Hot zone heater for single crystal furnace and single crystal furnace

Abstract

The present disclosure provides a hot zone heater for a single crystal furnace and a single crystal furnace, the hot zone heater of the single crystal furnace including an edge main heater and an auxiliary heater, both of which have a cylindrical structure with both ends open, both of which have opposing top and bottom open ends, the auxiliary heater being sleeve-mounted outside the edge main heater, and the top open end of the auxiliary heater extending beyond the top open end of the edge main heater.

Description

Technical Field

[0001] (Cross - reference to related applications) This disclosure claims the priority of Chinese Patent Application No. 202011053337.0 filed in China on September 29, 2020, and all of its content is incorporated herein by reference. This disclosure relates to the technical field of semiconductor wafers, and particularly to the hot zone heater of a single crystal furnace and a single crystal furnace.

Background Art

[0002] For pulling single - crystal silicon, it is necessary to use a single - crystal furnace. The polysilicon raw material is melted in a special quartz crucible, and then a seed crystal is used to pull up a crystal rod of single - crystal silicon. As the quality of semiconductor silicon wafers is getting higher and higher, the requirements for controlling the crystal defects of the crystal rod during crystal pulling are becoming higher. The internal structure of a single - crystal furnace forms a hot zone, and the structure and performance of the hot zone directly affect the quality of the crystal rod. Therefore, the design of the hot zone is extremely important.

[0003] For a single - crystal furnace, the design of the heater is one of the cores of the hot - zone design. The heater is divided into a main heater and a bottom heater. The main heater is also called an edge heater and is provided on the side of the crucible, and the bottom heater is provided at the bottom of the crucible. Here, the edge main heater bears the main heat output of the single - crystal furnace and plays an important role in both the melting stage of the polysilicon material and the later crystal growth (body) stage of the crystal rod. Its shape and the size of the heating area directly affect the temperature field of the crystal - pulling furnace and further affect the quality of the crystal rod.

[0004] However, in related technologies, the heating area of ​​the edge main heater within the hot zone is small, resulting in uneven heating. In order to guarantee a constant temperature field, power consumption increases, which is detrimental to cost savings. Furthermore, edge main heaters are generally resistance heaters, which have a slow temperature rise and a long heating response time. This prolongs the time required for the material melting stage, significantly increasing time costs. Moreover, with a single resistance heater, it is difficult to guarantee the stability of the temperature field at the three phase points of solid, liquid, and gas at the molten silicon surface. When the temperature field becomes unstable, localized thermal shocks are formed, which is detrimental to defect-free growth of crystal rods. [Overview of the project] [Problems that the invention aims to solve]

[0005] To solve the above problems, the embodiments of this disclosure provide a hot zone heater for a single crystal furnace and a single crystal furnace that have features such as good heating effect, rapid temperature rise, and stable hot zone temperature, which are advantageous for defect-free growth of crystal rods during crystal growth and improve the yield of crystal rods. [Means for solving the problem]

[0006] The technical proposals provided by the embodiments of this disclosure are as follows:

[0007] A hot zone heater for a single crystal furnace, comprising an edge main heater and an auxiliary heater, wherein both the edge main heater and the auxiliary heater are cylindrical structures with open ends, and both the edge main heater and the auxiliary heater include opposing top and bottom open ends, the auxiliary heater is sleeve-mounted outside the edge main heater, and the top open end of the auxiliary heater extends outside the top open end of the edge main heater.

[0008] Selectively, the auxiliary heater is A protective case is provided so as to surround the aforementioned edge main heater, The electromagnetic induction coil housed in the aforementioned protective case and Includes.

[0009] Selectively, the protective case includes an inner case and an outer case that engage with each other, both of which are cylindrical in shape, the inner case is fitted over the outer circumference of the edge main heater, the outer case is sleeved outside the inner case so as to form a cavity between them, the inner case includes a first inner wall that cooperates with the outer case to form the cavity, the electromagnetic induction coil is housed in the cavity and is spirally wound around the first inner wall from the top open end of the inner case toward the bottom open end of the inner case, and both ends of the electromagnetic induction coil extend outwards from the protective case.

[0010] Selectively, a stepped first side portion is provided at the top opening end of the inner case, and a stepped second side portion is provided at the top opening edge of the outer case, with the stepped structures of the first and second sides overlapping and connected to each other. A stepped third side portion is provided at the bottom opening edge of the inner case, and a stepped fourth side portion is provided at the bottom opening edge of the outer case, with the stepped structures of the third and fourth sides overlapping and connected to each other.

[0011] Selectively, the electromagnetic induction coil includes a plurality of spirals, a plurality of first supports are provided on the first inner wall of the inner case, and one of the first supports is provided between two adjacent spirals.

[0012] Selectively, the edge main heater is, The heater body has a cylindrical structure, A cylindrical cover body, which is placed over the outside of the heater body and covers at least the top open end, the bottom open end, and the outer circumferential surface of the heater body, is an insulating protective cover. Includes.

[0013] Selectively, the heater body includes a plurality of U-shaped heating column units, which are sequentially connected and arranged in a circle to form the first cylindrical structure, such that the opening of one of two adjacent U-shaped heating column units faces the top opening end of the first cylindrical structure, and the opening of the other U-shaped heating column unit faces the bottom opening end of the first cylindrical structure, so that the outline of the heater body forms a snake-like curved structure.

[0014] Selectively, each of the U-shaped heating columns is Two parallel vertical direct heating columns, the extension direction of which is parallel to the axial direction of the first cylindrical structure, An arc-shaped or straight horizontal heating column connected between the two vertical direct heating columns, Includes, Between the two vertical direct heating columns, there is a gap in the circumferential direction of the first cylindrical structure, and the width of the gap in the circumferential direction of the first cylindrical structure is greater than or equal to the width of the vertical direct heating columns in the circumferential direction of the first cylindrical structure.

[0015] Selectively, the width of the vertical direct heating column in the circumferential direction of the first cylindrical structure is 15 to 20 mm, and the cross-sectional area of ​​the vertical direct heating column is 150 to 200 mm. 2 Furthermore, the length of the vertical direct heating column from the top opening end to the bottom opening end of the first cylindrical structure is 320 to 350 mm.

[0016] Selectively, the inner wall of the insulating protective cover is provided with a plurality of second supports for supporting the heater body, and at least one of the second supports is provided in the gap between the two vertical straight heaters in each U-shaped heating column unit.

[0017] Selectively, the plurality of second supports include a plurality of alternately provided first support columns and a plurality of second support columns, wherein the first support columns are provided in the gap between two vertical direct heating columns in a U-shaped heating column unit with an opening facing the top open end, and the second support columns are provided in the gap between two vertical direct heating columns in a U-shaped heating column unit with an opening facing the bottom open end.

[0018] Selectively, the insulating protective cover includes a first cover body and a second cover body. The first cover body includes an annular top shielding plate that shields the top open end of the heater body, and a side shielding plate that encircles the outer circumference of the heater body and is fixedly connected to the top shielding plate, and the plurality of first support columns are uniformly distributed along the circumferential direction of the top shielding plate and are fixed to the inner wall of the side shielding plate. The second cover body includes an annular bottom shielding plate that shields the bottom open end of the heater body, and a plurality of second support columns uniformly distributed along the circumferential direction of the bottom shielding plate, the plurality of second support columns being fixed to the bottom shielding plate. Multiple second support columns are inserted into the side shielding plate so as to engage the first cover body and the second cover body.

[0019] Selectively, the insulating protective cover includes a first cover body and a second cover body. The first cover body includes an annular bottom shielding plate that shields the bottom open end of the heater body, and a side shielding plate that encircles the outer circumference of the heater body and is fixedly connected to the bottom shielding plate, and the plurality of second support columns are uniformly distributed along the circumferential direction of the bottom shielding plate and are fixed to the inner wall of the side shielding plate. The second cover body includes an annular top shielding plate that shields the top open end of the heater body, and a plurality of first support columns that are uniformly distributed along the circumferential direction of the top shielding plate and fixed to the top shielding plate. Multiple first support columns are inserted into the side shielding plate so as to engage the first cover body and the second cover body.

[0020] Optionally, at least a first electrode connector and a second electrode connector are further connected to the heater body. The first electrode connector and the second electrode connector are respectively located on opposite sides of the heater body. At least a first opening and a second opening are provided in the insulation protection cover. The first electrode connector penetrates through the first opening, and the second electrode connector extends out from the second opening.

[0021] A single crystal furnace, including the hot zone heater of the single crystal furnace as described above.

Advantages of the Invention

[0022] The beneficial effects achieved by the embodiments of the present disclosure are as follows. The hot zone heater of the single crystal furnace and the single crystal furnace according to the embodiments of the present disclosure include an edge main heater and an auxiliary heater. By installing the auxiliary heater, the following roles can be fulfilled, that is, rapidly increasing the temperature to melt the material, and during the crystal growth (body) stage of the crystal bar, performing temperature compensation for the edge main heater and cooperating with the edge main heater to jointly ensure the stability of the temperature field at the solid-liquid-gas triple point on the surface of the silicon melt, contributing to the defect-free growth of the crystal bar. Moreover, the auxiliary heating device can share the heating power of the edge main heater and extend the service life of the entire heater. Also, compared with the hot zone heater of the single crystal furnace in the related art, the hot zone heater of the single crystal furnace and the single crystal furnace according to the embodiments of the present disclosure have a large heating area and a heater with a high energy conversion rate. Therefore, under the condition of ensuring a certain temperature field, it is more energy-saving, cost-saving, and the edge main heater and the auxiliary heater operate in cooperation to improve the adjustment range and adjustment accuracy of the heater.

Brief Description of the Drawings

[0023] [Figure 1] FIG. 1 is a schematic cross-sectional view showing the overall structure of the hot zone heater of the single crystal furnace according to the embodiment of the present disclosure. [Figure 2]Figure 2 is a schematic diagram showing the overall appearance of an auxiliary heater in the hot zone heater of a single crystal furnace according to an embodiment of the present disclosure. [Figure 3] Figure 3 is a schematic diagram showing the structure of the inner case and electromagnetic induction coil of the auxiliary heater in the hot zone heater of a single crystal furnace according to an embodiment of the present disclosure. [Figure 4] Figure 4 is a schematic diagram showing the overall structure of the edge main heater in the hot zone heater of a single crystal furnace according to an embodiment of the present disclosure. [Figure 5] Figure 5 is a schematic diagram showing the structure of the heater body of the edge main heater in the hot zone heater of a single crystal furnace according to an embodiment of the present disclosure. [Figure 6] Figure 6 is a schematic diagram showing the structure of the second cover body in the hot zone heater of a single crystal furnace according to an embodiment of the present disclosure. [Figure 7] Figure 7 is a schematic diagram showing the structure of the first cover body in the hot zone heater of a single crystal furnace according to an embodiment of the present disclosure. [Modes for carrying out the invention]

[0024] To further clarify the purpose, technical proposal and advantages of the embodiments of this disclosure, the technical proposal of the embodiments of this disclosure will be clearly and completely described below with reference to the drawings of the embodiments of this disclosure. It will be obvious that the embodiments described below are only a selection of the embodiments of this disclosure, and not all of them. Any other embodiments that can be obtained without creative work by a person skilled in the art based on the embodiments of this disclosure described below will all be covered by this disclosure.

[0025] Unless otherwise defined, technical or scientific terms used in this disclosure have the ordinary meanings that are understood by those skilled in the art. The terms “first,” “second,” and similar terms used in this disclosure do not indicate any order, quantity, or importance, but merely distinguish different components. Similarly, similar terms such as “one,” “single,” or “the said” do not limit a quantity, but mean that there is at least one. Similar terms such as “includes” or “incorporates” mean that the element or component described before the term includes, but does not exclude, the element or component and its equivalents listed after the term. Similar terms such as “connected” or “coupled” are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. “Up,” “down,” “left,” “right,” etc., merely indicate relative positions, and such relative positions may change if the absolute position of the subject changes.

[0026] Prior to a detailed description of the hot zone heater and single crystal furnace of the embodiment of this disclosure, it is necessary to explain the related technologies as follows. In related technologies, the heating area of ​​the edge main heater within the hot zone is small, resulting in uneven heating. To guarantee a constant temperature field, power consumption increases, which is detrimental to cost savings. Furthermore, edge main heaters are generally resistance heaters, which have a slow temperature rise and a long heating response time. This prolongs the time required for the material melting phase, significantly increasing time costs. Moreover, with a single resistance heater, it is difficult to guarantee the stability of the temperature field at the three phase points of solid, liquid, and gas at the molten silicon surface. When the temperature field becomes unstable, localized thermal shocks are formed, which is detrimental to defect-free growth of crystal rods.

[0027] To address the above issues, the embodiments of this disclosure provide a hot zone heater for a single crystal furnace and a single crystal furnace that have features such as good heating effect, rapid temperature rise, and stable hot zone temperature, which are advantageous for defect-free growth of crystal rods during crystal growth and improve the yield of crystal rods.

[0028] As shown in Figure 1, the hot zone heater of the single crystal furnace according to the embodiment of this disclosure is The device includes an edge main heater 10 and an auxiliary heater 20, both of which are cylindrical structures with open ends, and both the edge main heater 10 and the auxiliary heater 20 include opposing top and bottom open ends, the auxiliary heater 20 is sleeve-mounted outside the edge main heater 10, and the top open end of the auxiliary heater 20 extends outside the top open end of the edge main heater 10.

[0029] The hot zone heater of the single crystal furnace according to the embodiment of this disclosure includes an edge main heater 10 and an auxiliary heater 20. The auxiliary heater 20 can perform the following roles: it rapidly increases the temperature to melt the material, provides temperature compensation to the edge main heater during the crystal growth (body) stage of the crystal rod, and works in conjunction with the edge main heater to jointly ensure the stability of the temperature field at the solid-liquid-gas three-phase point on the silicon molten surface, thereby contributing to defect-free growth of the crystal rod. Furthermore, the auxiliary heating device can share the heating power of the edge main heater, extending the overall service life of the heater. Compared to hot zone heaters of single crystal furnaces in related technologies, the hot zone heater and single crystal furnace according to the embodiment of this disclosure have a larger heating area and a heater with a high energy conversion rate. Therefore, under conditions that guarantee a constant temperature field, it is more energy-efficient and cost-effective, and the coordinated operation of the edge main heater and auxiliary heater improves the heater's adjustment range and adjustment accuracy.

[0030] In some embodiments, as shown in Figures 1 to 3, the auxiliary heater 20 includes a protective case 21 and an electromagnetic induction coil 22, the protective case 21 is provided so as to surround the edge main heater 10, and the electromagnetic induction coil is housed inside the protective case 21.

[0031] In the above embodiment, an electromagnetic induction heater is used as the auxiliary heater 20, and the edge main heater 10 and the electromagnetic induction auxiliary heater 20 work in cooperation to improve the heater's adjustment range and adjustment accuracy. Furthermore, since electromagnetic induction heaters have an even higher adjustment range and adjustment accuracy compared to resistance heaters, the stability of the temperature field at the three phase points of solid, liquid, and gas on the molten silicon surface can be further guaranteed.

[0032] Of course, in actual applications, a resistance heater may be used as the auxiliary heater 20.

[0033] Furthermore, in some embodiments, as shown in Figures 1 to 3, the protective case 21 includes an inner case 23 and an outer case 24 that engage with each other, both of which are cylindrical in shape, the inner case 23 is installed on the outer circumference of the edge main heater 10, the outer case 24 is sleeve-installed outside the inner case 23 so that a cavity is formed between them, the inner case 23 includes a first inner wall that cooperates with the outer case 24 to form the cavity, the electromagnetic induction coil 22 is housed in the cavity, the electromagnetic induction coil 22 is spirally wound around the first inner wall from the top open end of the inner case 23 toward the bottom open end of the inner case 23, and both ends of the electromagnetic induction coil 22 are power connectors 25, with both power connectors 25 extending outwards from the protective case 21.

[0034] In the above embodiment, both ends of the electromagnetic induction coil 22 are power connectors 25, extending from the protective case 21 and connected to an AC power source. According to the principle of electromagnetic induction heating, the electromagnetic induction coil 22 converts the generated induced electrical energy into thermal energy and further transfers the heat to the silicon material in the quartz crucible by thermal radiation. The protective case 21 serves the purpose of protecting the electromagnetic induction coil 22, preventing erosion of the electromagnetic induction coil 22 in the auxiliary heater 20 by argon flow and the deposition of SiO2 on the electromagnetic induction coil 22, thereby improving the service life of the auxiliary heater 20. Furthermore, the auxiliary heater 20 also has a heat retention effect, reducing heat loss and transferring more heat into the crucible in the hot zone, thereby improving the energy conversion efficiency of the heater.

[0035] In some embodiments, as shown in Figures 1 to 3, a stepped first side portion 2301 is provided at the top opening end of the inner case 23, and a stepped second side portion 2401 is provided at the top opening edge of the outer case 24, with the stepped structures of the first side portion 2301 and the second side portion 2401 overlapping and connected to each other. A stepped third side portion 2302 is provided at the bottom opening edge of the inner case 23, and a stepped fourth side portion 2402 is provided at the bottom opening edge of the outer case 24, with the stepped structures of the third side portion 2302 and the fourth side portion 2402 overlapping and connected to each other.

[0036] In the above embodiment, the inner case 23 and the outer case 24 are connected to each other by overlapping them, with a stepped structure provided at the opening edge, thereby achieving mutual engagement between them. In actual applications, the specific structure of the inner case 23 and the outer case 24 is not limited to this.

[0037] Furthermore, in some embodiments, as shown in Figures 1 and 3, the electromagnetic induction coil 22 includes a plurality of spirals, a plurality of first supports 26 are provided on the first inner wall of the inner case 23, and one first support 26 is provided between two adjacent spirals.

[0038] In the above embodiment, the electromagnetic induction coil 22 is spirally distributed inside the protective case 21, and each spiral of each winding may be supported by the first support 26 in order to improve the overall mechanical properties of the electromagnetic induction coil 22.

[0039] The first support 26 may selectively be a support column structure, but the specific structure of the first support is not limited thereto.

[0040] Furthermore, in related technologies, the main heater in the hot zone of a single crystal furnace is located on the outer periphery of the crucible, lacks protective devices, and is directly exposed to the argon flow atmosphere. During crystal pulling, the top and outer surfaces of the heater are continuously eroded by the argon flow, significantly shortening the service life of the main heater. In addition, SiO2 (silicon dioxide) deposits occur in the affected area, and the removal of SiO2 also contributes to shortening the heater's lifespan.

[0041] To solve the above problems, in some embodiments of the present disclosure, as shown in Figure 4, the main heater 10 includes a heater body 100 and an insulating protective cover 200, the heater body 100 is a first cylindrical structure provided to circumfer the crucible in the hot zone of a single crystal furnace, and includes a top open end, a bottom open end, and an outer peripheral side located between the top open end and the bottom open end, and the insulating protective cover 200 is a cylindrical cover body provided on the outside of the heater body 100 and covers at least the top open end, the bottom open end, and the outer peripheral side of the first cylindrical structure.

[0042] In the hot zone heater of the single crystal furnace according to the embodiment of this disclosure, an insulating protective cover 200 is provided on the outside of the heater body 100, so that the insulating protective cover 200 can enclose and cover all of the top open end, bottom open end and outer peripheral side surface of the heater body 100, thereby preventing erosion of the heater body 100 by argon flow and deposition of SiO2 on the heater body 100, improving the service life of the heater. Furthermore, the cylindrical insulating protective cover 200 also has a heat retention effect, reducing heat loss of the heater body 100, transferring more heat into the crucible in the hot zone, and improving the energy conversion efficiency of the heater.

[0043] Furthermore, in related technologies, the hot zone edge main heater 10 of a conventional single crystal furnace includes a sheet-like cylindrical structure, and multiple slits are provided in the sheet-like cylindrical structure to form multiple blades, each blade being wide, and the heating power of the edge main heater 10 is related to the size of the cross-sectional area of ​​the blades, so the relationship between the heating power of the edge main heater 10 and the cross-sectional area of ​​the blades is as follows.

number

[0044] From equations (I) and (II), we obtain the following equation (III).

number

[0045] In one embodiment of the present disclosure, as shown in Figures 4 and 5, the heater body 100 includes a plurality of U-shaped heating column units 100A, which are sequentially connected and arranged in a circle to form the first cylindrical structure, and the opening of one of two adjacent U-shaped heating column units 100A faces the top opening end, and the opening of the other U-shaped heating column unit 100A faces the bottom opening end, so that the contour of the heater body 100 forms a snake-like curved structure.

[0046] Selectively, each of the U-shaped heating columns is The first cylindrical structure comprises two parallel vertical direct heating columns 110, the two vertical direct heating columns 110 whose extending direction is parallel to the axial direction of the first cylindrical structure, and an arc-shaped or linear horizontal heating column 120 connected between the two vertical direct heating columns 110, wherein there is a gap A between the two vertical direct heating columns 110 in the circumferential direction of the first cylindrical structure, and the width of the gap A in the circumferential direction of the first cylindrical structure is the width of the vertical direct heating columns 110 in the circumferential direction of the first cylindrical structure. That's all. That is the case.

[0047] In the above embodiment, the structure of the heater body 100 is improved, and the heater body 100 is formed by a plurality of U-shaped heating column units 100A whose ends are connected to each other to form a first cylindrical structure, and the heating columns within the U-shaped heating column units 100A are designed to include two vertical straight heating columns 110 and an arc-shaped or straight horizontal heating column 120, and in such a heating column structure, the cross-section of the heating column is smaller than the cross-sectional dimension of the blades compared to the blade structure in the edge main heater 10 in related technology, and the gap A between the two vertical straight heating columns 110 is larger than the dimension of the slit compared to the slit between the blades in the edge main heater 10 in related technology. Thus, the cross-section of the heating column becomes smaller, increasing the heater's resistance and thus the heater's heating power. This ensures that the heating by the heater becomes more uniform with the design of the annular U-shaped heating column unit 100A. When the heating area of ​​the edge main heater 10 is large and a constant temperature field is guaranteed, power consumption decreases, which is advantageous for cost savings. It is also advantageous for controlling the oxygen content of the crystal rod during crystal pulling, and further improves the overall quality of the crystal rod.

[0048] Furthermore, it should be noted that in the embodiments of this disclosure, the heating power may be further increased by increasing the length of the single vertical direct heating column 110.

[0049] In some embodiments, the width of the vertical direct heating column 110 in the circumferential direction of the first cylindrical structure is 15 to 20 mm, the cross-sectional area of ​​the vertical direct heating column is less than or equal to the cross-sectional area of ​​the gap between two adjacent vertical direct heating columns, and furthermore, the cross-sectional area of ​​the vertical direct heating column is 150 to 200 mm. 2 Furthermore, the length of the vertical direct heating column 110 from the top opening end to the bottom opening end of the first cylindrical structure is 320 to 350 mm. It should be noted that in actual applications, the specific structure of the edge main heater 10 is not limited to this.

[0050] Furthermore, in the embodiments of this disclosure, as shown in Figures 4 to 7, the inner wall of the insulating protective cover 200 is provided with a plurality of second support bodies 300 for supporting the heater body 100, and at least one of the second support bodies 300 is provided in the gap A between the two vertical straight heaters in each U-shaped heating column unit 100A.

[0051] When the above embodiment is used, a U-shaped heating column unit 100A is used as the heater body 100, and because the gap A between adjacent vertical direct heating columns 110 is large, there is a risk that its mechanical properties may be weakened. In order to improve the impact resistance of the heater body 100 and improve its overall mechanical properties, in the above embodiment, a second support 300 is provided on the insulating protective cover 200, and the second support 300 is provided in the gap A between the two vertical direct heating columns 110 in each U-shaped heating column unit 100A, thereby playing a role in supporting the protective heater body 100, and thus improving the impact resistance of the hot zone heater of the single crystal furnace and improving the overall mechanical properties of the heater.

[0052] In some embodiments of the present disclosure, as shown in Figures 4 to 7, the plurality of second support members 300 include a plurality of alternately provided first support columns 310 and a plurality of second support columns 320, wherein the first support columns 310 are provided in the gap A between two vertical direct heating columns 110 in a U-shaped heating column unit 100A with openings facing the top open end, and the second support columns 320 are provided in the gap A between two vertical direct heating columns 110 in a U-shaped heating column unit 100A with openings facing the bottom open end.

[0053] In the above embodiment, the second support 300 is a columnar structure, i.e., a support column, provided in the gap A between the two vertical direct heating columns 110 in the U-shaped heating column unit 100A. In some other embodiments, the structure of the second support 300 is not limited to a support column, and other structures such as a support block may be used.

[0054] Furthermore, in some embodiments of this disclosure, as shown in Figures 4 to 7, the insulating protective cover 200 includes a first cover body 210 and a second cover body 220, the first cover body 210 includes an annular top shielding plate 211 that shields the top open end of the heater body 100 and a side shielding plate 212 that wraps around the outer circumference of the heater body 100 and is fixedly connected to the top shielding plate 211, and the plurality of first support columns 310 are uniformly distributed along the circumferential direction of the top shielding plate 211, The second cover body 220 is fixed to the inner wall of the side shielding plate 212 and includes an annular bottom shielding plate 221 that shields the bottom open end of the heater body 100 and a plurality of second support columns 320 uniformly distributed along the circumferential direction of the bottom shielding plate 221. The plurality of second support columns 320 are fixed to the bottom shielding plate 221 and are inserted into the side shielding plate 212 so as to engage the first cover body 210 and the second cover body 220.

[0055] In the above embodiment, the insulating protective cover 200 consists of two cover bodies, an upper and a lower one, namely a first cover body 210 and a second cover body 220. With this structure, the cover bodies are easily secured to the heater body 100, and a first support column 310 and a second support column 320 are provided on the two cover bodies, respectively. Both serve as the framework of the heater body 100, supporting and protecting the heater body 100.

[0056] In other embodiments of the present disclosure, the insulating protective cover 200 includes a first cover body 210 and a second cover body 220, wherein the first cover body 210 includes an annular bottom shielding plate 221 that shields the bottom open end of the heater body 100 and a side shielding plate 212 that encircles the outer circumference of the heater body 100 and is fixedly connected to the bottom shielding plate 221, and a plurality of the second support columns 320 are uniformly distributed along the circumferential direction of the bottom shielding plate 221, and the side shielding plate Fixed to the inner wall of 212, the second cover body 220 includes an annular top shielding plate 211 that shields the top open end of the heater body 100, and a plurality of the first support columns 310 uniformly distributed along the circumferential direction of the top shielding plate 211. The plurality of the first support columns 310 are fixed to the top shielding plate 211, and the plurality of the first support columns 310 are inserted into the side shielding plate 212 so as to engage the first cover body 210 and the second cover body 220.

[0057] It should be noted that the above is merely an illustrative example of the insulating protective cover 200, and in actual applications, the specific structure of the insulating protective cover 200 is not particularly limited.

[0058] Furthermore, it should be noted that the insulating protective cover 200 may be selectively made of a high-temperature resistant, corrosion-resistant insulating material, such as a semiconductor ceramic material.

[0059] Furthermore, the length of the vertical direct heating column from the top opening end to the bottom opening end of the first cylindrical structure is equal to the length of the first support column on the first cover body or the second support column on the second cover body.

[0060] Furthermore, as shown in Figures 4 to 7, in one embodiment of the present disclosure, at least a first electrode connector 410 and a second electrode connector 420 are further connected to the heater body 100, the first electrode connector 410 and the second electrode connector 420 are located on opposite sides of the heater body 100, the insulating protective cover 200 is provided with at least a first opening 201 and a second opening 202, the first electrode connector 410 passes through the first opening 201 and the second electrode connector 420 extends out from the second opening 202.

[0061] In the above embodiment, the heater body 100 is provided with a first electrode connector 410 and a second electrode connector 420 for connecting to the electrodes of the heater body 100.

[0062] It should be explained that in some embodiments, the heater body 100 is provided with at least two electrode connectors, but in actual applications, the number of electrode connectors on the heater body 100 is not limited to two, and may include, for example, three electrode connectors, that is, the connectors on the heater body 100 may be three-phase electrical connectors.

[0063] Furthermore, embodiments of this disclosure further provide a single crystal furnace including a hot zone heater for the single crystal furnace according to the embodiments of this disclosure. Obviously, the single crystal furnace according to the embodiments of this disclosure can also achieve the beneficial effects of the hot zone heater for the single crystal furnace according to the embodiments of this disclosure, but this will not be repeated here.

[0064] The following are some points to keep in mind. (1) The drawings of the embodiments of this disclosure relate only to the structures relating to the embodiments of this disclosure; for other structures, refer to the usual designs. (2) For clarity, in the drawings illustrating embodiments of the present disclosure, the thickness of layers or regions is enlarged or reduced, i.e., these drawings are not drawn to actual proportions. Understandably, when it is referred to that a component such as a layer, film, region or substrate is "on top of" or "below" another component, that component may be located "directly" on top of or below the other component, or an intermediate component may be interposed. (3) Where there is no inconsistency, it is possible to combine the embodiments and features of the embodiments herein to obtain new embodiments.

[0065] The above describes only specific embodiments of the present disclosure, and the scope of protection of the present disclosure is not limited thereto, but is subject to the scope of protection of the claims.

Claims

1. A hot zone heater for a single crystal furnace, comprising an edge main heater using a resistance heater and an auxiliary heater using an electromagnetic induction coil, wherein both the edge main heater and the auxiliary heater are cylindrical structures with open ends, both the edge main heater and the auxiliary heater include opposing top open ends and bottom open ends, the auxiliary heater is sleeve-mounted outside the edge main heater, and the top open end of the auxiliary heater extends outside the top open end of the edge main heater.

2. The aforementioned auxiliary heater is A protective case is provided so as to surround the aforementioned edge main heater, A hot zone heater for a single crystal furnace according to claim 1, comprising an electromagnetic induction coil housed in the protective case.

3. The hot zone heater for a single crystal furnace according to claim 2, wherein the protective case includes an inner case and an outer case that engage with each other, both of which are cylindrical in shape, the inner case is fitted over the outer circumference of the edge main heater, the outer case is sleeve-fitted outside the inner case to form a cavity between it and the inner case, the inner case includes a first inner wall that cooperates with the outer case to form the cavity, the electromagnetic induction coil is housed in the cavity and is spirally wound around the first inner wall from the top open end of the inner case toward the bottom open end of the inner case, and both ends of the electromagnetic induction coil extend outwards from the protective case.

4. A stepped first side is provided at the top open end of the inner case, a stepped second side is provided at the top open edge of the outer case, the stepped structure of the first side and the second side are superimposed and connected to each other, a stepped third side is provided at the bottom open edge of the inner case, a stepped fourth side is provided at the bottom open edge of the outer case, the stepped structure of the third side and the fourth side are superimposed and connected to each other, the hot zone heater for a single crystal furnace according to claim 3.

5. The hot zone heater for a single crystal furnace according to claim 3, wherein the electromagnetic induction coil includes a plurality of spirals, a plurality of first supports are provided on the first inner wall of the inner case, and one of the first supports is provided between two adjacent spirals.

6. The aforementioned edge main heater is The heater body has a cylindrical structure, A hot zone heater for a single crystal furnace according to claim 1, comprising a cylindrical cover body, which is provided outside the heater body and includes an insulating protective cover that covers at least the top open end of the heater body, the bottom open end of the heater body, and the outer peripheral surface of the heater body.

7. The heater body includes a plurality of U-shaped heating column units, the plurality of U-shaped heating column units are sequentially connected and arranged in a circle to form the first cylindrical structure, and of two adjacent U-shaped heating column units, the opening of one U-shaped heating column unit faces the top opening end of the first cylindrical structure, and the opening of the other U-shaped heating column unit faces the bottom opening end of the first cylindrical structure, so that the outline of the heater body forms a snake-like curved structure, as described in claim 6.

8. Each of the aforementioned U-shaped heating columns is Two parallel vertical direct heating columns, the extension direction of which is parallel to the axial direction of the first cylindrical structure, It includes an arc-shaped or linear horizontal heating column connected between the two vertical direct heating columns, A hot zone heater for a single crystal furnace according to claim 7, wherein there is a gap in the circumferential direction of the first cylindrical structure between the two vertical direct heating columns, and the width of the gap in the circumferential direction of the first cylindrical structure is greater than or equal to the width of the vertical direct heating columns in the circumferential direction of the first cylindrical structure.

9. The width of the vertical direct heating column in the circumferential direction of the first cylindrical structure is 15 to 20 mm, and the cross-sectional area of ​​the vertical direct heating column is 150 to 200 mm. ２ The hot zone heater for a single crystal furnace according to claim 8, wherein the length of the vertical direct heating column from the top opening end to the bottom opening end of the first cylindrical structure is 320 to 350 mm.

10. The hot zone heater for a single crystal furnace according to claim 8, wherein a plurality of second supports for supporting the heater body are provided on the inner wall of the insulating protective cover, and at least one of the second supports is provided in the gap between the two vertical direct heating columns in each U-shaped heating column unit.

11. The hot zone heater for a single crystal furnace according to claim 10, wherein the plurality of second supports include a plurality of alternately provided first support columns and a plurality of second support columns, the first support columns being provided in the gap between two vertical direct heating columns in a U-shaped heating column unit with openings facing the top open end, and the second support columns being provided in the gap between two vertical direct heating columns in a U-shaped heating column unit with openings facing the bottom open end.

12. The aforementioned insulating protective cover includes a first cover body and a second cover body, The first cover body includes an annular top shielding plate that shields the top open end of the heater body, and a side shielding plate that encircles the outer circumference of the heater body and is fixedly connected to the top shielding plate, and the plurality of first support columns are uniformly distributed along the circumferential direction of the top shielding plate and are fixed to the inner wall of the side shielding plate. The second cover body includes an annular bottom shielding plate that shields the bottom open end of the heater body, and a plurality of second support columns uniformly distributed along the circumferential direction of the bottom shielding plate, the plurality of second support columns being fixed to the bottom shielding plate. The hot zone heater for a single crystal furnace according to claim 11, wherein a plurality of the second support columns are inserted into the side shielding plate so as to engage the first cover body and the second cover body.

13. The aforementioned insulating protective cover includes a first cover body and a second cover body, The first cover body includes an annular bottom shielding plate that shields the bottom open end of the heater body, and a side shielding plate that encircles the outer circumference of the heater body and is fixedly connected to the bottom shielding plate, and the plurality of second support columns are uniformly distributed along the circumferential direction of the bottom shielding plate and are fixed to the inner wall of the side shielding plate. The second cover body includes an annular top shielding plate that shields the top open end of the heater body, and a plurality of first support columns that are uniformly distributed along the circumferential direction of the top shielding plate and fixed to the top shielding plate. The hot zone heater for a single crystal furnace according to claim 11, wherein a plurality of the first support columns are inserted into the side shielding plate so as to engage the first cover body and the second cover body.

14. The hot zone heater for a single crystal furnace according to claim 6, wherein at least a first electrode connector and a second electrode connector are further connected to the heater body, the first electrode connector and the second electrode connector are located on opposite sides of the heater body, and the insulating protective cover is provided with at least a first opening and a second opening, the first electrode connector passes through the first opening and the second electrode connector extends out from the second opening.

15. A single crystal furnace comprising a hot zone heater for a single crystal furnace according to any one of claims 1 to 14.

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