resin composition

A resin composition with polyphenylene sulfide and specific solvents addresses the need for high refractive index, transparency, and chemical resistance, enabling effective microlens fabrication with suitable etching rates and EBR.

JP7868664B2Active Publication Date: 2026-06-02NISSAN CHEM CORP
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
NISSAN CHEM CORP
Filing Date
2023-01-10
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

Existing materials lack a high refractive index, transparency, long-term reliability, chemical resistance, and a suitable dry etching rate for microlens fabrication, while also being suitable for Edge Bead Removal (EBR) in wafer processing.

Method used

A resin composition containing polyphenylene sulfide with a phenolic hydroxyl group and specific organic solvents, along with optional polyfunctional epoxy compounds and surfactants, is developed to achieve the desired properties.

Benefits of technology

The resin composition enables EBR, forms a resin film with high refractive index and transparency, exhibits excellent long-term reliability and chemical resistance, and has an appropriate dry etching rate, making it suitable for microlens applications.

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Abstract

Provided is a resin composition from which a resin film that can undergo EBR, that has high refractive index, transparency, heat resistance, light resistance, moisture resistance, and chemical resistance, and that has a dry etching rate comparable to that of a resist can be formed. The resin composition contains (A) a polymer and (B) an organic solvent. The component (A) is a polymer including a structural unit represented by formula (1). The component (B) is an organic solvent that has a melting point of 15°C or lower and a boiling point of 85°C or higher. (In the formula, each R1 independently represents a hydroxy group, a methyl group, an ethyl group, a methoxy group, or an ethoxy group, a represents an integer of 0-3, and n represents an integer of 1-4. However, a and n satisfy 1≤a+n≤4.)
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