Multi-axis positioner

Abstract

To provide an accurate positioning manipulator as an alternative to a hexapod.SOLUTION: A multi-axis positioning stage or positioner includes a top plate 104 that is supported and operated by a plurality of prismatic joint actuators. Each actuator includes an actuator joint with four or five degrees of freedom (DOF) with the top plate 104. When one or more of the actuators extend or retract, the point of rotation of the remaining actuators, or the four or five DOF actuator joints, can shift to move the top plate 104. The actuators can be positioned between the top plate and at least one base plate 102 or base structure and secured thereto.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The concept of the present invention relates to a positioning stage, and more particularly to a multi-axis relative positioning stage.

Background Art

[0002] Related Applications This application claims the benefit of U.S. Patent Application No. 17 / 029,908, filed on September 23, 2020, entitled "Multi-Axis Positioner", which is a continuation-in-part of U.S. Patent Application No. 16 / 930,638, filed on July , 2020, entitled "Multi-Axis Positioner", which is a continuation of U.S. Patent Application No. 16 / 275,601, filed on February 14, 2019, entitled "Multi-Axis Positioning Method", now U.S. Patent No. 10,746,928, which is a divisional application of U.S. Patent Application No. 15 / 720,006, filed on September 29, 2017, entitled "Multi-Axis Relative Positioning Stage", now U.S. Patent No. 10,429,587, which claims the benefit of U.S. Provisional Application No. 62 / 402,674, filed on September 30, 2016, entitled "Multi-Axis Relative Positioning Stage", and each of these applications is hereby incorporated by reference in its entirety.

[0003] Position manipulators are used in a vast number of applications to position objects, tools, or instruments with varying degrees of precision. An overview of kinematic joints, or kinematic pairs, that can be used in position manipulators, including rigid (stationary), prism, rotation, parallel cylinder, cylinder, spherical, planar, edge slider, cylinder slider, point slider, spherical slider, and crossed cylinder, is shown in FIG. 1.

[0004] A Stewart platform (also known herein as a hexapod) is a multi-axis positioning stage consisting of, for example, six actuators, each with a spherical, ball, or universal joint at both ends. While hexapods are considered world-class multi-axis positioning stage configurations for most applications, they often come at exorbitant costs. One problem with hexapods is that they are synergistic motion platforms due to the interaction of the actuators. That is, due to the interaction of the actuators, no actuator can move independently, and for a given movement, many or all of the actuators must move by different specific amounts and with different velocity profiles to prevent the stage from being constrained. Furthermore, these motion and velocity profiles change continuously as the given start and end points are changed. Therefore, even when a short-distance single-axis movement is required, a very complex computer algorithm is needed to individually calculate the travel distance and velocity profile required for each actuator to move the top plate of the stage from point A to point B. As a result, a human operator cannot manually perform even this simple movement without constraining the stage.

[0005] Another significant drawback of hexapods is that the stiffness of the joints (against off-axis motion) determines the "slop" or "play," and therefore the resolution of the stage. This is a design paradox, as forming spherical joints (as used in hexapods) with increasingly tight tolerances becomes exponentially difficult. In other words, when designers form world-class spherical bearings to maximize stage resolution and minimize tilt, two inherent problems are exacerbated by default. First, the stiffness of the spherical joints exponentially improves the precision of the motion and velocity profile requirements of each actuator to prevent constraints. Second, the functional requirements of the actuators increase exponentially to achieve the required precise motion and velocity profiles. As a result, improving the resolution of a hexapod requires an exponential increase in computational power to determine motion and velocity profiles, an exponential increase in the performance capabilities of the actuators, and 12 high-quality spherical bearings. All of these factors significantly increase the cost of hexapods.

[0006] Hexapods generally cost 3 to 10 times more than their corresponding kinematic chains, but are often preferred because they are not plagued by tolerance stack-up issues. 10-micron accuracy is not uncommon as a positioner requirement in many applications; for example, the photonics industry often requires sub-micron accuracy. Currently, the price of hexapods generally ranges from $60,000 to over $120,000, depending on the respective requirements of physical size, load limits, and accuracy. Another, more precise positioning manipulator is highly desirable. [Overview of the project] [Means for solving the problem]

[0007] According to the conceptual principle of the present invention, a parallel position manipulator comprises a top plate, a base plate (also referred to herein as a bottom plate or base plate), and three, four, five, or six prism joint actuators. Each actuator includes an actuator joint with five degrees of freedom (DOF) on either the base plate or the top plate. When one or more actuators extend or retract during operation, the pivot points of the remaining actuators, for example, the five-DOF actuator joints, can shift on any axis other than the operating axis of that actuator (i.e., the axis defined by the extension and retraction of the actuators). In exemplary embodiments, magnetism, gravity, and / or a flexible polymer such as silicone can be used to keep up to five DOF pivot points in contact with their respective (i.e., top or bottom) plates within the contact area as the prism actuators extend or retract. In exemplary embodiments, at least two of the prism actuators are perpendicular to at least two other prism actuators. When a fifth axis is added, its associated prism actuator is positioned perpendicular to the other four prism actuators.

[0008] In exemplary embodiments, the actuator may be any of several types, such as a piezoelectric actuator, a manual micrometer screw, a magnetic actuator, a stepping motor with a linear actuator (either integrated or separate), a hydraulic cylinder, a pneumatic cylinder, or a transfer motor with an eccentric cam, for example. In exemplary embodiments relating to the principle of the concept of the present invention, the parallel position manipulator is configured such that the push-pull force exerted by each actuator is greater than the shear friction of all other actuators combined. In exemplary embodiments, this is achieved by using a material with high holding force but low shear force, such as a spherical surface of a hard metal held in magnetic contact with a hard, flat metal surface. In such embodiments, only one of the sides (i.e., either the spherical surface of the hard metal or the hard, flat metal surface) is magnetized. This is because if both sides are magnetic, they are semi-constrained on the slide axis and thus behave like a spherical 3DOF joint.

[0009] According to the principles of the concept of the present invention, a positioning stage includes a plurality of magnetic prism joint actuators, a base plate, and a top plate. The top plate can support the device for precise positioning. The top plate may be supported by a plurality of magnetic prism joint actuators, which in turn are supported by the base plate. In an exemplary embodiment, each actuator is fixed to a portion of the base plate that positions each actuator at a certain angle to a vertical axis or plane. In an exemplary embodiment, the angle is 45 degrees, which positions the actuators at 90 degrees relative to each other at the opposite end or end piece of the base plate. In an exemplary embodiment, the sides of the top plate are formed at the same angle to the vertical axis or plane as the sides of the base plate, but other forms are conceivable within the scope of the concept of the present invention. Magnets are provided on the inclined sides of the top plate. Each actuator includes a magnetic material, which may be, for example, an iron metal, at its distal end. In an exemplary embodiment, the magnetic material is hemispherical, but other shapes and combinations are conceivable within the scope of the concept of the present invention. In a preferred embodiment, the edges of each magnetic material are configured to contact the magnets on the sides of the top plate, thereby supporting the top plate on the base plate.

[0010] During operation, the distal end of the actuator is held in contact with a magnet on the side of the top plate by the force of the magnet. When the actuator is activated (i.e., extends or retracts), the top plate moves linearly in the direction of motion determined by the actuator's movement. The distal end of the actuator, which is in contact with the magnet on the opposite side of the top plate, remains in contact with the magnet due to the magnetic force of the magnet acting on the magnetic material at the distal end of the actuator. Simultaneously, this distal end of the actuator can slide the magnet (and the top plate) in the direction determined by the movement of the activated actuator.

[0011] According to the concept of the present invention, a parallel positioner is provided comprising a top plate, a base plate, and three or more actuators configured to support the top plate across the base plate and move the top plate in response to the extension or contraction of one or more actuators, each actuator comprising a joint having five degrees of freedom.

[0012] In various embodiments, each actuator includes a magnetic joint as a 5-degree-of-freedom joint.

[0013] In various embodiments, the top plate includes inclined sides, and the actuator is configured to extend from the base plate to the top plate and to support the top plate along the inclined sides of the top plate.

[0014] In various embodiments, in the neutral position, the inclined side of the top plate is at the same angle as the inclined side of the base plate with respect to the vertical axis or plane.

[0015] In various embodiments, each magnetic joint includes an actuator end formed of a hemispherical magnetic material and a magnet within the contact area of ​​the plate.

[0016] In various embodiments, each magnetic joint is formed on the side of the top plate, and each actuator end forming the joint is configured to contact a magnet on the side of the top plate, and the opposite end of each actuator is configured to be attached and fixed to a base plate.

[0017] In various embodiments, the parallel positioner includes four prism actuators, each forming a magnetic joint with the side of the top plate; two actuators per side; and each prism actuator fixed to the base plate at the other end, wherein the end piece of the base plate and the side of the top plate are formed at the same angle with respect to the vertical axis or plane when in the neutral position.

[0018] In various embodiments, the actuators are configured such that the same extension or contraction amount of any pair of actuators results in the movement of the top plate along only a single axis, and the extension or contraction is performed under the control of an electronic controller.

[0019] According to another aspect of the concept of the present invention, a method for positioning a device is provided, which includes the steps of: preparing a top plate on which the device is placed; preparing a base plate for supporting the top plate; and providing three or more actuators between the top plate and the base plate, wherein the actuators support the top plate across the base plate and are configured to move the top plate by the extension or contraction of one or more actuators, each actuator including a joint having five degrees of freedom.

[0020] In various embodiments, each actuator includes a magnetic joint as a 5-degree-of-freedom joint.

[0021] In various embodiments, the top plate includes inclined sides, and the actuator is configured to extend from the base plate to the top plate and to support the top plate along the inclined sides of the top plate.

[0022] In various embodiments, in the neutral position, the inclined side of the top plate is at the same angle as the inclined side of the base plate with respect to the vertical axis or plane.

[0023] In various embodiments, each magnetic joint includes an actuator end formed of a hemispherical magnetic material and a magnet within the contact area of ​​the plate.

[0024] In various embodiments, each magnetic joint is formed on a side surface of the top plate, each actuator end of the joint is configured to contact a magnet on the side surface of the top plate, and each opposite end of the actuator is configured to be attached and fixed to the base plate.

[0025] In various embodiments, the positioning method includes steps of providing four prism actuators each forming a magnetic joint with the side surface of the top plate, two actuators for each side surface, and each prism actuator fixed to the base plate at the other end, and the end piece of the base plate and the side surface of the top plate are formed at the same angle with respect to a vertical axis or plane when in a neutral position.

[0026] In various embodiments, the actuator is configured such that the same amount of extension or contraction of any pair of actuators results in movement of the top plate only along a single axis, and the extension or contraction is performed under the control of an electronic controller.

[0027] According to another aspect of the concept of the present invention, there is provided a photonic positioning device comprising a photonic device, a top plate supporting the photonic device, a base plate, and three or more actuators configured to support the top plate over the base plate and move the top plate in response to extension or contraction of one or more actuators, each of the actuators including a joint having five degrees of freedom.

[0028] In various embodiments, the photonic device is an optical fiber splitter.

[0029] In various embodiments, the photonic positioning device further comprises four prism actuators each forming a magnetic joint with the side surface of the top plate, two actuators for each side surface, and each prism actuator fixed to the base plate at the other end, wherein the end piece of the base plate and the side surface of the top plate are formed at the same angle with respect to the vertical axis or plane when in the neutral position.

[0030] In various embodiments, the actuator is configured such that the same amount of extension or contraction of any pair of actuators results in movement of the top plate only along a single axis, and the extension or contraction is performed under the control of an electronic controller.

[0031] According to another aspect of the concept of the present invention, there is provided a parallel positioner comprising a top plate, a base plate, and at least four actuators configured to support the top plate over the base plate and move the top plate in response to extension or contraction of one or more actuators, at least some of the actuators including joints having five degrees of freedom.

[0032] In various embodiments, each of the actuators includes a joint having five degrees of freedom.

[0033] In various embodiments, not all of the actuators include joints having five degrees of freedom.

[0034] In various embodiments, at least one of the actuators includes a joint having four degrees of freedom.

[0035] In various embodiments, the top plate includes a first inclined side surface and a second inclined side surface, and the base plate includes a first inclined side surface piece parallel to the first inclined side surface corresponding to the first inclined side surface and a second inclined side surface piece parallel to the second inclined side surface corresponding to the second inclined side surface.

[0036] In various embodiments, the base plate includes an intermediate portion from which side pieces extend.

[0037] In some embodiments, the intermediate portion is planar.

[0038] According to another aspect of the concept of the present invention, a positioner is provided comprising a structure, at least one base, and a plurality of actuators configured to support the structure across the at least one base and to move the structure in response to the extension or contraction of one or more actuators. Three or more of the actuators maintain contact with the structure via joints having at least four degrees of freedom (DOF).

[0039] In various embodiments, three or more of the actuators include at least two actuators that maintain contact with the structure via a joint having 5DOF.

[0040] In various embodiments, three or more actuators include at least two actuators that maintain contact with a structure via a joint having 4DOF.

[0041] In various embodiments, at least one joint having 4DOF is a magnetic joint.

[0042] In various embodiments, at least one joint having 5DOF is a magnetic joint.

[0043] In various embodiments, each of the three or more actuators has a magnetic joint with the structure.

[0044] In various embodiments, an actuator having a 4DOF joint with a structure has a cylindrical end that contacts the structure.

[0045] In various embodiments, the actuator having a 5DOF joint with a structure has a hemispherical end that contacts the structure.

[0046] In various embodiments, the structure includes longitudinally extending grooves, recesses, or channels.

[0047] In various embodiments, longitudinally extending grooves, recesses, or channels are configured to hold at least one optical fiber.

[0048] In various embodiments, the structure includes a V-groove configured to hold at least one optical fiber.

[0049] In various embodiments, the positioner further comprises a top plate, at least one base comprises at least one base plate, and three or more actuators supporting the top plate are coupled to at least one base plate.

[0050] In various embodiments, the top plate includes inclined sides that are engaged by a plurality of actuators, and at least one base plate includes inclined side pieces to which three or more actuators are coupled, and the inclined sides of the top plate and the inclined side pieces of at least one base plate have the same angle with respect to a vertical plane or axis.

[0051] In various embodiments, the positioner further comprises an end plate including a coupling to the end of the structure.

[0052] In various embodiments, the coupling is a magnetic coupling.

[0053] According to another aspect of the concept of the present invention, a positioner is provided comprising a top plate, a base plate, and three or more actuators configured to support the top plate across the base plate and to move the top plate in response to the extension or contraction of one or more actuators, each actuator maintaining contact with the top plate via a joint having at least four degrees of freedom (DOF).

[0054] In various embodiments, the three or more actuators include at least two actuators that maintain contact with the top plate via a joint having 4DOF, and at least one actuator that maintains contact with the top plate via a joint having 5DOF.

[0055] In various embodiments, the top plate includes inclined sides that are engaged by three or more actuators, and the base plate includes inclined side pieces to which three or more actuators are coupled, and the inclined sides of the top plate and the inclined side pieces of the base plate have the same angle with respect to a vertical plane or axis.

[0056] In various embodiments, the actuator having a 4DOF joint with the top plate has a cylindrical end.

[0057] The present invention will become more apparent by considering the accompanying drawings and embodiments for carrying out the invention. The embodiments shown therein are provided as examples and not as limitations, and similar reference numerals refer to the same or similar elements. The drawings are not necessarily to scale and instead focus on illustrating aspects of the invention. [Brief explanation of the drawing]

[0058] [Figure 1] This diagram shows various conventional kinematic joints. [Figure 2]This is a front end view of an embodiment of a four-axis positioning stage or positioner in which all actuators are retracted, with a third actuator (not shown) located behind the first actuator and a fourth actuator (not shown) located behind the second actuator. [Figure 3] Figure 2 is the same front end view of the 4-axis stage, with the first and third actuators extended along the axis ("X-axis"). [Figure 4] This is the same end view of the 4-axis stage in Figure 2, with the second and fourth actuators extended along the axis ("Y-axis"). [Figure 5] Figure 2 shows the first diagram of a four-axis stage, with the first and third actuators extended along the "X-axis," where a second actuator (not shown) is located behind the first actuator and a fourth actuator (not shown) is located behind the third actuator. [Figure 6] The second diagram is the opposite side of the first diagram of the 4-axis stage in Figure 2, with the second and fourth actuators extended along the "Y-axis," where the first actuator (not shown) is behind the second actuator and the third actuator (not shown) is behind the fourth actuator. [Figure 7] The first diagram of the four-axis stage shown in Figures 2 and 5 shows a second actuator (not shown) behind the first actuator and a fourth actuator (not shown) behind the second actuator, with the first actuator retracting and the third actuator extending to pitch the top plate. [Figure 8] The second diagram of the four-axis stage in Figures 2 and 6 shows a first actuator (not shown) behind a second actuator and a third actuator (not shown) behind a fourth actuator, where the second actuator is extended and the fourth actuator is retracted to yaw the top plate. [Figure 9] This is a diagram of the 4-axis stage shown in Figure 2, with the base plate omitted for clarity. [Figure 10] This invention relates to the principle of the present invention and provides a single-axis / dual-actuator moving table applicable to a four-axis stage. [Figure 11] This invention relates to the principle of the present invention and provides a single-axis / single-actuator moving table applicable to a 5-axis stage. [Figure 12] This figure shows one embodiment of a 5-axis positioning stage, relating to the concept and principle of the present invention, as shown in a top view. [Figure 13] This figure shows another embodiment of a multi-axis positioning stage that can achieve a "rolling" motion of a top plate according to the conceptual principle of the present invention. [Figure 14A] This figure shows another embodiment of a four-axis stage using a manual actuator capable of one-digit micron accuracy, relating to the conceptual principle of the present invention. [Figure 14B] This figure shows another embodiment of a four-axis stage using a manual actuator capable of one-digit micron accuracy, relating to the conceptual principle of the present invention. [Figure 14C] This figure shows another embodiment of a four-axis stage using a manual actuator capable of one-digit micron accuracy, relating to the conceptual principle of the present invention. [Figure 15] This figure shows one embodiment of a 5-axis positioning stage that uses a cylindrical magnet in a joint, relating to the concept principle of the present invention. [Figure 16] This is a block diagram of one embodiment of a photonic positioner including an electronic controller, relating to the conceptual principle of the present invention. [Figure 17A] This is a diagram of one embodiment of a photonic positioner system using a four-axis positioning stage, relating to the conceptual principle of the present invention. [Figure 17B] Figure 17A shows the photonic positioner system. [Figure 18] This is a front end view of another embodiment of a multi-axis positioning stage according to a conceptual aspect of the present invention. [Figure 19] Figure 18 is a front end view of the multi-axis positioning stage with the first and third actuators extended. [Figure 20]Figure 18 is a front end view of the multi-axis positioning stage with the second and fourth actuators extended. [Figure 21] Figure 18 is a front end view of the multi-axis positioning stage with the first, second, third, and fourth actuators extended. [Figure 22] Figure 18 is a front end view of the multi-axis positioning stage with the top plate tilted. [Figure 23] Figure 18 is a perspective view of the multi-axis positioning stage with the top plate tilted. [Figure 24] Figure 18 is a side view of the multi-axis positioning stage with the top plate tilted. [Figure 25] This is a perspective view of another embodiment of a multi-axis positioning stage according to a conceptual aspect of the present invention. [Figure 26] Figure 25 is a perspective view of the multi-axis positioning stage with the first and third actuators extended. [Figure 27] Figure 25 is a front end view of the multi-axis positioning stage with the first and third actuators extended. [Modes for carrying out the invention]

[0059] Various aspects of the concept of the present invention will be fully described below with reference to the accompanying drawings illustrating several exemplary embodiments. However, the concept of the present invention can be embodied in many different forms and should not be construed as being limited to the exemplary embodiments described herein.

[0060] In this specification, terms such as "first," "second," etc., may be used to describe various elements, but it should be understood that these elements should not be limited by these terms. These terms are used to distinguish one element from another, but do not imply any order of the elements. For example, without departing from the scope of the invention, the first element may be called the second element, and similarly, the second element may be called the first element. As used herein, the terms "and / or" include any and all combinations of one or more of the related enumerated items. The term "or" is not used in an exclusive or sense, but in an inclusive or sense.

[0061] When an element is described as being "on top of" another element, or "connected to" or "joined" by another element, it will be understood that the element is either directly on top of the other element, can be connected to or joined to another element, or that an intermediary element may exist. Conversely, when an element is described as being "directly on top of" another element, or "directly connected to" or "directly joined" by another element, no intermediary element exists. Other words used to describe relationships between elements should be interpreted in a similar manner (e.g., "between" and "directly between," "adjacent" and "directly adjacent").

[0062] The terms used herein are for the sole purpose of describing specific embodiments and are not intended to limit the invention. As used herein, the singular forms “a,” “an,” and “the” are intended to include the plural form unless the context clearly indicates otherwise. It will be further understood that “equipped,” “having,” “containing,” and / or “containing,” as used herein, identify the presence of a described feature, step, action, element, and / or component, but do not exclude the presence or addition of one or more other features, steps, actions, elements, components, and / or groups thereof.

[0063] Spatially relative terms such as “directly below,” “downward,” “below,” “upward,” and “above” can be used to describe the relationship between one element and / or feature and other elements and / or features, for example, as shown in the figure. It will be understood that spatially relative terms are intended to encompass different orientations of the device during use and / or operation, in addition to the orientation shown in the figure. For example, if the device in the figure is turned upside down, the element described as “downward” and / or “directly below” the other element or feature will be oriented “upward” the other element or feature. The device may be oriented in a different direction (e.g., rotated 90 degrees or in another direction), and the spatially relative descriptors used herein may be interpreted accordingly.

[0064] Exemplary embodiments are described herein with reference to schematic cross-sectional views of idealized exemplary embodiments (and intermediate structures). Therefore, variations from the shapes shown, for example, as a result of manufacturing techniques and / or tolerances, should be expected. Accordingly, exemplary embodiments should not be construed as being limited to specific shapes in the region shown herein, and should include, for example, deviations in shape due to manufacturing.

[0065] To the extent that functional features, operations, and / or steps are described herein or otherwise understood to be included in various embodiments of the concept of the present invention, such functional features, operations, and / or steps can be embodied in functional blocks, units, modules, operations, and / or methods. And to the extent that such functional blocks, units, modules, operations, and / or methods include computer program code, such computer program code can be stored in a computer-readable medium such as non-temporary memory and medium executable by at least one computer processor.

[0066] In exemplary embodiments relating to the conceptual principle of the present invention, a multi-axis positioner or positioning stage includes a support plate supported by a plurality of actuators, such as one or more prism joint actuators. In preferred embodiments, one or more of the actuators include an actuator joint having 5 degrees of freedom (DOF) with respect to the support plate. In various embodiments, one or more actuators include an actuator joint having 4DOF with respect to the support plate. When one or more of the actuators extend or retract during operation, the pivot point of a 5DOF actuator can be shifted on any axis other than the operating axis of that actuator (i.e., the axis defined by the extension and retraction of the actuator).

[0067] In various embodiments, the support plate may include an upper surface for supporting an object and a lower surface that engages with the movable ends of at least several actuators. One or more actuators may be positioned between the top plate and one or more structures. In some embodiments, at least some of the actuators may have a first end fixed to or coupled to a base plate or base structure and a second end that engages with and moves with the support (or top) plate.

[0068] In exemplary embodiments, when the prism actuator is retracted, magnetic force, gravity, and / or a flexible polymer such as silicone can be used to keep the five DOF pivot points in contact with their respective (i.e., top or bottom) plates.

[0069] In some exemplary embodiments, at least two of the prism actuators may be perpendicular to at least two other prism actuators.

[0070] In some embodiments, a fifth axis of movement may be included. If a fifth axis is included, in some embodiments, its associated prism actuator may be positioned perpendicular to the other four prism actuators.

[0071] In exemplary embodiments, the actuator may be one of several types, such as a piezoelectric actuator, a manual micrometer screw, a magnetic actuator, a stepping motor with a linear actuator (either integrated or separate), a hydraulic cylinder, a pneumatic cylinder, or a rotary motor with, for example, an eccentric cam. In exemplary embodiments relating to the principle of the concept of the present invention, the position is set such that the push-pull force exerted by each actuator is greater than the shear friction of all other actuators combined. In exemplary embodiments, this can be achieved by using a material with high holding force but low shear force, such as a hard metal actuator end having a spherical, flat, or pointed surface that is magnetically coupled to a hard, flat metal surface of a support plate and held in contact with this metal surface. In such embodiments, only one of the contact surfaces (i.e., either the hard metal actuator end face or the hard, flat metal surface) is magnetized. This is because if both sides are magnetic, they are semi-constrained on the slide axis and thus behave like a spherical 3DOF joint.

[0072] In an exemplary embodiment relating to the conceptual principle of the present invention, the positioning stage includes a plurality of prism joint actuators, a base plate (or structure), and a top plate. The top plate is a support plate that can support the device for precise positioning of the device. The top plate may be supported by a plurality of prism actuators, which in turn are supported by the base plate or other structure. In an exemplary embodiment, one or more actuators are fixed to a portion of the base plate that positions each actuator at an angle to a vertical axis or plane. In an exemplary embodiment, the sides of the top plate are formed at the same angle to the vertical axis or plane as the sides of the base plate, but other forms are conceivable within the scope of the concept of the present invention. For example, the vertical plane may be a plane that extends perpendicularly to the length between the centers of the top plate and the base plate. In various embodiments, for example, if the actuators are of equal length, one or more sides of the top plate may be parallel to one or more sides of the base plate at at least one position on the top plate.

[0073] In various embodiments, a magnetic field can be established between the support actuator end and the side surface of the top plate, thereby forming a magnetic joint between a portion of the top plate surface and the actuator end for at least one actuator. In various embodiments, either the actuator end or the inclined side surface of the top plate contains or is formed from a magnetic field generating material, such as a magnet, while the other contains or is made from a magnetic material, such as an iron metal. In exemplary embodiments, the actuator end may be hemispherical in shape, but other shapes and combinations, such as cylinders, are conceivable within the scope of the present invention. In various embodiments, the actuator end contains or is formed from a magnetic material, and each magnetic material end is configured to contact a magnet or magnetic surface on the side surface of the top plate, thereby movably supporting the top plate on the base plate.

[0074] In some embodiments, the magnets on the sides of the top plate are fitted to the outer surface of the top plate. The inner surface of the top plate does not need to be magnetic, nor does it need to contain magnets. In some embodiments, the top plate may have a planar, V-shaped, semi-cylindrical, or other cross-sectional shape.

[0075] During operation, in a preferred embodiment, the distal end of the actuator is maintained in contact with the magnet on the outer or side surface of the top plate by the force of the magnet. When the actuator is actuated, for example, when it extends or retracts, the top plate moves according to the direction of motion determined by the movement of the actuator. Thus, the actuator is extendable and retractable along the axis. The distal end of the actuator that is in contact with the magnet on the opposite side of the top plate remains in contact with the magnet by the magnetic force of the magnet acting on the magnetic material of the distal end of the actuator. At the same time, the distal end of such an actuator is made so that the magnet (and the top plate) can slide in the direction determined by the movement of the actuated actuator. With respect to the actuation, this opposite actuator can be passive, i.e., not actuated, or actuated in a different direction and / or range, in various embodiments.

[0076] A multi-axis positioner or positioning stage according to the conceptual principle of the present invention can take the form of a parallel positioner. As a parallel positioner, the device is not plagued by the mechanical stacking problems associated with multiple single-axis stages stacked on top of each other, sometimes called a kinematic chain. Furthermore, unlike a hexapod, the positioning stage according to the conceptual principle of the present invention allows any combination of four actuators to extend or retract by any amount at any speed without stage constraints. Each actuator may be positioned to influence the movement of the top plate of the stage on two different axes. To perform single-axis movement, two actuators may be moved so that they complement each other on the desired axis and cancel each other out on the undesirable axis. As a result, in exemplary embodiments according to the conceptual principle of the present invention, single-axis stage movement can employ dual-actuator movement. The movement of the single-axis stage and the operation of the associated actuators are shown in the tables in Figures 10 and 11.

[0077] In addition to being parallel actuators, the positioning stage according to the conceptual principle of the present invention can have several other advantages. For example, the positioning stage according to the conceptual principle of the present invention is expandable stepwise from 4 axes to 6 axes, whereas the Stewart platform always has 3 or 6 axes. Unlike kinematic chains, the positioning stage according to the conceptual principle of the present invention does not exhibit the accumulation of tolerances of individual stages. The positioning stage according to the conceptual principle of the present invention does not require rotary bearings or linear bearings, whereas a kinematic chain requires one for each free axis. In the positioning stage according to the conceptual principle of the present invention, each operating axis requires only two actuators that move in a fixed, intuitive ratio, and therefore, achieving the desired operation is relatively easy. As previously shown, this is not the case with the Stewart platform. Furthermore, unlike the Stewart platform, there is no need to control the operating speed to prevent stage constraint, and individual actuators can be moved without constraining the stage. In exemplary embodiments, the top plate of the positioning stage can be easily removed and replaced by simply separating interfaces such as a magnetic interface between the actuator and the top plate.

[0078] In exemplary embodiments, the resolution and rigidity of the positioning stage may depend on the quality of the actuator, the smoothness of the slider components, whether hemispherical, cylindrical, or otherwise, and the strength of the magnetic force (or other force) holding the joint formed between the actuator and the top plate together. By optimizing all these aspects, a submicron precision positioning stage can be created at a fraction of the cost of a similar precision hexapod. Often, positioning stages relating to the principles of the concept of the present invention perform better than standard kinematic chains while being more cost-effective. In exemplary embodiments, the holding force (e.g., magnetic holding force) of the actuator slider (or the other four of the five DOF connections) is greater than the coefficient of friction of all other actuator joints. Where this is true, the top plate settles into an equilibrium state that allows the four (or more) connections to slide or rotate as needed, while maintaining all contact points.

[0079] A four-axis positioning stage with a constrained Z-axis that does not interfere with other degrees of freedom can be implemented according to the principles of the concept of the present invention by using a rigid beam to constrain or limit the movement of such a Z-axis, or by replacing one of the four 5DOF actuator joints with a 4DOF joint that limits the movement of the Z-axis, as shown in Figure 15.

[0080] Figures 2 to 9, when combined, illustrate an exemplary embodiment of a four-axis positioning stage relating to the concept and principle of the present invention.

[0081] Figure 2 shows a front end view of an embodiment of a multi-axis positioning stage or positioner with all actuators retracted, where a third actuator (not shown) is behind the first actuator and a fourth actuator (not shown) is behind the second actuator. Figures 5 to 9 show the third and fourth actuators. For example, as can be seen in Figure 9, the third actuator is behind the first actuator and the fourth actuator is behind the second actuator.

[0082] With respect to Figure 2, all actuators are retracted in this figure. In this exemplary embodiment, the positioning stage is a four-axis positioning stage 100 comprising a base plate 102, a top plate 104, and a plurality of actuators which may be prism actuators. The plurality of actuators include a first actuator 106 (i.e., prism actuator 1), a second actuator 108 (i.e., prism actuator 2), a third actuator 110 (i.e., prism actuator 3), and a fourth actuator 112 (i.e., prism actuator 4).

[0083] In an exemplary embodiment, the base plate 102 includes inclined side pieces 118 and 120. In this embodiment, θ1 and θ2 represent the angles of the inner surfaces of the side pieces 118 and 120 with respect to the vertical axis and / or vertical plane, respectively. The inclined side pieces of the base plate may also be formed at an angle θ with respect to the horizontal plane, where in this embodiment θ = θ1 = θ2. In other embodiments, θ ≠ θ1, θ ≠ θ2 and / or θ1 ≠ θ2 may be assumed. In other embodiments, θ may be irrelevant, and θ1 = θ2 may still hold. In this embodiment, the outer surfaces 122 and 124 of the top plate 104 are formed at the same angles θ1 and θ2 with respect to the vertical axis and / or vertical plane. Thus, the inner surface of the side piece 118 of the base plate 102 can be parallel to the outer surface 122 of the top plate 104, and the inner surface of the side piece 120 of the base plate 102 can be parallel to the outer surface 124 of the top plate. The vertical plane may be a plane that extends vertically through the centers of the top plate 104 and the base plate 102.

[0084] In the embodiment shown in Figure 2, the base plate 102 includes an intermediate portion to which the side plates 118 and 120 extend. The intermediate portion may be a planar piece in a horizontal plane, but it does not have to be planar in all embodiments. Also, the side pieces 118 and 120 are shown connected or as part of the same structure, but this is not necessary in all embodiments. In other embodiments, the side pieces 118 and 120 may be part of different structures, or they may be separate plates attached to one or more other structures.

[0085] In this embodiment, each of the actuators 106, 108, 110, and 112 extends from one of the side pieces 118, 120 of the base plate 102 toward the top plate 104. For example, in this embodiment, each actuator is fixed to or coupled to a side piece of the base plate 102 and extends toward the corresponding side 122 or 124 of the top plate 104 at a 90-degree angle to the corresponding side piece 118 or 120.

[0086] The distal end of each actuator 106, 108, 110, and 112 includes a magnetic material. In this embodiment, each of the actuators 106, 108, 110, and 112 includes an iron metal hemispherical end 134, 136, 138, and 140. Magnets 126, 128, 130, and 132 are positioned on or within the sides 122, 124 of the top plate 104 at locations corresponding to the iron metal hemispherical ends 134, 136, 138, and 140 of each actuator 106, 108, 110, and 112.

[0087] Figure 3 shows the same front end view of the four-axis positioning stage of Figure 2, in which case the first and third actuators extend along the axis ("X-axis"). In Figure 3, the first actuator 106 and the third actuator 110 are extended to move the top plate 104 in the direction of the X-axis, as indicated by the "X-axis arrow". As already shown, the third actuator 110 (actuator 3) is behind the first actuator 106 (actuator 1), and the fourth actuator 112 (actuator 4) is behind the second actuator 108 (actuator 2). In an exemplary embodiment, actuators 106 and 310 are extended by the same amount to give pure X-axis movement. The dashed line shows the original positions of the top plate 104 and magnets 126, 128, which is the position of the top plate in Figure 2.

[0088] Figure 4 shows the same end view of the four-axis positioning stage of Figure 2, in which case the second and fourth actuators extend along the axis ("Y-axis"). In the exemplary embodiment of Figure 4, actuators 1 106 and 3 110 (X-axis) and actuators 2 108 and 4 112 (Y-axis) are extended. As already shown, the third actuator 110 is behind the first actuator 106 and the fourth actuator 112 is behind the second actuator 108. In the exemplary embodiment, the first actuator 106 and the third actuator 110 are extended by the same amount to produce X-axis movement. The second actuator 108 and the fourth actuator 112 are extended by the same amount to produce Y-axis movement. The dashed lines show the original positions of the top plate 104 and magnets 126, 128.

[0089] Figure 5 shows the first and third actuators of the four-axis positioning stage of Figure 2 extended along the "X-axis," with the second actuator (not shown) behind the first actuator and the fourth actuator (not shown) behind the third actuator. In the exemplary embodiment of Figure 5, the first actuator 106 and the third actuator 110 are extended by the same amount to result in movement only in the direction of the X-axis. From this viewpoint, the second actuator 108 is behind the first actuator 106 and the fourth actuator 112 is behind the third actuator 110. The dashed lines indicate the original positions of the top plate 104 and magnets 126, 130.

[0090] Figure 6 shows the second and fourth actuators of the four-axis positioning stage of Figure 2 extended along the "Y-axis," with the first actuator (not shown) behind the second actuator and the third actuator (not shown) behind the fourth actuator. In the embodiment of Figure 6, the second actuator 108 and the fourth actuator 112 are extended by the same amount to result in movement only in the direction of the Y-axis. From this viewpoint, the first actuator 106 is behind the second actuator 108 and the third actuator 110 is behind the fourth actuator 112. The dashed lines indicate the original positions of the top plate 104 and magnets 128, 132.

[0091] Figure 7 shows the first actuator 106 retracted and the third actuator 110 extended to pitch the top plate 104, with a second actuator 108 (not shown) behind the first actuator and a fourth actuator 112 (not shown) behind the second actuator.

[0092] Figure 8 shows a four-axis positioning stage in which the second actuator 108 is extended and the fourth actuator 112 is retracted to yaw the top plate 104, with the first actuator 106 (not shown) behind the second actuator and the third actuator 110 (not shown) behind the fourth actuator.

[0093] Figure 9 shows a diagram of the four-axis positioning stage of Figure 2, with the base plate 102 omitted for clarity. In the exemplary embodiment of Figure 9, this diagram of the four-axis positioning stage shows the relative positions of the first, second, third, and fourth actuators 106, 108, 110, and 112, along with their respective associated magnets 126, 128, 130, and 132, as well as the top plate 104.

[0094] Figure 10 shows a table of single-axis / dual-actuator movements applicable to a four-axis positioning stage, relating to the conceptual principle of the present invention. The table in Figure 10 shows combinations of dual-actuator movements that realize the movement of the top plate according to the conceptual principle of the present invention. For example, in order to extend the top plate only in the positive X-axis direction, the first actuator 106 and the third actuator 110 are extended while the second actuator 108 and the fourth actuator 112 remain in their predetermined positions. Similarly, in order to extend the top plate only in the positive Y-axis direction, the second actuator 108 and the fourth actuator 112 are extended while the first actuator 106 and the third actuator 110 remain in their predetermined positions.

[0095] Figure 11 shows a table of single-axis / single-actuator movements applicable to a 5-axis positioning stage, relating to the conceptual principle of the present invention. For example, Figure 12 shows a fifth actuator 113 added to influence the movement of the top plate 4 in the Z-axis in the horizontal plane. In other embodiments, a sixth actuator may be provided on the opposite side of the fifth actuator.

[0096] The table in Figure 11 shows, as an example, the single-axis, single-actuator motion of the fifth actuator 113 when added to actuators 106, 108, 110, and 112. That is, the table in Figure 11 can be added to the table in Figure 10 when five actuators are used. Thus, a five-axis positioning stage as shown in Figure 12 can be given positive Z-axis motion brought about by the extension of the fifth actuator 113 and negative Z-axis motion brought about by the contraction of the fifth actuator 113. In an exemplary embodiment in which a four-axis positioning stage is used, with the Z-axis constrained, the fifth actuator 113 may be replaced with, for example, a rigid beam.

[0097] Figure 13 shows another embodiment of a multi-axis positioning stage capable of achieving a “rolling” motion of a top plate according to the conceptual principle of the present invention. In an exemplary embodiment according to the conceptual principle of the present invention, a sixth rolling motion axis may be introduced as shown in Figure 13. In this exemplary embodiment, the top plate 104 is semi-cylindrical as is the magnet 133. In such an exemplary embodiment, the motion of the sixth axis does not interfere with the motion of the other five axes. Rolling can be achieved by selective extension and / or contraction of actuators 106, 108, 110, and 112. A fifth actuator 113 may be provided, again optional, if Z-axis motion is intended.

[0098] Figures 14A, 14B, and 14C provide an end view, perspective view, and exploded view, respectively, of an exemplary positioner relating to the conceptual principle of the present invention. In this exemplary embodiment, the top plate 104 and the base plate 102 are V-shaped, in which case the sides have the same angle θ with respect to the vertical axis, where in this embodiment θ = θ1 = θ2. In other embodiments, θ1 ≠ θ2 may be assumed. In this exemplary embodiment, the first to fourth actuators 106, 108, 110, and 112 penetrate the base plate 102 and contact magnets 135, 137 located on the sides of the top plate 104.

[0099] Magnets 135 and 137 are positioned on or within the sides 122, 124 of the top plate 104, at locations corresponding to the iron metal hemispherical ends 134, 136, 138, and 140 at the distal ends of their respective actuators 106, 108, 110, and 112.

[0100] In exemplary embodiments, actuators 106, 108, 110, and 112 may be precision adjustment mechanisms such as micrometer screws 106a, 108a, 110a, and 112a that enable single-digit micron-precision adjustment.

[0101] Figure 15 is a diagram of one embodiment of a five-axis positioning stage using a cylindrical magnet in a joint, relating to the principle of the concept of the present invention. As shown in the exemplary embodiment of Figure 15, in this exemplary embodiment, one of the magnets 139 mounted on the top plate 104 may be in the form of a cylindrical magnet that gives a 4DOF joint resulting in a positioner with restricted Z-axis movement. The cylindrical magnet can be constructed, for example, by bending to give a sixth axis of rolling.

[0102] Figure 16 is a block diagram of one embodiment of a photonic positioner including an electronic controller relating to the conceptual principle of the present invention. The block diagram of Figure 16 shows a photonic system 200 that uses a photonic device 101, such as a fiber splicer or alignment device, as a component thereof, in relation to a positioner 100 relating to the conceptual principle of the present invention. In an exemplary embodiment, the positioner 100 is controlled by a controller 103, which operates an actuator of the positioner in the manner described above to precisely move the photonic device 101. Such movement may, for example, enable the alignment of the ends of optical fibers. The controller 103 may receive feedback from the photonic device 101, for example, which the controller uses to adjust the positioner 100. In an exemplary embodiment where the photonic device 101 is a splicer, for example, a sensor may provide the controller 103 with an indication of the quality of alignment between fibers, and the controller 103 uses such indication to adjust the positioner, for example, for precise alignment of optical fibers.

[0103] Figures 17A and 17B are side views of a photonic positioner system 105 using a positioner according to the principle of the concept of the present invention. In this exemplary embodiment, a pair of positioners 100 each support optical fiber ends F1 and F2 for splicing. Each of the positioners 100 can be operated, for example, using an electronic controller 103, as described above, to align the ends of the fibers F1 and F2 for splicing by an optical fiber splicer that includes a heating element such as a plasma heater (not shown) configured to heat the fiber ends when they are aligned using the positioner 100. In the exemplary embodiment, the top plate of the positioner 100 may include or support a fiber holder 107. Such a fiber holder is known and may have grooves on two flat top surfaces to hold one or more fibers in place for positioning and splicing.

[0104] Referring to Figures 18 to 27, alternative embodiments of a multi-axis positioner or positioning stage relating to an aspect of the concept of the present invention are described. Unless otherwise specified, the above description applies similarly to these embodiments or their aspects. As described above, a multi-axis positioner, also referred to herein as a parallel positioner or positioning stage, can use multiple actuators that form multiple joints with a support plate. In these embodiments, the multiple joints include at least two 4-degree-of-freedom (4DOF) joints combined with two other joints, where each of the other joints can be a 4DOF joint or a 5DOF joint. In various embodiments, this positioner includes either two 4DOF joints and two 5DOF joints, one 4DOF joint and one 5DOF joint, or two 4DOF joints. Thus, the interface between the positioning ends of the actuators and the support plate is a 4DOF joint or a 5DOF joint. Other embodiments may include different combinations of 4DOF and / or 5DOF joints with the support plate. The support plate may be configured to support one or more objects that are to be positioned with high precision, preferably.

[0105] In various embodiments, the system includes three or more actuators that maintain contact with the structure via joints having four or five degrees of freedom (DOF). Alternatively, the system may optionally not include actuators that maintain contact with the structure via joints having three or fewer DOFs.

[0106] In an exemplary embodiment, the positioner may also include at least one bottom plate (or structure), and the actuator may be positioned between at least one bottom plate and a top plate and fixed to at least one bottom plate (or structure).

[0107] During operation, when one or more actuators extend or retract, the pivot point of the interface between the remaining actuators and the support plate (e.g., 4DOF and / or 5DOF joints) can be shifted on at least one of the four axes other than the operating axis of that actuator. As already shown, the 4DOF joint with the support plate may be formed by an actuator having an end with, for example, an edge slider or a cylindrical slider. In a preferred embodiment, similar to the embodiment of the 5DOF joint described above, at least two of the prism actuators may be perpendicular to at least two other prism actuators, and if a fifth or sixth axis is added, the prism actuators associated with them may, in various embodiments, be positioned perpendicular to the other four prism actuators.

[0108] Similar to the 5DOF embodiment described above, the ends of the actuators can be magnetically coupled to the support (or top) plate. When one or more actuators extend or retract during operation, the pivot points of the remaining actuators can shift and move relative to the top plate while remaining magnetically movably coupled to the support (or top) plate.

[0109] As described above, in exemplary embodiments, the actuator may be any of several types, such as a piezoelectric actuator, a manual micrometer screw, a magnetic actuator, a stepping motor with a linear actuator (either integrated or separate), a hydraulic cylinder, a pneumatic cylinder, or a rotary motor with, for example, an eccentric cam. In exemplary embodiments relating to the conceptual principle of the present invention, the positioner is configured such that the push-pull force exerted by each actuator is greater than the shear friction of all other actuators combined. In exemplary embodiments, this can be achieved by using a material with high holding force but relatively low shear force, for example, a hard metal end face of the actuator held in magnetic contact with a hard, flat metal surface of the top plate.

[0110] Figures 18 to 27 provide illustrations of exemplary embodiments of a multi-axis positioner or positioning stage relating to the conceptual principle of the present invention, which uses at least two actuators having cylindrical slider ends to form a 4DOF joint with a support plate. This positioner may include two or more actuators that engage with a support plate having a 4 or 5DOF joint.

[0111] The support plate can be configured to hold an object to be positioned. In some embodiments, the object may be at least one optical fiber. In some embodiments, the support plate may include grooves or channels configured to hold the object in a preferred position. In some embodiments, the support plate may include V-shaped grooves configured to hold the object in a preferred position. In some embodiments, this positioner or positioning stage may form part of a fiber processing machine, such as an optical fiber splicer, and the grooves may be configured to hold or support at least one optical fiber.

[0112] Figure 18 shows a front end view of an embodiment of a multi-axis positioning stage or positioner 300 having at least four actuators 306, 308, 310, and 312 supporting a support (or top) plate 304. In this figure, the first actuator 306 and the second actuator 308 are visible, while a third actuator 310 (not shown) is located behind the first actuator 306 and a fourth actuator 312 (not shown) is located behind the second actuator 308.

[0113] With respect to Figure 18, all actuators are retracted in this figure. In this exemplary embodiment, the positioning stage 300 includes a base plate 302, a top plate 304, and a plurality of actuators 306, 308, 310, 312, one or more of the plurality of actuators may be prism actuators. In various embodiments, the positioning stage 300 or its base plate may optionally include an end plate 317, as described with respect to Figures 23 and 24.

[0114] In exemplary embodiments, similar to the embodiments described above, the base plate 302 includes side pieces 318, 320, each having an internally inclined side surface formed at an angle with respect to a vertical axis or vertical plane "A". For this, see, for example, the above-described θ1 and θ2 that can be applied to this embodiment. For example, the vertical plane A may be a plane that extends vertically through the centers of the top plate 304 and the base plate 302. In other embodiments, θ1 ≠ θ2 may be assumed. The sides 322, 324 of the top plate 304 are formed at the same angle with respect to the vertical axis or vertical plane A. Thus, the side piece 318 of the base plate 302 is parallel to the side 322 of the top plate 304, and the side piece 320 of the base plate is parallel to the side 324 of the top plate 304. In the embodiment of Figure 18, the base plate 302 includes an intermediate portion to which the side pieces 318 and 320 extend. The intermediate portion may be a substantially planar piece in the horizontal plane, but it does not have to be planar or flat in all embodiments and may include a recess, for example, as shown in Figure 18.

[0115] In this embodiment, each of the actuators 306, 308, 310, and 312 extends from one of the side pieces 318, 320 of the base plate 302 toward the top plate 304. For example, in this embodiment, each actuator is fixed or coupled to a side piece of the base plate 302 and oriented at a 90-degree angle to the corresponding actuator on the opposite side piece 318 or 320.

[0116] The distal ends of each actuator 306, 308, 310, and 312 may include magnetic material. In the embodiments shown in Figures 18 to 24, each of the actuators 306, 308, 310, and 312 includes iron metal cylindrical ends 334, 336, 338, and 340, but other linear ends can be used in other embodiments. Magnets such as the aforementioned magnets 126, 128, 130, and 132 may be positioned on or within the sides 322, 324 of the top plate 304 at positions corresponding to the iron metal cylindrical ends 334, 336, 338, and 340 of each actuator 306, 308, 310, and 312.

[0117] Figure 19 shows the same front end view of the positioning stage 300 as in Figure 18, in which the first actuator 306 and the third actuator (behind the first actuator) are extended along the axis ("X-axis"). The second actuator 308 and the fourth actuator (behind the second actuator) remain retracted (or are not extended). In Figure 19, the first actuator 306 and the third actuator 310 are extended to move the top plate 304 in the direction of the X-axis, as indicated by the X-axis arrow (see Figure 3). In exemplary embodiments, the first actuator 306 and the third actuator 310 are extended by the same amount to produce purely X-axis movement.

[0118] Figure 20 shows the same front end view of the positioning stage 300 as in Figure 18, in which the second actuator 308 and the fourth actuator (behind the second actuator) are extended along the axis ("Y-axis"). The first actuator 306 and the third actuator (behind the first actuator) remain retracted (or are not extended). In Figure 20, the second actuator 308 and the fourth actuator 312 are extended to move the top plate 304 in the direction of the Y-axis, as indicated by the Y-axis arrow (see Figure 4). In exemplary embodiments, the second actuator 308 and the fourth actuator 312 are extended by the same amount to produce purely Y-axis movement.

[0119] Figure 21 shows the same front end view with all actuators extended by the same amount to produce movement in the Z direction. In Figure 21, actuators 306 and 310 (X-axis) and actuators 308 and 312 (Y-axis) are extended. As already shown, the third actuator 310 is behind the first actuator 306 and the fourth actuator 312 is behind the second actuator 308. In exemplary embodiments, the first actuator 306 and the third actuator 310 are extended by the same amount to produce movement in the X-axis, and the second actuator 308 and the fourth actuator 312 are extended by the same amount to produce movement in the Y-axis.

[0120] Figure 22 shows a left perspective view of the positioning stage 300 of Figure 18, in which case the first actuator 306 is extended by a longer distance than the third actuator 310, and the second actuator 308 is similarly extended by a longer distance than the fourth actuator 312, resulting in the top plate 304 being tilted upward.

[0121] Similarly, the third actuator 310 can be extended a longer distance than the first actuator 306, and the fourth actuator 312 can be extended a longer distance than the second actuator 308, resulting in the top plate 304 tilting downwards.

[0122] Figure 23 shows a side perspective view in which the first actuator 306 is extended longer than the third actuator 310, and the fourth actuator 312 is extended longer than the second actuator 308, resulting in both an upward tilt and partial rotation of the top plate 304. In Figure 23, the end plate 317 is partially visible. The end plate may be fixed to the base plate 302 or be part of the base plate 302, as shown. In other embodiments, the end plate 317 does not need to be in contact with the base plate or be part of the base plate. That is, in various embodiments, the end plate 317 may be detached from and / or independent of the base plate 302.

[0123] Figure 24 shows a side view of the positioning stage 300, with the base plate omitted but the top plate 304 shown. Of the four actuators 306, 308, 310, and 312, only the first and third actuators 306 and 310 are visible in this figure. The cylindrical end 334 of the first actuator and the cylindrical end 338 of the third actuator 310 are in direct contact with the top (or support) plate 304 for direct positioning. The end plate 317 includes a magnetic ball 319 for engaging with one end of the top plate 304. Similar to the joint described above, in various embodiments, the magnetic ball 319 may be positioned to engage with a magnet (not shown) located on or inside the top plate 304.

[0124] The embodiments shown in Figures 18 to 24 are accompanied by four actuators having sliding cylinder ends that form a 4DOF joint with the top plate. However, as described above, combinations of 4DOF and 5DOF actuators are conceivable within the scope of the present invention, as shown in the exemplary embodiments of Figures 25 to 27, which have combinations of actuators with cylindrical ends and ball ends, as previously mentioned.

[0125] An embodiment shown in Figure 25 illustrates a multi-axis positioning stage or positioner 400. The positioning stage 400 includes two 4DOF actuators 310, 312 and two 5DOF actuators 406, 408, as well as an end plate 317 with a base plate 302, a top plate 304, and a magnetic ball 319.

[0126] Any combination of actuator extension and contraction can be achieved, but in this example, the first and second actuators 406 and 408 are extended by a longer distance than the third and fourth actuators 310 and 312, resulting in them tilting upward at the front of the top plate 304.

[0127] Figure 26 is a perspective view of a positioning stage 400 in which the first actuator 406 and the third actuator 410 are extended by the same amount, resulting in the top plate 404 moving in the X-axis direction. Figure 26 is a front view of the positioning stage 400 of Figure 25 with the same actuator extension arrangement. Figure 27 shows, as an example, a front end view of the same actuator configuration. As will be apparent to those skilled in the art who enjoy the benefits of this disclosure, other combinations of actuator extension and retraction can be achieved within the scope of the concept of the present invention. In this embodiment, each actuator includes an electromechanical component that forms part of the actuator, resulting in the extension and retraction of the actuator, which can be controlled by at least one controller, such as controller 103. Such a controller may include at least one processor that executes computer instructions to drive the actuators.

[0128] The above describes what is considered to be the best mode and / or other preferred embodiment, but it is understood that various modifications can be made thereto, and the present invention or multiple inventions can be carried out in various forms and embodiments, and they can be applied to a number of uses, only some of which are described herein. The following claims are intended to claim the literal statements and all equivalents thereof, including all modifications and changes contained within each claim.

[0129] For clarity, it should be understood that certain features of the present invention described in the context of separate embodiments may be provided in combination in a single embodiment. Conversely, for brevity, various features of the present invention described in the context of a single embodiment may be provided separately or in any suitable subcombination.

[0130] For example, it should be understood that all features described in any of the claims (whether independent or dependent) can be combined in any given way.

Claims

1. Structure (304) and At least one base (302) and A plurality of linear actuators (306, 308, 310, 312) are configured to support the structure across at least one base and to move the structure relative to the at least one base in response to the extension or contraction of one or more linear actuators, Equipped with, A positioner (300) characterized in that three or more linear actuators include at least two linear actuators that maintain contact with the structure via joints having four degrees of freedom (DOF).

2. A positioner according to claim 1, wherein the joint having 4 DOF has 5 DOF, and the three or more linear actuators include at least two linear actuators that maintain contact with the structure via the joint having 5 DOF.

3. A positioner according to claim 1, characterized in that at least one of the joints having 4DOF is a magnetic joint.

4. A positioner according to claim 1, characterized in that at least one of the joints has 5DOF, and the at least one joint having 5DOF is a magnetic joint.

5. A positioner according to claim 1, characterized in that each of the three or more linear actuators has a magnetic joint with the structure.

6. A positioner according to claim 1, wherein the linear actuator having a 4DOF joint with the structure has a cylindrical end that contacts the structure.

7. A positioner according to claim 1, wherein at least one of the joints has 5DOF, and the linear actuator having a 5DOF joint with the structure has a hemispherical end that contacts the structure.

8. A positioner according to claim 1, wherein the structure includes a groove, recess, or channel extending in the longitudinal direction.

9. A positioner according to claim 8, characterized in that the longitudinally extending groove, recess, or channel is configured to hold at least one optical fiber.

10. A positioner according to claim 8, wherein the structure includes a V-groove configured to hold at least one optical fiber.

11. A positioner according to claim 1, The structure comprises a top plate, and the at least one base includes at least one base plate. A positioner characterized in that the three or more linear actuators supporting the top plate are coupled to at least one base plate.

12. A positioner according to claim 11, wherein the top plate includes an inclined side surface that is engaged by the three or more linear actuators, and the at least one base plate includes an inclined side piece to which the three or more linear actuators are coupled, and the inclined side surface of the top plate and the inclined side piece of the at least one base plate are at the same angle with respect to a vertical plane or vertical axis.

13. A positioner according to claim 1, characterized in that it includes an end plate (317) which includes a coupling (319) to the end of the structure (304).

14. A positioner according to claim 13, characterized in that the coupling is a magnetic coupling.

15. Top plate (304) and Base plate (302) and Three or more linear actuators (306, 308, 310, 312) are configured to support the top plate across the base plate and to move the top plate in accordance with the extension or contraction of one or more linear actuators, Equipped with, A positioner (300) characterized in that at least two of the linear actuators maintain contact with the top plate via a joint having four degrees of freedom (DOF).

16. A positioner according to claim 15, wherein at least one of the joints has 5 DOF, and the three or more linear actuators include at least two linear actuators that maintain contact with the top plate via the joint having 4 DOF, and at least one linear actuator that maintains contact with the top plate via the joint having 5 DOF.

17. A positioner according to claim 15, wherein the top plate includes an inclined side surface that is engaged by the three or more linear actuators, the base plate includes an inclined side piece to which the three or more linear actuators are coupled, and the inclined side surface of the top plate and the inclined side piece of the base plate are at the same angle with respect to a vertical plane or vertical axis.

18. A positioner according to claim 15, wherein the linear actuator having a 4DOF joint with the top plate has a cylindrical end.

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