Receivers and magnetic communication equipment

Abstract

To provide a magnetic communication apparatus and the like that can increase the amount of information transmission without being restricted by skin effect, proximity effect, radiation resistance, or the like, and that can be miniaturized.SOLUTION: A magnetic communication apparatus includes a transmitter 410 and a receiver 420. The transmitter 410 includes a first signal source 411, a second signal source 412, a modulator 414, a power amplifier 416, and a transmitting coil 418. The receiver 420 includes a magnetic sensor 421, a high frequency signal processing circuit 422, a first demodulator 424, a second demodulator 426, and an output controller 428. The magnetic sensor 421 utilizes ferromagnetic resonance for receiving a second modulated wave m2 that has arrived using a magnetic field as a medium, and outputs a signal corresponding to the magnetic field. The output controller 428 visualizes a demodulated original modulated signal (information) and outputs it as sound pressure, light, and / or force or the like.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a magnetic communication technology used in seawater or underground.

Background Art

[0002] In conventional transmitters and receivers for magnetic communication, a coil is used as a receiving antenna for detecting the strength or direction of a magnetic field, which is the medium for information (see, for example, Patent Document 1). The reason why a magnetic field is used as the medium for information is that it is hardly affected by seawater or groundwater with high permittivity and conductivity, and low-loss and relatively long-distance transmission is possible. The coil of the receiving antenna is called a loop antenna, and is formed by winding a plurality of times a thin wire with good conductivity with a radius sufficiently small compared to the wavelength. In addition, generally, devices such as connecting a capacitor to form a resonant circuit to enhance sensitivity are made.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in receivers using coils, at relatively high frequencies that can transmit a lot of information, such as 10 kHz or higher, losses due to the skin effect, proximity effect, and radiation resistance increase, limiting the receivable signal strength. Consequently, the communication distance is also limited. Furthermore, while resonant circuits constructed by connecting capacitors improve receiving sensitivity, they also have the problem of limiting the frequency band that can be used for communication. Moreover, when using a coil as a receiving antenna, in principle, the induced electromotive force is obtained from the change in the magnitude of the magnetic field linked in the coil loop, making it difficult to improve the sensitivity of the coil while miniaturizing it (if the coil loop is made smaller to achieve miniaturization, the linked magnetic field becomes smaller).

[0005] Therefore, the present invention aims to provide magnetic communication equipment, etc., that can increase the amount of information transmitted without being limited by the skin effect, proximity effect, or radiation resistance, and that can be miniaturized. [Means for solving the problem]

[0006] The receiver of the present invention is A magnetic sensor utilizing ferromagnetic resonance to receive a modulated wave m2 arriving via a magnetic field, To excite the ferromagnetic resonance of the magnetic sensor of The two output signals are: a first output signal S1 of the modulated wave m2 that responds to the common-mode component I of the high-frequency excitation signal, and a second output signal S2 of the modulated wave m2 that responds to the orthogonal component Q of the high-frequency excitation signal. Rahen It is equipped with a demodulator for demodulating the signal.

[0007] The magnetic communication device of the present invention A magnetic communication device that utilizes changes in magnetic fields as information, A transmitter comprising: a signal source for generating a high-frequency signal that will serve as a carrier wave; a modulator for transmitting a first modulated wave m1 obtained by modulating the carrier wave with a modulation signal; a power amplifier for power amplified the modulated wave; and a transmitting coil for transmitting a second modulated wave m2 obtained by the power amplifier. A magnetic sensor that utilizes ferromagnetic resonance to receive a second modulated wave m2 that arrives via a magnetic field, and to excite the ferromagnetic resonance of the magnetic sensor of The two output signals are: a first output signal S1 of the second modulated wave m2 that responds to the common-mode component I of the high-frequency excitation signal, and a second output signal S2 of the second modulated wave m2 that responds to the orthogonal component Q of the high-frequency excitation signal. Rahen It comprises a receiver equipped with a demodulator for demodulating a signal.

[0008] According to the magnetic communication device of the present invention, the amount of information that can be transmitted can be improved and the communication device can be miniaturized. [Brief explanation of the drawing]

[0009] [Figure 1] An explanatory diagram illustrating the configuration of a magnetic communication device as one embodiment of the present invention. [Figure 2] Other explanatory diagrams regarding the configuration of a magnetic sensor. [Figure 3] An explanatory diagram of the signal processing circuit configuration. [Figure 4] Block diagram of the signal processing circuit that makes up the receiver. [Figure 5A] An explanatory diagram regarding the power spectrum of the second modulated wave m2 detected by the magnetic sensor. [Figure 5B] An explanatory diagram of the power spectrum output from a magnetic sensor, which is a receiving antenna. [Figure 5C] An explanatory diagram of the power spectrum of the first output signal S1 of the second modulated wave m2, which responds to the in-phase component I of the high-frequency excitation signal for exciting the ferromagnetic resonance of a magnetic sensor, after the modulated wave m3 is multiplied with the high-frequency excitation signal by the first mixer. [Figure 5D] This diagram illustrates the power spectrum of the second output signal S2 of the second modulated wave m2, which responds to the orthogonal component Q of the high-frequency excitation signal used to excite the ferromagnetic resonance of a magnetic sensor, after the modulated wave m3 is multiplied with the high-frequency excitation signal by the second mixer. [Figure 6] An explanatory diagram showing the output results of a receiver in response to frequency changes in a high-frequency excitation signal. [Figure 7] Explanatory diagram of the output result of the receiver with respect to the bias magnetic field applied to the magnetic sensor. [Figure 8] Explanatory diagram of the output characteristics of the receiver with respect to the frequency change of the second modulated wave m2. [Figure 9] Explanatory diagram of the output characteristics of the receiver with respect to the communication distance. [Figure 10] Explanatory diagram of the power spectra of the first output signal S1 and the second output signal S2 of the receiver. [Figure 11] Explanatory diagram of the error rate per packet in data transmission with respect to the communication distance.

Mode for Carrying Out the Invention

[0010] As one embodiment of the magnetic communication device of the present invention shown in FIG. 1, it includes a transmitter 410 and a receiver 420.

[0011] The transmitter 410 includes a first signal source 411, a second signal source 412, a modulator 414, a power amplifier 416, and a transmission coil 418.

[0012] The first signal source 411 generates a high-frequency signal serving as a carrier wave. The second signal source 412 generates a modulation signal. The modulator 414 sends out a first modulated wave m1 obtained by modulating the carrier wave with the modulation signal. The power amplifier 416 power-amplifies the modulated wave. The transmission coil 418 sends out a second modulated wave m2 obtained by the power amplifier 416.

[0013] The receiver 420 comprises a magnetic sensor 421, a high-frequency signal processing circuit 422, a first demodulator 424, a second demodulator 426, and an output controller 428. The magnetic sensor 421 outputs a signal corresponding to the magnetic field by utilizing ferromagnetic resonance to receive a second modulated wave m2 arriving via a magnetic field. The high-frequency signal processing circuit 422 outputs a first output signal S1 of the second modulated wave m2 in response to the in-phase component I of the high-frequency excitation signal used to excite the ferromagnetic resonance of the magnetic sensor 421, and a second output signal S2 of the second modulated wave m2 in response to the orthogonal component Q of the high-frequency excitation signal. The first demodulator 424 and the second demodulator 426 each demodulate the modulated signal from the output signals. The output controller 428 outputs the demodulated original modulated signal, i.e., information that can be visualized and, specifically, transmitted to the receiver as sound pressure including audible speech, visually transmitted light, and / or tactilely transmitted force.

[0014] The transmitter 410 and receiver 420 are positioned within a communication distance obtained by dividing the carrier wavelength λ by 2π, i.e., within the near-field. In the near-field, the magnetic field, which serves as the medium for information, is superior to the electric field, allowing for efficient information transmission through seawater or the ground.

[0015] The frequency band of the carrier wave generated by the first signal source 411 is preferably in the range of 10 to 500 kHz. Generally, the higher the frequency, the more information can be transmitted, but the high-frequency current flowing through the transmitting coil increases losses such as the skin effect, reducing efficiency.

[0016] Modulation methods that can be applied by modulator 414 include known analog modulation methods such as amplitude modulation, frequency modulation, and phase modulation; digital modulation methods such as amplitude shift modulation, frequency shift modulation, phase shift modulation, quadrature-to-amplitude modulation, and / or amplitude-to-phase modulation; and orthogonal frequency division multiplexing, which is capable of transmitting multiple pieces of information simultaneously.

[0017] The transmitting coil 418 may be configured as a phased array antenna, in which multiple coils are arranged in an array, and the amplitude and phase of the current supplied to each coil are controlled to beam scan the second modulated wave m2. Such a configuration has strong directivity in a specific direction and can obtain high gain. Therefore, signals can be transmitted over long distances.

[0018] Furthermore, it is preferable to apply an electric field shield to the transmitting coil 418 in order to suppress electric field components that are significantly attenuated by moisture in seawater or underground.

[0019] Multiple magnetic sensors 421 utilizing ferromagnetic resonance may be arranged in an array, and the amplitude and / or phase of the high-frequency excitation signal for exciting the ferromagnetic resonance of each magnetic sensor 421 may be controlled to efficiently receive the second modulated wave m2 arriving from the transmitting coil 418 via the magnetic field in a specific direction. Such a configuration has strong directivity in a specific direction and can achieve high reception sensitivity.

[0020] The output controller 428 can output the original modulated signal demodulated by the first demodulator 424 and the second demodulator 426, that is, in the form of sound (pressure) containing speech that can be audibly transmitted to the receiver. Specifically, after performing known signal processing, such as amplifying the modulated signal to a desired signal strength and removing unwanted noise, it is possible to generate sound (pressure) using an electromagnetic conversion element, such as a speaker using an electromagnet and / or a piezoelectric element.

[0021] Furthermore, the output controller 428 can output a modulated signal, that is, information in the form of light that can be visually transmitted to the receiver. Specifically, after performing known signal processing, such as amplifying the modulated signal to a desired signal intensity and removing unwanted noise, it is possible to generate light using a photoelectric conversion element, such as a white light source lamp and / or a light-emitting diode.

[0022] Furthermore, the output controller 428 can output a modulated signal, that is, information in the form of a force that can be tactilely transmitted to the receiver. Specifically, after performing known signal processing, such as amplifying the modulated signal to a desired signal strength and removing unwanted noise, it is possible to generate force through movements such as extension, flexion, and / or rotation using actuators such as electric and / or hydraulic actuators that can convert the electrical signal into a physical force. The output controller 428 has a function to store the output data as digital data.

[0023] The magnetic sensor 421, as an embodiment of the present invention shown in Figure 2, comprises a dielectric substrate 100, a signal line layer 110 stacked in a substantially rectangular shape extending front to back on the upper surface of the dielectric substrate 100, a pair of substantially rectangular ground conductor layers 121 and 122 extending front to back, spaced apart to the left and right from the signal line layer 110 on the upper surface 101 of the dielectric substrate 100, a ground conductor layer 124 formed on the lower surface of the dielectric substrate 100, and an input / output terminal electrically connected to one end of a transmission line 120 composed of ground conductor layers 124, 121, and 122. Child and The transmission line 120 is further equipped with a soft magnetic thin film 140 partially laminated on the other end and a thin-film magnet 150. The grounding conductor layer 124 may be omitted.

[0024] As the dielectric substrate 100, for example, substrates made of semiconductor materials such as single-crystal silicon and germanium, compound semiconductor materials such as GaAs, GaN, SiC, ZnSe, CdS, ZnO, InP, and SiGe, as well as quartz, sapphire, and glass, and ceramic materials such as alumina, silicon nitride, aluminum nitride, zirconia, silicon carbide, titania, yttria, or composite materials thereof may be used.

[0025] Signal line layer 110, transmission line 120, ground conductor layer 121 , 122 and For 124, Al, Cu, Au, Pt, Ag, or Ti, or multilayer thin films thereof may be used.

[0026] As the soft magnetic thin film 140, an amorphous thin film of the Co-Fe-Si-B or Co-Nb-Zr system, a microcrystalline thin film of the Fe-Si or Fe-Zr-N system, or a multilayer thin film in which a thin insulating layer such as SiO is sandwiched between these thin films, a crystalline thin film of the Ni-Fe or Fe-Si-Al system, or a bulk material of Fe-Si alloy, Fe-Co-Ni alloy, or Sendust alloy, an amorphous alloy thin strip of the Co-Fe-Ni-Si-B, Fe-Co-Ni-Zr, Fe-Ni-B, Co-Fe-Zr, or Co-Zr system, or a thin film made of soft magnetic ferrite may be used. The soft magnetic thin film 140 is preferably located near the signal line layer 110.

[0027] As the thin-film magnet 150, sputtered thin films of Pt-Fe, SmCo, Nd-Fe-B, Sm-Fe-N, or Nd-Fe-N types may be used, or metallic bulk magnets such as Mn-Al-Co, Co-Pt, Fe-Pt, Fe-Al-Ni, oxide-based ferrite magnets, or rare-earth-based SmCo or Nd-Fe-B magnets may be used.

[0028] Figure 3 shows the magnetic field distribution generated near the signal line layer 130. When a high-frequency current flows through the signal line layer 130, a magnetic field B is generated around the signal line layer 130, as shown in Figure 3. The strength of the magnetic field B decreases sharply as it moves away from the signal line layer 130. Also, the electric field E is concentrated between the signal line layer 130 and the ground conductor layers 121 and 122. The characteristic impedance of the transmission line 120 is defined by the ratio of the electric field E to the magnetic field B, and strongly depends on the dielectric constant ε and permeability μ of the medium near the signal line layer 110 where the electric field E and magnetic field B are distributed. Therefore, if a soft magnetic thin film 140 with high permeability is placed near the signal line layer 110, and the characteristic that the permeability μ of the soft magnetic thin film 140 changes with an external magnetic field is utilized, a characteristic impedance sensitive to slight changes in the magnetic field of the second modulated wave m2 arriving via the magnetic field can be obtained. This large change in characteristic impedance makes it possible to create a highly sensitive magnetic sensor, and thus a highly sensitive receiving antenna.

[0029] Furthermore, the magnetic sensor has a structure in which the termination of a transmission line 120 having a signal line layer 130 and ground conductor layers 121 and 122 is short-circuited, and a thin-film magnet 150 and a soft magnetic thin film 140 are stacked at the termination. The thin-film magnet 150 is pre-magnetized in the longitudinal direction of the soft magnetic thin film 140, and the magnetic field generated by the thin-film magnet 150 is induced in the soft magnetic thin film 140 which has high magnetic permeability. In other words, the thin-film magnet 150 and the soft magnetic thin film 140 form a closed magnetic circuit structure. Therefore, a magnetic bias is efficiently applied to the soft magnetic thin film 140.

[0030] The strength of the magnetic bias is preferably equal to the magnitude of the anisotropic magnetic field of the soft magnetic thin film 140. The external magnetic field due to the magnetic bias causes a torque on the magnetization of the soft magnetic thin film 140, resulting in precession of the magnetic moment. At this time, when an external magnetic field equal to the magnitude of the anisotropic magnetic field is applied to the soft magnetic thin film 140 and excited at a desired frequency, ferromagnetic resonance occurs. Therefore, a soft magnetic thin film in a ferromagnetic resonance state exhibits an extremely large change in permeability μ even in response to a slight change in the magnetic field of the second modulated wave m2 arriving via the magnetic field, and consequently, a more sensitive receiving antenna can be realized due to an even larger change in characteristic impedance.

[0031] The magnitude of this anisotropic magnetic field can be adjusted by the composition, deposition conditions, and / or heat treatment conditions of the soft magnetic thin film 140. Similarly, the remanent magnetization, which indicates the strength of the thin-film magnet 150, can also be adjusted by its composition, deposition conditions, and / or heat treatment conditions.

[0032] Figure 4 shows the signal processing circuit 4 that constitutes the receiver 420. 22 A block diagram is shown. Signal processing circuit 4 22 This includes a high-frequency excitation signal generator 21, amplifiers 24, 25, 26, 27, 28, 29, circulator 23, distributors 22, 31, 35, and mixer. 3 6. 37 and low-pass filters 40, 41 are provided. Two output signals are obtained: a first output signal S1 of the second modulated wave m2 that responds to the in-phase component I of the high-frequency excitation signal generated by the high-frequency excitation signal generator 21 for exciting the ferromagnetic resonance of the magnetic sensor 421, and a second output signal S2 of the second modulated wave m2 that responds to the orthogonal component Q of the high-frequency excitation signal.

[0033] High-frequency excitation signal generator 2 1 The high-frequency excitation signal generated is amplified by the first amplifier 24 and distributed in phase in two directions to the second amplifier 25 and the fourth amplifier 27 by the first distributor 22.

[0034] The high-frequency excitation signal sent to the second amplifier 25 is amplified by the second amplifier 25 and supplied to the input / output terminals of the magnetic sensor 421 via port P0 and port P1 of the circulator 23. In the magnetic sensor 421, the third modulated wave m3, which is the high-frequency excitation signal modulated by the second modulated wave m2, is amplified by the third amplifier 26 via port P1 and port P2 of the circulator 23 and distributed in phase in two directions to the first mixer 26 and the second mixer 27 by the third distributor 35.

[0035] The high-frequency excitation signal sent to the other fourth amplifier 27 is amplified by the fourth amplifier 27 and then distributed in phase and orthogonally in two directions to the first mixer 26 and the second mixer 27 in the second distributor. From the first mixer 26, a first output signal S1 of the second modulated wave m2, which responds to the in-phase component I of the high-frequency excitation signal for exciting the ferromagnetic resonance of the magnetic sensor 421, is sent out. This signal is then amplified to a desired magnitude by the fifth amplifier 28, unwanted noise is removed by the first low-pass filter 40, and then sent out to the first demodulator 424. From the second mixer 27, a second output signal S2 of the second modulated wave m2, which responds to the orthogonal component Q of the high-frequency excitation signal, is sent out. This signal is then amplified to a desired magnitude by the sixth amplifier 29, unwanted noise is removed by the second low-pass filter 41, and then sent out to the second demodulator 426.

[0036] Figures 5A to 5D each show power spectra to illustrate the function of the receiver 420. Figure 5A shows the power spectrum 30 of the second modulated wave m2 detected by the magnetic sensor 421. Here, the power spectrum 30 is obtained by orthogonal frequency division multiplexing using multiple carrier waves to make effective use of the frequency band. For example, in the G3-PLC communication standard used in low-speed power line communication, the occupied frequency band is approximately 480 kHz, and the number of channels is 1.

[0037] Figure 5B shows the power spectrum output from the magnetic sensor 421, which is a receiving antenna. The second modulated wave m2 sensed by the magnetic sensor modulates the high-frequency excitation signal (e.g., 1.8 GHz) supplied to the magnetic sensor, and a modulated wave m3 is obtained, consisting of the spectrum 31 of the high-frequency excitation signal, as well as the upper sideband spectrum 32 on the high-frequency side and the lower sideband spectrum 33 on the low-frequency side of the spectrum 31 of the high-frequency excitation signal.

[0038] Figure 5C shows the power spectrum 34 of the first output signal S1 of the second modulated wave m2, which is obtained by multiplying the modulated wave m3 with the high-frequency excitation signal by the first mixer 26 and responding to the in-phase component I of the high-frequency excitation signal for exciting the ferromagnetic resonance of the magnetic sensor 421.

[0039] Figure 5D shows the power spectrum 35 of the second output signal S2 of the second modulated wave m2, which responds to the orthogonal component Q of the high-frequency excitation signal for exciting the ferromagnetic resonance of the magnetic sensor 421, after the modulated wave m3 is multiplied with the high-frequency excitation signal by the second mixer 27.

[0040] Figure 6 shows the output results of the receiver 420 in response to a frequency change of the high-frequency excitation signal supplied to a magnetic sensor 421, which is one embodiment of the present invention. Here, the second modulated wave m2 received by the magnetic sensor 421 is an unmodulated signal (carrier frequency 200 [kHz]). At a frequency of 1.800 to 1.815 [GHz] of the high-frequency excitation signal, the output of the first output signal S1, which responds to the common-phase component I of the high-frequency excitation signal, takes a minimum at 1.803 [GHz], and the output of the second output signal S2, which responds to the other orthogonal component Q, takes a minimum at 1.808 [GHz]. This is due to the effect of standing waves caused by impedance mismatches in the input / output terminals of the magnetic sensor 421 or in various parts inside the high-frequency signal processing circuit 422. However, these two outputs are complementary. Furthermore, phase information can be obtained from this relationship.

[0041] Figure 7 shows the output result of the receiver 420 in response to a bias magnetic field applied to a magnetic sensor 421 as an embodiment of the present invention. Here, the frequency of the high-frequency excitation signal supplied to the magnetic sensor 421 is 1.806 [GHz]. Output V of the first output signal S1 in response to the common-mode component I of the high-frequency excitation signal. S1 It takes a maximum value of approximately 0.7 [mT], and the output V of the second output signal S2, which responds to one of the orthogonal components Q. S2 The value becomes zero at 0.68 [mT], indicating that the system is in a ferromagnetic resonance state.

[0042] Figure 8 shows the output characteristics of the receiver 420 with respect to the frequency change of the second modulated wave m2 arriving from the transmitter 410, which is one embodiment of the present invention. Both the first output signal S1 and the second output signal S2 show flat characteristics within the range of attenuation 3 [dB] in the frequency range of 100 [Hz] to 500 [kHz], and for example, it is possible to transmit information up to approximately 300 [kbps] in a frequency bandwidth of 480 [kHz]. Furthermore, the floor noise is high at -105 [dBm] at 100 [Hz] (see power spectrum of the first output signal S1) in the low frequency range due to the large influence of 1 / f noise, and relatively low at -130 [dBm] or less in the high frequency range due to the dominance of thermal noise, resulting in a large signal-to-noise ratio in the high frequency range.

[0043] Figure 9 shows the output characteristics of the receiver 420 with respect to the communication distance between the transmitter 410 and the receiver 420 as an embodiment of the present invention. Here, the power supply current to the transmitting coil 418 is, for example, 0.4 [Ap-p] of the unmodulated signal (carrier frequency 200 [kHz]). Also, for example, the radius of the transmitting coil 418 is 15 [cm] and the number of turns is 5. The power P of the first output signal S1 of the receiver 420 S1 and the power P of the second output signal S2 S2 It can be seen that the signal attenuates to about 1 / 100th of its original value as the communication distance doubles.

[0044] Figure 10 shows the power spectrum P of the first output signal S1 of receiver 420 as an embodiment of the present invention. S1 and the power spectrum P of the second output signal S2 S2 This is shown. In the spectrum obtained by orthogonal frequency division multiplexing, the occupied frequency bandwidth is approximately 10 to 490 [kHz], and the power spectrum of the second output signal S2 is approximately 10 [dB] higher than that of the first output signal S1. As shown in Figure 6, by selecting a desired high-frequency excitation frequency, it is possible to adjust the power spectra of the first output signal S1 and the second output signal S2.

[0045] Figure 11 shows the packet error rate (PER) in data transmission as a function of communication distance. Here, the excitation frequency of the high-frequency excitation signal supplied to the magnetic sensor 421 is 1.806 [GHz]. The modulation and demodulation method of the transceiver is orthogonal frequency division multiplexing. The first output signal S1 has a PER of zero up to a communication distance of approximately 0.55 [m], after which the PER increases (PER shown in the figure). S1 (See reference) It can be seen that the second output signal S2 has a PER of zero up to a communication distance of 0.60 [m], and thereafter the PER increases (PER in the same figure) S2 It can be seen that they are referring to it. [Explanation of symbols]

[0046] 410...Transmitter, 411...First signal source, 412...Second signal source, 414...Modulator, 416...Power amplifier, 418...Transmitting coil, 420...Receiver, 421...Magnetic sensor, 422...High-frequency signal processing circuit, 424...First demodulator, 426...Second demodulator, 428...Output controller.

Claims

1. The modulated wave m that arrived via the magnetic field 2 A magnetic sensor that utilizes ferromagnetic resonance to receive, The modulated wave m responds to the in-phase component I of the high-frequency excitation signal used to excite the ferromagnetic resonance of the magnetic sensor. 2 The first output signal S 1 and the modulated wave m in response to the orthogonal component Q of the high-frequency excitation signal 2 The second output signal S 2 It includes a demodulator for demodulating a modulated signal from two output signals, The magnetic sensor comprises a dielectric substrate, a signal line layer stacked in a substantially rectangular shape extending front to back on the upper surface of the dielectric substrate, a pair of substantially rectangular first and second ground conductor layers extending front to back, spaced apart to the left and right from the signal line layer on the upper surface of the dielectric substrate, a third ground conductor layer formed on the lower surface of the dielectric substrate, an input / output terminal electrically connected to one end of the transmission line formed by the third ground conductor layer, the first ground conductor layer and the second ground conductor layer, a soft magnetic thin film partially stacked on the other end of the transmission line, and a thin-film magnet. Receiver.

2. The receiver according to Claim 1, The termination portion of the transmission line having the signal line layer, the first ground conductor layer, and the second ground conductor layer is short-circuited, and the thin film magnet and the soft magnetic thin film are laminated at the termination portion. The thin-film magnet and the soft magnetic thin film form a closed magnetic circuit structure. Receiver.

3. The receiver according to claim 1, One of the following is used as the soft magnetic thin film: an amorphous thin film of Co-Fe-Si-B or Co-Nb-Zr; a microcrystalline thin film of Fe-Si or Fe-Zr-N; a multilayer thin film in which a thin insulating layer such as SiO is sandwiched between these thin films; a crystalline thin film of Ni-Fe or Fe-Si-Al; bulk materials of Fe-Si alloy, Fe-Co-Ni alloy, or Sendust alloy; an amorphous alloy thin strip of Co-Fe-Ni-Si-B, Fe-Co-Ni-Zr, Fe-Ni-B, Co-Fe-Zr, or Co-Zr; or a thin film made of soft magnetic ferrite. Receiver.

4. A magnetic communication device that utilizes changes in magnetic fields as information, A signal source for generating a high-frequency signal that will serve as a carrier wave, and a first modulated wave m obtained by modulating the carrier wave with a modulation signal. 1 A modulator that transmits a first modulated wave m1, a power amplifier that power-amplifies the first modulated wave m1, and a second modulated wave m obtained by the power amplifier. 2 A transmitter equipped with a transmitting coil for sending out, A magnetic sensor that utilizes ferromagnetic resonance to receive a second modulated wave m that arrives using a magnetic field as a medium, and the second modulated wave m that responds to the in-phase component I of a high-frequency excitation signal for exciting the ferromagnetic resonance of the magnetic sensor 2 The first output signal S 2 of 1 and the second modulated wave m that responds to the quadrature component Q of the high-frequency excitation signal 2 The second output signal S 2 A receiver comprising a demodulator for demodulating a modulation signal from two output signals thereof The magnetic sensor comprises a dielectric substrate, a signal line layer stacked in a substantially rectangular shape extending front to back on the upper surface of the dielectric substrate, a pair of substantially rectangular first and second ground conductor layers extending front to back, spaced apart to the left and right from the signal line layer on the upper surface of the dielectric substrate, a third ground conductor layer formed on the lower surface of the dielectric substrate, an input / output terminal electrically connected to one end of the transmission line formed by the third ground conductor layer, the first ground conductor layer and the second ground conductor layer, a soft magnetic thin film partially stacked on the other end of the transmission line, and a thin-film magnet. Magnetic communication equipment.

5. A magnetic communication device according to claim 4, The termination portion of the transmission line having the signal line layer, the first ground conductor layer, and the second ground conductor layer is short-circuited, and the thin film magnet and the soft magnetic thin film are laminated at the termination portion. The thin-film magnet and the soft magnetic thin film form a closed magnetic circuit structure. Magnetic communication equipment.

6. A magnetic communication device according to claim 4, One of the following is used as the soft magnetic thin film: an amorphous thin film of Co-Fe-Si-B or Co-Nb-Zr; a microcrystalline thin film of Fe-Si or Fe-Zr-N; a multilayer thin film in which a thin insulating layer such as SiO is sandwiched between these thin films; a crystalline thin film of Ni-Fe or Fe-Si-Al; bulk materials of Fe-Si alloy, Fe-Co-Ni alloy, or Sendust alloy; an amorphous alloy thin strip of Co-Fe-Ni-Si-B, Fe-Co-Ni-Zr, Fe-Ni-B, Co-Fe-Zr, or Co-Zr; or a thin film made of soft magnetic ferrite. Magnetic communication equipment.

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