A method of cutting multiple slices from a workpiece using a wire saw during a series of cutting operations.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- SILTRONIC AG
- Filing Date
- 2021-06-07
- Publication Date
- 2026-07-06
- Estimated Expiration
- Not applicable · inactive patent
Smart Images

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Abstract
Claims
1. A method for cutting multiple slices from a workpiece with a wire saw during a series of cutting operations, wherein the cutting operation is divided into an initial cut and a subsequent cut, the wire saw comprises a wire array of movable wire sections of saw wire and a drive mechanism, the wire array is stretched across a plane between two wire guide rollers, each of the two wire guide rollers is supported between a fixed bearing and a floating bearing, and the method is, Each cutting operation includes a step of feeding the respective workpiece through the wire array along the feed direction by the drive device in the presence of a working fluid and a hard material that acts to abrade the workpiece, wherein the feed direction is perpendicular to the workpiece axis and perpendicular to the plane of the wire array. During each of the cutting operations, the process includes a step of feeding the workpiece through the wire array simultaneously with the axial movement of the floating bearing by adjusting the temperature of the fixed bearing using the cooling fluid according to the specifications of a temperature profile that specifies the temperature of the cooling fluid depending on the depth of cut, wherein the temperature profile is related to a first correction profile that specifies the movement of the floating bearing depending on the depth of cut. The process comprises the steps of moving the workpiece along the workpiece axis by a drive element in accordance with the specifications of a second correction profile that specifies the movement of the workpiece, while simultaneously feeding the workpiece through the wire array, wherein the first and second correction profiles act in opposite directions to the shape deviation. A method comprising the steps of measuring the shape deviation during each cutting operation by comparing the position of a line passing through the center of at least one cut with the position of a reference trajectory, and determining the shape deviation by comparing an average shape profile, which is determined by averaging the shape profiles of slices selected from a plurality of already cut slices, with a reference shape profile.
2. The method according to claim 1, wherein the selection of the slice is performed in a slice-based manner, in a cut-based manner, or in both a slice-based and cut-based manner.
3. The method according to claim 1 or 2, wherein the already cut slices are generated from at least one to five cutting operations immediately preceding each of the cutting operations.
4. The method according to any one of claims 1 to 3, wherein if the shape deviation determined before the further cutting operation reaches or exceeds a predetermined threshold, maintenance is initiated instead of the further cutting operation.