Member for machining

The cutting member, comprising an amorphous thermoplastic resin and an inorganic reinforcing material, addresses the challenges of poor cutting processability and burr generation in semiconductor inspection tools, achieving improved performance and accuracy in cutting operations.

WO2025121311A1PCT designated stage expired Publication Date: 2025-06-12OTSUKA CHEMICAL CO LTD
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Patent Information

Application Number
PCT/JP2024/042681
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2023-12-08
Filing Date
2024-12-03
Publication Date
2025-06-12

AI Technical Summary

Technical Problem

Conventional thermoplastic resin molded bodies used in inspection tools for semiconductor devices suffer from poor cutting processability and significant burr generation during drilling, leading to insertion issues and malfunction of contact probe pins.

Method used

A cutting member composed of a molded body of a resin composition containing an amorphous thermoplastic resin and an inorganic reinforcing material with a Mohs hardness of 5 or less, optimized with a cutting parameter defined by fracture toughness and flexural modulus to enhance cutting processability and suppress burr generation.

Benefits of technology

The cutting member exhibits improved cutting processability, reduced burr generation, and enhanced drilling accuracy, enabling faster processing times and minimizing insertion and functional issues in semiconductor inspection tools.

✦ Generated by Eureka AI based on patent content.

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Abstract

Provided is a member for machining which, when machined by shaving, cutting, or drilling, for example, using a mechanical tool, exhibits excellent machinability and suppresses generation of burrs. The member for machining is composed of a molded object of a resin composition containing a thermoplastic resin (A) and a reinforcing material (B), and is characterized in that: the thermoplastic resin (A) is an amorphous thermoplastic resin; the reinforcing material (B) is an inorganic reinforcing material having a Mohs hardness of 5 or less; and a machinability parameter defined by equation (1) from the fracture toughness K1c and flexural modulus of the member for machining is 15 m1 / 2 to 100 m1 / 2. Equation (1): Machinability parameter = (fracture toughness K1c) / (flexural modulus)×105
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Description

Cutting materials

[0001] The present invention relates to a member for cutting work, which is constituted by a molded article of a resin composition.

[0002] Conventionally, inspection tools such as semiconductor inspection jigs incorporating contact probe pins have been used for performance inspection of electronic devices such as semiconductor devices. In recent years, inspection tools using such contact probe pins have been required to be more precise as semiconductors and components have become increasingly miniaturized.

[0003] These inspection tools require properties such as mechanical properties, heat resistance, chemical resistance, and dimensional stability, so the holding and guide parts of the contact probe pins are made of plate-shaped super engineering plastic molded bodies (thermoplastic resin molded bodies) with many fine holes.

[0004] The thermoplastic resin that constitutes such a thermoplastic resin molded body is characterized by its toughness, and therefore, when a hole is drilled in the thermoplastic resin molded body, string-like debris (so-called burrs) is formed around the drilled opening as a result of the shavings bonding with the cutting surface of the body, and these burrs cause poor insertion of the contact probe pin, malfunction, etc. Therefore, Patent Document 1 proposes a method of suppressing the generation of burrs by using a thermoplastic resin molded body containing a conductive filler.

[0005] Japanese Patent Application Laid-Open No. 2005-226031

[0006] However, although the thermoplastic resin molded article described in Patent Document 1 has excellent conductivity, it has a problem that it cannot be used as an insulator. Furthermore, when a resin molded article using carbon fiber as a conductive filler is subjected to cutting such as drilling, there is a problem that the drill bit hits the carbon fiber in the resin molded article, causing the hole position in the cut object to shift, resulting in a decrease in drilling accuracy.

[0007] Furthermore, inspection tools using contact probe pins are required to be more precise in line with the recent trend toward finer semiconductors and components, and therefore there is a demand not only for the prevention of burrs during cutting of the thermoplastic resin molded products used therein, but also for improved cutting processability, such as shortening the processing time for the thermoplastic resin molded products. However, with conventional thermoplastic resin molded products, it is difficult to shorten the processing time, and there are problems in that cutting processability is still insufficient.

[0008] The present invention has been made in view of the above circumstances, and aims to provide a member for cutting processing that has excellent cutting processability and can suppress the generation of burrs when cutting processing such as scraping, cutting, or drilling is performed using a machine tool.

[0009] The present invention provides a cutting member having the following configuration.

[0010] Item 1: A cutting member configured from a molded body of a resin composition containing a thermoplastic resin (A) and a reinforcing material (B), wherein the thermoplastic resin (A) is an amorphous thermoplastic resin, the reinforcing material (B) is an inorganic reinforcing material having a Mohs hardness of 5 or less, and the cutting member has a fracture toughness K1c and a flexural modulus of elasticity of 15m or less, and the cutting parameter defined by the following formula (1) is 15m or less. 1/2 ~100m 1/2 A cutting processing member characterized by:

[0011] Machinability parameter = (fracture toughness K1c / flexural modulus) × 10 5 ...Formula (1)

[0012] Item 2. A member for cutting processing according to Item 1, wherein the member for cutting processing has a deflection temperature under load (HDT) of 150° C. or higher at a load of 1.8 MPa.

[0013] Item 3. The member for cutting processing according to Item 1 or 2, wherein the thermoplastic resin (A) is at least one selected from the group consisting of polyetherimide resins, polyethersulfone resins, and polyamideimide resins.

[0014] Item 4. The member for cutting processing according to any one of Items 1 to 3, wherein the aspect ratio of the reinforcing material (B) is 3 to 100.

[0015] Item 5. The member for cutting processing according to any one of Items 1 to 4, wherein the reinforcing material (B) is a fibrous reinforcing material having an average fiber length of 1 μm to 300 μm.

[0016] Item 6. The cutting member according to any one of Items 1 to 5, wherein the reinforcing material (B) is at least one fiber selected from the group consisting of potassium titanate fiber, wollastonite fiber, and titania fiber.

[0017] Item 7. The cutting processing member according to any one of items 1 to 6, wherein the content of the thermoplastic resin (A) is 20% by mass to 95% by mass, and the content of the reinforcing material (B) is 5% by mass to 55% by mass, in 100% by mass of the total amount of the resin composition.

[0018] Item 8: The thermoplastic resin (A) is a polyetherimide resin, and the resin composition has a shear rate of 122 sec -1 Item 8. The member for cutting processing according to any one of Items 1 to 7, wherein the melt viscosity at a temperature of 380°C is 300 Pa·s to 2600 Pa·s.

[0019] Item 9: The thermoplastic resin (A) is a polyethersulfone resin, and the resin composition has a shear rate of 122 sec -1 Item 8. The member for cutting processing according to any one of Items 1 to 7, wherein the melt viscosity at a temperature of 380°C is 230 Pa·s to 550 Pa·s.

[0020] Item 10: The cutting member according to any one of Items 1 to 9, which is a compression molded or extrusion molded article of the resin composition containing the thermoplastic resin (A) and the reinforcing material (B).

[0021] Item 11. The cutting member according to any one of Items 1 to 10, which is an injection-molded article of the resin composition containing the thermoplastic resin (A) and the reinforcing material (B).

[0022] Item 12. The member for cutting processing according to any one of Items 1 to 11, which is a molded article having a plate-like portion.

[0023] Item 13: The cutting processing member according to any one of Items 1 to 12, which is used for at least one selected from the group consisting of a semiconductor inspection socket, a wafer inspection probe card, a printed circuit board inspection jig, a TAB (Tape Automated Bonding) tape inspection jig, a flexible printed circuit board inspection jig, and a chip component inspection jig.

[0024] According to the present invention, it is possible to provide a member for cutting work that has excellent cutting workability and can suppress the generation of burrs when cutting work such as scraping, cutting, or drilling is performed using a machine tool.

[0025] FIG. 1 is a schematic diagram showing the shape of the drill fixing jig produced in Example 1.

[0026] Hereinafter, an example of a preferred embodiment of the present invention will be described. However, the following embodiment is merely an example, and the present invention is not limited to the following embodiment.

[0027] The cutting workpiece of the present invention is composed of a molded article of a resin composition. The resin composition contains a thermoplastic resin (A) and a reinforcing material (B), and may further contain other additives as needed. The thermoplastic resin (A) is an amorphous thermoplastic resin. The reinforcing material (B) is an inorganic reinforcing material having a Mohs hardness of 5 or less.

[0028] In the present invention, the machinability parameter defined by the following formula (1) from the fracture toughness K1c and flexural modulus of the cutting workpiece is 15m 1/2 ~100m 1/2 is.

[0029] Machinability parameter = (fracture toughness K1c / flexural modulus) × 10 5 ...Formula (1)

[0030] The cutting member of the present invention has the overall configuration of the present invention, and in particular, the reinforcing material (B) is an inorganic reinforcing material having a Mohs hardness of 5 or less, and the cutting parameter of the cutting member is 15m 1/2 ~100m 1/2Therefore, when cutting, cutting, drilling, or other cutting processes are performed using a machine tool, the cutting process is excellent and the processing time can be shortened. Furthermore, the cutting process member of the present invention can suppress the generation of burrs during cutting, and can improve the drilling accuracy during drilling.

[0031] In the present invention, the machinability parameter of the cutting workpiece is 15m 1/2 That's all, 100m 1/2 Less than 15m, preferably 1/2 More than 80m, preferably 1/2 Less than 15m, more preferably 1/2 More than 60m, preferably 1/2 The machinability parameter of the cutting member is 15m or less. 1/2 ~100m 1/2 , preferably 15 m 1/2 ~80m 1/2 , more preferably 15 m 1/2 ~60m 1/2 is.

[0032] In the present invention, the machinability parameter of the cutting workpiece is preferably 15 m from the viewpoint of further shortening the processing time. 1/2 More than 22m 1/2 The machinability parameter of the cutting member is preferably 15m or less. 1/2 ~22m 1/2 is.

[0033] In the present invention, the machinability parameter of the cutting workpiece is preferably 35 mm from the viewpoint of further suppressing the generation of burrs. 1/2 More than 50m 1/2 The machinability parameter of the cutting member is preferably 35m or less. 1/2 ~50m 1/2 is.

[0034] When the machinability parameters of the cutting member are within the above ranges, the cutting workability during cutting is even better, and the generation of burrs during cutting can be further suppressed.

[0035] In the present invention, the deflection temperature under load (HDT) of the cutting member at a load of 1.8 MPa is preferably 150°C or higher. The deflection temperature under load (HDT) of the cutting member is more preferably 165°C or higher, even more preferably 175°C or higher, and preferably 250°C or lower. In this case, by increasing the rotation speed and feed rate of the drill bit during cutting of the cutting member, the processing time can be further shortened. In addition, the appearance of the cut surface of the cutting member can be improved, so that a cut surface with a fine and good appearance can be obtained. The deflection temperature under load (HDT) can be adjusted by the type of thermoplastic resin (A), the amount of reinforcing material (B), the molding method, etc.

[0036] Each component of the resin composition constituting the cutting workpiece of the present invention will be described below.

[0037] <Resin Composition> The resin composition used in the present invention contains a thermoplastic resin (A) and a reinforcing material (B), and may further contain other additives as necessary. Each constituent component of the resin composition used in the present invention will be described below.

[0038] (Thermoplastic resin (A)) The thermoplastic resin (A) used in the present invention is an amorphous thermoplastic resin. "Crystalline" means that the value of the heat of fusion measured using a differential scanning calorimeter (DSC) in a nitrogen atmosphere after cooling from a molten state to 50°C at a cooling rate of 10°C / min and then heating at a rate of 10°C / min is greater than 30 J / g. "Amorphous" means that the value of the heat of fusion measured using a DSC in a nitrogen atmosphere after cooling from a molten state to 50°C at a cooling rate of 10°C / min and then heating at a rate of 10°C / min is 30 J / g or less.

[0039] Examples of amorphous thermoplastic resins include polystyrene resin, polymethyl methacrylate resin, acrylonitrile-butadiene-styrene resin, polycarbonate resin, modified polyphenylene ether resin, polyetherimide resin, polyethersulfone resin, and polyamideimide resin. The amorphous thermoplastic resin is preferably at least one selected from the group consisting of polyetherimide resin, polyethersulfone resin, and polyamideimide resin. In this case, the heat resistance, chemical resistance, and dimensional stability of the cutting workpiece can be improved to a higher level. These amorphous thermoplastic resins can be used alone or in combination of two or more.

[0040] Among these amorphous thermoplastic resins, a thermoplastic resin (heat-resistant resin) having heat resistance and a glass transition temperature of 170°C or higher is preferred. The glass transition temperature can be measured by a differential scanning calorimeter (DSC). When the amorphous thermoplastic resin is the heat-resistant resin, deformation and discoloration due to frictional heat are unlikely to occur even when the cutting workpiece is subjected to cutting work such as drilling.

[0041] When the thermoplastic resin (A) is a polyetherimide resin, the shear rate is 122 sec at a temperature 100°C to 170°C higher than the glass transition temperature using a capillary rheometer. -1 In addition, when the thermoplastic resin (A) is a polyethersulfone resin, the melt viscosity measured by a capillary rheometer at a temperature 100°C to 170°C higher than the glass transition temperature and a shear rate of 122 sec is preferably 300 Pa·s to 2600 Pa·s. -1 It is preferable that the melt viscosity measured by is 200 Pa·s to 550 Pa·s.

[0042] When the thermoplastic resin (A) is a polyetherimide resin, the shear rate of the resin composition constituting the cutting workpiece is 122 sec -1The melt viscosity at a temperature of 380°C is preferably 300 Pa·s to 2600 Pa·s, more preferably 300 Pa·s to 2000 Pa·s. When the thermoplastic resin (A) is a polyethersulfone resin, the shear rate of the resin composition constituting the cutting workpiece is 122 sec -1 It is also preferable that the melt viscosity at a temperature of 380° C. is 230 Pa·s to 550 Pa·s. When the melt viscosity of the resin composition is within the above range, the moldability of the cutting workpiece can be further improved.

[0043] The content of the thermoplastic resin (A) is preferably 20% by mass to 95% by mass, more preferably 35% by mass to 85% by mass, and even more preferably 40% by mass to 80% by mass, based on 100% by mass of the total amount of the resin composition. By setting the content of the thermoplastic resin (A) within the above range, the cutting processability of the cutting processable member can be further improved.

[0044] (Reinforcing Material (B)) The reinforcing material (B) used in the present invention is an inorganic reinforcing material having a Mohs hardness of 5 or less, and is preferably a powdered inorganic reinforcing material composed of particles having a Mohs hardness of 5 or less. The Mohs hardness of the inorganic reinforcing material is preferably 2 or more and 5 or less. Note that the Mohs hardness is an index that indicates the hardness of a substance, and the substance that is scratched when two minerals are rubbed against each other is the one with the lower hardness. In the present invention, the Mohs hardness can also be converted based on the Vickers hardness.

[0045] The reinforcing material (B) is a powdered inorganic reinforcing material composed of particles, and the particle shape is not particularly limited as long as it improves the strength and rigidity of the cutting workpiece. Examples of the reinforcing material (B) that can be used include a fibrous reinforcing material (B1) that is a powder composed of fibrous particles and a plate-like reinforcing material (B2) that is a powder composed of plate-like particles. The reinforcing material (B) is preferably one or more types selected from the group consisting of a fibrous reinforcing material (B1) and a plate-like reinforcing material (B2). The particle shape of the reinforcing material (B) can be determined, for example, by observation with a scanning electron microscope (SEM).

[0046] In the present invention, a fibrous particle refers to a particle in which, when the longest side of a rectangular parallelepiped circumscribing the particle and having the smallest volume (circumscribing rectangular parallelepiped) is defined as the major axis L, the next longest side as the minor axis B, and the shortest side as the thickness T (B>T), both L / B and L / T are 3 or more, and the major axis L corresponds to the fiber length and the minor axis B corresponds to the fiber diameter. Further, a plate-like particle refers to a particle in which L / B is less than 3 and L / T is 3 or more.

[0047] Specific examples of the fibrous reinforcing material (B1) include inorganic fibers such as potassium titanate fiber, wollastonite fiber, aluminum borate fiber, magnesium borate fiber, xonotlite fiber, zinc oxide fiber, basic magnesium sulfate fiber, alumina fiber, silicon carbide fiber, boron fiber, or titania fiber. The potassium titanate fiber may be a potassium titanate fiber whose surface is coated with a conductive material such as tin oxide / antimony oxide. The titania fiber may be a monoclinic titania fiber whose surface is coated with a conductive material such as tin oxide / antimony oxide. These fibrous reinforcing materials (B1) may be used alone or in combination.

[0048] From the viewpoint of further improving the drilling accuracy while suppressing the generation of burrs during drilling of a cutting workpiece, the fibrous reinforcing material (B1) is preferably particles having a Mohs hardness of 2 or more and 5 or less, more preferably at least one of potassium titanate fiber and wollastonite fiber, and particularly preferably potassium titanate fiber.

[0049] The average fiber length of the fibrous reinforcing material (B1) is preferably 1 μm to 300 μm, more preferably 1 μm to 200 μm, even more preferably 3 μm to 100 μm, and particularly preferably 5 μm to 50 μm, from the viewpoint of further improving machinability when cutting or cutting a cutting workpiece or when drilling holes with a drill bit. The average fiber diameter of the fibrous reinforcing material (B1) is preferably 0.01 μm to 1 μm, more preferably 0.03 μm to 0.9 μm, even more preferably 0.05 μm to 0.8 μm, and particularly preferably 0.1 μm to 0.7 μm. The average aspect ratio of the fibrous reinforcing material (B1) is preferably 3 to 200, more preferably 3 to 100, even more preferably 3 to 50, and particularly preferably 3 to 40.

[0050] A wide variety of conventional potassium titanate fibers can be used, including, for example, potassium tetratitanate fiber, potassium hexatitanate fiber, and potassium octatitanate fiber. The dimensions of the potassium titanate fiber are not particularly limited as long as they are within the range of the dimensions of the fibrous reinforcing material (B1) described above, but the average fiber length is preferably 1 μm to 50 μm, more preferably 3 μm to 30 μm, and even more preferably 3 μm to 20 μm. The average fiber diameter of the potassium titanate fiber is preferably 0.01 μm to 1 μm, more preferably 0.05 μm to 0.8 μm, and even more preferably 0.1 μm to 0.7 μm. The average aspect ratio of the potassium titanate fiber is preferably 10 or more, more preferably 10 to 100, and even more preferably 15 to 35.

[0051] Wollastonite fiber is an inorganic fiber made of calcium metasilicate. The dimensions of the wollastonite fiber are not particularly limited as long as they are within the range of the dimensions of the fibrous reinforcing material (B1) described above, but the average fiber length is preferably 5 μm to 180 μm, more preferably 7 μm to 100 μm, and even more preferably 9 μm to 40 μm. The average fiber diameter of the wollastonite fiber is preferably 0.1 μm to 15 μm, more preferably 1 μm to 10 μm, and even more preferably 2 μm to 7 μm. The average aspect ratio of the wollastonite fiber is preferably 3 or more, more preferably 3 to 30, and even more preferably 3 to 15.

[0052] The average fiber length and average fiber diameter of the fibrous reinforcing material (B1) can be measured by observation with a scanning electron microscope (SEM), and the average aspect ratio of the fibrous reinforcing material (B1) (average fiber length / average fiber diameter) can be calculated from the average fiber length and average fiber diameter. When measuring the average fiber length and average fiber diameter of the fibrous reinforcing material (B1), for example, a plurality of fibrous reinforcing materials (B1) are photographed with a scanning electron microscope (SEM), and 300 fibrous reinforcing materials (B1) are randomly selected from the observation image, and their fiber lengths and fiber diameters are measured. The average fiber length can be calculated by integrating all the fiber lengths and dividing by the number of fibers, and the average fiber diameter can be calculated by integrating all the fiber diameters and dividing by the number of fibers.

[0053] Specific examples of the plate-like reinforcing material (B2) include mica, sericite, illite, talc, kaolinite, montmorillonite, boehmite, smectite, vermiculite, potassium titanate, lithium potassium titanate, and magnesium potassium titanate. These plate-like reinforcing materials (B2) may be used alone or in combination. In the present invention, the term "plate-like" includes not only plate-like but also flake-like and scale-like shapes.

[0054] From the viewpoint of further improving the drilling accuracy while suppressing the generation of burrs during drilling, the plate-like reinforcing material (B2) is preferably particles having a Mohs hardness of 2 or more and 5 or less, and more preferably mica.

[0055] From the viewpoint of further improving machinability when cutting or cutting a cutting workpiece or when drilling holes with a drill bit, the plate-shaped reinforcing material (B2) preferably has a maximum diameter (long diameter) of 1 μm to 30 μm, more preferably 1 μm to 10 μm. The short diameter of the plate-shaped reinforcing material (B2) is preferably 0.5 μm to 20 μm, more preferably 0.5 μm to 10 μm. Note that, for convenience, the maximum diameter (long diameter) and short diameter are referred to here, but the term "plate-shaped" also includes those in which the maximum diameter (long diameter) and short diameter are approximately the same length, i.e., square or nearly so. The thickness of the plate-shaped reinforcing material (B2) is preferably 0.05 μm to 2 μm, more preferably 0.05 μm to 1 μm. The aspect ratio (maximum diameter / thickness) of the plate-shaped reinforcing material (B2) is preferably 20 to 400, more preferably 50 to 300.

[0056] The maximum diameter (major diameter), minor diameter, thickness, and aspect ratio of the plate-like reinforcing material (B2) can be calculated from the average by, for example, photographing a plurality of plate-like reinforcing materials (B2) with a scanning electron microscope (SEM), measuring their maximum diameter (major diameter), minor diameter, and thickness, and averaging them. For example, 300 plate-like reinforcing materials (B2) are arbitrarily selected from the SEM observation image, and the average major diameter obtained by integrating all of the maximum diameters (major diameters) and dividing by the number of pieces is taken as the maximum diameter (major diameter) of the plate-like reinforcing material (B2), and the average minor diameter obtained by integrating all of the minor diameters and dividing by the number is taken as the minor diameter of the plate-like reinforcing material (B2).

[0057] In addition, when it is difficult to measure the maximum diameter of the plate-like reinforcing material (B2), the average particle diameter of the plate-like reinforcing material (B2) may be measured. From the viewpoint of further improving machinability when cutting or cutting a cutting workpiece or when drilling a hole with a drill bit, the plate-like reinforcing material (B2) preferably has an average particle diameter of 0.01 μm to 25 μm, more preferably 0.05 μm to 20 μm.

[0058] The average particle size of the plate-like reinforcing material (B2) can be measured by a laser diffraction / scattering method. Specifically, the average particle size of the plate-like reinforcing material (B2) is the particle size at 50% cumulative volume in the particle size distribution measured by the laser diffraction / scattering method (volume-based cumulative 50% particle size), i.e., D 50(median diameter). This volume-based cumulative 50% particle diameter (D 50 ) is the particle size at which the cumulative value reaches 50% when the particle size distribution is calculated on a volume basis and the number of particles is counted from the smallest particle size on a cumulative curve with the total volume set to 100%.

[0059] Furthermore, in the reinforcing material (B), a treatment layer made of a surface treatment agent may be formed on the surface of the reinforcing material (B) for the purpose of further improving dispersibility in the resin composition and further improving adhesion to the thermoplastic resin (A).

[0060] The surface treatment agent is not particularly limited, but examples thereof include silane coupling agents, titanium coupling agents, etc. Among these, silane coupling agents are preferred, and amino-based silane coupling agents, epoxy-based silane coupling agents, or alkyl-based silane coupling agents are more preferred. The above surface treatment agents may be used alone or in combination of two or more.

[0061] Examples of amino-based silane coupling agents include N-2-(aminoethyl)-3-aminopropylmethyldimethoxysilane, N-2-(aminoethyl)-3-aminopropyltrimethoxysilane, 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-ethoxysilyl-N-(1,3-dimethylbutylidene)propylamine, N-phenyl-3-aminopropyltrimethoxysilane, and N-(vinylbenzyl)-2-aminoethyl-3-aminopropyltrimethoxysilane.

[0062] Examples of epoxy-based silane coupling agents include 3-glycidyloxypropyl(dimethoxy)methylsilane, 3-glycidyloxypropyltrimethoxysilane, diethoxy(3-glycidyloxypropyl)methylsilane, triethoxy(3-glycidyloxypropyl)silane, and 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane.

[0063] Examples of alkyl silane coupling agents include methyltrimethoxysilane, dimethyldimethoxysilane, trimethylmethoxysilane, methyltriethoxysilane, ethyltrimethoxysilane, n-propyltrimethoxysilane, isobutyltrimethoxysilane, isobutyltriethoxysilane, n-hexyltrimethoxysilane, n-hexyltriethoxysilane, cyclohexylmethyldimethoxysilane, n-octyltriethoxysilane, and n-decyltrimethoxysilane.

[0064] A conventionally known surface treatment method can be used as a method for forming a treatment layer made of a surface treatment agent on the surface of the reinforcing material (B). Examples of the method for forming a treatment layer made of a surface treatment agent include a wet method in which the surface treatment agent is dissolved in a solvent that promotes hydrolysis (e.g., water, alcohol, or a mixed solvent thereof) to prepare a solution, and the solution is sprayed onto the reinforcing material (B).

[0065] The amount of the surface treatment agent used when treating the surface of the reinforcing material (B) with the surface treatment agent is not particularly limited. In the case of a wet method, for example, a solution of the surface treatment agent may be sprayed so that the amount of the surface treatment agent is 0.1 to 20 parts by mass per 100 parts by mass of the reinforcing material (B).

[0066] In the cutting member of the present invention, the particle shape of the reinforcing material (B) is not particularly limited. However, from the viewpoint of further improving the drilling accuracy while suppressing the generation of burrs during drilling of the cutting member, it is preferable that the reinforcing material (B) contains either a fibrous reinforcing material (B1) or a plate-like reinforcing material (B2), and more preferably contains either a fibrous reinforcing material (B1) having a Mohs hardness of 2 or more and 5 or less and a plate-like reinforcing material (B2) having a Mohs hardness of 2 or more and 5 or less. In this case, at least a portion of the surface of either the fibrous reinforcing material (B1) or the plate-like reinforcing material (B2) may be covered with a treatment layer composed of a surface treatment agent.

[0067] In the present invention, the content of the reinforcing material (B) is preferably 0.1% by mass to 60% by mass, more preferably 5% by mass to 60% by mass, even more preferably 5% by mass to 55% by mass, particularly preferably 5% by mass to 45% by mass, even more particularly preferably 10% by mass to 40% by mass, most preferably 15% by mass to 40% by mass, and particularly most preferably 20% by mass to 35% by mass, relative to 100% by mass of the total amount of the resin composition.

[0068] By setting the content of the reinforcing material (B) within the above range, it is possible to further improve the drilling accuracy while suppressing the generation of burrs during drilling of the cutting workpiece.

[0069] (Other Additives) The resin composition used in the present invention may contain other additives such as inorganic fillers (such as barium sulfate) other than the reinforcing material (B), colorants (such as titanium dioxide and carbon black), laser direct structuring additives, conductive fillers (such as the reinforcing material (B)), antistatic agents, antioxidants, heat stabilizers, ultraviolet absorbers, light stabilizers, weather resistance agents, light resistance agents, release agents, lubricants, flow improvers, plasticizers, impact resistance modifiers, flame retardants (such as phosphazene compounds, phosphate ester compounds, and condensed phosphate ester compounds), drip prevention agents, nucleating agents (such as finely powdered talc), dispersants, vibration dampers, neutralizers, and antiblocking agents, to the extent that the preferred physical properties are not impaired. These may be used alone or in combination of two or more.

[0070] The colorant is not particularly limited as long as it can color the resin composition, and examples thereof include inorganic pigments, organic pigments, dyes, etc. From the viewpoint of further improving the heat resistance of the cutting workpiece, the colorant is preferably an inorganic pigment. Examples of inorganic pigments include carbon black, titanium dioxide, zinc white, red iron oxide, iron oxide pigments, ultramarine, cobalt blue, chromium oxide, titanium yellow, zinc-iron brown, spinel green, lead chromate pigments, cadmium pigments, copper-chromium black, copper-iron black, etc.

[0071] Examples of the conductive filler include carbons such as conductive carbon black and carbon fiber; inorganic fillers other than the reinforcing material (B) whose surfaces are coated with a conductive substance such as carbon or tin oxide / antimony oxide; and powders or fibers of iron, nickel, copper, silver, gold, aluminum, etc.

[0072] Examples of antistatic agents include anionic antistatic agents such as sodium alkylsulfonate, sodium alkylbenzenesulfonate, and alkylphosphate; cationic antistatic agents such as phosphonium alkylsulfonate, phosphonium alkylbenzenesulfonate, and quaternary ammonium salt compounds; nonionic antistatic agents such as polyoxyethylene derivatives, polyhydric alcohol derivatives, and alkylethanolamines; low-molecular-weight antistatic agents such as amphoteric antistatic agents such as polyoxyethylene derivatives, polyhydric alcohol derivatives, and alkylethanolamines; and polymeric antistatic agents such as polyethylene glycol methacrylate copolymers, polyether amides, polyether ester amides, polyether amide imides, polyalkylene oxide copolymers, polyethylene oxide-epichlorohydrin copolymers, and polyether esters. Among these, polymeric antistatic agents are preferred.

[0073] The amount of the other additives to be added is not particularly limited as long as it does not impair the desirable physical properties of the cutting workpiece of the present invention. The amount of the other additives to be added is usually 30% by mass or less, preferably 10% by mass or less, and more preferably 5% by mass or less, relative to 100% by mass of the total amount of the resin composition.

[0074] <Method for manufacturing a cutting-use member> (Method for manufacturing a resin composition) In the method for manufacturing a cutting-use member of the present invention, a resin composition is first manufactured. The resin composition can be manufactured by heating and mixing (particularly melt-kneading) a mixture containing a thermoplastic resin (A) and a reinforcing material (B), and optionally other additives. For melt-kneading, a known melt-kneading device such as a twin-screw extruder can be used.

[0075] Specifically, the resin composition can be produced by (1) a method of premixing the components in a mixer (such as a tumbler or a Henschel mixer), melt-kneading the components in a melt-kneading device, and pelletizing the components in a pelletizing means (such as a pelletizer); (2) a method of preparing a masterbatch of the desired components, mixing other components as needed, and melt-kneading the resulting mixture in a melt-kneading device to form pellets; or (3) a method of feeding the components to a melt-kneading device and pelletizing the resulting mixture. The resulting pellets may be formed into granules or particles by known methods.

[0076] The processing temperature in melt kneading is not particularly limited as long as it is a temperature at which the thermoplastic resin (A) can be melted. Usually, the cylinder temperature of the melt kneading device used for melt kneading is set slightly higher than the melting point of the resin, and adjusted to a range in which the resin composition can be melted at the actual cylinder temperature. In this way, the resin composition of the present invention that exhibits the desired effects is produced.

[0077] (Method for manufacturing and use of cutting workpiece) The obtained resin composition can be molded by a known resin molding method such as injection molding, insert molding, compression molding (press molding), blow molding, inflation molding, or extrusion molding depending on the type, use, and shape of the desired cutting workpiece (resin molded body). The molding method of the resin composition is preferably injection molding, compression molding, or extrusion molding from the viewpoint of molding a molded body having a plate-shaped portion as described below. The molding method of the resin composition is more preferably compression molding or extrusion molding from the viewpoint of further suppressing the occurrence of burrs, and compression molding is even more preferable. The molding method of the resin composition is preferably injection molding from the viewpoint of further shortening the processing time. In addition, in this case, the machinability parameters can be adjusted to a more suitable range, and the occurrence of burrs can be further suppressed or the processing can be completed in a shorter time. Furthermore, a method of combining the above molding methods can be used to mold the resin composition.

[0078] The cutting workpiece obtained by molding the resin composition has excellent heat resistance, dimensional stability, and cutting workability when cutting or cutting, or when drilling holes with a drill bit, and in particular, can improve drilling accuracy while suppressing the generation of burrs during drilling.

[0079] The cutting member obtained as described above satisfies the above-mentioned machinability parameters, which can be adjusted, for example, by changing the type and content of the thermoplastic resin (A) and the reinforcing material (B) contained in the resin composition constituting the cutting member, or by changing the molding method and molding conditions during production.

[0080] In the present invention, the moisture content of the cutting member obtained as described above before cutting or cutting is preferably 0.01% to 1.00% by mass. The moisture content is preferably 0.01% by mass or more, more preferably 0.05% by mass or more, and preferably 1.00% by mass or less, more preferably 0.50% by mass or less, and even more preferably 0.25% by mass or less.

[0081] The cutting member of the present invention is preferably a molded body having a plate-like portion, from the viewpoint of drilling a large number of precision holes used therefor in order to respond to the increasing precision associated with the miniaturization of semiconductors and parts. When the cutting member is a molded body having a plate-like portion, the shape of the molded body having a plate-like portion is preferably, for example, a plate-like portion (flat plate) having a thickness of more than 1.0 mm in a portion of the molded body, and may have shapes such as a round bar, pipe, or irregularly shaped product in addition to the plate-like portion (flat plate). From the viewpoint of the cutting processability of the cutting member, when the cutting member has a round bar shape other than a plate-like portion (flat plate), it is preferable that the diameter of the round bar-shaped portion exceeds 1.0 mm. Furthermore, when the cutting member has a pipe shape other than a plate-like portion (flat plate), it is preferable that the thickness of the pipe-shaped portion exceeds 1.0 mm. Furthermore, when the cutting member has an irregularly shaped portion other than a plate-like portion (flat plate), it is preferable that the thickest part of the irregularly shaped portion has a thickness of more than 1.0 mm. Here, the irregularly shaped portion refers to a portion having an arbitrary cross-sectional shape different from the cross-sectional shapes of a plate, a round bar, a pipe, etc. When the irregularly shaped portion is composed of a thick-walled portion and a thin-walled portion, such as a concave or convex portion, it is preferable that the thickness of the thin-walled portion exceeds 0.5 mm from the viewpoint of the cutting workability of the cutting workpiece. Of course, the cutting workpiece may be composed of only a plate-shaped portion (flat plate).

[0082] The cutting process member of the present invention can be subjected to cutting processes (machining processes) such as cutting, sawing, drilling, etc. to obtain various secondary molded products such as resin parts. Specific applications in the electrical and electronic fields include wafer carriers, wafer cassettes, spin chucks, tote bins, wafer boats, IC chip trays, IC chip carriers, IC transport tubes, semiconductor inspection sockets (IC test sockets), burn-in sockets, pin grid array sockets, quad flat packages, leadless chip carriers, dual in-line packages, small outline packages, reel packing, inspection jigs for chip components such as multilayer ceramic capacitors (MLCCs), various cases, storage trays, transport device components, and magnetic card readers.

[0083] The cutting processing member of the present invention can be particularly advantageously used in devices that use contact probe pins where burrs can cause malfunction or where precision in drilling is required, and can be particularly advantageously used as a member having a plate-like portion used in the manufacture of semiconductor inspection jigs.

[0084] Examples of devices that use such contact probe pins include semiconductor inspection jigs such as semiconductor inspection sockets (IC test sockets), inspection jigs for chip components such as multilayer ceramic capacitors (MLCCs), printed circuit board inspection jigs, flexible printed circuit board inspection jigs, TAB (Tape Automated Bonding) tape inspection jigs, and wafer inspection probe cards.

[0085] <Method of using the cutting member> The cutting member of the present invention can be used, for example, in a method for suppressing the generation of burrs during drilling of a plate-like object. In this method, when the cutting member of the present invention has the above-described plate-like portion, drilling of the plate-like portion can be performed to suppress the generation of burrs during drilling. The cutting member of the present invention can also be used in a method for improving the drilling accuracy during drilling of a plate-like object. In this method, when the cutting member of the present invention has the above-described plate-like portion, drilling of the plate-like portion can be performed to improve the drilling accuracy.

[0086] The present invention will be specifically described below based on examples and comparative examples, but the present invention is not limited thereto. The raw materials used in the examples and comparative examples are as follows.

[0087] <Raw materials> (amorphous thermoplastic resin) Polyetherimide (PEI) resin 1: melt viscosity 720 Pa·s (380°C, shear rate 122 sec -1 ), glass transition temperature 217°C, manufactured by SABIC, trade name "Ultem 1010-1000" Polyetherimide (PEI) resin 2: melt viscosity 1120 Pa·s (380°C, shear rate 122 sec -1), glass transition temperature 217°C, manufactured by SABIC, trade name "Ultem 1000-1000" Polyetherimide (PEI) resin 3: melt viscosity 340 Pa·s (380°C, shear rate 122 sec -1 ), glass transition temperature 217°C, manufactured by SABIC, trade name "Ultem1040A-1000" Polyethersulfone (PES) resin: melt viscosity 220 Pa·s (380°C, shear rate 122 sec -1 ), glass transition temperature 225°C, manufactured by BASF, product name "Ultrason E0510"

[0088] (Inorganic reinforcing materials) Potassium titanate fiber: fibrous potassium hexatitanate, average fiber length 15 μm, average fiber diameter 0.5 μm, Mohs hardness: 4 (manufactured by Otsuka Chemical Co., Ltd., trade name "Tismo N102") Wollastonite fiber: average fiber length 25 μm, average fiber diameter 3.5 μm, aspect ratio 7.1, Mohs hardness: 4.5 (manufactured by Otsuka Chemical Co., Ltd., trade name "Bystal K101") Titania fiber: monoclinic titania fiber coated with a conductive material consisting of tin oxide / antimony oxide, average fiber length 12 μm, average fiber diameter 0.4 μm, Mohs hardness: 5 Glass fiber: average fiber length 3 mm, average fiber diameter 16 μm, Mohs hardness: 6 (manufactured by Nippon Electric Glass Co., Ltd., trade name "ECS03 T-717") Mica: major axis (maximum diameter) 6.0 μm, thickness 0.1 μm, aspect ratio 60, Mohs hardness: 2.8

[0089] (Other additives) Colorant: a mixture of carbon black (50% by mass) and low-molecular-weight polyethylene (50% by mass), manufactured by Ohta Chemical Industry Co., Ltd., trade name "EB-15 Grain Black" Additive: a heat-resistant stabilizer, manufactured by Sumitomo Chemical Co., Ltd., trade name "Sumilizer GA-80"

[0090] (Measurement of Melt Viscosity) The melt viscosity of the polyetherimide (PEI) resin was measured using a melt viscosity measuring device (manufactured by Toyo Seiki Seisakusho, product name "Capirograph 1D") at a temperature (380°C) 163°C higher than the glass transition temperature of the polyetherimide (PEI) resin, and the shear rate was 122 sec. -1 The measurement was carried out using a capillary rheometer of 1.0 mmφ×10 mm under the conditions of

[0091] The melt viscosity of the polyethersulfone (PES) resin was measured using a melt viscosity measuring device (manufactured by Toyo Seiki Seisakusho, product name "Capirograph 1D") at a temperature (380°C) 155°C higher than the glass transition temperature of the polyethersulfone (PES) resin, and the shear rate was 122 sec. -1 The measurement was carried out using a capillary rheometer of 1.0 mmφ×10 mm under the conditions of

[0092] (Measurement of Glass Transition Temperature) The glass transition temperatures of polyetherimide (PEI) resin and polyethersulfone (PES) resin were measured in accordance with JIS-K7121 using a differential scanning calorimeter (manufactured by Hitachi High-Tech Science Corporation, product name "DSC7000X") by placing 10 mg of a sample in a measurement aluminum cell, raising the temperature from room temperature to 50°C at a heating rate of 10°C / min under a nitrogen flow of 100 ml / min, holding at 50°C for 5 minutes, and then raising the temperature to 400°C at a heating rate of 10°C / min.

[0093] (Average Fiber Length, Average Fiber Diameter, and Aspect Ratio) The average fiber length, average fiber diameter, and aspect ratio of potassium titanate fibers or wollastonite fibers were determined from the average values ​​of 300 randomly selected fibers measured by observation with a scanning electron microscope (SEM).

[0094] <Production of Resin Compositions and Evaluation Samples> (Examples 1 to 10 and Comparative Examples 1 and 2) The resin compositions were melt-kneaded using a twin-screw extruder in the blending ratios shown in Tables 1 and 2 to produce pellets (resin compositions). The cylinder temperature of the twin-screw extruder was 100°C to 160°C higher than the glass transition temperature of the thermoplastic resin.

[0095] The obtained pellets were molded into JIS test pieces and business card-shaped plates (test pieces) for measuring mechanical properties, deflection temperature under load, fracture toughness, cutting resistance, and cutting time, and used as evaluation samples (resin molded articles) for cutting components. The pellets were molded by injection molding in Examples 1 to 4, 5, and 9 and Comparative Examples 1 and 2. Compression molding (press molding) was used in Examples 6, 8, and 10. Extrusion molding was used in Example 7. In injection molding, the cylinder temperature of the molding machine was 100°C or more higher than the glass transition temperature of the thermoplastic resin, and the mold temperature was approximately 30°C higher than the glass transition temperature of the thermoplastic resin. In press molding, the mold temperature of the molding machine was 90°C or more higher than the glass transition temperature of the thermoplastic resin. After heating and holding for a certain period of time, the melt was pressed for 2 minutes under a load of 5 tons. The removal temperature after cooling was approximately 50°C. In addition, during extrusion molding, the cylinder temperature was about 100°C higher than the glass transition temperature of the thermoplastic resin, and the mold temperature was about 60°C higher than the glass transition temperature of the thermoplastic resin. Evaluation samples for the compression-molded (press-molded) and extrusion-molded products were obtained by cutting test pieces from plate materials with a bench circular saw. The dimensions of the evaluation samples were adjusted to match those of the injection-molded products. Hereinafter, the evaluation samples for the compression-molded and extrusion-molded products prepared in this manner will be collectively referred to as JIS test pieces.

[0096] <Evaluation> The following evaluations were carried out on the evaluation samples (test pieces) or resin compositions prepared in Examples 1 to 10 and Comparative Examples 1 and 2. The results are shown in Tables 1 and 2 below.

[0097] (Flexural Strength, Flexural Modulus) In accordance with JIS K7171, the flexural strength and flexural modulus were measured for JIS test pieces (length: 10.1 mm, width: 110 mm, thickness: 4.1 mm) by a three-point bending test with a support distance of 60 mm using an Autograph AG-5000 (manufactured by Shimadzu Corporation).

[0098] (Notched Izod (IZOD) Impact Value) In accordance with JIS K7110, the notched Izod (IZOD) impact value was measured for a JIS test piece (length 13 mm, width 63 mm, thickness 4 mm).

[0099] (Melt Viscosity) The melt viscosity of the resin compositions of Examples 1 to 10 and Comparative Examples 1 and 2 was measured at a shear rate of 122 sec using a melt viscosity measuring device (manufactured by Toyo Seiki Seisakusho, trade name "Capirograph 1D"). -1 The measurement was carried out under the conditions of a temperature of 380°C.

[0100] (Deflection temperature under load) In accordance with JIS K7191A, an edgewise test was carried out using an HDT measuring device (manufactured by Toyo Seiki Seisakusho, trade name "HDT.VSPT.TESTER S-3M") to measure the deflection temperature under load (°C). The test conditions were as follows: a bending test piece (length: 10.1 mm, width: 110 mm, thickness: 4.1 mm) as a JIS test piece; the deflection temperature under load (°C) was determined for each test piece in accordance with JIS K7191A. The starting temperature was 50°C, the heating rate was 120°C / h, the load was 1.8 MPa, and the distance between supports was 100 mm.

[0101] (Fracture toughness K1c) For the JIS test pieces (length 13 mm, width 63 mm, thickness 4 mm) of the examples and comparative examples, fracture toughness K1c was measured using a fracture toughness measuring device (manufactured by Shimadzu Corporation, trade name "Mechanical Testing Machine Autograph AGS-J") in accordance with ASTM D5045-93. Fracture toughness K1c indicates resistance to crack progression, and a larger value indicates higher fracture toughness.

[0102] (Cutting Parameter) The cutting parameter defined by the following formula (1) was calculated from the fracture toughness K1c and flexural modulus of the evaluation sample.

[0103] Machinability parameter = (fracture toughness K1c / flexural modulus) × 10 5 ...Formula (1)

[0104] (Cutting Resistance and Cutting Time) Each of the business card-shaped plates (50 mm long, 90 mm wide, 3 mm thick) of the Examples and Comparative Examples was cut into a 30 mm square to prepare a flat plate for evaluating machinability.

[0105] In addition, a drill fixing jig was fabricated to hold a drill (manufactured by Saito Manufacturing Co., Ltd., product number "ADR-1.0") used in the cutting evaluation. The shape of the drill fixing jig fabricated is as shown in Figure 1.

[0106] The machinability evaluation plate and drill fixture were attached to a friction and wear tester (manufactured by A&D Co., Ltd., model "EFM-3-H"), and cutting evaluation was initiated at a load of 1100 g and a rotational speed of 0.3 m / s. The cutting resistance and cutting time were measured from when the drill entered the plate until it penetrated through. At this time, the machinability evaluation plate was attached to the rotating side, and the drill fixture was attached to the fixed side.

[0107] In addition, for those pieces in which the hole did not penetrate even after 1 minute or more had passed since the start of the cutting evaluation, the entry "The hole did not penetrate" was entered in the cutting time column of Table 1, and the piece was rated as unfavorable in terms of cutting workability.

[0108] (Amount of burrs) After measuring the cutting resistance and cutting time, the machinability evaluation plate was visually observed using an optical microscope (manufactured by Keyence Corporation, product number "One Shot 3D Measuring Macroscope VR-3000") with a magnification of 150x to evaluate the drilling accuracy after drilling, and the maximum length (longitudinal) of burrs generated around the holes after drilling and the number of burrs.

[0109] The evaluation criteria for the drilling accuracy after drilling were as follows: no burrs were observed (burr count: 0) was rated A, the maximum length (longitudinal) of the observed burrs was 50 μm or less and the number of burrs was 1 was rated B, and the maximum length (longitudinal) of the observed burrs was more than 50 μm and the number of burrs was 2 or more was rated C. The results are shown in Tables 1 and 2.

[0110]

[0111]

[0112] As is clear from Tables 1 and 2, in the cutting processing members of Examples 1 to 10, the Mohs hardness of the inorganic reinforcing material is 5 or less, and the machinability parameter is 15m or less.1/2 ~100m 1/2 Since the cutting resistance is within the above range, it has been confirmed that the cutting workability is excellent, such as cutting time can be shortened, and the occurrence of burrs can be suppressed.

[0113] On the other hand, in the cutting processing members of Comparative Examples 1 and 2, the machinability parameters were 1/2 Since the Mohs hardness of the inorganic reinforcing material is greater than 5, the hole did not penetrate under the above cutting conditions.

[0114] As described above, the cutting member of the present invention has excellent cutting workability and can suppress the generation of burrs during cutting work, and therefore can be suitably used in devices that use contact probe pins where burrs can cause malfunction and require high drilling accuracy, and can be suitably used in semiconductor inspection jigs in particular.

Claims

1. A cutting member made of a molded body of a resin composition containing a thermoplastic resin (A) and a reinforcing material (B), wherein the thermoplastic resin (A) is an amorphous thermoplastic resin, the reinforcing material (B) is an inorganic reinforcing material having a Mohs hardness of 5 or less, and the cutting parameter defined by the following formula (1) from the fracture toughness K1c and bending modulus of the cutting member is 15m 1/2 ~100m 1/2 A cutting processing member, characterized in that: Cutting parameter = (fracture toughness K1c / flexural modulus) x 10 5 ...Formula (1) 2. A member for cutting processing according to claim 1, wherein the member for cutting processing has a deflection temperature under load (HDT) of 150°C or higher at a load of 1.8 MPa.

3. A member for cutting processing according to claim 1 or 2, wherein the thermoplastic resin (A) is at least one selected from the group consisting of polyetherimide resins, polyethersulfone resins, and polyamideimide resins.

4. A member for cutting processing according to claim 1 or 2, wherein the aspect ratio of the reinforcing material (B) is 3 to 100.

5. A member for cutting processing according to claim 1 or 2, wherein the reinforcing material (B) is a fibrous reinforcing material having an average fiber length of 1 μm to 300 μm.

6. A member for cutting processing according to claim 1 or 2, wherein the reinforcing material (B) is at least one type of fiber selected from the group consisting of potassium titanate fiber, wollastonite fiber, and titania fiber.

7. A cutting processing component according to claim 1 or claim 2, wherein the content of said thermoplastic resin (A) is 20% by mass to 95% by mass, and the content of said reinforcing material (B) is 5% by mass to 55% by mass, in a total amount of 100% by mass of said resin composition.

8. The thermoplastic resin (A) is a polyetherimide resin, and the shear rate of the resin composition is 122 sec -1 The member for cutting processing according to claim 1 or 2, wherein the melt viscosity at a temperature of 380° C. is 300 Pa·s to 2600 Pa·s.

9. The thermoplastic resin (A) is a polyethersulfone resin, and the shear rate of the resin composition is 122 sec -1 The member for cutting processing according to claim 1 or 2, wherein the melt viscosity at a temperature of 380° C. is 230 Pa·s to 550 Pa·s.

10. A cutting processing member according to claim 1 or 2, which is a compression molded or extrusion molded body of the resin composition containing the thermoplastic resin (A) and the reinforcing material (B).

11. A cutting processing component according to claim 1 or 2, which is an injection molded article of the resin composition containing the thermoplastic resin (A) and the reinforcing material (B).

12. A cutting processing member according to claim 1 or 2, which is a molded body having a plate-shaped portion.

13. The cutting processing member according to claim 1 or 2, which is used for at least one selected from the group consisting of a socket for semiconductor inspection, a probe card for wafer inspection, a printed circuit board inspection jig, a TAB (Tape Automated Bonding) tape inspection jig, a flexible printed circuit board inspection jig, and an inspection jig for chip components.

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