Vibration detection system, position adjustment system, robot system, and vibration detection method
The vibration detection system effectively addresses the challenge of detecting chip vibrations by using a light-based approach, enabling precise position adjustments in the mounting process.
WO2025115839A1PCT designated stage expired Publication Date: 2025-06-05PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
Patent Information
- Application Number
- PCT/JP2024/041755
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2023-11-27
- Filing Date
- 2024-11-26
- Publication Date
- 2025-06-05
AI Technical Summary
Technical Problem
Existing technologies do not effectively detect the vibration of semiconductor chips with respect to substrates during the mounting process, which is crucial for precise position adjustment.
Method used
A vibration detection system that includes a light source, an observation unit, and a light receiving unit, which detects changes in the intensity of response light emitted by the observation unit to determine the vibration of the semiconductor chip with respect to the substrate.
Benefits of technology
Enables accurate detection of vibrations between semiconductor chips and substrates, allowing for appropriate position adjustments and improving the mounting process precision.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure JP2024041755_05062025_PF_FP_ABST
Abstract
A light source 40 is provided so as to be interlocked with a first object 11, and irradiates an observation light 45. An observation part 50 is provided so as to be interlocked with a second object 12, emits a response light 55 when receiving the observation light 45 irradiated from the light source 40, and is configured so that the intensity of the response light 55 or the intensity of each wavelength changes according to the movement of the first object 11 in a predetermined direction with respect to the second object 12. A light-receiving part 60 receives the response light 55 emitted from the observation part 50. A control unit 80 detects vibration in a predetermined direction of the first object 11 with respect to the second object 12 on the basis of the intensity of the response light 55 received by the light-receiving unit 60 or a change in intensity for each wavelength.
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Citation Information
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