Workpiece suction device

Abstract

To provide a workpiece adsorption device that even if an upper surface of a work-piece inclines with respect to a work-piece adsorption surface, can adsorb the work-piece by making the work-piece adsorption surface follow a predetermined position on the upper surface of the work-piece.SOLUTION: A work-piece adsorption device 1 comprises: support rod parts 6 that can reciprocate in a direction of first shafts L1; and magnet chucks 5 that have turning arm parts 20 whose base ends in a direction of second shafts L2 are turnably connected, with first joint parts 10, to the tips of the support rod parts and chuck units 50 whose base ends in a direction of third shafts L3 are turnably connected, with second joint parts 40, to tips of turning arm parts, which adsorb a work-piece 110 by magnets. The chuck unit have work-piece adsorption surfaces 48a at a tip of an enclosure 51. The first and second joint parts have first and second center points S1 and S2. The support rod parts and the turning arm parts can freely and mutually turn with the first center points S1 as centers, and the turning arm parts and the chuck units can freely and mutually turn with the second center points S2 as centers.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a work suction device including a magnet chuck that sucks a work by magnetic force.

Background Art

[0002] Conventionally, a magnet chuck provided with an electromagnet in a housing or a magnet chuck that attaches a permanent magnet to a piston movably provided in a cylinder hole formed in the housing and displaces the permanent magnet together with the piston has been already known as shown in Patent Documents 1 and 2, for example.

[0003] By the way, the magnet chuck described in Patent Document 1 has an electromagnet provided in a housing, and a work suction surface extending in a lateral direction orthogonal to the vertical direction is formed on the lower surface of the housing. When the electromagnet operates, this magnet chuck is configured such that a magnetic force is generated on the work suction surface and the work can be sucked on the work suction surface. The magnet chuck is movable in the vertical direction by a lifting device connected to the upper surface of the housing.

[0004] On the other hand, the magnet chuck described in Patent Document 2 has a cylinder hole formed in a housing, and a piston is provided in the cylinder hole so as to be movable in the vertical direction. A permanent magnet is attached to the lower part of the piston, and the permanent magnet is movable in the vertical direction in the cylinder hole together with the piston. A work suction surface extending in a lateral direction orthogonal to the vertical direction is formed at the lower end of this magnet chuck, and a robot arm for moving the magnet chuck in the vertical direction is connected to the upper end of the magnet chuck.

[0005] When sucking a work by these magnet chucks, if the upper surface of the work is inclined with respect to the work suction surface, when the magnet chuck descends, a part of the work suction surface abuts on the upper surface of the work, and the work suction surface cannot follow the upper surface of the work. Therefore, the magnet chuck cannot suck the work on the work suction surface.

[0006] Therefore, if a joint described in Patent Document 3 is provided on the upper part of each of the magnetic chucks described in Patent Documents 1 and 2, that is, a joint that allows the magnetic chuck to rotate around an axis perpendicular to the vertical direction, even if a part of the workpiece suction surface comes into contact with the upper surface of the workpiece, the magnetic chuck can be moved further downward, causing the magnetic chuck to rotate around the axis of the joint and make contact with the upper surface of the workpiece while conforming to it.

[0007] However, as the magnetic chuck rotates around the joint axis and moves downward, the position in which the workpiece suction surface attaches to the top surface of the workpiece shifts from its predetermined position. Furthermore, in magnetic chucks where the permanent magnet can move within the frame, the vertical dimension is larger than the horizontal dimension, so this amount of shift increases even more. [Prior art documents] [Patent Documents]

[0008] [Patent Document 1] Japanese Patent Application Publication No. 7-171784 [Patent Document 2] Japanese Patent Publication No. 2019-186324 [Patent Document 3] Utility Model Registration No. 3087910 Gazette [Overview of the project] [Problems that the invention aims to solve]

[0009] Therefore, the technical problem of the present invention is to provide a workpiece suction device that can suction a workpiece while conforming the workpiece suction surface to a predetermined position on the upper surface of the workpiece, even when the upper surface of the workpiece is inclined with respect to the workpiece suction surface. [Means for solving the problem]

[0010] To solve the problem, the present invention provides a workpiece adsorption device comprising: a support rod portion that is reciprocable in a first axial direction and has a tip and a base end at both ends in the direction of movement; a rotating arm portion that has one end and the other end at both ends in a second axial direction and one end of which is rotatably connected to the tip of the support rod portion by a first joint portion; and a housing that has a tip and a base end at both ends in a third axial direction, the base end of which is rotatably connected to the other end of the rotating arm portion by a second joint portion, and a chuck unit for adsorbing a workpiece by magnetic force, the magnetic chuck A workpiece adsorption device comprising the above, wherein in the magnetic chuck, the chuck unit has a workpiece adsorption surface formed at the tip of the housing in a direction perpendicular to the third axis, the first joint portion has a first center point, the support rod portion and the rotating arm portion are rotatable relative to each other about the first center point, the second joint portion has a second center point, and the rotating arm portion and the chuck unit are rotatable relative to each other about the second center point.

[0011] In this case, preferably, the chuck unit includes a cylinder bore formed inside the housing and extending in the third axial direction, a chuck piston provided to be movable within the cylinder bore, and a permanent magnet attached to the chuck piston and moving together with the chuck piston, wherein the permanent magnet is reciprocable in the third axial direction between an adsorption position for moving the permanent magnet toward the front end of the housing to adsorb the workpiece onto the workpiece adsorption surface and an adsorption release position for moving the permanent magnet toward the base end of the housing to release the adsorption of the workpiece.

[0012] Preferably, the first joint portion is configured to have a first ball body having a first center point and a first recess that slidably accommodates the first ball body, and the second joint portion is configured to have a second ball body having a second center point and a second recess that slidably accommodates the second ball body. Preferably, in the first joint portion, the first ball body is attached to the support rod portion and the first recess opens at one end of the rotating arm portion, and in the second joint portion, the second ball body is attached to the base end of the chuck unit and the second recess opens at the other end of the rotating arm portion.

[0013] Preferably, the rotating arm portion has a first locking mechanism that can lock and unlock the relative rotation between the first ball body housed in the first recess of the first joint portion and the first recess, and the relative rotation between the second ball body housed in the second recess of the second joint portion and the second recess.

[0014] In this case, preferably, the rotating arm portion includes a first cover member attached to one end thereof and having a first through hole passing through in the second axial direction, and a second cover member attached to the other end of the rotating arm portion and having a second through hole passing through in the second axial direction, and the first locking mechanism portion includes the first and second through holes formed in the first and second cover members respectively, first and second cylinder holes formed inside the one end and the other end of the rotating arm portion, a first piston movably provided in the first cylinder hole and having a first hole portion opening to the one end, and the Second cylinderThe device comprises a second piston movably provided within the bore and having a second bore portion opening to the other end, a first pressure chamber formed on the other end of the first cylinder bore in the second axial direction and partitioned by the first piston, and a second pressure chamber formed on one end of the second cylinder bore in the second axial direction and partitioned by the second piston, wherein the first through bore and the first bore portion communicate in the second axial direction, and the inner space surrounded by the first through bore and the first bore portion forms the first recess for housing the first ball body, the inner surface of the first through bore has a first outer sliding surface that slides against the outer surface on one end of the first ball body in the second axial direction, and the inner surface of the first bore portion has a first inner sliding surface that slides against the outer surface on the other end of the first ball body in the second axial direction, the second through bore and the second bore portion communicate in the second axial direction, and the inner space surrounded by the second through bore and the second bore portion forms the second recess for housing the second ball body A second outer sliding surface is formed on the inner surface of the second through hole, which slides against the outer surface of the other end of the second ball body in the second axial direction, and a second inner sliding surface is formed on the inner surface of the second hole, which slides against the outer surface of the one end of the second ball body in the second axial direction. By supplying and discharging compressed air to the first and second pressure chambers of the first and second cylinder bores, the first and second pistons can be reciprocated in the second axial direction. The compressed air supplied to the first and second pressure chambers moves the first piston to one end in the second axial direction and the second piston to the other end in the second axial direction, causing the first ball body to be gripped by the first outer sliding surface and the first inner sliding surface, and the second ball body to be gripped by the second outer sliding surface and the second inner sliding surface, thereby locking the rotation of the rotating arm portion relative to the support rod portion and the chuck unit, respectively.

[0015] Preferably, the first outer sliding surface of the first through hole contacts the outer surface of the first ball body on one end side in the second axial direction relative to the first center point, the first inner sliding surface of the first hole contacts the outer surface of the first ball body on the other end side in the second axial direction relative to the first center point, the second outer sliding surface of the second through hole contacts the outer surface of the second ball body on the other end side in the second axial direction relative to the second center point, and the second inner sliding surface of the second hole contacts the outer surface of the second ball body on one end side in the second axial direction relative to the second center point. Preferably, the first inner sliding surface of the first piston is formed as a conical surface whose inner diameter expands as it proceeds toward one end side in the second axial direction, and the second inner sliding surface of the second piston is formed as a conical surface whose inner diameter expands as it proceeds toward the other end side in the second axial direction.

[0016] Furthermore, the workpiece suction device according to the present invention , multiple The device comprises several magnetic chucks and a support portion that reciprocatesly supports each support rod portion of the plurality of magnetic chucks, wherein the support portion has an arm support member that extends in a direction perpendicular to the first axis and has a plurality of through holes through which each support rod portion of the plurality of magnetic chucks is individually inserted so as to be reciprocally movable, and a plurality of connecting portions that are attached to the arm support member and have communication holes through which each support rod portion of the plurality of magnetic chucks is individually inserted, and have a second locking mechanism that can lock and unlock the support rod portion relative to the arm support member, and is attached to each of the plurality of support rod portions The device is configured to include a plurality of retaining members that abut against one end of the connecting portion in the first axial direction as the support rod portion moves, thereby preventing the support rod portion from being pulled out of the through hole, and a plurality of spring members provided between the connecting portion and the support rod portion of each of the plurality of magnet chucks, thereby biasing each of the plurality of magnet chucks toward the tip side in the first axial direction relative to the arm support member, wherein each support rod portion of the plurality of magnet chucks is arranged on the arm support member with a distance between them and their respective first axes parallel.

[0017] In this case, preferably, the second locking mechanism of the connecting portion includes a third cylinder bore extending in the first axial direction and formed in the communication hole of the connecting portion, a brake pad having a pressing surface positioned in the third cylinder bore facing the side surface of the support rod portion, a third piston movable in the first axial direction within the third cylinder bore and having an inclined surface positioned in the third cylinder bore radially outward from the first axis than the brake pad, and a pressing force positioned between the brake pad and the inclined surface that receives a pressing force directed radially inward from the inclined surface as a result of the movement of the third piston. The device comprises a member and a third pressure chamber whose third cylinder bore is partitioned by the third piston. By supplying and discharging compressed air to and from the third pressure chamber of the third cylinder bore, the third piston can be reciprocated in the first axial direction. By moving the third piston with the compressed air supplied to the third pressure chamber, the pressing member receives a pressing force directed radially inward from the inclined surface, pressing the brake pad radially inward. The pressing surface then presses against the side surface of the support rod, thereby locking the support rod with respect to the arm support member.

[0018] Preferably, the connecting portion has one end and the other end on both sides in the first axial direction, one end of which is attached to the arm support member, and has a connecting body portion with the communication hole formed inside, the connecting body portion has a fixing member attached to one end thereof and having an insertion hole that penetrates in the first axial direction and is inserted into the through hole of the arm support member, the insertion hole communicates with the communication hole of the connecting body portion, the support rod portion is inserted through the insertion hole and the communication hole, and the fixing member is detachably attached to the arm support member while inserted into the through hole of the arm support member, thereby the connecting body portion is detachably attached to the arm support member.

[0019] Also, preferably, the fixing member is attached to the arm support member in a state of protruding from an end surface on one end side of the arm support member in the first axial direction, and the support rod portion has a base end portion thereof protruding from one end in the first axial direction of the insertion hole in the fixing member, and a retaining member is attached to the base end portion of the support rod portion. The retaining member is formed in a columnar shape having a diameter larger than the inner diameter of the insertion hole of the fixing member and smaller than the inner diameter of the through hole of the arm support member.

[0020] Also, preferably, the spring member is a compression spring disposed between the other end of the connecting cylinder portion and the tip end portion of the support rod portion.

Advantages of the Invention

[0021] As described above, according to the present invention, even when the upper surface of the work is inclined with respect to the work suction surface, it is possible to provide a work suction device capable of sucking the work suction surface in a state following a predetermined position on the upper surface of the work.

Brief Description of the Drawings

[0022] [Figure 1] It is a front view of a work suction device according to an embodiment of the present invention. [Figure 2] It is a side view of the work suction device. [Figure 3] It is a cross-sectional view of the work suction device corresponding to the arrow III-III in FIG. 2. [Figure 4] It is a front view of a magnet chuck in an extended state in which a connecting portion is inserted. [Figure 5] It is a cross-sectional view of the magnet chuck and the connecting portion corresponding to the arrow V-V in FIG. 4. [Figure 6] It is a front view of the rotating arm portion. [Figure 7] It is a plan view of the rotating arm portion. [Figure 8] It is a cross-sectional view of the rotating arm portion corresponding to the arrow VIII-VIII in FIG. 6. [Figure 9] It is an exploded perspective view of the rotating arm portion. [Figure 10] This is a cross-sectional view of the rotating arm when the first and second joints are in a rotated state. [Figure 11] This is a cross-sectional view of the chuck unit with the permanent magnet moved to the adsorption position. [Figure 12] This is a cross-sectional view of the chuck unit with the permanent magnet moved to the release position. [Figure 13] This is a front view of the connecting section through which the support rod is inserted. [Figure 14] This is a cross-sectional view of the support rod and connecting portion corresponding to the XIV-XIV line in Figure 13. [Figure 15] Figure 14 is an enlarged cross-sectional view of the connecting portion. [Figure 16] This is an exploded perspective view of the support rod section and the connecting section. [Figure 17] This diagram illustrates the operation of a chuck unit when it picks up a workpiece when the top surface of the workpiece is tilted upward to the right relative to the workpiece suction surface. [Figure 18] This diagram illustrates the operation of a chuck unit when it picks up a workpiece when the top surface of the workpiece is tilted downwards to the right relative to the workpiece suction surface. [Modes for carrying out the invention]

[0023] The workpiece suction device according to the present invention will be described below. In this embodiment, the workpiece suction device has a plurality of magnetic chucks, and the chuck unit of the magnetic chuck is described as having a permanent magnet movably installed inside its housing. However, the workpiece suction device may have only one magnetic chuck, or the magnetic chuck may have an electromagnet fixed inside its housing.

[0024] Figures 1-3 show one embodiment of the workpiece suction device 1 according to the present invention. This workpiece suction device 1 is configured to have a plurality of magnetic chucks 5 and a support portion 70, and these magnetic chucks 5 are supported on the support portion 70 so as to be reciprocally movable. In this embodiment, four magnetic chucks 5 are provided on the support portion 70, and the support portion 70 is connected to, for example, the tip arm of a robot or a lifting machine, so that the entire workpiece suction device 1 is movable in a direction perpendicular to the arm support member 71 of the support portion 70 (hereinafter sometimes referred to as the "first axis L1 direction").

[0025] As shown in Figure 5, the magnetic chuck 5 comprises a support rod portion 6 that is reciprocable in the direction of the first axis L1 and has a tip 6a and a base 6b at both ends in the direction of movement; a rotating arm portion 20 that has a base 20b (one end) and a tip 20a (the other end) at both ends in the direction of the second axis L2, with the base 20b being rotatably connected to the tip 6a of the support rod portion 6 by a first joint portion 10; and a housing 51 that has a tip 51a and a base 51b at both ends in the direction of the third axis L3, with the base 51b of the housing 51 being rotatably connected to the tip 20a of the rotating arm portion 20 by a second joint portion 40, and a chuck unit 50 for attracting a workpiece by magnetic force. In this embodiment, the magnetic chuck 5 is configured to have a support rod portion 6, a first joint portion 10, a rotating arm portion 20, a second joint portion 40, and a chuck unit 50, extending from the base end to the tip end in the direction of the first axis L1. Figure 5 shows the state in which the support rod portion 6 is inserted into the connecting portion 75, which will be described later.

[0026] In this embodiment, the support rod portion 6 is formed in an elongated cylindrical shape extending along the direction of the first axis L1. A retaining member 3, described later, is screwed onto the base end 6b of the support rod portion 6, and a connecting nut 2 is screwed onto the tip 6a of the support rod portion 6.

[0027] As shown in Figures 5, 8-10, the first joint portion 10 is configured to include a first ball body 11 and a first recess 12 that slidably accommodates the first ball body 11. 10It has a first central point S1, which is its center, and the support rod portion 6 and the rotating arm portion 20 are connected to each other so as to be able to rotate around the first central point S1.

[0028] In this embodiment, the first ball body 11 is formed in a spherical shape, and the base end of the first ball body 11 in the direction of the first axis L1 is attached to the connecting nut 2 by screwing it in, and the first center point S1 is located on the first axis L1.

[0029] The first recess 12 is in the extension direction (second axis L2 direction) of the rotating arm portion 20 At the base It is open. In this embodiment, as shown in Figures 8 and 9, the first recess 12 is configured to have a first through hole 22 in the first cover member 21 attached to the base end 20b of the rotating arm portion 20, and a first hole portion 24 that opens to the base end side (one end side) in the direction of the second axis L2 of the first piston 23 provided inside the base end side of the rotating arm portion 20. The first through hole 22 and the first hole portion 24 are in communication in the direction of the second axis L2, and the inner space 26 surrounded by the first through hole 22 and the first hole portion 24 forms the first recess 12 that accommodates the first ball body 11.

[0030] In this embodiment, the first cover member 21 is formed in a plate shape, and its outer circumference is fixed to the base end 20b of the rotating arm portion 20 by a plurality of fastening means such as bolts 25. A first through hole 22 is formed in the central part of the first cover member 21, penetrating in the direction of the second axis L2. The first through hole 22 opens at both ends of the first cover member 21 in the direction of the second axis L2, and its inner surface extends annularly around the second axis L2, forming a first outer sliding contact surface 22a that slides along the outer surface of the base end side of the first ball body 11. The first outer sliding contact surface 22a contacts the outer surface of the first ball body 11 on the base end side in the direction of the second axis L2, relative to the first center point S1.

[0031] In this embodiment, the first hole 24 of the first piston 23 is formed in a hemispherical shape that is recessed from the base end to the tip end in the direction of the second axis L2, and the inner surface of the first hole 24 forms a first inner sliding surface 24a that slides against the outer surface of the tip end of the first ball body 11. The first inner sliding surface 24a is formed as a conical surface whose inner diameter expands as it proceeds toward the base end, and contacts the outer surface of the first ball body 11 on the tip side in the direction of the second axis L2, relative to the first center point S1.

[0032] As shown in Figures 5 and 10, the first ball body 11 is rotatably supported within the first recess 12, so that the support rod portion 6 and the rotating arm portion 20 can rotate relative to each other about the first center point S1 of the first ball body 11. Details of the first piston 23 will be described later.

[0033] In this embodiment, the rotating arm portion 20 is formed in a cylindrical shape extending in the direction of the second axis L2, as shown in Figures 6-10. An arm through-hole 27 is formed inside the rotating arm portion 20, penetrating in the direction of the second axis L2, and a first cylinder hole 28 and a second cylinder hole 29 are formed inside the base end and tip end of the rotating arm portion 20, respectively. The first and second cylinder holes 28 and 29 have the same inner diameter and depth, and are larger in diameter than the inner diameter of the arm through-hole 27. A first piston 23 is movably provided in the first cylinder hole 28, and a second piston 30 is movably provided in the second cylinder hole 29.

[0034] The depth of the first cylinder bore 28 is such that, when the first inner sliding contact surface 24a of the first piston 23 is in contact with the outer surface of the first ball body 11, a gap 31 is formed between the tip end 23a of the first piston 23 and the bottom surface of the first cylinder bore 28. By retracting the first piston 23 toward the tip, the first ball body 11 can rotate relative to the first recess 12.

[0035] In this embodiment, the first piston 23 is formed in a cylindrical shape, as shown in Figures 8 and 10, and an annular groove 23b extending in the circumferential direction is formed on the outer circumferential surface of the tip side of the first piston 23. A sealing member 23c is installed in this groove 23b to seal the space between the outer circumferential surface of the first piston 23 and the inner circumferential surface of the first cylinder bore 28. The sealing member 23c is a lip-type sealing member, and the lip portion 23d of the sealing member 23c is inclined in a direction in which the outer diameter increases towards the tip side of the first piston 23. Therefore, the lip portion 23d prevents the flow of compressed air from the tip side to the base side between the outer circumferential surface of the first piston 23 and the inner circumferential surface of the first cylinder bore 28.

[0036] A first pressure chamber 28a is formed at the tip of the first cylinder bore 28, partitioned by the first piston 23. In this embodiment, the first pressure chamber 28a is formed between the top 23a of the first piston 23 and the bottom surface of the first cylinder bore 28, and communicates with the arm through-hole 27. A supply and discharge port 20d is formed in the middle of the rotating arm portion 20 in the direction of the second axis L2, allowing compressed air to be introduced from the outside into the arm through-hole 27.

[0037] The second joint portion 40, which connects the tip 20a of the rotating arm portion 20 and the base end 51b of the housing 51 of the chuck unit 50, is configured in the same way as the first joint portion 10 described above, as shown in Figures 5 and 8-10, in this embodiment, and comprises a second ball body 41 and a second recess 42 that slidably accommodates the second ball body 41. The second joint portion 40 has a second center point S2, and the rotating arm portion 20 and the chuck unit 50 are connected so as to be rotatable to each other around the second center point S2.

[0038] In this embodiment, the second ball body 41 is formed in a spherical shape, and the tip of the second ball body 41 in the direction of the third axis L3 (the extension direction of the chuck unit 50) is attached to the housing 51 of the chuck unit 50, and the second center point S2 is located on the third axis L3.

[0039] The second recess 42 opens at the tip of the rotating arm portion 20. In this embodiment, the second recess 42 is configured to have a second through hole 33 in the second cover member 32 attached to the tip of the rotating arm portion 20, and a second hole portion 34 that opens to the tip side in the direction of the second axis L2 of the second piston 30 provided inside the tip side of the rotating arm portion 20. The second through hole 33 and the second hole portion 34 communicate in the direction of the third axis L3, and the inner space 35 surrounded by the second through hole 33 and the second hole portion 34 forms the second recess 42 that accommodates the second ball body 41.

[0040] In this embodiment, the second cover member 32 is formed in a plate shape, as shown in Figures 8-10, and the outer circumference of the second cover member 32 is fixed to the tip 20a of the rotating arm portion 20 by fastening members such as bolts 25. A second through hole 33 is formed in the center of the second cover member 32, penetrating in the direction of the second axis L2. Both ends of the second through hole 33 in the direction of the second axis L2 are open, and the inner surface of the second through hole 33 extends annularly around the second axis L2, forming a second outer sliding contact surface 33a that slides along the outer surface of the other end of the second ball body 41. The second outer sliding contact surface 33a contacts the outer surface of the second ball body 41 on the tip side in the direction of the second axis L2, relative to the second center point S2.

[0041] In this embodiment, the second hole 34 of the second piston 30 is formed in a hemispherical shape that is recessed from the tip side to the base side. The inner surface of the second hole 34 forms a second inner sliding surface 34a that slides against the outer surface of the base side of the second ball body 41. In this embodiment, the second inner sliding surface 34a is formed as a conical surface whose inner diameter expands as it proceeds toward the tip side, and contacts the outer surface of the second ball body 41 on the base side in the direction of the second axis L2, relative to the second center point S2.

[0042] As described above, the second ball body 41 is rotatably supported within the second recess 42, so that the rotating arm portion 20 and the chuck unit 50 shown in Figure 5 can rotate relative to each other about the second center point S2 of the second ball body 41.

[0043] Furthermore, in this embodiment, the depth of the second cylinder bore 29 that movably accommodates the second piston 30 is such that, when the second inner sliding contact surface 34a of the second piston 30 is in contact with the outer surface of the second ball body 41, a gap 31 is formed between the top 30a on the base end side of the second piston 30 and the bottom surface of the second cylinder bore 29. By retracting the second piston 30 toward the base end side through this gap 31, the second ball body 41 can rotate relative to the second recess 42.

[0044] Furthermore, in this embodiment, the second piston 30 is formed in a cylindrical shape, and an annular groove 30b extending in the circumferential direction is formed on the outer surface of the second piston 30. A sealing member 30c is installed in this groove 30b to seal the space between the outer surface of the second piston 30 and the inner surface of the second cylinder bore 29. This sealing member 30c is a lip-type sealing member, and the lip portion 30d of the sealing member 30c is inclined in a direction in which the outer diameter increases from the tip side to the base side. Therefore, the lip portion 30d prevents the flow of compressed air from the base side to the tip side between the outer surface of the second piston 30 and the inner surface of the second cylinder bore 29.

[0045] A second pressure chamber 29a is formed at the base end of the second cylinder bore 29, partitioned by the second piston 30. In this embodiment, the second pressure chamber 29a is formed between the top 30a at the base end of the second piston 30 and the bottom surface of the second cylinder bore 29, and communicates with the arm through-hole 27.

[0046] Incidentally, as shown in Figures 8 and 10, the rotating arm portion 20 is provided with a first locking mechanism 37 that can lock and unlock the relative rotation between the first ball body 11 housed in the first recess 12 of the first joint portion 10 and the first recess 12, and the relative rotation between the second ball body 41 housed in the second recess 42 of the second joint portion 40 and the second recess 42.

[0047] In this embodiment, the first locking mechanism 37 includes first and second through holes 22 and 33 formed in the first and second cover members 21 and 32, respectively, first and second cylinder holes 28 and 29 formed inside the base end and tip end of the rotating arm portion 20, and a first piston 23 movably provided in the first cylinder hole 28. Second cylinder The device comprises a second piston 30 movably provided within the hole 29, a first pressure chamber 28a formed in the first cylinder hole 28, and a second pressure chamber 29a formed in the second cylinder hole 29.

[0048] When compressed air is introduced from the supply / discharge port 20d into the arm through-hole 27, the first locking mechanism 37 supplies compressed air to the first and second pressure chambers 28a and 29a of the first and second cylinder holes 28 and 29, respectively, thereby moving or pressing the first and second pistons 23 and 30 toward the tip and base ends in the direction of the second axis L2. As a result, the first ball body 11 is clamped between the first outer sliding surface 22a and the first inner sliding surface 24a, and the second ball body 41 is clamped between the second outer sliding surface 33a and the second inner sliding surface 34a, thereby locking the rotation of the rotating arm 20 relative to the support rod 6 and the chuck unit 50 shown in Figure 5.

[0049] Furthermore, when compressed air in the arm communication hole 27 is discharged from the supply / discharge port 20d, the pressing force of the first and second pistons 23 and 30 on the first and second ball bodies 11 and 41 is released. Consequently, the clamping of the first ball body 11 by the first outer sliding surface 22a and the first inner sliding surface 24a is released, and the clamping of the second ball body 41 by the second outer sliding surface 33a and the second inner sliding surface 34a is released. As a result, the rotating arm portion 20 becomes rotatable relative to the support rod portion 6 and the chuck unit 50 shown in Figure 5, that is, the lock is released.

[0050] Next, the chuck unit 50 will be described. As shown in Figures 5, 11, and 12, the chuck unit 50 is configured to include a housing 51, a cylinder bore 52a formed inside the housing 51 and extending in the direction of the third axis L3, a chuck piston 57 that is movable within the cylinder bore 52a, and a permanent magnet 60 attached to the chuck piston 57 and moving together with the chuck piston 57, and attracts the workpiece 110 by magnetic force.

[0051] In this embodiment, the housing 51 is formed in the shape of a rectangular parallelepiped extending in the direction of the third axis L3 and comprises a cylinder tube 52 having a cylinder bore 52a formed inside, a top cover 53 attached to the base end of the cylinder tube 52, and a bottom cover 54 attached to the tip of the cylinder tube 52. The cylinder bore 52a is divided into a first pressure chamber 52b formed on the base end side in the direction of the third axis L3 by the chuck piston 57, and a second pressure chamber 52c formed on the tip side in the direction of the third axis L3.

[0052] A first port 52d for air supply and exhaust is formed at the tip end of the side wall 52e of the cylinder tube 52, and the first port 52d communicates with the second pressure chamber 52c. A second port 52f for air supply and exhaust is formed at the base end of the side wall 52e of the cylinder tube 52, and this second port 52f communicates with the first pressure chamber 52b. A latch yoke 56 is inserted into the base end of the cylinder hole 52a, closing the base end opening of the cylinder hole 52a.

[0053] The chuck piston 57 includes a disc-shaped seal holder 58 positioned at the base end, a core yoke 59 attached to the center of the tip end face of the seal holder 58, a permanent magnet 60 positioned circumferentially on the outer side of the core yoke 59, and the permanent magnet 60 Radial direction It comprises an externally positioned cover yoke 61 and a ring plate 62 attached to the tip of a permanent magnet 60.

[0054] The seal holder 58 is provided with a piston seal 63 that slides against the inner surface of the cylinder bore 52a within an annular groove formed on its outer circumferential surface. The core yoke 59 is formed in a cylindrical shape, and a recess 59b that opens at the tip of the core yoke 59 is formed therein.

[0055] The cover yoke 61 is formed in a cylindrical shape and is attached to the outer circumference of the tip end face of the seal holder 58. Wear rings 65, 65 are provided in two annular grooves formed on the base end side of the cover yoke 61. These wear rings 65, 65 guide and support the chuck piston 57 along the cylinder hole 52a. An annular space 66 is formed between the inner circumferential surface of the cover yoke 61 and the outer circumferential surface of the core yoke 59, and a permanent magnet 60 is inserted into this space 66.

[0056] The bottom cover 54 is formed in a disc shape and covers the opening at the tip of the cylinder hole 52a. A workpiece suction surface 48a is formed at the tip of the bottom cover 54, extending in a direction perpendicular to the third axis L3.

[0057] The chuck unit 50 configured in this way can reciprocate the chuck piston 57 in the direction of the third axis L3 by supplying and discharging compressed air to the first and second pressure chambers 52b and 52c of the cylinder bore 52a, and the permanent magnet 60 is movable in the direction of the third axis L3 between a suction position P1 (see Figure 11) where the magnet is moved toward the front end of the housing 51 to hold the workpiece 110 on the workpiece suction surface 48a, and a suction release position P2 (see Figure 12) where the magnet is moved toward the base end of the housing 51 to release the suction of the workpiece 110.

[0058] The top cover 53 is fixed to the base end 51b of the housing 51 by fastening means such as bolts, and the tip of the second ball body 41 is screwed into the center of the top cover 53.

[0059] Thus, the housing 51 of the chuck unit 50 has a cylinder hole 52a extending in the direction of the third axis L3 for moving the permanent magnet 60 between the adsorption position P1 and the release position P2. In addition, the second ball body 41 is attached to the base end side of the housing 51, protruding from it. For this reason, the chuck unit 50 is formed in a vertically elongated rectangular parallelepiped shape in the direction of the third axis L3.

[0060] Next, the support portion 70 will be described. As shown in Figures 1 and 3, the support portion 70 is composed of an arm support member 71 having a plurality of through holes 71a through which each support rod portion 6 of the plurality of magnet chucks 5 is individually inserted so as to be able to reciprocate; a plurality of connecting portions 75 attached to the arm support member 71 and having communication holes 77 through which each support rod portion 6 of the plurality of magnet chucks 5 is individually inserted; a plurality of retaining members 3 attached to each of the plurality of support rod portions 6, which abut against the base end of the connecting portion 75 as each support rod portion 6 moves, preventing the support rod portion 6 from being pulled out of the through holes 71a; and a plurality of compression coil springs 108 (spring members, compression springs) located between the connecting portion 75 and the support rod portion 6 provided on each of the plurality of magnet chucks 5, which bias each of the plurality of magnet chucks 5 toward the tip side in the direction of the first axis L1 relative to the arm support member 71.

[0061] In this embodiment, the arm support member 71 is formed in a plate shape extending in a direction perpendicular to the first axis L1 (lateral direction), and has a tip surface and a base surface at both ends in the direction of the first axis L1. Multiple through holes 71a are formed in the arm support member 71 at equal intervals in the lateral direction. A connecting support portion 71b that protrudes toward the base end along the first axis L1 is attached to the lateral central part of the arm support member 71. For example, the tip arm of a robot or a lifting machine is connected to this connecting support portion 71b. A support rod portion 6 is inserted through each of the multiple through holes 71a along the direction of the first axis L1.

[0062] As shown in Figures 3, 13-16, the connecting portion 75 includes a connecting body portion 76 that extends in the direction of the first axis L1 and has a base end 76b (one end) and a tip end 76c (the other end) on both sides. A communication hole 77 extending in the direction of the first axis L1 passes through the interior of the connecting body portion 76.

[0063] The connecting body portion 76 is provided with a communication hole 77, which is equipped with a second locking mechanism 80 capable of locking and unlocking the support rod portion 6 to the arm support member 71. In this embodiment, the second locking mechanism 80 is configured to include a base-side second locking mechanism 81 provided on the base end side of the communication hole 77, and a tip-side second locking mechanism 82 provided on the tip side of the communication hole 77.

[0064] As shown in Figures 14-16, the base-side second locking mechanism 81 comprises a third cylinder bore 78 formed on the base end side of the communication hole 77 of the connecting body 76 and extending in the direction of the first axis L1; a brake pad 83 having a pressing surface 83d positioned within the third cylinder bore 78 and facing the side surface of the support rod 6; a third piston 84 that is movable within the third cylinder bore 78 in the direction of the first axis L1 and has an inclined surface 84a positioned within the third cylinder bore 78 radially outward from the brake pad 83 in the direction of the first axis L1; a pressing member 85 positioned between the brake pad 83 and the inclined surface 84a and receiving a pressing force directed radially inward from the inclined surface 84a due to the movement of the third piston 84; and a third pressure chamber 86 in which the third cylinder bore 78 is partitioned by the third piston 84.

[0065] In this embodiment, the third cylinder bore 78 is formed in a cylindrical shape that opens at the base end of the connecting body portion 76, and the inner diameter of the third cylinder bore 78 is larger than the inner diameter of the communication hole 77. At the tip of the third cylinder bore 78, an annular stepped portion 78a is formed, extending in a direction perpendicular to the direction of the first axis L1.

[0066] In this embodiment, the brake pad 83 is formed in a cylindrical shape from an elastic material such as synthetic resin. The brake pad 83 is composed of a plurality of brake pieces 83a that are divided at equal intervals in the circumferential direction. Each brake piece 83a is formed in a fan shape that spreads radially outward from the first axis L1, and an arc-shaped pressing surface 83d is formed on the radially inner side of the brake piece 83a, which the side surface of the support rod portion 6 slides against. When the plurality of brake pieces 83a are arranged continuously in the circumferential direction, this pressing surface 83d surrounds the outer circumferential surface of the support rod portion 6 and constitutes a part of the through hole 83b through which the support rod portion 6 is inserted. Multiple annular grooves 83e are formed on the pressing surface 83d at intervals in the direction of the first axis L1, opening radially inward and extending to surround the support rod portion 6. A recessed groove 83c is formed on the outer surface of the brake piece 83a, which accommodates a part of the pressing member 85 and extends in the direction of the first axis L1.

[0067] In this embodiment, the third piston 84 is formed in a cylindrical shape, and a through hole 84b is formed in the center of the third piston 84, penetrating in the direction of the first axis L1. The support rod portion 6 is inserted through this through hole 84b so as to be movable in the direction of the first axis L1. A third hole portion 84c is opened at the base end of the third piston 84, and this third hole portion 84c is recessed to the middle part of the third piston in the direction of the first axis L1. The inner surface of the third hole portion 84c forms an inclined surface 84a that extends in an annular shape surrounding the pressing member 85 and whose inner diameter increases as it proceeds toward the base end.

[0068] An annular groove 84d extending in the circumferential direction is formed on the outer circumferential surface of the tip side of the third piston 84, and a sealing member 87 is inserted into this groove 84d to seal the space between the outer circumferential surface of the third piston 84 and the inner circumferential surface of the third cylinder bore 78. In addition, a sealing member 88 is inserted into an annular groove extending in the circumferential direction on the inner surface of the through hole 84b of the third piston 84 to seal the space between the inner surface of the through hole 84b and the side surface of the support rod portion 6. Each of these sealing members 87 and 88 is a lip-type sealing member, and these lip portions 87a and 88a are inclined in a direction in which the outer diameter increases as it approaches the tip side in the direction of the first axis L1. sealing members 87, 88This prevents the flow of compressed air from the tip end to the base end between the outer circumferential surface of the third piston 84 and the inner circumferential surface of the third cylinder bore 78, and between the inner surface of the through hole 84b and the side surface of the support rod portion 6.

[0069] In this embodiment, the pressing member 85 has a plurality of metal spheres 85a, and the plurality of spheres 85a are inserted into the respective grooves 83b of the plurality of brake pieces 83a. The plurality of spheres 85a are supported by a sphere support member 89.

[0070] In this embodiment, the spherical support member 89 is formed in a cylindrical shape with a hole 89a opening at its base end, and a flange portion 89b is formed in an annular shape at the base end of the spherical support member 89, projecting radially outward. The flange portion 89b is fixed to the connecting body 76 by fastening means such as bolts 89c while installed on the base end of the connecting body 76. The hole 89a is formed in a cylindrical shape extending to the tip side along the direction of the first axis L1, and the bottom of the hole 89a extends in a direction perpendicular to the direction of the first axis L1. A through hole 89d is formed in the center of the bottom of the hole 89a through which the support rod portion 6 is inserted. The brake pad 83 attached to the support rod portion 6 is housed inside the hole 89a. The tip of the brake pad 83 is in contact with the bottom surface of the hole 89a. This prevents the brake pad 83 from moving toward the tip side.

[0071] The outer surface of the side wall 90 of the spherical support member 89 forms an inclined surface 90a whose outer diameter increases as it approaches the base end. This inclined surface 90a extends substantially parallel to the inclined surface 84a of the third piston 84. Multiple holes 90b for accommodating the sphere 85a are formed in the side wall 90 of the spherical support member 89 at equal intervals in the circumferential direction. Each of the multiple holes 90b is positioned opposite each of the recessed grooves 83c of the multiple brake pieces 83a and penetrates the side wall 90 radially. The inner diameter of the holes 90b is slightly larger than the diameter of the sphere 85a, and the thickness of the side wall 90 (length of the holes 90b) is smaller than the diameter of the sphere 85a. Therefore, the sphere 85a can move radially within the holes 90b, and both ends of the sphere 85a protrude from each end of the holes 90b. The radially inner end of the sphere 85a is in contact with the inner surface of the groove 83c of the brake pad 83, and the radially outer end of the sphere 85a is in contact with the inclined surface 84a of the third piston 84.

[0072] When the radial ends of the sphere 85a are in contact with the brake piece 83a and the third piston 84, a gap 91 is formed between the inner surface of the third hole 84c of the third piston 84 and the outer surface of the sphere support member 89, and between the base end face of the third piston 84 and the base inner surface of the sphere support member 89. Therefore, when the third piston 84 moves toward the base end, the inclined surface 84a of the third piston 84 can press against the sphere 85a.

[0073] The third pressure chamber 86 is formed by partitioning the tip side of the third cylinder bore 78 with the third piston 84. In this embodiment, the third pressure chamber 86 is formed between the tip end 84e of the third piston 84 and the bottom surface of the third cylinder bore 78, and communicates with the communication hole 77. A supply and discharge port 92 is formed in the middle of the connecting body 76 in the direction of the first axis L1, allowing compressed air to be introduced into the communication hole 77 from the outside.

[0074] Next, the tip-side second locking mechanism 82 will be described. The tip-side second locking mechanism 82 is configured in substantially the same way as the base-side second locking mechanism 81 described above, so the parts that differ from the base-side second locking mechanism 81 will be described, and the parts that are identical to the base-side second locking mechanism 81 will be explained in a simplified manner.

[0075] In this embodiment, as shown in Figures 15 and 16, the tip-side second locking mechanism 82 is configured to include a fourth cylinder hole 79 formed on the tip side of the communication hole 77 of the connecting portion 75, a brake pad 83 having a pressing surface 83d positioned within the fourth cylinder hole 79 facing the side surface of the support rod portion 6, a fourth piston 94 that is movable within the fourth cylinder hole 79 and has an inclined surface 94a positioned within the fourth cylinder hole 79 radially outward from the brake pad 83, a pressing member 85 positioned between the brake pad 83 and the inclined surface 94a and receiving a pressing force directed radially inward from the inclined surface 94a due to the movement of the fourth piston 94, and a fourth pressure chamber 95 in which the fourth cylinder hole 79 is partitioned by the fourth piston 94.

[0076] The fourth cylinder bore 79 is formed in a cylindrical shape that opens at the tip of the connecting body portion 76, and the inner diameter of the fourth cylinder bore 79 is larger than the inner diameter of the communication hole 77. The base end of the fourth cylinder bore 79 is the first shaft L1 A stepped portion 79a extending in a direction perpendicular to the direction is formed in an annular shape.

[0077] Since the brake pad 83 is the same as the brake pad 83 of the base-side second locking mechanism 81, its description will be omitted.

[0078] Furthermore, in this embodiment, the fourth piston 94 has a through hole 94b that penetrates its center, through which the support rod portion 6 is inserted so as to be movable in the direction of the first axis L1. The tip of the fourth piston 94 has an opening, a fourth hole portion 94c, and the inner surface of the fourth hole portion 94c is formed as an inclined surface 94a whose inner diameter increases as it proceeds toward the tip.

[0079] An annular groove 94d is formed on the outer circumferential surface of the base end of the fourth piston 94, and a sealing member 96 is fitted into this groove 94d to seal the space between the outer circumferential surface of the fourth piston 94 and the inner circumferential surface of the fourth cylinder bore 79. In addition, a sealing member 97 is fitted into an annular groove formed on the inner surface of the through hole 94b of the fourth piston 94 to seal the space between the inner surface of the through hole 94b and the side surface of the support rod portion 6. These sealing members 96 and 97 are lip-type sealing members, and the lip portions 96a and 97a of these sealing members 96 and 97 are inclined in a direction in which the outer diameter increases from the tip end to the base end. Therefore, these lip portions 96a and 97a can prevent the flow of compressed air from the base end to the tip end between the outer circumferential surface of the fourth piston 94 and the inner circumferential surface of the fourth cylinder bore 79, and between the inner surface of the through hole 94b and the side surface of the support rod portion 6.

[0080] In this embodiment, the pressing member 85 is composed of a plurality of metal spheres 85a and is supported by a sphere support member 89. The sphere support member 89 is formed in a cylindrical shape with a hole 89a opening at its tip, and a flange portion 89b formed at the tip of the sphere support member 89 is fixed to the tip of the connecting body portion 76 by fastening means such as a bolt 89c. A support rod portion 6 is inserted through a through hole 89d formed at the bottom of the hole 89a, and a brake pad 83 attached to the support rod portion 6 is housed inside the hole 89a. The base end of the brake pad 83 is in contact with the bottom surface of the hole 89a. This prevents the brake pad 83 from moving toward the tip.

[0081] Furthermore, in this embodiment, the outer surface of the side wall 90 of the spherical support member 89 is an inclined surface 90a whose outer diameter increases as it approaches the tip, and this inclined surface 90a extends parallel to the inclined surface 94a of the fourth piston. Multiple holes 90b are formed in the side wall 90 of the spherical support member 89 for accommodating each of the multiple spheres 85a. The radially inner end of the sphere 85a inserted into the hole 90b contacts the inner surface of the groove 83c of the brake pad 83, and the radially outer end of the sphere 85a contacts the inclined surface 94a of the fourth piston 94.

[0082] When the sphere 85a is in contact with the brake piece 83a and the fourth piston 94, a gap 98 is formed between the inner surface of the fourth hole 94c of the fourth piston 94 and the outer surface of the sphere support member 89, and between the end face of the tip of the fourth piston 94 and the inner surface of the tip of the sphere support member 89. Therefore, when the fourth piston 94 moves toward the tip, the inclined surface 94a of the fourth piston 94 can press against the sphere 85a.

[0083] Furthermore, in this embodiment, the fourth pressure chamber 95 is formed by partitioning the base end side of the fourth cylinder bore 79 with the fourth piston 94. In this embodiment, the fourth pressure chamber 95 is formed between the top portion 94e on the base end side of the fourth piston 94 and the bottom surface of the fourth cylinder bore 79, and communicates with the communication hole 77.

[0084] In the base and tip side second locking mechanisms 81 and 82 configured in this way, compressed air can be supplied to and released from the third and fourth pressure chambers 86 and 95 through the communication hole 77 from the supply and discharge port 92, thereby pressing the third and fourth pistons 84 and 94 against the pressing member 85. For example, by moving or pressing the third and fourth pistons 84 and 94 towards both ends of the connecting body 76 in the direction of the first axis L1 with the compressed air supplied to the third and fourth pressure chambers 86 and 95, the sphere 85a receives a pressing force directed radially inward from the inclined surfaces 84a and 94a. As a result, the brake pads 83 and 83 are pressed radially inward, and the pressing surfaces 83d and 83d press against the side surface of the support rod 6. This allows the support rod 6 to be locked to the arm support member 71 (connecting body 76).

[0085] As shown in Figures 3, 15, and 16, a fixing member 100 is attached to the base end of the connecting body 76, having an insertion hole 100a that penetrates in the direction of the first axis L1 and is inserted into the through hole 71a of the arm support member 71. In this embodiment, the fixing member 100 has a fixing body portion 101 that extends in the direction of the first axis L1 and is formed in a cylindrical shape with a base end 101d and a tip end 101e on both sides, an annular flange portion 101a that protrudes radially outward from the tip side of the fixing body portion 101, and a cylindrical locking projection portion 101b that protrudes from the tip of the fixing body portion 101. The flange portion 101a is fixed to the spherical support member 89 by fastening means such as a screw 102 while installed on the base end of the spherical support member 89. Therefore, the fixing member 100 is fixed to the connecting body 76 via the spherical support member 89.

[0086] With the support rod portion 6 inserted through the insertion hole 100a of the fixing member 100 and the flange portion 101a fixed to the base end of the spherical support member 89, the locking projection 101b of the fixing member 100 is inserted in a fitted state into the hole 89a of the spherical support member 89, and the tip of the locking projection 101b is in contact with the base end of the brake pad 83. As a result, the brake pad 83 is held between the locking projection 101b and the bottom surface of the hole 89a of the spherical support member 89, preventing movement to either side in the direction of the first axis L1.

[0087] The outer diameter of the fixed body portion 101 is smaller than the inner diameter of the through hole 71a of the arm support member 71, and a male threaded portion 101c is formed on the base end side of the fixed body portion 101. The fixed body portion 101 is inserted through the through hole 71a of the arm support member 71, with the base end face of the flange portion 101a in contact with the tip end face of the arm support member 71, and the base end of the fixed body portion 101 protrudes from the through hole 71a. The fixing member 100 is then fixed to the arm support member 71 by screwing the mounting nut 103 onto the male threaded portion 101c of the protruding fixed body portion 101. As a result, the connecting body portion 76 is detachably fixed to the arm support member 71 via the fixing member 100.

[0088] On the other hand, in this embodiment, a cover member 104 having a through hole 104a penetrating in the direction of the first axis L1 is attached to the tip 76c of the connecting body 76, as shown in Figures 3, 15, and 16. The cover member 104 has a cylindrical cover body portion 105 extending in the direction of the first axis L1, and an annular flange portion 105a protruding radially outward from the middle portion of the cover body portion 105 in the direction of the first axis L1. The flange portion 105a is fixed to the spherical support member 89 by fastening means such as a screw 102 while installed on the tip of the spherical support member 89. Therefore, the cover member 104 is fixed to the connecting body 76 via the spherical support member 89.

[0089] The base end of the cover body 105 is in contact with the tip of the brake pad 83. As a result, the brake pad 83 is held between the cover body 105 and the bottom surface of the hole 89a of the spherical support member 89, preventing the brake pad 83 from moving to either side in the direction of the first axis L1.

[0090] In this embodiment, as shown in Figures 3 and 14, the support rod portion 6 has its base end protruding from the base end of the insertion hole 100a of the fixing member 100, and the retaining member 3 is attached to the base end 6b of the support rod portion 6. In this embodiment, the retaining member 3 is formed in a cylindrical shape, and its diameter is larger than the inner diameter of the insertion hole 100a of the fixing member 100, and smaller than the inner diameter of the through hole 71a of the arm support member 71. Therefore, since the retaining member 3 can be inserted through the through hole 71a of the arm support member 71, the retaining member 3 can be inserted into and removed from the through hole 71a of the arm support member 71 while it is still attached to the support rod portion 6. Furthermore, since the retaining member 3 is larger than the inner diameter of the insertion hole 100a of the fixing member 100, when the support rod portion 6 moves toward the tip side relative to the connecting portion 75, the support rod portion 6 comes into contact with the base end 101d of the fixing body portion 101 of the fixing member 100, thus preventing the support rod portion 6 from coming loose from the connecting portion 75.

[0091] In this embodiment, the connecting nut 2 screwed onto the tip of the support rod portion 6 has a larger diameter than the outer diameter of the support rod portion 6. Therefore, when the connecting nut 2 is attached to the support rod portion 6, the base end of the connecting nut 2 forms a spring seat 2b (step portion) that protrudes radially outward relative to the support rod portion 6.

[0092] A compression coil spring (compression spring, spring member) 108 is provided between the spring seat 2b and the cover member 104. In this embodiment, a support rod portion 6 is inserted inside the compression coil spring 108, and one end of the support rod portion 6 is in contact with the tip of the cover member 104, while the other end is in contact with the spring seat 2b of the connecting nut 2. The compression coil spring 108 constantly biases the support rod portion 6 toward the tip.

[0093] Now, as shown in Figure 1, the workpiece suction device 1 is configured by attaching a plurality of magnetic chucks 5 to an arm support member 71, and the support rod portions 6 of each of these magnetic chucks 5 are attached to the arm support member 71 so as to be parallel to each other.

[0094] Next, the workpiece suction device 1 uses the workpiece suction device 1 to remove the base end surface of the workpiece 110 in the direction of the first axis L1 (hereinafter referred to as the "up and down direction"). surface" The following describes the case in which a workpiece 110 is adsorbed, which is formed having a non-inclined surface facing the same direction as the direction perpendicular to the vertical direction (hereinafter referred to as the "left-right direction") and a plurality of inclined surfaces inclined in different directions with respect to the left-right direction.

[0095] In this embodiment, the workpiece 110 further has different vertical heights between the non-inclined surface and some of the multiple inclined surfaces. That is, as shown in Figure 3, the workpiece 110 is formed by bending multiple metallic plate-like members and has a first inclined surface 110a, a second inclined surface 110b, a non-inclined surface 110c, and a third inclined surface 110d from left to right. The first inclined surface 110a is an upward-sloping surface that inclines upward as you move from left to right, the second inclined surface 110b is located at approximately the same height as the first inclined surface 110a and inclines downward as you move from left to right, the non-inclined surface 110c is located below the first and second inclined surfaces 110a and 110b and extends in the left-right direction, and the third inclined surface 110d has an intermediate position in the left-right direction at the same height as the non-inclined surface 110c and is an downward-sloping surface with a smaller inclination angle than the second inclined surface 110b.

[0096] When the workpiece 110 formed in this manner is to be picked up by the workpiece suction device 1, first, the workpiece 110 is placed below the workpiece suction device 1. Then, as shown in Figure 5, the lock on the support rod portion 6 of the rotating arm portion 20 and the chuck unit 50 by the first locking mechanism 37 is released, and the lock on the support rod portion 6 to the connecting body portion 76 by the second locking mechanism 80 is released. Furthermore, the permanent magnet 60 of the chuck unit 50 is moved to the suction position P1. As a result, the support rod portion 6 becomes movable vertically relative to the connecting body portion 76, and the entire magnetic chuck 5 moves downward, causing the retaining member 3 to contact the base end 101d of the fixing member 100. As a result, the downward movement of the magnetic chuck 5 stops, and the entire magnetic chuck 5 extends in a straight line along the direction of the first axis L1.

[0097] In this state, when the workpiece suction device 1 is moved downward, as shown in Figures 17(a) and 18(a), the workpiece suction surfaces 48a of the chuck units 50 located above the first inclined surface 110a and the second inclined surface 110b, which are the uppermost of the multiple inclined surfaces of the workpiece 110, come into contact with the first inclined surface 110a and the second inclined surface 110b, respectively. In this case, the chuck unit 50 that comes into contact with the first inclined surface 110a has the right end B of its workpiece suction surface 48a come into contact with the first inclined surface 110a (see Figure 17(a)), and the chuck unit 50 that comes into contact with the second inclined surface 110b has the left end A of its workpiece suction surface 48a come into contact with the second inclined surface 110b (see Figure 18(a)). 8 (see (a)).

[0098] Then, as the workpiece suction device 1 is moved further downward, these magnetic chucks 5 receive reaction forces from these inclined surfaces 110a and 110b, and move upward relative to the downward-moving arm support member 71 while remaining in a straight line, thereby compressing the compression coil spring 108. As a result, as shown in Figures 17(b) and 17(b) 18 As shown in (b), the downward movement of the magnetic chuck 5 and the pressing force of the compression coil spring 108 work together to rotate each chuck unit 50 in the left-right direction with the first center point S1 of the first joint 10 as the pivot point, while the left-right ends A and B of each chuck unit 50 are in contact with the first inclined surface 110a and the second inclined surface 110b, respectively. The chuck unit 50 also rotates in the left-right direction with the second center point S2 of the second joint 40 as the pivot point. Therefore, each workpiece suction surface 48a can contact and suction the workpiece without shifting relative to a predetermined position, following the first and second inclined surfaces 110a and 110b.

[0099] Furthermore, as the workpiece suction device 1 moves downward, as shown in Figure 18(a), the left end A of the workpiece suction surface 48a of the magnetic chuck 5, which is located above the third inclined surface 110d, comes into contact with the third inclined surface 110d. Then, as the workpiece suction device 1 is moved further downward, the magnetic chuck 5 receives a reaction force from the third inclined surface 110d and moves upward relative to the downward-moving arm support member 71 while remaining in a straight line, thereby compressing the compression coil spring 108. As a result, as shown in Figure 18(b), the downward movement of the magnetic chuck 5 and the pressing force of the compression coil spring 108 combine to rotate the rotating arm 20 to the right around the first center point S1 of the first joint 10 as the pivot point, while the left end A of the chuck unit 50 comes into contact with the third inclined surface 110d, and the chuck unit 50 rotates to the left around the second center point S2 of the second joint 40 as the pivot point. Therefore, the workpiece adsorption surface 48a can adhere to the workpiece without shifting relative to a predetermined position while following the third inclined surface 110d.

[0100] Furthermore, as the workpiece suction device 1 moves downward, as shown in Figure 3, the workpiece suction surface 48a of the chuck unit 50 of the magnetic chuck 5, which is located above the non-inclined surface 110c, comes into contact with the non-inclined surface 110c in a manner consistent with the non-inclined surface 110c. Then, as the workpiece suction device 1 is moved further downward, the magnetic chuck 5, Non-inclined surface 110c Receiving a reaction force from the arm support member 71, which moves downward, the compression coil spring 108 moves upward relative to the arm support member 71 while remaining in a straight line, thereby compressing the spring. As a result, the downward movement of the magnetic chuck 5 and the pressing force of the compression coil spring 108 combine to press the workpiece suction surface 48a of the chuck unit 50 against the non-inclined surface 110c. At this time, the rotating arm portion 20 does not rotate with respect to the first center point S1 of the first joint portion 10 and the second center point S2 of the second joint portion 40, and as a result, the magnetic chuck 5 is maintained in a straight line position. Therefore, the workpiece suction surface 48a can contact and suction the workpiece without shifting relative to the predetermined position while conforming to the non-inclined surface 110c.

[0101] Compressed air is then supplied to the first locking mechanism 37 and the second locking mechanism 80 of each of the multiple magnetic chucks 5 to lock the support rod 6 against the arm support member 71 and to lock the rotation of the rotating arm 20 against the support rod 6 and the chuck unit 50. As a result, the workpiece suction surfaces 48a of each of the multiple chuck units 50 are maintained in a position where they are suctioning the corresponding inclined surface. When the workpiece suction device 1 is moved upward, the workpiece 110 can be moved upward without tilting.

[0102] As described above, with the workpiece suction device 1 according to the present invention, the base end of the rotating arm portion 20 is rotatably connected to the tip of the support rod portion 6 by the first joint portion 10, and the tip of the rotating arm portion 20 is rotatably connected to the base end of the chuck unit 50 by the second joint portion 40. Therefore, even if the upper surface of the workpiece 110 is inclined with respect to the workpiece suction surface 48a, the workpiece suction surface 48a can be used to suction the workpiece while conforming to the upper surface of the workpiece without shifting relative to a predetermined position on the upper surface of the workpiece.

[0103] In the embodiment described above, the chuck unit 50 was shown to be vertically elongated, but it may also be formed horizontally elongated, with the width of the chuck unit 50 being greater than the length in the direction of the third axis L3. [Explanation of Symbols]

[0104] 1. Workpiece suction device 3 Retaining member 5. Magnetic chuck 6. Support rod section 6a, 51a, 76 c tip 6b, 51b, 76 b proximal end 10. First joint section 11. First Ball 12 First recess 20 Rotating Arm Section 21 First cover member 22 First through hole 22a First outer sliding surface 23 First Piston 24 1st hole 24a First inner sliding surface Within 26,35 side space 28 First cylinder bore 29 Second cylinder hole 30. Second piston 32 Second cover member 33 Second through hole 33a Second outer sliding surface 34 2nd hole 34a 2nd inner sliding surface 37. First locking mechanism 40. Second joint section 41. Second Ball 42 Second recess 48a Workpiece suction surface 50 Chuck Units 51 cabinets 52a Cylinder bore 52b First pressure chamber 52c Second pressure chamber 57 Chuck Piston 60 permanent magnets 70 Support part 71 Arm support member 71a Through hole 75 Connecting part 76 Connecting body 77 Communication hole 78 Third cylinder bore 80 Second locking mechanism 81 Proximal end second locking mechanism (second locking mechanism) 82. Second locking mechanism at the tip (second locking mechanism) 83 Brake Pads 84 Third piston 85 Pressing member 86 Third pressure chamber 94. Fourth piston 95 Fourth pressure chamber 100 Fixing member 108 Compression coil spring (spring component, compression spring) L1 1st axis L2 Second Axis L3 Third Axis P1 Adsorption position P2 Adsorption release position S1 First center point S2 Second Center Point

Claims

1. A workpiece adsorption device comprising a magnetic chuck having a support rod portion that is reciprocable in a first axial direction and has a tip and a base end at both ends in the direction of movement; a rotating arm portion that has one end and the other end at both ends in a second axial direction and one end of which is rotatably connected to the tip of the support rod portion by a first joint portion; and a housing that has a tip and a base end at both ends in a third axial direction, the base end of the housing being rotatably connected to the other end of the rotating arm portion by a second joint portion, and a chuck unit for adsorbing a workpiece by magnetic force, wherein In the aforementioned magnetic chuck, The chuck unit has a workpiece suction surface formed at the tip of the housing, extending in a direction perpendicular to the third axis. The first joint portion has a first center point, The support rod portion and the rotating arm portion are rotatable relative to each other about the first center point. The second joint portion has a second center point, The rotating arm and the chuck unit are rotatable relative to each other about the second center point. A workpiece suction device characterized by the following features.

2. The chuck unit comprises a cylinder bore formed inside the housing and extending in the third axial direction, a chuck piston movably provided within the cylinder bore, and a permanent magnet attached to the chuck piston and moving together with the chuck piston. The permanent magnet is reciprocable in the third axial direction between an adsorption position, where the permanent magnet is moved toward the front end of the housing to adsorb the workpiece onto the workpiece adsorption surface, and an adsorption release position, where the permanent magnet is moved toward the base end of the housing to release the adsorption of the workpiece. The workpiece adsorption device according to feature 1.

3. The first joint portion is configured to include a first ball body having a first center point and a first recess that slidably accommodates the first ball body. The second joint portion is configured to include a second ball body having the second center point and a second recess that slidably accommodates the second ball body. A workpiece adsorption device according to claim 1 or 2.

4. In the first joint portion, the first ball body is attached to the support rod portion, and the first recess opens at one end of the rotating arm portion. In the second joint portion, the second ball body is attached to the base end of the chuck unit, and the second recess opens to the other end of the rotating arm portion. The workpiece adsorption device according to feature 3.

5. The rotating arm portion has a first locking mechanism that can lock and unlock the relative rotation between the first ball body housed in the first recess of the first joint portion and the first recess, and the relative rotation between the second ball body housed in the second recess of the second joint portion and the second recess. The workpiece adsorption device according to feature 4.

6. The rotating arm portion comprises a first cover member attached to one end thereof and having a first through hole passing through in the second axial direction, and a second cover member attached to the other end of the rotating arm portion and having a second through hole passing through in the second axial direction. The first locking mechanism is, The first and second through holes formed in the first and second cover members, The first and second cylinder holes formed inside one end and the other end of the rotating arm portion, A first piston is provided movably within the first cylinder bore and has a first hole portion that opens at one end, A second piston is provided movably within the second cylinder bore and has a second hole portion that opens to the other end, A first pressure chamber formed on the other end side of the first cylinder bore in the second axial direction and partitioned by the first piston, It is configured to have a second pressure chamber formed on one end of the second cylinder bore in the second axial direction and partitioned by the second piston, The first through hole and the first hole are in communication in the second axial direction, and the inner space surrounded by the first through hole and the first hole forms the first recess for housing the first ball body. A first outer sliding contact surface is formed on the inner surface of the first through hole, which slides against the outer surface of one end of the first ball body in the second axial direction. A first inner sliding surface is formed on the inner surface of the first hole, which slides against the outer surface of the other end of the first ball body in the second axial direction. The second through hole and the second hole are in communication in the second axial direction, and the inner space surrounded by the second through hole and the second hole forms the second recess for housing the second ball body. A second outer sliding contact surface is formed on the inner surface of the second through hole, which slides against the outer surface of the other end of the second ball body in the second axial direction. A second inner sliding surface is formed on the inner surface of the second hole, which slides against the outer surface of one end of the second ball body in the second axial direction. By supplying and discharging compressed air to the first and second pressure chambers of the first and second cylinder bores, the first and second pistons can be made to reciprocate in the second axial direction. By using compressed air supplied to the first and second pressure chambers, the first piston is moved to one end in the second axial direction, and the second piston is moved to the other end in the second axial direction, thereby causing the first ball body to be clamped between the first outer sliding surface and the first inner sliding surface, and the second ball body to be clamped between the second outer sliding surface and the second inner sliding surface. As a result, the rotation of the rotating arm is locked relative to the support rod and the chuck unit, respectively. The workpiece adsorption device according to feature 5.

7. The first outer sliding surface of the first through hole contacts the outer surface of the first ball body on one end side in the second axial direction relative to the first center point. The first inner sliding surface of the first hole contacts the outer surface of the first ball body on the other end side in the second axial direction from the first center point. The second outer sliding surface of the second through hole contacts the outer surface of the second ball body on the other end side in the second axial direction from the second center point. The second inner sliding surface of the second hole contacts the outer surface of the second ball body on one end side in the second axial direction relative to the second center point. The workpiece adsorption device according to feature 6.

8. The first inner sliding surface of the first piston is formed as a conical surface whose inner diameter increases as it advances toward one end in the second axial direction. The second inner sliding surface of the second piston is formed as a conical surface whose inner diameter expands as it advances toward the other end in the second axial direction. The workpiece adsorption device according to feature 7.

9. A plurality of the magnetic chucks, It has a support portion that supports each support rod portion of the plurality of magnetic chucks so that it can reciprocate, The aforementioned support portion is An arm support member having multiple through holes extending in a direction perpendicular to the first axis, through which each support rod portion of the multiple magnetic chucks can be individually inserted so as to be reciprocable, Multiple connecting parts are attached to the arm support member and have communication holes through which each support rod portion of the multiple magnetic chucks is individually inserted, and each connecting part has a second locking mechanism that can lock and unlock the support rod portion relative to the arm support member, Multiple retaining members are attached to each of the multiple support rod portions and abut against one end of the connecting portion in the first axial direction as the support rod portion moves, thereby preventing the support rod portion from being pulled out of the through hole. The device comprises a plurality of spring members provided between the connecting portion and the support rod portion of each of the plurality of magnetic chucks, which bias each of the plurality of magnetic chucks toward the tip side in the first axial direction relative to the arm support member. Each of the support rods of the multiple magnetic chucks is arranged on the arm support member with a distance between them and their respective first axes parallel to each other. A workpiece adsorption device according to any one of claims 5 to 8.

10. The second locking mechanism of the connecting portion is A third cylinder hole extending in the first axial direction and formed in the communication hole of the connecting portion, Within the third cylinder bore, a brake pad having a pressing surface positioned opposite the side surface of the support rod portion, A third piston is movable within the third cylinder bore in the first axial direction and has an inclined surface positioned within the third cylinder bore radially outward from the brake pad in the first axial direction, A pressing member is positioned between the brake pad and the inclined surface and receives a pressing force directed radially inward from the inclined surface due to the movement of the third piston, It is configured to have a third pressure chamber, the third cylinder bore of which is partitioned by the third piston, By supplying and discharging compressed air to the third pressure chamber of the third cylinder bore, the third piston can be made to reciprocate in the first axial direction. By moving the third piston with compressed air supplied to the third pressure chamber, the pressing member receives a pressing force directed radially inward from the inclined surface, pressing the brake pad radially inward, and the pressing surface presses against the side surface of the support rod portion. As a result, the support rod portion is locked to the arm support member. The workpiece suction device according to feature 9.

11. The connecting portion has one end and the other end on both sides in the first axial direction, one end being attached to the arm support member, and having a connecting body portion in which the communication hole is formed. The connecting body portion is equipped with a fixing member attached to one end thereof, having a through hole that penetrates in the first axial direction and is inserted into the through hole of the arm support member. The insertion hole communicates with the communication hole of the connecting body, and the support rod portion is inserted through the insertion hole and the communication hole. The fixing member is detachably attached to the arm support member while being inserted through the through hole of the arm support member. As a result, the connecting body is detachably attached to the arm support member. The workpiece adsorption device according to feature 10.

12. The fixing member is attached to the arm support member in such a state that it protrudes from the end face on one end side of the arm support member in the first axial direction. The support rod portion is positioned such that its base end protrudes from one end of the insertion hole in the fixing member in the first axial direction, and the retaining member is attached to the base end of the support rod portion. The retaining member is formed in a cylindrical shape having a diameter larger than the inner diameter of the insertion hole of the fixing member and smaller than the inner diameter of the through hole of the arm support member. The workpiece suction device according to feature 11.

13. The spring member is a compression spring positioned between the other end of the connecting body and the tip of the support rod. The workpiece adsorption device according to claim 11 or 12.

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