Tilt detection device, gaze detection device, head-mounted display, retinal projection display device, optometry device, user state estimation device, driver assistance system

Abstract

To provide an inclination detector which can be reduced in size.SOLUTION: An inclination detector comprises: a support body including first and second planes; a light source provided on the first plane; a light guiding member guiding light from the light source; a light emission part for emitting the light guided by the light guiding member to the second plane side; a first light reception part which is provided on the second plane, and outputs a light reception signal of reflected light by a three dimensional object of the light emitted from the light emission part; and an output part for outputting inclination information on the three dimensional object on the basis of the light reception signal from the first light reception part.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to an inclination detection device, a gaze detection device, a head-mounted display, a retinal projection type display device, an ophthalmic examination device, a user state estimation device, and a driving support system.

Background Art

[0002] Conventionally, an inclination detection device for a three-dimensional object such as a human eyeball has been known. Such an inclination detection device is used in a gaze detection device, a head-mounted display, a retinal projection type display device, an ophthalmic examination device, and the like.

[0003] Also, an optical information reading device is disclosed that optically scans a reading target composed of patterns having different light reflectivities, receives the reflected light, and reads information from a signal obtained by photoelectric conversion of the reflected light (see, for example, Patent Document 1). In this optical information reading device, a substrate portion including a light emitting portion and a movable scanning mirror that deflects light from the light emitting portion, a reflecting portion having a reflecting surface that guides light from the light emitting portion to the scanning mirror, and a collimator portion that makes light radiated from the light emitting portion and guided to the scanning mirror into parallel light are formed in a wafer shape, and these are laminated and joined.

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the configuration of Patent Document 1, there is room for improvement in terms of miniaturizing the device.

[0005] An object of the present invention is to provide an inclination detection device that can be miniaturized.

Means for Solving the Problems

[0006] It should be noted that the "二十ー" in the translation of is a mistake in the original text. It should be "

Problems to be Solved by the Invention

[0007] According to the present invention, a tilt detection device that can be miniaturized can be provided. [Brief explanation of the drawing]

[0008] [Figure 1] This is a diagram showing an example of the overall configuration of the gaze detection device according to the embodiment. [Figure 2] This is a bottom view of the optical unit according to the embodiment. [Figure 3] This is a cross-sectional view along the III-III line in Figure 2. [Figure 4] This is a top view of the optical unit according to the embodiment. [Figure 5] This is a top view of the first substrate in the optical unit according to the embodiment. [Figure 6] This is a block diagram of an example hardware configuration of the processing unit according to the embodiment. [Figure 7] This is a block diagram of an example of the functional configuration of the processing unit according to the embodiment. [Figure 8] This is a diagram showing an example of the configuration of a light source according to the first embodiment. [Figure 9] Figure 8 shows a cross-sectional view along the IX-IX cutting line. [Figure 10] This is a diagram showing an example of the configuration of a light source according to the second embodiment. [Figure 11] Figure 10 shows a cross-sectional view along the line XI-XI. [Figure 12]This is a diagram showing an example configuration of a gaze detection device according to the third embodiment. [Figure 13] This is a diagram showing an example configuration of a retinal projection type display device according to the fourth embodiment. [Modes for carrying out the invention]

[0009] The embodiments for carrying out the invention will be described below with reference to the drawings. In each drawing, the same reference numerals are used for the same components, and redundant explanations are omitted as appropriate. Furthermore, the embodiments shown below are illustrative examples of tilt detection devices for realizing the technical concept of the present invention, and the present invention is not limited to the embodiments shown below. Unless otherwise specified, the shapes of the components, their relative arrangement, parameter values, etc., described below are intended to be illustrative and not to limit the scope of the present invention to those specific examples. In addition, the size and positional relationships of the members shown in the drawings may be exaggerated to clarify the explanation.

[0010] In recent years, there has been growing interest in services that integrate cyberspace and the physical world. Eyeglass-type video display devices, such as retinal projection displays, are being developed and commercialized as core devices in this field.

[0011] Eyeglass-type video display devices are broadly classified into immersive and see-through types. In immersive eyeglass-type video display devices, the incorporation of gaze detection devices is becoming standard. On the other hand, in see-through eyeglass-type video display devices, the incorporation of various sensors and cameras is kept to a minimum in order to achieve a smaller, lighter housing and an appearance indistinguishable from eyeglasses. While there are devices on the market that only perform gaze detection, there are no display devices on the market that have a gaze detection device integrated into them.

[0012] In the current situation, image processing in a glasses-type video display device is often performed by an external terminal. A see-through type of glasses-type video display device is expected to expand its market in the field of augmented reality (AR) in the future. In addition to miniaturization and weight reduction, it is required for a see-through type of glasses-type video display device that it does not interfere with human cognitive behavior and enables natural access to visual information. Also, an expanded viewing angle, improved image sharpness, and high-performance and diversified human-machine interfaces are required for a see-through type of glasses-type video display device.

[0013] As a small-sized non-image-based line-of-sight detection device used in a glasses-type video display device, there is a known technology that scans a laser beam on the eyeball using a MEMS (Micro Electro Mechanical Systems) mirror and detects the inclination of the eyeball based on a light reception signal of the reflected light from the eyeball. The non-image-based method refers to a method that does not use an image. Also, there is a known line-of-sight detection technology that does not have a movable part in the non-image-based method, receives the reflected light of light from a plurality of light sources by the eyeball, and estimates the rotation angle of the eyeball.

[0014] However, a glasses-type video display device is required to accommodate a plurality of sensors, their drive circuits, signal detection circuits, feedback circuits, arithmetic circuits, batteries, etc. in a housing member of the same size as a general pair of glasses. Also, in a line-of-sight detection device, it is required to accommodate components such as a light source, a movable mirror, a light detection unit, etc., as well as an electric circuit for driving and controlling these components and an electric circuit for acquiring line-of-sight information in a housing member. In order to accommodate these respective components in a housing member, miniaturization of each component and high-precision mounting technology are required.

[0015] In this embodiment, an inclination detection device such as a line-of-sight detection device that can be miniaturized is provided. Also, in this embodiment, an inclination detection device that enables high-precision mounting is provided. Furthermore, in this embodiment, for example, a non-image-based line-of-sight detection device that is expected to be mounted on a see-through type of glasses-type video display device is provided.

[0016] Hereinafter, as an example of an inclination detection device, a line-of-sight detection device mounted on a glasses-type support and detecting the inclination angle of the eyeball of a person wearing the glasses-type support as the line-of-sight direction will be described. The human eyeball is an example of a three-dimensional object. The line-of-sight detection device detects the inclination information of the eyeball that tilts in the direction in which a person looks as information indicating the line-of-sight direction of the person (line-of-sight direction information). The inclination information of the eyeball includes information regarding inclination angles other than the inclination angle of the eyeball in addition to the information directly indicating the inclination angle.

[0017] In the following description, the eyeball of a person's right eye will be exemplified, but the same applies to the eyeball of the left eye. Also, two line-of-sight detection devices can be respectively applied to the eyeballs of both eyes. Note that the three-dimensional object is not limited to the eyeball, and the present embodiment can be applied to any three-dimensional object having a curvature.

[0018] [Embodiment] <Configuration Example of Line-of-Sight Detection Device 10> FIG. 1 is a diagram showing an example of the overall configuration of the line-of-sight detection device 10. The line-of-sight detection device 10 includes an optical unit 50, a reflection focusing member 60, a glasses-type support 70, and a processing unit 100. The glasses-type support 70 includes a lens 71, a glasses frame 72, a temple 73, and a joint 74. The glasses frame 72 supports the lens 71. The joint 74 connects the glasses frame 72 and the temple 73 in a tiltable manner. The temple 73 holds the optical unit 50 by housing it inside. The glasses-type support 70 is an example of a holding member that holds the first support included in the optical unit 50.

[0019] The glasses-type support 70 can be worn on a person's head. When the glasses-type support 70 is worn, the optical unit 50 is disposed at a position (in front of the eyes) close to the eyeball 30 of the person wearing it. The optical unit 50 is a unit including a light source, a light emitting unit 13, a first light receiving unit 14, and the like. The optical unit 50 irradiates the laser light L0 emitted by the light source in response to the drive signal Dr from the processing unit 100 toward the reflection focusing member 60 through the light emitting unit 13.

[0020] The reflective focusing member 60 is provided on the spectacle-type support 70. The reflective focusing member 60 reflects and focuses the laser light L0 from the light-emitting unit 13 toward the eyeball 30. The reflective focusing member 60 is, for example, a concave mirror. The reflective focusing member 60 is provided on the spectacle frame 72 so that it is positioned near the nose of the person wearing the spectacle-type support 70 when the spectacle-type support 70 is worn on the person's face. The focused light L1 from the reflective focusing member 60 is incident near the pupil 31 of the eyeball 30.

[0021] The angle of incidence of the focused light L1 onto the eyeball 30 is adjusted so that it is incident at a predetermined angle on the center of the pupil 31 of the eyeball 30 when the eye is in normal vision. The surface of the pupil 31 (the surface of the cornea 32) of the eyeball 30 is a transparent body containing water and generally has a reflectivity of about 2-4%. The focused light L1 incident near the pupil 31 of the eyeball 30 is reflected by the surface of the pupil 31 of the eyeball 30. The reflected light L2 from the pupil 31 is incident on the first light receiving unit 14 of the optical unit 50. The second light receiving unit 12 outputs the received signal S of the reflected light L2 to the processing unit 100.

[0022] The processing unit 100 estimates the rotation angle of the eyeball 30 based on the received light signal S. The processing unit 100 outputs the line of sight information E of the eyeball 30 corresponding to this rotation angle. The processing unit 100 also controls the light intensity of the laser light L0 emitted by the light source by outputting a drive signal Dr based on the light intensity monitoring signal M from the optical unit 50.

[0023] Figures 2 to 4 illustrate the configuration of the optical unit 50 of the gaze detection device 10. Figure 2 is a bottom view of the optical unit 50. Figure 2 is a view of the optical unit 50 from the direction in which the eyeball 30 is located in Figure 1. Figure 3 is a cross-sectional view taken along the III-III line in Figure 2. Figure 4 is a top view of the optical unit 50. Figure 5 is a top view of the first substrate 1 in the optical unit 50 with the second substrate 2 removed.

[0024] As shown in Figure 3, the optical unit 50 includes a first substrate 1, a second substrate 2, a spacer member 3, a light source 11, a light guide member 20, a light emitting section 13, and a first light receiving section 14. The light guide member 20 includes a first prism 21, a second prism 22, and a first through-hole 23.

[0025] The first substrate 1 is an example of a support including a first surface 1a and a second surface 1b. The first substrate 1 is a mounting substrate on which a light source 11 and a first light receiving unit 14 can be mounted. The second surface 1b is the surface of the first substrate 1 opposite to the first surface 1a. The light source 11, the second light receiving unit 12, and the amplifier 15 are mounted on the first surface 1a of the first substrate 1. The first light receiving unit 14 and the connector 16 are mounted on the second surface 1b of the first substrate 1. The connector 16 is connected to the flexible substrate 17. The light emitting section 13 is a through-hole that penetrates the first substrate 1.

[0026] The second substrate 2 is an example of a second support that supports at least the light guide member 20. The second substrate 2 faces the first substrate 1 and is positioned so as to overlap with the first substrate 1 when viewed from the direction normal to the first substrate 1. In the following, viewing from the direction normal to the first substrate 1 is referred to as a plan view. The spacer member 3 is provided between the first substrate 1 and the second substrate 2. The second substrate 2 is fixed to the first substrate 1 via the spacer member 3 by an adhesive member or the like.

[0027] On the side of the second substrate 2 opposite to the side facing the first substrate 1, the first prism 21, the second prism 22, and the beam splitter 24 are mounted. The second substrate 2 also has a first through hole 23, a second through hole 25, and a third through hole 26. In a plan view, the first through hole 23 overlaps with the through hole of the light emitting section 13. In a plan view, the second through hole 25 contains the light source 11 inside. In a plan view, the third through hole 26 contains the second light receiving section 12 inside.

[0028] The light source 11 emits laser light L0. The first prism 21 reflects the laser light L0 from the light source 11 toward the beam splitter 24. The beam splitter 24 reflects a portion of the laser light L0 from the first prism 21 toward the second light receiving unit 12 and transmits the rest. The second prism 22 reflects the laser light L0 that has passed through the beam splitter 24 toward the first through hole 23. The laser light L0 reflected by the second prism 22 passes through the first through hole 23 and the light emitting unit 13 and is then directed toward the reflection focusing member 60.

[0029] The first light receiving unit 14 outputs a received light signal S of reflected light L2 reflected by the eyeball 30. The amplifier 15 electrically amplifies the received light signal S. The connector 16 receives the received light signal S amplified by the amplifier 15. The optical unit 50 outputs the received light signal S input via the connector 16 to the processing unit 100 through the flexible substrate 17.

[0030] The light source 11 is a VCSEL (Vertical Cavity Surface Emitting Laser) array in which VCSEL elements are arranged in a two-dimensional array. The light source 11 can be driven individually for each VCSEL array. In this specification, the smallest unit of individually driven VCSEL arrays is referred to as the light-emitting unit. Each light-emitting unit emits laser light with directionality and a finite divergence angle. The VCSEL array is an example of a light-emitting unit.

[0031] The wavelength of the laser light emitted by the light source 11 is preferably a near-infrared wavelength, which is invisible light, so as not to interfere with the visibility of the "person" whose line of sight is being detected. However, it is not limited to this, and the wavelength of the laser light emitted by the light source 11 may be visible light.

[0032] The light source 11 is not limited to a VCSEL array, but may also be an LD (laser diode), an LED (light-emitting diode), or a laser light source other than an LD. VCSEL arrays are preferred because they are easy to integrate in a two-dimensional plane, allowing for compact mounting in wearable devices.

[0033] The light guide member 20 guides the laser light L0 from the light source 11. The light guide member 20 can have any configuration as long as it can guide the light from the light source 11. For example, the light guide member 20 may include at least one of a lens, a diffraction grating, an optical fiber, etc.

[0034] The light-emitting section 13 emits the laser light L0 guided by the light-guiding member 20 from the first surface 1a to the second surface 1b. The light-emitting section 13 can have any configuration as long as it can emit the light guided by the light-guiding member 20. For example, the light-emitting section 13 may include a notch or slit that penetrates the first substrate 1. Alternatively, the portion of the lens, diffraction grating, optical fiber, light-transmitting member, or attenuation filter included in the light-guiding member 20 from which light is emitted may be designated as the light-emitting section 13. The shape of the light-emitting section 13 may be circular, elliptical, rectangular, polygonal, or the like.

[0035] The beam splitter 24 is an example of an optical splitting member that splits the laser light L0 from the light source 11 into two or more beams. The beam splitter 24 is not limited to a cube shape; it may also be a plate shape or the like.

[0036] The second light-receiving unit 12 outputs a light intensity monitoring signal M corresponding to the amount of light received by the second light-receiving unit 12 from the reflected and transmitted light of the laser beam L0 split by the beam splitter 24. The second light-receiving unit 12 can use a photodiode or other light-receiving element, or an image sensor such as a CCD or CMOS. The second light-receiving unit 12 is arranged on the first surface 1a of the first substrate 1. The second light-receiving unit 12 outputs the light intensity monitoring signal M to the processing unit 100.

[0037] The first light-receiving unit 14 is provided on the second surface 1b. The first light-receiving unit 14 receives the reflected light L2 from the eyeball 30 of the laser light L0 emitted from the light-emitting unit 13 and outputs a light-receiving signal S. In this embodiment, the first light-receiving unit 14 is a PSD (Position Sensitive Detector) capable of outputting both a signal indicating the light intensity of the received light and a signal indicating the position of the reflected light L2 incident on the first light-receiving unit 14. However, the first light-receiving unit 14 may be a single-pixel PD (Photo Detector) that outputs a signal indicating the light intensity of the received light, or it may be an image sensor such as a CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor). The PSD is preferable in that it can detect the reflected light L2 from the eyeball 30 with high sensitivity and can accurately detect the line of sight direction based on the incident position of the reflected light L2 and the position of the light-emitting part in the light source 11.

[0038] The arrangement of the reflective focusing member 60 and the first light-receiving unit 14 is not limited to those shown in Figures 1 and 3. The arrangement of the reflective focusing member 60 and the first light-receiving unit 14 is such that only one of the laser beams L0 emitted by the multiple light-emitting units of the light source 11 ultimately enters the first light-receiving unit 14 according to the tilt of the eyeball 30. A deflection optical element or the like may be provided between the eyeball 30 and the first light-receiving unit 14.

[0039] The processing unit 100 is an example of an output unit that outputs line-of-sight information of the eyeball 30 based on the light-receiving signal S from the first light-receiving unit 14. The processing unit 100 can sequentially illuminate each light-emitting part of the light source 11 by outputting a drive signal Dr. The processing unit 100 performs a process to estimate the line-of-sight direction based on the light-receiving signal S input from the first light-receiving unit 14. The placement of the processing unit 100 is not particularly limited, but may be, for example, on the vine part 73.

[0040] The origin of the reflected light L2 incident on the first light-receiving unit 14 depends on the direction of the line of sight, as it is determined which light-emitting unit in the light source 11 emitted the laser light L0 from. Therefore, the processing unit 100 estimates the direction of the line of sight based on the position of the light-emitting unit in the light source 11 using the received signal S from the first light-receiving unit 14. The processing unit 100 can estimate the direction of the line of sight using the position of the light-emitting unit in the light source 11, the position of the reflected light L2 incident on the first light-receiving unit 14, and a predetermined eyeball model. The processing unit 100 outputs line of sight information E based on the estimated direction of the line of sight.

[0041] The light source 11 has multiple light-emitting units and is capable of high-speed time modulation. The gaze detection device 10 time-modulates the laser light L0 emitted by the light source 11 according to, for example, an orthogonal coding pattern. The gaze detection device 10 extracts a component from the light-receiving signal S of the first light-receiving unit 14 that has a coding pattern that matches the reflected light L2 incident on the first light-receiving unit 14. As a result, the gaze detection device 10 can remove the influence of light from the external environment that is not modulated and improve the signal-to-noise ratio of the output signal. The gaze detection device 10 makes it easier to detect the direction of gaze in bright environments and makes it possible to reduce the amount of focused light L1 irradiated onto the eyeball 30. Reducing the amount of focused light L1 improves safety for the eyeball 30.

[0042] The gaze detection device 10 sequentially illuminates each light-emitting unit included in the light source 11. Sequential illumination is advantageous because it can reduce the light intensity of the focused light L1 irradiated onto the eyeball 30 compared to the case where each light-emitting unit is illuminated in parallel. When all of the multiple light-emitting units are illuminated in parallel, it is necessary to prepare a light source drive unit such as a light source modulation unit for each light-emitting unit. The gaze detection device 10 illuminates each unit one by one, so it is not necessary to prepare a light source drive unit such as a light source modulation unit for each light-emitting unit. For this reason, the gaze detection device 10 can implement a light source drive unit that is small and lightweight.

[0043] In this embodiment, the optical unit 50 and the processing unit 100 are shown to be housed in the vine portion 73, but the invention is not limited to this, and a head-mounted display or a headgear-type holding structure may also be used.

[0044] <Example hardware configuration of processing unit 100> Figure 6 is a block diagram illustrating an example of the hardware configuration of the processing unit 100. The processing unit 100 includes a CPU (Central Processing Unit) 101, a ROM (Read Only Memory) 102, a RAM (Random Access Memory) 103, and an SSD (Solid State Drive) 104. The processing unit 100 also includes a light source drive circuit 105, an A / D (Analog / Digital) conversion circuit 106, and an input / output I / F (Interface) 107. These are interconnected via a system bus 108 so that they can communicate with each other.

[0045] The CPU 101 reads programs and data from storage devices such as the ROM 102 and SSD 104 onto the RAM 103. By executing the read programs, the CPU 101 controls the entire processing unit 100 and implements the functions described later. At least some of the functions of the CPU 101 may be implemented by electronic circuits such as ASICs (application-specific integrated circuits) or FPGAs (field-programmable gate arrays).

[0046] ROM102 is a non-volatile semiconductor memory (storage device) that can retain programs and data even when the power is turned off. ROM102 stores programs such as the BIOS (Basic Input / Output System), OS settings, and network settings, as well as data, which are executed when the processing unit 100 starts up. RAM103 is a volatile semiconductor memory (storage device) that temporarily holds programs and data.

[0047] SSD104 is a non-volatile memory that stores programs and various data that execute processing by the processing unit 100. Note that the SSD may also be an HDD (Hard Disk Drive).

[0048] The light source drive circuit 105 is an electrical circuit that is electrically connected to the light source 11 and outputs a drive voltage to the light source 11 according to the drive signal Dr. The light source drive circuit 105 sequentially causes the multiple light-emitting parts of the light source 11 to light up.

[0049] The drive voltage can be a square wave, a sine wave, or a voltage waveform with a predetermined waveform shape, and the light source drive circuit 105 can modulate the period of the drive voltage by changing the period (frequency) of these voltage waveforms.

[0050] The A / D conversion circuit 106 is electrically connected to the first light receiving unit 14 and the second light receiving unit 12, respectively. The A / D conversion circuit 106 outputs digital voltage data obtained by A / D conversion of the light receiving signal S, which is an analog voltage signal output by the first light receiving unit 14. The A / D conversion circuit 106 also outputs digital voltage data obtained by A / D conversion of the light intensity monitoring signal M, which is an analog voltage signal output by the second light receiving unit 12.

[0051] The I / F107 is an interface for connecting to external devices such as PCs (Personal Computers) and video equipment.

[0052] <Example of the functional configuration of processing unit 100> Figure 7 is a block diagram illustrating an example of the functional configuration of the processing unit 100. As shown in Figure 7, the processing unit 100 includes a light-emitting drive unit 110, a signal input unit 111, a calculation unit 120, and a gaze information output unit 130.

[0053] The light emission drive unit 110 outputs a drive signal Dr to the light source 11, causing the light source 11 to emit laser light L0 from its multiple light-emitting sections. The light emission drive unit 110 also controls the light intensity of the laser light L0 emitted by the light source 11 based on the light intensity monitoring signal M from the signal input unit 111. The functions of the light emission drive unit 110 are realized by the light source drive circuit 105, etc.

[0054] The signal input unit 111 outputs a digital voltage signal obtained by A / D conversion of the received light signal S input from the first light receiving unit 14 to the eye rotation angle estimation unit 121 of the calculation unit 120. The signal input unit 111 also outputs a digital voltage signal obtained by A / D conversion of the light intensity monitoring signal M input from the second light receiving unit 12 to the light emission drive unit 110. The functions of the signal input unit 111 are realized by the A / D conversion circuit 106, etc.

[0055] The calculation unit 120 includes an eye rotation angle estimation unit 121 and a gaze information acquisition unit 122. Based on the received light signal S input by the signal input unit 111, it performs calculation processing to acquire the pupil position of the eyeball 30. The functions of the calculation unit 120 are realized by the CPU 101 executing a program stored in the ROM 102, etc.

[0056] The eye rotation angle estimation unit 121 estimates the rotation angle of the eyeball 30 based on the light signal S received from the signal input unit 111. The eye rotation angle estimation unit 121 outputs the estimated rotation angle data to the gaze information acquisition unit 122. The gaze information acquisition unit 122 performs a process to acquire the position information of the pupil 31 based on the rotation angle information of the eyeball 30 obtained by the eye rotation angle estimation unit 121. The gaze information acquisition unit 122 also performs a process to acquire gaze information E from the position of the pupil 31. The gaze information acquisition unit 122 outputs the gaze information E to an external device, etc., via the gaze information output unit 130. The gaze information output unit 130 is implemented by an input / output I / F 107, etc.

[0057] In the gaze detection device 10, the angle of incidence of the focused light L1 irradiated from the light source 11 onto the eyeball 30, and the formula for calculating the rotation angle of the eyeball 30 are predetermined. The formula for calculating the rotation angle of the eyeball 30 includes a linear function or a quadratic function. However, the form of the formula is not particularly limited as long as the rotation angle can be determined based on the angle of incidence of the focused light L1 and the position of the first light receiving unit 14 on the light receiving surface. In this embodiment, a calculation formula using a quadratic function is adopted as a simple approximation.

[0058] A surface shape model of the eyeball 30 can be used to determine the angle at which the focused light L1 enters the eyeball 30. For example, a simplified model eye, which has been known for a long time as a general surface shape model of the eyeball (see, for example, "Optical Mechanism of the Eye," Precision Machinery 27-11, 1961), can be used.

[0059] On the other hand, the incident angle of focused light L1 to the eyeball 30 is predetermined by ray tracing calculations, etc., so that the incident position of reflected light L2 to the first light-receiving unit 14 is at the center of the light-receiving surface. Furthermore, the incident position of reflected light L2 to the light-receiving surface of the first light-receiving unit 14 is determined by theoretical analysis based on the incident angle of focused light L1 to the eyeball 30, the reflection position of focused light L1 on the eyeball 30, and the inclination of the tangent surface of the eyeball 30. From the solution of the theoretical analysis, an inverse calculation formula (approximation formula) for estimating the rotation angle of the eyeball 30 is determined by polynomial approximation.

[0060] The inverse calculation formula for estimating the incidence angle of the focused light L1 onto the eyeball 30 and the rotation angle of the eyeball 30 is stored in the memory of the processing unit 100, such as the ROM 102 or SSD 104. This inverse calculation formula is referenced when the light-emitting unit is changed by the light-emitting drive unit 110 and when the gaze information E is acquired by the calculation unit 120.

[0061] [First Embodiment] <Example configuration of light source 11> The configuration of the light source 11 will be described with reference to Figures 8 and 9. Figure 8 is a diagram illustrating the configuration of the light source 11 according to the first embodiment. Figure 9 is a cross-sectional view taken along the line IX-IX in Figure 8.

[0062] As shown in Figure 8, the light source 11 has nine VCSEL arrays 80, numbered 11ch to 19ch, each having a light-emitting section 40. The light-emitting sections 40 of the VCSEL array 80 correspond to individualized light-emitting sections. Individualization means a state in which the sections are completely separated. An air layer 81 is provided between the multiple light-emitting sections 40. The air layer 81 is a layer in which air exists between the VCSEL arrays 80 containing the light-emitting sections 40.

[0063] In this embodiment, the light source 11 is not a VCSEL array containing multiple light-emitting units 40 within a single chip, but rather a VCSEL array 80 in which each light-emitting unit 40 is a separate chip is fabricated on the wafer surface. The VCSEL array 80 is selectively picked up using a patterned adhesive material and transferred onto a donor substrate. The fabrication process for such a light source 11 is a microtransfer process.

[0064] When multiple VCSEL arrays 80 are used in the light source 11, the number of optical components can be reduced by optimizing the spacing between the VCSEL arrays 80. On the other hand, it is not desirable to manufacture a configuration in which non-periodic VCSEL arrays 80 are arranged at relatively sparse intervals using a semiconductor manufacturing process. This is because the number of VCSEL arrays 80 extracted per wafer is small, and the benefits of mass production cannot be obtained.

[0065] By fabricating multiple VCSEL arrays 80 through a microtransfer process, the light source 11 can efficiently arrange multiple VCSEL arrays 80. For space saving and miniaturization, it is preferable that the VCSEL arrays 80 in the light source 11 have an electrode configuration that supports flip-chip mounting. Figure 8 illustrates a configuration in which one electrode is shared and connected to GND.

[0066] As shown in Figure 9, the VCSEL array 80 includes a light-emitting section 40, an electrode 41, a conductive member 42, a first semiconductor substrate 43, and a second semiconductor substrate 44. The electrode 41 includes an anode terminal 41p and a cathode terminal 41n. The conductive member 42 includes a conductive member 42p and a conductive member 42n. The conductive member 42p connects the light-emitting section 40 and the anode terminal 41p. The conductive member 42n connects the light-emitting section 40 and the cathode terminal 41n.

[0067] The VCSEL array 80 has a shape formed by mesa processing of a multilayer film. By covering the mesa structure in adjacent light-emitting sections 40 with a conductive member 42 such as metal, the VCSEL array 80 can be used as, for example, an n-type electrode in Figure 9. When the conductive member 42 is melted and compressed as a bump, the electrode 41 and the light-emitting section 40 become electrically connected, enabling current injection into the VCSEL array 80.

[0068] When there are many VCSEL arrays 80, wiring crossovers occur, so it is preferable to use a multilayer substrate with through holes and provide common electrodes on different layers. That is, it is preferable that the cathode terminal 41n and the anode terminal 41p are electrically connected to different layers of a double-sided substrate or multilayer substrate.

[0069] <Effects and Effects of the Eye-Tracking Device 10> The operation and effects of the gaze detection device 10 will now be explained. For example, Patent Document 1 discloses an optical scanning module in which multiple reflective surfaces, end-face emitting type laser diodes, monitor photodiodes, and collimator lenses are stacked on a flat substrate. This optical scanning module distributes a laser beam so as to circle a scanning mirror. This optical scanning module irradiates the scanning mirror with a laser beam, which then passes through a transparent glass cover.

[0070] However, the configuration described in Patent Document 1 requires the scanning mirrors to be arranged three-dimensionally to obtain the desired emission angle. Furthermore, a gap region must be provided to ensure movable space. Additionally, because an end-face emitting laser diode is used, height adjustment via a submount is necessary. Alignment with the collimator lens is also not easy. Since the cross-sectional profile of the light beam is distorted with an end-face emitting laser diode, optical components for beam shaping are required. For these reasons, using the configuration described in Patent Document 1 may result in a larger gaze detection device 10.

[0071] The gaze detection device 10 (tilt detection device) according to this embodiment includes a first substrate 1 (first support), a light source 11, a light guide member 20, a light emission unit 13, a first light receiving unit 14, and a processing unit 100 (output unit). The light source 11 is provided on the first surface 1a of the first substrate 1. The first light receiving unit 14 is provided on the second surface 1b of the first substrate 1. With this configuration, the light source 11, the electronic circuit for driving the light source 11, the electronic circuit for processing signals from the first light receiving unit 14, etc., can be arranged on the surface of the first substrate 1 opposite to the surface on which the first light receiving unit 14 is provided. As a result, a gaze detection device 10 that can be miniaturized can be provided.

[0072] Furthermore, since the gaze detection device 10 can be configured without any movable parts, it is not necessary to secure space for the range of motion. Also, the gaze detection device 10 does not require a drive circuit or power supply to drive and control a movable mechanism. These factors also allow the gaze detection device 10 to be miniaturized.

[0073] The first light-receiving unit 14 preferably has a large light-receiving area. The reason for this is explained below. Laser light L0 is irradiated onto the eyeball 30. The reflected light L2 is incident on the light-receiving surface of the first light-receiving unit 14. The reflected light L2 is incident on the light-receiving surface of the first light-receiving unit 14 at a position corresponding to the tilt of the eyeball 30. In addition, the reflected light L2 is incident on the light-receiving surface of the first light-receiving unit 14 with a spread according to the surface shape of the eyeball 30. For these reasons, increasing the light-receiving area of ​​the light-receiving surface of the first light-receiving unit 14 is advantageous for detecting the position of the reflected light L2 and ensuring sufficient light intensity of the reflected light L2. For these reasons, it is preferable that the light-receiving surface of the first light-receiving unit 14 has a large light-receiving area.

[0074] Furthermore, in this embodiment, the first substrate 1 is a mounting substrate on which the light source 11 and the first light receiving unit 14 can be mounted. With this configuration, the light source 11 and the first light receiving unit 14, which require electrical connections, can be mounted together on the first substrate 1, making it easier to handle the optical unit 50.

[0075] In this embodiment, the optical unit 50 is shown to have a configuration having a first substrate 1 and a second substrate 2, but the optical unit 50 does not necessarily have to have a second substrate 2. If the optical unit 50 does not have a second substrate 2, the light guide member 20 and the beam splitter 24 are installed on the first substrate 1.

[0076] Furthermore, in this embodiment, the light source 11 has a plurality of light-emitting units 40. By switching the light emission of each of the plurality of light-emitting units 40 and changing the incident angle of the laser beam L0 on the eyeball 30, tracking that follows the movement of the eyeball 30 becomes possible.

[0077] Furthermore, in this embodiment, an air layer 81 is provided between the multiple light-emitting units 40. This configuration allows for the optimization of the arrangement of the multiple light-emitting units 40, eliminating the need for optical elements to control the incident position of the reflected light L2 to the first light-receiving unit 14 or to control the laser beam shape of the reflected light L2. As a result, the number of optical components can be drastically reduced. In addition, optical components can be mounted using the mounting accuracy of electronic components or the mounting accuracy using an electronic component mounting device. As a result, a gaze detection device 10 with a small number of optical components and easy mounting can be provided.

[0078] It is even more preferable to use a light source 11 having multiple light-emitting parts 40 that emit linearly polarized light aligned to an appropriate polarization azimuth angle. This is because the polarization of the laser light incident on the eyeball 30 can be uniquely determined, and the amount of light entering the eyeball 30 can be reduced without the need for a special polarizing member.

[0079] Furthermore, this embodiment includes a beam splitter 24 (optical splitting member) and a second light receiving unit 12. The second light receiving unit 12 is arranged on the first surface 1a of the first substrate 1. With this configuration, components that do not require electrical connections, such as the light guide member 20 and the beam splitter 24, can be consolidated on the second substrate 2, making it easier to handle the optical unit 50.

[0080] Furthermore, in this embodiment, the light-emitting unit 40 includes a cathode terminal 41n and an anode terminal 41p. The cathode terminal 41n and the anode terminal 41p may be electrically connected to different layers of a double-sided substrate or a multilayer substrate. This configuration reduces the wiring space of the light source 11, allows for effective use of gap space, and enables miniaturization of the gaze detection device 10.

[0081] Furthermore, in this embodiment, the device includes at least a second substrate 2 supporting the light guide member 20, and a spacer member 3 provided between the first substrate 1 and the second substrate 2. Since the light guide member 20 and the beam splitter 24 are optical elements with flat light input and output surfaces, high mounting accuracy is not required, and the stacking of the first substrate 1 and the second substrate 2 using the spacer member 3 provides sufficient mounting accuracy. This makes it possible to provide a gaze detection device with fewer optical components and easier mounting.

[0082] [Second Embodiment] The light source of the gaze detection device according to the second embodiment will now be described. Note that the same components are denoted by the same reference numerals, and redundant explanations are omitted as appropriate. This also applies to the embodiments described later.

[0083] <Example configuration of light source 11a> Referring to Figures 10 and 11, the configuration of the light source 11a of the gaze detection device 10a according to the second embodiment will be described. Figure 10 is a diagram illustrating the configuration of the light source 11a according to the second embodiment. Figure 11 is a cross-sectional view taken along the XX cutting line in Figure 10.

[0084] As shown in Figure 10, the light source 11a has a plurality of VCSEL arrays 80 and a plurality of second light-receiving units 12a. Each of the plurality of VCSEL arrays 80 has a single light-emitting unit 40. The plurality of second light-receiving units 12a are provided adjacent to each of the plurality of VCSEL arrays 80. The plurality of second light-receiving units 12a form pairs with the plurality of VCSEL arrays 80. The second light-receiving units 12a are, for example, photodiodes, but are not limited to those that can output an electrical signal corresponding to the light intensity.

[0085] The second light-receiving unit 12a is positioned between multiple light-emitting units 40. Because the VCSEL array 80 is sparsely arranged, the same number of second light-receiving units 12a as the VCSEL array 80 can be placed next to the VCSEL array 80. The gaze detection device 10 can individually detect the amount of laser light L0 output from each VCSEL array 80 using the second light-receiving unit 12a.

[0086] In order for the second light-receiving unit 12a to detect the laser light L0 emitted from the VCSEL array 80, it is necessary to deflect a portion of the laser light L0 in the direction in which the second light-receiving unit 12a is located.

[0087] In this embodiment, as shown in Figure 11, the line-of-sight detection device 10a has a polarization anisotropy member 114 between the first prism 21 and the VCSEL array 80. The polarization anisotropy member 114 is an example of a deflection member that deflects light from each of the multiple light-emitting units. The polarization anisotropy member 114 deflects the laser light L0 from each of the multiple VCSEL arrays 80 so that it is incident on the paired second light-receiving units 12a.

[0088] The polarization anisotropy member 114 deflects two orthogonal polarization components, or one right-handed polarization and one left-handed polarization component, by diffraction, allowing one to pass through and directing the other to the second light-receiving unit 12a. The first-order diffracted light L3 of the laser light L0 from the VCSEL array 80 by the polarization anisotropy member 114 is incident on the second light-receiving unit 12a.

[0089] The polarization anisotropy member 114 can exhibit polarization anisotropy dependent on the orientation pattern of liquid crystals by, for example, aligning liquid crystal molecules and then polymerizing them. Here, since it is sufficient to detect the amount of light, it is not necessarily required to diffract the light with high efficiency.

[0090] The gaze detection device having the light source 11a enables the detection of the light intensity of the laser beam L0 in the gaze detection device 10, and eliminates the need for the beam splitter 24, the second light receiving unit 12, and the third through-hole 26 in the gaze detection device 10. This allows for further miniaturization of the gaze detection device.

[0091] Other effects are the same as in the first embodiment.

[0092] [Third Embodiment] Figure 12 is a diagram illustrating the configuration of the gaze detection device 10b according to the third embodiment. The gaze detection device 10b includes a reflective focusing member 60 held by a spectacle-type support 70, and a third light-receiving unit 91 that receives light from the reflective focusing member 60.

[0093] The light source 11 includes a light-emitting unit 40 as a first light-emitting unit and a light-emitting unit 45 as a second light-emitting unit. The first light-receiving unit 14 outputs a received light signal S of the focused light L1, which is the focused light L1, obtained by the reflection and focusing member 60 of the laser light L0 emitted by the light-emitting unit 40, and reflected light L2 by the eyeball 30. The third light-receiving unit 91 outputs a received light signal T of the focused light L5, obtained by the reflection and focusing member 60 of the laser light L4 emitted by the light-emitting unit 45.

[0094] The output of the received signal S from the first light receiving unit 14 and the output of the received signal T from the third light receiving unit 91 may be performed by a single light receiving unit. In this case, since the received signal T and the received signal S have different time-series patterns, they can be distinguished by performing an inner product calculation on their respective patterns.

[0095] The processing unit 100a outputs line-of-sight information E in which the position and angle of the reflective focusing member 60 are compensated, based on the received light signal S from the first light receiving unit 14 and the received light signal T from the third light receiving unit 91. For example, the processing unit 100a outputs line-of-sight information E in which the position and angle of the reflective focusing member 60 are compensated, by correcting an inverse calculation formula stored in memory such as ROM 102 or SSD 104 based on the received light signal T. The inverse calculation formula estimates the incident angle of the focused light L1 on the eyeball 30 and the rotation angle of the eyeball 30.

[0096] For example, the reflective focusing member 60 may shift in position or angle when the wearer puts on the glasses-type support 70. Due to the shift in position or angle of the reflective focusing member 60, the gaze detection device may not be able to correctly detect the wearer's gaze direction. In this embodiment, the received signal T from the third light receiving unit 91 of the focused light L5, which has not passed through the eyeball 30, is used. Therefore, it becomes possible to detect the shift in position or angle of the reflective focusing member 60 and compensate for its impact on the gaze information E. As a result, in this embodiment, a gaze detection device 10b with excellent robustness in gaze detection can be provided.

[0097] Other effects are the same as in the first embodiment.

[0098] [Fourth Embodiment] Figure 13 is a diagram illustrating an example of the configuration of a retinal projection display device 200 according to the fourth embodiment. The retinal projection display device 200 includes an RGB (Red, Green, Blue) laser light source 61, a scanning mirror 62, a planar mirror 63, a half mirror 64, an image generation unit 65, and a gaze detection device 10. The retinal projection display device 200 projects and displays an image onto the retina of a person wearing the retinal projection display device 200. The retinal projection display device 200 is an example of a head-mounted display.

[0099] The RGB laser light source 61 outputs laser light of three RGB colors, modulated in time. The scanning mirror 62 scans the light from the RGB laser light source 61 in two dimensions. The scanning mirror 62 is a MEMS mirror, etc. However, it is not limited to this, and any mirror with a reflective part that scans light, such as a polygon mirror or galvanometer mirror, is acceptable. MEMS mirrors are advantageous in terms of miniaturization and weight reduction. The driving method of the MEMS mirror may be electrostatic, piezoelectric, electromagnetic, etc.

[0100] The planar mirror 63 reflects the scanning light from the scanning mirror 62 toward the half mirror 64. The half mirror 64 transmits a portion of the incident light and reflects the other portion toward the eyeball 30. The half mirror 64 has a concave curved surface shape. The half mirror 64 focuses the reflected light near the pupil 31 of the eyeball 30 and forms an image at the position of the retina 33. This projects the image formed by the scanning light onto the retina 33. The light 61a shown by the dashed line in the figure represents the light that forms an image on the retina 33. Note that the amount of reflected light and transmitted light in the half mirror 64 does not necessarily have to be in a 1:1 ratio.

[0101] The gaze detection device 10 transmits a feedback signal Fd of the tilt of the eyeball 30, i.e., the direction of gaze, to the image generation unit 65.

[0102] The image generation unit 65 has a function to control the deflection angle of the scanning mirror 62 and a function to control the emission of the RGB laser light source 61. The image generation unit 65 also receives a feedback signal Fd of the gaze direction from the gaze detection device 10. By outputting a control signal Ct according to the gaze information E acquired by the gaze detection device 10, the deflection angle of the scanning mirror 62 and the emission of the RGB laser light source 61 are controlled, thereby rewriting the projection angle of the image or the image content. This makes it possible to form an image on the retina 33 that follows the change in gaze direction (eye tracking).

[0103] In this embodiment, an example is shown where the retinal projection display device 200 is a head-mounted display, which is a wearable terminal, but the embodiment is not limited to this. For example, the retinal projection display device 200 may be attached not only directly to a person's head, but also indirectly to a person's head via a fixing part or other component (head-mounted display device). Furthermore, a binocular retinal projection display device may be provided with a pair of retinal projection display devices 200 for the left and right eyes.

[0104] Furthermore, although this embodiment illustrates a configuration in which the retinal projection display device 200 is equipped with a gaze detection device 10, the retinal projection display device 200 may also be equipped with a gaze detection device 10a or a gaze detection device 10c.

[0105] [Other Preferred Embodiments] Although examples of embodiments of the present invention have been described above, the present invention is not limited to these specific embodiments, and various modifications and changes are possible within the scope of the gist of the present invention as described in the claims.

[0106] For example, in the embodiment described above, a device for detecting the tilt of the eyeball 30 was shown as an example of an optical device, but the invention is not limited to this. For example, an optical device may be mounted on a robot hand, and the tilt of the robot hand, which is an example of an object, may be detected.

[0107] Furthermore, this embodiment can also be applied to optometry devices that have the function of detecting the tilt of the eyeball and the position of the pupil (cornea). An optometry device refers to a device that can perform various tests such as visual acuity tests, refractive power tests, intraocular pressure tests, and axial length tests. An optometry device is a device that can perform eye examinations without contact with the eyeball and has a support part that supports the face of the subject, an eye examination window, a display part that displays information to keep the direction of the subject's eyeball (direction of gaze) constant during the eye examination, a control part, and a measurement part. In order to improve the measurement accuracy of the measurement part, it is required that the subject stare at a single point without moving the eyeball (gaze), and the subject fixes their face to the support part and stares at the display displayed on the display part through the eye examination window. At this time, the eyeball tilt position detection device of this embodiment can be used when detecting the tilt position of the eyeball. The eyeball tilt position detection device is positioned to the side of the measurement part so as not to interfere with the measurement. The tilt position (line of sight) information of the eyeball obtained by the eyeball tilt position detection device can be fed back to the control unit, allowing measurements to be performed according to the tilt position information of the eyeball.

[0108] Furthermore, the gaze detection device 10 can also be applied to a user state estimation device that estimates the user's state based on information regarding the tilt of the eyeball 30, the position of the pupil (cornea), or the direction of gaze. "User" refers to the user of the user state estimation device.

[0109] The user's state includes at least one of the following: user fatigue level and user attention level. User fatigue level is an indicator that represents, for example, the degree of the user's mental fatigue. User attention level is an indicator that represents the level of the user's attention.

[0110] For example, a user state estimation device that estimates a user's fatigue level includes a gaze detection device 10 and a fatigue level estimation unit that estimates the fatigue level based on the user's gaze direction information detected by the gaze detection device 10. The fatigue level estimation unit is an example of a state estimation unit.

[0111] One example of a method for estimating a user's mental fatigue level in the fatigue level estimation unit is the method described in the non-patent literature (Tseng, V.WS., Valliappan, N., Ramachandran, V. et al. Digital biomarker of mental fatigue. npj Digit. Med. 4, 47 (2021)). According to this method, the mental fatigue level can be estimated by having the user perform a task of following the trajectory of an object displayed on a monitor with their eyes for several minutes and measuring the movement of their gaze at that time. The gaze detection device 10 can detect reflected light from an object with high sensitivity while suppressing the increase in the amount of light irradiated onto the object. Therefore, a fatigue level estimation device having the gaze detection device 10 can estimate the user's mental fatigue level safely and with high accuracy. Furthermore, the fatigue level estimation device may have a notification means that notifies the user of information, such as prompting them to take a break, based on the estimated mental fatigue level.

[0112] A user state estimation device for estimating a user's level of attention includes a gaze detection device 10 and an attention level estimation unit that estimates the user's level of attention based on gaze direction information detected by the gaze detection device 10. The attention level estimation unit is an example of a state estimation unit.

[0113] One method for estimating the user's level of attention in the attention level estimation unit is to detect microsaccades, which are minute vibrations of the eyeball 30, and estimate the user's level of focus based on their frequency. According to non-patent literature (Pastukhov A, Braun J. Rare but precious: microsaccades are highly informative about attentional allocation. Vision Res. 2010 Jun 11;50(12):1173-84.), microsaccades are relatively large-amplitude and high-speed movements among fixation tremors (minute vibrations of the eyeball 30 with an amplitude of about ±3.0[°] that occur when a person is fixating on an object), and are known to correlate with a person's level of attention. The gaze detection device 10 can measure the tilt of the eyeball 30 quickly and with high accuracy, and therefore can detect microsaccades with higher accuracy than conventional gaze detection devices.

[0114] Therefore, the user state estimation device, which estimates the user's level of attention, can safely and accurately estimate the user's level of attention by detecting reflected light from the object with high sensitivity while suppressing the increase in the amount of light irradiated onto the object.

[0115] Furthermore, the user state estimation device having the gaze detection device 10 can also be applied to a driving assistance system. This driving system includes a user state estimation device having the gaze detection device 10, and an operation control unit that controls the operation of a moving object based on the level of attention estimated by the user state estimation device. For example, if the level of attention of the user estimated by the user state estimation device falls below a predetermined standard, the operation control unit controls the operation mode of the moving object, such as a vehicle, to switch from manual driving mode to automatic driving mode. Because the gaze detection device 10 can detect reflected light from an object with high sensitivity while suppressing the increase in the amount of light illuminating the object, the driving assistance system can provide safe and highly accurate driving assistance.

[0116] Furthermore, these embodiments may also be configured such that two or more image generation units and a state estimation unit that estimates the user's state utilize a single piece of information regarding the tilt of the eyeball 30, pupil position (cornea), or gaze direction detected by the gaze detection device 10. This configuration allows for high-sensitivity detection of reflected light from the eyeball 30 while suppressing an increase in the amount of light irradiated onto the user's eyeball 30, and also allows for miniaturization of the gaze detection device 10.

[0117] For example, the tilt of the eyeball 30, pupil position (cornea), or gaze direction information detected by the gaze detection device 10 may be used as a feedback signal to the image generation unit of the retinal projection display device, while also being used for fatigue estimation by the fatigue estimation unit of the fatigue estimation device. In this case, the image generation unit and the fatigue estimation unit as functional components may be provided in the same information processing device, or they may be provided in separate information processing devices.

[0118] All ordinal numbers, quantities, and other figures used in this specification are illustrative to specifically illustrate the technology of the present invention, and the present invention is not limited to these illustrative figures. Furthermore, the connection relationships between components are illustrative to specifically illustrate the technology of the present invention, and the connection relationships that realize the functions of the present invention are not limited thereto.

[0119] Furthermore, each function of the embodiments described herein can be realized by one or more processing circuits. Hereinafter, "processing circuit" as used herein includes processors programmed to execute each function by software, such as processors implemented by electronic circuits, as well as devices such as ASICs (Application Specific Integrated Circuits), DSPs (digital signal processors), FPGAs (field programmable gate arrays), and conventional circuit modules designed to execute the functions described above. [Explanation of symbols]

[0120] 1. First substrate (first support) 1a 1st page 1b 2nd side 2. Second substrate (second support) 3 Spacer member 10, 10a, 10b Line-of-sight detection device (an example of a tilt detection device) 11, 11a light source 12, 12a 2nd light receiving section 13 Light Emitting Section 14 1st light receiving section 15 Amplifier 16 connectors 17 Flexible circuit board 20 Light guide member 21. First Prism 22. Second Prism 23 First through hole 24 Beam Splitter 25 Second through hole 26 Third through hole 30. Eyeball (an example of a three-dimensional object) 31 Pupil 32 Cornea 33 Retina 40, 45 Light-emitting part 41 electrode 41p Anode terminal 41n cathode terminal 42, 42p, 42n conductive members 43. First Semiconductor Substrate 44. Second Semiconductor Substrate 50 Optical Units 60 Reflection focusing member 61 RGB laser light sources 62 Scanning mirrors 63 Flat mirror 64 Half Mirror 65 Image generation unit 70 Spectacle-shaped support 71 Lens 72 Eyeglass Frames 73 Vines 74 Fittings 80 VCSEL array 81 Air layer 91 Third light receiving section 100, 100a Processing Unit 101 CPU 102 ROM 103 RAM 104 SSD 105 Light source driving circuit 106 A / D conversion circuit 107 Input / Output Interfaces 108 System Bus 110 Light-emitting drive unit 111 Signal Input Section 114 Polarization Anisotropic Member 120 Arithmetic section 121 Eye rotation angle estimator 122 Gaze information acquisition unit 130 Eye-tracking information output unit 200 Retinal projection display device Ct control signal Dr drive signal E Gaze information Fd feedback signal S Received light signal M Light intensity monitoring signal L0, L4 laser light L1, L5 focused light L2 reflected light L3 Primary Diffraction [Prior art documents] [Patent Documents]

[0121] [Patent Document 1] Patent No. 4914616

Claims

1. A tilt detection device for detecting the tilt of a three-dimensional object, A first support including a first surface and a second surface, The light source provided on the first surface, A light guide member that guides light from the light source, A light emission unit that emits light guided by the light guide member from the first surface to the second surface, A first light receiving unit is provided on the second surface, which receives the reflected light from the three-dimensional object that emits light from the light emitting unit and outputs a light receiving signal, An output unit that outputs tilt information of the three-dimensional object based on the light received signal from the first light receiving unit, A light splitting member that splits the light from the light source into two or more beams of light, The system includes a second light receiving unit that receives at least one of the two or more lights divided by the light splitting member and outputs a signal corresponding to the amount of light of the received light, The second light-receiving unit is a tilt detection device positioned between the light source and the light-emitting unit on the first surface of the first support.

2. The tilt detection device according to claim 1, wherein the first support is a mounting substrate on which the light source and the first light receiving unit can be mounted.

3. The tilt detection device according to claim 1 or claim 2, wherein the light source has a plurality of light-emitting units.

4. The light source has multiple light-emitting parts, each of which is made up of individual pieces. The tilt detection device according to any one of claims 1 to 3, wherein an air layer is provided between the plurality of light-emitting parts.

5. The light source includes a plurality of light-emitting parts, each of which is separated into individual pieces. The second light-receiving unit includes a plurality of individual light-receiving units, The plurality of individualized light-receiving units are paired with the plurality of light-emitting units and are arranged between the plurality of light-emitting units. The tilt detection device according to claim 1, wherein the plurality of individualized light-receiving units receive at least one of the light beams from a pair of light-emitting units that has been divided by the light-dividing member.

6. A second support that supports at least the light guide member, The tilt detection device according to any one of claims 1 to 5, further comprising a spacer member provided between the first support and the second support.

7. A holding member for holding the first support, A reflective and focusing member is provided on the holding member, which reflects and focuses the light from the light emitting part toward the three-dimensional object, A third light-receiving unit that receives light from the aforementioned reflective focusing member, The light source includes a first light-emitting section and a second light-emitting section. The first light receiving unit outputs a light receiving signal of the light reflected by the three-dimensional object, which is the light emitted by the first light emitting unit and reflected and focused by the reflection and focusing member. The third light receiving unit outputs a light receiving signal of the light that has been reflected and focused by the reflection and focusing member, the light emitted by the second light emitting unit. The tilt detection device according to any one of claims 1 to 6, wherein the output unit outputs tilt information of the three-dimensional object, with the position and angle of the reflecting and focusing member compensated, based on the light received signals from the first light receiving unit and the third light receiving unit.

8. A human gaze detection device, Having a tilt detection device according to any one of claims 1 to 7, The aforementioned three-dimensional object is an eyeball, A gaze detection device that includes gaze information relating to the direction of a person's line of sight as the inclination information of the three-dimensional object.

9. A head-mounted display having the gaze detection device described in claim 8.

10. A retinal projection type display device having the gaze detection device described in claim 8.

11. An eye examination device having the gaze detection device described in claim 8.

12. Having the gaze detection device described in claim 8, A user state estimation device comprising: an estimation unit that estimates the user's state based on the gaze information detected by the gaze detection device.

13. The user state estimation device according to claim 12, wherein the estimation unit estimates the user's state based on the frequency of micro-vibrations of the user's eyeballs.

14. The user state estimation device according to claim 12 or 13, wherein the user state includes at least one of the user's fatigue level and the user's attention level.

15. A user state estimation device according to any one of claims 12 to 14, A driving assistance system comprising: a control unit that controls the operation of a mobile body driven by the user based on the user's state estimated by the user state estimation device.

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