Stage equipment, press equipment, and press method

Abstract

To provide a tilt adjustment technology that can be used under higher loads. [Solution] A stage device comprising a base member, a tilt adjustment means supported by the base member, and a stage member supported by the tilt adjustment means and whose inclination relative to the base member is adjusted by the tilt adjustment means, wherein the base member, the tilt adjustment means and the stage member are arranged in a first direction, the tilt adjustment means comprises a plurality of tilt adjustment members arranged in the first direction, and a plurality of bearings arranged in the first direction and supporting the plurality of tilt adjustment members so as to be rotatable about the first direction relative to the base member and the stage member, the plurality of tilt adjustment members have inclined surfaces inclined with respect to a second direction perpendicular to the first direction, and the plurality of bearings are thrust bearings that support loads in the first direction.

Description

Technical Field

[0001] The present invention relates to a stage device, a press device, and a press method.

Background Art

[0002] As a press device, a device (coining device) for pressing and flattening bumps formed on electronic components such as substrates and IC chips is known. Patent Document 1 discloses a press device that applies a pressing force to the top of a bump in the thickness direction of a substrate using a lower press head and an upper press head. In such a press device, the inclination (parallelism) of each pressing surface of the lower press head and the upper press head that sandwich the substrate is important. The press device of Patent Document 1 is provided with a function for adjusting the inclination of the upper surface that serves as the pressing surface of the lower press head, thereby improving the parallelism with respect to the lower surface that serves as the pressing surface of the upper press head.

Prior Art Documents

Patent Documents

[0003] [[ID=2,1]]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The performance of semiconductor chips has been improving, and there is a trend towards an increase in the bump area due to an increase in chip size and a reduction in bump size. With the increase in chip size, higher loads have been required for press devices. For example, conventionally, the area for pressing bumps is about 50 mm square and the pressing force is about 30 kN. In the future, the area for pressing bumps will expand to 100 mm square or more, and the pressing force will also be required to reach 80 kN. The bump size is also expected to be reduced from, for example, a conventional diameter of 120 μm to 60 μm in the future, and the accuracy of the height of the bumps after pressing is also required to be higher than before.

[0005] The object of the present invention is to provide a tilt adjustment technology that can be used under higher loads. [Means for solving the problem]

[0006] According to the present invention, Base member and The tilt adjustment means supported by the base member, A stage member supported by the tilt adjustment means, the tilt of which relative to the base member is adjusted by the tilt adjustment means, A stage apparatus equipped with, The base member, the tilt adjustment means, and the stage member are arranged in a first direction. The aforementioned tilt adjustment means is A plurality of tilt adjustment members arranged in the first direction, Arranged in the first direction, Furthermore, they are arranged between the plurality of tilt adjustment members and between the tilt adjustment members and the first press head, The plurality of tilt adjustment members are supported by a plurality of bearings that allow them to rotate freely around the first direction relative to the base member and the stage member, The plurality of inclination adjusting members have inclined surfaces that are inclined with respect to a second direction perpendicular to the first direction, The plurality of bearings are thrust bearings that support the load in the first direction. the law of nature , The aforementioned plurality of tilt adjustment members are A first inclination adjustment member having a first inclined surface as the inclined surface, The device includes a second inclination adjusting member having a second inclination surface opposite to the first inclination surface, The plurality of bearings include bearings positioned between the first inclined surface and the second inclined surface. A stage device characterized by the above is provided. [Effects of the Invention]

[0007] According to the present invention, it is possible to provide a tilt adjustment technology that can be used under higher loads. [Brief explanation of the drawing]

[0008] [Figure 1] A schematic diagram of a press machine according to one embodiment of the present invention. [Figure 2]External view of the mechanical part of the stage device according to an embodiment of the present invention. [Figure 3] Cross-sectional view taken along line A-A in FIG. 2. [Figure 4] (A) to (C) are cross-sectional views taken along line B-B, line C-C, and line D-D in FIG. 2, respectively. [Figure 5] Explanatory drawing of the inclination adjustment member. [Figure 6] Block diagram of the control unit of the press device in FIG. 1. [Figure 7] Flowchart showing an example of the process executed by the control unit in FIG. 6. [Figure 8] Operation explanatory drawing of the press device in FIG. 1. [Figure 9] Operation explanatory drawing of the press device in FIG. 1.

Mode for Carrying Out the Invention

[0009] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the scope of the claims. Although a plurality of features are described in the embodiments, not all of these plurality of features are necessary, and the plurality of features may be arbitrarily combined. Further, in the accompanying drawings, the same or similar configurations are denoted by the same reference numerals, and redundant descriptions are omitted.

[0010] <First Embodiment> (Outline of the Press Device) FIG. 1 is a schematic diagram of a press device 10 according to an embodiment of the present invention. In each figure, arrows X, Y, and Z indicate directions that intersect each other, and in this embodiment, they are orthogonal. The X direction and the Y direction are horizontal directions, and the Z direction is a vertical direction.

[0011] The press device 10 includes a lower press head 11 and an upper press head 12. The press head 11 is supported by the leg portion 13 via the stage device 1 according to an embodiment of the present invention. The press head 12 is supported by the pressing unit 14. The pressing unit 14 is supported by the frame 15 and raises and lowers the press head 12 in the Z direction. The pressing unit 14 is, for example, an electric cylinder with a motor as a drive source.

[0012] The press head 11 includes a head portion 111 and a heater portion 112. The head portion 111 has a contact surface 111a that contacts the workpiece 100. In the case of the present embodiment, the contact surface 111a is a horizontal flat surface (mounting surface) on which the workpiece 100 is placed. A heater 112a is provided in the heater portion 112. The heater 112a is, for example, an electric - heat conversion element. The heater portion 112 heats the workpiece 100 by heating the press head 11.

[0013] The press head 12 includes a head portion 121 and a heater portion 122. The head portion 121 has a contact surface 121a that contacts the workpiece 100. In the case of the present embodiment, the contact surface 121a is a horizontal flat surface (pressing surface) that presses the workpiece 100 placed on the contact surface 111a. A heater 122a is provided in the heater portion 122. The heater 122a is, for example, an electric - heat conversion element. The heater portion 122 heats the workpiece 100 by heating the press head 12.

[0014] The workpiece 100 is, as an example, a circuit board on which a semiconductor package is mounted. The workpiece 100 includes a substrate 101 and a plurality of bumps (solder balls) 102 on the substrate 101. The press device 10 sandwiches the workpiece 100 between the press head 11 and the press head 12 and presses the substrate 101 and the plurality of bumps 102 in the thickness direction of the substrate 101 by the pressing unit 14 while heating. Thereby, the plurality of bumps 102 are crushed to make their heights uniform from the substrate 101. By making the heights of the plurality of bumps 102 uniform, it is possible to prevent connection failures with a semiconductor package connected to the circuit board 101 via the bumps 102 in subsequent working processes.

[0015] (Stage equipment) If the parallelism between the contact surface 111a and the contact surface 121a is low, variations may occur in the height of the bumps 102 on the substrate 101. As chip sizes increase, the press device 10 is required to handle even higher loads, and the accuracy of the height of the bumps 102 after pressing is also required to be higher.

[0016] The stage device 1 has a structure that can withstand high loads while achieving high-precision tilt accuracy. Figure 2 is an external view of the mechanical part of the stage device 1. The stage device 1 comprises a base member 2, a tilt adjustment unit 3, a stage member 4, and drive units 7 and 8. The press head 11 is mounted on the stage member 4. The tilt adjustment unit 3 adjusts the tilt of the contact surface 111a of the press head 11 together with the stage member 4. This adjustment improves the parallelism between the contact surface 111a of the press head 11 and the contact surface 121a of the press head 12. Drive units 7 and 8 drive the tilt adjustment unit 3.

[0017] Refer to Figures 3, 4(A) to 4(C) in addition to Figure 2. Figures 3, 4(A) to 4(C) are cross-sectional views along lines AA, BB, CC, and DD of Figure 2.

[0018] The base member 2 is a member that supports each component of the stage device 1, and in this embodiment, it is a rectangular plate-shaped member in plan view. The stage member 4 is a circular member in plan view, and its upper surface constitutes the support surface for the object to be tilted. The stage member 4 is surrounded by an annular anti-rotation member 9. The anti-rotation member 9 is fixed to the base member 2 via a pair of support members 90 that are spaced apart in the Y direction. The anti-rotation member 9 has a plurality of slits 9a that extend radially outward from its inner circumferential surface and penetrate the anti-rotation member 9 in the thickness direction. In this embodiment, four slits 9a are formed at equal pitches in the circumferential direction of the rotation center Z1 in the Z direction, which will be described later. The rotation center Z1 passes through the center of the stage member 4.

[0019] The stage member 4 is provided with multiple shafts 4a that protrude radially from the rotation center Z1. Each shaft 4a enters one of the slits 9a. As a result, the rotation of the stage member 4 around the rotation center Z1 relative to the base member 2 is restricted.

[0020] In this embodiment, the shaft 4a is provided on the stage member 4 side and the slit 9a is provided on the anti-rotation member 9 side, but the relationship between these may be reversed.

[0021] The tilt adjustment unit 3 is positioned between the base member 2 and the stage member 4, and these are arranged in the Z direction. The tilt adjustment unit 3 is a mechanism for adjusting the inclination of the stage member 4 relative to the base member 2, and comprises a plurality of tilt adjustment members 31 and 32 and a plurality of thrust bearings 33 to 35. In this embodiment, two tilt adjustment members 31 and 32 are provided, but the number of tilt adjustment members may be three or more. Also, in this embodiment, three thrust bearings 33 to 35 are provided corresponding to the number of tilt adjustment members 31 and 32, but the number of thrust bearings can be appropriately selected in accordance with the number of tilt adjustment members.

[0022] The inclination adjustment members 31 and 32 and thrust bearings 33 to 35 are cylindrical or annular members centered on the rotation center Z1, and a cavity 36 is formed inside the inclination adjustment unit 3. Of the inclination adjustment members 31 and 32, inclination adjustment member 31 is positioned on the base member 2 side in the Z direction, and inclination adjustment member 32 is positioned on the stage member 4 side in the Z direction.

[0023] The thrust bearings 33-35 are members that independently support the tilt adjustment members 31 and 32 so that they can rotate freely around the rotation center Z1. In this embodiment, the thrust bearings 33-35 are thrust rolling bearings having a plurality of rolling elements R arranged at equal pitches around the rotation center Z1 and a retainer H that holds the plurality of rolling elements R. In this embodiment, the rolling elements R are rollers, but they may also be spheres. The thrust bearings 33-35 may also be sliding bearings without rolling elements.

[0024] The tilt adjustment members 31 and 32 and thrust bearings 33 to 35 are arranged alternately in the Z direction and overlap in the Z direction. Thrust bearing 33 is positioned between the base member 2 and the tilt adjustment member 31, and its rolling elements R overlap both the base member 2 and the tilt adjustment member 31 in the Z direction. Thrust bearing 34 is positioned between the tilt adjustment member 31 and the tilt adjustment member 32, and its rolling elements R overlap both the tilt adjustment member 31 and the tilt adjustment member 32 in the Z direction. Thrust bearing 35 is positioned between the tilt adjustment member 32 and the stage member 4, and its rolling elements R overlap both the tilt adjustment member 32 and the stage member 4 in the Z direction. Since the load in the Z direction on the stage member 4 is transmitted to the base member 2 via each rolling element R, the durability against high loads in the Z direction, i.e., the pressing load of the workpiece 100, can be improved.

[0025] Refer to Figure 5 in addition to Figures 2 to 4(C). Figure 5 is a cross-sectional view of the inclination adjustment members 31 and 32. The inclination adjustment members 31 and 32 are disc-shaped members having a circular outer surface. The inclination adjustment member 31 has a contact surface 311 on its bottom side that contacts the rolling element R of the thrust bearing 33. The contact surface 322 forms a plane 311a perpendicular to the rotation center Z1. Plane 311a is a plane parallel to the XY plane. The inclination adjustment member 31 has a contact surface 312 that receives the thrust bearing 34 on its inside and contacts the rolling element R. The contact surface 312 forms a plane 312a that intersects the rotation center Z1. Plane 312a is an inclined surface tilted by an angle α with respect to the plane perpendicular to the rotation center Z1 (XY plane). The outer circumferential surface of the inclination adjustment member 31 has a recess 313 around which the belt 72b (described later) is wrapped, and a contact surface 314 against which the roller 73 makes contact.

[0026] The inclination adjustment member 32 receives the thrust bearing 35 on its inner side and has a contact surface 322 that contacts the rolling element R. The contact surface 322 forms a plane 322a that intersects the rotation center Z1. The inclination adjustment member 32 has a contact surface 321 on its bottom side that contacts the rolling element R of the thrust bearing 34. The contact surface 321 forms a plane 321a that intersects the rotation center Z1. The plane 321a is an inclined surface that is tilted by an angle β with respect to a plane parallel to the plane 322a. The outer circumferential surface of the inclination adjustment member 32 has a recess 323 around which the belt 82b (described later) is wound, and a contact surface 324 against which the roller 73 contacts. The contact surface 324 has an arc shape.

[0027] The tilt adjustment members 31 and 32 each have inclined contact surfaces 312 and 321, respectively. The orientation of the tilt adjustment member 32 (the inclination relative to the Z direction and the direction of the inclination around the Z axis) changes depending on the combination of rotational phases of the tilt adjustment members 31 and 32 around the rotation center Z1. This makes it possible to change the inclination and direction of the stage member 4, that is, the inclination and direction of the contact surface 111a of the press head 11.

[0028] Depending on the combination of rotational phases, the tilt adjustment member 32 can be positioned such that, for example, its plane 322a is perpendicular to the rotation center Z1 (the XY plane). In this case, the contact surface 111a of the press head 11 is parallel to the XY plane (horizontal plane). Depending on the combination of rotational phases, the tilt adjustment member 32 can be positioned such that, for example, its plane 322a is tilted by an angle α+β with respect to the XY plane. In this case, the contact surface 111a of the press head 11 is tilted by an angle α+β with respect to the XY plane (horizontal plane).

[0029] Angles α and β are, for example, angles within the range of 0.1 degrees to 0.5 degrees. Angles α and β may be the same or different.

[0030] Refer to Figures 2 and 4(A) to 4(C). The drive unit 7 is a mechanism that rotates the tilt adjustment member 31 around the rotation center Z1. The drive unit 7 comprises a motor 71 as a drive source and a transmission mechanism 72 that is driven by the driving force of the motor 71 and transmits the driving force of the motor 71 to the tilt adjustment member 31. The motor 71 is supported at one end of the base member 2 in the X direction, and its rotation axis direction is in the Z direction. The motor 71 is provided with a sensor (not shown) that detects the amount of rotation, and the rotation phase of the tilt adjustment member 31 can be determined from the detection result of the sensor. In this embodiment, the transmission mechanism 72 is a belt drive mechanism. However, other drive force transmission mechanisms such as a gear mechanism may be used as the transmission mechanism 72.

[0031] The transmission mechanism 72 includes a pulley 72a attached to the rotation shaft of the motor 71 and an endless belt 72b wrapped between the pulley 72a and the recess 313 of the tilt adjustment member 31. A pair of rollers 73 that guide the rotation of the tilt adjustment member 31 are rotatably supported on the base member 2 around the Z axis. The pair of rollers 73 are positioned between the rotation center Z1 and the rotation shaft of the motor 71 in the X direction, spaced apart in the Y direction, and in contact with the contact surface 314 of the tilt adjustment member 31. The rotation center of the tilt adjustment member 31 is maintained at the rotation center Z1 by the tension of the belt 72b and the contact surface 314 with the pair of rollers 73.

[0032] The drive unit 8 is a mechanism that rotates the tilt adjustment member 32 around the rotation center Z1. The drive unit 8 comprises a motor 81 as a drive source and a transmission mechanism 82 that is driven by the driving force of the motor 81 and transmits the driving force of the motor 81 to the tilt adjustment member 32. The motor 72 is supported at the other end of the base member 2 in the X direction, and its rotation axis direction is in the Z direction. The motor 81 is provided with a sensor (not shown) that detects the amount of rotation, and the rotation phase of the tilt adjustment member 32 can be determined from the detection result of the sensor. In this embodiment, the transmission mechanism 82 is a belt drive mechanism. However, other drive force transmission mechanisms such as a gear mechanism may be used as the transmission mechanism 82.

[0033] The transmission mechanism 82 includes a pulley 82a attached to the rotation shaft of the motor 81 and an endless belt 82b wrapped between the pulley 82a and the recess 323 of the tilt adjustment member 32. A pair of rollers 83 that guide the rotation of the tilt adjustment member 32 are rotatably supported on the base member 2 via a support member 84. The pair of rollers 83 are located between the rotation center Z1 and the rotation shaft of the motor 81 in the X direction, spaced apart in the Y direction, and in contact with the contact surface 324 of the tilt adjustment member 32.

[0034] The tilt adjustment member 32 maintains its rotation center at the rotation center Z1 due to the tension of the belt 82b and the contact surface 324 with a pair of rollers 83. As described above, the orientation of the tilt adjustment member 32 can change depending on the combination of rotation phases of the tilt adjustment member 31 and the tilt adjustment member 32 around the rotation center Z1. For this reason, the support member 84 supports the roller 83 in an orientation where the rotation center of the roller 83 is tilted with respect to the Z axis. By bringing the roller 83, which is tilted with respect to the Z axis, into contact with the arc-shaped contact surface 324, the contact point moves in accordance with the change in the orientation of the tilt adjustment member 32, and its rotation center can be maintained at the rotation center Z1. Strictly speaking, the rotation centers of the tilt adjustment member 32 and the bearings 34 and 35 are slightly tilted with respect to the Z direction due to the change in the orientation of the tilt adjustment member 32, but rotation around the rotation center Z1 includes this range of tilt.

[0035] Refer to Figures 2 to 4(C). The movable unit 5 and multiple tilt detection sensors 6 are arranged in the cavity 36. By arranging the movable unit 5 and multiple tilt detection sensors 6 in the cavity 36, the empty space of the tilt adjustment unit 3 can be used as space for placing components, thereby enabling miniaturization of the stage device 1.

[0036] The moving unit 5 is a moving mechanism that moves the stage member 4 in the Z direction. In this embodiment, the moving unit 5 is an extendable actuator that extends and retracts in the Z direction, and is in particular an air cylinder having a cylinder portion 51 and a rod portion 52. The rod portion 52 is inserted into the cylinder portion 51 so as to be movable in the Z direction, and the total length of the moving unit 5 in the Z direction changes depending on the amount of movement of the rod portion 52 relative to the cylinder portion 51. The cylinder portion 51 is supported by the base member 2, and the moving unit 5 is arranged such that the axis of the rod portion 52 is located on the rotation center Z1.

[0037] The upper end of the rod portion 52 and the stage member 4 are connected via a universal joint 53, and the connection between the rod portion 52 and the stage member 4 is maintained without resisting the tilt of the stage member 4 by the tilt adjustment unit 3.

[0038] The moving unit 5 raises and lowers the stage member 4 between a support position in which the stage member 4 is supported by the tilt adjustment unit 3 and a separated position in which the stage member 4 is spaced higher and further away from the tilt adjustment unit 3 than the support position. In this embodiment, at the support position, the stage member 4 is seated on the thrust bearing 35. At the support position, the moving unit 5 is driven to the contraction side, allowing the tilt adjustment unit 3 to be compressed in the Z direction between the base member 2 and the stage member 4. This also brings the tilt adjustment members 31 and 32 and the thrust bearings 33 to 35 into close contact in the Z direction, stabilizing the tilt of the stage member 4 adjusted by the tilt adjustment unit 3.

[0039] At the separated position, the stage member 4 is not constrained by the tilt adjustment unit 3 and can tilt freely around the universal joint 53. The stage member 4 can be made to conform to the target object of the tilt. In this embodiment, as will be described later, the parallelism between the two is improved by bringing the contact surface 111a of the press head 11 into contact with the contact surface 121a of the press head 12, thereby making the contact surface 111a conform to the tilt of the contact surface 121a.

[0040] In this embodiment, the stage member 4 is configured to seat on the thrust bearing 35 in the support position and to move away from the thrust bearing 35 in the separation position, but other configurations are also possible. For example, an intermediate member such as an elastic member may be interposed between the stage member 4 and the thrust bearing 35. The intermediate member may contact both the stage member 4 and the thrust bearing 35 when the stage member 4 is in either the support position or the separation position, or it may be sandwiched between them in a compressed state. In the support position, the compression state of the intermediate member is strengthened by driving the movement unit 5 to the contraction side, allowing the tilt adjustment unit 3 to support and restrain the stage member 4. In the separation position, the compression state of the intermediate member is weakened or made substantially natural by driving the movement unit 5 to the extension side, allowing the stage member 4 to tilt freely around the universal joint 53 without being restrained by the tilt adjustment unit 3.

[0041] In this embodiment, the tilt detection sensor 6 is a contact-type linear displacement sensor. A probe 62 is supported so as to be movable in the Z direction relative to the sensor body 61, and the amount of displacement is detected by the position of the probe 62 relative to the sensor body 61. The sensor body 61 is supported by a cylindrical support 37 having an arc-shaped cross-section.

[0042] The probe 62 is biased upward in the Z direction and contacts the bottom surface of the stage member 4. In this embodiment, three tilt detection sensors 6 are arranged at different positions in the circumferential direction of the rotation center Z1, and the positions in the Z direction at three locations on the bottom surface of the stage member 4 are detected. The tilt of the stage member 4 can be calculated from these three positions.

[0043] (Control unit) Figure 6 is a block diagram of the control unit 16 of the press machine 10. The control unit 16 is an electronic circuit including a processing unit 161, a memory unit 162, and an interface (I / F) 163. The processing unit 161 is a processor, such as a CPU. The memory unit 162 is a storage device such as a semiconductor memory. The I / F 163 includes an input / output interface and a communication interface with external devices. The memory unit 162 stores programs executed by the processing unit 161 and data used by the processing unit 161 for processing. The processing unit 161 controls the actuator 165 based on instructions from a higher-level device and detection results from sensors 164. Sensors 164 include a tilt detection sensor 6, a sensor for detecting the amount of rotation of motor 71, and a sensor for detecting the amount of rotation of motor 81. The actuator 165 includes motor 71, the air supply source and valves for the moving unit 5 and the pressing unit 14.

[0044] (Control example) This section describes an example of control performed by the processing unit 161 of the control unit 16. Here, we describe the parallelism adjustment process of the press heads 11 and 12, which is performed before the press operation on the workpiece 100. Figure 7 is a flowchart of the parallelism adjustment process performed by the processing unit 161. Figures 8 and 9 are explanatory diagrams of the operation of the press device 10 during the parallelism adjustment process.

[0045] In step S1, the position of the press head 12 relative to the press head 11 is adjusted. The pressing unit 14 lowers the press head 12 to a position where the contact surfaces 121a and 111a are separated by a predetermined distance, as shown in state ST1 in Figure 8.

[0046] In step S4, a tracing motion is performed. Here, as shown in state ST2 in Figure 8, the moving unit 5 is driven to raise the stage member 4 to a separated position, bringing the contact surface 111a of the press head 11 into contact with the contact surface 121a of the press head 11. The tilt of the stage member 4 can be freely changed around the universal joint 53. Therefore, the entire stage member 4 and press head 11 tilt in accordance with the tilt of the contact surface 121a. That is, the contact surfaces 121a and 111a become parallel to each other.

[0047] In step S3, the tilt of the stage member 4 is measured with the contact surface 111a in contact with the contact surface 121a. The detection result from the tilt detection sensor 6 is obtained, and the tilt of the stage member 4 is calculated.

[0048] In step S4, as shown in state ST3 in Figure 8, the stage member 4 is lowered to the support position by driving the moving unit 5. As a result, the press head 111 also lowers, and its contact surface 111a separates from the contact surface 121a of the press head 12.

[0049] In step S5, the inclination of the stage member 4 is measured. With the stage member 4 in the support position, the detection result from the inclination detection sensor 6 is acquired, and the inclination of the stage member 4 is calculated.

[0050] In step S6, the inclination calculated in step S3 is set as the target value for the inclination of the stage member 4 (contact surface 111a). Also, based on the inclination of the stage member 4 calculated in step S3 and the inclination of the stage member 4 calculated in step S5, the control amounts for the rotational phases of the tilt adjustment members 31 and 32 (the control amounts for the motors 71 and 81) are set. The control amounts are set by calculating the combination of rotational phases of the tilt adjustment members 31 and 32 necessary to eliminate the difference between the inclination of the stage member 4 calculated in step S3 and the inclination of the stage member 4 calculated in step S5.

[0051] In step S7, the inclination of the stage member 4, i.e., the contact surface 111a of the press head 11, is adjusted. Here, with the stage member 4 in the support position as shown in state ST4 of Figure 9, the motors 71 and 81 are driven to rotate the inclination adjustment members 31 and 32, according to the control amount set in step S6.

[0052] In step S8, as shown in state ST5 in Figure 9, the tilt of the stage member 4 is measured again while the stage member 4 is in the support position to confirm the effect of the adjustment. The detection result from the tilt detection sensor 6 is obtained and the tilt of the stage member 4 is calculated. In step S9, it is determined whether the measurement result from step S8 is within the acceptable range relative to the target value set in step S6. If the measurement result is within the acceptable range, the process ends.

[0053] If the value is outside the acceptable range, the process proceeds to step S10. In step S10, the rotational phases of the tilt adjustment members 31 and 32 (the control amounts of motors 71 and 81) are set again based on the tilt of the stage member 4 calculated in step S8 and the target value set in step S6. The control amounts are set by calculating the combination of rotational phases of the tilt adjustment members 31 and 32 necessary to eliminate the difference between the tilt of the stage member 4 calculated in step S8 and the target value set in step S6. After that, the process returns to step S7, where the same process is performed.

[0054] Through the above process, the parallelism between the contact surface 111a of the press head 11 and the contact surface 121a of the press head 12 is adjusted with high precision. After that, a pressing operation is performed on the workpiece 100.

[0055] <Second Embodiment> In the first embodiment, the tracing operation in step S2 sets a target value for the inclination of the stage member 4 (contact surface 111a), and also sets the initial control amount for each rotation phase of the tilt adjustment members 31 and 32 (step S6). However, control without tracing operation is also possible. For example, the height of the bump 102 of the workpiece 100 that has actually undergone pressing operation is measured. Then, the target value for the inclination of the stage member 4 (contact surface 111a) and the control amount for each rotation phase of the tilt adjustment members 31 and 32 are set based on the measurement result, and these are instructed to the control unit 16 via external input. The substrate 101 of the workpiece 100 may have variations in thickness. By determining the target value and initial control amount based on the measured value of the height of the bump 102, it is possible to accommodate such variations in the substrate 101.

[0056] <Third Embodiment> In the first embodiment, the tilt detection sensor 6 detects the tilt of the stage member 4 and adjusts the parallelism between the contact surface 111a of the press head 11 and the contact surface 121a of the press head 12. However, the detection target may be the contact surface 111a or the contact surface 121a, or it may be another reference part of the press head 11 or the press head 12. The tilt of the contact surface 111a may be adjusted by the tilt adjustment unit 3 according to the detection result. The tilt detection sensor 6 may be a non-contact type laser displacement sensor or a 3D measurement sensor, etc.

[0057] <Other Embodiments> In the first embodiment, the press unit 14 moves the press head 12 to press the workpiece 100. However, the press head 11 may be moved to press the workpiece 100, or both the press heads 11 and 12 may be moved to press the workpiece 100.

[0058] In the first embodiment, heaters were provided on the press heads 11 and 12 respectively (heater sections 112 and 122), but a heater may be provided on either one of them.

[0059] In the first embodiment, the stage device 1 is provided on the side of the press head 11 to adjust the inclination of the contact surface 111a. However, the stage device 1 may also be inverted and provided on the side of the press head 12 to adjust the inclination of the contact surface 121a.

[0060] In the first embodiment, the stage device 1 was applied to the press device 10, but the stage device 1 can also be applied to other devices.

[0061] In the first embodiment, the adjustment operation of the tilt adjustment unit 3 is automated by the drive units 7 and 8, but it is also possible to configure the system so that the adjustment operation is performed manually without the drive units 7 and 8.

[0062] Furthermore, the present invention can also be realized by supplying a program that implements one or more of the functions of the above-described embodiments to a system or device via a network or storage medium, and by having one or more processors in the computer of that system or device read and execute the program. It can also be realized by a circuit (e.g., an ASIC) that implements one or more functions.

[0063] The technical ideas derived from this disclosure are not limited to the exemplary embodiments disclosed, but are intended to encompass various modifications of the exemplary embodiments, or substitutions with equivalent structures or functions. The scope of the following claims should be interpreted in the broadest way to encompass all such modifications and equivalent structures and functions. [Explanation of Symbols]

[0064] 1 Stage device, 2 Base member, 3 Inclination adjustment unit, 4 Stage member, 10 Press device

Claims

1. Base member and The tilt adjustment means supported by the base member, A stage member supported by the tilt adjustment means, the tilt of which relative to the base member is adjusted by the tilt adjustment means, A stage apparatus equipped with, The base member, the tilt adjustment means, and the stage member are arranged in a first direction. The aforementioned tilt adjustment means is A plurality of tilt adjustment members arranged in the first direction, The device comprises a plurality of bearings arranged in the first direction and positioned between the base member and the tilt adjustment member, between the plurality of tilt adjustment members, and between the tilt adjustment member and the stage member, respectively, which support the plurality of tilt adjustment members so as to be rotatable around the first direction, The plurality of inclination adjusting members have inclined surfaces that are inclined with respect to a second direction perpendicular to the first direction, The plurality of bearings are thrust bearings that support the load in the first direction, The aforementioned plurality of tilt adjustment members are A first inclination adjustment member having a first inclined surface as the inclined surface, The device includes a second inclination adjusting member having a second inclination surface opposite to the first inclination surface, The plurality of bearings include bearings positioned between the first inclined surface and the second inclined surface. A stage apparatus characterized by the following features.

2. A stage apparatus according to claim 1, The aforementioned plurality of bearings are thrust rolling bearings. A stage apparatus characterized by the following features.

3. A stage apparatus according to claim 2, The aforementioned plurality of bearings are It has a plurality of rolling elements arranged in a position that overlaps with the first tilt adjustment member in the first direction, and includes a bearing that supports the first tilt adjustment member, Of the plurality of bearings, the bearing positioned between the first inclined surface and the second inclined surface has a plurality of rolling elements positioned to overlap with the second inclination adjustment member in the first direction, and supports the second inclination adjustment member. A stage apparatus characterized by the following features.

4. A stage apparatus according to claim 3, The aforementioned plurality of bearings are It has a plurality of rolling elements positioned to overlap with the stage member in the first direction, and includes a bearing that supports the stage member, The bearing supporting the first tilt adjustment member is positioned between the base member and the first tilt adjustment member. The bearing supporting the stage member is positioned between the second tilt adjustment member and the stage member. A stage apparatus characterized by the following features.

5. A base member and The tilt adjustment means supported by the base member, A stage member supported by the tilt adjustment means, the tilt of which relative to the base member is adjusted by the tilt adjustment means, A stage apparatus equipped with, The base member, the tilt adjustment means, and the stage member are arranged in a first direction. The aforementioned tilt adjustment means is A plurality of tilt adjustment members arranged in the first direction, It comprises a plurality of bearings arranged in the first direction, which support the plurality of tilt adjustment members so as to be rotatable about the first direction relative to the base member and the stage member, The plurality of inclination adjusting members have inclined surfaces that are inclined with respect to a second direction perpendicular to the first direction, The plurality of bearings are thrust bearings that support the load in the first direction, The aforementioned stage device is A moving means for supporting the stage member so that it can be tilted, and for moving the stage member in the first direction between a first position where the stage member is supported by the tilt adjustment means and a second position which is further away from the tilt adjustment means than the first position, The system includes a detection means for detecting the inclination of the stage member at the first position and the second position. A stage apparatus characterized by the following features.

6. A stage apparatus according to claim 5, The tilt adjustment means has a cavity extending in the first direction, The moving means and the detection means are arranged in the cavity. A stage apparatus characterized by the following features.

7. A stage device according to claim 6, The moving means is an extendable actuator comprising a cylinder portion and a rod portion inserted into the cylinder portion so as to be movable in the first direction. The cylinder portion is supported by the base member, The end of the rod portion is connected to the stage member, The end of the rod portion and the stage member are connected by a universal joint. A stage apparatus characterized by the following features.

8. A base member and The tilt adjustment means supported by the base member, A stage member supported by the tilt adjustment means, the tilt of which relative to the base member is adjusted by the tilt adjustment means, A stage apparatus equipped with, The base member, the tilt adjustment means, and the stage member are arranged in a first direction. The aforementioned tilt adjustment means is A plurality of tilt adjustment members arranged in the first direction, It comprises a plurality of bearings arranged in the first direction, which support the plurality of tilt adjustment members so as to be rotatable about the first direction relative to the base member and the stage member, The plurality of inclination adjusting members have inclined surfaces that are inclined with respect to a second direction perpendicular to the first direction, The plurality of bearings are thrust bearings that support the load in the first direction, The aforementioned stage device is The plurality of tilt adjustment members are each provided with a driving means for independently rotating them around the first direction. A stage apparatus characterized by the following features.

9. A stage apparatus according to claim 8, The aforementioned plurality of tilt adjustment members are The first tilt adjustment member, Including a second tilt adjustment member, The aforementioned driving means is A first driving means for rotating the first tilt adjustment member, The second driving means for rotating the second tilt adjustment member is included, A stage apparatus characterized by the following features.

10. A stage apparatus according to claim 9, The first driving means and the second driving means each include a drive source and a belt transmission mechanism driven by the driving force of the drive source, The first tilt adjustment member has a circular outer surface around which the belt of the belt transmission mechanism of the first drive means is wrapped, The second tilt adjustment member has a circular outer surface around which the belt of the belt transmission mechanism of the second drive means is wrapped. A stage apparatus characterized by the following features.

11. A stage apparatus according to claim 8, A detection means for detecting the inclination of the stage member, The system includes a control means that controls the drive means based on the detection result of the detection means, A stage apparatus characterized by the following features.

12. A stage apparatus according to claim 11, A moving means for supporting the stage member so that it can be tilted, and for moving the stage member in the first direction between a first position supported by the tilt adjustment means and a second position further away from the tilt adjustment means than the first position, A detection means for detecting the inclination of the stage member at the first position and the second position, The system includes a control means that controls the drive means based on the detection result of the inclination of the stage member at the first position and the detection result of the inclination of the stage member at the second position, as determined by the detection means. A stage apparatus characterized by the following features.

13. A press device comprising a first press head and a second press head, wherein a workpiece is pressed by the first press head and the second press head, The first press head is supported and the tilt adjustment means is provided for adjusting the inclination of the first press head, The aforementioned tilt adjustment means is A plurality of tilt adjustment members arranged in the pressing direction of the workpiece, The device comprises a plurality of bearings arranged in the pressing direction and positioned between the plurality of inclination adjustment members and between the inclination adjustment members and the first press head, respectively, which support the plurality of inclination adjustment members so as to be rotatable around the pressing direction, The plurality of inclination adjustment members have inclined surfaces that are inclined with respect to a direction perpendicular to the pressing direction, The aforementioned plurality of bearings are thrust bearings that support the load in the pressing direction, The aforementioned plurality of tilt adjustment members are A first inclination adjustment member having a first inclined surface as the inclined surface, The device includes a second inclination adjusting member having a second inclination surface opposite to the first inclination surface, The plurality of bearings include bearings positioned between the first inclined surface and the second inclined surface. A press apparatus characterized by the following features.

14. A press apparatus according to claim 13, A heater is provided in at least one of the first press head and the second press head. A press apparatus characterized by the following features.

15. A press device comprising a first press head and a second press head, wherein a workpiece is pressed by the first press head and the second press head, The first press head is supported and the tilt adjustment means is provided for adjusting the inclination of the first press head, The aforementioned tilt adjustment means is A plurality of tilt adjustment members arranged in the pressing direction of the workpiece, The system comprises a plurality of bearings arranged in the pressing direction, which support the plurality of tilt adjustment members so as to be rotatable around the pressing direction relative to the first press head, The plurality of inclination adjustment members have inclined surfaces that are inclined with respect to a direction perpendicular to the pressing direction, The aforementioned plurality of bearings are thrust bearings that support the load in the pressing direction, The first press head comprises a first head portion having a first contact surface with the workpiece, The second press head comprises a second head portion having a second contact surface with the workpiece, The first press head is supported so as to be tiltable, and the moving means moves the first press head in the pressing direction between a first position in which the first press head is supported by the tilt adjustment means and a second position which is further away from the tilt adjustment means than the first position and in which the first contact surface contacts the second contact surface. The system includes a detection means for detecting the inclination of the first press head at the first position and the second position. A press apparatus characterized by the following features.

16. A press apparatus according to claim 15, A drive means for independently rotating each of the aforementioned multiple tilt adjustment members, The system includes a control means that controls the drive means based on the detection result of the inclination of the first press head at the first position and the detection result of the inclination of the first press head at the second position, performed by the detection means. A press apparatus characterized by the following features.

17. A pressing method in which a workpiece is pressed by a first press head and a second press head, An adjustment step of adjusting the inclination of the first press head using an inclination adjustment means that supports the first press head and adjusts the inclination of the first press head, The system includes a pressing step of pressing a workpiece by moving the first press head and the second press head relative to each other in the pressing direction, The aforementioned tilt adjustment means is A plurality of tilt adjustment members arranged in the pressing direction of the workpiece, The device comprises a plurality of bearings arranged in the pressing direction and positioned between the plurality of inclination adjustment members and between the inclination adjustment members and the first press head, respectively, which support the plurality of inclination adjustment members so as to be rotatable with respect to the first press head around the pressing direction, The plurality of inclination adjustment members have inclined surfaces that are inclined with respect to a direction perpendicular to the pressing direction, The aforementioned plurality of bearings are thrust bearings that support the load in the pressing direction, The aforementioned plurality of tilt adjustment members are A first inclination adjustment member having a first inclined surface as the inclined surface, The device includes a second inclination adjusting member having a second inclination surface opposite to the first inclination surface, The plurality of bearings include bearings positioned between the first inclined surface and the second inclined surface, In the adjustment step, the tilt of the first press head is adjusted by a combination of the rotational positions of the plurality of tilt adjustment members. A pressing method characterized by the following:

18. A pressing method for pressing a workpiece with a first press head and a second press head, An adjustment step of adjusting the inclination of the first press head using an inclination adjustment means that supports the first press head and adjusts the inclination of the first press head, The system includes a pressing step of pressing a workpiece by moving the first press head and the second press head relative to each other in the pressing direction, The aforementioned tilt adjustment means is A plurality of tilt adjustment members arranged in the pressing direction of the workpiece, The system comprises a plurality of bearings arranged in the pressing direction, which support the plurality of tilt adjustment members so as to be rotatable around the pressing direction relative to the first press head, The plurality of inclination adjustment members have inclined surfaces that are inclined with respect to a direction perpendicular to the pressing direction, The aforementioned plurality of bearings are thrust bearings that support the load in the pressing direction, In the adjustment step, the tilt of the first press head is adjusted by a combination of the rotational positions of the plurality of tilt adjustment members. The first press head comprises a first head portion having a first contact surface with the workpiece, The second press head comprises a second head portion having a second contact surface with the workpiece, A first moving step involves moving the first press head in the pressing direction so that the first contact surface and the second contact surface come into contact, A first detection step in which the tilt of the first press head is detected while the first contact surface and the second contact surface are in contact, A second movement step involves returning the first press head from the state in which the first contact surface and the second contact surface are in contact to the position supported by the tilt adjustment means, The system includes a second detection step of detecting the inclination of the first press head at a position where the first press head is supported by the inclination adjustment means, In the adjustment step, the tilt of the first press head is adjusted based on the detection results of the first detection step and the second detection step. A pressing method characterized by the following:

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