Compressible tray for solid chemical vaporization chamber

Abstract

A tray for an ampoule of a delivery system for a solid precursor material used in an atomic layer deposition (ALD) process, a chemical vapor deposition (CVD) process, or both, configured to reduce in profile size upon compression to improve ease with which the tray can be inserted into the ampoule, and to expand in size to improve contact with an interior wall surface of the ampoule, resulting in improved heat transfer from the interior wall surface to the tray and ultimately to the solid precursor material disposed on the tray.

Description

Technical Field

[0001] Priority This disclosure claims priority based on U.S. Provisional Patent Application No. 63 / 253,800, filed Oct. 8, 2021. This priority document is incorporated herein by reference for all purposes.

[0002] This disclosure generally relates to delivery systems for solid precursor materials used in atomic layer deposition (ALD) processes, chemical vapor deposition (CVD) processes, or both.

Background Art

[0003] Delivery systems designed for transporting solid precursor materials used in ALD and CVD processes are used in the wafer manufacturing process. Such systems can include an ampoule configured to contain a solid precursor material.

Summary of the Invention

[0004] Some embodiments of the delivery system include an ampoule having a body that defines an internal chamber having an inner surface. At least some of these embodiments of the delivery system are used in ALD, CVD, or both processes. The solid precursor material can be used in the fabrication of microelectronic devices. In some embodiments, the solid precursor material is various organic precursors, inorganic precursors, metal organic precursors, or combinations thereof. In some embodiments, heat is required to use the solid precursor material.

[0005] In some embodiments, the ampoule includes at least one tray within its internal chamber for holding the solid precursor material. In some embodiments, the tray is configured with passages for flowing a fluid, such as a gas, from the lower part of the internal chamber to the upper part of the internal chamber, from the upper part of the internal chamber to the lower part of the internal chamber, or both.

[0006] In some embodiments, the tray is configured to conduct heat from the inner surface of the inner chamber to the solid precursor material. In some embodiments, the tray is configured with at least one portion for pressing a portion of the tray to increase or maximize contact with the inner surface of the inner chamber. In some embodiments, the tray is configured with a portion for increasing or maximizing heat transfer from the inner surface of the inner chamber to another portion of the tray, the solid precursor material, or both.

[0007] In some embodiments, the tray is configured to have a structure that allows it to change its structure so that it can be easily or relatively easily placed in an internal chamber, and once placed in an internal chamber, the tray is configured to change its structure so that it adheres to the internal chamber. According to some embodiments, the tray may have a portion that engages, contacts, connects, or any combination thereof with the inner surface or other part of the internal chamber mechanically, frictionally, or both.

[0008] In some embodiments, the tray for ampoules includes a compressible portion that exhibits both a compressed and a relaxed state, wherein the spring potential energy of the compressible portion is higher than that of the relaxed state.

[0009] In some embodiments of the tray, the tray includes a heat transfer component, which is in thermal contact with a compressible portion.

[0010] In some embodiments of the tray, the tray includes a second heat transfer component, the second heat transfer component being in thermal contact with a compressible portion.

[0011] In some embodiments of the tray, the distance from one heat transfer component to a second heat transfer component decreases when the compressible portion is compressed.

[0012] In some embodiments of the tray, the heat transfer component and the second heat transfer component are configured to be in thermal contact with the inner wall surface of the ampoule, and the heat transfer component and the second heat transfer component are configured to transfer thermal energy from the inner wall surface of the ampoule to the compressible portion.

[0013] In some embodiments of the tray, the tray has a surface configured to hold a solid precursor material and is in thermal contact with a compressible portion.

[0014] In some embodiments of the tray, the compressible portion is compressible along the radial direction of the surface, the circumferential direction of the surface, or both.

[0015] In some embodiments of the tray, the surface comprises a non-planar portion, a planar portion, or both.

[0016] In some embodiments of the tray, the compressible portion is equipped with a spring.

[0017] In some embodiments of the tray, the compressible portion has a bellows-like surface having a bulging direction and a folding direction.

[0018] In some embodiments of the tray, the bellows-like surface is configured to hold a solid precursor material.

[0019] In some embodiments of the tray, the compressible portion includes an opening ring.

[0020] In some embodiments of the tray, the tray has a surface configured to hold a solid precursor material and is in thermal contact with an open ring.

[0021] In some embodiments of the tray, the opening ring is provided on the outer periphery of the surface.

[0022] In some embodiments of the tray, the opening ring is located above the surface.

[0023] In some embodiments of the tray, the opening ring is located below the surface.

[0024] In some embodiments of the tray, the tri comprises a second surface configured to hold a solid precursor material and is in thermal contact with an open ring.

[0025] In some embodiments of the tray, the distance from the first surface to the second surface decreases as the compressible portion is compressed.

[0026] In some embodiments, the ampoule comprises a tray according to any of the tray embodiments herein.

[0027] In some embodiments, a method of inserting a tray into an ampoule includes obtaining a tray according to any of the tray embodiments described herein, compressing a compressible portion of the tray, and inserting the tray into the internal volume of the ampoule.

[0028] In some embodiments, the method further includes releasing the compressible portion of the tray, at which time the compressible portion expands and the tray is configured to be in thermal contact with the inner wall surface of the ampoule.

[0029] Reference is made to the accompanying drawings, which form a part of this disclosure and illustrate embodiments in which the systems and methods described herein may be implemented. Like reference numerals represent the same or similar parts throughout.

Brief Description of the Drawings

[0030] [Figure 1] [[ID=二十五]] [Figure 2] A schematic cross-sectional view of an ampoule containing a tray according to some embodiments is shown. [Figure 3A] A view showing a tray according to some embodiments is shown. [Figure 3B] Another view of a tray according to some embodiments is shown. [Figure 3C] Another view of a tray according to some embodiments is shown. [Figure 3D] Yet another view of a tray according to some embodiments is shown. [Figure 4A] A view showing a tray according to some embodiments is shown. [Figure 4B] Another view of a tray according to some embodiments is shown. ​ [Figure 4C] Another diagram of the tray according to part of the embodiment is shown. [Figure 4D] Another diagram of the tray according to part of the embodiment is shown. [Figure 5A] A diagram of a tray according to one embodiment is shown. [Figure 5B] Another diagram of the tray according to part of the embodiment is shown. [Figure 6] An exploded view of a tray according to one embodiment is shown. [Figure 7] This figure shows a snap ring for a tray according to one of the embodiments. [Figure 8] This figure shows a tray according to a part of the embodiment. [Figure 9] This figure shows a flowchart illustrating part of an embodiment of a method for inserting a compressible tray into a system ampoule. [Modes for carrying out the invention]

[0031] Figure 1 shows a schematic cross-sectional view of an exemplary ampoule 100 according to one embodiment. The ampoule 100 accommodates any combination of trays 102 according to any embodiment described herein. The ampoule 100 has an internal chamber 104 that defines a volume sufficient to hold a stack of trays 102 and allows for the flow of fluid (e.g., gas) within the internal volume. As shown in Figure 1, the internal chamber 104 and its volume are generally cylindrical in shape.

[0032] The tray 102 may be stainless steel, aluminum, graphite, or other material known to those skilled in the art. In some embodiments, the tray 102 includes a coating. The coating can impart useful properties to the tray 102. For example, the coating can reduce the amount of metal particles supplied from the tray 102 to the associated tool that receives the precursor. In one embodiment, the coating is ceramic (e.g., aluminum oxide) or polymer (e.g., polytetrafluoroethylene).

[0033] The internal chamber 104 has an inner wall surface 106. Each of the trays 102 is configured to be stackable and is sized to fit within the internal volume of the internal chamber 104. The internal chamber 104 includes a flow path 108 for directing a fluid (e.g., gas) upward toward the upper part 110 of the internal chamber 104, downward toward the lower part 112 of the internal chamber 104, or both. Each of the trays 102 is also configured to allow upward, downward, or both fluid flows. For example, each of the trays 102 may have through holes or openings that penetrate the body of the tray 102.

[0034] Each tray 102 has a portion 114 configured to contract with the inner wall surface 106. Increasing the surface area of ​​contact between the portion 114 and the inner wall surface 106 improves heat transfer from the inner wall surface 106 to the tray 102, thereby improving heat transfer to the solid precursor material.

[0035] Since the diameter of the internal chamber 104 does not change overall, trays 102 with a smaller profile size compared to the diameter of the internal chamber 104 can make the process of inserting the trays and stacking them within the internal chamber 104 relatively easy. However, trays that are fixed and have a constant smaller profile size cannot make sufficient contact with the inner wall surface 106 of the ampoule 100 to provide good heat transfer from the inner wall surface 106 to the tray and / or the solid precursor material provided on the tray.

[0036] Embodiments of the tray 102 disclosed herein can achieve both advantages: by reducing the profile size during compression, the ease with which the tray 102 can be inserted into the internal chamber 104 is improved; and then, by increasing in size, the contact between the ampoule 100 and the inner wall surface 106 is improved, resulting in good heat transfer from the inner wall surface 106 to the tray 102 and / or the solid precursor material provided on the tray 102. Various exemplary embodiments of the tray 102 are described below.

[0037] As used herein, the term “compressible” means a structure, material, or configuration of both that is designed to allow modification, alteration, shortening, lengthening, or any combination thereof of any part of a device or its linear, radial, diametrical, or circumferential length. Examples of compressible structures include one or more of springs, bellows structures, open rings, mechanical joints with or without locking mechanisms, malleable materials, and porous materials.

[0038] Figure 2 shows a tray 200 according to part of an embodiment. The tray 200 is configured to be stacked with other identical or similar trays. The tray 200 includes a compressible portion 202 with a spring 202 configured to shorten its length along the axial direction. When compressed, the tray 200 shortens its length along the axial direction 204, allowing it to be inserted relatively easily into the internal chamber of an ampoule. The compressible portion 202, in this case the spring 202, is made of a material that improves heat transfer from the ampoule to a solid precursor material provided on the tray 200. The spring 202 is in thermal contact with blades 206, 208, which are heat transfer components. Each of the blades 206, 208 has corresponding curved surfaces 210, 212. The spring 202 is configured to move these curved surfaces 210, 212 away from each other so that the spring 202 can improve contact with the inner wall surface of the ampoule. In some embodiments, all of the curved surfaces 210, 212 are in contact with at least a portion of the inner wall surface of the ampoule. According to some embodiments, the compressible portion 202 is not a bellows structure. The tray 200 includes a component (e.g., a plate, bowl, or bucket) 214 for holding solid precursor material. This component 214 has an upper surface 216. In some embodiments, the upper surface 216 is curved. The curved upper surface 216 can have a concave topology, a bowl shape, or a bucket shape. The component 214 can have a single compartment or multiple compartments.

[0039] In a particular example, the tray 200 comprises four modular components: a spring 202, a first wing 206, a second wing 208, and a barrel 214 having an upper surface 216 configured to hold a solid precursor material. The spring 202 is mechanically and frictionally engaged and connected to the wing sections 206 and 208. The wing sections 206 and 208 each have retainers 218 and 220 for connecting to the spring 202. This connection provides sufficient contact to transfer heat from the wing sections 206 and 208 to the spring 202. Each of the wing sections 206 and 208 has horizontal components 222 and 224 that connect to the barrel 214, the horizontal components 222 and 224 being slidable relative to the barrel 214 and having frictional engagement, mechanical engagement, or both with the barrel 214. When spring 202 is compressed and then released, it pushes the two wing sections 206 and 208 apart from each other. When spring 202 is compressed, its spring potential energy increases. That is, the spring potential energy of spring 202 in the compressed state is higher than that in its relaxed state.

[0040] Figures 3A to 3D show various views of the tray 300 according to some embodiments. Figure 3A is a perspective view of the tray 300, Figure 3B is a front view, Figure 3C is a top view, and Figure 3D is a side view. The tray 300 is a single-piece structure having a bellows-like structure 302, which has a bulging direction 304 and a folding direction 306. The bellows-like structure 302 comprises a bellows-like surface 302-a. In some embodiments, the surface 302-a is planar. In some embodiments, the surface 302-a is not planar. In some embodiments, the surface 302-a comprises planar and non-planar portions. The bellows-like structure 302 is compressible along the folding direction 306 rather than the bulging direction 304. The largest and smallest parts of the bellows-like structure 302 are configured to have at least one surface for holding solid precursor material. Furthermore, the bellows-like structure 302 provides a higher surface area to increase heat transfer from the tray to the solid precursor material on the surface of the tray 300. The tray 300 also has at least one passage 308 for fluid (e.g., gas) to flow when the tray 300 is placed inside the ampoule. The tray 300 is also configured to be stackable with other trays of the same or similar structure. When multiple trays 300 are stacked, the largest part of one tray 300 can contact and / or connect with the smallest part of another tray. At the ends, the outer surfaces 310, 312 along the folding direction 306 are curved and configured to contact the inner wall surface of the ampoule's internal chamber. The bellows-like structure 302 allows the tray 300 to exhibit a shorter length along the folding direction 306 for insertion into the ampoule, and then expand along the folding direction 306 to improve and enhance surface contact between the outer surfaces 310, 312 and the inner wall surface of the ampoule's internal chamber. In other words, when the compressed tray 300 is released, the bellows-like structure 302 separates its two outer surfaces 310 and 312 from each other. When the bellows-like structure 302 is compressed, its spring potential energy increases. That is, the spring potential energy of the bellows-like structure 302 in the compressed state is higher than that in its relaxed state.

[0041] Figures 4A to 4D show various views of another tray 400 according to some embodiments. Figure 4A shows a perspective view of tray 400, Figure 4B shows a front view, Figure 4C shows a top view, and Figure 4D shows a side view. Tray 400 is similar to tray 300 shown in Figures 3A to 3D, but has two external regions with components 402 and 404 that have a larger surface area compared to the outer surfaces 310 and 312 shown in Figures 3A to 3D.

[0042] Figures 5A and 5B show various views of the tray 500 according to some embodiments. Figure 5A shows a perspective view of the tray 500, and Figure 5B shows a plan view of the same tray 500. The tray 500 comprises a planar plate 502 configured with an open ring 504 component on its outer or outermost circumference. The open ring 504 is made of a material capable of imparting thermal energy to a solid precursor material provided on the tray 500. The open ring 504 is configured with ring bands of varying thicknesses to achieve desired spring-invariant properties. The open ring 504 can be compressed at the open ends 506, 508, thereby reducing its overall size. The open ends 506, 508 can be configured with additional structures (e.g., holes 506-a, 508-a) for mechanical, frictional, or both engagement to provide sufficient force to compress the open ring 504. That is, the open ring 504 can be compressed to shrink along its radial direction. This allows the tray 500 to exhibit a smaller planar profile for insertion into the ampoule. When this compressed state is released, the open ring 504 expands radially outward to improve and enhance surface contact between the outer surface 510 of the tray 500 and the inner wall surface of the ampoule's internal chamber. When the open ring 504 is compressed, its spring potential energy increases; that is, the spring potential energy of the open ring 504 in the compressed state is higher than in its relaxed state. The tray 500 also includes passages 512, 514, and 516, which are passages for flowing a fluid, such as a gas, from the bottom to the top of the internal chamber, from the top to the bottom of the internal chamber, or both.

[0043] Figure 6 shows an exploded view of tray 600 according to part of an embodiment. Tray 600 comprises a plate 602 configured to hold a solid precursor material. Plate 602 comprises a flow path 604, which is a passage for flowing a fluid, such as a gas, from the bottom to the top of the internal chamber, from the top to the bottom of the internal chamber, or both. Tray 600 further comprises a compressible open ring 606 (which may also be called a "snap ring" because when released from a compressed state, the ring "springs" back to its original shape). The open ring 606 may be positioned above or below plate 602. The open ring 606 is made of a material capable of imparting thermal energy to the solid precursor material provided on tray 600. The open ring 606 has open ends 608, 610, which may be configured with additional structures for mechanical, frictional, or both engagement to provide sufficient force to compress the open ring 606 (e.g., holes 608-a, 610-a). In other words, the open ring 606 can be compressed so as to shrink along its radial direction. This allows the tray 600 to exhibit a smaller planar profile for insertion into the ampoule. When this compressed state is released, the open ring 606 expands outward along its radial direction, improving and enhancing surface contact between the outer surface 612 of the open ring 606 and the inner wall surface of the ampoule's internal chamber. This improves heat transfer from the ampoule's inner wall surface to the open ring 606. The open ring 606 is in thermal contact with the plate 602. Therefore, the improvement in thermal contact between the ampoule's inner wall surface and the plate 602 is achieved by the open ring 606. This also improves the delivery of thermal energy to the solid precursor material provided on the plate 602. When the open ring 606 is compressed, its spring potential energy increases. That is, the spring potential energy of the open ring 606 in the compressed state is higher than in its relaxed state.

[0044] Figure 7 shows one embodiment of a snap ring 700 that can be used with any of the trays shown in Figures 5A, 5B, and 6. The snap ring 700 is compressible, and when released from a compressed state, the open ring "springs back" to its original shape. The snap ring 700 can be positioned above or below the plate for the tray. The snap ring 700 is made of a material that can impart thermal energy to a solid precursor material provided on the tray. The snap ring 700 has open ends 702, 704, which can be configured with additional structures such as holes 706, 708, 710, 712 for mechanical, frictional, or both engagement to provide sufficient force to compress the snap ring 700. A set of holes, such as internal holes 706, 708, etc., can be used to compress the snap ring 700 using a tool such as pliers or another mechanical device. Another pair of external holes, such as 710, 712, are configured to be used to secure the compressed snap ring using another tool, such as a wire. Once the wire is in place, the snap ring 700 maintains its compressed configuration, allowing it to be easily inserted into the depths of the ampoule's internal chamber. That is, the snap ring 700 can be compressed to shrink along its radial direction. This allows the tray to exhibit a smaller planar profile for insertion into the ampoule. After the snap ring 700 (and associated tray) is in place at the desired location and position, the wire holding the compressed state can be cut, releasing the snap ring 700 relative to the internal dimensions of the ampoule's internal chamber. When this compressed state is released by disengaging the wire, the snap ring 700 expands radially outward, improving and enhancing surface contact between the outer surface of the snap ring 700 and the inner wall surface of the ampoule's internal chamber. This allows for improved heat transfer from the ampoule's inner wall surface to the snap ring 700. The snap ring 700 is in thermal contact with the plate. Therefore, the improvement of thermal contact between the inner wall surface of the ampoule and the plate is achieved by the snap ring 700.This also improves the delivery of thermal energy to the solid precursor material provided on the plate. When the snap ring 700 is compressed, its spring potential energy increases. That is, the spring potential energy of the snap ring 700 in the compressed state is higher than in its relaxed state.

[0045] Figure 8 shows a plan view of tray 800 according to part of an embodiment. Tray 800 comprises several plates 802, 804 configured to hold a solid precursor material. That is, each of plates 802, 804 has corresponding first and second surfaces configured to hold a solid proculator. Figure 8 shows two plates 802, 804, but more than two plates (and surfaces) can be incorporated into other modified embodiments of this tray 800. Plates 802, 804 are separated to define a flow path 806, which is a passage for a fluid such as a gas to flow from the bottom to the top of the internal chamber, from the top to the bottom of the internal chamber, or both. Tray 800 further comprises a compressible open ring 808 (which may also be called a "snap ring" because when released from a compressed state, the ring "springs" back to its original shape). The open ring 808 can be positioned above or below plates 802, 804. The open ring 808 is made of a material capable of imparting thermal energy to a solid precursor material provided on the tray 800. The open ring 808 has open ends 810, 812, which can be configured with additional structures (e.g., holes 810-a, 812-a) for mechanical, frictional, or both engagement to provide sufficient force to compress the open ring 808. That is, the open ring 808 can be compressed to shrink along its radial, circumferential portions, or both. This allows the plates 802, 804 to move closer to each other, and the tray 800 achieves a smaller planar profile for insertion into the ampoule. When this compressed state is released, the open ring 808 "springs back" and expands radially outward. This improves and enhances surface contact between the outer surfaces 814, 816 of the plates 802, 804 and the inner wall surface of the ampoule's internal chamber. This improves heat transfer from the inner wall surface of the ampoule to plates 802 and 804. This also improves thermal energy delivery to the solid precursor material provided on plates 802 and 804. When the open ring 808 is compressed, its spring potential energy increases. That is, the spring potential energy of the open ring 808 in the compressed state is higher than that in its relaxed state.

[0046] Figure 9 shows an exemplary flowchart of a part of an embodiment of Method 900 for inserting a compressible tray into an ampoule of the system. The tray may be any of the trays having a compressible portion as described herein. Method 900 includes obtaining a tray according to any of the embodiments described herein 902. Then compressing the tray 904 and inserting the (compressed) tray into an internal chamber defining the internal volume of the ampoule 904. In some embodiments, Method 900 further includes releasing the compressible portion of the tray 908, in which case the compressible portion expands and the tray is configured to make thermal contact with the inner wall surface of the ampoule. This allows the compressed tray to expand and fit tightly and firmly to the inner wall surface of the internal chamber. The process of releasing 908 may include, for example, cutting or releasing a wire that holds a snap ring in a compressed state (see, for example, Figure 7 and the relevant description above).

[0047] The terms used herein are intended to describe embodiments and not to limit them. The terms "a," "an," and "the" also include the plural unless otherwise specified. The terms "comprises" and / or "comprising," as used herein, identify the presence of specified features, integers, processes, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, processes, operations, elements, and / or components.

[0048] Any or any part of the embodiments may be combined with any of the other embodiments without departing from the scope of this disclosure. Furthermore, detailed modifications to the construction materials used, as well as the shape, size, and arrangement of components, may be made without departing from the scope of this disclosure. This specification and the embodiments described herein are illustrative, and the true scope and spirit of this disclosure are indicated by the claims set forth below.

Claims

1. It is a tray for ampoules, The tray comprises a compressible portion that exhibits a compressed state and a relaxed state, The spring potential energy of the compressible portion is higher in the compressed state than in the relaxed state. The compressible portion has a bellows-like surface having a bulging direction and a folding direction. Tray.

2. The tray according to claim 1, further comprising a first heat transfer component in thermal contact with the compressible portion.

3. The tray according to claim 2, further comprising a second heat transfer component in thermal contact with the compressible portion.

4. The tray according to claim 1, wherein the compressible portion is compressed in the folding direction but not in the bulging direction.

Images