium (encompassing gas, including vapor) is present in the fluid jet, it generates multiple scattering events for the ICI image, which are very easily distinguishable from other signals, allowing the user to confirm that light can pass through the workpiece joint and that a fully penetrated weld is assumed. The scattering medium can be further identified by changing the integration time of the ICI system (to modulate the system's sensitivity to fast-moving artifacts) and / or by applying Doppler or speckle dispersion methods known to those skilled in the art of optical coherence tomography, so that it exhibits velocities within a specific range that do not coincide with motion from other aspects of the process (such as vapor channels or sputtering). It is particularly useful to apply an imaging processor in synchronization with the modulation of the ICI integration time to enable differential comparison between measurement results acquired at different integration periods.

[0048] In some embodiments, the fluid comprises or contains a material that emits (e.g., fluorescence) when irradiated with a process energy beam, or other optical beams transmitted with the process beam, and the beam transmission system (e.g., including transmission fibers) and / or laser are configured to receive this emission and confirm that complete penetration of the weld is occurring. According to one embodiment, this emission can be received using an auxiliary optical sensor. An example of an ICI system with an auxiliary sensor is disclosed in the applicant's International Application No. PCT / US2018 / 014218 (Patent Document 6), which is incorporated in whole by reference hereto. Receiving and recognizing this emission can be difficult with other emission from the process itself (e.g., blackbody emission from a hot workpiece). To address this, the detection of this signal can be achieved by separating emission at specific wavelengths (e.g., fluorescence emission lines) using an optical filter, and / or by separating it in time (at a rate of several kHz or several MHz) by pulsed operation of the excitation source, and by comparing the measured signal in the pulse with a signal measured at another time. When the pulse frequency differs sufficiently from the rate at which the background noise changes, the true signal can be identified much more easily, allowing for the identification of full penetration in a weld. This concept is also applicable to other material processing applications such as drilling and cutting, and can demonstrate that full penetration has occurred in substantially opaque materials.

[0049] Referring to Figures 11A to 11C, the system and method of this disclosure can be used to monitor the weld penetration of a butt weld without subsurface structures along the process axis below the weld area. In this example, the imaging signal density can be used to distinguish between complete penetration and critical penetration loss. Figures 11A to 11C show images of the weld root as the laser power is reduced from 9.6 kW to 6.0 kW, 7.0 kW, and 8.0 kW, respectively. The weld root is visible in Figure 11A, sporadically in Figure 11B, but in Figure 11C, it is continuous melting throughout the entire weld, with only thinned portions of the root visible. In this example, the welds in Figures 11A and 11B are unacceptable, while the weld in Figure 11 is acceptable.

[0050] Figures 12A to 12C show the ICI keyhole measurement results as a function of the weld distance shown in Figures 11A to 11C, respectively. Each plot indicates that the keyhole is closed at the beginning of the power-reducing region, indicated by the increase in point density within that region. Figure 13 shows the imaging signal density as a function of distance for the three welds shown in Figures 11A to 11C in a single plot, where signal density 1301A is for a 6.0 kW weld, signal density 1301B is for a 7.0 kW weld, and signal density 1301C is for an 8.0 kW weld. In this example, the measurement or tracking threshold is 17 dB, and welds with an imaging signal density exceeding 2.8% (indicated by the dashed line) over more than 2 mm are considered unacceptable. This plot of imaging signal density helps to indicate pass / fail decisions by more clearly distinguishing between welds that passed with an imaging signal density below the limit (i.e., the weld in Figure 11C) and welds that failed with an imaging signal density exceeding the limit (i.e., the welds in Figures 11A and 11B).

[0051] Figure 14 shows the ICI keyhole measurement results (top) and imaging signal density (bottom) for welds with speeds of 3.8 m / min and 3.5 m / min and a power reduction from 9.6 kW to 6.0 kW. As shown, the imaging signal density, plotted as a function of distance, indicates that the reduction in speed results in a difference between pass and fail welds. Using the imaging signal density, it is possible to change one or more process parameters (welding speed, power, defocus, lateral process beam offset, etc.) to alter the geometric shape of the weld keyhole. Furthermore, by adjusting the ICI measurement settings (measurement threshold, signal density limit, keyhole measurement position, etc.), it is possible to ensure that the quality assurance algorithm provides the desired pass / fail results for specific applications.

[0052] Referring to Figures 15A to 15D, further embodiments of systems and methods for monitoring material processing using imaging signal density can be used to monitor oscillating welding processes (such as laser welding processes for battery tabs). This type of process is common in electromobility (E-mobility) applications (such as battery pack assemblies) and is frequently used to join conductive metals (such as copper and aluminum) in a variety of configurations. Other metals, such as steel and other iron alloys, and metal coatings such as nickel are also common in these processes. Prismatic cells, pouch cells, and cylindrical cells are non-limiting examples of battery pack assembly configurations. In E-mobility welding applications, oscillating welding methods using single-mode lasers are generally employed to improve the weldability of the highly reflective metals involved in the process.

[0053] In this application, the fluctuation pattern results in periodic spatial variations in the alignment between the imaging beam measurement site and the phase change region (PCR) location. Furthermore, the fluctuation pattern can also cause periodic temporal variations in the PCR due to changes in linear energy density around the fluctuation pattern, leading to periodic formation and collapse of keyhole vapor channels. As a result of these variations, a series of A-scans obtained at a given imaging beam location may include those corresponding to the vapor channel and those corresponding to its nearby surface (e.g., molten pool or workpiece surface). Classifying each A-scan into a corresponding category (e.g., PCR, vapor channel, workpiece surface, molten pool, etc.) is useful for improving the accuracy of the measurement system.

[0054] Precise spatiotemporal synchronization with the fluctuation pattern (more specifically, the PCR position) may be impossible to achieve. Therefore, classifying A-scans into the categories and types mentioned above relies on the information contained in the measurement results themselves. Such classification can be performed using imaging signal density. Figure 15A shows A-scan data (i.e., optical path distance) along the weld, and Figures 15B to 15D show the use of imaging signal density and static threshold levels to classify the A-scan data in Figure 15A as "keyhole" depth or "surface". Furthermore, classification accuracy can be improved using more complex thresholding and signal analysis methods.

[0055] Figure 15B shows the signal density plot corresponding to the depth tracking data in Figure 15A. The signal density is compared against a constant signal density threshold level (0.78 in this example). A scans with signal density values ​​above the threshold are classified as "surface," while those below the threshold are classified as "keyhole" depth. Depth tracking data points from "keyhole" A scans are plotted separately from the depth tracking data points from "surface" A scans in Figure 15C. The classified data can then be used, for example, for additional data processing, quality assurance decisions, and feedback control signals, as described above. In this example, the "keyhole" depth signal is subtracted from the "surface" signal to generate a depth measurement result relative to the local surface of the workpiece (Figure 15D). The quality assurance decision algorithm itself can then be applied to the surface-referenced keyhole depth. Furthermore, the "surface" signal can be used to compensate for variations in optical path distance caused by the scanning optical system.

[0056] Similar periodic time variations are observed in PCR in pulsed laser welding applications, and these can also be subject to the classification described above. While the above example shows the A-scan classification for periodic PCR changes, the classification method described above is also useful for non-periodically changing PCR and other workpiece characteristics. Examples of processes that can produce such changes include those with fluctuating process conditions (material type, laser power, welding speed, focus, shielding gas, etc.) or those with higher inherent instability.

[0057] While the illustrated example shows the classification of "surface" and "keyhole," the concept of classifying A-scans using imaging signal density can also be used to classify A-scans that involve any aspect of the phase transition region or workpiece sub-region. Such aspects include, but are not limited to, vapor channels, vapor channel bottoms, vapor channel sidewalls, weld penetration depth, molten pool, workpiece surface, material composition, material phase, and material density.

[0058] A further application of the method described above is the classification and identification of various aspects of workpieces. For workpieces composed of multiple material types, signal density can be used to distinguish one material type from others, or to classify whether an A-scan belongs to a particular material type. Different material types have inherently different optical and geometric properties, resulting in different signal levels received by the imaging system. These signal levels represent different signal density readings, and these values ​​can be used in combination with thresholding algorithms to classify A-scans to correspond to specific material types. Such classification is useful in a wide variety of applications (including, but not limited to, dissimilar material laser welding, laser material removal, laser cleaning, laser additive manufacturing, and laser marking).

[0059] The phase of a substance (e.g., solid, liquid, gas) and the degree of the substance (e.g., semi-solid, semi-liquid) have a similar effect on the level of the measurement signal received by the imaging system, i.e., the signal density. By analyzing the signal density, one phase of a substance or degree of substance can be distinguished from others. This type of classification can be useful in laser processing applications where it is often necessary to distinguish between the solid (e.g., workpiece), liquid (e.g., molten pool), and gaseous (e.g., vapor channels in keyhole welding) aspects of the process.

[0060] Furthermore, material density also causes characteristic changes in signal density levels similar to those described above. For example, aggregates of metal powder particles (e.g., those used in powder additive manufacturing) exhibit more diffuse scattering than their corresponding bulk solid form. Diffuse scattering typically results in signal density readings that are distinguishable, for example, by signal stability or signal level, compared to signal density readings associated with more reflective surfaces.

[0061] The example included in this application is a simple example of the advantages of A-scan classification based on signal density. The method described above is extendable to other applications.

[0062] A more general use involves classifying A-scan acquisition results into one or more individual channels, but is not limited to this. These channels can be further analyzed to measure or quantify the process characteristics. In addition to classifying which channel an A-scan belongs to, classifications can also be made to identify which channels an A-scan does not belong to.

[0063] The method described herein is particularly suitable for applications and processes where, for example, prior planning or synchronization of the process is not possible as a result of hardware limitations or fluctuating process conditions. A-scan classification helps overcome these limitations by providing retrospective synchronization to the process configuration.

[0064] A system, method, algorithm, and software are provided for calculating the density of inline coherent imaging signals. This method can be used to monitor and control laser-activated materials and perform general inspections of materials, parts, components, products, etc.

[0065] In one embodiment, the ICI signal density is calculated by determining whether each A-scan contains a measurement point that exceeds a user-defined signal intensity threshold (e.g., measured in dB above the detector noise floor, excluding a user-defined region near the zero delay point), and calculating the percentage of A-scans that satisfy this condition within a user-defined distance or time (referred to as a "bin") over which the signals are aggregated.

[0066] In some embodiments, multiple bins may be defined end-to-end, connecting the ends of the bins in the measurement starting from the first acquired A scan. In some embodiments, multiple bins may be defined consistently overlapping. In some embodiments, multiple bins may be defined overlapping with respect to the location of the A scan that satisfies the above condition. In some embodiments, the resulting percentage values ​​may be further smoothed by algorithms such as (but not limited to) moving averages, medians, and quantile filters.

[0067] In some embodiments, the data generated by this method may be used for automatic pass / fail and quality evaluation of laser material processing processes, or for automatic pass / fail and quality evaluation of materials, parts, components, products, etc.

[0068] In one embodiment, the intensity or density of the ICI signal is used to monitor the vapor channels in a full-penetration laser or electron beam welding process.

[0069] In other embodiments, this method is used to monitor vapor channels in a partial penetration laser or electron beam welding process.

[0070] In other embodiments, this method is used to monitor the molten pool in a conducted laser or electron beam welding process.

[0071] In other embodiments, this method is used to monitor the molten pool or initial vapor channel of an intermediate laser or electron beam welding process in a typical energy density scheme between a keyhole welding process and a conduction welding process.

[0072] In other embodiments, this method is used to monitor the molten pool of a partially or fully fused laser or electron beam welding process.

[0073] In other embodiments, this method is used to monitor the surface state and properties of a material before a laser or electron beam material processing process.

[0074] In other embodiments, this method is used to monitor the surface state and properties of a material after a laser or electron beam material processing process.

[0075] In other embodiments, this method is used to inspect the surface condition and properties of a material before a laser or electron beam material processing process.

[0076] In other embodiments, this method is used to inspect the surface condition and properties of a material after a laser or electron beam material processing process, where "material" can refer to the weld molten area itself, the surrounding material, the material / surface coating, or other surface parts related to the process.

[0077] This method allows for monitoring of vapor channels in a full penetration laser or electron beam welding process where vapor channels enter subsurface cavities or voids, or in a full penetration laser or electron beam welding process where vapor channels do not enter subsurface cavities or voids. In some embodiments, subsurface cavities or voids may be gas pockets or similar features. In some embodiments, vapor channels penetrate the material into free space, where other surfaces exist along the process axis. These free space surfaces include steps and shelves of the parts or assemblies being welded, surfaces of surrounding equipment, surfaces of other components within the assembly to which the welded part belongs, surfaces of sacrificial or temporary guards or shields present in the welding process, and surfaces of fasteners, fixtures, gas transfer units, and exhaust equipment within the welding cell.

[0078] In other embodiments, the method is used in parallel with other methods, algorithms, and software applied to the same ICI data to extract or calculate other metrics or measurement results, such as weld penetration depth. In other embodiments, the results of the method are used independently of the depth results of a penetration depth extraction method applied in parallel with the same ICI data to monitor, evaluate, or control specific aspects of the welding process. In other embodiments, the results of the method are used in conjunction with the depth results of a penetration depth extraction method applied in parallel with the same ICI data to monitor, evaluate, or control specific aspects of the welding process.

[0079] In other embodiments, this method is used in parallel with other methods, algorithms, and software applied to other subsets of ICI data acquired during the same laser material processing process to extract or calculate other metrics or measurement results.

[0080] In other embodiments, the method is used in parallel with other methods, algorithms, and software applied to other subsets of ICI data acquired during the same laser or electron beam welding process to extract and / or calculate the height of the material to be welded, the edge of the material or surrounding equipment, the lateral position of the joint or seam, the longitudinal surface profile of the finished weld, or metrics and characteristics derived therefrom, the lateral surface profile of the finished weld, or metrics and characteristics derived therefrom.

[0081] In other embodiments, the calculated signal density can be used together with or in parallel with the measured intensity of the same ICI data to better extract relevant information about the substance, component, or process being measured. This intensity data can be filtered, smoothed, or averaged.

[0082] In other embodiments, signal density measurements are used to determine the keyhole / weld stability for turbulent processes (e.g., aluminum / titanium / alloy welding).

[0083] In some embodiments, subsurface features may be intentionally designed to consistently or predictably promote backscattering of the ICI beam, with the aim of making the method more effective. Such features include gas pockets and channels, other features contained within a part or assembly below the process region, and other features located anywhere within the process beam axis region. Such designs may include geometric shapes, surface finishes, surface angles, material selection (e.g., identifiable by fluorescence emission or light scattering), coatings, cladding, paints, and other design elements that facilitate measurements using the method. These design elements may also include ventilation, gas flow, and melt flow control techniques designed to influence the laser process in order to facilitate measurements using the method.

[0084] In other embodiments, multiple feature regions of the phase change region (PCR) of the processed material are illuminated simultaneously or sequentially using an ICI system, and the signal density from each region is analyzed separately in one or multiple dimensions, and / or the regions are correlated to indicate one or more parameters of the material processing process.

[0085] In other embodiments, the process is managed using the signal density from one or more regions of the process. Such management can be in real time (during the process) or over multiple cycles.

[0086] In some embodiments, the ICI beam is dithered (vibrated) to compensate for process instability, particularly when the butt joint has non-uniform thickness on both sides. In such cases, the relative motion of the workpiece to the process beam can significantly affect the geometric shape of the PCR, and the instability caused by this motion is compensated for by dithering.

[0087] In some embodiments, the measurement location at the bottom of the keyhole is changed based on other ICI measurement results at the seam location and / or the ICI measurement results of the PCR itself.

[0088] In a further embodiment, the material shelf or other surface of the welded assembly in a full-penetration laser weld, for which the ICI signal density is calculated, is substantially perpendicular to the process axis, traversed by the process axis, and located less than 10 m from the target weld joint on the opposite side of the weld beam transmission optical system. The material shelf is measured by the ICI beam passing through a full-penetration vapor channel during the welding process (i.e., making a round-trip movement through the channel to the shelf and back). The ICI signal density is calculated together with the weld penetration depth measurement results, which are extracted in parallel from the same ICI data. A logical formula is applied to the signal density measurement results together with the weld penetration measurement results to formulate an automatic pass / fail determination for the laser welding process and generate data for automatic control. This method is applied in conjunction with other methods for monitoring the process based on seam position, material height, longitudinal finish weld surface profile and its derived metrics, transverse surface profile and its derived metrics, and other measurement results (and their derived metrics) obtained by in-line coherent imaging or a photodiode type process monitoring system.

[0089] Other aspects of the present disclosure relate to a computer-readable storage medium that, when executed by a processor, causes the processor (or a device containing such a processor) to perform imaging signal density calculations relating to the present disclosure. When in use, the computer-readable storage medium may take the form of a product. In some examples, the computer-readable storage medium may be a non-temporary computer-readable medium or a machine-readable storage medium, and includes, but is not limited to, optical storage mediums, magnetic storage mediums, and semiconductor storage mediums. In any case, the storage medium may include or store computer-executable instructions that, for example, calculate imaging signal density and instruct steps of a method for monitoring and / or controlling material processing using the imaging signal density. Non-limiting examples of suitable usable computer-readable storage mediums include tangible media capable of storing electronic data, such as volatile memory, non-volatile memory, removable memory, non-removable memory, erasable memory, non-erasable memory, writable memory, and rewritable memory. Examples of computer executable instructions include appropriate types of code, such as source code, compiled code, interpreted code, executable code, static code, dynamic code, object-oriented code, and visual code.

[0090] The principles of the present invention have been described above, but those skilled in the art should understand that this description is merely illustrative and does not limit the scope of the invention. Other embodiments are conceivable within the scope of the invention in addition to the exemplary embodiments disclosed herein. Modifications and substitutions by those skilled in the art are considered to be within the scope of the invention without being limited by the appended claims.

[0091] 112 Process beams 122 Imaging beams 502 parts 503 Welding Area 505 void 506 Below surface shelf 508 Keyhole 509 Keyhole bottom 522 Imaging beams

Claims

1. To generate a process beam and direct the process beam towards a workpiece for material processing, Generating an imaging beam, Directing the imaging beam towards the workpiece, To generate an interference output from at least one component of the imaging beam reflected from the workpiece, Using the interference output, multiple A scans of the workpiece are generated, A method comprising classifying the plurality of A scans with respect to at least one aspect of a phase change region or a workpiece sub-region.

2. Determining the imaging signal density from the aforementioned interference output, The method according to claim 1, further comprising classifying the plurality of A scans using the imaging signal density.

3. The method according to claim 2, wherein determining the imaging signal density includes determining whether each A scan satisfies the condition that it contains a measurement point exceeding a signal intensity threshold, and calculating the percentage of A scans that satisfy this condition within the bin of A scans.

4. The method according to claim 2, wherein classifying the plurality of A scans includes classifying the plurality of A scans based on the imaging signal density compared to a certain signal density threshold level.

5. The method according to claim 1, wherein at least one aspect of the phase change region or workpiece sub-region is at least one of a vapor channel, a vapor channel bottom, a vapor channel sidewall, a weld penetration depth, a molten pool, a workpiece surface, a material composition, a material phase, and a material density.

6. The method according to claim 1, further comprising determining at least one other measurement result using the imaging beam.

7. The method according to claim 6, wherein the at least one other measurement result is a distance measurement result.

8. The method according to claim 7, wherein the distance measurement result indicates the penetration depth.

9. The method according to claim 1, further comprising processing the workpiece to give it subsurface features that promote backscattering of the imaging beam.

10. The method according to claim 1, wherein directing the process beam toward the workpiece includes directing the process beam toward the workpiece in a oscillating pattern.

11. Using inline coherent imaging, generate multiple A-scans of the workpiece with distance or time intervals between them, A method comprising classifying the plurality of A scans with respect to at least one aspect of a phase change region or a workpiece sub-region.

12. Calculating the inline coherent imaging signal density, The method according to claim 11, further comprising classifying the plurality of A scans using the inline coherent imaging signal density.

13. The method according to claim 12, comprising calculating the inline coherent imaging signal density to determine whether each A-scan satisfies the condition that it includes a measurement point exceeding a signal intensity threshold.

14. The method according to claim 11, further comprising processing the workpiece to give it subsurface features that promote backscattering of the imaging beam.

15. The method according to claim 11, further comprising directing a process beam toward the workpiece in an oscillating pattern.

16. The method according to claim 11, wherein at least one aspect of the phase change region or workpiece sub-region is at least one of a vapor channel, a vapor channel bottom, a vapor channel sidewall, a weld penetration depth, a molten pool, a workpiece surface, a material composition, a material phase, and a material density.

17. A material processing system configured to generate a process beam and direct the process beam toward a workpiece, An inline coherent imaging system is configured to generate an imaging beam, direct the imaging beam towards the workpiece together with the process beam, generate an interference output from the reflection of the imaging beam, detect the interference output, and generate inline coherent imaging data. A system comprising: a monitoring system programmed to receive the inline coherent imaging data, determine at least the inline coherent imaging signal density, and classify at least one aspect of a phase change region or a workpiece sub-region using the inline coherent imaging signal density.

18. The system according to claim 17, wherein the monitoring system is programmed to receive A-scan data representing multiple A-scans of a workpiece using inline coherent imaging and to determine the inline coherent imaging signal density.

19. The system according to claim 18, wherein the monitoring system is programmed to determine the inline coherent imaging signal density by determining whether each A scan includes a measurement point that exceeds a threshold.

20. The system according to claim 17, wherein the material processing system is configured to direct the process beam toward the workpiece in an oscillating pattern.

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