Grinding device

Abstract

To provide a grinding device which is used by mounting a grinding wheel at a tip of a spindle and facilitates exchange of the grinding wheel.SOLUTION: A grinding device fastens a grinding wheel onto a mount disk 6 connected to the tip of a spindle 30 by the use of a bolt 64. The mount disk 6 includes at least three internal threaded holes 62 which are penetrated through upper and lower faces and are arranged circumferentially at regular intervals, and a protruded part 61 which is protruded from a mounting face 60. The bolt 64 includes an external thread portion 641 and a neck part 642 at a tip of the external thread portion 641, and an engagement part 643 projecting out from the neck part 642. The grinding wheel includes: an annular aperture 71 which is annularly formed on a face 70 to be mounted of an annular base 7; an annular groove 72 which is connected to the annular aperture 71, has a width larger than an annular aperture, and is annularly formed within the annular base 7; at least three insertion holes which are arranged in the annular aperture 71 and each of which allows the engagement part 643 to be inserted into the annular groove 72; and a protruded part insertion hole 75 into which the protruded part 61 can be inserted.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a grinding apparatus provided with a grinding wheel having abrasive wheels arranged in a ring shape.

Background Art

[0002] A grinding apparatus for grinding various plate-shaped workpieces such as semiconductor wafers includes a mount disk at the tip of a spindle, and a grinding wheel is mounted on the mount disk for use. An abrasive wheel is provided on the lower surface side of the grinding wheel, and the abrasive wheel is rotated by rotating the spindle, and grinding is performed by bringing the rotating abrasive wheel into contact with the workpiece. When the abrasive wheel wears, it is necessary to replace the grinding wheel, so a mechanism for facilitating the replacement of the grinding wheel has been proposed.

[0003] For example, in Patent Document 1 below, a grinding apparatus is proposed in which a first chuck claw and a second chuck claw are provided on a base on the spindle side, and these support the grinding wheel, eliminating the need for complicated operations such as fixing with screws. Further, in Patent Document 2 below, a grinding apparatus is proposed in which the wheel engaging portion of the grinding unit is brought close to the grinding wheel placed on the chuck table and engaged with the grinding wheel, thereby mounting the grinding wheel on the spindle.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, to equip existing grinding equipment with the mechanisms disclosed in Patent Documents 1 and 2, it is necessary to modify the mounted disc. Furthermore, the motor controller settings, which control the motor that rotates the spindle, must be changed to accommodate the heavier mounted disc resulting from the modification, which takes time to modify and change the settings of the grinding equipment. In addition, it may be necessary to replace the spindle itself to which the mounted disc is attached.

[0006] The present invention has been made in view of these problems, and addresses the challenge of enabling quick modification of the mounting disc in existing grinding devices and facilitating the replacement of grinding wheels in a grinding device that uses a grinding wheel attached to the tip of a spindle. [Means for solving the problem]

[0007] The present invention relates to a grinding apparatus in which a grinding wheel, having a grinding wheel arranged in an annular shape on an annular base, is fastened by bolts to a mounting disc connected to the tip of a spindle, and a workpiece held on a chuck table is ground with the grinding wheel, wherein the mounting disc has at least three female holes that penetrate the upper and lower surfaces and are arranged at equal intervals in a circular shape. screw The bolt comprises a hole and a protrusion that extends from the mounting surface on which the grinding wheel is attached, and the bolt is male screw The department and the male screw department lower end A neck portion connected to the neck portion lower end The engaging portion is connected to the neck portion and protrudes from the neck portion, A protruding portion connected to the upper end of the male threaded portion, The grinding wheel comprises an annular opening formed in an annular shape on the mounting surface of the annular base, and the annular opening lower end Connected Concentric with the annular opening The mounting disc comprises an annular groove formed in an annular shape within the annular base, having a width wider than the annular opening, at least three insertion holes arranged in the annular opening into which the engaging portion can be inserted into the annular groove, and a protrusion insertion hole into which the protrusion can be inserted, and when the grinding wheel is mounted on the mounting disc, the female screw In the hole The bolt The male threaded portion is screwed in and the engaging portion protrudes from the mounting surface. Furthermore, a portion of the protruding part is made to protrude above the opposite side of the mounting surface.Insert the engaging portion into the annular groove through the insertion hole, rotate the mounting disc and the grinding wheel relative to each other, and at the position where the protrusion insertion hole and the protrusion coincide... Rotate the protruding part The bolt is rotated to insert the protrusion into the protrusion insertion hole, and the mounting disc and the grinding wheel are fastened together with the bolt. In the grinding apparatus described above, the protrusion insertion hole may also be the insertion hole. The protrusion, the engaging portion, the insertion hole, and the protrusion insertion hole may be formed in a cylindrical shape. [Effects of the Invention]

[0008] This grinding device allows for easy replacement of the grinding wheel without requiring a complex mechanism on the mounted disc, thus avoiding increased weight on the mounted disc. Consequently, there is no need to change the settings of the motor controller that rotates the spindle. Furthermore, since the grinding wheel does not need to be held by suction force, there is no need to connect it to a suction source, and therefore there is no need to replace the spindle. [Brief explanation of the drawing]

[0009] [Figure 1] This is a perspective view showing an example of a grinding machine. [Figure 2] This is a bottom view showing an example of a mounted disk. [Figure 3] This is a schematic cross-sectional view showing a magnified view of a portion of the mounting disc, bolts, and grinding wheel. [Figure 4] This is a plan view showing an example of a ring-shaped base. [Figure 5] This is a schematic cross-sectional view showing the state before the bolt is inserted into the female threaded hole of the mounting disc. [Figure 6] This is a schematic cross-sectional view showing the bolt inserted into the female threaded hole of the mounting disc. [Figure 7] This is a schematic cross-sectional view showing the state in which the engaging portion engages with the annular groove, causing the mounting disc and the grinding wheel to rotate relative to each other. [Figure 8]A cross-sectional view schematically showing a state where a convex portion of a mounting disk is inserted into a convex portion insertion hole and the mounting disk and a grinding wheel are fastened by bolts.

Embodiments for Carrying Out the Invention

[0010] The grinding apparatus 1 shown in FIG. 1 is an apparatus for grinding a workpiece held by a chuck table 2 using a grinding mechanism 3. The chuck table 2 is driven by a moving mechanism 4 and is movable in the Y-axis direction. The grinding mechanism 3 is driven by a grinding feed mechanism 5 and is movable in the Z-axis direction.

[0011] The chuck table 2 includes a suction portion 21 formed of a porous member and a frame body 22 that supports the suction portion 21. The surface of the suction portion 21 constitutes a holding surface 210 for holding the workpiece 10. The holding surface 210 and the upper surface 220 of the frame body 22 are flush.

[0012] Below the chuck table 2, a table base 23 is provided. The table base 23 is supported at at least three locations by three chuck support portions 24 (only two are shown in FIG. 1). In each chuck support portion 24, a load measuring device 25 for measuring the vertical load when the grinding mechanism 3 presses the workpiece held by the holding surface 200 is disposed. Also, at least two chuck support portions 24 have a function of adjusting the height of the chuck table 2 to adjust the inclination of the holding surface 210.

[0013] The grinding mechanism 3 includes a spindle 30 having a rotation axis in the Z-axis direction, a motor 31 for rotating the spindle 30, a spindle housing 32 for rotatably supporting the spindle 30, a mount disk 6 connected to the lower end of the spindle 30, and a grinding wheel 34 mounted on the mount disk 33. At the upper end of the spindle 30, there is a grinding water inlet 301 for allowing grinding water to flow in. When the motor 31 rotates the spindle 30, the grinding wheel 34 also rotates. The grinding wheel 34 is composed of an annular base 7 fixed to the mount disk 6 and a plurality of grinding wheels 8 annularly fixed to the lower surface of the annular base 7.

[0014] The moving mechanism 4 includes a ball screw 40 having a rotation axis in the Y-axis direction, a motor 41 for rotating the ball screw 40, a pair of guide rails 42 arranged in parallel with the ball screw 40, and a slide plate 43 having a nut (not shown) inside whose bottom is in sliding contact with the guide rail 42 and is screwed onto the ball screw 40. Above the slide plate 43, a chuck support portion 24 and a load measuring device 25 are arranged. When the ball screw 40 rotates, the slide plate 43 is guided by the guide rail 42 and moves in the Y-axis direction, and along with the movement of the slide plate 43 in the Y-axis direction, the chuck table 2 also moves in the same direction.

[0015] The grinding feed mechanism 5 includes a ball screw 50 having a rotation axis in the Z-axis direction, a motor 51 for rotating the ball screw 50, a pair of guide rails 52 arranged in parallel with the ball screw 50, a lifting plate 53 having a nut (not shown) inside whose side is in sliding contact with the guide rail 52 and is screwed onto the ball screw 50, and a holder 54 connected to the lifting plate 53 and supporting the spindle housing 32. When the ball screw 50 rotates, the lifting plate 53 is guided by the guide rail 52 and moves in a direction perpendicular to the holding surface 200, and along with this, the grinding mechanism 3 also moves in the same direction, and the grinding wheel 8 approaches or separates relatively with respect to the holding surface 200. The position of the grinding mechanism 3 in the Z-axis direction is recognized by an encoder 55 provided in the motor 51.

[0016] A thickness measuring device 9 is positioned to the side of the Y-axis movement path of the chuck table 2 to measure the thickness of the wafer held by the chuck table 2. The thickness measuring device 9 includes a first measuring unit 91 that measures the height of the upper surface of the wafer held on the holding surface 210 of the suction unit 21, and a second measuring unit 92 that measures the height of the upper surface 220 of the frame 22. The difference between the measurement value of the first measuring unit 91 and the measurement value of the second measuring unit 92 is calculated as the thickness of the wafer.

[0017] As shown in Figure 2, the mounting disc 6 is formed in an annular shape. The lower surface of the mounting disc 6, i.e., the mounting surface 60 on which the grinding wheel 34 is attached, is provided with two cylindrical protrusions 61 that project downward. The two protrusions 61 are formed on the same circumference, spaced 180 degrees apart.

[0018] The protrusion may be integrated with the mounting disc 6, or it may be detachable. In the case of a detachable design, for example, a female thread may be formed on the mounting surface 60 of the mounting disc 6, and a male thread may be formed on the tip of the protrusion, and the position of the protrusion may be changed depending on the type of grinding wheel. Also, the shape of the protrusion may be changed to a polygonal prism depending on the type of grinding wheel.

[0019] The mount disc 6 has eight female screw holes 62 formed therein, which are formed at equal intervals on the same circumference. In the example shown in Figure 2, eight female screw holes 62 are formed, but at least three are sufficient. As shown in Figure 3, the female screw holes 62 penetrate the upper and lower surfaces of the mount disc 6. The mount disc 6 also has a grinding water channel 63 formed therein, which is a passage for grinding water that flows in from the grinding water inlet 301 shown in Figure 1 and flows into the mount disc through a channel (not shown) inside the spindle 30.

[0020] A bolt 64, as shown in Figure 3, is inserted into this female threaded hole 62. The bolt 64 comprises a male threaded portion 641, a neck portion 642 connected to the tip of the male threaded portion 641, and a cylindrical engaging portion 643 connected to the tip of the neck portion 642, which is larger in diameter than the neck portion 642 and extends outward from the neck portion 642. The bolt 64 is equipped with a plunger 644, and the engaging portion 643, together with the neck portion 642, is retractable relative to the male threaded portion 641.

[0021] As shown in Figure 4, an annular opening 71 is formed on the upper surface of the annular base 7 of the grinding wheel 34, i.e., the mounting surface 70 that is mounted on the mounting surface 60 of the mount disc 6. As shown in Figure 5, a bottomed annular groove 72, which is an annular space, is formed inside the annular base 7. The annular groove 72 is wider than the annular opening 71 and communicates with the annular opening 71 in the vertical direction. The annular base 7 is also equipped with a grinding water ejection section 73, the upper part of which is open and communicates with the grinding water channel 63 of the mount disc 6, and the lower part of which is open.

[0022] As shown in Figure 2, the annular opening 71 has insertion holes 74 formed at equal intervals, which are cylindrical spaces through which the engaging portion 643 can be inserted, i.e., the inner diameter is slightly larger than the outer diameter of the engaging portion 643. In the example in Figure 4, eight insertion holes 74 are formed, but at least three are sufficient.

[0023] In the annular opening 71, cylindrical spaces called protrusion insertion holes 75 are formed at equal intervals, into which the protrusions 61 of the mounting disk 6 are inserted. The same number of protrusion insertion holes 75 are formed as the number of protrusions 61. In the example in Figure 2, two protrusions 61 are formed at 180-degree intervals, so correspondingly, two protrusion insertion holes 75 are also formed at 180-degree intervals.

[0024] Next, the procedure for attaching the annular base 7 of the grinding wheel 34 to the mounting disc 6 will be described with reference to Figure 5-8. The mounting disc 6 in Figure 5 shows the AOB cross-section in Figure 2. The grinding wheel 34 in Figures 5 and 6 also shows the AOB cross-section in Figure 4.

[0025] First, as shown in Figure 5, the male threaded portion 641 of the bolt 64 is screwed into the female threaded hole 62 of the mount disc 6, and the engaging portion 643 is made to protrude from the mounting surface 60, as shown in Figure 6. Next, the engaging portion 643 is inserted through the insertion hole 74 shown in Figure 4, and the engaging portion 642 is inserted to the depth of the annular groove 72. Then, with the engaging portion 643 positioned in the annular groove 72, the mount disc 6 and the grinding wheel 34 are rotated relative to each other.

[0026] As the relative rotation of the mounting disc 6 and the grinding wheel 34 occurs, as shown in Figure 7, the neck portion 642 enters the annular opening 71 and the engaging portion 643 enters the annular groove 72 and engages. As the relative rotation of the mounting disc 6 and the grinding wheel 34 continues, the position of the protrusion insertion hole 75 formed in the annular base 7 coincides with the position of the protrusion 61 formed in the mounting disc 6. Furthermore, the annular groove 72 may have a recess formed in it into which the tip of the plunger 644 enters when the position of the protrusion insertion hole 75 coincides with the position of the protrusion 61.

[0027] When the position of the protrusion insertion hole 75 and the position of the protrusion 61 coincide, the relative rotation of the mount disc 6 and the grinding wheel 34 is stopped at that position, and as shown in Figure 8, the bolt 64 is rotated at that position to bring the mount disc 6 and the annular base 7 closer together and into close contact. This inserts the protrusion 61 into the protrusion insertion hole 75. Then the bolt 64 is rotated further to fasten the mount disc 6 and the annular base 7 of the grinding wheel 34 with the bolt 64.

[0028] In this way, the engaging portion 643 of the bolt 64 inserted into the female threaded hole 62 of the mount disc 6 engages with the annular groove 72 of the annular base 7, causing the annular base 7 and the mount disc 6 to rotate relative to each other. By tightening the bolt 64 while the position of the protrusion insertion hole 75 and the position of the protrusion 61 are aligned, the grinding wheel 34 can be attached to the mount disc 6. Alternatively, the grinding wheel 34 can be removed from the mount disc 6 by loosening the bolt 64, rotating the annular base 7 and the mount disc 6 relative to each other, and disengaging the engaging portion 643 from the insertion hole 74. Furthermore, a recess may be formed in the annular groove 72 at the center of the insertion hole 74 into which the tip of the plunger 644 enters. This allows the operator to know when the grinding wheel 34 is ready to be removed from the mounting disc 6.

[0029] In this way, the grinding wheel 34 can be easily replaced without requiring a complex mechanism in the mounted disc 6, thus avoiding making the mounted disc 6 heavier. Therefore, the settings of the controller for the motor 31 that rotates the spindle 30 do not need to be changed. Also, since the mounted disc 6 does not need to hold the grinding wheel 34 by suction, there is no need to communicate with a suction source, and there is no need to replace the spindle 30. Furthermore, the bolts

[0030] In this embodiment, the annular base 7 is provided with separate insertion holes 74 and protrusion insertion holes 75, but the insertion hole 74 may also serve as the protrusion insertion hole 75. [Explanation of Symbols]

[0031] 1: Grinding device 2: Chuck Table 21: Suction part 210: Holding surface 22: Frame body 220: Top surface 23: Table base 24: Chuck support 25: Load measuring device 3: Grinding mechanism 30: Spindle 301: Grinding water inlet 31: Motor 32: Spindle housing 33: Mounting disk 34: Grinding Wheel 4: Movement mechanism 40: Ball screw 41: Motor 42: Guide rail 43: Slide plate 5: Grinding feed mechanism 50: Ball screw 51: Motor 52: Guide rail 53: Lifting plate 54: Holder 55: Encoder 6: Mount disk 60: Mounting surface 61: Protrusion 62: Female screw hole 63: Grinding water channel 64: Bolt 641: Male threaded portion 642: Neck portion 643: Engaging portion 644: Plunger 7: Ring base 70: Mounting surface 71: Annular opening 72: Annular groove 73: Grinding water spout 74: Insertion hole 75: Protruding insertion hole 8: Grinding wheel 9: Thickness measuring instrument 91: First measuring section 92: Second measuring section

Claims

1. A grinding apparatus comprising a grinding wheel having grinding wheels arranged in a ring shape on an annular base, fastened by bolts to a mounting disc connected to the tip of a spindle, and grinding a workpiece held on a chuck table with the grinding wheel, The mounting disc comprises at least three female screw holes that penetrate the upper and lower surfaces and are arranged at equal intervals in a circular pattern, and a protrusion that extends from the mounting surface on which the grinding wheel is attached. The bolt comprises a male threaded portion, a neck portion connected to the lower end of the male threaded portion, an engaging portion connected to the lower end of the neck portion and protruding from the neck portion, and a protruding portion connected to the upper end of the male threaded portion. The grinding wheel comprises an annular opening formed in an annular shape on the mounting surface of the annular base, an annular groove formed in an annular shape within the annular base, connected to the lower end of the annular opening and having a width wider than the annular opening and concentric with the annular opening, at least three insertion holes arranged in the annular opening into which the engaging portion can be inserted into the annular groove, and a protrusion insertion hole into which the protrusion can be inserted, A grinding device for mounting the grinding wheel to the mounting disc, wherein the male threaded portion of the bolt is screwed into the female threaded hole, the engaging portion protrudes from the mounting surface, a portion of the protruding portion protrudes above the opposite surface of the mounting surface, the engaging portion is inserted into the annular groove through the insertion hole, the mounting disc and the grinding wheel are rotated relative to each other, the protruding portion is rotated when the protrusion insertion hole and the protrusion coincide, the bolt is rotated, the protrusion is inserted into the protrusion insertion hole, and the mounting disc and the grinding wheel are fastened together with the bolt.

2. The grinding apparatus according to claim 1, wherein the protrusion insertion hole is the insertion hole.

3. The grinding apparatus according to claim 1, wherein the protrusion, the engaging portion, the insertion hole, and the protrusion insertion hole are formed in a cylindrical shape.

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