Gas inlet valve having a bellows drive

Abstract

The invention relates to a gas inlet valve (1) for the controlled introduction of a fluid into a vacuum process chamber, the gas inlet valve (1) having: a gas application unit (2) with a gas inlet (21), a gas outlet (22) and an inner volume (23); an adjusting element (31) that projects into the gas application unit (2) and is equipped with a valve plate (32) which is arranged inside the inner volume (23); a drive unit (3) which is coupled to the adjusting element (31) outside the gas application unit (2) and provides an adjustment of the adjusting element (31) along the adjustment axis (V), wherein the valve plate (32) can be brought into an open position in the opening direction (O) by means of the drive unit (3), in which open position the valve plate (32) is spaced apart from a sealing surface (24) and a fluid passage is provided; and a flexible sealing element (25). The gas application unit (2) has a temperature control arrangement with a temperature control body (11) at least partially surrounding the adjusting element (31), and with at least one heating element (12) which is at least partially enclosed by the temperature control body (11). The temperature control body (11) is arranged in such a way as not to be in contact with the adjusting element (31).

Description

GAS INLET VALVE WITH BELLOWS ACTUATOR FIELD OF THE INVENTION

[0001] The present invention relates to a gas inlet valve for the inlet of a fluid into a vacuum process chamber. BACKGROUND OF THE INVENTION

[0002] Such vacuum process chambers are used for the manufacturing of integrated circuits (ICs), semiconductors, flat panels, or substrates. For at least some of the process steps, the vacuum chambers are flooded with a process gas after evacuation. Manufacturing must take place in a protected atmosphere and, if possible, without the presence of contaminating particles. Evacuation is achieved using a vacuum valve that connects the vacuum process chamber to a vacuum pump and differs in its design and technical requirements from a gas inlet valve.

[0003] Furthermore, such vacuum chambers have at least one or two vacuum chamber openings through which the elements to be processed can be guided into and / or out of the vacuum chamber. For example, in a manufacturing facility for semiconductor wafers or liquid crystal substrates, the highly sensitive semiconductor or liquid crystal elements sequentially pass through several vacuum processing chambers, in each of which the elements are processed using a separate processing device.

[0004] The element can, for example, be placed by a robot on extended support pins of a lifting system and lowered onto a carrier, e.g., a potential plate (chuck). The robot arm, which typically carries the element, is then extended out of the chamber. The pins can be lowered after the element has been placed and are then separated from it, meaning there is no contact between the pins and the element. After removing the robot arm, and closing the chamber, the chamber is usually evacuated and then filled with a process gas, after which the processing of the element can begin.

[0005] A gas inlet valve is provided for filling the process chamber with one or more specific process gases or precursors. This enables various substrate processing operations, such as the targeted deposition of a material layer onto a wafer or etching of the wafer surface. Specifically, a defined quantity of process fluid is introduced into the process chamber, and a reaction between the process fluid and the wafer is initiated or accelerated, for example, by means of a plasma.

[0006] Gas inlet valves are specifically designed for the defined control or regulation of gas flow and are located, for example, within a pipe system between a vacuum process chamber (or a transfer chamber) and a gas source, the atmosphere, or another vacuum process chamber. The opening cross-section of such gas inlet valves is generally smaller than that of a vacuum valve.

[0007] Depending on the application, gas inlet valves can be used not only to completely open and close an opening, but also to control or regulate a flow by continuously adjusting the opening cross-section between an open position and a gas-tight closed position.

[0008] When introducing the process gas into the vacuum chamber, minimal flow disturbances within the chamber and rapid, precise filling are of paramount importance. For example, a defined quantity or volume of a specific process gas should be introduced into the chamber with each opening cycle of the gas inlet valve. This requires both rapid valve actuation and precise adjustment of the valve opening cross-section.

[0009] Some processing steps are typically carried out at elevated process temperatures, especially above 100°C or above 150°C.

[0010] Inhomogeneous fluid flows or fluid distributions or undesirable deposition processes on the valve can result due to a temperature difference between the process gas and the valve components in contact with this process gas.

[0011] One consequence of such undesirable deposition processes in particular can be a shortened service life of a gas inlet valve or a reduced reliability and precision with increasing operating time, in particular with regard to the amount of gas applied through the valve per process cycle. OBJECT OF THE INVENTION

[0012] Therefore, it is an object of the invention to provide an improved gas inlet valve for a vacuum process to avoid the aforementioned disadvantages.

[0013] In particular, the task is to provide a fast and continuous precise flooding of a vacuum process chamber with a process gas using the gas inlet valve over a wide temperature range. SUMMARY OF THE INVENTION

[0014] The present invention relates to a gas inlet valve with a device for controlling the temperature of the valve, in particular the components of the valve that come into contact with a process gas that can be applied through the valve. The temperature control arrangement is designed and arranged such that said components can be efficiently heated (and / or cooled). The arrangement is configured to avoid physical contact with moving parts of the valve, while still providing comparatively excellent and advantageous temperature control.

[0015] The temperature control arrangement of a gas inlet valve according to the invention has a temperature control element that at least partially surrounds an adjusting element (e.g., valve stem) and a heating element for temperature control of the Both the temperature control body and the heating element are contactless relative to the adjustment element.

[0016] Another aspect of the invention relates to the design of the components of the valve to be temperature-controlled, in particular a sealing element. The sealing element, which is in particular designed as a flexible membrane, can be coated in such a way as to provide advantageous heat absorption by the membrane.

[0017] The present invention thus relates to a gas inlet valve for the controlled inlet or flow of a fluid into a vacuum process chamber, wherein the gas inlet valve comprises a gas application unit with a gas inlet, a gas outlet, and an internal volume. The internal volume connects the gas inlet and the gas outlet. The gas application unit also has a sealing surface in the internal volume.

[0018] In the context of the present invention, a fluid is understood to mean at least one gas, a gas mixture, or a precursor-containing gas. The fluid can, in particular, be a process or precursor gas.

[0019] The gas inlet valve further comprises an adjusting element with a valve plate, wherein the adjusting element extends into the gas application unit and the valve plate is arranged within the internal volume. The adjusting element is mounted for movement along an adjusting axis in the closing and opening directions.

[0020] The gas inlet valve also has a drive unit coupled to the adjustment element outside the gas application unit and providing adjustment of the adjustment element along the adjustment axis. The valve disk can be moved in the opening direction by means of the drive unit into an open position, in which the valve disk is spaced from the sealing surface and a fluid flow is provided. The drive unit can have an electric motor or a pneumatic system for adjusting the adjustment element.

[0021] Furthermore, a flexible sealing element is provided, which is connected to the gas application unit and to the adjusting element, and which The drive unit is atmospherically separated from the internal volume, in particular by sealing it. The sealing element is specifically designed as a metallic membrane.

[0022] According to the invention, the gas application unit comprises a temperature control arrangement. The temperature control arrangement has a temperature control body that at least partially, in particular completely, surrounds the adjustment element and at least one heating element, in particular a plurality of heating elements, which is at least partially, preferably at least largely, enclosed by the temperature control body. The temperature control body is arranged in a contactless manner relative to the adjustment element.

[0023] The invention thus relates to a gas inlet valve with a temperature control concept that advantageously provides temperature control, particularly through convection of thermal energy from the temperature control body to the valve component to be temperature controlled. At the same time, the contactless arrangement of the temperature control body prevents friction or grinding between the parts and thus the formation of unwanted particles. Furthermore, the temperature control body remains stationary in the valve, which can advantageously improve the service life of the temperature control assembly and the valve.

[0024] In one embodiment, the temperature control body may comprise a material with a thermal conductivity of greater than 20 W / (m*K), in particular greater than 200 W / (m*K), or be made of this material.

[0025] In one embodiment, the temperature control element can be made of copper or be manufactured from copper and / or be ring-shaped. Alternatively or additionally, the temperature control element can be made of, for example, silver, gold, and / or aluminum. These materials can provide advantageous thermal conductivity.

[0026] This shape and / or material selection of the temperature control element ensures advantageous heat transfer from the element, particularly to the adjacent or enclosed adjusting element or sealing element. The copper material, in particular, allows for more efficient heat transfer compared to the typical valve material, steel. (Heat radiation) is provided. Due to the ring shape of the body, the adjusting element can be heated efficiently from all sides. Accordingly, the sealing element can directly receive the heat radiation emanating from the temperature control element on its entire side facing the temperature control element, through the underside of the temperature control ring, which can correspond to the shape of the sealing element.

[0027] According to one embodiment, the temperature control element can have at least one first recess for receiving the at least one heating element, and the first recess can correspond in shape and / or spatial extent to the shape or spatial extent of the at least one heating element. The at least one heating element can accordingly be inserted into the first recess or be at least partially located therein.

[0028] The recess can, for example, be provided as a bore in the tempering body.

[0029] In particular, the heating element can be integrated into the temperature control body, i.e., completely enclosed by the temperature control body, with only one electrical contact, e.g. a cable, extending through the temperature control body and provided for and connected to the heating element.

[0030] In particular, the heating element can be designed as a heating rod, a heating cartridge or a Peltier element.

[0031] The combination of heating element and temperature control element, and in particular the choice of material for the temperature control element, enables rapid, homogeneous and therefore efficient heating of the entire temperature control element.

[0032] In one embodiment, the gas inlet valve can have a sensor, in particular a thermocouple, for generating temperature information. The sensor can, for example, be arranged on the temperature control element or on or in the adjusting element.

[0033] In particular, the temperature control body can have at least one second recess for accommodating the sensor, and the second recess can correspond in shape and / or spatial extent to a shape or spatial extent of the sensor. The sensor can be inserted into the second recess or at least partially located therein. Such an arrangement of the sensor enables direct temperature measurement of the temperature control body.

[0034] In particular, if the temperature control body is annular, the second recess can be arranged opposite the first recess with respect to a center point of the ring. Due to a largely homogeneous heat distribution in the temperature control body, the heating of the body generated by the heating element in the first recess can be determined as the (current) minimum temperature for the entire body.

[0035] In one embodiment, the gas inlet valve can have a control unit with a temperature control functionality, wherein in one embodiment of the temperature control functionality, current temperature information for the temperature control body, the adjustment element and / or the flexible sealing element is detected by means of the sensor, and the heating element is controlled based on the current temperature information and a target temperature.

[0036] By means of such a control, after specifying a setpoint for the temperature, a targeted temperature control of the valve can be provided, for example, according to the temperature requirements for a machining process or the gas temperature.

[0037] As already mentioned above, by bringing the valve temperature closer to the temperature of a process gas used, a reduction or (complete) avoidance of deposits of gas particles on the valve is provided.

[0038] According to one embodiment, the temperature control body can have one or more further recesses for receiving a further heating element and / or a further sensor. The further heating element or the further sensor can be inserted into the one or more further recesses.

[0039] An additional heating element can further improve the heat distribution in the temperature control body and the temperature control speed of the temperature control body.

[0040] Accordingly, the accuracy of temperature determination can be further improved by using an additional sensor.

[0041] Both of these effects can contribute to faster and more precise control of the temperature of the temperature control body.

[0042] The recesses are uniformly distributed along the ring, particularly with respect to the ring shape of the temperature control body, i.e., the recesses have correspondingly equal distances to their respective neighboring recesses or have correspondingly equal intermediate angles with respect to a ring center point.

[0043] In one embodiment, the first and / or second and / or further recesses can have a through-opening in the direction of the flexible sealing element. Such a through-opening can serve as an assembly aid, preventing any air pockets when inserting a heating element or sensor into the recess and providing ventilation through the through-opening.

[0044] Furthermore, the temperature of the sealing element can be measured directly using the sensor, i.e., without the intermediate temperature control element. Accordingly, heat transfer from the heating element to the sealing element can be provided just as directly.

[0045] According to one embodiment, the flexible sealing element can be designed as a flexible membrane, wherein the flexible membrane is connected to the adjusting element by means of clamps and the flexible membrane is formed from a metal-containing core material. For clamping the membrane The adjusting element, particularly at the transition to the valve disc, can be designed in two parts, and the valve disc can be screwed to the valve stem, with the diaphragm being clamped in this transition by the screw connection. This also allows for easy replacement of the diaphragm, e.g., in case of unwanted wear.

[0046] In one embodiment, the flexible sealing element and / or the adjusting element can have a surface coating that provides a thermal conductivity that is greater than the thermal conductivity of the core material of the sealing element or the adjusting element, in particular greater than 20 W / (m*K), in particular greater than 100 W / (m*K), in particular greater than 200 W / (m*K).

[0047] In particular, the surface coating can have a layer thickness in a range of 10 pm to 60 pm.

[0048] In particular, the surface coating may contain or be formed from silver, copper, gold or aluminum or a combination thereof.

[0049] Such a coating of the valve components to be tempered, i.e., the sealing element and / or the adjusting element, results in improved, i.e., faster and more efficient heat absorption of the respective component. Furthermore, improved and homogeneous heat distribution within the respective component can be provided.

[0050] In particular, the coating allows the structural properties of the respective component, such as elasticity, robustness, strength, dimensional stability, etc., to be maintained in the desired manner and also improves temperature control.

[0051] The invention also relates to a gas inlet valve for the controlled inlet or flow of a fluid into a vacuum process chamber, wherein the gas inlet valve comprises a gas application unit with a gas inlet, a gas outlet, and an internal volume. The internal volume connects the gas inlet and the gas outlet. The gas application unit also has a sealing surface in the internal volume.

[0052] The gas inlet valve further comprises an adjusting element with a valve plate, wherein the adjusting element extends into the gas application unit and the valve plate is arranged within the internal volume. The adjusting element is mounted for movement along an adjusting axis in the closing and opening directions.

[0053] The gas inlet valve also has a drive unit coupled to the adjustment element outside the gas application unit and providing adjustment of the adjustment element along the adjustment axis. The valve disk can be moved in the opening direction by means of the drive unit into an open position, in which the valve disk is spaced from the sealing surface and a fluid flow is provided. The drive unit can have an electric motor or a pneumatic system for adjusting the adjustment element.

[0054] Furthermore, a flexible sealing element is provided, which is connected to the gas application unit and the adjustment element and atmospherically separates, in particular seals, the drive unit from the interior volume. The sealing element is designed, in particular, as a metallic membrane.

[0055] According to the invention, the flexible sealing element is designed as a flexible membrane, the flexible membrane is connected to the adjusting element by means of clamps and is formed from a metal-containing core material, and the flexible membrane has a surface coating that provides a thermal conductivity that is greater than the thermal conductivity of the core material.

[0056] In one embodiment, the thermal conductivity of the surface coating may be greater than 20 W / (m*K), in particular greater than 100 W / (m*K) or 200 W / (m*K).

[0057] In one embodiment, the surface coating may have a layer thickness of at least 10 pm, in particular at most 60 pm.

[0058] In one embodiment, the surface coating may contain or be formed from silver, copper, gold, or aluminum, or a combination thereof.

[0059] The above statements regarding the advantages of coating the membrane apply analogously.

[0060] By means of a design of the valve according to the invention, it is particularly advantageous for use at elevated temperatures, whereby any deposit processes on the valve can be avoided or reduced and thus the service life of the valve can be extended.

[0061] A gas inlet valve according to the invention can have a valve housing. The adjusting element and the temperature control element can extend parallel to a wall of the valve housing.

[0062] The adjusting element and the temperature control element can be arranged radially apart from each other within the valve housing and each extend parallel to a wall of the valve housing.

[0063] In one embodiment of the gas inlet valve, the sealing surface, the valve disk and the sealing element may have a circular cross-section, wherein the sealing surface is formed by a shoulder in the internal volume.

[0064] In particular, the valve disk divides the internal volume in the closed position into a first and a second partial internal volume, with the gas inlet having free access to the first partial volume and the gas outlet having free access to the second partial volume. In this arrangement, the gas outlet can be connected to a vacuum chamber, in particular having free access to the vacuum process chamber, and the gas inlet can, in particular, have free access to a process gas source. BRIEF DESCRIPTION OF THE DRAWINGS

[0065] Further advantages of the present invention are evident from the detailed description and the drawings.

[0066] Figure 1 shows an embodiment of a gas inlet valve according to the invention in a sectional view;

[0067] Figure 2 shows the gas inlet valve according to the invention from Figure 1 in a side view; and

[0068] Figure 3 shows the gas application unit of a gas inlet valve according to the invention in a cross section orthogonal to the adjustment axis. DETAILED DESCRIPTION OF THE DRAWINGS

[0069] Figures 1 and 2 show an embodiment of a gas inlet valve 1 according to the invention. Figure 1 shows the valve 1 in a sectional view to illustrate the inventive concept. Figure 2 shows the gas inlet valve 1 in a side view.

[0070] The gas inlet valve 1 has a gas application unit 2, which in turn has a gas inlet 21, a gas outlet 22, and an internal volume 23, wherein the internal volume 23 has free access to, or connects, the gas inlet 21 and the gas outlet 22. The gas application unit 2 has a sealing surface 24 in the internal volume 23.

[0071] The gas inlet valve 1 also has an adjusting element 31 with a valve plate 32, wherein the adjusting element 31 protrudes into the inner volume 23 and is adjustably mounted outside the gas application unit (2). The valve plate 32 is arranged within the inner volume 23 and is movably mounted along an adjusting axis V in the closing direction S and in the opening direction O.

[0072] In the closed position shown, the valve disk 32 is pressed against the sealing surface 24. A disk-side seal 33, e.g., a gasket, serves to ensure a gas-tight seal. The seal 33 can be arranged (as shown here) on the disk 32 or (in other embodiments) on the sealing surface 24. This seal 33 consists in particular of an elastomer, thermoplastic, metal, etc., and can have a shape adapted to the shape of the disk 32 (e.g., an O-ring) or can be vulcanized to the disk 32.

[0073] The gas inlet valve 1 further comprises a flexible sealing element 25, which in the example shown is designed as a membrane, in particular as a metal membrane. The sealing element 25 is connected to the gas application unit 2 and to the adjustment element 31 and thus seals the internal volume 23. The flexible membrane 25 thus provides a flexible seal for the internal volume 23, in particular with respect to a drive unit 3, i.e., the seal remains intact even when the adjustment element 31 moves. The sealing element 25 is connected to the adjustment element 31 by clamping.

[0074] The gas inlet valve 2 has a corresponding drive unit 3, which is coupled to the adjusting element 31 outside the gas application unit 2 and is capable of adjusting the adjusting element 31 along the adjustment axis V. The valve disc 32 can be moved by means of the drive unit 3 into an open position in the opening direction O, in which the valve disc 32 is spaced away from the sealing surface 24, thus allowing gas to flow between the gas inlet 21 and the gas outlet 22 through the internal volume 23.

[0075] The gas application unit 2 also includes a temperature control arrangement. This arrangement is designed to control the temperature of the gas application unit 2, in particular the diaphragm 25, as well as the valve disc 32 and the adjusting element 31. This allows the components to be temperature-controlled, and in particular heated, to be adapted to a specific production process and a process gas of a specific temperature.

[0076] In the illustrated embodiment, the temperature control arrangement comprises a temperature control element 11 that surrounds the adjusting element 31. The temperature control element 11 is designed as an annular copper element. The copper ring 11 has two opposing recesses designed to accommodate a heating element and a sensor. The recesses are, in particular, cylindrical, especially as straight circular cylinders. One side of the recess can be open, depending on the size and shape of the base. The opposite side of the recess can have a comparatively smaller opening 13.

[0077] The temperature control body 11 is arranged contactlessly relative to the adjustment element 31. Heat transfer from the temperature control body 11 to the membrane 25 and / or the valve plate 32 and / or the adjustment element 31 is provided here in particular by means of convection or thermal radiation.

[0078] The temperature control element 11 is also arranged without contact relative to the membrane 25.

[0079] The temperature control body 11 accordingly has a surface adapted to the extension of the adjustment element 31, which faces in the direction of the adjustment element 31 and thus provides efficient and reliable heat transfer. A corresponding shape in the direction of the membrane 25 and arrangement relative to the membrane 25 also ensures efficient and reliable heat transfer to the membrane 25.

[0080] The arrangement of the temperature control element 11, the adjusting element 31, and especially the diaphragm 25 without contact or touching allows frictionless movement of the adjusting element 31 and thus prevents the formation of any particles. This can further improve the potential service life of the valve 1.

[0081] In an alternative embodiment, the temperature control body 11 can be formed in the core with a material, in particular containing metal, and the surface can be coated with another material with a comparatively greater thermal conductivity.

[0082] A heating element 12 is arranged in the first recess. The heating element 12 is specifically designed as a heating cartridge or heating rod, but can alternatively be designed as a Peltier element or other temperature-controlled element. The heating element 12 is at least partially enclosed by the copper ring 11. This allows for rapid and efficient heat transfer from the heating element 12 to the copper ring 11. The heating element 12 is specifically inserted into the copper ring 11. The opening 13 allows for relatively easy insertion of the heating element 12 and prevents the formation of an air pocket in the recess.

[0083] A sensor 14 is arranged in the second recess. The sensor 14 can be designed, in particular, as a thermocouple and thus provides a measurement of a (body) temperature of the copper ring 11.

[0084] A first connection 15a (cable connection) provides an electrical connection between the heating element 12 and a controller for adjusting a heating current and thus the heat energy that can be applied by the heating element 12. A second connection 15b connects the sensor 14 to the controller for detecting and processing temperature information.

[0085] By arranging both heating element 12 and sensor 14, the temperature of copper ring 11 can be adjusted, monitored, or even regulated, e.g., by means of the controller. For this purpose, for example, temperature values ​​can be continuously obtained from sensor 14 and the heating element 12 can be regulated such that a currently measured temperature approximates a desired target temperature.

[0086] The membrane 25 has a surface coating with comparatively higher thermal conductivity than steel, especially stainless steel. In the illustrated embodiment, the membrane 25 is coated with a silver-containing material, or with silver. Alternative advantageous coatings may include copper, gold, or aluminum, for example.

[0087] The increased thermal conductivity of the membrane thus provided enables advantageous—i.e., rapid and efficient—heat absorption and heat distribution across the membrane. This can further improve the temperature control of the valve components that come into contact with a process gas.

[0088] Figure 3 shows a cross-section through the gas application unit orthogonal to the adjustment axis.

[0089] The heating element 12 and the sensor 14 are integrated into the temperature control body 11, e.g., inserted or embedded therein. The temperature control body 11 is formed so as to extend around the adjustment element 31 and is arranged at a specific distance relative to the adjustment element 31.

[0090] The invention will be explained with reference to exemplary embodiment(s), but numerous other changes and variations may be made without departing from the scope of the present invention. Therefore, it is intended that the appended claims cover such changes and variations as fall within the true scope of the invention.

Claims

CLAIMS 1 . Gas inlet valve (1 ) for the controlled inlet of a fluid into a vacuum process chamber, the gas inlet valve (1 ) comprising: - a gas application unit (2) with a gas inlet (21), a gas outlet (22) and an internal volume (23) connecting the gas inlet (21) and the gas outlet (22), wherein the gas application unit (2) has a sealing surface (24) in the internal volume (23), - an adjusting element (31) projecting into the gas application unit (2) with a valve plate (32) arranged within the internal volume (23), wherein the adjusting element (31) is movably mounted along an adjusting axis (V) in the closing direction (S) and in the opening direction (O), - a drive unit (3) which is coupled to the adjusting element (31) outside the gas application unit (2) and provides an adjustment of the adjusting element (31) along the adjustment axis (V), wherein the valve plate (32) can be brought into an open position in the opening direction (0) by means of the drive unit (3), in which the valve plate (32) is spaced from the sealing surface (24) and a fluid passage is provided, - a flexible sealing element (25) which is connected to the gas application unit (2) and to the adjusting element (31) and which Drive unit (3) from the internal volume (23) atmospherically separated, characterized in that the gas application unit (2) has a tempering arrangement with - a tempering body (11) at least partially surrounding the adjusting element (31) and - at least one heating element (12) which is at least partially enclosed by the tempering body (11), wherein the tempering body (11) is arranged contactlessly relative to the adjusting element (31).

2. Gas inlet valve (1) according to claim 1, wherein the temperature control body (11) comprises a material with a thermal conductivity of greater than 20 W / (m*K), in particular greater than 200 W / (m*K), or is made of this material.

3. Gas inlet valve (1) according to claim 1 or 2, wherein the temperature control body (11) comprises copper or is made of copper and / or is annular.

4. Gas inlet valve (1) according to one of the preceding claims, wherein - the temperature control body (11) has at least one first recess for receiving the at least one heating element (12) and the first recess corresponds in terms of shape and / or spatial extent to a shape or spatial extent of the at least one heating element (12) and - at least one heating element (12) is inserted into the first recess.

5. Gas inlet valve (1) according to one of the preceding claims, wherein the gas inlet valve has a sensor (14), in particular a thermocouple, for generating temperature information.

6. Gas inlet valve (1) according to claim 5, wherein - the temperature control body (11) has at least one second recess for receiving the sensor (14) and the second recess corresponds in shape and / or spatial extent to a shape or spatial extent of the sensor (14) and - the sensor (14) is inserted into the second recess.

7. Gas inlet valve (1) according to claim 5 or 6, wherein the gas inlet valve has a control unit with a temperature control functionality, in the execution of which - current temperature information for the temperature control body (11), the adjustment element (31) or the flexible sealing element (25) is detected by means of the sensor (14), and - the heating element (12) is controlled based on the current temperature information and a target temperature.

8. Gas inlet valve (1) according to one of the preceding claims, wherein - the temperature control body (11) has one or more further recesses for receiving a further heating element and / or a further sensor and - the additional heating element or the additional sensor is inserted into the one or more additional recesses.

9. Gas inlet valve (1) according to one of claims 4 to 8, wherein the first and / or the second and / or the further recess has a passage opening (13) in the direction of the flexible sealing element (25).

10. Gas inlet valve (1) according to one of the preceding claims, wherein - the flexible sealing element (25) is designed as a flexible membrane, - the flexible membrane (25) is connected to the adjusting element (31) by means of clamps, and - the flexible membrane (25) is formed from a metal-containing core material.

11. Gas inlet valve (1) according to one of the preceding claims, wherein the flexible sealing element (25) and / or the adjusting element (31) has a surface coating which provides a thermal conductivity which is greater than the thermal conductivity of the core material, in particular greater than 20 W / (m*K), in particular greater than 100 W / (m*K) or than 200 W / (m*K).

12. Gas inlet valve (1) according to claim 11, wherein the surface coating has a layer thickness in a range of 10 pm to 60 pm.

13. Gas inlet valve (1) according to claim 11 or 12, wherein the surface coating contains or is formed from silver, copper, gold or aluminum or a combination thereof.

14. Gas inlet valve (1) for the controlled inlet of a fluid into a vacuum process chamber, the gas inlet valve (1) comprising: - a gas application unit (2) with a gas inlet (21), a gas outlet (22) and an internal volume (23) connecting the gas inlet (21) and the gas outlet (22), wherein the gas application unit (2) has a sealing surface (24) in the internal volume (23), - an adjusting element (31) projecting into the gas application unit (2) with a valve plate (32) arranged within the internal volume (23), wherein the adjusting element (31) is movably mounted along an adjusting axis (V) in the closing direction (S) and in the opening direction (O), - a drive unit (3) which is coupled to the adjusting element (31) outside the gas application unit (2) and provides an adjustment of the adjusting element (31) along the adjustment axis (V), wherein the valve plate (32) can be brought into an open position in the opening direction (0) by means of the drive unit (3), in which the valve plate (32) is spaced from the sealing surface (24) and a fluid passage is provided, - a flexible sealing element (25) which is connected to the gas application unit (2) and to the adjusting element (31) and which Drive unit (3) is atmospherically separated from the internal volume (23), characterized in that - the flexible sealing element (25) is designed as a flexible membrane, - the flexible membrane (25) is connected to the adjusting element (31) by means of clamps, - the flexible membrane (25) is formed from a metal-containing core material, and - the flexible membrane (25) has a surface coating which provides a thermal conductivity which is greater than the thermal conductivity of the core material.

15. Gas inlet valve (1) according to claim 14, wherein the thermal conductivity of the surface coating is greater than 20 W / (m*K), in particular greater than 100 W / (m*K) or 200 W / (m*K).

16. Gas inlet valve (1) according to claim 14 or 15, wherein the surface coating has a layer thickness of at least 10 pm, in particular at most 60 pm.

17. Gas inlet valve (1) according to one of claims 14 to 16, wherein the surface coating contains or is formed from silver, copper, gold or aluminum or a combination thereof.

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