X-ray measuring device

Abstract

To suppress power consumption.SOLUTION: An X-ray measurement device, to / from which an X-ray shielding section for shielding an X-ray applied to an object to be measured can be attached / detached, includes: an X-ray irradiation section that irradiates the object to be measured with an X-ray when an instruction is received; an X-ray detection section that detects the X-ray diffracted by the object to be measured; a contact state detection section that detects a state of contact with the object to be measured or an installation surface of the object to be measured; and a control section that determines whether the contact state detection section detects the contact with the object to be measured or the installation surface when the X-ray irradiation section irradiates with the X-ray or when the instruction is given, and controls the X-ray irradiation section not to irradiate with the X-ray when determining the contact state detection section does not detect the contact with the object to be measured or the installation surface.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to an X-ray measuring device.

Background Art

[0002] Conventionally, an X-ray measuring device that measures the residual stress, half-value width, amount of retained austenite, etc. of a measurement object by using the diffraction phenomenon of X-rays has been known.

[0003] Regarding this, Patent Document 1 discloses an X-ray diffractometer including an X-ray irradiation device disposed so as to penetrate a two-dimensional X-ray detector, and a cylindrical shield member (X-ray shielding portion) disposed at the periphery of the two-dimensional X-ray detector and integrally fixing the two-dimensional X-ray detection device and the X-ray irradiation device.

Prior Art Documents

Non-Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the technique described in Patent Document 1, even when an instruction to irradiate X-rays is given in a state where the measurement object is not covered by the X-ray shielding portion, or when the X-ray shielding portion fails to cover the measurement object while X-rays are being irradiated, the X-rays continue to be irradiated. Therefore, when the X-ray irradiation device is made portable with respect to the technique described in Patent Document 1, even when the X-ray irradiation device, that is, the X-ray shielding member is separated from the measurement object, the X-rays continue to be irradiated, resulting in a problem of consuming a large amount of power.

[0006] The present invention has been made in view of such problems, and an object thereof is to provide an X-ray measuring device that suppresses power consumption.

Means for Solving the Problems

[0007] To solve the above problems, an X-ray measuring device according to a first aspect of the present invention includes an X-ray measuring device in which an X-ray shielding unit for shielding X-rays irradiated onto an object to be measured is detachable, and comprises: an X-ray irradiation unit that irradiates the object to be measured with X-rays when an instruction is received; an X-ray detection unit that detects X-rays diffracted from the object to be measured; a contact state detection unit that detects the contact state between the object to be measured or the mounting surface of the object to be measured; and a control unit that determines whether the contact state detection unit has detected contact with the object to be measured or the mounting surface when the X-ray irradiation unit is irradiating X-rays or when the instruction is given, and controls the X-ray irradiation unit so as not to irradiate X-rays if the determination is negative.

[0008] Furthermore, in the X-ray measuring apparatus according to the second aspect of the present invention, the contact state detection unit is positioned at the mounting location with the X-ray shielding unit.

[0009] Furthermore, in the X-ray measuring apparatus according to the third aspect of the present invention, the contact state detection unit detects contact with the object to be measured or the grounding surface by detecting the pressure applied between the object to be measured or the grounding surface.

[0010] Furthermore, in the X-ray measuring apparatus according to the fourth aspect of the present invention, the X-ray shielding portion has one surface that can come into contact with the object to be measured or the installation surface, the one surface has a hole for irradiating the object to be measured with X-rays, and an elastic member is attached to the one surface. [Effects of the Invention]

[0011] According to the present invention, the X-ray measuring device can reduce power consumption. [Brief explanation of the drawing]

[0012] [Figure 1] This is a perspective view showing an X-ray measuring apparatus according to the first embodiment of the present invention and an object to be measured. [Figure 2] This is a side view showing an X-ray measuring apparatus according to the first embodiment of the present invention and an object to be measured. [Figure 3] This is a perspective view showing an X-ray measuring apparatus according to a second embodiment of the present invention and an object to be measured. [Figure 4] This is a side view showing an X-ray measuring apparatus and an object to be measured according to a second embodiment of the present invention. [Figure 5a] This is a diagram showing an X-ray shielding portion according to the first embodiment of the present invention. [Figure 5b] This figure shows an X-ray shielding portion according to a second embodiment of the present invention. [Figure 6] This figure shows the circuit configuration of an X-ray measuring device according to the first embodiment of the present invention. [Figure 7] This is a flowchart showing the operation of the X-ray measuring device according to the first embodiment of the present invention. [Modes for carrying out the invention]

[0013] Hereinafter, embodiments of the present invention (hereinafter referred to as "this embodiment") will be described with reference to the attached drawings. To facilitate understanding of the description, the same reference numerals are used for the same components and steps in each drawing whenever possible, and redundant explanations are omitted.

[0014] <First Embodiment> Figure 1 is a perspective view showing the X-ray measuring apparatus 1 and the object to be measured 2 according to the first embodiment of the present invention. Figure 2 is a side view showing the X-ray measuring apparatus 1 and the object to be measured 2 according to the first embodiment of the present invention.

[0015] As shown in Figure 2, the X-ray measuring device 1 is portable and easily carried by the user. The X-ray measuring device 1 comprises a housing 10, an X-ray shielding unit 20a, an X-ray irradiation unit 12, an X-ray detection unit 13, a contact state detection unit 14, and a vibration detection unit 40. The X-ray measuring device 1 according to the first embodiment of the present invention is used, for example, to measure the residual stress or the amount of retained austenite of an object to be measured 2. The following describes the case in which the X-ray measuring device 1 measures the residual stress of an object to be measured 2. The object to be measured 2 is the object to be measured for residual stress measurement using X-rays.

[0016] The housing 10 is a box that houses various components built into the X-ray measuring device 1. The housing 10 includes a handle portion 19 at the upper part and a housing connector 11 at the lower part respectively. The handle portion 19 is used for the user of the X-ray measuring device 1 to hold the X-ray measuring device 1. The housing connector 11 is used to attach the X-ray shielding portion 20a to the housing 10. The housing connectors 11 are arranged at two locations, for example, at the lower part of the housing 10. The housing connector 11 has a hook-shaped structure when the housing 10 is viewed from the front so that the two connection portions 22 at the upper part of the X-ray shielding portion 20a can be inserted. When the connection portion 22 is inserted into the hook-shaped structure, the X-ray shielding portion 20a is attached.

[0017] The X-ray irradiation unit 12 irradiates the object to be measured 2 with X-rays from the X-ray irradiation port 16 through the X-ray shielding portion 20a. The irradiation of the X-rays by the X-ray irradiation unit 12 is controlled by a control unit 15 described later. Also, the X-ray detection unit 13 detects the X-rays diffracted by the object to be measured 2 and passing through the X-ray shielding portion 20a. The X-ray measuring device 1 calculates the residual stress and half-value width of the object to be measured 2 based on the dose of the X-rays detected by the X-ray detection unit 13.

[0018] The X-ray shielding portion 20a relays the X-rays irradiated from the X-ray irradiation unit 12 to the object to be measured 2. Also, the X-ray shielding portion 20a relays the X-rays diffracted by the object to be measured 2 to the X-ray detection unit 13. The X-ray shielding portion 20a has an upper surface, side surfaces, and a surface (bottom surface) that can contact the object to be measured 2 or the installation surface of the object to be measured 2, and is formed of a material that shields X-rays. The upper surface is open. Also, two connection portions 22 for connecting to the housing 10 are arranged on the side surfaces. The connection portion 22 is formed in a convex shape in the vertical direction from the upper part of the side surface that becomes the left side or the right side when the X-ray measuring device 1 is viewed from the front, and when the connection portion 22 is inserted into the above-described housing connector 11, the X-ray shielding portion 20a is detachably attached to the housing 10. Also, the bottom surface has a hole portion 21. That is, the X-rays irradiated from the X-ray irradiation unit 12 reach the object to be measured 2 via the X-ray irradiation port 16, the upper surface of the X-ray shielding portion 20a, and the hole portion 21 in this order. Also, the X-rays diffracted by the object to be measured 2 reach the X-ray detection unit 13 via the hole portion 21 and the upper surface of the X-ray shielding portion 20a in this order.

[0019] Further, the X-ray shielding portion 20a is formed such that the relative angle between the upper surface and the bottom surface is approximately 20° to 45° ± 1° (for example, 35°), and is used, for example, to measure the residual stress of the object to be measured 2. That is, the incident angle of the X-ray irradiated from the X-ray irradiation portion 12 with respect to the object to be measured 2 is approximately 35°. The incident angle of approximately 35° is suitable for measuring the residual stress of the object to be measured 2. Therefore, when the X-ray shielding portion 20a is attached to the housing 10, the X-ray measuring device 1 is used to measure the residual stress of the object to be measured 2.

[0020] The contact state detection unit 14 is, for example, a pressure sensor, and detects whether the X-ray shielding portion 20a is in contact with the object to be measured 2 or the installation surface of the object to be measured 2. Specifically, the contact state detection unit 14 determines whether a pressure equal to or greater than a predetermined value is applied between the X-ray measuring device 1 and the object to be measured 2 or the installation surface of the object to be measured 2, and detects "contacting" when a pressure equal to or greater than the predetermined value is applied, and detects "not contacting" when a pressure equal to or greater than the predetermined value is not applied. This predetermined value is preferably a positive integer other than 0 [kgf / cm 2 . The contact state detection unit 14 is disposed at a location where the X-ray shielding portion 20a is attached to the housing 10 or at a location where the housing 10 and the X-ray shielding portion 20a are in contact.

[0021] The vibration detection unit 40 is, for example, a gyro sensor, and is disposed outside or inside the housing 10. The vibration detection unit 40 acquires hand tremors and vibrations when the user holds the X-ray measuring device 1 as vibration parameters, determines whether the vibration parameters are less than or equal to a predetermined value, and detects that there is vibration when the determination is a negative determination.

[0022] FIG. 5a is a diagram showing the X-ray shielding portion 20a according to the first embodiment of the present invention.

[0023] As described above, the X-ray shielding section 20a is formed such that the relative angle between its top and bottom surfaces is approximately 35°, and is used when measuring the residual stress of the object to be measured 2. The X-ray shielding section 20a also relays X-rays between the X-ray irradiation section 12, the object to be measured 2, and the X-ray detection section 13. The X-ray shielding section 20a also has an X-ray shielding tube 30 that is attached to the periphery of the hole 21. The X-ray shielding tube 30 is made of, for example, an elastic material (such as rubber) that shields X-rays, and fills the gap between the X-ray shielding section 20a and the object to be measured 2 or the mounting surface of the object to be measured 2 by fitting tightly into the gap between the X-ray shielding section 20a and the object to be measured 2 or the mounting surface of the object to be measured 2.

[0024] Figure 6 shows the circuit configuration of an X-ray measuring device 1 according to the first embodiment of the present invention. As shown in Figure 6, the X-ray measuring device 1 is composed of, for example, an X-ray irradiation unit 12, an X-ray detection unit 13, a control unit 15, an input / output unit 17, a calculation unit 18, and a housing 10 that houses these components.

[0025] User terminal 3 is a device operated by the user operating the X-ray measuring device 1. Examples of user terminal 3 include tablets and personal computers.

[0026] The X-ray irradiation unit 12 irradiates X-rays from the X-ray irradiation port 16 under the control of the control unit 15. The X-ray detection unit 13 detects the dose of X-rays that have diffracted through the object to be measured 2 and passed through the X-ray shielding unit 20a, and transmits the detection result to the control unit 15.

[0027] The contact state detection unit 14 detects whether the X-ray shielding unit 20a is in contact with the object to be measured 2 or the surface on which the object to be measured 2 is installed, and transmits the detection result to the control unit 15. The vibration detection unit 40 transmits whether or not vibration is present to the control unit 15.

[0028] The input / output unit 17 receives input from the user transmitted from the user terminal 3 and transmits the received input as a command to the control unit 15. The input / output unit 17 also transmits calculation results such as residual stress and full width at half maximum transmitted from the control unit 15 to the user terminal 3. User input here refers to commands such as a command to start irradiating the object under test 2 with X-rays to measure the residual stress, a command to start irradiating the object under test 2 with X-rays to measure the full width at half maximum, and a command to stop irradiating the object under test 2.

[0029] Based on the control of the control unit 15, the calculation unit 18 calculates the residual stress and half-width of the object to be measured 2 from the X-ray dose detected by the X-ray detection unit 13, and transmits the calculated results to the control unit 15.

[0030] The control unit 15 controls the X-ray irradiation unit 12 to irradiate and stop X-ray irradiation based on commands transmitted from the input / output unit 17. The control unit 15 also controls the calculation unit 18 to calculate the residual stress or full width at half maximum of the object to be measured 2 based on commands transmitted from the input / output unit 17, and transmits the X-ray dose detected by the X-ray detection unit 13 to the calculation unit 18. The control unit 15 also transmits the calculation results transmitted from the calculation unit 18 to the input / output unit 17. Furthermore, when the X-ray irradiation unit 12 is irradiating X-rays or when the input / output unit 17 has issued an instruction to start X-ray irradiation, the control unit 15 determines whether the contact state detection unit 14 has detected contact with the object to be measured 2 or the installation surface of the object to be measured 2, and controls the X-ray irradiation unit 12 not to irradiate X-rays if the determination is negative. In addition, the control unit 15 may control the X-ray irradiation unit 12 not to irradiate X-rays if the vibration detection unit 40 detects vibration. This can suppress a decrease in measurement accuracy due to vibration.

[0031] Figure 7 is a flowchart illustrating the operation of the X-ray measuring apparatus 1 according to the first embodiment of the present invention. Note that the order and content of the following steps can be changed as appropriate.

[0032] (Step SP10) The input / output unit 17 receives a command from the user terminal 3 to irradiate with X-rays and measure the residual stress of the object to be measured 2. The input / output unit 17 transmits this command to the control unit 15. Then, the process proceeds to step SP12.

[0033] (Step SP12) The control unit 15 receives the detection result from the contact state detection unit 14 regarding whether the X-ray shielding unit 20a is in contact with the object to be measured 2 or the installation surface of the object to be measured 2, and makes a determination on the detection result. If the determination result is negative, the process proceeds to step SP24, while if the determination result is positive, the process proceeds to step SP13.

[0034] (Step SP13) The control unit 15 determines whether or not the vibration detection unit 40 has detected vibration. If the result of this determination is negative, the process proceeds to step SP14; however, if the result of this determination is positive, the process proceeds to step SP24.

[0035] (Step SP14) The control unit 15 receives commands transmitted from the user terminal 3 via the input / output unit 17, and controls the X-ray irradiation unit 12 to irradiate the object to be measured 2 with X-rays based on these commands. Then, the process proceeds to step SP16.

[0036] (Step SP16) The control unit 15 receives the detection result from the contact state detection unit 14 as to whether the X-ray shielding unit 20a is in contact with the object to be measured 2 or the installation surface of the object to be measured 2, and makes a determination on the detection result. If the determination result is negative, the process proceeds to step SP24, while if the determination result is positive, the process proceeds to step SP17.

[0037] (Step SP17) The control unit 15 determines whether or not the vibration detection unit 40 has detected vibration. If the result of this determination is negative, the process proceeds to step SP18; however, if the result of this determination is positive, the process proceeds to step SP24.

[0038] (Step SP18) The control unit 15 transmits the X-ray dose detected by the X-ray detection unit 13 to the calculation unit 18. The control unit 15 also controls the calculation unit 18 to calculate the residual stress or full width at half maximum of the object under measurement 2 based on commands transmitted from the user terminal 3 via the input / output unit 17. Then the process moves to step SP20.

[0039] (Step SP20) The calculation unit 18, under the control of the control unit 15, calculates the residual stress or half-width of the object under test 2 based on commands transmitted from the user terminal 3 via the input / output unit 17. The calculation unit 18 transmits the calculated result to the control unit 15. The control unit 15 transmits the residual stress or half-width of the object under test 2 transmitted from the calculation unit 18 to the input / output unit 17. The input / output unit 17 transmits the residual stress or half-width of the object under test 2 transmitted from the control unit 15 to the user terminal 3. Then, the process moves to step SP22.

[0040] (Step SP22) The input / output unit 17 receives a command from the user terminal 3 to stop X-ray irradiation. The input / output unit 17 transmits this command to the control unit 15. Then, the process proceeds to step SP24.

[0041] (Step SP24) The control unit 15 receives commands transmitted from the user terminal 3 via the input / output unit 17, and controls the X-ray irradiation unit 12 to prevent X-ray irradiation based on these commands.

[0042] <Effects> In this embodiment, the X-ray measuring device 1, which has a detachable X-ray shielding unit 20a that shields X-rays irradiated onto the object to be measured 2, comprises: an X-ray irradiation unit 12 that irradiates the object to be measured 2 with X-rays when an instruction is received; an X-ray detection unit 13 that detects X-rays diffracted from the object to be measured 2; a contact state detection unit 14 that detects the contact state between the object to be measured 2 or the installation surface of the object to be measured 2; and a control unit 15 that determines whether the contact state detection unit 14 has detected contact with the object to be measured 2 or the installation surface when the X-ray irradiation unit 12 is irradiating X-rays or when such instruction is given, and controls the X-ray irradiation unit 12 so as not to irradiate X-rays if the determination is negative. With this configuration, when the X-ray measuring device 1 is moved and no contact is detected with the object to be measured 2 or the installation surface, X-ray irradiation is prevented, thereby reducing power consumption.

[0043] Furthermore, in this embodiment, the contact state detection unit 14 is positioned at the mounting location with the X-ray shielding unit 20. This configuration allows for easy detection of contact with the object being measured 2 or the installation surface.

[0044] Furthermore, in this embodiment, the contact state detection unit 14 detects contact with the object to be measured 2 or the installation surface by detecting the pressure applied between the object to be measured 2 or the installation surface of the object to be measured 2. This configuration allows for easy detection of contact with the object being measured 2 or the installation surface.

[0045] <Second Embodiment> Figure 3 is a perspective view showing the X-ray measuring apparatus 1 and the object to be measured 2 according to the second embodiment of the present invention. Figure 4 is a side view showing the X-ray measuring apparatus 1 and the object to be measured 2 according to the second embodiment of the present invention.

[0046] As shown in Figures 3 and 4, the X-ray measuring device 1 is configured to include an X-ray shielding section 20b instead of an X-ray shielding section 20a. Note that the components of the X-ray measuring device 1 according to the second embodiment of the present invention, other than the X-ray shielding section 20b, are the same as those in the first embodiment, and therefore their description is omitted. The X-ray measuring device 1 is used, for example, to measure the half-width of an object to be measured 2. The object to be measured 2 is the object to be measured for measuring the half-width using X-rays.

[0047] The X-ray shielding section 20b relays the X-rays irradiated from the X-ray irradiation section 12 to the object to be measured 2. The X-ray shielding section 20b also relays the X-rays diffracted by the object to be measured 2 to the X-ray detection section 13. The X-ray shielding section 20b has a top surface, side surfaces, and one surface (bottom surface) that can contact the object to be measured 2 or the surface on which the object to be measured 2 is placed, and is made of a material that shields against X-rays. The top surface is open. Two connection parts 22 for connecting to the housing 10 are arranged on the side surface. The connection parts 22 are formed in a convex shape in the vertical direction from the upper part of the left or right side surface when the X-ray measuring device 1 is viewed from the front, and the X-ray shielding section 20b is attached to the housing 10 by being inserted into the housing connector 11 described above. The bottom surface has a hole 21. In other words, the X-rays emitted from the X-ray irradiation unit 12 reach the object to be measured 2 via the X-ray irradiation port 16, the upper surface of the X-ray shielding unit 20b, and the hole 21 in that order. The X-rays diffracted from the object to be measured 2 then reach the X-ray detection unit 13 via the hole 21 and the upper surface of the X-ray shielding unit 20b in that order.

[0048] Furthermore, the X-ray shielding section 20b is formed such that the relative angle between its top and bottom surfaces is approximately 0°, and is used, for example, to measure the half-width of the object to be measured 2. That is, the incident angle of the X-rays irradiated from the X-ray irradiation section 12 to the object to be measured 2 is approximately 0°. An incident angle of approximately 0° is suitable for measuring the half-width of the object to be measured 2. Therefore, the X-ray measuring device 1 is used to measure the half-width of the object to be measured 2 when the X-ray shielding section 20b is connected to the housing 10. Note that "approximately 0°" includes not only 0° but also directions that deviate from 0° by approximately ±1°.

[0049] Figure 5b shows the X-ray shielding portion 20b according to the second embodiment of the present invention.

[0050] As described above, the X-ray shielding section 20b is formed such that the relative angle between its top and bottom surfaces is approximately 0°, and is used when measuring the half-width of the object to be measured 2. The X-ray shielding section 20b also relays X-rays between the X-ray irradiation section 12, the object to be measured 2, and the X-ray detection section 13. The X-ray shielding section 20b also has an X-ray shielding tube 30 that is attached to the periphery of the hole 21. The X-ray shielding tube 30 is made of, for example, an elastic material (such as rubber) that shields X-rays, and fills the gap between the X-ray shielding section 20b and the object to be measured 2 or the mounting surface of the object to be measured 2 by fitting tightly into the gap between the X-ray shielding section 20b and the object to be measured 2 or the mounting surface of the object to be measured 2.

[0051] <Variation> It should be noted that the present invention is not limited to the embodiments described above. That is, any design modifications made to the above embodiments by those skilled in the art are also included within the scope of the present invention, as long as they retain the features of the present invention. Furthermore, the elements of the above embodiments and the modifications described later can be combined to the extent that it is technically possible, and any combination thereof is also included within the scope of the present invention, as long as it retains the features of the present invention.

[0052] For example, in the above embodiment, the case in which the bottom surface of the X-ray shielding portion 20 has a hole 21 was described, but the entire bottom surface of the X-ray shielding portion 20 may be open. When the entire bottom surface of the X-ray shielding portion 20 is open, the bottom surface will come into contact with the object to be measured 2 or the mounting surface of the object to be measured 2 when irradiated with X-rays. Also, when the entire bottom surface of the X-ray shielding portion 20 is open, the contact state detection unit 14 detects whether or not the X-ray shielding portion 20 is in contact with the object to be measured 2 or the mounting surface of the object to be measured 2.

[0053] Furthermore, in the above embodiment, the case in which the contact state detection unit 14 is positioned at the mounting location of the housing 10 and the X-ray shielding unit 20, or at the location where the housing 10 and the X-ray shielding unit 20 are in contact, has been described. However, the contact state detection unit 14 may also be positioned on the outside of the bottom surface of the X-ray shielding unit 20. When the contact state detection unit 14 is positioned on the outside of the bottom surface of the X-ray shielding unit 20, the detection result by the contact state detection unit 14 of whether or not the X-ray shielding unit 20a is in contact with the object to be measured 2 or the installation surface of the object to be measured 2 is transmitted to the control unit 15 by signal wiring or wireless functions arranged in the X-ray shielding unit 20.

[0054] Furthermore, although the above embodiment described a case where the hole 21 at the bottom of the X-ray shielding portion 20 is circular, the hole 21 may have other shapes, such as polygons. Also, the X-ray shielding tube 30 may have any shape that can cover the periphery of the hole 21, such as a rectangular tube.

[0055] Furthermore, in the above embodiment, the X-ray shielding portion 20 is attached to the housing 10 by the housing connector 11 and the connector 22. However, any mounting method that allows the X-ray shielding portion 20 to be detached from the housing 10 and fixed to the housing 10 is also acceptable, such as a magnet, screws, or connectors.

[0056] Furthermore, in the above embodiment, the contact state detection unit 14 is, for example, a pressure sensor, but it may also be, for example, an optical sensor, as long as it can detect whether or not the X-ray shielding unit 20 is in contact with the object to be measured 2 or the mounting surface of the object to be measured 2.

[0057] Furthermore, the control unit 15 may determine whether a predetermined time has elapsed since the X-ray irradiation unit 12 stopped irradiating X-rays. If the control unit 15 determines that the determination is positive and receives an instruction from the input / output unit 17 to irradiate X-rays, it may control the X-ray irradiation unit 12 to warm up the X-ray measuring device 1, and then control the X-ray irradiation unit 12 to start irradiating X-rays.

[0058] Alternatively, the housing 10 may be connected to or installed on a dedicated storage stand instead of the X-ray shielding unit 20. The dedicated storage stand is used when storing the X-ray measuring device 1 or when warming up the X-rays. The dedicated storage stand has a structure that covers the area around the X-ray irradiation port 16 when the housing 10 is mounted or installed. This structure is made of a material that shields against X-rays. The dedicated storage stand also has a structure that can support the housing 10 so that it does not tip over when the housing 10 is mounted or installed. [Explanation of Symbols]

[0059] 1...X-ray measuring device, 2...Object to be measured, 12...X-ray irradiation unit, 13...X-ray detection unit, 14...Contact state detection unit, 15...Control unit, 20...X-ray shielding unit

Claims

1. An X-ray measuring device having a detachable X-ray shielding section that shields the object being measured from X-rays, An X-ray irradiation unit that, upon receiving an instruction, irradiates the object to be measured with X-rays, An X-ray detection unit for detecting X-rays diffracted from the object being measured, A contact state detection unit is positioned at the mounting location with the X-ray shielding unit and detects the contact state with the object to be measured or the mounting surface of the object to be measured, A vibration detection unit for detecting vibrations in the X-ray measuring device, The system includes a control unit that, when the X-ray irradiation unit is irradiating X-rays or when the instruction is given, determines whether the contact state detection unit has detected contact with the object to be measured or the installation surface, and controls the X-ray irradiation unit so as not to irradiate X-rays if the determination is negative, The control unit determines whether the vibration detection unit has detected the vibration when the X-ray irradiation unit is irradiating X-rays or when the instruction has been given, and controls the X-ray irradiation unit so as not to irradiate X-rays if the determination is affirmative. An X-ray measuring device characterized by the following features.

2. The contact state detection unit detects contact with the object to be measured or the installation surface by detecting the pressure applied between the object to be measured or the installation surface. The X-ray measuring apparatus according to feature 1.

3. The X-ray shielding portion has one surface that can come into contact with the object to be measured or the installation surface. The aforementioned surface has a hole for irradiating the object to be measured with X-rays, and an elastic member is attached to the aforementioned surface. The X-ray measuring apparatus according to claim 1 or 2.

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