Rotating devices, motors, and pumps

Abstract

To provide a new technology that utilizes an oscillator and can be applied to various purposes.SOLUTION: A rotation device includes: a first vibrator having a first vibration surface perpendicular to a vibration direction; a second vibrator having a second vibration surface perpendicular to the vibration direction; and an opposing element having a first opposing surface opposing the first vibration surface and a second opposing surface opposing the second vibration surface, and rotating around the vibration direction of the first vibrator and the second vibrator as an axis. The rotation device does not include a member supporting the opposing element. The first vibration surface and the first opposing surface have a first parallel region where they face each other in parallel and a first impeller region that is three-dimensionally formed on at least one of them. The second vibration surface and the second opposing surface have a second parallel region where they face each other in parallel and a second impeller region that is three-dimensionally formed on at least one of them.SELECTED DRAWING: Figure 7A

Description

Technical Field

[0001] The present invention relates to a rotating device, a motor, and a pump.

Background Art

[0002] In recent years, vibration waves such as ultrasonic waves have been used in various applications. Patent Document 1 discloses a technique for obtaining a pumping effect using ultrasonic waves with a simple structure. Non-Patent Document 1 discloses a phenomenon in which when an object is brought close to a vibrator, the object is attracted to the vibrator.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Non-Patent Documents

[0004]

Non-Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] New technologies applicable to various applications using a vibrator are expected.

[0006] An object of the present invention is to provide a new technology applicable to various applications using a vibrator. [Means for solving the problem]

[0007] A rotating device according to one aspect of the present invention comprises a first vibrator having a first vibrating surface perpendicular to the direction of vibration, a second vibrating surface perpendicular to the direction of vibration, a first opposing surface facing the first vibrating surface, and a second opposing surface facing the second vibrating surface, and the opposing surface rotates about the vibration direction of the first vibrator and the second vibrator as an axis, and does not have a member to support the opposing surface, the first vibrating surface and the first opposing surface each have a first parallel region facing each other parallel to each other and a first impeller region formed three-dimensionally on at least one of them, and the second vibrating surface and the second opposing surface each have a second parallel region facing each other parallel to each other and a second impeller region formed three-dimensionally on at least one of them. [Effects of the Invention]

[0008] According to the present invention, it is possible to provide a novel technology that can be applied to various uses by utilizing an oscillator. [Brief explanation of the drawing]

[0009] [Figure 1] This is a conceptual diagram showing an example of the configuration of a rotating device according to one embodiment. [Figure 2A] This is a conceptual diagram showing an example of the configuration of an oscillator according to one embodiment. [Figure 2B] This is a conceptual diagram showing an example of the configuration of an oscillator according to one embodiment. [Figure 3] This figure illustrates an example of the vibration characteristics of an oscillator according to one embodiment. [Figure 4A] This figure schematically shows an example of the shape of a vibrator according to one embodiment. [Figure 4B] This figure schematically shows an example of the shape of a vibrator according to one embodiment. [Figure 4C] This figure schematically shows an example of the shape of a vibrator according to one embodiment. [Figure 4D] This figure schematically shows an example of the shape of a vibrator according to one embodiment. [Figure 4E] It is a diagram schematically showing an example of the shape of a vibrator according to an embodiment. [Figure 5A] It is a diagram showing the relationship between the measurement results of the vibration amplitude and the rotation speed of a vibration device for an opposed element according to an embodiment. [Figure 5B] It is a diagram showing the relationship between the measurement results of the vibration amplitude and the rotation speed of a vibration device for an opposed element according to an embodiment. [Figure 5C] It is a diagram showing the relationship between the measurement results of the vibration amplitude and the rotation speed of a vibration device for an opposed element according to an embodiment. [Figure 5D] It is a diagram showing the relationship between the measurement results of the vibration amplitude and the rotation speed of a vibration device for an opposed element according to an embodiment. [Figure 5E] It is a diagram showing the relationship between the measurement results of the vibration amplitude and the rotation speed of a vibration device for an opposed element according to an embodiment. [Figure 6] It is a conceptual diagram for explaining the rotation direction of an opposed element according to an embodiment. [Figure 7A] It is a conceptual diagram for explaining a modified example of a rotation device according to an embodiment. [Figure 7B] It is a conceptual diagram for explaining a modified example of an opposed element according to an embodiment. [Figure 8A] It is a conceptual diagram for explaining a modified example of a rotation device according to an embodiment. [Figure 8B] It is a conceptual diagram for explaining a modified example of a rotation device according to an embodiment. [Figure 9A] It is a conceptual diagram for explaining a modified example of a rotation device according to an embodiment. [Figure 9B] It is a conceptual diagram for explaining a modified example of an opposed element according to an embodiment. [Figure 9C] It is a conceptual diagram for explaining a modified example of a rotation device according to an embodiment. [Figure 9D] It is a conceptual diagram for explaining a modified example of a rotation device according to an embodiment. [Figure 9E] It is a conceptual diagram for explaining a modified example of a rotation device according to an embodiment. [Figure 10A] This is a conceptual diagram illustrating a modified example of a vibration device according to one embodiment. [Figure 10B] This is a conceptual diagram illustrating a modified example of a vibration device according to one embodiment. [Figure 11] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 12] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 13] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 14] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 15] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 16] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 17] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 18] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 19] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 20] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 21] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 22] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 23] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 24] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 25] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 26] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 27] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 28] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 29] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 30] This is a conceptual diagram illustrating a modified example of an opposing element according to one embodiment. [Figure 31] This table illustrates a modified example of an opposing element according to one embodiment. [Figure 32] This table illustrates a modified example of an opposing element according to one embodiment. [Figure 33] This graph illustrates a modified example of an opposing element according to one embodiment. [Modes for carrying out the invention]

[0010] An embodiment of the present invention will be described below with reference to the drawings. In the drawings, identical or similar parts are denoted by the same or similar reference numerals. The drawings are schematic, and the relationship between thickness and planar dimensions, the ratio of the thickness of each layer, etc., may differ from reality. Furthermore, there may be parts where the dimensional relationships and ratios differ between drawings.

[0011] <Device configuration> An example of a rotating device according to this embodiment will be described with reference to Figure 1. As shown in Figure 1, the rotating device 1 comprises a vibrating device 10 and an opposing element 20. The vibrating device 10 comprises an oscillator 11 and a horn 12. In this embodiment, the vibrating device 10 may also be referred to as the oscillator.

[0012] The vibration device 10 is fixed by a fixing device 30 so that the longitudinal direction of the vibration device 10, which is the direction of vibration of the vibration device 10, is in the direction of gravity. The vibration device 10 has a circular, planar vibration surface perpendicular to the direction of vibration at one end in the longitudinal direction of the vibration device 10 (the lower end in the example of Figure 1). The vibration device 10 is connected to a power source (not shown) to obtain driving power. The vibration device 10 has a control circuit (not shown) for generating and controlling vibration.

[0013] The lower end of the vibrator 10 and the opposing element 20 are submerged in the water filling the tank 50. The position of the tank 50 in the Z-axis direction is adjusted by the Z-axis stage 40. The temperature probe 60 is fixed by a fixture 30 so that it can measure the water temperature in the tank 50.

[0014] The opposing element 20 is, for example, a plate shape such as a disc. The opposing element 20 has two circular surfaces. Of the two circular surfaces of the opposing element 20, at least one surface has a planar region and an impeller region. When the surface of the opposing element 20 and the vibrating surface of the vibrating device 10 are positioned parallel to each other, the planar region of the surface of the opposing element 20 (opposing surface) is parallel to the vibrating surface of the vibrating device 10, and is therefore also referred to as the parallel region in the following description. The impeller region is a region in which a three-dimensional impeller shape is formed. Point-symmetric three-dimensional patterns that are not impeller shapes may be formed in the impeller region.

[0015] The diameter of the surface of the opposing element 20 and the diameter of the vibrating surface of the vibrating device 10 are the same. Here, "same diameter" does not necessarily mean that they are exactly the same diameter. For example, there may be a difference of 1% to 5% between the diameter of the surface of the opposing element 20 and the diameter of the vibrating surface of the vibrating device 10.

[0016] With the lower end of the vibrating device 10 submerged in the water of the tank 50, the vibrating device 10 is vibrated, and when the surface portion (opposing surface) of the opposing element 20 having the parallel region and impeller region is brought close to the vibrating surface of the vibrating device 10, the opposing surface of the opposing element 20 is maintained in a state where it is attracted to the vibrating surface of the vibrating device 10. The rotating device 1 does not have a member that supports the opposing element 20. The vibration produced by the vibrating device 10 is not limited to, but for example, ultrasonic vibration with a frequency of 20 kHz or higher. The vibration produced by the vibrating device 10 is not limited to, but for example, simple harmonic motion. Although the detailed principle of the phenomenon in which an object is attracted to the vibrating surface of the vibrator has not been elucidated, the phenomenon has been reported in Non-Patent Literature 1.

[0017] When the vibrating device 10 vibrates and the opposing element 20 is attracted to it, a self-centering effect occurs between the vibrating surface of the vibrating device 10 and the surface of the opposing element 20, so that the center of the vibrating surface of the vibrating device 10 and the center of the surface of the opposing element 20 become close to each other. Also, as described above, the diameter of the surface of the opposing element 20 and the diameter of the vibrating surface of the vibrating device 10 are the same. As a result, when the vibrating device 10 vibrates and the vibrating surface of the vibrating device 10 and the surface of the opposing element 20 are facing each other, the end of the vibrating surface of the vibrating device 10 on that surface faces the end of the surface of the opposing element 20 on that surface.

[0018] Furthermore, at this time, the opposing element 20 rotates around the direction of vibration of the vibrating device 10. The principle by which this rotation occurs is not clear, but it is possible that the rotation of the opposing element 20 is caused by the pressure generated by the vibration of the vibrating surface of the vibrating device 10, the water flow that flows through the gap between the vibrating device 10 and the opposing element 20, and the acoustic flow generated by the vibration of the vibrating surface, hitting the surface of the opposing element 20. Details of the rotation of the opposing element 20 will be described later.

[0019] In this embodiment, the surface of the opposing element 20 has a parallel region and an impeller region, but this is not the only option. As a variation, instead of the surface of the opposing element 20, the vibrating surface of the vibrating device 10 may have a parallel region and an impeller region. The same applies to the embodiments described later.

[0020] As described above, according to this embodiment, the rotating device 1 comprises a vibrating device 10 (vibrator) and an opposing element 20. The vibrating device 10 has a vibrating surface perpendicular to the direction of vibration. The opposing element 20 has an opposing surface facing the vibrating surface of the vibrating device 10 and rotates about the direction of vibration of the vibrating device 10 as its axis. The vibrating surface of the vibrating device 10 and the opposing surface of the opposing element 20 each have a parallel region that faces each other parallel to each other and an impeller region formed three-dimensionally on at least one of them.

[0021] The rotating device 1, having the configuration described above, makes it possible to realize a novel rotating device utilizing the vibrating device 10. In particular, since the opposing element 20 rotates without contacting the vibrating device 10, wear and damage due to contact with the vibrating device 10 are less likely to occur. As a result, it is possible to realize a highly durable rotating device 1.

[0022] The following describes in detail an example of the vibration device 10 and the opposing element 20 in this embodiment.

[0023] <Vibration device> An exemplary configuration of the vibration device 10 in this embodiment will be described with reference to Figures 2A and 2B. The vibration device 10 only needs to be configured to generate vibration, and its specific configuration is not limited to the configuration described below. The vibrator 11 of the vibration device 10 is constructed by alternately sandwiching a donut-shaped piezoelectric ceramic and an electrode plate, further sandwiching both ends with metal blocks, and fastening them with through bolts. A voltage is applied to the electrode plate so that the vibrator 11 is polarized in its axial direction. By applying an AC voltage from the circuit to the electrode plate, expansion and contraction due to the inverse piezoelectric effect occur, and the vibrator 11 vibrates in a unidirectional vibration mode. Because the vibrator 11 is constructed by fastening it with through bolts, even the piezoelectric ceramic, which is weak against tensile force, can withstand the vibration amplitude and operate as a high-power vibrator.

[0024] A horn 12 is connected to one axial end of the vibrator 11. The horn 12 is a component connected to the vibrator 11 so that the vibration surface of the vibrating device 10 satisfies desired conditions, such as shape, pattern, presence or absence of holes, and material. In the example shown in Figure 2A, the horn 12 is cylindrical in shape. The bottom surface of the horn 12, which is the vibration surface of the vibrating device 10, is circular. The horn 12 is connected to the vibrator 11 so that its axis is coaxial with the axis of the vibrator 11. The horn 12 can be made of any material, but for example, it can be made of a metal material such as stainless steel.

[0025] Referring to Figure 3, an example of the vibration characteristics of an exemplary vibrator 11 used in the vibration device 10 in this embodiment will be described, but the vibration characteristics are not limited to this. Figure 3 shows the measurement results when the vibration characteristics of the vibration device 10, fixed by the fixing device 30, were measured using an impedance analyzer. Figure 3 shows the relationship between the frequency of the AC voltage in the circuit of the vibration device 10 and the conductance (real part G) and susceptance (imaginary part B) of the admittance. Figure 3(1) shows the results of measuring the vibration characteristics of the vibration device 10 in air. Figure 3(2) shows the results of measuring the vibration characteristics of the vibration device 10 in water. The frequency at which the real part G takes a maximum value (unit [S]) is the resonant frequency of the vibration device 10. According to Figure 3, the vibration device 10 resonates at a frequency of 26.5~26.6kHz in air and water. It is possible to track the resonant frequency of the vibration device 10 by using the phase measurement of admittance. According to Figure 3, the maximum value of the real part G in water is about half the maximum value of the real part G in air. Therefore, Figure 3 shows that in order to obtain the same vibration amplitude in water and air, it is necessary to apply approximately twice the voltage in water compared to air.

[0026] <Opponent> Referring to Figures 4A to 4E, several examples of the shape of the opposing element 20 in this embodiment will be described. In the example shown in Figure 4A, the opposing element 20a is disc-shaped. At least one of the two opposing circular surfaces of the opposing element 20a has an impeller region and a planar region 203 surrounding the impeller region. The impeller region has a plurality of inclined surfaces 201 and a plurality of vertical surfaces 202. The inclined surfaces 201 are fan-shaped surfaces inclined with respect to the planar region 203. The inclined surfaces 201 have their vertices at the point of contact between the planar region 203 and the radiation, and are inclined toward the other radiation of the inclined surface 201. The angle of inclination is not limited, but for example, it is 10° with respect to the planar region 203. The vertical surfaces 202 are surfaces perpendicular to the planar region 203 and are planes extending between the ends of the two inclined surfaces 201. In the impeller region, multiple tangent lines (hereinafter also referred to as "radiations") where the inclined surface 201 and the vertical surface 202 are in contact extend radially from the center of the impeller region to the planar region 203.

[0027] Furthermore, in the example shown in Figure 4A, the opposing element 20a has a convex portion formed on the surface along the edge of the surface, with the planar region 203 as its upper surface. Since this convex portion has a higher elevation than the impeller region, in this embodiment, this convex portion of the opposing element 20a is also referred to as the edge, and the portion of the impeller region that is recessed compared to the planar region 203 is also referred to as the recess.

[0028] Because the vibrating surface of the vibrating device 10 and the surface portion (opposing surface) of the opposing element 20a, which has convex and concave portions, are facing each other, a space is formed between the vibrating surface of the vibrating device 10 and the opposing surface of the opposing element 20a. In this case, the vibrating surface of the vibrating device 10 is not in contact with the convex portion of the opposing element 20a, and a predetermined distance exists between the vibrating surface of the vibrating device 10 and the convex portion of the opposing element 20a.

[0029] Furthermore, in the example shown in Figure 4A, although not limited thereto, the diameter of the circular surface portion of the opposing element 20a is 40 mm, and the width of the upper surface of the planar region 203 in the short-side direction is 1.5 mm. The thickness of the opposing element 20a is 2.5 mm.

[0030] As described above, the surface of the opposing element 20a and the vibrating surface of the vibrating device 10 are circular, and the diameter of the surface of the opposing element 20a and the diameter of the vibrating surface of the vibrating device 10 are the same. As a result, when the vibrating device 10 vibrates and the vibrating surface of the vibrating device 10 and the surface of the opposing element 20a are facing each other, the end of the vibrating surface of the vibrating device 10 faces the end of the surface of the opposing element 20a.

[0031] The examples of the opposing element 20 shown in Figures 4B to 4E will be explained primarily in terms of the differences between them and the opposing element 20a or other examples of the opposing element 20 shown in Figure 4A.

[0032] The inclined surface 201 of the opposing element 20b shown in Figure 4B has a different inclination method than that of the opposing element 20a. The inclined surface 201 of the opposing element 20b is inclined with one of the radiation rays on the inclined surface 201 being the highest point, and the other radiation ray being inclined towards the point of contact between the other radiation ray and the planar region 203.

[0033] The opposing element 20c shown in Figure 4C differs from the opposing element 20b in that it has a through hole 204c in the center of its surface. More specifically, the opposing element 20c has a through hole 204c formed from the center of one of the two surfaces facing the opposing element 20c parallel to it, toward the other surface (the back surface of the opposing element 20c). The diameter of the through hole 204c is not limited, but is approximately 3 mm. As will be described later, having the through hole 204c in the center of the impeller region makes the rotation of the opposing element 20c more stable.

[0034] The opposing element 20d shown in Figure 4D differs from the opposing element 20c in that it has a through-hole 204c at the point of contact between the radiation and the planar region 203, rather than in the center of the surface.

[0035] The vertical surface 202e of the opposing element 20e shown in Figure 4E is curved, unlike the vertical surface 202 of the opposing element 20a, which is flat. In the example shown in Figure 4E, the vertical surface 202e is curved so as to form a recess when viewed from above. Furthermore, the opposing element 20e differs from the opposing element 20a in that it has a through hole 204e in the center of its surface.

[0036] <Measurement Results> The following describes the measurement results of the rotational characteristics of the opposing element 20 when the rotating device 1 shown in Figure 1 is configured and the opposing elements 20a to 20e shown in Figures 4A to 4E are used as the opposing elements 20 of the rotating device 1.

[0037] To measure the rotational characteristics of the opposing element 20, an AC voltage was generated by a function generator, amplified by a high-speed amplifier, and applied to the vibrator 11 of the vibration device 10 to excite the vibrator 11. The frequency of the applied AC voltage was 26.5 kHz, which was the resonant frequency of the vibrator 11. The water temperature in the water tank 50 in which the lower end of the vibration device 10 and the opposing element 20 were immersed was maintained in the range of 20°C to 30°C. The rotational speed of the opposing element 20 was measured visually with a stopwatch at low rotational speeds, and measured from video footage at high rotational speeds.

[0038] Figures 5A to 5E show the measurement results of the rotational speed of the opposing element 20a to 20e, respectively, as a function of the vibration amplitude of the vibration device 10. The measurement results are shown for each atmospheric pressure condition.

[0039] As shown in Figure 6, in a top view of the impeller region of the opposing element 20, counterclockwise rotation is considered the positive rotation of the opposing element 20, and the rotational speed is shown as a positive value in Figures 5A to 5E. On the other hand, clockwise rotation is considered the negative rotation of the opposing element 20, and the rotational speed is shown as a negative value in Figures 5A to 5E.

[0040] Figures 5A to 5E show that the opposing elements 20 exhibit different rotational characteristics depending on their shape. For example, opposing elements 20b, 20c, and 20e tend to increase in rotational speed as the vibration amplitude of the vibration device 10 increases. Furthermore, opposing elements 20c and 20e, which have a through hole in the center of the surface (impeller region), show less variation in measurement results compared to the other opposing elements 20. Therefore, it can be seen that the rotation of opposing element 20c is more stable due to the presence of a through hole in the center of the surface.

[0041] Modifications of this embodiment will now be described. The details of each of the several modifications described below can be applied to the above embodiment and other modifications as appropriate. In the following description of modifications, components similar to those in the above embodiment will be denoted by the same reference numerals as appropriate, and their descriptions will be omitted or simplified as appropriate.

[0042] <Example 1> In the above embodiment, the rotating device 1 has one vibrating device, but in the modified example 1, the rotating device 1 has two vibrating devices.

[0043] Referring to Figures 7A and 7B, the general configuration of the rotating device 1 in Modification 1 will be described. The rotating device 1 comprises a vibrator 101, a vibrator 102, and an opposing element 211. The vibrator 101 and vibrator 102 are configured in the same way as the vibrator 10.

[0044] The vibrating device 101 has a first vibrating surface perpendicular to the direction of vibration. The vibrating device 102 has a second vibrating surface perpendicular to the direction of vibration. In the rotating device 1 of the modified example 1, the vibrating devices 101 and 102 are installed so that the first vibrating surface and the second vibrating surface face each other. An opposing element 211 is placed between the first vibrating surface and the second vibrating surface. The opposing element 211 is, for example, a plate shape such as a disc. The opposing element 211 has two circular surfaces.

[0045] As shown in Figure 7A, the first vibrating surface, the second vibrating surface, and the opposing element 211 are immersed in the water filling the water tank 501.

[0046] As shown in Figure 7B, the first surface portion 211a and the second surface portion 211b of the opposing element 211 each have a planar region and an impeller region, similar to those in the above embodiment. When the opposing element 211 is placed between the first vibrating surface and the second vibrating surface, the first surface portion 211a becomes the surface opposite the first vibrating surface, and the second surface portion 211b becomes the surface opposite the second vibrating surface. The diameters of the first surface portion 211a and the second surface portion 211b are the same as the diameters of the first vibrating surface and the second vibrating surface. Note that the impeller region may be formed on the first vibrating surface and the second vibrating surface instead of the first surface portion 211a and the second surface portion 211b.

[0047] When the vibrating devices 101 and 102 are vibrating, a self-centering effect occurs between the first and second vibrating surfaces and the first and second surface portions 211a and 211b, causing the centers of the first and second vibrating surfaces to be in close proximity to the centers of the first and second surface portions 211a and 211b. At this time, the opposing element 211 rotates around the vibration direction of the vibrating devices 101 and 102 as its axis.

[0048] Furthermore, the impeller regions of the first surface 211a and the second surface 211b are formed in such a shape that the rotational force generated when the water flow and acoustic flow etc. strike the first surface 211a does not repel the rotational force generated when the water flow and acoustic flow etc. strike the second surface 211b.

[0049] According to the rotating device 1 of the modified example 1, the vibrating device 101 has a first vibrating surface perpendicular to the direction of vibration. The vibrating device 102 has a second vibrating surface perpendicular to the direction of vibration. The opposing element 211 has a first surface portion 211a facing the first vibrating surface and a second surface portion 211b facing the second vibrating surface. The first vibrating surface and the first surface portion 211a (first opposing surface) each have a first parallel region that faces each other parallel to each other and a first impeller region formed three-dimensionally on at least one of them. The second vibrating surface and the second surface portion 211b (second opposing surface) each have a second parallel region that faces each other parallel to each other and a second impeller region formed three-dimensionally on at least one of them. The opposing element 211 rotates about the vibration direction of the vibrating devices 101 and 102 as its axis.

[0050] In the modified example 1, the vibration of the two vibrators generates a rotational force on the opposing element 211, making it possible to increase the rotational torque of the opposing element 211.

[0051] <Modification 2> In the modified example 2, a through-hole is provided on the vibrating surface of the vibrating device of the rotating device 1, facing outwards through the inside of the vibrating device, and fluid is drawn up through this through-hole.

[0052] As shown in Figure 8A, in Modification 2, the rotating device 1 includes a vibrating device 103. In the vibrating device 103, a through hole 121 is provided on the vibrating surface perpendicular to the vibration direction, formed through the inside of the vibrating device 103 toward the outside of the vibrating device 103. The rotating device 1 is configured the same as the rotating device 1 of the above embodiment, except that the vibrating device 103 is provided with a through hole 121.

[0053] With the lower end of the vibrating device 103, including the vibrating surface, submerged in the water of the tank 50, the vibrating device 103 is vibrated, bringing the surface portion (opposing surface) of the opposing element 20, which has a parallel region and an impeller region, closer to the vibrating surface of the vibrating device 103. As a result, the opposing surface of the opposing element 20 is held in a state where it is attracted to the vibrating surface of the vibrating device 103. At this time, the pressure generated by the vibration of the vibrating surface of the vibrating device 103 creates a water flow that flows through the gap between the vibrating device 103 and the opposing element 20. In addition, an acoustic flow is generated by the vibration of the vibrating surface. The water flow and acoustic flow, etc., strike the surface portion of the opposing element 20, causing the opposing element 20 to rotate. Furthermore, the water flow, acoustic flow, and rotation of the opposing element 20 create a negative pressure in the space formed between the vibrating surface of the vibrating device 103 and the surface portion of the opposing element 20, drawing the fluid (water) into the space. As a result, a pumping effect occurs, and the fluid that flows into the space is sucked into the through-hole 121 of the vibrating surface, passes through the inside of the vibrating device 103, and is discharged to the outside.

[0054] In Modification 2, the rotating device 1 has two vibrating devices, similar to Modification 1, and each of the two vibrating devices may be provided with a through hole.

[0055] Referring to Figure 8B, the schematic configuration of Modification 2, in which the rotating device 1 has two vibrating devices, will be described. The rotating device 1 has a vibrating device 103 and a vibrating device 104. The vibrating device 104 is configured similarly to the vibrating device 103, and a through hole 122 is provided on the vibrating surface perpendicular to the vibration direction, formed through the inside of the vibrating device 104 toward the outside of the vibrating device 104.

[0056] The rotating device 1 shown in Figure 8B is configured similarly to the rotating device 1 of Modification 1, except that it is provided with through holes 121 and 122. In the rotating device 1 shown in Figure 8B, a pumping effect occurs in the spaces formed by the vibrating surfaces of the vibrating devices 103 and 104, and the two surfaces of the opposing element 211. The fluid that flows into these spaces is sucked into the through holes 121 and 122 of the vibrating surfaces, passes through the inside of the vibrating devices 103 and 104, and is discharged to the outside.

[0057] <Variation 3> In the above embodiments and modifications, the vibrating surface and opposing element of the vibrating device were operated underwater, but in modification 3, they are operated in the air.

[0058] As shown in Figure 9A, the rotating device 1 comprises a vibrating device 102 and an opposing element 212. The vibrating device 102 has a vibration surface perpendicular to the vibration direction, and the vibrating device 102 is installed so that the vibration surface faces upward in the vertical direction.

[0059] As shown in Figure 9B, the surface portion 212a of the opposing element 212 facing the vibrating surface of the vibrating device 102 has a planar region 2122 which is a plane parallel to the vibrating surface of the vibrating device 102, and an impeller region 2121 in which a three-dimensional impeller shape is formed surrounding the planar region 2122. As in the above embodiment, when the opposing element is rotated in water, it is preferable that the planar region is an edge (provided on the outer circumference of the surface portion), such as the planar region 203. On the other hand, when it is rotated in the air, as shown in Figure 9B, the planar region 2122 may be provided in the center of the surface portion 212a of the opposing element 212, or it may be provided as an edge on the outer circumference of the surface portion 212a of the opposing element 212.

[0060] By placing the counter element 212 on the vibrating surface of the vibrating device 102 and vibrating the vibrating device 102 with high-frequency vibrations such as ultrasonic vibrations, a squeeze film effect occurs on the vibrating surface of the vibrating device 102, causing the counter element 212 to float. The positive pressure generated by the squeeze film effect is applied to the impeller region 2121, generating a rotational force, and the counter element 212 rotates around the vibration direction of the vibrating device 102 as its axis. At this time, a self-centering effect occurs between the vibrating surface of the vibrating device 102 and the surface portion 212a of the counter element 212, so that the center of the vibrating surface of the vibrating device 102 and the center of the surface portion 212a of the counter element 212 become close to each other.

[0061] As shown in Figure 9C, the rotating device 1 in Modification 3 may have two vibrating devices, as in Modification 1. In the example shown in Figure 9C, the rotating device 1 comprises a vibrating device 101, a vibrating device 102, and an opposing element 213. The vibrating device 101 has a first vibrating surface perpendicular to the direction of vibration. The vibrating device 102 has a second vibrating surface perpendicular to the direction of vibration. The vibrating devices 101 and 102 are installed so that the first vibrating surface and the second vibrating surface face each other. The opposing element 213 is placed between the first vibrating surface and the second vibrating surface. The opposing element 213 is, for example, a plate shape such as a disc. The opposing element 211 has two circular surfaces. Each of the two surfaces is formed in the same shape as the surface 212a shown in Figure 9B.

[0062] Furthermore, the impeller regions on each of the two surfaces of the opposing element 213 are formed in such a shape that the rotational forces generated by the pressure applied to each of the two surfaces of the opposing element 213 do not repel each other.

[0063] In the modified example 3, the vibration of the two vibrators can generate a rotational force for the opposing element 213, making it possible to increase the rotational torque of the opposing element 213.

[0064] Furthermore, as shown in Figures 9D and 9E, in Modification 3, similar to Modification 2, a through hole formed on the vibrating surface of the vibrating device of the rotating device, facing the outside through the inside of the vibrating device, may be provided, and fluid may be drawn up through the through hole.

[0065] Figures 9D and 9E show the through-hole 121 in the vibrating device 103 and the through-hole 122 in the vibrating device 104. Positive pressure is generated by the squeeze membrane effect between the vibrating surfaces of the vibrating devices 103 and 104 and the opposing element 212 or 213, and by the rotation of the opposing element 212 or 213. As a result, a pumping effect occurs, and the fluid (air) that flows into the vicinity of the opposing element 212 or 213 is drawn into the through-hole 121 or 122 of the vibrating surface, passes through the inside of the vibrating devices 103 and 104, and is discharged to the outside.

[0066] <Modification 4> In Modification 4, an impeller region, which is a region in which a three-dimensional impeller shape is formed, is provided on the vibrating surface of the vibrating device. This impeller region on the vibrating surface may be provided in place of the impeller region on the surface of the opposing element described in the above embodiment and modification, or it may be provided together with the impeller region on the surface of the opposing element.

[0067] The impeller region provided on the vibrating surface of the vibrating device will be described with reference to Figures 10A and 10B. Figure 10A is a front view of the vibrating surface 105a of the vibrating device 105. Figure 10B is a side view of the vibrating device 105. The vibrating surface 105a of the vibrating device 105 is circular, and its diameter is formed to be the same as that of the opposing element, for example, 30 mm. Multiple notches are formed on the vibrating surface 105a of the vibrating device 105 from the circumference toward the center, thereby forming a three-dimensional impeller shape on the vibrating surface 105a. The base of these notches is inclined with respect to the planar direction of the vibrating surface 105a, and the angle of inclination is, for example, 2°. In addition, a conical recess is formed on the vibrating surface 105a with its apex at the center of the vibrating surface 105a, and the inclination of the side surface of this cone is, for example, 5° with respect to the planar direction of the vibrating surface 105a.

[0068] By bringing the opposing element close to the vibrating surface 105a and vibrating the vibrating device 105, the opposing element rotates, similar to the above embodiment and modification.

[0069] <Modification 5> In the above embodiments and modifications, an impeller shape was formed as a three-dimensional shape on the surface of the opposing element. An impeller shape is generally a vane shape that rotates a rotor by receiving fluid pressure, but the applicant's verification has revealed that even if a three-dimensional shape other than the shape widely recognized as an impeller is provided on the opposing element, the opposing element may function as a rotor depending on the three-dimensional shape. Modification 5 is an example in which a three-dimensional shape that is not generally recognized as an impeller shape is formed on the surface of the opposing element. In Modification 5, the configuration other than the opposing element may be the configuration described in the above embodiments and modifications.

[0070] In Modification 5, for example, the counter element has a surface facing the vibrating surface of the oscillator, and this surface has a parallel region facing the vibrating surface of the oscillator and a plurality of three-dimensional shapes formed to extend toward the end of the counter element. That is, the vibrating surface and the counter element may each have parallel regions facing each other in parallel. The parallel region may also be a plane. The starting point for forming the three-dimensional shape that extends toward the end of the counter element may be the inside of the counter element, in particular, the center of the counter element. That is, the three-dimensional shape may be formed from the inside of the counter element or from the center of the inside of the counter element toward the end of the counter element. The three-dimensional shape may also be formed with the same width. The parallel region is a region that, in the case of water, is thought to generate an adsorption force between the counter element and the vibrating surface of the oscillator, and in the case of air, is thought to generate a buoyant force of the counter element due to the squeeze membrane effect described above (i.e., a repulsive force between the counter element and the vibrating surface). The three-dimensional shape is a region that is thought to generate a rotational force of the counter element under the action of the fluid.

[0071] The three-dimensional shape formed to extend toward the ends of the opposing surfaces is formed, for example, by having one or more grooves or holes. The grooves may also be referred to as recesses. The holes may also be referred to as through holes. The three-dimensional shape formed on the opposing surfaces may also have convex portions.

[0072] Furthermore, while there is no limit to the number of three-dimensional shapes formed on the opposing surface, it is preferable from the viewpoint of the rotational speed of the opposing element that there are four or more on the opposing surface.

[0073] Figures 11 to 28 show examples of the shapes of the opposing elements applied in Modification 5. Figures 11 to 22 also show the measurement results of the rotational speed of the opposing elements with respect to the vibration amplitude of the vibrating device 10 when the opposing elements shown in Figures 11 to 22 are applied to the rotating device 1 described with reference to Figures 1 to 3. In the drawings described below, the symbols with "a" added to the symbol of the opposing element are symbols for the parallel region, and the symbols with "b" added are symbols for the three-dimensional shape. For example, the opposing surface of the opposing element 601 has a parallel region 601a and a three-dimensional shape 601b formed thereon.

[0074] While not particularly limited for realizing the opposing element in Modification 5, unless otherwise noted, the opposing element used for the measurements described later in Modification 5 is made of aluminum, with a diameter of 40 mm and a thickness of 2.5 mm. Furthermore, if a groove is provided on the opposing surface, the depth of the groove is 1.5 mm.

[0075] The outer circumferential shape of the opposing surface of the opposing element 601 shown in Figure 11 is circular, similar to the vibrating surface of the oscillator described above. Furthermore, the opposing surface is formed so that its ends face the ends of the vibrating surface. For example, the outer circle of the opposing surface and the outer circle of the vibrating surface are formed to have the same shape and size.

[0076] The opposing surface of the opposing element 601 has a parallel region 601a and a plurality of three-dimensional shapes 601b. The opposing element 601 has holes, which are three-dimensional shapes 601b, formed at the ends of its opposing surface. Because the holes, which are three-dimensional shapes 601b, are formed at the ends of the opposing surface of the opposing element 601, the ends are open. In other words, the three-dimensional shapes 601b formed on the opposing element 601 form slits on its opposing surface.

[0077] Furthermore, in the opposing element 601, the three-dimensional shape 601b formed on the opposing surface is formed along a plurality of radial curves extending from the center to the edge of the opposing surface. The distance from the outer circumference of the radial curve to the center of the curvature circle of the radial curve is not limited, but is, for example, 21 mm. The width of the three-dimensional shape 601b in the short-side direction is, for example, 2 mm. In the opposing element described later in Modification 5, the distance from the outer circumference of the radial curve to the center of the curvature circle of the radial curve, and the width of the three-dimensional shape in the short-side direction may be the same as in the example shown in Figure 11, unless otherwise explained.

[0078] In the opposing element 601, the parallel region is formed in the center of the opposing surface. The outer circumference of this parallel region is formed to define a concentric circle with the outer circumference of the opposing surface. In other words, the three-dimensional shape 601b (or the end of the three-dimensional shape 601b) formed on the opposing surface of the opposing element 601 is formed along a concentric circle that is concentric with the outer circumference of the opposing surface. In the example shown in Figure 11, although not limited thereto, the radius of the outer circumference of the parallel region is 27 mm.

[0079] The radius of the outer circle of the parallel region formed at the center of the opposing surfaces may be 60% to 80% of the radius of the outer circle of the opposing surfaces. More preferably, the radius of the outer circle of the parallel region may be 70% to 80% of the radius of the outer circle of the opposing surfaces.

[0080] As described above, in the opposing element 601, the three-dimensional shape 601b is formed along multiple radial curves extending from the center to the edge of the opposing surface. As a result, adjacent three-dimensional shapes 601b are not symmetrical with respect to the radial direction of the opposing surface. That is, the multiple three-dimensional shapes 601b formed on the opposing surface include multiple adjacent three-dimensional shapes 601b that are not symmetrical with respect to the radial direction of the opposing surface.

[0081] Furthermore, as shown in the example described later, a hole may be formed in the center of the opposing surface instead of the parallel region described above.

[0082] In the graph of the rotational speed measurement results of the counter element 601 shown in Figure 11, the result when the surface of the counter element shown in the figure was facing the vibrating surface of the oscillator (i.e., facing upwards) is indicated as "front," and the result when the back surface of the counter element shown in the figure was facing the vibrating surface of the oscillator is indicated as "reverse." In addition, the rotational speed was measured multiple times, and the first, second, and third measurements are indicated as "1st time," "2nd time," and "3rd time," respectively. The same applies to the graphs shown in Figures 12 to 22.

[0083] As shown in the graph in Figure 11, when the opposing element 601 was applied to the rotating device 1 described with reference to Figures 1 to 3, rotation of the opposing element 601 was confirmed.

[0084] The opposing surface of the opposing element 602 shown in Figure 12 has a parallel region 602a and a plurality of three-dimensional shapes 602b. In the opposing element 602, similar to the opposing element 601 shown in Figure 11, the three-dimensional shapes 602b formed on the opposing surface are formed along a plurality of radial curves extending from the center to the edge of the opposing surface. In the opposing element 602, the distance from the outer circumference of the radial curve to the center of the curvature circle of the radial curve is not limited, but is, for example, 16 mm. The other configurations of the opposing element 602 are the same as those of the opposing element 601.

[0085] As shown in the graph in Figure 12, when the opposing element 602 was applied to the rotating device 1, rotation of the opposing element 602 was confirmed. As can be seen from the graphs in Figures 11 and 12, at high vibration amplitudes, the opposing element 601 was found to have a higher rotational speed than the opposing element 602.

[0086] The opposing surface of the opposing element 603 shown in Figure 13 has a parallel region 603a and a plurality of three-dimensional shapes 603b. The three-dimensional shapes 603b are formed by holes and grooves. The three-dimensional shapes 603b are formed by holes along a plurality of radial curves extending from the center to the edge of the opposing surface, but the three-dimensional shapes 603b are formed by grooves at the outer peripheral edge of the opposing surface. As a result, unlike the opposing element 601, no slits are formed on the opposing surface of the opposing element 603. In the parallel region 603a, a circular parallel region is formed at the center of the opposing surface. The diameter of this circle is not limited, but is approximately 6.5 mm.

[0087] The three-dimensional shape 603b is formed along multiple radial curves extending from the center to the edge of the opposing surface. The distance from the outer circumference of the radial curve to the center of the circle of curvature of the radial curve (radius of curvature) is not limited, but for example, it is 20 mm. The radius of curvature may be the same in the opposing element described with reference to Figures 14 to 22.

[0088] As shown in the graph in Figure 13, when the opposing element 603 was applied to the rotating device 1, rotation of the opposing element 603 was confirmed.

[0089] For the opposing elements shown in Figures 14 to 22, rotation of the opposing element was confirmed when the opposing element 603 was applied to the rotating device 1.

[0090] In the opposing element 604 shown in Figure 14, the three-dimensional shape 604b is formed by grooves. The three-dimensional shape 604b is formed along multiple radial curves extending from the center to the edge of the opposing surface.

[0091] In the opposing element 605 shown in Figure 15, the three-dimensional shape 605b is formed by holes. The three-dimensional shape 605b is formed along multiple radial curves extending from the center to the edge of the opposing surface, but the three-dimensional shape 605b is not formed at the outer peripheral edge of the opposing surface.

[0092] In the opposing element 606 shown in Figure 16, the three-dimensional shape 606b is formed by grooves. The three-dimensional shape is formed along multiple radial curves extending from the center to the edge of the opposing surface, but the three-dimensional shape is not formed at the outer peripheral edge of the opposing surface.

[0093] In the opposing element 607 shown in Figure 17, the three-dimensional shape 607b is formed by grooves and holes. The three-dimensional shape 607b is formed by grooves along multiple radial curves extending from the center to the edges of the opposing surface, but the three-dimensional shape 607b is not formed at the outer peripheral edges of the opposing surface. At the center of the opposing surface, the three-dimensional shape 607b is formed in a circular shape by holes.

[0094] In the opposing element 608 shown in Figure 18, the three-dimensional shape 608b is formed by holes and grooves. The three-dimensional shape 608b is formed by holes along multiple radial curves extending from the center to the edge of the opposing surface, but the three-dimensional shape 608b is formed by grooves at the outer peripheral edge of the opposing surface. Unlike the opposing element 603, the opposing element 608 does not have a parallel region at the center of the opposing surface.

[0095] In the opposing element 609 shown in Figure 19, the three-dimensional shape 609b is formed by grooves. The three-dimensional shape 609b is formed by grooves along multiple radial curves extending from the center to the edge of the opposing surface.

[0096] In the opposing element 610 shown in Figure 20, the three-dimensional shape 610b is formed by having holes and grooves. The three-dimensional shape 610b is formed by grooves along multiple radial curves extending from the center to the edge of the opposing surface. In addition, the three-dimensional shape 610b is formed in a circular shape by holes at the center of the opposing surface.

[0097] In the opposing element 611 shown in Figure 21, the three-dimensional shape 611b is formed by holes. The three-dimensional shape 611b is formed by holes along multiple radial curves extending from the center to the edges of the opposing surface. The three-dimensional shape 611b is not formed at the outer peripheral edges of the opposing surface. In addition, a circular parallel region is provided at the center of the opposing surface.

[0098] In the opposing element 612 shown in Figure 22, the three-dimensional shape 612b is formed by grooves. The three-dimensional shape 612b is formed by grooves along multiple radial curves extending from the center to the edges of the opposing surface. The three-dimensional shape 612b is not formed at the outer peripheral edges of the opposing surface. In addition, a circular parallel region 612a is provided at the center of the opposing surface.

[0099] Although the measurement results for the opposing elements 613 to 634 shown in Figures 23 to 28 are not shown, the rotation of the opposing elements was confirmed when they were applied to the rotating device 1 described with reference to Figures 1 to 3. Clear rotation could not be confirmed for opposing elements 614, 617, and 633, but rotation was confirmed for the other opposing elements. Furthermore, the rotation of opposing elements 618 to 620 was slight. For opposing elements that rotated slightly, it is conceivable that they could rotate more by separately applying an initial rotational torque to them.

[0100] The shapes of the notable opposing elements 613 to 634 are described below. In Figures 23 to 28, the left side shows a photograph of the opposing element, and the right side shows a schematic diagram. The black three-dimensional shapes shown in the photographs are holes, and the other three-dimensional shapes are grooves.

[0101] On the opposing surfaces of the opposing elements 613 and 614, adjacent three-dimensional shapes are formed symmetrically with respect to the radial direction of the opposing surfaces.

[0102] The difference between the opposing element 615 and the opposing element 624 is that the three-dimensional shape of the opposing element 615 is formed by holes, while the three-dimensional shape 624b of the opposing element 624 is formed by grooves.

[0103] The opposing surface of the opposing element 626 has a parallel region 626a and multiple three-dimensional shapes 626b. The three-dimensional shapes 626b formed by grooves are formed over a larger area compared to other opposing elements such as opposing elements 601 to 612. Of the parallel region 626a, the central part of the opposing surface of the opposing element 626 is formed in a substantially circular shape. The opposing surface of the opposing element 627 is also formed over a large area of ​​three-dimensional shape 627b, similar to the opposing element 626. The opposing surface of the opposing element 627 differs from that of the opposing element 626 in that its central part is a three-dimensional shape formed by a hole.

[0104] The opposing surface of the opposing element 628 has a parallel region 628a and a plurality of three-dimensional shapes 628b. The three-dimensional shapes 628b are formed by convex portions.

[0105] The opposing surfaces of the opposing element 629 have a parallel region 629a and a plurality of three-dimensional shapes 629b. The three-dimensional shapes 629b are formed by a plurality of holes. The three-dimensional shapes 629b may also be formed by a plurality of grooves, or by a combination of holes and grooves.

[0106] The opposing element 631 is the same opposing element used in the modified example 6 described later. In the modified example 5, the rotation of the opposing element 631 was confirmed.

[0107] The outer circumferential shape of the opposing surface of the opposing element 633 is rectangular. The outer circumferential shape of the opposing surface of the opposing element 633 is different from the outer circumferential shape of the vibrating surface of the vibrator. Therefore, the opposing surface of the opposing element 633 is not formed so that its end faces the end of the vibrating surface. As described above, no clear rotation of the opposing element 633 could be confirmed.

[0108] The opposing surface of the opposing element 634 has a parallel region 634a and a three-dimensional shape 634b. The three-dimensional shape 634b is formed along a spiral curve extending from the center to the end of the opposing surface of the opposing element 634. The three-dimensional shape 634b may also be an Archimedean spiral. In this case, although not limited, the width of the three-dimensional shape 634b in the shorter direction may be 5 mm. There is one three-dimensional shape formed on the opposing surface of the opposing element 634. As described above, rotation of the opposing element 634 was confirmed.

[0109] <Variation 6> Modification 5 describes an example in which an opposing element with a three-dimensional shape other than an impeller shape is applied to the rotating device 1 described with reference to Figures 1 to 3 and rotated (i.e., an example in which the opposing element is rotated underwater). Modification 6 describes an example in which an opposing element with a three-dimensional shape other than an impeller shape is rotated in the air. Modification 6 is the same as Modification 3 except that a different opposing element is used than the opposing element in Modification 3. In particular, the rotating device 1 described with reference to Figure 9A is used as the rotating device.

[0110] In Modification 6, for example, the counter element has a surface facing the vibrating surface of the oscillator, and this surface has a parallel region facing the vibrating surface of the oscillator and a plurality of three-dimensional shapes formed to extend toward the end of the counter element. That is, the vibrating surface and the counter element may each have parallel regions facing each other parallel to each other. The parallel region may also be a plane. The starting point for forming the three-dimensional shape that extends toward the end of the counter element may be the inside of the counter element, in particular the center of the counter element. That is, the three-dimensional shape may be formed from the inside of the counter element or from the center of the inside of the counter element toward the end of the counter element. The parallel region is the region where, in the case of air, a levitation force of the counter element due to the squeeze membrane effect described above (i.e., a repulsive force between the counter element and the vibrating surface) is thought to occur between the counter element and the vibrating surface of the oscillator. The three-dimensional shape is the region where a rotational force of the counter element is thought to be generated by the action of a fluid.

[0111] Figures 29 and 30 show examples of the shapes of the opposing elements 701 to 708 applied in Modification 6. The method of manufacturing the opposing elements in Modification 6 is not limited, but the opposing elements shown in Figures 29 and 30 are made of ABS resin and were manufactured using a 3D printer. In the drawings described below, the reference numerals with "a" added to the reference numeral of the opposing element indicate the parallel region, and the reference numerals with "b" added indicate the three-dimensional shape. For example, the opposing surface of opposing element 701 has a parallel region 701a and a three-dimensional shape 701b formed thereon.

[0112] The opposing surface of the opposing element 701 has a parallel region 701a and a three-dimensional shape 702b. The parallel region 701a has a central part 701a1, a beam 701a2, and an outer periphery 701a3. The central part 701a1 is the central portion of the opposing surface. The outer periphery 701a3 is the outer portion of the opposing surface. The beam 701a2 is the region connecting the central part 701a1 and the outer periphery 701a3. The three-dimensional shape 702b is formed by holes. Opposing elements 702 to 708 also have a parallel region and a three-dimensional shape. Furthermore, the parallel region has a central part, a beam, and an outer periphery. Opposing elements 701 to 708 each have a different number of beams, ranging from 2 to 9.

[0113] In a beam, the two sides connecting the center and outer periphery of opposing surfaces may or may not be parallel to each other. If they are not parallel, for example, the angle formed by the longitudinal intersection of the two sides of the beam 704a2 of the opposing element 704 is 10°. Also, the diameter of the center 704a1 of the opposing element 704 is 10.5 mm. The diameter of the outer circle of the outer periphery 704a3 of the opposing element 704 is 40 mm, and the diameter of the inner circle is 30 mm.

[0114] Figure 31 shows the relationship between the number of opposing beams, their mass, the area of ​​the holes, and the ratio of the area of ​​the holes to the total area, as shown in Figure 29.

[0115] Figure 32 shows the relationship between the number of opposing beams shown in Figure 29, the ratio of the hole area to the total area, the rotation speed of the opposing beams, and the amplitude at the rear end of the oscillator.

[0116] Figure 33 shows the relationship between the number of beams in the opposing element shown in Figure 29 and the rotation speed. According to Figures 32 and 33, the rotation speed of the opposing element with 6 beams (i.e., opposing element 708) is faster than that of the other opposing elements.

[0117] <Other variations> A motor having the rotating device 1 in the above embodiment and the above modification may be configured. In this case, the motor may be driven by rotating the opposing element.

[0118] A pump having the rotating device 1 in the above embodiment and the above modification may be configured, and the pump may be driven by rotating the opposing element. In this case, the rotating device 1 may provide the function of a pump by drawing in fluid through the through hole provided in the vibrating device of the rotating device 1 and sending it out to the outside of the vibrating device.

[0119] In the above embodiment, the opposing element 20 of the rotating device 1 was configured to rotate around the vibration direction of the vibrating device 10 as its axis. However, as a modification, the opposing element 20 may be fixed so as not to rotate. For example, as a modification of the rotating device 1 having a vibrating device 10 (vibrator) and an opposing element 20 as shown in Figure 1, the opposing element 20 may have an opposing surface facing the vibrating surface, and may be fixed so that the vibrating surface and the opposing surface are spaced apart from each other. Here, "fixed" may mean that the opposing element 20 does not rotate at a predetermined position and is immovable. The opposing element 20 may be fixed, for example, via a support member or by being integrally formed with a fixed member. By fixing the opposing element 20, the position of the center of the vibrating surface and the position of the center of the surface portion of the opposing element 20 may be in close proximity. By fixing the opposing element 20, the distance between the vibrating surface and the opposing surface is not limited, but may be set to 10 to 500 microns. The vibrating surface and the opposing surface may have the same shape (for example, circular). Furthermore, in this modified example, the rotating device 1 may have, similar to the example shown in Figure 1, a parallel region where the vibrating surface and the opposing surface are parallel to each other, and an impeller region formed three-dimensionally on at least one of them. A pump having the rotating device in this modified example may also be constructed. This pump may be formed, for example, by providing a through hole in the vibrating device, as in the example in Figure 8A. In this modified example, since the opposing element is fixed, it is possible to suppress the pressure reduction due to the pumping effect that occurs in the space formed between the vibrating surface and the surface portion of the opposing element 20, compared to the case where the opposing element rotates.

[0120] While embodiments and modifications have been described, those skilled in the art can make various further modifications and alterations based on these embodiments and modifications, and these modifications and alterations are included in these embodiments. The functions and other elements included in each means, etc., can be rearranged in a way that is not logically contradictory, and multiple means, steps, etc., can be combined into one or separated. [Explanation of Symbols]

[0121] 1. Rotating device 10 Vibration device 11. Oscillator 12 horns 20,211,212,213 Opposites 30 Fixtures 40 Z-axis stage 50 aquariums 60 Temperature probes 101,102,103,104,105 Vibration device

Claims

1. A first oscillator having a first vibration plane perpendicular to the direction of vibration, A second oscillator having a second vibration plane perpendicular to the vibration direction, An opposing element having a first opposing surface facing the first vibrating surface and a second opposing surface facing the second vibrating surface, and rotating about the vibration direction of the first and second vibrating elements by the vibration of the first and second vibrating elements. Equipped with, It does not have a member that supports the opposing element, The first vibrating surface and the first opposing surface each have a first parallel region that faces each other parallel to each other and a first impeller region formed three-dimensionally on at least one of them. A rotating device wherein the second vibrating surface and the second opposing surface each have a second parallel region that faces each other parallel to each other and a second impeller region formed three-dimensionally on at least one of them.

2. A motor having the rotating device described in claim 1.

3. A pump having the rotating device described in claim 1.

4. A vibrator having a vibration plane perpendicular to the direction of vibration, An opposing surface having a surface facing the vibrating surface, and an opposing surface that rotates about the vibration direction of the vibrator as a result of the vibration of the vibrator, Equipped with, It does not have a member that supports the opposing element, The vibrating surface and the opposing surface each have parallel regions that are parallel to each other. A rotating device wherein the opposing surface has one or more three-dimensional shapes formed to extend toward the end of the opposing surface, and the opposing element rotates without contacting the vibrator.

5. The rotating device according to claim 4, wherein the three-dimensional shape is formed by having one or more grooves or holes.

6. The rotating device according to claim 4 or 5, wherein the plurality of three-dimensional shapes include a plurality of adjacent three-dimensional shapes that are not symmetrical with respect to the radial direction of the opposing surfaces.

7. The rotating device according to any one of claims 4 to 6, wherein four or more three-dimensional shapes are formed on the opposing surfaces.

8. The rotating device according to any one of claims 4 to 7, wherein a hole is formed in the center of the opposing surface.

9. The rotating device according to any one of claims 4 to 7, wherein the parallel region is formed in the center of the opposing surfaces.

10. The rotating device according to claim 9, wherein the radius of the outer circle of the parallel region formed in the center of the opposing surfaces is 60% to 80% of the radius of the outer circle of the opposing surfaces.

11. The rotating device according to claim 9 or 10, wherein the three-dimensional shape has slits formed on the opposing surfaces.

12. The rotating device according to any one of claims 4 to 11, wherein the outer circumferential shapes of the vibrating surface and the opposing surface are each circular, and the end of the vibrating surface faces the end of the opposing surface.

13. The rotating device according to any one of claims 4 to 12, wherein the three-dimensional shape is formed along a plurality of radial curves extending from the center to the end of the opposing surface.

14. The rotating device according to any one of claims 4 to 12, wherein the three-dimensional shape is formed along a spiral curve extending from the center to the end of the opposing surface.

15. The rotating device according to any one of claims 4 to 12, wherein the three-dimensional shape is formed along concentric circles that are concentric with the outer circumference circle of the opposing surface of the opposing element.

16. A motor having a rotating device according to any one of claims 4 to 15.

17. A pump having a rotating device according to any one of claims 4 to 15.

Images