Flow controller

Abstract

A flow controller, comprising a valve assembly, a flow measurement assembly and a control circuit board. The valve assembly comprises a valve body, a valve element and a motor used for driving the valve element to rotate; a flow channel is formed in the valve body; the valve element comprises a valve element body and a connecting body; the valve element body is installed in the flow channel; the connecting body extends out of the flow channel and is connected to the motor; the flow measurement assembly comprises an impeller and a magnetic induction chip used for measuring the rotating speed of the impeller, the impeller is installed in the flow channel and located on the side of the valve element body close to an inlet of the flow channel, and the magnetic induction chip is installed outside the flow channel; and the control circuit board is communicatively connected to the magnetic induction chip and the motor, so as to control the motor, on the basis of a measurement signal of the magnetic induction chip, to drive the valve element to rotate. The present application can rapidly and accurately control the volume of liquid flow, and can also recover the sealing pressure by moving a one-way lock washer by a preset distance towards the valve element body.

Description

A flow controller

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on December 21, 2023, with application number 202311774644.1 and invention name “A Flow Controller”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the technical field of semiconductor wafer cutting, and in particular to a flow controller. Background Art

[0003] The semiconductor wafer dicing process requires controlling liquid flow rate, and the accuracy of liquid flow control has a significant impact on the processing accuracy of semiconductor wafers. How to accurately control the liquid flow rate is a technical problem that needs to be solved by those skilled in the art. Summary of the Invention

[0004] One object of the present application is to provide a flow controller to accurately control the flow rate of liquid.

[0005] The flow controller provided in this application includes:

[0006] A valve assembly, the valve assembly comprising a valve body, a valve core, and a motor for driving the valve core to rotate, the valve body having a flow channel therein, the valve core comprising a valve core body and a connector, the valve core body being mounted within the flow channel, the connector extending outside the flow channel and connected to the motor;

[0007] a flow detection assembly, the flow detection assembly comprising an impeller and a magnetic induction chip for detecting the rotational speed of the impeller, the impeller being mounted in the flow channel and located on a side of the valve core body close to the flow channel inlet, and the magnetic induction chip being mounted outside the flow channel;

[0008] A control circuit board is communicatively connected with the magnetic induction chip and the motor to control the motor to drive the valve core to rotate according to a detection signal from the magnetic induction chip.

[0009] In a possible implementation of the flow controller, the valve body is provided with a mounting groove at a position corresponding to the area where the impeller is located, a thin wall is formed between the mounting groove and the flow channel, and the magnetic induction chip is installed in the mounting groove to detect the rotational speed of the impeller through the thin wall.

[0010] In a possible embodiment of the flow controller, the flow detection assembly includes a guide tube and a turbine, the guide tube is installed in the flow channel and is located on the side of the valve core body close to the flow channel inlet, the impeller is installed in the guide tube, the turbine is installed on the side of the guide tube close to the flow channel inlet, and a guide hole is provided on the side of the guide tube away from the flow channel inlet, the turbine and the guide tube are each provided with a connecting hole, and the two ends of the impeller axle are respectively inserted into the two connecting holes.

[0011] In a possible embodiment of the flow controller, the flow detection assembly includes a rectifier block, which is installed in the flow channel and located on the side of the turbine close to the flow channel inlet. A rectifier channel is provided inside the rectifier block, and the rectifier channel includes a tapered channel, and the inner diameter of the tapered channel gradually decreases in the direction away from the flow channel inlet.

[0012] In a possible embodiment of the flow controller, the connecting body includes a plurality of split bodies, each of the split bodies is provided with a groove, the split bodies are assembled together, the grooves of the split bodies are matched to form a motor connecting hole, the output shaft of the motor extends into the motor connecting hole, and the side walls of the grooves of the split bodies hold the output shaft of the motor tightly.

[0013] In a possible embodiment of the flow controller, the valve assembly includes an induction magnet, the connector is provided with an induction magnet connecting hole, the induction magnet is assembled in the induction magnet connecting hole, a fully open magnetic induction chip and a fully closed magnetic induction chip are provided on the control circuit board, the fully open magnetic induction chip and the fully closed magnetic induction chip are arranged at 90 degree intervals on the circumference of the rotation center line of the valve core, when the valve core rotates to the fully open position, the induction magnet is opposite to the fully open magnetic induction chip, and when the valve core rotates to the fully closed position, the induction magnet is opposite to the fully closed magnetic induction chip.

[0014] In a possible embodiment of the flow controller, the valve assembly includes an inlet pipe, an outlet pipe, an inlet sealing ring and an outlet sealing ring, the inlet pipe is connected to the inlet of the flow channel, the inlet sealing ring is compressed between one end face of the inlet pipe and the inlet end face of the valve body, the outlet pipe is connected to the outlet of the flow channel, and the outlet sealing ring is compressed between one end face of the outlet pipe and the outlet end face of the valve body.

[0015] In a possible embodiment of the flow controller, the flow controller includes a shell, which is assembled with the valve body, and the shell and the valve body together enclose a accommodating cavity, and the main body of the motor, the magnetic induction chip, the control circuit board and the end of the connector away from the flow channel are all located in the accommodating cavity.

[0016] In a possible embodiment of the flow controller, the valve assembly includes two sealing parts, the two sealing parts are installed in the flow channel, the two sealing parts are respectively located on opposite sides of the valve core body, and the two sealing parts each include a sealing valve seat and a one-way check gasket; the one-way check gasket is located on the side of the sealing valve seat away from the valve core body, the one-way check gasket presses the sealing valve seat so that the sealing valve seat presses the valve core body, and the one-way check gasket can move unidirectionally in the flow channel to approach the valve core body.

[0017] In a possible embodiment of the flow controller, both of the sealing parts include one or more elastic rings, which are compressed between the one-way check gasket and the sealing valve seat, and barrier gaskets are arranged between adjacent elastic rings and between the elastic rings and the one-way check gasket.

[0018] The flow controller provided in the present application can quickly and accurately control the liquid flow rate; it can restore the sealing pressure by moving the one-way check gasket a predetermined distance toward the valve core body, which effectively reduces the use cost compared with the previous method of restoring the sealing pressure by replacing related parts; a certain sealing pressure is always maintained between the sealing valve seat and the valve core body during the valve switching process, thereby ensuring the sealing effect; the overall integration is high; and the processing cost is low. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] FIG1 is a cross-sectional view of an embodiment of a flow controller provided by the present application;

[0020] FIG2 is an enlarged view of a portion of the structure of the flow detection assembly in FIG1 ;

[0021] FIG3 is an enlarged view of a portion of the structure of the valve assembly in FIG1 ;

[0022] FIG4 is a perspective view of an embodiment of a one-way stop washer;

[0023] The following are the descriptions of the reference numerals:

[0024] 10 valve assembly, 101 valve body, A flow channel, B mounting groove, C thin wall, 102 valve core, 1021 valve core body, 1022 connector, 1022a split body, 103 motor, 1031 output shaft, 1032 body, 104 inlet pipe, 105 inlet sealing ring, 106 outlet pipe, 107 outlet sealing ring, 108 induction magnet, 109 sealing part, 1091 sealing valve seat, 1092 one-way check washer, 1092a washer body, 1092b convex tooth, 1093 elastic ring, 1094 barrier washer;

[0025] 20 flow detection assembly, 201 impeller, 2011 blade, 2012 axle, 202 magnetic induction chip, 203 guide tube, 2031 guide hole, 204 fan-shaped turbine, 205 rectifier block, 2051 tapered channel, 2052 equal-diameter channel, 206 elastic compensation ring; 30 control circuit board; 40 housing; 50 light guide lamp post. DETAILED DESCRIPTION

[0026] In order to enable those skilled in the art to better understand the technical solution of the present invention, the technical solution of the present invention is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0027] As shown in FIG1 , the present application provides a flow controller, which includes: a valve assembly 10 , a flow detection assembly 20 and a control circuit board 30 .

[0028] The valve assembly 10 includes a valve body 101, a valve core 102, and a motor 103 for rotating the valve core 102. A flow channel A is defined within the valve body 101. The valve core 102 includes a valve core body 1021 and a connector 1022. The valve core body 1021 is mounted within the flow channel A. The connector 1022 extends outside the flow channel A and connects to the motor 103, allowing the motor 103 to rotate the valve core 102 to adjust the opening of the valve assembly 10.

[0029] Among them, the flow detection component 20 includes an impeller 201 and a magnetic induction chip 202. The impeller 201 is installed in the flow channel A and is located on the side of the valve core body 1021 close to the inlet of the flow channel A. The magnetic induction chip 202 is installed outside the flow channel A and is used to detect the rotation speed of the impeller 201. More specifically, when the impeller 201 rotates, a pulse signal is generated on the magnetic induction chip 202. The number of pulse signals generated on the magnetic induction chip 202 for each rotation of the impeller 201 is certain, so the number of rotations of the impeller 201 can be obtained based on the number of pulse signals, and then the rotation speed of the impeller 201 can be obtained. Since the rotation speed of the impeller 201 is positively correlated with the liquid flow rate, the high or low rotation speed of the impeller 201 can reflect the size of the liquid flow rate.

[0030] The control circuit board 30 is in communication with the magnetic induction chip 202 to receive detection signals from the magnetic induction chip 202, thereby generating control instructions based on the detection signals from the magnetic induction chip 202. The control circuit board 30 is also in communication with the motor 103 to transmit the control instructions to the motor 103 and control the motor 103. If the current liquid flow rate is less than the target flow rate, the control circuit board 30 will control the motor 103 to drive the valve core 102 to rotate in the valve opening direction to increase the opening of the valve assembly 10. If the current liquid flow rate is greater than the target flow rate, the control circuit board 30 will control the motor 103 to drive the valve core 102 to rotate in the valve closing direction to reduce the opening of the valve assembly 10 or close the valve assembly 10.

[0031] The flow controller of the above structure can detect the liquid flow rate in real time and can adjust the liquid flow rate in real time according to the detection result, thereby realizing closed-loop control of the liquid flow rate.

[0032] In the flow controller of the above structure, since the impeller 201 is located on the side of the valve core body 1021 close to the inlet of the flow channel A, the liquid flow is not disturbed by the valve core body 1021 when flowing through the impeller 201, and the magnetic induction chip 202 is installed outside the flow channel A, so the magnetic induction chip 202 is not disturbed by the liquid flow. Therefore, the detection accuracy of the impeller 201 rotation speed is relatively high, and correspondingly, the control accuracy of the liquid flow rate is relatively high.

[0033] In one embodiment, as shown in FIG1 , the valve body 101 is provided with a mounting groove B in the area corresponding to the impeller 201, with a thin wall C formed between the mounting groove B and the flow channel A. A magnetic sensing chip 202 is mounted within the mounting groove B to detect the rotational speed of the impeller 201 across the thin wall C. This design allows the magnetic sensing chip 202 to sensitively respond to the rotation of the impeller 201, thereby rapidly detecting the rotational speed of the impeller 201. Specifically, the magnetic sensing chip 202 can quickly detect the rotational speed of the impeller 201.

[0034] In one embodiment, as shown in FIG2 , the blades 2011 of the impeller 201 are straight blades extending in the radial direction. Compared with spiral blades, straight blades are simpler to process and are more conducive to improving the detection accuracy of the rotation speed of the impeller 201 .

[0035] In one embodiment, as shown in Figures 1 and 2, the flow detection assembly 20 further includes a guide tube 203 and a turbine 204. The guide tube 203 is installed in the flow channel A and is located on the side of the valve core body 1021 close to the inlet of the flow channel A. The turbine 204 is installed on the side of the guide tube 203 close to the inlet of the flow channel A. The impeller 201 is installed in the guide tube 203, and a guide hole 2031 is provided on the side of the guide tube 203 away from the inlet of the flow channel A. The guide tube 203 and the turbine 204 each have a connecting hole, and the two ends of the wheel shaft 2012 of the impeller 201 are inserted into these two connecting holes. More specifically, the turbine 204 can be a fan-shaped turbine. The turbine 204 can guide the liquid flow into a spiral flow in advance, so that when the liquid flow flows through the impeller 201, it can more easily impact the rotation of the impeller 201, so that the rotation speed of the impeller 201 can more accurately reflect the liquid flow rate. The guide hole 2031 can guide the liquid flow through the impeller 201 into a flat flow. In this way, the liquid can flow smoothly toward the valve core body 1021 without easily impacting the valve core body 1021, which helps to extend the service life of the valve core body 1021. In addition, the guide cylinder 203 and the turbine 204 provide support for the impeller 201, allowing the impeller 201 to be securely mounted in the flow channel A in a rotatable manner.

[0036] In one embodiment, as shown in Figures 1 and 2, the flow detection component 20 further includes a rectifying block 205. The rectifying block 205 is installed in the flow channel A and is located on the side of the turbine 204 close to the inlet of the flow channel A. A rectifying channel is provided inside the rectifying block 205, and the rectifying channel includes a tapered channel 2051, and the inner diameter of the tapered channel 2051 gradually decreases in the direction gradually away from the inlet of the flow channel A. In this way, the liquid flow can be concentrated to flow to the central area of ​​the turbine 204, so that it can be better guided by the turbine 204 into a spiral flow, thereby further improving the detection accuracy of the liquid flow rate. More specifically, the rectifying channel can also include an equal-diameter channel 2052, which is connected to the small-diameter end of the tapered channel 2051 and the diameter of the equal-diameter channel 2052 is equal to the minimum diameter of the tapered channel 2051.

[0037] In one embodiment, the valve body 101 is formed by 3D printing. This molding process has low processing costs, but the dimensional deviation is larger than that of fine processing. Therefore, in order to compensate for the dimensional deviation, an elastic compensation ring 206 can be set between the guide tube 203 and the step surface in the flow channel A of the valve body 101 for stopping the guide tube 203, and between the rectifier block 205 and the turbine 204.

[0038] In one embodiment, as shown in FIG1 , the connector 1022 includes a plurality of split bodies 1022a (two in the figure, but not limited to two). Each split body 1022a is provided with a groove. The split bodies 1022a are assembled together, and the assembly method can be assembled using threaded fasteners. Of course, the assembly method is not limited to this. The grooves of the split bodies 1022a are matched to form a motor connection hole. The output shaft 1031 of the motor 103 extends into the motor connection hole, and the side walls of the grooves of the split bodies 1022a hold the output shaft 1031 of the motor 103 tightly. With this design, there is no gap between the output shaft 1031 of the motor 103 and the connector 1022. Therefore, the rotation amount of the output shaft 1031 of the motor 103 can be completely converted into the rotation amount of the valve core 102, thereby improving the control accuracy of the liquid flow rate.

[0039] In one embodiment, as shown in Figure 1, the valve assembly 10 includes an inlet pipe 104, an outlet pipe 106, an inlet sealing ring 105 and an outlet sealing ring 107. The inlet pipe 104 is connected to the inlet of the flow channel A, and the inlet sealing ring 105 is compressed between the end face of one end of the inlet pipe 104 and the inlet end face of the valve body 101. The outlet pipe 106 is connected to the outlet of the flow channel A, and the outlet sealing ring 107 is compressed between the end face of one end of the outlet pipe 106 and the outlet end face of the valve body 101.

[0040] In one embodiment, as shown in FIG1 , the valve assembly 10 includes an induction magnet 108, and the connector 1022 is provided with an induction magnet connection hole, in which the induction magnet 108 is assembled. A fully open magnetic induction chip and a fully closed magnetic induction chip are provided on the control circuit board 30. The fully open magnetic induction chip and the fully closed magnetic induction chip are arranged at 90-degree intervals on the circumference of the rotation center line of the valve core 102. When the valve core 102 rotates to the fully open position, the induction magnet 108 is directly opposite to the fully open magnetic induction chip. When the valve core 102 rotates to the fully closed position, the induction magnet 108 is directly opposite to the fully closed magnetic induction chip. This design can detect the position of the valve core 102 through magnetic induction, ensuring that the valve core 102 rotates within the range of the fully open position and the fully closed position. Moreover, since the induction magnet 108 is assembled with the valve core 102, the sensed position of the valve core 102 is very accurate, thereby improving the control accuracy of the liquid flow rate.

[0041] In one embodiment, as shown in FIG1 , the flow controller includes a housing 40, which is assembled with a valve body 101. The housing 40 and the valve body 101 together enclose a receiving chamber. The main body 1032 of the motor 103, the magnetic induction chip 202, the control circuit board 30, and the end of the connector 1022 away from the flow channel A (the lower end in the figure) are all located in the receiving chamber. It should be noted that the space in the mounting slot B for mounting the magnetic induction chip 202 is also part of the receiving chamber. This design makes the flow controller highly integrated as a whole and more convenient to use.

[0042] In one embodiment, as shown in FIG1 , the flow controller includes a light guide lamp post 50 , and an indicator light for indicating the current switch state of the valve assembly 10 is provided on the control circuit board 30 . One end of the light guide lamp post 50 is inserted into the housing 40 and faces the indicator light, and the other end of the light guide lamp post 50 extends outside the housing 40 to guide the light of the indicator light outside the housing 40 , so that the current switch state of the valve assembly 10 can be intuitively seen from the outside, which is more convenient to use.

[0043] In one embodiment, as shown in FIG. 1 , the valve assembly 10 includes two sealing portions 109 . The two sealing portions 109 are installed in the flow channel A. The two sealing portions 109 are located on opposite sides of the valve core body 1021 .

[0044] As shown in Figure 3, both sealing portions 109 include a sealing valve seat 1091 and a one-way check washer 1092. The one-way check washer 1092 is located on the side of the sealing valve seat 1091 away from the valve core body 1021. The one-way check washer 1092 presses against the sealing valve seat 1091, causing the sealing valve seat 1091 to press against the valve core body 1021, thereby achieving a seal.

[0045] The one-way check gasket 1092 can move unidirectionally in the flow channel A to approach the valve core body 1021, that is, the one-way check gasket 1092 can only move along the flow channel A in the direction close to the valve core body 1021, and cannot move along the flow channel A in the direction away from the valve core body 1021.

[0046] Because the one-way check washer 1092 cannot move along the flow channel A away from the valve core body 1021, it can reliably press against the sealing valve seat 1091, preventing the sealing valve seat 1091 from moving away from the valve core body 1021, thereby ensuring sealing reliability. Because the one-way check washer 1092 can move along the flow channel A away from the valve core body 1021, when the contact area between the sealing valve seat 1091 and the valve core body 1021 wears and causes the sealing pressure to fall below the lower limit, the sealing pressure can be restored by moving the one-way check washer 1092 a predetermined distance toward the valve core body 1021. Compared with the previous method of restoring the sealing pressure by replacing related parts, the cost of use is effectively reduced.

[0047] In one embodiment, as shown in FIG4 , the one-way check washer 1092 includes a washer body 1092a and a protruding tooth 1092b. The protruding tooth 1092b protrudes from the outer peripheral edge of the washer body 1092a. The protruding tooth 1092b contacts the side wall of the flow channel A. The protruding tooth 1092b is inclined relative to the washer body 1092a toward the side away from the valve core body 1021. In this way, when the one-way check washer 1092 tends to move away from the valve core body 1021, the inclination angle of the protruding tooth 1092b will decrease, and the radial dimension of the check washer will increase, so that the protruding tooth 1092b will contact the side wall of the flow channel A more closely, thereby preventing the one-way check washer 1092 from moving away from the valve core body 1021. When the one-way check washer 1092 tends to move toward the valve core body 1021, the inclination angle of the protruding teeth 1092b increases, and the radial dimension of the one-way check washer 1092 decreases, so that the protruding teeth 1092b disengage from the side wall of the flow channel A, thereby allowing the one-way check washer 1092 to move toward the valve core body 1021. The one-way check washer 1092 of this structure is simple in structure and low in manufacturing cost.

[0048] In one embodiment, as shown in FIG3 , both sealing portions 109 include one or more elastic rings 1093 . The elastic rings 1093 are compressed between the one-way check washer 1092 and the sealing valve seat 1091 . That is, the elastic rings 1093 are located between the one-way check washer 1092 and the sealing valve seat 1091 and are compressed to a certain extent. In the figure, both sealing portions 109 include two elastic rings 1093 , but the number is not limited to two. Furthermore, the number of elastic rings 1093 in the two sealing portions 109 can be the same or different. More specifically, the elastic rings 1093 can be O-rings, which have good elastic properties.

[0049] An elastic ring 1093 is compressed and arranged between the one-way check gasket 1092 and the sealing valve seat 1091. In this way, the elastic force of the elastic ring 1093 acts on the sealing valve seat 1091, so that a certain sealing pressure is always maintained between the sealing valve seat 1091 and the valve core body 1021 during the valve switching process, thereby ensuring the sealing effect.

[0050] In one embodiment, spacer washers 1094 are provided between adjacent elastic rings 1093 and between the elastic rings 1093 and the one-way check washer 1092. In the figure, each sealing portion 109 is provided with two spacer washers 1094: one spacer washer 1094 is provided between adjacent elastic rings 1093, and one spacer washer 1094 is provided between the elastic ring 1093 and the one-way check washer 1092. The spacer washers 1094 provide support for the elastic rings 1093, improving the installation reliability of the elastic rings 1093.

[0051] The above embodiments can be freely combined without conflict.

[0052] In summary, the flow controller provided by the present application has the following technical effects: it can quickly and accurately control the liquid flow rate; it can restore the sealing pressure by moving the one-way check gasket a predetermined distance toward the valve core body, which effectively reduces the use cost compared with the previous method of restoring the sealing pressure by replacing related parts; a certain sealing pressure is always maintained between the sealing valve seat and the valve core body during the valve switching process, thereby ensuring the sealing effect; the overall integration is high; and the processing cost is low.

[0053] Several specific embodiments are described below.

[0054] Embodiment 1: A flow controller comprising:

[0055] The valve assembly 10 includes a valve body 101, a valve core 102, and a motor 103 for driving the valve core 102 to rotate. The valve body 101 has a flow channel A inside. The valve core 102 includes a valve core body 1021 and a connector 1022. The valve core body 1021 is installed in the flow channel A. The connector 1022 extends outside the flow channel A and is connected to the motor 103.

[0056] A flow detection assembly 20, comprising an impeller 201 and a magnetic induction chip 202 for detecting the rotational speed of the impeller 201. The impeller 201 is mounted within the flow channel A and located on a side of the valve core body 1021 close to the inlet of the flow channel A. The magnetic induction chip 202 is mounted outside the flow channel A.

[0057] The control circuit board 30 is in communication with the magnetic induction chip 202 and the motor 103 to control the motor 103 to drive the valve core 102 to rotate according to the detection signal of the magnetic induction chip 202 .

[0058] Example 2: According to the flow controller described in Example 1, the valve body 101 is provided with an installation groove B at a position corresponding to the area where the impeller 201 is located, a thin wall C is formed between the installation groove B and the flow channel A, and the magnetic induction chip 202 is installed in the installation groove B to detect the rotational speed of the impeller 201 across the thin wall C.

[0059] Example 3: According to the flow controller described in Example 1 or Example 2, the flow detection assembly 20 includes a guide tube 203 and a turbine 204, the guide tube 203 is installed in the flow channel A and is located on the side of the valve core body 1021 close to the inlet of the flow channel A, the impeller 201 is installed in the guide tube 203, the turbine 204 is installed on the side of the guide tube 203 close to the inlet of the flow channel A, and a guide hole 2031 is provided on the side of the guide tube 203 away from the inlet of the flow channel A, the turbine 204 and the guide tube 203 are each provided with a connecting hole, and the two ends of the wheel shaft 2012 of the impeller 201 are respectively inserted into the two connecting holes.

[0060] Example 4: According to the flow controller described in Example 1, Example 2 or Example 3, the flow detection component 20 includes a rectifier block 205, which is installed in the flow channel A and is located on the side of the turbine 204 close to the inlet of the flow channel A. A rectifier channel is provided inside the rectifier block 205, and the rectifier channel includes a tapered channel 2051, and the inner diameter of the tapered channel 2051 gradually decreases in the direction away from the inlet of the flow channel A.

[0061] Example 5: According to the flow controller described in Example 1 or Example 2 or Example 3 or Example 4, the connecting body 1022 includes a plurality of split bodies 1022a, each of the split bodies 1022a is provided with a groove, the split bodies 1022a are assembled together, the grooves of the split bodies 1022a are matched to form a motor connecting hole, the output shaft 1031 of the motor 103 extends into the motor connecting hole, and the side walls of the grooves of the split bodies 1022a hold the output shaft 1031 of the motor 103 tightly.

[0062] Example 6: According to the flow controller described in Example 1 or Example 2 or Example 3 or Example 4 or Example 5, the valve assembly 10 includes an induction magnet 108, the connecting body 1022 is provided with an induction magnet connecting hole, the induction magnet 108 is assembled in the induction magnet connecting hole, and the control circuit board 30 is provided with a fully open magnetic induction chip and a fully closed magnetic induction chip, the fully open magnetic induction chip and the fully closed magnetic induction chip are arranged at 90 degree intervals on the circumference of the rotation center line of the valve core 102, when the valve core 102 rotates to the fully open position, the induction magnet 108 is opposite to the fully open magnetic induction chip, and when the valve core 102 rotates to the fully closed position, the induction magnet 108 is opposite to the fully closed magnetic induction chip.

[0063] Example 7: According to the flow controller described in Example 1 or Example 2 or Example 3 or Example 4 or Example 5 or Example 6, the valve assembly 10 includes an inlet pipe 104, an outlet pipe 106, an inlet sealing ring 105 and an outlet sealing ring 107, the inlet pipe 104 is connected to the inlet of the flow channel A, the inlet sealing ring 105 is compressed between one end face of the inlet pipe 104 and the inlet end face of the valve body 101, the outlet pipe 106 is connected to the outlet of the flow channel A, and the outlet sealing ring 107 is compressed between one end face of the outlet pipe 106 and the outlet end face of the valve body 101.

[0064] Example 8: According to the flow controller described in Example 1 or Example 2 or Example 3 or Example 4 or Example 5 or Example 6 or Example 7, the flow controller includes a shell 40, the shell 40 is assembled together with the valve body 101, the shell 40 and the valve body 101 together enclose a receiving cavity, the main body 1032 of the motor 103, the magnetic induction chip 202, the control circuit board 30 and the end of the connector 1022 away from the flow channel A are all located in the receiving cavity.

[0065] Example 9: According to the flow controller described in Example 1 or Example 2 or Example 3 or Example 4 or Example 5 or Example 6 or Example 7 or Example 8, the valve assembly 10 includes two sealing parts 109, and the two sealing parts 109 are both installed in the flow channel A. The two sealing parts 109 are respectively located on opposite sides of the valve core body 1021, and the two sealing parts 109 include a sealing valve seat 1091 and a one-way check gasket 1092; the one-way check gasket 1092 is located on the side of the sealing valve seat 1091 away from the valve core body 1021, and the one-way check gasket 1092 presses the sealing valve seat 1091 so that the sealing valve seat 1091 presses the valve core body 1021, and the one-way check gasket 1092 can move unidirectionally in the flow channel A to approach the valve core body 1021.

[0066] Example 10: According to the flow controller described in Example 1 or Example 2 or Example 3 or Example 4 or Example 5 or Example 6 or Example 7 or Example 8 or Example 9, the two sealing parts 109 each include one or more elastic rings 1093, and the elastic ring 1093 is compressed between the one-way check gasket 1092 and the sealing valve seat 1091, and a blocking gasket 1094 is arranged between adjacent elastic rings 1093 and between the elastic ring 1093 and the one-way check gasket 1092.

[0067] The principles and implementation methods of the present application have been described above using specific examples. The description of the above embodiments is only intended to help understand the method and core concept of the present application. It should be noted that for those skilled in the art, without departing from the principles of the present application, various improvements and modifications may be made to the present application, and such improvements and modifications also fall within the scope of protection of the claims of the present application.

Claims

1. A flow controller, comprising: A valve assembly (10), the valve assembly (10) comprising a valve body (101), a valve core (102) and a motor (103) for driving the valve core (102) to rotate, the valve body (101) being provided with a flow channel (A) inside, the valve core (102) comprising a valve core body (1021) and a connecting body (1022), the valve core body (1021) being installed in the flow channel (A), and the connecting body (1022) extending outside the flow channel (A) and connected to the motor (103); A flow detection component (20), the flow detection component (20) comprising an impeller (201) and a magnetic induction chip (202) for detecting the rotation speed of the impeller (201), the impeller (201) being installed in the flow channel (A) and located on a side of the valve core body (1021) close to the inlet of the flow channel (A), and the magnetic induction chip (202) being installed outside the flow channel (A); A control circuit board (30) is communicatively connected with the magnetic induction chip (202) and the motor (103) so as to control the motor (103) to drive the valve core (102) to rotate according to a detection signal of the magnetic induction chip (202).

2. The flow controller according to claim 1, characterized in that: The valve body (101) is provided with an installation groove (B) at a position corresponding to the area where the impeller (201) is located, a thin wall (C) is formed between the installation groove (B) and the flow channel (A), and the magnetic induction chip (202) is installed in the installation groove (B) to detect the rotation speed of the impeller (201) through the thin wall (C).

3. The flow controller according to claim 1 or 2, characterized in that: The flow detection assembly (20) comprises a guide tube (203) and a turbine (204); the guide tube (203) is installed in the flow channel (A) and is located on a side of the valve core body (1021) close to the inlet of the flow channel (A); the impeller (201) is installed in the guide tube (203); the turbine (204) is installed on a side of the guide tube (203) close to the inlet of the flow channel (A); a guide hole (2031) is provided on a side of the guide tube (203) away from the inlet of the flow channel (A); the turbine (204) and the guide tube (203) are each provided with a connecting hole; and two ends of the wheel shaft (2012) of the impeller (201) are respectively inserted into the two connecting holes.

4. The flow controller according to claim 3, characterized in that: The flow detection component (20) comprises a rectifying block (205), wherein the rectifying block (205) is installed in the flow channel (A) and is located on a side of the turbine (204) close to an inlet of the flow channel (A), and a rectifying channel is provided inside the rectifying block (205), wherein the rectifying channel comprises a tapered channel (2051), and the inner diameter of the tapered channel (2051) gradually decreases in a direction gradually away from the inlet of the flow channel (A).

5. The flow controller according to any one of claims 1 to 4, characterized in that: The connecting body (1022) includes a plurality of split bodies (1022a), each of the split bodies (1022a) is provided with a groove, and the split bodies (1022a) are assembled together, and the grooves of the split bodies (1022a) are matched to form a motor connecting hole, and the output shaft (1031) of the motor (103) extends into the motor connecting hole, and the side walls of the grooves of the split bodies (1022a) tightly hold the output shaft (1031) of the motor (103).

6. The flow controller according to any one of claims 1 to 5, characterized in that: The valve assembly (10) includes an induction magnet (108), the connector (1022) is provided with an induction magnet connection hole, the induction magnet (108) is assembled in the induction magnet connection hole, the control circuit board (30) is provided with a fully open magnetic induction chip and a fully closed magnetic induction chip, the fully open magnetic induction chip and the fully closed magnetic induction chip are arranged at intervals of 90 degrees on a circle surrounding the rotation center line of the valve core (102), when the valve core (102) rotates to the fully open position, the induction magnet (108) is opposite to the fully open magnetic induction chip, and when the valve core (102) rotates to the fully closed position, the induction magnet (108) is opposite to the fully closed magnetic induction chip.

7. The flow controller according to any one of claims 1 to 6, characterized in that: The valve assembly (10) comprises an inlet pipe (104), an outlet pipe (106), an inlet sealing ring (105) and an outlet sealing ring (107); the inlet pipe (104) is connected to the inlet of the flow channel (A); the inlet sealing ring (105) is compressed between an end face of one end of the inlet pipe (104) and an inlet end face of the valve body (101); the outlet pipe (106) is connected to the outlet of the flow channel (A); the outlet sealing ring (107) is compressed between an end face of one end of the outlet pipe (106) and an outlet end face of the valve body (101).

8. The flow controller according to any one of claims 1 to 7, characterized in that: The flow controller comprises a housing (40), wherein the housing (40) is assembled with the valve body (101), and the housing (40) and the valve body (101) together enclose a receiving cavity, wherein a main body (1032) of the motor (103), the magnetic induction chip (202), the control circuit board (30), and an end of the connector (1022) away from the flow channel (A) are all located in the receiving cavity.

9. The flow controller according to any one of claims 1 to 8, characterized in that: The valve assembly (10) comprises two sealing parts (109), both of which are installed in the flow channel (A), and the two sealing parts (109) are respectively located on opposite sides of the valve core body (1021), and both of which comprise a sealing valve seat (1091) and a one-way check gasket (1092); the one-way check gasket (1092) is located on a side of the sealing valve seat (1091) away from the valve core body (1021), and the one-way check gasket (1092) presses against the sealing valve seat (1091) so that the sealing valve seat (1091) presses against the valve core body (1021), and the one-way check gasket (1092) can move unidirectionally in the flow channel (A) to approach the valve core body (1021).

10. The flow controller according to claim 9, characterized in that: The two sealing parts (109) each include one or more elastic rings (1093), and the elastic rings (1093) are compressed between the one-way check gasket (1092) and the sealing valve seat (1091), and a barrier gasket (1094) is arranged between adjacent elastic rings (1093) and between the elastic ring (1093) and the one-way check gasket (1092).

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