substrate delivery device

Abstract

A brushless electric motor includes: a frame; a motor stator connected to the frame and having phase coils disposed in an atmospheric volume maintaining an atmospheric environment; a motor rotor cooperatively coupled to the motor stator to generate an output under excitation from the motor stator, the motor rotor being disposed in a sealed environment that is sealed and isolated from and different from the atmospheric volume; and a seal that seals and isolates the motor rotor from the motor stator. The motor rotor and motor stator are arranged with an axial clearance, wherein the axial clearance between the motor rotor and motor stator is disposed across the motor stator, and the seal is disposed in the axial clearance to seal and isolate each motor stator from each motor rotor excited by the motor stator across the seal.

Description

[0001] Cross-reference to related applications This application is a non-provisional application of U.S. Provisional Patent Application No. 63 / 581,512, filed September 8, 2023, and U.S. Provisional Patent Application No. 63 / 685,401, filed August 21, 2024, and claims the benefit of those provisional patent applications, the disclosures of which are incorporated herein by reference in their entirety. Background Technology 1. Technical Field This disclosure relates generally to robotic systems, and more particularly to robotic conveying systems.

[0003] 2. Brief overview of relevant progress For example, in semiconductor processing, there is a trend toward narrow or elongated vacuum systems. These narrow vacuum systems have increasingly larger footprints, especially in length. Typically, vacuum robots (called yaw robots) that move in Cartesian coordinates are used in these elongated vacuum systems. However, as the length or footprint of elongated vacuum systems increases, the reach required by the vacuum robot also increases. To accommodate this increased reach, the length / size of the links in the vacuum robot arm increases, resulting in a heavier arm structure with increased inertia, which places increased demands on the motors driving each axis of the robot arm. In some applications, to increase semiconductor production throughput, the robot arm operates with higher accelerations, which further increases the demands on the motors (e.g., requirements for the torque output of the motors). In some cases, the motors used to drive the robot arm are located in a common motor housing (such as in coaxial or side-by-side arrangements where the motor output is arranged via a coaxial drive shaft); in others, some of the motors are distributed within the robot arm itself. Placing the motors within the arm increases the weight and inertia of the arm structure.

[0004] Therefore, this disclosure solves many of the problems. Attached Figure Description

[0005] The foregoing aspects and other features of this disclosure are explained in the following description in conjunction with the accompanying drawings, wherein: Figures 1A to 1I This is a schematic diagram of a substrate processing apparatus according to an embodiment of the present disclosure.

[0006] Figures 2A to 2H This is a schematic diagram of an exemplary substrate transport device according to the present disclosure, which can be used in... Figures 1A to 1I Used in substrate processing equipment; Figures 3A to 3C This is a schematic diagram of an exemplary substrate transfer device including one or more brushless motors according to the present disclosure; Figures 3D to 3FBased on this disclosure Figures 3A to 3C A schematic diagram of a portion of an exemplary substrate transport device; Figure 4A and Figure 4B This is a schematic diagram of an exemplary substrate transfer device including one or more brushless motors according to the present disclosure; Figures 5A to 5C This is a schematic diagram of an exemplary brushless motor according to the present disclosure, which can be incorporated at one or more joints of any substrate delivery device described herein; Figure 6A and Figure 6B This is a schematic diagram of an exemplary substrate transfer device including one or more brushless motors according to the present disclosure; Figure 7 This is a schematic diagram of an exemplary substrate transfer device including one or more brushless motors according to the present disclosure; Figure 8 This is a schematic diagram of an exemplary substrate transfer device including one or more brushless motors according to the present disclosure; Figures 9A to 9C This is a schematic diagram of an exemplary substrate transfer device including one or more brushless motors according to the present disclosure; Figure 10 Based on this disclosure Figures 9A to 9C A schematic flowchart illustrating the operation of the substrate transport device; Figure 11 and Figure 12 This is an exemplary flowchart of the method according to this disclosure; Figure 13A This is a schematic side view of an exemplary substrate transfer device including one or more brushless motors according to the present disclosure; Figure 13B and Figure 13C Based on this disclosure Figure 13A An exemplary plan view of a substrate transport device; Figure 13D Based on this disclosure Figure 13A A schematic side view of an exemplary substrate transport device; Figure 13E and Figure 13F An exemplary substrate transfer operation according to this disclosure is illustrated; Figures 14A to 14D This is an exemplary perspective view of a substrate transfer device including one or more brushless motors according to the present disclosure; Figure 15A and Figure 15B This is an exemplary perspective view of a substrate transfer device including one or more brushless motors according to the present disclosure; and Figure 16AThis is an exemplary perspective view of a substrate transfer device including one or more brushless motors according to the present disclosure; Figure 16B and Figure 16C It is in accordance with the corresponding extended configuration of this disclosure. Figure 16A A corresponding exemplary perspective view of the substrate transport device; Figure 16D and Figure 16E yes Figure 16A A corresponding exemplary perspective view of the substrate transport device, showing different motor configurations according to the present disclosure; Figure 17A This is an exemplary perspective view of a substrate transfer device including one or more brushless motors according to the present disclosure; Figure 17B and Figure 17C It is in accordance with the corresponding extended configuration of this disclosure. Figure 17A A corresponding exemplary perspective view of the substrate transport device; Figure 18 Based on this disclosure Figures 16A to 16C and Figures 17A to 17C An exemplary perspective view of a portion of the substrate transport device; Figure 19 An exemplary loading lock of the substrate processing apparatus described herein, serving the substrate transport device according to this disclosure, is illustrated, having and corresponding to a popular loading lock configuration that has been widely adopted in industry; and Figure 20 This is a flowchart of an exemplary method according to this disclosure. Detailed Implementation

[0007] The following detailed description is intended to help those skilled in the art to understand and is not intended to unduly limit the claims related to or relating to this disclosure in any way.

[0008] The following detailed description refers to the various figures, wherein the same reference numerals refer to the same parts and features in the various figures, whether or not a specific figure is referenced.

[0009] The word “each” as used in this document refers to a single object (i.e., the object itself) in the case of a single object, or each object in the case of multiple objects. The words “a,” “one,” and “the” as used in this document all include “at least one” and “one or more,” and therefore do not limit the objects mentioned to the singular form.

[0010] Figures 1A to 1IThis is a schematic diagram of a substrate processing apparatus according to aspects of the disclosed embodiments. Although the present disclosure will be described with reference to the accompanying drawings, it should be understood that the present disclosure can be implemented in a variety of forms. Furthermore, any suitable size, shape, or type of element or material can be used.

[0011] This disclosure provides a robot architecture that integrates motors into one or more joints of a robot arm, wherein the motors are high-torque, compact motors that can reduce the driven mass and overall size of the robot arm links. The robot architecture can operate in one or more vacuum and atmospheric environments.

[0012] This disclosure provides a robot architecture that integrates motors (each motor may have a corresponding encoder providing position feedback) into one or more joints of a robot arm, wherein the motors are high-torque, compact motors that can reduce the driven mass and overall size of the robot arm links compared to conventional robots with directly driven arm links. For example, a typical semiconductor robot typically has a torque of about 100 N / m for the shoulder axis or motor and about 60 N / m for the elbow axis or motor to, for example, rotate the upper arm and forearm of a SCARA transfer robot. The shoulder and elbow joints can be the dominant axes of motion typical of yaw or radial arm robots with Cartesian motion (such as those described herein). With the continuous development of semiconductor manufacturing (e.g., the shift to robots with longer strokes / heavier links, heavier payloads with new substrate materials, and higher throughput / robot acceleration), the torque requirements for motors are constantly increasing. According to this disclosure, the motors integrated into one or more joints of the robot arm and directly driving one or more joints of the robot arm are axial flux motors with high torque, light weight, and low power consumption. These motors employ rotors without permanent magnets (e.g., rotors made of any suitable magnetic material), such as those described in U.S. Patent No. 9,948,155, issued April 17, 2018, and U.S. Patent No. 11,444,521, issued September 13, 2022, and U.S. Patent Application No. 17 / 790,722, filed July 1, 2022 (published March 2, 2023 as US 2023 / 0069099), the disclosures of which are incorporated herein by reference in their entirety.

[0013] According to this disclosure, one or more of the arm joints may include a motor having a magnet / coil array stacked axially along the motor's axis of rotation, wherein the stacked coil array is configured to provide a predetermined motor torque output, which can result in the motor having a smaller footprint than a radial flux motor having the same torque output. For example, a typical torque density of a radial flux motor located at the shoulder axis of a SCARA transport arm is about 9.09 N / m / kg, compared to about 41.7 N / m / kg for an equivalent axial flux motor, wherein the power required to drive the axial flux motor is lower than that of the radial flux motor (e.g., about 315 watts (48vDC) compared to about 49 watts (48vDC) for driving the axial flux motor). The lower power consumption of the axial flux motor allows for the use of smaller-gauge electrical conductors and connectors for the motor, which is advantageous when routing conductors through the arm link.

[0014] According to this disclosure, these stacked coil (stator) axial flux motors are sealed for operation in a vacuum environment (note that stacked coil axial flux motors can be used in sealed or unsealed atmospheric environments). As noted above, the axial flux motor has stacked coils (also referred to as concentrator rings) with the rotor (or armature) interleaved between the stacked coils. The stator seals provided herein include isolation walls that form a static seal, which is arranged in a substantially serpentine configuration interleaved between the coils and the rotor.

[0015] Still referencing Figures 1A to 1I The accompanying drawings illustrate processing apparatuses 100A, 100B, 100C, 100D, 100E, 100F, and 100G according to the present disclosure, such as, for example, semiconductor tool tables. Although semiconductor tool tables are shown in the drawings, the present disclosure described herein can be applied to any tool table or application employing robotic manipulators. Processing apparatuses 100A, 100B, 100C, 100D, 100E, 100F, and 100G are shown as having a clustered tool arrangement (e.g., having a substrate holding stage connected to a central chamber); however, the processing apparatus may be a linear arrangement of tools, or the present disclosure can be applied to any suitable tool table. Apparatuses 100A, 100B, 100C, 100D, 100E, 100F, and 100G generally include an atmospheric front end 101, at least one vacuum loading lock 102, 102A, 102B, and a vacuum back end 103. At least one vacuum loading lock 102, 102A, 102B can be connected to any suitable port or opening of the front end 101 and / or the rear end 103 (one or more) in any suitable arrangement. For example, one or more loading locks 102, 102A, 102B can be arranged side-by-side in a common horizontal plane, as in... Figure 1B , Figures 1D to 1HAs can be seen in the diagram. One or more load locks can be arranged in a grid pattern, such that at least two load locks 102A, 102B, 102C, 102D are arranged in rows (e.g., with spaced horizontal planes) and columns (e.g., with spaced vertical planes), as shown in the diagram. Figure 1I As shown in the diagram. One or more load locks can be as follows: Figure 1A The single inline loading lock 102 is shown. At least one loading lock 102, 102E can be arranged as follows: Figure 1C The stacked in-line arrangement is shown. Although the load locks are illustrated on the ends 100E1 or facets 100F1 of the transport chambers 125A, 125B, 125C, 125D, 125E, 125F, and 125G, one or more load locks may be arranged on any number of sides 100S1, 100S2, ends 100E1, 100E2, or facets 100F1-100F8 of the transport chambers 125A, 125B, 125C, 125D, 125E, 125F, and 125G. Each of at least one load lock may include one or more wafer / substrate resting planes (WRPs). Figure 1C The substrate is held on a suitable support within the respective loading lock. The workbench can have any suitable configuration. Components of each of the front end 101, at least one loading lock 102, 102A, 102B, and the rear end 103 can be connected to a controller 110, which can be part of any suitable control architecture, such as, for example, a cluster architecture control. The control system can be a closed-loop controller having a master controller, a cluster controller, and autonomous remote controllers, such as those disclosed in U.S. Patent No. 7,904,182, entitled “Scalable Motion Control System,” issued March 8, 2011, the disclosure of which is incorporated herein by reference in its entirety. Any suitable controller and / or control system can be utilized.

[0016] Front end 101 typically includes a loading port module 105 and a microenvironment 106, such as, for example, an Equipped Front End Module (EFEM). The loading port module 105 may be a Box Opener / Loader to Tool Standard (BOLTS) interface conforming to SEMI standards E15.1, E47.1, E62, E19.5, or E1.9 for 300 mm loading ports, front-opening, or bottom-opening boxes / bays and cassettes. The loading port module may be configured as a 200 mm wafer / substrate interface, a 450 mm wafer / substrate interface, or any other suitable substrate interface, such as, for example, larger or smaller semiconductor wafers / substrates, flat panels for flat panel displays, solar panels, photomasks, or any other suitable object. Although in Figure 1A , Figure 1B , Figure 1D , Figure 1E , Figure 1F , Figure 1G , Figure 1H Three loading port modules 105 are shown, but any suitable number of loading port modules can be incorporated into the front end 101. Loading port modules 105 can be configured to receive substrate carriers or cassettes C from overhead conveyor systems, automated guided vehicles, personnel-guided vehicles, rail-guided vehicles, or any other suitable transport method. Loading port modules 105 can be interconnected with the microenvironment 106 via loading ports 107. Loading ports 107 allow the substrate to pass between the substrate cassette and the microenvironment 106.

[0017] Microenvironment 106 typically includes any suitable transfer robot 108, which may incorporate one or more features of this disclosure as described herein. Robot 108 may be a track-mounted robot, such as those described in, for example, U.S. Patent 6,002,840, issued December 14, 1999; U.S. Patent 8,419,341, issued April 16, 2013; and U.S. Patent 7,648,327, issued January 19, 2010, the disclosures of which are incorporated herein by reference in their entirety. Robot 108 may be substantially similar to the robot described herein with respect to backend 103. Microenvironment 106 may provide a controlled clean area for substrate transfer between multiple loading port modules.

[0018] At least one vacuum loading lock 102, 102A, 102B may be located between and connected to the microenvironment 106 and the rear end 103. A loading port module 105 may be substantially directly coupled to at least one loading lock 102, 102A, 102B or transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G, wherein the substrate carrier C is drawn into the vacuum of the transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G, and the substrate is directly transported between the substrate carrier C and the loading lock or transport chamber. The substrate carrier C may be used as a loading lock, such that the processing vacuum of the transport chamber extends into the substrate carrier C. Where the substrate carrier C is substantially directly coupled to the loading lock via a suitable loading port, any suitable transport device may be disposed within the loading lock, or otherwise accessible to the carrier C, for transporting the substrate to and from the substrate carrier C. It should be noted that the term "vacuum" as used in this article can refer to a high vacuum in which the substrate is processed, such as 1 × 10⁻⁶. -5Torr or lower. At least one loading lock 102, 102A, 102B typically includes atmospheric and vacuum gap valves. The gap valves of loading locks 102, 102A, 102B (and those for the processing stage 130) provide environmental isolation for evacuating the loading locks after loading the substrate from the atmospheric front end and for maintaining a vacuum in the delivery chamber when the loading locks are vented with an inert gas such as nitrogen. As will be described herein, the slot valves of processing devices 100A, 100B, 100C, 100D, 100E, 100F, and 100G may be located in the same plane, in different vertical stacking planes, or in a combination of slot valves located in the same plane and slot valves located in different vertical stacking planes (as described above regarding the loading ports) to accommodate the transfer of substrates to and from at least processing stages 130 and loading locks 102, 102A, and 102B connected to transport chambers 125A, 125B, 125C, 125D, 125E, 125F, and 125G. At least one loading lock 102, 102A, 102B (and / or front end 101) includes an aligner ALN for aligning a reference for the substrate to the desired location for processing or any other suitable substrate metrology equipment. Vacuum loading locks may be located in any suitable location within the processing device and may have any suitable configuration.

[0019] The vacuum backend 103 typically includes transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G, one or more processing stages 130, and any suitable number of transfer unit modules 104, each including one or more transfer robots that may include one or more features of this disclosure as described herein. The transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G may have any suitable shape and size, for example, conforming to SEMI Standard E72 guidelines. The transfer unit modules 104 and one or more transfer robots will be described below and may be at least partially located within the transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G to transport substrates between loading locks 102, 102A, 102B (or cassette C located at the loading port) and various processing stages 130. The transmission unit module 104 can be removed as a modular unit from the transmission chambers 125A, 125B, 125C, 125D, 125E, 125F, and 125G, so that the transmission unit module 104 conforms to the SEMI standard E72 guideline.

[0020] Stage 130 can operate on a substrate using various deposition, etching, or other types of processes to form circuits or other desired structures on the substrate. Typical processes include, but are not limited to, thin film processes using vacuum, such as plasma etching or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation (e.g., ion implantation), metrology, rapid thermal processing (RTP), dry lift atomic layer deposition (ALD), oxidation / diffusion, nitride formation, vacuum lithography, epitaxy (EPI), wire bonding, and other thin film processes using evaporation or vacuum pressure. Stage 130 can be communicatively connected to transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G in any suitable manner, such as through a slit valve SV, to allow substrate transfer from transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G to stage 130 and vice versa. The slit valve SV of the transport chamber 125 can be arranged to allow connection of dual processing stages (e.g., more than one substrate processing chamber located within a common housing) or side-by-side processing stages 130T1, 130T2, single processing stage 130S and / or stacked process modules / loading locks. Figure 1C and 1I ).

[0021] It should be noted that when one or more arms of the transfer unit module 104 are aligned with a predetermined processing stage 130, transfer of substrates to and from the processing stage 130, and to loading locks 102, 102A, 102B (or cartridge C) connected to transfer chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G, can occur. According to this disclosure, one or more substrates can be transferred individually or nearly simultaneously to the respective predetermined processing stage 130 (e.g., as shown in the image). Figure 1B , Figure 1D and Figure 1H As shown, such as when picking up / placing a substrate from a side-by-side or tandem processing stage). The transfer unit module 104 can be mounted on the arm 143 (see, for example, see...). Figure 1E , Figure 1F , Figure 1H ) or linear carriage 144 (for example, see Figure 1C The disclosures of, for example, those described in U.S. Patent No. 10,777,438 (titled “Processing Apparatus”, issued September 15, 2020) and International Patent Application No. PCT / US13 / 25513 (titled “Substrate Processing Apparatus”, filed February 11, 2013) are incorporated herein by reference in their entirety.

[0022] refer to Figure 2A and Figure 2B An exemplary arm configuration will be described, to which the transfer unit module 104 can be coupled. The arm 143 and the transfer unit module 104 can be collectively referred to as a substrate delivery device (however, if the transfer unit module 104 is used without the arm 143, then the transfer unit module can be referred to as a substrate delivery device). The arm 143 can be a single non-hinged linkage arm 220 ( Figure 2A ), or articulated boom 222 ( Figure 2B ).

[0023] refer to Figure 2A A single non-hinged linkage boom 220 is rotatably connected to the frame or base 201 of the conveying device and is directly driven by a motor 200BA, which is substantially similar to the direct drive motor 500 described herein (see [link to documentation]). Figures 5A to 5C (Also referred to herein as an axial flux brushless motor / motor). Motor 200BA is coupled to the frame and positioned at the boom rotation axis BSX for directly driving boom 143 in a manner similar to that described herein. Transmission unit module 104 is coupled to the distal end of boom 143 (opposite to boom rotation axis BSX). Although transmission unit module 104 is shown in a configuration with SCARA arm 210 (or dual SCARA arm 210, 210A), transmission unit module 104 may have any suitable arm configuration, including but not limited to those described herein.

[0024] refer to Figure 2B The articulated boom 220 includes an upper boom link 220, which is rotatably coupled at its proximal end to the frame or base 201 of the conveyor (at the boom rotation axis BAX). The other end or distal end of the upper boom link 220 is rotatably coupled at the boom joint rotation axis BEX to the proximal end of a front boom link 221, wherein the transmission unit module 104 is coupled to and supported by the front boom link 221 at its distal end. The upper boom link 220 is directly driven by a motor 200BA, coupled to the frame 201 and located at the boom rotation axis BSX, in a manner similar to that described herein.

[0025] The articulated boom 222 may have a hybrid drive system, wherein a motor 200BA directly drives the upper boom link 220 and the front boom link 221 rotates accordingly (e.g., a belt and pulley drive causes the rotation of the front boom link 221 to follow the frame 201). The front boom link 221 is directly driven by a motor 200BFA located at the axis of rotation BEX of the front boom link 221 and within at least one of the upper boom link 220 and the front boom link 221 (in a manner similar to that described herein, the motor 200BFA is substantially similar to the direct drive motor 500 described herein (see [link to motor 500]). Figures 5A to 5C The articulated boom 222 can have any suitable number of links connected in series with each other, wherein one or more of the links are directly driven by a corresponding motor disposed at a respective axis of rotation of one or more of the links. Suitable examples of booms that may be used in conjunction with this disclosure are described in U.S. Patent Application No. 15 / 215,143, filed July 20, 2016, entitled “Substrate Processing Apparatus,” the disclosure of which is incorporated herein by reference in its entirety.

[0026] Although Figure 2A and Figure 2B The transmission unit module 104 is illustrated as having a SCARA arm 210 (or dual SCARA arms 210, 210A) configuration, but the transmission unit module 104 can have any suitable transmission arm configuration, including but not limited to those described herein. For example, the transmission unit module can have any other desired arrangement, such as frog leg arms 216 ( Figure 2C Configuration, jumping frog arm 217 ( Figure 2D ) configuration, double symmetrical arms 218 ( Figure 2E Configuration, etc. The frog leg arm 216 can be directly driven by a drive motor 200TA located at the shoulder axis SX of the frog leg arm 216. Each end effector of the jumping frog arm 217 can be extended and retracted by the corresponding drive motor 200TA, 200TAA (located at the shoulder axis SX) of the corresponding frog leg arm directly driving the corresponding end effector 211, 211DS. The double symmetrical arm 218 can be extended and retracted by a drive motor 200TA located at the shoulder axis of the double symmetrical arm 218. Motors 200TA, 200TAA are substantially similar to the direct drive motor 500 described herein (see...). Figures 5A to 5C ).

[0027] refer to Figure 2CDirect drive motors 200TWA and 200TWAA (as described herein) can be located at each wrist joint of the frog leg link connected to the end effectors 211 and 211DS. The direct drive motors 200TWA and 200TWAA at the wrist joints can provide for driving the frog leg arm to move through any singularities that may exist during the extension / retraction of the arm. The direct drive motors 200TWA and 200TWAA at the wrist joints can be used to drive the end effectors 211 and 211DS to rotate about the wrist joint, causing the end effectors to deviate from the radial extension path to provide automated wafer alignment and / or auxiliary substrate pick-up and placement. Other joints (e.g., such as those at the elbow or shoulder axis) can be driven (e.g., by any suitable motor and / or transmission) or not driven at all, as the frog leg arm can be extended and retracted only at the wrist axis by motors 200TWA and 200TWAA.

[0028] As another example, see Figure 2F The transmission unit module 104 can be configured as a transmission arm 219. The transmission arm 219 includes at least a first hinged SCARA arm 210 and a second hinged SCARA arm 210A, wherein each arm 210, 210A includes end effectors 211DS, 211, 211DE, 211DT, 211DQ, which are configured to hold at least two substrates S1, S2 side-by-side in a common transmission plane (each substrate holding position of the end effector 211DS shares a common driver for picking up and placing substrates S1, S2), wherein the spacing DX between substrates S1, S2 corresponds to a fixed spacing between the side-by-side substrate holding positions. Reference Figure 2F and Figure 2G The SCARA arm 210 (and arm 210A) includes an upper arm 213, a forearm 212, and end effectors 211, 211DS, 211DE, 211DT, and 211DQ, which are connected in series to form an articulated chain of arm links. At least one of the arm links 213, 212, and 211 is driven by a corresponding drive motor 200TA, 200TAA, 200TFA, 200TFAA, 200TWA, or 200TWAA located at the corresponding joints SX, EX, and WX of the transmission arm (the drive motor is substantially similar to the direct drive motor 500 described herein (see [link to motor description]). Figures 5A to 5CDirect drive. Each of the arm links 213, 212 and (one or more) end effectors 211, 211DS, 211DE, 211DT, 211DQ can be directly driven, although both arm links 212, 211 and (one or more) end effectors 211, 211DS, 211DE, 211DT, 211DQ can be driven (e.g., via corresponding belt / pulley drives), or the end effectors 211, 211DS, 211DE, 211DT, 211DQ can be driven (e.g., driven by the upper arm), while links 213, 212 are directly driven in the manner described herein.

[0029] Suitable examples of the transmission arms that may employ the present disclosure can be found in U.S. Patent 6,231,297, issued May 15, 2001; U.S. Patent 5,180,276, issued January 19, 1993; U.S. Patent 6,464,448, issued October 15, 2002; U.S. Patent 6,224,319, issued May 1, 2001; U.S. Patent 5,447,409, issued September 5, 1995; U.S. Patent 7,578,649, issued August 25, 2009; and U.S. Patent 5,794,487, issued August 18, 1998. U.S. Patent No. 7,946,800, issued May 24, 2011; U.S. Patent No. 6,485,250, issued November 26, 2002; U.S. Patent No. 7,891,935, issued February 22, 2011; U.S. Patent No. 11,569,111, issued January 31, 2023; U.S. Patent No. 8,752,449, issued July 17, 2014; U.S. Patent No. 8,918,203, issued December 23, 2014; and U.S. Patent No. 11,235,935, issued February 1, 2022, and a patent entitled "Dual-Arm Robot" The disclosures of U.S. Patent Application No. 13 / 293,717, filed November 10, 2011, entitled "Arm Robot," and U.S. Patent Application No. 13 / 270,844, filed October 11, 2011, entitled "Coaxial Drive Vacuum Robot," are incorporated herein by reference in their entirety. Suitable examples of belt / pulley drives that may be employed in this disclosure are described in U.S. Patent No. 5,682,795, issued November 4, 1997; U.S. Patent No. 5,778,730, issued July 14, 1998; and U.S. Patent No. 11,201,073, issued December 14, 2021, the disclosures of which are incorporated herein by reference in their entirety.

[0030] refer to Figure 2HThe illustration shows another transmission unit module 104. Similar to the other transmission unit modules described herein, Figure 2H The transmission unit module can be connected to boom 143 (see example). Figure 1H , Figure 2A and Figure 2B ) so that it can be transported by boom 143 to linear carriage 144 (see example) Figure 1G The turret 266 is either transported by the linear carriage 144 or stationary and fixed to the frames (or the frame of the microenvironment 106) of the transport chambers 125A, 125B, 125C, 125D, 125E, 125F, and 125G. The transport unit module 104 includes a frame 266F to which the turret 266 is rotatably coupled for rotation about the turret's rotation axis TAX. The drive section 200 includes a turret driver 200R disposed at the turret's rotation axis TAX, which directly drives the rotation of the turret 266 in the direction T3. The turret driver 200R is substantially similar to the direct drive motor 500 described herein (see [link to description]). Figures 5A to 5C The turret 266 includes transfer arm supports 270A, 270B extending from opposite sides of the turret 266, and one or more corresponding transfer arms 210, 210A, 216, 217, 218 are coupled to the transfer arm supports 270A, 270B. The transfer arm supports 270A, 270B are spaced apart from each other such that the corresponding transfer arms are supported by the turret 266 in a side-by-side arrangement, wherein each of the side-by-side transfer arms includes one or more end effectors 211, 211DS, 211DE, 211DT, 211DQ, the end effectors being configured to hold at least one substrate side-by-side in a common transfer plane, wherein the spacing DX between substrates S1, S2 corresponds to a fixed spacing between the side-by-side substrate holding positions (e.g., similar to the spacing between substrates S1, S2). Figure 2F The disclosure of U.S. Patent No. 10,134,621, issued November 20, 2018, is hereby incorporated herein by reference in its entirety.

[0031] The turret 266 may include one or more linear motors 200LM connected to corresponding transfer arm supports 270A, 270B for moving the corresponding transfer arm supports 270A, 270B in directions 271A, 271B to achieve adjustment of distance DX (or independent adjustment of corresponding distances DX1, DX2 from axis TAX) to take into account the variability from substrate holding stage to substrate holding stage and independent automatic wafer alignment relative to the transfer arms held on the corresponding transfer arm supports 270A, 270B. Turret 266 provides individual or independent Cartesian adjustments for each respective transfer arm support 270A, 270B (and the corresponding transfer arm coupled thereto) to maintain substrate alignment and reduce substrate exchange time, because position correction achieved by Cartesian (e.g., XY) positioning of the end effectors 211, 211DS, 211DE, 211DT, 211DQ of at least one transfer arm coupled to transfer arm support 270A is performed in parallel with Cartesian positioning of the end effectors 211, 211DS, 211DE, 211DT, 211DQ of at least one other transfer arm coupled to transfer arm support 270B. Each transfer arm support 270A, 270B may include a corresponding Z-axis driver 200Z1, 200Z2 for moving the corresponding transfer arm held on transfer arm support 270A, 270B independently of Z-axis movement of the corresponding transfer arm held on the other transfer arm support 270A, 270B. Another Z-axis drive can be provided for moving the turret 266 and any transmission arm connected to it as a unit in the Z direction.

[0032] refer to Figures 5A to 5CThe motor 200R, 200TA, 200TWA, 200TFA, 200TAA, 200TWAA, 200TFAA, 200BA, 200BFA of the drive section 200 of the substrate transport device (i.e., where the substrate transport device itself is the transport unit module 104 or the transport unit module 104 coupled to the boom 143) is an axial flux brushless motor or electric motor 500. The motor 500 is a compact motor with high torque. For example, the compact motor has a stator outer diameter of approximately 170 mm or less (where the stator surrounds / arounds the rotor). For a motor 500 with a stator sealed to the rotor by an isolation wall, the high torque is approximately twice the torque of a radial flux motor with a similar stator diameter and air gap. For a motor 500 with a stator sealed to the rotor using a magnetohydrodynamic seal, the high torque is approximately five times the torque of a radial flux motor with a similar stator diameter and similar air gap. For illustrative purposes only, a motor with a stator outer diameter of approximately 170 mm has a peak torque of approximately 212 Nm and a torque density of approximately 53.0 Nm / kg, although the peak torque may be greater than or less than approximately 212 Nm and the torque density may be greater than or less than approximately 53.0 Nm / kg. With the stator sealed to the rotor via an isolation wall, the power of motor 500 can be reduced by approximately 60% or less compared to motor 500 without such a seal (however, as noted above, even with the power reduction, motor 500 with the isolation wall produces approximately twice the torque of a radial flux motor with a similar stator diameter and air gap).

[0033] Motor 500 has a frame or housing 500H, a stator 501, and a rotor 505. The stator 501 is connected to the frame 500H and has phase coils 501AC, 501BC, and 501CC disposed within an atmospheric volume that maintains an atmospheric environment. The rotor 505 is cooperatively coupled to the stator 501 to generate an output under excitation from the stator, wherein the rotor 505 is disposed in a sealed environment that is sealed and isolated from the atmospheric volume and is different from the atmospheric volume. As will be described herein, a seal 510 seals and isolates the rotor 505 from the stator 501. As will be described herein, the rotor 505 and stator 501 are disposed in an axial clearance arrangement, wherein the axial clearance between the rotor 505 and the stator 501 is provided across the stator 501. A seal or isolation wall 510 is arranged in the axial clearance to seal and isolate each stator 501 from each rotor 505 excited by the stator 501 across the seal 510.

[0034] The stator 501 includes at least one phase or stator coils 501AC, 501BC, 501CC that are interleaved or crossed with each other, and rotors 505A, 505B, 505C, 505D. This axial flux motor 500 is part of... Figures 5A to 5C The motor 500 may include at least one phase coil 501AC, 501BC, 501CC that are axially stacked or arranged (three are illustrated for illustrative purposes only; however, there may be more or fewer than three stator coils). Each stator coil 501AC, 501BC, 501CC is disposed on a corresponding concentrator ring 501AR, 501BR, 501CR (also referred to herein as a stator ring), wherein the concentrator ring (including the coil) forms the stator 501. Rotor 505 includes axially stacked or arranged armatures 505A, 505B, 505C, 505D (also referred to as rotor rings - four are illustrated for illustrative purposes only; however, there may be more or fewer than four depending on the number of concentrator rings 501AR-501CR), wherein concentrator rings 501AR-501CR extend between the stacked armatures 505A-505D to stagger or cross with the stacked armatures 505A-505D to have an axially spaced arrangement, wherein there is an axial gap between the stator portion and the rotor portion (see [link to documentation]). Figure 5A and Figure 5B The axial clearance arrangement is configured such that the stator 501 excites the rotor 505 across the axial clearance.

[0035] As described herein, the substrate delivery device is used in at least a (high) vacuum environment. The rotor 505 may be constructed of a magnetically conductive material (e.g., without permanent magnets) to be configured for use in a vacuum environment. At least a portion of the interior of the arm link of the substrate delivery device may be exposed to the vacuum environment, while other portions of the interior of the arm link may be exposed to the atmospheric environment. For example, as in... Figure 5A As can be seen, the stator 501 is located within the internal portion of the arm connecting rod exposed to the atmospheric environment, while the rotor 505 is located within the internal portion of the arm connecting rod exposed to the vacuum environment. To maintain the separation between the vacuum environment and the atmospheric environment, the motor 500 (or arm connecting rod) includes an isolation wall or seal 510, i.e., a static seal (i.e., no moving parts). The sealed environment (e.g., maintaining a vacuum) and the atmospheric environment within the sealed volume can be sealed and isolated from each other by the isolation wall 510.

[0036] As described herein, rotor 505 is made of a magnetically conductive material, enabling motor 500 to operate as an induction motor having an axial air gap between stator 501 and rotor 505 between about 0.3 mm and about 1.0 mm, and preferably between about 0.3 mm and 0.8 mm. Isolation wall 510 is axially located between each rotor element (e.g., each rotor ring 505A-505D) and each stator element of the excitation rotor 505 (e.g., each stator / concentrator ring 501AR-501CR). For example, the shape and dimensions of isolation wall 510 are designed to conform to at least one of stator 501 and rotor 505. Isolation wall 510 may follow the profile of the air gap between the stator 501 concentrator rings 501AR-501CR (with corresponding coils 501AC-501CC) and the rotor 505 armature 505A-505D of rotor 505. Figure 5A and Figure 5B As can be seen, the isolation wall 510 has a serpentine cross-section that follows the serpentine air gap between the stator 501 and the rotor 505. The serpentine cross-section includes at least one sealing disc portion 510D that spans the entire axial gap and radially separates the stator 501 from the rotor 505.

[0037] The isolation wall 510 is made of a non-magnetic material with low electrical conductivity, which can withstand pressure differential loads (e.g., between atmospheric and vacuum environments) and allows magnetic fields to pass between the stator 501 and the rotor 505. Suitable materials for constructing the isolation wall 510 include, but are not limited to, 300 series stainless steel.

[0038] The isolation wall 510 can be constructed as a single integral component (see Figure 5A The seal is hydroformed or welded in a manner similar to constructing a metal bellows, resulting in a solid, integral seal without radial cracks. The isolation wall 510 consists of two or more isolation rings 510R1-510R6, which can be assembled / stacked together with the motor concentrator rings 501AR-501CR and the rotor armatures 505A-505D. Each of the isolation rings 510R1-510R6 seals against one or more adjacent isolation rings 510R1-510R6 (e.g., via any suitable seal, such as an O-ring or other static seal), wherein the end isolation ring (e.g., isolation rings 510R1, 510R6) seals against adjacent isolation rings (e.g., isolation ring 510R6 seals against adjacent isolation ring 510R5, and isolation ring 510R1 seals against adjacent isolation ring 510R2) and the corresponding isolation wall end cap 510RE (which is an integral, single-piece structure or component), which is located at the connection between the isolation wall 510 and the motor 500 (see...). Figure 3CA seal is formed between the housing 500H or the inside of the arm link (e.g., via any suitable seal, such as an O-ring or other static seal).

[0039] Motor components (e.g., stator concentrator rings 501AR-501CR and rotor armatures 505A-505D) can be assembled around isolation wall 510. Isolation wall 510 can provide support for coils 501AC-501CC, which can be fitted onto or otherwise positioned on the isolation wall. For example, reference coil 501AC, when the isolation wall 510 is assembled (e.g.) Figure 5A As shown in the diagram, the isolation wall 510 is a single, integrated component, or as... Figure 5B In the middle, the isolation wall 510 is formed by isolation rings 510R1 and 510R2), and the coil is wound around the isolation wall 510 and supported by the isolation wall 510 (in Figure 5A and Figure 5B In this context, the windings of coil 501AC extend into / out of the page. Concentrator ring 501AR is constructed of at least two portions 501ARP1, 501ARP2, each portion 501ARP1, 501ARP2 being radially inserted (e.g., toward the center / rotation axis of motor 500) into isolation wall 510 to tightly engage and interconnect with each other portion of the corresponding coil 501AC and concentrator rings 501ARP1, 501ARP2. Referring again to coil 501AC, concentrator ring 501AR is radially inserted into isolation wall 510 to tightly engage with coil 501AC (e.g., for electrical connection to coil 501AC), wherein isolation wall 510 tightly engages with concentrator ring 501AR. As used herein, the expressions “tightly engaged” or “being tightly engaged” mean supported, substantially touching, contacting, and / or close to. The components of coils 501BC, 501CC and corresponding concentrator rings 501BR, 501CR can be assembled into the isolation wall 510 in a manner similar to that described above with respect to coil 501AC and concentrator ring 501AR.

[0040] As described above, the partition wall 510 includes stacked sealing disc portions 510D that radially separate the stator 501 from the rotor 505 across the entire axial clearance. Each of the sealing disc portions 510D is an integral, single-piece structure or component that can be joined together (e.g., via... Figure 5A Welding or via, for example Figure 5B (The seal in the middle) to form an isolation wall 510. Assembly of the motor 500 includes step-by-step assembly. For example, still referring to... Figure 5A and Figure 5BStarting from end 500E1 of motor 500, rotor ring 505D fits tightly to isolation wall end cap 510RE. Sealing disc 510D (at its radially outer side) is attached to isolation wall end cap 510RE, and another sealing disc 510D (at its radially inner side) is attached to sealing disc 510D to form a recess in which coil 501CC and concentrator ring 501CR are disposed. Coil 501CC is wound within the recess, and concentrator ring portions 501ARP1 and 501ARP2 of concentrator ring 501CR can be inserted into the recess in the manner described herein, such that coil 501CC is supported by isolation wall 510, and concentrator ring 501CR fits tightly to the recess of isolation wall 510. Rotor ring 505C is assembled to rotor ring 505D, and another sealing disc 501D is connected to another sealing disc 510D at its radially outer side, and yet another sealing disc 510D (at its radially inner side) is connected to sealing disc 510D to form a recess in which coil 501BC and concentrator ring 501BR are disposed. Coil 501BC is wound within the recess, and concentrator ring portions 501ARP1 and 501ARP2 of concentrator ring 501BR can be inserted into the recess in the manner described herein, such that coil 501BC is supported by isolation wall 510, and concentrator ring 501BR fits tightly into the recess of isolation wall 510. The assembly of other rotor rings 505A-505D, coils 501AC-501CC, concentrator rings 501AR-501CR, and sealing disc 510D is carried out in a similar manner to that described above, so that the required number of stator rings and rotor rings can be assembled and sealed and isolated from each other.

[0041] Although some of the transmission arms are described herein as having a single-ended end effector 211, the transmission arm may include any one or more of the following: a single-ended end effector 211; (one or more) a double-ended end effector 211DE (each configured to hold at least two substrates S1, S2 on opposite sides of the wrist axis WX) (see Figure 3AThe transfer unit module 104 includes: a side-by-side end effector 211DS; a three-terminal end effector 211DT having substrate stages radially spaced approximately 120° apart; and a four-terminal end effector 211DQ having holding stages radially spaced approximately 90° apart. In the case of multiple arms in the transfer unit module 104, different end effectors 211, 211DE, 211DS, 211DT, and 211DQ can be used on the multiple arms in any suitable combination. Rapid exchange of substrates at the substrate holding position can be performed by a single transfer arm with a two-terminal end effector 211DE by picking up / placing a first substrate from / to the substrate holding position, rotating the transfer arm as a unit to change the facing orientation of the two-terminal end effector 211DE, and then placing / picking up a second substrate from / to the same substrate holding position. Rapid substrate exchange in a holding position using a single transfer arm with a dual-end end effector 211DE, a triple-end end effector 211DT, and a quadruple-end end effector 211DQ can be achieved by rotating the end effector using a direct-drive motor located at the corresponding wrist joint / axis WX. For example, the transfer arm extends to pick up / place a first substrate from the substrate holding position to the substrate holding position, the transfer arm retracts, and the end effector rotates to change the facing orientation of the end effectors 211DE, 211DT, and 211DQ, and then extends to place a second substrate into / pick up a second substrate from the same substrate holding position. Rapid substrate exchange using multiple transfer arms can be achieved by extending the first transfer arm to pick up / place a substrate from the substrate holding position, retracting the first transfer arm, and then extending the second transfer arm to place / pick up a second substrate from the same substrate holding position (note that one or more of the multiple arms can be configured, as indicated above, to achieve rapid substrate exchange by themselves).

[0042] In cases where the end effector includes more than one holding stage, different holding stages can be used to transport objects with different degrees of cleanliness. For example, one holding stage may be used or designated to transport the substrate S to be processed (e.g., a substrate in process), while another holding stage may be used or designated to transport processing equipment / accessories within the substrate processing apparatus (such as those described herein), which may not have the same degree of cleanliness as the substrate S in process.

[0043] refer to Figure 2F , Figure 2G , Figure 2H , Figures 3A to 3C , Figures 4A to 4B , Figures 6A to 6B , Figure 7 , Figure 8 and Figures 9A to 9C The exemplary arm and motor 500 configuration will be described with reference to a SCARA or radius transfer arm, which can be used on the boom 143 (e.g., Figure 2A and Figure 2B As illustrated, one or more of the SCARA arms can be mounted on boom 143 or used without boom 143. (See reference.) Figure 2F and Figure 2G The SCARA arms 210 and 210A are basically similar to Figures 3A to 3C The SCARA arm shown in the figure, although in Figure 3, the SCARA arm is shown as having dual end effectors 211, 211DS, 211DE, 211DT, 211DQ configured to rotate about a common wrist axis WX. Figure 2A The boom link 220 of boom 143 in the middle can be basically similar to Figure 3A The upper arm linkage of the SCARA arm, and Figure 2B The boom links 220 and 221 of boom 143 can be basically similar to Figure 3B The upper arm and forearm links of the SCARA arm (note that the arm movement is separate from and different from the kinematic movement of the SCARA arm (or transmission unit module 104) to which it is attached), wherein one or more links of the arm 143 move in a manner similar to that of the SCARA arm (or transmission unit module 104). Figure 3A The arm linkage is configured and driven to rotate in a similar manner.

[0044] For illustrative purposes, refer to Figures 2A to 9C The substrate delivery device includes a frame or base 201 to which an arm is coupled. The arm has an end joint (e.g., at the shoulder axis SX) about which it rotates and extends. The arm has more than one arm link 213, 212, 212L, 212R and end effectors 211, 322DC, 211DE, 211DT, 211DQ attached thereto. Each arm link 213, 212 is connected in series with the (corresponding) end effector 211, 322DC, 211DE, 211DT, 211DQ at the distal end of the SCARA arm.

[0045] As in Figure 3A , Figure 4A , Figure 6A , Figure 7 , Figure 8 and Figure 9BAs can be seen, the arm has a distributed drive section 200, which has more than one degree of freedom. The distributed drive section 200 is operatively coupled to the arm to enable the end effectors 211, 322DC, 211DE, 211DT, 211DQ to move in accordance with the more than one degree of freedom. Arm links 212, 212L, and 212R, of the more than one arm link 213, 212, 212L, and 212R, are direct drive links that depend on and are directly driven by the direct drive motors 200TFA and 200TFAA of the distributed drive section 200, and are located on the SCARA arm at link joints distal to the end joint SX (e.g., such as at elbow axes EX, EXL, and EXR). The end effector 211, 322DC, 211DE, 211DT, 211DQ, or at least one other arm link 212, 212L, 212R, is directly driven by another direct drive motor 200TWA1, 200TWA2, 200TFA, 200TFAA from the distributed drive section 200 on the arm, and follows the direct drive link 212, 213. For illustrative purposes only. Figure 3A , Figure 4A , Figure 7 , Figure 8 The arm in Figure 9 is illustrated as having drive motors 200TA, 200TFA, 200TWA1, and 200TWA2 at each arm joint or axis SX, EX, WX (e.g., a full motor configuration); however, one or more of the arm links and end effectors may be servo-driven, such as... Figure 6A and Figure 2H The illustrations are shown in the figure (as described in this article).

[0046] refer to Figure 3A Each of the drive motors 200TA, 200TFA, 200TWA1, and 200TWA2 directly drives the corresponding arm link 213, 212 or end effector 211, 211DS, 211DE, 211DT, and 211DQ, and may each be referred to as a direct drive motor. As described herein, the motors 200TA and 200TFA, located at the shoulder axis AX and elbow axis EX, are substantially similar to the direct drive axial flux motor 500 described herein, wherein each direct drive motor 500 on the SCARA arm has a sealed rotor 505 that is isolated from the atmospheric environment of the stator 501 of the direct drive motor 500 (see [link to documentation]). Figure 5A and 5B Sealed isolation. Motors 200TWA1 and 200TWA2 can be substantially similar to axial flux motor 500; although motors 200TWA1 and 200TWA2 can be substantially similar to Figure 3BThe radial flux motor 300 illustrated herein is a radial flux motor (also referred to herein as a radial flux brushless motor / motor). Motors at each joint of the SCARA arm provide a non-radial or offset extension path for the end effector, wherein the end effectors 211, 211DS, 211DE, 211DT, and 211DQ are kept aligned with the substrate stage along the path by rotating the end effector about the wrist axis SX via corresponding wrist motors 200TWA1 and 200TWA2 (see [reference needed]). Figure 3A ).

[0047] Also refer to Figure 3C And also refer to Figure 5A and Figure 5B The motor 500 includes a housing 500H that houses at least a stator 501, wherein an isolation wall 500 is sealed against the housing 500H to isolate the stator 501 from any vacuum environment (where the motor or transmission arm is used in a vacuum environment). When the motor 500 is positioned at the elbow axis EX or the wrist axis WX, the housing 500H is coupled to a surface 398 of the arm link 213 such that the stator 501 extends through surface 398 into the arm link 213, which opposes a surface 396 of the next link 212 (or end effector 211, 211DS, 211DE, 211DT, 211DQ) in the tandem arm link. When the motor 500 is positioned at the shoulder axis SX, the housing 500H is coupled to any suitable motor support 397 of the frame 201 such that the stator 501 is at least partially disposed within the frame 201.

[0048] A housing 500H extends above surface 398 (or frame 201) to form a support to which rotor 505 is coupled. For example, housing 500H forms an orifice to which the inner wall includes one or more bearings 390 and one or more seals 380. Rotor 505 is coupled to an output shaft or drive shaft 505DS that extends through the orifice of housing 500H, such that drive shaft 505DS (and rotor 505 coupled thereto) is supported by one or more bearings 390 and sealed against housing 500H by seals 380. Seals 380 can be any suitable seal, such as magnetohydrodynamic seals. The drive shaft 505DS is connected to the surface 396 of the next link 212 (or end effector 211, 211DT, 211DQ, 211DS, 211DE) such that the next link 212 (or end effector 211, 211DS, 211DE, 211DT, 211DQ) is supported by the drive shaft 505DS and is integral with the drive shaft 505DS (e.g., the drive link is a direct drive link with an integral motor rotor of a direct drive motor). As in Figure 3CAs can be seen, the direct drive motor 500 at joints SX, EX, and WX and the direct drive links 212, 211, 211DE, 211DS, 211DT, and 213 driven by the direct drive motor 500 are connected to each other via a transmissionless coupling formed by the coupling between the stator 501 and the rotor 505. The surface 396 of the next link 212 may be a recessed surface to maintain the stacked arm links in close proximity to each other, wherein a portion of the motor housing is disposed within the height of the two arm links.

[0049] refer to Figure 3B The wrist axis WX may include one or more radial flux motors 300 (see...) Figure 3B The device comprises a stator 300S, a rotor 300R, and an output shaft or drive shaft 300DS coupled to the rotor 300R. End effectors 211, 211DS, 211DE, 211DT, and 211DQ are coupled to the drive shaft 300DS for rotation about the wrist axis WX. The stator 300S can be sealed and isolated from any vacuum environment in which the transmission arm operates by any suitable insulating wall 300W. A suitable example of a radial flux motor that can be incorporated into the wrist axis WX is described in U.S. Patent No. 9,948,155, issued April 17, 2018, which is previously incorporated herein by reference in its entirety.

[0050] refer to Figure 3C , Figure 4A and Figure 6A Motor 500 can be mounted as a modular unit to and removed from arm links 212, 212L, 212R, 213 or frame 201, such that one or more direct drive motors 500 at the corresponding joints or axes SX, EX can be configured as part of a pulley drive, and / or one or more direct drive motors at the joints or axes WX can be interchanged with the pulleys of the pulley drive. For example, motors 200TFA, 200TFAA can be... Figure 5C The modular approach of the motor configuration (e.g., all-motor configuration) illustrated in the figure is similar to... Figure 6A The motor configuration illustrated herein (e.g., with drive pulley 620 for follow-up configuration) can be selectively replaced or interchanged. Figure 3A The arm link 212 in the middle can be connected to the arm link 212L including the wrist driven pulley 650 (see... Figure 6B The switching is performed to complete the transmission for causing the end effectors 211, 211DS, 211DE, 211DT, and 211DQ to follow the surface 398 of the arm link 213. Therefore, the SCARA arm can be used in hybrid and all-motor configurations (such as in...). Figure 3A , Figure 7 and Figure 8Selectively configured among ( ), wherein, in a hybrid configuration, at least one of the end effectors 211, 211DS, 211DE, 211DT, 211DQ or more than one arm link 212, 212L, 212R, 213 follows a direct drive link (such as in Figure 2H and Figure 6A (in the middle); In the all-motor configuration, the end effectors 211, 211DS, 211DE, 211DT, 211DQ or at least one other arm link 212, 212L, 212R are directly driven by another direct drive motor, such that in the all-motor configuration, each arm link 212, 212L, 212R, 213 and the end effector are directly driven by the corresponding direct drive motor.

[0051] refer to Figure 3B Motors 500 and 300 include any suitable encoders 385 and 386 for sensing or otherwise detecting the rotation of the corresponding rotors 505 and 300R. Encoders 385 and 386 can be coupled to controller 110 in any suitable manner, such as using an electrical conductor EC or a wireless connection. Encoders 385 and 386 can be any suitable encoder, including but not limited to optical, magnetic, and electromagnetic induction encoders. Each encoder 385 and 386 includes a read head 385R and 386R and encoder rails 385T and 386T. The read heads 385R and 386R are coupled to motor housings 500H and 300H in a fixed position in any suitable manner and can be isolated from any vacuum atmosphere by any suitable insulating wall (e.g., optically transparent and / or non-magnetic). Encoder rails 385T and 386T are coupled to rotors 505 and 300R and rotate with rotors 505 and 300R as a unit. Encoders 385 and 386 provide signals to controller 110 that reflect the position of the motor, which are used to realize the kinematic movement of the transmission arm and / or boom 143 of transmission module unit 104.

[0052] Despite Figure 3A The intermediate transport unit module 104 or substrate transport device is illustrated as having a single SCARA arm, but more than one independently movable SCARA arm may be provided. For example, see reference... Figure 2A , Figure 2B and Figure 8The frame 201 includes, for example, two drive motors 200TA1 and 200TA2 arranged coaxially at the shoulder axis SX for directly driving the corresponding upper arm 213 of one of the SCARA arms 210 and 210A. Each SCARA arm 210 and 210A includes a drive motor 200TFA at the elbow axis EX for directly driving the corresponding forearm 212. Each SCARA arm 210 and 210A may include a drive motor 200TWA at the wrist axis WX for directly driving one or more corresponding end effectors 211, 211DS, 211DE, 211DT, and 211DQ. The upper arm 213 and forearm 212 may have substantially equal lengths from joint center to joint center (see [link to relevant documentation]). Figure 2A and Figure 2B However, the upper arm 213 and the forearm 212 have unequal lengths from the joint center to the joint center. For illustrative purposes, in Figure 8 In this configuration, for each of the SCARA arms 210 and 210A, the forearm 212 is shorter than the upper arm 213. The shorter forearm 212 is used to position the forearm 212 of the SCARA arm 210 in a common plane with the forearm 212 of the SCARA arm 210A. Similarly, the end effectors 211, 211DS, 211DE, 211DT, and 211DQ of the SCARA arms 210 and 210A can be positioned in a common plane. The drive motors 200TA2, 200TFA, and 200TWA of the SCARA arm 210 can be driven substantially simultaneously to extend the end effectors 211, 211DS, 211DE, 211DT, and 211DQ along a substantially straight path or trajectory. The drive motors 200TA1, 200TFA, and 200TWA of the SCARA arm 210A can be driven substantially simultaneously to extend the end effectors 211, 211DS, 211DE, 211DT, and 211DQ along a substantially straight path or trajectory.

[0053] Refer again Figure 2H As described in this article, one or more of the arm links can rotate automatically rather than be directly driven. Figure 2H An example is illustrated where the upper arm link 213 of each transmission arm is directly driven by a corresponding motor 200TA, 200TAA, while the forearm link and end effector rotate as a follower (e.g., via any suitable transmission device, such as those described herein). Figure 6A and Figure 6B The illustrated and described substantially similar belt and pulley drives are used to maintain the alignment of the end effector along the radial axes of extension and retraction. For example, the drive pulley DP1 may be positioned within the upper arm 213 at the shoulder axis SX, wherein the shoulder drive pulley is positioned similarly to the one described above. Figure 6AThe pulley 610 is fixed to one of the corresponding motor housing 500H or transmission arm supports 270A, 270B in the manner described. The elbow driven pulley EP1 is disposed within the upper arm 213 at the elbow axis EX and fixed to the forearm 212 so as to rotate with the forearm 212 as a unit. One or more belts (or straps) connect the shoulder drive pulley DP1 to the elbow driven pulley EP1 to constrain the rotation of the forearm 212 when the upper arm 213 is rotated by the corresponding drive motors 200TA, 200TAA. The elbow drive pulley EP2 is similar in configuration to... Figure 6A The pulley 610 is fixed (non-rotatably) to the surface 398 of the upper arm 213 (e.g., the surface facing the forearm 212) in the manner described. The wrist driven pulley WP1 is disposed within the forearm 212 at the wrist axis WX and fixed to the end effectors 211, 211DS, 211DE, 211DT, 211DQ so as to rotate as a unit with the end effectors 211, 211DS, 211DE, 211DT, 211DQ. One or more belts (or straps) connect the elbow drive pulley EP2 to the wrist driven pulley WP1 to constrain the rotation of the end effectors 211, 211DS, 211DE, 211DT, 211DQ when the forearm 212 rotates in response to the rotation of the upper arm 213 caused by the respective drive motors 200TA, 200TAA. A pulley ratio of 1:2 and 2:1 is used in the upper arm 213 and forearm 212, respectively, to maintain the alignment of the end effectors 211, 211DS, 211DE, 211DT, and 211DQ along the extended and retracted radial paths (the extended / retracted radial paths through the shoulder axis SX).

[0054] Figure 6A The illustration shows an example of a drive pulley (of the follower drive) fixed or non-rotatably secured to surface 398 of upper arm 213 (or the (top) surface 398A of motor housing 500H or transmission arm supports 270A, 270B; for convenience, the identifier "top" is used, but note that any suitable identifier may also be used to denote the outer surface of the turret oriented in any suitable direction)). A similar pulley fixation can be used relative to the shoulder drive pulley at shoulder axis SX. This exemplary fixation of the drive pulley (of the follower drive) can be used for any drive pulley of the follower drive in either the transmission arm or the link of boom 143 of the transmission module unit 104 described herein. Reference Figure 6AThe illustration depicts an exemplary dual SCARA transport arm, wherein forearms 212R, 212L extend from opposite ends of a common upper arm 312. Suitable examples of transport devices with a common upper arm arrangement that may employ the present disclosure are described, for example, in U.S. Patent No. 8,376,685, issued February 19, 2013, and U.S. Patent No. 8,752,449, issued June 17, 2014, the disclosures of which are incorporated herein by reference in their entirety. A dual SCARA transport arm may include an upper arm 213 and two forearms 212R, 212L attached to opposite ends 213R, 213L (e.g., relative to a shoulder axis SX) of a common (generally rigid and non-hinged) upper arm 213. Forearms 212R are coupled to the end 213R of the upper arm 213 at an elbow axis EXR. Forearms 212L are coupled to the end 213L of the upper arm 213 at an elbow axis EXL. Each forearm 212R, 212L has at least one end effector 211, 211DS, 211DE, 211DT, 211DQ connected to it at the corresponding wrist axis WXR, WXL. Figure 6A In this embodiment, the rotation of end effectors 211, 211DS, 211DE, 211DT, and 211DQ can follow the corresponding upper arm portion; however, drive motors 500 and 300 can be located at the wrist axis to directly drive the rotation of end effectors 211, 211DS, 211DE, 211DT, and 211DQ. In the manner described herein, drive motors are provided at each axis SX, EXR, EXL, WXR, and WXL to achieve nonlinear or offset extension of end effectors 211, 211DS, 211DE, 211DT, and 211DQ, wherein the drive motors are driven substantially simultaneously to extend end effectors 211, 211DS, 211DE, 211DT, and 211DQ along radial or non-radial paths or trajectories.

[0055] The upper arm 213 is connected to the frame 201 and in a manner similar to that described in this article. Figures 3A to 3C The described method is directly driven by drive motor 200TA. Each forearm 212R, 212L is similar to that described in this article. Figures 3A to 3CThe described configuration is directly driven by the corresponding drive motor 200TFA; however, to accommodate the fixed connection of the elbow drive pulley 610 to the surface 398 of the upper arm 213, the drive shaft 505DS may include an annular extension 505DSE extending from the drive shaft to at least partially surround (to maintain the compact height of the motors 500 and 200TFA) a bearing 390 that supports the drive shaft 505DS and connects it to the housing 500H. The housing 500H includes an annular extension 500HE coplanar with the annular extension 500DSE of the drive shaft 500DS, wherein a seal 380 is disposed between the annular extension 500HE and the annular extension 500DSE.

[0056] like Figure 6A As illustrated, the elbow drive pulley 610 is mounted on the support column 610S. The elbow drive pulley 610 and the support column 610S can be an integral, one-piece construction or connected to each other in any suitable manner (e.g., using any suitable mechanical and / or chemical fasteners). The support column 610S (and the elbow drive pulley 610) is non-rotatably connected to an annular extension 500HE of the housing 500H, as described above, which is connected to the surface 389 of the upper arm 213 (e.g., fixing the elbow drive pulley 610 to surface 398). Figure 6A As can be seen, the strut 610S can have any suitable height or length depending on the arm configuration, such that at least a portion of the forearms 212R, 212L and the corresponding end effectors 211, 211DS, 211DE, 211DT, 211DQ are stacked one on top of the other (e.g., at least the forearms and end effectors are in a stacked position). Figure 6A (The retracted configuration is shown in the diagram).

[0057] Also refer to Figure 6BForearms 212R and 212L are configured to receive an elbow drive pulley 610, a wrist driven pulley 650, and one or more belts connecting the elbow drive pulley 610 to the wrist driven pulley 650. While this document describes the forearm configuration with respect to forearm 212L, it should be understood that forearm 212R has a substantially similar configuration. Forearm 212L has a housing 660 including a driven pulley recess 661 and a drive pulley recess 662. The driven pulley recess 661 and the drive pulley recess 662 are connected by belt recesses 663A and 663B. The drive pulley recess 662 includes a drive shaft mount 620 to which a drive shaft 505DS is coupled, such that the forearm 212L rotates as a unit with respect to the drive shaft 505DS. With the forearm 212L mounted to the drive shaft 505DS, the elbow drive pulley 610 extends into the drive pulley recess 662 and surrounds the drive shaft mount. The strut 610S may include an annular cup 610SC that extends from the strut 610S and interacts with the drive pulley recess 662 to form a labyrinth seal or otherwise substantially close the drive pulley recess 662.

[0058] The driven pulley recess 661 is shaped and sized to receive the wrist driven pulley 650 (the ratio between the elbow drive pulley 610 and the wrist driven pulley 650 is 1:2 or any other suitable ratio). The driven pulley recess includes a bearing mount 665 to which a bearing 666 is coupled, wherein the wrist driven pulley 650 is coupled to the bearing 666 for rotation about the wrist axis WX. Belts 651A and 651B extend through corresponding belt channels 663A and 663B and are wound around the drive pulley 610 and driven pulley 650 in opposite directions, such that each belt 651A and 651B is always tensioned against the other belt 651A and 651B. End effectors 211, 211DS, 211DE, 211DT, and 211DQ are coupled to the wrist driven pulley 650 to rotate as a unit with the wrist driven pulley 650. The end effectors 211, 211DS, 211DE, 211DT, and 211DQ are shaped and sized such that the end effectors substantially enclose the driven pulley recess 661 (or form a labyrinth seal with the driven pulley recess 661). The housing 660 of the forearm 212L may include any suitable cover for enclosing the channels 663A and 663B. As described herein, in Figure 6AIn this configuration, the rotation of end effectors 211, 211DS, 211DE, 211DT, and 211DQ follows the surface 389 of the upper arm 213. As the transfer arm extends, the rotation of end effectors 211, 211DS, 211DE, 211DT, and 211DQ is constrained, ensuring that the end effectors remain aligned with and travel along the radial axis R of the extension and retraction.

[0059] refer to Figure 4A and Figure 4B The illustration is similar to Figure 6A The transmission arm; however, the transmission arm may include an axial flux direct drive motor 500 at the shoulder axis SX and elbow axes EXR, EXL, and a radial flux direct drive motor 300 at the wrist axes WXR, WXL (although an axial flux motor 500 may be used at the wrist axis). As described herein, motors are provided at each joint or axis SX, EXR, EXL, WXR, WXL to enable movement of end effectors 211, 211DS, 211DE, 211DT, 211DQ along radial and non-radial travel paths.

[0060] refer to Figure 7 , Figure 6A The dual SCARA arm can include a drive motor at each joint (SX, EXR, EXL, WXR, WXL) and has arm links of varying lengths. For example, in Figure 7 In this configuration, the forearm 212 is shorter than the corresponding upper arm portions 213R and 213L. The shorter forearm 212 is used to position the forearms 212R and 212L in a common plane. Similarly, the end effectors 211, 211DS, 211DE, 211DT, and 211DQ, coupled to the forearms 212R and 212L, can be positioned in a plane common to each other. The drive motors 200TA, 200TFA, and 200TWA can be driven substantially simultaneously to extend end effectors(s)211, 211DS, 211DE, 211DT, and 211DQ along a substantially straight path or trajectory. When an end effector corresponding to one of the arm portions 213R and 213L extends to pick up or place a substrate, the end effector corresponding to the other arm portion 213R or 213L can remain retracted (so as not to pick up or place a substrate) or extend in substantially the opposite direction (so as to pick up or place a substrate).

[0061] refer to Figures 9A to 9CAnother exemplary transfer arm configuration is shown. The transfer arm may include a frame 201, a single arm link 213, and one or more end effectors 211, 211DS, 211DE, 211DT, 211DQ. The single arm link 213 is a non-hinged arm link that is coupled to and directly driven by a drive motor 200TA (which is substantially similar to drive motor 500) to rotate about a shoulder axis SX. The connection between the single arm link 213 and the drive motor 200TA can be substantially similar to that described herein. Figure 3C The described connection. Each of the end effectors 211, 211DS, 211DE, 211DT, and 211DQ is connected to and directly driven by the corresponding drive motors 200TWA1 and 200TWA2 to rotate about the wrist axis WX. The connection between the end effectors 211, 211DS, 211DE, 211DT, and 211DQ and the corresponding drive motors 200TWA1 and 200TWA2 is substantially similar to that described herein. Figure 3B The connection described. Although drive motors 200TWA1 and 200TWA2 are illustrated as radial flux motors 300, one or more of drive motors 200TWA1 and 200TWA2 may be axial flux motors 500.

[0062] Still referencing Figures 9A to 9C And also refer to Figure 10 For descriptive purposes, end effectors will be distinguished and designated as 211A, 211B, etc. The transfer arm is... Figure 9C The diagram shows the setting in relation to Figure 1D Within the essentially similar transfer chamber 125C shown in the diagram, there are side-by-side process modules 130T1 and 130T2 (in... Figure 9C and Figure 10(Only two are shown in the diagram). In operation, to place or pick up the substrate S into the process module 130T1 using the end effector 211B, the transfer arm rotates as a unit in a clockwise or counterclockwise direction, such that the end effector 211B faces the side of the transfer chamber 125C that is connected to the process module 130T1. The motor 200TA can rotate the arm link 213, while the motors 200TWA1 and 200TWA2 can be energized to maintain the end effectors 211A and 211B substantially aligned with the arm link 213 throughout the rotation of the arm link 213. To extend the end effector 211B into the process module 130T1, the drive motor 200TA rotates the arm link 213 clockwise, while the motor 200TWA2 rotates the end effector 211B counterclockwise, such that the substrate S travels into the process module 130T1 along a substantially straight path SLP1 offset (relative to the shoulder axis SX). Motor 200TWA1 can be energized to maintain end effector 211A substantially aligned with arm link 213 throughout the rotation of arm link 213 and the extension / retraction of end effector 211B to / from process module 130T1. Retraction of end effector 211B from process module 130T1 is achieved in a manner substantially the opposite of the extension into process module 130T1 described above. Extension and retraction of end effector 211A into process module 130T1 are achieved in a manner similar to that described above with respect to end effector 211B.

[0063] To place or pick up the substrate S into the process module 130T2 using the end effector 211A, the transfer arm rotates as a unit in a clockwise or counterclockwise direction, such that the end effector 211A faces the side of the transfer chamber 125C that is connected to the process module 130T2. Motor 200TA can rotate the arm link 213, while motors 200TWA1 and 200TWA2 can be energized to maintain the end effectors 211A and 211B substantially aligned with the arm link 213 throughout its rotation. To extend the end effector 211A into the process module 130T2, motor 200TA drives the arm link 213 to rotate counterclockwise, while motor 200TWA1 rotates the end effector 211B clockwise, causing the substrate S to travel into the process module 130T2 along a substantially straight path SLP2 offset (relative to the shoulder axis SX). Motor 200TWA2 can be energized to maintain end effector 211B substantially aligned with arm link 213 throughout the rotation of arm link 213 and the extension / retraction of end effector 211A to / from process module 130T2. Retraction of end effector 211A from process module 130T2 is achieved in a manner substantially the opposite of extension into process module 130T2 as described above. Extension and retraction of end effector 211B into process module 130T2 are achieved in a manner similar to that described above regarding end effector 211A.

[0064] To place or pick up the substrate S into the loading lock 102A using the end effector 211A, the transfer arm rotates as a unit in a clockwise or counterclockwise direction, such that the end effector 211A faces the side of the transfer chamber 125C that is connected to the loading lock 102A. Motor 200TA can rotate the arm link 213, while motors 200TWA1 and 200TWA2 can be energized to maintain the end effectors 211A and 211B substantially aligned with the arm link 213 throughout the rotation of the arm link 213. To extend the end effector 211A into the loading lock 102A, drive motor 200TA rotates the arm link 213 counterclockwise, while motor 200TWA1 rotates the end effector 211A clockwise, causing the substrate S to travel along a substantially straight path SLP3 offset (relative to the shoulder axis SX) into the loading lock 102A. Motor 200TWA2 can be energized to maintain end effector 211B substantially aligned with arm link 213 throughout the rotation of arm link 213 and the extension / retraction of end effector 211A to / from loading lock 102A. Retraction of end effector 211A from loading lock 102A is achieved in a manner substantially the opposite of the extension into process module 130T2 described above. Extension and retraction of end effector 211B into loading lock 102A is achieved in a manner similar to that described above regarding end effector 211A. End effectors 211A and 211B extend along a substantially straight path SLP4 into loading lock 102B in a manner substantially similar to that described above regarding extension into process module 130T1. The transfer arm can rotate as a unit in a clockwise or counterclockwise direction in a manner similar to that described above to pick up / place substrates into either process module 130 or loading locks 102A and 102B connected to transfer chamber 125C (see above). Figure 1D ).

[0065] refer to Figures 13A to 14D The illustration shows an exemplary transfer arm configuration of a substrate transfer device. The substrate transfer device includes a base or frame 201, at least two parallel arms 1300A, 1300B, 210, 210A, and a distributed drive section 200. Each arm 1300A, 1300B, 210, 210A has an end joint (such as a shoulder axis SX). Figures 13A to 13C ) or boom axis BX ( Figures 14A to 14D Arms 1300A, 1300B, 210, and 210A rotate and extend about end joints. The end joints are common to each arm 1300A, 1300B, 210, and 210A, and each arm 1300A, 1300B, 210, and 210A is connected to the base or frame 201 via these common end joints. Each arm has at least one arm link 213, 213A (see [link to arm link]). Figures 13A to 13C), 212, 213, 212A, 213A, 222, 222A (see also) Figures 14A to 14D ) and end effectors 211, 211A, 211B, 211AA, 211BB attached thereto, wherein each arm link is connected in series with the end effector at the distal end of the arms 1300A, 1300B, 210, 210A.

[0066] The distributed drive section 200 is operatively connected to each arm 1300A, 1300B, 210, 210A, wherein the distributed drive section 200 has more than one individual motor 200TA, 200TAA, 200TWA1-200TWA4 (see example). Figure 13A ), 200TA, 200TA2, 200TB1, 200TB2, 200FA1, 200FA2 (see example) Figure 14A Each motor defines an independent drive axis operatively connected to each arm 1300A, 1300B, 210, 210A to describe at least one degree of freedom of motion of the end effectors 211, 211A, 211B, 211AA, 211BB of the respective arms 1300A, 1300B, 210, 210A, said motion being commensurate with more than one independent drive axis connected to the respective arms 1300A, 1300B, 210, 210A. The end effectors 211, 211A, 211B, 211AA, 211BB of each of at least two parallel arms 1300A, 1300B, 210, 210A, or one arm link of at least one arm link, are dependent on and directly driven by the direct drive motor of the distributed drive section 200, and are disposed on the corresponding arm at the link joint distal to the end joint.

[0067] End effectors 211, 211A, 211B, 211AA, 211BB or link arms 213, 213A (see...) Figures 13A to 13C ), 212, 213, 212A, 213A, 222, 222A (see also) Figures 14A to 14D At least one degree of freedom of motion of the ) and the other end actuators 211, 211A, 211B, 211AA, 211BB of each of the other corresponding arms 1300A, 1300B, 210, 210A of at least two juxtaposed arms 1300A, 1300B, 210, 210A or the link 213, 213A of each other arm (see Figures 13A to 13C ), 212, 213, 212A, 213A, 222, 222A (see also) Figures 14A to 14D At least one degree of freedom of motion is decoupled.

[0068] Z-drive motor 200Z2 can be disposed at a link joint distal to the end joint of at least one arm to decouple (achieve differential movement) the Z-motion of the end effector of the respective arm 1300A, 1300B, 210, 210A of at least two parallel arms 1300A, 1300B, 210, 210A from the other arm 1300A, 1300B, 210, 210A of each of the at least two parallel arms 1300A, 1300B, 210, 210A. Z-drive motors 200Z1, 200Z2 can be disposed at the end joint SX (see example...) Figure 13A ), BX (see example) Figure 14A At a location, differential Z-motion is achieved between each of the at least two parallel arms 1300A, 1300B, 210, 210A.

[0069] Each corresponding arm 1300A, 1300B, 210, 210A may have two end effectors 211A, 211B, 211AA, 211BB ( Figures 14A to 14D The arm in the diagram may have two end effectors, but for illustrative purposes only one is shown on each arm), and stacked drive motors 200TWA1-200TWA4 located at the link joints distal to the end effector joints (see...). Figure 13A Note that this type of stacking motor can be set in Figures 14A to 14D (at the link joint distal to the mid-end joint) so that each of the other end actuators 211, 211A, 211B, 211AA, 211BB of the corresponding arms 1300A, 1300B, 210, 210A can be independently driven from each of the other end actuators 211, 211A, 211B, 211AA, 211BB of the corresponding arms 1300A, 1300B, 210, 210A.

[0070] Each direct drive motor on arms 1300A, 1300B, 210, and 210A has a sealed rotor that is sealed and isolated from the atmospheric environment of the stator of the direct drive motor (as described herein).

[0071] refer to Figures 13A to 13F Each of the 1300A and 1300B arms is essentially similar to the one discussed in this article. Figures 9A to 9CThe arm described. Arm 1300A includes a single arm link 213 and end effectors 211A, 211B, but may include any one or more of end effectors 211, 211DS, 211DE, 211DT, 211DQ. The single arm link 213 is a non-hinged arm link connected to and directly driven by drive motor 200TA (which is substantially similar to drive motor 500) to rotate about shoulder axis SX. The connection between the single arm link 213 and drive motor 200TA can be substantially similar to that described herein. Figure 3C The described connection. Each of the end effectors 211A and 211B is connected to and directly driven by the corresponding drive motors 200TWA1 and 200TWA2 to rotate about the wrist axis WX. The connection between the end effectors 211A and 211B and the corresponding drive motors 200TWA1 and 200TWA2 is substantially similar to that described herein. Figure 3B The described connection. Drive motors 200TWA1 and 200TWA2 can be radial flux motors 300, but one or more of drive motors 200TWA1 and 200TWA2 can be axial flux motors 500.

[0072] Arm 1300B includes a single arm link 213A and end effectors 211AA, 211BA, although it may include any one or more of end effectors 211, 211DS, 211DE, 211DT, 211DQ. The single arm link 213A is a non-hinged arm link, coupled to drive motor 200TAA (which is substantially similar to drive motor 500) and directly driven by drive motor 200TAA to rotate about the shoulder axis SX. The connection between the single arm link 213A and drive motor 200TAA can be substantially similar to that described herein. Figure 3C The described connection. Each of the end effectors 211A and 211B is connected to and directly driven by the corresponding drive motors 200TWA3 and 200TWA4 to rotate about the wrist axis WXA. The connection between the end effectors 211A and 211B and the corresponding drive motors 200TWA3 and 200TWA4 is substantially similar to that described herein. Figure 3B The described connection. Drive motors 200TWA3 and 200TWA4 can be radial flux motors 300, but one or more of drive motors 200TWA3 and 200TWA4 can be axial flux motors 500.

[0073] Z-axis driver 200Z1 can be configured and coupled to frame 201 in any suitable manner to allow arms 1300A and 1300B to move as a unit in the Z direction. One or more of arms 1300A and 1300B may include components located at wrist axes WX and WXA (see...). Figure 13A ) or located at the shoulder axis SX (see Figure 13D Another Z-axis driver 200Z2 is located at the same location. The other Z-axis driver 200Z2 may operate in conjunction with (e.g., in a coordinated manner) or independently of the Z-axis driver 200Z1 to perform pick-and-place operations, wherein the end effectors 211A, 211B of arm 1300A and / or the end effectors 211AA, 211BB of arm 1300B simultaneously pick up or place substrates S1-S4 (e.g., the other Z-axis driver 200Z2 may compensate for any difference between the Z-direction distance between the stacked substrate holding positions and the Z-direction distance between the stacked end effectors 211A, 211B and 211AA, 211BB).

[0074] Arms 1300A and 1300B are connected to frame 201 in an opposing configuration around shoulder axis SX (see...). Figure 13C This allows arms 1300A and 1300B to extend simultaneously (or one at a time) into two side-by-side process modules 130T1 and 130T2, such as... Figure 13B As shown in the diagram. Each arm 1300A, 1300B extends into the corresponding one of the two side-by-side process modules 130T1, 130T2, which can be used for the above-mentioned... Figures 9A to 9C and Figure 10 The described manner of occurrence.

[0075] like Figure 13A As illustrated, arms 1300A and 1300B can be configured such that end effectors 211A, 211B, 211AA, and 211BB are arranged relative to each other on different planes (e.g., at different elevations or Z-heights). Figure 13D As illustrated, arms 1300A and 1300B can be arranged such that end effectors 211A and 211AA can be placed on the same plane (at the same Z-height), and end effectors 211B and 211BB can be placed on the same plane. For example, with Z-axis drives 200Z1 and 200Z2 in the origin (original) position, end effectors 211A, 211B, 211AA, and 211BB can be positioned at different Z-heights, such as... Figure 13EAs illustrated in the middle section. To position end effectors 211A and 211AA at the same Z-height, actuator 200Z1 can move arm 1300B upwards and / or actuator 200Z2 can move arm 1300A downwards, allowing end effectors 211A and 211AA to simultaneously pick up / place substrates (e.g., ...). Figure 13F (Dual substrate transfer illustrated in the diagram). To position end effectors 211B and 211BB at the same Z height, actuator 200Z1 can move arm 1300B downwards and / or actuator 200Z2 can move arm 1300A upwards, allowing end effectors 211B and 211BB to simultaneously pick up / place substrates. Arms 1030A and 1300B can be positioned when end effectors 211A, 211B, 211C, and 211D are in a position... Figure 13E Single substrate transport is achieved at any of the locations illustrated (relative to each other).

[0076] Arms 1300A and 1300B can provide one or more of the following: independent (for each arm 1300A and 1300B) automated wafer alignment and pitch correction; dual-substrate or single-substrate interchangeability; left-to-right (or right-to-left) process module substrate transfer (i.e., arm 1300A can place a substrate into either process module 130T1 or 130T2, and arm 1300B can place a substrate into either process module 130T1 or 130T2); arms 1300A and 1300B can be constructed from any suitable material, making them resistant to high temperatures and corrosion; no metal belts, pulleys, gears, or transmission components are required in arms 1300A to 130B; a compact drive design that improves maintainability; accurate and repeatable placement; and distributed control, sensors, and machine vision for real-time data.

[0077] refer to Figures 2A to 9C , Figures 13A to 13C and Figure 11 An exemplary method will be described. This method includes providing a brushless motor 500 as described herein (…). Figure 11 (Frame 1100). The motor rotor 505 is sealed and isolated from the motor stator 501 by a seal or isolation wall 510. Figure 11 (See frame 1110), such that the phase coils 501AC-501CC are disposed in an atmospheric volume that maintains the atmospheric environment, and the motor rotor 505 is disposed in a sealed environment that is sealed and isolated from the atmospheric volume and is different from it. The motor rotor 505 and the motor stator 501 are arranged with axial clearance (see...). Figure 5CThe axial gap between the motor rotor 505 and the motor stator 501 is provided across the motor stator 501, and the seal 510 is arranged in the axial gap to seal and isolate each motor stator 501 from each motor rotor 505 excited by the motor stator 501 across the seal 510.

[0078] refer to Figures 2A to 9C , Figures 13A to 13C and Figure 12 An exemplary method will be described below. This method includes providing a substrate delivery device (such as...) Figures 2A to 9C Any of those illustrated in the figure ( Figure 12 (Frame 1200). Specifically, the substrate delivery device has at least one arm with an end joint SX about which the arm rotates and extends, and the arm has more than one arm link 212, 212L, 212R, 213 and end effectors 211, 211DE, 211DS, 211DT, 211DQ attached thereto, each arm link being connected in series with an end effector at the distal end of the arm. The movement of the end effectors 211, 211DE, 211DS, 211DT, 211DQ is achieved using a distributed drive section 200, which corresponds to the more than one degree of freedom of the distributed drive section 200 (…). Figure 12 (See box 1210). As described herein, arm links 212, 212L, and 212R of more than one arm link 213, 212, 212L, and 212R are direct-drive links that depend on and are directly driven by direct-drive motors 200TFA and 200TFAA of the distributed drive section 200, and are located on the SCARA arm at a link joint distal to the end joint SX (e.g., such as at elbow axes EX, EXL, and EXR). End effectors 211, 322DC, 211DE, 211DT, 211DQ, or at least another arm link 212, 212L, or 212R of more than one arm link 213, 212 are directly driven by another direct-drive motor 200TWA1, 200TWA2, 200TFA, or 200TFAA of the distributed drive section 200 on the arm, and / or follow the direct-drive links 212 and 213.

[0079] refer to Figures 14A to 14DAn exemplary transfer arm with a dual SCARA arm configuration 210, 210A is illustrated. Each of the SCARA arms 210, 210A is rotatably mounted to a corresponding boom 222, 222A, wherein the boom 222, 222A rotates about the boom axis BX. The SCARA arms 210, 210A may be similar to those SCARA arms described herein, wherein each SCARA arm 210, 210A includes an upper arm 213, 213A, a forearm 212, 212A, and an end effector 211, 211A (and / or any one or more end effectors 211DS, 211DE, 211DT, 211DQ), the end effectors being connected in series to each other and to the corresponding boom 222, 222A via corresponding shoulder axes SX, SX1, elbow axes EX, EX1, and wrist axes WX, WX1. The transmission arm includes a frame or base 201, arms 210 and 210A are connected to the frame or base 201, and arms 222 and 222A are connected to the frame or base 201.

[0080] Figures 14A to 14D The transmission arm includes a distributed drive section 200 having more than one degree of freedom defined by corresponding motors 200TB1, 200TB2, 200TA1, and 200TA2 of the distributed drive section 200. The distributed drive section 200 is operatively coupled to the arm to achieve motion of the end effectors 211 and 211A commensurate with the more than one degree of freedom. Motors 200TB1, 200TB2, 200TA1, and 200TA2 can be substantially similar to those described herein. Boom 222 can be driven by motor 200TB1 about the boom axis BX. Boom 222A can be driven by motor 200TB2 about the boom axis BX. Upper arm 213 can be driven by motor 200TA1 about the shoulder axis SX1. Upper arm 213A can be driven by motor 200TA1 about the shoulder axis SX2. Forearm 212 can be driven by motor 200FA1 about the elbow axis EX1. The forearm 212A can be driven by the motor 200FA2 around the elbow axis EX2. The end effectors 211 and 211A can follow the corresponding upper arms 213 and 213, but the motor 200TWA can be set at the corresponding wrist axes WX1 and WX2 to drive the end effectors 211 and 211A to rotate around the corresponding wrist axes WX1 and WX2.

[0081] Arms 210 and 210A are configured for independent Z-direction travel. For example, drive section 200 includes Z-axis driver 200Z1 for moving arms 222 and 210A in the Z-direction independently of arms 222A and 210A. Drive section 200 includes Z-axis driver 200Z2 for moving arms 222A and 210A in the Z-direction independently of arms 222A and 210A. The independent Z-direction movement provided by Z-axis drivers 200Z1 and 200Z2 enables transfer of substrates to substrate holding positions in a stack (such as stacked loading locks 102A and 102B).

[0082] Independent rotation of booms 222, 222A can provide alignment of the extension axes of each of booms 210, 210A to allow end effectors 211, 211A to extend into the substrate holding stage, such as stacked loading locks 102A, 120B, which are radially aligned with the boom axis BX (see [link]). Figure 14D In order to place it into the stacked substrate holding stage, the boom 222 moves upward so that the extension of the arm 210 aligns with the loading lock 102A, while the boom 222A moves downward so that the extension of the arm 210A aligns with the loading lock 102B.

[0083] Independent rotation of booms 222 and 222A allows the extension axes of booms 210 and 210A to be aligned with the side-by-side processing tables 130T1-130T8. Figures 14A to 14D In the illustration, transfer chamber 125C is shown with at least two side-by-side substrate holding stages on each side of transfer chamber 125C. Arms 222, 222A are rotatable so that the extension axes of arms 210, 210A are aligned with a corresponding one of the side-by-side processing stages 130T1-130T8 on the respective sides of transfer chamber 125C (see Figure 125C). Figures 14B to 14D Processing tables 130T1-130T8 are illustrated as having axes angled relative to the respective transfer chambers 125C to which processing tables 130T1-130T8 are connected, wherein the angle of the processing tables coincides with the extension axes of the respective arms 210, 210A; although each arm link 213, 212, 211, 213A, 212A, 211A is driven to rotate independently, arms 210, 210A can extend non-radially into the processing tables having axes substantially orthogonal to the respective transfer chamber sides.

[0084] refer to Figures 15A to 18An exemplary transfer arm of a substrate transfer device is shown. The substrate transfer device includes a base or frame 201, a common rotary joint BX, at least two juxtaposed arms 210, 210A, 210B, 210C, 1600A-1600D, and a distributed drive section 200. Each arm 210, 210A, 210B, 210C, 1600A-1600D has a corresponding end joint SXA-SXD, and each corresponding arm 210, 210A, 210B, 210C, 1600A-1600D rotates and extends about the end joint SXA-SXD. The end joints SXA-SXD of each corresponding arm 210, 210A, 210B, 210C, 1600A-1600D are connected to the base 201 via a common rotary joint BX. Each arm has more than one arm link (see...). Figures 15A to 18 (as described herein) and end effectors 211, 211A, 211B, 211C, 211D attached thereto, wherein each arm link is connected in series with end effectors 211, 211A, 211B, 211C, 211D at the distal end of arms 210, 210A, 210B, 210C, 1600A-1600D.

[0085] The distributed drive section 200 is operably connected to each arm 210, 210A, 210B, 210C, 1600A-1600D, wherein the distributed drive section 200 has more than one individual motor 200TA1-200TA4, 200TB1, 200TB2 (as per example). Figure 15A and Figure 15B (as described), 200T, 200TA-200TD, 200TA1-200TD1 (as for example) Figures 16A to 18As described, each motor defines an independent drive axis operatively connected to each arm 210, 210A, 210B, 210C, 1600A-1600D to describe at least one degree of freedom of motion of the end effectors 211, 211A, 211B, 211C, 211D of the respective arms 210, 210A, 210B, 210C, 1600A-1600D, corresponding to more than one independent drive axis connected to the respective arms 210, 210A, 210B, 210C, 1600A-1600D. In each of the more than one arm link of at least two arms 210, 210A, 210B, 210C, 1600A-1600D, one arm link is a direct drive link that is dependent on and directly driven by the direct drive motor of the distributed drive section 200, which is located on the corresponding arm at the link joint distal to the end joints SXA-SXD.

[0086] At least one of the more than one arm linkages of the end effector 211, 211A, 211B, 211C, 211D or the corresponding arm 210, 210A, 210B, 210C, 1600A-1600D is at least one of the following: directly driven by another direct drive motor of the distributed drive section 200 on the arm 210, 210A, 210B, 210C, 1600A-1600D; and follows the direct drive linkage.

[0087] At least two juxtaposed arms 210, 210A, 210B, 210C, 1600A-1600D include stacked arms, wherein the stack of arms is juxtaposed with respect to each other (see example...). Figures 15A to 18 At least one of the two parallel arms has an arm link of equal length (see example...). Figures 15A to 18 At least one of the two parallel arms has arm links of unequal length (see example...). Figures 15A to 18 ).

[0088] refer to Figure 15A and Figure 15BThe illustration shows an exemplary transfer arm with a configuration of four SCARA arms 210, 210A, 210B, and 210C. Each of the SCARA arms 210, 210A, 210B, and 210C is rotatably mounted to a corresponding boom 222, 222A, wherein booms 222, 222A rotate about the boom axis BX. SCARA arms 210, 210A, 210B, 210C may be similar to those SCARA arms described herein, wherein each SCARA arm 210, 210A, 210B, 210C includes upper arms 213, 213A, 213B, 213C, forearms 212, 212A, 212B, 212C, and end effectors 211, 211A, 211B, 211C (and / or any one or more end effectors 211DS, 211DE, 211DT, 211DQ), the end effectors being connected in series to each other and to the corresponding booms 222, 222A via corresponding shoulder axes SXA, SXB, elbow axes EX, EX1, and wrist axes WX, WX1. The transmission arm includes a frame or base 201, arms 210 and 210A are connected to the frame or base 201, and booms 222 and 222A are connected to the frame or base 201.

[0089] Figure 15AThe boom to Figure 15D includes a distributed drive section 200 having more than one degree of freedom defined by corresponding motors 200TB1, 200TB2, 200TA1, 200TA2, 200TA3, and 200TA4 of the distributed drive section 200. The distributed drive section 200 is operatively coupled to the boom to enable motion of the end effectors 211 and 211A commensurate with the more than one degree of freedom. The drive section 200 may include a Z-axis driver 200X for moving the booms 210, 210A, 210B, 210C and the booms 222 and 222A as a unit in the Z direction. The motors 200TB1, 200TB2, 200TA1, 200TA2, 200TA3, and 200TA4 may be substantially similar to those described herein. The boom 222 may be driven by the motor 200TB1 about the boom axis BX. Boom 222A can be driven by motor 200TB2 about boom axis BX. Upper arm 213 can be driven by motor 200TA1 to rotate about shoulder axis SXA. Upper arm 213A can be driven by motor 200TA2 to rotate about shoulder axis SXA. Upper arm 213B can be driven by motor 200TA3 to rotate about shoulder axis SXB. Upper arm 213C can be driven by motor 200TA4 to rotate about shoulder axis SXB. Each of the corresponding booms 210, 210A, 210B, 210C, and its forearms 212, 212A, 212B, 212C and end effectors 211, 211A, 211B, 211C can follow the corresponding booms 222, 222A, such that the corresponding booms 210, 210A, 210B, 210C are extended individually by the actuation of the corresponding motors 200TA1, 200TA2, 200TA3, 200TA4, or extended in conjunction with the rotation of the corresponding booms 222, 222B about the boom axis BX, wherein the rotation of the corresponding booms 222, 222A is driven by the corresponding motors 200TB1, 200TB2. Each of booms 210, 210A, 210B, and 210C, extending individually using a motor (i.e., the corresponding one of motors 200TA1, 200TA2, 200TA3, and 200TA4) or in combination with corresponding booms 222, 222A, and motors 200TB1 and 200TB2, can provide a compact boom link height (e.g., at least one of the upper boom and forearm), which can reduce the Z-direction chamber height and increase throughput (e.g., reduced pumping and venting times due to the smaller internal volume of the transfer chamber 125C). The compact boom link height (e.g., at least one of the upper boom and forearm) can reduce the boom's moment of inertia, thereby providing increased boom speed, which can reduce pick-up / placement cycle time.A compact Z-height can be achieved at least partially because the drives (such as direct drive motors located at one or more points in the arm joint) can not overlap vertically with each other, but rather be aligned vertically (e.g., arranged to the sides of each other), rather than one stacked on top of another.

[0090] As in Figure 15A and Figure 15B As can be seen, arms 210A and 210C are configured as through arms. For example, the z-direction distance between the upper arm 213A and the forearm 212A of arm 210A, and the length of each of the upper arm 213A and the forearm 212A, causes the elbow axis EX1 of arm 210 to pass between the upper arm 213A and the forearm 212A to the inside of the elbow axis EX2 of arm 210A (relative to the shoulder axis SXA), which can be referred to as an offset elbow arrangement. Similarly, the z-direction distance between the upper arm 213C and the forearm 212C of arm 210C, and the length of each of the upper arm 213C and the forearm 212C, causes the elbow axis EX3 of arm 210B to pass between the upper arm 213C and the forearm 212C to the inside of the elbow axis EX4 of arm 210C (relative to the shoulder axis SXB), which can be referred to as an offset elbow arrangement. These offset elbow arrangements can be Figure 15A and Figure 15B The transfer arm provides a minimum height to reduce the internal volume of the transfer chamber 125C.

[0091] refer to Figures 16A to 16EThe illustration shows another exemplary transmission arm configuration. The transmission arm includes a base 201 to which the arm is attached. The transmission arm includes a distributed drive section 200 and a base arm link 1610, which is attached to the base 201 for rotation about a base arm axis BX driven by a drive motor 200T of the distributed drive section 200. Four arms 1600A, 1600B, 1600C, and 1600D are attached to the base arm link 1610 for rotation about corresponding shoulder axes SXA, SXB, SXC, and SXD. The base arm link 1610 may include an interior isolated from the environment in which the arm operates. Each arm 1600A, 1600B, 1600C, 1600D includes upper arms 213A, 213B, 213C, 213D, forearms 212A, 212B, 212C, 212D, and end effectors 211A, 211B, 211C, 211D, which may have unequal lengths. Shoulder axes SXA, SXB, SXC, SXD are arranged in a substantially cross configuration (e.g., such that shoulder axes SXA and SXC are arranged along lines / axis LAX2 that are substantially perpendicular to the extension / retraction axes EXT1, EXT2 of arms 1600A, 1600B, 1600C, 1600D, and shoulder axes SXB and SXD are arranged along lines / axis LAX1 that are substantially parallel to the extension / retraction axes EXT1, EXT2 of arms 1600A, 1600B, 1600C, 1600D). The drive motor 200T causes the base arm link 1610 and the four arms 1600A, 1600B, 1600C, and 1600D to rotate as a unit around the base arm axis BX. The distributed drive section 200 may include a Z-axis driver 200Z for moving the arms 1600A, 1600B, 1600C, 1600D, and base arm 1610 as a unit in the Z direction.

[0092] The distributed drive section 200 may include at least one drive motor for each arm 1600A, 1600B, 1600C, 1600D, with the at least one drive motor arranged in the base arm link 1610 at the corresponding shoulder axis SXA, SXB, SXC, SXD. For example, in the case where each arm 1600A, 1600B, 1600C, 1600D has a follower configuration, a single corresponding drive motor 200TA, 200TB, 200TC, 200TD can extend / retract each corresponding arm 1600A, 1600B, 1600C, 1600D (see also...). Figure 16DIn the case where the upper arms 213A, 213B, 213C, 213D and the forearms 212A, 212B, 212C, 212D of each arm rotate independently and the end effectors 211A, 211B, 211C, 211D follow the upper arms, each arm 1600A, 1600B, 1600C, 1600D can be equipped with two coaxial drive motors 200TA, 200TA1, 200TB, 200TB1, 200TC, 200TC1, 200TD, 200TD1, so as to rotate each arm 1600A, 1600B, 1600C, 1600D as a unit about the corresponding shoulder axes SXA, SXB, SXC, SXD and extend / retract the arms 1600A, 1600B, 1600C, 1600D (see also...) Figure 16E One arm 1600B or 1600D on axis LAX1 can have a follower configuration (i.e., a single drive motor configuration), and the other arm 1600B or 1600D can have a follower end effector configuration (i.e., a two drive motor configuration). One arm 1600A or 1600C on axis LAX2 can have a follower configuration (i.e., a single drive motor configuration), and the other arm 1600A or 1600C can have a follower end effector configuration (i.e., a dual drive motor configuration).

[0093] At least one arm 1600A, 1600B, 1600C, 1600D with two drive motors is provided on each axis LAX1, LAX2, which can provide for automated wafer alignment (AWC). The drive motor 200T of the base arm 1610 is used to align a substrate held by an arm with a single drive motor, and the two drive motors 200TA, 200TA1, 200TB, 200TB1, 200TC, 200TC1, 200TD, 200TD1 of the other arm are used to align a substrate held by the other arm (see [link to other arm description]). Figure 16B In the case where each arm 1600A, 1600B, 1600C, and 1600D includes two drive motors 200TA, 200TA1, 200TB, 200TB1, 200TC, 200TC1, 200TD, and 200TD1, the corresponding two drive motors can be used to achieve automatic wafer alignment (AWC) for the corresponding arm, instead of using the base arm 1610 drive motor 200T (see [link]). Figure 16C In the case where the arms 1600A and 1600C along axis LAX2 include a single drive motor, the base arm 1610 may include at least one linear drive motor 200L1 and 200L2 (see...). Figure 16D and Figure 18), used to move at least one of the shoulder axes SXA, SXC (or at least one pair of shoulder axes SXA, SXB and SXC, SXD, i.e., shoulder axes SXA, SXB can be moved in the direction of 180° by motor 200L2 as a unit and shoulder axes SXC, SXD can be moved in the direction of 180° by motor 200L1 as a unit) along axis LAX2 to achieve automatic wafer alignment (AWC). Although Figure 16B and Figure 16C The illustration shows an automated wafer alignment system with arms 1600A and 1600C having shoulder axes set along axis LAX2, but the description of the automated wafer alignment and... Figure 16B and Figure 16C The same applies to arms 1600B and 1600D with a shoulder axis set along axis LAX1.

[0094] about Figures 16A to 16E The arm links (such as upper arms 213B, 213D and forearms 212B, 212D) are not equal in length (e.g., from joint center to joint center), as illustrated with arms 1600B, 1600D, and each arm 1600B, 1600D has two drive motors 200TB, 200TB1, 200TD, 200TD1 for extending / retracting the arm 1600B, 1600D. The two drive motors 200TB, 200TB1, 200TD, 200TD1 of each arm can be used in combination (e.g., cooperatively or substantially simultaneously) to maintain the movement of the respective end effectors 211B, 211D along the respective radial extension paths EXT1, EXT2. In cases where the arm links (such as upper arms 213B, 213D and forearms 212B, 212D) are not equal in length (e.g., from joint center to joint center), as illustrated with arms 1600B, 1600D, and each arm 1600B, 1600D has a single drive motor 200TB, 200TD for extending / retracting the arm 1600B, 1600D and a motor 200L1, 200L2 for moving the corresponding arm 1600B, 1600D in the direction 1800, the drive motors 200TB, 200TD, 200L1, 200L2 of each arm can be used in combination (e.g., cooperatively or substantially simultaneously) to maintain the movement of the corresponding end effectors 211B, 211D along the corresponding radial extension paths EXT1, EXT2. The configuration of the arms 1600A-1600D shown and described herein can also provide mounting of the arms 1600A-1600D through a top opening in the transmission chamber in which the arms operate.

[0095] Each arm 1060A, 1600B, 1600C, 1600D includes a belt and pulley drive system (BTS) configured to maintain substantially linear extension / retraction of the respective arm 1600A, 1600B, 1600C, 1600D. The drive pulley ratio of the arm links (e.g., upper arm to forearm and forearm to end effector) can be 2+:1:2+. For example, in the case where arms 1600A-1600D are configured in a follower configuration and extend / retract using a single motor (e.g., as... Figure 16D The diagram in the figure and generally in Figure 16A As illustrated in the diagram, the upper arm belt and pulley drive system UBTS includes a gear ratio of approximately greater than 2:1 (2+:1 ratio) (shoulder pulley to elbow pulley), while the forearm belt and pulley drive system FBTS includes a gear ratio of approximately 1:greater than 2 (1:2+ ratio) (elbow pulley to wrist pulley). Arms 1600A-1600D are configured such that the end effector follows the upper arm and utilizes two motors for extension / retraction (e.g., as shown in the diagram). Figure 16E The diagram in the figure and generally in Figure 16A As illustrated in the diagram, the upper arm belt and pulley drive system (UBTS) has a transmission ratio of approximately greater than 1:1 (1+:1 ratio) (shoulder pulley to elbow pulley), while the forearm belt and pulley drive system (FBTS) has a transmission ratio of approximately greater than 1:2 (1:2+ ratio) (elbow pulley to wrist pulley). The pulleys in the belt and pulley drive system (BTS) can be round pulleys without any outer covering. When arms 1600A, 1600B, 1600C, and 1600D are equipped with two drive motors, both motors can be used for AWC and refine the linear movement of the corresponding arm.

[0096] The lengths of each arm link 213A, 212A allow the elbow axis of arm 1600A to swing (without contact) inside the shoulder axes SXB, SXD of arms 1600B, 1600D. The lengths of each arm link 213C, 212C allow the elbow axis of arm 1600C to swing (without contact) inside the shoulder axes SXB, SXD of arms 1600B, 1600D. Arms 1600A, 1600B, 1600C, and 1600D are configured such that end effectors 211A, 211B are arranged vertically adjacent to each other, and end effectors 211C, 211D are arranged vertically adjacent to each other to minimize Z-axis movement for rapid substrate exchange.

[0097] refer to Figures 17A to 17C The illustration shows an exemplary transmission arm configuration. Figures 17A to 17C The transmission arm shown in the diagram is basically similar to the one described above. Figures 16A to 16C The described transmission arms, except that the shoulder axes SXB and SXD of arms 1600B and 1600D are set on one side of the base arm 1610. Figures 17A to 17CIn the diagram, shoulder axes SXB and SXD are shown on what can be referred to as the “front” side of the base arm 1610 (i.e., the side of the base arm 1610 closest to the pick-up / placement position along the extension / retraction axes EXT1 and EXT2); although shoulder axes SXB and SXD can be located on what can be referred to as the “rear” side of the base arm 1610 (i.e., the side of the base arm 1610 furthest from the pick-up / placement position along the extension / retraction axes EXT1 and EXT2). Figure 17B The illustration shows arms 1600A and 1600C extending into loading locks 102A and 120B (or other suitable substrate holding positions) when arms 1600B and 1600D are in the retracted configuration. Figure 17C The illustration shows arms 1600B and 1600D extending into loading locks 102A and 120B (or other suitable substrate holding positions) when arms 1600A and 1600C are in a retracted configuration.

[0098] Figures 13A to 14D and Figures 15A to 18 The arm configuration corresponds to a small or compact conveyor chamber 125C with two process modules 130T1, 130T2 (or two conveyor openings) on each side, wherein the arm size depends on the spacing between the two side-by-side process modules 130T1, 130T2 (or side-by-side conveyor openings). For example, Figures 13A to 18 The substrate processing apparatus has a substrate transport chamber 125C that is substantially hexahedral (or compact) in shape and is sealed to maintain a chamber atmosphere. The transport chamber 125C has two linear sides 125CS1, 125CS2 of a hexahedron extending in the lateral direction, and at least one end wall 125CS3, 125CS4 of a hexahedron substantially orthogonal to the linear sides 125CS1, 125CS2. At least one end wall 125CS3, 125CS4 has two end substrate transport openings 130P, wherein each of the end substrate transport openings and the side substrate transport openings 130P is arranged to transport a substrate through it into and out of the substrate transport chamber 125C. At least one of the linear sides 125CS1, 125CS2 has two side substrate transport openings 130P arranged in the lateral direction (e.g., close to each other) at a common horizontal height. Each of the substrate delivery openings 130P is connected to a corresponding processing module (such as process module 130) and communicates with the substrate delivery chamber 125C (and the compact dimensions of the delivery chamber 125C are described).

[0099] like Figures 15A to 18As illustrated, a pair of SCARA arms are connected to a frame or base 201 and disposed within a sealed chamber of a delivery chamber 125C. Each SCARA arm is a multi-link arm with an independent drive axis for extending and retracting the respective arm, such that the first SCARA arm has a first independent drive axis, the second SCARA arm has a second independent drive axis, the third SCARA arm has a third independent drive axis, and the fourth SCARA arm has a fourth independent drive axis, each of the first, second, third, and fourth drive axes being distinct from one another. An outer drive section 200ES (of the distributed drive section 200) is located outside the sealed chamber of the delivery chamber 125C and is connected to the pair of SCARA arms for moving the pair of SCARA arms about a common axis BX. An inner drive section 200CS is located inside the sealed chamber of the delivery chamber 125C and includes a sealed housing configured to maintain a sealed atmosphere different from the chamber atmosphere (e.g., as described herein).

[0100] Sealed housing (similar to the above regarding) Figures 3A to 8 The described motors (200TA1, 200TA2, 200TA3, 200TA4, 200TA, 200TB, 200TC, 200TA, 200TB1, 200TC1) distributed in a sealed chamber include: a first sealed rotary motor for describing a first independent drive axis of at least a first SCARA arm; a second sealed rotary motor sealed separately from the first sealed rotary motor and providing a second drive axis different from the first drive axis, wherein the second drive axis describes a second independent drive axis of at least a second SCARA arm; a third sealed rotary motor sealed separately from the first and second sealed rotary motors and providing a third drive axis different from the first and second drive axes, wherein the third drive axis describes a third independent drive axis of a third SCARA arm; and a fourth sealed rotary motor sealed separately from the first, second, and third sealed rotary motors and providing a fourth drive axis different from the first, second, and third drive axes, wherein the fourth drive axis describes a fourth independent drive axis of a fourth SCARA arm. The first, second, third, and fourth sealing motors are arranged in a tightly packed cluster (CPA) (each sealing motor is offset from each other - see [link]). Figures 15A to 18 The rotating joints of the arm containing the central motor are distributed within the sealed chamber of the transport chamber 12C, such that the outermost span width of the tightly packed cluster arrangement CPA (of the sealed motors) is proportionate to the lateral distance from the outer edge to the outer edge of the two side substrate transport openings 130P (see [reference]). Figure 15A , Figure 15B , Figure 16B , Figure 16C and Figures 17A to 18 ).

[0101] This disclosure may provide power buses and high-speed data communication buses distributed throughout one or more arms of the substrate delivery device 104 (which may form a common (e.g., combined) bus or separate buses). For example, see reference Figure 3A , Figure 3D and Figure 3E The power distributed via the power bus can be either DC or AC power. The power and data communication system (PDCS) can be connected via a hinged arm (including those discussed in this article). Figures 1A to 19 All articulated arms described are distributed such that the power and communication data system PDCS has (at least one) wireless power and data communication interface WPDC (see...). Figure 3D and Figure 3E The wireless power and data communication interface (WPDC) is deployed through each rotary joint of the housing via at least one movable arm link (e.g., one or more joints at corresponding axes BSX, BEX, SX, EX, WX, and other axes / joints that rotatably connect adjacent arm links to each other). The WPDC is configured as a contactless wireless communication interface through each rotary joint. The data communication and bus power network (PDCN) (e.g., a network formed by the power and data communication system (PDCS) and the network of the power and data communication system (PDCS)) resides on the articulated arm in an airborne manner. The PDCN is distributed throughout the articulated arm from the end joints (such as one or more of joints SX, BSX) through the distal joints (e.g., joint WX). The PDCN is housed in each rotary joint of the housing and passes through each rotary joint of the housing. A data communication and bus power network (PDCN) is incorporated into a local controller (e.g., the transmitter, receiver, controller, etc. of the substrate delivery device described herein) and sensors (e.g., encoders, substrate sensors, sensors of the metrology kit, sensors of auxiliary devices, imaging / vision sensors, thermal sensors, displacement sensors, and other sensors described herein), respectively disposed on at least one movable link and at least another movable arm link and end effector, connected via a network interface (e.g., a corresponding wireless power and data communication interface (WPDC) as described herein) to enable local on-the-fly control of at least one of the following via the articulation of one or more movable arm links of the articulated arm, substrate or process metrology, imaging of at least a portion of the articulated arm using an on-board imaging sensor, and on-the-fly health monitoring of the articulated arm: active thermal control of the end effector, local on-the-fly control of the kinematic motion of at least one of the following: the kinematic motion of the substrate holding stage (SHS).

[0102] This disclosure provides path selection for power and communication components to electrical components (e.g., motors, motor encoders, power docks, communication docks, accessory components, etc.) located outside a vacuum environment (such as an environment in which the articulated arm operates) within or connected to the arm, allowing the power and communication components to be unaffected by the vacuum environment and venting. Conductors (e.g., electrical wires and communication lines) within the arm are fixed relative to the corresponding arm links so that the conductors do not flex relative to the articulated arm due to the arm hinge, which can increase the lifespan of electrical conductors and cooling components, as well as increase the reliability of the substrate delivery device 104.

[0103] At least the data communication provided by this disclosure can be achieved without mechanical contact with, for example, slip rings of the articulated arm. Data communication is not limited by the use of slip rings and can support synchronous data transmission for high-speed (gigabit or higher) high-bandwidth (gigabit or higher) data rates, enabling motion control of the arm and digital signal processing of the arm's electronics. Electrical transmission (some of which can be high current) can be achieved within the arm using slip rings, while data transmission bypasses the slip rings. At some portions of the articulated arm, power (e.g., electrical transmission) can be transmitted without slip rings, such that power can be transmitted between pressurized and unpressurized environments or between pressurized and unpressurized environments. In this way, this disclosure can provide the placement of sensors and / or actuators within and / or on the arm and end effector without exposing the electronics and / or cables of the sensors and / or actuators to a vacuum environment. Wireless power / data transmission between arm links and / or between arm links and the end effector provides substantially unlimited rotation of one or more joints of the articulated arm of the substrate delivery device 104. The wireless power / data transmission of the disclosed embodiments can provide large / high-speed data bandwidth (e.g., about gigabits per second or more) and ultra-low latency (e.g., in the nanosecond range) to enable direct driving of one or more joints of the articulated arm and / or sensing of the substrate carried by the substrate delivery device 104.

[0104] This disclosure allows for power and data docking (e.g., an interface or wireless docking station) to be provided on the wrist plate, on the end effector, or at any other suitable location on the arm (see [link]). Figure 3A and Figure 3F The docking station interacts with any suitable auxiliary devices that utilize power and / or data communication. Such auxiliary devices include, but are not limited to, metering kits and wireless chargers. In cases where the metering kit(s) receive power from the power extension dock and communicate through the docking station's data extension dock, the metering kit can receive substantially unlimited power and is provided with high-speed data transmission that is substantially free from external radio frequency interference (e.g., enabled by short-range, high-bandwidth data communication as described herein).

[0105] Figure 3D and Figure 3E An exemplary rotary joint configuration is illustrated, in which hollow drive shafts 200M1D, 200M2D, 200M3AD, and 200M3BD (see also...) Figure 3A The joint is configured for one or more passes through the cable / communication cable CBL. The rotary joint configuration provides wireless delivery of at least data communication via an air gap MAG (the term "air" is used herein for convenience, as the gap can exist in a vacuum atmosphere, as described herein with respect to the wrist axis). The rotary joint may allow power delivery via slip rings 379 (such as at the shoulder and elbow joints), but the power delivery may be wireless power delivery similar to wireless data communication via an air gap MAG (such as at the wrist joint and / or at one or more of the shoulder and elbow joints). As described herein, the power delivery and data communication implemented by this disclosure can allow the integration of sensors and / or actuators / direct drive motors into the articulated arm while isolating the sensors and actuators from the vacuum environment in which the articulated arm operates. Any cables, cooling pipes, and other electronic components (including at least sensors such as encoders, substrate sensors, sensors in metrology kits, sensors in auxiliary devices, imaging / vision sensors, thermal sensors, displacement sensors, etc., as described herein, and direct drive motors as described herein) are embedded within the articulated arm structure, which essentially eliminates contamination of the vacuum environment due to venting from cables and other electronic components.

[0106] Although Figure 3D The diagram shows the elbow joint of the articulated arm, but the shoulder joint (and wrist joint, see below) is not shown. Figure 3E This can be configured similarly. See reference. Figure 3DThe conduit 381 extends through the hollow drive shaft 200M2D and the motor rotor (the motor rotor is formed by the drive shaft, or vice versa, or otherwise coupled to the drive shaft), although the conduit 381 may otherwise be formed by the hollow drive shaft 200M2D and / or the motor rotor. To enable data transmission via the rotary joint, noting that the conduit 381 rotates relative to the upper arm 213, the wireless transmitter 377T is fixed (i.e., stationary) to the end portion of the upper arm 213. The wireless receiver 377R (having, for example, a disc antenna or any suitable antenna shape) is fixed to the conduit 381 so as to rotate with the conduit 381 as a unit and is coupled to the communication cable CBL. The wireless transmitter 377T (having, for example, a disc antenna or any suitable antenna shape) is positioned relative to the wireless receiver 377R to transmit data therebetween. Although transmitter 377T and receiver 377R are shown, their positions can be reversed, and there can be two transceivers (to provide bidirectional data communication), or two sets of transmitters and receivers (to provide bidirectional data communication). Transmitter 377T and receiver 377R can be configured for optical communication, radio frequency (e.g., WiFi, near-field communication, ultra-wideband, millimeter wave, etc.) communication, inductive communication, or other short-range wireless communication protocols such as those described herein (e.g., Bluetooth®, infrared, Zigbee®, etc.), operating at very short distances such as about 20 mm or less (communication distances can be greater than about 20 mm). Short-range communication enables secure data transmission within semiconductor manufacturing facilities (FABs) or plants and immunity to radio frequency noise. A minimized air gap (MAG) is provided between the transmitting and receiving portions of transmitter 377T and receiver 377R. The dimensions of the minimized air gap are designed to provide approximately the smallest possible gap for receiver 377R to rotate relative to transmitter 377T without contact between them.

[0107] Still referencing Figure 3DElectrical power can be transmitted via the rotary joint through the slip ring 379, although it can also be wirelessly transmitted via an air gap MAG, as described below. For illustrative purposes only, with respect to the slip ring 379, the brush block 379B of the slip ring 379 is fixedly (stationarily) coupled to the end portion of the upper arm 213, while the rotating ring 379R of the slip ring (e.g., relative to the conduit 381) is fixed to the conduit 381 so as to rotate with the conduit 381 as a unit. Electrical power is fed to the brush block 379B using any suitable power cable CBL, and electrical power is fed from the rotating ring to the forearm 212 using any suitable power cable CBL located adjacent to the conduit 381 and laid within the drive shaft 200M2D. Power fed through the articulated arm via cables and the slip ring (and in some cases via wireless coupling) supplies power to the motors 200M1-200M3B, encoders 388, 389, 389A, and / or any other suitable electronics integrated with the articulated arm.

[0108] Also refer to Figure 3D and Figure 3E Power transmission and data communication via the rotating joint can both be wireless. For illustrative purposes only, information regarding the wrist joint (see...) Figure 3E This describes wireless power transmission and data communication, although the elbow joint (see...) Figure 3DThe arm and shoulder joint can be substantially similar. For example, power and data communication is provided to the wrist via cables to enable operation of at least drive motors 200M3A, 200M3B and corresponding encoders, wherein the cables extend through the arm to the wrist. A short-range short-field wireless communication network can be provided for transmitting power and data to and / or from the end effectors 211A, 211B. The short-range short-field wireless communication network includes data and power transmitters 341T, 342T disposed within the wrist and data and power receivers 341R, 342R disposed within the end effectors 211A, 211B (power receiver 342R is illustrated at the base of the drive shaft 200M3BD for the end effector 211A). The short-range short-field wireless communication network can be used for power and / or data transmission between the frame 201 and the upper arm 213 and / or between the upper arm 213 and the forearm 212. The data and power transmitter 341T is disposed within the arm. Data and power transmitter 341T is coupled to transmitter antenna 341TA (see also transmitter antenna 342TA of transmitter 342T) which is disposed in a vacuum environment. Transmitter antennas 341TA and 342TA are constructed of any suitable vacuum-compatible material (e.g., stainless steel) and attached to the arm in any suitable manner (e.g., using any suitable fasteners). Any suitable seal (e.g., an O-ring) can be provided between transmitter antenna 341TA and the arm to seal any feedthrough connecting transmitter antenna 341TA to data and power transmitter 341T. Transmitter antenna 341TA can surround drive shaft 200M3AD of motor 200M3A (and therefore, the connection between drive shaft 200M3AD and the corresponding end effector 211B) such that wireless communication between power and data transmitter 341T and end effector 211B is substantially maintained as end effector 211B rotates.

[0109] The data and power receiver 341R is embedded within the end effector 211B in any suitable manner (e.g., during the manufacture of the end effector or within a sealed atmospheric chamber within the end effector 211B). The receiver antenna 341RA is disposed in a vacuum environment (see also receiver antenna 342RA at the base of the drive shaft 200M3BD). Receiver antennas 341RA and 342RA are constructed of any suitable vacuum-compatible material (e.g., stainless steel) and are attached to the end effector 211B in any suitable manner (e.g., using any suitable fasteners). Any suitable seal (e.g., an O-ring) may be provided between the receiver antenna 341RA and the end effector 211B to seal any feedthrough connecting the receiver antenna 341RA to the data and power receiver 341R. Receiver antenna 341RA can surround the drive shaft 200M3AD of motor 200M3A (and thus the connection between drive shaft 200M3AD and the corresponding end effector 211B) to provide passage for drive shaft 200M3BD of motor 200M3B, and to maintain, substantially, wireless communication between power and data transmitter 341T and end effector 211B as end effector 211B rotates, primarily via wireless communication between two loop antennas 341TA, 341RA. Antennas 341TA, 341RA can have any suitable shape. As an example, antennas 341TA, 341RA can be constructed of thin foil to conform to / be conform to the surface to which they are attached. Transmitter 341T and receiver 341R can provide bidirectional data communication. Antennas 341TA, 341RA are separated by a minimized gap MAG in a manner similar to that described herein. Power and data can be transmitted to (and from) end effector 211A in a manner substantially similar to that described with respect to end effector 2511B.

[0110] As in Figure 3DAs can be seen, the rotary joint provides substantially unrestricted rotation of the forearm 212 relative to the upper arm 213. Furthermore, because the cable CBL in the upper arm 213 at the elbow joint is only connected to components stationary relative to the upper arm 213 (e.g., transmitter 377T, brush block 379B of slip ring 379), the cable CBL will not flex or move with the hinge of the forearm 212 relative to the upper arm 213, which increases the reliability and lifespan of the cable CBL. Similarly, because the cable CBL in the forearm 212 at the elbow joint is only connected to components stationary relative to the forearm 212 (e.g., receiver 377R, rotary ring 379R of slip ring 379), the cable CBL will not flex or move with the hinge of the forearm 212 relative to the upper arm 213, which increases the reliability and lifespan of the cable CBL. Without requiring or otherwise expecting substantially unlimited rotation of the arm joint, one or more of the electric slip ring and data transmitter / receiver can be removed, such that one or more power and data cables extend through conduit 381 to seal 385B (conduit 381 is stationary and fixed to upper arm 213), wherein one or more cables form a clock spring in forearm 212, which winds and unwinds (in a manner similar to a helical clock spring) as forearm 212 rotates relative to upper arm 213.

[0111] refer to Figure 3A and Figure 3F This disclosure enables the positioning of wireless power and data transmission extension docks 345A-345C (also referred to as wireless docking stations) at any suitable location on one or more of the articulated arms and / or end effectors 211A, 211B. These wireless docking stations can provide power and high-speed data transmission to (and / or from) any suitable accessory items carried by the articulated arms. The accessory items are configured to enable automated maintenance and / or diagnostics of the substrate processing apparatus (or any part thereof). These accessory items include, but are not limited to, metering kits 340A, 340B. Metering kits 340A, 340B can include any suitable sensors 340S, including but not limited to cameras, accelerometers, thermometers, tactile sensors (e.g., pressure-sensing pads, transducers, etc.), magnetometers, gyroscopes, contaminant sensors, humidity sensors, gas sensors, chemical sensors, pressure sensors, audio sensors, etc. Metering kits 340A, 340B can include a processor 340C. Metering kits 340A, 340B can include a power supply 340P (e.g., a battery, capacitor, etc.). The metrology kit 340A can be any suitable instrumented substrate that has a shape and size similar to that of the production substrate S, but is configured with one or more sensors (such as those mentioned above) to enable metrology of the substrate processing apparatus.

[0112] A paired wireless extension dock 340D, configured to wirelessly pair with one of the corresponding wireless docking stations 345A-345C, provides power and high-speed data transfer to the processor (which can distribute power to (one or more) sensors 340S and power supply 340P of the accessory items and communicate with (one or more) sensors 340S). A substantially unlimited amount of power and high-speed data transfer can be provided to the metering kits 340A, 340B for powering the sensors 340S and / or charging the power supply 340P, and for providing sensor feedback to the controller 110 (or any other suitable controller or operator station of the substrate processing devices 100A-100G).

[0113] Although wireless docking stations 345, 345A-345C are illustrated as being positioned on end effectors 211A, 211B and wrist joint 340B, one or more wireless docking stations can be positioned at any suitable location on the articulated arm that presents the metering kit to the desired portion of the substrate handling apparatus. For example, the wireless docking station can be positioned on the shoulder joint, elbow joint, wrist joint, upper arm 213, forearm 212, and / or end effectors 211A, 211B (or any other suitable location on the substrate delivery apparatus 104). Docking stations 345, 345A-345C can have any suitable configuration for transmitting power and data to and / or to the metering kits 340A, 340B (and the paired wireless extension dock 340D has any suitable pairing configuration). Dock stations 345, 345A-345C communicate with paired wireless docking station 340D via any suitable short-range transmission (such as those described herein), including but not limited to one or more of millimeter-wave (ultra-wideband) transmission, capacitive transmission, and inductive transmission. Metering kits 340A, 340B are configured such that when picked up by substrate delivery device 104, paired wireless docking station 340D aligns with the corresponding docking station 345, 345A-345C to establish a wireless power / data link between the corresponding docking station 345, 345A-345C and paired wireless docking station 340D.

[0114] Wireless power and data communication between the substrate delivery device 104 and the metrology kits 340A and 340B enables the implementation of the metrology kits 340A and 340B without significant limitations on power and / or data bandwidth. In this regard, compared to conventional battery-powered metrology kits, the metrology kits 340A and 340B can include faster, more powerful processors, an increased number of sensors, etc., which can increase the performance and functionality of the metrology kits. The performance and functionality of the metrology kits (e.g., substantially unlimited inspection / maintenance duration) compared to conventional battery-powered metrology kits can be enhanced by employing high-speed data transmission (e.g., at least Gigabit Ethernet or EtherCat, etc.) provided by this disclosure. Exemplary sensors (and / or auxiliary devices) 340S that may be provided include, but are not limited to, one or more of a thermal sensor 1410 (for sensing the temperature of the substrate) and an imaging / detection sensor 1610 (for substrate position detection during substrate pickup and placement and automatic substrate alignment relative to the end effector). Other sensors include arm link thermal sensors, arm link displacement sensors, and vision sensors, which can be used to monitor the temperature and thermal expansion of the corresponding arm link and the relative position of adjacent arm links. Accelerometers and / or tilt sensors can be placed within the articulated arm (such as near the wrist axis WX) to determine arm droop.

[0115] refer to Figure 19 The robotic transfer arm described herein can provide transfer of substrates to and from substrate holding stages 1910A, 1910B, 1910C, or three of the three holding stages 1910A, 1910B, 1910C, stacked one on top of another, at other substrate holding positions of a triple-stacked loading lock 102. Loading locks are a popular and widely adopted loading lock configuration in industry and are compatible with it. Therefore, all transfer arms described herein can be oriented and configured to conform to the footprint and dimensions of the loading lock 102, as described herein. Figure 19 The loading lock 102 illustrated herein is one of those described. For illustrative purposes, the loading lock 102 is illustrated as a triple stack / chamber loading lock having three stationary substrate holding stages 1910A, 1910B, 1910C relative to the loading lock frame. To pick up or place substrates S1-S3 from the respective substrate holding stages 1910A, 1910B, 1910C, a Z-direction movement distance DX1, DX2 of approximately 5 mm (although the movement may be greater or less than approximately 5 mm) may be required to achieve the substrate S1-S3 in the support of the substrate holding stage and the end effector 1920 (part of which is in Figure 19The diagram illustrates the transfer between the end effectors (which can be any of those described herein). Therefore, to pick up a substrate from the uppermost substrate holding stage 1910C, the end effector 1920 moves upward in the Z-direction by at least 5 mm, exceeding the top of the substrate S1 mounted on the support or exceeding the top of the support of the substrate holding stage 1910C by 5 mm. To place the substrate S3 onto the lowermost substrate holding stage 1910A, the end effector 1920 moves downward in the Z-direction by at least 5 mm, exceeding the bottom of the substrate S3 mounted on the support or exceeding the top of the support of the substrate holding stage 1910A by 5 mm. The robot's transfer arm described herein can be configured with a Z-direction travel distance or stroke DX3 of approximately 175 mm (the stroke can be greater than or less than approximately 175 mm) to pick up and place substrates S1-S3 from the three substrate holding stages 1910A-1910C. The bottom substrate holding stage 1910A may be located at a distance DX4 of approximately 18.5 mm from the bottom of the transport opening or slot 1950 of the substrate holding stage 1910A (this distance may be greater than or less than approximately 18.5 mm), wherein the bottom of the slot 1950 is at a distance DX5 of approximately 107 mm from the reference plane RP of the substrate processing equipment (this distance may be greater than or less than approximately 107 mm). When the bottommost transfer arm picks up / places a substrate from, for example, the bottommost substrate holding stage 1910A of the triple-stack loading lock 102, the following applies to the substrate holding stage 1910A: Figures 1A to 18 The bottommost or lowest transmission arm of the robot described herein is located within the distance of DXS (not extending below).

[0116] As the ultimate self Figure 19 A non-limiting example of a triple-stacked loading lock 102 transfer substrate, see reference. Figures 1A to 5C , Figures 15A to 18 and Figure 19 The substrate delivery device 104 includes a base 201 and a pair of arms (although references are available). Figures 15A to 18 However, the approach described in this article can be adopted. Figures 1A to 18(Any of the arms of the robot described). A pair of arms has first arms 210, 210A, 1600A, 1600B and second arms 210C, 210D, 1600C, 1600D. The first arms 210, 210A, 1600A, 1600B are juxtaposed with respect to the second arms 210C, 210D, 1600C, 1600D. The first arms 210, 210A, 1600A, 1600B have a first top arm 210A, 1600B with a first top end effector, and a first bottom arm 210, 1600A with a first bottom end effector. The second arms 210B, 210C, 1600C, 1600D have a second top arm 210C, 1600D with a second top end effector and a second bottom arm 210B, 1600C with a second bottom end effector.

[0117] The first top arms 210A, 1600B and the first bottom arms 210, 1600A each have an end joint BX about which they rotate and extend. The end joint BX is common to each of the first top arms 210A, 1600B and the first bottom arms 210, 1600A, and connects each of the first top arms 210A, 1600B and the first bottom arms 210, 1600A to the base 201 via the common end joint BX. The first top arms 210A, 1600B have at least one first top arm link and a first top end effector attached to the distal end of the at least one first top arm link (see [link]). Figures 15A to 18 (as described herein). The first bottom arm 210 has at least one first bottom arm link and a first bottom end effector attached thereto at the distal end of the at least one first bottom arm link (see [link]). Figures 15A to 18 (As described herein). Each link of the first top arms 210A, 1600B is separate and distinct from each link of the first bottom arms 210, 1600A, and the first top end effector and the first bottom end effector extend at least partially overlapping each other.

[0118] The drive section 200 has at least one motor 200T, 200TA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200L1, 200L2 connected to each corresponding arm 210, 1600A, 210A, 1600B of the pair of arms, and is arranged to extend each corresponding arm 210, 1600A, 210A, 1600B with at least one degree of freedom independently of each other corresponding arm 210, 1600A, 210A, 1600B in the pair of arms. The drive section 200 has at least one other motor 200T, 200TA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200L1, 200L2 connected to each corresponding arm 210, 1600A, 210A, 1600B, and is arranged to laterally move the corresponding arm 210 with at least one other degree of freedom. 1600A, 210A, 1600B, such that each corresponding end effector 211, 211A, 211B, 211C, 211D of the corresponding arms 210, 1600A, 210A, 1600B extends and is laterally laterally displaced relative to the corresponding end effector 211, 211A, 211B, 211C, 211D of at least one other corresponding arm 210, 1600A, 210A, 1600B of the pair of arms.

[0119] The drive section 200 has another motor 200Z, which describes a movement with a predetermined stroke along a direction substantially orthogonal to the substantially horizontal substrate transport plane LTP, raising and lowering corresponding end effectors 211, 211A-211B, 211C, 211D, such that at least the first top end effector and the first bottom end effector each move with a predetermined stroke of substantially 175 mm (see distance DX3) from the triple-stack loading lock 102 (see... Figure 19 The substrate is placed and picked up at each horizontal height (e.g., stacked substrate holding stages 1910A-1910C). The first bottom arm and the first top arm of the first double arms are arranged such that the bottommost link of the first double arms is located within a height of approximately 120.5 mm (the sum of distances DX4 and DX5 minus distance DX1) below the substantially horizontal substrate delivery plane LTP corresponding to the bottommost end effector of the first double arms.

[0120] The substrate delivery device 104, alone or in any suitable combination thereof, includes one or more of the following: The second bottom arm 210B, 1600C and the second top arm 210C, 1600D of the second double arms 210B, 210C, 1600D are arranged such that the bottommost link of the second double arms is located within a height of approximately 120.5 mm below the substantially horizontal substrate delivery plane LTP corresponding to the bottommost end effector of the second double arms. The pairs of arms are arranged such that the bottom link of the pairs of arms (see example) Figures 15A to 18 It is located at a height of approximately 120.5 mm below the substantially horizontal substrate delivery plane LTP corresponding to the bottom end effector of the paired arms; At least one other motor 200T, 200TA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200L1, 200L2 is arranged to move laterally with at least one other degree of freedom (see example). Figure 18 The corresponding arms 210, 210A, 1600A, 1600B, 210C, 210D, 1600C, 1600D, such that each corresponding end effector 211, 211A-211D of the corresponding arms 210, 210A, 1600A, 1600B, 210C, 210D, 1600C, 1600D extends and is laterally laterally displaced along the substantially horizontal substrate transport plane LTP relative to the corresponding end effector 211, 211A-211D of each other corresponding arm 210, 210A, 1600A, 1600B, 210C, 210D, 1600C, 1600D of the paired arms; At least one other motor 200T, 200TA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200L1, 200L2 is configured to rotate with at least one other degree of freedom (e.g., such as about axes SX, SXA-SXD, at least one or more) the corresponding arms 210, 210A, 1600A, 1600B, 210C, 210D, 1600C, 1600D, such that each corresponding end effector 211, 211A-211D of the corresponding arms 210, 210A, 1600A, 1600B, 210C, 210D, 1600C, 1600D extends and laterally transverses along a substantially horizontal substrate transport plane; At least one other motor, 200T, 200TA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200L1, or 200L2, is configured to laterally traverse independently of each of the second top actuator and the second bottom end actuator (see, for example...). Figure 18 At least one of a first top end effector and a first bottom end effector; Each of the first bottom arms 210, 1600A and the first top arms 210A, 1600B is arranged at a different horizontal height relative to the reference plane RP of the substrate delivery device 104, and the first bottom arms 210, 1600A and the first top arms 210A, 1600B are arranged such that the total height OAH of the first dual arms 210, 210A, 1600A, 1600B from the reference plane RP including the bottommost link to the height OAH including the topmost link is decoupled from the stack height STK of each arm link of the first dual arms, and the first bottom end effector and the first top end effector are each positioned at a different elevation in the reference stack along a reference common axis RCA defined by at least one shoulder axis SX of the first bottom arm and the first top arm (see [reference]). Figure 15A , Figure 16A , Figure 17A ); The total height OAH limits the minimum total height of the first dual arms 210, 210A, 1600A, and 1600B, which is less than the stack height STK of the first dual arms set in the reference stack. The first bottom arms 210, 1600A have a first shoulder axis, which corresponds to and extends about the first bottom arms, and the first top arms 210A, 1600B have another first shoulder axis (see [link to article]). Figure 16A-17C Another first shoulder axis corresponds to the first top arm and the first top arm extends about the other first shoulder axis, the first shoulder axis and the other first shoulder axis are separate from each other and different; The drive section 200 has first motors 200T, 200TA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200L1, and 200L2, whose first drive axis is substantially coincident with the first shoulder axis. The drive section also has second motors 200T, 200TA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200L1, and 200L2, which are different from the first motors. The second motors have a second drive axis that is substantially coincident with the second shoulder axis. The second double arms 210C, 210D, 1600C, 1600D are arranged across an axis (e.g., a linear axis that intersects the rotation axis BX and extends between the extension axes EXT1, EXT2) in a substantially mirror arrangement of the first double arms 210, 210A, 1600A, 1600B, which divides the conveyor 104 into a right-hand side and a left-hand side. The drive section 200 is at least one of a seven-motor drive section and an eight-motor drive section. Each motor 200T, 200TA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200L1, and 200L2 of the at least one of the seven-motor drive section and the eight-motor drive section describes an independent degree of freedom in the horizontal substrate transport plane. At least one of the seven-motor drive section and the eight-motor drive section has at least one lifting motor 200Z, 200Z1 that is different from each of the other motors 200T, 200TA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200L1, 200L2 in the seven-motor drive section and the eight-motor drive section. The lifting motor 200Z, 200Z1 raises and lowers the horizontal substrate transport plane and describes another independent degree of freedom that is different from the independent degrees of freedom in the substantially horizontal substrate transport plane LTP. At least one lifting motor 200Z, 200Z1 has more than one different lifting motor 200Z, 200Z1, the lifting motors 200Z, 200Z1 being arranged and operably connected to the first double arms 210, 210A, 1600A, 1600B and the second double arms 210C, 210D, 1600C, 1600D such that the first double arms 210, 210A, 1600A, 1600B and the second double arms 210C, 210D, 1600B are connected to each other. Each of 600C and 1600D rises and falls by a predetermined stroke, such that at least one of the first double arms 210, 210A, 1600A, 1600B and the second double arms 210C, 210D, 1600C, 1600D rises and falls independently by a predetermined stroke relative to the other of the first double arms 210, 210A, 1600A, 1600B and the second double arms 210C, 210D, 1600C, 1600D; and At least one first top arm link of the first top arm 210A, 1600B includes a first top upper arm rotatable about a corresponding shoulder joint and a first top forearm connected to the first top upper arm at a corresponding elbow joint, wherein the lengths of the first top forearm and the first top upper arm from the joint center to the joint center are not equal; and at least one first bottom arm link of the first bottom arm 210, 1060A includes a first bottom upper arm rotatable about a corresponding shoulder joint and a first bottom forearm connected to the first bottom upper arm at a corresponding elbow joint, wherein the lengths of the first bottom forearm and the first bottom upper arm from the joint center to the joint center are equal (see...). Figures 15A to 17C ).

[0121] refer to Figures 1A to 5C , Figures 13A to 13F , Figures 15A to 18 , Figure 19 and Figure 20 An exemplary method will be described in accordance with this disclosure. The method includes providing a substrate delivery device 104 as described herein. Figure 20 (See frame 2000). For example, substrate delivery device 104 includes a base 201 and a pair of arms (although reference 2000 is also available). Figures 13A to 13F and Figures 15A to 18 However, the approach described in this article can be adopted. Figures 1A to 18 (Any of the described dual-arm robots). The paired dual arms have first dual arms 210, 210A, 1600A, 1600B, 1300A and second dual arms 210C, 210D, 1600C, 1600D, 1300B. The first dual arms 210, 210A, 1600A, 1600B, 1300A are juxtaposed with respect to the second dual arms 210C, 210D, 1600C, 1600D, 1300B. The first dual arms 210, 210A, 1600A, 1600B, 1300A have a first top arm 210A, 1600B with a first top end effector. Figures 15A to 18 ), 211A ( Figures 13A to 13F ), and the first bottom arm 210, 1600A with a first bottom end effector ( Figures 15A to 18 ), 211B ( Figures 13A to 13F The second dual arms 210B, 210C, 1600C, and 1600D have second top arms 210C, 1600D, and 211AA with second top end effectors, and second bottom arms 210B, 1600C, and 211BB with second bottom end effectors. The first top arms 210A, 1600B, and 211A and the first bottom arms 210A, 1600A, and 211B each have an end joint BX (…). Figures 15A to 18 ), SX ( Figures 13A to 13F The first top arms 210A, 1600B, 211A and the first bottom arms 210, 1600A, 211B rotate about and extend from the end joint, respectively. End joints BX, SX are common to each of the first top arms 210A, 1600B, 211A and the first bottom arms 210, 1600A, 211B, and connect each of the first top arms 210A, 1600B, 211A and the first bottom arms 210, 1600A, 211B to the base 201 via the common end joints BX, SX. The first top arms 210A, 1600B, 211A have at least one first top arm link and a first top end effector attached thereto at the distal end of at least one first top arm link (see [link]). Figures 13A to 13F and Figures 15A to 18 The first bottom arms 210, 1600A, 211B have at least one first bottom arm link and a first bottom end effector attached thereto at the distal end of at least one first bottom arm link (see...). Figures 13A to 13F and Figures 15A to 18 The first top end effector and the first bottom end effector extend at least partially overlapping each other.

[0122] The method includes utilizing at least one motor 200T, 200TA, 200TAA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, or 200TA2 connected to a drive section 200 of each corresponding arm 210, 1600A, 210A, 1600B, 211A, 211B, 211AA, 211BB in a pair of arms. 200TD, 200TD1, 200TWA1-200TWA4, 200L1, 200L2, such that each corresponding arm 210, 1600A, 210A, 1600B, 211A, 211B, 211AA, 211BB extends independently of each other corresponding arm 210, 1600A, 210A, 1600B, 211A, 211B, 211AA, 211BB in the paired arms, extending with at least one degree of freedom. Figure 20 (Frame 2010). The corresponding arms 210, 1600A, 210A, 1600B, 211A, 211B, 211AA, 211BB utilize at least one other motor 200T, 200TA, 200TAA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200TWA1-200TWA4, 200L1, 200L2 with at least one other degree of freedom to move laterally ( ). Figure 20 (Box 2020) such that each corresponding end effector of the respective arms 210, 1600A, 210A, 1600B, 211A, 211B, 211AA, 211BB extends and laterally transverses relative to the corresponding end effector of at least another corresponding arm 210, 1600A, 210A, 1600B, 211A, 211B, 211AA, 211BB along the substantially horizontal substrate transport plane LTP.

[0123] The method includes using another motor 200Z, 200Z1, 200Z2 in the drive section to raise and lower the corresponding end effector. Figure 20 (See box 2030). Another motor 200Z, 200Z1, 200Z2 describes movement with a predetermined stroke along a direction substantially orthogonal to the substantially horizontal substrate transport plane LTP, raising and lowering the corresponding end effectors such that at least the first top end effector and the first bottom end effector each have a predetermined stroke of substantially 175 mm from the triple stack loading lock 102 (see box 2030). Figure 19The substrate is placed and picked up at each horizontal height (e.g., stacked substrate holding stages 1910A-1910C). The first bottom arm and the first top arm of the first double arms are arranged such that the bottommost link of the first double arms is located within a height of approximately 120.5 mm below the substantially horizontal substrate delivery plane LTP corresponding to the bottommost end effector of the first double arms.

[0124] The method, alone or in any suitable combination thereof, includes one or more of the following: Each link of the first top arms 210A and 1600B is separate from and different from each link of the first bottom arms 210 and 1600A; The second bottom arms 210B, 1600C, 1600D, and 1300B of the second double arms 210B, 1600C, and 211BB, and the second top arms 210C, 1600D, and 211AA are arranged such that the bottommost link of the second double arms is located within a height of approximately 120.5 mm below the substantially horizontal substrate delivery plane LTP corresponding to the bottommost end effector of the second double arms. The pairs of arms are arranged such that the bottom link of the pairs of arms (see example) Figures 15A to 18 It is located at a height of approximately 120.5 mm below the substantially horizontal substrate delivery plane LTP corresponding to the bottom end effector of the paired arms; At least one other motor 200T, 200TA, 200TAA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200TWA1-200TWA3, 200L1, 200L2 is arranged such that the corresponding arms 210, 210A, 1600A, 1600B, 210C, 210D, 1600C, 1600D, 211A, 211AA, 211B, 211BB are laterally laterally traversed with at least one other degree of freedom (see example). Figure 18 This causes each corresponding end effector of the respective arms 210, 210A, 1600A, 1600B, 210C, 210D, 1600C, 1600D, 211A, 211AA, 211B, 211BB to extend and laterally traverse along the substantially horizontal substrate transport plane LTP relative to the corresponding end effector of each other corresponding arm 210, 210A, 1600A, 1600B, 210C, 210D, 1600C, 1600D, 211A, 211AA, 211B, 211BB in the pair of arms.

[0125] At least one other motor, 200T, 200TA, 200TAA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200TWA1-200TWA4, 200L1, 200L2, is configured to rotate with at least one other degree of freedom (e.g., such as about axis S). At least one or more of X, SXA-SXD) of corresponding arms 210, 210A, 1600A, 1600B, 210C, 210D, 1600C, 1600D, 211A, 211AA, 211B, 211BB, such that each corresponding end effector of corresponding arms 210, 210A, 1600A, 1600B, 210C, 210D, 1600C, 1600D, 211A, 211AA, 211B, 211Bb extends and laterally transverses along a substantially horizontal substrate delivery plane; At least one other motor 200T, 200TA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200L1, 200L2 is configured to laterally traverse independently of each of the second top and second bottom end actuators (see, for example...). Figure 18 At least one of the first top and first bottom end actuators; Each of the first bottom arms 210, 1600A and the first top arms 210A, 1600B is arranged at a different horizontal height relative to the reference plane RP of the substrate delivery device 104, and the first bottom arms 210, 1600A and the first top arms 210A, 1600B are arranged such that the total height OAH from the reference plane RP of the first dual arms 210, 210A, 1600A, 1600B, including the bottommost link, to the total height OAH including the topmost link, is decoupled from the stack height STK of each arm link of the first dual arms, and the first bottom end effector and the first top end effector are each positioned at a different elevation in the reference stack along a reference common axis RCA defined by at least one shoulder axis SX of the first bottom arms and the first top arms (see [reference]). Figure 15A , Figure 16A , Figure 17A ); The total height OAH limits the minimum total height of the first dual arms 210, 210A, 1600A, and 1600B, which is less than the stack height STK of the first dual arms set in the reference stack. The first bottom arms 210, 1600A have a first shoulder axis, which corresponds to and extends relative to the first bottom arms, and the first top arms 210A, 1600B have another first shoulder axis (see [link to article]). Figure 16A-17C Another first shoulder axis corresponds to the first top arm and the first top arm extends relative to the other first shoulder axis, the first shoulder axis and the other first shoulder axis are separate from each other and different; The drive section 200 has first motors 200T, 200TA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200L1, and 200L2, whose first drive axis is substantially coincident with the first shoulder axis. The drive section also has second motors 200T, 200TA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200L1, and 200L2, which are different from the first motors. The second motors have a second drive axis that is substantially coincident with the second shoulder axis. The second double arms 210C, 210D, 1600C, 1600D are arranged across an axis (e.g., a linear axis that intersects the rotation axis BX and extends between the extension axes EXT1, EXT2) in a substantially mirror arrangement of the first double arms 210, 210A, 1600A, 1600B, which divides the conveyor 104 into a right-hand side and a left-hand side. The drive section 200 is at least one of a seven-motor drive section and an eight-motor drive section. Each motor 200T, 200TA, 200TAA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200TWA1-200TWA4, 200L1, and 200L2 in the at least one of the seven-motor drive section and the eight-motor drive section describes an independent degree of freedom in the horizontal substrate transport plane. At least one of the seven-motor drive section and the eight-motor drive section has at least one lifting motor 200Z, 200Z1, 200Z2 that is different from each of the other motors 200T, 200TA, 200TAA, 200TA1, 200TA2, 200TA3, 200TA4, 200TB, 200TB1, 200TB2, 200TC, 200TC1, 200TD, 200TD1, 200TWA1-200TWA4, 200L1, 200L2 in the seven-motor drive section and the eight-motor drive section. The lifting motor raises and lowers the horizontal substrate transport plane and describes another independent degree of freedom that is different from the independent degrees of freedom in the substantially horizontal substrate transport plane LTP. At least one lifting motor 200Z, 200Z1, 200Z2 has more than one different lifting motor 200Z, 200Z1, 200Z2, which is arranged and operably connected to a first double arm 210, 210A, 1600A, 1600B, 1300A and a second double arm 210C, 210D, 1600C, 1600D, 1300B such that the first double arm 210, 210A, 1600A, 1600B Each of the first double arms 210, 210A, 1600A, 1600B, 1300A and the second double arms 210C, 210D, 1600C, 1600D, 1300B is raised and lowered by a predetermined stroke, such that at least one of the first double arms 210, 210A, 1600A, 1600B and the second double arms 210C, 210D, 1600C, 1600D, 1300B is raised and lowered independently of the other of the first double arms 210, 210A, 1600A, 1600B and the second double arms 210C, 210D, 1600C, 1600D by a predetermined stroke; and At least one first top arm link of the first top arm 210A, 1600B includes a first top upper arm rotatable about a corresponding shoulder joint and a first top forearm connected to the first top upper arm at a corresponding elbow joint, wherein the lengths of the first top forearm and the first top upper arm from the joint center to the joint center are not equal; and at least one first bottom arm link of the first bottom arm 210, 1060A includes a first bottom upper arm rotatable about a corresponding shoulder joint and a first bottom forearm connected to the first bottom upper arm at a corresponding elbow joint, wherein the lengths of the first bottom forearm and the first bottom upper arm from the joint center to the joint center are equal (see...). Figures 15A to 17C ).

[0126] The following are provided under this disclosure and may be used individually, in any combination of each other, and / or in any combination with the features described above: According to this disclosure, a brushless electric motor includes: a frame; a motor stator connected to the frame and having phase coils disposed in an atmospheric volume maintaining an atmospheric environment; a motor rotor cooperatively coupled to the motor stator to generate an output under excitation from the motor stator, the motor rotor being disposed in a sealed environment that is sealed and isolated from and different from the atmospheric volume; and a seal that seals and isolates the motor rotor from the motor stator; wherein the motor rotor and the motor stator are arranged with an axial clearance, wherein the axial clearance between the motor rotor and the motor stator is disposed across the motor stator, and the seal is disposed in the axial clearance to seal and isolate each motor stator from each motor rotor excited by the motor stator across the seal.

[0127] Brushless motors may be individually or in any suitable combination thereof, including one or more of the following: The axial clearance arrangement is configured such that the motor stator excites the motor rotor across the axial clearance; The sealed environment and the atmospheric environment within the sealed volume are sealed and isolated from each other by sealing components. The seal is axially positioned between each motor rotor element and each motor stator of the excitation motor rotor; The seal has at least one sealing disc portion that spans the entire axial clearance and radially separates the motor stator from the motor rotor. The seal conforms to at least one of the motor stator and the motor rotor; and The motor stator has stator rings arranged axially, and the motor rotor has rotor rings arranged axially.

[0128] According to this disclosure, a method includes: providing a brushless motor having: a frame; a motor stator connected to the frame and having phase coils; and a motor rotor cooperatively coupled to the motor stator to generate an output under excitation from the motor stator; and sealingly isolating the motor rotor from the motor stator using a seal, such that the phase coils are disposed in an atmospheric volume maintaining an atmospheric environment, and the motor rotor is disposed in a sealed environment sealed and different from the atmospheric volume; wherein the motor rotor and the motor stator are arranged with an axial clearance, wherein the axial clearance between the motor rotor and the motor stator is disposed across the motor stator, and the seal is disposed in the axial clearance to seal each motor stator from each motor rotor excited by the motor stator across the seal.

[0129] The method, alone or in any suitable combination thereof, may include one or more of the following: The stator axial clearance of the motor drives the motor rotor; The sealed environment and the atmospheric environment within the sealed volume are sealed and isolated from each other by sealing components.

[0130] The seal is axially positioned between each motor rotor element and each motor stator of the excitation motor rotor.

[0131] The seal has at least one sealing disc portion that spans the entire axial clearance and radially separates the motor stator from the motor rotor. The seal conforms to at least one of the motor stator and the motor rotor; and The motor stator has stator rings arranged axially, and the motor rotor has rotor rings arranged axially.

[0132] According to this disclosure, a substrate delivery device includes: a base; an arm having an end joint, the arm rotating and extending about the end joint, and having more than one arm link and an end effector attached thereto, each arm link being connected in series with the end effector at a distal end of the arm; and a distributed drive section operatively connected to the arm, having more than one degree of freedom to realize movement of the end effector commensurate with the more than one degree of freedom; wherein one of the more than one arm links is a direct drive link, which is dependent on and directly driven by a direct drive motor of the distributed drive section, and is disposed on the arm at a link joint distal to the end joint; and wherein the end effector or at least another arm link of the more than one arm link is at least one of the following: directly driven by another direct drive motor of the distributed drive section on the arm, and follows the direct drive link.

[0133] The substrate delivery device may, alone or in any suitable combination thereof, include one or more of the following: Each direct drive motor on the arm has a sealed rotor that is sealed and isolated from the atmospheric environment of the stator of the direct drive motor. The direct drive linkage has an integrated motor rotor of a direct drive motor with a direct drive linkage.

[0134] The direct drive motor at the distal joint and the direct drive linkage driven by the direct drive motor are connected to each other by a coupling without a transmission device. The arm can be selectively configured between a hybrid configuration and a full-motor configuration, in which the end effector or at least one of more arm links follows a direct-drive link, and in the full-motor configuration, the end effector or at least one of more arm links is directly driven by another direct-drive motor, such that in the full-motor configuration, each arm link and the end effector is directly driven by a corresponding direct-drive motor; The base includes a non-hinged link with a rotation axis at the proximal end, wherein the end joint is located at the distal end of the non-hinged link. The base includes more than one series-connected articulated link, wherein the proximal end of the series-connected articulated link is located at the rotation axis of the base, and the end joint is located at the distal end of the series-connected articulated link. More than one arm is connected to the base at the corresponding end joint; The arm is a SCARA arm; The SCARA arm includes: a common upper arm link having a first end and a second end, wherein an end joint is disposed between the first end and the second end; at least one forearm link disposed at the first end of the common upper arm link and at least one other forearm joint disposed at the second end of the common upper arm link; and at least one end effector coupled to each of the at least one forearm and the at least one other forearm link. The base includes a turret with side-by-side transmission arm supports, wherein each transmission arm support supports a corresponding arm at a corresponding end joint located at the transmission arm support. Each corresponding arm is a SCARA arm; The end effector is directly driven by another direct drive motor of the distributed drive section, wherein the end effector is at least one of the following: a single-end end effector; a dual end effector having side-by-side substrate holding positions in a common plane; a dual end effector having substrate holding positions disposed at opposite ends of the dual end effector in a common plane; an end effector having three substrate holding positions disposed in a common plane; and an end effector having four substrate holding positions disposed in a common plane; An end effector follows a direct-drive link, wherein the end effector is at least one of the following: a single-end end effector; a dual-end end effector having side-by-side substrate holding positions in a common plane; and a dual-end end effector having substrate holding positions disposed at opposite ends of the dual-end end effector in a common plane; and The distributed drive section provides vertical travel for the arm to move the end effector by one or more of the following: a vertical distance of at least about 175 mm; a vertical distance of at least about 5 mm above the uppermost substrate held at the uppermost substrate holding stage of the loading lock, the uppermost substrate holding stage being configured to hold the substrate in a stationary substrate stack relative to the frame of the loading lock; and a vertical distance of at least about 5 mm below the lowermost substrate held at the lowermost substrate holding stage of the loading lock, the lowermost substrate holding stage being configured to hold the substrate in a stationary substrate stack relative to the frame of the loading lock.

[0135] According to this disclosure, a method includes: providing a substrate delivery device having: a base; an arm having an end joint that rotates and extends about the end joint, and having more than one arm link and an end effector attached thereto, each arm link being connected in series with the end effector at a distal end of the arm; and a distributed drive section operably connected to the arm, having more than one degree of freedom; using the distributed drive section to realize motion of the end effector commensurate with the more than one degree of freedom; wherein one of the more than one arm link is a direct drive link, the direct drive link being dependent on and directly driven by a direct drive motor of the distributed drive section, and disposed on the arm at a link joint distal to the end joint; and wherein the end effector or at least another arm link of the more than one arm link is at least one of: being directly driven by another direct drive motor of the distributed drive section on the arm, and following the direct drive link.

[0136] The method, alone or in any suitable combination thereof, may include one or more of the following: Each direct drive motor on the arm has a sealed rotor that is sealed and isolated from the atmospheric environment of the stator of the direct drive motor. The direct drive link is directly driven by the integrated motor rotor of the direct drive motor of the direct drive link; The direct drive motor at the distal joint and the direct drive linkage driven by the direct drive motor are connected to each other by a coupling without a transmission device. The arms can be configured selectively between a hybrid configuration and a full-motor configuration, in which the end effector or at least one of more arm links follows a direct-drive link, and in the full-motor configuration, the end effector or at least one of more arm links is directly driven by another direct-drive motor, such that in the full-motor configuration, each arm link and the end effector is directly driven by a corresponding direct-drive motor. The base includes a non-hinged link with a rotation axis at the proximal end, wherein the end joint is located at the distal end of the non-hinged link. The base includes more than one series-connected articulated link, wherein the proximal end of the series-connected articulated link is located at the rotation axis of the base, and the end joint is located at the distal end of the series-connected articulated link. More than one arm is connected to the base at the corresponding end joint; The arm is a SCARA arm; The SCARA arm includes: a common upper arm link having a first end and a second end, wherein an end joint is disposed between the first end and the second end; at least one forearm link disposed at the first end of the common upper arm link and at least one other forearm joint disposed at the second end of the common upper arm link; and at least one end effector coupled to each of the at least one forearm and the at least one other forearm link. The base includes a turret with side-by-side transfer arm supports, wherein each transfer arm support supports a corresponding arm at a corresponding end joint located at the transfer arm support. Each corresponding arm is a SCARA arm; The end effector is directly driven by another direct drive motor of the distributed drive section, wherein the end effector is at least one of the following: a single-end end effector; a dual end effector having side-by-side substrate holding positions in a common plane; a dual end effector having substrate holding positions disposed at opposite ends of the dual end effector in a common plane; an end effector having three substrate holding positions disposed in a common plane; and an end effector having four substrate holding positions disposed in a common plane; An end effector follows a direct-drive link, wherein the end effector is at least one of the following: a single-end end effector; a double-end end effector having side-by-side substrate holding positions in a common plane; and a double-end end effector having substrate holding positions disposed at opposite ends of the double-end end effector in a common plane; and The distributed drive section provides vertical travel for the arm to move the end effector by one or more of the following: a vertical distance of at least about 175 mm; a vertical distance of at least about 5 mm above the uppermost substrate held at the uppermost substrate holding stage of the loading lock, the uppermost substrate holding stage being configured to hold the substrate in a stationary substrate stack relative to the frame of the loading lock; and a vertical distance of at least about 5 mm below the lowermost substrate held at the lowermost substrate holding stage of the loading lock, the lowermost substrate holding stage being configured to hold the substrate in a stationary substrate stack relative to the frame of the loading lock.

[0137] According to this disclosure, a substrate delivery device includes: a base; at least two parallel arms, each arm having an end joint about which the arm rotates and extends, the end joint being common to each arm and connecting each arm to the base via the common end joint, each arm having at least one arm link and an end effector attached thereto, each arm link being connected in series with the end effector at a distal end of the arm; and a distributed drive section operatively connected to each arm, wherein the distributed drive section has more than one individual motor, each motor defining an independent drive axis, operatively connected to each arm to describe at least one degree of freedom of motion of the end effector of the respective arm commensurate with the more than one independent drive axis connected to the respective arm; wherein the end effector of each of the at least two parallel arms or one arm link of the at least two arm links depends on and is directly driven by a direct drive motor of the distributed drive section, and is disposed on the respective arm at a link joint distal to the end joint.

[0138] The substrate delivery device may, alone or in any suitable combination thereof, include one or more of the following: At least one degree of freedom of motion of an end effector or arm link is decoupled from at least one degree of freedom of motion of each other end effector or arm link of each of at least two other corresponding arms in a juxtaposed arm; The substrate delivery device also includes a Z-drive motor, which is located at a link joint distal to the end joint of at least one arm, so as to decouple the Z-motion of the end effector of the respective arm in at least two parallel arms from each other arm. The substrate delivery device also includes a Z-driver at the end joint, which enables differential Z-motion between each of the at least two parallel arms; Each corresponding arm has two end effectors and a stacked drive motor at the link joint distal to the end joint, so that each end effector of the corresponding arm can be driven independently of each other end effector; Each direct drive motor on the arm has a sealed rotor, which is sealed and isolated from the atmospheric environment of the stator of the direct drive motor; and The distributed drive section provides vertical travel for each arm to move the end effector by one or more of the following: a vertical distance of at least about 175 mm; a vertical distance of at least about 5 mm above the uppermost substrate held at the uppermost substrate holding stage of the loading lock, the uppermost substrate holding stage being configured to hold the substrate in a stationary substrate stack relative to the frame of the loading lock; and a vertical distance of at least about 5 mm below the lowermost substrate held at the lowermost substrate holding stage of the loading lock, the lowermost substrate holding stage being configured to hold the substrate in a stationary substrate stack relative to the frame of the loading lock.

[0139] According to this disclosure, a substrate delivery device includes: a base; a common rotary joint; at least two parallel arms, each arm having a corresponding end joint, each corresponding arm rotating and extending about the end joint, the end joint of each corresponding arm connecting the corresponding arm to the base via the common rotary joint, each arm having more than one arm link and an end effector attached thereto, each arm link being connected in series with the end effector at a distal end of the arm; and a distributed drive section operatively connected to each arm, wherein the distributed drive section has more than one individual motor, each motor defining an independent drive axis, operatively connected to each arm to describe at least one degree of freedom of motion of the end effector of the corresponding arm commensurate with the more than one independent drive axis connected to the corresponding arm; wherein one of the more than one arm links of each of the at least two arms is a direct drive link, which depends on and is directly driven by the direct drive motor of the distributed drive section, and is disposed on the corresponding arm at a link joint distal to the end joint.

[0140] The substrate delivery device may, alone or in any suitable combination thereof, include one or more of the following: The end effector or at least one other arm link in more than one arm link is at least one of the following: directly driven by another direct drive motor of a distributed drive section on the arm; and followed by a direct drive link; At least two juxtaposed arms comprise stacked arms, wherein the stack of arms is juxtaposed relative to each other; At least one of the two parallel arms has an arm link of equal length; At least one of the at least two parallel arms has arm links of unequal length; and The distributed drive section provides vertical travel for each arm to move the end effector by one or more of the following: a vertical distance of at least about 175 mm; a vertical distance of at least about 5 mm above the uppermost substrate held at the uppermost substrate holding stage of the loading lock, the uppermost substrate holding stage being configured to hold the substrate in a stationary substrate stack relative to the frame of the loading lock; and a vertical distance of at least about 5 mm below the lowermost substrate held at the lowermost substrate holding stage of the loading lock, the lowermost substrate holding stage being configured to hold the substrate in a stationary substrate stack relative to the frame of the loading lock.

[0141] According to this disclosure, a substrate processing apparatus includes: a substrate transport chamber that is substantially hexahedral in shape and is sealed to maintain a chamber atmosphere, the chamber having two linear sides of the hexahedron extending in a lateral direction, and at least one end wall of the hexahedron substantially orthogonal to the linear sides, the at least one end wall having two end substrate transport openings, each of the end substrate transport openings and the side substrate transport openings being arranged for transporting a substrate through it into and out of the substrate transport chamber; at least one of the linear sides having two side substrate transport openings arranged in a lateral direction at a common horizontal height, each of the substrate transport openings being for coupling to a corresponding processing module and communicating with the substrate transport chamber; and two pairs of SCARA arms. It is connected to the frame and disposed within the sealed chamber. Each SCARA arm is a multi-link arm and has an independent drive axis for extending and retracting the corresponding arm, such that the first SCARA arm has a first independent drive axis, the second SCARA arm has a second independent drive axis, the third SCARA arm has a third independent drive axis, and the fourth SCARA arm has a fourth independent drive axis, each of the first, second, third, and fourth drive axes being different from each other; an outer drive section, located outside the sealed chamber and connected to the two pairs of SCARA arms, for moving the two pairs of SCARA arms about a common axis; and an inner drive section located inside the sealed chamber, the inner drive... The segment includes a sealed housing configured to maintain a sealed atmosphere different from the chamber atmosphere; wherein the sealed housing has different sealed motors distributed within the sealed chamber, including: a first sealed rotary motor for describing a first independent drive axis of at least a first SCARA arm; a second sealed rotary motor sealed separately from the first sealed rotary motor and providing a second drive axis different from the first drive axis, wherein the second drive axis describes a second independent drive axis of at least a second SCARA arm; and a third sealed rotary motor sealed separately from the first and second sealed rotary motors and providing a third drive axis different from the first and second drive axes, the third drive axis... The third independent drive axis of the third SCARA arm is described; and the fourth sealed rotary motor is sealed separately from the first, second and third sealed rotary motors and provides a fourth drive axis different from the first, second and third drive axes, the fourth drive axis describing the fourth independent drive axis of the fourth SCARA arm; wherein the first, second, third and fourth sealed motors are arranged in a tightly packed cluster (each sealed motor offset from each other) distributed in a sealed chamber, such that the outermost span width of the tightly packed cluster is proportional to the lateral distance from the outer edge to the outer edge of the two side substrate delivery openings.

[0142] It should be understood that the foregoing description is for illustrative purposes only. Various alternatives and modifications can be devised by those skilled in the art without departing from this disclosure. Therefore, this disclosure is intended to encompass all such substitutions, modifications, and variations that fall within the scope of any of the appended claims. Furthermore, the fact that different features are referenced in mutually different dependent or independent claims does not imply that combinations of these features cannot be advantageously used, and such combinations remain within the scope of this disclosure.

[0143] What needs protection is:

Claims

1. A brushless electric motor, comprising: frame; An electric motor stator, the electric motor stator being connected to the frame and having phase coils disposed in an atmospheric volume that maintains the atmospheric environment; An electric motor rotor, cooperatively coupled to the electric motor stator to generate an output under excitation from the electric motor stator, the electric motor rotor being disposed in a sealed environment that is sealed and isolated from the atmospheric volume and is different from the atmospheric volume; and A sealing element that seals and isolates the motor rotor from the motor stator; The motor rotor and motor stator are arranged with an axial gap, wherein the axial gap between the motor rotor and motor stator is provided across the motor stator, and the seal is arranged in the axial gap to seal and isolate each motor stator from each motor rotor excited by the motor stator across the seal.

2. The brushless motor according to claim 1, wherein, The axial clearance arrangement is configured such that the motor stator excites the motor rotor across the axial clearance.

3. The brushless motor according to claim 1, wherein, The sealed environment and the atmospheric environment within the sealed volume are respectively sealed and isolated from each other by the sealing element.

4. The brushless motor according to claim 1, wherein, The seal is axially positioned between each motor rotor element and each motor stator that drives the motor rotor.

5. The brushless motor according to claim 1, wherein, The seal has at least one sealing disc portion that spans the entire axial clearance to radially separate the motor stator from the motor rotor.

6. The brushless motor according to claim 1, wherein, The seal is conformal to at least one of the motor stator and the motor rotor.

7. The brushless motor according to claim 1, wherein, The motor stator has axially arranged stator rings, and the motor rotor has axially arranged rotor rings.

8. A method comprising: Provides brushless motors with the following features: frame; A motor stator, the motor stator being connected to the frame and having phase coils, and An electric motor rotor, which is cooperatively coupled to the electric motor stator, in order to generate an output under excitation from the electric motor stator; as well as The motor rotor is sealed and isolated from the motor stator by a sealing element, so that the phase coil is placed in an atmospheric volume that maintains the atmospheric environment, and the motor rotor is placed in a sealed environment that is sealed and isolated from the atmospheric volume and is different from it; The motor rotor and motor stator are arranged with an axial clearance, wherein the axial clearance between the motor rotor and motor stator is provided across the motor stator, and the seal is arranged in the axial clearance to seal and isolate each motor stator from each motor rotor excited by the motor stator across the seal.

9. The method according to claim 8, wherein, The motor stator excites the motor rotor across the axial gap.

10. The method according to claim 8, wherein, The sealed environment and the atmospheric environment within the sealed volume are respectively sealed and isolated from each other by the sealing element.

11. The method according to claim 8, wherein, The seal is axially positioned between each motor rotor element and each motor stator that drives the motor rotor.

12. The method of claim 8, wherein: The seal has at least one sealing disc portion that spans the entire axial clearance and radially separates the motor stator from the motor rotor. or The seal is conformal to at least one of the motor stator and the motor rotor.

13. The method according to claim 8, wherein, The motor stator has axially arranged stator rings, and the motor rotor has axially arranged rotor rings.

14. A substrate delivery device, comprising: Base; An arm having an end joint, the arm rotating and extending about the end joint, and having more than one arm link and an end effector attached thereto, each arm link being connected in series with the end effector at the distal end of the arm; and A distributed drive section having more than one degree of freedom is operably connected to the arm to realize the motion of the end effector in proportion to the more than one degree of freedom; One of the more than one arm links is a direct drive link, which is directly driven by and dependent on the direct drive motor of the distributed drive section, and is located on the arm at the link joint distal to the end joint; and Wherein, the end effector or at least one of the more than one arm link is at least one of the following: directly driven by another direct drive motor of the distributed drive section on the arm, and followed by the direct drive link.

15. The substrate transport apparatus according to claim 14, wherein, Each direct drive motor on the arm has a sealed rotor that is sealed and isolated from the atmospheric environment of the stator of the direct drive motor.

16. The substrate transport apparatus according to claim 14, wherein, The direct drive link has an integrated motor rotor of the direct drive motor that directly drives the link.

17. The substrate transport apparatus according to claim 14, wherein, The direct drive motor at the distal joint and the direct drive linkage driven by the direct drive motor are connected to each other by a coupling without a transmission device.

18. The substrate delivery apparatus of claim 14, wherein the arms are selectively configured between a hybrid configuration and a full-motor configuration, wherein in the hybrid configuration the end effector or at least one of the more than one arm links follows the direct drive link, and in the full-motor configuration the end effector or at least one of the more than one arm links is directly driven by another direct drive motor, such that in the full-motor configuration each arm link and the end effector are directly driven by a corresponding direct drive motor.

19. The substrate transport apparatus according to claim 14, wherein: The end effector is directly driven by another direct drive motor of the distributed drive section, wherein the end effector is at least one of the following: Single-ended end effector; A dual-end actuator with side-by-side substrates maintaining position in a common plane; A dual-end actuator having substrate holding positions disposed at opposite ends of the dual-end actuator in a common plane; An end effector having three substrates arranged in a common plane to maintain position; and An end effector having four substrates held in position arranged in a common plane; or The end effector follows the direct drive link, wherein the end effector is at least one of the following: Single-ended end effector; A dual-end actuator with side-by-side substrates maintaining their positions in a common plane; and A dual-end actuator having substrate holding positions disposed at opposite ends of the dual-end actuator in a common plane.

20. The substrate transport apparatus according to claim 14, wherein, The distributed drive section provides vertical travel to the arm so that the end effector can move one or more of the following: At least approximately 175mm of vertical distance; At a vertical distance of at least about 5 mm above the uppermost substrate held at the uppermost substrate holding stage of the loading lock, the uppermost substrate holding stage is configured to hold the substrate in a stationary substrate stack relative to the frame of the loading lock. and At a vertical distance of at least about 5 mm below the lowest substrate held at the lowest substrate holding stage of the loading lock, the lowest substrate holding stage is configured to hold the substrate in the stationary substrate stack relative to the frame of the loading lock.

21. A substrate delivery device, comprising: Base; A pair of arms, the pair of arms having a first arm and a second arm, the first arm being juxtaposed with respect to the second arm, the first arm having a first top arm with a first top end effector and a first bottom arm with a first bottom end effector, and the second arm having a second top arm with a second top end effector and a second bottom arm with a second bottom end effector; Each of the first top arm and the first bottom arm has an end joint, which rotates about and extends from the end joint, respectively. The end joint is common to each of the first top arm and the first bottom arm and connects each of the first top arm and the first bottom arm to a base via the common end joint. The first top arm has at least one first top arm link and a first top end actuator attached thereto at the distal end of the at least one first top arm link. The first bottom arm has at least one first bottom arm link and a first bottom end actuator attached thereto at the distal end of the at least one first bottom arm link. Each link of the first top arm is separate and different from each link of the first bottom arm, and the first top end actuator and the first bottom end actuator extend at least partially overlapping each other. as well as A drive section having at least one motor connected to each corresponding arm of the paired double arms, arranged such that each corresponding arm of the paired double arms extends independently of each other corresponding arm of the paired double arms with at least one degree of freedom, and the drive section having at least one other motor connected to each corresponding arm, the at least one other motor being arranged to laterally laterally move the corresponding arm with at least one more degree of freedom, such that each corresponding end effector of the corresponding arm extends and laterally laterally moves relative to the corresponding end effector of the at least one other corresponding arm of the paired double arms along a substantially horizontal substrate transport plane, and The drive section has another motor, which describes movement along a direction substantially orthogonal to the substantially horizontal substrate transport plane for a predetermined stroke, raising and lowering the corresponding end effectors, such that at least the first top end effector and the first bottom end effector each place and pick up the substrate from each horizontal height of the triple-stacked loading lock with a predetermined stroke of substantially 175 mm. The first bottom arm and the first top arm of the first double arms are arranged such that the bottommost link of the first double arms is located within a height of approximately 120.5 mm below the substrate delivery plane, which is substantially horizontal and corresponds to the bottommost end effector of the first double arms.

22. The substrate delivery apparatus of claim 21, wherein the second bottom arm and the second top arm of the second double arms are arranged such that the bottommost link of the second double arms is located within a height of approximately 120.5 mm below the substantially horizontal substrate delivery plane corresponding to the bottommost end effector of the second double arms.

23. The substrate delivery apparatus of claim 21, wherein the paired arms are arranged such that the bottom link of the paired arms is located within a height of approximately 120.5 mm below the substantially horizontal substrate delivery plane corresponding to the bottom end effector of the paired arms.

24. The substrate transport apparatus of claim 21, wherein the at least one other motor is: The respective arms are arranged to laterally transverse with the aforementioned at least one other degree of freedom, such that each corresponding end effector of the respective arm extends and laterally transverses relative to the corresponding end effector of each other corresponding arm in the pair of arms along the substantially horizontal substrate delivery plane; The respective arm is configured to rotate in the at least one other degree of freedom such that each corresponding end effector of the respective arm extends and laterally transverses along a substantially horizontal substrate delivery plane; or Configured to laterally laterally move at least one of the first top end effector and the first bottom end effector independently of each of the second top end effector and the second bottom end effector.

25. The substrate delivery apparatus of claim 21, wherein each of the first bottom arm and the first top arm is arranged at different horizontal heights relative to a reference plane of the substrate delivery apparatus, and the first bottom arm and the first top arm are arranged such that the total height of the first pair of arms from the reference plane including the bottommost link to and including the topmost link is decoupled from the stack height of each link of the first pair of arms, and a first bottom end effector and a first top end effector, each disposed in a reference stack at different elevations along a reference common axis defined by at least one shoulder axis of the first bottom arm and the first top arm.

26. The substrate transport apparatus according to claim 25, wherein, The total height defines a minimum total height for the first pair of arms, which is less than the stack height of the first pair of arms disposed in the reference stack.

27. The substrate delivery apparatus of claim 21, wherein the first bottom arm has a first shoulder axis corresponding to the first bottom arm and the first bottom arm extends relative to the first shoulder axis, and the first top arm has another first shoulder axis corresponding to the first top arm and the first top arm extends relative to the other first shoulder axis, the first shoulder axis and the other first shoulder axis being separate from and different from each other.

28. The substrate transport apparatus of claim 27, wherein the drive section has a first motor having a first drive axis substantially coincident with the first shoulder axis, and the drive section has a second motor different from the first motor having a second drive axis substantially coincident with the second shoulder axis.

29. The substrate transport apparatus according to claim 21, wherein, The second pair of arms are arranged across an axis in a substantially mirror image of the first pair of arms, the axis dividing the conveying device into a right-hand side and a left-hand side.

30. The substrate transport apparatus of claim 21, wherein the drive section is at least one of a seven-motor drive section and an eight-motor drive section, each motor of the at least one of the seven-motor drive section and the eight-motor drive section describing an independent degree of freedom in the horizontal substrate transport plane.

31. The substrate transport apparatus of claim 30, wherein at least one of the seven-motor drive section and the eight-motor drive section has at least one lifting motor that is different from each other motor of the seven-motor drive section and the eight-motor drive section, the lifting motor raising and lowering the horizontal substrate transport plane, and describing another independent degree of freedom that is different from the independent degree of freedom in the substantially horizontal substrate transport plane.

32. The substrate transport apparatus of claim 31, wherein the at least one lifting motor has more than one different lifting motor, the different lifting motors being arranged and operatively coupled to the first double arm and the second double arm such that each of the first double arm and the second double arm is raised and lowered by a predetermined stroke, and such that at least one of the first double arm and the second double arm is raised and lowered independently of the other of the first double arm and the second double arm by a predetermined stroke.

33. The substrate transport apparatus according to claim 21, wherein: The at least one first top arm link of the first top arm includes a first top upper arm rotatable about a corresponding shoulder joint and a first top forearm connected to the first top upper arm at a corresponding elbow joint, wherein the first top forearm and the first top upper arm have unequal lengths from the joint center to the joint center; and At least one first bottom arm link of the first bottom arm includes a first bottom upper arm rotatable about a corresponding shoulder joint and a first bottom forearm connected to the first bottom upper arm at a corresponding elbow joint, wherein the first bottom forearm and the first bottom upper arm are of equal length from the joint center to the joint center.

34. A method comprising: Provide a substrate delivery device, including: Base; A pair of arms, the pair of arms having a first arm and a second arm, the first arm being juxtaposed with respect to the second arm, the first arm having a first top arm with a first top end effector and a first bottom arm with a first bottom end effector, and the second arm having a second top arm with a second top end effector and a second bottom arm with a second bottom end effector. Each of the first top arm and the first bottom arm has an end joint, which rotates about and extends from the end joint, respectively. The end joint is common to each of the first top arm and the first bottom arm, and connects each of the first top arm and the first bottom arm to a base via the common end joint. Each first top arm has at least one first top arm link and a first top end actuator attached to the distal end of the at least one first top arm link. Each first bottom arm has at least one first bottom arm link and a first bottom end actuator attached to the distal end of the at least one first bottom arm link. The first top end actuator and the first bottom end actuator extend at least partially overlapping each other. Drive section; Using at least one motor connected to the drive section of each of the paired arms, each of the corresponding arms extends independently of each other of the paired arms with at least one degree of freedom; Using at least one other motor connected to the drive section of each corresponding arm, the corresponding arm is laterally moved with at least one other degree of freedom, such that each corresponding end effector of the corresponding arm extends and laterally moves relative to the corresponding end effector of at least one other corresponding arm of the paired arms along a substantially horizontal substrate transport plane, and The corresponding end effector is raised and lowered by another motor in the drive section, wherein the other motor describes movement along a direction substantially orthogonal to the substantially horizontal substrate delivery plane for a predetermined stroke, the movement raising and lowering the corresponding end effector such that at least the first top end effector and the first bottom end effector each place and pick up the substrate from each horizontal height of the triple-stacked loading lock with a predetermined stroke of substantially 175 mm. The first bottom arm and the first top arm of the first double arms are arranged such that the bottommost link of the first double arms is located within a height of approximately 120.5 mm below the substrate delivery plane, which is substantially horizontal and corresponds to the bottommost end effector of the first double arms.

35. The method of claim 34, wherein, The second bottom arm and the second top arm of the second double arms are arranged such that the bottommost link of the second double arms is located within a height of approximately 120.5 mm below the substrate delivery plane, which is substantially horizontal and corresponds to the bottommost end effector of the second double arms.

36. The method of claim 34, wherein, The paired arms are arranged such that the bottom link of the paired arms is located within a height of approximately 120.5 mm below the substantially horizontal substrate delivery plane corresponding to the bottom end effector of the paired arms.

37. The method of claim 34, wherein, The at least one other motor: The respective arms are arranged to laterally transverse with the aforementioned at least one other degree of freedom, such that each corresponding end effector of the respective arm extends and laterally transverses relative to the corresponding end effector of each other corresponding arm in the pair of arms along the substantially horizontal substrate delivery plane; Configured to rotate the corresponding arm with at least one other degree of freedom, such that each corresponding end effector of the corresponding arm extends and laterally transverses along a substantially horizontal substrate delivery plane; or Configured to move at least one of the first top end effector and the first bottom end effector laterally, independently of each of the second top end effector and the second bottom end effector.

38. The method according to claim 34, wherein, Each of the first bottom arm and the first top arm is arranged at a different horizontal height relative to the reference plane of the substrate delivery device, and the first bottom arm and the first top arm are arranged such that the total height of the first pair of arms from the reference plane including the bottommost link to and including the topmost link is decoupled from the stack height of each arm link of the first pair of arms, and a first bottom end effector and a first top end effector are each disposed in the reference stack at a different elevation along a reference common axis defined by at least one shoulder axis of the first bottom arm and the first top arm.

39. The method according to claim 34, wherein, The first bottom arm has a first shoulder axis corresponding to the first bottom arm and the first bottom arm extends relative to the first shoulder axis, and the first top arm has another first shoulder axis corresponding to the first top arm and the first top arm extends relative to the other first shoulder axis, the first shoulder axis and the other first shoulder axis being separate from each other and different.

40. The method of claim 34, wherein, The second pair of arms are arranged across an axis in a substantially mirror image of the first pair of arms, the axis dividing the conveying device into a right-hand side and a left-hand side.

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