Lightweight gear and manufacturing method for pad dresser using water jet

Abstract

To provide a lightweight gear of a pad dresser using a water jet capable of achieving weight saving and long service life, and a manufacturing method.SOLUTION: Manufacturing of a pad dresser for a polishing device includes a step S100 for processing a gear to gear thickness to make flatness maintain gear thickness t during water jet processing, a step S200 for processing a water jet processing hole of the gear by water jet cutting, a step S300 for joining a first segment and a second segment together to manufacture a segment having segment plate thickness T, a step S400 bonding the segment to the water jet processing hole by an epoxy adhesive, and a step S500 for completing the manufacturing of the gear that enables double side dressing while maintaining flatness.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to the gears of a pad dresser. In particular, by using a water jet and epoxy adhesion, it is possible to combine a thin gear and a segment, and by combining with the segment, holes are formed in the reduced thickness to enable further weight reduction. The present invention relates to a weight-reduced gear of a pad dresser using a water jet and a manufacturing method therefor.

Background Art

[0002] Generally, the wafer polishing process of a semiconductor polishing apparatus is a chemical / mechanical polishing (CMP) process that combines mechanical removal processing and chemical removal processing as one processing method, and includes wafer polishing of a polishing pad and dressing of a pad dresser.

[0003] As an example, the pad dresser is composed of a combination of a gear and a segment. The gear rotates with the gears meshing between the inner / outer gears of the polishing apparatus, and the segment is attached to the gear (for example, bonded or fixed) to face the surface of the polishing pad, thereby removing glazing on the surface of the polishing pad.

[0004] For this purpose, the pad dresser is manufactured by the following procedure: 1) thickening the gear (for example, made of SUS or PVC material) (for example, with a thickness of 9 - 15T cross-section) (in mm units) and performing CNC machining on the segment mounting site → 2) separately manufacturing the segment (for example, with a thickness of 6T cross-section) → 3) assembling the segment to the machined gear by screwing.

[0005] Therefore, the dressing of the pad dresser prevents a decrease in polishing speed by removing glazing from the polishing pad generated during the polishing process and restoring the polishing pad to its original state. In this case, glazing is a phenomenon in which pad residue, wafer polishing material residue, and slurry particles generated by friction between the polishing pad and the wafer adhere to the pad surface.

[0006] In particular, the aforementioned pad dresser is called a diamond dresser because it uses diamonds for its segments.

[0007] Typically, the gears have a large size (e.g., outer diameter 432mm / inner diameter 365mm / thickness 10-18mm) and a heavy weight (e.g., about 5kg), which is unavoidable because the gears must have a thickness of at least 9T to prevent distortion of flatness due to material deformation during CNC machining.

[0008] However, in industrial settings, gear weight inevitably becomes a major factor affecting the ease of work during the pad dresser replacement process. [Overview of the Initiative] [Problems that the invention aims to solve]

[0009] Therefore, taking the above points into consideration, the present invention aims to provide a lightweight gear and manufacturing method for a pad dresser using a water jet, which allows for the formation of segment bonding holes in the gear by water jet processing with minimal material deformation, and the fixing of the diamond-double-sided structured segments located in the segment bonding holes to the gear by epoxy bonding, thereby enabling the combination of the segments with a lightweight, thin gear. In particular, the diamond-double-sided structure of the segments extends the gear life compared to a single-sided structure, and further weight reduction is possible by forming multiple rings in a concentric circle structure through multiple holes formed in the thin, lightweight gear. [Means for solving the problem]

[0010] A method for manufacturing a lightweight pad dresser using a water jet according to the present invention to achieve the above objective may be characterized by including the steps of: processing a gear to a gear thickness such that flatness is maintained during water jet processing; processing water jet holes in the gear by water jet cutting; joining a first segment and a second segment to create a segment having a segment plate thickness; bonding the segment to the water jet holes by epoxy adhesive; and completing the production of a gear that can be dressed on both sides while maintaining the flatness.

[0011] Preferably, the thickness of the gear is set to 1 / 3 of the thickness required for CNC machining.

[0012] Preferably, the waterjet-machined holes are machined to penetrate the gear and are formed in multiple locations along the circumference of the gear. The segment plate thickness is the sum of the segment plate thickness of the first segment and the segment plate thickness of the second segment, where the segment plate thickness of the first segment and the segment plate thickness of the second segment are the same. Diamond is applied to one side of each of the first and second segments, and the other side without diamond is bonded with an adhesive.

[0013] Preferably, the epoxy bonding is performed along the edge of the segment bonding hole.

[0014] Preferably, the flatness is within 100 μm.

[0015] Furthermore, the present invention's lightweight pad dresser using a water jet to achieve the above objective includes a gear having a flatness of 100 μm or less, with a plurality of water jet-machined holes of a predetermined size formed along the circumference, and a segment with diamond exposed on both sides, fixed to the water jet-machined holes by epoxy adhesive, wherein the segment is characterized by a bonding structure of an adhesive to the other side of a first segment and a second segment, with the diamond applied to one side of the first segment and the diamond applied to the other side of the second segment.

[0016] Preferably, the gear is formed in an annular shape from SUS or PVC material, and the waterjet-machined holes are machined by a waterjet in the gear edge width formed by the difference between the inner and outer diameters, and a plurality of waterjet-machined holes are formed along the circumference in a structure that penetrates the gear.

[0017] Preferably, the segment plate thickness of the first segment and the segment plate thickness of the second segment are the same, and each of the segment plate thicknesses may be greater than or equal to the thickness of the gear.

[0018] Furthermore, the lightweight gear for a pad dresser using a water jet according to the present invention for achieving the above objective includes a gear plate in which first, second, and third internal rings are formed in water jet-machined holes inside the gear ring, a segment fixing portion that integrates the first internal ring with the gear ring at a predetermined third angle, and a ring joint portion that integrates the second internal ring and the third internal ring with the first internal ring at a predetermined second angle, wherein the second angle is formed at an angle greater than the third angle.

[0019] Preferably, the ring joint portion and the segment fixing portion are in a straight line, the third angle bisects the second angle, and the number of segment fixing portions is twice the number of ring joint portions.

[0020] Furthermore, the lightweight gear for a pad dresser using a water jet according to the present invention for achieving the above objective includes a gear plate in which first, second, and third internal rings are formed in water jet-machined holes inside the gear ring, a segment fixing portion that integrates the first internal ring with the gear ring at a predetermined fourth angle, and a ring joint portion that integrates the second internal ring and the third internal ring with the first internal ring at a predetermined fifth angle, wherein the fourth angle is formed at an angle greater than the fifth angle.

[0021] Preferably, the ring joint portion has a wedge shape with a "V" shaped tip and a "U" shaped base, the segment fixing portion is straight, the number of segment fixing portions and the ring joint portion are the same, the tip portion coincides with the fourth angle, and the base portion forms the fifth angle.

[0022] Preferably, the gear is coupled with a carrier to form a first exposed space and a second exposed space, the first exposed space being the waterjet-machined hole in the gear plate, and the second exposed space being a space for positioning the wafer at the center point of the gear plate.

[0023] Furthermore, the lightweight gear for a pad dresser using a water jet according to the present invention for achieving the above objective includes a gear plate in which first, second, and third internal rings are formed in water jet-machined holes inside the gear ring, a segment fixing portion that integrates the first internal ring with the gear ring at a predetermined sixth angle, and a ring joint portion that integrates the second internal ring and the third internal ring with the first internal ring at a predetermined seventh angle, wherein the sixth angle is formed at an angle greater than the seventh angle.

[0024] Preferably, the ring joint portion has a wedge shape formed by a "V"-shaped tip portion and a "U"-shaped base portion, the segment fixing portion is linear, the number of the segment fixing portions is twice that of the ring joint portion, the segment fixing portions are located between the ring joint portions, the tip portion coincides with the sixth angle, and the base portion forms the seventh angle.

[0025] Preferably, the first, second, and third inner rings form a concentric structure with the center point of the gear plate inside the gear ring. The ring joint portion and the segment fixing portion form a radially arranged array in the circumferential direction with respect to the gear center point of the gear plate.

[0026] Preferably, the water jet machining holes are divided into outer machining holes formed in the segment fixing portion on the gear ring and the first inner ring, and inner machining holes formed in the ring joint portion on the second inner ring and the third inner ring.

Advantages of the Invention

[0027] Such a lightweight gear of the pad dresser using the water jet machining of the present invention and the manufacturing method have a thickness of about 1 / 3T and a weight of about 1 / 3 with the same gear size (for example, outer diameter 432 mm / inner diameter 365 mm), so they are easy to handle and the work in the replacement process is easy. In particular, by combining the double-sided segments with the gear, the service life can be extended twice compared to the combination of the single-sided segment and the gear.

[0028] Also, the lightweight gear of the pad dresser using the water jet machining of the present invention and the manufacturing method are thinner and lighter than before, so they are easy to handle and replace. In particular, since a plurality of rings are configured in a concentric structure through a plurality of holes formed in the thin and lightweight gear, further weight reduction is possible.

Brief Description of the Drawings

[0029] [Figure 1]This is a procedure diagram for the gear manufacturing method of a lightweight pad dresser using a water jet according to the present invention. [Figure 2] This invention relates to a method for manufacturing a lightweight pad dresser, specifically a gear structure and an example of waterjet machining. [Figure 3] This is an example of manufacturing a lightweight gear through multiple gear rings and holes according to the present invention. [Figure 4] This is an example of how the durability of a lightweight gear according to the present invention is enhanced by increasing the number of gear ring fixing points. [Figure 5] This is an example of how the durability of a lightweight gear according to the present invention is enhanced by changing the width of the gear ring fixing portion. [Figure 6] This is an example of epoxy bonding of a double-sided segment and gear in a manufacturing method for a lightweight pad dresser according to the present invention. [Figure 7] This shows the pad dresser, which is a combination of gears and segments according to the present invention, manufactured as a double-sided diamond dresser. [Figure 8] This shows the double-sided diamond dresser according to the present invention applied to a polishing apparatus. [Modes for carrying out the invention]

[0030] The embodiments of the present invention will be described in detail below with reference to the attached illustrative drawings. However, these embodiments are merely examples, and the present invention can be embodied in various different forms by a person with ordinary skill in the art to which the present invention belongs. Therefore, the invention is not limited to the embodiments described herein.

[0031] Referring to Figure 1, the method for manufacturing a lightweight gear for a pad dresser using a water jet includes a gear preparation step S100, a water jet machining step S200, a segment preparation step S300, an epoxy bonding step S400, and a pad dresser manufacturing step S500.

[0032] Therefore, since the manufacturing method for the lightweight pad dresser is a manufacturing method for the lightweight pad dresser using water jet processing and epoxy bonding, the advantages of water jet processing enable weight reduction of the pad dresser and the gear, and in particular, the pad dresser may be characterized as a double-sided diamond dresser.

[0033] The gear preparation (S100) is performed by machining the gear 200 having the minimum thickness that can maintain flatness.

[0034] The water jet machining (S200) allows for additional weight reduction by creating a concentric structure in the thin gear 200 through multiple water jet machined holes 230, thereby reducing the weight of the gear. This is done by forming segment bonding holes in the gear by water jet machining, as in S210, and the water jet machining is performed while maintaining the flatness of the gear, as in S220.

[0035] Referring to Figure 2, the gear 200 is made of SUS or PVC material and consists of an annular gear plate 210 having a gear edge width W and a gear thickness t. The gear plate 210 is externally tangent to the inner / outer rotating gears 30 and 40 (see Figure 8) of the polishing device 10 by forming a gear ring 200A on its outer edge.

[0036] As an example, the gear edge width W is formed by the difference in diameter (Dd) between the inner diameter d and outer diameter D of the annular shape, forming a waterjet-machined hole 230 to which the segment 300 (see Figure 6) is bonded. The waterjet-machined hole 230 is formed to the same size over the entire circumference of the gear 200 by dividing the 360° circumference of the gear 200 with an acute first angle θ. In this case, the outer diameter D is approximately 432 mm, the inner diameter d is approximately 365 mm, and the first angle θ is set to 15°, but it may be set to a smaller or larger angle as needed.

[0037] On the other hand, although the waterjet-machined hole 230 is represented as a rectangle, in reality it is formed in the shape of an arc corresponding to a first angle θ of approximately 15° within a 360° circle, and the same applies to the segment 300 (see Figure 6) which has the first angle θ.

[0038] In particular, since the water jet-machined hole 230 is positioned inward relative to the gear edge width W centerline KK and close to the inner diameter d, the durability of the gear ring 200A on the outer diameter D side, which meshes with the rotating gears 30 and 40 and rotates, can be improved.

[0039] For example, the gear thickness t (unit: mm) is set to a thickness that maintains the distortion-free flatness of the gear plate 210 even after the water jet-machined holes 230 are machined. Since the water jet-machined holes 230 are machined using water jet cutting technology, which causes less material deformation compared to CNC (Computerized Numerical Control) machining, the thickness of the water jet-machined holes can be made thinner than the thickness required for CNC machining.

[0040] In particular, the gear 200 forms a flatness (e.g., xxx μm) that guarantees process accuracy and high quality with uniform thickness relative to the wafer 90, and the set value of the flatness (e.g., xxx μm) may be within approximately 100 μm or may be the same.

[0041] Therefore, the gear thickness t is applied at a rate of approximately 30-40% when the CNC machining thickness is 100%, preferably at a thickness of approximately 1 / 3. In this case, the CNC machining thickness can be exemplified as approximately 9-15T, and the waterjet machining thickness as approximately 3-5T.

[0042] Furthermore, the gear 200 can be manufactured as a lightweight gear by forming holes in the reduced thickness achieved when combined with the segment 300.

[0043] Referring to the lightweight gear in Figure 3, the gear 200 is made of SUS or PVC material and consists of a gear ring 200A and a gear plate 210 in which three first, second, and third internal rings 213, 214, and 215 of different sizes are formed in a concentric structure via multiple waterjet-machined holes 230.

[0044] The gearing ring 200A has gear teeth formed on its outer circular edge that are in contact with the inner / outer rotating gears 30 and 40 (see Figure 5) of the polishing device 10, respectively, and there are gaps between the bundle of the gearing ring 200A and the first inner ring 213, and between the bundle of the second inner ring 214 and the third inner ring 215.

[0045] The first, second, and third internal rings 213, 214, and 215 are three rings of different sizes, forming a concentric circular structure within the inner space of the gear ring 200A, with the gear ring 200A being the outermost.

[0046] Therefore, the gear plate 210 includes a ring joint portion 211 and a segment fixing portion 212 that integrate the gear ring 200A with the first, second, and third internal rings 213, 214, and 215. The ring joint portion 211 forms the spacing of the inner machining holes 230B of the water jet machining holes 230, integrating the first, second, and third internal rings 213, 214, and 215 with the gear ring 200A. The segment fixing portion 212 forms the spacing of the outer machining holes 230A of the water jet machining holes 230, dividing the ring joint portion 211 into two equal parts and integrating the first internal ring 213 with the gear ring 200A.

[0047] In other words, the ring joint portion 211 and the segment fixing portion 212 are arranged radially in the circumferential direction with respect to the gear center point O of the gear plate 210, the ring joint portion 211 forms a predetermined second angle α with respect to the gear center point O, and the segment fixing portion 212 is positioned between two adjacent ring joint portions 211 at a predetermined third angle β with respect to the gear center point O, dividing the second angle α into two equal parts. In this case, since the second angle α is set to approximately 45°, the third angle β can be set to approximately 22.5°.

[0048] Furthermore, of the waterjet-machined holes 230, the outer machined hole 230A is used as a segment bonding hole to bond the segment 300, and the inner machined hole 230B is machined as an additional weight-reducing hole to reduce the weight of the gear 200, but may also be used as a segment bonding hole to bond the segment 300 if necessary.

[0049] Furthermore, the gear 200 forms the gear edge width W of the gear ring 200A and the first internal ring 213 by the difference in diameter (Dd) between the outer diameter D of the gear ring 200A and the inner diameter d of the first internal ring 213, and forms the gear edge widths of the second and third internal rings 214 and 215 by the difference in diameter between the outer diameter of the second internal ring 214 and the inner diameter of the third internal ring 215.

[0050] Therefore, the gear edge width W allows the outer machined hole 230A and inner machined hole 230B of the waterjet machined hole 230 to be formed in an arc shape, and the outer machined hole 230A is biased inward with respect to the center line KK of the gear edge width W and close to the inner diameter d, thereby improving the durability of the gear teeth on the outer diameter D side that mesh with the inner / outer rotating gears 30, 40 (see Figure 6) and rotate.

[0051] Furthermore, the gear 200 is set to a gear thickness t that maintains the distortion-free flatness of the gear plate 210 even after the water jet cut holes 230 are machined. The gear thickness t is set to a thickness that can be reduced from the thickness required for CNC machining, as the water jet cut holes 230 into which the segments 300 are bonded are machined using water jet cutting 400, which results in less material deformation compared to CNC (Computerized Numerical Control) machining. The flatness can be set to a flatness (e.g., xxx μm) that guarantees high quality with process accuracy and uniform thickness relative to the wafer 90.

[0052] On the other hand, the lightweight gear shown in Figure 3, as shown in Figures 4 and 5, can have its durability, which is weakened by the first, second, and third internal rings 213, 214, and 215 of the gear 200, strengthened by the deformation structure of the ring joint portion 211.

[0053] Referring to the lightweight gear with enhanced durability shown in Figure 4, the gear 200 has a structure in which the gear plate 210 is formed by first, second, and third internal rings 213, 214, and 215, which are concentric with the gear ring 200A, a ring joint portion 211, and a segment fixing portion 212, compared to the case in Figure 3. However, the shape and number of the ring joint portion 211 are different from those in Figure 3, which enhances the durability of the gear 200.

[0054] In other words, the number of ring joint portions 211 is a 1:1 matching of the number of segment fixing portions 212, the position of the ring joint portions 211 is the same as that of the segment fixing portions 212, and the ring joint portions 211 form a fourth angle ε and have a wedge shape with a width wider than the linear uniform width of the segment fixing portions 212. In this case, the fourth angle ε may be the same as the third angle β.

[0055] The wedge shape is divided into a pointed tip 211A and a flat base 211B. The pointed tip 211A gradually narrows in width to coincide with the formation point of the segment fixing portion 212. The space 71 between the first internal ring 213 and the second internal ring 214 is V-shaped, exposing the carrier. The flat U-shape of the base 211B occupies the space between the second internal ring 214 and the third internal ring 215 (i.e., the inner machining hole 230B) with a constant width.

[0056] Therefore, the ring joint portion 211 forms an overlapping angle (ε, γ) of a fourth angle ε and a fifth angle γ with respect to the gear center point O of the gear plate 210, the fourth angle ε being the angle formed by the tip portion 211A of the ring joint portion 211 that coincides with the segment fixing portion 212, and the fifth angle γ being the angle formed by two adjacent base portions 211B at an angle smaller than the fourth angle ε, depending on the width size of the base portion 211B.

[0057] Therefore, the fifth angle γ is smaller than the fourth angle ε.

[0058] Referring to the lightweight gear with enhanced durability shown in Figure 5, the gear 200, compared to the case in Figure 3, has a structure in which the gear plate 210 is formed by the first, second, and third internal rings 213, 214, and 215, which are concentric with the gear ring 200A, the ring joint portion 211, and the segment fixing portion 212. However, the ring joint portion 211 maintains a wedge shape with a tip portion 211A and a base portion 211B, but its number is reduced compared to the case in Figure 4, and it differs in that ease of manufacturing is prioritized over the durability of the gear 200.

[0059] In other words, the number of ring joint portions 211 is set to match the number of segment fixing portions 212 in a 2:1 ratio, and this number is reduced to half (i.e., 1 / 2) of that shown in Figure 4, and the ring joint portion 211 forms an overlapping angle (ζ, δ) of a sixth angle ζ and a seventh angle δ with respect to the gear center point O of the gear plate 210. In this case, the sixth angle ζ may be the same as the second angle α.

[0060] Therefore, the sixth angle ζ is the angle formed by the tip portion 211A of the ring joint portion 211, which coincides with the segment fixing portion 212, and the seventh angle δ is the angle formed by two adjacent base portions 211B at an angle smaller than the sixth angle ζ, depending on the width size of the base portion 211B.

[0061] Therefore, the seventh angle δ is smaller than the sixth angle ζ.

[0062] Therefore, in Figures 2 to 5, the relative magnitudes of the first angle θ, second angle α, third angle β, fourth angle ε, fifth angle γ, sixth angle ζ, and seventh angle δ are such that they decrease from α and ζ to θ, in the order "α, ζ > δ > β, ε > γ > θ".

[0063] Again, in the segment preparation (S300) in Figure 1, the segment fabrication in S310 is performed by confirming the double-sided dressing structure of the segment in S320, and the epoxy bonding (S400) is performed by bonding the segment 300 to the gear 200 with epoxy.

[0064] Referring to Figure 6, the segment 300 may be characterized by forming a pair of first and second segments 300A and 300B bonded together with adhesive 350, and each of the first and second segments 300A and 300B being a double-sided diamond segment that simultaneously polishes the upper and lower polishing pads 50 and 60 with a size and shape that matches the outer machining hole 230A of the water jet machining hole 230.

[0065] The first and second segments 300A and 300B are composed of a first segment 300A and a second segment 300B bonded together via an adhesive 350, and each of the first segment 300A and the second segment 300B forms a segment plate thickness T (in mm) with a segment plate 310 having one surface coated with diamond 330 as abrasive particles and the other surface coated with adhesive 350.

[0066] Therefore, the segment plate thickness T is formed from the sum of the segment plate thickness T1 of the first segment 300A and the segment plate thickness T2 of the second segment 300B (T1+T2), and the adhesive between the upper and lower segments, where the thickness of the first segment 300A (T1) and the thickness of the second segment 300B (T2) are each greater than the gear thickness t, but may be applied to the same thickness.

[0067] Next, the segment 300 is fixed by epoxy adhesive 500 while fitted into the segment adhesive hole 230 of the gear 200, and the epoxy adhesive 500 is applied along the edge of the segment adhesive hole 230. In this case, when the epoxy adhesive 500 is applied, care is taken to ensure that the diamond 330 of the first segment 300A and the diamond 330 of the second segment 300B protrude evenly from the gear thickness t of the gear 200.

[0068] Ultimately, the pad dresser fabrication (S500) is the process of completing the fabrication of a gear that can be dressed on both sides while maintaining the final flatness.

[0069] Referring to Figure 7, the gear 200 has a gear thickness t that is thinner than the segment plate thickness T of the segment 300, and the diamonds 330 of the first and second segments 300A and 300B protrude from the upper and lower surfaces to form a double-sided dressing structure. Such a double-sided dressing structure may be characterized in that the pad dresser 100 is a double-sided diamond dresser.

[0070] In particular, the pad dresser 100 can guarantee process accuracy and high quality with uniform thickness for the wafer 90 by completing the manufacturing process while maintaining the flatness of the gear 200 (e.g., xxx μm) to within or equivalent to the final flatness setting value (e.g., yyy μm). In this case, "yyy μm", which indicates the flatness setting value, can be set in the same way as "xxx μm".

[0071] Furthermore, the bonding force between the segment 300 and the gear 200 is greater than or equal to the bonding force between the first and second segments 300A and 300B, which maintain polishing even when removed, because the segment 300 is inserted and mounted in the waterjet machining hole 230 during polishing. This is because the polishing function is lost when the entire first and second segments 300A and 300B are removed from the waterjet machining hole 230.

[0072] On the other hand, referring to Figure 8, the polishing apparatus 10 includes a pad dresser 100 which is combined with rotating gears (Inner / Outer Gear) 30, 40, polishing pads 50, 60, and a carrier 70 on which wafers 90 are positioned.

[0073] In other words, the polishing apparatus 10 consists of an internal rotating gear 30 that rotates the upper polishing pad 50 clockwise by motor power, an external rotating gear 40 that rotates the lower polishing pad 60 counterclockwise by motor power, and a carrier 70 that positions the wafer 90 to be polished by opposite rotation and friction between the upper and lower polishing pads 50 and 60. Since these components 30, 40, 50, 60, and 70 are known components of the polishing apparatus 10, a detailed explanation will be omitted.

[0074] However, the polishing device 10 may also be configured with a pad dresser 100.

[0075] The pad dresser 100 in Figure 2 is composed of a combination of a gear 200 and a segment 300. The gear 200 is an annular shape and is located between the inner rotating gear 30 and the outer rotating gear 40. It rotates by meshing with the rotating gears 30 and 40 via an outer diameter gear ring 200A. The segment 300 is composed of multiple segments of a predetermined size and is arranged around the 360° circumference of the gear 200.

[0076] The pad dresser 100 shown in Figures 3 to 5 allows for further weight reduction of the gear plate 21 because the waterjet-machined holes 230 formed in the gear plate 21 for coupling the gear 200 and segment 300 form both outer machined holes 230A and inner machined holes 230B.

[0077] In addition, the gear 200 is coupled with the carrier 70 to form a first exposed space 71 and a second exposed space 73, the first exposed space 71 being a waterjet-machined hole 230 in the gear plate 210, and the second exposed space 73 being a space for positioning the wafer 90 at the center point of the gear plate 210.

[0078] Therefore, the waterjet-machined holes 230 are divided into waterjet-machined holes 230A for the gear ring 200A and the first internal ring 213, and waterjet-machined holes 230B for the second internal ring 214 and the third internal ring 215, enabling further weight reduction of the gear plate 21, and are formed in the first exposed space 71.

[0079] As a result, each of the pad dressers 100 in Figures 2 and 3 to 5 removes pad glazing, which is the adhesion of pad residue, wafer polishing material, residue and slurry particles to the upper / lower polishing pads 50 and 60 during the wafer polishing process, and restores the pads to their original state so that the polishing speed is maintained, thereby enabling the wafer 90 to have a flatness that is closely related to wafer efficiency and process stability.

[0080] Furthermore, the pad dresser 100 is a double-sided pad dresser manufactured by a lightweight pad dresser manufacturing method using water jet processing and epoxy bonding, and is composed of a pair of first and second segments 300A and 300B (see Figure 6), each having rows of diamond 330 particles, thereby enabling simultaneous removal of pad glazing from the upper polishing pad 50 of the first segment 300A and the lower polishing pad 60 of the second segment 300B.

[0081] Therefore, the pad dresser 100, by simultaneously polishing both sides using the structural features of a double-sided pad dresser, eliminates minute damage from scratches and particles caused by pad glazing and provides excellent flatness to the wafer 90, thereby guaranteeing process accuracy and high quality with uniform thickness. It is particularly suitable for ultra-thin silicon wafers and MEMS elements where double-sided polishing is essential.

[0082] As described above, the lightweight gear 200 of the pad dresser using a water jet according to this embodiment can divide the 360° circumference of the gear 200 at an acute first angle θ by the water jet-machined holes 230, or the lightweight gear 200 can have the first, second, and third internal rings 213, 214, and 215 formed by the water jet-machined holes 230 form a concentric structure with the gear ring 200A, and the ring joint integrates the first, second, and third internal rings 213, 214, and 215 The second angle α of the segment 211 includes the third angle β of the segment fixing portion 212 that integrates the first internal ring 213 with the gear ring 200A, or the fourth angle ε includes the fifth angle γ due to the wedge shape of the ring joint portion 211, or the sixth angle ζ includes the seventh angle δ due to the wedge shape of the ring joint portion 211. By combining the segments 300, the thin gear 200 is made into a concentric circle structure by water jet machined holes 230, thereby achieving further weight reduction. [Explanation of Symbols]

[0083] 10: Polishing equipment 30, 40: Inner / Outer Rotating Gear 50, 60: Upper / Lower Polishing Pads 70: Career 71: 1st exposure space 73:Second exposure space 90: Wafer 100: Pad Dresser 200: Gear 200A: Gearing 210: Gear Plate 211: Ring joint section 211A: Tip 211B: Basal part 212: Segment fixing part 213, 214, 215: First, second, and third internal rings 230: Waterjet machined holes 230A: Outside machined hole 230B: Inner machined hole 300: Segment 300A, 300B: First and second segments 310: Segment Plate 330: Diamond 350: Adhesive 400: Waterjet processing 500: Epoxy adhesive

Claims

1. In the manufacture of pad dressers for polishing equipment, The steps include machining the gear to a gear thickness t such that flatness is maintained during waterjet machining, The steps include: machining the water jet holes of the gear by water jet cutting, The steps include joining a first segment and a second segment to create a segment having a segment plate thickness T, The steps include bonding the segment to the water jet processed hole by epoxy adhesive, The step includes completing the fabrication of a gear that can be dressed on both sides while maintaining the aforementioned flatness, The water jet-machined holes are formed in multiple locations along the circumference of the gear and are machined to penetrate the gear. A method for manufacturing a lightweight pad dresser using a water jet, characterized in that the water jet-machined holes are positioned offset inward from the center line of the gear edge width of the gear and close to the inner diameter, and this close position improves the durability of the gear teeth on the outer diameter side that the gear meshes with the rotating gear and rotates.

2. The segment plate thickness T is A method for manufacturing a lightweight pad dresser using a water jet according to claim 1, characterized in that the sum of the segment plate thickness of the first segment and the segment plate thickness of the second segment is greater than the gear thickness t of the gear.

3. Each of the first segment and the second segment is, A method for manufacturing a lightweight pad dresser using a water jet according to claim 1, characterized in that diamond is applied to one side surface.

4. The epoxy adhesive described above is A method for manufacturing a lightweight pad dresser using a water jet according to claim 1, characterized in that the process is carried out along the edge of the water jet processed hole.

5. In a pad dresser for polishing equipment, A gear with multiple water-jet machined holes formed along its circumference, The segment includes, fixed in the waterjet-machined hole, with diamonds exposed on both sides, The aforementioned segment is This is a bonding structure between a first segment and a second segment, with the aforementioned diamond coated on one side. The aforementioned gear is Formed in an annular shape from SUS or PVC material, A lightweight pad dresser using a water jet, characterized in that the water jet-machined holes are machined by a water jet in the gear rim width formed by the difference in diameter between the inner and outer diameters.

6. The aforementioned water jet machined hole is A lightweight pad dresser using a water jet according to claim 5, characterized in that multiple water jets are formed along the circumference in a structure that penetrates the gear.

7. The aforementioned gear is A gear ring formed in an annular shape from SUS or PVC material, Inside the gear ring, the first, second, and third internal rings are formed in a concentric circular structure via water jet-machined holes, and the gear plate is formed in this manner. A segment fixing part that integrates the gear ring and the first internal ring, It includes a ring joint portion that integrates the first internal ring, the second internal ring, and the third internal ring, The first, second, and third internal rings are, A concentric circle structure is formed at the center point of the gear plate, The ring joint portion and the segment fixing portion are, A radial arrangement is formed in the circumferential direction with respect to the gear center point of the gear plate. The gear is coupled with the carrier to form a first exposed space and a second exposed space. The first exposed space is the waterjet-machined hole of the gear plate, and the second exposed space positions the wafer at the center point of the gear plate. The aforementioned water jet machined hole is A lightweight pad dresser using a water jet according to claim 5, characterized in that it is divided into the gear ring and the machined holes of the first internal ring, and the machined holes of the second internal ring and the third internal ring.

8. The first segment and the second segment are A lightweight pad dresser using a water jet according to claim 5, characterized in that the adhesive force between the first segment and the second segment and the water jet-machined hole is greater than the adhesive force between the surface that is not coated with diamond.

9. In the gears of a pad dresser for polishing equipment, A gear ring formed in an annular shape from SUS or PVC material, Inside the gear ring, the first, second, and third internal rings are formed in a concentric circular structure via water jet-machined holes, and the gear plate is formed in this manner. A segment fixing part that integrates the gear ring and the first internal ring, It includes a tip portion that integrates the first internal ring and the second internal ring, and a base portion that integrates the second internal ring and the third internal ring, The tip portion and the base portion form a ring joint portion. A lightweight gear for a pad dresser using a water jet, characterized in that the ring joint portion and the segment fixing portion are connected to each other.

10. The tip and the base form a wedge shape. The segment fixing portion is characterized by forming a straight line, as described in claim 9, for a lightweight gear for a pad dresser using a water jet.

11. The aforementioned tip is V-shaped, The base portion is U-shaped, A lightweight gear for a pad dresser using a water jet, as described in claim 10, characterized in that a wedge shape is formed by the combination of the "V" shape and the "U" shape.

12. The tip portion and the base portion form a ring joint portion. The lightweight gear for a pad dresser using a water jet, as described in claim 9, characterized in that the segment fixing portion is composed of twice the number of ring joint portions.

13. The first, second, and third internal rings form a concentric structure with the center point of the gear plate. The lightweight gear for a pad dresser using a water jet according to claim 9, characterized in that the tip portion, the base portion, and the segment fixing portion are arranged radially in the circumferential direction with respect to the gear center point of the gear plate.

14. The aforementioned water jet machined hole is The lightweight gear for a pad dresser using a water jet, as described in claim 9, characterized in that it is divided into the gear ring and the machined holes of the first internal ring, and the machined holes of the second internal ring and the third internal ring.

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