Adjustment jig and method for adjusting scanner

Abstract

In scanners, it is desirable for adjustments to any positional offset between the coordinate position of a workpiece and the processing focal point of laser light to to be made with increased accuracy.　This adjustment jig comprises a cylindrical jig body into which first laser light and second laser light are introduced, a first adjustment tool that can be detachably arranged on one end side of the jig body and that has a light transmission surface for use in confirming and adjusting the optical axis of the first laser light, and a second adjustment tool that can be detachably arranged on the one-end side of the jig body coaxially with the first adjustment tool and that has a movable member configured in the form of a needle such that the distal-end section thereof shows the processing focal point of the second laser light. The distance from the laser light emission port to the light transmission surface in a state in which the first adjustment tool has been positioned on the jig body, and the distance from the laser light emission port to the distal-end section of the movable member in a state in which the second adjustment tool has been positioned on the jig body are set to the focal length of the processing focal point of the second laser light emitted from the scanner.

Description

Adjustment jig and scanner adjustment method

[0001] The present invention relates to an adjustment jig and a method for adjusting a scanner.

[0002] Conventionally, laser processing systems have been known that irradiate a workpiece with a laser beam to perform processing such as welding. In these laser processing systems, a laser head equipped with a galvanometer scanner is often used as a scanner that scans the processing laser beam (see, for example, Patent Documents 1 and 2).

[0003] JP 2019-98360 A JP 2004-361862 A

[0004] In a laser processing system, when a scanner is attached to a processing machine shaft, robot arm, or the like and used, if the scanner is attached in a position displaced from its original attachment position, the laser light will be irradiated in a state where the processing point of the workpiece (hereinafter also referred to as the "coordinate origin") and the focal point of the processing laser light (hereinafter also referred to as the "processing focus") are misaligned. Because the scanner has the function of scanning the laser light over a wide area, if the scanner is not attached in a position displaced, it will not be able to draw the figure as instructed, causing problems such as a distorted processed shape.

[0005] Because machining laser light is invisible, it is impossible to visually check the machining focus. Therefore, conventionally, machining focus misalignment has been adjusted using guide laser light, laser distance meters, cross-line laser light, etc. However, because the guide laser light and the machining laser light have different chromatic aberrations due to differences in wavelength, even when they are adjusted to the same focal length, misalignment of the focal points occurs. On the other hand, laser distance meters require high-precision products, and depending on the installation position, it is difficult to accurately measure the machining focus of the laser light. Furthermore, with methods using cross-line laser light, it is difficult to visually check the machining focus misalignment unless the crossed laser light deviates by ±2 mm or more. Thus, with all of these methods, it is difficult to visually check the positional misalignment between the coordinate position of the workpiece and the machining focus of the laser light, making it difficult to accurately adjust the positional misalignment between the coordinate position of the workpiece and the machining focus of the laser light.

[0006] Therefore, it is desirable for the scanner to be able to more accurately adjust the positional deviation between the coordinate position of the workpiece and the processing focus of the laser light.

[0007] The adjustment jig of the present disclosure is an adjustment jig for a scanner capable of scanning a workpiece with laser light, and comprises: a cylindrical jig body at one end into which first laser light and second laser light irradiated from the laser light emission port of the scanner are introduced; a first adjustment tool that can be removably arranged at the other end of the jig body and has a light-transmitting surface for checking and adjusting the optical axis of the first laser light irradiated from the scanner; and a second adjustment tool that can be removably arranged at the other end of the jig body coaxially with the first adjustment tool and has a movable member whose tip is needle-shaped so as to indicate the processing focus of the second laser light irradiated from the scanner, wherein the distance from the laser light emission port to the light-transmitting surface when the first adjustment tool is arranged on the jig body and the distance from the laser light emission port to the tip of the movable member when the second adjustment tool is arranged on the jig body are set to the focal length of the processing focus of the second laser light irradiated from the scanner.

[0008] The scanner adjustment method disclosed herein is a scanner adjustment method using the adjustment jig disclosed above, and includes the steps of placing the first adjustment tool on the jig body attached to the scanner and checking and adjusting the optical axis of the first laser light, removing the first adjustment tool from the jig body and adjusting the focal point of the first laser light, and placing the second adjustment tool on the jig body attached to the scanner and abutting the tip of the movable member against a workpiece, thereby adjusting the attachment position of the scanner and the processing focus of the second laser light.

[0009] 1 is a diagram illustrating a configuration of a laser processing system 1. FIG. 2 is a diagram illustrating an optical system of a scanner 30. FIG. 3 is a diagram illustrating a configuration of an adjustment jig 100. FIG. 4 is a diagram illustrating a configuration of a jig main body 110. FIG. 5 is a cross-sectional view of a first adjustment tool 130 cut along a central axis CA1. FIG. 6 is a view of the first adjustment tool 130 as seen from the optical axis direction. FIG. 7 is a cross-sectional view of a second adjustment tool 150 cut along a central axis CA2. FIG. 8 is a side view illustrating a state in which a movable pin of the second adjustment tool 150 is most protruding. FIG. 9 is a side view illustrating a state in which a part of the movable pin of the second adjustment tool 150 is retracted. FIG. 10 is a diagram illustrating a method for adjusting the optical axis of a guide laser beam. FIG. 11 is a diagram illustrating a method for adjusting a focal point of a guide laser beam. FIG. 12 is a diagram illustrating adjustment of the optical axis of a guide laser beam. FIG. 13 is a diagram illustrating an adjustment method using the adjustment jig 100 on which the second adjustment tool 150 is arranged. FIG. 14 is a diagram illustrating an adjustment method using the adjustment jig 100 on which the second adjustment tool 150 is arranged. 12 is a diagram illustrating a jig body 120 of a second embodiment. FIG. 12 is a cross-sectional view taken along line II of FIG. 12. FIG. 12 is a diagram illustrating a laser processing system 1A using a robot 2 and a fixed stand 4. FIG. 12 is a diagram illustrating a function of teaching a processing focus of laser light using the laser processing system 1A and the fixed stand 4. FIG. 12 is a diagram illustrating a function of teaching a processing focus of laser light using the laser processing system 1A and the fixed stand 4. FIG. 12 is a diagram illustrating a function of teaching a processing focus of laser light using the laser processing system 1A and the fixed stand 4.

[0010] Hereinafter, an embodiment of an adjustment jig and a scanner adjustment method according to the present disclosure will be described. The drawings attached to this specification are all schematic diagrams, and the shape, scale, aspect ratio, and the like of each part have been modified or exaggerated from the actual product in consideration of ease of understanding, etc.

[0011] (First embodiment) Fig. 1 is a diagram illustrating the configuration of a laser processing system 1. Fig. 2 is a diagram illustrating the optical system of a scanner 30. The laser processing system 1 shown in Fig. 1 is a system that irradiates a laser beam onto a workpiece W placed on a moving stage (not shown) to perform processing such as welding. Note that the present invention is not limited to an example in which the workpiece W is placed on a moving stage.

[0012] 1, the laser processing system 1 includes a laser light source 10, a laser control unit 20, a scanner 30, a scanner control unit 40, a processing machine 50, and a processing machine control unit 60. Note that, although Fig. 1 shows a state in which an adjustment jig 100 (described later) is attached to the scanner 30, the adjustment jig 100 is removed from the scanner 30 after adjusting the attachment position of the scanner 30 and the focal point of the laser light.

[0013] The laser light source 10 is a device that generates laser light by oscillating a laser with a laser oscillator (not shown) inside the laser light source 10 in response to a command from a laser control unit 20 (described later). Examples of the laser light source 10 include a fiber laser oscillator, a pulsed laser oscillator, a direct diode laser (DDL), and a CO ２ A laser oscillator, a solid-state laser (YAG laser) oscillator, etc. can be used. The laser light source 10 outputs the generated laser light to the scanner 30.

[0014] The laser control unit 20 is a controller that controls the operation of the laser light source 10. The laser control unit 20 switches the laser oscillator of the laser light source 10 to emit a laser light for focus confirmation (hereinafter also referred to as a "guide laser light") or a laser light for processing (hereinafter also referred to as a "processing laser light") as a laser light. The guide laser light is a laser light (first laser light) in the visible light range that can be seen by an operator. The processing laser light is a laser light (second laser light) in the invisible light range that cannot be seen by an operator. In the following description, the guide laser light and the processing laser light are collectively referred to as "laser light".

[0015] In the laser control unit 20, the laser beam irradiation mode is set to either a first mode or a second mode. When the first mode is set as the laser beam irradiation mode, the laser source 10 is switched to a laser oscillator that emits a processing laser beam. When the second mode is set as the laser beam irradiation mode, the laser source 10 is switched to a laser oscillator that emits a guide laser beam.

[0016] The scanner 30 is a device for irradiating the workpiece W with the laser beam output from the laser source 10 through a laser beam outlet 37 (see FIG. 3 ). The scanner 30 includes a galvanometer scanner as a mirror mechanism. As shown in FIG. 2 , the galvanometer scanner includes a first mirror 31 and a second mirror 32 that sequentially reflect the laser beam output from the laser source 10, and rotary motors 33 and 34 that rotate these mirrors around rotation axes X1 and X2, respectively. By controlling the rotation direction and amount of the first mirror 31 and the second mirror 32, the positions of the guide laser beam on the X axis and the Y axis can be adjusted. This allows the optical axis of the guide laser beam to be aligned with a center point P of a first adjustment tool 130 (described later).

[0017] The galvanometer scanner also includes a lens 35 and a lens driving mechanism 36. The lens 35 is an optical member that focuses the laser light R output from the laser light source 10. The lens driving mechanism 36 is a device that moves the lens 35 in the optical axis direction. The operation of the lens driving mechanism 36 is controlled by a scanner control unit 40 (described later). By moving the lens 35 in the optical axis direction, the focal point of the laser light R focused by the lens 35 can be adjusted. In this embodiment, the "optical axis direction" refers to the direction along the optical axis of the laser light.

[0018] 1 , the scanner control unit 40 is a controller that controls the operation of the scanner 30. The scanner control unit 40 reads out an application program for controlling the scanner 30 (the rotary motors 33 and 34, and the lens driving mechanism 36) from a storage unit (not shown) and executes it, thereby cooperating with each piece of hardware to scan with laser light based on commands.

[0019] The processing machine 50 has the function of moving the scanner 30 linearly. The processing machine 50 includes a processing machine shaft 51, a drive motor 52, etc. The processing machine shaft 51 is a ball screw connected to the drive motor 52. The scanner 30 is attached to the processing machine shaft 51. By rotating the processing machine shaft 51 (forward or reverse) using the drive motor 52, the scanner 30 moves along the axial direction of the processing machine shaft 51. The processing machine control unit 60 is a controller that controls the operation of the processing machine 50. When processing is performed outside the irradiation range of the scanner 30, the processing machine control unit 60 rotates the processing machine shaft 51 to move the scanner 30 to the desired position.

[0020] Next, the configuration of the adjustment jig 100 attached to the scanner 30 will be described. FIG. 3 is a diagram illustrating the configuration of the adjustment jig 100. FIG. 4 is a diagram illustrating the configuration of the jig main body 110. FIG. 5A is a cross-sectional view of the first adjustment tool 130 taken along the central axis CA1. FIG. 5B is a view of the first adjustment tool 130 as seen from the optical axis direction. FIG. 6 is a cross-sectional view of the second adjustment tool 150 taken along the central axis CA2. FIG. 7A is a side view showing a state in which the movable pin of the second adjustment tool 150 is fully protruded. FIG. 7B is a side view showing a state in which the movable pin of the second adjustment tool 150 is partially retracted.

[0021] The adjustment jig 100 is a detachable jig with respect to the scanner 30, and is used to adjust the attachment position of the scanner 30 and the focal point of the laser light. As shown in Fig. 3, the adjustment jig 100 includes a jig body 110, a first adjustment tool 130, and a second adjustment tool 150. Either the first adjustment tool 130 or the second adjustment tool 150 is disposed on the jig body 110 depending on the work content. Hereinafter, the first adjustment tool 130 and the second adjustment tool 150 will also be referred to as "tools" as appropriate.

[0022] The jig body 110 is a cylindrical housing into which the laser light irradiated from the laser light exit port 37 (see FIG. 3) of the scanner 30 is introduced. As shown in FIG. 4, the jig body 110 includes a cylindrical portion 111 and a flange 112. As will be described later, the central axis CA of the jig body 110 coincides with the center of the laser light exit port 37 of the scanner 30 by attaching the adjustment jig 100 to a predetermined position on the scanner 30. Hereinafter, the direction along the central axis CA will also be referred to as the "axial direction CA."

[0023] The tube portion 111 is a hollow cylindrical member. A flange 112 is joined to one end side (upper side in the figure) of the tube portion 111. The flange 112 is a member for attaching the jig body 110 near the laser light emission port 37 of the scanner 30. The tube portion 111 and the flange 112 are made of a metal material such as aluminum, steel, or SUS. The tube portion 111 and the flange 112 may be formed integrally. A base portion of the flange 112 has a plurality of screw holes 113.

[0024] A tool holding portion 114 is provided on the other end side (lower side in the figure) of the cylindrical portion 111. The tool holding portion 114 is a portion where the first adjustment tool 130 and the second adjustment tool 150 can be detachably disposed. By inserting the first adjustment tool 130 or the second adjustment tool 150 into the tool holding portion 114, the first adjustment tool 130 or the second adjustment tool 150 can be attached to the jig body 110.

[0025] A pin confirmation window (opening) 115 is provided near the tool holding portion 114. The pin confirmation window 115 is an opening that allows visual observation of the movement of a movable pin 153 (described later) of the second adjustment tool 150 inserted into the tool holding portion 114. The pin confirmation window 115 opens in the radial direction of the tubular portion 111 and extends along the axial direction CA. Note that it is sufficient that one pin confirmation window 115 is provided near the tool holding portion 114, but multiple pin confirmation windows 115 may be provided along the outer circumferential surface of the tubular portion 111. The function of the pin confirmation window 115 will be described later.

[0026] 3 , a female threaded portion 38 that can be fitted with a setscrew 116 (described later) is provided around the laser light emission port 37 of the scanner 30. The setscrew 116 is a component for fixing the jig body 110 to the scanner 30. The jig body 110 can be fixed to the scanner 30 by aligning a screw hole 113 provided in a flange 112 of the jig body 110 with the female threaded portion 38 of the scanner 30, and then fitting the setscrew 116 inserted into the screw hole 113 into the female threaded portion 38 and tightening it. This allows the central axis CA of the jig body 110 to coincide with the center of the laser light emission port 37 of the scanner 30.

[0027] Note that the jig body 110 is not limited to being attached near the laser light exit port 37 of the scanner 30, as long as the central axis CA can be aligned with the center of the laser light exit port 37 of the scanner 30. For example, the jig body 110 may be attached to the periphery of the laser light exit port 37.

[0028] The first adjustment tool 130 is a tool for checking and adjusting the optical axis of the processing laser light emitted from the scanner 30. As shown in FIG. 5A , the first adjustment tool 130 includes an insertion portion 131, a panel holding portion 132, and a target panel 133. The insertion portion 131 is a cylindrical member that is inserted into the tool holding portion 114 of the jig body 110. The outer diameter D1 of the insertion portion 131 is set to be slightly smaller than the inner diameter d (see FIG. 4 ) of the tool holding portion 114 of the jig body 110. Therefore, when the insertion portion 131 is inserted into the tool holding portion 114 of the jig body 110, the first adjustment tool 130 can be held in the jig body 110 by the frictional force generated between the inner circumferential surface of the tool holding portion 114 and the outer circumferential surface of the insertion portion 131.

[0029] The panel holding portion 132 is a cylindrical member that holds a target panel 133 (described below). The panel holding portion 132 is joined to the insertion portion 131 at one end in the direction of the central axis CA1 (hereinafter also referred to as the "axial direction CA1"), with the insertion portion 131 and the panel holding portion 132 partially overlapping each other. Because the outer diameter D2 of the panel holding portion 132 is larger than the outer diameter D1 of the insertion portion 131, a step portion 130a is formed at the joint between the insertion portion 131 and the panel holding portion 132. When the first adjustment tool 130 is inserted into the jig main body 110 (tool holding portion 114), the end portion 114a of the tool holding portion 114 of the jig main body 110 abuts against the step portion 130a. Therefore, the first adjustment tool 130 is held in a position at the tip of the jig main body 110 (tool holding portion 114).

[0030] By disposing the first adjustment tool 130 at the tip of the jig body 110, the central axis CA1 of the first adjustment tool 130 can be aligned with the central axis CA of the jig body 110. This makes the first adjustment tool 130 coaxial with the jig body 110. As shown in FIG. 3 , the length L of the axial direction CA of the adjustment jig 100 in which the first adjustment tool 130 is disposed at the tip of the jig body 110 is set to match the working distance of the processing laser light. The working distance is the focal length of the processing focus (focus point) of the processing laser light. Note that in the first adjustment tool 130, the insertion portion 131 and the panel holding portion 132 may be integrally formed.

[0031] The panel holding portion 132 includes a holding frame 132a on the other end side in the axial direction CA1. The target panel 133 is held by the holding frame 132a. The target panel 133 is a member for aligning the optical axis of the guide laser beam emitted from the scanner 30 with the central axis CA of the jig body 110. The target panel 133 is made of a visible light transmissive material, such as acrylic, polycarbonate, polyethylene terephthalate (PET), or glass. The target panel 133 is attached to the tip side of the panel holding portion 132. The target panel 133 can be attached by, for example, bonding it to the tip side of the panel holding portion 132 with an adhesive. As shown in FIG. 5A , in the first adjustment tool 130, the position of the tip surface 132b of the panel holding portion 132 and the position of the light transmitting surface 133a of the target panel 133 are configured to coincide in the axial direction CA1.

[0032] 5B , a target mark formed by combining a cross and a circle is formed on the light-transmitting surface 133a of the target panel 133. The center point P of the target panel 133 is a mark (target center position) for aligning the optical axes of the guide laser beam and the processing laser beam. By disposing the first adjustment tool 130 on the jig body 110, the center point P of the target panel 133 coincides with the central axis CA of the jig body 110. The target mark may be formed, for example, by printing or laser engraving on the light-transmitting surface 133a of the target panel 133. Alternatively, a sticker on which the target mark is printed may be attached.

[0033] The operator can align the optical axis of the guide laser beam with the center point P of the target panel 133 by controlling the rotation of the first mirror 31 and the second mirror 32 (see FIG. 2 ) of the scanner 30. This allows the optical axis of the processing laser beam (invisible light) passing through the same optical path as the guide laser beam to be aligned with the center point P of the target panel 133.

[0034] 5B , the target mark has straight lines S1 and S2 that pass through the center point P and are perpendicular to each other, and a straight line S3 that is parallel to the straight line S2. The target mark also has concentric circles C1 and C2 that are centered on the center point P and have different diameters. When attaching the first adjustment tool 130 to the jig body 110, by aligning the extending direction of the processing machine axis 51 (see FIG. 1 ) with the extending direction of the straight line S1 or S2, it becomes easy to grasp the direction in which the guide laser beam is deviated from the center point P.

[0035] The operator can grasp the deviation between the optical axis of the guide laser beam projected on the target panel 133 and the center point P by visually observing the guide laser beam from diagonally below the first adjustment tool 130 or by projecting the guide laser beam onto a screen (not shown) installed below. The guide laser beam is projected as a beam circle with a certain spread on the target panel 133. The spread of this beam circle changes depending on the position of the focal point in the optical axis direction. By aligning the center of the beam circle of the guide laser beam with the center point P of the target panel 133, the operator can align the optical axis of the guide laser beam with the center of the beam outlet (laser beam outlet 37) of the scanner 30.

[0036] The operator can align the optical axis of the guide laser beam projected onto the target panel 133 with the center point P by controlling the operation of the scanner 30 (galvano scanner). Furthermore, by capturing an image of the beam circle of the guide laser beam projected onto the target panel 133 with a camera installed diagonally downward, the operator can adjust the optical axis of the guide laser beam to the center point P while viewing the captured image. At that time, the operator can easily grasp the direction in which the focal point of the guide laser beam projected onto the target panel 133 is displaced from the center point P by checking the position of the line S3 relative to the center point P of the target panel 133. In this way, the optical axis of the guide laser beam can be checked and adjusted by using the first adjustment tool 130.

[0037] The second adjustment tool 150 is a tool for adjusting the position of the processing focus (focus point) of the processing laser light. As shown in FIG. 6 , the second adjustment tool 150 includes an insertion portion 151, a base portion 152, a movable pin (movable member) 153, and a setscrew 154. The insertion portion 151 is a cylindrical member inserted into the tool holding portion 114 of the jig body 110. The insertion portion 151 has a first through-hole 155 extending along the central axis CA2. The first through-hole 155 is a cylindrical opening that supports the movable pin 153 so that it can move freely in the optical axis direction. The insertion portion 151 also has a female thread portion 156 that can be fitted with the setscrew 154. The female thread portion 156 extends in a direction perpendicular to the central axis CA2.

[0038] The outer diameter D3 of the insertion portion 151 is set to a dimension slightly smaller than the inner diameter d (see FIG. 4 ) of the tool holding portion 114 of the jig body 110. Therefore, when the insertion portion 151 is inserted into the tool holding portion 114 of the jig body 110, the second adjustment tool 150 can be held in the jig body 110 by the frictional force generated between the inner peripheral surface of the tool holding portion 114 and the outer peripheral surface of the insertion portion 151.

[0039] By holding the second adjustment tool 150 at the tip of the tool holder 114 after adjustment by the first adjustment tool 130, the central axis CA2 of the second adjustment tool 150 can be aligned with the central axis CA of the jig body 110. This makes the second adjustment tool 150 coaxial with the jig body 110. As shown in FIG. 3 , the axial length L of the adjustment jig 100 with the second adjustment tool 150 at its tip (the length at the position where the movable pin 153 protrudes most) is the same as the axial length L of the adjustment jig 100 with the first adjustment tool 130 at its tip. Note that in the second adjustment tool 150, the insertion portion 151 and the base portion 152 (described later) may be integrally formed.

[0040] 6 , the base portion 152 is a cylindrical member that holds the insertion portion 151. The base portion 152 has a second through hole 157 that supports the movable pin 153 so that it can move freely in the optical axis direction. The second through hole 157 is formed so as to be coaxial with the first through hole 155 in the axial direction CA2. The inner diameters of the first through hole 155 and the second through hole 157 are set to be the same.

[0041] The movable pin 153 is a component having a needle-shaped tip 153p that indicates the focal point (processing focus) of the processing laser light. When the movable pin 153 is positioned at the lowest point in the direction of gravity due to its own weight, the tip 153p protrudes the most from the base portion 152. At this time, the tip 153p of the movable pin 153 indicates the position of the processing focus of the processing laser light irradiated from the scanner 30 (see FIG. 3 ). That is, when the movable pin 153 is positioned at the lowest point in the direction of gravity due to its own weight, the length L from the laser light emission port 37 to the tip 153p of the movable pin 153 is set to the focal length of the processing focus of the processing laser light.

[0042] The movable pin 153 is composed of a pin body 153a and a head 153b. The pin body 153a has a needle-shaped tip 153p. The outer diameter of the pin body 153a is set to be slightly smaller than the inner diameters of the first through hole 155 and the second through hole 157. As a result, when the pin body 153a is inserted into the first through hole 155 and the second through hole 157, the movable pin 153 is movable in the axial direction CA2.

[0043] 7A , when the head 153b and the end face 151a of the insertion portion 151 are in contact with each other, that is, when there is no gap between the head 153b of the movable pin 153 and the end face 151a of the insertion portion 151, the movable pin 153 protrudes downward from the second adjustment tool 150 (base portion 152) to the maximum extent.

[0044] 7B , when a gap s is generated between the head 153b of the movable pin 153 and the end surface 151a of the insertion portion 151, the amount by which the movable pin 153 protrudes from the second adjustment tool 150 is shorter by the gap s than in the state of FIG. 7A where the movable pin 153 protrudes most. As shown in FIGS. 7A and 7B , the operator can visually check through the pin confirmation window 115 whether or not there is a gap between the head 153b of the movable pin 153 and the end surface 151a of the insertion portion 151 (hereinafter also referred to as the "gap of the head of the movable pin"), thereby determining whether or not the movable pin 153 protrudes most from the base portion 152.

[0045] Returning to FIG. 6 , the setscrew 154 is a component that enables or restricts movement of the movable pin 153 in the axial direction CA2. The setscrew 154 and the female thread portion 156 of the insertion portion 151 form a fixing mechanism for the movable pin 153. The setscrew 154 is formed, for example, by a hexagon socket setscrew. By engaging the setscrew 154 with the female thread portion 156 of the insertion portion 151 and tightening it until the tip abuts against the movable pin 153 (pin body 153 a), movement of the movable pin 153 in the axial direction CA2 can be restricted.

[0046] When attaching the second adjustment tool 150 to the jig body 110, for example, tightening the setscrew 154 to restrict movement of the movable pin 153 can prevent the movable pin 153 from falling off. The head of the setscrew 154 is positioned so that it is exposed from the pin confirmation window 115 of the jig body 110 when the second adjustment tool 150 is attached to the jig body 110. Therefore, with the second adjustment tool 150 attached to the jig body 110, an operator can tighten or loosen the setscrew 154 by inserting a tool (e.g., a hex wrench) into the pin confirmation window 115. Note that in FIG. 6 , the setscrew 154 and the female thread portion 156 are shown rotated 90° in the axial direction CA2 to make the configurations thereof easier to understand.

[0047] Furthermore, in a state in which the movement of the movable pin 153 is restricted by the setscrew 154, the movable pin 153 can be moved in the axial direction CA2 by loosening the setscrew 154 and moving it to a position where the tip does not abut against the movable pin 153. By loosening the setscrew 154 and enabling the movable pin 153 to move, it is possible to easily perform the tasks of adjusting the mounting position of the scanner 30 with the second adjustment tool 150 and adjusting the processing focus of the processing laser light.

[0048] By disposing the second adjustment tool 150 at the tip of the jig body 110, the central axis CA2 of the second adjustment tool 150 can be aligned with the central axis CA of the jig body 110. This makes the second adjustment tool 150 coaxial with the jig body 110. As shown in FIG. 3 , when the second adjustment tool 150 is disposed at the tip of the jig body 110 and the movable pin 153 is fully protruded, the length L of the axial direction CA of the adjustment jig 100 coincides with the working distance of the processing laser light. In other words, it is the same as the length L of the axial direction CA of the adjustment jig 100 when the first adjustment tool 130 is disposed at the tip of the jig body 110.

[0049] Next, a method for adjusting the mounting position of the scanner 30 and the processing focus of the processing laser beam using the adjustment jig 100 will be described. Fig. 8A is a diagram illustrating a method for adjusting the optical axis of the guide laser beam. Fig. 8B is a diagram illustrating a method for adjusting the focal point of the guide laser beam. Figs. 9A and 9B are diagrams illustrating adjustment of the optical axis of the guide laser beam. Figs. 10A, 10B, and 11 are diagrams illustrating an adjustment method using the adjustment jig 100 on which the second adjustment tool 150 is disposed. Of these, Figs. 10A and 10B omit the illustration of the processing machine 50.

[0050] First, as shown in FIG. 8A , the first adjustment tool 130 is placed on the jig body 110 attached to the scanner 30, and the optical axis OA of the guide laser beam is aligned with the center of the first adjustment tool 130. For example, the operator can align the optical axis OA of the guide laser beam with the center point of the target panel 133 by controlling the rotation of the first mirror 31 and the second mirror 32 (see FIG. 2 ) of the scanner 30 while visually observing the guide laser beam (beam circle) from diagonally below the first adjustment tool 130. For example, when the optical axis OA of the guide laser beam is deviated from the center point P of the target panel 133 as shown in FIG. 9A , the operator can align the optical axis OA of the guide laser beam with the center point P of the target panel 133 by controlling the mirrors (see FIG. 2 ) of the scanner 30 as shown in FIG. 9B .

[0051] After adjusting the optical axis of the guide laser beam, as shown in FIG. 8B , the first adjustment tool 130 is removed from the jig body 110, and the position of the focal point of the guide laser beam is adjusted using the focus monitor system 70. The focus monitor system 70 includes a focus monitor 71 and a power meter 72. The focus monitor 71 is a device for measuring the beam diameter of the light. The focus monitor 71 is provided at a position where the working distance WD (e.g., 500 mm) of the processing laser beam coincides with the monitor center. The power meter 72 is a device for measuring the output of the light beam. The power meter 72 is provided at a predetermined position in the direction in which the guide laser beam is irradiated.

[0052] The operator controls the position of the lens 35 (see FIG. 2) of the scanner 30 in the optical axis direction to adjust the position of the focal light so that the beam diameter of the guide laser light is minimized and the output of the guide laser light is maximized. This allows the focal point of the processing laser light (invisible light) to be aligned with the coordinate origin (the processing point of the workpiece).

[0053] After adjusting the optical axis and focal point of the guide laser beam, the first adjustment tool 130 is removed from the jig body 110 attached to the scanner 30, and the second adjustment tool 150 is placed in its place. Then, as shown in Figures 10A and 10B, the workpiece W is placed at the working position. After the workpiece W is placed at the working position, the setscrew 154 (see Figure 6) of the second adjustment tool 150 is loosened to allow the movable pin 153 to move freely in the optical axis direction.

[0054] As shown in FIG. 10A , when the distance Lx between the scanner 30 and the workpiece W is equal to the working distance WD (Lx=WD), the gap s of the head 153b of the movable pin 153 is zero (s=0). On the other hand, as shown in FIG. 10B , when the distance Lx between the scanner 30 and the workpiece W is shorter than the working distance WD (Lx<WD), a gap s of the same length as the shorter distance is generated between the head 153b of the movable pin 153 and the end face 151a of the insertion portion 151 (s≠0). Furthermore, although not shown, when the distance Lx between the scanner 30 and the workpiece W is longer than the working distance WD, the gap s of the head 153b of the movable pin 153 is zero, but a gap of the same length as the longer distance is generated between the workpiece W and the tip 153p of the movable pin 153 (see FIG. 6 ). Therefore, the operator checks the gap between the head 153b of the movable pin 153 and the gap between the workpiece W and the tip 153p of the movable pin 153 (hereinafter also referred to as the "gap between the workpiece W and the movable pin 153"), and if a gap exists, the operator can adjust the mounting position of the scanner 30 relative to the workpiece W by correcting the inclination, position, etc. of the scanner 30 relative to the workpiece W.

[0055] Next, as shown in Fig. 11 , the scanner 30 with the adjustment jig 100 (second adjustment tool 150) attached is moved along the machine axis 51 of the processing machine 50 to check for any misalignment in the attachment position of the processing machine axis 51. For example, as shown in Fig. 11 , if the processing machine axis 51 is tilted upward and to the left, moving the scanner 30 from right to left along the processing machine axis 51 will cause a misalignment g between the workpiece W and the movable pin 153, the misalignment being equivalent to the amount of tilt of the processing machine axis 51.

[0056] Furthermore, although not shown, if the processing machine axis 51 is tilted downward and to the left, moving the scanner 30 from right to left along the processing machine axis 51 will create a gap between the head 153b of the movable pin 153 and the end face 151a (see FIG. 7B) of the insertion portion 151, the gap having a length corresponding to the tilt of the processing machine axis 51. Therefore, the operator checks the gap in the head 153b of the movable pin 153 and the gap between the workpiece W and the movable pin 153, and if a gap is present, can correct the tilt of the processing machine axis 51 to appropriately adjust the mounting position of the scanner 30 relative to the workpiece W.

[0057] As described above, according to the adjustment jig 100 of the first embodiment, by disposing the first adjustment tool 130 on the jig body 110 into which the guide laser beam and the processing laser beam are introduced, it is possible to visually check the misalignment of the optical axis of the guide laser beam. Furthermore, by disposing the second adjustment tool 150 on the jig body 110, it is possible to visually check the misalignment between the attachment position of the scanner 30 and the processing focus of the processing laser beam. Therefore, by adjusting the scanner 30 using the adjustment jig 100 as a support tool for the adjustment work, it is possible to more accurately adjust the misalignment between the coordinate position of the workpiece W and the processing focus of the processing laser beam.

[0058] In the adjustment jig 100 of the first embodiment, the first adjustment tool 130 and the second adjustment tool 150 are detachably arranged on a common jig body 110 attached to the scanner 30. Therefore, compared to a configuration in which an adjustment jig in which the first adjustment tool 130 and the jig body 110 are integrated and an adjustment jig in which the second adjustment tool 150 and the jig body 110 are integrated are prepared and each adjustment jig is attached to the scanner 30, it is possible to minimize errors in the optical axis of the guide laser beam.

[0059] In the adjustment jig 100 of the first embodiment, the light transmitting surface 133 a (target panel 133) of the first adjustment tool 130 has a target mark indicating the target center position (center point P) of the guide laser beam and the processing laser beam. This allows the operator to accurately align the optical axes of the guide laser beam and the processing laser beam with the center of the beam outlet (laser beam outlet 37) of the scanner 30.

[0060] In the adjustment jig 100 of the first embodiment, the second adjustment tool 150 includes a movable pin 153. When the movable pin 153 is positioned at the lowest position in the direction of gravity due to its own weight, the length L from the laser light emission port 37 to the tip 153p of the movable pin 153 is set to the focal length of the processing focus of the processing laser light. Therefore, the operator can more appropriately adjust the position of the scanner 30 relative to the workpiece W by checking the gap of the head 153b of the movable pin 153 and the gap between the workpiece W and the movable pin 153.

[0061] In the adjustment jig 100 of the first embodiment, the second adjustment tool 150 includes a setscrew 154 and a female thread portion 156 as a fixing mechanism capable of restricting movement of the movable pin 153 in the optical axis direction. According to this configuration, movement of the movable pin 153 in the axial direction CA2 can be restricted by tightening the setscrew 154 clockwise until it abuts the movable pin 153. Therefore, when attaching the second adjustment tool 150 to the jig body 110, for example, it is possible to prevent the movable pin 153 from falling off. Furthermore, by loosening the setscrew 154 that has been tightened until it abuts the movable pin 153, the movable pin 153 can be made movable in the optical axis direction. Furthermore, by making the movable pin 153 movable in the optical axis direction, the movable pin 153 can be replaced.

[0062] In the adjustment jig 100 of the first embodiment, the jig body 110 is provided with a pin confirmation window (opening) 115 through which the movement of the movable pin 153 of the second adjustment tool 150 can be visually observed. Therefore, with the second adjustment tool 150 placed on the jig body 110, the operator can easily confirm whether the movable pin 153 has moved, the amount of movement, etc. Furthermore, with the second adjustment tool 150 attached to the jig body 110, the operator can tighten or loosen the set screw 154 by inserting a tool into the pin confirmation window 115.

[0063] Second Embodiment The adjustment jig 100A of the second embodiment differs from that of the first embodiment in the configuration of the jig body 120. The other configurations of the adjustment jig 100A of the second embodiment are the same as those of the first embodiment. Therefore, in the second embodiment, only the jig body 120 is illustrated, and the entire adjustment jig 100A is not illustrated. Furthermore, in the description and drawings of the second embodiment, members equivalent to those of the first embodiment are assigned the same reference numerals as those of the first embodiment, and redundant description will be omitted.

[0064] FIG. 12 is a diagram illustrating a jig body 120 according to the second embodiment. FIG. 13 is a cross-sectional view taken along line II of FIG. 12. As shown in FIG. 12, the jig body 120 according to the second embodiment includes a first cylindrical portion 121, a second cylindrical portion 122, and a flange 112. The first cylindrical portion 121 is a hollow cylindrical member disposed on the laser light introduction side of the jig body 120. A flange 112 is joined to one end (the left side in the figure) of the first cylindrical portion 121. The configuration of the flange 112 is the same as that of the first embodiment. As shown in FIG. 13, the first cylindrical portion 121 is provided with a female thread portion 123 that can be fitted with a setscrew 125 (described below).

[0065] The second cylindrical portion 122 is a hollow cylindrical member that is arranged on the laser light emission side of the jig body 120. The jig body 120 of the second embodiment is used in a state in which a portion of the second cylindrical portion 122 is fitted onto the first cylindrical portion 121. The inner diameter and the outer diameter of the second cylindrical portion 122 are set to dimensions that allow the first cylindrical portion 121 to move smoothly inside the second cylindrical portion 122.

[0066] The second cylindrical portion 122 has an adjustment screw hole 124 and a pin confirmation window 115. The adjustment screw hole 124 is an elongated hole into which a setscrew 125 is inserted, and is open radially and extends along the axial direction CA. The setscrew 125 is a component for enabling or restricting movement of the second cylindrical portion 122, which is extrapolated onto the first cylindrical portion 121, in the axial direction CA. Note that the mechanism consisting of the female thread portion 123, the adjustment screw hole 124, and the setscrew 125 may be provided in at least one location on the jig body 120. The configuration of the pin confirmation window 115 is the same as in the first embodiment.

[0067] 13 , by inserting the setscrew 125 through the adjustment screw hole 124 of the second cylindrical portion 122 and engaging and tightening the setscrew 125 with the female thread portion 123 of the first cylindrical portion 121, it is possible to restrict movement of the second cylindrical portion 122 in the axial direction CA relative to the first cylindrical portion 121. Furthermore, by loosening the setscrew 125 while the movement of the second cylindrical portion 122 is restricted, it is possible to move the second cylindrical portion 122 in the axial direction CA relative to the first cylindrical portion 121.

[0068] The operator can adjust the length L of the adjustment jig 100A in the axial direction CA by loosening the setscrew 125 and making the second cylindrical portion 122 movable in the axial direction CA. After adjusting the length L of the adjustment jig 100A in the axial direction CA to a desired dimension, the operator can fix the position of the second cylindrical portion 122 in the axial direction CA by tightening the setscrew 125.

[0069] According to the adjustment jig 100A of the second embodiment, the length of the jig body 120 in the optical axis direction can be adjusted, so that even when performing processing work with different working distances, adjustment work can be performed without changing the jig body. Moreover, compared to a configuration in which the jig body is changed depending on the working distance, errors in the optical axis of the guide laser beam can be minimized.

[0070] Third Embodiment The adjustment jig 100 of the first embodiment can also be applied to a laser processing system in which the scanner 30 is attached to a robot arm for operation. Fig. 14 is a diagram illustrating a laser processing system 1A using a robot 2 and a fixed stand 4. Figs. 15A to 15C are diagrams illustrating a function of teaching the processing focus of laser light using the laser processing system 1A and the fixed stand 4. Note that the robot control device 3 is not shown in Figs. 15A to 15C.

[0071] As shown in FIG. 14 , the laser processing system 1A includes a robot 2 and a robot control device 3. The robot 2 processes a workpiece by irradiating it with laser light, and is configured, for example, by an articulated robot. A scanner 30 is attached to the tip of the arm of the robot 2. The robot 2 can move the scanner 30 to any position in the workspace and in any orientation by driving servo motors (not shown) provided on each joint axis. An adjustment jig 100 is attached to the scanner 30. The robot control device 3 is a controller that controls the operation of the robot 2. The robot control device 3 is connected to a numerical control device (not shown) and controls the operation of the robot 2 in accordance with robot command signals transmitted from the numerical control device.

[0072] The fixed stand 4 is a tool for teaching the robot 2 the machining point (coordinate origin) of the workpiece. In this embodiment, "teaching" refers to adjusting the tip 153p of the second adjustment tool 150 so that it coincides with the same point (here, the pin tip 4a of the fixed stand 4) regardless of the posture of the robot 2. Although not shown, before placing the second adjustment tool 150 on the adjustment jig 100, the first adjustment tool 130 is placed and the optical axis and focal point of the laser light are adjusted, as in the first embodiment.

[0073] When teaching the robot 2 a processing point of the workpiece, the robot control device 3 controls the robot 2 from three or six directions to record the position where the tip 153p of the second adjustment tool 150 coincides with the tip of the pin of the fixed stand 4. In the case of control from three directions, the focal point of the scanner 30 (processing focus) can be aligned with the tip of the second adjustment tool 150 by moving the X, Y, and Z axes (Cartesian coordinate system). In the case of control from six directions, the focal point of the scanner 30 can be aligned with the tip of the second adjustment tool 150 by moving the w, p, and r axes (rotating coordinate system) in addition to the X, Y, and Z axes.

[0074] 15A to 15C show examples in which the tip of the second adjustment tool 150 is aligned with the tip of the pin of the fixed stand 4 in different postures. In this embodiment, the operator can more appropriately adjust the position of the scanner 30 relative to the tip of the pin of the fixed stand 4, which is the processing point of the workpiece, by checking the gap in the head 153b of the movable pin 153 (see FIG. 6) and the gap between the tip of the pin of the fixed stand 4 and the tip 153p of the movable pin 153 (see FIG. 6) in each posture.

[0075] In a laser processing system in which the scanner 30 is attached to a robot arm for operation, the adjustment jig 100 on which the first adjustment tool 130 is arranged can be used to teach the robot 2 the processing point of the workpiece (coordinate origin). Specifically, in each posture of the robot, the center of the target mark projected onto the target panel 133 (target mark) of the first adjustment tool 130 is photographed by a camera, and the position where the optical axis and focal point of the guide laser beam coincide with the processing focus of the processing laser beam is recorded, thereby teaching the robot 2 the processing point of the workpiece.

[0076] (Modifications) Although the embodiments of the present disclosure have been described above, the present disclosure is not limited to the above-described embodiments. Various additions, substitutions, modifications, partial deletions, etc. are possible in these embodiments without departing from the gist of the present disclosure or the spirit of the present disclosure derived from the content of the claims and their equivalents. Furthermore, these embodiments can also be implemented in combination. For example, in the above-described embodiments, the order of each operation and the order of each process are shown as examples and are not limited to these.

[0077] In the embodiment, an example has been described in which tools are held on the jig body 110 by frictional force generated between the inner peripheral surface of the tool holding portion 114 of the jig body 110 and the outer peripheral surface of the insertion portion of each tool, but the structure for detachably holding tools on the jig body 110 is not limited to this example. For example, the inner peripheral surface of the tool holding portion 114 of the jig body 110 and the outer peripheral surface of the insertion portion of each tool may be formed with matable male and female threads, and the tools may be threaded into the jig body 110 to be detachably held thereon. Furthermore, the tool holding portion 114 of the jig body 110 and the insertion portion of each tool may be detachably connected with a fixing screw and a nut.

[0078] In the embodiment, the movable pin 153 may be partially or entirely colored to make it easier to visually recognize the movement of the movable pin 153 in the optical axis direction. Furthermore, a scale may be provided on the pin body 152a (see FIG. 6) of the movable pin 153 so that the amount of movement of the movable pin 153 can be measured. Furthermore, a contact sensor may be provided on the second adjustment tool 150 to electrically detect whether or not there is a gap in the movable pin 153. Similarly, a displacement sensor or the like may be provided on the second adjustment tool 150 to electrically measure the amount of movement of the movable pin 153.

[0079] The following supplementary note is further disclosed regarding the above embodiment: (Supplementary note 1) An adjustment jig (100) for a scanner (30) capable of scanning a workpiece with a laser beam, comprising: a cylindrical jig body (110) into which a first laser beam and a second laser beam irradiated from a laser beam outlet (37) of the scanner are introduced at one end; a first adjustment tool (130) detachably disposed at the other end of the jig body and having a light-transmitting surface (133a) for checking and adjusting the optical axis of the first laser beam irradiated from the scanner; and a first adjustment tool (130) detachably disposed at the other end of the jig body coaxially with the first adjustment tool. and a second adjustment tool (150) having a movable member (153) configured in a needle shape so that a tip (153p) indicates a processing focus of the second laser light irradiated from the scanner, wherein the distance from the laser light outlet to the light transmitting surface in a state where the first adjustment tool is disposed on the jig body and the distance from the laser light outlet to the tip of the movable member in a state where the second adjustment tool is disposed on the jig body are set to a focal length of the processing focus of the second laser light irradiated from the scanner. (Appendix 2) The light transmitting surface (133a) of the first adjustment tool (130) has target marks that indicate target center positions of the first laser light and the second laser light. (Supplementary Note 3) When the movable member (153) of the second adjustment tool (150) is positioned at the lowest position in the direction of gravity due to its own weight, the distance from the laser light outlet (37) to the tip end (153p) of the movable member is set to the focal length of the processing focus of the second laser light irradiated from the scanner (30). (Supplementary Note 4) The second adjustment tool (150) has fixing mechanisms (154, 156) that can restrict movement of the movable member (153) in the optical axis direction. (Supplementary Note 5) The jig main body (110) has an opening (115) that allows visual observation of movement of the movable member (8153) in the optical axis direction when the second adjustment tool (150) is placed. (Supplementary Note 6) The jig main body (110) is configured so that its length in the optical axis direction is adjustable.(Appendix 7) A method for adjusting a scanner using the adjustment jig (100) described in any one of Appendices 1 to 6, comprising the steps of: placing the first adjustment tool on the jig body attached to the scanner and checking and adjusting the optical axis of the first laser light; removing the first adjustment tool from the jig body and adjusting the focal point of the first laser light; and placing the second adjustment tool on the jig body attached to the scanner and abutting the tip of the movable member against a workpiece, thereby adjusting the attachment position of the scanner and the processing focal point of the second laser light.

[0080] 1, 1A: laser processing system, 10: laser light source, 20: laser control unit, 30: scanner, 37: laser light emission port, 100, 100A: adjustment jig, 110: jig body, 115: pin confirmation window, 130: first adjustment tool, 133a: light transmission surface, 150: second adjustment tool, 153: movable pin, 154: setscrew 154, 156: female thread portion

Claims

1. An adjustment jig for a scanner capable of scanning a workpiece with a laser light, comprising: a cylindrical jig body at one end into which a first laser light and a second laser light irradiated from the laser light output port of the scanner are introduced; a first adjustment tool that can be removably arranged at the other end of the jig body and has a light-transmitting surface for checking and adjusting the optical axis of the first laser light irradiated from the scanner; and a second adjustment tool that can be removably arranged at the other end of the jig body coaxially with the first adjustment tool and has a movable member whose tip is configured in a needle shape so as to indicate the processing focus of the second laser light irradiated from the scanner, wherein the distance from the laser light output port to the light-transmitting surface when the first adjustment tool is arranged on the jig body and the distance from the laser light output port to the tip of the movable member when the second adjustment tool is arranged on the jig body are set to the focal length of the processing focus of the second laser light irradiated from the scanner.

2. The adjustment jig according to claim 1, wherein the light transmitting surface of the first adjustment tool has a target mark indicating a target center position of the first laser light and the second laser light.

3. An adjustment jig as described in claim 1 or 2, wherein when the movable member of the second adjustment tool is positioned at the lowest position in the direction of gravity due to its own weight, the distance from the laser light emission port to the tip of the movable member is set to the focal length of the processing focus of the second laser light irradiated from the scanner.

4. An adjustment jig as described in any one of claims 1 to 3, wherein the second adjustment tool has a fixing mechanism capable of restricting movement of the movable member in the optical axis direction.

5. An adjustment jig as described in any one of claims 1 to 4, wherein the jig body has an opening through which the movement of the movable member in the optical axis direction can be visually observed when the second adjustment tool is placed.

6. An adjustment jig as set forth in any one of claims 1 to 5, wherein the jig body is configured so that the length in the optical axis direction is adjustable.

7. A method for adjusting a scanner using an adjustment jig as defined in any one of claims 1 to 6, comprising the steps of: placing the first adjustment tool on the jig body attached to the scanner, and checking and adjusting the optical axis of the first laser light; removing the first adjustment tool from the jig body, and adjusting the focal point of the first laser light; and placing the second adjustment tool on the jig body attached to the scanner, and abutting the tip of the movable member against a workpiece, thereby adjusting the mounting position of the scanner and the processing focus of the second laser light.

Images