Substrate storage container

The substrate storage container addresses damage issues by using recessed areas on support plates and lid components to prevent contact with protrusions, ensuring safe storage and transportation while maintaining substrate alignment and preventing contamination.

WO2025017865A1PCT designated stage expired Publication Date: 2025-01-23MIRAIAL CO LTD
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Patent Information

Application Number
PCT/JP2023/026410
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-07-19
Publication Date
2025-01-23

AI Technical Summary

Technical Problem

Conventional substrate storage containers suffer from damage to substrates due to protrusions and resin pieces caused by ejector pin marks and mold release issues, which lead to level differences and potential interference during storage and transportation.

Method used

The substrate storage container design incorporates recessed areas on the support plates and lid components to accommodate protrusions, preventing direct contact with substrates and minimizing damage, while also ensuring proper alignment and spacing of substrates using support plates and retainers.

Benefits of technology

This design effectively prevents substrate damage by avoiding contact with protrusions and steps, ensuring safe storage and transportation, and facilitates easy cleaning to prevent contamination.

✦ Generated by Eureka AI based on patent content.

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  • Figure JP2023026410_23012025_PF_FP_ABST
    Figure JP2023026410_23012025_PF_FP_ABST
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Abstract

A substrate storage container 2 comprises: a container body 2 including a cylindrical wall part 20 that has one end part on the front side in which a container body opening 21 is formed and the other end part on the rear side which is closed by a back wall 22, the inner surface of the wall part 20 forming a substrate storage space 27 in which a plurality of substrates W can be stored and which communicates with the container body opening 21; and a lid body 3 that can be attached to and detached from the container body opening 21 and is capable of closing the container body opening 21. At least one of the container body 2 and the lid body 3 is composed of a member 5, 7. When the member 5, 7 is released from a mold for molding the member 5, 7, a portion of the member 5, 7 abuts a pushing pin for pushing out the member 5, 7. The portion, which abuts the edge of a substrate W, is provided with a recess 521 recessed in a direction away from the substrate W.
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Citation Information

Patent Citations

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