Vacuum pad vibration prevention mechanism

Abstract

To provide a vacuum pad in which bellows is reliably prevented from shaking even when a workpiece is conveyed at a high speed and a large acceleration and deceleration speed is applied to the workpiece.SOLUTION: A vacuum pad 12 includes a support member 14 having a vacuum passage 14a, and bellows 16 attached to the support member. A cover body includes a cylindrical body part 32, an attachment part 34 projecting from one end of the body part, and a flange part 36 projecting from the other end of the body part outward in the radial direction. When the bellows contracts and sucks and holds the workpiece, the cover body covers the outside of the bellows.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a mechanism for preventing vibration of a vacuum pad that adsorbs and holds a workpiece by an attractive force due to negative pressure (vacuum pressure).

Background Art

[0002] Conventionally, a vacuum pad that generates negative pressure inside a bellows and adsorbs and holds a workpiece at the open end of the bellows is known. Since this vacuum pad has a bellows that can expand and contract, it can adsorb the workpiece following various shapes of the workpiece, and can also easily adsorb a workpiece placed in an inclined state.

[0003] In a vacuum pad provided with a bellows, there is also known a technique devised so that the workpiece is held in a stable state even when an external force acts on the workpiece. For example, Patent Document 1 describes that a fixing rod for preventing the inclination of the workpiece is disposed outside the bellows-type adsorption pad.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] When a workpiece is conveyed at high speed using a vacuum pad provided with a bellows, when a large acceleration or deceleration acts on the workpiece, the bellows may vibrate violently while deforming. The technique described in Patent Document 1 was not made paying attention to such an event, and a technique for preventing the vibration of the bellows has not been sufficiently developed.

[0006] An object of the present invention is to solve the above-described problems.

Means for Solving the Problems

[0007] The vacuum pad runout prevention mechanism according to the present invention has a cover body attached to the vacuum pad. The vacuum pad comprises a support member having a vacuum passage and a bellows attached to the support member. The cover body comprises a cylindrical main body, a mounting portion protruding from one end of the main body, and a flange portion protruding radially outward from the other end of the main body. When the bellows contracts and holds the workpiece by suction, the cover body covers the outside of the bellows. The cover body is attached to the vacuum pad by screwing the mounting portion onto the support member, and the mounting position of the cover body relative to the vacuum pad is adjustable. [Effects of the Invention]

[0008] According to the vacuum pad runout prevention mechanism of the present invention, when the bellows contracts and holds the workpiece by suction, the cover body covers the outside of the bellows. Therefore, even when the workpiece is transported at high speed and large accelerations and decelerations act on the workpiece, the deformation of the bellows is suppressed by the cover body, and bellows runout is reliably prevented. Furthermore, the cover body is attached to the vacuum pad by screwing its mounting portion into a support member, and the mounting position of the cover body relative to the vacuum pad is adjustable. Therefore, the mounting position of the cover body can be easily changed according to the length of the bellows used, etc. [Brief explanation of the drawing]

[0009] [Figure 1] Figure 1 is an external view of a vacuum pad vibration prevention mechanism according to an embodiment of the present invention. [Figure 2] Figure 2 is a cross-sectional view of the vacuum pad runout prevention mechanism shown in Figure 1, cut along the line II-II. [Figure 3] Figure 3 is a diagram corresponding to Figure 2 when the workpiece is being held in place. [Figure 4] Figure 4 shows the cover body of the vacuum pad vibration prevention mechanism shown in Figure 1, before installation. [Figure 5] Figure 5 is an external view of the extension plate. [Figure 6] Figure 6 shows the state in which the expansion plate from Figure 5 is attached to the cover body of the vacuum pad vibration prevention mechanism from Figure 1. [Figure 7] Figure 7 is a diagram showing a cross-sectional view of the main part of the vacuum pad vibration prevention mechanism with extension plate shown in Figure 6. [Figure 8] Figure 8 is a diagram illustrating a first modified example of the extension plate shown in Figure 5. [Figure 9] Figure 9 is a diagram illustrating a second modified example of the extension plate shown in Figure 5. [Figure 10] Figure 10 is a diagram illustrating a third modified example of the extension plate shown in Figure 5. [Figure 11] Figure 11 is a diagram illustrating a modified example of the cover body shown in Figure 4. [Figure 12] Figure 12 is a diagram illustrating a first modified example of the expansion plate positioning structure in the vacuum pad runout prevention mechanism of Figure 1. [Figure 13] Figure 13 is a diagram illustrating a second modified example of the expansion plate positioning structure in the vacuum pad runout prevention mechanism of Figure 1 (a diagram before positioning). [Figure 14] Figure 14 is a diagram illustrating a second modified example of the expansion plate positioning structure in the vacuum pad runout prevention mechanism of Figure 1 (a diagram after positioning). [Figure 15] Figure 15 is a diagram illustrating a third modified example of the expansion plate positioning structure in the vacuum pad runout prevention mechanism of Figure 1 (a diagram before positioning). [Figure 16] Figure 16 is a diagram illustrating a third modified example of the expansion plate positioning structure in the vacuum pad runout prevention mechanism of Figure 1 (a diagram after positioning). [Modes for carrying out the invention]

[0010] As shown in Figures 1 and 2, the vacuum pad vibration prevention mechanism 10 according to an embodiment of the present invention includes a vacuum pad 12 and a cover body 20.

[0011] The vacuum pad 12 includes a cylindrical support member 14 having a vacuum passage 14a inside, and a bellows 16 attached to the lower part of the support member 14. The vacuum passage 14a extends along the axis X of the support member 14 and opens at both the upper and lower ends of the support member 14. A negative pressure from a vacuum generating device (not shown) is supplied to the upper end of the vacuum passage 14a. The support member 14 has a male thread 14b on the outer periphery over a predetermined length, and has a concave groove 14c on the outer periphery below the male thread 14b. A lock nut 18 is screwed onto the support member 14.

[0012] The bellows 16 is formed in a cylindrical shape from a rubber material or resin material such as silicone. The bellows 16 has a pleated structure in which ring-shaped thick portions 16a protruding from the outer wall and ring-shaped thick portions 16b protruding from the inner wall are alternately formed, and can expand and contract vertically. The internal space of the bellows 16 communicates with the vacuum passage 14a of the support member 14. The bellows 16 contacts the workpiece at the lower end surface. The upper end of the bellows 16 has a flange portion 16c protruding radially inward. The bellows 16 is attached to the support member 14 by fitting the flange portion 16c into the concave groove 14c of the support member 14.

[0013] As shown in FIG. 4, the cover body 20 includes a first cover body 22 and a second cover body 30 that are relatively rotatably connected via a hinge portion 40. The first cover body 22 and the second cover body 30 include semi-cylindrical main body portions 24, 32, attachment portions 26, 34 that protrude with a reduced diameter from the upper ends of the main body portions 24, 32, and flange portions 28, 36 that protrude radially outward from the lower ends of the main body portions 24, 32. The inner diameters of the main body portions 24, 32 of the first cover body 22 and the second cover body 30 are slightly larger than the outer diameter of the bellows 16.

[0014] Hereinafter, the main body portions 24 of the first cover body 22 and the main body portions 32 of the second cover body 30 may be collectively referred to as the main body portions 24 and 32 of the cover body 20. Also, the attachment portions 26 of the first cover body 22 and the attachment portions 34 of the second cover body 30 may be collectively referred to as the attachment portions 26 and 34 of the cover body 20. Further, the flange portions 28 of the first cover body 22 and the flange portions 36 of the second cover body 30 may be collectively referred to as the flange portions 28 and 36 of the cover body 20.

[0015] The attachment portions 26 and 34 of the cover body 20 have female threads 26a and 34a that are screwed with the male thread 14b of the support member 14. The flange portions 28 and 36 of the cover body 20 contact the workpiece at the lower end surface. The main body portions 24 and 32 of the cover body 20 have first mating portions 24a and 32a that abut each other at a position close to the hinge portion 40, and second mating portions 24b and 32b that abut each other at a position away from the hinge portion 40.

[0016] The main body portion 24 of the first cover body 22 includes an engagement recess 24c in the vicinity of the first mating portion 24a and includes a pair of engagement pieces 24d protruding from the second mating portion 24b. The main body portion 32 of the second cover body 30 includes an engagement piece 32d protruding from the first mating portion 32a and includes a pair of engagement recesses 32c in the vicinity of the second mating portion 32b. Each engagement piece 24d of the first cover body 22 engages with each engagement recess 32c of the second cover body 30. The engagement piece 32d of the second cover body 30 engages with the engagement recess 24c of the first cover body 22.

[0017] The lower part of the main body 24 of the first cover body 22 includes a first protruding piece 24e projecting outward from the circumferential center and a second protruding piece 24f projecting outward near the first joint portion 24a. The first protruding piece 24e and the second protruding piece 24f face each other with a predetermined gap between them and the flange portion 28. The lower part of the main body 32 of the second cover body 30 includes a third protruding piece 32e projecting outward from the circumferential center, a fourth protruding piece 32f projecting outward near the first joint portion 32a, and a fifth protruding piece 32g projecting outward near the second joint portion 32b. The third protruding piece 32e, the fourth protruding piece 32f, and the fifth protruding piece 32g face each other with a predetermined gap between them and the flange portion 36.

[0018] When the first cover body 22 and the second cover body 30 are butted against each other, the main body portions 24 and 32 of the cover body 20 are formed in a cylindrical shape. When the first cover body 22 and the second cover body 30 are butted against each other, the second protruding piece 24f of the first cover body 22 and the fourth protruding piece 32f of the second cover body 30 form a single continuous protruding piece (hereinafter referred to as the "continuous protruding piece"). The first protruding piece 24e, the continuous protruding piece, the third protruding piece 32e, and the fifth protruding piece 32g are all the same shape and are arranged at equal intervals (90 degrees apart) in the circumferential direction of the cover body 20.

[0019] The fifth protruding piece 32g is equipped with a hook portion 32h for positioning and fixing the expansion plate 42, which will be described later. A slit 32i is formed at the tip of the hook portion 32h into which a tool such as a screwdriver can be inserted (see Figure 7). The main bodies 24 and 32 of the first cover body 22 and the second cover body 30 have elongated window portions 38 that extend in the vertical direction. The worker can check the mounting position of the bellows 16 through this window portion 38. A scale 39 is displayed next to the window portion 38.

[0020] The cover body 20 is attached to the vacuum pad 12 by, for example, the following procedure: The first cover body 22 and the second cover body 30 are rotated relative to each other to open them wide, and the second cover body 30 is placed over the vacuum pad 12 from the side. Next, the first cover body 22 is rotated in the closing direction to place it over the vacuum pad 12.

[0021] When the first cover body 22 is rotated in the closing direction, each engaging piece 24d of the first cover body 22 engages with each engaging recess 32c of the second cover body 30, and the engaging pieces 32d of the second cover body 30 engage with the engaging recess 24c of the first cover body 22. In addition, the first mating portions 24a and 32a of the first cover body 22 and the second cover body 30 abut against each other, and the second mating portions 24b and 32b of the first cover body 22 and the second cover body 30 abut against each other. The mounting portions 26 and 34 of the cover body 20 are attached to the support member 14 by screwing. At this time, the axis X of the cover body 20 coincides with the axis X of the support member 14.

[0022] Next, the mounting position of the cover body 20 on the support member 14 is adjusted so that the cover body 20 covers the outside of the bellows 16 when the bellows 16 contracts and holds the workpiece by suction. Figure 3 shows how a workpiece W, for example, a type of frozen food, is held by suction using the vacuum pad vibration prevention mechanism 10. In this case, the cover body 20 is rotated around the axis X of the support member 14 and the screw positions of the mounting parts 26 and 34 are adjusted so that when the lower end surface of the bellows 16 is displaced upward by the amount of contraction L of the bellows 16, the lower end surfaces of the flange parts 28 and 36 of the cover body 20 align with the lower end surface of the bellows 16.

[0023] The worker can easily perform the above adjustment work because they can check the position of the bellows 16 through the window 38 of the first cover body 22 or the second cover body 30. After that, the lock nut 18 is tightened to press the lock nut 18 against the mounting parts 26 and 34 of the cover body 20, and the installation of the cover body 20 is completed.

[0024] Furthermore, when the bellows 16 contracts and holds the workpiece by suction, the lower end surfaces of the flange portions 28 and 36 of the cover body 20 do not necessarily align with the lower end surface of the bellows 16. For example, if the workpiece is bag-shaped and deforms, a part of the workpiece will enter the inside of the cover body 20 when it is held by suction, so the lower end surfaces of the flange portions 28 and 36 of the cover body 20 will protrude below the lower end surface of the bellows 16.

[0025] The vacuum pad 12 is attached to a vacuum generator (not shown) at the upper end of the support member 14. Since the first cover body 22 and the second cover body 30 are placed over the vacuum pad 12 from the side, in a direction that does not interfere with the attachment of the cover body 20, it is possible to attach and detach only the cover body 20 without removing the vacuum pad 12 from the vacuum generator.

[0026] It is preferable to attach an expansion plate to the cover body 20 that is appropriate to the shape and size of the workpiece W. A circular expansion plate 42 is shown in Figure 5. The expansion plate 42 has a hole 44 in the center. The hole 44 includes a central hole 44a through which the main body portions 24 and 32 of the cover body 20 can be inserted, and four peripheral holes 44b that extend in a cross shape from the central hole 44a. The four peripheral holes 44b are all the same shape and are shaped to allow the first protruding piece 24e, the continuous protruding piece, the third protruding piece 32e, and the fifth protruding piece 32g of the cover body 20 to be inserted. In addition, each peripheral hole 44b is large enough to allow the hinge portion 40 to be inserted.

[0027] The expansion plate 42 has insertion portions 48 between adjacent peripheral holes 44b. Each insertion portion 48 has a slit 46 that extends generally in the radial direction. The thickness of the expansion plate 42 is approximately equal to the gap between the first protruding piece 24e, the continuous protruding piece, the third protruding piece 32e, and the fifth protruding piece 32g and the flange portions 28 and 36 of the cover body 20.

[0028] Next, the procedure for attaching the expansion plate 42 to the cover body 20 will be described with reference to Figures 6 and 7. First, the expansion plate 42 is fitted onto the cover body 20 from above. That is, the main body portions 24 and 32 of the cover body 20 are inserted into the central hole portion 44a of the expansion plate 42, and the hinge portion 40, the first protruding piece 24e, the continuous protruding piece, the third protruding piece 32e, and the fifth protruding piece 32g are inserted into the respective peripheral holes 44b of the expansion plate 42. In this case, since the four protruding pieces are the same shape and the four peripheral holes 44b are also the same shape, each protruding piece can be inserted into any peripheral hole. Note that the hinge portion 40 and the continuous protruding piece are inserted into one peripheral hole 44b.

[0029] When the expansion plate 42 is fitted into the cover body 20, the lower surface of the expansion plate 42 contacts the upper surfaces of the flange portions 28 and 36 of the cover body 20. Then, the tip of a screwdriver (not shown) is inserted into the slit 32i of the hook portion 32h, and while lifting the hook portion 32h, the expansion plate 42 is rotated around the axis X of the cover body 20. The insertion portion 48 of the expansion plate 42 fits into the gap where the first protruding piece 24e, the continuous protruding piece, the third protruding piece 32e, and the fifth protruding piece 32g face the flange portions 28 and 36 of the cover body 20. When the expansion plate 42 is rotated by approximately 45 degrees, the hook portion 32h elastically engages with one of the slits 46 of the expansion plate 42. This positions and fixes the expansion plate 42 to the cover body 20. Note that the direction in which the expansion plate 42 is rotated around the axis X of the cover body 20 may be any direction.

[0030] To remove the expansion plate 42 from the cover body 20, insert the tip of a screwdriver into the slit 32i of the hook portion 32h, lift the hook portion 32h, and rotate the expansion plate 42. When the expansion plate 42 is rotated by approximately 45 degrees, each peripheral hole 44b of the expansion plate 42 aligns with the first protruding piece 24e, the continuous protruding piece, the third protruding piece 32e, and the fifth protruding piece 32g of the cover body 20. This allows the expansion plate 42 to be removed from the cover body 20. In this embodiment, the expansion plate 42 is circular, but the shape of the expansion plate can be designed in various ways, such as rectangular, depending on the shape of the workpiece.

[0031] According to the vacuum pad vibration prevention mechanism 10 of this embodiment, when the bellows 16 contracts and holds the workpiece by suction, the outside of the bellows 16 is covered by the cover body 20 with only a small gap between them. Therefore, even if the workpiece W is transported at high speed and large accelerations and decelerations act on the workpiece W, the deformation of the bellows 16 is suppressed by the cover body 20, and vibration of the bellows 16 is reliably prevented.

[0032] Furthermore, the cover body 20 is attached to the vacuum pad 12 by screwing the mounting portions 26 and 34 onto the support member 14, and the mounting position of the cover body 20 relative to the vacuum pad 12 is adjustable. Moreover, the main body portions 24 and 32 of the cover body 20 have a window portion 38 that allows the mounting position of the bellows 16 to be checked from the outside. Therefore, the mounting position of the cover body 20 can be easily adjusted according to the length of the bellows 16 used.

[0033] Furthermore, since the first cover body 22 and the second cover body 30, which are connected to each other so as to be rotatable via the hinge portion 40, can be sequentially placed over the vacuum pad 12 from the side of the vacuum pad 12, only the cover body 20 can be easily attached and detached.

[0034] (First modified example of the extension plate) Figure 8 shows a vacuum pad vibration prevention mechanism 10 equipped with an extension plate 50 according to the first modified example. This extension plate 50 consists of a circular plate portion 52 and a cylindrical skirt portion 54 extending downward from the outer circumference of the plate portion 52. Since the sides of the workpiece can be covered with the skirt portion 54, it is possible to prevent the workpiece from sliding laterally in the direction of transport when the workpiece is being held and when it is being transported. In addition, when holding a flexible and easily damaged workpiece, it is possible to protect the workpiece from being crushed. Furthermore, it is possible to prevent the workpiece from coming into contact with surrounding equipment, etc., when the workpiece is being transported.

[0035] (Second variation of the extension plate) Figure 9 shows a vacuum pad vibration prevention mechanism 10 equipped with an expansion plate 60 according to a second modification. This expansion plate 60 is composed of a circular plate body 62 and a plurality of guide shafts 66 arranged perpendicular to the surface of the plate body 62. The plate body 62 has a plurality of slits 64 cut out radially inward from the outer edge. The plurality of slits 64 are evenly arranged in the circumferential direction.

[0036] The guide shaft 66, which has a male thread, is inserted through each slit 64 and fixed to the plate body 62 using a pair of nuts 68. Specifically, the guide shaft 66 with the pair of nuts 68 screwed onto it is inserted through the slit 64, and the plate body 62 is clamped by the pair of nuts 68. As a result, the guide shaft 66 is fixed to the plate body 62 at a desired position on the slit 64 and is fixed to the plate body 62 while protruding downward by a desired length from the plate body 62.

[0037] With the extension plate 60, multiple guide shafts 66 are positioned on the outside of the workpiece, protecting the workpiece during suction and transport, and preventing lateral slippage. Moreover, since the position and height of the multiple guide shafts 66 can be adjusted, it can accommodate workpieces of different shapes and sizes without replacing the plate body 62.

[0038] (Third variation of the extension plate) Figure 10 shows a vacuum pad vibration prevention mechanism 10 equipped with an expansion plate 70 according to a third modification. This expansion plate 70 has a plurality of regularly arranged holes 44. The cover bodies 20 of multiple vacuum pad vibration prevention mechanisms 10 are attached to one expansion plate 70. In this modification, a total of six vacuum pad vibration prevention mechanisms 10 are arranged. The expansion plate 70 allows multiple vacuum pad vibration prevention mechanisms 10 to be arranged in an orderly manner.

[0039] (A variation of the cover body) A modified example of the cover body 20 is shown in Figure 11. The cover body 20 of the vacuum pad vibration prevention mechanism 10 described above has a structure in which the first cover body 22 and the second cover body 30 are connected via a hinge portion 40 so as to be rotatable relative to each other. However, as shown in Figure 11, the first cover body 22 and the second cover body 30 may be separate components that can be separated.

[0040] (First modified example of the expansion plate positioning structure) Figure 12 shows an expansion plate positioning structure according to the first modified example. The fifth protruding piece 32g of the second cover body 30 includes a hook portion 32h for positioning and fixing the expansion plate 42, and a lever portion 32j for lifting the hook portion 32h. When the lever portion 32j is tilted in a predetermined direction, the hook portion 32h is lifted.

[0041] (Second modified example of the expansion plate positioning structure) Figures 13 and 14 show an expansion plate positioning structure according to a second modified example. The lower part of the main body portion 24 of the first cover body 22 is provided with an engagement lever 32k having a predetermined elasticity. A spherical projection (not shown) is formed on the lower surface of the engagement lever 32k. Each peripheral hole 44b of the expansion plate 42 is sized to allow the fifth projection piece 32g and the engagement lever 32k to be inserted simultaneously. A pin hole 47 is formed in the insertion portion 48 of the expansion plate 42, into which the projection of the engagement lever 32k can engage.

[0042] When attaching the expansion plate 42 to the cover body 20, the first protruding piece 24e, the continuous protruding piece, the third protruding piece 32e, the fifth protruding piece 32g, and the engaging lever 32k of the cover body 20 are inserted into the respective peripheral holes 44b of the expansion plate 42. Then, force is applied to the tip of the engaging lever 32k to lift the engaging lever 32k while rotating the expansion plate 42. When the expansion plate 42 is rotated by approximately 45 degrees, the protrusion of the engaging lever 32k engages with the pin hole 47 of the expansion plate 42. This positions and fixes the expansion plate 42 to the cover body 20 (see Figure 14).

[0043] (Third modified example of the expansion plate positioning structure) Figures 15 and 16 show an expansion plate positioning structure according to a third modified example. The lower part of the main body portion 24 of the first cover body 22 is provided with an engagement lever 32m having a predetermined elasticity. The engagement lever 32m has a bent shape and is provided with ribs 32n that protrude downward along the width direction. Each peripheral hole 44b of the expansion plate 42 is sized to allow the fifth protruding piece 32g and the engagement lever 32m to be inserted simultaneously. In addition, the slit 46 of the expansion plate 42 has the same width as the ribs 32n of the engagement lever 32m.

[0044] When attaching the expansion plate 42 to the cover body 20, the first protruding piece 24e, the continuous protruding piece, the third protruding piece 32e, the fifth protruding piece 32g, and the engaging lever 32m of the cover body 20 are inserted into the respective peripheral holes 44b of the expansion plate 42. Then, force is applied to the tip of the engaging lever 32m to lift the engaging lever 32m while rotating the expansion plate 42. When the expansion plate 42 is rotated by approximately 45 degrees, the rib 32n of the engaging lever 32m engages with the slit 46 of the expansion plate 42. This positions and fixes the expansion plate 42 to the cover body 20 (see Figure 16).

[0045] The vacuum pad vibration prevention mechanism according to the present invention is not limited to the embodiments described above, and can take various configurations without departing from the spirit of the present invention. [Explanation of Symbols]

[0046] 10…Vacuum pad vibration prevention mechanism 12…Vacuum pad 14...Support member 14a...Vacuum passage 16... Bellows 20... Cover 22...First cover body 24, 32...Main body 24c, 32c…Engaging recesses 24d, 32d…Engaging pieces 24e...First protruding piece (protruding piece) 24f...Second protruding piece (protruding piece) 26, 34... Mounting section 28, 36... Flange section 30...Second cover body 32e...Third projection (projection) 32f...4th protruding piece (protruding piece) 32g...5th protruding piece (protruding piece) 32h...Hook section 32i...Slit (in the hook section) 32j...Lever section; 32k, 32m...Engaging lever 32n... Rib 38... Window section 40...Hinge section 42, 50, 60, 70...Extension plates 44...hole 44a...center hole 44b... Peripheral hole portion 46... Slit (insertion portion) 47...Pin hole 48...Insertion part 52...Plate section 54...Skirt section 62...Plate body 64...Slit (of the plate body) 66... ​​Guide shaft 68... Nut

Claims

1. A vacuum pad vibration prevention mechanism in which a cover body is attached to a vacuum pad, The vacuum pad comprises a support member having a vacuum passage and a bellows attached to the support member, the cover body comprises a cylindrical main body, a mounting portion protruding from one end of the main body, and a flange portion protruding radially outward from the other end of the main body, the cover body covers the outside of the bellows when the bellows contracts and holds the workpiece by suction, the cover body is attached to the vacuum pad by the mounting portion being screwed into the support member, and the mounting position of the cover body relative to the vacuum pad is adjustable. The cover body includes a first cover body and a second cover body, and the first cover body and the second cover body are provided with a semi-cylindrical main body portion. A vacuum pad vibration prevention mechanism in which an expansion plate having a hole is attached to the cover body.

2. In the vacuum pad vibration prevention mechanism according to claim 1, The main body of the cover is provided with a plurality of protruding pieces that project outward, and the plurality of protruding pieces are arranged at equal intervals in the circumferential direction and face the flange portion with a predetermined gap between them, forming a vacuum pad vibration prevention mechanism.

3. In the vacuum pad vibration prevention mechanism according to claim 2, The hole in the expansion plate includes a central hole through which the main body of the cover can be inserted, and a plurality of peripheral holes through which the plurality of protruding pieces can be inserted, and the expansion plate has an insertion portion between adjacent peripheral holes, and the insertion portion is a vacuum pad vibration prevention mechanism in which the plurality of protruding pieces fit into the gap between the flange portion of the cover.

4. In the vacuum pad vibration prevention mechanism according to claim 3, A vacuum pad vibration prevention mechanism in which one of the plurality of protruding pieces has a hook portion with a slit formed at its tip, and when the expansion plate is in a predetermined position around the axis of the cover body, the hook portion elastically engages with the slit formed in the insertion portion of the expansion plate.

5. In the vacuum pad vibration prevention mechanism according to claim 3, A vacuum pad vibration prevention mechanism wherein one of the plurality of protruding pieces comprises a hook portion and a lever portion for lifting the hook portion, and when the expansion plate is in a predetermined position around the axis of the cover body, the hook portion elastically engages with a slit formed in the insertion portion of the expansion plate.

6. In the vacuum pad vibration prevention mechanism according to claim 3, The main body of the cover body is equipped with an engagement lever, and when the extension plate is in a predetermined position around the axis of the cover body, a spherical projection formed on the engagement lever engages with a pin hole formed in the insertion portion of the extension plate, thereby preventing vibration of the vacuum pad.

7. In the vacuum pad vibration prevention mechanism according to claim 3, The main body of the cover body is equipped with an engagement lever, and when the extension plate is in a predetermined position around the axis of the cover body, the rib of the engagement lever engages with a slit formed in the insertion portion of the extension plate, thereby preventing vibration of the vacuum pad.

8. In the vacuum pad vibration prevention mechanism according to claim 1, The aforementioned extension plate is a vacuum pad vibration prevention mechanism composed of a plate portion and a cylindrical skirt portion extending from the outer circumference of the plate portion.

9. In the vacuum pad vibration prevention mechanism according to claim 1, The aforementioned extension plate is a vacuum pad vibration prevention mechanism composed of a plate body and a plurality of guide shafts arranged perpendicular to the surface of the plate body.

10. In the vacuum pad vibration prevention mechanism according to claim 9, The plate body has a plurality of slits cut inward from its outer edge, and the guide shaft having a male thread is inserted through the plurality of slits and fixed to the plate body with a pair of nuts, forming a vacuum pad vibration prevention mechanism.

11. A vacuum pad vibration prevention mechanism in which a cover body is attached to a vacuum pad, The vacuum pad comprises a support member having a vacuum passage and a bellows attached to the support member, the cover body comprises a cylindrical main body, a mounting portion protruding from one end of the main body, and a flange portion protruding radially outward from the other end of the main body, the cover body covers the outside of the bellows when the bellows contracts and holds the workpiece by suction, the cover body is attached to the vacuum pad by the mounting portion being screwed into the support member, and the mounting position of the cover body relative to the vacuum pad is adjustable. The cover body includes a first cover body and a second cover body, and the first cover body and the second cover body are provided with a semi-cylindrical main body portion. A vacuum pad vibration prevention mechanism in which multiple cover bodies are attached to a single expansion plate.

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