Measurement system and measurement method

Abstract

Provided is a measurement system comprising a scanner which emits guide light from a predetermined emission position toward a target, a first sensor which receives the guide light reflected on the target, and a calculation unit which calculates a distance between the scanner and the target on the basis of information relating to the guide light from the first sensor.

Description

Technical Field

[0003]

[0001] The present disclosure relates to a measurement system and a measurement method.

Background Art

[0002] In a laser processing machine or the like that irradiates a target object with laser light, it is necessary to align the focus of the laser light with the target object before processing the target object. Therefore, the distance between the emission position where the laser light is emitted and the target object is measured. This distance measurement is performed while an operator visually checks a scale such as a scale or a numerical value displayed on a distance meter (for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, this distance measurement imposes a great burden on the operator. Therefore, a system that automatically measures the distance is required.

Means for Solving the Problems

[0005] The measurement system of the present disclosure includes a scanner that irradiates a target object with guide light from a predetermined emission position, A first half-mirror is provided in the scanner, which reflects a portion of the guide light, a first sensor that receives the guide light reflected by the target object, A second sensor receives guide light that is reflected by the object and transmitted through the first half-mirror, and a calculation unit that calculates the distance between the scanner and the target object based on information regarding the guide light from the first sensor. Then, based on the information from the second sensor that receives the guide light, the parallelism between the scanner and the object is calculated. It is provided with The second sensor receives guide light that has passed through one or more first apertures placed between the first half-mirror and the second sensor. . Furthermore, the measurement system disclosed herein includes a scanner that irradiates guide light from a predetermined emission position toward an object, a first sensor that receives the guide light reflected by the object, a light source that irradiates light toward the object, a second half-mirror that reflects a portion of the light from the light source toward the object, a third sensor that receives the light reflected by the object, and a calculation unit that calculates the distance between the scanner and the object based on information about the guide light from the first sensor and calculates the parallelism between the scanner and the object based on information from the third sensor that received the light, wherein the third sensor receives light that has passed through one or more second apertures placed between the second half-mirror and the third sensor.

[0006] The measurement method of the present disclosure is guide light A portion of it is reflected by the first half-mirror and scannedThe process involves irradiating the target object from a predetermined emission position and using the guide light reflected by the target object. With the first sensor Receiving and The guide light, reflected by the object and transmitted through the first half-mirror, is received by the second sensor, and the first sensor... Based on information about the guide light, the distance between the scanner and the object is calculated. Then, based on information from a second sensor that receives guide light, the parallelism between the scanner and the object is calculated. This includes The second sensor receives guide light that has passed through one or more first apertures positioned between the first half-mirror and the second sensor. Furthermore, the measurement method of the present disclosure includes irradiating a guide light from a predetermined emission position of a scanner toward an object, receiving the guide light reflected by the object with a first sensor, reflecting a portion of the light from a light source with a second half mirror and irradiating it toward the object, receiving the light reflected by the object with a third sensor, calculating the distance between the scanner and the object based on information about the guide light from the first sensor, and calculating the parallelism between the scanner and the object based on information from the third sensor that received the light, wherein the third sensor receives the light that has passed through one or more second apertures arranged between the second half mirror and the third sensor. [Brief explanation of the drawing]

[0007] [Figure 1] This is a diagram illustrating an example of a laser oscillator and measurement system. [Figure 2] This is a diagram illustrating an example of the internal structure of a scanner. [Figure 3] This is a diagram to explain the calculation principle. [Figure 4] This is a block diagram showing an example of the hardware configuration of a control device. [Figure 5] This is a block diagram showing an example of a control device function. [Figure 6] This is a diagram to explain the calculation principle. [Figure 7] This is a diagram illustrating an example of the internal structure of a scanner. [Figure 8] This flowchart shows an example of the processing flow performed by the measurement system. [Figure 9] This is a diagram illustrating an example of how the detector is mounted. [Figure 10] This is a diagram illustrating an example of the internal structure of a detector. [Modes for carrying out the invention]

[0008] Hereinafter, a measurement system and measurement method according to the embodiments of this disclosure will be described with reference to the drawings. In the following description, components having the same or similar functions will be denoted by the same reference numerals. Duplication of these components may be omitted.

[0009] As used in this application, "based on XX" means "based on at least XX", and includes cases where it is based on XX in addition to other elements. Also, "based on XX" is not limited to the case of directly using XX, but also includes cases where it is based on something obtained by performing operations or processing on XX. "XX" is any element (for example, any information).

[0010] <First Embodiment> FIG. 1 is a diagram for explaining an example of a laser oscillator and a measurement system 2. The laser oscillator 1 is a device that generates laser light. The laser oscillator 1 is, for example, a gas laser oscillator, a fiber laser oscillator, a disk laser oscillator, a DDL laser oscillator, or a YAG laser oscillator. The laser light generated by the laser oscillator is, for example, high-power laser light for cutting, welding, marking, or engraving.

[0011] Further, the laser oscillator 1 generates guide light. Guide light is light that has an optical axis that coincides with the optical axis of the laser light. The guide light is, for example, red laser light. Note that the guide light is not limited to red laser light and may be visible light.

[0012] The laser oscillator 1 is connected to the measurement system 2. The laser oscillator 1 supplies the generated laser light and guide light to the measurement system 2 through an optical fiber or the like.

[0013] The measurement system 2 includes a scanner 21, a first sensor 22, a control device 23, an industrial machine 24, and a second sensor (not shown).

[0014] The scanner 21 is a device that irradiates the object O with the laser light and guide light supplied from the laser oscillator 1 from a predetermined emission position. The scanner 21 has a function of changing the emission direction of the laser light and guide light supplied from the laser oscillator 1. In other words, the scanner 21 is a device for scanning the object O with the laser light and guide light. The scanner 21 is, for example, a galvanometer scanner.

[0015] The guide light is output coaxially from the scanner 21 with the laser beam. In other words, the guide light is projected at the same position on the object O that will be illuminated by the laser beam. By visually confirming the position where the guide light is projected, the operator can confirm the position where the laser will be projected in advance.

[0016] Figure 2 is a diagram illustrating an example of the internal structure of the scanner 21. For convenience, the directions indicated by the arrows in each figure are defined as the X-axis positive direction, the Y-axis positive direction, and the Z-axis positive direction, respectively, and this embodiment will be described accordingly.

[0017] The scanner 21 has, for example, a rectangular prism-shaped housing (not shown). Inside the housing, the scanner 21 has, for example, a focus control mechanism 211, a condensing lens 212, and an angle control mechanism 213.

[0018] The focus control mechanism 211 is a mechanism for controlling the focal position of the laser beam. The focus control mechanism 211 has a lens section 211a and a drive section 211b.

[0019] The lens portion 211a is, for example, a convex lens. However, the lens portion 211a is not limited to a convex lens; it may be any other type of lens.

[0020] The drive unit 211b is a device that moves the lens unit 211a along the direction of laser light transmission. The drive unit 211b is a linear motion mechanism. A linear motion mechanism is, for example, a ball screw linear motion mechanism. The drive unit 211b moves the lens unit 211a along the X axis, for example.

[0021] The focusing lens 212 is a lens used to focus the laser beam onto the angle control mechanism 213. The focusing lens 212 is, for example, a convex lens. The focusing lens 212 is positioned between the focus control mechanism 211 and the angle control mechanism 213.

[0022] The angle control mechanism 213 is a mechanism for changing the irradiation angle of the laser beam and guide beam with respect to the object O. In other words, the angle control mechanism 213 is a mechanism for changing the emission angle of the laser beam and guide beam emitted from a predetermined emission position of the scanner 21, as described later.

[0023] The angle control mechanism 213 includes a drive mechanism and a mirror. The drive mechanism includes a first drive mechanism 213a and a second drive mechanism 213c. The mirror includes a first mirror 213b and a second mirror 213d.

[0024] The first drive mechanism 213a is a mechanism for rotating the first mirror 213b. The first drive mechanism 213a has a rotating shaft. The rotating shaft is connected to the first mirror 213b. As the rotating shaft rotates, the first mirror 213b connected to the rotating shaft rotates. The first drive mechanism 213a is, for example, a servo motor.

[0025] The first mirror 213b is a mirror for scanning the laser beam and guide beam, for example, along the X-axis. The first mirror 213b changes the orientation of the optical axes of the laser beam and guide beam by reflecting the laser beam and guide beam. The first mirror 213b is a mirror that totally reflects the laser beam. The first mirror 213b is also a mirror that totally reflects the guide beam.

[0026] The second drive mechanism 213c is a mechanism for rotating the second mirror 213d. The second drive mechanism 213c has a rotation axis. The rotation axis is connected to the second mirror 213d. As the rotation axis rotates, the second mirror 213d, which is attached to the rotation axis, rotates. The second drive mechanism 213c is, for example, a servo motor.

[0027] The second mirror 213d is, for example, a mirror for scanning the laser beam and guide beam along the Y-axis. The second mirror 213d changes the orientation of the optical axes of the laser beam and guide beam by reflecting the laser beam and guide beam. The second mirror 213d is a mirror that performs total internal reflection of the laser beam. The second mirror 213d is a half-mirror that reflects a portion of the guide beam and transmits the other portion of the guide beam.

[0028] When laser light is supplied from the laser oscillator 1 to the scanner 21, the laser light is guided to the lens section 211a. The laser light guided to the lens section 211a passes through the lens section 211a and is guided to the focusing lens 212. Furthermore, the laser light guided to the focusing lens 212 passes through the focusing lens 212 and is guided to the first mirror 213b. The laser light guided to the first mirror 213b is reflected by the first mirror 213b and guided to the second mirror 213d. The laser light guided to the second mirror 213d is reflected by the second mirror 213d and is irradiated from the emission position toward the object O.

[0029] The emission position is the position from which the scanner 21 emits laser light and guide light to the outside. For example, the emission position is the position where the optical axes of the laser light and guide light intersect with the surface on which the bottom plate of the scanner 21 housing is placed.

[0030] The drive unit 211b of the focus control mechanism 211 moves the lens unit 211a, thereby adjusting the focal position of the laser beam. Furthermore, the first drive mechanism 213a rotates the first mirror 213b, allowing the laser beam to be scanned along the X-axis. Additionally, the second drive mechanism 213c rotates the second mirror 213d, allowing the laser beam to be scanned along the Y-axis.

[0031] When guide light is supplied from the laser oscillator 1 to the scanner 21, the guide light is directed to the lens section 211a. The guide light directed to the lens section 211a passes through the lens section 211a and is directed to the focusing lens 212. Furthermore, the guide light directed to the focusing lens 212 passes through the focusing lens 212 and is directed to the first mirror 213b. The guide light directed to the first mirror 213b is reflected by the first mirror 213b and directed to the second mirror 213d. The guide light directed to the second mirror 213d is reflected by the second mirror 213d and is irradiated from the emission position toward the object O.

[0032] The first drive mechanism 213a rotates the first mirror 213b, thereby scanning the guide light along the X-axis. The second drive mechanism 213c rotates the second mirror 213d, thereby scanning the guide light along the Y-axis. Now, let's return to the explanation of Figure 1.

[0033] The first sensor 22 is a sensor that detects guide light. The first sensor 22 has a light-receiving unit (not shown). The first sensor 22 receives guide light reflected from the object O with its light-receiving unit. The first sensor 22 is, for example, a photosensor. The object O is, for example, a workpiece to be processed. The first sensor 22 sends information about the received guide light to the control device 23.

[0034] The information regarding the guide light is positional information relating to the position of the guide light received by the first sensor 22. That is, the positional information indicates at what position on the light-receiving part of the first sensor 22 the guide light was received. The first sensor 22 acquires positional information relating to the position along the X-axis from which the guide light enters the light-receiving part, for example. As will be described later, the control device 23 calculates the distance between the scanner 21 and the object O based on the information regarding the guide light.

[0035] Figure 3 is a diagram illustrating the principle for calculating the distance between the scanner 21 and the object O. The scanner 21 emits guide light from the emission position P1 toward the object O. The object O reflects the guide light emitted from the scanner 21 at the reflection position P2. That is, the reflection position P2 is the intersection point of the optical axis of the guide light and the surface of the object O.

[0036] The first sensor 22 receives the guide light reflected at reflection position P2. In other words, the guide light enters the light-receiving section of the first sensor 22 at incidence position P3. That is, incidence position P3 is the intersection point of the optical axis of the guide light and the light-receiving section of the first sensor 22.

[0037] The first sensor 22 acquires information regarding the incident position P3 of the guide light. This determines the distance d between the exit position P1 and the incident position P3. The exit angle θ of the guide light is determined based on the rotation angle of the mirror. Therefore, the distance between the exit position P1 and the object O, i.e., the distance D1 between the scanner 21 and the object O, can be calculated using the following equation 1.

[0038]

number

[0039] Next, the control device 23 will be described. The control device 23 is a device that controls the scanner 21 and the industrial machine 24. The control device 23 controls the operation of the scanner 21 and the industrial machine 24, for example, based on an operation program.

[0040] Figure 4 is a block diagram showing an example of the hardware configuration of the control device 23. The control device 23 comprises a hardware processor 231, a bus 232, a ROM (Read Only Memory) 233, a RAM (Random Access Memory) 234, and a non-volatile memory 235.

[0041] The hardware processor 231 is a processor that controls the entire control unit 23 according to the system program. The hardware processor 231 reads the system program and other data stored in the ROM 233 via the bus 232 and performs various processing based on the system program. The hardware processor 231 controls the scanner 21 and the industrial machine 24 based on the operation program. The hardware processor 231 is, for example, a CPU (Central Processing Unit) or an electronic circuit.

[0042] Bus 232 is a communication path that connects each piece of hardware within the control unit 23 to each other. Each piece of hardware within the control unit 23 exchanges data via bus 232.

[0043] ROM233 is a memory device that stores system programs and other information for controlling the entire control device 23. ROM233 is a computer-readable storage medium.

[0044] RAM234 is a memory device that temporarily stores various types of data. RAM234 functions as a workspace for the hardware processor 231 to process various types of data.

[0045] The non-volatile memory 235 is a storage device that retains data even when the power to the control device 23 is turned off and no power is supplied to the control device 23. The non-volatile memory 235 stores, for example, operating programs and various parameters. The non-volatile memory 235 is a computer-readable storage medium. The non-volatile memory 235 is, for example, battery-backed memory or an SSD (Solid State Drive).

[0046] The control device 23 further includes an axis control circuit 236, a first interface 237, a second interface 238, and a third interface 239.

[0047] The axis control circuit 236 is a circuit that controls the servo motor (not shown) of the industrial machine 24. The axis control circuit 236 receives control commands from the hardware processor 231 and sends various commands to the servo motor to drive it. For example, the axis control circuit 236 sends a torque command to the servo motor to control the torque of the servo motor.

[0048] Industrial machine 24 is a machine used in factories and other similar facilities. Industrial machine 24 includes, for example, industrial robots such as manipulators, and 3D scanner processing machines. If industrial machine 24 is an industrial robot, the scanner 21 is attached, for example, to the end of the robot's arm. If industrial machine 24 is a 3D scanner processing machine, the scanner 21 is attached to the end of the processing machine.

[0049] The first interface 237 connects the bus 232 and the scanner 21. The first interface 237 sends various commands or data processed by the hardware processor 231 to the scanner 21, for example.

[0050] The second interface 238 connects the bus 232 to the first sensor 22. The second interface 238 sends information acquired by the first sensor 22 to the hardware processor 231, RAM 234, etc.

[0051] The third interface 239 connects the bus 232 to the second sensor 25. The third interface 239 sends information acquired by the second sensor 25 to, for example, the hardware processor 231, RAM 234, etc. The second sensor 25 will be described in detail later.

[0052] Figure 5 is a block diagram showing an example of the functions of the control device 23. The control device 23 comprises a receiving unit 23a, a calculation unit 23b, and a control unit 23c.

[0053] The receiving unit 23a is connected to the first sensor 22 via a wired or wireless connection, for example, over a network. The receiving unit 23a receives information about guide light from the first sensor 22.

[0054] The calculation unit 23b calculates the distance D1 between the scanner 21 and the object O based on the information regarding the guide light from the first sensor 22 received by the receiving unit 23a. The distance D1 between the scanner 21 and the object O is, for example, the distance between the emission position P1 and the surface of the object O. That is, the distance D1 between the scanner 21 and the object O is the length of the line segment connecting the point where a perpendicular line drawn from the emission position P1 of the scanner 21 to the object O intersects with the object O and the emission position P1.

[0055] The control unit 23c controls the scanner 21 and the industrial machine 24. The control unit 23c controls the industrial machine 24 based on the distance D1 between the scanner 21 and the object O calculated by the calculation unit 23b. For example, the control unit 23c controls the industrial machine 24 so that the distance D1 between the scanner 21 and the object O becomes a predetermined reference distance.

[0056] When the distance D1 between the scanner 21 and the object O is calculated, the calculation unit 23b can further calculate the distance between any position on the object O to which the guide light is irradiated and the emission position P1 based on the emission angle θ of the guide light.

[0057] Figure 6 illustrates the principle for calculating the distance between an arbitrary position P4 on the object O to which the guide light is emitted and the emission position P1. If the distance D1 between the scanner 21 and the object O has already been calculated, the distance D2 between an arbitrary position P4 on the object O to which the guide light is emitted and the emission position P1 can be calculated by the following equation 2. Note that α is the angle between the perpendicular line drawn from the emission position P1 to the object O and the optical axis of the guide light.

[0058]

number

[0059] The measurement system 2 further includes a second sensor 25, as described above. The second sensor 25 is a sensor that detects guide light. The second sensor 25 receives guide light reflected from the object O. The second sensor 25 is, for example, a photosensor. The calculation unit 23b calculates the parallelism between the scanner 21 and the object O based on the information from the second sensor 25 that has received the guide light.

[0060] Figure 7 is a diagram illustrating an example of the internal structure of the scanner 21. Note that the first mirror 213b and the drive mechanism are omitted from Figure 7.

[0061] The scanner 21 has a second sensor 25 positioned on the opposite side of the position where the object O is placed, relative to the second mirror 213d. That is, the second mirror 213d is positioned between the object O and the second sensor 25.

[0062] The second mirror 213d is positioned such that the angle between the surface that reflects the guide light and the bottom plate of the housing is 45°. The scanner 21 also has one or more first apertures 214 between the second mirror 213d and the second sensor 25. If the scanner 21 has multiple first apertures 214, the multiple first apertures 214 are arranged parallel to each other.

[0063] The second sensor 25 receives guide light reflected from the object O. The second sensor 25 sends information about the received guide light to the control device 23. Here, the information about the guide light is, for example, intensity information regarding the intensity of the guide light. Light intensity is an index that represents the degree of brightness of the light.

[0064] Guide light supplied from the laser oscillator 1 passes through the lens section 211a and the focusing lens 212, is reflected by the first mirror 213b, and is guided to the second mirror 213d. A portion of the guide light guided to the second mirror 213d is reflected by the second mirror 213d and irradiates the object O. The guide light irradiated onto the object O is reflected by the surface of the object O and is guided again to the second mirror 213d.

[0065] A portion of the guide light directed to the second mirror 213d passes through the second mirror 213d. The guide light that has passed through the second mirror 213d and gone through the first aperture 214 is incident on the second sensor 25. The second sensor 25 sends information about the received guide light to the control device 23.

[0066] The receiving unit 23a receives information about guide light from the second sensor 25. The calculation unit 23b calculates the parallelism between the scanner 21 and the object O based on the information about guide light from the second sensor 25. The parallelism between the scanner 21 and the object O is, for example, the parallelism between the bottom plate of the scanner 21 housing and the surface of the object O.

[0067] When the parallelism between the scanner 21 and the surface of the object O is high, the intensity of the guide light passing through the first aperture 214 increases. As a result, the intensity of the guide light received by the second sensor 25 increases.

[0068] On the other hand, if the parallelism between the scanner 21 and the surface of the object O is low, the intensity of the guide light passing through the first aperture 214 will be weaker. As a result, the intensity of the guide light received by the second sensor 25 will be weaker. In other words, the calculation unit 23b calculates the parallelism between the scanner 21 and the object O based on the correlation between the intensity of the guide light received by the second sensor 25 and the parallelism between the scanner 21 and the object O.

[0069] Furthermore, there is a positive correlation between the parallelism between the scanner 21 and the object O and the perpendicularity between the optical axis of the guide light and the surface of the object O. Therefore, the calculation unit 23b may calculate the perpendicularity between the guide light and the surface of the object O instead of the parallelism between the scanner 21 and the object O.

[0070] Next, an example of the processing flow performed by the measurement system 2 will be described. In the above description, first the calculation of the distance D1 between the scanner 21 and the object O was mentioned, and then the calculation of the parallelism between the scanner 21 and the object O was mentioned. However, in the measurement system 2, as will be explained below, first the parallelism between the scanner 21 and the object O is measured, and then the distance between the scanner 21 and the object O is measured.

[0071] Figure 8 is a flowchart showing an example of the processing flow performed by the measurement system 2. First, the control unit 23c moves the scanner 21 to a predetermined position where the emission position P1 of the scanner 21 faces the surface of the object O (step S1). The control unit 23c controls the industrial machine 24 based on a predetermined operation program, for example, to move the scanner 21 to the predetermined position. The control unit 23c may also move the scanner 21 to the predetermined position based on manual operation by an operator.

[0072] Next, the parallelism between the scanner 21 and the object O is measured (step S2). Specifically, first, the control unit 23c controls the scanner 21 to emit guide light toward the object O. Next, the receiving unit 23a receives information about the guide light from the second sensor 25. Then, the calculation unit 23b calculates the parallelism between the scanner 21 and the object O based on the information about the guide light received from the second sensor 25.

[0073] If the parallelism calculated by the calculation unit 23b does not meet the predetermined conditions (in the case of No in step S3), the control unit 23c controls the industrial machine 24 based on an operation program, for example, to adjust the parallelism between the scanner 21 and the object O (step S4).

[0074] If the parallelism calculated by the calculation unit 23b satisfies a predetermined condition (i.e., Yes in step S3), the control unit 23c does not adjust the parallelism.

[0075] Furthermore, after the parallelism has been adjusted once, the measurement of parallelism and the determination of whether or not the predetermined conditions are met may be repeated until those conditions are satisfied.

[0076] Next, the distance D1 between the scanner 21 and the object O is measured (step S5). Specifically, first, the control unit 23c controls the scanner 21 to emit guide light toward the object O. Next, the receiving unit 23a receives information about the guide light from the first sensor 22. Then, the calculation unit 23b calculates the distance D1 between the scanner 21 and the object O based on the information about the guide light received from the first sensor 22.

[0077] If the distance D1 calculated by the calculation unit 23b does not satisfy a predetermined condition (i.e., No in step S6), the control unit 23c controls the industrial machine 24 based on an operation program, for example, to adjust the distance D1 between the scanner 21 and the object O (step S7).

[0078] If the distance D1 calculated by the calculation unit 23b satisfies a predetermined condition (i.e., Yes in step S6), the control unit 23c does not adjust the distance, and the process ends.

[0079] Furthermore, after the distance has been adjusted, the measurement of the distance and the determination of whether or not the predetermined conditions are met may be repeated until those conditions are met.

[0080] After the measurement and adjustment of parallelism, as well as the measurement and adjustment of distance, are completed, the control unit 23c may operate the industrial machine 24 and scanner 21 based on the operation program to process the object O.

[0081] <Second Embodiment> In the first embodiment described above, the distance between the emission position P1 and the emission position P3 is determined based on the information regarding the incidence position P3 acquired by the first sensor 22, and further, the distance D1 between the scanner 21 and the object O is calculated using a predetermined emission angle θ of the guide light.

[0082] However, the emission angle θ of the guide light may be adjusted so that the predetermined position of the light-receiving section becomes the incident position P3. In other words, the control device 23 may adjust the rotation angle of the mirror of the scanner 21 so that the guide light is received at the predetermined position of the light-receiving section of the first sensor 22.

[0083] In this case, the receiving unit 23a acquires information regarding the guide light emission angle θ from the scanner 21. In this case, the emission angle θ is the emission angle of the guide light when it is adjusted so that it is incident on a predetermined position of the light receiving unit.

[0084] The calculation unit 23b calculates the distance D1 between the scanner 21 and the object O based on the emission angle θ and the distance d between the emission position P1 and the incident position P3.

[0085] <Third Embodiment> In the first embodiment described above, the calculation unit 23b calculates the parallelism between the scanner 21 and the object O based on information from the second sensor 25 that receives guide light. On the other hand, the measurement system 2 of this embodiment includes a detector that detects the parallelism between the scanner 21 and the object O instead of the second sensor 25.

[0086] Figure 9 illustrates an example of how the detector is mounted on the scanner 21. The detector 26 is mounted, for example, at a position adjacent to the guide light emission position P1.

[0087] Figure 10 is a diagram illustrating an example of the internal structure of the detector 26. The detector 26 comprises a light source 261, a third mirror 262, one or more second apertures 263, and a third sensor 264.

[0088] The light source 261 shines light toward the third mirror 262. The light source 261 emits, for example, red laser light. The direction in which the light source 261 emits light is parallel to the bottom plate of the scanner 21 housing.

[0089] The third mirror 262 is a half-mirror that transmits some of the light emitted from the light source 261 and reflects the other part. The third mirror 262 is positioned such that the angle between the surface that reflects the light emitted from the light source 261 and the bottom plate of the scanner 21 housing is 45°.

[0090] The third sensor 264 is a light-detecting sensor. The third sensor 264 receives light reflected from the object O. The third sensor 264 sends information about the received light to the control device 23. Here, the information about the light is, for example, intensity information regarding the intensity of the light. The detector 26 has the third sensor 264 at a position opposite to the position where the object O is placed, with reference to the third mirror 262. That is, the third mirror 262 is placed between the object O and the third sensor 264.

[0091] Furthermore, the detector 26 has one or more second apertures 263 between the third mirror 262 and the third sensor 264. When the detector 26 has multiple second apertures 263, the multiple second apertures 263 are arranged parallel to each other.

[0092] Light emitted from the light source 261 is guided to the third mirror 262. A portion of the light guided to the third mirror 262 is reflected by the third mirror 262 and irradiates the object O. In other words, the light source 261 irradiates light toward the object O via the third mirror 262. The light irradiated toward the object O is reflected by the surface of the object O and guided again toward the third mirror 262.

[0093] A portion of the light guided to the third mirror 262 passes through the third mirror 262. The light that passes through the third mirror 262 and then through the second aperture 263 is incident on the third sensor 264.

[0094] The receiving unit 23a receives information about light from the third sensor 264. The calculation unit 23b calculates the parallelism between the scanner 21 and the object O based on the information from the third sensor 264 that has received light.

[0095] As described above, the measurement system 2 of this disclosure includes a scanner 21 that irradiates guide light from a predetermined emission position P1 toward an object O, a first sensor 22 that receives the guide light reflected by the object O, and a calculation unit 23b that calculates the distance D1 between the scanner 21 and the object O based on information about the guide light from the first sensor 22.

[0096] Therefore, the measurement system 2 can automatically measure and adjust distances. For example, compared to a situation where an operator measures distances by visually checking the scale markings or the values ​​displayed on a distance meter, the measurement system 2 can reduce the operator's workload.

[0097] Furthermore, the measurement system 2 can improve the accuracy of distance measurement compared to when an operator measures distance while visually checking the scale markings or the values ​​displayed on a distance meter.

[0098] Furthermore, since the measurement system 2 measures distance using guide light, it does not require any other light source for measuring distance.

[0099] Furthermore, the information regarding the guide light is positional information relating to the position of the guide light received by the first sensor 22. That is, the first sensor 22 acquires positional information indicating the position of the light-receiving section where the guide light is incident. In this case, the scanner can be positioned at any position before distance measurement, as long as the guide light is received by the light-receiving section. Therefore, positioning the scanner before distance measurement becomes easier.

[0100] Furthermore, the scanner 21 is equipped with a mirror that changes the emission angle θ of the guide light emitted from a predetermined emission position P1, and the calculation unit 23b calculates the distance based on the emission angle θ. In this case, the scanner 21 adjusts the emission angle θ of the guide light so that the predetermined position of the light-receiving part of the first sensor 22 becomes the incident position P3. As a result, the measurement range of the measurement system 2 can be increased.

[0101] Furthermore, the calculation unit 23b calculates the distance between an arbitrary position P4 on the object O to which the guide light is irradiated and the emission position P1 based on the emission angle α. Therefore, the control unit 23c can easily focus the laser beam on any position P4 on the object O to which the laser beam is irradiated.

[0102] Furthermore, the measurement system 2 is further equipped with a second sensor 25 that receives guide light reflected from the object O, and the calculation unit 23b calculates the parallelism between the scanner 21 and the object O based on the information from the second sensor 25 that receives the guide light. The information from the second sensor 25 is intensity information regarding the intensity of the guide light.

[0103] Therefore, compared to the case where an operator measures parallelism while visually checking the scale of a spirit level, measurement system 2 can reduce the burden on the operator. Furthermore, compared to the case where an operator measures parallelism while visually checking the scale of a spirit level, measurement system 2 can improve the accuracy of parallelism measurement.

[0104] The scanner also includes a light source 261 that irradiates light toward the object O, and a third sensor 264 that receives light reflected by the object O. The calculation unit 23b calculates the parallelism between the scanner 21 and the object O based on the information from the third sensor 264 that receives the light. The information from the third sensor 264 is intensity information regarding the intensity of the light.

[0105] Therefore, compared to the case where an operator measures parallelism while visually checking the scale of a spirit level, measurement system 2 can reduce the burden on the operator. Furthermore, compared to the case where an operator measures parallelism while visually checking the scale of a spirit level, measurement system 2 can improve the accuracy of parallelism measurement.

[0106] Furthermore, the measurement system 2 further comprises an industrial machine 24, and the scanner 21 is mounted on the industrial machine 24. The industrial machine 24 is an industrial robot. Therefore, when the scanner 21 is mounted on the industrial machine 24, in particular an industrial robot, the distance D1 between the scanner 21 and the object O, and the parallelism between the scanner 21 and the object O can be measured automatically.

[0107] While this disclosure has been described in detail, it is not limited to the individual embodiments described above. These embodiments can be added, replaced, modified, partially deleted, etc., in any way that does not depart from the gist of this disclosure, or from the gist of this disclosure derived from the claims and their equivalents. These embodiments can also be implemented in combination.

[0108] The following are additional notes regarding embodiments of this disclosure. Note [1] A measurement system comprising: a scanner that emits guide light from a predetermined emission position toward an object; a first sensor that receives the guide light reflected by the object; and a calculation unit that calculates the distance between the scanner and the object based on information about the guide light from the first sensor. Note [2] The measurement system as described in Appendix [1], wherein the information relating to the guide light is positional information relating to the position of the guide light received by the first sensor. Note [3] The scanner is equipped with a mirror that changes the emission angle of the guide light emitted from the predetermined emission position, and the calculation unit calculates the distance based on the emission angle, according to the measurement system described in Appendix [1] or [2]. Note [4] The measurement system according to Appendix [3] further comprises a calculation unit which calculates the distance between the position on the object to which the guide light is irradiated and the emission position based on the emission angle. Note [5] The measurement system according to any one of the appendices [1] to [4], further comprising a second sensor that receives the guide light reflected from the object, wherein the calculation unit calculates the parallelism between the scanner and the object based on information from the second sensor that received the guide light. Note [6] The measurement system described in Appendix [5], wherein the information from the second sensor is intensity information relating to the intensity of the guide light. Note [7] The measurement system according to any one of the appendices [1] to [4] further comprises a light source that irradiates light toward the object, and a third sensor that receives the light reflected by the object, wherein the calculation unit calculates the parallelism between the scanner and the object based on information from the third sensor that received the light. Note [8] The measurement system described in Appendix [7], wherein the information from the third sensor is intensity information relating to the intensity of the light. Note [9] The system further comprises an industrial machine, wherein the scanner is a measurement system as described in any of the appendices [1] to [8] attached to the industrial machine. Note

[10] The aforementioned industrial machine is an industrial robot, as described in Appendix [9]. Note

[11] A measurement method comprising: irradiating a guide light from a predetermined emission position toward an object; receiving the guide light reflected by the object; and calculating the distance between the scanner and the object based on information regarding the guide light. [Explanation of symbols]

[0109] 1. Laser oscillator 2. Measurement System 21 Scanners 211 Focus control mechanism 211a Lens section 211b Drive unit 212 Focusing lens 213 Angle control mechanism 213a First drive mechanism 213b The First Mirror 213c Second drive mechanism 213d Second Mirror 214 First Aperture 22 First Recovery 23 Control device 231 Hardware Processors 232 bus 233 ROM 234 RAM 235 Non-volatile memory 236-axis control circuit 237 First Interface 238 Second Interface 239 Third Interface 23a Receiving section 23b Calculation part 23c Control Unit 24 Industrial Machinery 25. Second sensor 26 Detectors 261 Light source 262 The Third Mirror 263 Second Aperture 264 Third Sensor

Claims

1. A scanner that emits guide light from a predetermined emission position toward an object, The scanner is provided with a first half-mirror that reflects a portion of the guide light, A first sensor that receives the guide light reflected from the object, A second sensor that receives the guide light reflected by the object and transmitted through the first half-mirror, A calculation unit calculates the distance between the scanner and the object based on information about the guide light from the first sensor, and calculates the parallelism between the scanner and the object based on information from the second sensor that received the guide light. Equipped with, The second sensor receives the guide light that has passed through one or more first apertures positioned between the first half-mirror and the second sensor. Measurement system.

2. A scanner that emits guide light from a predetermined emission position toward an object, A first sensor that receives the guide light reflected from the object, A light source that irradiates light toward the aforementioned object, A second half-mirror that reflects a portion of the light from the light source and irradiates it toward the object, A third sensor that receives the light reflected from the object, A calculation unit calculates the distance between the scanner and the object based on information about the guide light from the first sensor, and calculates the parallelism between the scanner and the object based on information from the third sensor that received the light. Equipped with, The third sensor receives the light that has passed through one or more second apertures positioned between the second half-mirror and the third sensor. Measurement system.

3. The measurement system according to claim 1 or 2, wherein the information relating to the guide light is positional information relating to the position of the guide light received by the first sensor.

4. The scanner includes a mirror that changes the emission angle of the guide light emitted from the predetermined emission position, The measurement system according to claim 1 or 2, wherein the calculation unit calculates the distance based on the emission angle.

5. The measurement system according to claim 4, wherein the calculation unit further calculates the distance between the position on the object to which the guide light is irradiated and the emission position based on the emission angle.

6. The measurement system according to claim 1, wherein the information from the second sensor is intensity information relating to the intensity of the guide light.

7. The measurement system according to claim 2, wherein the information from the third sensor is intensity information relating to the intensity of the light.

8. Equipped with additional industrial machinery, The measurement system according to claim 1 or 2, wherein the scanner is attached to the industrial machine.

9. The measurement system according to claim 8, wherein the industrial machine is an industrial robot.

10. A portion of the guide light is reflected by a first half-mirror and irradiated onto the object from a predetermined emission position of the scanner, The first sensor receives the guide light reflected from the object, The guide light, reflected by the object and transmitted through the first half-mirror, is received by the second sensor. Based on the information regarding the guide light from the first sensor, the distance between the scanner and the object is calculated, and based on the information from the second sensor that received the guide light, the parallelism between the scanner and the object is calculated. A measurement method including, The second sensor receives the guide light that has passed through one or more first apertures positioned between the first half-mirror and the second sensor. Measurement method.

11. The guide light is directed towards the object from a predetermined emission position of the scanner, The first sensor receives the guide light reflected from the object, A portion of the light from the light source is reflected by a second half-mirror and directed towards the object, The light reflected by the object is received by the third sensor, Based on the information regarding the guide light from the first sensor, the distance between the scanner and the object is calculated, and based on the information from the third sensor that received the light, the parallelism between the scanner and the object is calculated. A measurement method including, The third sensor receives the light that has passed through one or more second apertures positioned between the second half-mirror and the third sensor. Measurement method.

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