Piping diagram generation method, semiconductor process device, and computer-readable storage medium

Abstract

Provided in the present application are a piping diagram generation method, a semiconductor process device, and a computer-readable storage medium. The method comprises: acquiring text information of piping, wherein the text information comprises at least two node identifiers and a piping identifier located between the two node identifiers, and the text information corresponds to the piping on a one-to-one basis; parsing the text information on the basis of a preset parsing rule, so as to determine at least one piece of text sub-information, wherein the parsing rule comprises classifying two adjacent node identifiers and the piping identifier therebetween into the same text sub-information, and the text sub-information corresponds to the smallest piping on a one-to-one basis; generating a corresponding smallest piping diagram on the basis of each piece of text sub-information, wherein the smallest piping diagram is used for representing the structure of the smallest piping in an image; and generating an initial piping diagram on the basis of all the smallest piping diagrams. By means of the solution of the present application, a piping diagram can be quickly generated, thereby improving the efficiency of piping diagram generation.

Description

Piping diagram generation method, semiconductor process equipment and computer-readable storage medium Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a pipeline diagram generation method, semiconductor process equipment, and computer-readable storage medium. Background Art

[0002] In the control system of semiconductor process equipment, a pipeline diagram is usually constructed for the pipeline system of the semiconductor process equipment, and the pipeline diagram is used to display or modify the attribute data of each pipeline, so as to intuitively present the attribute data of each pipeline or control the attributes of each pipeline.

[0003] Currently, the related art method for generating piping diagrams involves first drawing a mechanical schematic diagram of the piping system using specialized mapping software; then performing image recognition on the mechanical schematic diagram to generate an initial piping diagram; and then manually binding the component images in the initial piping diagram with the attribute data to generate the target piping diagram. Because the image recognition process consumes a large amount of computing resources, it slows down the generation of piping diagrams.

[0004] Summary of the Invention

[0005] The present application provides a pipeline map generation method, semiconductor process equipment and computer-readable storage medium to solve the problem in related technologies that image recognition consumes a large amount of computing resources, resulting in slow pipeline map generation.

[0006] The first aspect of the present application provides a pipeline diagram generation method, which is applied to a host computer of semiconductor process equipment, wherein the semiconductor process equipment includes a pipeline system, the pipeline system includes at least one pipeline, the pipeline includes at least one minimum pipeline, and the minimum pipeline is a pipeline located between two adjacent nodes in the pipeline; the method includes: obtaining text information of the pipeline; the text information includes at least two node identifiers and a pipeline identifier located between the two node identifiers; the text information corresponds one-to-one with the pipeline; parsing the text information based on a preset parsing rule to determine at least one sub-text information; the parsing rule includes dividing two adjacent node identifiers and the pipeline identifier between the two into the same sub-text information, and the sub-text information corresponds one-to-one with the minimum pipeline; based on the sub-text information, generating a corresponding minimum pipeline diagram; the minimum pipeline diagram is used to represent the structure of the minimum pipeline in image form; based on all the minimum pipeline diagrams, generating an initial pipeline diagram.

[0007] In one embodiment, the text information also includes a device identifier located between two adjacent node identifiers. The text information is parsed based on a preset parsing rule, and it is determined that at least one sub-text information also includes: treating two adjacent node identifiers, a pipeline identifier located between two adjacent node identifiers, and a device identifier as a sub-text information.

[0008] In one embodiment, the method further includes: traversing the device identification of the subtext information, obtaining attribute data corresponding to the device identification from a preset attribute database; and automatically binding the attribute data with the minimum pipeline diagram to generate a target pipeline diagram.

[0009] In one embodiment, the attribute data is presented in a table or icon format.

[0010] In one embodiment, the attribute data and the text information are configured in the same text file.

[0011] In one embodiment, generating a corresponding minimum pipeline diagram based on the sub-text information includes: based on the pipeline identifier in the sub-text information, obtaining a pipeline segment image corresponding to the pipeline identifier from a preset image database and displaying it; marking the two node identifiers in the sub-text information at both ends of the pipeline segment image in a one-to-one correspondence to generate a minimum pipeline diagram.

[0012] In one embodiment, the sub-text information also includes a device identification. Based on the sub-text information, generating a corresponding minimum pipeline diagram also includes: based on the device identification in the sub-text information, obtaining a device image corresponding to the device identification from an image database; setting the device image on the pipeline segment image and displaying it.

[0013] In one embodiment, the minimum pipeline diagram includes multiple minimum pipeline diagrams, and the two ends of the minimum pipeline diagram respectively have two different node identifiers. Based on all the minimum pipeline diagrams, generating the initial pipeline diagram includes: splicing the ends corresponding to the same node identifiers of all the minimum pipeline diagrams to generate the initial pipeline diagram.

[0014] The second aspect of the present application provides a semiconductor process equipment, including a pipeline system and a host computer; the host computer includes a processor and a memory, the memory stores instructions, and the instructions are loaded and executed by the processor to implement the method of any of the above embodiments to generate a pipeline diagram of the pipeline system.

[0015] A third aspect of the present application provides a computer-readable storage medium, in which a computer program is stored. When the computer program is executed by a processor, the method of any one of the above-mentioned embodiments is implemented.

[0016] The advantages or beneficial effects of the above technical solution include at least the following: because there is a one-to-one correspondence between pipelines and text information in a pipeline system, the pipeline text information can be used to characterize the pipeline structure. By parsing the pipeline text information, sub-text information corresponding to the minimum pipeline in the pipeline can be determined. The sub-text information is then used to generate a minimum pipeline map, and then the minimum pipeline map is used to generate an initial pipeline map. This pipeline map generation method only requires processing text information and does not require image recognition. The computational complexity is far less than that of image recognition, which can effectively reduce the use of computing resources and improve computing speed, thereby quickly generating pipeline maps and improving pipeline map generation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings are incorporated into and constitute a part of the specification, illustrate embodiments consistent with the present application, and together with the description, serve to explain the principles of the present application. In addition, these drawings and the description are not intended to limit the scope of the concept of the present application in any way, but rather to illustrate the concept of the present application for those skilled in the art by reference to specific embodiments.

[0018] FIG1A is a mechanical schematic diagram of a pipeline system in the related art.

[0019] FIG1B shows an initial piping diagram of a piping system in the related art.

[0020] FIG1C shows a target pipeline diagram of a pipeline system in the related art.

[0021] FIG2 is a flow chart showing a method for generating a pipeline diagram according to an embodiment of the present application.

[0022] FIG3A is a schematic structural diagram of a pipeline system according to an embodiment of the present application.

[0023] FIG. 3B is a schematic diagram showing the marking of the piping system in FIG. 3A .

[0024] FIG3C is a schematic diagram showing an initial pipeline diagram according to an embodiment of the present application.

[0025] FIG3D is a schematic diagram showing a target pipeline diagram according to an embodiment of the present application.

[0026] FIG4 is a partial flow chart of a method for generating a pipeline diagram according to another embodiment of the present application.

[0027] FIG5 is a block diagram showing the structure of a host computer of a semiconductor process equipment according to an embodiment of the present application. DETAILED DESCRIPTION

[0028] Hereinafter, only certain exemplary embodiments are briefly described. As will be appreciated by those skilled in the art, the described embodiments may be modified in various ways without departing from the spirit or scope of the present application. Therefore, the drawings and description are to be regarded as illustrative in nature and not restrictive.

[0029] Figure 1A shows a mechanical schematic diagram of a pipeline system in the related art. Figure 1B shows an initial pipeline diagram of a pipeline system in the related art. Figure 1C shows a target pipeline diagram of a pipeline system in the related art.

[0030] During the implementation process, the inventors found that: in the pipeline diagram generation method of the related art, as shown in Figure 1A, it is usually necessary to first use special drawing software to draw a mechanical schematic diagram of the pipeline system, wherein the pipeline source 11, flow meter 21, first valve 31, second valve 32, third valve 33, fourth valve 34, fifth valve 35, process chamber 41, dry pump 51, molecular pump 52, each pipeline section L, first node A, second node B, third node C, and fourth node D in the mechanical schematic diagram all need to be drawn; please refer to Figure 1B, and then perform image recognition on the mechanical schematic diagram of the pipeline system, and according to the recognition result, draw the pipeline source 11, flow meter 21, first valve 31, second valve 32, third valve 33, fourth valve 34, fifth valve 35, process chamber 41, dry pump 51, molecular pump 52, each pipeline section L, first node A, second node B, third node C, and fourth node D in the mechanical schematic diagram. The corresponding pipeline segment image LA and component image are obtained from the image database and manually spliced ​​together to generate an initial pipeline diagram. The flowmeter image 21A, first valve image 31A, second valve image 32A, third valve image 33A, fourth valve image 34A, fifth valve image 35A, process chamber image 41A, dry pump image 51A, and molecular pump image 52A in Figure 1B are all component images and correspond one-to-one with the components in Figure 1A. Each component image in the initial pipeline diagram is then manually bound to the corresponding component attribute data to generate the target pipeline diagram shown in Figure 1C. However, image recognition of mechanical schematics requires a significant amount of computing resources, which can reduce computing speed and result in slow pipeline diagram generation.

[0031] In view of this, the present application provides a pipeline map generation method, semiconductor process equipment, and computer-readable storage medium that can effectively solve the problem of slow pipeline map generation caused by image recognition consuming a large amount of computing resources. The following describes the embodiments of the present application in detail with reference to the accompanying drawings.

[0032] FIG2 is a flow chart showing a method for generating a pipeline diagram according to an embodiment of the present application.

[0033] The present application provides a method for generating a pipeline diagram, which is applicable to a host computer of semiconductor process equipment. The semiconductor process equipment includes a pipeline system, which includes at least one pipeline, including at least one minimum pipeline, where the minimum pipeline is located between two adjacent nodes in the pipeline. The pipeline includes, but is not limited to, gas lines and water lines. The semiconductor process equipment can be photovoltaic equipment or other semiconductor process equipment, and the present application does not limit the type of semiconductor process equipment.

[0034] For example, as shown in FIG3A , the pipeline system includes a first pipeline L1 located between the pipeline source 11 and the process chamber 41, a second pipeline L2 located between the first node A and the second node B, a third pipeline L3 located between the dry pump 51 and the fourth node D, and a fourth pipeline L4 located between the third node C and the fourth node D, for a total of four pipelines. Taking the first pipeline L1 as an example, the minimum pipelines of the first pipeline L1 include a first minimum pipeline L11 located between the adjacent pipeline source 11 and the first node A, a second minimum pipeline L12 located between the adjacent first node A and the second node B, a third minimum pipeline L13 located between the adjacent second node B and the fourth node D, and a fourth minimum pipeline L14 located between the adjacent fourth node D and the process chamber 41.

[0035] As shown in FIG. 2 , the pipeline map generating method includes the following steps S210 to S240 .

[0036] Step S210: Obtain text information of the pipeline; the text information includes at least two node identifiers and a pipeline identifier located between the two node identifiers; the text information corresponds to the pipeline in a one-to-one manner, wherein the text information is used to represent the structure of the pipeline in the form of character identifiers.

[0037] For example, the text information of the pipeline can be pre-written according to a preset description rule. For example, a description rule of the pipeline is shown in Table 1 below.

[0038] Table 1. Pipeline description rules

[0039] According to the description rules in Table 1 above, the pipeline system in Figure 3A can be marked using the marking schematic diagram shown in Figure 3B, where "(N2)" is the pipeline source identifier of the pipeline source 11, where "N2" represents the pipeline source name, and "()" represents the starting node identifier; "#A" is the first node identifier used to characterize the first node A, "#B" is the second node identifier used to characterize the second node B, "#C" is the third node identifier used to characterize the third node C, and "#D" is the fourth node identifier used to characterize the fourth node D; "mfc:N2" is the flow meter identifier used to characterize the flow meter 21, and the flow meter 21 is used to detect the flow of the fluid provided by the pipeline source 11 flowing through the pipeline section where the flow meter 21 is located; "v1" is used to The first valve identifier represents the first valve 31, "v2" represents the second valve identifier representing the second valve 32, "v3" represents the third valve identifier representing the third valve 33, "v4" represents the fourth valve identifier representing the fourth valve 34, and "v5" represents the fifth valve identifier representing the fifth valve 35; "pm1" represents the process chamber identifier representing the process chamber 41 and can be used as the termination node identifier; "pump1" represents the dry pump identifier representing the dry pump 51, and "pump2" represents the molecular pump identifier representing the molecular pump 52; "---->-----" represents the pipeline identifier representing a pipeline segment with a one-way valve, and "---------" represents the pipeline identifier representing only a pipeline segment. It should be noted that the labeling diagram shown in FIG3B is used to label FIG3A as an analysis process. If one is familiar with the description rules and the structure of the pipeline system, the text information of each pipeline in the pipeline system can be directly written according to the above description rules without labeling the pipeline system using FIG3B.

[0040] According to the description rules in Table 1 above, please refer to Figures 3A and 3B to pre-write the text information of the four pipelines in the pipeline system, as follows:

[0041] (N2)----->-----#A-----mfc:N2-----v1-----#B-----#D------pm1

[0042] #A------v2------#B

[0043] pump1-----#C----v3-----#D

[0044] #C------v4-----pump2-----v5-----#D

[0045] Among the four text messages mentioned above, the first text message corresponds to the first pipeline L1, the second text message corresponds to the second pipeline L2, the third text message corresponds to the third pipeline L3, and the fourth text message corresponds to the fourth pipeline L4. In this way, the four pipelines in the pipeline system correspond to the four text messages one by one.

[0046] For example, the above four text information can be written in the same description text in rows. The description text can be in TXT text format or other text formats in the computer field. The embodiment of the present application does not limit the format of the description text. Step S210 can be: obtain each line of text information from the description text.

[0047] Step S220: Parse the text information based on a preset parsing rule to determine at least one subtext information. The parsing rule includes grouping two adjacent node identifiers and the pipeline identifier between them into the same subtext information, with the subtext information corresponding to the minimum pipeline in a one-to-one manner. The subtext information is used to represent the structure of the minimum pipeline in the form of character identifiers.

[0048] For example, the first text information “(N2)---->-----#A-----mfc:N2-----v1-----#B------#D------pm1” is taken as an example for description.

[0049] Please refer to FIG. 3B . In the first text information, “(N2), #A, #B, #D, pm1” all represent node identifiers of the first pipeline L1. Parsing the first text information based on the preset parsing rules, determining at least one sub-text information can be: dividing the adjacent pipeline source identifier "(N2)" and the first node identifier "#A" and the pipeline identifier "---->-----" between the two into one sub-text information, determining the first sub-text information "(N2)---->-----#A"; dividing the adjacent first node identifier "#A" and the second node identifier "#B" and the pipeline identifier "--------------" between the two into one sub-text information, determining the second sub-text information "#A---------------#B"; dividing the adjacent second node identifier "#B" and the fourth node identifier "#D" and the pipeline identifier "------" between the two into one sub-text information, determining the third sub-text information "#B------#D"; dividing the adjacent fourth node identifier "#D" and the end node identifier "pm1" and the pipeline identifier "------" between the two into one sub-text information, determining the fourth sub-text information "#D------pm1". The first subtext information corresponds to the first minimum pipeline L11 , the second subtext information corresponds to the second minimum pipeline L12 , the third subtext information corresponds to the third minimum pipeline L13 , and the fourth subtext information corresponds to the fourth minimum pipeline L14 .

[0050] Similarly, corresponding sub-text information can be determined by parsing the second text information, the third text information, and the fourth text information based on the preset parsing rules.

[0051] Step S230: Generate a corresponding minimum pipeline diagram based on the subtext information; the minimum pipeline diagram is used to represent the structure of the minimum pipeline in an image form.

[0052] For example, please refer to Figure 3B and Figure 3C together, and continue to take the above-mentioned first sub-text information, second sub-text information, third sub-text information and fourth sub-text information as an example. Based on the first sub-text information, the first minimum pipeline diagram L11A in Figure 3C can be generated, based on the second sub-text information, the second minimum pipeline diagram L12A can be generated, and based on the third sub-text information, the third minimum pipeline diagram L13A can be generated, and based on the fourth sub-text information, the fourth minimum pipeline diagram L14A can be generated.

[0053] Step S240: Generate an initial pipeline map based on all minimum pipeline maps.

[0054] In one example, if the piping system consists of only one minimum piping, the minimum piping diagram can be used as the initial piping diagram. In another example, if the piping system consists of multiple minimum piping, all the minimum piping diagrams can be concatenated to generate the initial piping diagram. For example, the initial piping diagram shown in FIG3C can be obtained.

[0055] In this solution, because there is a one-to-one correspondence between pipelines and textual information in a pipeline system, the pipeline textual information can be used to characterize the pipeline structure. By parsing the pipeline textual information, sub-textual information corresponding to the smallest pipeline in the pipeline can be determined. This sub-textual information is then used to generate a minimum pipeline diagram, and then the minimum pipeline diagram is used to generate an initial pipeline diagram. This pipeline diagram generation method only requires processing textual information and does not require image recognition. The computational complexity is far less than that of image recognition, effectively reducing the use of computing resources and facilitating faster computation, thereby rapidly generating pipeline diagrams and improving pipeline diagram generation efficiency.

[0056] In addition, in actual applications, since the pipeline diagram generation method of the related art relies on the mechanical schematic diagram of the pipeline system, the drawing of the mechanical schematic diagram is indispensable, which consumes a lot of drawing time and is inconvenient to modify. Compared with the related art, the present application uses the text information of the pipeline in the pipeline system to generate the pipeline diagram, which can save the tedious drawing process, and the editing and modification of the text information are simpler, more convenient and flexible, which helps to increase the generation speed of the pipeline diagram. In this way, when the structure of the pipeline system changes, such as the model, batch, etc. of the pipeline system are different, or the user needs to modify the pipeline system, the pipeline diagram can be quickly updated by modifying the text information.

[0057] In one embodiment, the text information further includes a device identifier located between two adjacent node identifiers, and step S220 further includes: treating the two adjacent node identifiers, the pipeline identifier located between the two adjacent node identifiers, and the device identifier as a sub-text information.

[0058] For example, the first text information “(N2)---->-----#A-----mfc:N2-----v1-----#B------#D------pm1” is taken as an example for description.

[0059] Please refer to Figure 3B. The flow meter identifier "mfc:N2" and the first valve identifier "v1" in the first text message are both device identifiers. Based on the preset parsing rules, the first text message is parsed to determine that at least one sub-text message can be: the adjacent pipeline source identifier "(N2)" and the first node identifier "#A" and the pipeline identifier "---->-----" between the two are divided into one sub-text message, and the first sub-text message "(N2)---->-----#A" is determined; the adjacent first node identifier "#A" and the second node identifier "#B" and the pipeline identifier "--------------" between the two, the flow meter identifier "mfc:N2", and the first valve identifier "v1" are divided into one In the sub-text information, the second sub-text information "#A-----mfc:N2-----v1-----#B" is determined; the adjacent second node identifier "#B" and the fourth node identifier "#D" and the pipeline identifier "-----" between the two are divided into one sub-text information, and the third sub-text information "#B------#D" is determined; the adjacent fourth node identifier "#D" and the end node identifier "pm1" and the pipeline identifier "------" between the two are divided into one sub-text information, and the fourth sub-text information "#D------pm1" is determined.

[0060] Based on this, when a device identifier exists between two adjacent node identifiers in the text information, the text information can also be parsed.

[0061] In one embodiment, as shown in FIG4 , after step S240 , the pipeline map generating method may further include the following steps S250 to S260 .

[0062] Step S250: traverse the device identification in the subtext information, and obtain attribute data corresponding to the device identification from the attribute database.

[0063] Step S260: Automatically bind the attribute data with the minimum pipeline diagram corresponding to the sub-text information to generate a target pipeline diagram.

[0064] For example, referring to Figures 3B through 3D , consider the second smallest pipeline L12 within the first pipeline L1. By traversing the flowmeter identifier "mfc:N2" and the first valve identifier "v1" in the second subtext information corresponding to the second smallest pipeline L12, the operating data "0" and setting data "2" corresponding to the flowmeter identifier "mfc:N2" can be retrieved from the attribute database, as well as the icon F corresponding to the first valve identifier "v1." The operating data "0," setting data "2," and first valve identifier "v1" are automatically bound to the first smallest pipeline diagram L12A to generate the target pipeline diagram. For example, the operating data "0" and setting data "2" are automatically bound to the flowmeter image 21A corresponding to the flowmeter identifier "mfc:N2," and the icon F corresponding to the first valve identifier "v1" is automatically bound to the first valve image 31A corresponding to the flowmeter identifier "mfc:N2."

[0065] Among them, the operation data "0" and setting data "2" corresponding to the flow meter identifier "mfc: N2" are obtained from the attribute database. Based on the flow meter identifier "mfc: N2", they can be automatically queried from the attribute database. For example, by automatically querying all data in the attribute database where the pipeline name of the flow meter is "N2", the corresponding operation data "0" and setting data "2" can be obtained.

[0066] Correspondingly, obtaining the icon corresponding to the first valve identifier “v1” from the attribute database may also be obtained by automatically querying the icon with the valve number “1” in the attribute database.

[0067] Based on this, the automatic binding of attribute data can be achieved without manual intervention, which can reduce the occurrence of binding errors and can easily and quickly generate the target pipeline diagram, which helps to further improve the efficiency of pipeline diagram generation.

[0068] In one embodiment, the attribute data is presented in a table or icon format.

[0069] For example, referring to Figure 3D , the flow meter image 21A displays the flow meter's operating data "0" and setting data "2" in a preset table format T. The process chamber image 41A displays the power data, internal even data, external even data, and setting data for each section of the process chamber, including the furnace tail, furnace interior, and furnace mouth, in a preset table format T. The first valve image 31A and the dry pump image 51A display corresponding icons in a preset icon format F.

[0070] In one embodiment, the attribute data and the text information are configured in the same text file. In this way, when the host computer executes the method of the present application, the number of files loaded by the host computer can be reduced, which is conducive to saving computing resources and improving generation efficiency.

[0071] It should be noted that in related technologies, because the generation of the initial pipeline diagram requires image recognition, and the generation of the target pipeline diagram requires attribute data binding, it is necessary to maintain at least one image library and one attribute database, and ensure that the two versions are consistent. Compared with related technologies, this application configures attribute data and text information in the same text file, which can reduce file maintenance costs.

[0072] In one embodiment, step S230 includes the following steps S231 to S232.

[0073] Step S231: Based on the pipeline identifier in the subtext information, obtain and display the pipeline segment image corresponding to the pipeline identifier from a preset image database, wherein the preset image database stores multiple pipeline identifiers and multiple pipeline segment images corresponding to the multiple pipeline identifiers.

[0074] Step S232: Mark the two node identifiers in the subtext information at the two ends of the pipeline segment image in a one-to-one correspondence to generate a minimum pipeline diagram.

[0075] For example, referring to Figures 3B and 3C , taking the first subtext message "(N2)---->-----#A" as an example, based on the pipeline identifier "---->-----" in the first subtext message, a pipeline segment image corresponding to the pipeline identifier is obtained from a preset image database. The pipeline source identifier "(N2)" and the first node identifier "#A" are marked on both ends of the pipeline segment image in a one-to-one correspondence, generating a first minimum pipeline diagram L11A corresponding to the first subtext message. By marking the two ends of the pipeline segment image with the pipeline source identifier "(N2)" and the first node identifier "#A" in a one-to-one correspondence, the two ends of the first minimum pipeline diagram L11A can be distinguished.

[0076] Similarly, for the second sub-text message "#A---------------#B" parsed from the first text message, after executing steps S231 and S232, a second minimum pipeline diagram L12A corresponding to the second sub-text message can be generated. For the third sub-text message "#B------#D" parsed from the first text message, after executing steps S231 and S232, a third minimum pipeline diagram L13A corresponding to the third sub-text message can be generated. For the fourth sub-text message "#D------pm1" parsed from the first text message, a fourth minimum pipeline diagram L14A corresponding to the fourth sub-text message can be generated.

[0077] In the above scheme, the minimum pipeline diagram is generated by first directly obtaining the pipeline segment image corresponding to the pipeline identifier from a preset image database based on the correspondence between the pipeline identifier and the pipeline segment image, and then marking the two ends of the pipeline segment image. This generation method requires far less computation than image recognition, effectively reducing computing resources and facilitating the rapid generation of the minimum pipeline diagram. Furthermore, by using the two node identifiers in the subtext information to mark the two ends of the pipeline segment image in a one-to-one correspondence, both ends of the minimum pipeline diagram are marked, facilitating the subsequent direct use of the minimum pipeline diagram to generate the initial pipeline diagram.

[0078] In one embodiment, the subtext information further includes a device identification, and step S230 may further include the following steps S233 and S234.

[0079] Step S233: Based on the device identification in the subtext information, obtain a device image corresponding to the device identification from an image database.

[0080] Step S234: setting the device image on the pipeline segment image and displaying it.

[0081] For example, taking the case where the second sub-text information includes the flow meter identifier "mfc:N2" and the first valve identifier "v1", please refer to Figures 3B and 3C together. First, based on the flow meter identifier "mfc:N2" and the first valve identifier "v1", the flow meter image 21A corresponding to the flow meter identifier "mfc:N2" and the first valve image 31A corresponding to the first valve identifier "v1" are obtained from the image database, and then the flow meter image 21A and the first valve image 31A are set on the corresponding pipeline segment image LA' and displayed to generate the second minimum pipeline map L12A.

[0082] Similarly, based on the above method, the second valve image 32A corresponding to the second valve identifier "v2", the third valve image 33A corresponding to the third valve identifier "v3", the fourth valve image 34A corresponding to the fourth valve identifier "v4", the fifth valve image 35A corresponding to the fifth valve identifier "v5", the process chamber image 41A corresponding to the process chamber identifier "pm1", the dry pump image 51A corresponding to the dry pump identifier "pump1", and the molecular pump image 52A corresponding to the molecular pump identifier "pump2" can also be obtained from the image database respectively, and then these device images can be set on their corresponding pipeline segment images and displayed.

[0083] Based on this, when the sub-text information includes a device identification, the device image and its corresponding pipeline segment image can be automatically combined, which helps to quickly generate a minimum pipeline diagram.

[0084] In one embodiment, the minimum pipeline graph includes multiple minimum pipeline graphs, and each end of the minimum pipeline graph has two different node identifiers. Step S240 includes: splicing the ends corresponding to the same node identifier of all minimum pipeline graphs to generate an initial pipeline graph.

[0085] For example, please refer to Figure 3B and Figure 3C together, and the above scheme will be explained by taking the splicing method of the first minimum pipeline diagram L11A corresponding to the first minimum pipeline L11 in the first pipeline L1, the second minimum pipeline diagram L12A corresponding to the second minimum pipeline L12, and the fifth minimum pipeline diagram L2A corresponding to the minimum pipeline in the second pipeline L2 as an example.

[0086] The node at the left end of the first minimum pipeline diagram L11A is identified as "(N2)" and the node at the right end is identified as "#A", the node at the left end of the second minimum pipeline diagram L12A is identified as "#A" and the node at the right end is identified as "#B", the node at the left end of the fifth minimum pipeline diagram L2A is identified as "#A" and the node at the right end is identified as "#B". The right end of the first minimum pipeline diagram L11A, the left end of the second minimum pipeline diagram L12A and the left end of the fifth minimum pipeline diagram L2A are spliced ​​to the same intersection, and the right end of the second minimum pipeline diagram L12A and the right end of the fifth minimum pipeline diagram L2A are spliced ​​to the same intersection, thereby completing the splicing between the first minimum pipeline diagram L11A, the second minimum pipeline diagram L12A and the fifth minimum pipeline diagram L2A.

[0087] Similarly, after splicing the ends corresponding to the same node identifiers of all minimum pipeline graphs, the initial pipeline graph shown in FIG3C can be obtained.

[0088] Based on this, by automatically splicing the ends corresponding to the same node identifiers of all minimum piping diagrams, the initial piping diagram can be automatically generated, which can eliminate the manual splicing operation in related technologies and is conducive to the rapid generation of the initial piping diagram.

[0089] FIG5 is a block diagram showing the structure of a host computer of a semiconductor process equipment according to an embodiment of the present application.

[0090] The semiconductor processing equipment includes a piping system and a host computer. As shown in FIG5 , the host computer 600 includes a memory 610 and a processor 620. The memory 610 stores a computer program that can be executed on the processor 620. When the processor 620 executes the computer program, it implements the piping map generation method described in the above embodiment. The number of the memory 610 and the processor 620 can be one or more.

[0091] The host computer 600 also includes a communication interface 630, which is used to communicate with external devices and perform data exchange transmission. If the memory 610, processor 620 and communication interface 630 are implemented independently, the memory 610, processor 620 and communication interface 630 can be interconnected via a bus and complete mutual communication. The bus can be an Industry Standard Architecture (ISA) bus, a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. The bus can be divided into an address bus, a data bus, a control bus, etc. For ease of representation, only one thick line is used in Figure 5, but this does not mean that there is only one bus or one type of bus.

[0092] Optionally, in a specific implementation, if the memory 610, the processor 620 and the communication interface 630 are integrated on a chip, the memory 610, the processor 620 and the communication interface 630 can communicate with each other through an internal interface.

[0093] An embodiment of the present application provides a computer-readable storage medium storing a computer program, which implements the method provided in the embodiment of the present application when the program is executed by a processor.

[0094] It should be understood that the processor may be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSP), application-specific integrated circuits (ASIC), field programmable gate arrays (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. The general-purpose processor may be a microprocessor or any conventional processor, etc. It is worth noting that the processor may be a processor that supports the Advanced RISC Machines (ARM) architecture.

[0095] Furthermore, optionally, the above-mentioned memory may include a read-only memory and a random access memory, and may also include a non-volatile random access memory. The memory may be a volatile memory or a non-volatile memory, or may include both volatile and non-volatile memories. Among them, the non-volatile memory may include a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), or a flash memory. The volatile memory may include a random access memory (RAM), which is used as an external cache. By way of example but not limitation, many forms of RAM are available. For example, static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDR SDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchronous link dynamic random access memory (SLDRAM) and direct rambus random access memory (DR RAM).

[0096] In the above embodiments, all or part of the embodiments may be implemented using software, hardware, firmware, or any combination thereof. When implemented using software, all or part of the embodiments may be implemented in the form of a computer program product. A computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the processes or functions according to the present application are generated in whole or in part. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions may be stored in a computer-readable storage medium or transferred from one computer-readable storage medium to another.

[0097] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. Throughout the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0098] It should be understood that various parts of the present application can be implemented using hardware, software, firmware, or a combination thereof. In the above embodiments, multiple steps or methods can be implemented using software or firmware stored in a memory and executed by a suitable instruction execution system. All or part of the steps of the above embodiment method can be completed by instructing the relevant hardware through a program, which can be stored in a computer-readable storage medium. When the program is executed, it includes one or a combination of the steps of the method embodiment.

[0099] In addition, the functional units in the various embodiments of the present application may be integrated into a single processing module, or each unit may exist physically separately, or two or more units may be integrated into a single module. The aforementioned integrated modules may be implemented in the form of hardware or in the form of software functional modules. If the aforementioned integrated modules are implemented in the form of software functional modules and sold or used as independent products, they may also be stored in a computer-readable storage medium. The storage medium may be a read-only memory, a magnetic disk, or an optical disk, etc.

[0100] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any person skilled in the art can easily conceive of various modifications or substitutions within the technical scope disclosed in this application, and such modifications or substitutions should be included within the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A method for generating a pipeline diagram, characterized in that: A host computer applied to a semiconductor process equipment, wherein the semiconductor process equipment includes a pipeline system, the pipeline system includes at least one pipeline, the pipeline includes at least one minimum pipeline, and the minimum pipeline is a pipeline located between two adjacent nodes in the pipeline; the method includes: Acquire text information of the pipeline; the text information includes at least two node identifiers and a pipeline identifier located between the two node identifiers; the text information corresponds to the pipeline in a one-to-one manner; Parsing the text information based on a preset parsing rule to determine at least one sub-text information; the parsing rule includes dividing two adjacent node identifiers and a pipeline identifier between the two into the same sub-text information, and the sub-text information corresponds to the minimum pipeline one by one; Based on the sub-text information, a corresponding minimum pipeline diagram is generated; the minimum pipeline diagram is used to represent the structure of the minimum pipeline in an image form; Based on all of the minimum pipeline diagrams, an initial pipeline diagram is generated.

2. The method according to claim 1, characterized in that The text information further includes a device identifier located between two adjacent node identifiers, and the parsing of the text information based on a preset parsing rule to determine at least one sub-text information further includes: Two adjacent node identifiers, a pipeline identifier and a device identifier between the two adjacent node identifiers are used as one sub-text information.

3. The method according to claim 2, characterized in that The method further comprises: Traversing the device identification in the subtext information, and acquiring attribute data corresponding to the device identification from a preset attribute database; The attribute data is automatically bound to the minimum pipeline diagram corresponding to the sub-text information to generate a target pipeline diagram.

4. The method according to claim 3, characterized in that The attribute data is presented in a table form or a graphical form.

5. The method according to claim 3, characterized in that: The attribute data and the text information are configured in the same text file.

6. The method according to claim 1, characterized in that The generating a corresponding minimum pipeline diagram based on the sub-text information includes: Based on the pipeline identifier in the subtext information, a pipeline segment image corresponding to the pipeline identifier is acquired from a preset image database and displayed; The two node identifiers in the subtext information are marked at both ends of the pipeline segment image in a one-to-one correspondence to generate the minimum pipeline diagram.

7. The method according to claim 6, characterized in that The sub-text information also includes a device identification, and the generating of a corresponding minimum pipeline diagram based on the sub-text information also includes: Based on the device identification in the subtext information, acquiring a device image corresponding to the device identification from the image database; The device image is set on the pipeline segment image and displayed.

8. The method according to claim 1, characterized in that The minimum pipeline graph includes a plurality of minimum pipeline graphs, and both ends of the minimum pipeline graph respectively have two different node identifiers. The initial pipeline graph is generated based on all the minimum pipeline graphs, including: The ends corresponding to the same node identifiers of all the minimum pipeline graphs are spliced ​​to generate the initial pipeline graph.

9. A semiconductor process equipment, characterized in that: It comprises a pipeline system and a host computer; the host computer comprises a processor and a memory, the memory stores instructions, and the instructions are loaded and executed by the processor to implement the method as described in any one of claims 1 to 8 to generate a pipeline diagram of the pipeline system.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the method according to any one of claims 1 to 9 is implemented.

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