Spectrometers, analyzers, and tunable light sources

Abstract

To provide a small and inexpensive spectroscope.SOLUTION: A spectroscope is provided with light incident means for making light from the outside incident. Also, the spectroscope includes a diffraction grating for dispersing the wavelength of the light made incident by the light incident means. Moreover, the spectroscope includes reflecting means which has a reflection surface which reflects the light wavelength-dispersed by the diffraction grating and allows the tilt of the reflecting surface to be varied.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a spectroscope and an analyzer and tunable light sources thereof.

Background Art

[0002] Conventionally, there is known a so-called spectroscope that obtains a spectral spectrum for each wavelength by spectrally separating measurement light for each wavelength.

[0003] Here, a general spectroscope includes a concave diffraction grating that spectrally separates incident measurement light into lights of a plurality of wavelengths, and an array sensor capable of detecting lights of the plurality of wavelengths respectively (for example, see Patent Document 1 below). For example, a Si photodiode, an InGaAs photodiode, or the like is used for the array sensor.

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, since the array sensor used in the spectroscope is large and expensive, conventionally, there has been a problem that a small and inexpensive spectroscope cannot be provided.

[0005] An object of the present invention is to provide a small and inexpensive spectroscope in order to solve the above-described problems of the conventional technology.

Means for Solving the Problems

[0006] To solve the above-mentioned problems, the spectrometer of the present invention includes: a light injecting means for injecting light; a concave diffraction grating for wavelength-dispersing the light injected by the light injecting means; a reflecting means having a reflective surface that reflects the light of different wavelengths dispersed by the concave diffraction grating, and whose inclination is variable by rotating around a rotation axis; and a single light emitting means that emits each of the spectrally dispersed light of different wavelengths reflected by changing the inclination of the reflective surface of the reflecting means. A first substrate and a second substrate, and an intervening member disposed between the first substrate and the second substrate, Equipped with, The light incident means and the reflection means are formed on the first substrate, the light emission means and the concave diffraction grating are formed on the second substrate, and each of the first substrate and the second substrate is bonded to the intervening member. The aforementioned reflective means is The aforementioned The concave diffraction grating is formed on a first substrate by a MEMS process, and is positioned such that a perpendicular line at the center of the concave diffraction grating intersects with the first substrate, and reflects light of different wavelengths dispersed by the concave diffraction grating toward the light emitting means. [Effects of the Invention]

[0007] According to the present invention, a compact and low-cost spectrometer can be provided. [Brief explanation of the drawing]

[0008] [Figure 1] This is a conceptual diagram showing the configuration of a spectrometer according to the first embodiment of the present invention. [Figure 2] This is a schematic diagram of the configuration of a light reflection unit according to the first embodiment of the present invention. [Figure 3] Figure 2 is a cross-sectional view of the light reflection unit along line A-A'. [Figure 4] Figure 2 is a cross-sectional view of the light reflection unit along line B-B'. [Figure 5] This is a schematic diagram showing a first configuration example of a concave diffraction grating according to the first embodiment of the present invention. [Figure 6] This is a schematic diagram showing a second configuration example of a concave diffraction grating according to the first embodiment of the present invention. [Figure 7] This is a schematic diagram showing a third configuration example of a concave diffraction grating according to the first embodiment of the present invention. [Figure 8]It is a conceptual diagram showing a first modification of the configuration of the spectroscope according to the first embodiment of the present invention. [Figure 9] It is a conceptual diagram showing a second modification of the configuration of the spectroscope according to the first embodiment of the present invention. [Figure 10] It is a conceptual diagram showing a third modification of the configuration of the spectroscope according to the first embodiment of the present invention. [Figure 11] It is a conceptual diagram showing a fourth modification of the configuration of the spectroscope according to the first embodiment of the present invention. [Figure 12] It is a conceptual diagram showing a fifth modification of the configuration of the spectroscope according to the first embodiment of the present invention. [Figure 13] It is a conceptual diagram showing a sixth modification of the configuration of the spectroscope according to the first embodiment of the present invention. [Figure 14] It is a conceptual diagram showing a seventh modification of the configuration of the spectroscope according to the first embodiment of the present invention. [Figure 15] It is a conceptual diagram showing an eighth modification of the configuration of the spectroscope according to the first embodiment of the present invention. [Figure 16] It is a conceptual diagram showing the configuration of the spectroscope according to the second embodiment of the present invention. [Figure 17] It is a schematic diagram of the configuration (first example) of the specific wavelength detector according to the second embodiment of the present invention. [Figure 18] It is a schematic diagram of the configuration (second example) of the specific wavelength detector according to the second embodiment of the present invention. [Figure 19] It is a diagram showing an example of the output signal of the specific wavelength detector according to the second embodiment of the present invention. [Figure 20] It is a diagram showing an example of the output signal of the specific wavelength detector according to the second embodiment of the present invention. [Figure 21] It is a diagram showing an example of the output signal of the specific wavelength detector according to the second embodiment of the present invention. [Figure 22] It is a diagram showing an example of the time waveform of the swing angle of the movable optical reflection part according to the second embodiment of the present invention. [Figure 23] It is a conceptual diagram showing a first modification of the configuration of the spectroscope according to the second embodiment of the present invention. [Figure 24]It is a conceptual diagram showing a second modification of the configuration of the spectroscope according to the second embodiment of the present invention. [Figure 25] It is a conceptual diagram showing a third modification of the configuration of the spectroscope according to the second embodiment of the present invention. [Figure 26] It is a conceptual diagram showing a fourth modification of the configuration of the spectroscope according to the second embodiment of the present invention. [Figure 27] It is a conceptual diagram showing another configuration of the spectroscope according to the second embodiment of the present invention. [Figure 28] It is a conceptual diagram showing the configuration of a spectroscopic measurement apparatus using the spectroscope according to the first embodiment of the present invention.

Embodiments for Carrying Out the Invention

[0009] 〔First Embodiment〕 Hereinafter, the first embodiment of the present invention will be described with reference to the drawings.

[0010] (Configuration of Spectroscope 10A) FIG. 1 is a conceptual diagram showing the configuration of a spectroscope 10A according to the first embodiment of the present invention. In FIG. 1 The spectroscope 10A shown is an example of the "spectroscope" of the present invention. This spectroscope 10A includes a light incident portion 1, a concave diffraction grating 2, a movable light reflecting portion 3, a light emitting portion 4, a substrate 5, and a substrate 6. It is configured.

[0011] The light incident portion 1 is an example of the "light incident means" of the present invention. The light incident portion 1 has a light passing portion 1a formed. The light incident portion 1 causes the light irradiated from the outside to pass through the inside of the light passing portion 1a and thereby makes it enter the spectroscope 10A. The light passing portion 1a has, for example, a pinhole shape , a slit shape, etc. The light incident portion 1 is installed, for example, for the purpose of determining the incident position of light or improving the wavelength resolution.

[0012] The concave diffraction grating 2 is an example of the "diffraction grating" of the present invention. The concave diffraction grating 2 is on the substrate 5 It is formed in the concave diffraction grating 2, which measures the light that enters the spectrometer 10A from the light incident section 1. Wavelength dispersion occurs. The light (diffracted light) dispersed by the concave diffraction grating 2 is directed to the movable light reflector 3. It is reflected toward the substrate. The material of the substrate 5 can be, for example, a semiconductor, glass, metal, resin, etc. These may be used, but are not limited to them. Note that the concave diffraction grating 2 is based It may be formed directly on the plate 5, or on a thin film layer (for example, a resin layer, etc.) formed on the substrate 5. It may be formed.

[0013] The movable light reflecting part 3 is an example of the "reflection means" of the present invention. The movable light reflecting part 3 is of the substrate 6 Within the opening 6a, it is arranged on the same plane as the substrate 6. The movable light reflecting part 3 is on the substrate Together with 6, it constitutes the light reflection unit 11. The movable light reflection part 3 is formed by the concave diffraction grating 2. The diffracted light, which has been spectrally separated, is reflected toward the light emission unit 4. The movable light reflector 3 rotates along the axis 3a. It has. The movable light reflecting part 3 reflects diffracted light by rotating around the rotation axis 3a. The system is configured to allow the inclination of the reflective surface to be changed. For example, semiconductors, glass, metals, resins, etc. can be used, but are not limited to these. This does not mean that... However, by using a semiconductor as the material for the substrate 6, the semiconductor process... By using MEMS processes, etc., it is possible to form a very thin and compact movable light reflector 3. It is possible. Furthermore, by using a semiconductor as the material for the substrate 6, piezoelectric driving and electrostatic driving can be achieved. Therefore, the drive element section, such as the electromagnetic drive, can be formed monolithically on the substrate 6. This allows the movable light reflecting part 3 to be driven without the use of an external drive device such as a motor. This makes it possible to further miniaturize the spectrometer 10A.

[0014] The light-emitting section 4 is an example of the "light-emitting means" of the present invention. The light-emitting section 4 has a light-passing section 4a It is formed. The light emitting part 4 directs the diffracted light reflected by the movable light reflecting part 3 to its focal point. The light is emitted to the outside by passing through the light-transmitting section 4a at a certain position. The light-transmitting section 4a is For example, it has a pinhole shape, a slit shape, etc. The light emitting part 4 emits, for example, diffracted light It is installed for the purpose of determining the emission position and improving wavelength resolution.

[0015] Furthermore, the light incident section 1 and the light emission section 4 may also be formed on the substrate. In this case, the substrate material can be, for example, semiconductor, glass, metal, resin, etc. This is possible, but is not limited to these. However, if semiconductor material is used for the substrate... By doing so, high-precision and low-cost photoinput can be achieved using semiconductor processes, MEMS processes, etc. It is possible to form the emission section 1 and the light emission section 4.

[0016] Furthermore, in the spectrometer 10A, each of the above components is arranged in a predetermined position as shown in Figure 1. Furthermore, it is fixed to the housing, jig, etc., so that it can maintain a predetermined posture.

[0017] (Configuration of the light reflection unit 11) Now, with reference to Figures 2 to 4, the specific configuration of the light reflection unit 11 will be described. Figure 2 is a schematic diagram of the configuration of the light reflection unit 11 according to the first embodiment of the present invention. As shown, the light reflection unit 11 comprises a movable light reflection part 3, a substrate 6, and a drive circuit 7 (in the present invention). It is configured to have an example of a "driving means" and a beam portion 8. The movable light reflecting portion 3 is a substrate Within the opening 6a of 6, it is arranged on the same plane as the substrate 6. The opening 6a is, for example For example, MEMS (Micro Electro Mechanical Systems) processes such as anisotropic deep etching. It is formed using S. The movable light reflecting part 3 is a part that becomes one end of the rotating shaft 3a, Both the rotating shaft 3a and the other end are supported by the beam 8.

[0018] Furthermore, in the example shown in Figure 2, the movable light reflecting part 3 is superimposed on the thin film part 3b and on the reflective surface side of the thin film part 3b. It is configured to have a reflective member 3c which reflects the movable light reflecting part 3. It is provided to improve the efficiency. The thin film portion 9 contains, for example, SOI (Silicon On Ins A thin film Si layer of the ulator substrate can be used. Furthermore, the reflective member 10 can be, for example, Metallic materials such as Al, Ag, Au, and Pt can be used.

[0019] Figure 3 is a cross-sectional view of the light reflection unit 11 shown in Figure 2, taken along line A-A'. In the example in Figure 3, the beam section 8, in order from the top (positive Z-axis direction) in the figure, consists of a thin film portion 8a, an electrode 8b, a piezoelectric film 8d, and an electric The pole 8c is superimposed to form the beam section 8. The beam section 8 configured in this way is connected to the drive circuit 7 (Figure (See 2) A voltage is applied to the piezoelectric film 8d via electrodes 8b and 8c, thereby activating It functions as a tuner and can rotate the movable light reflector 3. For example, In order to emit diffracted light of a desired wavelength to the outside, the movable light reflector 3 is moved to its wave It is necessary to tilt it at a predetermined angle according to its length. For example, the drive circuit 7 tilts the piezoelectric film 8d at a predetermined angle. By applying a voltage, or by detecting the tilt sensor provided in the movable light reflector 3 By feeding back the angle to the voltage applied to the piezoelectric film 8d, the movable light reflecting part 3 It can be tilted to a predetermined angle. Note that the driving method of the movable light reflector 3 is not limited to piezoelectric drive. Alternatively, other drive methods (e.g., electrostatic drive, electromagnetic drive, etc.) may be used.

[0020] Figure 4 is a cross-sectional view of the light reflection unit 11 shown in Figure 2, along the line B-B'. As shown in Figure 4, The movable light reflecting part 3 rotates when driven by the beam part 8, as explained in Figure 3. The reflective surface that reflects diffracted light rotates clockwise and counterclockwise around axis 3a. It is configured so that the inclination can be changed.

[0021] (Example of the configuration of concave diffraction grating 2) Next, the specific configuration of the concave diffraction grating 2 will be described with reference to Figures 5 to 7.

[0022] Figure 5 is a schematic diagram showing a first configuration example of a concave diffraction grating 2 according to the first embodiment of the present invention. In the example shown in Figure 5, the concave diffraction grating 2 is constructed having a resin layer 14 and a reflective member 15. Specifically, a concave curved surface is formed on the upper surface of the substrate 5, and a thin layer is applied to this concave curved surface. A film-like resin layer 14 is formed. A diffraction grating is then formed on the resin layer 14. Furthermore, Al, Ag, Au, and P are used on the surface of the diffraction grating to improve reflectivity. A reflective member 15 made of a metal material such as t is formed.

[0023] For example, if a Si substrate is used for substrate 5, a grayscale mask and nanoimprint technology are used. Using techniques, a pattern for forming a concave curved surface is formed on the resist coated on the substrate 5, and By performing etching or the like, a concave curved surface can be formed on the substrate 5. A resin layer 14 is formed on the concave curved surface, and the mold of a separately prepared concave diffraction grating is transferred to the resin layer 14 and hardened. By doing so, a diffraction grating can be formed on the resin layer 14.

[0024] Figure 6 is a schematic diagram showing a second configuration example of the concave diffraction grating 2 according to the first embodiment of the present invention. In the example shown in Figure 6, the concave diffraction grating 2 is configured to have a reflective member 15. A concave curved surface is formed on the upper surface of the substrate 5, and a diffraction grating is formed on this concave curved surface. Furthermore, Al, Ag, Au, are used on the surface of the diffraction grating to improve reflectivity. A reflective member 15 made of a metallic material such as Pt is formed. For example, opposite the concave curved surface of the substrate 5. Then, a resist is applied, and a grid pattern is formed on the resist using interference exposure or the like, and then... By performing etching or similar processes, a diffraction grating can be formed on the concave curved surface of the substrate 5.

[0025] Figure 7 is a schematic diagram showing a third configuration example of the concave diffraction grating 2 according to the first embodiment of the present invention. In the example shown in Figure 7, the concave diffraction grating 2 is constructed having a resin layer 14 and a reflective member 15. Specifically, a resin layer 14 is formed on the upper surface (flat surface) of the substrate 5. A concave curved surface is formed on the upper surface of layer 14, and a diffraction grating is formed on this concave curved surface. Furthermore, Al, Ag, Au, and P are used on the surface of the diffraction grating to improve reflectivity. A reflective member 15 made of a metal material such as t is formed. For example, the upper surface (flat surface) of the substrate 5 A resin layer 14 is formed on the resin, and a mold of a concave diffraction grating, which was prepared separately, is transferred to the resin layer 14 and cured. By doing so, a diffraction grating can be formed on the resin layer 14. The configuration in Figure 7 is on the substrate 5. Since the process of forming a concave curved surface can be omitted, the process can be simplified.

[0026] Note that the concave diffraction grating 2 in Figures 5 to 7 is, for example, the cross-sectional shape of the groove portion of the diffraction grating. It is possible to use devices with rectangular, sinusoidal, or sawtooth shapes. ru.

[0027] Furthermore, in the concave diffraction grating 2 shown in Figures 5 to 7, the reflective member 15 may be omitted. Furthermore, the configuration of the concave diffraction grating 2 is not limited to those exemplified in Figures 5 to 7. That is, The concave diffraction grating 2 can be configured in ways other than those shown in Figures 5 to 7, as long as it has a similar wavelength dispersion function. It may be present. Also, when parallel light is incident from the light incident section 1, instead of the concave diffraction grating 2, Similarly, a similar wavelength dispersion function can be achieved by using a planar diffraction grating. Yes. In this case, the complex equipment required when adopting a configuration that changes the tilt of the plane diffraction grating is necessary. The configuration (for example, a collimating optical system to make light parallel before and after a plane diffraction grating) is not It is essential.

[0028] (Effects and mechanisms of operation of spectrometer 10A) The spectrometer 10A of this embodiment, configured as described above, drives the movable light reflecting unit 3, By changing the inclination of the reflective surface of the light-reflecting part 3, light is emitted from the light-emitting part 4 to the outside. It is possible to change the wavelength of the diffracted light. Specifically, the concave diffraction grating 2 Therefore, the focal length of diffracted light dispersed by wavelength differs depending on the wavelength. Thus, spectrometer 10A The position of the light-transmitting portion 4a of the light-emitting portion 4 is a position corresponding to the focal length of the diffracted light of the desired wavelength. To achieve this, the inclination of the reflective surface of the movable light reflector 3 is changed. This results in the as shown in Figure 1. Then, diffracted light of the desired wavelength is emitted from the light-passing section 4a of the light-emitting section 4. Oh, the dashed line in Figure 1 schematically shows the optical path of light of a specific wavelength. In Figure 1, the reflective surface of the movable light reflector 3 is such that diffracted light of a specific wavelength is emitted. The image shows how the slope is set.

[0029] Thus, according to the spectrometer 10A of this embodiment, the tilt of the reflective surface of the movable light reflecting part 3 can be adjusted. This allows diffracted light of a desired wavelength to be emitted from the light-passing section 4a of the light-emitting section 4. Therefore, according to the spectrometer 10A of this embodiment, a single light sensor provided externally is used. This allows us to obtain the spectral spectrum of diffracted light at the desired wavelength. According to the spectrometer 10A, various wavelengths can be observed without using large and expensive array sensors. The spectral spectrum of the diffracted light can be obtained. Therefore, the spectrometer 10A of this embodiment According to this, it is possible to provide a small and low-cost spectrometer.

[0030] Furthermore, according to the spectrometer 10A of this embodiment, without changing the inclination of the concave diffraction grating 2, By changing the inclination of the reflective surface of the movable light reflecting part 3, light can be transmitted from the light passing part 4a of the light emitting part 4 to the desired location. The spectrometer 10A of this embodiment is designed to emit diffracted light of the desired wavelength. According to this, the complex apparatus structure required when adopting a configuration that changes the inclination of the concave diffraction grating 2 No configuration (for example, a configuration to accommodate changes in the angle of incidence of light to the concave diffraction grating 2) is required. Therefore, according to the spectrometer 10A of this embodiment, the light emission unit 4 has a relatively simple configuration. Diffractive light of a desired wavelength can be emitted from the light-transmitting section 4a.

[0031] Furthermore, according to the spectrometer 10A of this embodiment, the number of reflections of incident light is the number of concave diffractions. There are two reflections: one by child 2 and another by concave diffraction grating 2. Therefore, in this embodiment According to the spectrometer 10A, compared to a configuration that reflects light three or more times (for example, the configuration in Patent Document 1) In comparison, it allows for a simpler configuration and suppresses the reduction in light intensity due to reflection loss. It is possible.

[0032] In this embodiment, the spectrometer 10A emits light from at least the light passing section 4a of the light emitting section 4. By combining it with a photodetector that detects the diffracted light, a spectroscopic device is formed. This is possible. In this case, a photodetector having a single light sensor can be used. In addition, the spectrometer 10A of this embodiment is configured such that at least the light passing portion 4a of the light emitting portion 4 is By being combined with an optical fiber that guides the emitted diffracted light, a monochromator is formed. It is possible.

[0033] (Variations in the spectrometer configuration) The following describes variations in the spectrometer configuration. I will now explain the changes from the spectrometer described earlier. Furthermore, in each modified example, Components that have the same function as those previously described are described below. The same reference numerals are used for the components, and the explanation is omitted. Also, in each modified example, The operating principle of the optical device is the same as that explained previously, so the explanation will be omitted.

[0034] (First variation) Figure 8 is a conceptual diagram showing a first modified example of the configuration of a spectrometer according to the first embodiment of the present invention. In the spectrometer 10B shown in Figure 8, the light incident section 1 and the movable light reflecting section 3 are formed on the same substrate 6. In addition, in the spectrometer 10B, the light emission section 4 and the concave diffraction grating 2 are on the same substrate 5. It is formed on top. For example, when a Si substrate is used for substrates 5 and 6, the light incident part 1 and the light The injection unit 4 is manufactured using semiconductor processes, MEMS processes, etc., on substrates 5 and 6 respectively. It is possible to form it physically.

[0035] According to this spectrometer 10B, high positional precision can be achieved on substrates 5 and 6 using a semiconductor process. The light incident section 1 and the light emission section 4 can be formed in degrees. That is, with this spectrometer 10B This allows for alignment adjustment between the light incident part 1 and the movable light reflecting part 3, and the light emission part 4 and the recessed part. Since alignment adjustment between the surface diffraction grating 2 is unnecessary, overall alignment adjustment is easier. It becomes easier. Also, according to this spectrometer 10B, between the light incident part 1 and the movable light reflecting part 3, Furthermore, the configuration ensures that no part of the housing or any jigs are interposed between the light-emitting section 4 and the concave diffraction grating 2. Therefore, according to the spectrometer 10B, the distance between the light incident part 1 and the movable light reflecting part 3 Furthermore, the distance between the light emission section 4 and the concave diffraction grating 2 can be shortened, thus resulting in a smaller spectrometer. This makes it possible to achieve this.

[0036] (Second variation) Figure 9 is a conceptual diagram showing a second modified example of the configuration of a spectrometer according to the first embodiment of the present invention. In the spectrometer 10C shown in Figure 9, the light incident section 1 and the light output section 4 are formed on the same substrate 16. It is being done.

[0037] According to this spectrometer 10C, a semiconductor process is used to achieve high positional accuracy relative to the substrate 16. The light incident section 1 and the light emission section 4 can be formed in this spectrometer 10C. Therefore, alignment adjustment between the light inlet 1 and the light outlet 4 becomes unnecessary, thus improving the overall Alignment adjustment becomes easier.

[0038] (Third variation) Figure 10 is a conceptual diagram showing a third modified example of the spectrometer configuration according to the first embodiment of the present invention. The spectrometer 10D shown in Figure 10 differs from the spectrometer 10B shown in Figure 8 in that it has a different relationship between substrate 5 and substrate 6. The substrate 5 has a configuration in which a pair of left and right spacers 17 are further arranged in between. This is an example of the "second substrate". Substrate 6 is an example of the "first substrate" of the present invention. Sa 17 is an example of the "intervening member" of the present invention. Each of the substrates 5 and 6 is in contact with the spacer 17. They are joined together. For example, columnar or plate-shaped spacers can be used for the spacer 17. The distance between substrate 5 and substrate 6 is determined by the thickness of the spacer 17, so that the desired spectral characteristics can be obtained. The intervals are adjusted to be appropriate to allow this to happen.

[0039] According to this spectrometer 10D, the distance between substrate 5 and substrate 6 is determined by the thickness of the spacer 17. The intervals are adjusted to an appropriate level so that the desired spectral characteristics can be obtained. According to the spectrometer 10D, alignment adjustment between substrate 5 and substrate 6 becomes unnecessary. In the spectrometer 10D, it is also possible to use a substrate for the spacer 17. In this case, half By using a conductive process, a more precise spacer 17 can be formed. Furthermore, multiple spacers 17 can be formed on the wafer simultaneously with high precision. Therefore, it is possible to create a spectrometer with less variation and at a lower cost.

[0040] (Fourth variation) Figure 11 is a conceptual diagram showing a fourth modified example of the configuration of the spectrometer according to the first embodiment of the present invention. The spectrometer 10E shown in Figure 11 has a light emission section 4 on the substrate 5 that is to the right of the concave diffraction grating 2. It differs from the spectrometer 10D shown in Figure 10 in that it is formed on the side (positive Y-axis side in the figure). In 10E, the grating pitch in the concave diffraction grating 2 is wider than that of the spectrometer 10D shown in Figure 10. This is being done. As a result, the diffraction angle by the concave diffraction grating 2 has changed, so the spectrometer 10E Then, the position of the light emission unit 4 has been changed. According to this spectrometer 10E, the spectrometer 10D and In comparison, the concave diffraction grating 2 has a larger grating pitch, making it easier to manufacture. Therefore, according to spectrometer 10E, compared to spectrometer 10D, manufacturing variations This allows for a reduction in size and enables the lower cost of the spectrometer.

[0041] (Fifth variation) Figure 12 is a conceptual diagram showing a fifth modified example of the spectrometer configuration according to the first embodiment of the present invention. The spectrometer 10F shown in Figure 12 is configured such that the perpendicular line from the center of the concave diffraction grating 2 to the substrate 5 is connected to the substrate The concave diffraction grating 2 is positioned so as not to be perpendicular to the substrate surface of 5, on the light incident side 1 (in the figure) It differs from the spectrometer 10D shown in Figure 10 in that it is positioned at an angle (to the negative side of the Y-axis). .

[0042] According to the spectrometer 10F configured in this way, the inclination of the concave diffraction grating 2 can be changed. This adjusts the incident angle of diffracted light on the movable light reflecting part 3, thereby controlling the positive and negative directions of the movable light reflecting part 3. It is possible to control the required deflection angle so that it is equal. For this reason, the spectrometer 10F Therefore, while enabling measurement within the same wavelength range, the deflection angle of the movable light reflector 3 can be reduced. This makes it possible. According to the spectrometer 10F, the movable light reflector 3 can be moved with a smaller driving force. It can drive the movable light reflector 3. Therefore, according to the spectrometer 10F, the drive of the movable light reflector 3 The necessary components (e.g., drive elements, drive circuits, power supplies, etc.) can be miniaturized, and spectral analysis can be performed. Further miniaturization and cost reduction of the instrument can be achieved. Furthermore, with the spectrometer 10F This reduces the amount of twisting in the beam 8 that supports the movable light reflecting part 3, thus reducing the stress on the beam 8. The force can be reduced. Therefore, according to the spectrometer 10F, the stability of the rotation angle of the movable light reflector 3 It is possible to improve reliability and other factors.

[0043] (Sixth variation) Figure 13 is a conceptual diagram showing a sixth modified example of the spectrometer configuration according to the first embodiment of the present invention. In the spectrometer 10G shown in Figure 13, the spacer 17 on the left side (negative Y-axis in the figure) has been replaced with a substrate 19. In terms of the fact that the light incident portion 1 and the light emission portion 4 are formed on the substrate 19, This differs from the spectrometer 10D shown in Figure 10.

[0044] Substrate 19 is an example of the "third substrate" of the present invention. Substrate 19 is a combination of substrate 5 and substrate 6. In between, it is positioned non-parallel and perpendicular to substrates 5 and 6. Each of the boards 5 and substrate 6 is bonded to the substrate 19. The material of the substrate 19 is For example, semiconductors, glass, metals, resins, etc. can be used, but are not limited to these. It is not a semiconductor process. However, by using a semiconductor as the material for the substrate 19, Using MEMS processes, etc., an extremely thin and compact light-injecting section 1 and light-emitting section 4 are formed. It is possible to achieve this.

[0045] According to this spectrometer 10G, high positional accuracy can be achieved on the substrate 19 using a semiconductor process. The light incident section 1 and the light output section 4 can be formed in this spectrometer 10G. Therefore, alignment adjustment between the light inlet 1 and the light outlet 4 becomes unnecessary, thus improving the overall Alignment adjustment becomes easier. In the spectrometer 10G, the light incident section 1 is formed on the substrate 6. Alternatively, the light-emitting section 4 may be formed on the substrate 19. Or, in the spectrometer 10G Alternatively, the light incident portion 1 may be formed on the substrate 19, and the light emission portion 4 may be formed on the substrate 5.

[0046] (Variations of the 7th and 8th examples) Figure 14 is a conceptual diagram showing a seventh modified example of the spectrometer configuration according to the first embodiment of the present invention. Figure 15 is a conceptual diagram showing an eighth modified example of the configuration of a spectrometer according to the first embodiment of the present invention. The spectrometer 10H shown in Figure 14 has a light detection unit 1 instead of a light emission unit 4. It differs from the spectrometer 10A shown in Figure 1 in that it has 8. The spectrometer 10I shown in Figure 15. The difference is that instead of the light-emitting unit 4, a light-detecting unit 18 is provided in the position of the light-emitting unit 4, as shown in Figure It differs from the spectrometer 10B shown in 8. The photodetector 18 of spectrometers 10H and I is the "photodetector" of the present invention. This is an example of a "means."

[0047] According to this spectrometer 10H,I, there is no need to provide an external light detection unit 18, thus making it smaller. A spectrometer of this type can be realized. Note that the shape of the light-receiving surface of the light-emitting part of the light-detecting unit 18 is The light-transmitting portion 4a formed in 4 has a similar shape (for example, a pinhole shape, a slit shape). It may be formed in the following ways: or the light detection unit 18 is formed on the upper part of the light receiving surface, and the light emitting unit 4 They may also have light-shielding members having a similar shape. These light-receiving surfaces and light-shielding members, etc. It can be formed monolithically on a semiconductor substrate using a semiconductor process. Therefore, the light detection unit 18 can be manufactured to be thin and compact.

[0048] [Second Embodiment] Next, a second embodiment of the present invention will be described with reference to Figures 16 to 26. In this embodiment, we describe an example in which a specific wavelength detector is further provided in addition to the spectrometer.

[0049] (Configuration of Spectrometer 50A) Figure 16 is a conceptual diagram showing the configuration of the spectrometer 50A according to the second embodiment of the present invention. The spectrometer 50A shown in 6 further includes a specific wavelength detector 20, which is the first embodiment (Figure 1 It is different from the spectrometer 10A.

[0050] The specific wavelength detector 20 is an example of the "specific wavelength detection means" of the present invention. Specific wavelength detector 20 is located near the focal position of the emitted light (i.e., the position of the light-emitting part 4). The constant wavelength detector 20 is capable of detecting light of a specific wavelength λs, and is located near the light emission unit 4. It is installed nearby. The spectrometer 50A uses a specific wavelength detector 20 to detect light of a specific wavelength λs. By detecting this, the deflection angle of the movable light reflector 3 is set to the desired measurement wavelength range (λm~λx). It is possible to detect whether it is sufficient or not, or whether the amplitude is constant. be.

[0051] For example, when an InGaAs photodiode is used as the photodetector, the spectrometer 50A The measurement wavelength range can be set to 900-1700 nm or 900 nm-2500 nm. In this case, the specific wavelength λs is shorter than the minimum wavelength of the measurement wavelength range, which is 900 nm. However, if the measurement wavelength range is longer than the maximum wavelength of 1700 nm or 2500 nm, It is acceptable. In particular, by setting a specific wavelength λs to a wavelength of approximately 1000 nm or less. Since Si photodiodes can be used, this configuration can be realized at a lower cost. That is the case.

[0052] The dashed line in Figure 16 schematically shows the optical path of light with the smallest wavelength λm in the measurement wavelength range. On the other hand, the dashed line in Figure 16 roughly represents the optical path of light of a specific wavelength λs. This is what is shown.

[0053] (Configuration of the specific wavelength detector 20) Now, referring to Figures 17 and 18, let us describe the specific configuration of the specific wavelength detector 20. Let me explain. Figure 17 shows the configuration of a specific wavelength detector 20 according to the second embodiment of the present invention (first example). This is a schematic diagram. For example, as shown in Figure 17, the specific wavelength detector 20 is connected to the photodetector 21. It is configured to include a bandpass filter 22. The photodetector 21 is the "photodetector" of the present invention. This is an example. The photodetector 21 detects light of a specific wavelength λs. For example, Si photodiodes, InGaAs photodiodes, etc., are used. The pass filter 22 transmits light within a specific wavelength range (including a specific wavelength λs within the range). The bandpass filter 22 has a narrow passband filter (for example, a Fabry-Perot filter). It is preferable to use filters, etc.

[0054] Figure 18 is a schematic diagram of the configuration of a specific wavelength detector 20 according to a second embodiment of the present invention (second example). As shown in Figure 18, the specific wavelength detector 20 is further configured to include a light-shielding member 23. This may be done. The shape and size of the light-transmitting portion in the light-shielding member 23 may be appropriate as needed. Any such material should be used. Note that the specific wavelength detector 20 includes a bandpass filter 22 and a light-shielding section. Instead of using material 23 and photodetector 21, a bandpass filter and light-shielding member are used. A photodetector having the function of may be used. Also, Figure 27 shows the second embodiment of the present invention. This is a conceptual diagram showing other configurations of the spectrometer 50A related to the application method. As shown in the configuration in Figure 27, The specific wavelength detector 20 may be integrally formed with the light emission unit 4. For example, if the light emission unit 4 is S When formed on an i substrate and the specific wavelength detector 20 is a Si photodiode, both are It is possible to form it monolithically. Also, the bandpass filter 22 is, for example, The Fabry-Perot filter and the like can be formed using a semiconductor process, and the light-shielding member 23 is also a thin metal film. Since these can be formed using a semiconductor process, the specific wavelength shown in Figure 18 can be formed on the light emission section 4. The detector 20 can be formed as an integrated unit. Also, the Si photodiode Depending on the shape, it may be possible to obtain the same function without forming the light-shielding member 23.

[0055] Figures 19-21 show an example of the output signal of a specific wavelength detector 20 according to a second embodiment of the present invention. The diagram shows the detection of light of a specific wavelength λs by the specific wavelength detector 20. An example of the output signal in this case is shown. If the resonant frequency of the movable light reflector 3 is f, then the drive frequency Period T is 1 / f.

[0056] Figure 19 shows that the angular amplitude of the movable light reflector 3 matches the measurement wavelength range (λm~λx). This represents the state in which the movable light reflector 3 is vibrating. In this case, for example, if λs = λm, then the vibration of the movable light reflector 3 Because light of a specific wavelength λs is detected at the position of the maximum angle of levitation, the detection signal of a specific wavelength λs This means that the output will be generated once with a period T.

[0057] Figure 20 shows that there is a margin in the angular amplitude of the movable light reflector 3 with respect to the measurement wavelength range (λm~λx). This represents a certain state. In this case, the detection signal of a specific wavelength λs is such that the signal repeats twice with a period T. This will result in the output being:

[0058] Figure 21 shows that there is insufficient margin in the angular amplitude of the movable light reflector 3 for the measurement wavelength range (λm~λx). This represents a certain state. In this case, the amplitude of the detection signal for a specific wavelength λs will decrease. Furthermore, when the angular amplitude of the movable light reflector 3 decreases, a detection signal of a specific wavelength λs is output. You won't be able to anymore.

[0059] In the case of a spectrometer, it is necessary to constantly maintain the measurement wavelength range (λm~λx), as shown in Figure 19. The condition must be such that there is sufficient margin in the angular amplitude of the movable light reflecting part 3, as shown in Figure 20. In particular, in the case of Figure 20, the two pins are independent of the amplitude of the detection signal at a specific wavelength λs. By detecting the time Td or Ts between steps, there is a margin in the angular amplitude of the movable light reflector 3. It is possible to detect that this occurs. In addition, a movable light reflector can be used to keep Td or Ts constant. By controlling the drive of unit 3, the measurement wavelength range (λm~λx) can be kept constant, T If light emitted from the light emission unit 4 is detected within the range of s, the desired spectral spectrum can be obtained. It is possible to obtain this. Also, in cases where the resonant frequency f of the movable light reflecting part 3 may fluctuate Since Td changes depending on the value of f, by measuring the period T (=1 / f)... By controlling Td to a constant value according to the resonant frequency f, the desired spectrum can be obtained. This is possible.

[0060] Note that the range of T is the driving range for one round trip of the movable light reflecting part 3, so in reality it is two times A spectrum is obtained. Half of this data can be used as spectral data. Alternatively, you may use the average value.

[0061] Figure 22 shows an example of the time waveform of the deflection angle of the movable light reflector 3 according to the second embodiment of the present invention. This is a diagram. The solid line in Figure 22 represents the state where the deflection angle matches the measurement wavelength range (the state in Figure 19). This represents the state where, at the maximum value of the deflection angle, light with the minimum wavelength λm is emitted from the light emission unit 4. This represents the state in which the device is in operation (the state shown in Figure 19). The dashed line in Figure 22 indicates that the deflection angle is within the measurement wavelength range. This represents the state described above (the state in Figure 20). In this example, the amplitude is at its positive maximum value. In the vicinity, the deflection angle exceeds that of the minimum wavelength λm, so the deflection angle becomes equivalent to that of the minimum wavelength λm. A specific wavelength λs is detected at the right timing. Therefore, as shown in Figure 20, every period Two detection signals will be detected in succession. The dashed line in Figure 22 indicates the deflection angle. This represents an insufficient state (the state shown in Figure 21, or a state where the output at a specific wavelength λs is 0). .

[0062] Furthermore, the detection results of the specific wavelength detector 20 are output to the drive circuit 7, for example, and the movable light reflection It is used for feedback control of the rotation angle of part 3. In this case, for example, the drive circuit 7 is By controlling the time interval Td or Ts of the detection signal of a specific wavelength λs to be constant, movable light The rotation angle of the reflecting part 3 may be controlled to be constant.

[0063] (Variations in the spectrometer configuration) The following describes variations in the spectrometer configuration. I will now explain the changes from the spectrometer described earlier. Furthermore, in each modified example, Components that have the same function as those previously described are described below. The same reference numerals are used for the components, and the explanation is omitted. Also, in each modified example, The operating principle of the optical device is the same as that explained previously, so the explanation will be omitted.

[0064] (First variation) Figure 23 is a conceptual diagram showing a first modified example of the configuration of a spectrometer according to the second embodiment of the present invention. In the spectrometer 50B shown in Figure 23, the light incident section 1 and the movable light reflecting section 3 are located on the same substrate 6. It is formed. In addition, the spectrometer 50B has a light emission section 4, a concave diffraction grating 2, and a specific wavelength The detector 20 is formed on the same substrate 5. For example, if Si substrates are used for substrates 5 and 6... In that case, the light inlet 1 and light outlet 4 are manufactured using semiconductor processes, MEMS processes, etc. Therefore, they can be integrally formed on substrates 5 and 6, respectively.

[0065] In the spectrometer 50B, the specific wavelength detector 20 consists of a photodetector 21 and a bandpass filter 2 It may also be equipped with 2 (see Figure 17), and further include a light-shielding member 23 (see Figure 18) It may also be equipped with. In the former case, the photodetector 21 and the bandpass filter 22 For example, a Fabry-Perot filter can be formed using a semiconductor process, so the substrate 5 It is possible to form a monolithic structure on top of it. In the latter case, the light-shielding member 23 is also a thin metal film, etc. Since these can be formed using a semiconductor process, the photodetector 21 and the bandpass filter 2 It is possible to form it integrally with part 2.

[0066] According to the spectrometer 50B configured in this way, the specific wavelength detector 20 is integrated onto the substrate 5. Because it can be formed in this way, further miniaturization is possible. Also, by the spectrometer 50B By forming the light emission section 4 and the specific wavelength detector 20 using a semiconductor process, This enables a highly accurate positional relationship between the light emission unit 4 and the specific wavelength detector 20. Therefore, the spectrometer 50B accurately detects the deflection angle of the movable light reflector 3 and measures the wavelength range It is possible to stabilize the enclosure.

[0067] (Second variation) Figure 24 is a conceptual diagram showing a second modified example of the configuration of a spectrometer according to the second embodiment of the present invention. The spectrometer 50C shown in Figure 24 emits light at a focal point of a specific wavelength λs on the substrate 5. Figure 23 shows that a radiation section 24 is formed and a specific wavelength detector 20 is located externally. The spectrometer 50B shown is different. The light emission unit 24 is an example of the "second light emission means" of the present invention. In the spectrometer 50C configured in this way, a specific wavelength detector 20 is formed on the substrate 5. Therefore, the process of substrate 5 can be simplified. On the other hand, the light emission section 4 and light emission As for part 24, since it can be formed on the substrate 5 simultaneously using the same process, each position It is possible to precisely control the relationship. Therefore, according to the spectrometer 50C, movable light reflection It is possible to accurately detect the deflection angle of section 3 and stabilize the measurement wavelength range.

[0068] (Third variation) Figure 25 is a conceptual diagram showing a third modified example of the configuration of a spectrometer according to the second embodiment of the present invention. The spectrometer 50D shown in Figure 25 consists of a detector 21 and a van, which are components of the specific wavelength detector 20. In terms of the fact that the dopass filter 22 and the spectrometer 50 shown in Figure 24 are separated from each other, It differs from C. Specifically, the bandpass filter 22 has a light emission section 24 on the substrate 5. It is positioned to cover the other. On the other hand, the detector 21 is positioned externally. According to the configured spectrometer 50C, only the detector 21 is located externally, therefore, Compared to a configuration that includes a bandpass filter 22, this configuration allows for miniaturization.

[0069] (Fourth variation) Figure 26 is a conceptual diagram showing a fourth modified example of the configuration of a spectrometer according to the second embodiment of the present invention. The spectrometer 50E shown in Figure 26 has a specific wavelength detector 20 on the substrate 5, which is located below the light emission section 4. It differs from the spectrometer 50B shown in Figure 23 in that it is located on the left side (negative Y-axis side in the figure). The change in configuration occurs when a specific wavelength λs is set to a longer wavelength than the maximum wavelength λx in the measurement wavelength range. This was done in response to the above. In other words, the specific wavelength detector 20 has a maximum wavelength λx It is positioned so that when light passes through the light-emitting part 4, light of a specific wavelength λs is focused. .

[0070] In particular, if the maximum wavelength λx in the measurement wavelength range is 2000 nm or less, then the specific wavelength λs A configuration that detects a specific wavelength λs' of the higher-order diffracted light at the focusing position may also be used. The revealed λm, λx, and λs are first-order diffracted light, and according to the principle of diffraction, at the position of the first-order diffracted light... The first diffraction occurs when the wavelength is halved, resulting in the superposition of second-order diffracted light. For example, if a specific wavelength λs is used, the first diffraction is performed. If the diffracted light is 2000 nm, then λs' = λs / 2 is the same position as the focal point of the first diffracted light. The secondary diffracted light with a wavelength of 1000 nm is focused. Therefore, the secondary diffracted light with wavelength λs' By detecting this, a cheaper Si photodiode can be used, thus lowering costs. This makes conversion possible.

[0071] Furthermore, the specific wavelength detector 20 described in the second embodiment is the same as all the detectors described in the first embodiment. Applicable to spectrometers 10A to 10I.

[0072] Furthermore, an analytical apparatus can be constructed using any of the spectrometers described in each embodiment together with a light source. It may be done in such a way. In this analytical device, for example, a light source is used to measure the object to be measured. A constant light source is shone onto the object being measured. Then, the measurement light diffusely reflected from the object is measured using a spectrometer, and the wavelength is determined. The light is spectrally analyzed for each wavelength, and the measurement light obtained for each wavelength is detected. This allows the analyzer to perform the analysis. This allows us to obtain spectral spectra at each wavelength that are characteristic of the molecular structure of the object being measured. A tunable light source is constructed by using any of the spectrometers described in each embodiment together with a light source. This may be done. Thus, an analytical apparatus using a spectrometer of any of the embodiments and Furthermore, because the spectrometer is small and inexpensive, the tunable light source is used in analytical instruments and tunable light sources themselves. The body itself can also be made smaller and less expensive.

[0073] Figure 28 shows the configuration of a spectroscopic measuring device 70 using a spectrometer 10A according to the first embodiment of the present invention. This is a conceptual diagram illustrating the difference between the spectroscopic measuring device 70 shown in Figure 28 and the spectrometer 10A shown in Figure 1. The configuration includes a photodetector 30 installed on the outside of the light-emitting section 4, and a light source 31. In the light measuring device 70, light emitted from the light source 31 is emitted onto the object to be measured 90, Light reflected from the object being measured 90 enters the spectrometer 10A from the light incident section 1. Concave diffraction grating The light diffracted by 2 is reflected by the movable light reflector 3, and at the angle of the movable light reflector 3 The light is emitted from the light emission unit 4 and then detected by the detector 30. The optical measuring device 70 is capable of obtaining the absorption spectral spectrum of the object to be measured 90. The detailed operating principle of the spectroscopic measuring device 70 is the same as described above, so it will not be explained here. Omit it.

[0074] Although preferred embodiments of the present invention have been described in detail above, the present invention is not limited to these embodiments. It is not defined, and within the scope of the gist of the present invention as described in the claims, Various modifications or changes are possible. [Explanation of Symbols]

[0075] 1 Light incidence part (light incidence means) 2. Concave diffraction grating (diffraction grating) 3 Movable light reflecting section (reflecting means) 4 Light emitting part (light emitting means) 5. Circuit board (second circuit board) 6. Circuit board (first circuit board) 7. Drive circuit (driving means) 8 Beam section 10A~10I spectrometer 11 Light Reflection Unit 14 resin layer 15 Reflective material 17 Spacer (intervening member) 18. Light detection unit (light detection means) 19. Circuit board (third circuit board) 20. Specific wavelength detector (specific wavelength detection means) 21. Photodetector (light detection unit) 22 Bandpass Filters 23 Light-shielding material 24 Light-emitting section (second light-emitting means) 50A~50E Spectrometer [Prior art documents] [Patent Documents]

[0076] [Patent Document 1] Japanese Patent Publication No. 2015-148485

Claims

1. A means for injecting light, A concave diffraction grating that disperses the light incident by the light incident means by wavelength, A reflective means having a reflective surface that reflects light of different wavelengths dispersed by the concave diffraction grating, wherein the inclination of the reflective surface is variable by rotating it around a rotation axis, A single light emitting means that emits light of different wavelengths and spectrally separated light by changing the inclination of the reflective surface of the reflective means, A first substrate and a second substrate, The device comprises an intervening member disposed between the first substrate and the second substrate, The light incident means and the reflection means are formed on the first substrate. The light emitting means and the concave diffraction grating are formed on the second substrate. Each of the first substrate and the second substrate is bonded to the intervening member. The spectrometer is characterized in that the reflective means is formed on the first substrate by a MEMS process, the perpendicular line at the center of the concave diffraction grating intersects with the first substrate, and the reflective means reflects light of different wavelengths dispersed by the concave diffraction grating toward the light emitting means.

2. A light injecting means for injecting light, A concave diffraction grating that disperses the light incident by the light incident means by wavelength, A reflective means having a reflective surface that reflects light of different wavelengths dispersed by the concave diffraction grating, wherein the inclination of the reflective surface is variable by rotating it around a rotation axis, A single light emitting means that emits light of different wavelengths and spectrally separated light by changing the inclination of the reflective surface of the reflective means, A first substrate and a second substrate, The system comprises a third substrate positioned non-parallel to the first and second substrates, between the first and second substrates, The reflective means is formed on the first substrate by a MEMS process. The concave diffraction grating is formed on the second substrate, The light injecting means and the light emitting means are formed on the third substrate. Each of the first substrate and the second substrate is bonded to the third substrate. The spectrometer is characterized in that the reflective means is arranged such that a perpendicular line at the center of the concave diffraction grating intersects with the first substrate, and reflects light of different wavelengths dispersed by the concave diffraction grating toward the light emitting means.

3. The spectrometer according to claim 1 or 2, further comprising a driving means for controlling the inclination of the reflective surface by driving the reflective means.

4. The spectrometer according to claim 1, characterized in that the light emitting means and the concave diffraction grating are formed on the same substrate.

5. The spectrometer according to claim 1 or 2, characterized in that the concave diffraction grating is formed such that the perpendicular line to the center of the concave diffraction grating and the substrate surface on which the concave diffraction grating is formed are not perpendicular to each other.

6. The spectrometer according to any one of claims 1 to 5, further comprising a light detection means for detecting the light emitted from the light emitting means.

7. The spectrometer according to any one of claims 1 to 6, characterized in that it comprises a single light detection means for detecting the light reflected by the reflection means, instead of the light emitting means.

8. The spectrometer according to any one of claims 1 to 7, further comprising a specific wavelength detection means for detecting light of a specific wavelength of light reflected by the reflection means.

9. The spectrometer according to claim 8, characterized in that the specific wavelength detection means and the concave diffraction grating are formed on the same substrate.

10. The spectrometer according to claim 8 or 9, characterized in that the specific wavelength detection means comprises a photodetector and a bandpass filter.

11. The spectrometer according to claim 10, further comprising a second light emission means for emitting the light reflected by the reflection means toward the specific wavelength detection means provided externally.

12. The spectrometer according to claim 11, characterized in that the second light emitting means and the concave diffraction grating are formed on the same substrate.

13. The spectrometer according to any one of claims 8 to 12, characterized in that the tilt range of the reflecting means is controlled to be constant by controlling the time interval of the detection signal of light of the specific wavelength detected by the specific wavelength detection means to be constant.

14. The spectrometer according to any one of claims 8 to 13, characterized in that the order of the light detected by the photodetector and the order of the light of the specific wavelength detected by the specific wavelength detection means are different.

15. The spectrometer according to claim 3, characterized in that the driving means is a piezoelectric driving system.

16. A light source, A spectrometer according to any one of claims 1 to 15 and An analytical device characterized by being equipped with the following features.

17. A light source, A spectrometer according to any one of claims 1 to 6, 9 to 13, or 15 A tunable light source characterized by comprising the following features.

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