Resin composition, cured product, laminate, method for manufacturing a cured product, method for manufacturing a laminate, method for manufacturing a semiconductor device, and semiconductor device

JP7863558B2Active Publication Date: 2026-05-21FUJIFILM CORP
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
FUJIFILM CORP
Filing Date
2022-06-27
Publication Date
2026-05-21

AI Technical Summary

Technical Problem

Existing resin compositions for forming cured products in semiconductor devices face challenges in achieving excellent rectangularity of the pattern due to uneven cyclization and diffusion of amines, leading to decreased pattern solubility and adhesion.

Method used

A resin composition containing a base generator with an α,β-unsaturated ketone group that generates a tertiary amine through intramolecular cyclization, suppressing polymerization reactions and enhancing amine diffusibility, resulting in improved pattern rectangularity and adhesion.

Benefits of technology

The resin composition achieves superior rectangularity and elongation at break of the cured product, with enhanced chemical resistance and adhesion to metals, by using a base generator that forms tertiary amines with reduced solvent solubility and polymerization reactivity.

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Abstract

The present invention provides: a resin composition which enables the achievement of a cured product having excellent pattern rectangularity; a cured product which is obtained by curing the resin composition; a multilayer body which comprises the cured product; a method for producing the cured product; a method for producing the multilayer body; a method for producing a semiconductor device, the method comprising the method for producing the multilayer body; and a semiconductor device which comprises the cured product or the multilayer body. The present invention provides: a resin composition that contains a resin and a base generator which has an α,β-unsaturated ketone group at a site where a base is to be generated, and which generates a base that is cyclized within the molecule, thereby forming a tertiary amine; a cured product which is obtained by curing the resin composition; a multilayer body which comprises the cured product; a method for producing the cured product; a method for producing the multilayer body; a method for producing a semiconductor device, the method comprising the method for producing the multilayer body; and a semiconductor device which comprises the cured product or the multilayer body.
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