Device and method for manufacturing the same

A stabilization layer with a uniform oxynitride material addresses the durability and efficiency issues in PEC devices by protecting against corrosion and enhancing charge transfer, leading to improved photocurrent and stability.

JP7884739B2Active Publication Date: 2026-07-06THE RGT UNIV OF MICHIGAN +4
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
THE RGT UNIV OF MICHIGAN
Filing Date
2022-02-28
Publication Date
2026-07-06

AI Technical Summary

Technical Problem

Existing photoelectrochemical (PEC) water splitting devices face challenges with semiconductor durability due to chemical and photochemical corrosion, leading to rapid degradation, while efficient light absorbers lack stability, and durable materials exhibit insufficient efficiency.

Method used

A method involving the formation of a stabilization layer with a uniform distribution of oxynitride material on the semiconductor surface, which includes introducing oxygen to create a continuous oxynitride layer, enhancing the stability and efficiency of the device by providing protection against corrosion and improving charge transfer.

Benefits of technology

The oxynitride layer improves the durability and performance of PEC devices by protecting against corrosion and enhancing charge transfer, resulting in improved photocurrent and stability without adversely affecting device efficiency.

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Abstract

A method for manufacturing a device is provided that can stabilize the device surface during operation. A method of manufacturing a device includes providing a substrate for the device and forming a structure for the device, the structure being supported by the substrate and having a semiconductor composition and including a surface having nitrogen present thereon, the method further including introducing oxygen to the surface to form a stabilization layer on the surface.
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