Cell for spectroscopic analysis, spectroscopic analysis device, and spectroscopic analysis method

Abstract

In order to prevent cracking of a translucent plate even in cases where a wide range of a sample is measured while speeding up the measurement in a non-exposed environment by pressing and flattening the sample with a translucent plate such as a glass plate, or in cases where the translucent plate is thin, this cell 100 which is used for spectroscopic analysis and holds a sample S is provided with: a base 10 for supporting the sample S; a sealing member 20 that surrounds the sample S on the base 10; a translucent plate 30 for having the sample S sandwiched between itself and the base 10; and a decompression flow path L that is in communication with a sample space which is surrounded by the base 10, the sealing member 20, and the translucent plate 30.

Description

Spectroscopic analysis cell, spectroscopic analysis device, and spectroscopic analysis method

[0001] The present invention relates to a spectroscopic cell, a spectroscopic analysis device, and a spectroscopic analysis method.

[0002] Conventional spectroscopic analysis devices include, for example, what is called a micro-Raman spectroscopic device that is configured to be able to perform mapping measurements of a sample.

[0003] In such mapping measurements, if the sample has unevenness, adjusting the focus for each measurement point will take a long time to measure, so in order to speed up the measurement, it is necessary to press and fix the sample so that it is flat.

[0004] Furthermore, when the sample is one that will deteriorate when exposed to air, such as a battery electrode, the measurement must be performed in a non-exposed environment, and the measurement is performed behind a light-transmitting plate such as a glass plate.

[0005] However, if the sample is subject to deterioration or has unevenness, attempting to flatten the sample by pressing it down with a light-transmitting plate such as a glass plate in order to speed up measurement in a non-exposed environment can result in the problem of the light-transmitting plate cracking.

[0006] In particular, when mapping a wide area of ​​a sample, the force tends to be concentrated on one part of the glass plate, increasing the possibility of it breaking.

[0007] One way to prevent cracking is to make the light-transmitting plate thicker, but this would cause another problem, such as making it difficult to obtain a signal during measurement.

[0008] Japanese Patent Application Laid-Open No. 2019-86445

[0009] Therefore, the present invention solves the above-mentioned problems, and aims to speed up measurements in a non-exposed environment by pressing down and flattening the sample with a light-transmitting plate such as a glass plate, while preventing the light-transmitting plate from cracking even when measuring a wide range of the sample or when the light-transmitting plate is thin.

[0010] In other words, the spectroscopic analysis cell of the present invention is a cell used for spectroscopic analysis to hold a sample, and is characterized by comprising a base that supports the sample, a sealing member that surrounds the sample on the base, a light-transmitting plate that sandwiches the sample between the base and the sealing member, and a pressure-reducing flow path that communicates with the sample space surrounded by the base, the sealing member, and the light-transmitting plate.

[0011] In the spectroscopic analysis cell configured in this manner, by reducing the pressure in the sample space through the pressure reduction channel, a uniform force is applied to the entire light-transmitting plate, and the sample is pressed and flattened between the light-transmitting plate and the base. As a result, it is possible to increase the measurement speed in a non-exposed environment, and to prevent cracking of the light-transmitting plate even when measuring a wide range of samples or when the light-transmitting plate is thin.

[0012] It is preferable that the base and at least a part of the light-transmitting plate are in contact with each other when the sample space is decompressed, which makes it possible to more reliably flatten the sample and also to support at least a part of the light-transmitting plate by the base, thereby more effectively preventing cracks in the light-transmitting plate.

[0013] It is preferable that the pressure reduction channel opens at a position on the surface facing the sample space that avoids the sample, so that the sample space can continue to be depressurized even after the sample has become flat.

[0014] It is preferable that the internal flow path formed in the base constitutes at least a part of the pressure reduction flow path, which allows the pressure reduction flow path to be formed without difficulty and provides good workability.

[0015] It is preferable that one end opening of the internal flow path is open to the sample space and the other end opening is open to the side wall of the base, so that when setting the spectroscopic analysis cell in an analyzer or measuring a sample, tubing or the like connected to the opening in the side wall of the base is less likely to get in the way and the cell is easier to handle.

[0016] The thickness of the light-transmitting plate is preferably 5 mm or less, which allows a signal of scattered light generated from the sample to be reliably obtained and ensures measurement accuracy.

[0017] It is preferable to further include a cover member provided on the opposite side of the light-transmitting plate from the base, and a press member that sandwiches and holds the outer edge of the light-transmitting plate between the cover member and the light-transmitting plate. In this case, the light-transmitting plate can be temporarily fixed to the cover member by the press member, thereby improving the workability when attaching the light-transmitting plate to the base.

[0018] It is preferable that the light-transmitting plate be disposed with some play between the pressing member and the lid member, so that the light-transmitting plate is held between the pressing member and the lid member in a state where some deflection is permitted, thereby more reliably preventing cracking of the light-transmitting plate when the sample space is decompressed.

[0019] It is preferable to further include an anti-slip member interposed between the outer edge of the light-transmitting plate and the lid member to prevent the light-transmitting plate from slipping relative to the lid member, thereby preventing the light-transmitting plate from shifting out of position and improving workability when attaching the light-transmitting plate to the lid member.

[0020] It is preferable that the sealing member has a rectangular cross section, since the contact area between the sealing member and the light-transmitting plate is larger than when the sealing member has a substantially circular cross section, stress concentration at the contact point can be suppressed and cracking of the light-transmitting plate can be more reliably prevented.

[0021] The spectroscopic analysis device according to the present invention is characterized by comprising a light source for irradiating the sample with light and the above-described spectroscopic analysis cell, and such a spectroscopic analysis device can achieve the same effects as the above-described spectroscopic analysis cell.

[0022] In a more specific embodiment, an optical element may be provided between the light source and the spectroscopic analysis cell to collect light from the light source and direct it to the sample. In this case, the present invention is useful for mapping measurements.

[0023] A spectroscopic analysis method according to the present invention is a spectroscopic analysis method using a spectroscopic analysis cell including a base for supporting a sample, a sealing member surrounding the sample on the base, and a light-transmitting plate sandwiching the sample between the base and the sealing member, the method comprising the steps of reducing the pressure in a sample space surrounded by the base, the sealing member, and the light-transmitting plate, and irradiating light onto the sample in a state in which the sample space is reduced in pressure. This spectroscopic analysis method can achieve the same effects as those of the spectroscopic analysis cell described above.

[0024] According to the present invention described above, by pressing and flattening the sample with a light-transmitting plate such as a glass plate, it is possible to speed up measurements in a non-exposed environment, and to prevent the light-transmitting plate from cracking even when measuring a wide range of the sample or when the light-transmitting plate is thin.

[0025] FIG. 1 is a schematic diagram showing the configuration of a spectroscopic analysis device according to one embodiment of the present invention; FIG. 2 is an exploded perspective view showing the configuration of a cell according to the same embodiment; FIG. 3 is a cross-sectional view showing the configuration of a cell according to the same embodiment; FIG. 4 is an exploded perspective view showing a light-transmitting plate and its peripheral structure according to the same embodiment; FIG. 5 is a schematic view showing a state in which the sample space of the cell according to the same embodiment is depressurized; FIG. 6 is an exploded perspective view showing the configuration of a cell according to another embodiment; FIG. 7 is a schematic view showing how the cell according to another embodiment is used; FIG. 8 is an exploded perspective view showing the configuration of a cell according to a second embodiment of the present invention; and FIG. 9 is a cross-sectional view and an enlarged cross-sectional view showing the configuration of the cell according to the same embodiment.

[0026] Hereinafter, an embodiment of a spectroscopic analysis cell according to the present invention will be described with reference to the drawings.

[0027] First, a spectroscopic analysis device in which a spectroscopic cell is used will be briefly described.

[0028] <Spectroscopic Analysis Apparatus> The spectroscopic analysis apparatus of this embodiment analyzes the physical properties of a sample, and is, for example, what is called a Raman spectroscopic apparatus that can observe the molecular structure and component distribution of a sample by mapping measurement using an optical microscope.

[0029] Specifically, as shown in FIG. 1, this spectroscopic analysis device X includes a spectroscopic cell 100 (hereinafter simply referred to as the cell 100), a light source 1, a beam splitter 2, a condenser lens 3, a spectroscope 4, and a detector 5.

[0030] The cell 100 is used for spectroscopic analysis and holds the sample S. The spectroscopic analysis device X of this embodiment is characterized by this cell 100, and details thereof will be described later.

[0031] The light source 1 irradiates the sample S with light, and specifically is a laser light source or the like that emits laser light as excitation light.

[0032] The beam splitter 2 transmits light having a wavelength corresponding to that of the excitation light, and is specifically a dichroic mirror or the like.

[0033] The condenser lens 3 is an optical element provided between the light source 1 and the cell 100, which condenses the light from the light source 1 and guides it to the sample S, and is specifically an objective lens or the like.

[0034] With the above-described configuration, the excitation light emitted from the light source 1 passes through the beam splitter 2 and is incident on the sample S focused by the optical element, and a portion of the excitation light incident on the sample S is Raman scattered.

[0035] The Raman scattered light has a spectrum characteristic of the material of the sample S, and has a wavelength different from that of the excitation light.

[0036] The Raman scattered light is then reflected by the beam splitter 2 and enters the detector 5 via the spectroscope 4, and the Raman spectrum of the sample S is obtained.

[0037] <Spectroscopic Analysis Cell 100> Next, the cell 100 will be described in detail.

[0038] This cell 100 holds a sample S to be measured, and is set on the sample stage of the spectroscopic analyzer X described above.

[0039] 2 and 3, the sample S is a thin film having a thickness of, for example, about 0.1 mm, which deteriorates when exposed to air. An example of such a sample S is a carbon material that constitutes an electrode of a lithium ion battery. However, the sample S is not limited to this, and may have various thicknesses or may be a material that does not deteriorate when exposed to air.

[0040] Specifically, as shown in Figures 2 and 3, the cell 100 comprises at least a base 10, a sealing member 20, and a light-transmitting plate 30, and contains a sample S in a sample space surrounded by the base 10, the sealing member 20, and the light-transmitting plate 30.

[0041] The base 10 supports the sample S and has a mounting surface 11 on which the sample S is placed. The mounting surface 11 has, for example, a rectangular shape in a plan view and is large enough to accommodate the entire sample S; in other words, it has an area larger than the sample S.

[0042] The seal member 20 surrounds the sample S on the base 10 and keeps the above-mentioned sample space airtight.

[0043] As shown in Fig. 2, the seal member 20 is housed in a groove 12 formed around the mounting surface 11 of the base 10, and is a frame-shaped member made of, for example, synthetic rubber. As shown in Fig. 3, the seal member 20 of this embodiment has a rectangular cross section, and the groove 12 that houses the seal member 20 also has a rectangular cross section.

[0044] The light-transmitting plate 30 sandwiches the sample S between itself and the base 10, and is made of, for example, a glass plate, which transmits the excitation light from the light source 1 and also transmits the Raman scattered light from the sample S. In this embodiment, the thickness of the light-transmitting plate 30 is set to 5 mm or less in order to sufficiently transmit the Raman scattered light from the sample S.

[0045] As shown in FIG. 3, this light-transmitting plate 30 is at least larger than the above-mentioned mounting surface 11 and is large enough to cover the groove portion 12 formed in the base 10, in other words, large enough to be overlapped with the sealing member 20.

[0046] Here, as shown in Figures 2 and 3, the cell 100 of this embodiment further includes a lid member 40 provided on the opposite side of the base 10 from the light-transmitting plate 30, and is configured so that a sealing member 20 is interposed between this lid member 40 and the base 10.

[0047] More specifically, the cover member 40 is frame-shaped and is disposed opposite the outer edge 31 of the light-transmitting plate 30. That is, an opening 41 that is slightly smaller than the light-transmitting plate 30 is formed in the center of the cover member 40, and a groove 12 that accommodates the seal member 20 is formed in a position opposite to an inner edge 42 around the opening 41.

[0048] Furthermore, the cell 100 of this embodiment includes a pressing member 50 that holds the light-transmitting plate 30 between itself and the cover member 40, as shown in FIGS.

[0049] The pressing member 50 is a frame-shaped member disposed outside the groove portion 12 and is made of, for example, resin, to prevent the light-transmitting plate 30 from falling off.

[0050] More specifically, as shown in Figures 3 and 4, the inward surface 43 of the above-mentioned cover member 40 facing the base 10 has mounting holes 44 formed at multiple locations, into which fasteners 60 such as screws can be attached.

[0051] A locking member 70 such as a washer is attached to each fastener 60, and by tightening the fastener 60 into the mounting hole 44, the locking member 70 presses the pressing member 50 against the translucent plate 30, and the translucent plate 30 is held between the pressing member 50 and the cover member 40.

[0052] In this configuration, the light-transmitting plate 30 is disposed with some play between the pressing member 50 and the cover member 40. Note that the state of being disposed with some play here means a state in which the light-transmitting plate 30 is allowed to deform or move slightly.

[0053] As shown in FIGS. 3 and 4, the cell 100 of this embodiment further includes an anti-slip member 80 interposed between the cover member 40 and the light-transmitting plate 30.

[0054] The anti-slip member 80 is a frame-shaped sponge-like member that is arranged to surround the opening 41 of the cover member 40 described above, and prevents the light-transmitting plate 30 from slipping relative to the cover member 40.

[0055] The anti-slip member 80 of this embodiment is also used to prevent direct contact between the light-transmitting plate 30 and the cover member 40, and also functions as a cushioning material that absorbs impacts to the light-transmitting plate 30.

[0056] As shown in FIG. 3, the cell 100 of this embodiment includes the base 10, the seal member 20, and a pressure-reducing flow path L that communicates with the sample space surrounded by the light-transmitting plate 30.

[0057] More specifically, one opening of this pressure-reducing flow path L is connected to the sample space, and the other opening is connected to the outside, and a negative pressure generating means (not shown) such as a pump is provided midway. With this configuration, by operating the negative pressure generating means, the sample space is evacuated and reduced in pressure via the pressure-reducing flow path L.

[0058] This pressure reduction flow path L opens at a position on the surface facing the sample space containing the sample S that avoids the sample S. Specifically, as shown in Figure 3, one end opening of the pressure reduction flow path L is formed at a position on the mounting surface 11 of the base 10 that avoids the sample S.

[0059] In this embodiment, an internal flow path L1 is formed in the base 10, and this internal flow path L1 constitutes at least a part of the pressure reduction flow path L.

[0060] More specifically, the internal flow path L1 has one opening formed in the mounting surface 11 and the other opening formed in the side wall of the base 10 and opening toward the outside. The other opening of the internal flow path L1 may be formed in the bottom wall of the base 10 (the wall surface facing away from the mounting surface 11).

[0061] In the above-described configuration, one opening at the internal flow path L1 is one opening at the decompression flow path L, and the other opening at the internal flow path L1 is connected to a pipe member T such as a tube or a pipe joint. In other words, the internal space of this pipe member T also constitutes a part of the decompression flow path L.

[0062] This pressure reduction flow path L is provided with an opening / closing means V such as a valve, and by closing this opening / closing means V after operating the negative pressure generating means, the sample space can be maintained in a reduced pressure state.

[0063] Next, the procedure for holding the sample S in the cell 100, setting the cell 100 in the spectroscopic analyzer X, and performing analysis will be described.

[0064] First, the light-transmitting plate 30 is attached to the cover member 40 .

[0065] Specifically, the inward surface 43 of the cover member 40 is placed upward, the non-slip member 80 is placed on this inward surface 43 , and the light-transmitting plate 30 is placed on the non-slip member 80 .

[0066] Next, the pressing member 50 is placed on the outer edge 31 of the translucent plate 30, and fasteners 60 are tightened into the mounting holes 44 formed in multiple locations, thereby pressing the pressing member 50 against the cover member 40 with a locking member 70 such as a washer attached to the fastener 60.

[0067] As a result, the pressing member 50 presses the light-transmitting plate 30 toward the cover member 40, so that the light-transmitting plate 30 is locked and the light-transmitting plate 30 can be prevented from falling even if the inward surface 43 of the cover member 40 faces downward.

[0068] The cover member 40 is then placed on the base 10 with the inward surface 43 facing downward, and the cover member 40 is attached to the base 10 with screws or the like. Prior to this, the seal member 20 is fitted into the groove 12 of the base 10.

[0069] Then, the negative pressure generating means provided in the decompression flow path L is operated to decompress the sample space through the decompression flow path L.

[0070] As a result, as shown in Figure 5, a uniform force (negative pressure) acts on the entire light-transmitting plate 30, pressing down the thin-film sample S between the light-transmitting plate 30 and the base 10, stretching any bent parts of the sample S and making it flat.

[0071] At the same time, the light-transmitting plate 30 crushes the sealing member 20 fitted in the groove 12 of the base 10. As a result, coupled with the fact that the thickness of the sample is, for example, about 0.1 mm, when the sample space is depressurized, as shown in FIG. 3 , the upper surface 21 of the sealing member 20 (the surface facing the light-transmitting plate 30) becomes substantially flush with the mounting surface 11 of the base 10, and at least a portion of the base 10 and the light-transmitting plate 30 come into contact.

[0072] Then, the valve serving as the opening / closing means V is closed, and the cell 100 is set in the spectrometer X in a state where the sample space is depressurized.

[0073] With the sample space thus decompressed, excitation light from the light source 1 is irradiated onto the cell 100 through the light-transmitting plate 30, and the Raman scattered light generated from the sample S is incident on the detector 5, thereby obtaining the Raman spectrum of the sample S.

[0074] <Effects of this embodiment> According to the spectroscopic analysis cell 100 configured in this manner, by reducing the pressure in the sample space via the pressure-reducing flow path L, it is possible to apply a uniform force to the entire light-transmitting plate 30 and to press and flatten the sample S between the light-transmitting plate 30 and the base 10. As a result, it is possible to increase the measurement speed in a non-exposed environment, and to prevent cracking of the light-transmitting plate 30 even when measuring a wide range of the sample S or when the light-transmitting plate 30 is thin.

[0075] Furthermore, since the base 10 and at least a portion of the light-transmitting plate 30 are in contact when the sample space is decompressed, the sample S can be more reliably flattened, and at least a portion of the light-transmitting plate 30 can be supported by the base 10, which can further prevent cracking of the light-transmitting plate 30. If the sample S is thicker than in this embodiment, there may be cases where the base 10 and the light-transmitting plate 30 are not in contact, but even in this case, the sample S is flattened by the pressure applied between the light-transmitting plate 30 and the base 10.

[0076] Furthermore, since the pressure reduction flow path L opens at a position on the surface facing the sample space that avoids the sample S, the sample space can continue to be evacuated even after the sample S has become flat.

[0077] Since the internal flow path L1 formed in the base 10 constitutes at least a part of the pressure reduction flow path L, the pressure reduction flow path L can be formed without difficulty and is easy to process.

[0078] Furthermore, since the other end opening of the internal flow path L1 opens into the side wall of the base 10, when setting this spectroscopic analysis cell 100 in an analytical device or when measuring the sample S, the tubular member T etc. connected to the other end opening is less likely to get in the way, making it easy to handle.

[0079] Since the thickness of the light-transmitting plate 30 is 5 mm or less, the signal of the scattered light generated from the sample S can be reliably obtained, and measurement accuracy can be ensured.

[0080] The pressing member 50 clamps and holds the outer edge 31 of the light-transmitting plate 30 between the cover member 40, so that the light-transmitting plate 30 can be temporarily fixed to the cover member 40, thereby improving workability when attaching the light-transmitting plate 30 to the base 10, for example.

[0081] Furthermore, since the light-transmitting plate 30 is arranged with some play between the pressing member 50 and the lid member 40, the light-transmitting plate 30 is held in a state where some deflection is permitted between the pressing member 50 and the lid member 40, which more reliably prevents the light-transmitting plate 30 from cracking when the sample space is depressurized.

[0082] Since an anti-slip member 80 is provided between the outer edge 31 of the light-transmitting plate 30 and the cover member 40, misalignment of the light-transmitting plate 30 can be suppressed, thereby improving workability when attaching the light-transmitting plate 30 to the cover member 40, for example.

[0083] Since the sealing member 20 has a rectangular cross section, the contact area between the sealing member 20 and the light-transmitting plate 30 is larger than when the sealing member 20 has an approximately circular cross section, so that stress concentration at the contact points can be suppressed and cracking of the light-transmitting plate 30 can be more reliably prevented.

[0084] Other Embodiments The present invention is not limited to the above-described embodiments.

[0085] For example, although the pressure reduction flow path L in the above embodiment opens at one location on the mounting surface 11, the pressure reduction flow path L may be branched midway or multiple independent pressure reduction flow paths L may be provided, so that the pressure reduction flow path L opens at multiple locations on the mounting surface 11, as shown in Fig. 7. In this case, the force applied to the light-transmitting plate 30 when the sample space is depressurized can be made more uniform.

[0086] Furthermore, the pressure reduction flow path L does not necessarily have to be formed in the base 10, but may be formed in the cover member 40, for example.

[0087] Furthermore, although the cell 100 in the above embodiment is provided with the pressing member 50 and the anti-slip member 80, these members do not necessarily have to be provided.

[0088] Furthermore, although the sealing member 20 has a rectangular cross section in the above embodiment, it may have a circular cross section or the like.

[0089] The spectroscopic analyzer X may be one in which a plurality of cells 100 (two in this example) are set in a state where they are held integrally, as shown in FIG.

[0090] Furthermore, in the above embodiment, a microscopic Raman spectrometer is used as an example of the spectroscopic analysis device X, but this is not limited to this, and any device that uses spectroscopic analysis may be used, such as a photoluminescence measurement device or an ICP optical emission analysis device.

[0091] Furthermore, the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications are possible without departing from the spirit of the present invention.

[0092] Second Embodiment However, if measurement is performed by reducing the pressure in the sample space and bringing the sample S into close contact with the light-transmitting plate 30, the spectrum of the sample S and the spectrum of the light-transmitting plate 30 will be detected together, which can cause problems such as making it difficult to evaluate the measurement data. Therefore, the spectroscopic analysis cell 100 of the second embodiment further includes a spacer 9 that forms a gap between the sample S and the light-transmitting plate 30, as shown in Figures 8 and 9 .

[0093] The spacer 9 is placed on top of the sample S on the base 10 and is accommodated together with the sample S in the sample space surrounded by the base 10, the seal member 20, and the light-transmitting plate 30. The spacer 9 forms a substantial gap between the sample S and the light-transmitting plate 30 so that the spectrum of the sample S can be detected separately from the spectrum of the light-transmitting plate 30. The spacer 9 here is a thin film made of PET film with a thickness of about 0.2 mm and an area similar to that of the sample S. The size or thickness of the spacer 9 need only be such that it can be accommodated in the sample space. Various materials may also be used.

[0094] The spacer 9 has a plurality of through holes 91 formed therein, penetrating from the front surface to the back surface thereof, and a gap is formed inside these through holes 91 surrounded by the spacer 9, the sample S, and the light-transmitting plate 30.

[0095] The plurality of through holes 91 are arranged in a matrix at a predetermined pitch. Here, the through holes 91, each with a diameter of about 3 mm, are arranged at a pitch of about 5 mm vertically and horizontally. The arrangement, diameter, and pitch of the through holes 91 are not limited to those described above. However, for example, if the hole diameter is too large, the light-transmitting plate 30 may crack due to the pressure applied when the sample space is decompressed. Therefore, it is desirable to design the hole diameter within a range that prevents cracking of the light-transmitting plate 30.

[0096] 9, excitation light from the light source is irradiated onto the sample S through the through-hole 91. As a result, Raman scattered light generated from the sample S passes through the through-hole 91 and enters the detector. As a result, the Raman spectrum of the sample S located inside the through-hole 91 is obtained.

[0097] <Effects of the Second Embodiment> According to the second embodiment, a gap is formed between the light-transmitting plate 30 and the sample S by the spacer 9, and excitation light is irradiated onto the sample S through the gap, making it difficult to detect the spectrum of the light-transmitting plate 30. This makes it possible to obtain a Raman spectrum of the sample S with reduced influence of the light-transmitting plate 30.

[0098] The spacer may be formed integrally with the light-transmitting plate. For example, the light-transmitting plate may have a plurality of recesses recessed in the thickness direction on the surface that comes into contact with the sample. In this case, too, a gap can be formed between the recesses of the light-transmitting plate and the sample.

[0099] According to the present invention, by reducing the pressure in the sample space via the pressure reduction channel, a uniform force is applied to the entire light-transmitting plate, and the sample is pressed and flattened between the light-transmitting plate and the base. As a result, it is possible to increase the measurement speed in a non-exposed environment, and to prevent cracking of the light-transmitting plate even when measuring a wide range of the sample or when the light-transmitting plate is thin.

[0100] X: Spectroscopic analysis device S: Sample 100: Spectroscopic analysis cell 10: Base 11: Mounting surface 12: Groove portion 20: Sealing member 30: Light-transmitting plate 40: Cover member 50: Pressing member 60: Fastener 70: Locking member 80: Anti-slip member L: Pressure reduction flow path L1: Internal flow path

Claims

1. 1. A cell for use in spectroscopic analysis to hold a sample, comprising: a base for supporting the sample; a seal member surrounding the sample on the base; a light-transmitting plate that sandwiches the sample between itself and the base; A spectroscopic analysis cell comprising: a pressure reducing flow path communicating with a sample space surrounded by the base, the light-transmitting plate, and the sealing member.

2. 2. The spectroscopic analysis cell according to claim 1, wherein the base and at least a portion of the light-transmitting plate are in contact with each other when the sample space is decompressed.

3. 3. The spectroscopic analysis cell according to claim 1, wherein the pressure reducing channel is open at a position on the surface facing the sample space that avoids the sample.

4. 3. The spectroscopic analysis cell according to claim 1, wherein an internal flow path formed in the base constitutes at least a part of the pressure reduction flow path.

5. 5. The spectroscopic analysis cell according to claim 4, wherein one end opening of said internal flow path opens into said sample space, and the other end opening opens into a side wall of said base.

6. 3. The spectroscopic analysis cell according to claim 1, wherein the thickness of the light-transmitting plate is 5 mm or less.

7. a cover member provided on the opposite side of the base with respect to the light-transmitting plate; The spectroscopic analysis cell according to claim 1 , further comprising a pressing member that sandwiches and holds an outer edge of the light-transmitting plate between the light-transmitting plate and the cover member.

8. 8. The spectroscopic analysis cell according to claim 7, wherein the light-transmitting plate is disposed between the pressing member and the lid member with a play.

9. 8. The spectroscopic analysis cell according to claim 7, further comprising an anti-slip member interposed between an outer edge of the light-transmitting plate and the cover member to prevent the light-transmitting plate from sliding relative to the cover member.

10. 3. The spectroscopic analysis cell according to claim 1, wherein the sealing member has a rectangular cross section.

11. The spectroscopic analysis cell according to claim 1 or 2, further comprising a spacer that forms a gap between the light-transmitting plate and the sample.

12. a light source that irradiates the sample with light; A spectroscopic analysis device comprising the spectroscopic analysis cell according to claim 1 or 2.

13. The spectroscopic analysis device according to claim 12 , further comprising an optical element provided between the light source and the spectroscopic analysis cell, for collecting light from the light source and directing the light to the sample.

14. A spectroscopic analysis method using a spectroscopic analysis cell including: a base for supporting a sample; a seal member for surrounding the sample on the base; and a light-transmitting plate for sandwiching the sample between the base and the seal member, the light-transmitting plate comprising: reducing the pressure in a sample space surrounded by the base, the sealing member, and the light-transmitting plate; and irradiating the sample with light while the sample space is decompressed.