Droplet ejector

Abstract

To provide an improved piezoelectric droplet ejector for a printhead that can be mounted with more nozzles.SOLUTION: A droplet ejector for a printhead comprises: a substrate having a mounting surface and an opposite nozzle surface; a nozzle-forming layer formed on at least a portion of the nozzle surface of the substrate; a fluid chamber defined at least in part by the substrate and at least in part by the nozzle-forming layer, the fluid chamber having a fluid chamber outlet defined at least in part by a nozzle portion of the nozzle-forming layer, the nozzle portion comprising an inner portion located closer to the fluid chamber outlet and an outer portion located closer to a periphery of the nozzle portion; and either or both of an inner actuator mechanism formed on the inner portion of the nozzle portion of the nozzle-forming layer and an outer actuator mechanism formed on the outer portion of the nozzle portion of the nozzle-forming layer.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a droplet ejector for a print head, and a print head equipped with a droplet ejector, A printer equipped with a print head that has a droplet ejector, and droplet ejection for the print head. Regarding the method of operating the device. [Background technology]

[0002] Inkjet printers work by pushing droplets of ink onto a printing medium (such as paper). It is used to reproduce digital images on a medium. Many inkjet printers This controls the ejection of a series of individual ink droplets from the inkjet nozzles of the print head. It incorporates "drop-on-demand" technology, where ink droplets adhere to the medium. Each droplet is ejected with sufficient momentum to do so. Each droplet is ejected according to the applied drive signal, As a result, drop-on-demand inkjet printers produce a continuous flow of ink droplets. This continuous type of ink is produced by pressurizing the ink through a fine nozzle. It is differentiated from inkjet devices.

[0003] The two most commercially successful drop-on-demand technologies are thermal inkjet prints. These are inkjet and piezo (piezoelectric) inkjet printers. In printers, the printing fluid needs to contain volatile components such as water. The heating element is the print head. This causes spontaneous nucleation of bubbles within the volatile fluid, forcing the fluid droplets through the nozzle. It is ejected. Piezo inkjet printers, instead, use piezoelectric elements within the walls of the fluid chamber. It incorporates an actuator. The piezoelectric actuator flexes due to the deformation of the piezoelectric element, and This induces a pressure change in the printing fluid stored in the fluid chamber, which in turn causes the nozzle to... A droplet is ejected through the nozzle.

[0004] Thermal inkjet printers are used to spray only very small amounts of printing fluid. This is not possible (because the fluid must exhibit appropriate volatility). In addition, dried ink residue can accumulate on the heating element in multi-inkjet printers. Kogation may occur, which can affect the printer's operation. The possible lifespan will be shortened.

[0005] Piezo inkjet printers can be used with a wide range of fluids, and coagulation does not occur. Because it does not require this process, it has a longer operating life than thermal inkjet printers. However, Compared to thermal inkjet printheads, existing piezoelectric technology typically... Only a very small number of nozzles can be achieved per lint head. [Overview of the project] [Problems that the invention aims to solve]

[0006] One aspect of the present invention is an improvement for print heads that can achieve a larger number of nozzles. The objective is to provide a piezoelectric droplet dispenser. [Means for solving the problem]

[0007] A first aspect of the present invention provides a droplet ejector for a print head. The droplet ejector is mounted A substrate having a nozzle surface on the opposite side and a portion formed on the nozzle surface of the substrate A nozzle forming layer, and at least a portion of it is made of a substrate and at least a portion of it is made of the nozzle forming layer and a fluid chamber defined thereby. At least a part of the fluid chamber is formed by the nozzle of the nozzle formation layer. It has a fluid chamber outlet defined by the nozzle portion of the nozzle formation layer.

[0008] The nozzle portion of the nozzle formation layer typically functions as a diaphragm for discharging fluid from the fluid chamber through the fluid chamber outlet (for example, forming such a diaphragm or being such a diaphragm). The diaphragm is typically movable. The diaphragm is typically flexible. When the diaphragm moves (for example, flexes) toward the fluid chamber (i.e., into the fluid chamber), typically, fluid is discharged through the fluid chamber outlet. The droplet ejector typically further includes at least one actuator mechanism (for example, one or more actuators) formed on at least a part of the nozzle portion (for example, the diaphragm) of the nozzle formation layer. At least one actuator mechanism (for example, one or more actuators) is typically configured to move or flex the nozzle portion (for example, the diaphragm) of the nozzle formation layer during operation (for example, positioned) so as to move or flex it in that way during use. The diaphragm is typically flexible. When the diaphragm moves (for example, flexes) toward the fluid chamber (i.e., into the fluid chamber), typically, fluid is discharged through the fluid chamber outlet. The droplet ejector typically further includes at least one actuator mechanism (for example, one or more actuators) formed on at least a part of the nozzle portion (for example, the diaphragm) of the nozzle formation layer. At least one actuator mechanism (for example, one or more actuators) is typically configured to move or flex the nozzle portion (for example, the diaphragm) of the nozzle formation layer during operation (for example, positioned) so as to move or flex it in that way during use. The droplet ejector typically further includes at least one actuator mechanism (for example, one or more actuators) formed on at least a part of the nozzle portion (for example, the diaphragm) of the nozzle formation layer. At least one actuator mechanism (for example, one or more actuators) is typically configured to move or flex the nozzle portion (for example, the diaphragm) of the nozzle formation layer during operation (for example, positioned) so as to move or flex it in that way during use.

[0009] The droplet ejector typically further includes at least one actuator mechanism (for example, one or more actuators) formed on at least a part of the nozzle portion (for example, the diaphragm) of the nozzle formation layer. At least one actuator mechanism (for example, one or more actuators) is typically configured to move or flex the nozzle portion (for example, the diaphragm) of the nozzle formation layer during operation (for example, positioned) so as to move or flex it in that way during use. The droplet ejector typically further includes at least one actuator mechanism (for example, one or more actuators) formed on at least a part of the nozzle portion (for example, the diaphragm) of the nozzle formation layer. At least one actuator mechanism (for example, one or more actuators) is typically configured to move or flex the nozzle portion (for example, the diaphragm) of the nozzle formation layer during operation (for example, positioned) so as to move or flex it in that way during use. The droplet ejector typically further includes at least one actuator mechanism (for example, one or more actuators) formed on at least a part of the nozzle portion (for example, the diaphragm) of the nozzle formation layer. At least one actuator mechanism (for example, one or more actuators) is typically configured to move or flex the nozzle portion (for example, the diaphragm) of the nozzle formation layer during operation (for example, positioned) so as to move or flex it in that way during use. The droplet ejector typically further includes at least one actuator mechanism (for example, one or more actuators) formed on at least a part of the nozzle portion (for example, the diaphragm) of the nozzle formation layer. At least one actuator mechanism (for example, one or more actuators) is typically configured to move or flex the nozzle portion (for example, the diaphragm) of the nozzle formation layer during operation (for example, positioned) so as to move or flex it in that way during use. The droplet ejector typically further includes at least one actuator mechanism (for example, one or more actuators) formed on at least a part of the nozzle portion (for example, the diaphragm) of the nozzle formation layer. At least one actuator mechanism (for example, one or more actuators) is typically configured to move or flex the nozzle portion (for example, the diaphragm) of the nozzle formation layer during operation (for example, positioned) so as to move or flex it in that way during use. The droplet ejector typically further includes at least one actuator mechanism (for example, one or more actuators) formed on at least a part of the nozzle portion (for example, the diaphragm) of the nozzle formation layer. At least one actuator mechanism (for example, one or more actuators) is typically configured to move or flex the nozzle portion (for example, the diaphragm) of the nozzle formation layer during operation (for example, positioned) so as to move or flex it in that way during use. The droplet ejector typically further includes at least one actuator mechanism (for example, one or more actuators) formed on at least a part of the nozzle portion (for example, the diaphragm) of the nozzle formation layer. At least one actuator mechanism (for example, one or more actuators) is typically configured to move or flex the nozzle portion (for example, the diaphragm) of the nozzle formation layer during operation (for example, positioned) so as to move or flex it in that way during use. <00001​​​​​​​If one or more internal actuators are located adjacent to the fluid chamber outlet, Formed on at least a portion of the nozzle portion (e.g., diaphragm) of the nozzle forming layer. This is an actuator mechanism. That is, an internal actuator mechanism (for example, one or Multiple internal actuators are typically the nozzle portion of the nozzle formation layer (for example, Nozzle formation closer to the fluid chamber outlet than the peripheral edge (e.g., outer circumference) of the ear phragm. Actuator formed on at least a portion of the nozzle portion of the layer (e.g., diaphragm) This is an ethoderm mechanism.

[0011] At least one actuator mechanism (for example, one or more actuators) , equipped with an external actuator mechanism (for example, one or more external actuators) For example, it can be composed of an external actuator mechanism. If one or more outer actuators are typically the nozzle portion of the nozzle-forming layer ( For example, the nozzle forming layer adjacent to the peripheral edge (for example, the outer circumference) of the diaphragm Actuator machine formed on at least a portion of the lu part (for example, diaphragm) This is the structure. That is, an external actuator mechanism (for example, one or more external actuators) Eta) is typically located beyond the nozzle portion of the nozzle-forming layer (for example, from the fluid chamber outlet) The nozzle portion of the nozzle forming layer adjacent to the peripheral edge (for example, the outer circumference) of the diaphragm For example, it is an actuator mechanism formed on at least a portion of a diaphragm.

[0012] The droplet dispenser has an internal actuator mechanism (for example, one or more internal actuators Both the actuator and the external actuator mechanism (for example, one or more external actuators) In some cases, the droplet dispenser may be equipped with an internal actuator mechanism (for example). (, one or more internal actuators) or external actuator mechanism (for example, one or It may have multiple external actuators, but not both. The presence of an internal actuator mechanism (for example, one or more internal actuators) is not necessary. The presence of an external actuator mechanism (for example, one or more external actuators) This does not mean that, and vice versa, the external actuator mechanism (for example, 1 The presence of one or more external actuators does not necessarily mean that the internal actuator mechanism (even if This does not imply the presence of one or more internal actuators.

[0013] The nozzle portion of the nozzle-forming layer (e.g., the diaphragm) is typically an inner portion and It has an outer part (for example, it is composed of such a part).

[0014] The inner portion of the nozzle portion (e.g., diaphragm) of the nozzle-forming layer is typically, This is the part of the nozzle section located adjacent to the fluid chamber outlet. The inner portion of the nozzle (for example, the diaphragm) is typically the nozzle-forming layer of the nozzle portion. Fluid channels from the peripheral edge (e.g., outer circumference) of the nozzle portion (e.g., diaphragm) This is the part located close to the nozzle outlet. (For example, the nozzle portion of the nozzle formation layer, diaphragm) The inner part of the ram contacts the outlet of the fluid chamber of the nozzle (i.e., the fluid chamber It may be the part that extends to the nozzle exit. The nozzle portion of the nozzle forming layer (for example, diamond The inner portion of the flammation at least partially encloses the outlet of the fluid chamber at the nozzle portion. It can be a part. The inner part of the nozzle portion (for example, the diaphragm) of the nozzle-forming layer is The nozzle portion may be the part that completely encloses the outlet of the fluid chamber. The inner part of the nozzle (for example, the diaphragm) includes the outlet of the fluid chamber. It may be a part (that is, the outlet of the fluid chamber is the nozzle portion of the nozzle-forming layer (even (If so, it can extend through the inner portion of the diaphragm.)

[0015] The outer portion of the nozzle-forming layer (e.g., the diaphragm) is typically a nozzle-forming layer. The peripheral portion of the nozzle portion (for example, the diaphragm) of the nozzle forming layer of the slip portion (for example) This is a portion provided adjacent to the outer periphery. The nozzle portion of the nozzle forming layer (for example, the diaphragm) The outer part of the ear phragm is typically nozzle-shaped, extending beyond the fluid chamber outlet of the nozzle portion. In close proximity to the peripheral edge (e.g., outer circumference) of the stratified nozzle portion (e.g., diaphragm) This is the provided portion. The outer part of the nozzle portion (for example, the diaphragm) of the nozzle forming layer. The minutes refer to the inner portion of the nozzle part (for example, the diaphragm) of the nozzle forming layer of the nozzle part. It may be a portion that abuts against (i.e., extends to the inner portion). Nozzle of the nozzle-forming layer The outer part of the part (for example, the diaphragm) is typically the nozzle part, at least Partially around the inner portion of the nozzle portion (for example, the diaphragm) of the nozzle forming layer This is the provided portion. The outer part of the nozzle portion (for example, the diaphragm) of the nozzle forming layer. The minutes refer to the inner portion of the nozzle part (for example, the diaphragm) of the nozzle forming layer of the nozzle part. It may be a portion that at least partially surrounds the nozzle portion of the nozzle-forming layer (for example, The outer part of the diaphragm is the nozzle part of the nozzle forming layer (for example, the diaphragm It may be a part that completely encloses the inner part of the ear flaps. The nozzle portion of the nozzle-forming layer. For example, the outer part of the diaphragm is the nozzle part, the nozzle forming layer of the nozzle part For example, the peripheral edge (for example, the outer circumference) of the diaphragm (that is, the peripheral edge) It may be a portion that extends through the nozzle-forming layer (for example, the diaphragm). The outer part is the nozzle part of the nozzle forming layer (for example, the diaphragm) The side portion and the peripheral portion of the nozzle portion of the nozzle forming layer (for example, the diaphragm) (for example, the outer portion) It may be a portion that extends between the surrounding part and the surrounding part.

[0016] The inner portion of the nozzle portion of the nozzle-forming layer typically bends during operation. This is the part. The outer part of the nozzle portion of the nozzle-forming layer is typically the nozzle-forming layer This is the part that bends during operation. The outer and inner parts typically bend during operation. When it bends, it curves in the opposite direction (i.e., faces in the opposite direction). Therefore, one When viewed from a particular direction (for example, from the outside of the fluid chamber), during operation, the inner part and One of the outer parts typically appears to curve inward, while the other of the inner and outer parts is typical. It appears to curve outwards in terms of its shape.

[0017] At least one actuator mechanism (for example, at least one internal and / or external) The side actuator mechanism and the nozzle portion of the nozzle forming layer are such that the inner part of the nozzle portion is the first It is curved in the direction (sense), and the outer part of the nozzle portion is in the second direction opposite to the first direction. It may be configured to bend (i.e., bend in that way when started up). .

[0018] The inner and outer portions of the nozzle portion (for example, the diaphragm) of the nozzle forming layer are In addition, the entire nozzle portion (for example, the diaphragm) of the nozzle forming layer can be formed. Cut.

[0019] When the inner part is the inner half of the nozzle and the outer part is the outer half of the nozzle. There is a boundary between the inner and outer parts, and the outer edge of the fluid chamber outlet and nozzle portion. It can extend around the fluid chamber outlet, covering approximately 50% of the distance between the outlet and the other end.

[0020] The inner portion may include approximately 50% of the surface area of ​​the nozzle. The outer portion is the nozzle. This may include approximately 50% of the surface area of ​​the nozzle portion. The inner portion does not include approximately 50% of the surface area of ​​the nozzle portion. Including the full portion, the outer portion includes the portion that exceeds 50% of the surface area of ​​the nozzle portion (inner portion and The area of ​​the outer portion, when combined, typically constitutes the total surface area of ​​the nozzle. The inner portion includes approximately 25% of the surface area of ​​the nozzle, and the outer portion includes the surface area of ​​the nozzle. It includes approximately 75% of the (combined area of ​​the inner and outer parts, typically the nozzle part) (This may constitute the total surface area.)

[0021] The inner and outer portions of the nozzle portion (for example, the diaphragm) of the nozzle forming layer are the same It can be positioned on the axis. The inner portion of the nozzle part (e.g., diaphragm) of the nozzle forming layer. The outer portions may be arranged concentrically. The nozzle portion of the nozzle forming layer (for example, die The inner and outer parts of the yafram can be geometrically similar to each other. Nozzle-forming layer The inner and outer parts of the nozzle portion (for example, the diaphragm) are, respectively, formed by nozzle formation. The nozzle portion of the layer (e.g., diaphragm) may be geometrically similar. The inner and outer parts of the nozzle portion (for example, the diaphragm) are located at the fluid chamber outlet. They can be arranged coaxially (for example, in concentric circles) around it.

[0022] The inner and outer portions of the nozzle portion (e.g., diaphragm) of the nozzle forming layer are each The nozzle portion of the nozzle forming layer (for example, the diaphragm) (the nozzle forming layer (for example) For example, in the plane of the diaphragm, the nozzle portion of the nozzle forming layer (for example, the diaphragm) It may extend along approximately 50% of the width (measured in a cross-section along the main axis of the structure). For example, the nozzle portion of the nozzle-forming layer (for example, the diaphragm) is substantially circular (for example) For example, annular, and the inner and outer parts of the nozzle forming layer (for example, a diaphragm) Each of them is substantially ring-shaped and arranged concentrically, with the outer part extending around the inner part. The inner portion is the outer radius of the nozzle portion (e.g., diaphragm) of the nozzle forming layer. It has an outer radius of approximately 50%, and the outer portion is the nozzle portion of the nozzle-forming layer (for example, diamond The inner radius is approximately 50% of the outer radius of the flammage, and the nozzle portion of the nozzle formation layer (for example, the flammage) The outer radius may be approximately equal to the outer radius of the ear flaps.

[0023] An internal actuator mechanism (for example, one or more internal actuators) is present. In such cases, typically the inner portion of the nozzle part (e.g., the diaphragm) of the nozzle-forming layer. An actuator mechanism (for example, one or more actuators) formed therein. External actuator mechanisms (e.g., one or more external actuators) exist. In this case, typically, the outer portion of the nozzle portion (e.g., diaphragm) of the nozzle-forming layer This is a formed actuator mechanism (for example, one or more actuators).

[0024] The droplet dispenser has an internal actuator mechanism (for example, one or more internal actuators The droplet dispenser is equipped only with an external actuator mechanism (for example, one or more external actuators). It may not have a side actuator. In other words, the droplet dispenser has a nozzle forming layer. At least one action formed on the inner part of the nozzle portion (for example, the diaphragm) The droplet dispenser is equipped with a tuner mechanism (for example, at least one actuator), Any It may also lack an actuator mechanism (for example, an actuator).

[0025] Alternatively, the droplet dispenser may have an external actuator mechanism (for example, one or more external) The droplet dispenser has only an actuator, and the internal actuator mechanism (for example, one) Or it may not have multiple internal actuators. That is, the droplet dispenser may not have At least the outer portion of the nozzle forming layer (for example, the diaphragm) It also includes another actuator mechanism (for example, at least one actuator), and liquid The droplet dispenser is formed on the inner part of the nozzle portion (for example, the diaphragm) of the nozzle forming layer. In some cases, it may not have any actuator mechanism (for example, an actuator). ru.

[0026] The internal actuator mechanism (for example, one or more internal actuators) operates when Less than 50% of the nozzle portion of the nozzle formation layer that deforms, or more typically less than 40%, More typically, they may be formed in less than 30% of cases.

[0027] The external actuator mechanism (for example, one or more external actuators) operates when Less than 50% of the nozzle portion of the nozzle formation layer that deforms, or more typically less than 40%, More typically, they may be formed in less than 30% of cases.

[0028] Surprisingly, the inventors have found that the internal actuator mechanism alone or the external actuator mechanism By providing only this, most (for example, all) of the nozzle portion of the nozzle forming layer Standing (that is, both the inner and outer portions of the nozzle portion of the nozzle forming layer) Compared to known droplet dispensers equipped with a single actuator (which burlaps), It was found that this can improve droplet ejection efficiency.

[0029] For example, a droplet dispenser has an internal actuator mechanism (for example, one or more internal actuators) In embodiments comprising only a chute, the droplet dispenser typically operates in the first direction during use. Direct deflection of the inner portion of the nozzle portion of the nozzle formation layer in the first orientation (for example) It functions through the operation of the internal actuator mechanism that drives the nozzle. The part is typically fixed in place at its periphery (i.e., outer edge). , the curvature of the inner portion of the nozzle portion of the nozzle forming layer in the first direction (for example, the first orientation) Therefore, typically, in the second direction opposite to the first direction (for example, the second direction) This results in compensatory deflection of the outer portion of the nozzle in the nozzle formation layer. Due to the deflection of the nozzle portion of the nozzle-forming layer toward (i.e., into the fluid chamber), In terms of the type, the printing fluid is discharged from the fluid chamber through the fluid chamber outlet. Because the ETer mechanism is provided only in the inner part, during operation, the nozzle part is in the technical field As is known, the majority (for example, all) of the nozzle portion of the nozzle-forming layer This achieves a larger volume than what can be achieved when a single actuator mechanism is provided. It deforms by bending (for example, by forming a more complex shape). In particular, the inventor The nozzle portion is made of a similar material and is much larger than what is possible with existing droplet dispensers. Transform into a shape (and especially a shape having an S-shaped cross-section) that allows for the application of discharge force. It was found that this can be achieved. This increase in discharge force makes the actuator more efficient. Rational configuration (and, for example, more than what is typically used in inkjet printers) The use of actuators with lower output for each individual, and in the case of piezoelectric droplet dispensers, different pressures This will enable the use of electrical materials.

[0030] Similarly, the droplet dispenser has an external actuator mechanism (for example, one or more external actuators). In embodiments that only include a meter, geometric constraints limit the external actuator mechanism. During operation, the nozzle portion of the nozzle-forming layer is larger (than possible using existing equipment). It is certain that deformation occurs due to a large volume of deflection (for example, by forming a more complex shape). It will bear fruit.

[0031] In an alternative embodiment, the droplet dispenser includes at least one internal actuator mechanism (even if (for example, one or more internal actuators) and at least one external actuator mechanism ( For example, it may include one or more external actuators. That is, droplets The discharger has at least a portion of the nozzle portion (for example, the diaphragm) of the nozzle forming layer. For example, at least one (i.e., an internal) actuator machine formed in the inner part The structure (for example, one or more actuators) and the internal actuator mechanism are minimized. At least the nozzle portion (e.g., diaphragm) of the nozzle forming layer that partially surrounds it At least one (i.e., outer) actuary formed in part (for example, the outer part) It may also include an ET mechanism (for example, one or more actuators).

[0032] In embodiments that include both an internal actuator mechanism and an external actuator mechanism, The side actuator mechanism operates, typically in a first direction (for example, a first orientation). As a result, the inner part of the nozzle portion of the nozzle formation layer flexes, and the outer actuator mechanism operates... Typically, the second direction is opposite to the first direction (for example, the first direction). For example, in the second orientation, the outer portion of the nozzle part of the nozzle-forming layer flexes. Nozzle shape Due to the deflection of both the inner and outer portions of the stratified nozzle section, typically, fluid churning occurs. The printing fluid is ejected from the humber through the fluid chamber outlet. The droplet ejector is inside the actuator. Because it is equipped with both a tacker mechanism and an external actuator mechanism, the nozzle portion of the nozzle forming layer The deflection of both the inner and outer parts can be driven (for example, at the same time). In this case as well, a single actuator mechanism (and in particular) is used in the nozzle portion of the nozzle formation layer. , extending over most of the nozzle portion of the nozzle forming layer, for example, within the nozzle portion Only a single actuator mechanism that overlaps both the side and outer portions is provided. With a larger volume of deflection than what is achievable when it is being used (for example, more complex The nozzle portion can be deformed by forming its shape. In particular, the inventor Using the simultaneous operation of the inner actuator mechanism and the outer actuator mechanism, the nozzle section To deform it into a shape that allows it to exert a greater ejection force on the printing fluid. It was found that this is possible. In this case as well, this makes the actuator more efficient. Configuration (and, for example, individually, compared to those typically used in inkjet printers) This allows for the use of actuators with lower output.

[0033] The droplet dispenser may include at least one electronic component integrated with the substrate. At least one electronic component must be at least one active electronic component (for example, a transistor). It may include, or otherwise, at least one electronic component, It may include one passive electronic component (e.g., a resistor). At least one electronic component. The product consists of at least one CMOS (i.e., complementary metal oxide semiconductor) integrated with the substrate. (Body) May contain electronic components.

[0034] It is equipped with an internal actuator mechanism (i.e., the presence or absence of an external actuator mechanism) In embodiments (regardless of), the internal actuator mechanism is typically located at the fluid chamber outlet. It at least partially surrounds it. That is, the internal actuator mechanism is typically , the inner portion of the nozzle portion of the nozzle forming layer that at least partially surrounds the fluid chamber outlet It is formed in such a way that the internal actuator mechanism surrounds the fluid chamber outlet. The internal actuator mechanism may completely enclose the fluid chamber outlet. The actuator mechanism may extend continuously around the fluid chamber outlet.

[0035] The internal actuator mechanism may consist of a single internal actuator.

[0036] The internal actuator mechanism comprises two or more internal actuators, each of which is fluid-driven. The chamber outlet may be partially enclosed. Two or more internal actuators are typical. In terms of type, they are arranged with space between them. Two or more inner actuators are typical. Specifically, they are arranged around the fluid chamber outlet with space between them (i.e., they are spaced apart from each other). (They are not arranged with radial spacing.) Therefore, the inner actuator machine The structure may extend discontinuously around the outlet of the fluid chamber.

[0037] The internal actuator mechanism may be substantially annular (i.e., ring-shaped). The internal actuator mechanism may be centered around the fluid chamber outlet. The inverter mechanism may comprise two or more substantially annular internal actuators. The side actuator mechanism comprises two or more internal actuators, each of which has a partially shaped It is ring-shaped (that is, each is a part of the ring (for example, a sector) (that is, It may have a shape that forms part of the ring. Two or more partially annular inner parts The actuator is centered on the fluid chamber outlet (i.e., the fluid chamber outlet (They may be arranged symmetrically around the periphery.)

[0038] A droplet dispenser with a substantially annular actuator mechanism centered on the fluid chamber outlet By providing, the deflection of the nozzle portion of the nozzle formation layer is typically in a fluid chamber. It is uniform (i.e., symmetrical) around the outlet, thereby preventing droplets from leaving the fluid chamber outlet. The discharge becomes smoother.

[0039] The internal actuator mechanism is a piezoelectric actuator mechanism, for example, an internal piezoelectric actuator It may be a t-mechanism.

[0040] The internal actuator mechanism (i.e., the internal piezoelectric actuator mechanism) may be one or more. It may be equipped with an internal piezoelectric actuator.

[0041] At least one of one or more internal piezoelectric actuators is typically used for driving A piezoelectric element (i.e., an inner pressure) is placed between the pair of electrodes (i.e., the pair of inner driving electrodes). It is equipped with an electrical system.

[0042] Each of the one or more internal piezoelectric actuators is provided between the corresponding pair of drive electrodes. It comprises a piezoelectric element (i.e., an inner piezoelectric element provided between the corresponding inner pair of drive electrodes). There are cases where this is possible.

[0043] The internal piezoelectric actuator mechanism is substantially annular (i.e., ring-shaped). Yes, there is. The internal piezoelectric actuator mechanism may be centered around the fluid chamber outlet.

[0044] The internal actuator mechanism may consist of a single internal piezoelectric actuator. A single internal piezoelectric actuator may be substantially annular. The path may be centered around the outlet of the fluid chamber.

[0045] The internal actuator mechanism may include two or more internal piezoelectric actuators. The internal actuator mechanism comprises two or more substantially annular internal piezoelectric actuators. In some cases, the internal actuator mechanism comprises two or more internal piezoelectric actuators, Each of them has a partially annular shape (i.e., each is part of an annular body (for example, a segment) It may be shaped such that it forms a ring (i.e., part of a ring). The partially annular internal piezoelectric actuator is centered on the fluid chamber outlet (that is, (In some cases, they may be arranged symmetrically around the outlet of the fluid chamber.)

[0046] An internal piezoelectric actuator is formed from several parts of the same continuous internal piezoelectric body. There may be cases where this is the case. However, each of the internal piezoelectric actuators is typically itself Each body is equipped with a pair of internal drive electrodes.

[0047] The internal piezoelectric element may not extend into the outer portion of the nozzle portion of the nozzle-forming layer. .

[0048] The nozzle portion of the nozzle forming layer comprises an inner portion and an outer portion, and the inner piezoelectric actuator The structure is formed in the inner part, and the outer part does not have a piezoelectric actuator mechanism formed on it. Furthermore, the internal piezoelectric actuator mechanism operates, and the internal piezoelectric actuator mechanism The force applied directly to the inner portion causes the inner portion to move in a first direction (i.e., a first direction). It deforms in such a way, and the outer portion is connected to the inner portion and maintained around the peripheral edge of the outer portion. Because it is held, it deforms in the opposite second direction (i.e., the opposite second direction). There are cases where this occurs.

[0049] An internal piezoelectric actuator mechanism is typically operated (i.e., the internal piezoelectric actuator Less than 50% of the surface area of ​​the nozzle portion that deforms (during the operation of the tuner mechanism), or more typically It is formed in less than 40%, or more typically less than 30%.

[0050] The inner pair of drive electrodes may be electrically connected to the drive circuit. The drive circuit is Typically, a potential difference is selectively applied between the inner pair of drive electrodes (i.e., activated) When (for example, during use), it is connected to a power supply (for example, a voltage signal line) and the operating signal is It is configured to bend the internal piezoelectric element when it responds to a certain condition.

[0051] One or more electrodes of the inner drive electrode pair are integrated with the substrate, at least one It may be electrically connected to electronic components.

[0052] It is equipped with an external actuator mechanism (i.e., the presence or absence of an internal actuator mechanism) In embodiments (regardless of), the external actuator mechanism is typically located at the fluid chamber outlet. It at least partially surrounds it. That is, the external actuator mechanism is typically , outside the nozzle portion of the nozzle formation layer that at least partially surrounds the fluid chamber outlet It is formed in part.

[0053] The external actuator mechanism may surround the fluid chamber outlet. The ETA mechanism may completely enclose the fluid chamber outlet. (Outer actuator mechanism) The structure may extend continuously around the outlet of the fluid chamber.

[0054] The external actuator mechanism may consist of a single external actuator.

[0055] The external actuator mechanism comprises two or more external actuators, each of which is fluid-driven. The chamber outlet may be partially enclosed. Two or more external actuators are typical. In terms of type, they are arranged with space between them around the fluid chamber outlet (i.e., semi-semi (They are not arranged with a gap in the radial direction). Therefore, the outer actuator mechanism They may extend discontinuously around the outlet of the fluid chamber.

[0056] The external actuator mechanism may be substantially annular (i.e., ring-shaped). The external actuator mechanism may be centered around the fluid chamber outlet. The inverter mechanism may include two or more substantially annular external actuators. The side actuator mechanism comprises two or more external actuators, each of which has a partially shaped It is ring-shaped (that is, each is a part of the ring (for example, a sector) (that is, It may have a shape that forms part of the ring. Two or more partially annular outer rings The actuator is centered on the fluid chamber outlet (i.e., the fluid chamber outlet (They may be arranged symmetrically around the periphery.)

[0057] A droplet dispenser with a substantially annular actuator mechanism centered on the fluid chamber outlet By providing, the deflection of the nozzle portion of the nozzle formation layer is typically in a fluid chamber. It is uniform (i.e., symmetrical) around the outlet, thereby preventing droplets from leaving the fluid chamber outlet. The discharge becomes smoother.

[0058] The external actuator mechanism is a piezoelectric actuator mechanism, for example, an external piezoelectric actuator It may be a t-mechanism.

[0059] The external actuator mechanism (i.e., the external piezoelectric actuator mechanism) may consist of one or more components. It may be equipped with an external piezoelectric actuator.

[0060] At least one of one or more external piezoelectric actuators typically drives A piezoelectric element (i.e., an outer pressure) is placed between the pair of electrodes (i.e., the pair of outer driving electrodes). It is equipped with an electrical system.

[0061] Each of the one or more external piezoelectric actuators is provided between the corresponding pair of drive electrodes. It is equipped with a piezoelectric element (i.e., an outer piezoelectric element provided between the corresponding pair of outer drive electrodes). There are cases where this is possible.

[0062] The external piezoelectric actuator mechanism is substantially annular (i.e., ring-shaped). Yes, there is. The external piezoelectric actuator mechanism may be centered around the fluid chamber outlet.

[0063] The external actuator mechanism may consist of a single external piezoelectric actuator. A single external piezoelectric actuator may be substantially annular. The cutter may be centered around the outlet of the fluid chamber.

[0064] The external actuator mechanism may include two or more external piezoelectric actuators. The external actuator mechanism comprises two or more substantially annular external piezoelectric actuators. In some cases, the external actuator mechanism comprises two or more external piezoelectric actuators, Each of them has a partially annular shape (i.e., each is part of an annular body (for example, a segment) It may be shaped such that it forms a ring (i.e., part of a ring). The partially annular outer piezoelectric actuator is centered on the fluid chamber outlet (that is, (In some cases, they may be arranged symmetrically around the outlet of the fluid chamber.)

[0065] The external piezoelectric actuator is formed from several parts of the same continuous external piezoelectric body. There may be cases where this is the case. However, each of the external piezoelectric actuators is typically itself Each part of the body is equipped with an external drive electrode.

[0066] The outer piezoelectric element may not extend into the inner portion of the nozzle portion of the nozzle-forming layer. .

[0067] The nozzle portion of the nozzle forming layer comprises an outer portion and an inner portion, and the outer piezoelectric actuator The structure is formed on the outer part, and the inner part does not have a piezoelectric actuator mechanism formed on it. Furthermore, the external piezoelectric actuator mechanism is activated, and by the external piezoelectric actuator mechanism The force applied directly to the outer portion causes the outer portion to move in a first direction (i.e., a first direction). In this state, the inner portion is deformed, and the inner portion is connected to and held within the outer portion. This may result in deformation in the opposite second direction (i.e., the opposite second direction).

[0068] The external piezoelectric actuator mechanism is typically operated (i.e., the external piezoelectric actuator) Less than 50% of the surface area of ​​the nozzle portion that deforms (during the operation of the tuner mechanism), or more typically It is formed in less than 40%, or more typically less than 30%.

[0069] The outer pair of drive electrodes is connected to the drive circuit (for example, the inner pair of drive electrodes, if present). It may be electrically connected to the connected drive circuit. The drive circuit is typically This selectively applies a potential difference between the outer pair of drive electrodes (i.e., when it is activated ( For example, when in use, it is connected to a power supply (for example, a voltage signal line) and responds to an operating signal. When this happens, the outer piezoelectric element is configured to bend.

[0070] One or more electrodes of the pair of outer drive electrodes are integrated with the substrate, at least one It may be electrically connected to electronic components.

[0071] In embodiments that include both an internal actuator mechanism and an external actuator mechanism, the external The side actuator mechanism typically encloses the inner actuator mechanism at least partially. It surrounds. In other words, the outer actuator mechanism is typically the nozzle of the nozzle formation layer. It at least partially encloses the internal actuator mechanism formed in the inner part of the section. It is formed on the outer portion of the nozzle area of ​​the nozzle formation layer.

[0072] The outer actuator mechanism may surround the inner actuator mechanism. The actuator mechanism may completely enclose the internal actuator mechanism. The actuator mechanism may extend continuously around the inner actuator mechanism. ru.

[0073] The external actuator mechanism comprises two or more external actuators, each of which is an internal actuator. The actuator mechanism may be partially surrounded by two or more external actuators. These are typically arranged at intervals from each other around the internal actuator mechanism. Therefore, the outer actuator mechanism extends discontinuously around the inner actuator mechanism. This can sometimes happen.

[0074] The internal actuator mechanism is typically located at the outlet of the fluid chamber (for example, the fluid chamber It is installed closer to the periphery of the exhaust outlet (i.e., closer to the outer actuator mechanism). The external actuator mechanism is typically located at the outlet of the fluid chamber (for example, the flow Further away from the periphery of the body chamber outlet (i.e., further away from the internal actuator mechanism) It is provided.

[0075] The outer actuator mechanism is typically spaced apart from the inner actuator mechanism. In other words, they are arranged in the radial direction.

[0076] Both the inner actuator mechanism and the outer actuator mechanism are located at the outlet of the fluid chamber. In some cases, the heart is located on the coaxial axis. The inner actuator mechanism and the outer actuator mechanism are coaxial. They may be located on top. The inner actuator mechanism and the outer actuator mechanism are They may be concentric. Both the inner actuator mechanism and the outer actuator mechanism In some cases, the inner actuator is formed symmetrically around the fluid chamber outlet. In some cases, both the main mechanism and the external actuator mechanism may be arranged concentrically.

[0077] A droplet dispenser with a substantially annular actuator mechanism centered on the fluid chamber outlet By providing, the deflection of the nozzle portion of the nozzle formation layer is typically in a fluid chamber. It is uniform (i.e., symmetrical) around the outlet, thereby preventing droplets from leaving the fluid chamber outlet. The discharge becomes smoother.

[0078] The internal actuator mechanism is a piezoelectric actuator mechanism, for example, an internal piezoelectric actuator The actuator mechanism is and / or the external actuator mechanism is a piezoelectric actuator mechanism, for example. For example, it may be an external piezoelectric actuator mechanism. By calling it an actuator mechanism, the external actuator mechanism inevitably becomes a piezoelectric actuator. It is not the case that it is an ETA mechanism (i.e., an external piezoelectric actuator mechanism). It should be understood. Similarly, the external actuator mechanism can be called the external piezoelectric actuator mechanism. Therefore, the internal actuator mechanism is necessarily a piezoelectric actuator mechanism (i.e., internal pressure It should be understood that this does not mean it is an electric actuator mechanism. For example, the inside One of the actuator mechanism and the external actuator mechanism is a piezoelectric actuator mechanism. In other words, either an internal piezoelectric actuator mechanism or an external piezoelectric actuator mechanism Yes, the other of the inner actuator mechanism and the outer actuator mechanism is a non-piezoelectric actuator. Diverter mechanism (i.e., external non-piezoelectric actuator mechanism or internal non-piezoelectric actuator) It may be either of the mechanisms. Alternatively, it may be an internal actuator mechanism and an external actuator. Both sides of the tuner mechanism are piezoelectric actuator mechanisms (i.e., internal piezoelectric actuator mechanism) It may be a structure and an external piezoelectric actuator mechanism.

[0079] The internal actuator mechanism (for example, the internal piezoelectric actuator mechanism) may be one or more. It is equipped with an internal piezoelectric actuator and an external actuator mechanism (for example, an external piezoelectric actuator The inverter mechanism may include one or more external piezoelectric actuators. The system includes one or more external piezoelectric actuators and one or more internal piezoelectric actuators. They are at least partially besieging Ta.

[0080] Each of the one or more internal piezoelectric actuators is provided between the corresponding pair of drive electrodes. It comprises a piezoelectric element (i.e., an inner piezoelectric element provided between the corresponding inner pair of drive electrodes). In some cases, one or more external piezoelectric actuators may have a corresponding drive electrode. A piezoelectric element provided between the pairs (i.e., an outer element provided between the corresponding pairs of outer drive electrodes) It may be equipped with a side piezoelectric element. However, the piezoelectric element of the internal actuator mechanism is inside By calling it a piezoelectric element, the external actuator mechanism inevitably includes an external piezoelectric element. It is understood that this is meaningless (for example, the external actuator mechanism may be non-piezoelectric). Similarly, by calling the piezoelectric element of the external actuator mechanism the external piezoelectric element, the internal actuator... This does not mean that a cutter mechanism necessarily has an internal piezoelectric element (for example, an internal actuator). It will be understood that the tuner mechanism can be non-piezoelectric.

[0081] Both the inner and outer piezoelectric elements are formed from several parts of the same continuous piezoelectric material. In some cases, the inner piezoelectric element and the outer piezoelectric element are separate (i.e., connected). It may be a piezoelectric element that is not connected. The inner piezoelectric element and the outer piezoelectric element are spaced apart from each other. They may be arranged in that way.

[0082] Both the inner pair of drive electrodes and the outer pair of drive electrodes are electrically connected to the drive circuit. In some cases, the drive circuit typically selectively applies a first potential difference between the inner drive electrode pair. When applied (i.e., when activated (for example, when in use), power supply (for example, voltage signal) When connected to a line and responding to an operating signal, the inner piezoelectric element is connected in the first direction. Furthermore, a second potential difference is applied between the pair of outer drive electrodes, in the opposite direction to the first direction. The outer piezoelectric element is configured to bend in the second direction.

[0083] The drive circuit is connected to the power supply (e.g., voltage signal line) when the droplet dispenser is in use. Then, a first potential difference is applied between the pair of inner drive electrodes, and the inner piezoelectric in the first direction is activated. The body is bent, and a second potential difference is applied between the pair of outer drive electrodes, and the first direction and The outer piezoelectric element can be configured to be curved in the opposite, second direction.

[0084] The first and second potential differences typically have similar (e.g., the same) magnitudes. The first and second potential differences typically have opposite polarities.

[0085] One or more electrodes from the inner pair of drive electrodes and the outer pair of drive electrodes are connected to the substrate. It may be electrically connected to at least one integrated electronic component.

[0086] One or more internal piezoelectric elements (if present) and / or one or more external pressure elements If an electric element (if present) is used, one or more types of piezoelectric materials that can be processed at temperatures below 450°C are used. It may include (for example, being formed from such piezoelectric materials).

[0087] When temperatures exceed 300°C, integrated electronic components (such as CMOS electronic components) typically... At temperatures above 450°C, degradation begins, impairing the device's operation and reducing its efficiency. Integrated electronic components (e.g., CMOS electronic components) are typically even more substantial. It deteriorates. Therefore, by using piezoelectric materials that can be processed at temperatures below 450°C, Furthermore, the piezoelectric actuator is processed without causing substantial damage to the electronic components, (and For example, it can be integrated with the electronic components of the drive circuit.

[0088] One or more inner piezoelectric elements and / or one or more outer piezoelectric elements, 300°C Includes one or more types of piezoelectric materials that can be processed at temperatures below (for example, such piezoelectric materials (May be formed from) Use piezoelectric materials that can be processed at temperatures below 300°C. This further reduces damage to the electronic components when handling the piezoelectric actuator, (even It can be integrated with the electronic components of the drive circuit. It can be processed at temperatures below 300°C. By using piezoelectric materials, typically on a single substrate (for example, a single substrate Achieving higher yield of functional devices from mass production of multiple fluid dischargers (from EHA) It is possible.

[0089] By integrating the piezoelectric actuator with electronic components (for example, drive electronics), Typically, in existing devices, any piezoelectric printhead microchip is The need to provide a separate (and separately provided) droplet ejector drive electronic device is reduced or eliminated. Therefore, multiple droplet dispensers can be integrated in close proximity on a single chip. This increases the number of nozzles per chip and reduces the overall size of the printhead. Furthermore, a higher printhead nozzle density than is achievable with existing piezoelectric printheads is It becomes possible. Other advantages associated with integration on a single printhead chip include the most Ultimate reduction in manufacturing costs, reduction in printer system costs, modularization, devices Improvements to the printer system include increased reliability, redundancy, and throughput. .

[0090] Piezoelectric materials that can be processed at temperatures below 450°C (or below 300°C) are typically suitable for higher temperatures. Piezoelectric properties that are less efficient than piezoelectric materials requiring processing at a certain temperature (e.g., lower piezoelectric constant) It has, for example, from high-temperature treatable piezoelectric materials such as lead zirconate titanate (PZT). The formed piezoelectric actuator is made of a piezoelectric material that can be processed at low temperatures, such as aluminum nitride (AlN). A piezoelectric actuator made from a material is an order of magnitude larger, assuming all other elements are equal. It can exert a great deal of power.

[0091] However, the inventors have developed an internal piezoelectric actuator mechanism and / or an external piezoelectric actuator. By providing an ETER mechanism, (especially as seen in existing piezoelectric droplet dispensers, piezoelectric The actuator is located further away from the fluid chamber outlet and on the wall of the fluid chamber. (compared to the above), it is possible to use piezoelectric materials that can be processed at low temperatures, sufficiently to enable droplet emission. It was found that the droplet ejection efficiency of the dispenser can be improved. Low-temperature processable piezoelectric material The use of the droplet dispenser in this invention is made possible by the specific structure of the droplet dispenser, and the structure itself This makes it possible to integrate the droplet dispenser with the drive electronic device.

[0092] In particular, by applying an electric field (i.e., a potential difference) between one or more pairs of inner drive electrodes Typically, this induces deformation of one or more internal piezoelectric actuators, driving the outer actuators. By applying an electric field (i.e., a potential difference) between one or more pairs of electrodes, typically, Deformation is induced in one or more external piezoelectric actuators, and each of these deformations causes the nozzle This results in very damped vibrations in the nozzle portion of the cambium. The vibration creates an oscillating pressure field within the fluid chamber, causing droplets to pass through the fluid chamber outlet. Discharge is activated. (Fluid chamber located further away from the fluid chamber outlet) By displacing the nozzle portion of the nozzle-forming layer (rather than displacing the wall), the fluid The fluid pressure required for droplet discharge becomes relatively small, and therefore the operating force is relatively small. This makes it easier to use low-temperature processable piezoelectric materials with lower piezoelectric constants. Yes.

[0093] The force exerted by a piezoelectric actuator containing a piezoelectric material that can be processed at low temperatures is (compared to a piezoelectric material that can be processed at high temperatures). Because it is relatively small (compared to devices that use piezoelectric actuators containing materials), Therefore, because the fluid pressure achieved is relatively small, adjacent fluid channels on the print head Acoustic crosstalk between hummers (caused by sound waves propagating through the print head) is reduced. The decrease in pressure reduces the fluid compressibility, making acoustic crosstalk less likely to occur. Yes. Due to the reduction in acoustic crosstalk levels, print quality does not deteriorate. This allows for even closer integration of adjacent droplet dispensers on the head.

[0094] Processing of piezoelectric materials typically involves depositing the piezoelectric material. Further processing of the piezoelectric material thereafter (i.e., post-processing of the deposited piezoelectric material, or "post-processing") This can also include the processing of piezoelectric materials, which involves the firing of the piezoelectric material (i.e., after deposition). It can include more.

[0095] Piezoelectric materials that can be processed at temperatures below 450°C (or below 300°C) are typically 45 It is a piezoelectric material that can be deposited at temperatures below 0°C (or below 300°C). Below 450°C (or Piezoelectric materials that can be processed at temperatures below 300°C are typically those that can be processed at temperatures above 450°C (or 300°C). No post-deposition treatment (such as post-deposition annealing) at temperatures above ℃ is required. Piezoelectric materials that can be processed at temperatures below 450°C (or below 300°C) are typically, Annealable at temperatures below 450°C (or below 300°C) (after deposition) (i.e.) (When annealing of the piezoelectric material is necessary to make the piezoelectric material piezoelectric) .

[0096] One or more types of piezoelectric materials are typically used when the piezoelectric actuator is below 450°C (or To enable manufacturing at temperatures below 300°C, the temperature below 450°C (or below 300°C) It can be processed at any degree (e.g., it can be deposited and, if necessary, annealed). 450 Manufacturing piezoelectric actuators at temperatures below ℃ (or below 300℃) typically results in: This enables the integration of a piezoelectric actuator with at least one electronic component integrated with the substrate. Yes.

[0097] Therefore, one or more inner piezoelectric elements and / or one or more outer piezoelectric elements Typically, this occurs at temperatures below 450°C (or below 300°C), (for example, one or multiple types) It can be formed by depositing several types of piezoelectric materials and, if necessary, by annealing.

[0098] One or more types of piezoelectric materials are typically used on substrates with a temperature of less than 450°C (or less than 300°C). It is processable by temperature (for example, it can be deposited and, if necessary, annealed). In other words, the temperature of the substrate is typically related to the processing of one or more types of piezoelectric materials (e.g., stacks During deposition and annealing (if necessary), temperatures may exceed 450°C (or 300°C). It does not happen. The substrate temperature is typically 450°C (or 300°C) during piezoelectric formation. The substrate temperature will not reach or exceed ). During manufacturing, the temperature of the substrate will never reach or exceed 450°C (or 300°C). During the manufacture of a droplet dispenser (for example, the entire droplet dispenser), temperatures reach 450°C (or 300°C). There are times when it neither goes so nor exceeds.

[0099] One or more internal piezoelectric elements and / or one or more external piezoelectric elements are typically It can be deposited by one or more (e.g., low-temperature) physical vapor deposition (PVD) methods. (For example, to deposit). One or more internal piezoelectric elements and / or one or more The outer piezoelectric element is typically used in temperatures below 450°C (or more preferably below 300°C). At a temperature of 10 degrees (i.e., substrate temperature), by one or more (e.g., low-temperature) physical vapor deposition methods It can be deposited (for example, it deposits).

[0100] One or more inner piezoelectric elements and / or one or more outer piezoelectric elements are of type 1 or Includes multiple types of piezoelectric materials that can be PVD deposited (e.g., low temperature) (e.g., such materials (may be formed from) one or more internal piezoelectric elements and / or one or more The outer piezoelectric elements include one or more types of (e.g., low-temperature) PVD-deposited piezoelectric materials. (For example, they may be formed from such materials.)

[0101] Physical vapor deposition (e.g., low-temperature physical vapor deposition) uses the following deposition method: cathode arc vapor deposition. Attachment, electron beam physical vapor phase growth, evaporation deposition, pulsed laser deposition, sputter deposition, one of the following: It may include one or more sputtering elements. Sputter deposition is performed using one or more sputtering elements. It can include sputtering of materials from the source.

[0102] One or more types of piezoelectric materials are typically deposited at temperatures below 450°C (or below 300°C). It has a temperature. One or more types of piezoelectric materials are PV below 450°C (or below 300°C) D can have a deposition temperature. One or more types of piezoelectric materials may have a deposition temperature of less than 450°C (or 3 It can have a sputtering temperature of less than 00°C. One or more types of piezoelectric materials are It can have a post-storage annealing temperature of less than 450°C (or less than 300°C). The deposition temperature, PVD deposition temperature, sputtering temperature, or annealing temperature is typically... It should be understood that this refers to the temperature of the substrate during each process.

[0103] One or more inner piezoelectric elements and / or one or more outer piezoelectric elements are of type 1 pressure It may include (for example, be formed from) electrical materials. Alternatively, one or Multiple internal piezoelectric elements and / or one or more external piezoelectric elements include two or more types of piezoelectric materials. It can be (for example, formed from such materials).

[0104] One or more inner piezoelectric elements and / or one or more outer piezoelectric elements are made of aluminum. Umium and nitrogen, and optionally scandium, yttrium, titanium, magnesium One or more elements selected from um, hafnium, zirconium, tin, chromium, and boron. It may include (for example, be formed from) a ceramic material containing the element.

[0105] One or more inner piezoelectric elements and / or one or more outer piezoelectric elements are aluminum nitride. It may contain aluminum (AlN) (for example, formed from aluminum nitride (AlN)). .

[0106] One or more inner piezoelectric elements and / or one or more outer piezoelectric elements are made of zinc oxide. It may contain (ZnO) (for example, formed from zinc oxide (ZnO)).

[0107] One or more types of piezoelectric materials include aluminum nitride and / or zinc oxide (for example) (May be formed from aluminum nitride and / or zinc oxide.)

[0108] Aluminum nitride can consist of high-purity aluminum nitride. Alternatively, aluminum nitride Nium can contain one or more other elements (i.e., aluminum nitride). (This may include aluminum nitride compounds). Aluminum nitride contains the following elements: That is, scandium, yttrium, titanium, magnesium, hafnium, zirconium It may contain one or more of the following elements: um, tin, chromium, and boron.

[0109] One or more inner piezoelectric elements and / or one or more outer piezoelectric elements are nitrided scaling. Contains scandium aluminum (ScAlN) (for example, scandium aluminum nitride) (Can be formed from (ScAlN)). Scandi in scandium aluminum nitride The percentage of 'm' is typically within the limits of manufacturability. 31 To optimize the piezoelectric constant Selected. For example, Sc x Al 1-x The value of x in N is typically 0 <x≦0.5 It is selected from the range. As the proportion of scandium increases, typically, 31 The value is large The piezoelectric effect becomes stronger. The mass percentage (i.e., weight percentage) of iondium is typically greater than 5%. i. The mass percentage of scandium in scandium aluminum nitride (i.e., The weight percentage is typically greater than 10%. The mass percentage (i.e., weight percentage) of scandium in a given case is typically 2 Greater than 0%. Mass percentage of scandium in scandium aluminum nitride. (i.e., weight percent) is typically greater than 30%. Scandium nitride The mass percentage (i.e., weight percentage) of scandium in luminium is, In terms of type, it is greater than 40%. The quality of scandium in scandium aluminum nitride. The quantity percentage (i.e., weight percentage) may be 50% or less.

[0110] Aluminum nitride compounds (and, in particular, scandium aluminum nitride) Luminium and zinc oxide are heated at temperatures below 450°C, or more preferably below 300°C. It is a piezoelectric material that can be deposited. Aluminum nitride compounds (and, in particular, s Aluminum nitride containing candium aluminum and zinc oxide are used at temperatures below 450°C, Preferably at a temperature of less than 300°C, for physical vapor phase growth (e.g., sputtering) Therefore, it is a piezoelectric material that can be deposited. Aluminum nitride compounds (and, in particular, Aluminum nitride (including scandium aluminum nitride) and zinc oxide are typically This piezoelectric material does not require annealing after deposition.

[0111] One or more inner piezoelectric elements and / or one or more outer piezoelectric elements, 450°C Nitride deposits deposited by physical vapor phase growth at temperatures below, or more preferably below 300°C Luminium (for example, aluminum nitride compounds, for example, scandium nitride aluminum) It may contain (for example, be formed from) um and / or zinc oxide.

[0112] One or more inner piezoelectric elements and / or one or more outer piezoelectric elements are of type 1 or Multiple types of Group III-V and / or Group II-VI semiconductors (i.e., Group III and Group VI of the periodic table) Compound semiconductors containing elements from Group V and / or Groups II and VI) (for example, These can be formed from them. These III-V and II-VI semiconductors are typically This is a hexagonal wurtzite crystal structure. It crystallizes into a hexagonal wurtzite crystal structure. II-VI semiconductors typically exhibit piezoelectric properties due to their non-centrosymmetric crystal structure. It is a sexual thing.

[0113] One or more inner piezoelectric bodies and / or one or more outer piezoelectric bodies may include (e.g., be formed or composed of) a non-ferroelectric piezoelectric material. One or more types of piezoelectric materials may be one or more types of non-ferroelectric piezoelectric materials. Ferroelectric materials typically require polarization adjustment under an applied strong electric field (i.e., after deposition). Non-ferroelectric piezoelectric materials typically do not require polarization adjustment.

[0114] One or more inner piezoelectric bodies and / or one or more outer piezoelectric bodies typically have a piezoelectric constant d having a magnitude of less than 30 pC / N, or more typically less than 20 pC / N, or even more typically less than 10 pC / N. One or more types of piezoelectric materials 31 typically have a piezoelectric constant d having a magnitude of less than 30 pC / N, or more typically less than 20 pC / N, or even more typically less than 10 pC / N. 31

[0115] One or more types of piezoelectric materials are typically CMOS compatible. Thus, one or more types of piezoelectric materials typically do not contain substances that damage CMOS electronic structures, or are typically processable (e.g., depositable and, if necessary, annealable) without using such substances. For example, the processing of one or more types of piezoelectric materials (e.g., deposition and, if necessary, annealing) typically does not involve the use of acids such as hydrochloric acid (e.g., strong acids) and / or alkalis such as potassium hydroxide (e.g., strong alkalis).

[0116] ​​​The nozzle forming layer may include a nozzle plate. The nozzle plate may be composed of a single layer of material. Alternatively, the nozzle plate may be composed of a laminated structure of two or more layers of (e.g., different) materials. The nozzle plate typically has a Young's modulus (i.e., tensile elastic modulus) of 70 G Pa to 300 GPa for each of one or more materials from which it is formed. The nozzle plate may be formed from one or more of silicon dioxide (SiO2), silicon nitride (Si3N4), silicon carbide (SiC), silicon oxynitride (SiO x N y ).

[0117] The nozzle forming layer may include an electrical interconnection layer. The electrical interconnection layer typically includes one or more electrical connections (e.g., electrical wiring), typically surrounded by an electrical insulator. The one or more electrical connections (e.g., electrical wiring) are typically formed from metal or a metal alloy. Suitable metals include aluminum, copper, and tungsten sten, and their alloys. The electrical insulator is typically formed from a dielectric material such as silicon dioxide (S iO2), silicon nitride (Si3N4), or silicon oxynitride (SiO x N y ).

[0118] The electrical interconnection layer may be provided (e.g., formed) between the substrate and the nozzle plate. The electrical interconnection layer may be provided (e.g., formed) on the second surface of the substrate, and the nozzle plate may be provided (e.g., formed) on the electrical interconnection layer. The nozzle plate may include one or more apertures. ​​​​​Through this, an electrical connection point to the electrical interconnection layer can be formed.

[0119] The nozzle portion of the electrical interconnection layer forms at least a part of the nozzle portion of the nozzle forming layer. In some cases, the nozzle portion of the electrical interconnection layer may be composed of dielectric material. Alternatively, the electrical interconnection layer does not form part of the nozzle portion of the nozzle forming layer. There are cases where this is the case.

[0120] The inner and outer pairs of drive electrodes are typically made of metal (titanium, platinum, etc.). It comprises one or more layers of aluminum, tungsten, or alloys thereof. The pair of dynamic electrodes and the pair of outer drive electrodes can be stacked. For example, the inner drive electrode The electrode pair and the outer drive electrode pair are made of aluminum-molybdenum (Al / Mb) multilayer studs. It can be formed from a pair of inner and outer drive electrodes, typically This is at temperatures below 450°C (or more typically below 300°C) (i.e., substrate temperature) It is deposited by PVD (at a certain temperature), (for example, at low temperatures).

[0121] One or more of the inner drive electrode pair and the outer drive electrode pair are at least one It may be electrically connected to the electronic components. The inner drive electrode pair and the outer drive electrode Each of the pole pairs may be electrically connected to at least one electronic component.

[0122] A droplet dispenser may be equipped with a drive circuit. Alternatively, the drive circuit may be a droplet dispenser It is possible to form a part of a print head that includes the drive circuit inside. Generates the potential difference necessary to operate the actuator mechanism and the external actuator mechanism. Cause it to be done.

[0123] The droplet ejector can include a control circuit. As an alternative, the control circuit can form part of a print head that includes the droplet ejector. The control circuit typically determines when to operate the drive circuit. In embodiments where the droplet ejector includes a drive circuit, the drive circuit is typically integrated with the substrate. At least one electronic component typically forms part of the drive circuit. One or more of the inner drive electrode pairs and the outer drive electrode pairs may be electrically connected to the drive circuit. Each of the inner drive electrode pairs and the outer drive electrode pairs may be electrically connected to the drive circuit. When present, at least one electronic component is configured to provide a (e.g., variable) potential difference (i.e., voltage) between one or more pairs of the inner drive electrodes (i.e., during use). At least one electronic component is configured to change the potential difference (i.e., voltage) between one or more pairs of the inner drive electrodes (i.e., during use).

[0124] When present, at least one electronic component is configured to provide a (e.g., variable) potential difference (i.e., voltage) between one or more pairs of the outer drive electrodes (i.e., during use). At least one electronic component is configured to change the potential difference (i.e., voltage) between one or more pairs of the outer drive electrodes (i.e., during use).

[0125]

[0126] ​​​​​​​​​​​​​​

[0127] At least one electronic component provides a first potential difference between one or more pairs of internal drive electrodes. It is configured to provide and provide a second potential difference between one or more pairs of outer drive electrodes. In some cases, at least one electronic component simultaneously controls the first potential difference and the second potential difference. It may be configured to provide the first and second potential differences, typically , are of similar magnitude (for example, the same). The first potential difference and the second potential difference are typically, They have opposite polarities.

[0128] The drive circuit includes a CMOS circuit (e.g., a CMOS electronic circuit) integrated with the substrate. It is possible. CMOS electronic components (for example, CMOS that form part of a CMOS circuit) Electronic components, i.e., CMOS electronic circuits, are typically manufactured using standard CMOS manufacturing methods. It is formed on the substrate (for example, it grows on the substrate). For example, integrated CMO S electronic components are manufactured using the following methods: physical vapor deposition, chemical vapor deposition, electrochemical deposition, molecular beam epidural deposition. Xy, atomic layer deposition, ion implantation, photopatterning, reactive ion etching, plastic Deposition can be carried out using one or more of the Zuma irradiation methods.

[0129] The droplet dispenser includes an internal actuator mechanism, an external actuator mechanism, and a nozzle formation mechanism. A protective layer may be added to cover the layer. The protective layer is typically chemically inert. It is impermeable and / or fluid-repellent. The protective layer should have a low Young's modulus (i.e., tensile modulus). Substantially less than the Young's modulus of the sluice formation layer (and, in particular, the nozzle plate) and / or piezoelectric material It should have the lowest Young's modulus. The protective layer typically has a Young's modulus of less than 50 GPa. It has. The protective layer is made of one of the following materials: polyimide or polytetrafluoroethylene (PTFE) or This includes multiple types of polymer materials, diamond-like carbon (DLC), and negative or positive photoresistance. Photoresist, or epoxy-based photoresist (Su-8, BCB, etc.), or any combination thereof. It can be formed from a combination of these different materials. The protective layer has different fluid wetting properties. It may contain two or more layers of material.

[0130] Droplet dispensers are typically monolithic. Droplet dispensers are typically integrated. It is designed (i.e., it is an integrated droplet dispenser). Substrate, nozzle forming layer, actuary A drive mechanism, a fluid chamber, at least one electronic component (for example, a drive electronic device), and The protective layers are typically integrated (i.e., combined with each other). The ejector typically consists of a substrate, a nozzle forming layer, an actuator mechanism, (for example, a drive electron) At least one electronic component and protective layer of the apparatus are deposited through one or more deposition processes. They are manufactured by integral molding. Droplet dispensers are typically one or more Individually formed components (for example, individually formed substrates, nozzle forming layers, actsuaries) Manufactured by joining together the ET mechanism, electronic components and / or protective layer. No.

[0131] The mounting surface of the substrate may include a fluid inlet aperture that communicates with the fluid chamber. be.

[0132] The fluid chamber may be substantially elongated. The fluid chamber is typically located at the base of the substrate. It extends from the mounting surface to the nozzle surface. The fluid chamber is typically located on the mounting surface and / or nozzle. It extends along a direction substantially perpendicular to the surface. Fluid chambers are typically It extends between the fluid inlet aperture and the fluid chamber outlet.

[0133] The fluid chamber may have a substantially circular cross-section passing through the plane of the substrate. The cross-section passing through the plane of the substrate may be substantially polygonal (for example, a fluid chamber may have a cross-section (It can be practically square.) The fluid chamber may have multiple cross-sections passing through the plane of the substrate. .

[0134] The fluid chamber may have a substantially prismatic shape. The longitudinal axis is typically aligned with a direction substantially perpendicular to the mounting surface and / or nozzle surface. It persists.

[0135] The fluid chamber may be substantially cylindrical in shape. The longitudinal length of a substantially cylindrical chamber The directional axis is typically aligned along a direction substantially perpendicular to the mounting surface and / or nozzle surface. It persists.

[0136] The nozzle portion of the nozzle-forming layer typically crosses the fluid chamber of the nozzle-forming layer. This is a portion that extends and thereby forms at least one wall of the fluid chamber.

[0137] The nozzle portion of the nozzle-forming layer typically protrudes beyond the substrate, and therefore, the substrate and It is independently flexible.

[0138] The nozzle portion of the nozzle cambium may be substantially annular.

[0139] The fluid chamber is substantially cylindrical, and the nozzle portion of the nozzle-forming layer is substantially annular. There are cases where this occurs.

[0140] A fluid chamber is typically bounded by one or more fluid chamber walls. At least one of the one or more fluid chamber walls is typically made of a substrate. It is formed by part. At least one of the one or more fluid chamber walls is Typically, substantially perpendicular to the mounting surface and / or nozzle surface of the substrate (i.e.) (extending perpendicularly). Typical due to the perpendicular (i.e., perpendicular) fluid chamber walls. In terms of, multiple adjacent fluid chambers (and therefore, liquid) are located on a single print head. The droplet dispensers can be packed more closely together, thereby increasing nozzle density. The fluid chamber walls (i.e., orthogonal) are typically drilled using methods such as the Bosch process. It is formed by reactive ion etching (DRIE).

[0141] The outer periphery of the nozzle portion of the nozzle-forming layer may be substantially polygonal. The outer periphery of the nozzle portion of the layer may be multifaceted. The nozzle portion of the nozzle-forming layer is diamond-shaped. It is possible. The nozzle portion of the nozzle-forming layer may be square-shaped. However, the nozzle shape Layered nozzle portion (for example, polygonal, polyhedron, and / or square shape of the nozzle cleft layer) The nozzle portion may have rounded corners. The nozzle portion of the nozzle forming layer is Typically, it has an aperture. The aperture can be substantially circular. The aperture is It can be a polygon in practice. An aperture can have multiple faces.

[0142] The fluid chamber has a cross-section in the plane of the substrate that is substantially the same as the shape of the nozzle portion of the nozzle formation layer. They may have a similar shape. For example, the nozzle portion of the nozzle-forming layer may have rounded corners. In the case of a rounded square shape, the fluid chamber has a cross-section that is a square shape with rounded corners. It may be possible.

[0143] The nozzle portion of the nozzle-forming layer (i.e., extending across the fluid chamber, thereby flow The portion of the nozzle forming layer that forms at least one wall of the body chamber is on the plane of the substrate. The cross-section may be substantially similar in shape to the shape of the fluid chamber. For example, the cross-section of the fluid chamber When the chamber is substantially cylindrical (i.e., its cross-section is substantially circular), the nozzle formation layer The area around the nozzle is essentially circular.

[0144] The print head can be an inkjet print head. The droplet ejector is the ink For jet print heads (for example, used in inkjet print heads) It may be a droplet ejector (configured as follows). The droplet ejector is an inkjet droplet ejector. It is possible.

[0145] Printheads are functional flow filters used in the manufacturing of printed electronics. It can be configured to print fluids (i.e., liquids) such as bodies.

[0146] The printhead can be configured to print biological fluids. Biological fluids are, In terms of type, these are biological macromolecules, such as polynucleotides like DNA or RNA. Contains microorganisms and / or enzymes. The printhead contains diluents or reagents, etc., and is used in biological or bioengineering fields. It can be configured to print other fluids used in academic applications.

[0147] The print head is a voxel print head (i.e., 3D printing, for example, a layered print). A printer configured for use in additive printing. (Tohead) is possible.

[0148] A second aspect of the present invention is a print head equipped with a plurality of droplet ejectors according to the first aspect of the present invention. Provides a common droplet dispenser. Multiple droplet dispensers (for example, some or each of them) are common. In some cases, the substrate may be shared. For example, multiple droplet dispensers may be integrated on the common substrate. There are cases where this occurs.

[0149] The printhead may be an inkjet printhead. Each of the multiple droplet ejectors These could be inkjet droplet dispensers.

[0150] Printheads are functional, used in the manufacture of printed electronics, etc. It can be configured to print fluids.

[0151] The printhead can be configured to print biological fluids. Biological fluids are, In terms of type, these are biological macromolecules, such as polynucleotides like DNA or RNA. Contains microorganisms and / or enzymes. The printhead contains diluents or reagents, etc., and is used in biological or bioengineering fields. It can be configured to print other fluids used in academic applications.

[0152] The print head is a voxel print head (i.e., 3D printing, for example, a layered print). This could be a printhead configured for use in printing.

[0153] A third aspect of the present invention comprises one or more print heads according to the second aspect of the present invention. We provide printers.

[0154] A fourth aspect of the present invention provides a method for operating a droplet dispenser according to the first aspect of the present invention. This method typically involves activating an internal actuator mechanism and / or an external actuator. The ethode mechanism is activated, thereby displacing at least a portion of the nozzle portion of the nozzle formation layer. , and as a result a step that brings fluid out of the fluid chamber through the fluid chamber outlet Includes pu.

[0155] The droplet dispenser may be equipped with an internal actuator mechanism and an external actuator mechanism. (That is, this method involves a substrate having a mounting surface and a nozzle surface on the opposite side, and the nozzle surface of the substrate A nozzle forming layer formed on at least a portion of it, and at least a portion of it by the substrate and less At least part of it is a fluid chamber defined by a nozzle forming layer, and at least part of it is a nozzle forming layer A fluid chamber having a fluid chamber outlet defined by the nozzle portion of the culva formation layer, An internal actuator mechanism formed in at least a portion of the nozzle portion of the sluice formation layer, and At least partially surrounding the actuator mechanism is the nozzle portion of the nozzle forming layer. A method for operating a droplet dispenser that also includes an external actuator mechanism formed in part of it. (ru).

[0156] This method operates both the inner actuator mechanism and the outer actuator mechanism. May include a step. Both internal and external actuator mechanisms. The operation typically results in displacement of at least a portion of the nozzle portion of the nozzle formation layer, and the result is The fluid is discharged from the fluid chamber through the fluid chamber outlet (i.e., the fluid is discharged from the fluid chamber through the fluid chamber outlet). (When stored in a container) and are produced. Therefore, this method is typically used for fluids. The process includes the step of providing a fluid (i.e., a liquid) into the chamber.

[0157] Steps to activate the inner actuator mechanism and the outer actuator mechanism These steps are typically performed simultaneously (i.e., at the same time).

[0158] The drive circuit typically includes both an internal actuator mechanism and an external actuator mechanism. Activate it.

[0159] In embodiments in which the internal actuator mechanism comprises one or more internal piezoelectric actuators This method involves a first potential difference (i.e., voltage) between one or more pairs of inner drive electrodes. This may include the step of applying a voltage to cause deflection of one or more internal piezoelectric elements. In embodiments in which the side actuator mechanism comprises one or more external and internal piezoelectric actuators, This method involves creating a second potential difference (i.e., voltage) between one or more pairs of outer drive electrodes. This method may include the step of applying an application of a piezoelectric material to cause deflection of one or more outer piezoelectric elements. The method involves the step of applying the first potential difference and the second potential difference simultaneously (i.e., at the same time). This may include the application of a first potential difference and a second potential difference by the drive circuit.

[0160] The first potential difference and the second potential difference may have similar (e.g., the same) magnitudes. The first potential difference and the second potential difference may have opposite polarities. By applying a potential difference and a second potential difference, typically the inner piezoelectric and outer piezoelectric move in opposite directions. It will come to pass.

[0161] This method first involves activating the inner actuator mechanism and the outer actuator mechanism. , causing deflection of at least a portion of the nozzle portion of the nozzle forming layer in the first direction Firstly, by activating the inner actuator mechanism and the outer actuator mechanism, At least a portion of the nozzle portion of the nozzle forming layer in the second direction opposite to the first direction. This may include steps that cause deflection. Deflection of the nozzle formation layer in the first direction More typically, the fluid is drawn into the fluid chamber and in the second direction of the nozzle-forming layer Due to the deflection, the fluid is typically discharged from the fluid chamber through the fluid chamber outlet. This is because the nozzle-forming layer flexes in the first direction before flexing in the second direction, which is typical. In terms of displacement, the nozzle portion travels a greater distance during discharge, resulting in a larger displacement relative to the fluid. It also becomes possible to exert a strong discharge force.

[0162] Any optional or preferred feature of any one aspect of the present invention may be any other aspect of the present invention. These may be optional or preferred characteristics of the person.

[0163] Here, embodiments of the present invention will be described with reference to the following drawings. [Brief explanation of the drawing]

[0164] [Figure 1] This is a diagram of a monolithic fluid droplet dispensing device including integrated fluid elements (fluidics), electronic circuitry, nozzle, and actuator according to a first embodiment. [Figure 2] Figure 1 shows a cross-sectional view of a monolithic droplet dispenser device along line F2. [Figure 3] Figure 1 is a plan view of the nozzle, showing the features of a monolithic droplet dispenser with the protective coating removed. [Figure 4(a)-(b)]Figure 1 is a schematic diagram of an embodiment of the drive pulse for the droplet dispensing device. [Figure 5] Figure 1 is a schematic diagram of the manufacturing process flow for the droplet dispensing device. [Figure 6] This is a cross-sectional view showing an alternative embodiment of the electrode structure according to a second embodiment of the present invention. [Figure 7] Figure 6 is a schematic diagram showing an alternative drive pulse embodiment for the droplet dispensing device. [Figure 8] This is a schematic diagram showing a cross-section of an alternative embodiment of the nozzle structure according to the third embodiment of the present invention. [Figure 9] This is a cross-sectional view showing an alternative embodiment of the bond pad structure according to a fourth embodiment of the present invention. [Figure 10] This is a cross-sectional view through the nozzle structure of any of the droplet dispensing devices shown in Figures 1, 6, 8, or 9 during operation. [Figure 11] This invention provides both a cross-sectional view and a plan view illustrating an alternative monolithic droplet dispenser having only an internal actuator mechanism according to a fifth embodiment of the present invention. [Figure 12] Figure 11 is a cross-sectional view of the nozzle structure of the droplet dispensing device during operation. [Figure 13] This invention provides both a cross-sectional view and a plan view showing an alternative monolithic droplet dispenser having only an external actuator mechanism according to a sixth embodiment of the present invention. [Figure 14] Figure 13 is a cross-sectional view of the nozzle structure of the droplet dispensing device during operation. [Figure 15] This plot shows the volume swept by the diaphragm of the droplet ejector device according to the position of the actuator mechanism. [Figure 16] Figures 1, 6, 8, 9, 11, and 13 show the 3D shape of the diaphragm of the droplet ejector device during operation. [Figure 17] This plot shows the deflection of the droplet dispenser diaphragm for four different operating embodiments. [Figure 18]This plot shows the deflection of the droplet ejector diaphragm for two different actuator configurations, depending on the position of the actuator mechanism on the diaphragm. [Figure 19] It is not mentioned in the original text. [Modes for carrying out the invention]

[0165] Example of the first embodiment A first embodiment will be described with reference to Figures 1 to 5 and Figures 10 and 11.

[0166] Figure 1 shows an integrated fluid element, electronic circuit, nozzle and a first embodiment of the present invention. Figure 2 shows a monolithic fluid droplet dispensing device 1 including a cutter. This is a cross-sectional view of the monolithic droplet dispensing device 1 along line F2.

[0167] As shown in Figures 1 and 2, the fluid droplet dispensing device consists of a substrate 100 and a fluid inlet channel. R101, electronic circuit 200, interconnection layer 300 with wiring, internal piezoelectric actuator 4 00, outer piezoelectric actuator 450, nozzle plate 500, protective front 600, nozzle This is a monolithic chip including 601 and bond pad 700. Figure 1 shows the bond pad. Region 102 and nozzle region 103 are shown.

[0168] The substrate 100 has a thickness typically between 20 and 1000 micrometers. Interconnection layer 300, inner piezoelectric actuator 400, outer piezoelectric actuator 450, Nozzle The plate 500 and protective front 600 have a thickness of typically 0.5 to 5 micrometers. It is a nozzle. The nozzle 601 has a diameter typically between 3 and 50 micrometers. The fluid inlet channel 103 has characteristic dimensions of 50 to 800 micrometers. .

[0169] The monolithic chip shown in Figure 1 has four rows of nozzles. Each row has adjacent nozzles arranged in an alternating pattern. It is offset relative to the row. Any number of nozzle rows are possible in different configurations. Chip The nozzle arrangement above is determined by the target print density (i.e., dots per inch (dpi): dots per inch), target firing frequency (dots per inch), target firing frequency (dots per inch) It is configured to achieve the quency and / or target print speed. A wide range of different nozzle configurations are possible to satisfy the requirements. Different printhead nozzle configurations are By arranging individual nozzles and nozzle-specific drive electronic circuits 201 and 202, This is what is brought about.

[0170] The substrate 100 is formed from a silicon wafer, and includes a support 102 and a fluid inlet channel 101. It also includes an electronic circuit 200.

[0171] The fluid inlet channel 101 is based such that it has an opening to the fluid inlet 103 on one surface. Formed through the thickness of plate 100, and at the other end, nozzle plate 500 and nozzle It is terminated by 601. The walls of the fluid inlet channel 101 are connected to the substrate 100 and mutually connected. The subsequent layer 300 has a similar cross-section. The fluid inlet channel 101 is substantially cylindrical. The shape (i.e., the cross-section in the plane of the substrate is substantially circular) is such that it forms a boundary with the nozzle plate. The corners of the fluid inlet channel 101 at the interface and fluid inlet boundary surface minimize stress concentration. It is rounded in that way.

[0172] The electronic circuit 200 is formed on the surface of the substrate 100 opposite to the surface containing the fluid inlet 103. The electronic circuit 200 may include digital and / or analog circuits. The electronic circuit portions 201 and 202 are connected by wiring 301 and 302 that penetrate the interconnection layer 300. This directly connects the inner piezoelectric actuator 400 and the outer piezoelectric actuator 450. Therefore, in order to optimize the application of the drive waveform, the actuators 400 and 450 are positioned in close proximity. The electrode actuator wiring interconnection sections 301 and 302 are arranged in a continuous single structure. It may be a structure or may be constructed from multiple layers of wiring. The driving electronics are piezoelectric actuators The diode can be configured to apply a set voltage or shaping voltage for a set period of time.

[0173] The electronic circuit portion 203 is related to the overall operation of the entire monolithic droplet dispenser device. Furthermore, it can be located separately from the actuator drive circuits 201 and 202. Circuit 203 related to the overall operation of the chip includes data routing, authentication, and chip monitoring (for example). For example, chip temperature monitoring, usage period management, yield information processing and / or defective nozzle monitoring, etc. It can perform a wide range of functions. Circuit 203 is bonded through the interconnection layer 300. It is connected to the head 700 and predetermined electrode drive circuits 201 and 202. Child device 203 handles data caching, data routing, bus management, general-purpose logic, Performs different functions such as synchronization, security, authentication, power routing and / or input / output. It may include analog and / or digital circuits configured to do so. The sub-device 203 includes timing circuits, interface circuits, sensors and / or clock circuits, etc. It can be equipped with parts.

[0174] Located in different sections of the tip, for example, between the nozzle rows or around the periphery of the tip. There could be several general-purpose drive electronic device areas.

[0175] The electronic drive circuit includes a 200 CMOS drive circuit.

[0176] The interconnection layer 300 is formed directly on the electronic circuit 200 and the substrate 100, and is an electrical insulator. and wiring. The wiring in the interconnection layer 300 bonds the chip electronic circuit 203. Connect to both the 700 and the actuator electrode drive circuits 201 and 202. The subsequent layer 300 is located between the nozzles, around the periphery of the tip and / or on the drive electronics. This includes routing cabling for power and data. The interconnection layer 300 is typically It comprises multiple layers, each with a different wiring path.

[0177] The nozzle plate 500 is formed on the interconnection layer 300. 00 is formed from either a single material or a laminate of multiple materials. Nozzle plate Layer 500 is continuous across the front of the chip, with the lower interconnect layer 300 and the upper layer It has an electrical opening for wiring between the actuator electrode 401 and the device.

[0178] The nozzle plate 500 is CMOS electronic in terms of deposition temperature, composition, and chemical processing steps. It must be made from one or more types of materials that can be manufactured together with the drive circuit 200. The nozzle plate material is also chemically stable and compatible with the fluid being sprayed. In contrast, it must be impermeable. The nozzle plate material is also for piezoelectric actuators. It must be suitable for the function. For example, the Young's modulus of a suitable material should be 70 GPa~ It is in the range of 300 GPa. However, the variation in Young's modulus is due to the nozzle plate 50 This can be adapted by changing the thickness of 0. Examples of nozzle plate materials include silicon dioxide (SiO2), silicon nitride (Si3N4), silicon carbide (SiC), and silicon oxynitride (SiO x N y ) one of the following (for example, including combinations and / or laminates thereof) Includes multiple species.

[0179] Each external piezoelectric actuator 450 comprises a first electrode 451, a piezoelectric layer 452, and a second electrode 45 It comprises a laminate of three. The first electrode 451 is attached to the nozzle plate 500. The piezoelectric layer 452 is attached to the first electrode 451. The second electrode 403 is attached to the first electrode It is attached to the piezoelectric layer surface on the opposite side of the attachment surface. The first electrode 451 is connected to the interconnection layer 30 It is electrically connected to the wiring connection part 301 at 0. The second electrode 453 is interconnected layer The first electrode 451 and the second electrode are electrically connected to the wiring connection part 302 in 300. Poles 453 are electrically insulated from each other.

[0180] Each internal piezoelectric actuator 400 comprises a first electrode 401, a piezoelectric layer 402, and a second electrode 40 It comprises a laminate of three. The first electrode 401 is attached to the nozzle plate 500. The piezoelectric layer 402 is attached to the first electrode 401. The second electrode 403 is attached to the first electrode It is attached to the piezoelectric layer surface on the opposite side of the attachment surface. The first electrode 401 is attached to the outer piezoelectric actuator. It is electrically connected to the second electrode 453 of the diode. The second electrode 403 is an external piezoelectric element. It is electrically connected to the first electrode 451 of the tuner. Electrode 401 and the second electrode 403 are electrically insulated from each other.

[0181] Electrode materials are conductive and typically include titanium (Ti), aluminum (Al), and tungsten. Tungsten (W), tungsten (Pt), or platinum (Pt), or the same These materials are formed from metals or intermetallic compounds such as alloys. (deposition temperature and (Regarding compatibility with chemical processes) It can be manufactured together with the CMOS drive circuit and piezoelectric layer.

[0182] The piezoelectric layers 402 and 452 are selected to be compatible with the manufacture of CMOS and interconnect circuits. It is formed from selected materials. CMOS drive circuits are typically rated at temperatures up to approximately 450°C. It can withstand temperatures. However, for high-yield manufacturing, much lower P is needed. The manufacturing temperature typically requires a temperature of 300°C. CMOS-driven electronic devices require a certain period of time. Deposition methods that expose the material to multiple temperatures over a period of time can degrade performance, and typically, This affects dopant mobility and the degradation of wiring within the interconnection layer. Due to temperature limits, piezoelectricity The method of layer deposition is limited. Suitable piezoelectric materials include aluminum nitride (AlN) and nitrile. Aluminum compounds (especially scandium aluminum nitride (ScAlN)) and oxides Zinc (ZnO) is one example, and these are compatible with CMOS electronic circuits. Composition of piezoelectric materials It is selected to optimize the piezoelectric properties. For example, in aluminum nitride compounds The concentration of any additive element (e.g., the concentration of scandium in scandium aluminum nitride). ) is typically, d 31 Selected to optimize the magnitude of the piezoelectric constant. Scandinitriding The higher the concentration of scandium in aluminum um, the more likely it is that d 31The value will increase The mass percentage of scandium in scandium aluminum nitride is approximately 50%. There is a high possibility of this.

[0183] The piezoelectric actuator material is not continuous across the surface of the nozzle plate 500. The piezoelectric material is mainly located on the nozzle plate, around the electrode opening 404 and the area surrounding the nozzle. Includes multiple openings, including area 405.

[0184] The protective front surface 600 is formed on the outer surface of the droplet ejector device 100, and the piezoelectric layers 402 and 4 52, covers electrodes 401, 403, 451 and 453 and nozzle plate 500. Protection The front surface has an opening for the nozzle 601 and an opening for the bond pad 700. The protective front material is chemically inert and impermeable. The protective front material is also extruded. It may be water-repellent to the fluid it is exposed to. The mechanical properties of the protective front material are those of a piezoelectric actuator. Minimize the impact on the extrusion action of parts 400 and 450, as well as nozzle plate 500. The protective front material is carefully selected, for example, in terms of suitability for processing temperature and chemical process. Regarding this, it is selected so that it can be manufactured by a CMOS-compatible process flow. Protection The front surface 600 prevents fluid contact with either the electrode or the piezoelectric layer. Suitable protective front material Examples include polyimide, polytetrafluoroethylene (PTFE), and diamond-shaped carbon. (DLC) or related materials are examples.

[0185] Figure 3 shows the first embodiment with the protective coating 600 removed. This is a plan view of the nozzle, showing the features of the Lithic droplet dispensing structure 1. The dashed line indicates the piezoelectric internal actuator. The position below the fluid inlet 103 relating to the inverter 400 and the external piezoelectric actuator 450 To indicate placement.

[0186] When in use, the fluid droplet dispensing device 1 can supply fluid to the fluid inlet 103. It is mounted on a substrate. The fluid pressure is typically slightly negative at the fluid inlet 103. The fluid inlet channel 101 is a capillary tube, typically driven by surface tension. The phenomenon is "primed" or filled with fluid. The fluid inlet 103 is priming When priming occurs, the nozzle 601 is protected by capillary action up to the outer surface of the front 600. The fluid is then subjected to a combination of negative fluid pressure and the geometric shape of the nozzle 601. It does not pass through 601 and move onto the outer surface of the protective surface 600.

[0187] Actuator drive circuits 201 and 202 receive timing signals from the entire drive circuit 203. The application of voltage pulses to the drive electrodes 401, 403, 451, and 453 is controlled according to the specified number. Two electric fields are generated by applying an electrode voltage across piezoelectric material layers 402 and 452. The piezoelectric material layers 402 and 452 are deformed by the electric field. This deformation is due to the polarity of the material. Depending on the direction of the electric field relative to the local direction, it can be either tensile strain or compressive strain. The strain induced by the stretching or contraction of the piezoelectric materials 402 and 452 is, In terms of type, it consists of a nozzle plate 500, piezoelectric actuators 400 and 450, and a protective prelayer. A strain gradient is induced through a thickness of 600, and the nozzle plate is moved relative to the neutral position or Displace.

[0188] The piezoelectric properties of piezoelectric materials are partly determined by the transverse piezoelectric constant d 31It can be characterized by d. 31 This refers to an electric field applied across the piezoelectric material in a first direction, perpendicular to the first direction. The piezoelectric coefficient tensor is related to the strain induced in the piezoelectric material along a direct second direction. It is a specific component of the compound. The piezoelectric actuators 400 and 450 shown in the figure are subjected to the applied electricity. The field induces strain in the material layer in a direction perpendicular to the direction in which the electric field is applied. It is composed of, and therefore, d 31 It is characterized by a constant.

[0189] The piezoelectric material layers 402 and 452 have uniform thickness and composition, and the electrodes 403 and Electrical cross-connection between electrode 451 and electrodes 401 and 453 provides a constant voltage or voltage pulse. Upon application, a first potential difference is applied across the inner actuator layer, and the outer actuator A second potential difference is applied across the layer, and the first and second potential differences are large. The dimensions are the same but the polarity is opposite. In other words, across the inner actuator piezoelectric layer An electric field E1 is generated, and an electric field E2 is generated across the outer actuator piezoelectric layer. E1 and E2 are equal in magnitude but act in opposite directions. Therefore, the inner actuator layer and the outer actuator layer deform in opposite directions. E1 and Depending on the polarity of E2, the displacement X of the nozzle plate 500 is in the neutral position (i.e., the electric field is It is either positive or negative relative to (when no voltage is applied). At the top of Figure 4(a), the nozzle The positive displacement of the plate is shown, and the negative displacement of the nozzle plate is shown at the bottom of the figure.

[0190] By applying a pulsed electric field, vibration of the nozzle plate 500 can be induced. This vibration of the nozzle plate typically causes the fluid inlet 1 below the nozzle plate 500 to vibrate. Pressure is induced at 03, and droplets are discharged from nozzle 601. Vibration of the nozzle plate. The dynamics and amplitude are mainly controlled by the nozzle plate 500, piezoelectric actuators 400 and 450. The mass and rigidity of the protective layer 600, fluid properties (e.g., fluid density, fluid viscosity (Newton viscosity)) Viscosity (either in degrees or non-Newtonian viscosity) and surface tension, the geometric shape of the nozzle and fluid inlet. It is a function of the state and the configuration of both drive pulses.

[0191] Figures 4(a) and 4(b) show two embodiments of drive pulses. The figures show the inner action The voltage pulses across tuner electrodes 401 and 403 are shown. They are equal in magnitude but opposite in polarity. Paired voltage pulses are simultaneously applied across the outer actuator electrodes 451 and 453. It should be understood that this is being done.

[0192] In the first embodiment, as shown in the upper part of Figure 4(a), a steady electric field or DC is applied across the electrode pair. The application of an electric field causes strain in the piezoelectric layers 402 and 452, and in the direction away from the fluid inlet. This results in a steady deflection of the nozzle plate. The fluid pressure below the nozzle plate is due to the fluid entering It is the same as the supply pressure. The strain energy is the same as the nozzle plate 500 and the piezoelectric actuator. It accumulates in layers 400 and 450 and the protective layer 600.

[0193] Then, as shown in the lower part of Figure 4(a), the electric field is removed and a reverse electric field pulse is applied. This releases the accumulated strain energy and the piezoelectric material in the opposite direction. This results in both further distortion and the nozzle plate moving toward the fluid inlet. This results in positive pressure in the fluid inlet and nozzle region, and droplet discharge from nozzle 601. This results in the reverse electric field pulse occurring immediately after, or slightly after, the removal of the DC electric field. It can be applied in a short amount of time.

[0194] The final removal of the electric field across the piezoelectric material induces strain in the nozzle plate 500. It returns to a neutral position where it was not affected.

[0195] By applying electric fields of opposite polarity across the inner and outer actuators, The nozzle plate deforms into the shape shown in Figure 10. Nozzle in the region of the inner actuator The nozzle plate is opposite to the curvature of the nozzle plate in the region of the outer actuator. It curves in a certain direction, which results in an S-shaped cross-section. This particular shape is used for the nozzle. The plate is provided by only one actuator, which causes it to curve in only one direction. Compared to the displacement achievable in the case of the nozzle portion of the nozzle plate from the neutral position, The maximum displacement increases significantly. The maximum displacement of the nozzle plate in the direction away from the neutral position increases. By doing so, when the applied electric field is removed or its polarity is reversed, This allows for a large discharge force to be exerted. This means that the force that can be generated is low. Due to the low d, it is generally considered unsuitable for use with inkjet printers. 31 This makes it possible to use piezoelectric materials with constants. 31 Materials are usually at lower temperatures. It can be processed at a certain degree and allows for closer integration with the CMOS components of the droplet ejector. Because a larger discharge force can be achieved, it is also possible to reduce the overall size of the discharger. Yes, and this allows for an increase in printhead nozzle density.

[0196] In the second embodiment, along with the pulsed electric field configuration shown in Figure 4(b), as shown in Figure 4(a) The DC electric field configuration shown. This allows for any applied strain effect over a longer period of time. This has the advantage of minimizing [something]. Depending on the timing of switching and applying the electric field pulse, a double pulse is created. Further advantages of the saturation method become possible. The application of the first pulse is shown at the top of Figure 4(b). This induces vibrations accompanied by an initial movement of the nozzle plate away from the fluid inlet. The vibration creates negative fluid pressure beneath the nozzle plate, which in turn causes positive fluid to be directed towards the nozzle. A fluid flow of flavor is generated, which can further increase the fluid discharge flow through the nozzle.

[0197] Figure 5 is a schematic diagram showing the manufacturing process flow of a droplet dispensing device. Figure 5(a) As shown, the first manufacturing step involves placing the drive circuit and interconnects on the surface of the silicon wafer substrate. Layer 300, for example, is to create the CMOS driver circuit and interconnection section. The drive circuit is a standard process, for example, ion implantation onto a p-type or n-type substrate, and This is followed by standard CMOS manufacturing processes (e.g., ion implantation, chemical vapor deposition (C) VD), physical vapor deposition (PVD), etching, chemical mechanical planarization (CMP) and / or electric It is formed by creating a wiring interconnection layer by electroplating.

[0198] The subsequent manufacturing steps define the features and structure of the monolithic droplet dispenser device. The process is carried out in such a manner. Subsequent steps damage the structure formed in the preceding step. Selected to avoid this. An important manufacturing parameter is the peak processing temperature. Problems related to MOS processing include dopant mobility and degradation of interconnect wiring mechanisms. It can be done. CMOS electronic circuits are known to withstand temperatures of 450°C. However, However, for high yield, much lower temperatures (i.e., below 300°C) are desired. It's nice.

[0199] As shown in Figure 5(b), the nozzle plate 500, piezoelectric actuators 400 and 45 0, the protective layer 600 and the bond pad 700 are formed on the interconnection layer.

[0200] The nozzle plate 500 is deposited using CVD or PVD treatment.

[0201] The formation of CMOS-compatible piezoelectric materials 402 and 452 is a crucial driving force for the actuator. Because it is a moving element, it is especially important. Table 1 shows some common piezoelectric materials and their properties Related manufacturing methods, typical d 31 The values ​​are listed together. The highest d 31 Materials with value The material is not suitable for manufacturing monolithic CMOS structures. The materials used are low d 31 It has a value, and therefore has a much lower extrusion capacity.

[0202] As can be seen from the table, lead zirconate titanate (PZT) is PVD (sputtering) It can be deposited at low temperatures by (including), but subsequently, it is acceptable for CMOS. Post-processing annealing at temperatures exceeding the possible temperature is required. PZT also uses the sol-gel method. It is also possible to deposit the material by this method, but in this case as well, high-temperature firing that exceeds the limits of CMOS is required. Annealing is necessary. PZT also deposits very slowly and is not commercially viable. PZT also contains lead, which is environmentally undesirable.

[0203] ZnO, AlN, and AlN compounds (such as ScAlN) materials require post-treatment such as annealing. It can be deposited using low-temperature PVD (e.g., sputtering) which does not require a specific process. These materials also do not require polarity adjustment. The polarity adjustment step is not required in PZT. It is necessary, and in that case, the material must have a very strong electric field that directs all electric dipoles in the direction of the electric field. Exposed to the world.

[0204] Therefore, ZnO, AlN, and AlN compounds (e.g., ScAlN) materials are mono It is a commercially viable material for the manufacture of lithic droplet dispensing devices. However, Then, these materials d 31 The value is significantly lower than that of PZT. To improve discharge efficiency. A specific nozzle configuration (i.e., an operable nozzle plate) and an improvement in operating efficiency. The use of two pairs of control electrodes results in lower d associated with these materials. 31 Cancel out the values.

[0205] Actuator electrode materials are CMOS compatible, including PVD (including low-temperature sputtering). The process is used for deposition. Typical electrode materials include titanium (Ti) and platinum (P). t), aluminum (Al), tungsten (W), molybdenum (Mo), or a compound thereof. Gold can be awarded. The electrodes are patterned using standard patterning and etching methods. It is determined.

[0206] The protective material is a spin-on and curing method (s) (suitable for polyimide or other polymer materials). The material is deposited using the pin-on and cure method, and then patterned. It is possible. Some materials, such as PTFE, have more unique deposition and patterning techniques. There may be times when this is necessary.

[0207] The bond pad is manufactured using methods such as CVD or PVD (e.g., sputtering). To deposit.

[0208] As shown in Figure 5(c), the fluid inlet channel is a high aspect ratio deep reactive ion channel. The position is defined using the DRIE (Deep Red Intersection) method. The fluid inlet is connected to the wafer front-back alignment device. The nozzle structure is aligned using a tool. Front and back surface alignment and etching steps. In the middle, the wafer can be mounted on the handle wafer.

[0209] The DRIE method can also be used to separate the die into individual pieces, but other methods such as wafer saws are also available. This method can also be used.

[0210] Second Embodiment Example Figure 6 is a cross-sectional view showing an alternative embodiment of the electrode structure. In this embodiment, electrode 403 And 453 are connected by wiring 302 to the ground line 204, not to the drive circuit. The grounding line 204 is located within the interconnection layer 300 and is connected to the drive circuit region 203. , or directly connected to a grounded bond pad 700.

[0211] Third Embodiment Example Figure 7 is a schematic diagram showing an alternative drive pulse embodiment suitable for this droplet dispensing device. As shown in Figure 7, a voltage pulse is applied to only one electrode of each electrode pair, for example, 401 and The electric field is applied to 453, thereby passing through piezoelectric actuators 400 and 450. This electric field causes the nozzle plate 500 to be displaced downwards overall. A voltage is applied to electrodes 403 and 451, and a ground voltage is applied to electrodes 401 and 453. It is also possible to configure a sea urchin device.

[0212] Fourth Embodiment Example Figure 8 is a schematic diagram showing a cross-section of an alternative embodiment of the nozzle structure, near the fluid inlet 101. This shows an extension of the interconnection layer 304 attached to the nozzle plate layer 500. The extension 304 may contain only dielectric material without any wiring. Another variation Therefore, the device does not have a nozzle plate layer and is attached to a piezoelectric actuator. It has only an interconnection layer.

[0213] Fifth Embodiment Example Figure 9 is a cross-sectional view showing an alternative embodiment of the bond pad structure. The protective front is bond pad It is removed in the vicinity of the 701. Due to this geometric shape, the external wiring mechanism is removed. The bondability is improved, and the overall height of the wire bonding above the tip height is reduced.

[0214] Examples of the 6th and 7th embodiments Figure 11 shows a nozzle that includes only the internal piezoelectric actuator 400 adjacent to the fluid outlet 601. This is a schematic diagram showing a cross-sectional view and a plan view of an alternative embodiment of the structure. In this embodiment, piezoelectric material The material extends only between electrodes 401 and 402, and the rest of the nozzle plate layer 500 It does not extend beyond the upper electrode (i.e., the outer piezoelectric actuator is not expected to be located there). (It does not extend within the possible region 450).

[0215] When an electric field is applied across the internal actuator, the nozzle plate takes on the shape shown in Figure 12. It deforms into this shape. Due to the operation of the internal actuator, the inner part of the nozzle plate moves in the first direction. It curves. Accordingly, the outer part of the nozzle plate curves in the opposite direction, resulting in an S-shape. This results in a cross-section. This specific shape allows the nozzle plate to curve in only one direction, normally. This is achieved by providing only one actuator that extends across most of the nozzle plate. Compared to the displacement that can be achieved when this is the case, the nozzle portion of the nozzle plate from the neutral position The maximum displacement increases significantly.

[0216] Furthermore, Figure 13 includes only the external piezoelectric actuator 450 adjacent to the fluid outlet 601. This is a schematic diagram showing a cross-sectional view and a plan view of an alternative embodiment of the nozzle structure. In this embodiment, The piezoelectric material extends only between electrodes 401 and 402, and the rest of the nozzle plate layer 500. It does not extend beyond the electrodes above the part (i.e., the inner piezoelectric actuator is located (It does not extend within the region 400 where it is expected to be located.)

[0217] When an electric field is applied across the outer actuator, the nozzle plate takes on the shape shown in Figure 12. It deforms into this shape. Due to the operation of the outer actuator, the outer part of the nozzle plate moves in the first direction. It curves. Accordingly, the inner part of the nozzle plate curves in the opposite direction, resulting in an S-shape. This results in a cross-section. This specific shape allows the nozzle plate to curve in only one direction, normally. This is achieved by providing only one actuator that extends across most of the nozzle plate. Compared to the displacement that can be achieved when this is the case, the nozzle portion of the nozzle plate from the neutral position The maximum displacement increases significantly.

[0218] Figure 15 shows the radial direction of a single annular actuator positioned symmetrically around a fluid outlet. This indicates the volume swept by the nozzle plate during operation, depending on the direction of movement. In this case, The piezoelectric material layer extends across the entire nozzle plate, and the actuator is positioned at the first The position is determined by the actuator electrode and the second actuator electrode. The t has an outer radius of 125 microns. From this figure, the maximum sweep volume (therefore, The fluid discharge is located close to the outer edge of the nozzle plate (at a position of 105 microns from the center). It can be seen that this is achievable for the actuator in position. Figure 16 shows the outer edge The 3D shape that the nozzle plate takes when a single annular actuator located in close proximity is operated. The inner part of the nozzle plate curves in the opposite direction from the outer part of the nozzle plate. It can be seen that this is the case.

[0219] Figure 17 shows an embodiment that includes both an internal piezoelectric actuator and an external piezoelectric actuator. In this state, the nozzle from the neutral position (i.e., before all actuators are activated) This shows how the rate deflection changes depending on the radial position across the nozzle plate. This diagram shows "reverse polarity" (both inner and outer annular actuators). (Each is provided and operates simultaneously by an electric field with opposite polarity) "Similar polarity (Both an inner annular actuator and an outer annular actuator are provided, and each of them (Operates simultaneously by electric fields with opposite polarity), "Internal only" (Internal annular actuator) Both an inner and outer annular actuators are provided, but only the inner actuator operates. ), and "external only" (where both the inner and outer annular actuators are provided) This shows a dataset for when the external actuators are activated, although they can be moved. In this embodiment, electric fields having opposite polarity are applied to the inner actuator and the outer actuator. The maximum deflection is achieved when applied to [the specified area].

[0220] Figure 18 also shows a single piezoelectric actuator, where the piezoelectric material is the piezoelectric actuator. For embodiments that do not extend beyond the terminating point, the deflection of the nozzle plate from the neutral position is This demonstrates how it changes depending on the radial position across the nozzle plate. In this configuration, the maximum deflection is achieved when the internal actuator is installed. The absence of piezoelectric material in the region that does not contain ethanol increases flexibility, and therefore, the inside Compared to a discharger that incorporates both a piezoelectric actuator and an external piezoelectric actuator, It incorporates a single annular piezoelectric actuator (whether on the inside or outside). The discharger may allow for the achievement of greater deflection.

[0221] Further modifications and changes can be made within the scope of the present invention as disclosed herein.

[0222] The device can be formed on a silicon wafer substrate. Alternatively, the substrate may be made of silicon Silicon-on-insulator wafer or I It may include II-V semiconductor wafers.

[0223] The fluid inlet channel is substantially cylindrical, and therefore substantially in the plane of the substrate. It can have a circular cross-section. Alternatively, the fluid inlet channel may have multiple, regular surfaces. Various other cross-sections, including regular or irregular shapes, can be taken. Fluid inlet channel The shape is typically determined by the nozzle layout, the arrangement of the drive electronics, and the interconnection layer 30 This is determined by other aspects of the monolithic chip design, such as wiring routing at point 0.

[0224] The cross-sectional shape minimizes the width of the print head chip without causing a failure mechanism. You can also choose to do so. The failure mechanism may be structural (for example) For example, too many fluid inlets may reduce the robustness of the tip, or It may be functional (for example, interconnect wires are not suitable for transmitting the correct current). (This may be sufficient.) Reducing the printhead width allows for manufacturing on a single wafer. This is desirable because it increases the number of chips that can perform this task.

[0225] Further modifications and changes can be made within the scope of the present invention as disclosed herein.

Claims

1. A droplet ejector for a print head, A substrate having a mounting surface and a nozzle surface on the opposite side, A nozzle forming layer formed on at least a portion of the nozzle surface of the substrate, A fluid chamber defined at least in part by the substrate and at least in part by the nozzle forming layer, having a fluid chamber outlet defined at least in part by the nozzle portion of the nozzle forming layer, wherein the nozzle portion comprises an inner portion located closer to the fluid chamber outlet and an outer portion located closer to the peripheral edge of the nozzle portion, An internal actuator mechanism formed in the inner portion of the nozzle portion of the nozzle forming layer, An external actuator mechanism formed on the outer portion of the nozzle portion of the nozzle forming layer, Equipped with, A droplet dispenser comprising one or more internal piezoelectric actuators, wherein at least one of the one or more internal piezoelectric actuators comprises an internal piezoelectric element provided between a pair of internal drive electrodes.

2. The droplet dispenser according to claim 1, wherein the inner actuator mechanism, the outer actuator mechanism, and the nozzle portion of the nozzle forming layer are configured such that the inner portion of the nozzle portion curves in a first direction when started, and the outer portion of the nozzle portion curves in a second direction opposite to the first direction when in operation.

3. The droplet dispenser according to claim 1 or 2, wherein the outer portion of the nozzle portion of the nozzle forming layer at least partially surrounds the inner portion of the nozzle portion of the nozzle forming layer.

4. The droplet dispenser according to claim 1 or 2, wherein the internal actuator mechanism at least partially surrounds the outlet of the fluid chamber.

5. The droplet dispenser according to claim 1 or 2, wherein the inner actuator mechanism and the outer actuator mechanism are substantially annular.

6. The droplet dispenser according to claim 1 or 2, further comprising at least one electronic component integrated with the substrate.

7. The droplet dispenser according to claim 1 or 2, wherein the internal actuator mechanism comprises a single internal piezoelectric actuator that is substantially annular.

8. The droplet dispenser according to claim 1 or 2, wherein the external actuator mechanism comprises one or more external piezoelectric actuators, and at least one of the one or more external piezoelectric actuators comprises an external piezoelectric element provided between a pair of external drive electrodes.

9. The droplet dispenser according to claim 1 or 2, wherein the external actuator mechanism comprises a single external piezoelectric actuator that is substantially annular.

10. The droplet dispenser according to claim 9, wherein the single outer piezoelectric actuator surrounds a single inner piezoelectric actuator.

11. The droplet dispenser according to claim 8, wherein both the pair of inner drive electrodes and the pair of outer drive electrodes are electrically connected to a drive circuit, and when the drive circuit is connected to a power source during use, a first potential difference is applied between the pair of inner electrodes to cause deflection of the inner piezoelectric body in a first direction, and a second potential difference is applied between the pair of outer electrodes to cause deflection of the outer piezoelectric body in a second direction opposite to the first direction.

12. The droplet dispenser according to claim 8, wherein one or more of the inner piezoelectric elements and one or more of the outer piezoelectric elements include one or more types of piezoelectric materials that can be processed at a temperature of less than 450°C.

13. The droplet dispenser according to claim 8, wherein one or more of the inner piezoelectric elements and one or more of the outer piezoelectric elements include one or more types of piezoelectric materials that can be deposited at a temperature of less than 450°C.

14. The droplet dispenser according to claim 12, wherein the one or more types of piezoelectric materials are PVD-deposited piezoelectric materials.

15. The droplet dispenser according to claim 12, wherein the one or more types of piezoelectric materials include aluminum nitride and / or zinc oxide.

16. The droplet dispenser according to claim 15, wherein the aluminum nitride further comprises one or more of the following elements: scandium, yttrium, titanium, magnesium, hafnium, zirconium, tin, chromium, and boron.

17. The droplet dispenser according to claim 12, wherein the one or more piezoelectric materials include aluminum and nitrogen, and a ceramic material comprising one or more elements optionally selected from scandium, yttrium, titanium, magnesium, hafnium, zirconium, tin, chromium, and boron.

18. The droplet dispenser according to claim 12, wherein the one or more types of piezoelectric materials are non-ferroelectric piezoelectric materials.

19. One or more of the inner piezoelectric elements and one or more of the outer piezoelectric elements have a size of less than 20 pC / N. ３１ A droplet dispenser according to claim 8, having a piezoelectric constant.

20. The droplet dispenser according to claim 1 or 2, wherein the mounting surface of the substrate is provided with a fluid inlet aperture that communicates fluidly with the fluid chamber.

21. The droplet dispenser according to claim 1 or 2, wherein the fluid chamber is substantially cylindrical and the nozzle portion of the nozzle forming layer is substantially annular.

22. The droplet dispenser according to claim 1 or 2, further comprising the inner actuator mechanism, the outer actuator mechanism, and a protective layer covering the nozzle forming layer.

23. A print head comprising a plurality of droplet ejectors as described in claim 1 or 2.

24. The print head according to claim 23, wherein the plurality of droplet ejectors share a common substrate.

25. A printer comprising one or more print heads as described in claim 23.

26. A method for operating a droplet dispenser according to claim 1 or 2, comprising the step of operating both the inner actuator mechanism and the outer actuator mechanism to cause displacement of at least a portion of the nozzle portion of the nozzle forming layer, and consequently discharge of fluid from the fluid chamber through the fluid chamber outlet.

27. The method according to claim 26, wherein the step of activating the inner actuator mechanism and the step of activating the outer actuator mechanism are performed simultaneously.

28. The external actuator mechanism comprises one or more external piezoelectric actuators, and at least one of the one or more external piezoelectric actuators comprises an external piezoelectric body provided between a pair of external drive electrodes. The method according to claim 26, wherein the step of activating the inner actuator mechanism includes applying a first potential difference between the pair of inner drive electrodes to cause the inner piezoelectric body to deflect, and the step of activating the outer actuator mechanism includes applying a second potential difference between the pair of outer drive electrodes to cause the outer piezoelectric body to deflect.

29. The method according to claim 28, wherein the first potential difference and the second potential difference have opposite polarities such that the inner piezoelectric body and the outer piezoelectric body bend in opposite directions.

30. The method according to claim 28, wherein the first potential difference and the second potential difference are applied simultaneously.

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