Display apparatus and preparation method therefor

Abstract

Provided in the present disclosure are a display apparatus and a preparation method therefor. The display apparatus comprises: a touch-control display screen, which is provided with a touch-control display surface and a tactile feedback surface that are arranged opposite each other, and is adapted to acquire a touch-control position; an ultrasonic transducer array, which is located on the tactile feedback surface and comprises several ultrasonic transducers arranged in an array, wherein each ultrasonic transducer is adapted to operate independently; and a control module, which is provided with an input end and an output end, wherein the input end is electrically connected to the touch-control display screen, the output end is electrically connected to the ultrasonic transducers, and the control module is adapted to control an ultrasonic transducer, which is located at the touch-control position, to perform vibration feedback.

Description

Display device and manufacturing method thereof

[0001] Cross-references to related publications

[0002] This application claims priority to Chinese Patent Publication No. 202310729215.6 filed in China on June 19, 2023, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present disclosure relates to the field of display technology, and in particular to a method for preparing a display device. Background Art

[0004] Touch technology is the most widely used computer input method after keyboard, mouse, and voice input. Users can perform various operations on the host by simply touching the icons or text on the touch display screen with their fingers, making human-computer interaction more straightforward. With the development of technology, some touch display screens also have a tactile feedback function, which helps users quickly judge whether their operations are effective. For example, when a user is driving a vehicle, the tactile feedback of the touch display screen can enable the user to know in time that the operation is effective, thereby reducing the distraction of the user's attention and improving driving safety. Currently, most touch display screens with tactile feedback function have devices such as eccentric motors or linear motors set on the vibration plate to drive the vibration plate to vibrate when touched, thereby achieving tactile feedback.

[0005] However, when a user touches a certain position on the touch display screen, the entire touch display screen will vibrate, which not only consumes a lot of power but also cannot reproduce the tactile sensation of the touched position alone or at multiple positions simultaneously, which limits the application of touch display screens.

[0006] Summary of the Invention

[0007] In a first aspect, the present disclosure provides a display device comprising: a touch screen display having a touch display surface and a tactile feedback surface relatively arranged, the touch screen display being suitable for obtaining a touch position; an ultrasonic transducer array located on the tactile feedback surface, the ultrasonic transducer array comprising a plurality of ultrasonic transducers arranged in an array, each of the ultrasonic transducers being suitable for working independently; and a control module, the control module having an input end and an output end, the input end being electrically connected to the touch screen display, the output end being electrically connected to the ultrasonic transducer, the control module being suitable for controlling the ultrasonic transducer located at the touch position to perform vibration feedback.

[0008] In one example, the ultrasonic transducer array is a piezoelectric micromachined ultrasonic transducer array or a capacitive micromachined ultrasonic transducer array.

[0009] In one example, the piezoelectric micromechanical ultrasonic transducer array includes a substrate, a structural layer, a first electrode layer, a piezoelectric layer, and a second electrode layer stacked in sequence; the substrate has a plurality of through holes arranged in an array, and part of the surface of the structural layer is exposed in the through holes; the first electrode layer and / or the second electrode layer is a patterned electrode layer, and the patterned electrode layer includes a plurality of sub-electrode blocks arranged in an array, and the sub-electrode blocks are arranged opposite to the through holes; the surface of the substrate on one side facing away from the structural layer faces the tactile feedback surface.

[0010] In one example, the piezoelectric micromachined ultrasonic transducer further includes a vibration matching layer located on a surface of the second electrode layer facing away from the piezoelectric layer. The vibration matching layer has a low acoustic impedance and a high sound velocity, effectively reducing reflection and loss of ultrasonic waves generated by the ultrasonic transducer, thereby improving the transmission efficiency of the ultrasonic waves and, in turn, increasing vibration intensity, which is beneficial for enhancing tactile feedback.

[0011] In one example, the first electrode layer includes first sub-electrode blocks arranged in an array, and the second electrode layer includes second sub-electrode blocks arranged in an array. The first sub-electrode blocks and the second sub-electrode blocks are both disposed opposite the through-holes, and the area of ​​the second sub-electrode blocks is smaller than that of the first sub-electrode blocks. This facilitates achieving a better vibration effect, thereby facilitating a better tactile feedback effect.

[0012] In one example, a ratio of an area of ​​the second sub-electrode block to an area of ​​the first sub-electrode block is 0.5 to 0.8.

[0013] In one example, the piezoelectric micromechanical ultrasonic transducer array includes a sealing layer, a substrate, a structural layer, a first electrode layer, a piezoelectric layer, and a second electrode layer stacked in sequence; the substrate has a plurality of through holes arranged in an array, and the through holes, the structural layer, and the sealing layer constitute a closed cavity; the first electrode layer and / or the second electrode layer is a patterned electrode layer, and the patterned electrode layer includes a plurality of sub-electrode blocks arranged in an array, and the sub-electrode blocks are arranged opposite to the through holes; the surface of the second electrode layer on the side facing away from the piezoelectric layer faces the tactile feedback surface.

[0014] In one example, the sealing layer is a vibration matching layer.

[0015] In one example, the touch display screen includes a substrate, and the substrate is a flexible substrate, thereby facilitating improved vibration transmission effect and thus facilitating improved tactile feedback effect.

[0016] In a second aspect, the present disclosure provides a method for preparing a display device, comprising: forming a touch display screen, the touch display screen having a touch display surface and a tactile feedback surface arranged relative to each other, the touch display screen being suitable for obtaining a touch position; forming an ultrasonic transducer array, the ultrasonic transducer array being located on the tactile feedback surface, the ultrasonic transducer array comprising a plurality of ultrasonic transducers arranged in an array, each of the ultrasonic transducers being suitable for working independently; providing a control module, the control module having an input end and an output end, the input end being electrically connected to the touch display screen, the output end being electrically connected to the ultrasonic transducer, the control module being suitable for controlling the ultrasonic transducer located at the touch position to perform vibration feedback.

[0017] In one example, the method for manufacturing the display device includes: forming the touch screen display; and after forming the touch screen display, forming the ultrasonic transducer array on a tactile feedback surface of the touch screen display.

[0018] In one example, the step of forming the ultrasonic transducer array on the tactile feedback surface includes: forming a substrate on the tactile feedback surface, the substrate having a plurality of through holes arranged in an array; forming a structural layer on a surface of the substrate on a side facing away from the touch display screen, the through holes constituting a closed cavity; forming a first electrode layer on a surface of the structural layer on a side facing away from the touch display screen; forming a piezoelectric layer on an entire surface of the first electrode layer on a side facing away from the touch display screen; forming a second electrode layer on a surface of the piezoelectric layer on a side facing away from the touch display screen; the first electrode layer and / or the second electrode layer are patterned electrode layers, the patterned electrode layer including sub-electrode blocks arranged in an array, and the sub-electrode blocks are arranged opposite to the through holes.

[0019] In one example, the step of forming the substrate on the tactile feedback surface includes: forming a photoresist layer on the tactile feedback surface, and etching the photoresist layer to obtain the substrate.

[0020] In one example, the step of forming a structural layer on a surface of the substrate facing away from the touch display screen includes: prefabricating the structural layer, and adhering the structural layer to the surface of the substrate facing away from the touch display screen.

[0021] In one example, the step of forming the ultrasonic transducer array on the tactile feedback surface further includes: after forming the second electrode layer, forming a vibration matching layer on a surface of the second electrode layer facing away from the touch display screen.

[0022] In one example, the method for preparing the display device includes: forming the touch display screen; forming the ultrasonic transducer array; and after forming the touch display screen and the ultrasonic transducer array, adhering the ultrasonic transducer array to the tactile feedback surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the specific embodiments of the present disclosure or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0024] FIG1 is a schematic structural diagram of a display device provided by an embodiment of the present disclosure;

[0025] FIG2 is a schematic structural diagram of a display device shown in FIG1 ;

[0026] FIG3 is a top view of the substrate in FIG2 ;

[0027] FIG4 is a schematic structural diagram of another display device shown in FIG1 ;

[0028] FIG5 is a schematic structural diagram of another display device shown in FIG1 ;

[0029] 6 to 11 are schematic diagrams of the structure of the display device in FIG2 during the preparation process;

[0030] FIG12 is a schematic structural diagram of the ultrasonic transducer array in FIG5 ;

[0031] FIG13 is a schematic structural diagram of the ultrasonic transducer array in FIG4 ;

[0032] Explanation of reference numerals: 1 - touch screen; 2 - ultrasonic transducer array; 21 - substrate; 211 - through hole; 22 - structural layer; 23 - first electrode layer; 24 - piezoelectric layer; 25 - second electrode layer; 26 - vibration matching layer; 3 - bonding layer. DETAILED DESCRIPTION

[0033] The following describes in detail embodiments of the present disclosure, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present disclosure, and should not be construed as limiting the present disclosure.

[0034] In a first aspect, referring to FIG1 , the present disclosure provides a display device, comprising:

[0035] A touch screen 1, wherein the touch screen 1 has a touch display surface and a tactile feedback surface arranged opposite to each other, and the touch screen 1 is suitable for obtaining a touch position;

[0036] an ultrasonic transducer array 2 located on the tactile feedback surface, the ultrasonic transducer array 2 comprising a plurality of ultrasonic transducers arranged in an array, each of the ultrasonic transducers being adapted to operate independently;

[0037] A control module, wherein the control module has an input end and an output end, the input end is electrically connected to the touch display screen 1, and the output end is electrically connected to the ultrasonic transducer, and the control module is suitable for controlling the ultrasonic transducer located at the touch position to perform vibration feedback.

[0038] In the above-mentioned display device, each ultrasonic transducer in the ultrasonic transducer array 2 is capable of working independently, which enables the display device to individually reproduce the touch position and simultaneously reproduce the touch at multiple positions, which not only improves the flexibility of tactile feedback but also helps to reduce power consumption. Secondly, the ultrasonic transducer array 2 is located on the other side of the touch screen 1 away from the touch display surface, so it will not affect the image displayed on the touch screen 1, and does not occupy the space of the display area of ​​the touch screen 1, which is conducive to improving the resolution of the touch screen 1. Thirdly, the ultrasonic transducers in the ultrasonic transducer array 2 have a high arrangement density, which is conducive to improving the effect of the ultrasonic transducer for tactile feedback. In addition, the ultrasonic transducer array 2 is relatively light and thin, which is conducive to reducing the volume of the display device.

[0039] Specifically, the steps for the above-mentioned display device to implement tactile feedback are as follows: when a user touches the touch display surface of the display device, the touch display screen obtains the touch position and transmits the touch position information to the control module; after the control module receives the touch position information, it sends a vibration feedback signal to several ultrasonic transducers located at the touch position; after receiving the vibration feedback signal, the several ultrasonic transducers located at the touch position perform vibration feedback.

[0040] It should be noted that the display area of ​​the touchscreen display 1 has several light-emitting elements that emit light to display images. When ultrasonic transducers are placed between adjacent light-emitting elements, they inevitably occupy space in the display area, thereby affecting the resolution of the touchscreen display 1 and reducing the display quality of the touchscreen display 1. Furthermore, this arrangement reduces the density of the ultrasonic transducers, thereby affecting the tactile feedback provided by the ultrasonic transducers. When the ultrasonic transducer array 2 is placed on the touchscreen display surface, it will obstruct the image display of the touchscreen display 1, affecting the display quality of the touchscreen display 1.

[0041] According to an embodiment of the present disclosure, the ultrasonic transducer array 2 is a piezoelectric micromachined ultrasonic transducer array or a capacitive micromachined ultrasonic transducer array.

[0042] Preferably, the ultrasonic transducer array 2 is a piezoelectric micromachined ultrasonic transducer array, and when a user touches the touch display surface of the display device, the user can experience a more realistic physical touch. Specifically, the steps for implementing tactile feedback in the above-mentioned display device are as follows: when the user touches the touch display surface of the display device, the piezoelectric layer 24 in the ultrasonic transducer array 2 deforms to generate an electrical signal, and the ultrasonic transducer array 2 transmits the electrical signal to the control module; the control module calculates the touch pressure when the user performs the touch operation based on the magnitude of the electrical signal; when the user touches the touch display surface of the display device, the touch screen 1 can obtain the touch position and transmit the touch position information to the control module; after receiving the touch position information, the control module sends a vibration feedback signal to the ultrasonic transducers located at the touch position, and the vibration feedback signal carries the touch pressure information; after receiving the vibration feedback signal, the ultrasonic transducers located at the touch position vibrate to provide feedback, and the vibration intensity of the touch position is close to the touch pressure when the user performs the touch operation, so that the user can experience a more realistic physical touch.

[0043] In a first embodiment, referring to FIG2 , the piezoelectric micromachined ultrasonic transducer array includes a substrate 21, a structural layer 22, a first electrode layer 23, a piezoelectric layer 24, and a second electrode layer 25, which are stacked in sequence. Referring to FIG3 , the substrate 21 has a plurality of through holes 211 arranged in an array, with portions of the surface of the structural layer 22 exposed in the through holes 211. The first electrode layer 23 and / or the second electrode layer 25 are patterned electrode layers, each of which includes a plurality of sub-electrode blocks arranged in an array, each of which is disposed opposite the through holes 211. The surface of the substrate 21 facing away from the structural layer 22 faces the tactile feedback surface, and the through holes 211, the structural layer 22, and the tactile feedback surface form a closed cavity. The number of ultrasonic transducers in the ultrasonic transducer array 2 is the same as the number of through holes 211, and the positions of the ultrasonic transducers correspond to the positions of the through holes 211. The first electrode layer 23 and the second electrode layer 25 are both electrically connected to the control module, so that each ultrasonic transducer can be driven individually by the touch module.

[0044] Specifically, the material of the substrate 21 can be single crystal silicon or photoresist, or other materials; the structural layer 22 can be a metal film or an organic film; the piezoelectric layer 24 can be an inorganic piezoelectric film such as PZT (lead zirconate titanate piezoelectric ceramic), AlN, ZnO, etc., or it can be an organic piezoelectric film layer such as PVDF (polyvinylidene fluoride), PVDF-TrFE (vinylidene fluoride trifluoroethylene copolymer), PDMS (polydimethylsiloxane); the material of the first electrode layer 23 and the second electrode layer 25 can be a metal material such as Mo, Ti, Pt, or it can be a transparent conductive material such as ITO.

[0045] Furthermore, the thickness of the substrate 21 can be 10μm to 50μm, such as 10μm, 15μm, 20μm, 25μm, 30μm, 35μm, 40μm, 45μm or 50μm; referring to Figure 3, the shape of the orthographic projection of the through hole 211 on the structural layer 22 can be circular, rectangular, hexagonal, octagonal or the like, and the shapes and sizes of the several through holes 211 in the ultrasonic transducer array 2 can be the same or different, and the arrangement of the sub-electrode blocks corresponds to the arrangement mode and shape of the through holes 211; when the shape of the orthographic projection of the through hole 211 on the structural layer 22 is circular, the inner diameter of the through hole 211 can be 50μm to 500μm, such as 50μm, 100μm, 150μm, 200μm, 250μm, 300μm, 350μm, 400μm, 450μm or 100μm.

[0046] In the first embodiment, referring again to FIG2 , the piezoelectric micromachined ultrasonic transducer further includes a vibration matching layer 26 , which is located on the surface of the second electrode layer 25 facing away from the piezoelectric layer 24 . The vibration matching layer 26 has a low acoustic impedance and a high sound velocity, effectively reducing reflection and loss of the ultrasonic waves generated by the ultrasonic transducer, thereby improving the transmission efficiency of the ultrasonic waves and, in turn, increasing vibration intensity, which is beneficial for enhancing tactile feedback. The vibration matching layer 26 may be an organic film such as polyurethane or polyethylene, or other materials.

[0047] In the first embodiment, preferably, the first electrode layer 23 and the second electrode layer 25 are both patterned electrode layers. This structure can avoid interference between different ultrasonic transducers and is conducive to accurate tactile feedback. Specifically, the first electrode layer 23 includes first sub-electrode blocks arranged in an array, and the second electrode layer 25 includes second sub-electrode blocks arranged in an array, and the first sub-electrode blocks and the second sub-electrode blocks are both arranged opposite to the through hole 211. More preferably, the area of ​​the second sub-electrode block is smaller than the area of ​​the first sub-electrode block. This design is conducive to obtaining a better vibration effect, thereby facilitating a better tactile feedback effect. Exemplarily, the ratio of the area of ​​the second sub-electrode block to the area of ​​the first sub-electrode block is 0.5 to 0.8, such as 0.5, 0.55, 0.6, 0.65, 0.7, 0.75 or 0.8.

[0048] In a second embodiment, referring to FIG4 , the piezoelectric micromachined ultrasonic transducer array includes a sealing layer, a substrate 21, a structural layer 22, a first electrode layer 23, a piezoelectric layer 24, and a second electrode layer 25, which are stacked in sequence. The substrate 21 has a plurality of through-holes 211 arranged in an array. The through-holes 211, the structural layer 22, and the sealing layer form a sealed cavity. The first electrode layer 23 and / or the second electrode layer 25 are patterned electrode layers, each of which includes a plurality of sub-electrode blocks arranged in an array, each of which is disposed opposite the through-holes 211. The surface of the second electrode layer 25 facing away from the piezoelectric layer 24 faces the tactile feedback surface. The number of ultrasonic transducers in the ultrasonic transducer array 2 is the same as the number of through-holes 211, and the positions of the ultrasonic transducers correspond to those of the through-holes 211. Both the first electrode layer 23 and the second electrode layer 25 are electrically connected to the control module, enabling each ultrasonic transducer to be individually driven by the touch module. It should be understood that the materials and structures of the various functional layers in the piezoelectric micromechanical ultrasonic transducer array in the second embodiment can be the same as the materials and structures of the various functional layers in the piezoelectric micromechanical ultrasonic transducer array in the first embodiment, and will not be repeated here.

[0049] Preferably, the sealing layer is a vibration matching layer 26. The vibration matching layer 26 has low acoustic impedance and high sound velocity, effectively reducing reflection and loss of ultrasonic waves generated by the ultrasonic transducer, thereby improving the transmission efficiency of the ultrasonic waves and, in turn, increasing vibration intensity, which is beneficial for enhancing tactile feedback. The vibration matching layer 26 can be an organic film such as polyurethane or polyethylene, or other materials.

[0050] According to an embodiment of the present disclosure, the display device may further include an adhesive layer located between the touch screen 1 and the ultrasonic transducer array 2 to secure the ultrasonic transducer array 2 to a side surface of the touch screen 1. FIG4 shows the use of the adhesive layer 3 to secure the second electrode layer 25 of the piezoelectric micromachined ultrasonic transducer array to the touch screen 1, and FIG5 shows the use of the adhesive layer 3 to secure the substrate 21 of the piezoelectric micromachined ultrasonic transducer array to the touch screen 1.

[0051] According to an embodiment of the present disclosure, the touch screen 1 includes a substrate, which is a flexible substrate. In this case, the touch screen 1 is a flexible touch screen, which is beneficial for improving vibration transmission and thus tactile feedback. Furthermore, when the ultrasonic transducer array 2 is a piezoelectric micromachined ultrasonic transducer array, the flexible substrate can better transmit touch pressure to the piezoelectric layer 24, thereby improving the accuracy of the control module's calculation of touch pressure, thereby allowing users to experience a more realistic physical touch.

[0052] In a second aspect, the present disclosure provides a method for manufacturing a display device, comprising:

[0053] A touch screen 1 is formed, wherein the touch screen 1 has a touch display surface and a tactile feedback surface arranged opposite to each other, and the touch screen 1 is suitable for obtaining a touch position;

[0054] forming an ultrasonic transducer array 2, the ultrasonic transducer array 2 being located on the tactile feedback surface, the ultrasonic transducer array 2 comprising a plurality of ultrasonic transducers arranged in an array, each of the ultrasonic transducers being adapted to operate independently;

[0055] A control module is provided, which has an input end and an output end. The input end is electrically connected to the touch display screen 1, and the output end is electrically connected to the ultrasonic transducer. The control module is suitable for controlling the ultrasonic transducer located at the touch position to perform vibration feedback.

[0056] In a first embodiment, the method for manufacturing a display device includes the following steps: forming a touch screen 1 ; and after forming the touch screen 1 , forming an ultrasonic transducer array 2 on a tactile feedback surface of the touch screen 1 .

[0057] As a specific example of the first embodiment, the step of forming the ultrasonic transducer array 2 on the tactile feedback surface includes:

[0058] Referring to FIG. 6 , a substrate 21 is formed on the tactile feedback surface, and the substrate 21 has a plurality of through holes 211 arranged in an array. Specifically, the substrate 21 can be obtained by forming a photoresist layer on the tactile feedback surface and etching the photoresist layer. The substrate 21 can also be prepared by other preparation methods.

[0059] Referring to FIG. 7 , a structural layer 22 is formed on the surface of the substrate 21 facing away from the touch screen 1, so that the through hole 211 constitutes a closed cavity. Specifically, the structural layer 22 can be prefabricated and then adhered to the surface of the substrate 21 facing away from the touch screen 1, or the structural layer 22 can be formed on the surface of the substrate 21 facing away from the touch screen 1 in other ways.

[0060] Referring to FIG. 8 , a first electrode layer 23 is formed on a surface of the structural layer 22 facing away from the touch display screen 1 .

[0061] 9 , a piezoelectric layer 24 is formed entirely on the surface of the first electrode layer 23 facing away from the touch screen 1 . Specifically, the piezoelectric layer 24 is formed by spin coating or magnetron sputtering.

[0062] Referring to FIG. 10 , a second electrode layer 25 is formed on a surface of the piezoelectric layer 24 on a side facing away from the touch screen 1 ;

[0063] It should be noted that the first electrode layer 23 and / or the second electrode layer 25 are patterned electrode layers, each comprising an array of spaced-apart sub-electrode blocks, each of which is disposed opposite the through-hole 211. The first electrode layer 23 in FIG. 6 and the second electrode layer 25 in FIG. 8 are both patterned electrode layers. The method for preparing the patterned electrode layer includes the following steps: forming a full-surface electrode layer using processes including, but not limited to, vacuum evaporation and magnetron sputtering; and etching the full-surface electrode layer to obtain the patterned electrode layer.

[0064] Preferably, referring to FIG11 , the step of forming the ultrasonic transducer array 2 on the tactile feedback surface further includes: after forming the second electrode layer 25, forming a vibration matching layer 26 on a surface of the second electrode layer 25 facing away from the touch screen 1. Specifically, the vibration matching layer 26 can be formed by coating a slurry or other methods.

[0065] In a second embodiment, the method for manufacturing the display device includes the following steps: forming the touch screen 1; forming the ultrasonic transducer array 2; and after forming the touch screen 1 and the ultrasonic transducer array 2, adhering the ultrasonic transducer array 2 to the tactile feedback surface. Both the touch screen 1 and the ultrasonic transducer array 2 can be prefabricated in advance, which helps shorten the time required to manufacture the display device and thereby improve production efficiency.

[0066] As a specific example of the second embodiment, the method for preparing the ultrasonic transducer array 2 shown in FIG12 includes the following steps:

[0067] Step S1a: providing an initial substrate, which is used to form the substrate 21 in FIG12 ; specifically, the material of the initial substrate includes but is not limited to a single crystal silicon wafer.

[0068] Step S2a: forming a structural layer 22 on one side surface of the initial substrate.

[0069] Step S3a: forming a first electrode layer 23 on a surface of the structural layer 22 facing away from the initial substrate.

[0070] Step S4a: forming a piezoelectric layer 24 on a surface of the first electrode layer 23 facing away from the initial substrate.

[0071] Step S5a: forming a second electrode layer 25 on a surface of the piezoelectric layer 24 facing away from the initial substrate.

[0072] Step S6a, etching the initial substrate to obtain a substrate 21 having a plurality of through holes 211; when the material of the initial substrate is single crystal silicon, the method of etching the initial substrate includes but is not limited to a deep reactive ion etching method.

[0073] After the ultrasonic transducer array 2 shown in FIG. 12 is prepared, the surface of the substrate 21 facing away from the structural layer 22 is adhered to the tactile feedback surface to obtain the display device shown in FIG. 5 .

[0074] It should be noted that the first electrode layer 23 and / or the second electrode layer 25 are patterned electrode layers; the piezoelectric layer 24 and the patterned electrode layer can be formed according to the method provided in the first embodiment, which will not be repeated here; the structural layer 22 can be formed by processes such as spin coating, attachment or sputtering.

[0075] Preferably, continuing with FIG12 , the method for preparing the ultrasonic transducer array 2 further includes: after forming the second electrode layer 25 and before etching the initial substrate, forming a vibration matching layer 26 on a surface of the second electrode layer 25 facing away from the initial substrate. The vibration matching layer 26 can be formed according to the method provided in the first embodiment and will not be further described here.

[0076] As another specific example of the second embodiment, the method for preparing the ultrasonic transducer array 2 shown in FIG13 includes the following steps:

[0077] Step S1b: providing an initial substrate, which is used to form the substrate 21 in FIG. 13 ; specifically, the material of the initial substrate includes but is not limited to a single crystal silicon wafer.

[0078] Step S2b: forming a structural layer 22 on one side surface of the initial substrate.

[0079] Step S3b: forming a first electrode layer 23 on a surface of the structural layer 22 facing away from the initial substrate.

[0080] Step S4b: forming a piezoelectric layer 24 on a surface of the first electrode layer 23 that is away from the initial substrate.

[0081] Step S5b: forming a second electrode layer 25 on a surface of the piezoelectric layer 24 facing away from the initial substrate.

[0082] Step S6b: etching the initial substrate to obtain a substrate 21 having a plurality of through holes 211; when the material of the initial substrate is single crystal silicon, the method of etching the initial substrate includes but is not limited to a deep reactive ion etching method.

[0083] Step S7b: A sealing layer is attached to the surface of the substrate 21 facing away from the structural layer 22. The through hole 211, the structural layer 22 and the sealing layer form a closed cavity. Preferably, the sealing layer is the vibration matching layer 26.

[0084] After the ultrasonic transducer array 2 is prepared, the surface of the second electrode layer 25 facing away from the piezoelectric layer 24 is adhered to the tactile feedback surface to obtain the display device shown in FIG. 4 .

[0085] It should be noted that the first electrode layer 23 and / or the second electrode layer 25 are patterned electrode layers; the piezoelectric layer 24 and the patterned electrode layer can be formed according to the method provided in the first embodiment, which will not be repeated here; the structural layer 22 can be formed by processes such as spin coating, attachment or sputtering.

[0086] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of the features. Throughout the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0087] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present disclosure. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0088] Although the embodiments of the present disclosure have been shown and described above, it is understood that the above embodiments are illustrative and are not to be construed as limitations on the present disclosure. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present disclosure.

Claims

1. A display device, wherein: include: A touch display screen, wherein the touch display screen has a touch display surface and a tactile feedback surface arranged opposite to each other, and the touch display screen is suitable for obtaining a touch position; An ultrasonic transducer array located on the tactile feedback surface, the ultrasonic transducer array comprising a plurality of ultrasonic transducers arranged in an array, each of the ultrasonic transducers being suitable for working independently; A control module, wherein the control module has an input end and an output end, wherein the input end is electrically connected to the touch display screen, and the output end is electrically connected to the ultrasonic transducer, and the control module is suitable for controlling the ultrasonic transducer located at the touch position to perform vibration feedback.

2. The display device according to claim 1, wherein: The ultrasonic transducer array is a piezoelectric micromechanical ultrasonic transducer array or a capacitive micromechanical ultrasonic transducer array.

3. The display device according to claim 2, wherein: The piezoelectric micromechanical ultrasonic transducer array comprises a substrate, a structural layer, a first electrode layer, a piezoelectric layer, and a second electrode layer which are stacked in sequence; the substrate has a plurality of through holes arranged in an array, and a portion of the surface of the structural layer is exposed in the through holes; the first electrode layer and / or the second electrode layer is a patterned electrode layer, and the patterned electrode layer comprises a plurality of sub-electrode blocks arranged in an array, and the sub-electrode blocks are arranged opposite to the through holes; a surface of the substrate on one side away from the structural layer faces the tactile feedback surface; Preferably, the piezoelectric micromechanical ultrasonic transducer further includes a vibration matching layer, and the vibration matching layer is located on a surface of the second electrode layer on a side away from the piezoelectric layer.

4. The display device according to claim 3, wherein: The first electrode layer includes first sub-electrode blocks arranged in an array, and the second electrode layer includes second sub-electrode blocks arranged in an array, the first sub-electrode blocks and the second sub-electrode blocks are both arranged opposite to the through holes, and the area of ​​the second sub-electrode blocks is smaller than that of the first sub-electrode blocks; Preferably, the ratio of the area of ​​the second sub-electrode block to the area of ​​the first sub-electrode block is 0.5-0.

8.

5. The display device according to claim 2, wherein: The piezoelectric micromechanical ultrasonic transducer array comprises a sealing layer, a substrate, a structural layer, a first electrode layer, a piezoelectric layer and a second electrode layer which are stacked in sequence; the substrate has a plurality of through holes arranged in an array, and the through holes, the structural layer and the sealing layer constitute a closed cavity; the first electrode layer and / or the second electrode layer is a patterned electrode layer, and the patterned electrode layer comprises a plurality of sub-electrode blocks arranged in an array, and the sub-electrode blocks are arranged opposite to the through holes; a surface of the second electrode layer on one side away from the piezoelectric layer faces the tactile feedback surface; Preferably, the sealing layer is a vibration matching layer.

6. The display device according to claim 1, wherein: The touch display screen comprises a substrate, and the substrate is a flexible substrate.

7. A method for preparing a display device, wherein: include: forming a touch display screen, the touch display screen having a touch display surface and a tactile feedback surface arranged opposite to each other, the touch display screen being suitable for obtaining a touch position; forming an ultrasonic transducer array, wherein the ultrasonic transducer array is located on the tactile feedback surface, the ultrasonic transducer array comprises a plurality of ultrasonic transducers arranged in an array, and each of the ultrasonic transducers is suitable for working alone; A control module is provided, wherein the control module has an input end and an output end, wherein the input end is electrically connected to the touch display screen, and the output end is electrically connected to the ultrasonic transducer, and the control module is suitable for controlling the ultrasonic transducer located at the touch position to perform vibration feedback.

8. The method for manufacturing a display device according to claim 7, wherein: include: forming the touch display screen; After the touch display screen is formed, the ultrasonic transducer array is formed on the tactile feedback surface of the touch display screen.

9. The method for manufacturing a display device according to claim 8, wherein: The step of forming the ultrasonic transducer array on the tactile feedback surface comprises: forming a substrate on the tactile feedback surface, wherein the substrate has a plurality of through holes arranged in an array; A structural layer is formed on a surface of the substrate facing away from the touch display screen, and the through hole forms a closed cavity; Forming a first electrode layer on a surface of the structural layer that is away from the touch display screen; A piezoelectric layer is formed on a surface of the first electrode layer that is away from the touch display screen; Forming a second electrode layer on a surface of the piezoelectric layer that is away from the touch display screen; The first electrode layer and / or the second electrode layer is a patterned electrode layer, the patterned electrode layer comprises sub-electrode blocks arranged in an array, and the sub-electrode blocks are arranged opposite to the through holes; Preferably, the step of forming the substrate on the tactile feedback surface comprises: forming a photoresist layer on the tactile feedback surface, and etching the photoresist layer to obtain the substrate; Preferably, the step of forming a structural layer on a surface of the substrate facing away from the touch display screen comprises: prefabricating the structural layer, and adhering the structural layer to the surface of the substrate facing away from the touch display screen.

10. The method for manufacturing a display device according to claim 9, wherein: The step of forming the ultrasonic transducer array on the tactile feedback surface further includes: after forming the second electrode layer, forming a vibration matching layer on a surface of the second electrode layer that is away from the touch display screen.

11. The method for manufacturing a display device according to claim 7, wherein: include: forming the touch display screen; forming the ultrasonic transducer array; After forming the touch display screen and the ultrasonic transducer array, the ultrasonic transducer array is adhered to the tactile feedback surface.

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