Imaging system, electromagnetic wave irradiation system, measurement method, and program

Abstract

An imaging system (100) comprises: an image-forming optical system (110); a light-splitting member (120) that splits light (LT) that has passed through the image-forming optical system (110); a first imaging device (140) that images a first image (Im1) formed by one light resulting from splitting by the light-splitting member (120); a second imaging device (150) that images a second image (Im2) formed by the other light resulting from splitting by the light-splitting member (120); and a distance measurement device (170) that irradiates a target object with measurement light (LM) via the image-forming optical system (110) on the basis of image information of the first image (Im1) including an image of at least a portion of the target object imaged by the first imaging device (140), and generates distance information regarding the target object.

Description

Imaging system, electromagnetic wave irradiation system, measurement method, and program

[0001] The present invention relates to an imaging system, an electromagnetic wave irradiation system, a measurement method, and a program.

[0002] Conventionally, imaging systems capable of tracking and capturing an image of a target object have been known, as described in, for example, Patent Document 1. However, with such imaging systems, it has been difficult to measure the distance to the target object.

[0003] U.S. Pat. No. 4,855,838

[0004] The first imaging system according to the present invention comprises an imaging optical system, a light splitting element that splits light that has passed through at least a portion of the imaging optical system, a first imaging device that captures a first image formed by one of the lights split by the light splitting element, a second imaging device that captures a second image formed by the other light split by the light splitting element, and a distance measurement device that irradiates measurement light onto the target object via the imaging optical system based on image information of the first image, which includes an image of at least a portion of the target object, captured by the first imaging device, and generates distance information of the target object.

[0005] An imaging system according to a second aspect of the present invention comprises an imaging optical system, a light splitting element that splits light that has passed through the imaging optical system, an imaging device that captures a first image formed by one of the lights split by the light splitting element, and a distance measurement device that irradiates measurement light onto the target object via the imaging optical system based on image information of the first image, which includes an image of at least a portion of the target object, captured by the imaging device, and generates distance information of the target object.

[0006] An electromagnetic wave irradiation system according to the present invention includes an imaging system and an electromagnetic wave irradiation device that irradiates an object with electromagnetic waves.

[0007] A first measurement method according to the present invention is a measurement method using an imaging system that includes an imaging optical system and a light splitting element that splits light that has passed through at least a portion of the imaging optical system, and includes using a first imaging device to capture a first image formed by one of the lights split by the light splitting element, using a second imaging device to capture a second image formed by the other of the lights split by the light splitting element, and irradiating measurement light onto the target object via the imaging optical system based on image information of the first image that includes an image of at least a portion of the target object and is captured by the first imaging device, to generate distance information of the target object.

[0008] A second measurement method according to the present invention is a measurement method using an imaging system that includes an imaging optical system and a light splitting element that splits light that has passed through the imaging optical system, and includes using an imaging device to capture a first image formed by one of the lights split by the light splitting element, and irradiating measurement light onto the target object via the imaging optical system based on image information of the first image captured by the imaging device, which includes an image of at least a portion of the target object, to generate distance information of the target object.

[0009] A program according to the present invention causes a computer to execute the above-described measurement method.

[0010] 1 is a perspective view showing an example of an electromagnetic wave irradiation system. FIG. 1 is a schematic configuration diagram of an imaging unit according to a first embodiment. FIG. 2 is a diagram showing a state in which a first reflecting member is rotated and an optical path is changed in the imaging unit according to the first embodiment. FIG. 3 is a front view of a first imaging element. FIG. 4 is a front view of a second imaging element. FIG. 5 is a schematic configuration diagram showing an example of a distance measurement device. FIG. 6 is a flowchart showing a measurement method according to the first embodiment. FIG. 7 is a schematic diagram showing an example of a first image. FIG. 8 is a schematic diagram showing an example of a second image and an intermediate image. FIG. 9 is a schematic diagram showing an example of a first image. FIG. 10 is a schematic diagram showing an example of a second image. FIG. 11 is a schematic diagram showing a modified example of the imaging unit according to the first embodiment. FIG. 12 is a front view of a modified example of the second imaging element. FIG. 13 is a schematic diagram showing a modified example of the second image. FIG. 14 is a schematic diagram of an imaging unit according to a second embodiment. FIG. 15 is a front view of a second imaging element. FIG. 16 is a schematic diagram of an imaging unit according to a third embodiment. FIG. 17 is a schematic diagram of an imaging unit according to a fourth embodiment. FIG. 18 is a diagram showing a state in which a first reflecting member is rotated and an optical path is changed in the imaging unit according to the fourth embodiment. FIG. 19 is a flowchart showing a measurement method according to the fourth embodiment. FIG. 19 is a schematic diagram showing an example of an enlarged image obtained by electronic zoom. FIG. 19 is a schematic diagram showing a modified example of the imaging unit according to the fourth embodiment. Fig. 10 is a flowchart showing a measurement method according to a fifth embodiment. Fig. 11 is a schematic diagram showing an example of a first image in which a region of interest is set. Fig. 12 is a perspective view showing another example of an electromagnetic wave irradiation system. Fig. 13 is a schematic configuration diagram of an imaging unit according to a sixth embodiment. Fig. 14 is a flowchart showing an irradiation method according to the sixth embodiment. Fig. 15 is a schematic configuration diagram of an imaging unit according to a seventh embodiment.

[0011] Preferred embodiments will be described below. First, an electromagnetic wave irradiation system including an imaging system according to any one of the first to fifth embodiments will be described with reference to FIG. 1. In the following description, the directions indicated by the arrows in each figure may be referred to as the X direction, Y direction, and Z direction, respectively. The X direction, Y direction, and Z direction will be described later.

[0012] [Electromagnetic Wave Irradiation System] As shown in FIG. 1 , the electromagnetic wave irradiation system 1 includes an imaging system 100, a case member 10 in which the imaging system 100 is housed, and an electromagnetic wave irradiation device 20. The electromagnetic wave irradiation system 1 may be fixed to a building or the like on the ground, or may be mounted on a movable body. The movable body may be a drone (unmanned aerial vehicle) or a manned aerial vehicle. The movable body may also be a robot such as an articulated robot. The movable body may be an unmanned vehicle (e.g., an unmanned ground vehicle) or a manned vehicle (e.g., a truck). The movable body may be an unmanned ship or a manned ship. The movable body may be an artificial satellite. The movable body may be an unmanned spacecraft or a manned spacecraft.

[0013] The electromagnetic wave irradiation device 20 is disposed at a position different from the imaging system 100 (case member 10). The electromagnetic wave irradiation device 20 includes an emission device 21, a support device 23, and an irradiation control device 25. The emission device 21 irradiates the target object TG with electromagnetic waves LB. The support device 23 rotatably supports the emission device 21 around two rotation axes that are orthogonal to each other (for example, around two rotation axes consisting of a rotation axis extending in the vertical direction (Z direction) and a rotation axis extending in the horizontal direction). The support device 23 can change the irradiation direction of the electromagnetic waves LB emitted from the emission device 21 by rotating the emission device 21 around the two rotation axes. The irradiation control device 25 controls at least one of the emission device 21 and the support device 23 to continuously or intermittently irradiate the target object TG with the electromagnetic waves LB based on information output from the imaging system 100 (an output device 187 described below).

[0014] The electromagnetic waves LB are irradiated from the emission device 21 of the electromagnetic wave irradiation device 20 to the target object TG in order to destroy, exterminate, or remove the target object TG. The target object TG to be destroyed, exterminated, or removed may be at least one of pests, vermin, and weeds. The target object TG to be destroyed, exterminated, or removed may also be space debris (space junk) floating in outer space. The target object TG is not limited to pests, vermin, weeds, or space debris, but may be any object to be destroyed, exterminated, or removed. The electromagnetic waves LB irradiated to the target object TG may be light or radio waves as long as they are capable of destroying, exterminating, or removing the target object TG. For example, if the electromagnetic waves LB irradiated to the target object TG are light, they may be a highly directional light beam. For example, the light beam may be laser light. For example, when the target object TG is a pest (e.g., a moth, etc.), the electromagnetic waves LB irradiated may be light including at least a blue wavelength range (e.g., laser light in a blue wavelength range). When the target object TG is a weed, the electromagnetic waves LB irradiated may be light including at least an infrared wavelength range (e.g., laser light in an infrared wavelength range). Thus, the electromagnetic waves LB irradiated to the target object TG may be light including at least one wavelength range of infrared, ultraviolet, and visible light. Note that the electromagnetic waves LB irradiated to the target object TG are not limited to the above examples, and may be light of another wavelength range as long as it is in a wavelength range that can destroy or exterminate the target object TG. Also, for example, when the electromagnetic waves LB irradiated to the target object TG are radio waves, they may be microwaves. Note that the radio waves irradiated to the target object TG are not limited to microwaves, and may be radio waves of another wavelength range (frequency range). Also, the output of the electromagnetic waves LB irradiated to the target object TG (e.g., the output of light irradiated to the target object TG) may be 10 kW or more. The output of the electromagnetic waves LB irradiated to the target object TG is not limited to 10 kW or more, and may be less than 10 kW. The output of the electromagnetic waves LB irradiated to the target object TG may be an output that can destroy, exterminate, or remove the target object TG. The output of the electromagnetic waves LB irradiated to the target object TG may be the output of the electromagnetic waves LB emitted from the electromagnetic wave irradiation device 20.

[0015] The case member 10 is formed in a box shape. At least a portion of the imaging system 100 is housed inside the case member 10. The arrangement positions of the imaging system 100 (case member 10) and the electromagnetic wave irradiation device 20 are not limited to the positions shown in FIG. 1 . For example, the imaging system 100 and the electromagnetic wave irradiation device 20 may be installed on a stage (not shown) so that the positional relationship between the imaging system 100 and the electromagnetic wave irradiation device 20 does not change. For example, the imaging system 100 and the electromagnetic wave irradiation device 20 may be installed on a movable stage (not shown) that can be driven so that the positional relationship between the imaging system 100 and the electromagnetic wave irradiation device 20 can be changed. For example, the imaging system 100 (case member 10) may be attached to a stage portion below the support device 23 of the electromagnetic wave irradiation device 20. In this case, the imaging system 100 (case member 10) can be rotated by the support device 23 around a rotation axis extending in the vertical direction (Z direction). For example, the imaging system 100 (case member 10) may be attached to the upper part of the emission device 21 of the electromagnetic wave irradiation device 20. In this case, the imaging system 100 (case member 10) can rotate around two rotation axes together with the injection device 21. The imaging system 100 may be attached to the outside of the case member 10, such as to the side or top of the case member 10. Next, the imaging system 100 according to the first embodiment will be described. The case member 10 may be omitted.

[0016] 2 and 3 , the imaging system 100 according to the first embodiment includes an imaging optical system 110, a light splitting member 120, a reimaging optical system 130, a first imaging device 140, a second imaging device 150, a reflecting member rotation device 160, a distance measurement device 170, a control device 180, and a housing 101. The housing 101 houses and holds the imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first imaging device 140, the second imaging device 150, the reflecting member rotation device 160, and the distance measurement device 170.

[0017] In this embodiment, the optical axis of the first optical system 131 of the reimaging optical system 130 and the optical axis of the imaging optical system 110, which is coaxial with the first optical system 131, are referred to as the first optical axis AX1. The optical axis of the second optical system 132 of the reimaging optical system 130 is referred to as the second optical axis AX2. The second optical axis AX2 may intersect with the first optical axis AX1. Note that the second optical axis AX2 may be perpendicular to the first optical axis AX1. The direction along the first optical axis AX1 is referred to as the Y direction. The direction along the second optical axis AX2 is referred to as the Z direction. The direction perpendicular to the Y direction and the Z direction is referred to as the X direction. The X direction, Y direction, and Z direction are perpendicular to each other. For example, as shown in FIG. 1 , the Z direction may be vertical, and the X direction and the Y direction may be horizontal.

[0018] As shown in FIGS. 2 and 3 , the imaging optical system 110 includes a front lens 111, a rear lens 112, and an aperture stop 113. The imaging optical system 110 may be telecentric on the side of the light dividing member 120 (an intermediate image plane Imd, described below). The front lens 111 is disposed farther from the light dividing member 120 than the aperture stop 113. The rear lens 112 is disposed closer to the light dividing member 120 than the aperture stop 113. In FIG. 2 and other figures, the front lens 111 and the rear lens 112 are each schematically shown as a single lens. Each of the front lens 111 and the rear lens 112 may be composed of a single lens or multiple lenses. Each of the front lens 111 and the rear lens 112 may include one or more lenses as well as existing optical components other than lenses. The front lens 111 may include a focusing lens that is movable along the optical axis during focusing.

[0019] The imaging optical system 110 may be configured to be interchangeable. For example, at least one of a fixed focal length lens and a fisheye lens may be used as the interchangeable imaging optical system 110. In other words, a fixed focal length lens or a fisheye lens may be used as the imaging optical system 110. Furthermore, the interchangeable imaging optical system 110 may include multiple types of fixed focal lengths. The imaging optical system 110 does not have to be configured to be interchangeable. Even in this case, the imaging optical system 110 may be a fixed focal length lens or a fisheye lens. For example, the maximum angle of view of the imaging optical system 110 (i.e., the maximum angle of view on the object side of the image captured by the first imaging device (first image PC1 described below)) may be 170° or more. For example, the maximum angle of view of the imaging optical system 110 is not limited to 170° or more and may be less than 170°. For example, the maximum angle of view of the imaging optical system 110 may be 160°.

[0020] As shown in FIGS. 2 and 3 , the light splitting member 120 is disposed between the imaging optical system 110 and the re-imaging optical system 130. The light splitting member 120 splits the light LT that has passed through the imaging optical system 110. For example, the light splitting member 120 may be configured using a half mirror and may amplitude-split the light LT that has passed through the imaging optical system 110. Specifically, the light splitting member 120 may reflect a portion of the light LT that has passed through the imaging optical system 110 in the +Z direction toward the first image capture device 140 and transmit the remaining light. The half mirror may be a prism type or a flat type. The ratio of the transmittance to the reflectance of the half mirror may be 1:1. Note that the ratio of the transmittance to the reflectance of the half mirror is not limited to 1:1 and may be other ratios. For example, this ratio may be 2:1.

[0021] Furthermore, the light splitting member 120 may be configured using a dichromic mirror and split light in a predetermined wavelength range from the light LT that has passed through the imaging optical system 110. For example, the light splitting member 120 may reflect light in the near-infrared wavelength range from the light LT that has passed through the imaging optical system 110 in the +Z direction toward the first image capture device 140, and transmit light in other wavelength ranges (visible light). The light splitting member 120 may transmit light in the near-infrared wavelength range from the light LT that has passed through the imaging optical system 110, and reflect light in other wavelength ranges (visible light) in the +Z direction toward the first image capture device 140.

[0022] Furthermore, the light splitting member 120 may be configured using a polarizing beam splitter and may polarize and split the light LT that has passed through the imaging optical system 110. Note that the light splitting member 120 may be disposed midway through the imaging optical system 110. In this case, the light splitting member 120 may split the light LT that has passed through a portion of the imaging optical system 110. For example, the rear lens 112 may be disposed between the light splitting member 112 and the first image plane Im1 and between the light splitting member 120 and the intermediate image plane Imd.

[0023] Of the light LT that passes through at least a portion of the imaging optical system 110, the first image Im1 is formed by light that is reflected by the light splitting member 120. In other words, the first image Im1 is formed by one of the light beams split by the light splitting member 120. Furthermore, of the light LT that passes through the imaging optical system 110, the intermediate image Imd is formed by light that is transmitted through the light splitting member 120. In other words, the intermediate image Imd is formed by the other of the light beams split by the light splitting member 120. The intermediate image Imd may also be referred to as a third image. Here, the position where the intermediate image Imd (third image) is formed may be conjugate to the position where the first image Im1 is formed. In other words, the intermediate image Imd may be an image conjugate to the first image Im1. The first image Im1 formed by one of the light beams split by the light splitting member 120 may also be referred to as an intermediate image. Note that the light LT that has passed through at least a part of the imaging optical system 110 is split by the light splitting member 120, and the first image Im1 and the intermediate image Imd are formed by the respective split light beams, so it can also be said that the light splitting member 120 contributes to image formation. Therefore, the light splitting member 120 may be a part of the imaging optical system 110.

[0024] As shown in FIGS. 2 and 3 , the reimaging optical system 130 forms a second image Im2 by enlarging and reimaging a portion of the intermediate image Imd formed by the light LT that has passed through the imaging optical system 110. In other words, the second image Im2 is formed via the reimaging optical system 130 using the other light split by the light splitting member 120. As described above, the position at which the intermediate image Imd (third image) is formed may be conjugate with the position at which the first image Im1 is formed. In this way, by the reimaging optical system 130 enlarging and reimaging a portion of the intermediate image Imd, an effect equivalent to enlarging and reimaging a portion of the first image Im1 (a portion at the same relative position as the intermediate image Imd) can be obtained. In other words, the reimaging optical system 130 enlarges and reimaging a portion of the intermediate image Imd that corresponds to a portion of the first image Im1.

[0025] Furthermore, the reimaging optical system 130 may be telecentric on the side of the intermediate image Imd (beam splitting member 120). This suppresses divergence of the chief ray near the intermediate image Imd, allowing the aperture of the reimaging optical system 130 to be reduced. This therefore enables the imaging system 100 to be miniaturized and manufacturing costs to be reduced. Furthermore, it is possible to suppress variations in the angle of incidence of light incident on the beam splitting member 120 (beam splitting surface). Note that, although both the imaging optical system 110 and the reimaging optical system 130 are telecentric on the side of the intermediate image Imd (beam splitting member 120), this is not a limitation. For example, one of the imaging optical system 110 and the reimaging optical system 130 may be telecentric on the side of the intermediate image Imd (beam splitting member 120).

[0026] The reimaging optical system 130 includes a first optical system 131 and a second optical system 132. Light that has passed through the light splitting member 120 is incident on the first optical system 131. In other words, the other light split by the light splitting member 120 is incident on the first optical system 131. Light from the first optical system 131 is incident on the second optical system 132. In FIG. 2 and other figures, the first optical system 131 and the second optical system 132 are each schematically shown as a single lens. Each of the first optical system 131 and the second optical system 132 may be composed of a single lens or multiple lenses. Each of the first optical system 131 and the second optical system 132 may include existing optical components other than lenses in addition to one or more lenses.

[0027] The optical axis of the second optical system 132 (second optical axis AX2) is perpendicular to the optical axis of the first optical system 131 (first optical axis AX1). The optical axis of the second optical system 132 may intersect with the optical axis of the first optical system 131 at an angle other than 90 degrees. For example, the optical axis of the second optical system 132 may intersect with the optical axis of the first optical system 131 within an angle range of 90 degrees ±5 degrees. The reflecting surface 162 of the first reflecting member 161 in the reflecting member rotating device 160 is disposed at or near the intersection position where the optical axis of the first optical system 131 intersects with the optical axis of the second optical system 132. The intersection position where the optical axis of the first optical system 131 intersects with the optical axis of the second optical system 132 may also be referred to as the position of the intersection where the optical axis of the first optical system 131 intersects with the optical axis of the second optical system 132. Furthermore, the vicinity of the intersection position may be, for example, a position different from the intersection position where the reflecting surface 162 of the first reflecting member 161 can reflect light from the first optical system 131 toward the second optical system 132. The second optical system 132 forms the second image Im2 with the light from the first optical system 131 reflected by the reflecting surface 162 of the first reflecting member 161. It can also be said that the second image Im2 is formed by the first optical system 131 and the second optical system 132. It can also be said that the reimaging optical system 130 is configured to include the first reflecting member 161 in addition to the first optical system 131 and the second optical system 132.

[0028] The second optical system 132 may be configured to be interchangeable. The interchangeable second optical system 132 may be, for example, at least one of a fixed-magnification optical system and a variable-magnification optical system (zoom lens). In other words, the second optical system 132 may be a fixed-magnification optical system or a variable-magnification optical system (zoom lens). Furthermore, the interchangeable second optical system 132 may be made up of multiple types of optical systems with different magnifications. The second optical system 132 does not have to be interchangeable. Even in this case, the second optical system 132 may be a fixed-magnification optical system or a variable-magnification optical system. Furthermore, since the second optical system 132 is a fixed-magnification optical system or a variable-magnification optical system, the reimaging optical system 130 can also be said to be a fixed-magnification optical system or a variable-magnification optical system. The reimaging optical system 130 may be configured to reimage the intermediate image Imd as a second image Im2 by reducing a portion of the intermediate image Imd, or may be configured to reimage the intermediate image Imd as a second image Im2 at the same size as a portion of the intermediate image Imd.

[0029] As shown in FIGS. 2 and 3 , the first imaging device 140 includes a first imaging element 141 that captures a first image Im1. A CMOS (Complementary Metal Oxide Semiconductor) image sensor may be used as the first imaging element 141. Alternatively, the first imaging element 141 may be an infrared image sensor capable of capturing infrared images. In this case, the first imaging element 141 may be a near-infrared image sensor capable of capturing near-infrared images, or a mid-infrared image sensor capable of capturing mid-infrared images. Alternatively, the first imaging element 141 may be an event-based vision sensor. For example, if the light reflected by the light dividing member 120 is visible light, a CMOS image sensor or an event-based vision sensor may be used as the first imaging element 141. If the light reflected by the light dividing member 120 includes light in the near-infrared wavelength range, a near-infrared image sensor may be used as the first imaging element 141. When the light reflected by the light splitting member 120 includes light in the mid-infrared wavelength range, a mid-infrared image sensor may be used as the first imaging element 141 .

[0030] The first imaging element 141 is disposed at or near the position of the image plane where the first image Im1 is formed. Note that the vicinity of the position of the image plane where the first image Im1 is formed may be, for example, a position different from the position of the image plane where the first imaging element 141 can capture the first image Im1 so that the target object TG can be identified in the image of the first image Im1. As shown in FIG. 4 , a plurality of first pixels 143 are two-dimensionally arranged in the imaging region 142 of the first imaging element 141. The first pixels 143 are arranged at a predetermined arrangement pitch in the X direction and the Y direction. For example, one thousand or more first pixels 143 may be arranged in each of the X direction and the Y direction. Each first pixel 143 of the first imaging element 141 performs photoelectric conversion of light reflected by the light splitting member 120 and incident on the first imaging element 141. The first imaging device 140 outputs image information of the first image Im1 generated based on photoelectric conversion at each of the first pixels 143 of the first imaging element 141 to the control device 180 .

[0031] As shown in FIGS. 2 and 3 , the second imaging device 150 includes a second imaging element 151 that captures the second image Im2. A CMOS image sensor may be used as the second imaging element 151. Alternatively, the second imaging element 151 may be an infrared image sensor. In this case, the second imaging element 151 may be a near-infrared image sensor or a mid-infrared image sensor. Alternatively, the second imaging element 151 may be an event-based vision sensor. For example, if the light passing through the light dividing member 120 is visible light, a CMOS image sensor or an event-based vision sensor may be used as the second imaging element 151. If the light passing through the light dividing member 120 includes light in the near-infrared wavelength range, a near-infrared image sensor may be used as the second imaging element 151. Furthermore, for example, if the light reflected by light dividing member 120 is visible light and the light transmitted through light dividing member 120 is also visible light, an event-based vision sensor may be used as first image capturing element 141 and a CMOS image sensor may be used as second image capturing element 151. If the light reflected by light dividing member 120 is visible light and the light transmitted through light dividing member 120 includes light in the near-infrared wavelength range, an event-based vision sensor may be used as first image capturing element 141 and a near-infrared image sensor may be used as second image capturing element 151. For example, if the light reflected by and the light transmitted through light dividing member 120 both include light in the near-infrared wavelength range, first image capturing element 141 and second image capturing element 151 may be near-infrared image sensors. For example, if the light reflected by and the light transmitted through light dividing member 120 both include light in the mid-infrared wavelength range, first image capturing element 141 and second image capturing element 151 may be mid-infrared image sensors.

[0032] The second imaging element 151 is disposed at or near the position of the image plane where the second image Im2 is formed. Note that the vicinity of the position of the image plane where the second image Im2 is formed refers to, for example, the vicinity of the range in which the second imaging element 151 can capture the second image Im2 so that the target object TG can be identified in the image of the second image Im2. As shown in FIG. 5 , a plurality of second pixels 153 are two-dimensionally arranged in the imaging region 152 of the second imaging element 151. The second pixels 153 are arranged at a predetermined pitch in the X direction and the Y direction. For example, one thousand or more second pixels 153 may be arranged in each of the X direction and the Y direction. Each second pixel 153 of the second imaging element 151 performs photoelectric conversion on light that passes through the light splitting member 120, passes through the reimaging optical system 130, and enters the second imaging element 151. The second imaging device 150 outputs image information of the second image Im2 generated based on photoelectric conversion at each second pixel 153 of the second imaging element 151 to the control device 180. For example, the arrangement pitch of the second pixels 153 of the second imaging element 151 may be smaller than the arrangement pitch of the first pixels 143 of the first imaging element 141. In other words, the number of second pixels 153 per unit area of ​​the effective region of the second imaging element 151 (the region where the second pixels 153 are arranged) may be greater (higher density) than the number of first pixels 143 per unit area of ​​the effective region of the first imaging element 141 (the region where the first pixels 143 are arranged). In other words, the second imaging element 151 may be an imaging element with a higher resolution than the first imaging element 141. The arrangement pitch of the second pixels 153 of the second imaging element 151 may be equal to or smaller than the arrangement pitch of the first pixels 143 of the first imaging element 141. For example, the area of ​​the effective area of ​​the second imaging element 151 may be smaller than the area of ​​the effective area of ​​the first imaging element 141. The area of ​​the effective area of ​​the second imaging element 151 may be equal to or larger than the area of ​​the effective area of ​​the first imaging element 141.

[0033] Furthermore, a non-imaging region 154 may be formed in the central portion of the second imaging element 151 (a portion intersecting with the optical axis (second optical axis AX2) of the second optical system 132). The imaging region 152 of the second imaging element 151 may be provided around the non-imaging region 154. In this case, the non-imaging region 154 of the second imaging element 151 is sufficiently small compared to the imaging region 152 and has a size such that missing portions of the image caused by the non-imaging region 154 are not noticeable when the second image Im2 is viewed. The imaging region 152 can also be considered an effective region in which the second pixels 153 are arranged. The non-imaging region 154 can also be considered a region in which the second pixels 153 are not arranged. A through-hole 155 is formed in the second imaging element 151 in a direction intersecting with the non-imaging region 154 of the second imaging element 151. In this case, the non-imaging region 154 is a through region formed by the through-hole 155. The non-imaging region 154 can also be referred to as the cross-sectional region of the through-hole 155. The through-hole 155 is configured to allow the measurement light LM emitted from the distance measurement device 170 to pass through. The cross-sectional shape of the through-hole 155 is not limited to a rectangle and may be other shapes, such as a circle. The opening size (cross-sectional area) of the through-hole 155 may be any size as long as the measurement light LM emitted from the distance measurement device 170 can pass through. However, a smaller opening size is preferable to ensure a larger area of ​​the imaging region 152 (effective region). In FIG. 5 , the opening size of the through-hole 155 is larger than the size (surface area) of the second pixel 153, but it may also be smaller than the size of the second pixel 153. The position of the through-hole 155 is not limited to the central portion of the second imaging element 151 and may be formed at a position away from the center of the second imaging element 151. The through-hole 155 does not have to be formed in the non-imaging region 154. For example, at least a part of the distance measurement device 170 (e.g., the measurement light irradiation device 171) may be disposed in the non-imaging region 154. In this case, at least a part of the distance measurement device 170 may be installed in the non-imaging region 154 of the second imaging element 151, or may be provided away from the second imaging element 151 (e.g., between the second imaging element 151 and the reimaging optical system 130).

[0034] 2 and 3 , the reflecting member rotating device 160 includes a first reflecting member 161 having a reflecting surface 162 and a driving device 163. As described above, the reflecting surface 162 of the first reflecting member 161 may be disposed at or near the intersection position where the optical axis (first optical axis AX1) of the first optical system 131 and the optical axis (second optical axis AX2) of the second optical system 132 intersect. Furthermore, the reflecting surface 162 of the first reflecting member 161 may be disposed at the pupil position or a pupil conjugate position of the optical system consisting of the imaging optical system 110 and the first optical system 131. This allows the area of ​​the reflecting surface 162 of the first reflecting member 161 to be reduced. The reflecting surface 162 of the first reflecting member 161 reflects at least a portion of the light that has passed through the light splitting member 120 and the first optical system 131 toward the second optical system 132. In other words, the reflecting surface 162 of the first reflecting member 161 reflects at least a part of the other light split by the light splitting member 120 toward the second imaging device 150. The reflecting surface 162 of the first reflecting member 161 reflects the measurement light LM from the distance measurement device 170 that has passed through the second optical system 132 toward the first optical system 131. Therefore, it can be said that the reflecting surface 162 of the first reflecting member 161 is arranged on the optical path of the measurement light LM from the distance measurement device 170.

[0035] The driving device 163 is configured using, for example, a voice coil motor (VCM). The driving device 163 may rotate the first reflecting member 161 around two rotation axes, one extending in the X direction and the other extending in the Y direction. That is, the reflecting member rotating device 160 may be a two-axis gimbal mirror that can rotate the first reflecting member 161 around two rotation axes. This allows the driving device 163 to rotate the first reflecting member 161 to an angle (see FIG. 2 ) at which light traveling along the optical axis (first optical axis AX1) of the first optical system 131 is reflected toward the optical axis (second optical axis AX2) of the second optical system 132, and an angle (see FIG. 3 , for example) at which light traveling off the optical axis of the first optical system 131 is reflected toward the optical axis of the second optical system 132. In other words, the driving device 163 can rotate the first reflecting member 161 to an angle at which the measurement light LM reflected by the reflecting surface 162 of the first reflecting member 161 travels along the optical axis of the first optical system 131 (see FIG. 2 ) and an angle at which the measurement light LM reflected by the reflecting surface 162 of the first reflecting member 161 travels off the optical axis of the first optical system 131 (see FIG. 3 , for example). However, the reflecting member rotating device 160 is not limited to a two-axis gimbal mirror and may be another existing device. For example, the reflecting member rotating device 160 may have two first reflecting members 161. In this case, the driving device 163 may rotate each of the two first reflecting members 161 around a different rotation axis. For example, the driving device 163 may rotate each of the two first reflecting members 161 around rotation axes that are perpendicular to each other. In other words, the reflecting member rotating device 160 may be a two-axis galvanometer mirror. The reflecting member rotation device 160 is not limited to a device that rotates the first reflecting member 161 around two rotation axes, but may be a device that rotates around one rotation axis (for example, a one-axis gimbal mirror or a one-axis galvanometer mirror) or a device that rotates around three rotation axes (for example, a three-axis gimbal mirror or a three-axis galvanometer mirror).

[0036] As shown in FIGS. 2 and 3 , the distance measurement device 170 is disposed on the opposite side of the second imaging element 151 from the optical member of the second optical system 132 (reimaging optical system 130) that is closest to the second imaging element 151. The distance measurement device 170 irradiates the target object TG (see FIG. 1 ) with measurement light LM via the non-imaging region 154 (through-hole 155) of the second imaging element 151, the second optical system 132, the first reflecting member 161, the first optical system 131, the light splitting member 120, and the imaging optical system 110, and generates distance information about the target object TG. The distance information about the target object TG may be information about the distance from the front lens 111 of the imaging optical system 110 (e.g., the lens closest to the object of the front lens 111) to the target object TG, or may be information about the distance from the housing 101 to the target object TG. Note that the distance information about the target object TG may also be information about the distance from the distance measurement device 170 to the target object TG. In this case, the distance information of the target object TG may be information on the distance from a measurement light emitting device 171 (described later) of the distance measurement device 170 to the target object TG, or may be information on the distance from a light receiving device 172 (described later) of the distance measurement device 170 to the target object TG. Furthermore, the distance information of the target object TG may be information on the distance from the electromagnetic wave emitting device 20 to the target object TG. In this case, the distance information of the target object TG may be information on the distance from the electromagnetic wave emitting device 20 to the target object TG. Note that the distance information of the target object TG may be information on the distance from a specific reference point to the target object TG.

[0037] FIG. 6 schematically illustrates an example of a portion of the distance measurement device 170. The distance measurement device 170 illustrated in FIG. 6 includes a measurement light emitting device 171 (part), a light receiving device 172 (part), and a lens 173. As illustrated in FIG. 6, the distance measurement device 170 may be configured such that an emission unit of the measurement light emitting device 171 for emitting the measurement light LM and a light receiving unit of the light receiving device 171 for receiving light from the target object TG irradiated with the measurement light LM can transmit and receive light via the lens 173. The lens 173 of the distance measurement device 170 is provided in the emission unit (incident unit) described above in the distance measurement device 170. The lens 173 of the distance measurement device 170 (i.e., the emission unit and incident unit described above) is disposed opposite the through-hole 155 of the second image sensor 151 (see FIG. 5). However, the distance measurement device 170 is not limited to the configuration illustrated in FIG. 6. For example, the distance measurement device 170 may have a configuration in which at least a part of the measurement light emitting device 171 and at least a part of the light receiving device 171 are common. In this case, the distance measurement device 170 may have a common unit for the emission part of the measurement light LM of the measurement light emitting device 171 and the light receiving part of the light receiving device 171 that receives light from the target object TG irradiated with the measurement light LM. For example, the distance measurement device 170 may have a configuration in which the measurement light emitting device 171 and the light receiving device 171 are provided separately. Note that the distance measurement device 170 does not need to have the lens 173.

[0038] The measurement light emitting device 171 emits measurement light LM via a lens 173. The measurement light emitting device 171 may be configured using a laser diode (LD). In other words, the measurement light LM emitted from the measurement light emitting device 171 may be laser light. The laser diode (LD) may be a pulsed laser diode or a CW laser diode. The measurement light LM emitted from the measurement light emitting device 171 of the distance measurement device 170 enters the imaging optical system 110 from the non-imaging region 154 (through-hole 155) of the second image sensor 151, via the reimaging optical system 130, the first reflecting member 161, and the light splitting member 120.

[0039] The light receiving device 172 receives light from the target object TG irradiated with the measurement light LM via the lens 173 of the distance measurement device 170. The light receiving device 172 may be configured using an avalanche photodiode (APD) or a CMOS sensor. The distance measurement device 170 generates distance information of the target object TG based on the light receiving device 172 receiving the light from the target object TG irradiated with the measurement light LM from the measurement light irradiating device 171. The distance measurement device 170 outputs the generated distance information of the target object TG to the control device 180. Note that the distance measurement device 170 is not limited to generating the distance information. For example, the control device 180 may acquire the light receiving device 172 receiving the light from the target object TG irradiated with the measurement light LM, and generate distance information based on the light receiving result.

[0040] The light reception result by the light receiving device 172 may be the time (time of flight of the measurement light LM) from when the measurement light LM emitted from the measurement light emitting device 171 is reflected (specularly reflected and / or diffusely reflected) by the target object TG to when it is received by the light receiving device 172. In this case, the distance measurement device 170 measures the time from when the measurement light LM emitted from the measurement light emitting device 171 is reflected by the target object TG to when it is received by the light receiving device 172, and generates distance information about the target object TG. As such a TOF (Time of Flight) distance measurement device 170, for example, a TOF LiDAR (Light Detection And Ranging) may be used. Note that the distance measurement device 170 is not limited to a LiDAR and may be another TOF measurement device. For example, the distance measurement device 170 may be a TOF reflective laser sensor. The light receiving result by the light receiving device 172 may be the intensity of the light received by the light receiving device 172 from the target object TG irradiated with the measurement light LM.

[0041] The distance measurement device 170 may be a millimeter-wave sensor (or millimeter-wave radar) that irradiates the target object TG with millimeter waves as the measurement light LM. The distance measurement device 170 may also be a measuring instrument using an optical comb. The distance measurement device 170 may also be configured such that the measurement light emitting device 171 and the light receiving device 172 are separately provided within the case member 10 and generate distance information of the target object using the principle of triangulation. In this case, the measurement light emitting device 171 may irradiate the target object TG with structured light (pattern light), such as a stripe pattern having a regular stripe intensity distribution or a random dot pattern having a random (irregular) dot intensity distribution, as the measurement light LM. The distance measurement device 470 may not include the measurement light emitting device 170. For example, a stereo camera may be used as a distance measurement device that does not include the measurement light emitting device 170. In this case, distance information of the target object TG may be generated based on the parallax of stereo images captured by the stereo camera. The output device 187 may also output image information of one of the stereo images captured by the stereo camera.

[0042] Furthermore, the light reception result by the light receiving device 172 may be the frequency of light received by the light receiving device 172 when the measurement light LM emitted from the measurement light emitting device 171 while changing the frequency is reflected by the target object TG. In this case, the distance measurement device 170 measures the frequency of the light received by the light receiving device 172 and generates distance information about the target object TG. As such an FMCW (Frequency Modulated Continuous Wave) distance measurement device 170, for example, an FMCW LiDAR may be used. Note that the distance measurement device 170 is not limited to an FMCW LiDAR and may be another FMCW measurement device. For example, the distance measurement device 170 may be an FMCW interferometer.

[0043] In the distance measurement device 170 shown in FIG. 6 , the measurement light emitting device 171 emits converging measurement light LM via the lens 173, but this is not limited thereto. The measurement light emitting device 171 may emit diverging measurement light or may emit parallel measurement light (parallel light). Furthermore, the lens 173 (i.e., the aforementioned emission portion and incidence portion) of the distance measurement device 170 is arranged opposite the through-hole 155 (see FIG. 5 ) of the second image sensor 151, but this is not limited thereto. For example, the lens 173 (emission portion and incidence portion) of the distance measurement device 170 may be inserted into the through-hole 155 of the image sensor 151 and disposed in the non-imaging region 154.

[0044] The control device 180 is configured using, for example, a PC (personal computer) or the like. The control device 180 operates based on a program stored in a storage unit 181. As shown in FIGS. 2 and 3 , the control device 180 includes a storage unit 181, an image information acquisition unit 182, an image analysis unit 183, a device control unit 184, a distance information acquisition unit 185, an image correction unit 186, and an output device 187. The storage unit 181 stores the above-mentioned programs and the like. The control device 180 does not necessarily have to include the storage unit 181. The control device 180 may be housed in a housing 101. In this case, the case member 10 may not be required. At least some of the functional blocks of the control device 180 may be housed in the housing 101.

[0045] The image information acquisition unit 182 acquires image information of the first image Im1 output from the first imaging device 140. Hereinafter, the image of the first image Im1 captured by the first imaging device 140 (i.e., the image indicated by the image information of the first image Im1) may be referred to as a first image PC1 (see FIG. 10 ). The first image PC1 may also be referred to as a wide-angle image. The image information of the first image Im1 acquired by the image information acquisition unit 182 may be stored in the storage unit 181. The image information acquisition unit 182 also acquires image information of the second image Im2 output from the second imaging device 150. Hereinafter, the image of the second image Im2 captured by the second imaging device 150 (i.e., the image indicated by the image information of the second image Im2) may be referred to as a second image PC2 (see FIG. 11 ). The second image PC2 may also be referred to as a magnified image. The image information of the second image Im2 acquired by the image information acquisition unit 182 may be stored in the storage unit 181. The control device 180 may not include the image information acquisition unit 182. In this case, for example, the first imaging device 140 may output image information of the generated first image Im1 to the image analysis unit 183. For example, the second imaging device 150 may output image information of the second image Im2 to the image correction unit 186. As will be described later, if the control device 180 does not include the image correction unit 186, the second imaging device 150 may output image information of the second image Im2 to the irradiation control device 25 of the electromagnetic wave irradiation device 20. In this case, the second imaging device 150 may output image information of the second image Im2 to the irradiation control device 25 of the electromagnetic wave irradiation device 20 via the output device 187.

[0046] The image analysis unit 183 generates directional information of the target object TG based on image information of the first image Im1 including an image of the target object TG acquired by the image information acquisition unit 182. The directional information of the target object TG may be information about the direction of the target object TG relative to the front lens 111 of the imaging optical system 110 (e.g., the lens closest to the object side of the front lens 111), or may be information about the direction of the target object TG relative to the imaging system 100 (housing 101). Furthermore, the directional information of the target object TG may be information about the direction of the target object TG relative to the electromagnetic wave irradiation device 20. In this case, the directional information of the target object TG may be information about the direction of the target object TG relative to the emission device 21 of the electromagnetic wave irradiation device 20. Note that the directional information of the target object TG may be information about the direction of the target object TG relative to a specific reference point. Note that the directional information may be referred to as orientation information. An example of the first image Im1 is shown in Fig. 8, and an example of the image of the first image Im1 (first image PC1) captured by the first imaging device 140 is shown in Fig. 10. The image analysis unit 183 analyzes the image information of the first image Im1 to identify the target object TG from the first image PC1 that includes one or more objects.

[0047] For example, the image analysis unit 183 may identify the target object TG from the first image PC1 containing one or more objects by a template matching process. In this case, the target object TG may be identified from the first image PC1 by a matching process between the first image PC1 and a template image of the target object TG. The image analysis unit 183 may identify the target object TG from the first image PC1 by other processes, not limited to the template matching process. For example, the image analysis unit 183 may identify the target object TG from the first image PC1 containing one or more objects by performing an object detection process using machine learning (e.g., deep learning). In this case, the target object TG may be identified from the first image PC1 using a learning model learned by machine learning (e.g., deep learning). For example, the image analysis unit 183 may identify the target object TG from the first image PC1 containing one or more objects by performing a segmentation process. Note that the number of target objects TG to be identified is not limited to one, and the image analysis unit 183 may identify multiple target objects TG from a first image PC1 that includes multiple objects. Furthermore, the image analysis unit 183 may identify the target object TG from an image of a second image Im2 (second image PC2) that includes a single object or multiple objects. In this case, the image analysis unit 183 may identify the target object TG from the image of the second image Im2 (second image PC2) by the above-described process (e.g., template matching process). The image analysis unit 183 may identify the target object TG using both the first image PC1 and the second image PC2.

[0048] When the image analysis unit 183 identifies the target object TG, it generates position information of at least a portion of the target object TG in the first image PC1. For example, the position information of at least a portion of the target object TG in the first image PC1 may be information regarding the coordinate position of the center of a rectangular area including the target object TG in the first image PC1. The position information of at least a portion of the target object TG in the first image PC1 in the image coordinate system may be information regarding the coordinate position of a reference point of the target object TG in the first image PC1. Here, the reference point may be a characteristic point of the target object TG. The reference point may also be referred to as a characteristic point. The coordinate position may be two-dimensional coordinates in the image coordinate system or two-dimensional coordinates in another coordinate system. The coordinate position may be a pixel number (pixel address). The position information of at least a portion of the target object TG generated by the image analysis unit 183 may be stored in the storage unit 181. Once the position of the target object TG in the first image PC1 is known, the direction of the target object TG can be determined from the relationship between the position on the image plane of the first image Im1 and the angle of view of the imaging optical system 110. In other words, the direction of the target object TG (e.g., the direction of the target object TG relative to the imaging system 100) can be uniquely determined from the position of the target object TG in the first image PC1. The image analysis unit 183 may use a data table for generating direction information to generate direction information of the target object TG based on position information of at least a portion of the target object TG in the generated first image PC1. The data table for generating direction information may be a data table indicating the relationship between position information of at least a portion of the target object TG in the first image PC1 and direction information of the target object TG. The direction information of the target object TG generated by the image analysis unit 183 may be stored in the storage unit 181. In addition, the image analysis unit 183 may generate position information of the target object TG in the first image PC1 based on image information of the first image Im1, which includes an image of a portion of the target object TG, acquired by the image information acquisition unit 182, and may generate directional information of the target object TG based on the position information of the target object TG in the generated first image PC1.

[0049] The device control unit 184 controls the drive device 163 of the reflecting member rotation device 160. Based on the direction information of the target object TG generated by the image analysis unit 183, the device control unit 184 may control the drive device 163 of the reflecting member rotation device 160 so that an area including at least a part of the image of the target object TG in the image formation area of ​​the intermediate image Imd, which is the area where the intermediate image Imd (third image) is formed, is re-imaged as the second image Im2, as shown in FIG. 9 . Specifically, the device control unit 184 may use the device control data table stored in the storage unit 181 to control the rotation angle of the first reflecting member 161 rotated by the drive device 163 based on the direction information of the target object TG so that the image of the target object TG included in the intermediate image Imd (first image Im1) is re-imaged at the center of the imaging area 152 (effective area where the second pixels 153 are formed) of the second imaging element 151. In other words, based on the direction information of the target object TG, the device control unit 184 may control the rotation angle of the first reflecting member 161 to set a region of the image formation region of the intermediate image Imd that includes at least a portion of the image of the target object TG (a region that is reimaged by the reimaging optical system 130) so that an enlarged image including at least a portion of the image of the target object TG is reimaged in the imaging region 152. It can also be said that the device control unit 184 controls the rotation angle of the first reflecting member 161 to select a region that includes at least a portion of the image of the target object TG from the image formation region of the intermediate image Imd so that an enlarged image including at least a portion of the image of the target object TG is reimaged in the imaging region 152. The device control data table may be a data table that indicates the relationship between the direction information of the target object TG and the rotation angle of the first reflecting member 161. In this case, the re-imaging optical system 130 may be configured so that the second image Im2 re-imaged via the first reflecting member 162 is positioned at the center of the imaging area 152 of the second imaging element 151, regardless of the rotation angle of the first reflecting member 162 (in other words, regardless of which part of the image formation area of ​​the intermediate image Imd is enlarged).As a result, regardless of the position in the first image Im1 where at least a portion of the image of the target object TG is located (i.e., when at least a portion of the target object TG that falls within the field of view of the imaging optical system 130 is imaged by the first imaging device 140), the second imaging device 150 can image a second image Im2 that includes an image of at least a portion of the target object TG that has been enlarged and re-imaged by the re-imaging optical system 130, and generate image information of the second image Im2.

[0050] Furthermore, the device control unit 184 may utilize the device control data table stored in the storage unit 181 to control the rotation angle of the first reflecting member 161 rotated by the drive device 163 based on the position information of the target object TG in the first image PC1 so that an image of at least a portion of the target object TG included in the intermediate image Imd (first image Im1) is re-imaged at the center of the imaging area 152 in the second imaging element 151. In other words, based on the position information of the target object TG in the first image PC1, the device control unit 184 may control the rotation angle of the first reflecting member 161 to set an area (area re-imaged by the re-imaging optical system 130) in the image formation area of ​​the intermediate image Imd that includes at least a portion of the image of the target object TG so that an enlarged image including at least a portion of the image of the target object TG is re-imaged in the imaging area 152. It can also be said that the device control unit 184 controls the rotation angle of the first reflecting member 161 to select a region including at least a portion of the image of the target object TG from the image formation region of the intermediate image Imd based on position information of the target object TG in the first image PC1 so that an enlarged image including at least a portion of the image of the target object TG is re-imaged in the imaging region 152. The device control data table may be a data table indicating the relationship between the position information of the target object TG in the first image PC1 and the rotation angle of the first reflecting member 161. The device control data table may be created by previously calibrating the positional relationship between the first imaging element 141, the second imaging element 151, and the first reflecting member 161. In this case, too, the re-imaging optical system 130 may be configured so that the second image Im2 re-imaged via the first reflecting member 162 is located at the center of the imaging region 152 of the second imaging element 151, regardless of the rotation angle of the first reflecting member 162. As a result, regardless of where in the first image Im1 at least a portion of the image of the target object TG is located, the second imaging device 150 can capture a second image Im2 that includes at least a portion of the image of the target object TG that has been enlarged and re-imaged by the re-imaging optical system 130, and generate image information of the second image Im2.

[0051] Note that the device control unit 184 may control the rotation angle of the first reflecting member 161 based on directional information about the target object TG and / or position information about the target object TG in the first image PC1 so that the image of the target object TG included in the intermediate image Imd (first image Im1) is re-imaged at a position other than the center of the imaging area 152 of the second imaging element 151. In this case, the re-imaging optical system 130 may be configured so that the second image Im2 re-imaged via the first reflecting member 162 is positioned other than the center of the imaging area 152 of the second imaging element 151, regardless of the rotation angle of the first reflecting member 162. In addition, the device control unit 184 may control the rotation angle of the first reflecting member 161 based on directional information of the target object TG and / or positional information of the target object TG in the first image PC1 so that at least a portion of the image of the target object TG contained in the intermediate image Imd (first image Im1) is positioned and re-imaged in the imaging area 152 of the second imaging element 151.

[0052] In this embodiment, the first reflecting member 161 is rotated using the driving device 163 based on image information of the first image Im1 including the image of the target object TG, whereby the second image Im2 to be captured by the second imaging device 150 is determined, and the measurement light LM from the distance measurement device 170 is irradiated onto the target object TG. Note that the first image Im1 may include an image of a portion of the target object TG.

[0053] For example, by rotating the first reflecting member 161 using the driving device 163 based on image information of the first image Im1 including the image of the target object TG, a portion of the image formation area of ​​the intermediate image Imd to be re-imaged as the second image Im2 may be selected so that a portion of the first optical path of light forming the image of the target object TG included in the second image Im2 overlaps a portion of the second optical path of the measurement light LM from the distance measurement device 170. Then, the distance measurement device 170 may irradiate the measurement light LM in a state in which a portion of the image formation area is selected from the image formation area so that a portion of the first optical path overlaps a portion of the second optical path. Note that the first optical path may be the first optical path of light forming an image of a portion of the target object TG included in the second image Im2. Alternatively, the entire first optical path may overlap a portion of the second optical path. Alternatively, a portion of the first optical path may overlap a portion of the second optical path. Alternatively, the entire first optical path may overlap a portion of the second optical path.

[0054] In other words, based on image information of the first image Im1 including the image of the target object TG captured by the first imaging device 140, the second image Im2 may be formed such that a part of the first optical path of light forming the image of the target object TG included in the second image Im2 overlaps with a part of the second optical path of the measurement light LM from the distance measurement device 170. Then, the distance measurement device 170 may irradiate the measurement light LM in a state in which the second image Im2 is formed such that the first optical path overlaps with a part of the second optical path.

[0055] In other words, based on image information of the first image Im1 including the image of the target object TG, a partial region of the image formation region of the intermediate image Imd may be selected from the image formation region so that a part of the first optical path of the light forming the target object TG included in the second image Im2 overlaps with a part of the second optical path of the measurement light LM from the distance measurement device 170. Then, the distance measurement device 170 may irradiate the measurement light LM in a state in which a partial region of the image formation region of the intermediate image Imd is selected from the image formation region so that a part of the first optical path overlaps with a part of the second optical path.

[0056] Furthermore, by rotating the first reflecting member 161 using the driving device 163 based on image information of the first image Im1 including the image of the target object TG, a portion of the image formation area of ​​the intermediate image Imd re-formed as the second image Im2 may be selected from the image formation area so that the image of the target object TG included in the second image Im2 is superimposed on the non-image capture area 154 of the second image capture element 151. Then, the distance measurement device 170 may irradiate the measurement light LM in a state in which a portion of the image formation area is selected from the image formation area so that the image of the target object TG included in the second image Im2 is superimposed on the non-image capture area 154. Note that the image included in the second image Im2 may be a portion of the image of the target object TG included in the second image Im2. Furthermore, at least a portion of the image of the target object TG included in the second image Im2 may be superimposed on a portion of the non-image capture area 154 of the second image capture element 151.

[0057] Specifically, as described above, the device control unit 184 may control the rotation angle of the first reflecting member 161 based on image information of the first image Im1 including the image of the target object TG (specifically, directional information of the target object TG generated from the image information and / or positional information of the target object TG in the first image PC1) so that an image of at least a portion of the target object TG included in the intermediate image Imd (first image Im1) is re-imaged at the center of the imaging area 152 of the second imaging element 151. Note that in this case as well, the re-imaging optical system 130 may be configured so that the second image Im2 re-imaged via the first reflecting member 162 is positioned at the center of the imaging area 152 of the second imaging element 151, regardless of the rotation angle of the first reflecting member 162. Here, when the through-hole 155 (non-imaging region 154) is formed in the central portion of the second image sensor 151, when measurement light LM is emitted from the distance measurement device 170 in a state in which at least a portion of the image of the target object TG included in the intermediate image Imd is re-imaged at the center of the imaging region 152 of the second image sensor 151, the measurement light LM that passes through the through-hole 155 is irradiated in the direction in which the target object TG is located via the re-imaging optical system 130, the first reflecting member 161, the light splitting member 120, and the imaging optical system 110. At this time, it can be said that at least a portion of the first optical path overlaps with at least a portion of the second optical path. In other words, it can be said that a portion of the image formation region of the intermediate image Imd is selected so that the image of the target object TG included in the second image Im2 overlaps with the through-hole 155 (non-imaging region 154).

[0058] As a result, no matter where in the first image Im1 an image of at least a portion of the target object TG is located (that is, when at least a portion of the target object TG that falls within the angle of view of the imaging optical system 110 is imaged by the first imaging device 140), the measurement light LM emitted from the measurement light emitting device 171 of the distance measurement device 170 is irradiated onto the target object TG via the non-imaging region 154 (through-hole 155) of the second imaging element 151, the reimaging optical system 130 (the second optical system 132 and the first optical system 131), the first reflecting member 161, the light splitting member 120, and the imaging optical system 110. The light from the target object TG irradiated with the measurement light LM reaches the light receiving device 172 of the distance measurement device 170 in the reverse order of the measurement light LM from the measurement light emitting device 171. Therefore, the distance measurement device 170 can generate distance information of the target object TG based on the light receiving device 172 receiving the light from the target object TG irradiated with the measurement light LM from the measurement light irradiating device 171. Furthermore, simply by setting the rotation angle of the first reflecting member 161, the distance measurement device 170 can generate distance information of the target object TG, and the second imaging device 150 can generate image information of the second image Im2 including at least a portion of the image of the target object TG by capturing the second image Im2 including at least a portion of the image of the target object TG enlarged and re-imaged by the reimaging optical system 130. Therefore, the distance information of the target object TG and the image information of the second image Im2 including at least a portion of the image of the target object TG can be generated in a short time.

[0059] The distance information acquisition unit 185 acquires distance information of the target object TG output from the distance measurement device 170. The distance information of the target object TG acquired by the distance information acquisition unit 185 may be stored in the storage unit 181. It should be noted that the control device 180 does not need to be equipped with the distance information acquisition unit 185. In this case, for example, the distance measurement device 170 may output the generated distance information of the target object TG to the irradiation control device 25 of the electromagnetic wave irradiating device 20. It should be noted that the distance measurement device 170 may output the generated distance information of the target object TG to the irradiation control device 25 via the output device 187.

[0060] The image correction unit 186 corrects the image information of the second image Im2 acquired by the image information acquisition unit 182. As shown in FIG. 9 , the orientation of the target object TG in the second image Im2 rotates relative to the orientation of the target object TG in the intermediate image Imd (or the first image Im1) depending on the rotation angle of the first reflecting member 161. The image correction unit 186 may use a correction data table stored in the storage unit 181 to correct the image information of the second image Im2 so that the orientation of the target object TG in the image of the second image Im2 becomes the same as the orientation of the target object TG in the intermediate image Imd (or the first image Im1). FIG. 11 shows an example of the image of the second image Im2 (second image PC2) in which the orientation of the target object TG has been corrected. Note that the correction data table may be a data table indicating the relationship between the rotational position of the first reflecting member 161 and the amount of correction for the orientation of the target object TG included in the image of the second image Im2. The image information of the second image Im2 corrected by the image corrector 186 may be stored in the storage unit 181. Note that if the change in the orientation of the target object TG in the second image Im2 according to the rotation angle of the first reflecting member 161 is small enough not to affect the purpose of irradiating the target object TG from the electromagnetic wave irradiation device 20 and destroying, exterminating, or removing the target object TG, the image corrector 186 does not need to correct the image information of the second image Im2, and the control device 180 does not need to be equipped with the image corrector 186.

[0061] The output device 187 may output the direction information of the target object TG generated by the image analysis unit 183 and the distance information of the target object TG acquired by the distance information acquisition unit 185 (i.e., the distance information of the target object TG generated by the distance measurement device 170) to the irradiation control device 25 of the electromagnetic wave irradiation device 20. At this time, the irradiation control device 25 may control at least one of the emission device 21 and the support device 23 to irradiate the target object TG with the electromagnetic waves LB, based on the direction information of the target object TG and the distance information of the target object TG output from the output device 187. For example, when the direction information of the target object TG is direction information of the target object TG relative to the imaging system 100, the irradiation control device 25 may correct the direction information of the target object TG to the direction information of the electromagnetic wave irradiation device 20, based on the positional relationship between the imaging system 100 and the electromagnetic wave irradiation device 20. For example, when the distance information of the target object TG is the distance information of the target object TG from the imaging system 100, the irradiation control device 25 may correct the distance information of the target object TG from the electromagnetic wave irradiation device 20 based on the positional relationship between the imaging system 100 and the electromagnetic wave irradiation device 20, in addition to or instead of correcting the direction information of the target object TG. Note that the irradiation control device 25 is not limited to correcting at least one of the direction information of the target object TG and the distance information of the target object TG. For example, the control device 180 may generate at least one of the direction information of the target object TG relative to the electromagnetic wave irradiation device 20 and the distance information of the target object TG from the electromagnetic wave irradiation device 20 based on the positional relationship between the imaging system 100 and the electromagnetic wave irradiation device 20. Note that the positional relationship between the imaging system 100 and the electromagnetic wave irradiation device 20 may be determined in advance. The previously determined positional relationship between the imaging system 100 and the electromagnetic wave irradiation device 20 may be stored in the storage unit 181.

[0062] For example, the irradiation control device 25 controls the support device 23 (i.e., adjusts the emission direction of the electromagnetic waves LB from the emission device 21) based on directional information about the target object TG (directional information about the target object TG relative to the electromagnetic wave emission device 20) so that the electromagnetic waves LB are emitted from the emission device 21 in the direction in which the target object TG is located. For example, in addition to or instead of controlling the support device 23, the irradiation control device 25 may adjust the output of the electromagnetic waves LB emitted from the emission device 21 based on distance information about the target object TG (distance information about the target object TG from the electromagnetic wave emission device 20). In this case, the irradiation control device 25 may increase the output of the electromagnetic waves LB emitted from the emission device 21 as the distance of the target object TG from the electromagnetic wave emission device 20 increases.

[0063] The irradiation control device 25 may also generate position coordinate information of the target object TG based on direction information of the target object TG and distance information of the target object TG. The irradiation control device 25 may control at least one of the emission device 21 and the support device 23 based on the generated position coordinate information of the target object TG so that the target object TG is irradiated with the electromagnetic waves LB. The irradiation control device 25 does not necessarily need to generate the position coordinate information of the target object TG, and the control device 180 may generate the position coordinate information of the target object TG and output it to the irradiation control device 25. The position coordinate information of the target object TG may be three-dimensional coordinates of the target object TG in a coordinate system based on the electromagnetic wave irradiation device 20, or may be three-dimensional coordinates of the target object TG in another coordinate system (e.g., a global coordinate system or a coordinate system based on the imaging system 100). In this case, the position coordinate information of the target object TG may be generated using a transformation matrix between coordinate systems previously determined by calibration.

[0064] Furthermore, the output device 187 may not output at least one of the direction information of the target object TG and the distance information of the target object TG to the irradiation control device 25. In this case, the control device 180 may not generate at least one of the direction information of the target object TG and the distance information of the target object TG that are not output to the irradiation control device 25. For example, if the direction of the target object TG is known by the electromagnetic wave irradiation device 20 (irradiation control device 25), the output device 187 may not output the direction information of the target object TG to the irradiation control device 25. Furthermore, if the distance to the target object TG is known by the electromagnetic wave irradiation device 20, the output device 187 may not output the distance information of the target object TG to the irradiation control device 25. Furthermore, for example, when the direction information of the target object TG output by the output device 187 is information regarding the direction of the target object TG relative to the electromagnetic wave irradiation device 20 (or when the irradiation control device 25 is capable of generating direction information of the target object TG relative to the electromagnetic wave irradiation device 20), the output device 187 does not need to output distance information of the target object TG. In this case, the irradiation control device 25 may control at least one of the emission device 21 and the support device 23 to irradiate the target object TG with the electromagnetic waves LB based on the direction information of the target object TG. In this way, the output device 187 may output at least one of the direction information of the target object TG and the distance information of the target object TG to the electromagnetic wave irradiation device 20. The electromagnetic wave irradiation device 20 may control at least one of the emission device 21 and the support device 23 to irradiate the target object TG with the electromagnetic waves LB based on at least one of the direction information of the target object TG and the distance information of the target object TG output from the output device 187. Note that the control device 180 does not need to be equipped with the output device 187. In this case, for example, the image analysis unit 183 may output the generated direction information of the target object TG to the irradiation control device 25. Furthermore, the distance information acquisition unit 185 may output the generated distance information of the target object TG to the irradiation control device 25.

[0065] Furthermore, in addition to / instead of outputting at least one of the direction information of the target object TG and the distance information of the target object TG to the irradiation control device 25, the output device 187 may output image information of the second image Im2 corrected by the image correction unit 186 to the irradiation control device 25 of the electromagnetic wave irradiation device 20. As described above, the control device 180 does not need to include the image correction unit 186. In that case, the output device 187 may output image information of the second image Im2, which is generated by the second imaging device 150 and includes an enlarged image of at least a part of the target object TG, to the irradiation control device 25. In this case, for example, the irradiation control device 25 may use the image information of the second image Im2 including an enlarged image of at least a part of the target object TG to verify (determine) whether the target object TG is an object to be destroyed, exterminated, or removed by irradiating it with electromagnetic waves LM (i.e., whether it has been erroneously recognized as the target object TG). If, as a result of the comparison (determination) based on the image information, the target object TG is determined to be an object (i.e., the target object TG) that should be destroyed, exterminated, or removed by irradiating it with electromagnetic waves LM, the irradiation control device 25 may control at least one of the emission device 21 and the support device 23 so that the electromagnetic waves LB are irradiated onto the target object TG based on at least one of the directional information of the target object TG and the distance information of the target object TG.

[0066] In this way, the irradiation control device 25 may control at least one of the emission device 21 and the support device 23 to irradiate the electromagnetic wave LB onto the target object TG based on at least one of the directional information of the target object TG and the distance information of the target object TG output from the output device 187 and the image information of the second image Im2.

[0067] Here, a case where the positional relationship between the target object TG and the imaging system 100 changes will be described. Image information of the first image Im1 captured by the first imaging device 140 before the positional relationship between the target object TG and the imaging system 100 changes will be referred to as first image information. Furthermore, position information of the target object TG in the image (first image PC1) indicated by the first image information generated by the image analysis unit 183 will be referred to as first position information. Direction information of the target object TG generated by the image analysis unit 183 before the positional relationship between the target object TG and the imaging system 100 changes will be referred to as first direction information. Distance information of the target object TG generated by the distance measurement device 170 before the positional relationship between the target object TG and the imaging system 100 changes will be referred to as first distance information. Image information of the second image Im2 captured by the second imaging device 150 before the positional relationship between the target object TG and the imaging system 100 changes will be referred to as third image information. When the positional relationship between the target object TG and the imaging system 100 changes (for example, when the position of the target object TG changes relative to the imaging system 100), the position of at least a portion of the image of the target object TG included in the first image Im1 changes, and the position of at least a portion of the image of the target object TG included in the intermediate image Imd also changes. Furthermore, in accordance with the change in the position of at least a portion of the image of the target object TG included in the intermediate image Imd, the position of at least a portion of the image of the target object TG included in the second image Im2 also changes. The first imaging device 140 captures the first image Im1 in which the position of at least a portion of the image of the target object TG has changed, and outputs second image information of the first image Im1 to the control device 180.

[0068] The image information acquisition unit 182 of the control device 180 acquires second image information of the first image Im1 output from the first imaging device 140. As described above, the image analysis unit 183 generates second position information of the target object TG in the image (first image PC1) indicated by the second image information, based on the second image information of the first image Im1 acquired by the image information acquisition unit 182. As described above, the image analysis unit 183 generates second direction information of the target object TG based on the second position information of the target object TG in the image (first image PC1) indicated by the generated second image information.

[0069] As described above, the device control unit 184 may control the drive device 163 of the reflecting member rotation device 160 based on at least one of the second direction information of the target object TG generated by the image analysis unit 183 and the second position information of the target object TG in the image indicated by the second image information (first image PC1), so that a region of the image formation region of the intermediate image Imd that includes at least a partial image of the target object TG whose position has changed is reformed as the second image Im2. Specifically, the device control unit 184 may control the rotation angle of the first reflecting member 161 rotated by the drive device 163 based on at least one of the second direction information of the target object TG and the second position information of the target object TG in the image indicated by the second image information (first image PC1), so that an enlarged image of at least a partial image of the target object TG included in the intermediate image Imd (first image Im1) is positioned at the center of the imaging region 152 of the second imaging element 151 and reformed. Furthermore, as described above, when measurement light LM is emitted from the distance measurement device 170 (measurement light emitting device 171) in a state in which at least a part of the image of the target object TG whose position has changed and is included in the intermediate image Imd is re-imaged at the center of the imaging region 152 of the second image sensor 151, the measurement light LM that has passed through the through hole 155 is irradiated in the direction of the target object TG whose position has changed via the re-imaging optical system 130, the first reflecting member 161, the light splitting member 120, and the imaging optical system 110. Light from the target object TG irradiated with the measurement light LM travels in the reverse order of the measurement light LM from the measurement light emitting device 171 and reaches the light receiving device 172. The distance measurement device 170 may generate second distance information of the target object TG whose position has changed based on the light reception result by the light receiving device 172. As a result, even if the positional relationship between the target object TG and the imaging system 100 changes, the second imaging device 150 can capture the second image Im2 that includes an image of at least a portion of the target object TG whose position has changed. The second imaging device 150 generates fourth image information of the second image Im2 that includes an enlarged image of at least a portion of the target object TG whose position has changed. In other words, even if the positional relationship between the target object TG and the imaging system 100 changes, the second imaging device 150 can follow the target object TG whose positional relationship has changed and generate fourth image information of the second image Im2 that includes an enlarged image of at least a portion of the target object TG whose position has changed.

[0070] Furthermore, even if the positional relationship between the target object TG and the imaging system 100 changes, the distance measurement device 170 can generate the second distance information of the target object TG whose position has changed. In other words, even if the positional relationship between the target object TG and the imaging system 100 changes, the distance measurement device 170 can generate the second distance information of the target object TG whose position has changed by tracking the target object TG whose positional relationship has changed. In this case, the device control unit 184 may control the rotation angle of the first reflecting member 161 in accordance with the change in the positional relationship of the target object TG so that the measurement light LM from the distance measurement device 170 is irradiated continuously or intermittently to the target object TG.

[0071] The output device 187 may output at least one of the second direction information of the target object TG generated by the image analysis unit 183 and the second distance information of the target object TG acquired by the distance information acquisition unit 185 (i.e., the second distance information of the target object TG generated by the distance measurement device 170) to the irradiation control device 25 of the electromagnetic wave irradiation device 20. In this case, the irradiation control device 25 may control at least one of the emission device 21 and the support device 23 so as to continuously or intermittently irradiate the target object TG with the electromagnetic waves LB, based on at least one of direction change information generated based on the first direction information and the second direction information output from the output device 187 and distance change information generated based on the first distance information and the second distance information output from the output device 187. Here, the direction change information may be information indicating a change in the direction of the target object TG relative to the image capture system 100 or the electromagnetic wave irradiation device 20 in accordance with a change in the positional relationship between the target object TG and the image capture system 100. The distance change information may also be information indicating a change in the distance of the target object TG from the imaging system 100 or the electromagnetic wave irradiating device 20 in accordance with a change in the positional relationship between the target object TG and the imaging system 100. The control device 180 may generate the direction change information based on the first direction information and the second direction information, or may generate the distance change information based on the first distance information and the second distance information. In this case, the control device 180 (output device 187) may output at least one of the generated direction change information and distance change information to the irradiation control device 25.

[0072] Furthermore, the output device 187 may output, to the irradiation control device 25 of the electromagnetic wave irradiation device 20, fourth image information of the second image Im2 corrected by the image correction unit 186 and including an enlarged image of at least a part of the target object TG, in addition to / instead of at least one of the second direction information of the target object TG generated by the image analysis unit 183 and the second distance information of the target object TG acquired by the distance information acquisition unit 185. As described above, the control device 180 does not need to include the image correction unit 186. In that case, the output device 187 may output, to the irradiation control device 25 of the electromagnetic wave irradiation device 20, fourth image information of the second image Im2 acquired by the image information acquisition unit 182 (i.e., fourth image information of the second image Im2 captured by the second imaging device 150). In this case, for example, the irradiation control device 25 may use fourth image information of the second image Im2, which includes an enlarged image of at least a portion of the target object TG, to verify (determine) whether the target object TG is an object to be irradiated with electromagnetic waves LM to be destroyed, exterminated, or removed (i.e., whether it has been erroneously recognized as the target object TG). If, as a result of the verification (determination) based on the image information, the target object TG is determined to be an object to be irradiated with electromagnetic waves LM to be destroyed, exterminated, or removed (i.e., the target object TG), the irradiation control device 25 may control at least one of the emission device 21 and the support device 23 to irradiate the target object TG with electromagnetic waves LM based on at least one of direction information of the target object TG and distance information of the target object TG. Alternatively, the irradiation control device 25 may use image change information generated based on the third image information and the fourth image information to verify (determine) whether the target object TG is an object to be irradiated with electromagnetic waves LM to be destroyed, exterminated, or removed.

[0073] For example, the image change information may be information indicating a luminance change of a pixel corresponding to the target object TG in the image. In this case, the irradiation control device 25 may use the image change information to determine that the target object TG is the same as the target object TG matched based on the third image information before the position change, if the luminance change of the pixel corresponding to the target object TG in the image is smaller than a threshold value. This allows the electromagnetic wave irradiation device 20 to reliably irradiate the target object TG whose positional relationship has changed with the electromagnetic wave LB, even if the positional relationship between the target object TG and the imaging system 100 changes.

[0074] Furthermore, the imaging system 100 (output device 187) may, at a predetermined rate, control the rotation angle of the first reflecting member 161 based on image information of the first image Im1 including an image of at least a portion of the target object TG generated by the first imaging device 140, so that at least a portion of the image of the target object TG contained in the intermediate image Imd is positioned at the center of the imaging area 152 in the second imaging element 151 and enlarged and re-imaged, and may sequentially output at least one of the following information to the irradiation control device 25 of the electromagnetic wave irradiation device 20: image information of the second image Im2 including an enlarged image of at least a portion of the target object TG generated by the second imaging device 150, directional information of the target object TG generated by the image analysis unit 183, and distance information of the target object TG generated by the distance measurement device 170, as described above. In this case, the irradiation control device 25 may control at least one of the emission device 21 and the support device 23 to continuously or intermittently irradiate the target object TG with the electromagnetic waves LB based on at least one of image information of the second image Im2, direction information of the target object TG, and distance information of the target object TG, which are sequentially output at a predetermined rate. This allows the electromagnetic wave irradiation device 20 to reliably irradiate the target object TG with the electromagnetic waves LB while tracking the target object TG, even if the positional relationship between the target object TG and the imaging system 100 changes continuously or intermittently. The predetermined rate may be at least one of the imaging rate (frame rate) of the first imaging device 140 and the imaging rate (frame rate) of the second imaging device 150. In this case, the imaging rate may be 500 fps or more (e.g., 1000 fps) or less. The predetermined rate may also be set based on at least one of the movement speed and movement frequency of the target object TG. For example, the higher the moving speed of the target object TG, the higher the predetermined rate may be set to. In this case, the imaging rate of at least one of the first imaging device 140 and the second imaging device 150 may be set to the predetermined rate.

[0075] The output device 187 may output at least one of the generated image information of the first image Im1, the image information of the second image Im1, the direction information of the target object TG, and the distance information of the target object TG to a display device (not shown). The imaging system 100 may be equipped with this display device. Based on the information output from the output device 187, the display device may display at least one of the image indicated by the image information of the first image Im1 (first image PC1), the image indicated by the image information of the second image Im1 (second image PC2), the direction indicated by the direction information of the target object TG (e.g., the direction of the target object TG relative to at least one of the imaging system 100 and the electromagnetic wave irradiation device 20), and the distance indicated by the distance information of the target object TG (e.g., the distance of the target object TG relative to at least one of the imaging system 100 and the electromagnetic wave irradiation device 20). The imaging system 100 may be equipped with this display device. The image indicated by the image information of the first image Im1 (first image PC1) output to the display device may include at least a partial image of the target object TG. Furthermore, the image (second image PC2) indicated by the image information of the second image Im2 output to the display device may include an image of at least a portion of the target object TG.

[0076] [Measurement Method] Next, a measurement method using the imaging system 100 according to the first embodiment will be outlined. FIG. 7 is a flowchart showing the measurement method according to the first embodiment. Note that each process in the measurement method is executed based on a program stored in the storage unit 181. As shown in FIG. 7, the imaging system 100 first acquires directional information of the target object TG (step ST10). At this time, the first imaging device 140 captures a first image Im1 including at least a partial image of the target object TG, and outputs image information of the generated first image Im1 to the control device 180. The image information acquisition unit 182 acquires the image information of the first image Im1 output from the first imaging device 140.

[0077] As described above, the image analysis unit 183 generates position information of the target object TG in the first image PC1 (the image indicated by the image information of the first image Im1) based on image information of the first image Im1 including at least a partial image of the target object TG acquired by the image information acquisition unit 182. The image analysis unit 183 generates directional information of the target object TG based on the position information of the target object TG in the generated first image PC1. At this time, the device control unit 184 controls the drive device 163 of the reflecting member rotation device 160 based on the directional information of the target object TG generated by the image analysis unit 183 so that a region of the image formation region of the intermediate image Imd including at least a partial image of the target object TG is enlarged and re-imaged as the second image Im2 by the re-imaging optical system 130. For example, the device control unit 184 controls the rotation angle of the first reflecting member 161 rotated by the driving device 163 based on at least one of the directional information of the target object TG and the positional information of the target object TG in the first image PC1 so that at least a portion of the image of the target object TG contained in the intermediate image Imd (first image Im1) is re-imaged at the center of the imaging area 152 in the second imaging element 151.

[0078] Next, the imaging system 100 acquires distance information of the target object TG (step ST20). At this time, the rotation angle of the first reflecting member 161 is set so that at least a portion of the image of the target object TG included in the intermediate image Imd is re-imaged at the center of the imaging region 152 of the second imaging element 151. The distance measurement device 170 then irradiates the target object TG with measurement light LM via the non-imaging region 154 (through-hole 155) of the second imaging element 151, the second optical system 132, the first reflecting member 161, the first optical system 131, the light splitting member 120, and the imaging optical system 110, thereby generating distance information of the target object TG. The distance measurement device 170 outputs the generated distance information of the target object TG to the distance information acquisition unit 185. The distance information acquisition unit 185 acquires the distance information of the target object TG output from the distance measurement device 170. In step ST10, if direction information of the target object TG is not used to control the rotation angle of first reflecting member 161, step ST10 may be executed between steps ST20 and ST40 (described later). In that case, in step ST20, first imaging device 140 captures a first image Im1 including an image of at least a portion of the target object TG, and image analysis unit 183 generates position information of the target object TG in the first image PC1 based on image information of first image Im1 including an image of at least a portion of the target object TG.

[0079] Next, the imaging system 100 acquires image information of the second image Im2 (step ST30). At this time, the rotation angle of the first reflecting member 161 is set so that at least a portion of the image of the target object TG included in the intermediate image Imd is re-imaged at the center of the imaging area 152 of the second imaging element 151. The second imaging device 150 then captures the second image Im2, which includes at least a portion of the image of the target object TG, and outputs the image information of the generated second image Im2 to the image information acquisition unit 182. The image information acquisition unit 182 acquires the image information of the second image Im2 output from the second imaging device 150. Note that the image correction unit 186 may use a correction data table stored in the storage unit 181 to correct the image information of the second image Im2 so that the orientation of the target object TG in the image of the second image Im2 is the same as the orientation of the target object TG in the intermediate image Imd (or the first image Im1). Note that step ST30 may be executed between step ST10 and step ST20.

[0080] Then, the imaging system 100 outputs information (step ST40). At this time, the output device 187 may output at least one of the direction information of the target object TG generated by the image analysis unit 183 and the distance information of the target object TG acquired by the distance information acquisition unit 185 (i.e., the distance information of the target object TG generated by the distance measurement device 170) to the irradiation control device 25 of the electromagnetic wave irradiation device 20. At this time, the irradiation control device 25 may control at least one of the emission device 21 and the support device 23 to irradiate the target object TG with the electromagnetic waves LB based on at least one of the direction information of the target object TG and the distance information of the target object TG output from the output device 187. Furthermore, the output device 187 may output image information of the second image Im2 corrected by the image correction unit 186 to the irradiation control device 25. At this time, the irradiation control device 25 may control at least one of the emission device 21 and the support device 23 to irradiate the electromagnetic wave LB to the target object TG based on at least one of the directional information of the target object TG and the distance information of the target object TG output from the output device 187 and the image information of the second image Im2.

[0081] Note that the above-described steps ST10 to ST40 may be repeated. For example, by repeating the above-described steps ST10 to ST40 when the positional relationship between the target object TG and the imaging system 100 changes, the distance measurement device 170 may continuously or intermittently irradiate the target object TG whose positional relationship is changing, as described above. Furthermore, by repeating the above-described steps ST10 to ST40, the irradiation control device 25 may emit the electromagnetic wave LB toward the target object TG based on at least one of the direction information of the target object TG, the distance information of the target object TG, and the image information of the second image Im2 output in ST40, as described above, so that the electromagnetic wave irradiation device 20 may continuously or intermittently irradiate the target object TG whose positional relationship is changing. Note that the above-described steps ST10 to ST40 may be repeated even when the positional relationship between the target object TG and the imaging system 100 does not change.

[0082] According to the first embodiment, the imaging system 100 includes a light splitting member 120 that splits light LT that has passed through at least a portion of the imaging optical system 110, a first imaging device 140 that captures a first image Im1 formed by one of the light beams split by the light splitting member 120, a second imaging device 150 that captures a second image Im2 formed by the other of the light beams split by the light splitting member 120, and a distance measurement device 170 that irradiates a target object TG with measurement light LM via the imaging optical system 110 based on image information of the first image Im1, which includes an image of at least a portion of the target object, captured by the first imaging device 140, and generates distance information about the target object. This allows the measurement light LM to accurately irradiate a target object TG that falls within the angle of view of the imaging optical system 110, thereby reliably generating distance information about the target object TG. Furthermore, even if the positional relationship between the target object TG and the imaging system 100 changes, the measurement light LM can be continuously or intermittently irradiated onto the target object TG in accordance with the changing positional relationship of the target object TG. Therefore, even if the distance to the target object TG changes due to a change in the positional relationship, the change in the distance can be measured accurately and reliably. Therefore, the electromagnetic wave irradiation device 20 can irradiate the electromagnetic waves LB to the target object TG accurately and reliably.

[0083] The optical system further includes a reflecting member rotating device 160 having a first reflecting member 161 with a reflecting surface 162 that reflects the other light split by the light splitting member 120 toward the second imaging device 150, and a driving device 163 that rotates the first reflecting member 161. The reflecting surface 162 of the first reflecting member 161 is disposed on the optical path of the measurement light LM from the distance measurement device 170. By rotating the first reflecting member 161 with the driving device 163, the measurement light LM from the distance measurement device 170 can be directed toward the target object in a short time. Therefore, it is possible to measure the distance to the target object TG in a short time after recognizing the target object TG in an image (image information of the first image Im1). Furthermore, by utilizing the distance information measured and generated in a short time by the distance measurement device 170, it is possible to instantly irradiate the target object TG that has appeared with an electromagnetic wave LB.

[0084] By rotating the first reflecting member 161 with the driving device 163, light from the target object TG irradiated with the measurement light LM can be directed toward the second imaging device 150 (second imaging element 151) in a short time. Therefore, it is possible to generate image information of the second image Im2 containing at least a portion of the image of the target object TG in a short time. By using the image information of the second image Im2 containing at least a portion of the image of the target object TG generated in a short time by the second imaging device 150, it is possible to instantly irradiate the emerging target object TG with the electromagnetic wave LB.

[0085] Furthermore, the directional information of the target object TG can be generated in a short time by the image analysis unit 183. Therefore, by using the directional information of the target object TG generated in a short time by the image analysis unit 183, it becomes possible to instantly irradiate the electromagnetic wave LB onto the target object TG that has appeared.

[0086] The imaging system further includes a reimaging optical system 130 that forms a second image Im2 by enlarging and reimaging a portion of the intermediate image Imd formed by the imaging optical system 110. The image of the second image Im2 optically enlarged by the reimaging optical system 130 has higher image quality than when a portion of the image of the first image Im1 is enlarged using image processing such as digital zoom. Therefore, by using the image of the second image Im2 optically enlarged by the reimaging optical system 130 and including at least a portion of the target object, the target object TG can be recognized (distinguished from other similar objects) with high resolution. This reliably prevents erroneous irradiation of the electromagnetic wave LB.

[0087] In the first embodiment described above, the light receiving device 172 of the distance measurement device 170 may be provided at a position separate from the measurement light emitting device 171. For example, a half mirror may be provided in the optical path of the reimaging optical system 130 between the reimaging optical system 130 (second optical system 132) and the second image sensor 151. The light receiving device may be disposed opposite the half mirror, away from the reimaging optical system 130 in a direction (e.g., the Y direction) intersecting the optical axis (second optical axis AX2) of the second optical system 132 in the reimaging optical system 130. In this case, the half mirror may transmit a portion of the measurement light LM emitted from the measurement light emitting device 171 and reflect the remaining light in the −Y direction. The half mirror may reflect a portion of the light from the target object irradiated with the measurement light LM in the +Y direction toward the light receiving device and transmit the remaining light. The half mirror may also transmit a portion of the light that has passed through the reimaging optical system 130 and reflect the remaining light. The half mirror may be a prism type or a flat type. The ratio of transmittance to reflectance of the half mirror may be 1:1. In this case, the measurement light emitting device and the light receiving device may be arranged in reverse. Furthermore, the light receiving device 172 does not need to be arranged coaxially with the optical axis of the imaging system 100 (e.g., the optical axis of the reimaging optical system 130) as long as it can receive light from the target object TG irradiated with the measurement light LM. For example, the light receiving device 172 may be installed on the outer surface of the housing 101 or on the above-mentioned movable body.

[0088] [Modification of First Embodiment] In the first embodiment described above, the reflecting member rotation device 160 is provided, but this is not limiting. Therefore, a modification of the imaging system according to the first embodiment will be described. The imaging system according to the modification of the first embodiment shares essential components with the imaging system 100 according to the first embodiment, except for the configuration of the reimaging optical system 230, the second imaging device 250, the holding unit 260, the driving unit 265, the distance measurement device 270, the control device 280, and the housing 201. Therefore, components similar to those in the first embodiment are denoted by the same reference numerals as in the first embodiment, and detailed description thereof will be omitted. As shown in FIG. 12 , the imaging system 200 according to the modification of the first embodiment includes the imaging optical system 110, the light splitting member 120, the reimaging optical system 230, the first imaging device 140, the second imaging device 250, the holding unit 260, the driving unit 265, the distance measurement device 270, the control device 280, and the housing 201.

[0089] The housing 201 accommodates and holds the imaging optical system 110, the light splitting member 120, the re-imaging optical system 230, the first image capture device 140, the holding unit 260 (the second image capture device 250 and the distance measurement device 270), and the drive unit 265. The imaging optical system 110, the light splitting member 120, and the first image capture device 140 have the same configurations as the imaging optical system 110, the light splitting member 120, and the first image capture device 140 according to the first embodiment, and detailed description thereof will be omitted. Note that in this modification, the light splitting member 120 is disposed between the imaging optical system 110 and the re-imaging optical system 230. In this modification, the light splitting member 120 may also be disposed midway through the imaging optical system 110. In this case, the light splitting member 120 may split light LT that has passed through a portion of the imaging optical system 110. The light splitting member 120 may also be a part of the imaging optical system 110. For example, the rear lens 112 may be disposed between the light splitting member 112 and the first image plane Im1, and between the light splitting member 120 and the intermediate image plane Imd.

[0090] In this modified example, the optical axis of the imaging optical system 110 and the optical axis of the re-imaging optical system 230, which is coaxial with the imaging optical system 110, may be collectively referred to as the optical axis AX11. The direction along the optical axis AX11 of the imaging optical system 110 and the re-imaging optical system 230 is referred to as the Y direction. The direction facing the first image capture device 140 is referred to as the Z direction. The direction perpendicular to the Y direction and the Z direction is referred to as the X direction. The X direction, Y direction, and Z direction are perpendicular to one another. For example, as shown in FIG. 1 , the Z direction may be the vertical direction, and the X direction and the Y direction may be horizontal directions.

[0091] As shown in FIG. 12 , the reimaging optical system 230 re-images the intermediate image Imd formed by the light LT that has passed through the imaging optical system 110 as a second image Im2. In other words, the second image Im2 is formed via the reimaging optical system 230 by the other light split by the light splitting member 120. The reimaging optical system 230 may re-image the intermediate image Imd formed by the light LT that has passed through the imaging optical system 110 as the second image Im2 at the same size. The reimaging optical system 230 may also reduce the intermediate image Imd formed by the light LT that has passed through the imaging optical system 110 and re-image it as the second image Im2. The reimaging optical system 230 may form the second image Im2 by enlarging and re-imaging a portion of the intermediate image Imd. The position where the intermediate image Imd is formed may be conjugate with the position where the first image Im1 is formed. As a result, by having the reimaging optical system 230 re-image at least a portion of the intermediate image Imd as the second image Im2, an effect equivalent to re-imaging at least a portion of the first image Im1 (a portion at the same relative position as the intermediate image Imd) can be obtained. In other words, the reimaging optical system 230 re-images a portion of the intermediate image Imd that corresponds to a portion of the first image Im1. Note that the position where the intermediate image Imd (third image) is formed may be conjugate with the position where the first image Im1 is formed.

[0092] Furthermore, the reimaging optical system 230 may be telecentric on the intermediate image Imd (beam splitting member 120) side. This suppresses divergence of the chief ray near the intermediate image Imd, allowing the aperture of the reimaging optical system 230 to be reduced. This allows the imaging system 200 to be miniaturized, thereby reducing manufacturing costs. Furthermore, it is possible to suppress variations in the angle of incidence of light incident on the beam splitting member 120 (beam splitting surface). While both the imaging optical system 110 and the reimaging optical system 230 are telecentric on the intermediate image Imd (beam splitting member 120) side, this is not a limitation. For example, one of the imaging optical system 110 and the reimaging optical system 230 may be telecentric on the intermediate image Imd (beam splitting member 120) side.

[0093] The reimaging optical system 230 includes a lens 231. In Fig. 12, the reimaging optical system 230 is schematically shown as having two lenses 231. The number of lenses 231 in the reimaging optical system 230 may be one, or may be two or more. In addition to the lens 231, the reimaging optical system 230 may include an existing optical member other than a lens.

[0094] As shown in FIG. 12 , the second imaging device 250 includes a second imaging element 251 that captures a second image Im2. The second imaging element 251 is configured similarly to the second imaging element 151 according to the first embodiment, except that it is held in a holding unit 260 together with a distance measurement device 270. As shown in FIG. 13 , a plurality of second pixels 253 are two-dimensionally arranged in an imaging region 252 of the second imaging element 251. The second pixels 253 are arranged at a predetermined pitch in the X and Z directions. Each second pixel 253 of the second imaging element 251 performs photoelectric conversion on light that passes through the light splitting member 120, passes through the reimaging optical system 230, and enters the second imaging element 251. The second imaging device 250 outputs image information of the second image Im2 generated based on the photoelectric conversion at each second pixel 253 of the second imaging element 251 to the control device 280. For example, the arrangement pitch of the second pixels 253 of the second imaging element 251 may be smaller than the arrangement pitch of the first pixels 143 of the first imaging element 141. In other words, the number of second pixels 253 per unit area of ​​the effective region of the second imaging element 251 (the region where the second pixels 253 are arranged) may be larger (higher density) than the number of first pixels 143 per unit area of ​​the effective region of the first imaging element 141 (the region where the first pixels 143 are arranged). In other words, the second imaging element 251 may be an imaging element with a higher resolution than the first imaging element 141. Note that the arrangement pitch of the second pixels 253 of the second imaging element 251 may be equal to or smaller than the arrangement pitch of the first pixels 143 of the first imaging element 141. For example, the area of ​​the effective region of the second imaging element 251 may be smaller than the area of ​​the effective region of the first imaging element 141.

[0095] Furthermore, as in the first embodiment, a non-imaging region 254 may be formed in the center of the second imaging element 251. A through-hole 255 is formed in the second imaging element 251 in a direction intersecting the non-imaging region 254 of the second imaging element 251. In this case, the non-imaging region 254 is a penetrating region formed by the through-hole 255. The non-imaging region 254 can also be referred to as the cross-sectional area of ​​the through-hole 255. The through-hole 255 is configured to allow the measurement light LM emitted from the distance measurement device 270 to pass through. The cross-sectional shape of the through-hole 255 is not limited to a rectangle and may be other shapes such as a circle. The opening size (cross-sectional area) of the through-hole 255 may be any size as long as the measurement light LM emitted from the distance measurement device 270 can pass through it. However, a smaller opening size is preferable to ensure a larger area for the imaging region 252 (effective region). As shown in FIG. 14 , the second imaging element 251 (imaging region 252) is smaller than the second image Im2 and is configured to capture a portion of the second image Im2. For example, the diagonal length of the second imaging element 251 (imaging region 252) may be smaller than the diameter of the second image Im2 or may be smaller than the radius of the second image Im2. The position of the through-hole 255 is not limited to the central portion of the second imaging element 251, and may be formed at a position away from the center of the second imaging element 251. The through-hole 255 does not have to be formed in the non-imaging region 254. For example, at least a portion of the distance measurement device 270 (e.g., the measurement light irradiation device (171)) may be disposed in the non-imaging region 254. In this case, at least a part of the distance measurement device 270 may be installed in the non-imaging area 254 of the second imaging element 251, or may be installed away from the second imaging element 251 (for example, between the second imaging element 251 and the re-imaging optical system 230).

[0096] 12 , the distance measurement device 270 is configured similarly to the distance measurement device 170 according to the first embodiment, except that it is held by a holding unit 260 together with the second image sensor 251. The distance measurement device 270 is disposed on the opposite side of the second image sensor 251 from the optical member of the reimaging optical system 230 that is closest to the second image sensor 251. The distance measurement device 270 irradiates the target object TG (see FIG. 1 ) with measurement light LM via the non-imaging region 254 (through-hole 255) of the second image sensor 251, the reimaging optical system 230, the light splitting member 120, and the imaging optical system 110, and generates distance information about the target object TG.

[0097] As shown in FIG. 12 , the holder 260 holds the second image sensor 251 and the distance measurement device 270. The driver 265 is configured using, for example, a linear motor or a stepping motor. The driver 265 can translate the holder 260, which holds the second image sensor 251 and the distance measurement device 270, in two directions (e.g., the X direction and the Z direction) intersecting the optical axis AX11 of the reimaging optical system 230. The driver 265 moves the second image sensor 251 in, for example, the X direction and the Z direction, thereby changing the imaging range of the intermediate image Imd (third image) captured by the second image sensor 251. This also changes the imaging field of view on the object side (target side) captured by the second image sensor 251. Furthermore, the driver 265 moves the distance measurement device 270 in, for example, the X direction and the Z direction, thereby changing the irradiation direction of the measurement light LM emitted from the distance measurement device 270.

[0098] The control device 280 is configured using, for example, a PC (personal computer) or the like. The control device 280 operates based on a program stored in a storage unit 281. As shown in Fig. 12 , the control device 280 includes a storage unit 281, an image information acquisition unit 282, an image analysis unit 283, a device control unit 284, a distance information acquisition unit 285, and an output device 287. The storage unit 281, the image information acquisition unit 282, the image analysis unit 283, the distance information acquisition unit 285, and the output device 287 are configured in the same manner as the storage unit 181, the image information acquisition unit 182, the image analysis unit 183, the distance information acquisition unit 185, and the output device 187 according to the first embodiment.

[0099] The device control unit 284 controls the drive unit 265. Based on the directional information of the target object TG generated by the image analysis unit 283, the device control unit 284 may control the drive unit 265 so as to capture an area including at least a portion of the image of the target object TG within the image formation area of ​​the second image Im2, which is the area where the second image Im2 (intermediate image Imd) is formed, as shown in FIG. 14 . Specifically, the device control unit 284 may use a device control data table stored in the storage unit 281 to control the position of the second image sensor 251 driven by the drive unit 265 based on the directional information of the target object TG so that the image of the target object TG included in the second image Im2 is positioned at the center of the imaging area 252 (the effective area where the second pixels 253 are formed) of the second image sensor 251. The device control data table may be a data table indicating the relationship between the directional information of the target object TG and the position of the second image sensor 251. This allows the second imaging device 250 to capture a portion of the second image Im2 that is re-imaged by the re-imaging optical system 230, the portion including the image of the target object TG. Note that the portion of the second image Im2 that is captured by the second imaging element 251 (the portion including the image of the target object TG) may be referred to as the second image Im2#.

[0100] Furthermore, the device control unit 284 may use a device control data table stored in the storage unit 281 to control the position of the second image sensor 251 driven by the drive unit 265 based on position information of the target object TG in the first image Im1 so that at least a partial image of the target object TG included in the second image Im2 is positioned at the center of the imaging area 252 of the second image sensor 251. The device control data table may be a data table indicating the relationship between the position information of the target object TG in the first image Im1 and the position of the second image sensor 251. Note that the device control data table may be created in advance by calibrating the positional relationship between the first image sensor 141, the second image sensor 251, and the holder 260.

[0101] In this modification, based on image information of the first image Im1 including the image of the target object TG captured by the first imaging device 140, the second image Im2# may be formed so that a portion of the first optical path of light forming the image of the target object TG included in the second image Im2# overlaps a portion of the second optical path of the measurement light LM from the distance measurement device 270. Then, in a state in which the second image Im2# is formed so that the first optical path overlaps a portion of the second optical path, the distance measurement device 270 may irradiate the measurement light LM. Note that the first image Im1 may include an image of a portion of the target object TG. The image included in the second image Im2# may be an image of a portion of the target object TG included in the second image Im2#. Alternatively, the entire first optical path may overlap a portion of the second optical path. Alternatively, the entire first optical path may overlap a portion of the second optical path. Alternatively, the entire first optical path may overlap a portion of the second optical path.

[0102] In other words, based on image information of the first image Im1 including the image of the target object TG, a partial region of the image formation region of the intermediate image Imd may be selected from the image formation region so that a part of the first optical path of the light forming the target object TG included in the second image Im2# overlaps with a part of the second optical path of the measurement light LM from the distance measurement device 270. Then, the distance measurement device 270 may irradiate the measurement light LM in a state in which a partial region of the image formation region of the intermediate image Imd is selected from the image formation region so that a part of the first optical path overlaps with a part of the second optical path.

[0103] As a result, no matter where in the first image Im1 at least a portion of the image of the target object TG is located (i.e., when at least a portion of the target object TG that falls within the angle of view of the imaging optical system 110 is imaged by the first imaging device 140), the measurement light LM emitted from the distance measurement device 270 (measurement light emitting device (171)) is irradiated onto the target object TG via the non-imaging region 254 (through hole 255) of the second imaging element 251, the reimaging optical system 230, the light splitting member 120, and the imaging optical system 110. The light from the target object TG irradiated with the measurement light LM travels in the reverse order of the measurement light LM from the distance measurement device 270 and reaches the distance measurement device 270 (light receiving device). Therefore, the distance measurement device 270 can generate distance information of the target object TG based on the light reception result of the light from the target object TG irradiated with the measurement light LM. Furthermore, simply by setting the position of the second image sensor 251, the distance measurement device 270 generates distance information of the target object TG, and the second image capture device 250 can generate image information of the second image Im2# including at least a portion of the image of the target object TG by capturing the second image Im2# including at least a portion of the image of the target object TG re-imaged by the re-imaging optical system 230. Therefore, the distance information of the target object TG and the image information of the second image Im2# including at least a portion of the image of the target object TG can be generated in a short time.

[0104] [Measurement Method] Next, a measurement method using the imaging system 200 according to a modification of the first embodiment will be outlined. The measurement method according to this modification is similar to the measurement method according to the first embodiment. Therefore, the measurement method will be described using the same flowchart as in the first embodiment, shown in FIG. 7 . Note that each process in the measurement method is executed based on a program stored in the storage unit 281. First, the imaging system 200 acquires directional information of the target object TG (step ST10), as in the first embodiment. At this time, in this modification, the device control unit 284 controls the drive unit 265 based on the directional information of the target object TG generated by the image analysis unit 283 so as to capture a portion of the image formation area of ​​the second image Im2 (intermediate image Imd) that includes at least a partial image of the target object TG. For example, the device control unit 284 controls the position of the second image sensor 251 driven by the drive unit 265 based on at least one of the directional information of the target object TG and the position information of the target object TG in the first image PC1 so that at least a portion of the image of the target object TG included in the second image Im2 is positioned at the center of the imaging area 252 in the second image sensor 251.

[0105] Next, the imaging system 200 acquires distance information of the target object TG (step ST20). At this time, the position of the second imaging element 251 is set so that at least a portion of the image of the target object TG included in the second image Im2 is located at the center of the imaging region 252 of the second imaging element 251. The distance measurement device 270 then irradiates the target object TG with measurement light LM via the non-imaging region 254 (through-hole 255) of the second imaging element 251, the reimaging optical system 230, the light splitting member 120, and the imaging optical system 110, thereby generating distance information of the target object TG. The distance measurement device 270 outputs the generated distance information of the target object TG to the distance information acquisition unit 285. The distance information acquisition unit 285 acquires the distance information of the target object TG output from the distance measurement device 270. In step ST10, if direction information of the target object TG is not used to control the position of the second image sensor 251, step ST10 may be executed between steps ST20 and ST40 (described later). In that case, in step ST20, the first image capturing device 140 captures a first image Im1 including an image of at least a portion of the target object TG, and the image analyzing unit 283 generates position information of the target object TG in the first image PC1 based on image information of the first image Im1 including an image of at least a portion of the target object TG.

[0106] Next, the imaging system 200 acquires image information of the second image Im2# (step ST30). At this time, the second imaging device 250 captures the second image Im2# including the image of the target object TG with the second imaging element 251 positioned so that at least a portion of the image of the target object TG included in the second image Im2 is located at the center of the imaging area 252 of the second imaging element 251, and outputs image information of the generated second image Im2# to the image information acquisition unit 282. The image information acquisition unit 282 acquires the image information of the second image Im2# output from the second imaging device 250. The correction by the image correction unit 186 described in the first embodiment does not need to be performed. Step ST30 may be performed between steps ST10 and ST20.

[0107] Then, the imaging system 200 outputs the information in the same manner as in the first embodiment (step ST40). Note that, as in the first embodiment, the above-described steps ST10 to ST40 may be repeated.

[0108] According to this modification, similarly to the first embodiment, it is possible to measure the distance to the target object by the distance measurement device 270 while capturing an image of the target object by the first imaging device 140 and tracking the target object.

[0109] In a modification of the first embodiment, the reimaging optical system 230 may not be provided. In this case, the second image sensor 251 may be held by the holder 260 so as to be positioned at or near the position of the image plane where the intermediate image Imd is formed. Note that the vicinity of the position of the image plane where the intermediate image Imd is formed refers to, for example, the vicinity of a range in which the second image sensor 251 can capture an image of a part of the intermediate image Imd so that the target object TG can be identified in the image of the intermediate image Imd.

[0110] Second Embodiment Next, an imaging system according to a second embodiment will be described. The imaging system according to the second embodiment has the same configuration as the imaging system 100 according to the first embodiment, except for the configuration of the second imaging device 350, the second reflecting member 368, the distance measurement device 370, and the housing 301. Therefore, the same components as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and detailed description thereof will be omitted. As shown in FIG. 15 , the imaging system 300 according to the second embodiment includes an imaging optical system 110, a light splitting member 120, a reimaging optical system 130, a first imaging device 140, a second imaging device 350, a reflecting member rotating device 160, the second reflecting member 368, the distance measurement device 370, a control device 180, and the housing 301.

[0111] The housing 301 accommodates and holds the imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first image capture device 140, the second image capture device 350, the reflecting member rotation device 160, the second reflecting member 368, and the distance measurement device 370. The imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first image capture device 140, the reflecting member rotation device 160, and the control device 180 have the same configurations as the imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first image capture device 140, the reflecting member rotation device 160, and the control device 180 according to the first embodiment, and detailed description thereof will be omitted.

[0112] In the second embodiment, as in the first embodiment, the optical axis of the first optical system 131 of the reimaging optical system 130 and the optical axis of the imaging optical system 110, which is coaxial with the first optical system 131, are referred to as the first optical axis AX1. The optical axis of the second optical system 132 of the reimaging optical system 130 is referred to as the second optical axis AX2. Furthermore, the direction along the first optical axis AX1 is referred to as the Y direction. The direction along the second optical axis AX2 is referred to as the Z direction. The direction perpendicular to the Y direction and the Z direction is referred to as the X direction.

[0113] As shown in FIG. 15 , the second imaging device 350 includes a second imaging element 351 that captures a second image Im2. The second imaging element 351 is configured similarly to the second imaging element 151 according to the first embodiment, except that the second imaging element 351 does not include a non-imaging region or a through-hole. As shown in FIG. 16 , a plurality of second pixels 353 are two-dimensionally arranged in an imaging region 352 of the second imaging element 351. The second pixels 353 are arranged at a predetermined pitch in the X and Z directions. Each second pixel 353 of the second imaging element 351 performs photoelectric conversion on light that passes through the light splitting member 120, passes through the reimaging optical system 130, and enters the second imaging element 351. The second imaging device 350 outputs image information of the second image Im2 generated based on the photoelectric conversion at each second pixel 353 of the second imaging element 351 to the control device 380.

[0114] As shown in FIG. 15 , the second reflecting member 368 is provided in at least a portion of the optical path of the reimaging optical system 130 between the reimaging optical system 130 (second optical system 132) and the second image sensor 351. The second reflecting member 368 may be configured using, for example, a half mirror that divides the amplitude of light. The half mirror may be a prism type or a flat type. The ratio of transmittance to reflectance of the half mirror may be 1:1. The second reflecting member 368 may reflect a portion of the measurement light LM emitted from the distance measurement device 370 in the −Z direction toward the reimaging optical system 130 and transmit the remaining light. The second reflecting member 368 may reflect a portion of the light from the target object TG (see FIG. 1 ) irradiated with the measurement light LM in the +Y direction toward the distance measurement device 370 and transmit the remaining light. Furthermore, the second reflecting member 368 may transmit a portion of the light that has passed through the reimaging optical system 130 and reflect the remaining light. The second reflecting member 368 may be smaller than the area (cross-sectional area of ​​the optical path of the reimaging optical system 130) through which light from the reimaging optical system 130 passes. In other words, of the light that has passed through the reimaging optical system 130, light that travels away from the second optical axis AX2 may not be incident on the second reflecting member 368 but may pass outside the second reflecting member 368, and part of the light that travels near the second optical axis AX2 may be transmitted through the second reflecting member 368.

[0115] Furthermore, the second reflecting member 368 may be larger than the area through which light from the reimaging optical system 130 passes (the cross-sectional area of ​​the optical path of the reimaging optical system 130), or may be the same size as the area through which light from the reimaging optical system 130 passes. In this case, the second reflecting member 368 may be designed so that the transmittance of the second reflecting member 368 at a position near the second optical axis AX2 is higher than the transmittance of the second reflecting member 368 at a position away from the second optical axis AX2, or may be designed so that the transmittance of the second reflecting member 368 at a position near the second optical axis AX2 is lower than the transmittance of the second reflecting member 368 at a position away from the second optical axis AX2. Furthermore, when the second optical system 132 of the reimaging optical system 130 is composed of two or more lenses, the second reflecting member 368 may be provided in an intermediate portion of the second optical system 132 (for example, between lenses). Furthermore, the second reflecting member 368 may be provided in the optical path of the reimaging optical system 130 between the second optical system 132 and the first reflecting member 161. In this way, the second reflecting member 368 may be provided in at least a part of the optical path of the reimaging optical system 130. Furthermore, the second reflecting member 368 may be configured using a dichromic mirror that divides the wavelength of light.

[0116] As shown in FIG. 15 , the distance measurement device 370 may be configured similarly to the distance measurement device 170 according to the first embodiment, except for the different arrangement. The distance measurement device 370 is disposed opposite the second reflecting member 368, away from the second reflecting member 368 in a direction (e.g., the Y direction) intersecting the optical axis (second optical axis AX2) of the second optical system 132 in the reimaging optical system 130. The distance measurement device 370 irradiates the target object TG (see FIG. 1 ) with measurement light LM via the second reflecting member 368, the second optical system 132, the first reflecting member 161, the first optical system 131, the light splitting member 120, and the imaging optical system 110, and generates distance information about the target object TG. As described in the first embodiment, the distance measurement device 370 may have a common configuration for the emission unit of the measurement light LM and the incidence unit of light from the target object TG. Further, the distance measurement device 370 may be configured such that an emission section for the measurement light LM and an incidence section for the light from the target object TG are provided separately.

[0117] Furthermore, in the second embodiment, for example, a TOF LiDAR, a TOF reflective laser sensor, or a TOF range image sensor may be used as the distance measurement device 370. For example, an FMCW LiDAR may be used as the FMCW range measurement device 370. Furthermore, at least a part of the distance measurement device 370 (for example, the measurement light irradiator (171)) may be disposed at a position conjugate with the position where the second image Im2 is formed. For example, when a LiDAR or a reflective laser sensor is used, the emission section of the measurement light LM in the distance measurement device 370 may be disposed at a position conjugate with the position where the second image Im2 is formed. Furthermore, when a TOF range image sensor is used, the entire pixel array portion of the TOF range image sensor (distance measurement device 370) may be disposed at a position conjugate with the position where the second image Im2 is formed (the position of the second image sensor 351). Furthermore, a part of the pixel array portion in the TOF range image sensor (distance measurement device 370) may be disposed at a position conjugate with the position where the second image Im2 is formed.

[0118] Note that, similarly to the first embodiment described above, the light receiving device (172) of the distance measurement device 370 may be provided at a position separate from the measurement light emitting device (171). For example, two second reflecting members 368 may be provided at different positions on the optical path of the reimaging optical system 130. In this case, one second reflecting member 368 may be provided on the optical path of the reimaging optical system 130, and the other second reflecting member 368 may be provided on the optical path of the reimaging optical system 130 farther from the second image sensor 351 than the position of the one second reflecting member 368. For example, one second reflecting member 368 may reflect a portion of the measurement light LM from the measurement light emitting device (171) in the −Z direction toward the first reflecting member 161 and transmit the other light. In addition, the other second reflecting member 368 may reflect a portion of the light from the target object TG irradiated with the measurement light LM in the +Y direction toward the light receiving device (172) and transmit the other light. Furthermore, the light receiving device (172) does not need to be arranged coaxially with the optical axis of the imaging system 100 (e.g., the optical axis of the reimaging optical system 130) as long as it can receive light from the target object TG irradiated with the measurement light LM. For example, the light receiving device (172) may be installed on the outer surface of the housing 301 or on the above-mentioned movable body.

[0119] [Measurement Method] Next, a measurement method using the imaging system 300 according to the second embodiment will be outlined. The measurement method according to the second embodiment is similar to the measurement method according to the first embodiment. Therefore, the measurement method will be described using the same flowchart as in the first embodiment, shown in FIG. 7. Note that each process in the measurement method is executed based on a program stored in the storage unit 181. First, the imaging system 300 acquires directional information of the target object TG in the same manner as in the first embodiment (step ST10).

[0120] Next, the imaging system 300 acquires distance information of the target object TG (step ST20). At this time, the rotation angle of the first reflecting member 161 is set so that at least a portion of the image of the target object TG included in the intermediate image Imd is re-imaged at the center of the imaging area 352 of the second imaging element 351. The distance measurement device 370 then irradiates the target object TG with measurement light LM via the second reflecting member 368, the second optical system 132, the first reflecting member 161, the first optical system 131, the light splitting member 120, and the imaging optical system 110, thereby generating distance information of the target object TG. The distance measurement device 170 outputs the generated distance information of the target object TG to the distance information acquisition unit 185. The distance information acquisition unit 185 acquires the distance information of the target object TG output from the distance measurement device 370. In the second embodiment, the control device 180 may correct an error in the distance information due to a change in the optical path length caused by the rotation of the first reflecting member 161. For example, the control device 180 may correct the distance information of the target object TG output from the distance measurement device 370 using a correction data table stored in the storage unit 181. The correction data table may be a data table indicating the relationship between the rotation angle of the first reflecting member 161 and the correction amount of the distance information of the target object TG. Note that, if directional information of the target object TG is not used to control the rotation angle of the first reflecting member 161 in step ST10, step ST10 may be executed between steps ST20 and ST40 (described below). In that case, in step ST20, the first imaging device 140 captures a first image Im1 including at least a portion of the target object TG, and the image analysis unit 383 generates position information of the target object TG in the first image PC1 based on image information of the first image Im1 including at least a portion of the target object TG.

[0121] In addition, in step ST10, if directional information of the target object TG is not used to control the rotation angle of the first reflecting member 161, step ST10 may be executed between steps ST20 and ST40 (described later), as in the first embodiment.

[0122] Next, the imaging system 300 acquires image information of the second image Im2 (step ST30) in the same manner as in the first embodiment. Note that step ST30 may be executed between steps ST10 and ST20. Then, the imaging system 300 outputs information in the same manner as in the first embodiment (step ST40). Note that, as in the first embodiment, the above-described steps ST10 to ST40 may be repeated.

[0123] According to the second embodiment, the non-imaging region 154 (e.g., the through-hole 155) formed in the second imaging element 151 in the first embodiment is not formed in the second imaging element 351 of this embodiment, and therefore a portion (i.e., a portion corresponding to the non-imaging region 154) of the second image Im2, which includes an image of at least a portion of the target object TG captured by the second imaging device 350, is not missing. This makes it possible to generate more accurate image information of the target object TG. Therefore, the target object TG can be more accurately recognized (more accurately distinguished from other similar objects), and erroneous irradiation of the electromagnetic wave LB can be more reliably prevented.

[0124] Other effects of the second embodiment are similar to those of the first embodiment.

[0125] [Third Embodiment] Next, an imaging system according to a third embodiment will be described. The imaging system according to the third embodiment has the same configuration as the imaging system 100 according to the first embodiment, except for the configuration of a second imaging device 450, a distance measurement device 470, a control device 480, and a housing 401. Therefore, the same components as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and detailed description thereof will be omitted. As shown in FIG. 17 , the imaging system 400 according to the third embodiment includes an imaging optical system 110, a light splitting member 120, a reimaging optical system 130, a first imaging device 140, a second imaging device 450, a reflecting member rotation device 160, a distance measurement device 470, a control device 480, and a housing 401.

[0126] The housing 401 accommodates and holds the imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first image capture device 140, the second image capture device 450, and the reflecting member rotation device 160. The imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first image capture device 140, the second image capture device 450, and the reflecting member rotation device 160 accommodated and held in the housing 401 may be collectively referred to as an optical device. The imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first image capture device 140, and the reflecting member rotation device 160 have the same configurations as the imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first image capture device 140, and the reflecting member rotation device 160 according to the first embodiment, and detailed description thereof will be omitted.

[0127] In the third embodiment, as in the first embodiment, the optical axis of the first optical system 131 of the reimaging optical system 130 and the optical axis of the imaging optical system 110, which is coaxial with the first optical system 131, are referred to as the first optical axis AX1. The optical axis of the second optical system 132 of the reimaging optical system 130 is referred to as the second optical axis AX2. Furthermore, the direction along the first optical axis AX1 is referred to as the Y direction. The direction along the second optical axis AX2 is referred to as the Z direction. The direction perpendicular to the Y direction and the Z direction is referred to as the X direction.

[0128] 17, the second imaging device 450 includes a second imaging element 451 that captures a second image Im2. The second imaging element 451 has the same configuration as the second imaging element 351 according to the second embodiment.

[0129] As shown in FIG. 17 , the distance measurement device 470 may be configured similarly to the distance measurement device 170 according to the first embodiment, except for its location. The distance measurement device 470 is disposed at a different location from the imaging system 400 (housing 401). For example, the distance measurement device 470 may be provided in a different location from the imaging system 400 (housing 401) in the case member 10. The distance measurement device 470 irradiates the target object TG (see FIG. 1 ) with measurement light LM and generates distance information about the target object TG. In other words, the distance measurement device 470 irradiates the target object TG with measurement light LM without passing through the second optical system 132, the first reflecting member 161, the first optical system 131, the light splitting member 120, and the imaging optical system 110, and generates distance information about the target object TG. It can also be said that the distance measurement device 470 irradiates the target object TG with measurement light LM non-coaxially with the optical axis of the imaging system 400 and generates distance information about the target object TG. The distance measurement device 470 may be installed on the above-mentioned movable body. Similarly to the above-mentioned first embodiment, the light receiving device (172) of the distance measurement device 370 may be installed at a position separate from the measurement light emitting device (171). For example, the measurement light emitting device (171) may be fixed, and the light receiving device (172) may be installed on the above-mentioned movable body. At least one of the functional blocks of the storage unit 481, the image information acquiring unit 482, the image analyzing unit 483, the device control unit 484, the distance information acquiring unit 485, the image correcting unit 486, and the output device 487 may be provided in the distance measurement device 470.

[0130] In the third embodiment, the distance measurement device 470 may be, for example, a TOF LiDAR, a TOF reflective laser sensor, or a TOF distance image sensor. The FMCW distance measurement device 470 may be, for example, an FMCW LiDAR. The LiDAR used in the distance measurement device 470 may be configured to be able to change the irradiation direction of the measurement light LM using a polygon mirror, a galvanometer mirror, or the like. In this case, the target object TG may be searched for by changing the irradiation direction of the measurement light LM and performing scanning based on direction information of the target object TG generated by the image analysis unit 483 of the control device 480. For example, the distance measurement device 470 may search for the target object TG by changing the irradiation direction of the measurement light LM and scanning the area around the direction in which the target object TG is located, as indicated by the direction information of the target object TG. The LiDAR used in the distance measurement device 470 may have a configuration in which the irradiation direction of the measurement light LM is fixed. When a LiDAR or a reflective laser sensor in which the irradiation direction of the measurement light LM is fixed is used, the distance measurement device 470 may include a rotation stage that can hold the LiDAR or the reflective laser sensor in a rotational movement and change the irradiation direction of the measurement light LM. In this case, at least one of the measurement light emitting device (171) and the light receiving device (172) may be installed on the rotation stage.

[0131] The distance measurement device 470 may also be a millimeter-wave sensor (or millimeter-wave radar) that irradiates the target object with millimeter waves as the measurement light LM. The distance measurement device 470 may also be a measurement device using an optical comb. When a millimeter-wave sensor (or millimeter-wave radar) or a measurement device using an optical comb is used, the distance measurement device 470 may include a rotation stage that can rotatably hold the millimeter-wave sensor (or millimeter-wave radar) or the measurement device and change the direction of irradiation of the measurement light LM. The distance measurement device 470 may also be configured such that the measurement light emitting device and the light receiving device are separately mounted in the case member 10 and generate distance information about the target object TG using the principle of triangulation. In this case, the measurement light emitting device may irradiate the target object TG with structured light (pattern light), such as a stripe pattern having a regular stripe-like intensity distribution or a random dot pattern having a random (irregular) dot-like intensity distribution, as the measurement light LM. The distance measurement device 470 does not necessarily have to include a measurement light emitting device. A stereo camera, for example, may be used as a distance measurement device that does not include a measurement light emitting device. In this case, distance information of the target object TG may be generated based on the parallax of stereo images captured by the stereo camera. Furthermore, the output device 487 may output image information of one of the stereo images captured by the stereo camera.

[0132] The control device 480 is configured using, for example, a PC (personal computer) or the like. The control device 480 operates based on a program stored in a storage unit 481. As shown in FIG. 17 , the control device 480 includes a storage unit 481, an image information acquisition unit 482, an image analysis unit 483, a device control unit 484, a distance information acquisition unit 485, an image correction unit 486, and an output device 487. The storage unit 481, the image information acquisition unit 482, the image analysis unit 483, the distance information acquisition unit 485, the image correction unit 486, and the output device 487 are configured in the same manner as the storage unit 181, the image information acquisition unit 182, the image analysis unit 183, the distance information acquisition unit 185, the image correction unit 186, and the output device 187 according to the first embodiment.

[0133] The device control unit 484 controls the driving device 163 of the reflecting member rotation device 160 and the distance measurement device 470. Similar to the device control unit 184 according to the first embodiment, the device control unit 484 controls the driving device 163 of the reflecting member rotation device 160. The device control unit 484 may also set the irradiation direction of the measurement light LM based on at least one of the direction information of the target object TG and the position information of the target object TG in the first image PC1 generated by the image analysis unit 483, and the position information of the distance measurement device 470. Here, the position information of the distance measurement device 470 may be information regarding the positional relationship between the optical device (at least one of the imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first image capture device 140, the second image capture device 450, and the reflecting member rotation device 160) and the distance measurement device 470. The information regarding the positional relationship between the optical device and the distance measurement device 470 may be information determined in advance or may be stored in the storage unit 481. The device control unit 484 outputs a control signal including information about the set irradiation direction to the distance measurement device 470, and controls the distance measurement device 470 to irradiate the measurement light LM in the irradiation direction. Note that the position information of the distance measurement device 470 may also be referred to as positional relationship information between the optical device and the distance measurement device 470.

[0134] Note that, when light from the target object TG is not received by the distance measurement device 470 (light receiving device (172)), the device control unit 484 may reset the irradiation direction. Specifically, the device control unit 484 may correct directional information of the target object TG using information regarding the positional relationship between the optical devices (imaging optical system 110, light splitting member 120, reimaging optical system 130, first image capture device 140, second image capture device 450, and reflecting member rotation device 160) and the distance measurement device 470, and reset the irradiation direction based on the corrected directional information. Note that when light from the target object TG is not received by the distance measurement device 470 (light receiving device (172)), this may also be when the distance information acquisition unit 485 is unable to properly acquire distance information from the distance measurement device 470.

[0135] As a result, the measurement light LM emitted from the distance measurement device 470 (measurement light emitting device (171)) is irradiated onto the target object TG in an irradiation direction set based on the position information and direction information of the distance measurement device 470. The light from the target object TG irradiated with the measurement light LM reaches the distance measurement device 470 (light receiving device (172)). Therefore, the distance measurement device 470 can generate distance information of the target object TG based on the light reception result of the light from the target object TG irradiated with the measurement light LM.

[0136] [Measurement Method] Next, a measurement method using the imaging system 400 according to the third embodiment will be outlined. The measurement method according to the third embodiment is similar to the measurement method according to the first embodiment. Therefore, the measurement method will be described using the same flowchart as in the first embodiment, shown in FIG. 7 . Note that each process in the measurement method is executed based on a program stored in the storage unit 481. First, the imaging system 400 acquires directional information of the target object TG (step ST10), as in the first embodiment. At this time, in the third embodiment, the device control unit 484 controls the drive device 163 of the reflecting member rotation device 160 based on at least one of the directional information of the target object TG and the position information of the target object TG in the first image PC1, both generated by the image analysis unit 483, so that an area of ​​the image formation area of ​​the intermediate image Imd that includes at least a portion of the image of the target object TG is enlarged and re-imaged as the second image Im2. In addition, the device control unit 484 sets the irradiation direction of the measurement light LM based on at least one of the directional information of the target object TG and the positional information of the target object TG in the first image PC1 generated by the image analysis unit 483, and the positional information of the distance measurement device 470.

[0137] Next, the imaging system 400 acquires distance information of the target object TG (step ST20). At this time, the distance measurement device 470 emits the measurement light LM in an irradiation direction set by the device control unit 484, thereby irradiating the target object TG with the measurement light LM and generating distance information of the target object TG. The distance measurement device 470 outputs the generated distance information of the target object TG to the control device 480. The distance information acquisition unit 485 of the control device 480 acquires the distance information of the target object TG output from the distance measurement device 470. Note that, if the direction information of the target object TG is not used to control the rotation angle of the first reflecting member 161 in step ST10, step ST10 may be executed between steps ST20 and ST40 (described later), as in the first embodiment.

[0138] Next, the imaging system 400 acquires image information of the second image Im2 (step ST30) in the same manner as in the first embodiment. Note that step ST30 may be executed between steps ST10 and ST20. Then, the imaging system 400 outputs information in the same manner as in the first embodiment (step ST40). Note that, as in the first embodiment, the above-described steps ST10 to ST40 may be repeated.

[0139] According to the third embodiment, the same effects as those of the first embodiment can be obtained.

[0140] [Fourth Embodiment] Next, an imaging system according to a fourth embodiment will be described. The imaging system according to the fourth embodiment has the same configuration as the imaging system 100 according to the first embodiment, except for the first optical system 531, the second optical system 532, the imaging device 540, the reflecting member rotating device 160, the distance measurement device 570, the control device 580, and the housing 501. Therefore, the same components as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and detailed description thereof will be omitted. As shown in FIGS. 18 and 19 , the imaging system 500 according to the fourth embodiment includes an imaging optical system 110, a light splitting member 120, the first optical system 531, the second optical system 532, the imaging device 540, the reflecting member rotating device 160, the distance measurement device 570, the control device 580, and the housing 501. Note that the imaging system 500 does not necessarily include the second optical system 532. The imaging system 500 may include, instead of the second optical system 532, an optical system for converting (collimating) the measurement light LM from the distance measurement device 570 into parallel light.

[0141] The housing 501 accommodates and holds the imaging optical system 110, the light splitting member 120, the first optical system 531, the second optical system 532, the image capture device 540, the reflecting member rotation device 160, and the distance measurement device 570. The imaging optical system 110, the light splitting member 120, and the reflecting member rotation device 160 have the same configurations as the imaging optical system 110, the light splitting member 120, and the reflecting member rotation device 160 according to the first embodiment, and detailed description thereof will be omitted. Note that in the reflecting member rotation device 160, the reflecting surface 162 of the first reflecting member 161 reflects the measurement light LM from the distance measurement device 570 that has passed through the second optical system 532 toward the first optical system 531 (imaging optical system 110). In addition, the driving device 163 can rotate and move the first reflecting member 161 to a position where the measurement light LM reflected by the reflecting surface 162 of the first reflecting member 161 travels along the optical axis (first optical axis AX1) of the first optical system 531 (see Figure 18), and a position where the measurement light LM reflected by the reflecting surface 162 of the first reflecting member 161 travels away from the optical axis of the first optical system 531 (see, for example, Figure 19).

[0142] In the fourth embodiment, the optical axis of the first optical system 531 and the optical axis of the imaging optical system 110, which is coaxial with the first optical system 531, are referred to as the first optical axis AX1. The optical axis of the second optical system 532 is referred to as the second optical axis AX2. The second optical axis AX2 may intersect with the first optical axis AX1. The second optical axis AX2 may be perpendicular to the first optical axis AX1. The direction along the first optical axis AX1 is referred to as the Y direction. The direction along the second optical axis AX2 is referred to as the Z direction. The direction perpendicular to the Y direction and the Z direction is referred to as the X direction. The X direction, Y direction, and Z direction are perpendicular to each other. For example, as shown in FIG. 1 , the Z direction may be vertical, and the X direction and the Y direction may be horizontal.

[0143] The light that has passed through the light splitting member 120 is incident on the first optical system 531. In other words, the other light split by the light splitting member 120 is incident on the first optical system 531. The light from the first optical system 531 is incident on the second optical system 532. In FIG. 18 and other figures, the first optical system 531 and the second optical system 532 are each schematically shown as a single lens. Each of the first optical system 531 and the second optical system 532 may be composed of a single lens or multiple lenses. Each of the first optical system 531 and the second optical system 532 may include existing optical components other than lenses in addition to one or more lenses.

[0144] The optical axis of the second optical system 532 (second optical axis AX2) is perpendicular to the optical axis of the first optical system 531 (first optical axis AX1). The optical axis of the second optical system 532 may intersect with the optical axis of the first optical system 531 at an angle other than 90 degrees. For example, the optical axis of the second optical system 532 may intersect with the optical axis of the first optical system 531 within an angle range of 90 degrees ±5 degrees. The reflecting surface 162 of the first reflecting member 161 in the reflecting member rotating device 160 is disposed at or near the intersection position where the optical axis of the first optical system 531 intersects with the optical axis of the second optical system 532. The intersection position where the optical axis of the first optical system 531 intersects with the optical axis of the second optical system 532 is also the intersection position where the optical axis of the first optical system 531 intersects with the optical axis of the second optical system 532. The vicinity of the intersection position is, for example, the vicinity of the range in which the reflecting surface 162 of the first reflecting member 161 can reflect the light from the first optical system 531 toward the second optical system 532 .

[0145] Furthermore, the first optical system 531 may be telecentric on the side of the intermediate image Imd (beam splitting member 120). This suppresses divergence of the chief ray near the intermediate image Imd, allowing the aperture of the first optical system 531 to be reduced. Therefore, the imaging system 500 can be miniaturized, resulting in reduced manufacturing costs. Furthermore, variation in the angle of incidence of light incident on the beam splitting member 120 (beam splitting surface) can be suppressed. Therefore, the imaging system 500 can be miniaturized, resulting in reduced manufacturing costs. While both the imaging optical system 110 and the first optical system 531 are telecentric on the side of the intermediate image Imd (beam splitting member 120), this is not a limitation. For example, one of the imaging optical system 110 and the first optical system 531 may be telecentric on the side of the intermediate image Imd (beam splitting member 120).

[0146] 18 and 19 , the imaging device 540 includes an imaging element 541 that captures a first image Im1. The imaging device 540 and the imaging element 541 are configured similarly to the first imaging device 140 and the first imaging element 141 according to the first embodiment.

[0147] The distance measurement device 570 is disposed at a position where it can irradiate the measurement light LM toward the light splitting member 120 via the first reflecting member 161 of the reflecting member rotation device 160. The distance measurement device 570 may be disposed at a position conjugate with the position where the intermediate image Imd is formed. The position where the intermediate image Imd is formed may be conjugate with the position where the first image Im1 is formed. The distance measurement device 570 irradiates the measurement light LM onto the target object TG (see FIG. 1 ) via the second optical system 532, the first reflecting member 161, the first optical system 531, the light splitting member 120, and the imaging optical system 110, and generates distance information of the target object TG. The distance measurement device 570 may be configured similarly to the distance measurement device 170 according to the first embodiment. As described above, the imaging system 500 does not necessarily have to include the second optical system 532. In this case, the distance measurement device 570 may be disposed at a position closer to the first reflecting member 161 than the second optical system 532. In this case, the imaging system 500 (housing 501) can be further miniaturized. The light receiving device (172) of the distance measurement device 570 may be provided at a position separate from the measurement light emitting device (171). For example, a half mirror may be provided in the optical path of the second optical system 532. The light receiving device (172) may be disposed opposite the half mirror, separated from the measurement light LM in a direction (e.g., the Y direction) intersecting the optical axis (optical axis AX2) of the second optical system 532. In this case, the half mirror may transmit a portion of the measurement light LM emitted from the measurement light emitting device (171) and reflect the remaining light in the -Y direction. The half mirror may reflect a portion of the light from the target object TG irradiated with the measurement light LM in the +Y direction toward the light receiving device (172) and transmit the remaining light. The half mirror may be a prism type or a flat type. The ratio of transmittance to reflectance of the half mirror may be 1:1. In this case, the positions of the measurement light emitting device (171) and the light receiving device (172) may be reversed. Furthermore, the light receiving device (172) does not need to be arranged coaxially with the optical axis of the imaging system 500 (e.g., the optical axis of the second optical system 532) as long as it can receive light from the target object TG irradiated with the measurement light LM. For example, the light receiving device (172) may be installed on the outer surface of the housing 501 or on the above-mentioned movable body.

[0148] The control device 580 is configured using, for example, a PC (personal computer) or the like. The control device 580 operates based on a program stored in a storage unit 581. As shown in Figures 18 and 19, the control device 580 includes a storage unit 581, an image information acquisition unit 582, an image analysis unit 583, a device control unit 584, a distance information acquisition unit 585, and an output device 587. The storage unit 581, the distance information acquisition unit 585, and the output device 587 are configured in the same manner as the storage unit 181, the distance information acquisition unit 185, and the output device 187 according to the first embodiment.

[0149] The image information acquisition unit 582 acquires image information of the first image Im1 output from the imaging device 540. Hereinafter, the image of the first image Im1 captured by the imaging device 540 may be referred to as a first image PC1 (see FIG. 21 ). The first image PC1 may also be referred to as a wide-angle image. The image information of the first image Im1 acquired by the image information acquisition unit 582 may be stored in the storage unit 581.

[0150] The image analysis unit 583 generates directional information of the target object TG based on image information of the first image Im1 including at least a partial image of the target object TG, acquired by the image information acquisition unit 582. Similar to the image analysis unit 183 according to the first embodiment, the image analysis unit 583 analyzes the image information of the first image Im1 to identify the target object TG from the first image PC1 including one or more objects. Once the image analysis unit 583 identifies the target object TG, it generates position information of the target object TG in the first image PC1, similar to the image analysis unit 183 according to the first embodiment. Similar to the image analysis unit 183 according to the first embodiment, the image analysis unit 583 generates directional information of the target object TG based on the position information of the target object TG in the generated first image PC1.

[0151] Furthermore, when the image analysis unit 583 identifies the target object TG, it performs an enlargement process to enlarge the image of the target object TG in the first image PC1, and generates image information of an enlarged image PC12 (see FIG. 21 ) obtained by enlarging the image of the target object TG in the first image PC1. The image information of the enlarged image PC12 generated by the image analysis unit 583 may be stored in the storage unit 581. The enlargement process performed by the image analysis unit 583 may be referred to as digital zoom (electronic zoom). The image analysis unit 583 may perform an enlargement process to enlarge the image of a portion of the target object TG.

[0152] The device control unit 584 controls the drive device 163 of the reflecting member rotation device 160. The device control unit 584 controls the drive device 163 of the reflecting member rotation device 160 so that the measurement light LM passes through a region of the image formation region of the intermediate image Imd that includes at least a partial image of the target object TG, based on at least one of the direction information of the target object TG and the position information of the target object TG in the first image PC1, both generated by the image analysis unit 583. Specifically, the device control unit 584 uses the device control data table stored in the storage unit 581 to control the rotation angle of the first reflecting member 161 rotated by the drive device 163 so that the measurement light LM passes through a region of the image formation region of the intermediate image Imd that includes at least a partial image of the target object TG, based on at least one of the direction information of the target object TG and the position information of the target object TG in the first image PC1. As described above, the device control data table may be a data table showing the relationship between at least one of the directional information of the target object TG and the position information of the target object TG in the first image PC1 and the rotation angle of the first reflecting member 161.

[0153] As a result, a measurement optical path through which the measurement light LM from the distance measurement device 570 passes is set so that the measurement light LM is emitted from the imaging optical system 110 toward the target object TG based on image information of the first image Im1 including the image of the target object TG (specifically, at least one of directional information about the target object TG and positional information about the target object TG in the first image PC1). In other words, the measurement optical path is set so that the measurement light TG passes through a partial region of the image formation region of the intermediate image Imd that includes at least a partial image of the target object TG. Specifically, an region that includes at least a partial image of the target object TG is selected from the image formation region of the intermediate image Imd. In other words, the measurement optical path of the measurement light LM from the distance measurement device 570 is set so as to overlap with at least a portion of the optical path of light that forms at least a partial image of the target object TG that is included in the intermediate image Imd.

[0154] The device control unit 584 sets the measurement optical path so that at least a portion of the optical path of the light forming the image of the target object TG overlaps with at least a portion of the measurement optical path, whereby the measurement light LM from the distance measurement device 570 (measurement light emitting device (171)) is irradiated onto the target object TG via the second optical system 532, the first reflecting member 161, the first optical system 531, the light splitting member 120, and the imaging optical system 110. The light from the target object TG irradiated with the measurement light LM travels in the reverse order of the measurement light LM from the distance measurement device 570 to reach the distance measurement device 570 (light receiving device (172)). Therefore, the distance measurement device 570 can generate distance information of the target object TG based on the light reception result of the light from the target object TG irradiated with the measurement light LM. In other words, the measurement optical path of the measurement light LM is selected from the multiple optical paths formed by the imaging optical system 110 based on at least one of directional information of the target object TG and position information of the target object TG in the first image PC1. Specifically, the measurement optical path is selected from the multiple optical paths formed by the imaging optical system 110 by rotating the first reflecting member 161 using the driving device 163.

[0155] The output device 587 may output the direction information of the target object TG generated by the image analysis unit 583 and the distance information of the target object TG acquired by the distance information acquisition unit 585 (i.e., the distance information of the target object TG generated by the distance measurement device 570) to the irradiation control device 25 of the electromagnetic wave irradiation device 20. At this time, the irradiation control device 25 of the electromagnetic wave irradiation device 20 may control at least one of the emission device 21 and the support device 23 to irradiate the target object TG with electromagnetic waves LB, based on the direction information of the target object TG and the distance information of the target object TG output from the output device 587. Note that when the distance information of the target object TG is information regarding the distance from the emission device 21 of the electromagnetic wave irradiation device 20 to the target object TG, the output device 587 does not need to output the direction information of the target object TG. At this time, the irradiation control device 25 of the electromagnetic wave irradiation device 20 may control at least one of the emission device 21 and the support device 23 to irradiate the target object TG with the electromagnetic waves LB, based on the distance information of the target object TG output from the output device 587. In this way, the output device 587 may output at least one of the direction information of the target object TG and the distance information of the target object TG to the irradiation control device 25 of the electromagnetic wave irradiation device 20. The irradiation control device 25 of the electromagnetic wave irradiation device 20 may control at least one of the emission device 21 and the support device 23 to irradiate the target object TG with the electromagnetic waves LB, based on at least one of the direction information of the target object TG and the distance information of the target object TG output from the output device 587.

[0156] Furthermore, the output device 587 may output image information of the enlarged image PC12 generated by the image analysis unit 583 to the irradiation control device 25 of the electromagnetic wave irradiation device 20. The irradiation control device 25 of the electromagnetic wave irradiation device 20 may control at least one of the emission device 21 and the support device 23 to irradiate the target object TG with electromagnetic waves LB, based on the direction information of the target object TG, distance information of the target object TG, and image information of the enlarged image PC12 output from the output device 587. Furthermore, the irradiation control device 25 of the electromagnetic wave irradiation device 20 may control at least one of the emission device 21 and the support device 23 to irradiate the target object TG with electromagnetic waves LB, based on the distance information of the target object TG and image information of the enlarged image PC12 output from the output device 587. The irradiation control device 25 of the electromagnetic wave irradiation device 20 may control at least one of the emission device 21 and the support device 23 to irradiate the electromagnetic wave LB to the target object TG based on at least one of the directional information of the target object TG, the distance information of the target object TG, and the image information of the enlarged image PC12 output from the output device 587.

[0157] Here, a case where the positional relationship between the target object TG and the imaging system 500 changes will be described. Image information of the first image Im1 captured by the imaging device 540 before the positional relationship between the target object TG and the imaging system 500 changes will be referred to as first image information. Furthermore, position information of the target object TG in the first image PC1 generated by the image analysis unit 583 will be referred to as first position information. Direction information of the target object TG generated by the image analysis unit 583 will be referred to as first direction information. Distance information of the target object TG generated by the distance measurement device 570 will be referred to as first distance information. Image information of the enlarged image PC12 generated by the image analysis unit 583 will be referred to as third image information. After the positional relationship between the target object TG and the imaging system 500 changes, the position of the image of the target object TG included in the first image Im1 changes, and the position of the image of the target object TG included in the intermediate image Imd also changes. The image capturing device 540 captures a first image Im1 in which the position of the image of the target object TG has changed, and outputs second image information of the first image Im1 to the control device 580.

[0158] The image information acquisition unit 582 of the control device 580 acquires second image information of the first image Im1 output from the imaging device 540. The image analysis unit 583 generates second position information of the target object TG based on the second image information of the first image Im1 acquired by the image information acquisition unit 582. The image analysis unit 583 generates second direction information of the target object TG based on the generated second position information of the target object TG. In addition, the image analysis unit 583 generates fourth image information of the enlarged image PC12 based on the second image information of the first image Im1.

[0159] The device control unit 584 controls the drive device 163 of the reflecting member rotating device 160 based on the second direction information of the target object TG generated by the image analysis unit 583 so that the measurement light LM passes through a partial region of the image formation region of the intermediate image Imd that includes the image of the target object TG. As a result, even if the positional relationship between the target object TG and the imaging system 500 changes, the measurement light LM from the distance measurement device 570 (measurement light emitting device (171)) is irradiated onto the target object TG via the second optical system 532, the first reflecting member 161, the first optical system 531, the light splitting member 120, and the imaging optical system 110. The light from the target object TG irradiated with the measurement light LM reaches the distance measurement device 570 (light receiving device (172)) in the reverse order of the measurement light LM from the distance measurement device 570. Therefore, the distance measurement device 570 can generate second distance information of the target object TG based on the result of receiving light from the target object TG irradiated with the measurement light LM.

[0160] The output device 587 may output the second direction information of the target object TG generated by the image analysis unit 583 and the second distance information of the target object TG acquired by the distance information acquisition unit 585 (i.e., the second distance information of the target object TG generated by the distance measurement device 570) to the irradiation control device 25 of the electromagnetic wave irradiation device 20. At this time, the irradiation control device 25 of the electromagnetic wave irradiation device 20 may control at least one of the emission device 21 and the support device 23 to continuously or intermittently irradiate the target object TG with the electromagnetic waves LB, based on the direction change information generated based on the first direction information and the second direction information output from the output device 587 and the distance change information generated based on the first distance information and the second distance information output from the output device 587.

[0161] Note that, when the second distance information of the target object TG is information regarding the distance from the emission device 21 of the electromagnetic wave irradiation device 20 to the target object TG, the output device 587 does not need to output the second direction information of the target object TG. In this case, the irradiation control device 25 of the electromagnetic wave irradiation device 20 may control at least one of the emission device 21 and the support device 23 based on the distance change information so as to continuously or intermittently irradiate the target object TG with the electromagnetic waves LB. In this way, the output device 587 may output at least one of the second direction information of the target object TG and the second distance information of the target object TG to the irradiation control device 25 of the electromagnetic wave irradiation device 20. The irradiation control device 25 of the electromagnetic wave irradiation device 20 may control at least one of the emission device 21 and the support device 23 based on at least one of the direction change information and the distance change information so as to continuously or intermittently irradiate the target object TG with the electromagnetic waves LB. In addition, the output device 587 may generate direction change information and output it to the irradiation control device 25 of the electromagnetic wave irradiation device 20, or may generate distance change information and output it to the irradiation control device 25 of the electromagnetic wave irradiation device 20.

[0162] Furthermore, the output device 587 may output fourth image information of the enlarged image PC12 generated by the image analysis unit 583 to the irradiation control device 25 of the electromagnetic wave irradiation device 20. The irradiation control device 25 of the electromagnetic wave irradiation device 20 may control at least one of the emission device 21 and the support device 23 to continuously or intermittently irradiate the target object TG with the electromagnetic waves LB based on the direction change information, the distance change information, and image change information generated based on the third image information and the fourth image information output from the output device 587. Furthermore, the irradiation control device 25 of the electromagnetic wave irradiation device 20 may control at least one of the emission device 21 and the support device 23 to continuously or intermittently irradiate the target object TG with the electromagnetic waves LB based on the distance change information and the image change information. The irradiation control device 25 of the electromagnetic wave irradiation device 20 may control at least one of the emission device 21 and the support device 23 based on at least one of the direction change information, the distance change information, and the image change information so as to continuously or intermittently irradiate the target object TG with the electromagnetic waves LB. Note that the output device 587 may generate image change information and output it to the irradiation control device 25 of the electromagnetic wave irradiation device 20.

[0163] The output device 587 may output at least one of the generated image information of the first image Im1, the image information of the enlarged image PC12, the direction information of the target object TG, and the distance information of the target object TG to a display device (not shown). The imaging system 500 may be equipped with this display device. Based on the information output from the output device 587, the display device may display at least one of the image indicated by the image information of the first image Im1 (first image PC1), the enlarged image PC12, the direction indicated by the direction information of the target object TG (e.g., the direction of the target object TG relative to at least one of the imaging system 500 and the electromagnetic wave irradiation device 20), and the distance indicated by the distance information of the target object TG (e.g., the distance of the target object TG relative to at least one of the imaging system 500 and the electromagnetic wave irradiation device 20). The imaging system 500 may be equipped with this display device. The image indicated by the image information of the first image Im1 (first image PC1) output to the display device may include at least a partial image of the target object TG. The enlarged image PC12 output to the display device may also include an image of at least a portion of the target object TG.

[0164] [Measurement Method] Next, a measurement method using the imaging system 500 according to the fourth embodiment will be outlined. FIG. 20 is a flowchart showing the measurement method according to the fourth embodiment. Note that each process in the measurement method is executed based on a program stored in the storage unit 581. As shown in FIG. 20, first, the imaging system 500 acquires directional information of the target object TG (step ST110). At this time, the imaging device 540 captures a first image Im1 including at least a partial image of the target object TG, and outputs image information of the generated first image Im1 to the control device 580. The image information acquisition unit 582 acquires the image information of the first image Im1 output from the imaging device 540.

[0165] As described above, the image analysis unit 583 generates position information of the target object TG in the first image PC1 (the image indicated by the image information of the first image Im1) based on image information of the first image Im1 including at least a partial image of the target object TG, acquired by the image information acquisition unit 582. The image analysis unit 583 generates directional information of the target object TG based on the position information of the target object TG in the generated first image PC1.

[0166] Next, the imaging system 500 acquires image information of the enlarged image (step ST120). At this time, the image analysis unit 583 generates image information of the enlarged image PC12 based on the image information of the first image Im1, which includes at least a portion of the target object TG. Note that, if directional information of the target object TG is not used to control the rotation angle of the first reflecting member 161 in step ST110, step ST110 may be executed between steps ST120 and ST140 (described below). In that case, in step ST120, the imaging device 540 captures the first image Im1, which includes at least a portion of the target object TG, and the image analysis unit 583 generates position information of the target object TG in the first image PC1 based on the image information of the first image Im1, which includes at least a portion of the target object TG.

[0167] Next, the imaging system 500 acquires distance information of the target object TG (step ST130). At this time, the device control unit 584 controls the drive device 163 of the reflecting member rotation device 160 based on the direction information of the target object TG generated by the image analysis unit 583 so that the measurement light LM passes through a portion of the image formation area of ​​the intermediate image Imd that includes the image of the target object TG. The distance measurement device 570 irradiates the measurement light LM onto the target object TG via the second optical system 532, the first reflecting member 161, the first optical system 531, the light splitting member 120, and the imaging optical system 110, and generates distance information of the target object TG. The distance measurement device 570 outputs the generated distance information of the target object TG to the distance information acquisition unit 585. The distance information acquisition unit 585 acquires the distance information of the target object TG output from the distance measurement device 570. Note that step ST130 may be executed between steps ST110 and ST120.

[0168] The imaging system 500 then outputs information (step ST140). At this time, the output device 587 may output at least one of the direction information of the target object TG generated by the image analysis unit 583 and the distance information of the target object TG acquired by the distance information acquisition unit 585 (i.e., the distance information of the target object TG generated by the distance measurement device 570) to the irradiation control device 25 of the electromagnetic wave irradiation device 20. At this time, the irradiation control device 25 may control at least one of the emission device 21 and the support device 23 to irradiate the target object TG with the electromagnetic waves LB based on at least one of the direction information of the target object TG and the distance information of the target object TG output from the output device 587. Furthermore, the output device 587 may output image information of the enlarged image PC12 generated by the image analysis unit 583 to the irradiation control device 25. At this time, the irradiation control device 25 may control at least one of the emission device 21 and the support device 23 to irradiate the electromagnetic wave LB to the target object TG based on at least one of the directional information of the target object TG and the distance information of the target object TG output from the output device 587 and the image information of the enlarged image PC12.

[0169] Note that the above-described steps ST110 to ST140 may be repeated. For example, by repeating the above-described steps ST110 to ST140 when the positional relationship between the target object TG and the imaging system 500 changes, the distance measurement device 570 may continuously or intermittently irradiate the target object TG whose positional relationship is changing, as described above. Also, by repeating the above-described steps ST110 to ST140, the irradiation control unit 25 may emit the electromagnetic wave LB toward the target object TG based on at least one of the direction information of the target object TG, the distance information of the target object TG, and the image information of the enlarged image PC12 output in ST140, as described above, so that the electromagnetic wave irradiation device 20 may continuously or intermittently irradiate the target object TG whose positional relationship is changing. Note that the above-described steps ST110 to ST140 may be repeated even when the positional relationship between the target object TG and the imaging system 500 does not change.

[0170] According to the fourth embodiment, an imaging system 500 includes a light splitting member 120 that splits light LT that has passed through an imaging optical system 110, an imaging device 540 that captures a first image Im1 formed by one of the lights split by the light splitting member 120, and a distance measurement device 570 that irradiates a target object with measurement light LM via the imaging optical system 110 based on image information of the first image Im1 including an image of the target object captured by the imaging device 540, and generates distance information of the target object. This makes it possible to measure the distance to the target object using the distance measurement device 570 while capturing and tracking the target object using the imaging device 540.

[0171] The distance measurement device 570 further includes a reflecting member rotating device 160 having a first reflecting member 161 with a reflecting surface 162 that reflects the measurement light LM from the distance measurement device 570 toward the imaging optical system 110, and a driving device 163 that rotates the first reflecting member 161. Thus, by rotating the first reflecting member 161 with the driving device 163, the measurement light LM from the distance measurement device 570 can be directed toward the target object in a short time. Therefore, the distance to the target object can be measured in a short time by the distance measurement device 570. Furthermore, the three-dimensional position of the target object can be measured in a short time by using the distance information measured in a short time by the distance measurement device 570, and therefore, the electromagnetic wave LB can be irradiated onto the target object in a short time.

[0172] Furthermore, since there is no need to provide a second imaging device, the manufacturing costs can be reduced.

[0173] [Modification of Fourth Embodiment] In the fourth embodiment described above, the reflecting member rotation device 160 is provided, but this is not limiting. Therefore, a modification of the imaging system according to the fourth embodiment will be described. The imaging system according to the modification of the fourth embodiment shares essential components with the imaging system 100 according to the first embodiment, except for the imaging device 640, the holding unit 660, the driving unit 665, the distance measurement device 670, the control device 680, and the housing 601. Therefore, components similar to those in the first embodiment are denoted by the same reference numerals as in the first embodiment, and detailed descriptions thereof will be omitted. As shown in FIG. 22 , the imaging system 600 according to the modification of the fourth embodiment includes an imaging optical system 110, a light splitting member 120, the imaging device 640, the holding unit 660, the driving unit 665, the distance measurement device 670, the control device 680, and the housing 601.

[0174] The housing 601 accommodates and holds the imaging optical system 110, the light splitting member 120, the imaging device 640, the holder 660 (distance measurement device 670), and the drive unit 665. The imaging optical system 110 and the light splitting member 120 have the same configurations as the imaging optical system 110 and the light splitting member 120 according to the first embodiment, and detailed description thereof will be omitted. In this modification, the light splitting member 120 is disposed between the imaging optical system 110 and the distance measurement device 670. In this modification, the light splitting member 120 may also be disposed midway through the imaging optical system 110. In this case, the light splitting member 120 may split the light LT that has passed through a portion of the imaging optical system 110. The light splitting member 120 may also be part of the imaging optical system 110. For example, the rear lens 112 may be disposed between the light splitting member 112 and the first image plane Im1 and between the light splitting member 120 and the intermediate image plane Imd.

[0175] In this modification, the direction along the optical axis AX11 of the imaging optical system 110 is referred to as the Y direction. The direction facing the imaging device 640 is referred to as the Z direction. The direction perpendicular to the Y direction and the Z direction is referred to as the X direction. The X direction, Y direction, and Z direction are perpendicular to one another. For example, as shown in FIG. 1 , the Z direction may be vertical, and the X direction and the Y direction may be horizontal.

[0176] 22, the imaging device 640 includes an imaging element 641 that captures a first image Im1. The imaging device 640 and the imaging element 641 are configured similarly to the imaging device 540 and the imaging element 541 according to the fourth embodiment.

[0177] 22 , the distance measurement device 670 is configured similarly to the distance measurement device 570 according to the fourth embodiment, except that it is held by a holding unit 660. The distance measurement device 670 is disposed at a position where it can irradiate the measurement light LM toward the light splitting member 120. The distance measurement device 670 may also be disposed at a position where an intermediate image Imd is formed. The distance measurement device 670 irradiates the measurement light LM onto the target object TG (see FIG. 1 ) via the light splitting member 120 and the imaging optical system 110, and generates distance information of the target object TG.

[0178] 22 , the holding unit 660 holds the distance measurement device 670. The driving unit 665 is configured using, for example, a linear motor or a stepping motor. The driving unit 665 can move the holding unit 660, which holds the distance measurement device 670, in two directions (for example, the X direction and the Z direction) that intersect with the optical axis AX11 of the imaging optical system 110. The driving unit 665 moves the distance measurement device 670 in, for example, the X direction and the Z direction, thereby changing the irradiation direction of the measurement light LM emitted from the distance measurement device 670 via the imaging optical system 110.

[0179] The control device 680 is configured using, for example, a PC (personal computer) or the like. The control device 680 operates based on a program stored in a storage unit 681. As shown in FIG. 22 , the control device 680 includes a storage unit 681, an image information acquisition unit 682, an image analysis unit 683, a device control unit 684, a distance information acquisition unit 685, and an output device 687. The storage unit 681, the image information acquisition unit 682, the image analysis unit 683, the distance information acquisition unit 685, and the output device 687 are configured in the same manner as the storage unit 581, the image information acquisition unit 582, the image analysis unit 583, the distance information acquisition unit 585, and the output device 587 according to the fourth embodiment.

[0180] The device control unit 684 controls the drive unit 665. Based on at least one of the direction information of the target object TG and the position information of the target object TG in the first image PC1 generated by the image analysis unit 683, the device control unit 684 controls the drive unit 665 so that the measurement light LM passes through a portion of the image formation area of ​​the intermediate image Imd that includes the image of the target object TG. Specifically, the device control unit 684 uses a device control data table stored in the storage unit 681 to control the drive unit 665 so that the measurement light LM passes through a portion of the image formation area of ​​the intermediate image Imd that includes at least a portion of the image of the target object TG, based on at least one of the direction information of the target object TG and the position information of the target object TG in the first image PC1. The device control data table may be a data table indicating the relationship between the position of the distance measurement device 670 and at least one of the direction information of the target object TG and the position information of the target object TG in the first image PC1.

[0181] As a result, a measurement optical path through which the measurement light LM from the distance measurement device 670 passes is set so that the measurement light LM is emitted from the imaging optical system 110 toward the target object TG based on image information of the first image Im1 including the image of the target object TG (specifically, at least one of directional information about the target object TG and positional information about the target object TG in the first image PC1). In other words, the measurement optical path is set so that the measurement light TG passes through a region of the image formation region of the intermediate image Imd that includes at least a partial image of the target object TG. Specifically, a partial region that includes at least a partial image of the target object TG is selected from the image formation region of the intermediate image Imd. In other words, the measurement optical path of the measurement light LM from the distance measurement device 670 is set so as to overlap with at least a portion of the optical path of light that forms at least a partial image of the target object TG, which is included in the intermediate image Imd.

[0182] The device control unit 684 sets the measurement optical path so that at least a portion of the optical path of the light forming the image of the target object TG overlaps with at least a portion of the measurement optical path, and thereby the measurement light LM from the distance measurement device 670 (measurement light emitting device (171)) is irradiated onto the target object TG via the light splitting member 120 and the imaging optical system 110. The light from the target object TG irradiated with the measurement light LM travels in the reverse order of the measurement light LM from the distance measurement device 670 and reaches the distance measurement device 670 (light receiving device (172)). Therefore, the distance measurement device 670 can generate distance information of the target object TG based on the light reception result of the light from the target object TG irradiated with the measurement light LM. In other words, the measurement optical path of the measurement light LM is selected from multiple optical paths formed by the imaging optical system 110 based on at least one of directional information of the target object TG and position information of the target object TG in the first image PC1. The light receiving device (172) of the distance measurement device 670 may be provided at a position separate from the measurement light emitting device (171). For example, the light receiving device (172) does not have to be arranged coaxially with the optical axis of the imaging system 600 as long as it can receive light from the target object TG irradiated with the measurement light LM. For example, the light receiving device (172) may be installed on the outer surface of the housing 601 or on the above-mentioned movable body.

[0183] [Measurement Method] Next, a measurement method using the imaging system 600 according to a modification of the fourth embodiment will be outlined. The measurement method according to this modification is similar to the measurement method according to the fourth embodiment. Therefore, the description will be made using the same flowchart as in the fourth embodiment, shown in FIG. 20. Note that each process in the measurement method is executed based on a program stored in the storage unit 681 of the control device 680. First, the imaging system 600 acquires direction information of the target object TG in the same manner as in the fourth embodiment (step ST110).

[0184] Next, the imaging system 600 acquires image information of the enlarged image in the same manner as in the fourth embodiment (step ST120). Note that, if the direction information of the target object TG is not used in step ST110, step ST110 may be executed between step ST120 and step ST140 (described later).

[0185] Next, the imaging system 600 acquires distance information of the target object TG (step ST130). At this time, the device control unit 684 controls the drive unit 665 so that the measurement light LM passes through a portion of the image formation area of ​​the intermediate image Imd that includes the image of the target object TG, based on at least one of the direction information of the target object TG and the position information of the target object TG in the first image PC1 generated by the image analysis unit 683. The distance measurement device 670 irradiates the measurement light LM onto the target object TG via the light splitting member 120 and the imaging optical system 110, and generates distance information of the target object TG. The distance measurement device 670 outputs the generated distance information of the target object TG to the distance information acquisition unit 685. The distance information acquisition unit 685 acquires the distance information of the target object TG output from the distance measurement device 670. Note that step ST130 may be executed between steps ST110 and ST120.

[0186] Then, the imaging system 600 outputs information in the same manner as in the fourth embodiment (step ST140). Note that the above-described steps ST110 to ST140 may be repeated. Also, the order of the processing of step ST110 for acquiring the target object TG direction information and step ST120 for acquiring the image information may be reversed.

[0187] According to this modification, the imaging system 600 includes a light splitting member 120 that splits light LT that has passed through the imaging optical system 110, an imaging device 640 that captures a first image Im1 formed by one of the lights split by the light splitting member 120, and a distance measurement device 670 that irradiates the target object with measurement light LM via the imaging optical system 110 based on image information of the first image Im1 including an image of the target object captured by the imaging device 640, and generates distance information of the target object TG. This makes it possible to measure the distance to the target object using the distance measurement device 670 while capturing and tracking the target object using the imaging device 640.

[0188] Fifth Embodiment Next, an imaging system according to a fifth embodiment will be described. The imaging system according to the fifth embodiment has the same configuration as the imaging system 100 according to the first embodiment, except for the configuration of the imaging device 740, the distance measurement device 770, the control device 780, and the housing 701. Therefore, the same components as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and detailed description thereof will be omitted. As shown in FIG. 23 , the imaging system 700 according to the fifth embodiment includes an imaging optical system 110, a light splitting member 120, a first optical system 731, a second optical system 732, the imaging device 740, a reflecting member rotation device 160, the distance measurement device 770, the control device 780, and the housing 701.

[0189] The housing 701 houses and holds the imaging optical system 110, the light splitting member 120, the first optical system 731, the second optical system 732, the imaging device 740, the reflecting member rotation device 160, and the distance measurement device 770. The imaging optical system 110, the light splitting member 120, and the reflecting member rotation device 160 have the same configurations as the imaging optical system 110, the light splitting member 120, and the reflecting member rotation device 160 according to the first embodiment, and detailed description thereof will be omitted. In the reflecting member rotation device 160, the reflecting surface 162 of the first reflecting member 161 reflects the measurement light LM from the distance measurement device 770 that has passed through the second optical system 732 toward the first optical system 631 (imaging optical system 110). The imaging system 700 does not necessarily have to include the second optical system 732. In this case, the distance measurement device 770 may be positioned closer to the first reflecting member 161 than the second optical system 732. In this case, the imaging system 700 (housing 701) can be made more compact. The imaging system 700 may include, instead of the second optical system 732, an optical system for converting (collimating) the measurement light LM from the distance measurement device 770 into parallel light. The light receiving device (172) of the distance measurement device 770 may be provided at a position separate from the measurement light emitting device (171). For example, a half mirror may be provided in the optical path of the second optical system 732. The light receiving device (172) may be disposed opposite the half mirror, separated from the measurement light LM in a direction (e.g., the Y direction) intersecting the optical axis (optical axis AX2) of the second optical system 732. In this case, the half mirror may transmit a portion of the measurement light LM emitted from the measurement light emitting device (171) and reflect the other portion in the −Y direction. The half mirror may reflect a portion of the light from the target object TG irradiated with the measurement light LM in the +Y direction toward the light receiving device (172) and transmit the remaining light. In this case, the positions of the measurement light irradiating device (171) and the light receiving device (172) may be reversed. Furthermore, the light receiving device (172) does not need to be arranged coaxially with the optical axis of the imaging system 700 (e.g., the optical axis of the second optical system 732) as long as it can receive light from the target object TG irradiated with the measurement light LM. For example, the light receiving device (172) may be installed on the outer surface of the housing 701 or on the above-mentioned movable body.

[0190] In the fifth embodiment, as in the fourth embodiment, the optical axis of the first optical system 731 and the optical axis of the imaging optical system 110, which is coaxial with the first optical system 731, are referred to as the first optical axis AX1. The optical axis of the second optical system 732 is referred to as the second optical axis AX2. Furthermore, the direction along the first optical axis AX1 is referred to as the Y direction. The direction along the second optical axis AX2 is referred to as the Z direction. The direction perpendicular to the Y direction and Z direction is referred to as the X direction.

[0191] 23 , the first optical system 731 and the second optical system 732 are configured similarly to the first optical system 531 and the second optical system 532 according to the fourth embodiment. The imaging device 740 includes an imaging element 741 that captures a first image Im1. The imaging device 740 and the imaging element 741 are configured similarly to the imaging device 540 and the imaging element 541 according to the fourth embodiment. The distance measurement device 770 is configured similarly to the distance measurement device 570 according to the fourth embodiment.

[0192] The control device 780 is configured using, for example, a PC (personal computer) or the like. The control device 780 operates based on a program stored in a storage unit 781. As shown in Fig. 23 , the control device 780 includes a storage unit 781, an image information acquisition unit 782, an image analysis unit 783, a device control unit 784, a distance information acquisition unit 785, and an output device 787. The storage unit 781, the image information acquisition unit 782, the distance information acquisition unit 785, and the output device 787 are configured in the same manner as the storage unit 581, the image information acquisition unit 582, the distance information acquisition unit 585, and the output device 587 according to the fourth embodiment.

[0193] The image analysis unit 783 generates directional information of the target object TG based on image information of the first image Im1, which includes at least a partial image of the target object TG, acquired by the image information acquisition unit 782. Similar to the image analysis unit 183 according to the first embodiment, the image analysis unit 783 analyzes the image information of the first image Im1 to identify the target object TG from the first image PC1, which includes one or more objects. After identifying the target object TG, the image analysis unit 783 sets a region of interest ROI (see FIG. 25 ) in the first image PC1 so as to include an image of at least a partial image of the identified target object TG. At this time, the image analysis unit 783 sets multiple measurement points MP for the target object TG, arranged at a predetermined measurement pitch in the region of interest ROI. After setting the region of interest ROI, the image analysis unit 783 generates position information of the target object TG in the first image PC1 for the multiple measurement points MP, similar to the image analysis unit 183 according to the first embodiment. The image analysis unit 783 generates directional information of the target object TG for multiple measurement points MP based on the position information of the target object TG in the generated first image PC1, similar to the image analysis unit 183 in the first embodiment.

[0194] Furthermore, once the region of interest ROI is set, the image analysis unit 783 performs an enlargement process to enlarge the portion of the region of interest ROI in the first image PC1 (i.e., an image including at least a part of the target object TG), and generates image information of an enlarged image of the target object TG obtained by enlarging the portion of the region of interest ROI in the first image PC1. The image information of the enlarged image generated by the image analysis unit 783 may be stored in the storage unit 781. The enlargement process performed by the image analysis unit 783 may be referred to as digital zoom (electronic zoom).

[0195] The device control unit 784 controls the drive device 163 of the reflecting member rotation device 160. The device control unit 784 controls the drive device 163 of the reflecting member rotation device 160 so that the measurement light LM passes through a region of the image formation region of the intermediate image Imd that includes at least a partial image of the target object TG, based on at least one of the direction information of the target object TG and the position information of the target object TG in the first image PC1, both generated by the image analysis unit 783. Specifically, the device control unit 784 uses the device control data table stored in the storage unit 781 to control the rotational position of the first reflecting member 161 rotated by the drive device 163 so that the measurement light LM passes through a region of the image formation region of the intermediate image Imd that includes at least a partial image of the target object TG, based on at least one of the direction information of the target object TG and the position information of the target object TG in the first image PC1. The device control data table may be a data table that indicates the relationship between the rotational position of the first reflecting member 161 and at least one of the direction information of the target object TG and the position information of the target object TG in the first image PC1.

[0196] As a result, a measurement optical path through which the measurement light LM from the distance measurement device 770 passes is set so that the measurement light LM is emitted from the imaging optical system 110 toward the target object TG based on image information of the first image Im1 including the image of the target object TG (specifically, at least one of directional information about the target object TG and positional information about the target object TG in the first image PC1). In other words, the measurement optical path is set so that the measurement light TG passes through a partial region of the image formation region of the intermediate image Imd that includes at least a partial image of the target object TG. Specifically, a partial region that includes at least a partial image of the target object TG is selected from the image formation region of the intermediate image Imd. In other words, the measurement optical path of the measurement light LM from the distance measurement device 770 is set so as to overlap with at least a part of the optical path of the light that forms at least a partial image of the target object TG that is included in the intermediate image Imd.

[0197] The device control unit 784 sets the measurement optical path so that at least a portion of the optical path of the light forming the image of the target object TG overlaps with at least a portion of the measurement optical path. As a result, the measurement light LM from the distance measurement device 770 (measurement light emitting device (171)) is irradiated onto the target object TG via the second optical system 732, the first reflecting member 161, the first optical system 731, the light splitting member 120, and the imaging optical system 110. The light from the target object TG irradiated with the measurement light LM travels in the reverse order of the measurement light LM from the distance measurement device 770 and reaches the distance measurement device 770 (light receiving device (172)). Therefore, the distance measurement device 770 can generate distance information of the target object TG based on the light reception result of the light from the target object TG irradiated with the measurement light LM. In other words, the measurement optical path of the measurement light LM is selected from multiple optical paths formed by the imaging optical system 110 based on direction information of the target object TG. Specifically, the first reflecting member 161 is rotated using the driving device 163 to select a measurement optical path from the multiple optical paths formed by the imaging optical system 110 .

[0198] Here, the device control unit 784 controls the drive device 163 to rotate the first reflecting member 161 so that the measurement light LM from the distance measurement device 770 is sequentially irradiated onto the multiple measurement points MP on the target object TG based on the direction information of the target object TG generated for the multiple measurement points MP in the region of interest ROI. This allows the distance measurement device 770 to sequentially generate distance information for the target object TG for the multiple measurement points MP on the target object TG. In this case, distance information for multiple points on the target object TG (points corresponding to the multiple measurement points MP) can be generated. The distance information for the multiple points on the target object TG is information indicating the shape of at least a portion of the target object TG. Therefore, the distance information for the target object TG (specifically, the distance information for the multiple points on the target object TG) can also be considered shape information of the target object TG. The direction information for the target object TG generated for the multiple measurement points MP in the region of interest ROI may also be referred to as direction information of the measurement points MP.

[0199] [Measurement Method] Next, a measurement method using the imaging system 700 according to the fifth embodiment will be outlined. FIG. 24 is a flowchart showing the measurement method according to the fifth embodiment. Note that each process in the measurement method is executed based on a program stored in the storage unit 781. As shown in FIG. 24, first, the imaging system 700 sets a region of interest ROI and acquires directional information of the target object TG (step ST210). At this time, the imaging device 740 captures a first image Im1 including at least a partial image of the target object TG, and outputs image information of the generated first image Im1 to the control device 780. The image information acquisition unit 782 acquires the image information of the first image Im1 output from the imaging device 740.

[0200] As described above, the image analysis unit 783 sets the region of interest ROI based on image information of the first image Im1 including at least a partial image of the target object TG, acquired by the image information acquisition unit 782. After setting the region of interest ROI, the image analysis unit 783 generates position information of the target object TG in the first image PC1 for the multiple measurement points MP. The image analysis unit 783 generates directional information of the target object TG for the multiple measurement points MP based on the generated position information of the target object TG in the first image PC1.

[0201] Next, the imaging system 700 acquires image information of the enlarged image (step ST220). At this time, the image analysis unit 783 generates image information of the enlarged image of the target object TG, which is an enlarged image of the region of interest ROI, based on the image information of the first image Im1 including the image of the target object TG.

[0202] Next, the imaging system 700 acquires distance information of the target object TG (step ST230). At this time, the device control unit 784 controls the drive device 163 of the reflecting member rotation device 160 based on the direction information of the target object TG generated by the image analysis unit 783 so that the measurement light LM passes through a portion of the image formation area of ​​the intermediate image Imd that includes the image of the target object TG. The distance measurement device 770 irradiates the measurement light LM onto the target object TG via the second optical system 732, the first reflecting member 161, the first optical system 731, the light splitting member 120, and the imaging optical system 110, and generates distance information of the target object TG.

[0203] At this time, the device control unit 784 controls the drive device 163 to rotate the first reflecting member 161 so that the measurement light LM from the distance measurement device 770 is sequentially irradiated onto the multiple measurement points MP on the target object TG based on the direction information of the target object TG generated for the multiple measurement points MP in the region of interest ROI. As a result, the distance measurement device 770 sequentially generates distance information of the target object TG for the multiple measurement points MP on the target object TG. The distance measurement device 770 outputs the generated distance information of the target object TG to the distance information acquisition unit 785. The distance information acquisition unit 785 acquires the distance information of the target object TG output from the distance measurement device 770. Note that step ST230 may be executed between step ST210 and step ST220.

[0204] The imaging system 700 then outputs information (step ST240). At this time, the output device 787 may output at least one of the direction information of the target object TG for the plurality of measurement points MP generated by the image analysis unit 783 and the distance information of the target object TG for the plurality of measurement points MP acquired by the distance information acquisition unit 785 (i.e., the distance information of the target object TG generated by the distance measurement device 770) to the irradiation control device 25 of the electromagnetic wave irradiation device 20. At this time, the irradiation control device 25 may control at least one of the emission device 21 and the support device 23 to irradiate the target object TG with the electromagnetic waves LB based on at least one of the direction information of the target object TG for the plurality of measurement points MP and the distance information of the target object TG output from the output device 787. Furthermore, the output device 787 may output image information of the enlarged image generated by the image analysis unit 783 to the irradiation control device 25. At this time, the irradiation control device 25 may control at least one of the emission device 21 and the support device 23 to irradiate the electromagnetic wave LB onto the target object TG based on at least one of the directional information of the target object TG and the distance information of the target object TG for the multiple measurement points MP output from the output device 787, and the image information of the enlarged image.

[0205] As in the fourth embodiment, the above-described steps ST110 to ST140 may be repeated. In step ST140 of outputting information, the output device 787 may output information about a plurality of measurement points MP in the region of interest ROI instead of the directional information of the target object TG.

[0206] According to the fifth embodiment, the same effects as those of the fourth embodiment can be obtained.

[0207] In the fifth embodiment described above, the reflecting member rotating device 160 is provided, but the present invention is not limited to this. For example, similar to the imaging system according to the modified example of the fourth embodiment, a holding unit that holds the distance measurement device 770 and a driving unit that translates the holding unit in two directions (e.g., the X direction and the Z direction) that intersect with the optical axis of the imaging optical system 110 may be provided.

[0208] [Sixth Embodiment] Next, an imaging system according to a sixth embodiment will be described. First, an electromagnetic wave irradiation system including the imaging systems according to the sixth and seventh embodiments will be described with reference to FIG. 26. As shown in FIG. 26, the electromagnetic wave irradiation system 51 includes an imaging system 800, a case member 60 in which the imaging system 800 is housed, and a rotation drive device 61. The electromagnetic wave irradiation system 51 may be fixed to the ground or may be fixed to a building or the like on the ground. The electromagnetic wave irradiation system 51 may also be mounted on the above-mentioned movable body. When the electromagnetic wave irradiation system 51 is mounted on a movable body, the electromagnetic wave irradiation system 51 does not need to include the rotation drive device 61. The electromagnetic wave irradiation system 51 does not need to include the case member 60.

[0209] The case member 60 is formed in a box shape. At least a part of the imaging system 800 is housed inside the case member 60. The rotation drive device 61 rotatably supports the case member 60. The rotation drive device 61 is capable of rotating the case member 60 around a rotation axis extending in the vertical direction (Z direction). The imaging system 800 is capable of irradiating electromagnetic waves LB in the same manner as the electromagnetic wave irradiation device 20 described above. Note that the electromagnetic waves LB may be the same as the electromagnetic waves LB described in the first embodiment. Furthermore, the imaging system 800 may be attached to the outside of the case member 60, such as to the side or top of the case member 60. Next, an imaging system 800 according to a sixth embodiment will be described.

[0210] [Imaging System According to the Sixth Embodiment] Next, an imaging system according to the sixth embodiment will be described. The imaging system according to the sixth embodiment has the same configuration as the imaging system 100 according to the first embodiment, except for the configuration of the electromagnetic wave irradiation device 865, the second reflecting member 868, the distance measurement device 870, the control device 880, and the housing 801. Therefore, the same components as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and detailed description thereof will be omitted. As shown in FIG. 27 , the imaging system 800 according to the sixth embodiment includes an imaging optical system 110, a light splitting member 120, a reimaging optical system 130, a first imaging device 140, a second imaging device 150, a reflecting member rotation device 160, the electromagnetic wave irradiation device 865, the second reflecting member 868, the distance measurement device 870, the control device 880, and the housing 801.

[0211] The housing 801 accommodates and holds the imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first image capture device 140, the second image capture device 150, the reflecting member rotation device 160, the electromagnetic wave irradiation device 865, the second reflecting member 868, and the distance measurement device 870. The imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first image capture device 140, the second image capture device 150, and the reflecting member rotation device 160 have the same configurations as the imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first image capture device 140, the second image capture device 150, and the reflecting member rotation device 160 according to the first embodiment, and detailed description thereof will be omitted. In addition, in the reflecting member rotating device 160, the reflecting surface 162 of the first reflecting member 161 reflects the electromagnetic wave LB from the electromagnetic wave irradiation device 865 that has passed through the second optical system 132 (reimaging optical system 130) toward the first optical system 131 (imaging optical system 110).

[0212] In the sixth embodiment, as in the first embodiment, the optical axis of the first optical system 131 of the reimaging optical system 130 and the optical axis of the imaging optical system 110, which is coaxial with the first optical system 131, are referred to as the first optical axis AX1. The optical axis of the second optical system 132 of the reimaging optical system 130 is referred to as the second optical axis AX2. Furthermore, the direction along the first optical axis AX1 is referred to as the Y direction. The direction along the second optical axis AX2 is referred to as the Z direction. The direction perpendicular to the Y direction and the Z direction is referred to as the X direction.

[0213] As shown in FIG. 27 , the electromagnetic wave irradiation device 865 is disposed on the opposite side of the second imaging element 151 from the optical member of the second optical system 132 (reimaging optical system 130) that is closest to the second imaging element 151. The electromagnetic wave irradiation device 865 irradiates the target object TG (see FIG. 1 ) with electromagnetic waves LB via the non-imaging region 154 (through-hole 155) of the second imaging element 151, the second reflecting member 868, the second optical system 132, the first reflecting member 161, the first optical system 131, the light splitting member 120, and the imaging optical system 110. For example, the electromagnetic wave irradiation device 865 may include a fiber (not shown) that emits electromagnetic waves LB from a laser light source. That is, the electromagnetic waves LB may be laser light. The laser light source may be provided outside the imaging system 800 or may be provided within the imaging system 800.

[0214] 27 , the second reflecting member 868 is provided in a part of the optical path of the reimaging optical system 130, between the reimaging optical system 130 (second optical system 132) and the second image sensor 151. The second reflecting member 868 may be configured similarly to the second reflecting member 368 according to the second embodiment. Note that when the second optical system 132 of the reimaging optical system 130 is composed of two or more lenses, the second reflecting member 868 may be provided in an intermediate portion of the second optical system 132. In this way, the second reflecting member 868 may be provided in at least a part of the optical path of the reimaging optical system 130.

[0215] 27 , the distance measurement device 870 may be configured similarly to the distance measurement device 370 according to the second embodiment. The distance measurement device 870 is disposed at a position facing the second reflecting member 868, away from the second reflecting member 868 in a direction (e.g., the Y direction) intersecting the optical axis (second optical axis AX2) of the second optical system 132 in the reimaging optical system 130. The distance measurement device 870 irradiates the target object TG with measurement light LM via the second reflecting member 868, the second optical system 132, the first reflecting member 161, the first optical system 131, the light splitting member 120, and the imaging optical system 110, and generates distance information about the target object TG.

[0216] The control device 880 is configured using, for example, a PC (personal computer) or the like. The control device 880 operates based on a program stored in a storage unit 881. As shown in FIG. 27 , the control device 880 includes a storage unit 881, an image information acquisition unit 882, an image analysis unit 883, a device control unit 884, a distance information acquisition unit 885, and an image correction unit 886. The storage unit 881, the image information acquisition unit 882, the image analysis unit 883, the distance information acquisition unit 885, and the image correction unit 886 are configured in the same manner as the storage unit 181, the image information acquisition unit 182, the image analysis unit 183, the distance information acquisition unit 185, and the image correction unit 186 according to the first embodiment.

[0217] The device control unit 884 controls the drive device 163 of the reflecting member rotation device 160, similar to the device control unit 184 in the first embodiment. The device control unit 884 controls the drive device 163 of the reflecting member rotation device 160 based on at least one of the direction information of the target object TG and the position information of the target object TG in the first image PC1 generated by the image analysis unit 883, so that the electromagnetic waves LB pass through a region of the image formation region of the intermediate image Imd that includes at least a partial image of the target object TG. Specifically, the device control unit 884 uses the device control data table stored in the storage unit 881 to control the rotation angle of the first reflecting member 161 rotated by the drive device 163 based on at least one of the direction information of the target object TG and the position information of the target object TG in the first image PC1, so that the electromagnetic waves LB pass through a region of the image formation region of the intermediate image Imd that includes at least a partial image of the target object TG. The partial region including at least a partial image of the target object TG may be a partial region including at least a partial image of the target object TG. The device control data table may be a data table indicating the relationship between at least one of directional information of the target object TG and positional information of the target object TG in the first image PC1, and the rotation angle of the first reflecting member 161.

[0218] As a result, similarly to the first embodiment, the irradiation optical path through which the measurement light LM from the electromagnetic wave irradiation device 865 passes is set so that the electromagnetic wave LB is emitted from the imaging optical system 110 toward the target object TG based on image information of the first image Im1 including at least a partial image of the target object TG (specifically, at least one of directional information about the target object TG and positional information about the target object TG in the first image PC1). In other words, the irradiation optical path is set so that the electromagnetic wave LB passes through a partial region of the image formation region of the intermediate image Imd that includes at least a partial image of the target object TG. Specifically, a partial region that includes at least a partial image of the target object TG is selected from the image formation region of the intermediate image Imd. In other words, the irradiation optical path of the electromagnetic wave LB from the electromagnetic wave irradiation device 865 is set so as to overlap at least a portion of the optical path of the light that forms at least a partial image of the target object TG included in the intermediate image Imd.

[0219] The device control unit 884 sets the irradiation optical path so that at least a portion of the optical path of light forming an image of at least a portion of the target object TG overlaps with at least a portion of the irradiation optical path through which the electromagnetic wave LB passes. As a result, the electromagnetic wave LB from the electromagnetic wave irradiation device 865 is irradiated onto the target object TG via the non-imaging region 154 (through-hole 155) of the second image sensor 151, the second reflecting member 868, the second optical system 132, the first reflecting member 161, the first optical system 131, the light splitting member 120, and the imaging optical system 110. The irradiation optical path is selected from multiple optical paths formed by the imaging optical system 110 based on at least one of directional information about the target object TG and positional information about the target object TG in the first image PC1. Specifically, the irradiation optical path is selected from multiple optical paths formed by the imaging optical system 110 by rotating the first reflecting member 161 using the driving device 163. Furthermore, the measurement light LM from the distance measurement device 870 (measurement light emitting device (171)) is irradiated onto the target object TG via the second reflecting member 868, the second optical system 132, the first reflecting member 161, the first optical system 131, the light splitting member 120, and the imaging optical system 110. The light from the target object TG irradiated with the measurement light LM travels in the reverse order of the measurement light LM from the distance measurement device 870 and reaches the distance measurement device 870 (light receiving device (172)). Therefore, the distance measurement device 870 can generate distance information of the target object TG based on the light reception result of the light from the target object TG irradiated with the measurement light LM.

[0220] [Illumination Method] Next, an illumination method using the imaging system 800 according to the sixth embodiment will be outlined. FIG. 28 is a flowchart showing the illumination method according to the sixth embodiment. Note that each process in the illumination method is executed based on a program stored in the storage unit 881. As shown in FIG. 28, first, the imaging system 800 acquires directional information of the target object TG (step ST310). At this time, the first imaging device 140 captures a first image Im1 including at least a partial image of the target object TG, and outputs image information of the generated first image Im1 to the control device 880. The image information acquisition unit 882 acquires the image information of the first image Im1 output from the first imaging device 140.

[0221] As in the first embodiment, the image analysis unit 883 generates position information of the target object TG in the first image PC1 (the image represented by the image information of the first image Im1) based on image information of the first image Im1 including at least a partial image of the target object TG acquired by the image information acquisition unit 882. The image analysis unit 883 generates directional information of the target object TG based on the position information of the target object TG in the generated first image PC1. At this time, the device control unit 884 controls the drive device 163 of the reflecting member rotation device 160 based on at least one of the directional information of the target object TG and the position information of the target object TG in the first image PC1 generated by the image analysis unit 883 so that the electromagnetic wave LB passes through a partial region of the image formation region of the intermediate image Imd that includes at least a partial image of the target object TG.

[0222] Next, the imaging system 800 acquires distance information of the target object TG (step ST320). At this time, the distance measurement device 870 irradiates the target object TG with measurement light LM via the second reflecting member 868, the second optical system 132, the first reflecting member 161, the first optical system 131, the light splitting member 120, and the imaging optical system 110, and generates distance information of the target object TG. The distance measurement device 870 outputs the generated distance information of the target object TG to the distance information acquisition unit 885. The distance information acquisition unit 885 acquires the distance information of the target object TG output from the distance measurement device 870. Note that if the direction information of the target object TG is not used to control the rotation angle of the first reflecting member 161 in step ST310, step ST310 may be executed between steps ST320 and ST340 (described below). In this case, in step ST320, the first imaging device 140 captures a first image Im1 that includes an image of at least a portion of the target object TG, and the image analysis unit 883 generates position information of the target object TG in the first image PC1 based on image information of the first image Im1 that includes an image of at least a portion of the target object TG.

[0223] Next, the imaging system 800 acquires image information of the second image Im2 (step ST330), as in the first embodiment. Note that step ST330 may be executed between steps ST310 and ST320.

[0224] Then, the imaging system 800 irradiates the target object TG with the electromagnetic wave LB (step ST340). At this time, the electromagnetic wave irradiation device 865 irradiates the target object TG (see FIG. 1 ) with the electromagnetic wave LB via the non-imaging region 154 (through-hole 155) of the second imaging element 151, the second reflecting member 868, the second optical system 132, the first reflecting member 161, the first optical system 131, the light splitting member 120, and the imaging optical system 110. At this time, the control device 880 may control the output of the laser light source based on distance information of the target object TG.

[0225] Note that the above-described steps ST310 to ST340 may be repeated. For example, by repeating the above-described steps ST310 to ST340 when the positional relationship between the target object TG and the imaging system 800 changes, the distance measurement device 870 may continuously or intermittently irradiate the target object TG whose positional relationship has changed, as described above. Also, by repeating the above-described steps ST310 to ST340 when the positional relationship between the target object TG and the imaging system 800 changes, the electromagnetic wave irradiation device 865 may continuously or intermittently irradiate the target object TG whose positional relationship has changed, as described above. Note that the above-described steps ST310 to ST340 may be repeated even when the positional relationship between the target object TG and the imaging system 800 does not change.

[0226] According to the sixth embodiment, an imaging system 800 includes a light splitting member 120 that splits light LT passing through the imaging optical system 110, an imaging device 140 that captures a first image Im1 formed by one of the light beams split by the light splitting member 120, and an electromagnetic wave irradiation device 865 that irradiates an electromagnetic wave LB onto a target object TG via the imaging optical system 110 based on image information of the first image Im1 including an image of at least a portion of the target object captured by the imaging device 140. This makes it possible to irradiate the target object with electromagnetic waves LB using the electromagnetic wave irradiation device 865 while capturing and tracking the target object using the imaging device 140. Furthermore, by including a distance measurement device 870 that irradiates the target object with measurement light LM via the imaging optical system 110 and generates distance information about the target object TG, it becomes possible to measure the distance to the target object TG using the distance measurement device 870 while capturing and tracking the target object TG using the imaging device 140.

[0227] The imaging optical system 110 further includes a reflecting member rotating device 160 having a first reflecting member 161 with a reflecting surface 162 that reflects the electromagnetic waves LB from the electromagnetic wave irradiating device 865 toward the imaging optical system 110, and a driving device 163 that rotates the first reflecting member 161. As a result, by rotating the first reflecting member 161 with the driving device 163, the electromagnetic waves LB from the electromagnetic wave irradiating device 865 can be directed toward the target object in a short time. Therefore, it becomes possible to irradiate the electromagnetic waves LB to the target object in a short time.

[0228] In the sixth embodiment described above, the imaging system 800 includes the distance measurement device 870, but this is not limiting and the imaging system 800 may not include the distance measurement device 870.

[0229] In the sixth embodiment described above, the imaging system 800 includes the second imaging device 150 , but this is not limiting, and the second imaging device 150 may not be included.

[0230] [Seventh Embodiment] Next, an imaging system according to a seventh embodiment will be described. The imaging system according to the seventh embodiment has the same configuration as the imaging system 100 according to the first embodiment, except for the configuration of an electromagnetic wave irradiation device 965, a second reflecting member 968, a distance measurement device 970, a control device 980, and a housing 901. Therefore, the same components as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and detailed description thereof will be omitted. As shown in FIG. 29 , the imaging system 900 according to the seventh embodiment includes an imaging optical system 110, a light splitting member 120, a reimaging optical system 130, a first imaging device 140, a second imaging device 150, a reflecting member rotation device 160, an electromagnetic wave irradiation device 965, a second reflecting member 968, a distance measurement device 970, a control device 980, and a housing 901.

[0231] The housing 901 accommodates and holds the imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first image capture device 140, the second image capture device 150, the reflecting member rotation device 160, the electromagnetic wave irradiation device 965, the second reflecting member 968, and the distance measurement device 970. The imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first image capture device 140, the second image capture device 150, and the reflecting member rotation device 160 have the same configurations as the imaging optical system 110, the light splitting member 120, the reimaging optical system 130, the first image capture device 140, the second image capture device 150, and the reflecting member rotation device 160 according to the first embodiment, and detailed description thereof will be omitted. In addition, in the reflecting member rotating device 160, the reflecting surface 162 of the first reflecting member 161 reflects the electromagnetic wave LB from the electromagnetic wave irradiation device 865 that has passed through the second optical system 132 (reimaging optical system 130) toward the first optical system 131 (imaging optical system 110).

[0232] In the seventh embodiment, as in the first embodiment, the optical axis of the first optical system 131 of the reimaging optical system 130 and the optical axis of the imaging optical system 110, which is coaxial with the first optical system 131, are referred to as the first optical axis AX1. The optical axis of the second optical system 132 of the reimaging optical system 130 is referred to as the second optical axis AX2. Furthermore, the direction along the first optical axis AX1 is referred to as the Y direction. The direction along the second optical axis AX2 is referred to as the Z direction. The direction perpendicular to the Y direction and the Z direction is referred to as the X direction.

[0233] 29 , the distance measurement device 970 may be configured similarly to the distance measurement device 170 according to the first embodiment. The distance measurement device 970 is disposed on the opposite side of the second image sensor 151 from the optical member of the second optical system 132 (reimaging optical system 130) that is closest to the second image sensor 151. The distance measurement device 970 irradiates the target object TG with measurement light LM via the non-imaging region 154 (through-hole 155) of the second image sensor 151, the second reflecting member 968, the second optical system 132, the first reflecting member 161, the first optical system 131, the light splitting member 120, and the imaging optical system 110, and generates distance information about the target object TG.

[0234] 29 , the second reflecting member 968 is provided in a part of the optical path of the reimaging optical system 130, between the reimaging optical system 130 (second optical system 132) and the second image sensor 151. The second reflecting member 968 may be configured similarly to the second reflecting member 368 according to the second embodiment. Note that when the second optical system 132 of the reimaging optical system 130 is made up of two or more lenses, the second reflecting member 968 may be provided in an intermediate portion of the second optical system 132. In this way, the second reflecting member 968 may be provided in at least a part of the optical path of the reimaging optical system 130.

[0235] 29 , the electromagnetic wave irradiation device 965 is disposed opposite the second reflecting member 968, away from the second reflecting member 968 in a direction (e.g., the Y direction) intersecting the optical axis (second optical axis AX2) of the second optical system 132 in the reimaging optical system 130. The electromagnetic wave irradiation device 965 irradiates the target object TG with electromagnetic waves LB via the second reflecting member 968, the second optical system 132, the first reflecting member 161, the first optical system 131, the light splitting member 120, and the imaging optical system 110. For example, the electromagnetic wave irradiation device 965 may include a fiber (not shown) that emits electromagnetic waves LB from a laser light source. That is, the electromagnetic waves LB may be laser light. The laser light source may be provided outside the imaging system 900 or may be provided within the imaging system 900.

[0236] The control device 980 is configured using, for example, a PC (personal computer). The control device 980 operates based on a program stored in a storage unit 981. As shown in FIG. 29 , the control device 980 includes a storage unit 981, an image information acquisition unit 982, an image analysis unit 983, a device control unit 984, a distance information acquisition unit 985, and an image correction unit 986. The storage unit 981, the image information acquisition unit 982, the image analysis unit 983, the device control unit 984, the distance information acquisition unit 985, and the image correction unit 986 are configured in the same manner as the storage unit 881, the image information acquisition unit 882, the image analysis unit 883, the device control unit 884, the distance information acquisition unit 885, and the image correction unit 986 according to the sixth embodiment.

[0237] [Illumination Method] Next, an illumination method using the imaging system 900 according to the seventh embodiment will be outlined. The illumination method according to the seventh embodiment is similar to the illumination method according to the sixth embodiment. Therefore, the same flowchart as that according to the sixth embodiment, shown in FIG. 28, will be used for the description. Note that each process in the measurement method is executed based on a program stored in the storage unit 981. First, as in the sixth embodiment, the imaging system 900 acquires directional information of the target object TG (step ST310). Note that at this time, the device control unit 984 of the control device 980 controls the drive device 163 of the reflecting member rotation device 160 based on at least one of the directional information of the target object TG and the position information of the target object TG in the first image PC1 generated by the image analysis unit 983, so that the electromagnetic wave LB passes through a portion of the image formation region of the intermediate image Imd that includes at least a partial image of the target object TG.

[0238] Next, imaging system 900 acquires distance information of target object TG (step ST320) in the same manner as in the sixth embodiment. Note that, in step ST310, if direction information of target object TG is not used to control the rotation angle of first reflecting member 161, step ST310 may be executed between steps ST320 and ST340 (described later) in the same manner as in the sixth embodiment.

[0239] Next, the imaging system 900 acquires image information of the second image Im2 (step ST330), similarly to the sixth embodiment. Note that step ST330 may be executed between step ST310 and step ST320.

[0240] Then, the image capturing system 900 irradiates the target object TG with the electromagnetic wave LB (step ST340), as in the sixth embodiment. At this time, the control device 980 may control the output of the laser light source based on distance information of the target object TG.

[0241] As in the sixth embodiment, the above-described steps ST310 to ST340 may be repeated.

[0242] According to the seventh embodiment, the same effects as those of the sixth embodiment can be obtained.

[0243] In the seventh embodiment described above, the imaging system 900 includes the distance measurement device 970, but this is not limiting, and the imaging system 900 may not include the distance measurement device 870.

[0244] In the seventh embodiment described above, the imaging system 900 includes the second imaging device 150 , but this is not limiting, and the second imaging device 150 may not be included.

[0245] In the first to third, fifth, and sixth embodiments described above, the reimaging optical system 130 forms the second image Im2 by enlarging and reimaging a portion of the intermediate image Imd formed by the light LT that has passed through the imaging optical system 110. However, this is not limiting. For example, the reimaging optical system may reimage the intermediate image Imd formed by the light LT that has passed through the imaging optical system 110 as the second image Im2 at the same size. Furthermore, the reimaging optical system may reduce the intermediate image Imd formed by the light LT that has passed through the imaging optical system 110 and reimage it as the second image Im2. Note that the reimaging optical system 130 may be configured to reduce a portion of the intermediate image Imd and reimage it as the second image Im2, or may be configured to reimage the intermediate image Imd as the second image Im2 at the same size as the portion of the intermediate image Imd.

[0246] In the first to third embodiments described above, the output device outputs the direction information of the target object TG, the distance information of the target object TG, and the image information of the second image Im2, but this is not limiting. For example, the output device may output three-dimensional information of the target object TG generated based on the direction information of the target object TG, the distance information of the target object TG, and the image information of the second image Im2.

[0247] In the first to third embodiments described above, similar to the fifth embodiment, the image analysis unit may, upon identifying the target object TG, set a region of interest ROI in the first image PC1 so as to include an image of at least a portion of the identified target object TG. In this case, the image analysis unit may set a plurality of measurement points MP for the target object TG arranged at a predetermined measurement pitch in the region of interest ROI. After setting the region of interest ROI, the image analysis unit may generate position information of the target object TG in the first image PC1 for the plurality of measurement points MP, similar to the image analysis unit 183 according to the first embodiment. Similarly to the image analysis unit 183 according to the first embodiment, the image analysis unit may generate directional information of the target object TG for the plurality of measurement points MP based on the generated position information of the target object TG in the first image PC1. The device control unit may control the drive device 163 to rotate the first reflecting member 161 so that the measurement light LM from the distance measurement device is sequentially irradiated onto the plurality of measurement points MP on the target object TG based on the direction information of the target object TG generated for the plurality of measurement points MP in the region of interest ROI. The output device may output information on the plurality of measurement points MP in the region of interest ROI instead of the direction information of the target object TG.

[0248] In the first to third, sixth, and seventh embodiments, the control device may include a distance measurement unit that generates distance information of the target object from image information of the second image captured by the second imaging device by using machine learning. In this case, since the control device (distance measurement unit) has the function of a distance measurement device, a distance measurement device that irradiates measurement light does not need to be provided.

[0249] The following supplementary notes are further provided with respect to the above-described embodiments. [Supplementary Note 1] An imaging system comprising: an imaging optical system; a light splitting member that splits light that has passed through at least a portion of the imaging optical system; a first imaging device that captures a first image formed by one of the lights split by the light splitting member; a second imaging device that captures a second image formed by the other of the lights split by the light splitting member; and a distance measurement device that irradiates a target object with measurement light based on image information of the first image including an image of at least a portion of the target object, captured by the first imaging device, and generates distance information of the target object. [Supplementary Note 2] The imaging system described in Supplementary Note 1, in which the distance measurement device irradiates the target object with the measurement light based on position information of the target object in the first image generated from the image information of the first image, and generates the distance information. [Supplementary Note 3] The imaging system described in Supplementary Note 1 or 2, in which the distance measurement device irradiates the target object with the measurement light based on direction information of the target object generated from the image information of the first image, and generates the distance information. [Supplementary Note 4] The imaging system according to any one of Supplements 1 to 3, wherein the distance measurement device irradiates the target object with measurement light without passing through the imaging optical system and the light splitting member based on image information of the first image including an image of at least a part of the target object, thereby generating distance information of the target object. [Supplementary Note 5] The imaging system according to any one of Supplements 1 to 4, wherein the distance measurement device irradiates the target object with measurement light in an irradiation direction set based on image information of the first image including an image of at least a part of the target object, thereby generating distance information of the target object. [Supplementary Note 6] The imaging system according to any one of Supplements 1 to 5, wherein the distance measurement device irradiates the target object with measurement light in an irradiation direction set based on image information of the first image including an image of at least a part of the target object and position information of the distance measurement device, thereby generating distance information of the target object.[Supplementary Note 7] The imaging system according to any one of Supplements 1 to 6, wherein the distance measurement device irradiates the object with the measurement light by emitting the measurement light in an irradiation direction set based on image information of the first image including an image of at least a portion of the object, and a positional relationship between the distance measurement device and an optical device including the imaging optical system, the light splitting member, the first imaging device, and the second imaging device. [Supplementary Note 8] The imaging system according to any one of Supplements 1 to 7, wherein the second image is formed based on image information of the first image including an image of at least a portion of the object. [Supplementary Note 9] The imaging system according to any one of Supplements 1 to 8, wherein the second image is an image of a portion of a third image formed by the imaging optical system. [Supplementary Note 10] The imaging system according to Supplementary Note 9, further comprising a reimaging optical system that forms the second image by enlarging and reimaging a portion of the third image formed by the imaging optical system. [Supplementary Note 11] The imaging system according to Supplementary Note 10, wherein the reimaging optical system is telecentric on the side of the third image. [Supplementary Note 12] The imaging system according to any one of Supplements 9 to 11, wherein a portion of an image formation region of the third image is selected to be re-imaged as the second image so that the second image includes at least a portion of the image of the target object, based on image information of the first image including at least a portion of the target object. [Supplementary Note 13] The imaging system according to any one of Supplements 1 to 12, further comprising: a reflecting member rotation device including at least one first reflecting member having a reflecting surface that reflects at least a portion of the other light split by the light splitting member toward the second imaging device, and a drive device that rotates the at least one first reflecting member. [Supplementary Note 14] The imaging system according to Supplementary Note 13, further comprising a re-imaging optical system that re-images, as the second image, at least a portion of a third image formed by the other light split by the light splitting member using the imaging optical system. [Supplementary Note 15] The imaging system according to Supplementary Note 14, wherein the re-imaging optical system enlarges a portion of the third image formed from the other light split by the light splitting member and re-images it as the second image.[Supplementary Note 16] The imaging system according to Supplementary Note 14 or 15, wherein the position where the third image is formed is conjugate to the position where the first image is formed. [Supplementary Note 17] The imaging system according to any one of Supplementary Notes 14 to 16, wherein the reimaging optical system has: a first optical system onto which the other light split by the light splitting member is incident; and a second optical system onto which light from the first optical system is incident; the reflecting surface of the at least one first reflecting member is disposed at or near an intersection position where an optical axis of the first optical system intersects with an optical axis of the second optical system; and the second optical system forms the second image with light from the first optical system reflected by the reflecting surface. [Supplementary Note 18] The imaging system according to Supplementary Note 17, wherein the first optical system is telecentric on the side of the third image. [Supplementary Note 19] The imaging system according to Supplementary Note 17 or 18, wherein the reflecting surface is disposed at a pupil position or a pupil conjugate position of an optical system consisting of the imaging optical system and the first optical system. [Supplementary Note 20] The imaging system according to any one of Supplements 13 to 19, wherein the second image to be captured by the second imaging device is determined by rotating the at least one first reflecting member using the driving device based on image information of the first image including an image of at least a part of the target object. [Supplementary Note 21] The imaging system according to any one of Supplements 13 to 20, wherein image information of the second image to be captured by the second imaging device is corrected in accordance with the rotation of the first reflecting member by the driving device. [Supplementary Note 22] The imaging system according to any one of Supplements 1 to 21, wherein the distance measurement device has a measurement light emitting device that emits the measurement light and a light receiving device that receives light from the target object irradiated with the measurement light, and generates the distance information of the target object based on a light receiving result, by the light receiving device, of light from the target object irradiated with the measurement light from the measurement light emitting device. [Appendix 23] The imaging system according to any one of appendices 1 to 22, further comprising a housing for holding the imaging optical system, the light splitting member, the first imaging device, and the second imaging device, wherein the measurement light irradiation device is arranged at a position different from the housing.[Supplementary Note 24] The imaging system according to any one of Supplements 1 to 23, wherein at least one of the plurality of objects is identified as the target object based on image information of the first image including images of the plurality of objects imaged by the first imaging device, and the measurement light from the distance measurement device is irradiated onto the identified target object. [Supplementary Note 25] The imaging system according to any one of Supplements 1 to 23, wherein an object is identified as the target object based on image information of the first image including an image of the object imaged by the first imaging device, and the measurement light from the distance measurement device is irradiated onto the identified target object. [Supplementary Note 26] The imaging system according to any one of Supplements 1 to 25, further comprising an output device that outputs at least one of direction information of the target object generated based on image information of the first image including an image of at least a part of the target object and the distance information generated by the distance measurement device. [Supplementary Note 27] The imaging system according to Supplementary Note 26, wherein the second image is formed to include at least a partial image of the target object based on image information of the first image including an image of at least a part of the target object, and the output device outputs image information of the second image including at least a partial image of the target object imaged by the second imaging device. [Supplementary Note 28] The imaging system according to Supplementary Note 26, wherein an electromagnetic wave irradiation device is controlled to irradiate the target object with electromagnetic waves different from the measurement light based on at least one of the distance information and the direction information output from the output device. [Supplementary Note 29] The imaging system according to Supplementary Note 27, wherein an electromagnetic wave irradiation device is controlled to irradiate the target object with electromagnetic waves different from the measurement light based on at least one of the distance information, the direction information, and image information of the second image output from the output device.[Supplementary Note 30] When the image information of the first image is defined as first image information, the direction information is defined as first direction information, and the distance information is defined as first distance information, if the positional relationship between the target object and the imaging system changes, the output device outputs at least one of second distance information of the target object generated by irradiating the measurement light from the distance measurement device to the target object based on second image information of the first image including an image of at least a part of the target object imaged by the first imaging device after the positional relationship has changed, and second direction information of the target object generated based on second image information of the first image including an image of at least a part of the target object imaged by the first imaging device after the positional relationship has changed. [Supplementary Note 31] The imaging system according to Supplementary Note 27, wherein image information of the first image is defined as first image information, image information of the second image including an image of at least a part of the target object is defined as third image information, the direction information is defined as first direction information, and the distance information is defined as first distance information, when a positional relationship between the target object and the imaging system changes, the output device outputs at least one of: second distance information of the target object generated by irradiating the target object with the measurement light from the distance measurement device based on second image information of the first image including an image of at least a part of the target object imaged by the first imaging device after the positional relationship has changed; second direction information of the target object generated based on second image information of the first image including an image of at least a part of the target object imaged by the first imaging device after the positional relationship has changed; and fourth image information of the second image generated by imaging, by the second imaging device, the second image formed to include an image of at least a part of the target object based on second image information of the first image including an image of at least a part of the target object imaged by the first imaging device after the positional relationship has changed.[Supplementary Note 32] The imaging system according to Supplementary Note 30, wherein an electromagnetic wave irradiation device is controlled so that an electromagnetic wave different from the measurement light is irradiated to the target object continuously or intermittently as the positional relationship changes, based on at least one of distance change information of the first distance information and the second distance information and direction change information of the first direction information and the second direction information output from the output device. [Supplementary Note 33] The imaging system according to Supplementary Note 31, wherein an electromagnetic wave irradiation device is controlled so that an electromagnetic wave different from the measurement light is irradiated to the target object continuously or intermittently as the positional relationship changes, based on at least one of distance change information of the first distance information and the second distance information, direction change information of the first direction information and the second direction information, and image change information of the third image information and the fourth image information output from the output device. [Supplementary Note 34] The imaging system according to any one of Supplements 1 to 25, wherein, when the positional relationship between the target object and the imaging system changes, the target object is continuously or intermittently irradiated with the measurement light based on image information of the first image including at least a part of the target object imaged by the first imaging device. [Supplementary Note 35] The imaging system according to Supplementary Note 34, wherein, when the positional relationship between the target object and the imaging system changes, the second image is formed so as to include at least a part of the target object based on image information of the first image including at least a part of the target object imaged by the first imaging device. [Supplementary Note 36] The imaging system according to Supplementary Note 34 or 35, wherein, when the positional relationship between the target object and the imaging system changes, an electromagnetic wave irradiation device is controlled so as to continuously or intermittently irradiate the target object with electromagnetic waves different from the measurement light based on image information of the first image including at least a part of the target object imaged by the first imaging device. [Supplementary Note 37] The imaging system according to any one of Supplements 28, 29, 32, 33, and 36, wherein the electromagnetic wave irradiation device is disposed at a position different from the imaging system. [Supplementary Note 38] The imaging system according to any one of Supplements 28, 29, 32, 33, 36, and 37, wherein the electromagnetic waves are irradiated from the electromagnetic wave irradiation device to the target object in order to exterminate or destroy the target object.[Supplementary Note 39] The imaging system according to any one of Supplementary Notes 28, 29, 32, and 33, or any one of Supplementary Notes 36 to 38, wherein the electromagnetic waves are light. [Supplementary Note 40] The imaging system according to Supplementary Note 39, wherein an output of the light irradiated from the electromagnetic wave irradiation device is 10 kW or more. [Supplementary Note 41] An electromagnetic wave irradiation system comprising: the imaging system according to any one of Supplementary Notes 28, 29, 32, and 33, or any one of Supplementary Notes 36 to 40, and an electromagnetic wave irradiation device that irradiates electromagnetic waves onto a target object. [Supplementary Note 42] A measurement method using an imaging system including an imaging optical system and a light splitting member that splits light that has passed through at least a part of the imaging optical system, the measurement method including: capturing, using a first imaging device, a first image formed by one of the lights split by the light splitting member; capturing, using a second imaging device, a second image formed by the other of the lights split by the light splitting member; and irradiating a measurement light onto the target object based on image information of the first image including an image of at least a part of the target object, captured by the first imaging device, to generate distance information of the target object. [Supplementary Note 43] A program that causes a computer to execute the distance measurement method described in Supplementary Note 42. [Supplementary Note 44] An imaging system comprising: an imaging optical system; a light splitting member that splits light that has passed through at least a part of the imaging optical system; a first imaging device that captures a first image formed by one of the lights split by the light splitting member; and a second imaging device that captures a second image formed by the other of the lights split by the light splitting member, wherein a measurement light from a distance measurement device is irradiated onto the target object based on image information of the first image captured by the first imaging device and including an image of at least a part of the target object, and distance information of the target object is generated. [Supplementary Note 45] An imaging system comprising: an imaging optical system; a light splitting member that splits light that has passed through the imaging optical system; an imaging device that captures the first image formed by one of the lights split by the light splitting member; and an electromagnetic wave irradiation device that irradiates the target object with electromagnetic waves via the imaging optical system based on image information of the first image captured by the imaging device and including an image of at least a part of the target object.[Supplementary Note 46] The imaging system according to Supplementary Note 45, wherein the electromagnetic wave irradiation device irradiates the target object with electromagnetic waves via the imaging optical system based on position information of the target object in the image of the first image generated from image information of the first image. [Supplementary Note 47] The imaging system according to Supplementary Note 45 or 46, wherein the electromagnetic wave irradiation device irradiates the target object with electromagnetic waves via the imaging optical system based on directional information of the target object generated from image information of the first image. [Supplementary Note 48] The imaging system according to any one of Supplementary Notes 45 to 47, wherein an irradiation optical path through which the electromagnetic waves from the electromagnetic wave irradiation device pass is set based on image information of the first image including an image of at least a part of the target object. [Supplementary Note 49] The imaging system of Supplementary Note 48, wherein the irradiation optical path is set so that the electromagnetic waves are emitted from the imaging optical system in a direction in which the target object is located, based on image information of the first image including at least a partial image of the target object, and the electromagnetic wave irradiation device irradiates the electromagnetic waves via the set irradiation optical path, so that the electromagnetic waves emitted from the imaging optical system are irradiated onto the target object. [Supplementary Note 50] The imaging system of Supplementary Note 49, wherein the irradiation optical path is selected from a plurality of optical paths formed by the imaging optical system, based on image information of the first image including at least a partial image of the target object. [Supplementary Note 51] The imaging system of Supplementary Note 50, wherein the irradiation optical path is selected from the plurality of optical paths by the imaging optical system, based on image information of the first image including at least a partial image of the target object, by selecting a partial region including at least a partial image of the target object from an image formation region of an image formed by the other light split by the light splitting member. [Appendix 52] The imaging system according to any one of Appendices 48 to 50, wherein the irradiation light path is set by the imaging optical system based on image information of the first image including an image of at least a part of the target object so that the electromagnetic wave passes through a part of an image formation area of ​​an image formed by the other light spli...

Claims

1. An imaging system comprising: an imaging optical system; a light splitting member that splits light that has passed through at least a portion of the imaging optical system; a first imaging device that captures a first image formed by one of the lights split by the light splitting member; a second imaging device that captures a second image formed by the other light split by the light splitting member; and a distance measurement device that irradiates measurement light onto the target object via the imaging optical system based on image information of the first image, which includes an image of at least a portion of the target object, captured by the first imaging device, and generates distance information of the target object.

2. The imaging system of claim 1, wherein the distance measurement device irradiates the measurement light onto the target object via the imaging optical system based on position information of the target object in the image of the first image generated from image information of the first image, and generates the distance information.

3. An imaging system as described in claim 1 or 2, wherein the distance measurement device irradiates the measurement light onto the target object via the imaging optical system based on directional information of the target object generated from image information of the first image, and generates the distance information.

4. An imaging system as described in any one of claims 1 to 3, wherein the second image is formed based on image information of the first image including an image of at least a portion of the target object imaged by the first imaging device, such that at least a portion of a first optical path of light forming an image of at least a portion of the target object included in the second image overlaps with at least a portion of a second optical path of the measurement light from the distance measurement device, and the measurement light from the distance measurement device is irradiated to the target object via the imaging optical system by the distance measurement device irradiating the measurement light in a state in which the second image is formed such that the first optical path overlaps with at least a portion of the second optical path.

5. An imaging system according to any one of claims 1 to 4, wherein the second image is formed based on image information of the first image including an image of at least a portion of the target object.

6. An imaging system according to any one of claims 1 to 5, wherein the second image is an image of a portion of a third image formed by the imaging optical system.

7. The imaging system according to claim 6, further comprising a reimaging optical system which forms the second image by enlarging and reimaging a portion of the third image formed by the imaging optical system.

8. The imaging system according to claim 7, wherein the reimaging optical system is telecentric on the side of the third image.

9. An imaging system as described in any one of claims 6 to 8, wherein a portion of the image forming area of ​​the third image is selected to be re-imaged as the second image so that the second image includes an image of at least a portion of the target object based on image information of the first image including an image of at least a portion of the target object.

10. The imaging system described in claim 9, wherein, based on image information of the first image including an image of at least a portion of the target object, a partial area is selected from the image forming area so that at least a portion of a first optical path of light forming an image of at least a portion of the target object included in the second image overlaps with at least a portion of a second optical path of the measurement light from the distance measuring device, and the measurement light from the distance measuring device is irradiated to the target object via the imaging optical system by the distance measuring device irradiating the measurement light in a state in which the partial area is selected from the image forming area so that at least a portion of the first optical path overlaps with at least a portion of the second optical path.

11. An imaging system as described in any one of claims 1 to 10, further comprising at least one first reflecting member having a reflecting surface that reflects at least a portion of the other light split by the light splitting member toward the second imaging device, and a reflecting member rotating device having a drive device that rotates the at least one first reflecting member, wherein the reflecting surface is positioned on the optical path of the measurement light from the distance measurement device.

12. The imaging system according to claim 11, further comprising a reimaging optical system that re-images, as the second image, at least a portion of a third image formed by the other light split by the light splitting member using the imaging optical system.

13. The imaging system according to claim 12, wherein the reimaging optical system enlarges a portion of the third image formed from the other light split by the light splitting member and re-images it as the second image.

14. An imaging system according to claim 12 or 13, wherein the position at which the third image is formed is conjugate with the position at which the first image is formed.

15. The imaging system of any one of claims 12 to 14, wherein the re-imaging optical system has a first optical system into which the other light split by the light splitting member is incident, and a second optical system into which light from the first optical system is incident, the reflective surface of the at least one first reflecting member is positioned at or near an intersection position where the optical axis of the first optical system and the optical axis of the second optical system intersect, and the second optical system forms the second image with the light from the first optical system reflected by the reflective surface.

16. The imaging system according to claim 15, wherein the first optical system is telecentric on the side of the third image.

17. An imaging system according to claim 15 or 16, wherein the reflecting surface is disposed at a pupil position or a pupil conjugate position of an optical system consisting of the imaging optical system and the first optical system.

18. An imaging system according to any one of claims 11 to 17, wherein the measurement light from the distance measurement device is irradiated onto the target object via the at least one first reflecting member, the light splitting member, and the imaging optical system.

19. An imaging system as described in any one of claims 12 to 17, wherein the second imaging device has a second imaging element that captures the second image, the imaging area of ​​the second imaging element is provided around a non-imaging area, and the measurement light from the distance measurement device is incident on the imaging optical system from the non-imaging area via the re-imaging optical system, the at least one first reflecting member, and the light splitting member.

20. The imaging system described in claim 19, wherein a through hole is formed in the second imaging element in a direction intersecting the non-imaging region of the second imaging element, at least a part of the distance measuring device is arranged on the opposite side of the second imaging element to the optical member of the re-imaging optical system that is closest to the second imaging element, and the measurement light from the non-imaging region is emitted from at least a part of the distance measuring device and includes measurement light that has passed through the through hole.

21. An imaging system as described in any one of claims 12 to 17, further comprising a second reflecting member provided in at least a portion of the optical path of the re-imaging optical system, wherein the measurement light from the distance measuring device is incident on the re-imaging optical system via the second reflecting member.

22. The imaging system according to claim 21, wherein the second reflecting member is provided in at least a portion of the optical path of the reimaging optical system between the reimaging optical system and the second image sensor.

23. The imaging system according to claim 21 or 22, wherein at least a part of the distance measuring device is disposed at a position conjugate with the position where the second image is formed.

24. An imaging system as described in any one of claims 11 to 23, wherein the second image captured by the second imaging device is determined by rotating at least one of the first reflecting members using the driving device based on image information of the first image including an image of at least a portion of the target object, and the measurement light is irradiated onto the target object.

25. The imaging system described in claim 24, wherein a portion of an image forming area of ​​the third image to be re-imaged as the second image is selected so that at least a portion of a first optical path of light forming an image of at least a portion of the target object included in the second image overlaps with at least a portion of a second optical path of the measurement light from the distance measurement device by rotating the at least one first reflecting member using the driving device based on image information of the first image including an image of at least a portion of the target object, and the measurement light from the distance measurement device is irradiated to the target object via at least a portion of the re-imaging optical system, the at least one first reflecting member, and the imaging optical system by the distance measurement device irradiating the measurement light in a state in which the portion of the image forming area is selected so that at least a portion of the first optical path overlaps with at least a portion of the second optical path.

26. The imaging system described in claim 19, wherein a portion of the image forming area of ​​the third image to be re-imaged as the second image is selected from the image forming area of ​​the second image so that at least a portion of the image of the target object included in the second image is superimposed on at least a portion of the non-imaging area of ​​the second imaging element by rotating the at least one first reflecting member using the driving device, and the measurement light from the distance measuring device is irradiated to the target object via the re-imaging optical system, the at least one first reflecting member, and the imaging optical system by the distance measuring device irradiating the measurement light in a state in which the portion of the image forming area is selected from the image forming area so that at least a portion of the image of the target object included in the second image is superimposed on at least a portion of the non-imaging area.

27. An imaging system according to any one of claims 11 to 26, wherein image information of the second image captured by the second imaging device is corrected in response to rotation of the first reflecting member by the driving device.

28. An imaging system according to any one of claims 1 to 27, wherein the distance measurement device has a measurement light emitting device that emits the measurement light, and a light receiving device that receives light from the target object irradiated with the measurement light, and generates the distance information of the target object based on the result of reception by the light receiving device of light from the target object irradiated with the measurement light from the measurement light emitting device.

29. An imaging system as described in any one of claims 1 to 28, wherein at least one of the plurality of objects is identified as the target object based on image information of the first image including images of the plurality of objects imaged by the first imaging device, and the measurement light is irradiated onto the identified target object via the imaging optical system.

30. An imaging system according to any one of claims 1 to 28, further comprising: identifying an object as the target object based on image information of the first image including an image of the object captured by the first imaging device; and irradiating the identified target object with the measurement light via the imaging optical system.

31. An imaging system according to any one of claims 1 to 30, further comprising an output device that outputs at least one of directional information of the target object generated based on image information of the first image including an image of at least a portion of the target object, and the distance information generated by the distance measurement device.

32. An imaging system as described in claim 31, wherein the second image is formed so as to include an image of at least a portion of the target object based on image information of the first image including an image of at least a portion of the target object, and the output device outputs image information of the second image including an image of at least a portion of the target object imaged by the second imaging device.

33. An imaging system as described in claim 31, wherein an electromagnetic wave irradiation device is controlled so that the target object is irradiated with electromagnetic waves other than the measurement light based on at least one of the distance information and the direction information output from the output device.

34. An imaging system as described in claim 32, wherein an electromagnetic wave irradiation device is controlled so that the target object is irradiated with electromagnetic waves other than the measurement light based on at least one of the distance information, the direction information, and the image information of the second image output from the output device.

35. The imaging system of claim 31, wherein, when the image information of the first image is defined as first image information, the directional information is defined as first directional information, and the distance information is defined as first distance information, if a positional relationship between the target object and the imaging system changes, the output device outputs at least one of: second distance information of the target object generated by irradiating the measurement light from the distance measurement device to the target object via the imaging optical system based on second image information of the first image including an image of at least a portion of the target object imaged by the first imaging device after the positional relationship has changed; and second directional information of the target object generated based on second image information of the first image including an image of at least a portion of the target object imaged by the first imaging device after the positional relationship has changed.

36. The imaging system of claim 32, wherein the image information of the first image is defined as first image information, the image information of the second image including an image of at least a portion of the target object is defined as third image information, the directional information is defined as first directional information, and the distance information is defined as first distance information, when a positional relationship between the target object and the imaging system changes, the output device outputs at least one of: second distance information of the target object generated by irradiating the measurement light from the distance measurement device to the target object via the imaging optical system based on second image information of the first image including an image of at least a portion of the target object imaged by the first imaging device after the positional relationship has changed; second directional information of the target object generated based on second image information of the first image including an image of at least a portion of the target object imaged by the first imaging device after the positional relationship has changed; and fourth image information of the second image generated by imaging by the second imaging device the second image formed so as to include an image of at least a portion of the target object based on second image information of the first image including an image of at least a portion of the target object imaged by the first imaging device after the positional relationship has changed.

37. An imaging system as described in claim 35, wherein an electromagnetic wave irradiation device is controlled so that an electromagnetic wave different from the measurement light is irradiated to the target object continuously or intermittently as the positional relationship changes based on at least one of distance change information of the first distance information and the second distance information and direction change information of the first direction information and the second direction information output from the output device.

38. The imaging system of claim 36, wherein an electromagnetic wave irradiation device is controlled so that electromagnetic waves different from the measurement light are irradiated to the target object continuously or intermittently as the positional relationship changes, based on at least one of distance change information of the first distance information and the second distance information, direction change information of the first direction information and the second direction information, and image change information of the third image information and the fourth image information output from the output device.

39. An imaging system according to any one of claims 1 to 30, wherein when the positional relationship between the target object and the imaging system changes, the measurement light is continuously or intermittently irradiated onto the target object based on image information of the first image including an image of at least a portion of the target object captured by the first imaging device.

40. An imaging system as described in claim 39, wherein when the positional relationship between the target object and the imaging system changes, the second image is formed so as to include an image of at least a portion of the target object based on image information of the first image including an image of at least a portion of the target object captured by the first imaging device.

41. An imaging system as described in claim 39 or 40, wherein when the positional relationship between the target object and the imaging system changes, an electromagnetic wave irradiation device is controlled so that the target object is continuously or intermittently irradiated with electromagnetic waves different from the measurement light based on image information of the first image including an image of at least a portion of the target object imaged by the first imaging device.

42. An imaging system comprising: an imaging optical system; a light splitting member that splits light passing through the imaging optical system; an imaging device that captures a first image formed by one of the lights split by the light splitting member; and a distance measurement device that irradiates measurement light onto the target object via the imaging optical system based on image information of the first image including an image of at least a portion of the target object captured by the imaging device, and generates distance information of the target object.

43. An imaging system as described in claim 42, wherein the distance measurement device irradiates measurement light onto the target object via the imaging optical system based on position information of the target object in the image of the first image generated from image information of the first image, and generates the distance information.

44. An imaging system as described in claim 42 or 43, wherein the distance measurement device irradiates measurement light onto the target object via the imaging optical system based on directional information of the target object generated from image information of the first image, and generates the distance information.

45. An imaging system according to any one of claims 42 to 44, wherein a measurement optical path through which the measurement light from the distance measurement device passes is set based on image information of the first image, which includes an image of at least a portion of the target object.

46. ​​The imaging system described in claim 45, wherein the measurement optical path is set so that the measurement light is emitted from the imaging optical system in the direction in which the target object is located based on image information of the first image including an image of at least a portion of the target object, and the distance measuring device irradiates the measurement light via the set measurement optical path, thereby irradiating the measurement light emitted from the imaging optical system onto the target object.

47. The imaging system according to claim 46, wherein the measurement optical path is selected from a plurality of optical paths formed by the imaging optical system based on image information of the first image including an image of at least a portion of the target object.

48. An imaging system as described in claim 47, wherein the measurement optical path is selected from the multiple optical paths by the imaging optical system selecting a portion of an image forming area of ​​an image formed by the other light split by the light splitting member, the portion including an image of at least a portion of the target object, based on image information of the first image including an image of at least a portion of the target object.

49. An imaging system as described in any one of claims 45 to 47, wherein the measurement optical path is set by the imaging optical system based on image information of the first image including an image of at least a portion of the target object so that the measurement light passes through a portion of the image forming area of ​​the image formed by the other light split by the light splitting member, the portion including an image of at least a portion of the target object.

50. An imaging system as described in any one of claims 45 to 47, wherein the measurement optical path is set by the imaging optical system based on image information of the first image including an image of at least a portion of the target object so as to overlap with at least a portion of the optical path of light forming an image of at least a portion of the target object, which is included in an image formed by the other light split by the light splitting member, and by setting the measurement optical path, the measurement light from the distance measuring device is irradiated to the target object via the imaging optical system.

51. An imaging system according to any one of claims 42 to 50, further comprising a reflecting member rotating device having at least one first reflecting member having a reflecting surface that reflects the measurement light from the distance measuring device toward the imaging optical system, and a driving device that rotates the at least one first reflecting member.

52. The imaging system of claim 51, further comprising a first optical system into which the other light split by the light splitting member is incident, and a second optical system into which light from the first optical system is incident, wherein the reflective surface of the at least one first reflecting member is positioned at or near an intersection position where the optical axis of the first optical system and the optical axis of the second optical system intersect.

53. The imaging system according to claim 52, wherein the first optical system is telecentric on the side of the light splitting member.

54. The imaging system according to claim 52 or 53, wherein the reflecting surface is disposed at a pupil position or a pupil conjugate position of an optical system consisting of the imaging optical system and the first optical system.

55. An imaging system according to any one of claims 51 to 54, wherein the measurement light from the distance measurement device is irradiated onto the target object via the at least one first reflecting member, the light dividing member, and the imaging optical system.

56. An imaging system according to any one of claims 51 to 55, wherein at least a part of the distance measurement device is positioned in a position where it can irradiate the measurement light towards the light splitting member via the at least one first reflecting member.

57. An imaging system according to any one of claims 51 to 56, wherein the measurement light is irradiated onto the target object by rotating the at least one first reflecting member using the driving device based on image information of the first image including an image of at least a portion of the target object.

58. An imaging system as described in any one of claims 51 to 57, wherein a measurement optical path through which the measurement light from the distance measurement device passes is set so that the measurement light is emitted from the imaging optical system towards the target object by rotating the at least one first reflecting member using the driving device based on image information of the first image including an image of at least a portion of the target object, and the distance measurement device irradiates the measurement light via the set measurement optical path and the at least one first reflecting member, so that the measurement light emitted from the imaging optical system is irradiated onto the target object.

59. An imaging system as described in claim 58, wherein the measurement optical path is selected from a plurality of optical paths formed by the imaging optical system by rotating the at least one first reflecting member using the driving device based on image information of the first image including an image of at least a portion of the target object.

60. An imaging system as described in claim 58 or 59, wherein, based on image information of the first image including an image of at least a portion of the target object, the driving device is used to rotate at least one of the first reflecting members, and the measurement optical path is set so that the measurement light passes through a portion of the image forming area of ​​the image formed by the other light split by the light splitting member, the portion including an image of at least a portion of the target object, by the imaging optical system.

61. An imaging system as described in any one of claims 51 to 60, wherein the at least one first reflecting member is rotated using the driving device based on image information of the first image including an image of at least a portion of the target object, so that the measurement optical path of the measurement light from the distance measurement device is set so as to overlap with at least a portion of the optical path of the light forming an image of at least a portion of the target object included in an image formed by the other light split by the light splitting member by the imaging optical system, and the measurement optical path is set so that at least a portion of the optical path of the light forming the image of the portion overlaps with at least a portion of the measurement optical path, thereby causing the measurement light from the distance measurement device to be irradiated to the target object via the reflecting surface and the imaging optical system.

62. An imaging system as described in any one of claims 51 to 61, wherein, based on image information of the first image including an image of at least a portion of the target object, the driving device is used to rotate the at least one first reflecting member so that the measurement light is sequentially irradiated to multiple points on at least a portion of the target object, and the distances to each of the multiple points on at least a portion of the target object are generated as the distance information.

63. An imaging system described in any one of claims 48 to 50 or any one of claims 60 and 61, wherein the position at which the image formed by the other light split by the light splitting member is formed is conjugate to the position at which the first image is formed.

64. An imaging system according to any one of claims 42 to 63, wherein the distance measurement device has a measurement light emitting device that emits the measurement light, and a light receiving device that receives light from the target object irradiated with the measurement light, and generates the distance information of the target object based on the result of reception by the light receiving device of light from the target object irradiated with the measurement light from the measurement light emitting device.

65. An imaging system as claimed in any one of claims 42 to 64, further comprising: based on image information of the first image including images of a plurality of objects captured by the first imaging device, identifying at least one of the plurality of objects as the target object; and irradiating the identified target object with the measurement light via the imaging optical system.

66. An imaging system according to any one of claims 42 to 64, further comprising: identifying an object as the target object based on image information of the first image including an image of the object captured by the first imaging device; and irradiating the identified target object with the measurement light via the imaging optical system.

67. The imaging system according to any one of claims 42 to 66, further comprising an output device that outputs at least one of directional information of the target object generated based on image information of the first image including an image of at least a portion of the target object, and the distance information generated by the distance measurement device.

68. The imaging system of claim 67, wherein the output device outputs image information of an enlarged image of at least a portion of the target object in the image of the first image, the enlarged image being generated based on image information of the first image including an image of at least a portion of the target object.

69. An imaging system as described in claim 67, wherein an electromagnetic wave irradiation device is controlled so that the target object is irradiated with electromagnetic waves different from the measurement light based on at least one of the distance information and the direction information output from the output device.

70. An imaging system as described in claim 68, wherein an electromagnetic wave irradiation device is controlled so that the target object is irradiated with electromagnetic waves other than the measurement light based on at least one of the distance information, the direction information, and the image information of the enlarged image output from the output device.

71. The imaging system of claim 67, wherein, when the image information of the first image is defined as first image information, the directional information is defined as first directional information, and the distance information is defined as first distance information, if a positional relationship between the target object and the imaging system changes, the output device outputs at least one of second distance information of the target object generated by irradiating the measurement light from the distance measurement device to the target object via the imaging optical system based on second image information of the first image including an image of at least a portion of the target object imaged by the first imaging device after the positional relationship has changed, and second directional information of the target object generated based on second image information of the first image including an image of at least a portion of the target object imaged by the first imaging device after the positional relationship has changed.

72. The imaging system of claim 68, wherein, when the image information of the first image is defined as first image information, the image information of the enlarged image is defined as third image information, the directional information is defined as first directional information, and the distance information is defined as first distance information, when a positional relationship between the target object and the imaging system changes, the output device outputs at least one of: second distance information of the target object generated by irradiating the measurement light from the distance measurement device to the target object via the imaging optical system based on second image information of the first image including an image of at least a part of the target object imaged by the first imaging device after the positional relationship has changed; second directional information of the target object generated based on the second image information of the first image including an image of at least a part of the target object imaged by the first imaging device after the positional relationship has changed; and fourth image information of an enlarged image obtained by enlarging the image of at least a part of the target object in the image of the first image, generated based on the second image information of the first image including an image of at least a part of the target object imaged by the first imaging device after the positional relationship has changed.

73. An imaging system as described in claim 71, wherein an electromagnetic wave irradiation device is controlled so that an electromagnetic wave different from the measurement light is irradiated to the target object continuously or intermittently as the positional relationship changes based on at least one of distance change information of the first distance information and the second distance information and direction change information of the first direction information and the second direction information output from the output device.

74. An imaging system as described in claim 72, wherein an electromagnetic wave irradiation device is controlled so that an electromagnetic wave different from the measurement light is irradiated to the target object continuously or intermittently as the positional relationship changes, based on at least one of distance change information of the first distance information and the second distance information, direction change information of the first direction information and the second direction information, and image change information of the third image information and the fourth image information output from the output device.

75. An imaging system as described in any one of claims 42 to 66, wherein, when the positional relationship between the target object and the imaging system changes, the measurement light is continuously or intermittently irradiated onto the target object based on image information of the first image including an image of at least a portion of the target object captured by the first imaging device.

76. An imaging system as described in claim 75, wherein when the positional relationship between the target object and the imaging system changes, an electromagnetic wave irradiation device is controlled so that the target object is continuously or intermittently irradiated with electromagnetic waves different from the measurement light based on image information of the first image including an image of at least a portion of the target object imaged by the first imaging device.

77. An imaging system according to any one of claims 33, 34, 37, 38, 41, 69, 70, 73, 74, and 76, wherein the electromagnetic wave irradiation device is disposed at a position different from that of the imaging system.

78. An imaging system according to any one of claims 33, 34, 37, 38, 41, 69, 70, 73, 74, 76 and 77, wherein the electromagnetic waves are irradiated from the electromagnetic wave irradiation device to the target object in order to exterminate or destroy the target object.

79. An imaging system according to any one of claims 33, 34, 37, 38, 41, 69, 70, 73, 74 or any one of claims 76 to 78, wherein the electromagnetic wave is light.

80. The imaging system according to claim 79, wherein the output of the light irradiated from the electromagnetic wave irradiation device is 10 kW or more.

81. An electromagnetic wave irradiation system comprising: an imaging system according to any one of claims 33, 34, 37, 38, 41, 69, 70, 73, 74 or any one of claims 76 to 80; and an electromagnetic wave irradiation device that irradiates an object with electromagnetic waves.

82. A measurement method using an imaging system equipped with an imaging optical system and a light splitting member that splits light that has passed through at least a portion of the imaging optical system, comprising: capturing, using a first imaging device, a first image formed by one of the lights split by the light splitting member; capturing, using a second imaging device, a second image formed by the other of the lights split by the light splitting member; and irradiating a measurement light onto the target object via the imaging optical system based on image information of the first image including an image of at least a portion of the target object captured by the first imaging device, to generate distance information of the target object.

83. A measurement method using an imaging system equipped with an imaging optical system and a light splitting member that splits light that has passed through the imaging optical system, comprising: capturing a first image formed by one of the lights split by the light splitting member using an imaging device; and irradiating a measurement light onto the target object via the imaging optical system based on image information of the first image captured by the imaging device, the image including an image of at least a portion of the target object, to generate distance information of the target object.

84. A program for causing a computer to execute the measurement method according to claim 82 or 83.

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