Material handling equipment

Abstract

To provide an article conveying device that can be configured compactly in the vertical direction. [Solution] According to one aspect of the present invention, an article conveying device is provided, comprising: a support part for supporting an article to be conveyed; a sliding body to which the support part is attached and which is slidable along a linearly formed guide rail; and a rotating arm whose tip is connected to the support part and which rotates around a vertical axis to move the support part in a direction along the guide rail, wherein the rotating arm is positioned so as not to overlap with the movement trajectory of the sliding body in a plan view.

Description

Technical Field

[0001] The present invention relates to an article conveying device.

Background Art

[0002] As a conventional conveying device, for example, there is one in which a sliding body's movement locus and a rotating arm that moves and operates a support portion are arranged vertically side by side in a region where they overlap in plan view, such as the conveying arm unit 21 disclosed in Patent Document 1.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the above configuration, there is a problem that the vertical dimension of the entire conveying device becomes large.

[0005] In view of the above circumstances, the present invention aims to provide an article conveying device that can be configured to be compact in the vertical direction.

Means for Solving the Problems

[0006] According to one aspect of the present invention, there is provided an article conveying device including: a support portion that supports an article to be conveyed; a sliding body that is attached to the support portion and is slidable along a linearly formed guide rail; and a rotating arm having a tip end connected to the support portion and configured to move and operate the support portion in a direction along the guide rail by rotating around a vertical axis, wherein the rotating arm is arranged in a state where it does not overlap with the movement locus of the sliding body in plan view.

[0007] According to this configuration, the structure can be made more compact in the vertical direction than arranging the sliding body's movement trajectory and the rotating arm that moves the support part vertically in a region where they overlap in a plan view. [Brief explanation of the drawing]

[0008] [Figure 1] This is a plan view of an article transport device according to one embodiment, showing the support portion in a first position. [Figure 2] This is a plan view of the aforementioned article conveying device, showing the support section in the second position. [Figure 3] This is a perspective view of the transport mechanism. [Figure 4] This is a perspective view of the sliding body and support part. [Figure 5] This is a perspective view of the sliding body and support part from below. [Figure 6] (a) and (b) are perspective views of the sliding body and the support part, where (a) shows the support part in the first position and (b) shows the support part in the second position. [Modes for carrying out the invention]

[0009] Embodiments of the present invention will be described below with reference to the drawings. The various features shown in the embodiments below can be combined with each other to the extent that they do not contradict each other technically.

[0010] [Embodiment] Figure 1 shows an article transport device 1 according to one embodiment. The article transport device 1 includes a transport mechanism for transporting an article 10 to be transported. The transport mechanism includes a support part 7 for supporting the article 10, and the support part 7 is moved between a first position shown in Figure 1 and a second position different from the first position shown in Figure 2. In this embodiment, the article 10 is a rectangular substrate, but the article 10 is not limited to this.

[0011] In this embodiment, the article transport device 1 also includes a casing 2 that houses the transport mechanism. The casing 2 is connected to a booth 9. Inside the booth 9, a measuring device, an analytical device, or an inspection device for the article 10, which is a substrate, is arranged. In this embodiment, the inside of the booth 9 is a vacuum environment, and the inside of the casing 2 is configured to be switchable between an atmospheric environment and a vacuum environment. However, the environment inside the booth 9 and the environment inside the casing 2 are not limited to these and can be changed as appropriate.

[0012] Casing 2 forms a first region 11 where the first position is located, and booth 9 forms a second region 12 where the second position is located. Casing 2 and booth 9 share a partition wall 91 that is positioned between the first and second positions and separates the first region 11 and the second region 12.

[0013] A first opening 92 is formed in the partition wall 91, connecting the first region 11 and the second region 12. The support portion 7 is configured to be able to pass through this first opening 92. A gate valve 21 for opening and closing the first opening 92 is also located inside the casing 2.

[0014] The casing 2 has a second opening 23 that connects the first region 11 and the external region, positioned opposite the first opening 92 in a direction perpendicular to the partition wall 91 (the direction in which the first guide rail 4, described later, extends). In other words, the first opening 92 and the second opening 23 are aligned in the direction in which the first guide rail 4, described later, extends. The casing 2 is also provided with a gate valve 24 for opening and closing the second opening 23.

[0015] With the support unit 7 in the first position, the substrate item 10 is transferred to the support unit 7. At this time, first the inside of the casing 2 is made into an atmospheric environment, and then the gate valve 24 is opened to open the second opening 23. Next, the gate valve 24 is closed and the inside of the casing 2 is made into a vacuum environment. After that, that is, after both the inside of the casing 2 and the inside of the booth 9 are in a vacuum environment, the gate valve 21 is opened to open the first opening 92, and the support unit 7 is moved from the first position to the second position.

[0016] In a state where the support portion 7 supporting the article 10 is moved to the second position, the schematic stage disposed in the booth 9 ascends, and thus the article 10 is transferred from the support portion 7 to the stage. On the other hand, in a state where the support portion 7 is moved to the second position, the stage supporting the article 10 descends, and thus the article 10 is transferred from the stage to the support portion 7.

[0017] The above-described transfer mechanism includes, in addition to the support portion 7, a first guide rail 4, a slider 5, and a horizontal articulated robot 3.

[0018] The first guide rail 4 is a single rail and is linearly formed so as to extend in a direction in which the first region 11 and the second region 12 communicate with each other through the first opening 92. The first guide rail 4 is placed on the frame 22 installed in the casing 2 and is fixed to the frame 22 by bolts (not shown). Hereinafter, for convenience of explanation, the extending direction of the first guide rail 4 is referred to as the front-rear direction (the second region 12 side is the front, and the first region 11 side is the rear), and the horizontal direction orthogonal to the extending direction of the first guide rail 4 may be referred to as the left-right direction.

[0019] The length of the first guide rail 4 is set so that the first guide rail 4 is accommodated in the casing 2. That is, the first guide rail 4 is disposed only in the first region 11 of the first region 11 and the second region 12.

[0020] As shown in FIG. 3, the slider 5 is slidable along the first guide rail 4. The support portion 7 is attached to the slider 5. In the present embodiment, the slider 5 includes a first slider 5A slidably disposed on the first guide rail 4 and a second slider 5B slidably provided in a direction along the first guide rail 4 with respect to the first slider 5A. The support portion 7 is fixed to the second slider 5B.

[0021] More specifically, as shown in FIGS. 4 and 5, the first sliding body 5A is long in the front-rear direction and is in the shape of a substantially rectangular plate orthogonal to the vertical direction. At the rear part of the lower surface of the first sliding body 5A, a carriage 41 guided by the first guide rail 4 is fixed by bolts not shown in the figure.

[0022] On the other hand, the second sliding body 5B is long in the left-right direction and is in the shape of a rectangular plate orthogonal to the vertical direction. The length of the second sliding body 5B in the left-right direction is substantially equal to the width of the first sliding body 5A in the left-right direction. In the present embodiment, the support portion 7 includes a pair of claws 71 protruding forward (in the direction along the first guide rail) from the second sliding body 5B, and the rear end portions of the respective claws 71 are fixed to both end portions of the lower surface of the second sliding body 5B by bolts not shown in the figure.

[0023] Further, on the lower surface of each claw 71 of the support portion 7, a linear second guide rail 8 extending in the front-rear direction is provided. Therefore, even when the claw 71 is in the shape of a thin plate, the rigidity of the claw 71 can be compensated by the second guide rail 8.

[0024] At the left end portion and the right end portion of the upper surface of the first sliding body 5A, recesses 51 are formed over a predetermined length from the front end surface of the first sliding body 5A, and in these recesses 51, a carriage 81 guided by the second guide rail 8 is fixed by bolts not shown in the figure. That is, the first sliding body 5A has a carriage 81 as a guide support portion that supports the second guide rail 8 slidably in the direction along the first guide rail 4.

[0025] A stopper 61 is fixed to the rear end portion of the upper surface of the first sliding body 5A, and a stopper 62 is fixed to the front end portion of the upper surface of the first sliding body 5A. The stopper 61 defines the limit position when the second sliding body 5B retreats rearward with respect to the first sliding body 5A, and the stopper 62 defines the limit position when the second sliding body 5B advances forward with respect to the first sliding body 5A.

[0026] The stopper 61 includes a long block extending in the left-right direction and a position adjustment screw that penetrates the block in the front-rear direction. Both ends of the block are fixed to the first sliding body 5A by bolts, and the position adjustment screw is fixed to the block by a nut when the limit position is adjusted.

[0027] Similarly, the stopper 62 includes a long block extending in the left-right direction and a position adjustment screw that penetrates the block in the front-rear direction. Both ends of the block are fixed to the first sliding body 5A by bolts, and the position adjustment screw is fixed to the block by nuts when the limit position is adjusted.

[0028] Meanwhile, a rectangular block extending in the left-right direction is fixed to the lower surface of the second sliding body 5B by bolts (not shown). When the second sliding body 5B moves backward relative to the first sliding body 5A, the rear surface of the block contacts the position adjustment screw of the stopper 61, and when the second sliding body 5B moves forward relative to the first sliding body 5A, the front surface of the block contacts the position adjustment screw of the stopper 62.

[0029] Returning to Figure 3, the horizontal articulated robot 3 is for operating the sliding body 5. Specifically, the horizontal articulated robot 3 comprises a first rotating arm 31, a second rotating arm 32, a base 33, and a motor 34 as its constituent elements.

[0030] The tip of the first rotating arm 31 is connected to the support part 7 via a bracket 35 and a second sliding body 5B. The first rotating arm 31 moves the support part 7 in a direction along the first guide rail 4 by rotating around the vertical axis 3a set at its base end. In other words, the vertical axis 3a is also the rotation axis of the first rotating arm 31.

[0031] More specifically, the bracket 35 includes a vertical portion extending downward from the left end of the lower surface of the first sliding body 5A, and a horizontal portion projecting to the left from the lower end of the vertical portion. The horizontal portion is connected to the tip of the first rotating arm 31 via a pin extending in the vertical direction, and the first rotating arm 31 rotates around the central axis of the pin relative to the bracket 35. Alternatively, instead of using a pin for connection, a notch may be formed in the horizontal portion of the bracket 35, opening in a direction perpendicular to the extending direction of the first guide rail 4, and a cam follower provided at the tip of the first rotating arm 31 may engage with this notch.

[0032] The base end of the first rotating arm 31 is rotatably connected to the tip of the second rotating arm 32 around the vertical axis 3a. The base end of the second rotating arm 32 is rotatably supported by the base 33 around the vertical axis 3b. The second rotating arm 32 rotates around the vertical axis 3b set at its base end. In other words, the vertical axis 3b is also the rotation axis of the second rotating arm 32. When the second rotating arm 32 rotates, the first rotating arm 31 operates at twice the rotation angle of the second rotating arm 32.

[0033] The base 33 is supported by four pillars, and the motor 34 is positioned within the space enclosed by these pillars. The motor 34 is a stepping motor and rotates the second rotating arm 32 around the vertical axis 3b. The motor 34 may also be a servo motor.

[0034] As shown in Figures 1 and 2, the first rotating arm 31 is positioned so as not to overlap with the movement trajectory of the sliding body 5 in a plan view. On the other hand, the second rotating arm 32 is positioned so that only a portion of its base overlaps with the movement trajectory of the sliding body 5 in a plan view.

[0035] As shown in Figure 3, the vertical axis 3b, which is the rotation axis of the second rotating arm 32, is positioned close to the first guide rail 4. Here, "positioned close" means that when the support part 7 is in the first position, the vertical axis 3b is within the area where the article 10 is located in a plan view. With this configuration, the extent to which the movement trajectory of the first rotating arm 31 extends laterally from the movement trajectory of the sliding body 5 in a plan view can be suppressed. Therefore, when the support part 7 moves from the first position to the second position, interference between the first rotating arm 31 and the first opening 92 can be easily avoided.

[0036] Next, with reference to Figures 1, 2, 6(a), and 6(b), the operation of the transport mechanism when the support unit 7 moves from the first position to the second position will be explained. First, the gate valve 21 opens the first opening 92. Then, from the state in which the support unit 7 is located in the first position shown in Figures 1 and 6(a), the motor 34 of the horizontal articulated robot 3 rotates the second rotating arm 32 clockwise in Figure 1. As a result, the first rotating arm 31 moves while rotating so as to overlap the second rotating arm 32, and the support unit 7 is moved to the second position as shown in Figures 2 and 6(b). The distance the support unit 7 moves at this time is the transport stroke ST.

[0037] When the support portion 7 moves from the first position to the second position, in the sliding body 5, the second sliding body 5B first slides along the second guide rail 8 and contacts the stopper 62, and then the first sliding body 5A slides along the first guide rail 4 together with the second sliding body 5B. Note that the first sliding body 5A does not necessarily have to act before the second sliding body 5B, and the first sliding body 5A and the second sliding body 5B may act simultaneously due to sliding resistance.

[0038] Conversely, when the support portion 7 moves from the second position to the first position, in the sliding body 5, the second sliding body 5B first slides along the second guide rail 8 and contacts the stopper 61, and then the first sliding body 5A slides along the first guide rail 4 together with the second sliding body 5B. Note that the first sliding body 5A does not necessarily have to act before the second sliding body 5B, and the first sliding body 5A and the second sliding body 5B may act simultaneously due to sliding resistance.

[0039] As described above, in the article transport device 1 of this embodiment, the first rotating arm 31 that moves the support part 7 of the horizontal articulated robot 3 is positioned so that it does not overlap with the movement trajectory of the sliding body 5 in a plan view. Therefore, it can be configured more compactly in the vertical direction than if the movement trajectory of the sliding body 5 and the first rotating arm 31 were arranged vertically in a region where they overlap in a plan view.

[0040] Furthermore, in this embodiment, since the first guide rail 4 is positioned only in the first region 11, the support portion 7, the sliding body 5, the first rotating arm 31, and the second rotating arm 32 can be kept in the first region 11 except when the item 10 is being transferred while the support portion 7 is in the second position. This improves the spatial degree of freedom of the second region 12.

[0041] [Differentiation] The present invention is not limited to the embodiments described above, and various modifications are possible without departing from the spirit of the invention.

[0042] For example, the first guide rail 4 may not be a single rail, but rather a pair of rails arranged parallel to each other. In contrast, if the first guide rail 4 is a single rail as in the embodiment described above, the extent to which the movement trajectory of the first rotating arm 31 extends laterally from the movement trajectory of the sliding body 5 in a plan view can be suppressed compared to the case where the first guide rail 4 is provided in a pair of rails arranged parallel to each other. This is because the vertical axis 3b, which is the rotation axis of the second rotating arm 32 of the horizontal articulated robot 3, can be brought closer to the center line in the width direction of the sliding body 5 (the line that bisects the sliding body 5 in the width direction).

[0043] The horizontal articulated robot 3 is not necessarily required; a first rotating arm 31 and a motor to rotate the first rotating arm 31 may be used instead. In this case, a linear slit is formed in the bracket 35 in a direction perpendicular to the extending direction of the first guide rail 4, and a pin or cam follower provided at the tip of the first rotating arm 31 engages with this slit. In contrast, if a horizontal articulated robot 3 including the first rotating arm 31 and the second rotating arm 32 is used as in the above embodiment, a long transport stroke can be achieved.

[0044] The sliding body 5 does not necessarily have to consist of a first sliding body 5A and a second sliding body 5B; it may be a single component. However, if the sliding body 5 consists of a first sliding body 5A and a second sliding body 5B, as in the above embodiment, and the first sliding body 5A and the second sliding body 5B slide in two stages, the transport stroke can be increased.

[0045] The support portion 7 does not necessarily have to include a pair of claws 71, and may include a single wide claw 71. In this case, only one second guide rail 8 may be provided. However, if the second guide rail 8 is provided on the lower surface of each claw 71 as in the above embodiment, a configuration suitable for when the support portion includes a pair of claws can be realized.

[0046] [Summary] The present invention may be provided in any of the following embodiments.

[0047] (1) An article conveying device comprising: a support part for supporting an article to be conveyed; a sliding body to which the support part is attached and which is slidable along a linearly formed guide rail; and a rotating arm whose tip is connected to the support part and which rotates around a vertical axis to move the support part in a direction along the guide rail, wherein the rotating arm is positioned so as not to overlap with the movement trajectory of the sliding body in a plan view.

[0048] According to this configuration, the structure can be made more compact in the vertical direction than arranging the sliding body's movement trajectory and the rotating arm that moves the support part vertically in a region where they overlap in a plan view.

[0049] (2) An article conveying device as described in (1) above, wherein the rotating arm is a first rotating arm, the base end of which is connected to the tip of a second rotating arm that rotates around a vertical axis, and the first rotating arm and the second rotating arm constitute a horizontal articulated robot.

[0050] This configuration makes it possible to achieve a long transport stroke.

[0051] (3) An article conveying device as described in (2) above, wherein the rotation axis of the second rotating arm is located in close proximity to the guide rail.

[0052] According to this embodiment, the extent to which the movement trajectory of the first rotating arm extends laterally from the movement trajectory of the sliding body in a plan view can be suppressed.

[0053] (4) An article conveying device as described in (3) above, wherein the guide rail is a single rail.

[0054] In this configuration, compared to the case where a pair of guide rails are provided parallel to each other, the extent to which the movement trajectory of the first rotating arm extends laterally from the movement trajectory of the sliding body in a plan view can be suppressed.

[0055] (5) An article conveying device according to any one of (1) to (4) above, wherein the sliding body comprises a first sliding body slidably disposed on the guide rail and a second sliding body slidably provided with respect to the first sliding body in a direction along the guide rail, and the support portion is fixed to the second sliding body.

[0056] In this configuration, since the first and second sliding bodies slide in two stages, the transport stroke can be increased.

[0057] (6) Article conveying device as described in (5) above, wherein the guide rail is a first guide rail, the support portion includes a claw protruding from the second sliding body in a direction along the guide rail, the second guide rail is provided on the lower surface of the claw, and the first sliding body has a guide support portion that slidably supports the second guide rail in a direction along the first guide rail.

[0058] In this configuration, even if the claw is a thin plate, the rigidity of the claw can be supplemented by the second guide rail.

[0059] (7) The article conveying device described in (6) above, wherein the support portion includes a pair of claws, and the second guide rail is provided on the lower surface of each claw.

[0060] This embodiment makes it possible to realize a suitable configuration when the support portion includes a pair of claws.

[0061] (8) An article conveying device according to any one of (1) to (7) above, wherein the support portion is moved between a first position and a second position different from the first position, and has a partition wall positioned between the first position and the second position that separates a first region where the first position is located from a second region where the second position is located, the guide rail is positioned only in the first region of the first and second regions, and the support portion is configured to pass through an opening formed in the partition wall.

[0062] In this configuration, the support, sliding body, and rotating arm can be kept in the first region except when an item is being transferred while the support is in the second position, thereby improving the spatial degree of freedom in the second region. Of course, this is not always the case.

[0063] Finally, various embodiments of the present invention have been described, but these are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims and their equivalents. [Explanation of Symbols]

[0064] 1: Material handling device, 2: Casing, 3: Horizontal articulated robot, 3a: Vertical axis, 3b: Vertical axis, 4: First guide rail, 5: Sliding body, 5A: First sliding body, 5B: Second sliding body, 7: Support part, 8: Second guide rail, 9: Booth, 10: Material, 11: First area, 12: Second area, 21: Gate valve, 22: Frame, 23: Second opening, 24: Gate valve, 31: First rotating arm, 32: Second rotating arm, 33: Base, 34: Motor, 35: Bracket, 41: Carriage, 51: Recess, 61: Stopper, 62: Stopper, 71: Claw, 81: Carriage, 91: Partition wall, 92: First opening, ST: Conveying stroke

Claims

1. A material handling device, A support section that supports the item to be transported, The aforementioned support portion is attached to a sliding body that can slide along a guide rail formed in a straight line, The device comprises a rotating arm whose tip is connected to the support portion and which rotates around a vertical axis to move the support portion in a direction along the guide rail, The rotating arm is positioned in a manner that does not overlap with the movement trajectory of the sliding body in a plan view, in an article conveying device.

2. In the article conveying device according to claim 1, The aforementioned rotating arm is a first rotating arm, and its base end is connected to the tip of a second rotating arm that rotates around a vertical axis. An article handling device in which the first rotating arm and the second rotating arm constitute a horizontal articulated robot.

3. In the article conveying device according to claim 2, The rotation axis of the second rotating arm is positioned in close proximity to the guide rail of the article conveying device.

4. In the article conveying device according to claim 3, The aforementioned guide rail is a single rail in the article conveying device.

5. In the article conveying device according to claim 1, The sliding body is, A first sliding body is slidably positioned on the aforementioned guide rail, The device comprises a second sliding body that is slidably mounted relative to the first sliding body in a direction along the guide rail, The support portion is an article conveying device fixed to the second sliding body.

6. In the article conveying device according to claim 5, The aforementioned guide rail is the first guide rail, The support portion includes a claw that protrudes from the second sliding body in a direction along the guide rail, A second guide rail is provided on the lower surface of the claw, The first sliding body has a guide support portion that slidably supports the second guide rail in a direction along the first guide rail, in an article conveying device.

7. In the article conveying device according to claim 6, The article conveying device includes a pair of claws in the support portion, and the second guide rail is provided on the lower surface of each claw.

8. In the article conveying device according to any one of claims 1 to 7, The support portion is moved between a first position and a second position different from the first position. It has a partition wall positioned between the first position and the second position, which separates the first region where the first position is located from the second region where the second position is located. The guide rail is arranged only in the first region of the two regions, The support portion is configured to allow passage through an opening formed in the partition wall of the article conveying device.

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