Probe module for ultrasound equipment

Abstract

The present invention relates to a probe module for an ultrasonic inspection device, and includes a lower probe module disposed under a target object, the lower probe module including: a lower housing; a lower transducer disposed in the lower housing and capable of generating or receiving ultrasonic waves from a lower portion of the target object toward the target object; a lower water jacket having an internal space into which one side of the lower transducer can be inserted and in which the internal space is filled with liquid; and a lower liquid injector configured to inject liquid into the internal space of the lower water jacket.

Description

Technical Field

[0001] The present invention relates to a probe module of an ultrasonic inspection device. More specifically, the present invention relates to a probe module of an ultrasonic inspection device provided with a lower probe module that is arranged below an object and generates ultrasonic waves from the lower part of the object toward the object to inspect the object.

Background Art

[0002] An ultrasonic inspection device is a device that irradiates an object with ultrasonic waves through a probe module, receives the ultrasonic waves that are reflected or transmitted by the probe module, and forms an image. Minute defects can be detected through the ultrasonic inspection device, and thus a high resolution is required for the ultrasonic inspection device.

[0003] An ultrasonic inspection method using an ultrasonic inspection device requires a transmission medium for transmitting ultrasonic waves. In order to prevent attenuation of ultrasonic waves, a liquid is used as the ultrasonic transmission medium, and water is generally used as the liquid.

[0004] In a conventional ultrasonic inspection method, a water tank is filled with water, a product is placed in the filled water, and then the probe module is positioned above the object. The inspection of the object can proceed in a state where a certain part of the object is immersed in the filled water.

[0005] However, a conventional ultrasonic inspection device provided with a probe module above an object has the following problems. In a conventional ultrasonic inspection device, a probe module that receives a signal reflected by irradiating ultrasonic waves is arranged only in one direction, such as above the object.

[0006] In a conventional ultrasonic inspection device, since the probe module is arranged above the object, the inspection proceeds above the object. However, if the inspection is only carried out above the object that requires inspection of both the upper and lower parts, there is a problem that after scanning the upper part of the object, the lower part of the object must be scanned through inversion and movement of the object.

[0007] If the inspection is carried out using an ultrasonic inspection device equipped with a probe module only on the upper part of the object, there is a problem that the process time will be increased due to the inversion and movement of the object. In addition, when the object is inverted and moved after scanning the upper part of the object to align it, positional alignment tolerances occur, making it impossible to synchronize the signal processing data between the scanned upper and lower parts of the object.

[0008] Furthermore, if air bubbles are mixed into the water, which is the ultrasonic transmission medium of an ultrasound device, the bubbles can cause attenuation of the ultrasound waves. However, conventional ultrasound devices have the problem that they are not equipped with a separate device to remove air bubbles from the water supplied as the transmission medium. [Overview of the Initiative] [Problems that the invention aims to solve]

[0009] The present invention aims to solve the above-mentioned problems, and more specifically, provides a probe module for an ultrasound inspection device that includes a lower probe module positioned below the object and generating ultrasound waves from below the object toward the object to inspect the object. [Means for solving the problem]

[0010] The probe module of the ultrasonic inspection apparatus of the present invention, which solves the above-mentioned problems, is a probe module of an ultrasonic inspection apparatus that inspects an object via ultrasound, and includes a lower probe module disposed at the bottom of the object, wherein the lower probe module includes a lower housing; a lower transducer provided in the lower housing that can generate or receive ultrasound from the bottom of the object toward the object; a lower water jacket having an internal space into which one side of the lower transducer can be inserted and the internal space is filled with liquid; and a lower liquid injection section for injecting liquid into the internal space of the lower water jacket.

[0011] The lower liquid injection section of the probe module of the ultrasonic inspection apparatus of the present invention, which solves the above-mentioned problems, may include a lower nozzle through which liquid moves, which is in communication with the internal space of the lower water jacket, and a lower bubble discharge hole in communication with the lower nozzle.

[0012] To solve the above-mentioned problems, the lower bubble discharge hole of the probe module of the ultrasonic inspection apparatus of the present invention may include a first bubble discharge hole that communicates with the lower nozzle and extends to the upper part of the lower nozzle, and a second bubble discharge hole that communicates with the first bubble discharge hole and extends while forming a horizontal or downward inclination at one end of the first bubble discharge hole.

[0013] To solve the above-mentioned problems, the lower nozzle of the probe module of the ultrasonic inspection apparatus of the present invention is equipped with a lower mesh filter.

[0014] The lower nozzle of the probe module of the ultrasonic inspection apparatus of the present invention, which solves the above-mentioned problems, may include a lower micro-nozzle section equipped with a plurality of micro-pipes.

[0015] To solve the above-mentioned problems, the probe module of the ultrasonic inspection apparatus of the present invention may be provided with a lower buffer space having the same diameter as or larger than the diameter of the lower micro-nozzle portion between the point where the lower nozzle and the internal space of the lower water jacket are in communication and the lower micro-nozzle portion.

[0016] The probe module of the ultrasonic inspection apparatus of the present invention, which solves the above-mentioned problems, further includes a liquid supply unit connected to the lower liquid injection unit, the liquid supply unit including a liquid storage tank having a space inside which liquid can be stored, a liquid injection unit for injecting liquid into the liquid storage tank, a liquid discharge unit for discharging liquid from the liquid storage tank, and a bubble discharge hole extending to the outside from the top of the liquid storage tank, the liquid discharge unit may be equipped with a micro-nozzle unit having a plurality of micro-pipes.

[0017] The probe module of the ultrasonic inspection apparatus of the present invention for solving the above-mentioned problems further includes an upper probe module positioned on the upper part of an object, the upper probe module may include an upper housing; an upper transducer provided in the upper housing that can generate or receive ultrasonic waves from the upper part of the object toward the object; an upper water jacket having an internal space into which one side of the upper transducer can be inserted, and the internal space being filled with liquid; and an upper liquid injection section for injecting liquid into the internal space of the upper water jacket.

[0018] To solve the above-mentioned problems, the upper liquid injection section of the probe module of the ultrasonic inspection apparatus of the present invention is in communication with the internal space of the upper water jacket and includes an upper nozzle through which the liquid moves, and the upper water jacket may include an upper bubble discharge hole extending upward from the internal space of the upper water jacket.

[0019] The upper liquid injection section of the probe module of the ultrasonic inspection apparatus of the present invention, which solves the above-mentioned problems, may include an upper nozzle through which liquid moves, which is in communication with the internal space of the upper water jacket, and an upper bubble discharge hole which is in communication with the upper nozzle.

[0020] To solve the above-mentioned problems, the upper nozzle of the probe module of the ultrasonic inspection apparatus of the present invention may be equipped with a mesh filter.

[0021] The upper nozzle of the probe module of the ultrasonic inspection apparatus of the present invention, which solves the above-mentioned problems, may include an upper micro-nozzle section equipped with a plurality of micro-pipes.

[0022] To solve the above-mentioned problems, the probe module of the ultrasonic inspection apparatus of the present invention may be provided with an upper buffer space having the same diameter as or larger than the diameter of the upper fine nozzle portion between the point where the upper nozzle and the internal space of the upper water jacket are in communication and the upper fine nozzle portion.

[0023] The probe module of the ultrasonic inspection apparatus of the present invention for solving the above problems further includes a liquid supply unit connected to the upper liquid injection unit. The liquid supply unit includes a liquid storage tank having a space where liquid can be stored, a liquid injection unit for injecting liquid into the liquid storage tank, a liquid discharge unit from which liquid is discharged from the liquid storage tank, and a bubble discharge hole extending outward from the upper part of the liquid storage tank. The liquid discharge unit may be provided with a fine nozzle unit provided with a plurality of fine pipes.

Effect of the Invention

[0024] The present invention relates to a probe module of an ultrasonic inspection apparatus, and has an advantage that the lower part of an object can be inspected without inverting and moving the object through a lower probe module that is arranged below the object and generates ultrasonic waves from the lower part of the object toward the object to inspect the object.

[0025] Further, the present invention has an advantage that the lower and upper parts of the object can be inspected without inverting and moving the object by proceeding with inspections on the lower and upper parts of the object through the lower probe module and the upper probe module, and through this, the process time can be shortened.

[0026] Further, the present invention has an advantage that the lower and upper parts of the object can be inspected without inverting and moving the object by proceeding with inspections on the lower and upper parts of the object through the lower probe module and the upper probe module, and through this, the signal processing data obtained by scanning the upper and lower parts of the object without position alignment tolerance can be linked.

[0027] At the same time, the present invention has an advantage that it is possible to prevent ultrasonic attenuation caused by bubbles by forming a bubble discharge hole capable of removing water bubbles in the lower probe module and the upper probe module.

Brief Description of the Drawings

[0028] [Figure 1] This is a drawing showing the lower probe module and the upper probe module in a measurement state according to an embodiment of the present invention. [Figure 2] This is a diagram showing the lower probe module and upper probe module in a measurement standby state according to an embodiment of the present invention. [Figure 3] This diagram shows the water movement path in the lower probe module and the upper probe module according to an embodiment of the present invention. [Figure 4] This is a drawing showing a lower probe module according to an embodiment of the present invention. [Figure 5] This is a drawing showing the lower liquid injection section according to an embodiment of the present invention. [Figure 6] This is a drawing showing an upper probe module according to an embodiment of the present invention. [Figure 7] This is a drawing showing the upper liquid injection section according to an embodiment of the present invention. [Figure 8] This is a diagram showing a liquid supply unit connected to an upper water jacket and a lower water jacket according to an embodiment of the present invention. [Modes for carrying out the invention]

[0029] Various embodiments of the present invention are described below in relation to the accompanying drawings. While various modifications are possible and various embodiments of the present invention can exist, specific embodiments are illustrated in the drawings and described in detail. However, this should be understood not as an attempt to limit the diverse embodiments of the present invention to specific embodiments, but rather as including all modifications and / or equivalents or substitutes that fall within the spirit and technical scope of the diverse embodiments of the present invention. In relation to the description of the drawings, similar reference numerals are used for similar components.

[0030] Expressions such as “includes” or “may include,” which may be used in various embodiments of the present invention, indicate the existence of the disclosed function, operation, or component, but do not limit one or more additional functions, operations, or components. Furthermore, it should be understood that in various embodiments of the present invention, terms such as “includes” or “has” are intended to specify the existence of features, numbers, stages, operations, components, parts, or combinations thereof described in the specification, but do not preemptively exclude the existence or possibility of adding one or more other features, numbers, stages, operations, components, parts, or combinations thereof.

[0031] When it is mentioned that one component is "connected" to another component, it should be understood that the first component is directly connected to the other component, but that there may be other components between the first component and the other component. On the other hand, when it is mentioned that one component is "directly connected" to another component, it should be understood that there are no other components between the first component and the other component.

[0032] The terms used in the various embodiments of the present invention are used solely to describe specific embodiments and are not intended to limit the various embodiments of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise.

[0033] Unless otherwise specifically defined, all terms used herein, including technical or scientific terms, have the same meaning as those generally understood by those skilled in the art to which the various embodiments of this invention belong.

[0034] Terms as defined in commonly used dictionaries must be interpreted to have meanings consistent with their meanings in the context of the relevant technology, and not to be interpreted as ideal or overly formal unless explicitly defined in the various embodiments of the present invention.

[0035] The present invention relates to a probe module for an ultrasound inspection apparatus, and more particularly to a probe module for an ultrasound inspection apparatus that includes a lower probe module positioned below an object and generating ultrasound waves from below the object toward the object to inspect the object. Preferred embodiments of the present invention will be described in detail below with reference to the attached drawings.

[0036] The probe module of the ultrasound inspection apparatus according to an embodiment of the present invention is for inspecting an object 10, and can inspect the object 10 by irradiating it with ultrasound and receiving the reflected or transmitted ultrasound in the probe module. The object 10 can be a variety of products as long as it can be subjected to ultrasound inspection.

[0037] The probe module of the ultrasonic inspection apparatus according to an embodiment of the present invention includes a lower probe module 100 positioned below the object 10. Referring to Figures 1 and 2, the lower probe module 100 includes a lower housing 110, a lower transducer 120, a lower water jacket 130, and a lower liquid injection section 140.

[0038] The lower housing 110 is also the housing for the lower probe module 100. The lower housing 110 is located on the upper part of the object 10, and the lower transducer 120 is provided in the lower housing 110. The lower housing 110 is connected to a moving device and is movable in the x, y, and z directions.

[0039] As shown in Figure 1, when the device is in a measurement state for inspecting the object 10, the lower housing 110 can move in a direction toward the object 10. Also, as shown in Figure 2, when the device is in a measurement standby state, the lower housing 110 can move in a direction toward the object 10.

[0040] According to an embodiment of the present invention, the lower housing 110 can be moved, and the position of the lower transducer 120 provided in the lower housing 110 can be moved.

[0041] The lower transducer 120 is provided in the lower housing 110 and is capable of generating or receiving ultrasonic waves from the lower part of the object 10 toward the object 10. The lower transducer 120 is a device capable of generating ultrasonic waves, and ultrasonic waves can be irradiated from the lower part of the object 10 via the lower transducer 120.

[0042] Furthermore, ultrasonic waves can be received via the lower transducer 120. Specifically, the lower transducer 120 acts as a receiving unit and can receive ultrasonic waves flowing into the lower transducer 120.

[0043] The lower water jacket 130 is provided with an internal space into which one side of the lower transducer 120 can be inserted, and the internal space of the lower water jacket 130 can be filled with liquid.

[0044] A transmission medium is necessary to transmit the ultrasonic waves generated by the lower transducer 120 to the target object 10, and this transmission medium may be a liquid. The internal space of the lower water jacket 130 is filled with this transmission medium, which is also water. The following explanation will focus on the fact that the transmission medium is water.

[0045] One side of the lower transducer 120 may be positioned in the internal space of the lower water jacket 130. The lower water jacket 130 is provided with a lower discharge section 131, which is also a through-hole formed inside the lower water jacket 130 in the direction toward the target object 10.

[0046] According to an embodiment of the present invention, the inspection can be carried out without immersing the object in the liquid that serves as the transmission medium for ultrasonic wave transmission, while spraying the liquid onto the object via the lower water jacket 130. Specifically, the liquid is sprayed through the lower discharge section 131 of the lower water jacket 130, and the sprayed liquid acts as the transmission medium, allowing ultrasonic waves to be transmitted to the object 10.

[0047] The ultrasonic waves generated by the lower transducer 120 can pass through the lower discharge section 131 and be irradiated onto the target object 10. Referring to Figure 3, the water filling the internal space of the lower water jacket 130 is also discharged through the lower discharge section 131 of the lower water jacket 130.

[0048] The water also serves as a transmission medium for transmitting ultrasonic waves, and the water is discharged through the lower discharge section 131. The ultrasonic waves generated by the lower transducer 120 can be irradiated onto the target object 10 via the water discharged through the lower discharge section 131.

[0049] The water discharged through the lower discharge section 131 is moved to a water tank 160 provided outside the lower housing 110, and the water moved to the water tank 160 may be moved to the lower liquid injection section 140, which will be described later, via a pump or the like.

[0050] Referring to Figure 4, the lower liquid injection section 140 is capable of injecting liquid into the internal space of the lower water jacket 130. The lower liquid injection section 140 is connected to a hose or the like that extends to the outside, and liquid can be moved to the lower liquid injection section 140 via the hose.

[0051] The liquid that has moved to the lower liquid injection section 140 passes through the lower liquid injection section 140 and moves into the internal space of the lower water jacket 130. Here, the liquid that passes through the lower liquid injection section 140 and is injected into the internal space of the lower water jacket 130 is also water.

[0052] Referring to Figure 5, the lower liquid injection section 140 according to the embodiment of the present invention includes a lower nozzle 141 and a lower bubble discharge hole 150.

[0053] The lower nozzle 141 is in communication with the internal space of the lower water jacket 130 and is also a nozzle through which liquid moves. The lower nozzle 141 is a nozzle provided inside the lower liquid injection section 140, and water can be injected into the lower water jacket 130 via the lower nozzle 141.

[0054] The lower bubble discharge hole 150 is in communication with the lower nozzle 141. Specifically, the lower bubble discharge hole 150 is located above the lower nozzle 141 and is also a hollow tube, with one end of the lower bubble discharge hole 150 being in communication with the lower nozzle 141.

[0055] The lower bubble discharge hole 150 is for removing bubbles from the water moving through the lower nozzle 141. The water moving through the lower nozzle 141 is a transmission medium for transmitting ultrasonic waves generated in the lower transducer 120, and if bubbles are formed in the water stored in the lower nozzle 141, the bubbles can cause attenuation of the ultrasonic waves.

[0056] The lower bubble discharge hole 150 is for preventing this and is provided on the upper part of the lower nozzle 141, and can remove bubbles from the water moving through the lower nozzle 141 via the lower bubble discharge hole 150.

[0057] Specifically, when bubbles form in the water, the bubbles move to the top of the water. The water in which the bubbles are formed is discharged through the lower gas discharge hole 150 provided at the top of the lower nozzle 141, thereby removing the bubbles from the water passing through the lower nozzle 141.

[0058] Referring to Figures 4 and 5, the lower bubble discharge hole 150 includes a first bubble discharge hole 151 and a second bubble discharge hole 152. The first bubble discharge hole 151 communicates with the lower nozzle 141 and extends to the upper part of the lower nozzle 141, so that the first bubble discharge hole 151 can extend vertically from the upper part of the lower nozzle 141.

[0059] The second bubble discharge hole 152 is in communication with the first bubble discharge hole 151 and extends from one end of the first bubble discharge hole 151, forming a horizontal or downward inclination. Referring to Figures 3 and 4, water can be discharged from the lower discharge section 131 of the lower water jacket 130.

[0060] In this case, if the lower bubble discharge hole 150 includes only the vertically extending first bubble discharge hole 151, there is a risk that water discharged from the lower discharge section 131 will flow into the lower bubble discharge hole 150. If water flows into the lower bubble discharge hole 150, it will become difficult to remove bubbles from the water moving through the lower liquid injection section 140 via the lower bubble discharge hole 150.

[0061] To prevent this, the second bubble discharge hole 152 extends from one end of the first bubble discharge hole 151 while forming a horizontal or downward inclination. By the second bubble discharge hole 152 extending from one end of the first bubble discharge hole 151 while forming a horizontal or downward inclination, it is possible to prevent water discharged from the lower discharge section 131 from flowing into the lower bubble discharge hole 150.

[0062] Referring to Figure 5, the lower nozzle 141 may be equipped with a lower mesh filter 142. The lower mesh filter 142 can filter out foreign matter present in the water moving through the lower nozzle 141.

[0063] Referring to Figure 5, the lower nozzle 141 includes a lower micro-nozzle section 143 equipped with a plurality of micro-pipes. The lower micro-nozzle section 143 is equipped with a plurality of micro-pipes, and the water moving through the lower nozzle 141 passes through the lower micro-nozzle section 143.

[0064] Here, the multiple micropipes provided in the lower micronozzle section 143 extend in the same direction and may extend in a direction parallel to the direction in which the lower nozzle 141 extends.

[0065] The lower micro-nozzle section 143 is for forming laminar flow. When water moving through the lower nozzle 141 passes through the lower micro-nozzle section 143, it moves while forming laminar flow through the lower micro-nozzle section 143.

[0066] The water that passes through the lower nozzle 141 and flows into the internal space of the lower water jacket 130 also serves as a transmission medium for transmitting ultrasonic waves generated in the lower transducer 120.

[0067] If turbulent flow occurs in the water that passes through the lower nozzle 141 and flows into the internal space of the lower water jacket 130, it becomes difficult for the lower transducer 120 to accurately irradiate the ultrasonic waves to the designated position on the target object 10.

[0068] The lower fine nozzle section 143 is intended to prevent this. Water moving through the lower nozzle 141 via the lower fine nozzle section 143 moves in a laminar flow, which allows the ultrasonic waves generated by the lower transducer 120 to be accurately irradiated to a designated position on the target object 10.

[0069] Referring to Figure 5, a lower buffer space 144 having the same diameter as or larger than the diameter of the lower fine nozzle portion 143 may be provided between the point where the lower nozzle 141 and the internal space of the lower water jacket 130 are in communication and the lower fine nozzle portion 143.

[0070] Specifically, the water flowing into the lower nozzle 141 passes through the lower micro-nozzle section 143, which is equipped with multiple micro-pipes, and then passes through the lower buffer space 144, which is not equipped with multiple micro-pipes, before flowing into the lower water jacket 130.

[0071] The lower buffer space 144 is a space designed to prevent the water forming laminar flow from mixing with each other. If the water that has passed through the lower fine nozzle section 143 flows immediately into the lower water jacket 130, the water movement space expands, and the water forming laminar flow may mix with each other.

[0072] Furthermore, if the diameter of the point where the lower nozzle 141 and the internal space of the lower water jacket 130 are connected is smaller than the diameter of the lower fine nozzle section 143, there is a risk that some of the water forming the laminar flow may hit the wall.

[0073] The lower buffer space 144 is intended to prevent this. Water that has passed through the lower micro-nozzle section 143, which is equipped with multiple micro-pipes, passes through the lower buffer space 144, which is not equipped with multiple micro-pipes, and flows into the lower water jacket 130, thereby preventing the water that forms laminar flow from mixing with each other.

[0074] In the above description, it is stated that the lower water jacket 130 is provided with the lower bubble discharge hole 150 and the lower liquid injection section 140, the lower mesh filter 142, the lower fine nozzle section 143, and the lower buffer space 144. However, depending on the circumstances, the lower bubble discharge hole 150, the lower mesh filter 142, the lower fine nozzle section 143, and the lower buffer space 144 may not be provided.

[0075] The probe module of the ultrasound inspection apparatus according to an embodiment of the present invention may further include an upper probe module 200 positioned on the upper part of the object 10. That is, the probe module of the ultrasound inspection apparatus according to an embodiment of the present invention can perform simultaneous inspections on the upper and lower parts of the object 10 via the lower probe module 100 provided on the lower part of the object 10 and the upper probe module 200 provided on the upper part of the object 10.

[0076] Referring to Figures 1 and 2, the upper probe module 200 includes an upper housing 210, an upper transducer 220, an upper water jacket 230, and an upper liquid injection section 240.

[0077] The upper housing 210 is also the housing for the upper probe module 200. The upper housing 210 is mounted on the upper part of the object 10, and the upper transducer 220 is provided in the upper housing 210, and the upper housing 210 is movable in the x, y, and z directions while being connected to a moving device.

[0078] As shown in Figure 1, when the device is in a measurement state for inspecting the object 10, the upper housing 210 can move in a direction toward the object 10. Also, as shown in Figure 2, when the device is in a measurement standby state, the upper housing 210 can move away from the object 10.

[0079] According to an embodiment of the present invention, the upper housing 210 can be moved, and the position of the upper transducer 220 provided in the upper housing 210 can be moved.

[0080] The upper transducer 220 is provided in the upper housing 210 and can generate ultrasonic waves from the top of the object 10 toward the object 10. The upper transducer 220 can generate ultrasonic waves or receive ultrasonic waves. The upper transducer 220 is a device that can generate ultrasonic waves and can irradiate ultrasonic waves from the top of the object 10 via the upper transducer 220.

[0081] Furthermore, ultrasonic waves can be received via the upper transducer 220. Specifically, the upper transducer 220 acts as a receiving unit and can receive ultrasonic waves flowing into the upper transducer 220.

[0082] The upper water jacket 230 is provided with an internal space into which one side of the upper transducer 220 can be inserted, and the internal space of the upper water jacket 230 can be filled with liquid.

[0083] A transmission medium is necessary to transmit the ultrasonic waves generated by the upper transducer 220 to the target object 10, and this transmission medium may be a liquid. The internal space of the upper water jacket 230 is filled with this transmission medium, which is also water. The following explanation will focus on the fact that the transmission medium is water.

[0084] One side of the upper transducer 220 may be positioned in the internal space of the upper water jacket 230. The upper water jacket 230 is provided with an upper discharge section 231, which is also a through-hole formed inside the upper water jacket 230 in a direction toward the target object 10.

[0085] According to an embodiment of the present invention, the inspection can be carried out without immersing the object in the liquid that serves as the transmission medium for ultrasonic wave transmission, by spraying the liquid onto the object via the upper water jacket 230. Specifically, the liquid is sprayed through the upper discharge section 231 of the upper water jacket 230, and the sprayed liquid acts as the transmission medium, allowing ultrasonic waves to be transmitted to the object 10.

[0086] The ultrasonic waves generated by the upper transducer 220 can pass through the upper discharge section 231 and be irradiated onto the target object 10. Referring to Figure 3, the water filling the internal space of the upper water jacket 230 is also discharged through the upper discharge section 231 of the upper water jacket 230.

[0087] The water also serves as a transmission medium for transmitting ultrasonic waves, and the water is discharged through the upper discharge section 231. The ultrasonic waves generated by the upper transducer 220 can be irradiated onto the target object 10 via the water discharged through the upper discharge section 231.

[0088] The water discharged through the upper discharge section 231 is moved to a water tank 160 provided outside the upper housing 210, and the water moved to the water tank 160 may be moved to the upper liquid injection section 240, which will be described later, via a pump or the like.

[0089] Referring to Figure 6, the upper liquid injection section 240 can inject liquid into the internal space of the upper water jacket 230. The upper liquid injection section 240 is connected to a hose or the like that extends to the outside, and liquid can be moved to the upper liquid injection section 240 via the hose.

[0090] The liquid that has moved to the upper liquid injection section 240 passes through the upper liquid injection section 240 and moves into the internal space of the upper water jacket 230. Here, the liquid that passes through the upper liquid injection section 240 and is injected into the internal space of the upper water jacket 230 is water.

[0091] Referring to Figure 7, the upper liquid injection section 240 according to the embodiment of the present invention includes an upper nozzle 241 and an upper bubble discharge hole 250.

[0092] The upper nozzle 241 is in communication with the internal space of the upper water jacket 230 and is also a nozzle through which liquid moves. The upper nozzle 241 is a nozzle provided inside the upper liquid injection section 240, and water can be injected into the upper water jacket 230 via the upper nozzle 241.

[0093] The upper bubble discharge hole 250 is provided in the upper water jacket 230, and extends from the internal space of the upper water jacket 230.

[0094] Specifically, the upper bubble discharge hole 250 is located on the upper part of the upper water jacket 230 and is also a hollow tube, with one end of the upper bubble discharge hole 250 being in communication with the upper water jacket 230.

[0095] The upper bubble discharge hole 250 is for removing bubbles from the water stored in the internal space of the upper water jacket 230. The water stored in the upper water jacket 230 is a transmission medium for transmitting ultrasonic waves generated by the upper transducer 220, and if bubbles are formed in the water stored in the upper water jacket 230, the bubbles may cause attenuation of the ultrasonic waves.

[0096] The upper bubble discharge hole 250 is for preventing this and can remove water bubbles that accumulate in the upper water jacket 230 through the upper bubble discharge hole 250.

[0097] Specifically, when bubbles form in the water, the bubbles are moved to the top of the water. The water in which the bubbles are formed is discharged through the upper gas discharge hole 250 provided at the top of the upper nozzle 241, thereby removing the bubbles from the water passing through the upper nozzle 241.

[0098] The upper bubble discharge hole 250 is provided at the top of the upper water jacket 230 and can remove water in which bubbles have formed from the water stored in the internal space of the upper water jacket 230 via the upper bubble discharge hole 250. The upper bubble discharge hole 250 may extend vertically from the top of the upper water jacket 230.

[0099] Furthermore, the upper bubble discharge hole 250 may be connected to the upper nozzle 241. Specifically, the upper bubble discharge hole 250 is a hollow tube located above the upper nozzle 241, and one end of the upper bubble discharge hole 250 may be connected to the upper nozzle 241.

[0100] The upper bubble discharge hole 250 is for removing bubbles from the water moving through the upper nozzle 241. The upper bubble discharge hole 250 is located above the upper nozzle 241 and can remove water in which bubbles have formed from the water moving through the upper nozzle 241 via the upper bubble discharge hole 250. The upper bubble discharge hole 250 may extend vertically from the upper nozzle 241 and communicate with the outside.

[0101] Referring to Figure 7, the upper nozzle 241 may be equipped with an upper mesh filter 242. The upper mesh filter 242 can filter out foreign matter present in the water moving through the upper nozzle 241.

[0102] Referring to Figure 7, the upper nozzle 241 includes an upper micro-nozzle section 243 equipped with a plurality of micro-pipes. The upper micro-nozzle section 243 is equipped with a plurality of micro-pipes, and the water moving through the upper nozzle 241 passes through the upper micro-nozzle section 243.

[0103] Here, the multiple micropipes provided in the upper micronozzle section 243 extend in the same direction and may extend in a direction parallel to the direction in which the upper nozzle 241 extends.

[0104] The upper fine nozzle section 243 is for forming laminar flow. When water moving through the upper nozzle 241 passes through the upper fine nozzle section 243, it moves while forming laminar flow through the upper fine nozzle section 243.

[0105] The water that passes through the upper nozzle 241 and flows into the internal space of the upper water jacket 230 also serves as a transmission medium for transmitting ultrasonic waves generated by the upper transducer 220.

[0106] If turbulent flow occurs in the water that passes through the upper nozzle 241 and flows into the internal space of the upper water jacket 230, it becomes difficult for the upper transducer 220 to accurately irradiate the ultrasonic waves to the designated position on the target object 10.

[0107] The upper fine nozzle section 243 is intended to prevent this. Water moving through the upper nozzle 241 via the upper fine nozzle section 243 moves in a laminar flow, and through this, ultrasonic waves generated by the upper transducer 220 can be accurately irradiated to a designated position on the target object 10.

[0108] Referring to Figure 7, an upper buffer space 244 having the same diameter as or larger than the diameter of the upper fine nozzle portion 243 may be provided between the point where the upper nozzle 241 and the internal space of the upper water jacket 230 are in communication and the upper fine nozzle portion 243.

[0109] Specifically, the water flowing into the upper nozzle 241 passes through the upper micro-nozzle section 243, which is equipped with multiple micro-pipes, and then passes through the upper buffer space 244, which is not equipped with multiple micro-pipes, before flowing into the upper water jacket 230.

[0110] The upper buffer space 244 also serves as a space to prevent the water forming laminar flow from mixing with each other. If the water that has passed through the upper fine nozzle section 243 immediately flows into the upper water jacket 230, the water movement space is expanded, and the water forming laminar flow may mix with each other.

[0111] Furthermore, if the diameter of the point where the upper nozzle 241 and the internal space of the upper water jacket 230 are connected is smaller than the diameter of the upper fine nozzle section 243, there is a risk that some of the water forming the laminar flow will hit the wall.

[0112] The upper buffer space 244 is intended to prevent this. Water that has passed through the upper micro-nozzle section 243, which is equipped with multiple micro-pipes, passes through the upper buffer space 244, which is not equipped with multiple micro-pipes, and flows into the upper water jacket 230, thereby preventing the water that forms laminar flow from mixing with each other.

[0113] In the above description, it was explained that the upper water jacket 230 is provided with an upper bubble discharge hole 250 and the upper liquid injection section 240 is provided with an upper mesh filter 242, an upper fine nozzle section 243, and an upper buffer space 244. However, depending on the circumstances, the upper bubble discharge hole 250, the upper mesh filter 242, the upper fine nozzle section 243, and the upper buffer space 244 may not be provided.

[0114] Referring to Figure 8, the probe module of the ultrasonic inspection apparatus according to an embodiment of the present invention further includes a liquid supply unit 300.

[0115] The liquid supply unit 300 is connected to the lower liquid injection unit 140 or the upper liquid injection unit 240, and the liquid supply unit 300 is capable of supplying liquid to the lower liquid injection unit 140 or the upper liquid injection unit 240.

[0116] The liquid supply unit 300 is provided outside the lower housing 110 and the upper housing 210, and the liquid supply unit 300 may be connected to the lower liquid injection unit 140 or the upper liquid injection unit 240 via a hose or the like.

[0117] The liquid supply unit 300 according to an embodiment of the present invention includes a liquid storage tank 310, a liquid injection unit 320, a liquid discharge unit 330, and a bubble discharge hole 340.

[0118] Referring to Figure 8, the liquid storage tank 310 is provided with a space inside in which liquid is stored. The liquid injection unit 320 can inject liquid into the liquid storage tank 310, thereby allowing liquid to be stored in the liquid storage tank 310 via the liquid injection unit 320.

[0119] The liquid discharge section 330 is used to discharge liquid from the liquid storage tank 310. The liquid stored in the liquid storage tank 310 is discharged through the liquid discharge section 330, and the liquid discharged through the liquid discharge section 330 can be supplied to the lower liquid injection section 140 or the upper liquid injection section 240.

[0120] The liquid discharge section 330 may be equipped with a micro-nozzle section 350 having a plurality of micro-pipes. Referring to Figure 8, the micro-nozzle section 350 is equipped with a plurality of micro-pipes, and the liquid moving through the liquid discharge section 330 passes through the micro-nozzle section 350.

[0121] Here, the multiple micro-pipes provided in the micro-nozzle section 350 may extend in the same direction and in a direction parallel to the direction in which the liquid discharge section 330 extends.

[0122] The fine nozzle section 350 is for forming laminar flow. When water passes through the fine nozzle section 350 in the liquid discharge section 330, it moves while forming laminar flow through the fine nozzle section 350.

[0123] However, if necessary, the mesh filter 360 may not be provided in the liquid storage tank 310 and the liquid discharge section 330, or the mesh filter 360 may be provided in the liquid injection section 320.

[0124] According to embodiments of the present invention, the liquid stored in the liquid storage tank 310 is also water. The bubble discharge hole 340 extends to the upper part of the liquid storage tank 310. Specifically, the bubble discharge hole 340 is a hollow tube provided at the upper part of the liquid storage tank 310, and one end of the bubble discharge hole 340 can communicate with the liquid storage tank 310.

[0125] The bubble discharge hole 340 is for removing bubbles from the water stored in the internal space of the liquid storage tank 310. The water stored in the liquid storage tank 310 is a transmission medium for transmitting ultrasonic waves generated by the lower transducer 120 or the upper transducer 220, and if bubbles are formed in the water stored in the liquid storage tank 310, the bubbles may cause attenuation of the ultrasonic waves.

[0126] The bubble discharge hole 340 is for preventing this and can remove bubbles before supplying water to the lower liquid injection section 140 or the upper liquid injection section 240 through the bubble discharge hole 340.

[0127] Specifically, when bubbles form in the water, the bubbles are moved to the top of the water. The water in which bubbles are formed is discharged through the bubble discharge hole 340 provided at the top of the liquid storage tank 310, and the bubbles can be removed before the water is supplied to the lower liquid injection section 140 or the upper liquid injection section 240 through this hole.

[0128] The bubble discharge hole 340 is provided at the top of the liquid storage tank 310 and can remove bubbles from the water stored in the internal space of the liquid storage tank 310 through the bubble discharge hole 340. The bubble discharge hole 340 may extend vertically from the top of the liquid storage tank 310.

[0129] Referring to Figure 8, the liquid storage tank 310 and the liquid discharge section 330 may be equipped with a mesh filter 360. The mesh filter 360 can filter out foreign matter present in the water stored in the liquid storage tank 310 and the water moving through the liquid discharge section 330.

[0130] The probe module of the ultrasound inspection apparatus according to the above-described embodiment of the present invention has the following effects.

[0131] The probe module of the ultrasonic inspection apparatus according to an embodiment of the present invention has the advantage of being positioned below the object and being able to inspect the lower part of the object without inverting or moving the object, via a lower probe module that generates ultrasound from below the object toward the object to inspect the object.

[0132] Furthermore, the probe module of the ultrasonic inspection apparatus according to the embodiment of the present invention has the advantage of being able to inspect the lower and upper parts of the object without inverting or moving the object, by performing inspection on the lower and upper parts of the object via the lower probe module and the upper probe module, thereby shortening the process time.

[0133] Furthermore, the probe module of the ultrasonic inspection apparatus according to the embodiment of the present invention has the advantage of being able to inspect the lower and upper parts of an object without inverting or moving the object, by performing inspection on the lower and upper parts of the object via the lower probe module and the upper probe module, and thereby linking the signal processing data scanned from the upper and lower parts of the object without positional alignment tolerance.

[0134] In addition, the probe module of the ultrasonic inspection apparatus according to the embodiment of the present invention has the advantage of preventing ultrasonic attenuation caused by bubbles by forming bubble discharge holes in the lower probe module and the upper probe module that can remove water bubbles.

[0135] Although the present invention has been described in detail above based on preferred embodiments, the present invention is not limited to the above embodiments, and various modifications can be provided within the scope of the present invention. Therefore, the true scope of technical protection of the present invention must be determined by the technical idea of ​​the claims.

Claims

1. In a probe module of an ultrasound inspection device that inspects an object via ultrasound, A lower probe module positioned at the bottom of the target object, An upper probe module positioned on top of the target object, Includes, The lower probe module is Lower housing and A lower transducer provided in the lower housing is capable of generating or receiving ultrasonic waves from the lower part of the object toward the object, A lower water jacket is provided with an internal space into which one side of the lower transducer can be inserted, and the internal space is filled with liquid. A lower liquid injection section for injecting liquid into the internal space of the lower water jacket, Includes, The aforementioned lower liquid injection section is A lower nozzle, which communicates with the internal space of the lower water jacket and through which the liquid moves, A lower bubble discharge hole that communicates with the lower nozzle, Includes, The lower bubble discharge hole is A first bubble discharge hole is connected to the lower nozzle and extends to the upper part of the lower nozzle, A second bubble discharge hole is connected to the first bubble discharge hole and extends while forming a horizontal or downward inclination at one end of the first bubble discharge hole, Includes, The aforementioned lower nozzle is The lower micro-nozzle section is equipped with multiple micro-pipes. Includes, The upper probe module is The upper housing and An upper transducer provided in the upper housing, which is capable of generating or receiving ultrasonic waves from the top of the object toward the object, An upper water jacket is provided with an internal space into which one side of the upper transducer can be inserted, and the internal space is filled with liquid. An upper liquid injection section for injecting liquid into the internal space of the upper water jacket, including, A probe module for an ultrasound examination device characterized by the following features.

2. The lower nozzle is equipped with a lower mesh filter. A probe module for an ultrasound inspection apparatus as described in claim 1.

3. Between the point where the lower nozzle and the internal space of the lower water jacket are in communication and the lower fine nozzle section, A lower buffer space is provided, having a diameter equal to or larger than the diameter of the lower fine nozzle section. A probe module for an ultrasound inspection apparatus as described in claim 1.

4. A liquid supply unit connected to the lower liquid injection unit, It further includes, The aforementioned liquid supply unit is A liquid storage tank equipped with a space inside in which liquid can be stored, A liquid injection unit for injecting liquid into the liquid storage tank, A liquid discharge section from which liquid is discharged from the liquid storage tank, A bubble discharge hole extending from the top of the liquid storage tank to the outside, Includes, The liquid discharge section is equipped with a fine nozzle section having multiple fine pipes. A probe module for an ultrasound inspection apparatus as described in claim 1.

5. The aforementioned upper liquid injection section is The upper nozzle, which is in communication with the internal space of the upper water jacket and through which the liquid moves, Includes, The upper water jacket has an upper bubble discharge hole extending upward from the internal space of the upper water jacket. including, A probe module for an ultrasound inspection apparatus as described in claim 1.

6. The aforementioned upper liquid injection section is The upper nozzle, which communicates with the internal space of the upper water jacket and through which the liquid moves, An upper bubble discharge hole that communicates with the upper nozzle, including, A probe module for an ultrasound inspection apparatus as described in claim 1.

7. The upper nozzle is equipped with a mesh filter. The probe module for the ultrasound inspection apparatus according to feature 5.

8. The aforementioned upper nozzle is The upper micro-nozzle section is equipped with multiple micro-pipes. including, The probe module for the ultrasound inspection apparatus according to feature 5.

9. Between the point where the upper nozzle and the internal space of the upper water jacket are in communication and the upper fine nozzle section, An upper buffer space having a diameter equal to or larger than the diameter of the upper fine nozzle section is provided. The probe module for the ultrasound examination apparatus according to feature 8.

10. A liquid supply unit connected to the upper liquid injection unit, It further includes, The aforementioned liquid supply unit is A liquid storage tank equipped with a space inside in which liquid can be stored, A liquid injection unit for injecting liquid into the liquid storage tank, A liquid discharge section from which liquid is discharged from the liquid storage tank, A bubble discharge hole extending from the top of the liquid storage tank to the outside, Includes, The liquid discharge section is equipped with a fine nozzle section having multiple fine pipes. A probe module for an ultrasound inspection apparatus as described in claim 1.

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