Mapping device

Abstract

The present invention more reliably suppresses erroneous determinations pertaining to the accommodation state of a substrate by using a simple means.　A load port 4 can detect information pertaining to the accommodation state of a substrate S accommodated in a FOUP 100 having an opening 114 in a side surface. The load port 4 has lighting 62 and a camera 61. The camera is 61 is positioned such that, when imaging an imaging region 200, a virtual line VL passing through a light reception point RP and a detection target point SP intersects a non-facing surface, which is a surface other than a back surface 113B facing the opening 114 side.

Description

Mapping Device

[0001] The present invention relates to a mapping device.

[0002] Patent Document 1 discloses a load port (mapping device) equipped with a mapping sensor (detection unit). The detection unit is configured to detect the storage state of multiple semiconductor wafers (substrates) stored in a vertically aligned container with an opening formed on one side. More specifically, the detection unit includes a light-emitting unit and an imaging unit, each disposed near the opening. The imaging unit detects light emitted by the light-emitting unit that is reflected by the substrates or the like. This allows captured images to be acquired to determine the storage state of each substrate.

[0003] Here, if the reflected light from the container is strong and is detected by the imaging unit, the reflected light is difficult to distinguish from light reflected by the substrate, which may result in an erroneous determination of the substrate storage status. In particular, reflected light specularly reflected by the inner wall surface of the container located on the opposite side of the opening from the center of the container (hereinafter referred to as the opposing surface) can be a major cause of erroneous detection. Therefore, by tilting the imaging axis of the imaging unit opposite the optical axis of the light emitting unit, it is possible to suppress the detection of this reflected light.

[0004] Patent No. 7346839

[0005] Even if the above configuration is applied to the detection unit, if strong reflected light from the facing surface is directed toward the imaging unit, the strong reflected light will still be detected by the imaging unit. Therefore, there is still a risk of erroneous determination of the substrate storage status. However, it is not realistic to apply anti-reflection treatment to the facing surface of all containers that are already in widespread use.

[0006] An object of the present invention is to more reliably prevent erroneous determinations regarding the accommodation state of a substrate by using simple means.

[0007] The mapping device of the first invention is a mapping device that detects the storage state of a substrate stored in a container having an opening on the side, and has: a light-emitting unit that emits light toward at least the inside of the container; and an imaging unit that senses reflected light from the light-emitting unit that is reflected toward the opening side by at least the substrate, and images an imaging area that includes a predetermined detection target point that is set in advance to detect the substrate, and is characterized in that when the imaging unit is imaging the imaging area, a virtual straight line passing through the detection target point and a predetermined light-receiving point that is determined in advance by a light-receiving unit that receives the reflected light from the imaging unit intersects with a non-opposing surface, which is a surface of the inner wall surface of the container that is different from the opposing surface facing the opening side.

[0008] The arrangement of the imaging unit as in the present invention minimizes the possibility of the opposing surface being captured as a background in the detection target point and its surrounding area. This minimizes the influence of light reflected from the opposing surface. Furthermore, the light emitted from the light-emitting unit and reflected by the non-opposing surface is less likely to directly reach the imaging unit compared to light reflected from the opposing surface. This minimizes the risk of erroneous determinations of the board storage status at the detection target point. Therefore, a simple method can more reliably prevent erroneous determinations of the board storage status.

[0009] The mapping device of the second invention is the same as that of the first invention, and is characterized in that it includes a judgment unit that judges the storage state of the substrate using judgment information included in imaging information, which is information obtained by the imaging unit imaging the imaging area, and the judgment unit uses non-opposing surface-containing information as the judgment information, which does not include information on the area of ​​the imaging area related to the opposing surface, and which includes information on the area of ​​the imaging area related to both the non-opposing surface and the detection target point.

[0010] In the present invention, information on the area of ​​the image capture region captured with the opposing surface as the background can be excluded from the determination by the determination unit, thereby effectively preventing erroneous determination of the accommodation state of the board.

[0011] A mapping device according to a third aspect of the present invention is the mapping device according to the first or second aspect of the present invention, characterized in that the imaging unit images an area including a plurality of the detection target points on the board.

[0012] In a configuration where a determination is required for multiple detection target points on a certain board, even a single erroneous determination will result in an erroneous determination for the entire board. Therefore, the present invention, which can more reliably suppress erroneous determinations, is particularly effective in such a configuration.

[0013] The mapping device of the fourth invention is characterized in that, in the third invention, the imaging unit has a first camera configured to be able to image a first imaging area including two or more detection target points among the plurality of detection target points, and a second camera for detecting the thickness of the substrate, which is provided separately from the first camera and configured to be able to image a second imaging area including a detection target point other than the two or more detection target points among the plurality of detection target points.

[0014] In the present invention, at least the first camera can determine a so-called cross state (see the embodiment described later for details), and the second camera can determine a so-called double state (see the embodiment described later for details), so the storage state of the board can be determined in more detail.

[0015] The mapping device of the fifth invention is characterized in that, in the first or second invention, the imaging unit is configured to be able to image at least the end surface of the substrate, and the non-opposing surface is a side surface other than the opposing surface.

[0016] Depending on the material of the substrate, light may be irradiated toward the substrate from diagonally above or diagonally below the substrate. However, generally, of the light reflected by the substrate, the light reflected by the edge surface is stronger than the light reflected by portions other than the edge surface. Therefore, in order to more reliably detect the light reflected from the substrate, it is preferable that the imaging unit is configured to image at least the edge surface of the substrate, as in the present invention. In this case, the side surface of the inner wall surface of the container can be imaged by the imaging unit. Reflected light reflected by a side surface other than the opposing surface and heading directly toward the imaging unit is significantly weaker than reflected light heading directly from the opposing surface toward the imaging unit. This effectively reduces the occurrence of erroneous determinations regarding the presence or absence of a substrate at the detection target point.

[0017] FIG. 1 is a schematic plan view of an EFEM equipped with a load port according to this embodiment and its surroundings. FIG. 2 is a right side view of the load port. FIG. 3 is a diagram schematically showing the positional relationship between a substrate and a camera. (a) and (b) are diagrams showing the operation of the load port. (a) and (b) are diagrams showing the operation of the load port. FIG. 4 is a diagram showing an imaging area imaged by a camera. FIG. 5 is a flowchart showing the entire mapping process, and a determination process for each substrate. (a) to (d) are diagrams for explaining determination of the accommodation state of a substrate. (a) to (f) are diagrams for explaining determination of the accommodation state of a substrate according to a modified example.

[0018] An embodiment of the present invention will be described. For convenience of explanation, the directions shown in FIG. 1 are defined as the front-rear and left-right directions. More specifically, the direction in which an EFEM 1 (described later) and a processing device 6 (described later) are arranged is defined as the front-rear direction (predetermined direction). In the front-rear direction, the EFEM 1 side is defined as the front side. In the front-rear direction, the processing device 6 side is defined as the rear side. The direction perpendicular to the front-rear direction, in which multiple load ports 4 are arranged, is defined as the left-right direction. The direction perpendicular to both the front-rear direction and the left-right direction is defined as the up-down direction. The up-down direction is a direction parallel to the vertical direction in which gravity acts.

[0019] (Schematic Configuration of Load Port and Its Surrounding Area) The schematic configuration of the load port 4 (mapping device of the present invention) and its surrounding area according to this embodiment will be described with reference to FIG. 1. FIG. 1 is a schematic diagram of an EFEM 1 equipped with multiple load ports 4 and its surrounding area. "EFEM" is an abbreviation for "Equipment Front End Module." The EFEM 1 is a device for transporting a substrate S between a FOUP 100 (container of the present invention) (described below) placed on each load port 4 and a processing device 6. For example, a semiconductor circuit (not shown) is formed on the substrate S. Examples of types of the substrate S include known semiconductor substrates (including wafers), glass substrates, and glass epoxy substrates. The substrate S has, for example, a substantially rectangular shape when viewed from above. The substrate S has, for example, an end surface SE (see FIG. 2) extending along the above-below direction.

[0020] 1, the EFEM 1 includes a housing 2, a transfer robot 3, a plurality of load ports 4, and a control device 5. A processing device 6 is disposed behind the EFEM 1.

[0021] The EFEM 1 is installed at a predetermined position in, for example, a semiconductor factory. The EFEM 1 transfers substrates S between a FOUP 100 placed on a load port 4 and a processing device 6 using a transfer robot 3 arranged in a transfer space 9 inside a housing 2. "FOUP" is an abbreviation for "Front-Opening Unified Pod." The FOUP 100 is a container that can accommodate multiple substrates S arranged vertically. The FOUP 100 is transferred by, for example, a FOUP transfer device (not shown). The FOUP 100 is transferred between the FOUP transfer device and the load port 4.

[0022] The housing 2 is a box-shaped member having a transfer space 9 in which the substrate S is transferred. The transfer space 9 is separated from the space outside the housing 2 (external space). A plurality of load ports 4 are connected to the front end of the housing 2. A load lock chamber 7 of a processing device 6 is connected to the rear end of the housing 2. The transfer robot 3 transfers the substrate S between the FOUP 100 and the load lock chamber 7.

[0023] The multiple load ports 4 are arranged, for example, side by side in the left-right direction. The multiple load ports 4 are attached to the front end of the housing 2. Each load port 4 is configured to receive a FOUP 100. Each load port 4 is configured to attach and detach a lid 102 (see FIG. 2) to and from a FOUP body 101 (see FIG. 2) of the FOUP 100. Each load port 4 is configured to be able to perform mapping of the multiple substrates S accommodated in the FOUP body 101.

[0024] The control device 5 is electrically connected to a control unit (not shown) of the transfer robot 3, an LP (load port) control device 46 (described later) of the load port 4, and a control unit (not shown) of the processing device 6. The control device 5 is configured to communicate with these control units. The control device 5 may also be electrically connected to a higher-level host computer HC.

[0025] The processing device 6 is a device that performs a predetermined process, such as sputtering or dry etching, on the substrate S. The processing device 6 has, for example, a load lock chamber 7 for temporarily waiting the substrate S, and a processing chamber 8 for performing the predetermined process on the substrate S.

[0026] (Load Port) The configuration of the load port 4 will be described with reference to Fig. 2 and Fig. 3. Fig. 2 is a right side view of the load port 4. Fig. 3 is a diagram schematically showing the positional relationship between the substrate S and a plurality of cameras 61 described below (this positional relationship will be described later).

[0027] The load port 4 is configured to remove the lid 102 of the FOUP 100 from the FOUP body 101 and perform mapping of the multiple substrates S accommodated in the FOUP body 101. As shown in Figure 2, the load port 4 has, for example, a base 41, a door mechanism 42, a support frame 43, a placement unit 44, a scanner unit 45, and an LP control device 46 (see Figure 1).

[0028] The base 41 is a substantially flat member. The base 41 has a substantially rectangular shape when viewed from the front-to-rear direction. The base 41 is arranged to extend in the up-and-down direction. The base 41 is fixed to the EFEM 1. The base 41 is part of a partition wall that separates the transfer space 9 from the external space. The base 41 has a substantially rectangular opening 41a. The opening 41a is arranged in the upper part of the base 41. The opening 41a is large enough to allow the lid 102 of the FOUP 100 to pass through in the front-to-rear direction. The opening 41a is opened and closed by a door main body 50, which will be described later.

[0029] The door mechanism 42 is configured to enable the lid 102 to be attached to and detached from the FOUP body 101. As shown in Fig. 2, the door mechanism 42 includes, for example, a door body 50, a door support portion 53, a guide rail 54, a lifting block 55, a guide rail 56, a motor 57, and a motor 58.

[0030] The door body 50 is a plate-like member. When viewed from the front and rear, the door body 50 has a substantially rectangular shape. The door body 50 is supported by, for example, a door support portion 53. The door body 50 is provided with, for example, a suction holding portion (not shown) and a latch key (not shown). The suction holding portion holds the lid 102 by suction to the front surface of the door body 50. The lid 102 can be fixed to the FOUP body 101 by a locking mechanism (not shown). The latch key operates the locking mechanism to unlock and lock the lid 102 of the FOUP 100.

[0031] The door support portion 53 is a member that supports the door body 50. The door support portion 53 is supported by a guide rail 54 so as to be movable in the front-rear direction. The door support portion 53 is driven to move in the front-rear direction by a motor 57. The door support portion 53 moves in the front-rear direction to move the door body 50 between a closed position (see FIG. 4B) and an open position (see FIG. 5A). The closed position is the position of the door body 50 when the door body 50 blocks the opening 41a of the base 41. The open position is a position rearward of the closed position and is the position of the door body 50 when the door body 50 opens the opening 41a. The guide rail 54 is a member that guides the door support portion 53 in the front-rear direction. The guide rail 54 is provided on a lifting block 55. The lifting block 55 is a member for moving the door body 50 up and down. The lifting block 55 supports the door support portion 53 so as to be movable in the front-rear direction. The lifting block 55 is guided in the vertical direction along the guide rail 56. The lifting block 55 is driven to move in the vertical direction by a motor 58. By moving the lifting block 55 in the vertical direction, the door body 50 moves between the open position (see FIG. 5( a)) and a retracted position (see FIG. 5( b)) that is lower than the open position. The guide rail 56 is a member that guides the lifting block 55 in the vertical direction. The guide rail 56 is attached to the base 41, for example. The guide rail 56 extends in the vertical direction.

[0032] The motor 57 is configured to drive the door support portion 53 to move in the front-rear direction. The motor 57 is, for example, a known stepping motor driven by a pulse signal. The motor 57 is configured to be controlled by the LP control device 46 to control the position of the door support portion 53 in the front-rear direction.

[0033] The motor 58 is configured to drive the lifting block 55 to move up and down. The motor 58 is, for example, a known stepping motor driven by a pulse signal. The motor 58 is controlled by the LP control device 46 to control the vertical position of the door support portion 53.

[0034] The support frame 43 is a member for supporting the placement unit 44. The support frame 43 is fixed to the base 41. The support frame 43 is disposed so as to protrude forward from a vertical midpoint of the base 41. The placement unit 44 is a platform-shaped member on which the FOUP 100 is placed. The placement unit 44 is supported by the support frame 43. The placement unit 44 is configured to be movable in the front-rear direction relative to the support frame 43. The placement unit 44 is configured to be movable by a drive mechanism (not shown) between a predetermined transfer position (see FIG. 4A) and a lid opening / closing position (see FIG. 4B) behind the transfer position. The transfer position is the position of the placement unit 44 when the FOUP 100 is ready to be transferred to and from a FOUP transport device (not shown).

[0035] The scanner unit 45 is for detecting a plurality of substrates S in the FOUP 100. The scanner unit 45 is disposed, for example, in the transfer space 9. The scanner unit 45 may be fixed, for example, to the door body 50. This allows the scanner unit 45 to be driven by a motor 58 to move up and down integrally with the door body 50. As shown in FIG. 3 , the scanner unit 45 has a plurality of cameras 61, a light 62 (a light-emitting unit of the present invention), a trigger sensor 65, and a controller 66 (a determination unit of the present invention).

[0036] Each of the multiple cameras 61 is a device for acquiring imaging data (imaging information of the present invention) of multiple substrates S. Each camera 61 is configured and arranged to capture, for example, multiple substrates S at once. Here, "multiple substrates S" refers to, for example, a portion of all substrates S housed in the FOUP 100. Alternatively, each camera 61 may capture images of the multiple substrates S one by one. In this embodiment, "capturing an image" refers to recording (i.e., photographing) an image of an object using each camera 61. Each camera 61 is configured and arranged to capture a portion of the substrate S in the left-right direction. Each camera 61 is configured to capture at least a portion of the end surface SE of the substrate S (more specifically, the rear end surface of the substrate S). The multiple cameras may be arranged, for example, above the door body 50, and aligned in the left-right direction. Each camera 61 is electrically connected to the controller 66. Each camera 61 includes, for example, a light-receiving lens 61a (a light-receiving unit of the present invention) and an imaging element (not shown). The light-receiving lens 61a is a light-collecting member configured to receive light and focus it on the imaging element. The surface of the light-receiving lens 61a faces, for example, the front side (FOUP side). The imaging element is a known device such as a CCD. The imaging element senses light, converts it into an electrical signal, and transmits the electrical signal to the controller 66. The combination of the multiple cameras 61 corresponds to the imaging unit of the present invention. That is, in this embodiment, the imaging unit of the present invention has multiple cameras 61.

[0037] The lighting 62 is, for example, a device for illuminating the interior of the FOUP 100 substantially uniformly in the left-right direction. The lighting 62 includes, for example, a plurality of LED elements (not shown). The plurality of LED elements (not shown) are arranged, for example, to form a substantially linear row extending in the left-right direction. Furthermore, it is preferable that a plurality of such rows of LED elements are arranged in the vertical direction. Alternatively, the lighting 62 may include one or more LED elements (not shown) and a diffusion plate (not shown) arranged in front of the one or more LED elements (on the FOUP 100 side in the front-to-back direction). With the above configuration, light (irradiation light) with various directional components in the left-to-right and front-to-back directions is irradiated from the lighting 62 toward at least the interior of the FOUP 100. Although multiple lighting elements 62 are illustrated in FIG. 3 , the number of lighting elements 62 may be one.

[0038] A portion of the irradiated light emitted from the illumination 62 and traveling forward is reflected backward (reflected light) by the substrate S or an inner wall surface 113 described below. In particular, the reflected light that is specularly reflected backward (toward the opening side of the present invention) by the end surface SE (rear end surface) of the substrate S is used to detect the substrate S. A portion of the irradiated light (see the dashed line in FIG. 3 ) is specularly reflected by the end surface SE and then sensed by one of the multiple cameras 61. The imaging element of each camera 61 senses the reflected light, thereby capturing an image of a portion of the rear end surface of the substrate S in the left-right direction and the background portion, and is able to obtain imaging data. The imaging data obtained by the imaging element is transferred to the controller 66.

[0039] The trigger sensor 65 is a sensor used to determine the timing at which the multiple cameras 61 start capturing images. More specifically, the trigger sensor 65 is configured to detect the movement of the door support portion 53, for example, when a portion of the door support portion 53 moves up or down. The trigger sensor 65 may be, for example, a known photointerrupter. The photointerrupter has a light-emitting portion and a light-receiving portion (not shown), and the light-receiving portion detects light (transmitted light) emitted from the light-emitting portion. As shown in FIG. 2 , the trigger sensor 65 is disposed, for example, inside the support frame 43 and immediately in front of the base 41. That is, when the door body 50 is in at least the open position, the trigger sensor 65 is located near the door support portion 53 and is configured to detect, for example, the door support portion 53. The door support portion 53 includes, for example, a light-blocking portion (not shown) that is movable between a position that blocks and a position that does not block light emitted from the light-emitting portion of the trigger sensor 65. For example, when the transmitted light is blocked by the light-blocking portion, the trigger sensor 65 may send a signal (trigger signal) indicating that the door support portion 53 has been detected to the controller 66. For example, when the trigger sensor 65 detects that the transmitted light is no longer blocked as the door support portion 53 moves downward, the trigger sensor 65 may send a signal indicating that the door support portion 53 is no longer detected to the controller 66.

[0040] The trigger sensor 65 may have, for example, a photoreflector (a reflective optical sensor) instead of a photointerrupter. Alternatively, the trigger sensor 65 may not be provided. In this case, the LP control device 46 may determine the timing to start imaging based on, for example, the number of pulse signals (number of steps) sent from the LP control device 46 to the motor 58.

[0041] The controller 66 is for executing the mapping process described below. The controller 66 includes a CPU, ROM, and RAM (memory), all of which are not shown. The controller 66 performs calculations for the mapping process using the CPU in accordance with a program stored in the ROM. The controller 66 is electrically connected to the LP control device 46, the multiple cameras 61, and the trigger sensor 65. The controller 66 may have a known internal storage, such as a known NAND flash memory, HDD, or SSD, all of which are not shown.

[0042] The LP control device 46 includes a CPU, ROM, and RAM (memory), none of which are shown. The LP control device 46 controls each mechanism of the load port 4 using the CPU in accordance with a program stored in the ROM. The LP control device 46 also communicates with the control device 5 of the EFEM 1 and the host computer HC, etc. The LP control device 46 also sends information related to the mapping process to the controller 66 (described below).

[0043] (FOUP) Next, a more specific example of the configuration of the FOUP 100 will be described with reference to Figures 2 and 3. The front, rear, left, and right directions shown in Figure 3 are directions for the sake of convenience when an opening 114 (described later) faces rearward.

[0044] The FOUP 100 is a container having a generally rectangular parallelepiped shape. The FOUP 100 is configured to be able to accommodate a plurality of substrates S arranged vertically. As shown in FIGS. 2 and 3 , the FOUP 100 has a FOUP body 101 and a lid 102. The FOUP body 101 is a member having a generally rectangular parallelepiped shape. The FOUP body 101 can be supported by the mounting portion 44. The FOUP body 101 has, for example, a wall portion 111, an opening 112, and a plurality of poles P.

[0045] The wall 111 is a substantially rectangular parallelepiped member arranged to surround the internal space of the FOUP 100. The wall 111 is formed by, for example, a plurality of substantially flat plate-shaped members such as acrylic plates fixed to one another with fasteners (not shown). The wall 111 has a plurality of inner wall surfaces 113 (see FIGS. 2 and 3). The opening 112 is arranged, for example, at the rear end (side surface) of the FOUP body 101. The opening 112 has an opening 114 that is substantially rectangular when viewed from the front-to-rear direction.

[0046] Each of the multiple inner wall surfaces 113 is arranged to face the inside of the FOUP 100. Each inner wall surface 113 has, for example, a substantially rectangular shape. The multiple inner wall surfaces 113 include a back surface 113B (the opposing surface of the present invention), an upper surface 113U (see FIG. 2), a lower surface 113D (see FIG. 2), a left side surface 113L (see FIG. 3), and a right side surface 113R (see FIG. 3). The back surface 113B is the inner wall surface 113 arranged at the front-to-back position among the multiple inner wall surfaces 113. In FIG. 3, the back surface 113B faces the rear side (i.e., toward the opening 114 in the front-to-rear direction). The back surface 113B extends in the up-down and left-to-right directions. The back surface 113B is arranged on the opposite side of the opening 114 across the center of the FOUP body 101 in the front-to-rear direction. The top surface 113U is connected to the top end of the back surface 113B and extends to the rear end of the FOUP body 101 in the front-to-rear direction. The top surface 113U faces downward. The bottom surface 113D is connected to the bottom end of the back surface 113B and extends to the rear end of the FOUP body 101 in the front-to-rear direction. The bottom surface 113D faces upward. The left side surface 113L is connected to the left end of the back surface 113B, the left end of the top surface 113U, and the left end of the bottom surface 113D, respectively, and extends to the rear end of the FOUP body 101 in the front-to-rear direction. The left side surface 113L faces right. The right side surface 113R is connected to the right end of the back surface 113B, the right end of the top surface 113U, and the right end of the bottom surface 113D, respectively, and extends to the rear end of the FOUP body 101 in the front-to-rear direction. The right side surface 113R faces left.

[0047] The multiple poles P are used to support multiple substrates S in a substantially horizontal position. The multiple poles P are arranged in a substantially rectangular parallelepiped space surrounded by the FOUP body 101. Each of the multiple poles P is, for example, a substantially rod-shaped member extending in the front-rear direction. Each of the multiple poles P is fixed to, for example, the rear surface 113B. A portion of a substrate S is placed on one of the poles P. As shown in FIG. 2 , the multiple poles P are arranged vertically in a row corresponding to the multiple substrates S. As shown in FIG. 3 , the multiple poles P are arranged horizontally. In other words, the multiple poles P include multiple first poles P1, multiple second poles P2, and multiple third poles P3. The multiple first poles P1 are arranged, for example, immediately to the left of the right side surface 113R and arranged vertically. The multiple second poles P2 are arranged, for example, at approximately the center of the FOUP body 101 in the left-right direction and arranged vertically. The multiple third poles P3 are arranged, for example, near the left side surface 113L, and are aligned in the vertical direction. The numbers of first poles P1, second poles P2, and third poles P3 are the same. One first pole P1, one second pole P2, and one third pole P3 are provided corresponding to one substrate S. A set of first pole P1, second pole P2, and third pole P3 are arranged at approximately equal positions in the vertical direction to support one substrate S. The space for supporting one substrate S is called a slot. In other words, the FOUP 100 has multiple slots aligned in the vertical direction.

[0048] The lid 102 is configured to open and close the opening 114. The lid 102 is attached to and detached from the FOUP body 101 by the load port 4. The lid 102 has a locking mechanism (not shown) that can change the state of the lid 102 between a state where it is fixed to the FOUP body 101 and a state where it is released from the FOUP body 101. The locking mechanism is unlocked and locked by a latch key (not shown).

[0049] (Basic Operation of Load Port) The basic operation of the load port 4 will be described with reference to Figures 4(a) to 5(b). Figures 4(a) to 5(b) are right side views of the load port 4 in operation.

[0050] First, the FOUP 100 is placed on the placement unit 44 (see FIG. 4( a)). The LP control unit 46 moves the placement unit 44 from the transfer position (see FIG. 4( a)) to the lid open / close position (see FIG. 4( b)). Next, the LP control unit 46 adsorbs and holds the lid 102 on the suction holding unit of the door body 50, and causes the latch key to unlock the lock mechanism of the lid 102. Furthermore, the LP control unit 46 controls the motor 57 to move the door support unit 53 rearward (see the rightward arrow in FIG. 5( a)). This moves the door body 50 from the predetermined closed position (see FIG. 4( b)) to the open position (see FIG. 5( a)). As a result, the lid 102 is removed from the FOUP body 101.

[0051] Next, the LP control device 46 controls the motor 58 to move the door main body 50 from the open position (see FIG. 5( a)) to the retracted position (see FIG. 5( b)). Accordingly, the multiple cameras 61 and the like of the scanner unit 45 move downward integrally with the door main body 50. In response to a command from the controller 66, the multiple cameras 61 capture an image of a predetermined imaging area 200 (see FIG. 6), which will be described later, at a predetermined position in the vertical direction to obtain imaging data. The controller 66 performs a mapping process based on the imaging data obtained by the multiple cameras 61. The mapping process is a process that includes a determination regarding the storage status of each of the multiple boards S. Details of the mapping process will be described later.

[0052] After the mapping process is completed, the transfer robot 3 starts transferring the substrates S between the FOUP 100 and the processing device 6. The processing device 6 sequentially performs predetermined processing on some or all of the substrates S. The processed substrates S are returned to the FOUP 100 by the transfer robot 3. After all of the substrates S have been returned to the FOUP 100, the LP control device 46 causes the door mechanism 42 and the like to perform the reverse operation of opening the lid 102, and attaches the lid 102 to the FOUP 101 body. In this manner, a series of processes are performed from when the FOUP 100 is transferred to the load port 4 until it is ready for removal.

[0053] Here, if the reflected light from the inner wall surface 113 of the FOUP 100 is strong and is detected by the camera 61, the reflected light is difficult to distinguish from light reflected by the substrates S, which may result in an erroneous determination of the storage status of the substrates. In particular, light specularly reflected by the rear surface 113B can be a major cause of erroneous detection. More specifically, because the rear surface 113B is approximately perpendicular to the front-to-rear direction, the angle of incidence of light having a front-to-rear component of the irradiated light on the rear surface 113B is small. Therefore, a large amount of light is specularly reflected by the rear surface 113B and directed toward the camera 61. As a result, the light reflected by the rear surface 113B is likely to be mistaken for light reflected by the substrates S. Therefore, in order to more reliably suppress erroneous determination of the storage status of the substrates S using a simple means, the load port 4 has the following configuration. In particular, multiple cameras 61 are arranged as follows.

[0054] (Detailed Arrangement of Cameras, etc.) The detailed arrangement of the cameras 61, etc. will be described with reference to Figs. 3 and 6. Fig. 3 shows the positional relationship between the multiple cameras 61 and the FOUP 100 when the multiple cameras 61 are capturing images of the substrate S. Fig. 6 is a diagram showing multiple imaging areas 200 (first imaging area 201 and second imaging area 202). As described above, the scanner unit 45 has multiple cameras 61 and lighting 62. As shown in Fig. 3, the multiple cameras 61 include, for example, a first camera 63 and a second camera 64.

[0055] The first camera 63 is, for example, a low-magnification camera with a large horizontal angle of view. The horizontal angle of view of the first camera 63 is preferably, for example, 100° or more. More specifically, the horizontal angle of view is preferably 100° or more and 150° or less. The resolution of the first camera 63 is, for example, 1.2 million pixels. The imaging axis of the first camera 63 is, for example, approximately parallel to the front-to-rear direction (in other words, approximately horizontal). The horizontal angle of view, resolution, and orientation of the imaging axis of the first camera 63 are not limited thereto. As shown in FIG. 3 , the first camera 63 is disposed, for example, between the first pole P1 and the second pole P2 in the left-to-right direction. The first camera 63 is disposed in an appropriate position so that reflected light specularly reflected by the end face SE near the first pole P1 and reflected light specularly reflected by the end face SE near the second pole P2 travels toward the first camera 63. The distance in the left-right direction between the first camera 63 and the first pole P1 is preferably shorter than the distance in the left-right direction between the first camera 63 and the second pole P2, for example. The first camera 63 is configured and arranged to capture an image of a first imaging area 201 (see FIG. 6), which is one of the imaging areas 200. As shown in FIG. 6, the first imaging area 201 is longer in the up-down direction than the length obtained by, for example, adding up the diameter of the pole P and the thickness of the substrate S. The first imaging area 201 extends in the left-right direction, for example, from a position to the right of the first pole P1 to a position to the left of the second pole P2.

[0056] Data relating to the judgment area 210 (first judgment area 211 and second judgment area 212), which is part of the first imaging area 201, is used as judgment data to determine the storage state of the substrate S. The first judgment area 211 is an area near the first pole P1. The second judgment area 212 is an area near the second pole P2. For ease of explanation, the judgment data relating to the first judgment area 211 will be referred to as first judgment data. The judgment data relating to the second judgment area 212 will be referred to as second judgment data. The first judgment data and second judgment data correspond to judgment information in the present invention. In addition, in this embodiment, the first judgment data and second judgment data will also be collectively referred to as low-magnification data.

[0057] The second camera 64 is a high-magnification camera with a smaller horizontal angle of view than the first camera 63, for example. The horizontal angle of view of the second camera 64 is preferably, for example, between 30° and 35°. The horizontal angle of view is particularly preferably 34° or greater. The resolution of the second camera 64 is, for example, 1.2 million pixels. The imaging axis of the second camera 64 is, for example, approximately parallel to the front-to-rear direction (in other words, approximately horizontal). The horizontal angle of view, resolution, and orientation of the imaging axis of the second camera 64 are not limited thereto. As shown in FIG. 3 , the second camera 64 is disposed, for example, between the second pole P2 and the third pole P3 in the left-to-right direction. The second camera 64 is disposed in an appropriate position so that light specularly reflected by the end face SE located near the third pole P3 travels toward the second camera 64. The distance between the second camera 64 and the third pole P3 in the left-to-right direction is preferably shorter than the distance between the second camera 64 and the second pole P2 in the left-to-right direction. The second camera 64 is configured and arranged to capture an image of a second imaging area 202 (see FIG. 6), which is one of the imaging areas 200. As shown in FIG. 6, the second imaging area 202 is longer in the up-down direction than the length obtained by adding together the diameter of the pole P and the thickness of the substrate S, for example. More specifically, the second imaging area 202 is longer in the up-down direction than the length obtained by adding together the diameter of the pole P and the thickness of two substrates S, for example. The second imaging area 202 extends in the left-right direction from a position to the right of the third pole P3 to a position to the left of the third pole P3, for example.

[0058] Data relating to the determination area 210 (third determination area 213), which is part of the second imaging area 202, is used as determination data to determine the storage state of the substrate S. The third determination area 213 is an area near the third pole P3. For ease of explanation, the determination data relating to the third determination area 213 will be referred to as third determination data hereinafter. Like the first determination data and the second determination data, the third determination data corresponds to the determination information of the present invention. In addition, in this embodiment, the third determination data is also referred to as high-magnification data.

[0059] The position of each camera 61 will be described in further detail with reference to FIGS. 3 and 6. As shown in FIG. 3, when the camera 61 captures the imaging area 200, the camera 61 focuses reflected light using the light-receiving lens 61a. Generally, the principal points (front and rear principal points), foci (front and rear foci), and nodal points (front and rear nodal points) of the lens are predetermined according to the lens specifications. Although not shown, in this embodiment, for convenience of explanation, the front nodal point of the light-receiving lens 61a (the center point of the surface of the light-receiving lens 61a facing the substrate S) is defined as the light-receiving point RP. The light-receiving point RP associated with the first camera 63 is referred to as the first light-receiving point RP1. The light-receiving point RP associated with the second camera 64 is referred to as the second light-receiving point RP2.

[0060] As shown in FIG. 6 , a predetermined point included in each determination area 210 and included on the end surface SE is referred to as a detection target point SP (see FIGS. 3 and 6 ) for ease of explanation. The position of the detection target point SP in the left-right and front-rear directions is set in advance depending on, for example, the specifications of the FOUP 100, the specifications of the substrate S, the arrangement of the lighting 62, and the configuration and arrangement of the camera 61. The detection target point SP included in the first determination area 211 is referred to as a first detection target point SP1. As shown in FIG. 3 , the first detection target point SP1 may be located, for example, to the left of the first pole P1 (i.e., more inward in the left-right direction than the first pole P1). The detection target point SP included in the second determination area 212 is referred to as a second detection target point SP2. As shown in FIG. 3 , the second detection target point SP2 may be located, for example, at approximately the same position as the center position of the second pole P2 in the left-right direction. The detection target point SP included in the third determination area 213 is referred to as a third detection target point SP3. 3, the third detection target point SP3 may be located, for example, to the right of the third pole P3 (i.e., inside the third pole P3 in the left-right direction). The positions of the detection target points SP are not limited to those described above. For example, one or more detection target points SP may be set directly above the corresponding pole P.

[0061] The first camera 63 captures an image of an imaging area 200 (first imaging area 201; see FIG. 6 ) including the first detection target point SP1 and the second detection target point SP2. The second camera 64 captures an image of an imaging area 200 (second imaging area 202; see FIG. 6 ) including the third detection target point SP3. In this way, the multiple (two) cameras 61 capture an image of an area including multiple (three in total) detection target points SP on each board S.

[0062] As shown in FIG. 3 , for convenience of explanation, a virtual line passing through a predetermined light receiving point RP and a predetermined detection target point SP is referred to as a virtual line VL. More specifically, the virtual line VL passing through the first light receiving point RP1 and the first detection target point SP1 is referred to as a first virtual line VL1. The virtual line VL passing through the first light receiving point RP1 and the second detection target point SP2 is referred to as a second virtual line VL2. The virtual line VL passing through the second light receiving point RP2 and the third detection target point SP3 is referred to as a third virtual line VL3. The first virtual line VL1 intersects with, for example, the right side surface 113R of the FOUP 100. The second virtual line VL2 and the third virtual line VL3 intersect with, for example, the left side surface 113L of the FOUP 100. The right side surface 113R and the left side surface 113L are side surfaces of the inner wall surface 113 that are different from the back surface 113B (opposing surface). For convenience of explanation, the right side surface 113R and the left side surface 113L will be hereinafter collectively referred to as non-opposing surfaces.

[0063] With this arrangement, each camera 61 can capture an image of the area near the detection target point SP (i.e., the determination area 210) with one of the non-facing surfaces (and the pole P) as the background. In other words, it is possible to minimize the inclusion of image data related to the rear surface 113B in image data related to each determination area 210. Because the non-facing surface is approximately parallel to the front-to-rear direction, the amount of light reflected backward by the non-facing surface and heading directly toward the camera 61 is much smaller than the amount of light reflected by the rear surface 113B and heading toward the camera 61. Therefore, it is possible to minimize the inclusion of light that could cause erroneous detection of the substrate S in image data related to the determination area 210.

[0064] (Mapping Process) Next, an example of the mapping process executed by the load port 4 will be described mainly with reference to Fig. 7. Fig. 7 is a flowchart showing the entire mapping process.

[0065] The initial state is as follows: A FOUP 100 containing a plurality of substrates S is placed on the placement section 44. The placement section 44 is located in the lid open / close position. The lid 102 of the FOUP 100 is opened by the door mechanism 42. The door body 50 is located in the open position (see FIG. 5( a)).

[0066] First, the LP control device 46 transmits information (schedule information) related to the imaging schedule of the camera 61 to the controller 66. Information related to the imaging schedule includes, for example, the specifications of the FOUP 100, the number of substrates S that can be stored in the FOUP 100, the position of the uppermost slot among the multiple slots in the FOUP 100, and the set value of the descent speed of the door body 50. The schedule information is transmitted in advance to the LP control device 46 from, for example, a control unit (not shown) of the processing device 6. In addition to the schedule information, the control unit of the processing device 6 also transmits in advance to the LP control device 46, for example, a set value for the thickness of the substrates S (information for performing the double determination described below). The controller 66 receives the schedule information from the LP control device 46 (step S101 shown in FIG. 7). The controller 66 calculates an imaging schedule based on the schedule information (step S102). The imaging schedule is a schedule of the timing at which the camera 61 will take an image after a predetermined time has elapsed since the controller 66 received a predetermined trigger signal.

[0067] Next, the LP control device 46 controls the motor 58 of the door mechanism 42 to start lowering the scanner unit 45 together with the door main body 50 (and the door support unit 53) (step S103). At this time, the trigger sensor 65 detects the start of movement of the door support unit 53 and sends a detection signal to the controller 66. The controller 66 receives the detection signal as the trigger signal (step S104). Thereafter, the controller 66 causes each camera 61 to capture images based on the imaging schedule, for example, in the following manner.

[0068] The controller 66 sets to an initial value a counter for counting (determining) the substrates S accommodated in the FOUP 100 one by one from the top. More specifically, the controller 66 inputs, for example, 1 into a predetermined variable N (step S105).

[0069] Next, the controller 66 determines whether the timing for imaging the Nth substrate S has arrived based on the imaging schedule (step S106). If the timing for imaging the Nth substrate S has not arrived (step S106: No), the LP control device 46 continues to lower the scanner unit 45. If the timing for imaging the Nth substrate S has arrived (step S106: Yes), the controller 66 controls the multiple cameras 61 to image the imaging area 200 related to the Nth substrate S and acquire imaging data related to the substrate S (step S107). More specifically, the controller 66 causes the first camera 63 to image the first imaging area 201 and the second camera 64 to image the second imaging area 202. The controller 66 temporarily stores the imaging data acquired by these cameras 61 in, for example, a memory. The controller 66 may further store the imaging data in, for example, the internal storage (not shown) described above.

[0070] Next, the controller 66 determines the accommodation state of the Nth substrate S based on the determination data included in the image data (determination process, step S108). Details will be described later.

[0071] Next, the controller 66 determines whether the determination process has been completed for all of the substrates S (step S109). If the controller 66 determines that there are still substrates S for which the determination process has not yet been performed (step S109: No), the controller 66 adds 1 to the variable N (step S110), for example, and returns to step S106. If the determination process has been completed for all of the substrates S (step S109: Yes), the controller 66 ends the mapping process.

[0072] (Determination Process) An example of the determination process for the storage state of each substrate S will be described with reference to Figures 8 to 9(d). Figure 8 is a flowchart showing the determination process for each substrate S. Figures 9(a) to 9(d) are diagrams for explaining the determination of the storage state of a substrate S. In summary, the controller 66 determines whether the storage state of the Nth substrate S is a double state or a cross state, whether the Nth substrate S is not present, or whether the Nth substrate S is stored normally.

[0073] In the following determination process, the controller 66 uses the non-opposing surface-containing data (non-opposing surface-containing information of the present invention) as determination data. The non-opposing surface-containing data is data that does not include data on the region of the imaging region 200 that relates to the rear surface 113B, and includes data on the region that relates to both the non-opposing surface and the detection target point SP. In other words, the controller 66 uses data on the determination region 210 that does not include the rear surface 113B as a background, and that includes the left side surface 113L or the right side surface 113R as a background, as determination data.

[0074] First, the controller 66 determines whether the accommodation state of the Nth substrate S is a double state (double determination; step S201 shown in FIG. 8). A double state is a state in which two (or more) substrates S are accommodated vertically stacked in one slot, as shown in FIG. 9(a). The controller 66 detects the thickness of the Nth substrate S, for example, based on the third determination data. If the detected thickness exceeds the set value for the thickness of one substrate S, the controller 66 determines that the accommodation state of the Nth substrate S is a double state (i.e., a double state is detected). If the detected thickness is approximately the same as the set value for the thickness of one substrate S, the controller 66 determines that the accommodation state of the Nth substrate S is not a double state.

[0075] When the double state is detected (step S202: Yes), the controller 66 stores information indicating that the accommodation state of the Nth substrate S is the double state in the memory (step S203). Then, the controller 66 ends the determination regarding the Nth substrate S.

[0076] When a double state is not detected (step S202: No), the controller 66 determines whether or not the storage state of the Nth substrate S is a cross state (cross determination). The cross state is a state in which part of the substrate S is placed on one of a pair of poles P lined up in the left-right direction, and another part of the substrate S is located below the pair of poles P, as shown in Figure 9(b) or 9(c), for example.

[0077] As a procedure for determining whether the Nth substrate S is in a cross state, the controller 66 first determines whether the substrate S is in a cross state based on, for example, low-magnification data (step S204). More specifically, the controller 66 compares the vertical position of the substrate S detected based on the first determination data (hereinafter referred to as the first substrate position) with the vertical set position of the first pole P1 corresponding to the substrate S (hereinafter referred to as the first set position). The vertical set position of each pole P is pre-stored in the memory of the controller 66. Note that, because a design tolerance is allowed for the position of each pole P, there may be a difference between the designed vertical position of each pole P and its actual position. In this case, the controller 66 may detect the actual position of each pole P by, for example, pattern matching. For example, when the first substrate position is lower than the first set position, the controller 66 determines that the substrate S is in a cross state (i.e., a cross state is detected).

[0078] The controller 66 also compares the vertical position of the substrate S detected based on the second determination data (hereinafter referred to as the second substrate position) with the vertical set position of the second pole P2 corresponding to the substrate S (hereinafter referred to as the second set position). The second set position may be set, for example, as the same position as the first set position in the vertical direction, or may be set independently of the first set position. For example, when the second substrate position is lower than the second set position, the controller 66 determines that the storage state of the Nth substrate S is a cross state (i.e., a cross state is detected). When a cross state is detected (step S205: Yes), the controller 66 stores information indicating that the storage state of the Nth substrate S is a cross state in memory (step S206). The controller 66 then terminates the determination regarding the Nth substrate S.

[0079] When a cross state is not detected based on the low-magnification data (step S205: No), the controller 66 performs a cross determination taking into account the high-magnification data (step S207). The controller 66 compares the vertical position of the substrate S detected based on the third determination data (hereinafter referred to as the third substrate position) with the vertical set position of the third pole P3 corresponding to the substrate S (hereinafter referred to as the third set position). The third set position may be the same vertical position as the first set position and / or the second set position, or may be set independently of the first set position and the second set position. For example, when the third substrate position is lower than the third set position, the controller 66 determines that the accommodation state of the Nth substrate S is a cross state (i.e., a cross state is detected). When a cross state is detected (step S208: Yes), the controller 66 executes step S206 and terminates the determination regarding the Nth substrate S.

[0080] When a cross state is not detected even when the high-magnification data is taken into consideration (step S208: No), the controller 66 determines whether a substrate S is present (step S209). More specifically, the controller 66 determines whether a substrate S is detected in any of the first judgment area 211, the second judgment area 212, and the third judgment area 213 based on the judgment data. When a substrate S is not detected in any of the judgment areas 210 (see FIG. 9(d)), the controller 66 determines that the Nth substrate S is not present (step S210: No). In this case, the controller 66 stores information indicating the absence of the Nth substrate S in memory (step S211). The controller 66 then terminates the determination regarding the Nth substrate S. When a substrate S is detected in any of the judgment areas 210, the controller 66 determines that the Nth substrate S is present (i.e., correctly stored) (step S211: No). In this case, the controller 66 terminates the determination regarding the Nth substrate S. In this manner, the determination process for the Nth substrate S is completed.

[0081] As described above, when capturing an image of the imaging area 200, each camera 61 is positioned as follows. That is, a virtual straight line VL passing through each light receiving point RP and the corresponding detection target point SP intersects with the non-opposing surface (left side surface 113L or right side surface 113R) of the FOUP 100, which is a surface other than the back surface 113B. This arrangement of the cameras 61 minimizes the possibility of the back surface 113B being captured as a background in the detection target point SP and its surrounding area. This minimizes the influence of light reflected from the back surface 113B. Furthermore, the light emitted from the illumination 62 and reflected by the non-opposing surface is less likely to directly reach the camera 61 than the light reflected from the back surface 113B. This minimizes the occurrence of erroneous determinations regarding the storage status of the substrate S at the detection target point SP. Therefore, this simple method more reliably minimizes erroneous determinations regarding the storage status of the substrate S.

[0082] Furthermore, the controller 66 uses the non-opposing surface data as data for determination, thereby excluding data of the area of ​​the imaging area 200 that is imaged with the back surface 113B as the background from the determination by the controller 66. Therefore, erroneous determination of the accommodation state of the substrate S can be effectively suppressed.

[0083] Furthermore, the multiple cameras 61 (imaging units) capture images of an area including multiple detection target points SP on each board S. In a configuration that requires judgment regarding multiple detection target points SP for each board S, an erroneous judgment regarding even one of the detection target points SP will result in an erroneous judgment regarding the entire board S. Therefore, the scanner unit 45 of the present embodiment, which can more reliably suppress erroneous judgments, is particularly effective in this configuration.

[0084] Furthermore, cross determination can be performed by the first camera 63 (and the second camera 64). Furthermore, double determination can be performed by the second camera 64. Therefore, the accommodation state of the board S can be determined in more detail.

[0085] Furthermore, generally, of the light reflected by the substrate S, the light reflected by the edge surface SE is stronger than the light reflected by portions other than the edge surface SE. Therefore, in order to more reliably detect the light reflected from the substrate S, it is preferable that the imaging unit is configured to image at least the edge surface of the substrate, as in this embodiment. In this case, the side surface (left side surface 113L or right side surface 113R) of the inner wall surface 113 of the FOUP 100 can be imaged by the camera 61. The reflected light reflected by a side surface other than the back surface 113B and heading directly toward the camera 61 is significantly weaker than the reflected light heading directly from the back surface 113B toward the camera 61. This effectively prevents erroneous determination of the presence or absence of the substrate S at the detection target point SP.

[0086] Next, a modified example of the embodiment will be described, with the same reference numerals being used to designate components having the same configuration as the embodiment, and the description thereof will be omitted as appropriate.

[0087] (1) The controller 66 may be further capable of determining a cross state (see FIGS. 10A to 10F) other than the cross state shown in the above embodiment. That is, the controller 66 may determine that the storage state of the substrate S is a cross state even when the substrate S is not detected in some (any one or two) of the first determination area 211, the second determination area 212, and the third determination area 213. This situation is likely to occur, for example, when a substrate S that is easily bent because it is very thin or the like is stored in the FOUP 100, and when a portion of the substrate S is unintentionally placed below the pole P, the portion sags significantly due to gravity.

[0088] (2) In the above-described embodiment, the imaging axis of each camera 61 is substantially horizontal, and each camera 61 is positioned to image the end surface SE of the substrate S. However, this is not limited to this. The camera 61 may be configured to image the substrate S from, for example, a diagonally downward rear or diagonally upward rear. For example, if the substrate S is a glass epoxy substrate, the portion near the end surface SE is slightly rounded when viewed from the left or right. Such a substrate S can specularly reflect irradiated light in various directions, so there is a high probability that the substrate S can be detected even if the camera 61 is positioned as described above. When the camera 61 is positioned to image the substrate S from a diagonally downward rear, the upper surface 113U is included in the non-facing surface of the present invention. When the camera 61 is positioned to image the substrate S from a diagonally upward rear, the lower surface 113D is included in the non-facing surface of the present invention.

[0089] (3) In the above-described embodiment, the multiple cameras 61 include a first camera 63 and a second camera 64 having different performance (e.g., at least one of resolution, magnification, and viewing angle). However, this is not limited to this. The multiple cameras 61 may be two cameras (not shown) having the same performance. One camera may capture images for cross determination. The other camera or both cameras may capture images for double determination. When double determination is performed based on image data acquired by both cameras, the accuracy of double determination can be further improved.

[0090] (4) In the above-described embodiments, the imaging unit has two cameras 61. However, this is not limited to this. The imaging unit may have three or more cameras 61. Alternatively, the imaging unit may have only one camera 61. In a configuration in which only one camera 61 is provided, the horizontal angle of view of the camera 61 may be larger than the horizontal angle of view of the first camera 63, for example. This allows cross detection to be performed using a small number of cameras 61. Furthermore, the resolution of the camera 61 may be high enough to enable double detection despite such a large horizontal angle of view (i.e., low magnification). Furthermore, in the above-described embodiments, the imaging unit captures an area including multiple detection target points SP. However, this is not limited to this. In a configuration in which only one camera 61 is provided, the camera 61 may be configured to capture an area including only one detection target point SP. That is, the controller 66 may use the camera 61 to determine, for example, only the presence or absence of the substrate S.

[0091] (5) In the above-described embodiments, the controller 66 uses the non-opposing surface-containing data as the determination data. However, this is not limited to this. The controller 66 may use data that includes a small amount of the rear surface 113B as background data as the determination data. Even in this case, since the virtual line VL intersects with the non-opposing surface, the proportion of data related to the rear surface 113B in the determination data can be effectively reduced. Therefore, the influence of reflected light from the rear surface 113B can be effectively suppressed.

[0092] (6) In the above-described embodiments, one detection target point SP is set in each determination area 210. However, this is not limited to this. Multiple detection target points SP may be set in each determination area 210. Alternatively, the controller 66 may be configured to detect the entire area in each determination area 210 where light is specularly reflected as part of the end face SE.

[0093] (7) In the above-described embodiments, the front nodal point of the light-receiving lens 61a of the camera 61 is defined as the light-receiving point RP. However, this is not limited to this. The front principal point of the light-receiving lens 61a or a predetermined point on the front surface of the light-receiving lens 61a may also be defined as the light-receiving point RP. Alternatively, for example, if the front focal point of the light-receiving lens 61a is located inside the light-receiving lens 61a, the front focal point may also be defined as the light-receiving point RP. Alternatively, the rear principal point, the rear nodal point, or the like may also be defined as the light-receiving point RP.

[0094] (8) The number of poles P supporting each substrate S is not limited to three. The substrate S may be supported by a support member (not shown) separate from the pole P. Alternatively, both left and right ends of the substrate S may be supported by support portions (not shown) formed by cutting out the inner surface of the FOUP body 101, for example. The type of container is not limited to the FOUP 100. The present invention can also be applied to a container (not shown) other than the FOUP 100 that has an opening, an opposing surface, and a non-opposing surface.

[0095] (9) The shape of the substrate S may be a shape other than a substantially rectangular shape when viewed from above. For example, the substrate S may be a substantially circular plate shape.

[0096] (10) In the above-described embodiments, the scanner unit 45 is fixed to, for example, the door body 50 (i.e., is driven by the motor 58 to move up and down integrally with the door body 50). However, this is not limited to this. The scanner unit 45 may be configured to be movable, for example, in the front-to-rear direction relative to the door body 50. Alternatively, the scanner unit 45 may be driven to move up and down independently of the door body 50 by a drive source (not shown) separate from the motor 58. Alternatively, the scanner unit 45 may be attached to the transport robot 3 or other structures within the EFEM 1.

[0097] (11) In the above-described embodiments, the controller 66 causes each camera 61 to capture images based on an image capture schedule. However, this is not limited to this. The controller 66 may cause each camera 61 to capture images while determining the vertical position of the scanner unit 45, for example. The vertical storage position of each board S may be stored in advance in the memory (RAM) of the controller 66, for example. The vertical position of the scanner unit 45 may be determined based on the number of steps of the motor 58, which is a stepping motor, for example. The controller 66 may cause each camera 61 to capture images when it determines that the vertical position of the scanner unit 45 has reached the vertical storage position of any board S.

[0098] (12) In the above-described embodiments, the LP control device 46 and the controller 66 are provided separately. However, this is not limited to this. For example, the LP control device 46 may be equipped with the controller 66. Alternatively, the LP control device 46 may have a function to control each camera 61 instead of the controller 66. When the LP control device 46 has such a function, the LP control device 46 corresponds to the determination unit of the present invention. Alternatively, for example, the control device 5 of the EFEM 1 may control the load port 4. In this case, the control device 5 corresponds to the determination unit of the present invention.

[0099] (13) The load port 4 may be mounted on equipment other than the EFEM 1.

[0100] (14) The present invention may be applied to mapping devices other than the load port 4.

[0101] DESCRIPTION OF SYMBOLS 4 Load port (mapping device) 61 Camera (imaging unit) 61a Light receiving lens (light receiving unit) 62 Lighting (light emitting unit) 66 Controller (determination unit) 100 FOUP (container) 113 Inner wall surface 113B Back surface (opposing surface) 113L Left side surface (non-opposing surface, side surface) 113R Right side surface (non-opposing surface, side surface) 114 Opening 200 Imaging area 201 First imaging area 202 Second imaging area RP Light receiving point S Substrate SE End surface SP Detection target point VL Virtual line

Claims

1. A mapping device for detecting the storage state of a substrate contained in a container having an opening on a side, comprising: a light-emitting unit that emits light at least toward the inside of the container; and an imaging unit that senses at least part of the light emitted from the light-emitting unit that is reflected toward the opening side by the substrate, and images an imaging area including a predetermined detection target point that is set in advance to detect the substrate, wherein the imaging unit is positioned so that, when imaging the imaging area, a virtual straight line passing through the detection target point and a predetermined light-receiving point that is predetermined by a light-receiving unit that receives the reflected light of the imaging unit intersects with a non-opposing surface of the inner wall of the container, which is a surface other than the opposing surface facing the opening side.

2. A mapping device as described in claim 1, further comprising a judgment unit which judges the storage state of the substrate using judgment information contained in imaging information, which is information obtained by the imaging unit imaging the imaging area, and wherein the judgment unit uses non-opposing surface-containing information as the judgment information, which does not include information on an area of ​​the imaging area related to the opposing surface, and which includes information on an area of ​​the imaging area related to both the non-opposing surface and the detection target point.

3. A mapping device according to claim 1 or 2, characterized in that the imaging unit images an area including a plurality of the detection target points on the board.

4. The mapping device described in claim 3, characterized in that the imaging unit has: a first camera configured to be able to image a first imaging area including two or more detection target points among the plurality of detection target points; and a second camera for detecting the thickness of the substrate, provided separately from the first camera and configured to be able to image a second imaging area including a detection target point other than the two or more detection target points among the plurality of detection target points.

5. A mapping device according to claim 1 or 2, characterized in that the imaging section is configured to be able to image at least an end face of the substrate, and the non-opposing surface is a side surface other than the opposing surface.

Images