Conveying device

Abstract

To provide a conveyance device capable of conveying conveyance objects while holding the objects one by one.SOLUTION: A device 1 for conveying a conveying object 100 has a suction part 10 and a loading table 40 on which the conveying object 100 is loaded. The suction part 10 has a moving mechanism 30 for vertically moving the suction part 10. The device has an overlapping region A1 where a suction face 20 of the suction part 10 and an upper face part 41 of the loading table 40 overlap with each other in a state in which the suction part 10 approaches the loading table 40, and has a gap 50 between the upper face part 41 of the loading table 40 and the conveying object 100 in the overlapping region A1.SELECTED DRAWING: Figure 1

Description

【Technical Field】 【0001】 The present invention relates to an apparatus for transporting an object to be transported. 【Background Art】 【0002】 When packaging articles such as medical instruments and drugs, an attached document such as an instruction manual may be enclosed in the package of the article. Also, for example, when packaging articles such as glass plates, metal plates, and films, paper, film, or the like may be sandwiched between the articles as interleaving paper for protecting the articles. 【0003】 In recent years, in the packaging and bundling of articles, there has been a demand for automating the operation of transporting objects to be transported, such as thin plate-like objects like attached documents and interleaving paper, to a predetermined position. 【0004】 For example, Patent Document 1 describes a paper sheet feeding device including a magazine rack that holds a plurality of paper sheets in a stacked state on a plurality of support claws protruding inward from the outer shape of the paper sheet, and a drawing-out device that sucks the lower surface side of the lowermost paper sheet held in the magazine rack and draws it downward, and is provided with an air ejection device that blows air onto the upper surface side of the paper sheet drawn out by the drawing-out device. Patent Document 2 describes an interleaving paper supply device that supplies interleaving paper used by being inserted between thin plate-like products when stacking the thin plate-like products, which adsorbs the uppermost interleaving paper in the stacked interleaving paper group from above with an adsorption pad, lifts it upward, transports the interleaving paper in the adsorbed state, and supplies it. The adsorption pads are provided in two or two rows arranged in the longitudinal direction of the interleaving paper, and these are integrally moved up and down and moved to a predetermined position, and at least one of the two adsorption pads or at least one row of the two rows of adsorption pads is provided with vibration means for vibrating in the vertical direction. 【Prior Art Documents】 【Patent Documents】 【0005】 [Patent Document 1] Japanese Patent Application Publication No. 5-310334 [Patent Document 2] Japanese Patent Publication No. 2000-177864 [Overview of the project] [Problems that the invention aims to solve] 【0006】 In the apparatus described in Patent Documents 1 and 2, the objects to be transported, such as paper scraps and films, are supplied to the apparatus in a stacked state. However, when the apparatus is designed to hold and transport the objects one by one, it may end up holding multiple objects at once, which can lead to product defects or transport problems. 【0007】 The present invention has been made in view of the above circumstances, and its object is to provide a conveying device capable of holding and conveying objects one by one. [Means for solving the problem] 【0008】 The conveying device that has solved the above problem is a device for conveying an object to be conveyed, and comprises a suction part and a mounting table on which the object to be conveyed is placed, wherein the suction part has a movement mechanism for moving the suction part in the vertical direction, and when the suction part is close to the mounting table, there is an overlapping region where the suction surface of the suction part and the upper surface of the mounting table overlap each other, and in the overlapping region there is an air gap between the upper surface of the mounting table and the object to be conveyed. 【0009】 In the conveying device of the present invention, the mounting table has a bottom surface including an upper surface, and the gap is preferably a through hole provided in the bottom surface of the mounting table. 【0010】 In the conveying device of the present invention, the mounting table has a bottom surface including an upper surface, and the gap is preferably a bottomed groove provided on the bottom surface of the mounting table. 【0011】 In the conveying device of the present invention, the object to be conveyed has a portion through which gas passes in the thickness direction of the object to be conveyed, and it is preferable that the area of ​​the gap viewed from a direction perpendicular to the upper surface of the mounting table is 25% to 90% of the area of ​​the contact portion between the adsorption part and the object to be conveyed. 【0012】 In the conveying device of the present invention, the suction part has a first suction part and a second suction part, and the void has a first void in the part located on the suction surface of the first suction part and a second void in the part located on the suction surface of the second suction part, and it is preferable that the contact area between the first suction part and the object to be conveyed is larger than the contact area between the second suction part and the object to be conveyed. 【0013】 In the conveying device of the present invention, the suction part has a first suction part and a second suction part, and the void has a first void in the portion located on the suction surface of the first suction part and a second void in the portion located on the suction surface of the second suction part, and it is preferable that the distance between the center of the circumscribed circle of the suction surface of the first suction part and the center of the circumscribed circle of the first void is smaller than the distance between the center of the circumscribed circle of the suction surface of the second suction part and the center of the circumscribed circle of the second void. [Effects of the Invention] 【0014】 According to the conveying device of the present invention, when the suction part is close to the mounting table, the suction surface of the suction part and the upper surface of the mounting table have an overlapping region where they overlap each other, and there is a gap between the upper surface of the mounting table and the object to be conveyed in the overlapping region. As a result, when the suction part picks up the object to be conveyed that is placed on the mounting table, the pressure exerted by the suction part in suctioning the object can be released through the gap. Consequently, the suction pressure of the suction part does not affect the upper surface of the mounting table, making it difficult to lift the object to be conveyed from the mounting table, and the suction part does not unintentionally pick up multiple objects to be conveyed, making it easier to hold and convey the objects one by one. [Brief explanation of the drawing] 【0015】 [Figure 1] This diagram shows a schematic (partially cross-sectional) view of a conveying device according to one embodiment of the present invention. [Modes for carrying out the invention] 【0016】 The present invention will be described in more detail below based on the embodiments described below. However, the present invention is not limited by the embodiments described below, and it is certainly possible to implement it with appropriate modifications within the scope that is consistent with the spirit of the preceding and following descriptions, and all such modifications are included within the technical scope of the present invention. In addition, hatching and component reference numerals may be omitted in the drawings for convenience, in which case please refer to the specification or other drawings. Furthermore, the dimensions of various components in the drawings may differ from the actual dimensions, as priority has been given to helping to understand the features of the present invention. 【0017】 Figure 1 is a schematic diagram of a transport device 1 according to one embodiment of the present invention. As shown in Figure 1, the transport device 1 of the present invention is a device 1 for transporting an object to be transported 100, and has a suction unit 10 and a mounting table 40 on which the object to be transported 100 is placed. The suction unit 10 has a moving mechanism 30 for moving the suction unit 10 in the vertical direction. When the suction unit 10 is close to the mounting table 40, the suction surface 20 of the suction unit 10 and the upper surface 41 of the mounting table 40 have an overlapping region A1, and in the overlapping region A1, there is a gap 50 between the upper surface 41 of the mounting table 40 and the object to be transported 100. 【0018】 The conveying device 1 is a device that conveys the object to be conveyed 100 to a predetermined position. Examples of the object to be conveyed 100 include thin plate-like objects such as paper, film, sheet, resin plate, and metal plate. Among them, the object to be conveyed 100 is preferably paper. Since paper has a certain degree of air permeability in the thickness direction, when using a device 1 that holds and conveys the object to be conveyed 100 by sucking air with the suction portion 10, the paper may be adsorbed to the suction portion 10 in a state where a plurality of sheets are overlapped, and conveyance troubles are likely to occur. According to the method of operating the conveying device of the present invention, even if the object to be conveyed 100 is paper having air permeability, it becomes easy to hold and convey the object to be conveyed 100 one by one. Note that the paper of the object to be conveyed 100 may be a piece of paper without folding, a piece of paper with folding, or a booklet-shaped piece of paper. 【0019】 The mounting table 40 is for mounting the object to be conveyed 100. The mounting table 40 has an upper surface portion 41, and the object to be conveyed 100 is mounted on the upper surface portion 41. 【0020】 Examples of the material constituting the mounting table 40 include metal, synthetic resin, rubber, wood, etc. Among them, the material constituting the mounting table 40 is preferably metal. By the material constituting the mounting table 40 being metal, the durability of the mounting table 40 is enhanced. 【0021】 The object to be conveyed 100 is preferably in a state where a plurality of objects to be conveyed 100 are stacked in the thickness direction of the object to be conveyed 100. Specifically, it is preferable that a plurality of objects to be conveyed 100 are stacked on the upper surface portion 41 of the mounting table 40. By the state where a plurality of objects to be conveyed 100 are stacked, it becomes possible to enhance the efficiency of conveying the object to be conveyed 100 by the conveying device 1. 【0022】 As shown in FIG. 1, the conveying device 1 has a suction portion 10. The conveying device 1 can hold the object to be conveyed 100 by adsorbing the suction portion 10 to the object to be conveyed 100. 【0023】 The suction part 10 preferably adsorbs the object to be conveyed 100 by suction. That is, the suction part 10 preferably has suction holes. The number of suction holes that the suction part 10 has may be one or a plurality. 【0024】 The moving mechanism 30 moves the suction part 10 in the vertical direction. The moving mechanism 30 may not only move the suction part 10 in the vertical direction but also in the horizontal direction. That is, the moving mechanism 30 may move the suction part 10 in the vertical and horizontal directions. 【0025】 As shown in FIG. 1, the overlapping region A1 is a region where the suction surface 20 of the suction part 10 and the upper surface part 41 of the mounting table 40 overlap each other when the suction part 10 approaches the mounting table 40. In the overlapping region A1, there is a gap 50 between the upper surface part 41 of the mounting table 40 and the object to be conveyed 100. 【0026】 For the suction of the suction part 10 to the object to be conveyed 100, when the suction part 10 sucks the object to be conveyed 100, the suction pressure of the suction part 10 is transmitted to the object to be conveyed 100. When the thickness of the object to be conveyed 100 is thin or the number of objects to be conveyed 100 stacked on the mounting table 40 is small, etc., the suction pressure of the suction part 10 reaches the lower surface of the object to be conveyed 100, and the suction part 10 sucks the upper surface part 41 of the mounting table 40 under the object to be conveyed 100 or another object to be conveyed 100 placed under the object to be conveyed 100, and it may not be possible to convey the objects to be conveyed 100 one by one. In the overlapping region A1, by having the gap 50, the suction pressure of the suction part 10 can be released through the gap 50, so that the conveying device 1 can easily suck and convey one object to be conveyed 100 by the suction part 10. 【0027】 The number of voids 50 in one overlapping region A1 may be one or multiple. The shape of the void 50 as viewed from a direction perpendicular to the upper surface 41 of the mounting table 40 may be circular, elliptical, polygonal, or a combination thereof. The shape of the void 50 as viewed from a direction perpendicular to the upper surface 41 of the mounting table 40 can be rephrased as the cross-sectional shape of the void 50 in a cross section perpendicular to the depth direction of the void 50. In particular, the shape of the void 50 as viewed from a direction perpendicular to the upper surface 41 of the mounting table 40 is preferably circular. By making the shape of the void 50 circular, the suction pressure of the suction part 10 is less likely to concentrate on a part of the outer edge of the void 50, and wrinkles and scratches are less likely to occur on the transported object 100 located above the void 50 due to the suction pressure of the suction part 10. 【0028】 As shown in Figure 1, the mounting base 40 has a bottom surface 42 including an upper surface 41, and it is preferable that the gap 50 is a through hole provided in the bottom surface 42 of the mounting base 40. In Figure 1, the first gap 51, which is one of the gaps 50, is shown as a through hole provided in the bottom surface 42 of the mounting base 40. Because the gap 50 is a through hole provided in the bottom surface 42 of the mounting base 40, the suction pressure of the suction part 10 can be easily released, and the suction part 10 can easily hold and transport the objects to be transported 100 one by one. 【0029】 Furthermore, as shown in Figure 1, the mounting base 40 has a bottom surface 42 including an upper surface 41, and it is also preferable that the gap 50 is a bottomed groove provided in the bottom surface 42 of the mounting base 40. In Figure 1, the second gap 52, which is one of the gaps 50, is shown as a bottomed groove provided in the bottom surface 42 of the mounting base 40. Because the gap 50 is a bottomed groove provided in the bottom surface 42 of the mounting base 40, the suction pressure of the suction part 10 is released, and pressure is less likely to concentrate on the outer edge of the gap 50, thus making it less likely for wrinkles or scratches to occur on the object to be transported 100 located above the gap 50. 【0030】 The object to be conveyed 100 has a portion through which gas passes in the thickness direction of the object to be conveyed 100, and it is preferable that the area of ​​the gap 50 viewed from a direction perpendicular to the upper surface 41 of the mounting table 40 is 25% to 90% of the area of ​​the contact portion between the adsorption part 10 and the object to be conveyed 100. Note that the area of ​​the gap 50 viewed from a direction perpendicular to the upper surface 41 of the mounting table 40 can be rephrased as the area of ​​the cross-sectional shape of the gap 50 in a cross section perpendicular to the depth direction of the gap 50. The area of ​​the gap 50, viewed from a direction perpendicular to the upper surface 41 of the mounting table 40, is 25% to 90% of the area of ​​the contact between the suction part 10 and the object to be transported 100. This allows the suction pressure of the suction part 10 to be sufficiently released through the gap 50, while preventing excessive pressure from being applied to the object to be transported 100, thus reducing the likelihood of wrinkles or scratches on the object to be transported 100, and making it easier to hold each object to be transported 100 individually with the suction part 10. 【0031】 The area of ​​the gap 50, as viewed from a direction perpendicular to the upper surface 41 of the mounting base 40, is preferably 25% or more, more preferably 30% or more, and even more preferably 35% or more, of the contact area of ​​the suction part 10 with the object to be conveyed 100. By setting the lower limit of the ratio of the area of ​​the gap 50 to the contact area of ​​the suction part 10 with the object to be conveyed 100 within the above range, the suction pressure of the suction part 10 can be easily released by the gap 50. Furthermore, the area of ​​the gap 50, as viewed from a direction perpendicular to the upper surface 41 of the mounting base 40, is preferably 90% or less, more preferably 85% or less, and even more preferably 80% or less, of the contact area of ​​the suction part 10 with the object to be conveyed 100. By setting the upper limit of the ratio between the area of ​​the gap 50 and the area of ​​the contact portion between the suction part 10 and the object to be conveyed 100 to the above range, strong pressure is less likely to be applied to the outer edge of the gap 50, making it less likely for wrinkles or scratches to occur on the object to be conveyed 100. 【0032】 To configure the object to be transported 100 to have a portion through which gas passes in the thickness direction of the object to be transported 100, for example, through holes can be provided in the object to be transported 100, or the material constituting the object to be transported 100 can be made of a highly permeable material. 【0033】 As shown in Figure 1, the suction part 10 has a first suction part 11 and a second suction part 12, and the gap 50 has a first gap 51 located on the suction surface 21 of the first suction part 11 and a second gap 52 located on the suction surface 22 of the second suction part 12. Preferably, the contact area between the first suction part 11 and the object to be conveyed 100 is larger than the contact area between the second suction part 12 and the object to be conveyed 100. Because the contact area between the first suction part 11 and the object to be conveyed 100 is larger than the contact area between the second suction part 12 and the object to be conveyed 100, the size of the first gap 51 in the overlapping region A1 where the suction surface 21 of the first suction part 11 and the upper surface 41 of the mounting base 40 overlap each other is smaller than the size of the second gap 52 in the overlapping region A1 where the suction surface 22 of the second suction part 12 and the upper surface 41 of the mounting base 40 overlap each other. Therefore, the stress generated between the suction surface 21 of the first suction part 11, the object to be transported 100, and the upper surface 41 of the mounting table 40 by the suction of the first suction part 11 is greater than the stress generated between the suction surface 22 of the second suction part 12, the object to be transported 100, and the upper surface 41 of the mounting table 40 by the suction of the second suction part 12, making it possible for the second suction part 12 to lift the object to be transported 100 upward before the first suction part 11. Because the second suction part 12 lifts the object to be transported 100 upward before the first suction part 11, at least a part of the object to be transported 100 bends and sags, making it easier for air to enter the underside of the object to be transported 100. As a result, it becomes easier to detach other objects that are attached to the underside of the object to be transported 100 due to static electricity, etc., and it becomes easier to lift the objects to be transported 100 one by one by the first suction part 11 and the second suction part 12. 【0034】 The contact area between the first suction part 11 and the object to be conveyed 100 is preferably 1.1 times or more, more preferably 1.2 times or more, and even more preferably 1.3 times or more, than the contact area between the second suction part 12 and the object to be conveyed 100. By setting the lower limit of the ratio of the contact area between the first suction part 11 and the object to be conveyed 100 to the contact area between the second suction part 12 and the object to be conveyed 100 within the above range, the contact area between the first suction part 11 and the object to be conveyed 100 can be made sufficiently larger than the contact area between the second suction part 12 and the object to be conveyed 100, allowing for a difference in the timing of when the first suction part 11 lifts a part of the object to be conveyed 100 and when the second suction part 12 lifts a part of the object to be conveyed 100, making it easier to bend at least a part of the object to be conveyed 100. Furthermore, the contact area between the first suction part 11 and the object to be conveyed 100 is preferably 10 times or less, more preferably 9 times or less, and even more preferably 8 times or less, the contact area between the second suction part 12 and the object to be conveyed 100. By setting the upper limit of the ratio of the contact area between the first suction part 11 and the object to be conveyed 100 to the contact area between the second suction part 12 and the object to be conveyed 100 within the above range, it becomes possible to sufficiently release the suction pressure in both the first suction part 11 and the second suction part 12. 【0035】 The suction part 10 has a first suction part 11 and a second suction part 12, and the void 50 has a first void 51 located on the suction surface 21 of the first suction part 11 and a second void 52 located on the suction surface 22 of the second suction part 12, and it is preferable that the distance between the center of the circumscribed circle of the suction surface 21 of the first suction part 11 and the center of the circumscribed circle of the first void 51 is smaller than the distance between the center of the circumscribed circle of the suction surface 22 of the second suction part 12 and the center of the circumscribed circle of the second void 52. In other words, it is preferable that the center position of the suction surface 21 of the first suction part 11 is closer to the void 50 than the center position of the suction surface 22 of the second suction part 12. The circumscribed circle of the suction surface 21 of the first suction part 11 is the smallest circle tangent to the outer edge of the suction surface 21 when viewed from a direction perpendicular to the suction surface 21 of the first suction part 11, and the circumscribed circle of the suction surface 22 of the second suction part 12 is the smallest circle tangent to the outer edge of the suction surface 22 when viewed from a direction perpendicular to the suction surface 22 of the second suction part 12. Furthermore, the circumscribed circle of the first void 51 is the smallest circle tangent to the outer edge of the first void 51 when viewed from the depth direction of the first void 51, and the circumscribed circle of the second void 52 is the smallest circle tangent to the outer edge of the second void 52 when viewed from the depth direction of the second void 52. 【0036】 Because the distance between the center of the circumscribed circle of the suction surface 21 of the first suction part 11 and the center of the circumscribed circle of the first gap 51 is smaller than the distance between the center of the circumscribed circle of the suction surface 22 of the second suction part 12 and the center of the circumscribed circle of the second gap 52, the center of the suction surface 21 of the first suction part 11 and the center of the first gap 51 are closer than the center of the suction surface 22 of the second suction part 12 and the center of the second gap 52. As a result, the amount of suction pressure released by the first gap 51 in the first suction part 11 can be made greater than the amount of suction pressure released by the second gap 52 in the second suction part 12, creating a difference in suction force between the first suction part 11 and the second suction part 12. Consequently, the first suction part 11 can lift the object to be transported 100 upward before the second suction part 12, and the timing of when the first suction part 11 and the second suction part 12 adhere to the object to be transported 100 can be staggered. 【0037】 The distance between the center of the circumscribed circle of the suction surface 21 of the first suction part 11 and the center of the circumscribed circle of the first gap 51 is preferably 95% or less, more preferably 90% or less, and even more preferably 85% or less, of the distance between the center of the circumscribed circle of the suction surface 22 of the second suction part 12 and the center of the circumscribed circle of the second gap 52. By setting the upper limit of the ratio of the distance between the center of the circumscribed circle of the suction surface 21 of the first suction part 11 and the center of the circumscribed circle of the first gap 51 to the distance between the center of the circumscribed circle of the suction surface 22 of the second suction part 12 and the center of the circumscribed circle of the second gap 52 within the above range, the center of the circumscribed circle of the suction surface 21 of the first suction part 11 and the center of the circumscribed circle of the first gap 51 can be brought sufficiently close together. Furthermore, the lower limit of the ratio between the distance between the center of the circumscribed circle of the suction surface 21 of the first suction part 11 and the center of the circumscribed circle of the first gap 51, and the distance between the center of the circumscribed circle of the suction surface 22 of the second suction part 12 and the center of the circumscribed circle of the second gap 52, is not particularly limited, but can be, for example, 10% or more, 15% or more, or 20% or more. 【0038】 As shown in Figure 1, it is preferable that the conveying device 1 also has a spraying device 60 for spraying gas onto the object to be conveyed 100. By having the spraying device 60, the conveying device 1 sprays gas onto the object to be conveyed 100, making it less likely for other objects to adhere to the lower surface of the object to be conveyed 100 due to static electricity or the like. As a result, the conveying device 1 can be made capable of smoothly conveying the object to be conveyed 100. 【0039】 The spraying device 60 preferably sprays gas onto the lower surface of the object to be conveyed 100. The lower surface of the object to be conveyed 100 is prone to other substances adhering to it due to static electricity, etc. By spraying gas onto the lower surface of the object to be conveyed 100, the gas comes into contact with the lower surface of the object to be conveyed 100, making it less likely for other substances to adhere to the object to be conveyed 100. 【0040】 Examples of gases that the spraying device 60 sprays onto the object to be conveyed 100 include air, nitrogen gas, oxygen gas, and carbon dioxide gas. Among these, air is preferred as the gas sprayed onto the object to be conveyed 100. By using air as the gas sprayed onto the object to be conveyed 100, it is possible to reduce the risk of damaging the object to be conveyed 100, and since there is no need to introduce special equipment in the spraying process, the cost of the conveying device 1 can be reduced. 【0041】 As shown in Figure 1, it is preferable to further have a static eliminator 70 for removing static electricity from the object 100 to be transported. The presence of the static eliminator 70 in the transporting device 1 removes static electricity from the object 100. As a result, it becomes less likely for other objects to adhere to the object 100 due to static electricity, making it easier to transport the object 100 smoothly. 【0042】 Examples of the static eliminator 70 include a nozzle for spraying static electricity removal fluid onto the object 100 to be transported, a static elimination brush, a static elimination string, electrodes, etc. Among these, the static eliminator 70 is preferably a nozzle for spraying static electricity removal fluid onto the object 100 to be transported. By having the static eliminator 70 be a nozzle for spraying static electricity removal fluid, it becomes easier to eliminate static electricity from the entire object 100 without damaging it. 【0043】 As described above, the conveying device of the present invention is a device for conveying objects, and comprises a suction unit and a mounting table on which the objects to be conveyed are placed. The suction unit has a movement mechanism that moves the suction unit vertically, and when the suction unit is close to the mounting table, there is an overlapping region where the suction surface of the suction unit and the upper surface of the mounting table overlap each other, and in the overlapping region there is a gap between the upper surface of the mounting table and the objects to be conveyed. With this configuration of the conveying device of the present invention, the pressure exerted by the suction unit when it sucks up the objects to be conveyed that are placed on the mounting table can be released through the gap. As a result, the suction pressure of the suction unit does not affect the upper surface of the mounting table, making it difficult to lift the objects to be conveyed from the mounting table, and the suction unit does not unintentionally suck up multiple objects to be conveyed, making it easier to hold and convey the objects one by one. [Explanation of Symbols] 【0044】 1: Conveyor device 10: Adsorption part 11: 1st suction part 12:Second suction part 20: Adsorption surface 21: Adsorption surface of the first adsorption section 22: Adsorption surface of the second adsorption section 30: Movement mechanism 40: Mounting platform 41:Top part 42: Bottom part 50:Void 51: 1st cavity 52:Second cavity 60: Spraying device 70: Static eliminator 100: Object to be transported A1: Overlapping area

Claims

[Claim 1] A device for transporting objects, It has a suction part and a mounting platform on which the object to be transported is placed, The adsorption portion has a movement mechanism that moves the adsorption portion in the vertical direction. When the suction part is in close proximity to the base described above, the suction surface of the suction part and the base described above The upper surface has an overlapping region that overlaps with the upper surface. In the overlapping region, there is a gap between the upper surface of the aforementioned stand and the object to be transported. And, The adsorption portion has a first adsorption portion and a second adsorption portion. The void consists of a first void in the portion located on the adsorption surface of the first adsorption portion and the second adsorption portion It has a second void in the portion located on the adsorption surface, The distance between the center of the circumscribed circle of the adsorption surface of the first adsorption part and the center of the circumscribed circle of the first void is, The distance between the center of the circumscribed circle of the adsorption surface of the second adsorption part and the center of the circumscribed circle of the second void is smaller. A conveying device. [Claim 2] The mounting base has a bottom surface that faces the top surface in the thickness direction, The transport according to claim 1, wherein the gap is a through hole provided in the bottom surface of the stand described above. Device. [Claim 3] The mounting base has a bottom surface that faces the top surface in the thickness direction, The gap is a bottomed groove provided on the upper surface of the stand described above, according to claim 1. sending device. [Claim 4] The object to be transported has a portion through which gas passes in the thickness direction of the object to be transported. The area of ​​the gap as viewed from a direction perpendicular to the upper surface of the mounting platform is the area of ​​the adsorption part Any one of claims 1 to 3, wherein the area of ​​the contact portion with the object to be transported is 25% or more and 90% or less. The described conveying device. [Claim 5] The contact area between the first suction part and the object to be conveyed is the contact area between the second suction part and the object to be conveyed A conveying device according to any one of claims 1 to 4, wherein the contact area is larger than the contact area of ​​the conveying device.

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